JP6239969B2 - Drainage structure and substrate processing equipment - Google Patents

Description

  The present invention relates to a drainage structure used for a polisher pan of a substrate processing apparatus.

  A substrate processing apparatus such as a chemical mechanical polishing apparatus has a polisher pan that receives a cleaning liquid obtained by cleaning polishing residue and polishing liquid (Patent Document 1). A strainer for preventing foreign matter from being discharged to the outside is attached to the drain of the polisher pan.

JP 2008-66755 A

  Conventionally, since the strainer has been attached relatively loosely to the drain port, there are cases where the strainer comes off due to vibration or the like when moving the apparatus. The drain port of the polisher pan of the substrate processing apparatus is in a narrow place where various parts are intricate, and is in a place where it is difficult to perform strainer installation work. Accordingly, it is required that the strainer once attached cannot be easily detached by vibration or the like.

  In addition, when the strainer is clogged with foreign matter, it is necessary to remove the strainer. In that case, it is desirable that the strainer be easily removed.

  In view of the above background, an object of the present invention is to provide a strainer mounting structure and a substrate processing apparatus that can be easily detached and are not easily detached by vibration or the like.

  The drainage structure of the present invention includes a plurality of convex portions protruding from an edge of a drain port of a polisher pan of a substrate processing apparatus, and a strainer that prevents foreign matter from being discharged from the polisher pan, the strainer And a frame for internally fitting the plurality of convex portions. The number of the convex portions may be three.

  As described above, the frame of the strainer is fitted into the plurality of convex portions provided at the drain port, so that the strainer can be prevented from coming off due to vibration when the substrate processing apparatus is moved. In addition, since the structure can be attached by pushing the strainer, the strainer can be easily attached and removed.

  In the drainage structure of the present invention, the inner periphery of the strainer frame is not circular, and the upper portion of the strainer may have a step for avoiding interference with components of the substrate processing apparatus.

  As described above, the place where the strainer is attached is a narrow place where various parts are intricate, but by providing a step on the upper part of the strainer, interference with other parts can be avoided. Moreover, the upper part makes the inner periphery of the frame of the strainer a shape other than a circle, so that the direction of the strainer attachment can be defined, and it is easy to attach in a direction that avoids interference with the parts due to the step.

  In the drainage structure of the present invention, the tip of the convex portion may be rounded. With this configuration, the strainer can be easily fitted.

  In the drainage structure of the present invention, a cylindrical drainage member may be provided at a lower part of the polisher pan, and an upper part of the drainage member may be connected to a bottom surface of the polisher pan to form a drainage port. By providing the drainage member in this manner, drainage from the polisher pan can be guided to a predetermined place.

  The substrate processing apparatus of this invention has the structure provided with the said drainage structure. With this configuration, it is possible to prevent the strainer from coming off due to vibration during movement of the substrate processing apparatus.

  The present invention can prevent the strainer from being detached due to vibration when the substrate processing apparatus is moved, and also has an effect that the strainer can be easily attached and detached.

It is sectional drawing which shows the structure of a polisher pan. It is a figure which shows the structure of the discharge member of a polisher pan. It is a perspective view which shows the external appearance of a strainer. It is a figure which shows the structure of a strainer. (A) It is the figure which looked at the strainer from the bottom. (B) It is a figure which shows the position where a convex part engages with a strainer.

Hereinafter, a drainage structure according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view showing a configuration of a polisher pan 20 of a substrate processing apparatus having a drainage structure according to the present embodiment. FIG. 1 shows a state in which the strainer is not attached. The polisher pan 20 receives a cleaning liquid obtained by cleaning the polishing residue and the polishing liquid. The polisher pan 20 houses a pipe port 23 and the like that overflow when the water level rises due to strainer clogging or the like. A drainage member 10 is connected to the lower portion of the polisher pan 20. The upper opening of the drainage member 10 forms a drainage port A.

  FIG. 2 is a diagram illustrating the configuration of the drainage member 10. The drainage member 10 has a cylindrical structure 11 and has three convex portions 12 projecting upward (inside the polisher pan 20) along the edge of the drainage port A. The three convex portions 12 are fitted into a strainer 13 described later. A corner 12a is rounded at the tip of the convex portion 12, and the strainer 13 is easily fitted.

  FIG. 3 is a perspective view showing the appearance of the strainer 13 covering the drain port A. FIG. The strainer 13 has such a shape that the container is turned down. That is, it has a frame 14 that surrounds the edge of the drain outlet A, and a plate-like portion 16 that covers the frame 14. In this embodiment, the strainer 13 is made of resin, and the frame 14 and the plate-like portion 16 are integrally formed.

  FIG. 4 is a view of the strainer 13 as viewed from the top and side surfaces. As shown in FIG. 4, a plurality of holes 15 are formed in the frame 14 of the strainer 13. A plurality of holes 17 are also formed in the plate-like portion 16 of the strainer 13. Through these holes 15 and 17, the liquid in the polisher pan 20 flows to the drainage member 10. Further, a notch is formed in a part of the plate-like portion 16 and a step 18 is formed. The step 18 is provided to avoid interference with the piping port 23 provided in the polisher pan 20.

  Fig.5 (a) is the figure which looked at the strainer 13 from the lower surface. As shown in FIG. 5A, the frame 14 of the strainer 13 has a shape in which a part of the circumference and a string are combined. That is, the frame 14 of the strainer 13 is not a complete circle.

  FIG. 5B shows the positions of the three convex portions 12 fitted into the strainer 13. The frame 14 of the strainer 13 simultaneously abuts on the three convex portions 12 and fits the three convex portions 12 therein. As shown in FIG. 5B, since two of the three convex portions 12 are located at the boundary between the circumference of the frame 14 of the strainer 13 and the chord, the strainer 13 is fixed in a manner that does not rotate. Thereby, the strainer 13 is fixed in a direction in which the above-described step 18 portion avoids interference with the piping port 23. Therefore, when the operator installs the strainer 13, even if he / she does not pay special attention to the mounting angle of the strainer 13, he / she only looks for the direction in which the strainer 13 is fitted, and the interference between the strainer 13 and the piping port 23. Can be avoided.

  The inner periphery of the frame 14 of the strainer 13 is slightly smaller than the outer periphery of a virtual circle formed by the three convex portions 12. When the strainer 13 is pressed against the three convex portions 12 when the strainer 13 is attached, the frame 14 of the strainer 13 is slightly opened, so that the three convex portions 12 are pushed into the strainer 13. In this state, since the frame 14 of the strainer 13 tries to return to the original size by the elastic force, the strainer 13 is fixed to the drainage member 10 by the frictional force between the frame 14 of the strainer 13 and the three convex portions 12. Will be.

  The drainage structure of the present embodiment has been described above. In the drainage structure of the present embodiment, since the strainer 13 is fixed to the drainage member 10 by pushing the three convex portions 12 into the frame 14 of the strainer 13, when the substrate processing apparatus is moved, etc. The strainer 13 does not come off.

  In the drainage structure of the present embodiment, the strainer 13 can be attached by pushing the three convex portions 12 into the frame 14 of the strainer 13, and when removing, the strainer 13 may be pulled. Is easy to remove. In the present embodiment, since the strainer 13 has holes 15 and 17 in the frame 14 and the plate-like portion 16, the strainer 13 can be easily made by hooking a rod or the like to the holes 15 and 17. Can be removed.

  The drainage structure of the present embodiment is a simple structure in which the convex portion 12 is brought into contact with the frame 14 of the strainer 13 without opening a screw hole for attaching the strainer 13. The strainer 13 is opened to the drainage member 10. It can be fixed to the part.

  Since the drainage structure of the present embodiment is a structure in which the strainer 13 is attached by the three convex portions 12, the frictional force necessary for fixing the strainer 13 can be obtained while being able to be detached with a relatively small force.

  The drainage structure and the substrate processing apparatus according to the embodiment of the present invention have been described in detail with reference to the embodiment. However, the present invention is not limited to the above-described embodiment.

  In the present embodiment, the drainage member 10 having three convex portions 12 is taken as an example, but the number of the convex portions 12 is not limited to three, and may be two, four, or more.

  In the present embodiment, an example in which the plate-like portion 16 having the step 18 is provided on the upper portion of the strainer 13 has been described. However, the step 18 is not necessarily required when the strainer 13 has a sufficient mounting space. . Moreover, when there is no level | step difference, since the strainer 13 may be attached in any direction, the shape of the frame 14 may be circular.

  INDUSTRIAL APPLICABILITY The present invention can prevent the strainer from coming off due to vibrations and has an effect that the strainer can be easily attached and detached, and is useful as a strainer or the like provided at the drain port of the polisher pan of the substrate processing apparatus.

DESCRIPTION OF SYMBOLS 10 Drainage member 11 Cylindrical structure 12 Convex part 13 Strainer 14 Frame 15 Hole 16 Plate-like part 17 Hole 18 Step 20 Polisher pan 21 Hole 22 Hole 23 Piping port

Claims (6)

A plurality of convex portions protruding from the edge of the drain port of the polisher pan of the substrate processing apparatus;
A strainer for preventing foreign matter from being discharged from the polisher pan;
With
The strainer is to have a frame-fitting inner said plurality of protrusions,
The frame of the strainer has a shape that combines a part of the circumference and a string,
The upper part of the strainer has a step for avoiding interference with parts of the substrate processing apparatus,
Two of the plurality of convex portions are located at a boundary between a circumference of the strainer frame and a chord, and one of the plurality of convex portions is located at a circumference of the strainer frame, A drainage structure in which the strainer is fixed in a direction in which the stepped portion avoids interference with components of the substrate processing apparatus . The drainage structure according to claim 1, wherein the drainage port is provided at a lower portion of a piping port that overflows when the water level of the polisher pan rises .   The drainage structure according to claim 1 or 2, wherein a tip of the convex portion is rounded.   The drainage structure according to any one of claims 1 to 3, wherein the number of the convex portions is three.   The drainage structure according to any one of claims 1 to 4, wherein a cylindrical drainage member is provided at a lower part of the polisher pan, and an upper part of the drainage member is connected to a bottom surface of the polisher pan to form a drainage port. A substrate processing apparatus comprising the drainage structure according to claim 1.

Images