JP6288632B2 - Method for joining metal members - Google Patents
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- JP6288632B2 JP6288632B2 JP2013161047A JP2013161047A JP6288632B2 JP 6288632 B2 JP6288632 B2 JP 6288632B2 JP 2013161047 A JP2013161047 A JP 2013161047A JP 2013161047 A JP2013161047 A JP 2013161047A JP 6288632 B2 JP6288632 B2 JP 6288632B2
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Description
本発明は、複数の金属部材を接合する、金属部材の接合方法に係わる。 The present invention relates to a metal member joining method for joining a plurality of metal members.
従来、例えば、アルミニウム同士、或いは、アルミニウムと鋼材は、580〜620℃に加熱されて、ろう付により接合されていた。
ろう付による接合では、ろう材を溶融させて接合するため(580〜620℃)、位置決め精度に問題があり、適用範囲にも制限がある。また、ろう付には、フッ化物を含有するフラックスが用いられており、フラックス残渣による腐食の問題や、フラックスが人体に有害であるため、撤廃が望まれている。さらに、ろう材とアルミニウム母材との間で金属間化合物(脆性的な性質)が形成され、接合部が脆化する問題点もあった。
Conventionally, for example, aluminum, or aluminum and steel were heated to 580 to 620 ° C. and joined by brazing.
In joining by brazing, since the brazing material is melted and joined (580 to 620 ° C.), there is a problem in positioning accuracy, and the application range is also limited. In addition, flux containing fluoride is used for brazing, and the problem of corrosion due to flux residue and flux is harmful to the human body, and therefore, elimination is desired. Furthermore, an intermetallic compound (brittle property) is formed between the brazing material and the aluminum base material, and there is a problem that the joint portion becomes brittle.
また、金属部材の他の接合方法として、レーザ溶接、摩擦撹拌溶接、スポット溶接も行われている。
これらの溶接による接合では、溶接熱により溶接部の近傍が軟化し、ミクロ割れが発生する。また、接合部のクリアランスにより、腐食が問題となっている。
さらに、接合する部材がアルミニウムの場合は、熱伝導率が高いため、大きな電力(入熱量)を必要とする。
As other joining methods for metal members, laser welding, friction stir welding, and spot welding are also performed.
In joining by these welding, the vicinity of a welding part softens with welding heat, and a microcrack generate | occur | produces. Also, corrosion is a problem due to the clearance of the joint.
Furthermore, when the member to join is aluminum, since heat conductivity is high, big electric power (heat input) is required.
また、金属部材の他の接合方法として、固相接合法が知られている。
固相接合法は、母材を溶融することなく、固相状態で顕著な変形を加えずに、加熱及び加圧して接合する方法である。熱による部材へのダメージを減少させ、溶融させないことによるぬれ広がりの抑制や、精密組立接合が可能である、といった特徴を有している。
As another method for joining metal members, a solid phase joining method is known.
The solid phase bonding method is a method of bonding by heating and pressurizing without melting a base material and without causing significant deformation in a solid phase state. It has the characteristics that the damage to the member due to heat is reduced, the spread of wetting due to not being melted, and the precision assembly and joining are possible.
金属材料(特にアルミニウム)は、大気中に曝すと、接合阻害因子である強固な自然酸化皮膜を形成する。強度の高い接合部を得るには、接合圧力及び接合温度を高くして、酸化皮膜を機械的に破壊しなくてはならず、おのずと接合時の変形量が増加してしまう問題点がある。 When a metal material (especially aluminum) is exposed to the atmosphere, it forms a strong natural oxide film that is a bonding inhibiting factor. In order to obtain a joint having high strength, it is necessary to increase the joining pressure and joining temperature to mechanically destroy the oxide film, and there is a problem that the amount of deformation during joining naturally increases.
そこで、例えば、銅の接合面を有機酸から成る酸化膜除去液で処理してから、固相接合を行うことが提案されている(例えば、特許文献1参照。)。 Therefore, for example, it has been proposed to perform solid-phase bonding after treating the copper bonding surface with an oxide film removing solution made of an organic acid (see, for example, Patent Document 1).
しかしながら、アルミニウム等においては、表面を有機酸で処理しただけで固相接合を行うと、十分な接合強度が得られなかった。 However, when aluminum or the like is used for solid phase bonding only by treating the surface with an organic acid, sufficient bonding strength cannot be obtained.
上述した問題の解決のために、本発明においては、比較的低温で接合が可能であり、接合時の変形を抑制して、固相状態で金属同士を接合することができる金属部材の接合方法を提供するものである。 In order to solve the above-described problems, in the present invention, a joining method for metal members that can be joined at a relatively low temperature, can suppress deformation during joining, and can join metals in a solid state. Is to provide.
本発明の金属部材の接合方法は、複数の金属部材を接合する方法であって、第1の金属部材と第2の金属部材を突き合わせて、加熱及び加圧すると共に、第1の金属部材と第2の金属部材との間に電流を流して、第1の金属部材と第2の金属部材を接合する工程を有し、加熱及び加圧すると共に、第1の金属部材と第2の金属部材との間に電流を流して、第1の金属部材と第2の金属部材を接合する前記工程において、ヒーターにより温度を制御する。 The method for joining metal members of the present invention is a method for joining a plurality of metal members, but the first metal member and the second metal member are abutted, heated and pressurized, and the first metal member and the first metal member are joined together. A step of joining the first metal member and the second metal member by passing an electric current between the first metal member and the second metal member , and heating and pressurizing the first metal member and the second metal member; In the step of joining the first metal member and the second metal member with current flowing between them, the temperature is controlled by a heater.
第1の本発明の金属部材の接合方法は、さらに、第1の金属部材がアルミニウムであり、第2の金属部材が銅であり、電流を第2の金属部材から第1の金属部材への向きに流す構成とする。
第2の本発明の金属部材の接合方法は、さらに、第1の金属部材がアルミニウムであり、第2の金属部材がステンレス鋼であり、電流を第1の金属部材から第2の金属部材への向きに流す構成とする。
In the method for joining metal members according to the first aspect of the present invention , the first metal member is aluminum, the second metal member is copper, and current is supplied from the second metal member to the first metal member. It is configured to flow in the direction .
In the method for joining metal members according to the second aspect of the present invention , the first metal member is aluminum, the second metal member is stainless steel, and the current is transferred from the first metal member to the second metal member. It is set to flow in the direction .
上述の第1及び第2の本発明の金属部材の接合方法によれば、加熱及び加圧すると共に、第1の金属部材と第2の金属部材との間に電流を流すことにより、接合強度を増大させることができる。
そして、高い接合強度が得られるので、従来よりも低い接合温度で、高い接合強度を得ることが可能になる。
According to the joining method of the metal members of the first and second inventions described above, the joining strength can be increased by heating and pressurizing and passing a current between the first metal member and the second metal member. Can be increased.
And since high joining strength is obtained, it becomes possible to obtain high joining strength at a joining temperature lower than before.
上述の本発明によれば、従来よりも低い接合温度で、高い接合強度を得ることができる。
これにより、接合温度を低くして、加熱に必要なエネルギーを低減し、接合時の変形量を低減することが可能になる。
According to the present invention described above, a high bonding strength can be obtained at a bonding temperature lower than that of the prior art.
This makes it possible to lower the bonding temperature, reduce the energy required for heating, and reduce the amount of deformation during bonding.
以下、発明を実施するための形態(以下、「実施の形態」という)について説明する。
なお、説明は以下の順序で行う。
1.本発明の概要
2.実施例
Hereinafter, modes for carrying out the invention (hereinafter referred to as “embodiments”) will be described.
The description will be given in the following order.
1. 1. Outline of the present invention Example
<1.本発明の概要>
まず、本発明の概要について説明する。
本発明の金属部材の接合方法は、同一の材料からなる、或いは、異種の材料からなる、複数の金属部材を接合する方法である。
そして、本発明では、第1の金属部材と第2の金属部材を突き合わせて、加熱及び加圧すると共に、第1の金属部材と第2の金属部材との間に電流を流して、第1の金属部材と第2の金属部材を接合する工程を有する。
<1. Summary of the present invention>
First, an outline of the present invention will be described.
The method for joining metal members of the present invention is a method for joining a plurality of metal members made of the same material or different materials.
In the present invention, the first metal member and the second metal member are brought into contact with each other, heated and pressurized, and a current is passed between the first metal member and the second metal member. A step of joining the metal member and the second metal member;
本発明において、第1の金属部材及び第2の金属部材の材料としては、各種の金属材料からなる金属部材を使用することが可能である。例えば、アルミニウム、アルミニウム合金、銅、ステンレス鋼(SUS)等を、使用することが可能である。 In the present invention, as the materials of the first metal member and the second metal member, metal members made of various metal materials can be used. For example, aluminum, aluminum alloy, copper, stainless steel (SUS), etc. can be used.
接合する第1の金属部材及び第2の金属部材は、同じ材料であっても、異種の材料であっても良い。 The first metal member and the second metal member to be joined may be the same material or different materials.
また、第1の金属部材と第2の金属部材を異なる材料とする場合に、それぞれの金属部材の材料の組み合わせによっては、電流を流す向きによって、その向きの電流で得られる最大の接合強度や、その最大の接合強度が得られる電流の量が異なる。
例えば、第1の金属部材をアルミニウム、第2の金属部材を銅とした場合において、銅からアルミニウムへの向きに電流を流した(アルミニウムから銅への向きに電子を流した)ときには、逆向きに電流を流したときと比較して、最大の接合強度が得られる。また、逆向きに電流を流したときと比較して、最大の接合強度が得られる電流量が小さくなる。
例えば、第1の金属部材をアルミニウム、第2の金属部材をステンレス鋼とした場合において、アルミニウムからステンレス鋼への向きに電流を流した(ステンレス鋼からアルミニウムへの向きに電子を流した)ときには、逆向きに電流を流したときと比較して、最大の接合強度が得られる。また、逆向きに電流を流したときと比較して、最大の接合強度が得られる電流量が大きくなる。
Further, when the first metal member and the second metal member are made of different materials, depending on the combination of the materials of the respective metal members, depending on the direction in which the current flows, The amount of current at which the maximum bonding strength is obtained is different.
For example, when the first metal member is aluminum and the second metal member is copper, when a current is passed in the direction from copper to aluminum (electrons are passed in the direction from aluminum to copper), the direction is reversed. The maximum bonding strength can be obtained as compared with the case where an electric current is passed through. In addition, the amount of current at which the maximum bonding strength can be obtained is smaller than when a current is passed in the opposite direction.
For example, when the first metal member is aluminum and the second metal member is stainless steel, when an electric current is passed in the direction from aluminum to stainless steel (electrons are passed in the direction from stainless steel to aluminum), The maximum joint strength can be obtained as compared with the case where the current is passed in the opposite direction. In addition, the amount of current at which the maximum bonding strength can be obtained is greater than when a current is passed in the opposite direction.
本発明では、金属部材を接合する際に、加熱及び加圧を行うと共に、接合する金属部材に電流を流すので、電流によってそれぞれの金属部材の元素の拡散が促進される。
これにより、各金属部材が異種の材料の場合、接合面付近に反応層が生じ、各金属部材が同種の材料の場合、接合面付近の原子が結合する。また、接合過程の初期の段階で、ジュール熱により接合界面近傍のみ塑性変形することで、接合界面の密着化を完了する。
従って、接合強度を増大させることができる。
このようにして高い接合強度を得ることができるため、従来よりも低い温度で高い接合強度を得ることが可能になる。
In the present invention, when joining metal members, heating and pressurization are performed, and a current is passed through the metal members to be joined. Therefore, the diffusion of the elements of each metal member is promoted by the current.
Thereby, when each metal member is a different kind of material, a reaction layer is generated near the joint surface, and when each metal member is the same kind of material, atoms near the joint surface are bonded. Further, in the initial stage of the joining process, only the vicinity of the joining interface is plastically deformed by Joule heat, thereby completing the adhesion of the joining interface.
Accordingly, the bonding strength can be increased.
Thus, since high joint strength can be obtained, it becomes possible to obtain high joint strength at a temperature lower than before.
上述したように、本発明によれば、従来よりも低い温度で、十分に高い接合強度が得られるので、固相状態での接合が低温で可能になる。
そして、温度と同様の観点から、接合の際の圧力を低くしても、十分に高い接合強度を得ることができる。
これにより、低圧力で固相状態での接合が可能になり、接合の際の変形量を低減することができるので、接合の位置精度を向上することができる。そして、接合の位置精度が向上することにより、高い位置精度を保つことができるので、溶接では困難であった複雑な形状の金属部材の接合も可能になる。
また、低温かつ低圧力で接合が可能になるため、接合装置の構成を簡略化することや、加熱に必要なエネルギーを低減して、エネルギー効率を向上することができる。例えば、消費電力や加熱用の燃料、接合に要する時間等を低減することが可能になる。
As described above, according to the present invention, a sufficiently high bonding strength can be obtained at a lower temperature than in the prior art, so that bonding in a solid state can be performed at a low temperature.
From the same viewpoint as the temperature, a sufficiently high bonding strength can be obtained even if the pressure during bonding is lowered.
Thereby, bonding in a solid phase can be performed at a low pressure, and the amount of deformation at the time of bonding can be reduced, so that the positional accuracy of bonding can be improved. And since the positional accuracy of joining improves, it can maintain high positional accuracy, Therefore The joining of the metal member of the complicated shape which was difficult by welding is also attained.
Further, since bonding can be performed at a low temperature and a low pressure, the structure of the bonding apparatus can be simplified, energy required for heating can be reduced, and energy efficiency can be improved. For example, it becomes possible to reduce power consumption, fuel for heating, time required for joining, and the like.
なお、金属部材として、アルミニウムのように酸化物皮膜が形成されやすい材料を使用する場合には、表面に形成された酸化物皮膜を除去するために、例えば、アルカリ処理や有機酸処理を行ってから、接合を行っても良い。 In addition, when using a material that easily forms an oxide film such as aluminum as the metal member, for example, alkali treatment or organic acid treatment is performed in order to remove the oxide film formed on the surface. Therefore, bonding may be performed.
<2.実施例>
次に、実際に、本発明によって金属部材の接合を行い、特性を調べた。
<2. Example>
Next, the metal members were actually joined according to the present invention, and the characteristics were examined.
(実験1)アルミニウム/銅接合
接合する2つの金属部材として、図1に斜視図を示すように、直径が20mmで高さが15mmの円柱状のアルミニウムと、直径が10mmで高さが15mmの円柱状の銅を用意した。アルミニウムの純度は99.9%、銅の純度は99.99%であった。
(Experiment 1) Aluminum / copper joint As two metal members to be joined, as shown in a perspective view in FIG. 1, cylindrical aluminum having a diameter of 20 mm and a height of 15 mm, and a diameter of 10 mm and a height of 15 mm. Columnar copper was prepared. The purity of aluminum was 99.9%, and the purity of copper was 99.99%.
実験に使用した接合装置の概略構成図を、図2に示す。
図2に示す接合装置1は、真空チャンバ11内に、試験片に対して加圧を行う加圧部2が配置され、真空チャンバ11の周囲にヒーター13が設けられて、構成されている。
真空チャンバ11には、真空ポンプ12が接続されている。また、真空チャンバ11内には、窒素ガス供給部14に接続された窒素ガス供給管18が挿入されている。これにより、真空チャンバ11内を真空にした後に窒素ガスを供給して、真空チャンバ11内を窒素雰囲気とすることができる。
加圧部2の内部の空間には、試験片(この場合は、アルミニウム21及び銅22)が設置され、試験片21,22の上下にそれぞれ接してセラミック板4を配置して、下側のセラミック板4を基板3の上に載せている。そして、基板3及びセラミック板4を通じて、図示しない圧力調整部により調整された一定の圧力が、試験片21,22に印加されるように構成されている。
ヒーター13は、電力供給部15に接続されている。また、電力供給部15に接続された制御部16から、加圧部2内の基板3へ熱電対20が接続されている。これにより、熱電対20で基板3の温度を測定して、測定結果をフィードバックしている。そして、制御部16によって電力供給部15からヒーター13に供給する電力を制御し、真空チャンバ11内の温度を制御する。
また、直流電源17から、加圧部2内の試験片(アルミニウム21及び銅22)へ配線19が接続されている。これにより、アルミニウム21及び銅22に電流を流すことができる。なお、図2では、直流電源17の正極を銅22に接続して、負極をアルミニウム21に接続した状態を示しているが、この接合装置1では、図2とは逆に負極を銅22に接続して正極をアルミニウム21に接続することも可能である。
FIG. 2 shows a schematic configuration diagram of the joining apparatus used in the experiment.
The bonding apparatus 1 shown in FIG. 2 is configured by disposing a pressurizing unit 2 that pressurizes a test piece in a vacuum chamber 11 and providing a heater 13 around the vacuum chamber 11.
A vacuum pump 12 is connected to the vacuum chamber 11. A nitrogen gas supply pipe 18 connected to the nitrogen gas supply unit 14 is inserted into the vacuum chamber 11. Thereby, after evacuating the inside of the vacuum chamber 11, nitrogen gas can be supplied and the inside of the vacuum chamber 11 can be made into nitrogen atmosphere.
A test piece (in this case, aluminum 21 and copper 22) is installed in the space inside the pressurizing unit 2, and the ceramic plate 4 is disposed in contact with the upper and lower sides of the test pieces 21 and 22, respectively. A ceramic plate 4 is placed on the substrate 3. A constant pressure adjusted by a pressure adjusting unit (not shown) is applied to the test pieces 21 and 22 through the substrate 3 and the ceramic plate 4.
The heater 13 is connected to the power supply unit 15. Further, a thermocouple 20 is connected to the substrate 3 in the pressurizing unit 2 from the control unit 16 connected to the power supply unit 15. Thereby, the temperature of the board | substrate 3 is measured with the thermocouple 20, and the measurement result is fed back. And the electric power supplied from the electric power supply part 15 to the heater 13 by the control part 16 is controlled, and the temperature in the vacuum chamber 11 is controlled.
A wiring 19 is connected from the DC power source 17 to the test piece (aluminum 21 and copper 22) in the pressurizing unit 2. As a result, current can flow through the aluminum 21 and the copper 22. 2 shows a state in which the positive electrode of the DC power source 17 is connected to the copper 22 and the negative electrode is connected to the aluminum 21. In this joining apparatus 1, the negative electrode is connected to the copper 22 contrary to FIG. It is also possible to connect and connect the positive electrode to the aluminum 21.
図2に示したように、直流電源17の正極を銅22に接続し、負極をアルミニウム21に接続した場合には、電流は銅22からアルミニウム21に流れ、電子流はアルミニウム21から銅22に流れる。
図2とは逆に、直流電源17の正極をアルミニウム21に接続し、負極を銅22に接続した場合には、電流はアルミニウム21から銅22に流れ、電子流は銅22からアルミニウム21に流れる。
As shown in FIG. 2, when the positive electrode of the DC power source 17 is connected to the copper 22 and the negative electrode is connected to the aluminum 21, the current flows from the copper 22 to the aluminum 21, and the electron current flows from the aluminum 21 to the copper 22. Flowing.
In contrast to FIG. 2, when the positive electrode of the DC power supply 17 is connected to the aluminum 21 and the negative electrode is connected to the copper 22, the current flows from the aluminum 21 to the copper 22, and the electron flow flows from the copper 22 to the aluminum 21. .
図2に示した接合装置1において、接合圧力を12MPa、接合温度を460℃、接合時間を15分にそれぞれ設定して、加熱及び加圧することにより、アルミニウム21と銅22を接合して継手を作製した。
さらに、接合圧力を12MPa、接合時間を15分に設定して、電流値、電流の向き、接合温度を変えて、それぞれ金属部材の接合を行って、継手を作製した。
また、比較対照のために、電気アシストを行わず(電流0)に接合させた、継手も作製した。
さらに、変形例として、アルミニウムの接合界面の酸化物皮膜を金属塩に置換した後に、電気アシストを行って接合させた、継手も作製した。
In the joining apparatus 1 shown in FIG. 2, the joining pressure is set to 12 MPa, the joining temperature is set to 460 ° C., the joining time is set to 15 minutes, and the aluminum 21 and the copper 22 are joined by heating and pressurizing, thereby connecting the joint. Produced.
Furthermore, the joining pressure was set to 12 MPa, the joining time was set to 15 minutes, the current value, the direction of current, and the joining temperature were changed, and the metal members were joined to produce a joint.
In addition, for comparison, a joint that was joined without electric assistance (current 0) was also produced.
Furthermore, as a modified example, a joint was produced in which the oxide film at the aluminum bonding interface was replaced with a metal salt, and then joined by electric assistance.
(引張試験)
アルミニウムと銅の接合により得られた継手を、試験片として使用して、引張試験を行った。
図3に示すように、径が太いアルミニウム側の端面に引張試験用の治具を引っ掛けて、銅の外側を治具で挟んで、図中矢印で示す方向に応力をかけて、引張試験を行った。
引張試験機は、INSTRON社製5567を使用した。
接合圧力は12MPaで一定として、電流値、電流の向き、接合温度を変えて接合した、それぞれの継手について引張試験を行い、継手の界面強度を得た。
(Tensile test)
A tensile test was performed using a joint obtained by joining aluminum and copper as a test piece.
As shown in FIG. 3, a tensile test jig is hooked on the end surface on the aluminum side with a large diameter, the outside of the copper is sandwiched between the jigs, stress is applied in the direction indicated by the arrow in the figure, and the tensile test is performed. went.
As the tensile tester, 5567 manufactured by INSTRON was used.
The joint pressure was constant at 12 MPa, and the tensile test was performed on each joint, which was joined by changing the current value, the direction of current, and the joining temperature, to obtain the interface strength of the joint.
実験1の引張試験の結果として、接合圧力を12MPa、接合温度を460℃にそれぞれ固定して、電流値及び電流の向きを変化させた場合の界面強度の変化を、図4に示す。なお、図4の凡例の「Cu→Al」及び「Al→Cu」の矢印は電子流の向きを示しており、図2に示した直流電源17の負極をアルミニウムに接続した場合は、「Al→Cu」に該当する。 As a result of the tensile test of Experiment 1, FIG. 4 shows changes in the interface strength when the bonding pressure is fixed at 12 MPa and the bonding temperature is fixed at 460 ° C., and the current value and the direction of the current are changed. The arrows “Cu → Al” and “Al → Cu” in the legend of FIG. 4 indicate the direction of the electron flow. When the negative electrode of the DC power source 17 shown in FIG. → Cu ”.
図4より、高い界面強度を得るには、電流値及び電流の向きを適切に選択する必要があることが分かる。
また、AlとCuを接合しようとした場合は、図4の●印のように、電子流をAlからCuへの向きに、即ち電流をCuからAlへの向きに、10A(約0.8V)流すことによって、最も高い界面強度が得られることが分かる。
そして、CuからAlへの向きに電流を流した場合、逆にAlからCuへの向きに電流を流した場合と比較して、ピークの界面強度が高くなり、また、ピークの界面強度が得られる電流量が小さくなる。
As can be seen from FIG. 4, in order to obtain a high interface strength, it is necessary to appropriately select the current value and the direction of the current.
In addition, when Al and Cu are to be joined, as indicated by the mark ● in FIG. 4, the electron flow is directed from Al to Cu, that is, the current is directed from Cu to Al, and 10 A (about 0.8 V). It can be seen that the highest interface strength can be obtained by flowing.
When the current is passed in the direction from Cu to Al, the peak interface strength is higher than that in the case where the current is passed in the direction from Al to Cu, and the peak interface strength is obtained. The amount of current that is generated is reduced.
上述のように、電流の向きによって、ピークの界面強度が異なる現象が生じた要因は、以下のように考えられる。
電子をCu側からAl側に移動させた場合(図4の□印の場合)には、Cu側の酸素イオンと電子の斥力が働き、酸素イオンがAl側に移動することで、Al側の接合界面にAl2O3が多量に生成し、Al/Cu間の反応が生じにくい状態に変化したことが、界面強度が低くなった要因と考えられる。
電子をAl側からCu側に移動させた場合(図4の●印の場合)には、接合初期の段階でAl側に生成しているAl2O3の酸素イオンが電子との斥力によって引き離されCu側に移動し、接合温度が250℃以上であるため、酸化銅のCOとの還元作用によりAlとCuが反応しやすくなったことが、界面強度が高くなった要因と考えられる。
As described above, the cause of the phenomenon in which the peak interface strength differs depending on the direction of the current is considered as follows.
When electrons are moved from the Cu side to the Al side (in the case of □ in FIG. 4), the repulsive force between the oxygen ions on the Cu side and the electrons works, and the oxygen ions move to the Al side. A large amount of Al 2 O 3 is generated at the bonding interface, and the change to a state in which the reaction between Al / Cu hardly occurs is considered to be a cause of the low interface strength.
When electrons are moved from the Al side to the Cu side (in the case of the mark ● in FIG. 4), oxygen ions of Al 2 O 3 generated on the Al side in the initial stage of bonding are separated by repulsive force with the electrons. Since it moves to the Cu side and the bonding temperature is 250 ° C. or higher, the fact that Al and Cu easily react with each other due to the reducing action of copper oxide with CO is considered to be a cause of the increased interface strength.
また、電子をAl側からCu側に移動させた場合(図4の●印の場合)で、電流量を大きくしていったときに、ピークの界面強度が得られる電流量(10A)までは界面強度が増大し、さらに電流量を大きくすると界面強度が低下する現象が生じた要因は、以下のように考えられる。
電流によりアルミニウム酸化物が還元され、酸素イオンとしてCu接合面に移動した結果、Al及びCuの反応が顕著に生じやすくなったため、界面強度が増大したと考えられる。また、電流量がさらに大きくなると、電子がCu側に激しく移動することによって、CuのAl側への拡散を抑制したためではないかと考えられる。
In addition, when electrons are moved from the Al side to the Cu side (in the case of the ● mark in FIG. 4), when the current amount is increased, the current amount (10 A) at which the peak interface strength can be obtained. The cause of the phenomenon that the interface strength decreases when the interface strength increases and the current amount is further increased is considered as follows.
As a result of the reduction of the aluminum oxide by the electric current and the movement of oxygen ions to the Cu bonding surface, the reaction between Al and Cu is more likely to occur, which is considered to increase the interface strength. Further, it is considered that when the amount of current is further increased, electrons are vigorously moved to the Cu side, thereby suppressing the diffusion of Cu to the Al side.
次に、図4で最も高い界面強度が得られた、電流の向き及び電流量の条件に固定して、接合温度を変化させて場合の結果を、図5に示す。図5は、接合温度と界面強度及び接合変形量(Alの加圧方向の“接合前高さ−接合後の高さ”)の関係を示している。接合変形量は、電気アシストの有無に関わらずほとんど変化は認められなかった。なお、図5には、比較対照である、電気アシストを行わないで接合させた継手の測定結果、並びに変形例である、酸化物皮膜を金属塩に置換した後に電気アシストを行って接合させた継手の測定結果も、併記している。 Next, FIG. 5 shows the results when the junction temperature was changed while fixing the current direction and current amount conditions, in which the highest interface strength was obtained in FIG. FIG. 5 shows the relationship between the bonding temperature, the interface strength, and the amount of deformation of joint (“height before bonding−height after bonding” in the pressure direction of Al). There was almost no change in the amount of joint deformation regardless of the presence or absence of electric assist. In addition, in FIG. 5, the measurement result of the joint joined without performing electrical assist, which is a comparative control, and the modified example, the oxide film was replaced with a metal salt, and then joined with electrical assist. The joint measurement results are also shown.
図5より、電気アシストの有無に関わらず、接合温度の上昇とともに界面強度が増加する傾向が認められた。
しかしながら、電気アシストを行うことで、より低温・低変形量から界面強度が増加し、電気アシストを行わない場合に対して、約3倍の界面強度を有する接続部が得られることがわかる。さらに、接合界面の酸化物皮膜を金属塩に置換した後に電気アシストを行うことで、より界面強度が増加することが分かった。
From FIG. 5, it was recognized that the interface strength tended to increase as the bonding temperature increased regardless of the presence or absence of electrical assist.
However, it can be seen that by performing electrical assist, the interface strength increases from a lower temperature and a low deformation amount, and it is possible to obtain a connection portion having an interface strength approximately three times that in the case where electrical assist is not performed. Furthermore, it was found that the interface strength is further increased by performing electric assist after replacing the oxide film at the bonding interface with a metal salt.
引張試験後の試料の破面を、SEM(走査型電子顕微鏡)で観察した。また、アルミニウム側の破面の銅の分析も行った。
観察により得られた接合界面のSEM写真、及び、分析により得られたアルミニウム側の接合界面の銅の分布を、図6に示す。図6は、上段に電気アシストを行わなかった場合を示し、下段に電気アシストを行った場合を示し、それぞれ接合温度が500℃と520℃の場合の試料の結果を示している。
The fracture surface of the sample after the tensile test was observed with an SEM (scanning electron microscope). The analysis of copper on the fracture surface on the aluminum side was also conducted.
The SEM photograph of the bonding interface obtained by observation and the copper distribution at the bonding interface on the aluminum side obtained by analysis are shown in FIG. FIG. 6 shows the case where the electric assist was not performed on the upper stage, the case where the electric assist was performed on the lower stage, and the results of the samples when the bonding temperatures are 500 ° C. and 520 ° C., respectively.
図6より、電気アシストを行った場合は、破面の全面から互いの元素が検出されたが、電気アシストを行わなかった場合は一部に付着物が認められる程度であった。
従って、電気アシストを行った場合に高い界面強度を示したのは、接合面間の互いの原子による反応拡散がより顕著に生じたためであることが示唆される。
From FIG. 6, when electric assist was performed, the mutual elements were detected from the entire fracture surface, but when electric assist was not performed, only a part of the deposit was observed.
Therefore, it is suggested that the high interfacial strength was exhibited when the electric assist was performed because reaction diffusion due to the mutual atoms between the joint surfaces occurred more remarkably.
次に、図6に示した接合条件と同じ接続部の接合界面について、SEMを用いて観察及び元素分析を行った。その結果を図7に示す。図7は、上段に電気アシストを行わなかった場合を示し、下段に電気アシストを行った場合を示す。また、左側に接合温度500℃の場合を示し、右側に接合温度520℃の場合を示した。そして、それら4通りの条件について、SEM写真と対応する位置のAl及びCuの量の線分析結果を示している。 Next, observation and elemental analysis were performed using SEM on the bonding interface of the same connection portion as the bonding conditions shown in FIG. The result is shown in FIG. FIG. 7 shows a case where electric assist is not performed on the upper stage, and a case where electric assist is performed on the lower stage. Further, the case where the bonding temperature is 500 ° C. is shown on the left side, and the case where the bonding temperature is 520 ° C. is shown on the right side. And about these four conditions, the line analysis result of the quantity of Al and Cu of the position corresponding to a SEM photograph is shown.
図7より、電気アシストを行った場合は、界面に顕著な反応層が認められたが、電気アシストを行わなかった場合は、一部にわずかな反応領域が見られる程度であった。
従って、電気アシストを行った場合に高い界面強度を示したのは、電気アシストにより接合面間の互いの原子による反応拡散が促進されたためであることが示唆される。
From FIG. 7, when the electric assist was performed, a remarkable reaction layer was observed at the interface, but when the electric assist was not performed, only a slight reaction region was observed.
Therefore, it was suggested that the high interfacial strength was exhibited when the electric assist was performed because the reaction and diffusion by the mutual atoms between the bonding surfaces was promoted by the electric assist.
(実験2)アルミニウム/ステンレス綱(SUS304)接合
接合する2つの金属部材として、図8に斜視図を示すように、直径が20mmで高さが15mmの円柱状のアルミニウムと、直径が10mmで高さが15mmの円柱状のSUS304ステンレス綱を用意した。アルミニウムの純度は99.9%であった。
使用したSUS304ステンレス綱の化学組成を表1に示す。
(Experiment 2) Aluminum / stainless steel (SUS304) joining As two metal members to be joined, as shown in a perspective view in FIG. 8, columnar aluminum having a diameter of 20 mm and a height of 15 mm, and a diameter of 10 mm and a high height. A cylindrical SUS304 stainless steel rope having a length of 15 mm was prepared. The purity of aluminum was 99.9%.
Table 1 shows the chemical composition of the SUS304 stainless steel used.
図2に示した接合装置1において、接合圧力を6MPa、接合温度を460℃、接合時間を15分にそれぞれ設定して、電流値と電流の向きを変え、それぞれアルミニウム及びステンレス鋼の接合を行って、継手を作製した。
また、比較対照のために、電気アシストを行わず(電流0)に接合させた、継手も作製した。
In the joining apparatus 1 shown in FIG. 2, the joining pressure is set to 6 MPa, the joining temperature is set to 460 ° C., the joining time is set to 15 minutes, the current value and the direction of the current are changed, and aluminum and stainless steel are joined respectively. Thus, a joint was produced.
In addition, for comparison, a joint that was joined without electric assistance (current 0) was also produced.
(引張試験)
アルミニウムとステンレス鋼の接合により得られた継手を、試験片として使用して、引張試験を行った。
図9に示すように、径が太いアルミニウム側の端面に引張試験用の治具を引っ掛けて、ステンレス鋼の外側を治具で挟み、図中矢印で示す方向に応力をかけて、引張試験を行った。
引張試験機は、INSTRON社製5567を使用した。
接合圧力、接合温度及び接合時間を一定として、電流値、電流の向きを変えて接合した、それぞれの継手について引張試験を行い、継手の界面強度を得た。
(Tensile test)
A tensile test was performed using a joint obtained by joining aluminum and stainless steel as a test piece.
As shown in FIG. 9, a tensile test jig is hooked on the end surface of the thick aluminum side, the outside of the stainless steel is sandwiched between the jigs, stress is applied in the direction indicated by the arrow in the figure, and the tensile test is performed. went.
As the tensile tester, 5567 manufactured by INSTRON was used.
Tensile tests were performed on the respective joints that were joined with the joining pressure, joining temperature, and joining time being constant, and the current value and the direction of the current were changed, and the interface strength of the joint was obtained.
実験2の引張試験の結果として、電流量及び電流の向きを変化させた場合の界面強度の変化を、図10に示す。なお、図10には、比較対照である、電気アシストを行わないで接合させた継手の測定結果も、併記している。また、図10の凡例の「Al→SUS304」及び「SUS304→Al」の矢印は、図4と同様に、電子流の向きを示している。 As a result of the tensile test of Experiment 2, FIG. 10 shows changes in the interface strength when the amount of current and the direction of current are changed. Note that FIG. 10 also shows the measurement results of the joint joined without performing the electric assist, which is a comparative control. In addition, the arrows of “Al → SUS304” and “SUS304 → Al” in the legend of FIG. 10 indicate the direction of electron flow, as in FIG.
図10より、高い界面強度を得るには、電流値及び電流の向きを適切に選択する必要があることが分かる。
また、AlとSUS304を接合しようとした場合は、電子流をSUS304からAlへの向きに、即ち電流をAlからSUS304への向きに、20A(約1.6V)流すことによって、最も高い界面強度が得られることが分かる。なお、このAlからSUS304への向きに電流を流した場合、逆にSUS304からAlへの向きに電流を流した場合と比較して、ピークの界面強度が得られる電流量が大きくなる。
As can be seen from FIG. 10, in order to obtain a high interface strength, it is necessary to appropriately select the current value and the direction of the current.
In addition, when Al and SUS304 are to be joined, the highest interfacial strength is obtained by flowing an electron flow from SUS304 to Al, that is, a current from Al to SUS304 in a direction of 20 A (about 1.6 V). It can be seen that It should be noted that when current flows in the direction from Al to SUS304, the amount of current that provides peak interfacial strength is larger than when current flows in the direction from SUS304 to Al.
実験2より、電気アシストによる接合法は、Alとステンレス鋼との接合にも適用可能であることがわかる。
従って、電気アシストによる接合法は、多様な金属に対応可能であることが示された。
Experiment 2 shows that the joining method by electric assist is applicable also to joining of Al and stainless steel.
Therefore, it was shown that the joining method by electric assist is applicable to various metals.
(実験3)アルミニウム/アルミニウム合金接合
接合する2つの金属部材として、図11に斜視図を示すように、直径が20mmで高さが15mmの円柱状のアルミニウムと、直径が10mmで高さが15mmの円柱状のアルミニウム合金を用意した。アルミニウムの純度は99.9%であった。
使用したアルミニウム合金の化学組成を表2に示す。
(Experiment 3) Aluminum / aluminum alloy joining As shown in the perspective view of FIG. 11, as two metal members to be joined, cylindrical aluminum having a diameter of 20 mm and a height of 15 mm, and a diameter of 10 mm and a height of 15 mm. A cylindrical aluminum alloy was prepared. The purity of aluminum was 99.9%.
Table 2 shows the chemical composition of the aluminum alloy used.
図2に示した接合装置1において、接合圧力を6MPa、接合温度を460℃、接合時間を15分にそれぞれ設定して、電流値と電流の向きを変え、それぞれアルミニウム及びアルミニウム合金の接合を行って、継手を作製した。
また、比較対照のために、電気アシストを行わず(電流0)に接合させた、継手も作製した。
In the joining apparatus 1 shown in FIG. 2, the joining pressure is set to 6 MPa, the joining temperature is set to 460 ° C., the joining time is set to 15 minutes, the current value and the direction of current are changed, and aluminum and aluminum alloy are joined respectively. Thus, a joint was produced.
In addition, for comparison, a joint that was joined without electric assistance (current 0) was also produced.
(引張試験)
アルミニウムとアルミニウム合金の接合により得られた継手を、試験片として使用して、引張試験を行った。
図12に示すように、径が太いアルミニウム側の端面に引張試験用の治具を引っ掛けて、アルミニウム合金の外側を治具で挟んで、図中矢印で示す方向に応力をかけて、引張試験を行った。
引張試験機は、INSTRON社製5567を使用した。
接合圧力及び接合温度を一定として、電流値、電流の向きを変えて接合した、それぞれの継手について引張試験を行い、継手の界面強度を得た。
(Tensile test)
A tensile test was performed using a joint obtained by joining aluminum and an aluminum alloy as a test piece.
As shown in FIG. 12, a tensile test jig is hooked on the end surface on the aluminum side having a large diameter, the outside of the aluminum alloy is sandwiched between the jigs, and a stress is applied in the direction indicated by the arrow in the figure to test the tensile test. Went.
As the tensile tester, 5567 manufactured by INSTRON was used.
Tensile tests were performed on the joints that were joined with the joining pressure and joining temperature being constant and the current value and direction of the current were changed, and the interface strength of the joint was obtained.
実験3の引張試験の結果として、電流値及び電流の向きを変化させた場合の界面強度の変化を、図13に示す。なお、図13には、比較対照である、電気アシストを行わないで接合させた継手の測定結果も、併記している。また、図13の凡例の「Al→Al合金」及び「Al合金→Al」の矢印は、図4と同様に、電子流の向きを示している。 As a result of the tensile test of Experiment 3, the change in the interface strength when the current value and the direction of the current are changed is shown in FIG. Note that FIG. 13 also shows the measurement results of the joint joined without performing the electric assist, which is a comparative control. In addition, the arrows of “Al → Al alloy” and “Al alloy → Al” in the legend of FIG. 13 indicate the direction of electron flow, as in FIG.
図13に示すように、高い界面強度を得るには、電流の向きを適切に選択する必要があることが分かる。
また、AlとAl合金を接合しようとした場合は、AlからAl合金の向き(図13の□印)に電子を流し、かつ電流量を増加させることで、界面強度を高くできることが分かる。
As shown in FIG. 13, it is understood that the direction of the current needs to be appropriately selected in order to obtain a high interface strength.
In addition, when Al and an Al alloy are to be joined, it can be seen that the interface strength can be increased by causing electrons to flow from Al to the direction of the Al alloy (□ in FIG. 13) and increasing the amount of current.
実験3より、電気アシストによる接合法は、AlとAl合金との接合にも適用可能であることがわかる。
従って、電気アシストによる接合法は、多様な金属に対応可能であることが示された。
From Experiment 3, it can be seen that the joining method using electric assist is also applicable to joining of Al and an Al alloy.
Therefore, it was shown that the joining method by electric assist is applicable to various metals.
(実験4)銅/銅接合
接合する2つの金属部材として、図14Aに示すように、直径が1.2mmであり、下端部を曲率半径R=8.5mmで折り曲げた、高さ60mmの銅線(銅ワイヤ)31と、縦横が15mmで厚さが5mmの銅板32を用意した。
この銅線31及び銅板32を、図14Bに示すように、直径5mmの丸棒側面の先端部33を備えた押圧治具34で矢印に示す方向に荷重を加えて、銅線31と銅板32との間に電流を流し、加熱して、銅線31及び銅板32を接合して、試験片を作製した。
そして、図14Bにおいて、押圧治具34による接合荷重を588N、接合温度を300℃、接合時間を15分に設定して、電流値を変えて、それぞれ銅線31及び銅板32を接合して、試験片を作製した。
また、比較対照のために、電気アシストを行わず(電流0)に接合させた、継手も作製した。
(Experiment 4) Copper / copper joint As two metal members to be joined, as shown in FIG. 14A, the diameter is 1.2 mm, and the lower end is bent at a curvature radius R = 8.5 mm, and the height is 60 mm. A wire (copper wire) 31 and a copper plate 32 having a length and width of 15 mm and a thickness of 5 mm were prepared.
As shown in FIG. 14B, a load is applied to the copper wire 31 and the copper plate 32 in the direction indicated by the arrow by a pressing jig 34 having a tip 33 on the side of a round bar having a diameter of 5 mm. A current was passed between and heated, and the copper wire 31 and the copper plate 32 were joined to produce a test piece.
14B, the bonding load by the pressing jig 34 is set to 588 N, the bonding temperature is set to 300 ° C., the bonding time is set to 15 minutes, the current value is changed, and the copper wire 31 and the copper plate 32 are bonded to each other. A test piece was prepared.
In addition, for comparison, a joint that was joined without electric assistance (current 0) was also produced.
(引張試験)
銅線31と銅板32の接合により得られた試験片を使用して、引張試験を行った。
図14Cに示すように、銅板32に引張試験の治具を引っ掛けて、銅線側31を治具で挟み、図中矢印で示すように上方向に引っ張って、引張試験を行った。
接合圧力、接合温度、電流の向きを一定として、電流値を変えて接合した、それぞれの試験片について引張試験を行い、界面強度を得た。
(Tensile test)
A tensile test was performed using a test piece obtained by joining the copper wire 31 and the copper plate 32.
As shown in FIG. 14C, a tensile test jig was hooked on the copper plate 32, the copper wire side 31 was sandwiched between the jigs, and pulled upward as indicated by an arrow in the figure to perform a tensile test.
A tensile test was performed on each of the test pieces that were joined with the joining pressure, the joining temperature, and the direction of the current being constant and the current value was changed, to obtain the interface strength.
実験4の引張試験の結果として、電流値と界面強度の関係を、図15に示す。なお、図15には、比較対照である、電気アシストを行わないで接合させた継手の測定結果も、併記している。 As a result of the tensile test of Experiment 4, the relationship between the current value and the interface strength is shown in FIG. Note that FIG. 15 also shows the measurement results of the joint joined without performing the electric assist, which is a comparative control.
図15より、高い界面強度を得るには、電流値を適切に選択する必要があることが分かる。
また、CuとCuを接合しようとした場合は、電流を10A(約0.8V)流すことで、最も界面強度を高くできることが分かる。
従って、電気アシストによる接合法は、同種金属間であっても対応可能であることが示された。
FIG. 15 shows that it is necessary to appropriately select the current value in order to obtain a high interface strength.
In addition, when joining Cu and Cu, it can be seen that the interface strength can be maximized by applying a current of 10 A (about 0.8 V).
Therefore, it was shown that the joining method by electric assist can be applied even between the same kind of metals.
本発明は、上述の実施例に限定されるものではなく、本発明の要旨を逸脱しない範囲でその他様々な構成が取り得る。 The present invention is not limited to the above-described embodiments, and various other configurations can be taken without departing from the gist of the present invention.
以上の通り、本発明に係る金属部材の接合方法は、低温及び低変形量で金属部材を接合することを可能にするものであり、産業上の利用可能性を有している。 As described above, the method for joining metal members according to the present invention enables joining of metal members at a low temperature and a low deformation amount, and has industrial applicability.
1 接合装置、2 加圧部、3 基板、4 セラミック板、11 真空チャンバ、12 真空ポンプ、13 ヒーター、14 窒素ガス供給部、15 電力供給部、16 制御部、17 直流電源、18 窒素ガス供給管、19 配線、20 熱電対、21 アルミニウム、22 銅、31 銅線(銅ワイヤ)、32 銅板、34 押圧治具 DESCRIPTION OF SYMBOLS 1 Joining device, 2 Pressurization part, 3 Substrate, 4 Ceramic board, 11 Vacuum chamber, 12 Vacuum pump, 13 Heater, 14 Nitrogen gas supply part, 15 Power supply part, 16 Control part, 17 DC power supply, 18 Nitrogen gas supply Tube, 19 Wiring, 20 Thermocouple, 21 Aluminum, 22 Copper, 31 Copper wire (copper wire), 32 Copper plate, 34 Pressing jig
Claims (2)
第1の金属部材と第2の金属部材を突き合わせて、加熱及び加圧すると共に、第1の金属部材と第2の金属部材との間に電流を流して、第1の金属部材と第2の金属部材を接合する工程を有し、
加熱及び加圧すると共に、第1の金属部材と第2の金属部材との間に電流を流して、第1の金属部材と第2の金属部材を接合する前記工程において、ヒーターにより温度を制御し、
前記第1の金属部材がアルミニウムであり、前記第2の金属部材が銅であり、前記電流を前記第2の金属部材から前記第1の金属部材への向きに流す
金属部材の接合方法。 A method of joining a plurality of metal members,
The first metal member and the second metal member are brought into contact with each other, heated and pressurized, and an electric current is passed between the first metal member and the second metal member so that the first metal member and the second metal member are in contact with each other. Having a step of joining metal members,
In the process of heating and pressurizing and joining the first metal member and the second metal member by passing a current between the first metal member and the second metal member, the temperature is controlled by the heater. ,
The metal member joining method, wherein the first metal member is aluminum, the second metal member is copper, and the current flows in a direction from the second metal member to the first metal member.
第1の金属部材と第2の金属部材を突き合わせて、加熱及び加圧すると共に、第1の金属部材と第2の金属部材との間に電流を流して、第1の金属部材と第2の金属部材を接合する工程を有し、
加熱及び加圧すると共に、第1の金属部材と第2の金属部材との間に電流を流して、第1の金属部材と第2の金属部材を接合する前記工程において、ヒーターにより温度を制御し、
前記第1の金属部材がアルミニウムであり、前記第2の金属部材がステンレス鋼であり、前記電流を前記第1の金属部材から前記第2の金属部材への向きに流す
金属部材の接合方法。 A method of joining a plurality of metal members,
The first metal member and the second metal member are brought into contact with each other, heated and pressurized, and an electric current is passed between the first metal member and the second metal member so that the first metal member and the second metal member are in contact with each other. Having a step of joining metal members,
In the process of heating and pressurizing and joining the first metal member and the second metal member by passing a current between the first metal member and the second metal member, the temperature is controlled by the heater. ,
The method for joining metal members, wherein the first metal member is aluminum, the second metal member is stainless steel, and the current flows in a direction from the first metal member to the second metal member.
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