JP6235278B2 - Roll mold manufacturing method and manufacturing apparatus thereof - Google Patents

Description

  The present invention relates to a roll mold manufacturing method and a manufacturing apparatus thereof.

  There is a roll body having a resist film on the outer peripheral surface.

  For example, Patent Document 1 discloses a method for manufacturing a roll mold in which a cylindrical workpiece is immersed in a photoresist solution, and then the workpiece is pulled up from the photoresist solution while being rotated and dried. According to such a manufacturing method, the influence of gravity applied to the photoresist liquid by the centrifugal force is weakened, and a roll mold covered with a resist film having a uniform thickness can be obtained.

  Patent Document 2 discloses a manufacturing method in which a photoconductor is applied to a drum by a coating device, and then the photoconductor is dried while the drum is rotated by an infrared drying device. Specifically, after the photosensitive member is coated, the drum moves from the coating device to the infrared drying device by a rail. According to such a manufacturing method, the influence of gravity applied to the photoconductor by the centrifugal force is weakened, and a photoconductor drum covered with a photoconductor having a uniform thickness can be obtained.

JP 2009-216875 A JP 2007-188003 A

  Incidentally, a roll mold having a thick resist film on the outer peripheral surface is required. In the manufacturing method disclosed in Patent Document 1, if a large amount of resist solution is deposited to form a thick resist film, the resist solution may sag from the outer peripheral surface of the workpiece, and a film having a uniform thickness may not be obtained. It was. Further, when the work is further rotated to reduce the influence of gravity, the resist solution is excessively stirred. In some cases, bubbles were generated in the resist solution, and the resist solution adhered to the outer peripheral surface of the workpiece with bubbles. Further, the resist solution undulates in the liquid tank and adheres directly to the work outer peripheral surface. As a result, a film having a uniform thickness may not be obtained.

  Further, in the manufacturing method disclosed in Patent Document 2, if a large amount of resist solution is deposited, the resist solution may sag from the outer peripheral surface of the workpiece, and a film having a uniform thickness may not be obtained.

  An object of the present invention is to provide a method for manufacturing a roll mold having a thick and uniform resist film on the outer peripheral surface and an apparatus for manufacturing the same.

The method for producing a roll mold according to the present invention includes:
A method for producing a roll mold having a resist film on an outer peripheral surface, and a coating step of rotating a roll body and applying a resist solution to the outer peripheral surface of the roll body;
A drying step of drying the resist solution applied to the outer peripheral surface of the roll body while rotating the roll body following the coating step,
including.

  According to such a configuration, it is possible to manufacture a roll die having a thick and uniform resist film on the outer peripheral surface.

  Moreover, it may be characterized by further including a moving step of moving the roll body from the coating device to the dryer while rotating the roll body continuously from the coating step between the coating step and the drying step. The resist film may have a thickness of 1 μm or more. The resist film may have a thickness of 5 μm or more.

On the other hand, the roll mold manufacturing apparatus according to the present invention is:
A manufacturing apparatus used in the above-described roll mold manufacturing method,
Application means for applying a resist solution to the roll body;
A supporting means for supporting and rotating the roll body;
Drying means for drying the applied resist solution,
The support means of the roll body is a rotary moving carriage,
The rotary moving carriage is
A support mechanism for supporting the roll body at both ends;
A motor for rotating the roll body;
A rotation control unit for controlling rotation of the motor;
A position adjusting mechanism capable of adjusting the height and level of the roll body;
A moving mechanism for moving the roll body while rotating the roll body.

On the other hand, the roll mold manufacturing apparatus according to the present invention is:
A manufacturing apparatus used in the above-described roll mold manufacturing method,
Application means for applying a resist solution to the roll body;
A supporting means for supporting and rotating the roll body;
Drying means for drying the applied resist solution,
In a state where the support means rotates the roll body,
The application means moves in a direction away from the roll body.

  ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of a roll metal mold | die which has a thick and uniform resist film on an outer peripheral surface and its manufacturing apparatus can be provided.

It is a perspective view of the roll metal mold | die obtained by the manufacturing method concerning 1st Embodiment. It is a schematic diagram of the manufacturing apparatus concerning 1st Embodiment. It is the front view and side view of the principal part of the manufacturing apparatus concerning 1st Embodiment. It is a figure which shows the flowchart of the manufacturing method concerning 1st Embodiment. It is a schematic diagram of the manufacturing method concerning 1st Embodiment. It is a schematic diagram of the manufacturing method concerning 1st Embodiment. It is a schematic diagram of the manufacturing method concerning 1st Embodiment. It is a schematic diagram of the manufacturing apparatus concerning 2nd Embodiment. It is a figure which shows the flowchart of the manufacturing method concerning 2nd Embodiment. It is a schematic diagram of the manufacturing method concerning 2nd Embodiment. It is a schematic diagram of the manufacturing method concerning 2nd Embodiment. It is a schematic diagram of the manufacturing method concerning 2nd Embodiment. It is a figure which shows the resist film thickness in the outer peripheral surface of a roll metal mold | die. It is a figure which shows the resist film thickness in the outer peripheral surface of a roll metal mold | die. It is a figure which shows the resist film thickness in the outer peripheral surface of a roll metal mold | die.

(First embodiment)
With reference to FIG. 1, the roll metal mold | die obtained by the manufacturing method concerning 1st Embodiment is demonstrated. FIG. 1 is a perspective view of a roll mold according to the first embodiment.

  As shown in FIG. 1, the roll mold 1 includes a roll body 3 and a resist film 2. The roll body 3 is a cylindrical body having shaft portions 4 at both ends. The shaft portion 4 extends from both ends of the roll body 3 along the axial direction of the roll body 3. The roll body 3 is made of a metal material. Examples of such metal materials include steel and aluminum alloys. The outer peripheral surface of the roll body 3 is covered with the resist film 2.

  Next, the manufacturing apparatus used in order to manufacture the roll metal mold | die 1 is demonstrated using FIG. 2 and 3. FIG. FIG. 2 is a schematic diagram of the manufacturing apparatus according to the first embodiment. FIG. 3: shows the front view and side view of the principal part of the manufacturing apparatus concerning 1st Embodiment. Here, a description will be given using the roll body 3 as a workpiece for manufacturing the roll mold 1.

  As shown in FIG. 2, the manufacturing apparatus 50 includes a spray coater 10, a rotary support carriage 20, and a dryer 30.

  As shown in FIG. 3, the spray coater 10 includes a liquid tank 11, a gas tank 12, a spray nozzle 13, a linear slider 14, and a coating controller 15. The spray coater 10 is a coating device fixed at a predetermined position.

  The liquid tank 11 is a tank that stores a resist solution. As the resist solution, for example, a solution obtained by mixing a resist and an organic solvent can be used. In order to increase the thickness of the resist film 2, a resist solution having a high viscosity is preferable. For example, a resist solution having a viscosity of 40 cP can also be used.

  The gas tank 12 is a tank that stores compressed air. Instead of the gas tank 12, a compressor can be used.

  The spray nozzle 13 is supplied with the resist solution from the liquid tank 11 and is supplied with air from the gas tank 12. The spray nozzle 13 mixes the resist solution and air and discharges them in the form of a mist. A resist solution discharge amount and a discharge range are set in accordance with the air supply amount.

  The linear slider 14 is equipped with the spray nozzle 13 and can be translated along the linear guide. The film thickness of the resist is set by changing the translation speed and distance of the spray nozzle 13.

  The application controller 15 is connected to a power source (not shown) and is supplied with current. The application controller 15 opens and closes the valve 16 of the gas tank 12 and the valve of the spray nozzle 13 to adjust the supply amounts of air and resist solution, respectively. Further, the application controller 15 sets the speed and distance of the parallel movement of the spray nozzle 13 by the linear slider 14.

  As shown in FIG. 3, the rotation support carriage 20 includes a chuck portion 21, a motor 22, a rotation control portion 23, a base portion 24, wheels 25, and an adjuster bolt 26. The rotation support cart 20 can move while rotating the roll body 3 as a workpiece. The rotation support carriage 20 is connected to a power supply (not shown) different from the power supply supplied to the spray coater 10 and is supplied with current. Therefore, even if the spray coater 10 stops operating, the rotary support carriage 20 can move while the roll body 3 is rotated.

  The chuck portion 21 can chuck the shaft portion 4 of the roll body 3 and rotatably support the roll body 3. The motor 22 rotates the roll body 3 via the chuck portion 21.

  The rotation control unit 23 is connected to the motor 22 via a cable 27. The rotation control unit 23 sends a control signal to the motor 22 to control the rotation of the workpiece. The rotation control unit 23 is detachably installed on the main surface of the base unit 24. The rotation control unit 23 can be removed from the base unit 24 and placed at a location away from the base unit 24. The cable 27 has at least the necessary mechanical strength so that the function as a cable can be maintained even if it is sandwiched between the door 33 (described later) of the dryer 30 and its door frame. As the cable 27, for example, an electric wire covered with glass fiber can be used.

  The base portion 24 is a rectangular plate-like body having at least a mechanical strength necessary to mount the roll body 3, the chuck portion 21, the motor 22, the rotation control portion 23, and the cable 27 as a carriage.

  The wheels 25 are rotatably installed at four corners of the base portion 24 via adjuster bolts 26.

  The adjuster bolt 26 can adjust the height and level of the upper surface of the base portion 24. By adjusting the adjuster bolt 26, the height and direction of the roll body 3 are easily adjusted so that the shaft portion 4 is along the horizontal plane.

  Referring back to FIG. 2, the dryer 30 includes a heating chamber 31, a heater 32, and a door 33. The heating chamber 31 is shielded from the outside air and is kept at a predetermined temperature. The heater 32 is installed in the upper part of the heating chamber 31 and blows warm air toward the inside of the heating chamber 31. The door 33 is installed at the side of the heating chamber 31 and is an openable / closable door for easily putting the rotation support cart 20 in and out of the heating chamber 31. The door 33 is an openable / closable door for easily moving the rotation control unit 23 from the inside of the heating chamber 31 to the outside.

  In the first embodiment described above, the heater 32 is used. However, an infrared irradiation unit that irradiates infrared rays or a decompression unit that decompresses the inside of the heating chamber 31 may be used.

(Production method)
Next, the manufacturing method according to the first embodiment will be described with reference to FIGS. FIG. 4 shows a flowchart of the manufacturing method according to the first embodiment. 5-7 shows the schematic diagram of the manufacturing method concerning 1st Embodiment. Here, the case where the roll body 3 is a workpiece and the roll mold 1 is manufactured will be described as an example.

  First, prior to manufacturing, the roll body 3 is supported by the rotation support carriage 20 and the position and orientation of the roll body 3 are adjusted. Specifically, the adjuster bolt 26 is adjusted so that the shaft portion 4 of the roll body 3 is chucked by the chuck portion 21 and the axis of the roll body 3 is along the horizontal plane. Further, the distance between the roll body 3 and the spray nozzle 13 is adjusted so that the resist solution can be applied to the roll body 3. Further, the orientation of the roll body 3 is adjusted so that the axial direction of the roll body 3 is along the linear guide of the linear slider 14.

  As shown in FIG. 5, the spray coater 10 discharges and applies the resist solution to the outer peripheral surface of the roll body 3 while the rotary support carriage 20 rotates the roll body 3 (application step S1). Specifically, the rotation control unit 23 sets the work rotation speed and starts rotation. The application controller 15 opens the valve 16 of the gas tank 12 and the valve of the spray nozzle 13. As a result, the spray nozzle 13 discharges the resist liquid onto the rotating roll body 3 in a mist state to perform application. During this application, the linear slider 14 reciprocates the spray nozzle 13 as necessary. When applied for a predetermined time, the valve 16 of the gas tank 12 and the valve of the spray nozzle 13 are closed, and the linear slider 14 is stopped. Here, the resist solution adheres to the outer peripheral surface of the roll body 3.

  As shown in FIG. 6, the rotation support carriage 20 moves toward the dryer 30 while rotating the roll body 3 (rotation support carriage movement step S <b> 2). Specifically, the rotation support carriage 20 continues to rotate the roll body 3 from the application step S1, and the door 33 is opened. The rotation support carriage 20 rotates the roll body 3 and moves from the spray coater 10 toward the dryer 30 while entering the heating chamber 31 while keeping the axis of the roll body 3 along the horizontal plane.

  As shown in FIG. 7, the dryer 30 dries the resist solution adhering to the roll body 3 while the rotary support carriage 20 continues to rotate the roll body 3 (drying step S <b> 3). Specifically, the rotation support cart 20 continues to rotate the roll body 3, the rotation control unit 23 is placed outside the dryer 30, and the door 33 is closed. Furthermore, the heater 32 sends warm air toward the roll body 3 that has been rotated. The resist solution adhering to the roll body 3 is dried, and the resist film 2 is formed on the outer peripheral surface of the roll body 3. The rotation support carriage 20 is taken out from the dryer 30 and the rotation of the roll body 3 is stopped.

  As described above, the roll mold 1 is obtained through the coating step S1 to the drying step S3. Furthermore, a roll mold 1 having an uneven shape on the outer peripheral surface can be obtained through the following exposure process and development process.

  The resist film 2 is irradiated while scanning with a laser beam to expose the resist film 2 (exposure process). The wavelength of the laser beam to be used is not particularly limited and is selected according to the type of the resist film. The wavelength of the laser beam is, for example, 351 nm, 364 nm, 458 nm, 488 nm (Ar + laser oscillation wavelength), 351 nm, 406 nm, 413 nm (Kr + laser oscillation wavelength), 352 nm, 442 nm (He-Cd laser oscillation wavelength), 355 nm. 473 nm (pulse oscillation wavelength of a semiconductor excitation solid-state laser), 375 nm, 405 nm, 445 nm, 488 nm (semiconductor laser), and the like can be selected.

  Subsequently, the resist film 2 is developed (development process). The development of the resist can be carried out by a known method such as immersing the roll mold 1 in a developer. The developer is not particularly limited, and an alkali developer can be used. An example of the alkali developer is TMAH (tetramethylammonium hydroxide). In the development step, a part of the resist film 2 is removed according to the exposure amount, and an uneven shape is formed on the surface of the resist film 2.

  After these exposure steps and development steps, a roll mold 1 having an uneven shape on the outer peripheral surface is obtained. As the thickness of the resist film 2 increases, the height range of the concavo-convex shape increases.

  As described above, according to the manufacturing method according to the above-described first embodiment, in the coating step S1, the resist solution is applied while the roll body 3 as a work is rotated, so the influence of gravity on the resist solution is weakened. The resist solution can be further adhered to the workpiece. Further, the workpiece can be continuously rotated from the coating step S1 to the drying step S3, and the resist can be dried while the external force applied to the resist solution remains in an equilibrium state, thereby forming a resist film having a uniform thickness. In addition, from the coating step S1 to the drying step S3, the workpiece is rotated while the rotation axis of the workpiece is along the horizontal plane, fluctuation of the drag due to the tilt of the workpiece is suppressed, the external force applied to the resist solution is kept in an equilibrium state, and is uniform. A resist film having a thickness is formed.

  Moreover, according to the manufacturing method concerning 1st Embodiment mentioned above, the roll metal mold | die 1 covered with the resist film which has a thickness of 1 micrometer or more or 5 micrometers or more is obtained. According to this, after passing through the exposure process and the development process, it is possible to obtain the roll mold 1 having a concavo-convex shape having a height of 1 μm or more or 5 μm or more on the outer peripheral surface.

  Moreover, according to the manufacturing apparatus concerning 1st Embodiment mentioned above, the roll metal mold | die 1 which has a thick and uniform resist film is obtained. When the adjuster bolt 26 is adjusted, the resist film can be formed on workpieces of various sizes by adjusting the height and horizontal plane of the base portion. Moreover, since the workpiece can be moved while being rotated, various dryers can be used.

(Second Embodiment)
Next, the manufacturing apparatus according to the second embodiment will be described with reference to FIG. FIG. 8 is a schematic diagram of a manufacturing apparatus according to the second embodiment. The manufacturing apparatus according to the second embodiment has the same configuration as the manufacturing apparatus according to the first embodiment and a different configuration. The same components will be described with the same reference numerals.

  As shown in FIG. 8, the manufacturing apparatus 250 includes a spray coater 210, a rotation support base 220, and a dryer 230. Like the manufacturing apparatus 50, the manufacturing apparatus 250 is an apparatus that can form the resist film 2 on the outer peripheral surface of the roll body 3.

  The spray coater 210 includes a liquid tank 11, a gas tank 12, a spray nozzle 13, a linear slider 14, a coating controller 15, a base portion 217, and wheels 218. Unlike the spray coater 10, the spray coater 210 is a coating device that can be easily moved.

  The base portion 217 is a rectangular plate-like body having at least a mechanical strength necessary for mounting the liquid tank 11, the gas tank 12, the spray nozzle 13, the linear slider 14, and the coating controller 15.

  The wheels 218 are rotatably installed at the four corners of the bottom surface of the base portion 217. The spray coater 210 can be easily moved by the rotation of the wheel 218.

  The rotation support base 220 includes a chuck part 21, a motor 22, a rotation control part 23, a base part 24, and support legs 228. The rotation support base 220 can rotate the roll body 3 while being fixed at a predetermined position. The rotation support base 220 is connected to a power supply (not shown) different from the power supply supplied to the spray coater 10 and is supplied with a current. Therefore, even if the spray coater 210 stops operating, the rotation support base 220 can rotate the roll body 3.

  The support legs 228 are columnar bodies that support the four corners of the base portion 24. The support legs 228 are installed inside a heating chamber 231 (described later), for example, below the heater 232.

  The dryer 230 includes a heating chamber 231, a heater 232, and a door 233. The heating chamber 231 is shielded from the outside air and is kept at a predetermined temperature.

  The heating chamber 231 has a volume that can include at least the rotation support base 220 and the spray coater 210.

  The heater 232 is installed in the upper part of the heating chamber 231 and blows warm air toward the rotation support base 220.

  The door 233 is installed at the side of the heating chamber 231 and is an openable / closable door for easily taking the rotation control unit 23 into and out of the heating chamber 231.

  In the second embodiment described above, the heater 232 is installed in the heating chamber 231, but an infrared irradiation unit that emits infrared light may be installed in the heating chamber 231.

  In the first and second embodiments described above, the spray coaters 10 and 210 are used, but a roll coater, a die coater, or a bar coater may be used.

(Production method)
Next, the manufacturing method concerning Embodiment 2 is demonstrated along FIGS. 10-12 using FIGS. FIG. 9 is a flowchart of the manufacturing method according to the second embodiment. FIGS. 10-12 shows the schematic diagram of the manufacturing method concerning Embodiment 2. FIGS. Here, similarly to the manufacturing method according to the first embodiment, a case where the roll body 3 is used as a workpiece and the roll mold 1 is manufactured will be described as an example.

  First, prior to manufacturing, the roll body 3 is supported by the rotation support base 220. Specifically, the shaft portion 4 of the roll body 3 is chucked to the chuck portion 21. Further, the distance between the roll body 3 and the spray nozzle 13 is adjusted so that the resist solution can be applied to the roll body 3.

  As shown in FIG. 10, the spray coater 210 discharges and applies the resist solution to the outer peripheral surface of the roll body 3 while the rotation support base 220 rotates the roll body 3 in the same manner as in the coating process S1 (application process S21). ).

  Next, as shown in FIG. 11, the rotation support base 220 continues to rotate the roll body 3 and the spray coater 210 moves away from the roll body 3 (spray coater moving step S22).

  Finally, as shown in FIG. 12, the dryer 30 dries the resist solution adhering to the roll body 3 while the rotation support base 220 continues to rotate the roll body 3 (drying step S23). When the resist solution adhering to the roll body 3 is dried and the resist film 2 is formed on the outer peripheral surface of the roll body 3, the rotation of the roll body 3 is stopped.

  In the manufacturing method according to the second embodiment described above, the coating step S21, the spray coater moving step S22, and the drying step S23 are performed in this order. However, the drying step S23 may be started simultaneously with the spray coater moving step S22. . In the manufacturing method according to the second embodiment described above, the spray coater moving step S22 is included, but the spray coater moving step S22 may be omitted.

  As described above, the roll mold 1 is obtained through the coating step S21, the spray coater moving step S22, and the drying step S23. Furthermore, similarly to the manufacturing method according to the first embodiment, a roll mold 1 having a concavo-convex shape on the outer peripheral surface can be obtained through an exposure step and a development step.

  As mentioned above, according to the manufacturing apparatus concerning 2nd Embodiment mentioned above, the roll metal mold | die 1 which has a thick and uniform resist film is obtained. In addition, since the coating apparatus moves in a direction away from the workpiece, and then the dryer dries the resist solution, the risk of dust adhesion accompanying the movement of the workpiece can be reduced.

(Evaluation experiment)
Next, using the manufacturing method according to the first and second embodiments described above and the manufacturing method as a comparative example, a roll mold is manufactured under the following manufacturing conditions, and the obtained roll mold resist is obtained. The membrane was evaluated. The manufacturing method as a comparative example differs from the manufacturing method according to the first embodiment only in the number of rotations of the workpiece in each process as shown in Table 1. The production methods according to the first and second embodiments and the roll dies obtained by another production method as comparative examples were designated as Examples 1 and 2 and Comparative Examples 1 and 2, respectively. Hereinafter, some details of the manufacturing method will be described.

  As the roll body 3, a cylindrical body made of an aluminum alloy was used. It processed so that eccentricity might become small with respect to the rotating shaft of the roll body 3. FIG. The surface of the roll body 3 was mirror-finished.

  As the rotation control unit 23, a rotation control device that controls rotation by a stepping motor was used. This rotation control device can set the rotation speed from 0 to 500 rpm in increments of 0.1 rpm. Here, the rotation speed of the roll body 3 was set to 50 rpm.

  In the coating steps S1 and S21, a solution obtained by mixing a commercially available resist and PGMEA (Propylene Glycol Monoethyl Ether Acetate) at a ratio of 1: 1 was used as the resist solution. The liquid tank 11 was pressurized with an air pressure of 0.5 MPa, and the resist solution was ejected from the spray nozzle 13. The ejection amount of the resist solution was 0.2 cc / min. After the resist solution was ejected, the spray nozzle 13 was reciprocated along the axial direction of the roll body 3. The reciprocating speed of the linear slider 14 was 150 mm / sec. The distance between the spray nozzle 13 and the outer peripheral surface of the roll body 3 was 25 mm. The spray time was 20 seconds. After the application of the resist solution was completed, the parallel movement by the linear slider 14 was stopped. Subsequently, the roll was continuously rotated at 50 rpm.

  In the rotary support carriage moving step S2 and the spray coater moving step S22, the dryers 30 and 230 previously heated the heating chambers 31 and 231 to 80 ° C., respectively. After the application steps S1 and S21 were completed, the spray coater 10 or the rotation support base 220 was moved. A sufficiently long cable 27 was used in advance so that power could be continuously supplied to the motor 22 between the spray coater 10 and the dryer 30.

  In the drying steps S3 and S23, drying was performed for 70 minutes. The rotation speed of the roll body 3 was set to 50 rpm, which is the same as the rotation speed in the coating step S1.

(Measuring method)
Next, a method for measuring the resist film thickness will be described.

  In Example 1 and Comparative Examples 1 and 2, after completion of the drying step S3, the rotation of the roll body 3 was stopped, and the roll mold 1 was carried out of the dryer 30 together with the rotation support carriage 20. After 8 hours have passed from the dryer 30, the thickness of the resist film 2 at each position on the outer peripheral surface of the roll mold 1 was measured with the roll mold 1 set on the rotary support carriage 20.

  In Example 2, the rotation of the roll body 3 was stopped after the completion of the drying step S23. After 8 hours from the stop, the thickness of the resist film 2 at each position on the outer peripheral surface of the roll mold 1 was measured in a state where the roll mold 1 was set on the rotation support base 220.

(Measurement result)
Next, the measurement results of the resist film thickness will be described with reference to FIGS. 11 and 12 show the resist film thickness on the outer peripheral surface of the roll mold.

  As shown in FIG. 11, in Example 1, the average value of the resist film thickness was 19.9 μm, and the film thickness unevenness was as good as ± 3.8%. The film thickness unevenness is a dispersion value of measured values at each position on the outer peripheral surface of the roll mold 1.

  In Example 2, the average value of the resist film thickness and the film thickness unevenness showed substantially the same values as in Example 1.

  On the other hand, as shown in FIG. 12, in Comparative Example 1, the rotation of the roll body 3 was stopped after applying the resist solution. However, the average value of the resist film thickness was 18.76 μm, which is larger than that in Example 1. It did not change. On the other hand, the film thickness unevenness was ± 20.7%, which was larger than that of Example 1. This is probably because the resist solution was dripped from the outer peripheral surface of the roll body 3 due to the influence of gravity by stopping the rotation of the roll body 3 after applying the resist solution.

  On the other hand, as shown in FIG. 15, in Comparative Example 2, the average value of the resist film thickness was 18.82 μm, which was not significantly changed compared to Example 1. On the other hand, the film thickness unevenness was ± 12.3%, which was larger than that of Example 1 as in Comparative Example 1. This is considered to be because the resist liquid was dripped from the outer peripheral surface of the roll body 3 due to the influence of gravity due to the movement of the roll body 3 while stopping the rotation after the resist liquid was applied. .

  In addition, it exposed by irradiating the laser beam of wavelength 405nm, rotating the roll metal mold | die 1 concerning Example 1 and 2 (exposure process). Subsequently, the roll mold 1 was dipped in a 2.38% TMAH developer for 3 minutes for development. A fine concavo-convex pattern was produced on the surface of the resist film 2, and a roll mold 1 having the fine concavo-convex pattern on the surface was obtained.

1 roll mold, 2 resist film, 3 roll body, 4 shaft part,
50, 250 production equipment,
10, 210 spray coater,
11 Liquid tank, 12 Gas tank, 13 Spray nozzle,
14 linear slider, 15 application controller, 16 valve,
217 base, 218 wheels,
20 rotation support carriage, 220 rotation support carriage,
21 chuck part, 22 motor, 23 rotation control part,
24 base parts, 25 wheels, 26 adjuster bolts,
27 cables, 228 support legs,
30, 230 dryers, 31, 231 heating chambers, 32, 232 heaters,
33, 233 doors,
S1, S21 application process,
S2 Rotating support carriage moving process, S22 Spray coater moving process,
S3, S23 Drying process

Claims (5)

A method for producing a roll mold having a resist film on the outer peripheral surface ,
An application step of rotating the roll body and applying a resist solution to the outer peripheral surface of the roll body;
A moving step of moving the roll body from the coating device to a dryer while rotating the roll body continuously from the coating step;
A drying step of drying the resist solution applied to the outer peripheral surface of the roll body while rotating the roll body following the coating step,
A method for manufacturing a roll mold including: The method for producing a roll mold according to claim 1 , wherein the resist film has a thickness of 1 µm or more. The method for producing a roll mold according to claim 2 , wherein the resist film has a thickness of 5 µm or more. It is a manufacturing apparatus used with the manufacturing method of the roll metal mold | die described in any one of Claims 1-3 ,
Application means for applying a resist solution to the roll body;
A supporting means for supporting and rotating the roll body;
Drying means for drying the applied resist solution,
The support means of the roll body is a rotary moving carriage,
The rotary moving carriage is
A support mechanism for supporting the roll body at both ends;
A motor for rotating the roll body;
A rotation control unit for controlling rotation of the motor;
A position adjusting mechanism capable of adjusting the height and level of the roll body;
And a moving mechanism for moving the roll body while rotating the roll body. It is a manufacturing apparatus used with the manufacturing method of the roll metal mold | die described in any one of Claims 1-3 ,
Application means for applying a resist solution to the roll body;
A supporting means for supporting and rotating the roll body;
Drying means for drying the applied resist solution,
In a state where the support means rotates the roll body,
The said application | coating means moves to the direction away from the said roll body, The manufacturing apparatus characterized by the above-mentioned.

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