JP6296031B2 - Pressure sensor manufacturing apparatus and pressure sensor manufacturing method - Google Patents

Description

  The present invention relates to a pressure sensor manufacturing method that manufactures a pressure sensor that includes a pressure sensing unit that detects a physical quantity that changes in response to pressure, and a computing unit that calculates an output value from the detected physical quantity of the pressure sensing unit using an output computing equation. The present invention relates to a device and a pressure sensor manufacturing method.

  For example, various types of pressure sensors that measure pressure such as atmospheric pressure exist and are used in various applications. For example, Patent Document 1 describes a pressure measurement device that measures the pressure of a measurement environment using a semiconductor-type pressure sensor.

  A semiconductor-type pressure sensor is provided with a semiconductor as a pressure sensing unit that is deformed when subjected to pressure and whose electric resistance is changed by the deformation. The semiconductor-type pressure sensor includes an arithmetic unit that calculates a pressure value based on its electrical resistance, and is configured to output the calculated pressure value as an output value (measured value). That is, the semiconductor-type pressure sensor is a pressure sensor using piezoresistance.

  Apart from piezoresistors, there are pressure sensors that use capacitance and strain.

  The capacitance type pressure sensor includes two plate electrodes arranged in parallel as a pressure sensing unit. When one plate electrode receives pressure, it deforms, and the capacitance between the plate electrodes changes accordingly. Further, the capacitance type pressure sensor includes a calculation unit that calculates a pressure value based on the capacitance, and is configured to output the calculated pressure value as an output value.

  In addition, a strain sensor uses a strain gauge to detect the amount of deformation of the diaphragm that deforms when pressure is applied, calculates a pressure value based on the strain detection result, and uses the calculated pressure value as an output value. It is configured to output.

JP 2005-218661 A

  By the way, in recent years, a pressure sensor capable of measuring pressure with higher accuracy has been demanded.

  Therefore, as described above, an output arithmetic expression required when calculating a specific value (output value) of the pressure from a physical quantity (for example, electric resistance, capacitance, strain) that changes under pressure, that is, It is important to appropriately calculate the correspondence between physical quantity and pressure. In addition, in order for the pressure sensor to measure pressure with high accuracy (to output a highly accurate output value), it is important to consider that the physical quantity changes depending on the temperature of the measurement environment.

  Therefore, it is necessary to prepare a plurality of measurement environments having different pressures and temperatures. Then, the correspondence between physical quantities, temperatures, and pressures that change under pressure in each of the prepared measurement environments is obtained, and the use of the pressure sensor is based on the correspondences obtained in each of the measurement environments. Therefore, it is necessary to appropriately calculate an output arithmetic expression that can measure the pressure with high accuracy in the pressure range and the temperature range in which the pressure is assumed.

  In order to prepare a plurality of measurement environments, in Patent Document 1, a thermostatic bath is used. That is, a plurality of different measurement environments are realized by changing the temperature in the thermostat while the pressure measuring device is housed in the thermostat. In the case of Patent Document 1, the pressures of the plurality of measurement environments are atmospheric pressures.

  However, when changing the temperature of a measurement environment such as a thermostatic chamber described in Patent Document 1, it takes time to change the temperature, and it is necessary to wait until the temperature after the change becomes stable. For this reason, it takes time (low efficiency) to calculate the output arithmetic expression required when calculating the pressure value from the physical quantity that changes when pressure is received. As a result, the productivity of the pressure sensor is reduced.

  As a countermeasure, it is conceivable to prepare a plurality of measurement environments such as a constant temperature bath maintained at different temperatures. This eliminates the need for time to change the temperature and stabilize the temperature after the change.

  However, in this case, it is necessary to ensure the interrelationship of pressure between the plurality of measurement environments. For example, in the case of Patent Document 1, when a plurality of thermostats having different temperatures are provided, it is necessary to ensure that the pressure is the same (atmospheric pressure) in each of the plurality of thermostats.

  Therefore, it is conceivable to provide a pressure measuring device for measuring pressure in each of a plurality of measurement environments having different temperatures (in a plurality of thermostats in the case of Patent Document 1).

  However, there are individual differences in pressure measuring devices provided in each of a plurality of measurement environments having different temperatures. Due to this individual difference, the interrelationship of pressures among a plurality of measurement environments cannot be guaranteed. Thus, the accuracy (accuracy) of the output arithmetic expression calculated using a plurality of measurement environments in which the correlation between pressures is not guaranteed is low. As a result, a pressure sensor using such an output calculation formula cannot output a highly accurate output value. That is, the pressure measurement accuracy is low.

  Although it is conceivable to provide a pressure measuring device capable of measuring pressure with high accuracy, such as a pressure measuring standard, in each of a plurality of measuring environments, there are still individual differences. Also, the pressure measurement standard is very expensive. If a plurality of such very expensive pressure measuring standards are used, the production cost of the pressure sensor increases as a result.

  Therefore, the present invention relates to a pressure sensor including a pressure sensing unit that detects a physical quantity that changes in response to pressure, and a computation unit that calculates an output value from the detected physical quantity of the pressure sensing unit using an output computation coefficient. It is an object to calculate arithmetic coefficients so as to have high accuracy, in a short time, and at a lower cost.

In order to solve the above technical problem, according to one aspect of the present invention,
A pressure sensor manufacturing apparatus for manufacturing a pressure sensor, comprising: a pressure sensing unit that detects a physical quantity that changes in response to pressure; and a computing unit that calculates an output value from the detected physical quantity of the pressure sensing unit using an output computing equation. And
A plurality of calculation formula calculation chambers each capable of accommodating the pressure sensors and maintained at different temperatures;
A common pressure measuring device for measuring the pressures of a plurality of calculation formula calculation chambers;
A physical quantity detected by a pressure sensing unit of the pressure sensor when accommodated in each of the plurality of arithmetic expression calculation chambers, and a pressure value of each of the plurality of arithmetic expression calculation chambers measured by the common pressure measuring device; And a control unit for calculating the output calculation formula, a pressure sensor manufacturing apparatus is provided.

According to another aspect of the present invention,
A pressure sensor manufacturing method for manufacturing a pressure sensor, comprising: a pressure sensing unit that detects a physical quantity that changes in response to pressure; and a computing unit that calculates an output value from the detected physical quantity of the pressure sensing unit using an output computing equation. And
Maintain multiple calculation formula chambers at different temperatures,
The pressure sensors are sequentially accommodated in the plurality of arithmetic expression calculation chambers,
Based on the physical quantity detected by the pressure sensing unit of the pressure sensor when housed in each of the plurality of arithmetic expression calculation chambers and the pressure value of each of the plurality of arithmetic expression calculation chambers measured by a common pressure measuring device. Thus, a pressure sensor manufacturing method for calculating the output arithmetic expression is provided.

  According to the present invention, a pressure sensor including a pressure sensing unit that detects a physical quantity that changes in response to pressure, and a computation unit that calculates an output value from the detected physical quantity of the pressure sensing unit using an output computation expression, the output The arithmetic expression can be calculated with high accuracy, in a short time, and at a lower cost.

1 is a schematic configuration diagram of a pressure sensor manufacturing apparatus according to an embodiment of the present invention. Perspective view of pressure sensor Configuration diagram of pressure sensor Schematic cross section of chamber Block diagram showing control system of pressure sensor manufacturing equipment Diagram showing capacitance of pressure sensor obtained in different measurement environments Flowchart diagram showing the flow of calculating the pressure sensor output calculation formula Diagram showing the height position of multiple chambers The figure which shows the communicating pipe which connects each of several chambers and a pressure measuring device in the pressure sensor manufacturing apparatus which concerns on another embodiment. The figure which shows the communicating pipe which connects each of several chambers and the pressure measuring device in the pressure sensor manufacturing apparatus which concerns on another embodiment.

  The pressure sensor manufacturing apparatus according to one aspect of the present invention includes a pressure sensing unit that detects a physical quantity that changes in response to pressure, and a computing unit that calculates an output value from the detected physical quantity of the pressure sensing unit using an output computing equation. A pressure sensor manufacturing apparatus that manufactures a pressure sensor comprising a plurality of arithmetic expression calculation chambers capable of accommodating the pressure sensors and maintained at different temperatures, respectively, and the calculation of the plurality of arithmetic expressions A common pressure measuring device that measures the pressure of the pressure chamber, and a physical quantity detected by the pressure sensing unit of the pressure sensor when accommodated in each of the plurality of calculation formula calculation chambers and the common pressure measuring device. And a control unit for calculating the output calculation formula based on the pressure values of the calculation formula calculation chambers.

  According to this aspect, the output calculation formula of the pressure sensor can be calculated with high accuracy, in a short time, and at a lower cost.

  The pressure sensor further includes a temperature sensing unit that detects a temperature, the physical quantity detected by the pressure sensing unit is a capacitance, and the calculation unit of the pressure sensor includes a temperature detected by the temperature sensing unit, The output value is calculated based on the detected capacitance of the pressure sensing unit and the output calculation formula, and the control unit detects the detected temperature of the temperature sensing unit, and the detected capacitance of the pressure sensing unit, The output arithmetic expression may be calculated based on a pressure value measured by the common pressure measuring device. As a result, an output calculation expression with higher accuracy can be obtained, and the pressure sensor can measure the pressure with higher accuracy.

  The distance between each of the plurality of arithmetic expression calculation chambers and the common pressure measuring device is preferably substantially the same. Thereby, the pressure of each chamber is measured on the substantially same conditions by a common pressure measuring device. As a result, it is possible to obtain an output calculation formula of the pressure sensor with higher accuracy.

  The pressure sensor is accommodated in the calculation formula calculation chamber so that the pressure detection unit of the pressure sensor in the calculation formula calculation chamber and the pressure detection unit of the common pressure measuring device have substantially the same height. Preferably it is done. Thereby, the error caused by the difference in height between the pressure actually received by the pressure sensing unit and the measured value of the pressure measuring device can be reduced. As a result, an output calculation formula of the pressure sensor with higher accuracy can be obtained.

  The plurality of arithmetic expression calculation chambers are preferably arranged so that their height positions are substantially the same. Thereby, it is suppressed that the fluid inside the calculation formula calculation chamber having a high temperature moves toward another chamber. As a result, the pressure measuring device can measure the pressure in the chamber with high accuracy. As a result, an output calculation formula of the pressure sensor with higher accuracy can be obtained.

  It is preferable that the pressure manufacturing apparatus includes a common pressure adjusting device that adjusts the pressure of each of the plurality of arithmetic expression calculating chambers. The structure and control of the pressure sensor manufacturing apparatus are simplified compared to the case where a pressure adjusting device is provided in each of the plurality of arithmetic expression calculation chambers. As a result, the output calculation formula of the pressure sensor can be calculated at a lower cost.

  The pressure device has an arithmetic expression confirmation chamber that accommodates a pressure sensor that holds the output arithmetic expression calculated by the control section, and the control section includes a pressure sensor that is stored in the arithmetic expression confirmation chamber. It is preferable to determine the accuracy of the output arithmetic expression of the pressure sensor in the arithmetic expression confirmation chamber based on the difference between the output value and the pressure value of the arithmetic expression confirmation chamber. Thereby, the reliability of the output calculation formula of the pressure sensor is improved.

  It is preferable that the pressure and temperature of the calculation formula confirmation chamber are different from the pressure and temperature of the calculation formula calculation chamber. Thereby, the reliability of the output calculation formula of the pressure sensor is further improved.

  The pressure in the arithmetic expression confirmation chamber is preferably measured by the common pressure measuring device. Thereby, the accuracy determination of the output calculation formula of the pressure sensor has high reliability.

  It is preferable that a distance between the arithmetic expression confirmation chamber and the common pressure measurement device and a distance between each of the plurality of arithmetic expression calculation chambers and the common pressure measurement device are substantially the same. . Thereby, the accuracy determination of the output calculation formula of the pressure sensor has high reliability.

  The pressure sensor is accommodated in the arithmetic expression confirmation chamber so that the pressure sensing section of the pressure sensor in the arithmetic expression confirmation chamber and the pressure sensing section of the common pressure measuring device are substantially at the same height. Preferably it is done. As a result, it is possible to reduce an error caused by a difference in height between the pressure actually received by the pressure sensing unit in the arithmetic expression confirmation chamber and the measured value of the pressure measuring device. As a result, the accuracy determination of the output calculation formula of the pressure sensor has high reliability.

  It is preferable that the arithmetic expression confirmation chamber and the plurality of arithmetic expression calculation chambers are arranged so that their height positions are substantially the same when the pressure is measured by the common pressure measuring device. Thereby, it is suppressed that the fluid inside the arithmetic expression calculation chamber having a high temperature moves toward the arithmetic expression confirmation chamber. As a result, the pressure measuring device can measure the pressure of the arithmetic expression confirmation chamber with high accuracy. As a result, the accuracy determination of the output calculation formula of the pressure sensor has high reliability.

  It is preferable that the pressure adjusting device for adjusting the pressure of the arithmetic expression confirmation chamber and the pressure adjusting device for adjusting the pressure of each of the plurality of arithmetic expression calculating chambers are common. As a result, the accuracy of the output calculation formula of the pressure sensor can be determined at a lower cost.

  A pressure sensor manufacturing method according to another aspect of the present invention includes a pressure sensing unit that detects a physical quantity that changes in response to pressure, and a computing unit that calculates an output value from the detected physical quantity of the pressure sensing unit using an output computing equation. A pressure sensor manufacturing method for manufacturing a pressure sensor comprising: maintaining a plurality of arithmetic expression calculation chambers at different temperatures, sequentially storing the pressure sensors in the plurality of arithmetic expression calculating chambers, and The output based on the physical quantity detected by the pressure sensing unit of the pressure sensor when accommodated in each of the formula calculation chambers and the pressure value of each of the plurality of calculation formula calculation chambers measured by a common pressure measuring device. An arithmetic expression is calculated.

  According to this aspect, the output calculation formula of the pressure sensor can be calculated with high accuracy, in a short time, and at a lower cost.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic configuration diagram of a pressure sensor manufacturing apparatus according to an embodiment of the present invention.

  First, the pressure sensor 100 manufactured by the pressure sensor manufacturing apparatus 10 shown in FIG. 1 will be described.

  FIG. 2 is a perspective view of the pressure sensor 100. FIG. 3 is a configuration diagram showing the configuration of the pressure sensor 100.

  As shown in FIGS. 1 and 2, the pressure sensor 100 includes a pressure sensing unit 100a that senses pressure.

  In the case of the present embodiment, the pressure sensor 100 is a capacitance type pressure sensor. The pressure sensing unit 100a includes two plate electrodes arranged in parallel. One plate electrode is configured to be deformed when subjected to pressure. When this one plate electrode is deformed, the capacitance C between the two plate electrodes changes. The pressure sensing unit 100a detects the capacitance C that changes in response to this pressure. The pressure sensing unit 100a is provided inside the pressure sensor 100, and a pressure port 100b that communicates between the outside and the pressure sensing unit 100a is provided so that pressure acts on the pressure sensing unit 100a.

  Further, in order to measure the pressure with high accuracy, the pressure sensor 100 includes a temperature sensing unit (temperature sensor) 100c for sensing temperature, as shown in FIG. Specifically, the physical quantity (capacitance C in the present embodiment) detected by the pressure sensing unit 100a also changes depending on the temperature. Therefore, the pressure sensor 100 includes a temperature sensing unit 100c so that an output value in consideration of a change in physical quantity due to temperature can be output.

  Further, the pressure sensor 100 calculates a pressure value Pm based on the capacitance C detected by the pressure sensing unit 100a and the temperature T detected by the temperature sensing unit 100c, and outputs the calculated pressure value Pm as an output value. A calculation unit 100d that outputs to the outside as (measured value) is provided.

Specifically, the calculation unit 100d calculates the pressure value Pm based on the capacitance C, the temperature T, and the output calculation formula F stored in the storage unit 100e. The output calculation formula F is an equation for calculating the pressure value Pm from the capacitance C and the temperature T. In the case of the present embodiment, the output arithmetic expression F is defined by a high-order polynomial using a plurality of coefficients b00 to bnm as shown in Expression 1.

When this output calculation formula F is expressed in a matrix, it can be expressed as Formula 2.

That is, the pressure value Pm can be regarded as a product of a matrix C of 1 row × m columns, a matrix B of m rows × n columns, and a matrix T of n rows × 1 columns. In Equations 1 and 2, m and n are integers. As the number of m and n increases, the pressure value Pm can be obtained from the capacitance C and the temperature T with higher accuracy.

  Therefore, in the case of the present embodiment, the pressure sensor 100 uses the output calculation formula F for calculating the pressure value Pm from the capacitance C detected by the pressure sensing unit 100a and the temperature T detected by the temperature sensing unit 100c. As described above, a plurality of coefficients b00 to bnm of the output calculation formula F shown in Formula 1, that is, the components b00 to bnm of the matrix B shown in Formula 2, are stored (held) in the storage unit 100e.

  Furthermore, the pressure sensor 100 includes a plurality of external connection terminals 100f for connecting to an external device (not shown) as shown in FIG. Based on the capacitance C detected by the pressure sensing unit 100a, the temperature T detected by the temperature sensing unit 100c, and the output calculation formula F shown in Formula 1 (or Formula 2) via the external connection terminal 100f. The pressure sensor 100 can output the calculated pressure value Pm.

  The pressure sensor manufacturing apparatus 10 of the present embodiment that manufactures such a pressure sensor 100 has a plurality of coefficients shown in Formula 1 as an output calculation formula F for calculating the pressure value Pm from the capacitance C and the temperature T. It is configured to calculate b00 to bnm.

  Briefly described, the pressure sensor manufacturing apparatus 10 prepares a plurality of measurement environments having different pressures and temperatures, and sets the pressure sensor 100 in each measurement environment. And the electrostatic capacitance C and temperature T of the pressure sensor 100 in each measurement environment are acquired. The acquired capacitance C and temperature T are substituted into the output calculation formula F shown in Formula 1, and the pressure of the corresponding measurement environment is substituted into Pm. Thereby, a plurality of equations having unknown coefficients b00 to bnm are created (that is, simultaneous equations are created), and the simultaneous equations are solved to calculate the coefficients b00 to bnm.

  In order to calculate the m × n coefficients b00 to bnm in the output calculation formula shown in Formula 1, the pressure of the measurement environment, the capacitance C of the pressure sensor 100, and the pressure sensor 100 are substituted for the pressure value Pm. M × n combinations of temperatures T are required. Therefore, the pressure sensor manufacturing apparatus 10 prepares m × n measurement environments having different pressures and temperatures. Then, m × n simultaneous equations are created based on the capacitance C and temperature T of the pressure sensor 100 in each measurement environment and the pressure in the measurement environment. By solving the m × n simultaneous equations, m × n coefficients b00 to bnm are calculated.

  From here, the specific structure of the pressure sensor manufacturing apparatus 10 for calculating the output calculation formula F (that is, the plurality of coefficients b00 to bnm) of the pressure sensor 100 shown in Formula 1 will be described.

In order to facilitate understanding, the configuration of the pressure sensor manufacturing apparatus 10 for calculating the output arithmetic expression F shown in Expression 3, that is, the twelve coefficients b00 to b32 will be described below.

  As shown in FIG. 1, the pressure sensor manufacturing apparatus 10 includes first to third arithmetic expression calculation chambers 12 </ b> A to 12 </ b> C and an arithmetic expression confirmation chamber 14 that can accommodate the pressure sensor 100, and a plurality of chambers 12 </ b> A to 12 </ b> C. , 14 for adjusting the pressure (chamber internal pressure), a pressure measuring device 18 for measuring the chamber internal pressures of the plurality of chambers 12A to 12C, 14 and a controller 50.

  The first to third arithmetic expression calculation chambers 12A to 12C and the arithmetic expression confirmation chamber 14 are provided for providing a plurality of measurement environments having different pressures and temperatures, and the pressure sensor 100 accommodates each in order. Is done. These chambers 12A to 12C, 14 have substantially the same configuration. Therefore, only the first arithmetic expression calculation chamber 12A will be described, and description of the other chambers will be omitted.

  FIG. 4 is a schematic cross-sectional view showing the inside of the first arithmetic expression calculating chamber 12A.

  As shown in FIG. 4, in the case of the present embodiment, the first arithmetic expression calculation chamber 12 </ b> A is roughly provided with a main body portion 20 having an opening above and housing a plurality of pressure sensors 100, and the main body portion 20. And a cover portion 22 that covers the opening. By covering the opening of the main body portion 20 with the cover portion 22, a sealed space is formed in the arithmetic expression calculation chamber 12A.

  In the present embodiment, the plurality of pressure sensors 100 are placed on the tray 24, and the tray 24 is accommodated in the main body 20 of the first arithmetic expression calculation chamber 12A.

  As shown in FIG. 4, the plurality of external connection terminals 100f of the pressure sensor 100 are in contact with the plurality of contact terminals 26 provided in the arithmetic expression calculation chamber 12A. These contact terminals 26 are provided in the cover part 22 of the arithmetic expression calculation chamber 12A, and the cover part 22 contacts the external connection terminal 100f of the pressure sensor 100 by closing the opening of the main body part 20. These contact terminals 26 are connected to the control unit 50 of the pressure sensor manufacturing apparatus 10, as will be described in detail later.

  Further, the arithmetic expression calculation chamber 12A includes, for example, a Peltier element 28 as temperature adjusting means for adjusting the temperature (chamber temperature) therein. The plurality of Peltier elements 28 are provided in the arithmetic expression calculation chamber 12A so as to sandwich the pressure sensor 100 therebetween. The Peltier element 28 is controlled by the control unit 50 of the pressure sensor manufacturing apparatus 10 described later.

  Further, as shown in FIG. 1, the first arithmetic expression calculating chamber 12A is connected to a pressure adjusting device 16 which is a means for adjusting the chamber internal pressure. The pressure adjusting device 16 includes, for example, a positive pressure source (for example, a compressor) (not shown) and a negative pressure source (for example, a vacuum pump) (not shown) connected to the first arithmetic expression calculation chamber 12A. And controlling the output (positive pressure) of the compressor and the output (negative pressure) of the vacuum pump, thereby controlling the chamber internal pressure of the first arithmetic expression calculating chamber 12A.

  The pressure adjusting device 16 is not provided for each of the arithmetic expression calculation chambers 12A to 12C and the arithmetic expression confirmation chamber 14, but as shown in FIG. 1, a plurality of these chambers 12A to 12C are provided. , 14 is provided in common. The common pressure adjustment device 16 is connected to each of the plurality of chambers 12 </ b> A to 12 </ b> C and 14 via the pressure pipe 30. Therefore, the chamber internal pressures of the plurality of chambers 12A to 12C and 14 are the same.

  Thus, by providing one pressure adjusting device 16 in common for the plurality of chambers 12A to 12C, 14, the configuration and control of the pressure sensor manufacturing apparatus 10 can be made as compared with the case where the pressure adjusting device is provided in each chamber. It is simplified and the cost of the apparatus 10 is kept low.

  Further, the pressure adjusting device 16 is controlled by the control unit 50 of the pressure sensor manufacturing device 10, which will be described in detail later.

  The chamber internal pressures of the calculation formula calculating chambers 12 </ b> A to 12 </ b> C and the calculation formula checking chamber 14 adjusted by the pressure adjusting device 16 are measured by the pressure measuring device 18. Based on the measurement result of the pressure measuring device 18, the control unit 50 of the pressure sensor manufacturing device 10 controls the pressure adjusting device 16. Thereby, the chamber internal pressure is kept constant at a predetermined pressure.

  The pressure measuring device 18 is a pressure measuring device capable of measuring pressure with high accuracy. Although details will be described later, the pressure measuring device 18 is also used to calculate the output calculation formula F of the pressure sensor 100 shown in Formula 3. For example, the pressure measurement device 18 is a pressure measurement device that has been calibrated by a pressure measurement device that measures pressure with higher accuracy, such as a primary standard device or a secondary standard device, and has been adjusted based on the calibration result.

  The pressure measuring device 18 is not provided for each of the arithmetic expression calculation chambers 12A to 12C and the arithmetic expression confirmation chamber 14, but as shown in FIG. 1, a plurality of these chambers 12A to 12C are provided. , 14 is provided in common. As shown in FIG. 1, the common pressure measuring device 18 measures the pressure in the chamber by measuring the pressure in the communication pipe 32 that communicates each of the plurality of chambers 12 </ b> A to 12 </ b> C, 14. For this purpose, as shown in FIG. 4, a communication pipe 32 is connected to the pressure port 18 a of the pressure measuring device 18.

  From here, the control system of the pressure sensor manufacturing apparatus 10 will be described.

  FIG. 5 shows a control system of the pressure sensor manufacturing apparatus 10 for calculating the output calculation formula F of the pressure sensor 100 shown in Formula 3.

  In order to calculate the output calculation formula F of the pressure sensor 100, the control unit 50 of the pressure sensor manufacturing apparatus 10 controls the chamber temperatures of the calculation formula calculation chambers 12A to 12C and the calculation formula check chamber 14, respectively. A temperature control unit 52 and a chamber pressure control unit 54 that controls the chamber internal pressures of the plurality of chambers 12 </ b> A to 12 </ b> C and 14 via the pressure adjusting device 16 are provided.

  The chamber temperature control unit 52 of the control unit 50 of the pressure sensor manufacturing apparatus 10 controls the Peltier elements 28 of the first to third calculation formula calculation chambers 12A to 12C, and maintains the inside of the chambers at different chamber temperatures. . For example, the chamber temperature of the first arithmetic expression calculation chamber 12A is maintained at T1, the chamber temperature of the second arithmetic expression calculation chamber 12B is maintained at T2, and the temperature of the third arithmetic expression calculation chamber 12C is maintained at T3. (T1> T2> T3).

  The chamber temperature control unit 52 also controls the Peltier element 28 of the arithmetic expression confirmation chamber 14 to maintain the chamber temperature at a specified temperature Tc. The predetermined temperature Tc is, for example, an intermediate temperature between the temperatures T1 and T3.

  The chamber pressure control unit 54 of the control unit 50 of the pressure sensor manufacturing apparatus 10 controls the pressure adjusting device 16 to control the chamber internal pressures of the first to third calculation formula calculating chambers 12A to 12C and the calculation formula checking chamber 14. Change sequentially. For example, the chamber internal pressures of the plurality of chambers 12A to 12C and 14 are sequentially changed to predetermined pressures P1, P2, P3, and P4 (P1> P2> P3> P4) as will be described in detail later.

  Further, the control unit 50 of the pressure sensor manufacturing apparatus 10 uses the measured values Ps of the chamber internal pressures of the first to third arithmetic expression calculation chambers 12A to 12C and the arithmetic expression confirmation chamber 14 measured by the pressure measuring apparatus 18. The pressure acquisition part 56 to acquire is provided. Further, the control unit 50 acquires a capacitance C detected by the pressure sensing unit 100a of the pressure sensor 100 when accommodated in each of the plurality of chambers 12A to 12C, 14; And a temperature acquisition unit 60 that acquires the temperature T detected by the temperature sensing unit 100c.

  The pressure acquisition unit 56 of the control unit 50 of the pressure sensor manufacturing apparatus 10 receives the measurement value Ps of the pressure measurement device 18. Specifically, the pressure measurement device 18 measures the pressure in the communication pipe 32 communicating with each of the plurality of chambers 12 </ b> A to 12 </ b> C and 14, and outputs the measured value Ps to the control unit 50.

  The chamber pressure control unit 54 controls the pressure adjustment device 16 based on the measurement value Ps of the pressure measurement device 18 acquired by the pressure acquisition unit 56. Thereby, the chamber internal pressures of the first to third arithmetic expression calculation chambers 12A to 12C and the arithmetic expression confirmation chamber 14 are adjusted to the predetermined pressures P1, P2, P3, and P4 with high accuracy. Alternatively, the internal pressure of the chamber may be adjusted based on the pressure gauge measurement value of the pressure adjustment device.

  The capacitance acquisition unit 58 of the control unit 50 of the pressure sensor manufacturing apparatus 10 receives the capacitance C from the pressure sensor 100 in the first to third calculation formula calculation chambers 12A to 12C.

  Note that the capacitance C detected by the pressure sensing unit 100a of the pressure sensor 100 differs depending on the pressure and also on the temperature. Therefore, the capacitance C can be expressed as a function C (P, T) of the pressure P and the temperature T. In the present embodiment, in each of the first to third arithmetic expression calculation chambers 12A to 12C, the chamber internal pressure is sequentially changed to P1, P2, P3, and P4 as described above. The first to third arithmetic expression calculation chambers 12A to 12C are maintained at different temperatures T1, T2, and T3. As shown in FIG. 6, twelve capacitances C (P1, T1) to C (P4, T3) can be obtained from the twelve measurement environments having different pressures and temperatures. In FIG. 6, for example, capacitance C (P1, T1) indicates the capacitance obtained when the chamber internal pressure is P1 and the chamber temperature is T1.

  Further, the temperature acquisition unit 60 acquires the temperature T from the temperature sensing unit 100c of the pressure sensor 100 in the first to third arithmetic expression calculation chambers 12A to 12C. Since each of the first to third calculation formula calculation chambers 12A, 12B, and 12C is maintained at the temperatures T1, T2, and T3, the temperatures acquired by the temperature acquisition unit 60 are substantially the same.

  Note that the capacitance acquisition unit 58 and the temperature acquisition unit 60 of the control unit 50 of the pressure sensor manufacturing apparatus 10 indicate the capacitance C (P, T) and the temperature T via the contact terminal 26 of the chamber. Get from. For that purpose, the pressure sensor 100 outputs a capacitance C (P, T) and temperature T via the external connection terminal 100f, and the capacitance C (P, T), temperature T, and output calculation. And a mode for outputting the pressure value Pm calculated based on Formula F.

  Further, the control unit 50 of the pressure sensor manufacturing apparatus 10 includes the measurement value Ps (that is, P1 to P4) of the pressure measurement device 18 acquired by the pressure acquisition unit 56 and the pressure sensor 100 acquired by the capacitance acquisition unit 58. Based on the capacitance C (P, T) of the pressure sensing unit 100a and the temperature T (ie, T1 to T3) of the temperature sensing unit 100c of the pressure sensor 100 acquired by the temperature acquisition unit 60, Equation 3 The output arithmetic expression calculation unit 62 for calculating the output arithmetic expression F (the 12 coefficients b00 to b32) shown in FIG.

  Specifically, the output arithmetic expression calculation unit 62 has an unknown coefficient b00 to b32 for each of a plurality of measurement environments (first to third arithmetic expression calculation chambers 12A to 12C) having different chamber temperatures and chamber internal pressures. Create an equation.

  For example, for the first arithmetic expression calculation chamber 12A, four equations are created from pressures P1 to P4, temperature T1, and capacitances C (P1, T1) to C (P4, T1). That is, the second equation obtained from the first equation obtained by substituting P1, T1, and C (P1, T1) into the output calculation equation F shown in Equation 3, and P2, T1, and C (P2, T1). And a third equation obtained from P3, T1, and C (P3, T1) and a fourth equation obtained from P4, T1, and C (P4, T1).

  Similarly, for the second arithmetic expression calculation chamber 12B, four equations are created from the pressures P1 to P4, the temperature T2, and the capacitances C (P1, T2) to C (P4, T2). That is, the sixth equation obtained from the fifth equation obtained by substituting P1, T2, and C (P1, T2) into the output calculation equation F shown in Equation 3, and P2, T2, and C (P2, T2). , A seventh equation obtained from P3, T2, and C (P3, T2) and an eighth equation obtained from P4, T2, and C (P4, T2).

  Similarly, for the third calculation formula calculation chamber 12C, four equations are created from the pressures P1 to P4, the temperature T3, and the capacitances C (P1, T3) to C (P4, T3). In other words, the ninth equation obtained by substituting P1, T3, and C (P1, T3) into the output arithmetic expression F shown in Equation 3, and the tenth obtained from P2, T3, and C (P2, T3). And an eleventh equation obtained from P3, T3 and C (P3, T3) and a twelfth equation obtained from P4, T3 and C (P4, T3).

  The output arithmetic expression calculating unit 62 includes the first to fourth equations obtained for the first arithmetic expression calculating chamber 12A and the fifth to eighth equations obtained for the second arithmetic expression calculating chamber 12B. And the ninth to twelfth equations obtained for the third computing equation calculation chamber 12C, that is, solving simultaneous equations including 12 equations, 12 of the output computing equation F shown in Equation 3 The coefficients b00 to b32 are calculated. Thereby, the output calculation formula calculation unit 62 calculates the output calculation formula F of the pressure sensor 100.

  From here, an example is given and the flow of calculation of the output arithmetic expression F of the pressure sensor 100 by the pressure sensor manufacturing apparatus 10 is demonstrated, referring the flowchart shown in FIG. Note that the flow of calculation of the output calculation formula F of the pressure sensor 100 described here does not limit the present invention.

  First, as shown in FIG. 7, in step S100, for example, the pressure sensor 100 before factory shipment is set (accommodated) in the first arithmetic expression calculation chamber 12A having a chamber temperature of T1.

  Next, in step S110, the control unit 50 of the pressure sensor manufacturing apparatus 10 detects the capacitance C (P1, P1) detected by the pressure sensing unit 100a from the pressure sensor 100 in the first arithmetic expression calculation chamber 12A. T1) to C (P4, T1) and the temperature T1 detected by the temperature sensing unit 100c are acquired. That is, a first combination of P1, T1, and C (P1, T1), a second combination of P2, T1, and C (P2, T1), and P3, T1, and C (P3, T1) The control unit 50 acquires the third combination and the fourth combination of P4, T1, and C (P4, T1).

  Subsequently, in step S120, the pressure sensor 100 is unloaded from the first arithmetic expression calculation chamber 12A, and the chamber temperature is set in the second arithmetic expression calculation chamber 12B of T2.

  In step S130, the control unit 50 of the pressure sensor manufacturing apparatus 10 starts from the capacitance C (P1, T2) detected by the pressure sensing unit 100a from the pressure sensor 100 in the second arithmetic expression calculation chamber 12B. C (P4, T2) and the temperature T2 detected by the temperature sensing unit 100c are acquired. That is, a fifth combination of P1, T2, and C (P1, T2), a sixth combination of P2, T2, and C (P2, T2), and P3, T2, and C (P3, T2) The control unit 50 obtains the seventh combination and the eighth combination of P4, T2, and C (P4, T2).

  In step S140, the pressure sensor 100 is unloaded from the second calculation formula calculation chamber 12B, and the chamber temperature is set in the third calculation formula calculation chamber 12C of T3.

  In step S150, the control unit 50 of the pressure sensor manufacturing apparatus 10 starts from the capacitance C (P1, T3) detected by the pressure sensing unit 100a from the pressure sensor 100 in the third arithmetic expression calculation chamber 12C. C (P4, T3) and the temperature T3 detected by the temperature sensing unit 100c are acquired. That is, a ninth combination of P1, T3, and C (P1, T3), a tenth combination of P2, T3, and C (P2, T3), and P3, T3, and C (P3, T3) The eleventh combination and the twelfth combination of P4, T3, and C (P4, T3) are acquired by the control unit 50.

  In step S160, the control unit 50 (output arithmetic expression calculation unit 62) of the pressure sensor manufacturing apparatus 10 performs the pressures P1 to P4, the temperature T1, and the capacitances C (P1, T1) to C (C) acquired in step S110. First to fourth combinations of P4, T1), pressures P1 to P4 acquired in step S130, temperature T2, and capacitances C (P1, T2) to C (P4, T2) fifth to fifth. 8 and the ninth to twelfth combinations of the pressures P1 to P4, the temperature T3, and the capacitances C (P1, T3) to C (P4, T3) acquired in step S150 are expressed by Equation 3: Is substituted into the output calculation formula F shown in FIG. Thereby, simultaneous equations including 12 equations whose twelve coefficients b00 to b32 are unknown are created. The output arithmetic expression calculation unit 62 solves the simultaneous equations to calculate a plurality of coefficients b00 to b32, that is, calculates an output arithmetic expression F.

  When the calculation of the plurality of coefficients b00 to b32, that is, the calculation of the output calculation formula F is completed in step S160, the pressure sensor 100 calculates the calculation formula in step S170 in order to confirm the accuracy (accuracy) of the output calculation formula F. It is set in the confirmation chamber 14.

  In step S180, the control unit 50 of the pressure sensor manufacturing apparatus 10 determines the plurality of coefficients b00 to b32 calculated in step 160, that is, the accuracy of the output arithmetic expression F.

  Specifically, the plurality of coefficients b00 to b32 calculated in step S160, that is, the output arithmetic expression F, are stored in the storage unit 100e of the pressure sensor 100 housed in the arithmetic expression confirmation chamber 14 in the pressure sensor manufacturing apparatus 10. The control unit 50 writes.

  The pressure sensor 100 in which the output calculation formula F is written measures the pressure in the calculation formula confirmation chamber 14. That is, the pressure value Pm is calculated from the capacitance C detected by the pressure sensing unit 100a and the temperature T detected by the temperature sensing unit 100c using the output arithmetic expression F written in the storage unit 100e, The pressure value Pm is output to the control unit 50 of the pressure sensor manufacturing apparatus 10.

  The pressure value Pm output from the pressure sensor 100 in the arithmetic expression confirmation chamber 14 is compared with the measured value Ps of the chamber internal pressure of the arithmetic expression confirmation chamber 14 measured by the pressure measuring device 18, and the pressure sensor The control unit 50 of the manufacturing apparatus 10 determines the accuracy of the output calculation formula F written in the pressure sensor 100.

  For example, the accuracy of the output calculation formula F is determined based on the difference between the pressure value Pm of the pressure sensor 100 and the measurement value Ps of the pressure measuring device 18. If the difference is less than or equal to the predetermined threshold value, it is determined that the output arithmetic expression F is likely.

  In the case of the present embodiment, the temperature in the arithmetic expression confirmation chamber 14 is calculated from the first to third arithmetic expressions used for calculating the output arithmetic expression F (the plurality of coefficients b00 to b32). The temperature Tc is different from the temperatures T1 to T3 of the working chamber 12. Therefore, the output calculation formula F determined to be good in the measurement environment of the temperature Tc different from the temperatures T1 to T3 used for calculating the output calculation formula F has high accuracy and reliability. Therefore, the pressure sensor 100 that measures the pressure using the output calculation formula F with high accuracy and reliability can measure the pressure with high accuracy and high reliability.

  Further, the accuracy determination method of the output calculation formula F may be changed according to the measurement accuracy and reliability required for the pressure sensor 100.

  For example, after step S150 shown in FIG. 7 is completed, the pressure sensor 100 in the third arithmetic expression calculating chamber 12C is kept on standby, and the output arithmetic expression F is calculated in step S160. The calculated output calculation formula F is written in the storage unit 100e of the pressure sensor 100 standing by in the third calculation formula calculation chamber 12C. Then, the pressure sensor 100 measures the chamber internal pressure of the third calculation formula calculation chamber 12C, and obtains the measured pressure value Pm. A difference D1 between the acquired measured value Pm and the measured value Ps of the chamber internal pressure of the third arithmetic expression calculating chamber 12C measured by the pressure measuring device 18 is calculated.

  Next, the pressure sensor 100 is transported into the arithmetic expression confirmation chamber 14, the internal pressure of the arithmetic expression confirmation chamber 14 is measured by the pressure sensor 100, and the measured pressure value Pm is obtained. A difference D2 between the acquired measured value Pm and the measured value Ps of the chamber internal pressure of the calculation formula confirmation chamber 14 measured by the pressure measuring device 18 is calculated.

  Confirmation of the calculation formula of the difference T1 obtained in the third calculation formula calculation chamber 12C of the temperature T3 used in the calculation of the output calculation formula F and the temperature Tc different from the temperatures T1 to T3 used in the calculation of the output calculation formula F The difference D2 obtained in the working chamber 14 is compared. If the larger difference is less than or equal to the predetermined threshold value, it is determined that the output arithmetic expression F is likely.

  In this case, a more reliable output arithmetic expression F can be obtained as compared with the case where the output arithmetic expression F is determined using only the difference D2. Therefore, the pressure sensor 100 that measures the pressure using the output calculation formula F with higher reliability can measure the pressure with high accuracy and higher reliability.

  Further, other methods can be used as a method of determining the accuracy of the output calculation formula F. For example, in order to calculate the twelve coefficients b00 to b32 of the output calculation formula F shown in Formula 3, as described above, a combination of 12 sets of measurement data (that is, a measurement value (pressure value) of the pressure measurement device 18) And a combination of the capacitance detected by the pressure sensing unit 100a of the pressure sensor 100 and the temperature detected by the temperature sensing unit 100c of the pressure sensor 100). By substituting these 12 sets of measurement data into the output calculation formula F shown in Equation 3, 12 coefficients b00 to b32 create unknown simultaneous equations (12 equations) and solve the simultaneous equations. , 12 coefficients b00 to b32 are calculated (determined).

  The capacitance and temperature in this combination of measurement data are substituted into the output calculation formula F in which a plurality of coefficients b00 to b32 are determined, and the pressure value is calculated. A difference D3 between the calculated pressure value and the measured value of the pressure measuring device 18 corresponding to the capacitance and temperature substituted for the calculated pressure value is calculated. This difference D3 is calculated for each of the 12 sets of measurement data. The 12 differences D3 calculated based on each of the 12 sets of measurement data are respectively compared, and the maximum difference D3max, which is the largest difference, is specified. If the maximum difference D3max is less than or equal to a predetermined threshold value, it is determined that the output calculation formula F is likely.

  In this case, a plurality of measurement data used for calculating (determining) the plurality of coefficients b00 to b32 of the output calculation formula F is used for determining the accuracy of the output calculation formula F. In other words, the accuracy of the output arithmetic expression F can be determined without using the arithmetic expression confirmation chamber 14, and more specifically, without accommodating the pressure sensor 100 in the chamber. Therefore, the determination of the output arithmetic expression F can be completed in a short time.

  Note that the 12 differences D3 calculated based on each of the 12 sets of measurement data and the above-described difference D2 (measured values measured by the pressure sensor 100 and measured by the pressure measuring device 18 with respect to the arithmetic expression confirmation chamber 14). Difference between the measured value and the measured value), the maximum difference among them is identified, and if the identified difference is less than or equal to the threshold value, the output arithmetic expression F may be determined to be probable. In this case, the accuracy determination of the output calculation formula F can be performed with higher reliability.

  According to the pressure sensor manufacturing apparatus 10 of this embodiment, the output calculation formula F of the pressure sensor 100 can be calculated so as to have high accuracy (accuracy), in a short time, and at a lower cost. it can.

  First, as shown in FIG. 5, a plurality of measurement environments having different temperatures necessary for calculating the output calculation formula F of the pressure sensor 100 are used for calculating the first to third calculation formulas maintained at different temperatures. This is realized by the chambers 12A to 12C. Therefore, the output calculation formula F can be calculated in a shorter time than when a plurality of measurement environments having different temperatures are realized by changing the temperature of one chamber. That is, there is no time required for changing the temperature or waiting until the temperature after the change becomes stable.

  Further, the pressures of a plurality of measurement environments having different temperatures, that is, the chamber internal pressures of the first to third arithmetic expression calculating chambers 12A to 12C having different temperatures are measured by a common pressure measuring device 18. That is, the chamber internal pressures of the chambers 12A to 12C are measured with high accuracy by one common reference. Therefore, the interrelationship of pressure between these chambers 12A-12C is guaranteed. For example, it can be ensured that the chamber internal pressure of the first arithmetic expression calculation chamber 12A and the chamber internal pressure of the second arithmetic expression calculation chamber 12B are the same. Further, when the chamber internal pressure of the first calculation formula calculation chamber 12A is changed from P1 to P2 and then changed to P1 again, P1 before changing to P2 and P1 changed from P2 may be the same. Guaranteed.

  Therefore, the chamber pressure is measured with high accuracy by one common pressure measuring device 18 and the correlation between the chamber pressures is guaranteed with high certainty, that is, the first to third operations. The output calculation formula F calculated using the formula calculation chambers 12A to 12C has high accuracy (probability). As a result, the pressure sensor 100 using such an output calculation formula F can output a highly accurate output value (pressure value Pm). That is, the pressure measurement accuracy is high.

  The chamber internal pressures of the first to third arithmetic expression calculation chambers 12 </ b> A to 12 </ b> C are measured by one common pressure measurement device 18. Therefore, compared with the case where the pressure measuring device 18 is provided in each of the first to third arithmetic expression calculation chambers 12A to 12C and the internal pressures of those chambers are measured, the output arithmetic expression F with high accuracy of the pressure sensor 100 is inexpensive. Can be calculated.

  In this way, in the pressure sensor manufacturing apparatus 10 of the present embodiment, the output calculation formula F necessary for the pressure sensor 100 that measures pressure with high accuracy can be obtained with high accuracy and in a short time. It can be calculated at low cost.

  Moreover, in order to calculate the high-accuracy output calculation formula F of the pressure sensor 100, the pressure sensor manufacturing apparatus 10 of the present embodiment includes the following features.

  First, in the case of the present embodiment, as described above, the accuracy of the output arithmetic expression F of the pressure sensor 100 performed in the arithmetic expression confirmation chamber 14 is determined by the arithmetic expression confirmation chamber measured by the pressure measuring device 18. This is performed based on the 14 measured values Ps. That is, the calculation formula confirmation chamber 14 used for determining the chamber internal pressure of the first to third calculation formula calculation chambers 12A to 12C used for calculation of the output calculation formula F and the accuracy of the output calculation formula F. Are measured by one common pressure measuring device 18. Therefore, the determination of the output arithmetic expression F has high reliability. Therefore, the output arithmetic expression F determined as good by the determination with high reliability has high accuracy.

  In the case of the present embodiment, as shown in FIG. 1, the first to third arithmetic expression calculation chambers 12 </ b> A to 12 </ b> C and the arithmetic expression confirmation chamber 14 are approximately at a distance from the pressure measuring device 18. They are arranged to be the same. In the case of the present embodiment, a plurality of chambers 12 </ b> A to 12 </ b> C and 14 are arranged on the same circumference C with the pressure measuring device 18 as the center. Thereby, the pressure measuring device 18 can measure the chamber internal pressures of the plurality of chambers 12A to 12C and 14 under substantially the same conditions. Since the calculation of the output calculation formula F of the pressure sensor 100 and the determination of the accuracy thereof are performed based on the measured value of the pressure measuring device 18 measured under substantially the same conditions, the output calculation formula F thus obtained is High accuracy.

  Further, in the case of the present embodiment, as shown in FIG. 4, the pressure sensing unit 100 a of the pressure sensor 100 housed in the first to third arithmetic expression calculation chambers 12 </ b> A to 12 </ b> C and the arithmetic expression confirmation chamber 14. The pressure sensing unit 18b of the pressure measuring device 18 is positioned at substantially the same height level H. That is, the pressure sensor 100 is accommodated in the plurality of chambers 12A to 12C and 14 so that the pressure sensing unit 100a is positioned at the height level H.

  Thereby, the difference in pressure due to the difference in height between the position of the pressure sensing unit 100a of the pressure sensor 100 and the position of the pressure sensing unit 18b of the pressure measuring device 18 is eliminated. Therefore, an error between the actual pressure value that causes the capacitance C detected by the pressure sensing unit 100a and the measured value Ps of the pressure measuring device 18 is reduced. As a result, the output calculation formula F of the pressure sensor 100 calculated based on the capacitance C and the measured value Ps of the pressure measuring device 18 has high accuracy.

  Furthermore, in the case of the present embodiment, as schematically shown in FIG. 8, the first to third arithmetic expression calculation chambers 12A to 12C and the arithmetic expression confirmation chamber 14 are at substantially the same height position. Has been placed.

  As shown in FIG. 8, the pressure measuring device 18 communicates with each of the first to third arithmetic expression calculation chambers 12 </ b> A to 12 </ b> C and the arithmetic expression confirmation chamber 14 via a communication pipe 32. Therefore, the plurality of chambers 12 </ b> A to 12 </ b> C and 14 also communicate with each other via the communication pipe 32. Therefore, the fluid (for example, air) inside each of the plurality of chambers 12A to 12C, 14 can move to another chamber.

  Further, as described above, the temperatures inside the first to third arithmetic expression calculation chambers 12A to 12C and the arithmetic expression confirmation chamber 14 are different. Therefore, when the chamber having a high internal temperature is arranged at a lower position than the chamber having a low internal temperature, the fluid passing through the communication pipe 32 rises from the chamber having the high internal temperature toward the chamber having the low internal temperature. Flow occurs.

  In order to suppress the occurrence of the flow of the fluid passing through the communication pipe 32, the first to third arithmetic expression calculation chambers 12A to 12C and the arithmetic expression confirmation chamber 14 have a height as shown in FIG. It arrange | positions so that a position may become substantially the same. Thereby, the pressure measuring device 18 can measure the chamber internal pressures of the chambers 12 </ b> A to 12 </ b> C and 14 through the communication pipe 32 with high accuracy. As a result, the output calculation formula F of the pressure sensor 100 calculated based on the measured value of the pressure measuring device 18 has high accuracy.

  As described above, according to the present embodiment, the pressure sensing unit 100a that detects the capacitance C that changes in response to pressure, and the output calculation formula F from the detected capacitance C of the pressure sensing unit 100a. For the pressure sensor 100 including the calculation unit 100d that calculates the output value, the output calculation formula F can be calculated with high accuracy, in a short time, and at a lower cost.

  While the present invention has been described with reference to the above-described embodiment, the embodiment of the present invention is not limited to this.

  For example, in the case of the above-described embodiment, the first to third arithmetic expression calculation chambers 12A to 12C and the arithmetic expression confirmation chamber 14 suppress the occurrence of a flow of fluid that passes through the communication pipe 32 that communicates them. In order to do so, they are arranged at the same height position. Further, in order to suppress the generation of the flow of fluid passing through the communication pipe 32, a flow path resistance 32a may be provided in the communication pipe 32 as shown in FIG. For example, the flow path resistance 32 a is configured by a reduced diameter portion of the communication pipe 32 and is provided between the first arithmetic expression calculation chamber 12 </ b> A having a high internal temperature and the pressure measurement device 18. As a result, the high-temperature fluid in the first arithmetic expression calculating chamber 12 </ b> A is prevented from flowing into the communication pipe 32. Thereby, the influence on the measurement value of the pressure measuring device 18 by the flow of the fluid passing through the communication pipe 32 is further suppressed, and as a result, the output arithmetic expression F of the pressure sensor 100 is calculated to have higher accuracy. be able to.

  As shown in FIG. 9, a filter may be provided instead of providing the reduced diameter portion 32 a in the communication pipe 32. Further, as shown in FIG. 10, a plurality of piston members 40 may be arranged inside the communication pipe 32. The piston member 40 is slidably in contact with the inner peripheral surface of the communication pipe 32 and is disposed in the communication pipe 32 so as to be movable in the extending direction of the communication pipe 32. Further, a piston member 40 is disposed between each of the first to third arithmetic expression calculation chambers 12 </ b> A to 12 </ b> C and the arithmetic expression confirmation chamber 14 and the pressure measuring device 18.

  With such a piston member 40, fluid movement between chambers is prevented, but pressure is transmitted from the chambers to the pressure measuring device 18. Thereby, generation | occurrence | production of the flow of the fluid which passes the communicating pipe 32 is prevented, As a result, the output calculating formula F of the pressure sensor 100 can be calculated so that it may have higher accuracy.

  In the case of the above-described embodiment, the arithmetic expression confirmation chamber 14 is provided in order to determine the accuracy of the output arithmetic expression F of the pressure sensor 100. Moreover, the chamber internal pressure of the arithmetic expression confirmation chamber 14 is adjusted by a pressure adjusting device 16 that adjusts the chamber internal pressures of the first to third arithmetic expression calculating chambers 12A to 12C. Furthermore, the chamber internal pressure of the arithmetic expression confirmation chamber 14 is measured by a pressure measuring device 18 that measures the chamber internal pressures of the first to third arithmetic expression calculating chambers 12A to 12C. Therefore, the operating rate of the arithmetic expression confirmation chamber 14 is low.

  Specifically, in the case of the above-described embodiment, the accuracy determination of the output arithmetic expression F of the pressure sensor 100 in the arithmetic expression confirmation chamber 14 is performed under a predetermined pressure P3. Accordingly, when the chamber internal pressures of the first to third calculation formula calculating chambers 12A to 12C are maintained at the pressures P1, P2, and P4 different from the predetermined pressure P3 by the pressure adjusting device 16, the calculation formula checking chamber 14 is used. The chamber internal pressure is different from the predetermined pressure P3, and therefore, the accuracy determination of the output calculation formula F of the pressure sensor 100 in the calculation formula confirmation chamber 14 cannot be performed. Therefore, the operation rate of the arithmetic expression confirmation chamber 14 is low, and therefore the throughput of the pressure sensor manufacturing apparatus 10 is low.

  As a countermeasure for this, the chamber internal pressure of the calculation formula confirmation chamber 14 is adjusted by a pressure adjusting device different from the pressure adjusting device 16 and measured by another pressure measuring device different from the pressure measuring device 18. Thereby, the operation rate of the arithmetic expression confirmation chamber 14 can be improved, and the throughput of the pressure sensor manufacturing apparatus 10 can be improved. However, in this case, considering the reliability of the accuracy determination of the output calculation formula F of the pressure sensor 100 in the calculation formula confirmation chamber 14, the pressure measuring device that measures the chamber internal pressure of the calculation formula check chamber 14 is the first to It is preferable to have substantially the same measurement accuracy as the pressure measuring device 18 that measures the chamber internal pressures of the third arithmetic expression calculating chambers 12A to 12C.

  It is also possible to omit the arithmetic expression confirmation chamber 14 itself. That is, it is possible to omit the work of determining the accuracy of the output calculation formula F of the pressure sensor 100.

  For example, in the case of the above-described embodiment, twelve measurement environments having different temperatures (T1 to T3) and pressures (P1 to P4) by using the first to third arithmetic expression calculation chambers 12A to 12C. Is realized. In each of the plurality of measurement environments, the capacitance C of the pressure sensing unit 100a of the pressure sensor 100 and the temperature T of the temperature sensing unit 100c are acquired, and the measurement value Ps of the pressure measuring device 18 is acquired. Based on the 12 sets of combinations of the capacitance C, temperature T, and Ps, the output calculation formula F of the pressure sensor 100 is calculated.

  On the other hand, for example, while increasing the number of arithmetic expression calculation chambers with different chamber temperatures, the number of pressure changes performed in each of the arithmetic expression calculation chambers is increased. The number of measurement environments may be increased. Thereby, more combinations of capacitance C, temperature T, and measured value Ps can be acquired. Further, based on the more acquired combinations, the output calculation formula F of the pressure sensor 100 with higher accuracy can be calculated. Therefore, the work for determining the accuracy of the output calculation formula F of the pressure sensor 100 can be omitted.

  Further, in the above-described embodiment, there are three arithmetic expression calculation chambers, but the embodiment according to the present invention is not limited thereto. The embodiment according to the present invention includes at least two arithmetic expression calculation chambers, and measures the internal pressures of at least two chambers with a common pressure measuring device.

  Furthermore, in the case of the above-described embodiment, the pressure sensor manufacturing apparatus 10 manufactures the capacitance type pressure sensor 100, specifically, outputs using the capacitance C detected by the pressure sensing unit 100a. An arithmetic expression F is calculated. However, the pressure sensor manufacturing apparatus according to the embodiment of the present invention is not limited to a capacitance type pressure sensor.

  For example, the pressure sensor may be a semiconductor type pressure sensor made of a semiconductor whose electrical resistance changes upon receiving pressure. In this case, the pressure sensor manufacturing apparatus calculates an output arithmetic expression of the pressure sensor based on the electrical resistance instead of the capacitance.

  That is, in a broad sense, the pressure sensor manufacturing apparatus according to the embodiment of the present invention manufactures a pressure sensor including a pressure sensing unit that detects a physical quantity that changes in response to pressure.

  In this regard, the physical quantity detected by the pressure sensing unit of the pressure sensor may be a pressure. In this case, the output arithmetic expression for calculating the output value (pressure value) from this pressure is an expression for correcting the pressure.

  In addition, the pressure sensor 100 manufactured by the pressure sensor manufacturing apparatus 10 of the above-described embodiment is based on the capacitance C (physical quantity) that changes in response to the pressure, the temperature T, and the output calculation formula F. The pressure value is calculated and the calculated pressure value is output as an output value. However, the present invention is not limited to this.

  For example, the pressure sensor may be configured to calculate a pressure value based on an electrostatic capacitance that changes in response to pressure and an output arithmetic expression, and output the calculated pressure value as an output value. The output calculation formula in this case does not include the parameter of the temperature T like the output calculation formula F shown in Formula 3. However, since the output calculation formula of the pressure sensor is calculated based on the capacitance and pressure acquired in each of a plurality of measurement environments (multiple chambers) having different temperatures, the output calculation formula is an expression that takes temperature into consideration. It is. Therefore, a pressure sensor using such an output calculation formula is excellent in temperature characteristics.

  The present invention relates to a pressure sensor manufacturing apparatus and method including a pressure sensing unit that detects a physical quantity that changes in response to pressure, and a computing unit that calculates an output value from the detected physical quantity of the pressure sensing unit using an output computing equation. If so, it is applicable.

DESCRIPTION OF SYMBOLS 10 Pressure sensor manufacturing apparatus 12A Calculation formula calculation chamber (1st calculation formula calculation chamber)
12B Calculation Formula Calculation Chamber (Second Calculation Formula Calculation Chamber)
12C Calculation Formula Calculation Chamber (Third Calculation Formula Calculation Chamber)
18 Pressure measuring device 50 Control unit 100 Pressure sensor C Physical quantity (capacitance)
Ps measured value

Claims (16)

A pressure sensor manufacturing apparatus for manufacturing a pressure sensor, comprising: a pressure sensing unit that detects a physical quantity that changes in response to pressure; and a computing unit that calculates an output value from the detected physical quantity of the pressure sensing unit using an output computing equation. And
A plurality of calculation formula calculation chambers each capable of accommodating the pressure sensors and maintained at different temperatures;
A common pressure measuring device for measuring the pressure of the plurality of calculation formula calculation chambers;
A physical quantity detected by a pressure sensing unit of the pressure sensor when accommodated in each of the plurality of arithmetic expression calculation chambers, and a pressure value of each of the plurality of arithmetic expression calculation chambers measured by the common pressure measuring device; And a control unit for calculating the output arithmetic expression based on the pressure sensor manufacturing apparatus. The pressure sensor further comprises a temperature sensing unit for detecting temperature,
The calculation unit of the pressure sensor calculates the output value based on the detected temperature of the temperature sensing unit, the detected physical quantity of the pressure sensing unit, and the output calculation formula,
The control unit calculates the output arithmetic expression based on a detected temperature of the temperature sensing unit, a detected physical quantity of the pressure sensing unit, and a pressure value measured by the common pressure measuring device. The pressure sensor manufacturing apparatus according to 1.   The pressure sensor manufacturing apparatus according to claim 1, wherein the physical quantity detected by the pressure sensing unit is a capacitance.   The pressure sensor manufacturing apparatus according to claim 1, wherein the physical quantity detected by the pressure sensing unit is an electrical resistance.   5. The pressure sensor manufacturing apparatus according to claim 1, wherein a distance between each of the plurality of arithmetic expression calculation chambers and the common pressure measurement device is substantially the same.   The pressure sensor is accommodated in the calculation formula calculation chamber so that the pressure detection unit of the pressure sensor in the calculation formula calculation chamber and the pressure detection unit of the common pressure measuring device have substantially the same height. The pressure sensor manufacturing apparatus according to any one of claims 1 to 5.   The pressure sensor manufacturing apparatus according to any one of claims 1 to 6, wherein the plurality of arithmetic expression calculation chambers are arranged so that height positions thereof are substantially the same.   The pressure sensor manufacturing apparatus according to any one of claims 1 to 7, further comprising a common pressure adjusting device that adjusts a pressure of each of the plurality of arithmetic expression calculation chambers. An arithmetic expression confirmation chamber that houses a pressure sensor that holds the output arithmetic expression calculated by the control unit;
Based on the difference between the output value of the pressure sensor accommodated in the arithmetic expression confirmation chamber and the pressure value of the arithmetic expression confirmation chamber, the control unit includes the pressure sensor in the arithmetic expression confirmation chamber. The pressure sensor manufacturing apparatus according to claim 1, wherein the accuracy of the output calculation formula is determined.   The pressure sensor manufacturing apparatus according to claim 9, wherein the pressure and temperature of the calculation formula confirmation chamber are different from the pressure and temperature of the calculation formula calculation chamber.   The pressure sensor manufacturing apparatus according to claim 9 or 10, wherein the pressure in the arithmetic expression confirmation chamber is measured by the common pressure measurement apparatus.   The distance between the arithmetic expression confirmation chamber and the common pressure measurement device and the distance between each of the plurality of arithmetic expression calculation chambers and the common pressure measurement device are substantially the same. The pressure sensor manufacturing apparatus described in 1.   The pressure sensor is accommodated in the arithmetic expression confirmation chamber so that the pressure sensing section of the pressure sensor in the arithmetic expression confirmation chamber and the pressure sensing section of the common pressure measuring device are substantially at the same height. The pressure sensor manufacturing apparatus according to claim 11 or 12.   The pressure sensor manufacturing according to any one of claims 11 to 13, wherein the arithmetic expression confirmation chamber and the plurality of arithmetic expression calculation chambers are arranged so that height positions thereof are substantially the same. apparatus.   The pressure adjusting device for adjusting the pressure of the arithmetic expression confirmation chamber and the pressure adjusting device for adjusting the pressure of each of the plurality of arithmetic expression calculating chambers are common. The pressure sensor manufacturing apparatus as described. A pressure sensor manufacturing method for manufacturing a pressure sensor, comprising: a pressure sensing unit that detects a physical quantity that changes in response to pressure; and a computing unit that calculates an output value from the detected physical quantity of the pressure sensing unit using an output computing equation. And
Maintain multiple calculation formula chambers at different temperatures,
The pressure sensors are sequentially accommodated in the plurality of arithmetic expression calculation chambers,
Based on the physical quantity detected by the pressure sensing unit of the pressure sensor when housed in each of the plurality of arithmetic expression calculation chambers and the pressure value of each of the plurality of arithmetic expression calculation chambers measured by a common pressure measuring device. A pressure sensor manufacturing method for calculating the output calculation formula.

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