JP6298786B2 - Liquid resin composition for electronic components and electronic component device - Google Patents
Liquid resin composition for electronic components and electronic component device Download PDFInfo
- Publication number
- JP6298786B2 JP6298786B2 JP2015046101A JP2015046101A JP6298786B2 JP 6298786 B2 JP6298786 B2 JP 6298786B2 JP 2015046101 A JP2015046101 A JP 2015046101A JP 2015046101 A JP2015046101 A JP 2015046101A JP 6298786 B2 JP6298786 B2 JP 6298786B2
- Authority
- JP
- Japan
- Prior art keywords
- vinyl ether
- ether
- resin composition
- acid
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007788 liquid Substances 0.000 title claims description 103
- 239000011342 resin composition Substances 0.000 title claims description 68
- 150000001875 compounds Chemical class 0.000 claims description 41
- 125000004432 carbon atom Chemical group C* 0.000 claims description 38
- 239000004065 semiconductor Substances 0.000 claims description 25
- 150000002430 hydrocarbons Chemical group 0.000 claims description 24
- 239000011256 inorganic filler Substances 0.000 claims description 18
- 229910003475 inorganic filler Inorganic materials 0.000 claims description 18
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 14
- 150000004982 aromatic amines Chemical class 0.000 claims description 13
- 239000004850 liquid epoxy resins (LERs) Substances 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 12
- PISLZQACAJMAIO-UHFFFAOYSA-N 2,4-diethyl-6-methylbenzene-1,3-diamine Chemical compound CCC1=CC(C)=C(N)C(CC)=C1N PISLZQACAJMAIO-UHFFFAOYSA-N 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000013329 compounding Methods 0.000 claims description 7
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 claims description 5
- 239000004215 Carbon black (E152) Substances 0.000 claims description 3
- 229930195733 hydrocarbon Natural products 0.000 claims description 3
- 229960000834 vinyl ether Drugs 0.000 description 56
- 229920000647 polyepoxide Polymers 0.000 description 53
- -1 alicyclic carboxylic acids Chemical class 0.000 description 50
- 239000003822 epoxy resin Substances 0.000 description 49
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical group C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 43
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 27
- 239000003795 chemical substances by application Substances 0.000 description 27
- 239000002245 particle Substances 0.000 description 24
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 description 20
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 description 20
- 229920005989 resin Polymers 0.000 description 19
- 239000011347 resin Substances 0.000 description 19
- 230000000694 effects Effects 0.000 description 17
- 239000000853 adhesive Substances 0.000 description 15
- 230000001070 adhesive effect Effects 0.000 description 15
- 238000002156 mixing Methods 0.000 description 15
- 239000002253 acid Substances 0.000 description 14
- 150000001412 amines Chemical class 0.000 description 13
- 238000006243 chemical reaction Methods 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 12
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 12
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 11
- 239000000047 product Substances 0.000 description 11
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 11
- 238000012360 testing method Methods 0.000 description 11
- 239000007787 solid Substances 0.000 description 10
- 238000003860 storage Methods 0.000 description 10
- 125000002947 alkylene group Chemical group 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- MWZJGRDWJVHRDV-UHFFFAOYSA-N 1,4-bis(ethenoxy)butane Chemical compound C=COCCCCOC=C MWZJGRDWJVHRDV-UHFFFAOYSA-N 0.000 description 8
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 8
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 8
- 229920001971 elastomer Polymers 0.000 description 8
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 238000000465 moulding Methods 0.000 description 8
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 8
- WLJVNTCWHIRURA-UHFFFAOYSA-N pimelic acid Chemical compound OC(=O)CCCCCC(O)=O WLJVNTCWHIRURA-UHFFFAOYSA-N 0.000 description 8
- 238000001644 13C nuclear magnetic resonance spectroscopy Methods 0.000 description 7
- 239000004593 Epoxy Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 7
- OVGRCEFMXPHEBL-UHFFFAOYSA-N 1-ethenoxypropane Chemical compound CCCOC=C OVGRCEFMXPHEBL-UHFFFAOYSA-N 0.000 description 6
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- BDJRBEYXGGNYIS-UHFFFAOYSA-N nonanedioic acid Chemical compound OC(=O)CCCCCCCC(O)=O BDJRBEYXGGNYIS-UHFFFAOYSA-N 0.000 description 6
- 229920003986 novolac Polymers 0.000 description 6
- 239000005060 rubber Substances 0.000 description 6
- CXMXRPHRNRROMY-UHFFFAOYSA-N sebacic acid Chemical compound OC(=O)CCCCCCCCC(O)=O CXMXRPHRNRROMY-UHFFFAOYSA-N 0.000 description 6
- 229920002379 silicone rubber Polymers 0.000 description 6
- 239000004945 silicone rubber Substances 0.000 description 6
- 230000035882 stress Effects 0.000 description 6
- TYFQFVWCELRYAO-UHFFFAOYSA-N suberic acid Chemical compound OC(=O)CCCCCCC(O)=O TYFQFVWCELRYAO-UHFFFAOYSA-N 0.000 description 6
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 6
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 5
- 150000008065 acid anhydrides Chemical class 0.000 description 5
- 125000000217 alkyl group Chemical group 0.000 description 5
- 125000003700 epoxy group Chemical group 0.000 description 5
- QVOHHWQAOFEPOQ-UHFFFAOYSA-N 1,3-bis(ethenoxy)butane Chemical compound C=COC(C)CCOC=C QVOHHWQAOFEPOQ-UHFFFAOYSA-N 0.000 description 4
- UZKWTJUDCOPSNM-UHFFFAOYSA-N 1-ethenoxybutane Chemical compound CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 4
- 229930185605 Bisphenol Natural products 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 4
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 239000001361 adipic acid Substances 0.000 description 4
- 235000011037 adipic acid Nutrition 0.000 description 4
- 125000003342 alkenyl group Chemical group 0.000 description 4
- UJMDYLWCYJJYMO-UHFFFAOYSA-N benzene-1,2,3-tricarboxylic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1C(O)=O UJMDYLWCYJJYMO-UHFFFAOYSA-N 0.000 description 4
- QMKYBPDZANOJGF-UHFFFAOYSA-N benzene-1,3,5-tricarboxylic acid Chemical compound OC(=O)C1=CC(C(O)=O)=CC(C(O)=O)=C1 QMKYBPDZANOJGF-UHFFFAOYSA-N 0.000 description 4
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 4
- 125000002843 carboxylic acid group Chemical group 0.000 description 4
- 150000001735 carboxylic acids Chemical class 0.000 description 4
- 238000009833 condensation Methods 0.000 description 4
- 239000011258 core-shell material Substances 0.000 description 4
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 4
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 4
- XJRBAMWJDBPFIM-UHFFFAOYSA-N methyl vinyl ether Chemical compound COC=C XJRBAMWJDBPFIM-UHFFFAOYSA-N 0.000 description 4
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 229920001296 polysiloxane Polymers 0.000 description 4
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- ARCGXLSVLAOJQL-UHFFFAOYSA-N trimellitic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 ARCGXLSVLAOJQL-UHFFFAOYSA-N 0.000 description 4
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 4
- QOYBXUIKQOIDQO-UHFFFAOYSA-N 1,3-bis(ethenoxy)propane Chemical compound C=COCCCOC=C QOYBXUIKQOIDQO-UHFFFAOYSA-N 0.000 description 3
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 3
- DSSAWHFZNWVJEC-UHFFFAOYSA-N 3-(ethenoxymethyl)heptane Chemical compound CCCCC(CC)COC=C DSSAWHFZNWVJEC-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 229920000305 Nylon 6,10 Polymers 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 3
- UMHKOAYRTRADAT-UHFFFAOYSA-N [hydroxy(octoxy)phosphoryl] octyl hydrogen phosphate Chemical compound CCCCCCCCOP(O)(=O)OP(O)(=O)OCCCCCCCC UMHKOAYRTRADAT-UHFFFAOYSA-N 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
- 238000007259 addition reaction Methods 0.000 description 3
- 229960002255 azelaic acid Drugs 0.000 description 3
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 3
- YTIVTFGABIZHHX-UHFFFAOYSA-N butynedioic acid Chemical compound OC(=O)C#CC(O)=O YTIVTFGABIZHHX-UHFFFAOYSA-N 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- 239000007822 coupling agent Substances 0.000 description 3
- 239000001530 fumaric acid Substances 0.000 description 3
- 125000000524 functional group Chemical group 0.000 description 3
- 239000005350 fused silica glass Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 238000005470 impregnation Methods 0.000 description 3
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 3
- 239000011976 maleic acid Substances 0.000 description 3
- 125000005375 organosiloxane group Chemical group 0.000 description 3
- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 239000005011 phenolic resin Substances 0.000 description 3
- 150000002989 phenols Chemical class 0.000 description 3
- 229920000058 polyacrylate Polymers 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- IQVLXQGNLCPZCL-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) 2,6-bis[(2-methylpropan-2-yl)oxycarbonylamino]hexanoate Chemical compound CC(C)(C)OC(=O)NCCCCC(NC(=O)OC(C)(C)C)C(=O)ON1C(=O)CCC1=O IQVLXQGNLCPZCL-UHFFFAOYSA-N 0.000 description 2
- PJJJSPBDXSGONK-UHFFFAOYSA-N (E)-4-ethenoxypent-2-ene Chemical compound C(=C)OC(C=CC)C PJJJSPBDXSGONK-UHFFFAOYSA-N 0.000 description 2
- YKLWPGCWVBBCTO-HWKANZROSA-N (e)-1-ethenoxyprop-1-ene Chemical compound C\C=C\OC=C YKLWPGCWVBBCTO-HWKANZROSA-N 0.000 description 2
- FGTVHMDWJMWCOV-HWKANZROSA-N (e)-7-ethenoxyhept-2-ene Chemical compound C\C=C\CCCCOC=C FGTVHMDWJMWCOV-HWKANZROSA-N 0.000 description 2
- SKYXLDSRLNRAPS-UHFFFAOYSA-N 1,2,4-trifluoro-5-methoxybenzene Chemical compound COC1=CC(F)=C(F)C=C1F SKYXLDSRLNRAPS-UHFFFAOYSA-N 0.000 description 2
- CYIGRWUIQAVBFG-UHFFFAOYSA-N 1,2-bis(2-ethenoxyethoxy)ethane Chemical compound C=COCCOCCOCCOC=C CYIGRWUIQAVBFG-UHFFFAOYSA-N 0.000 description 2
- QYIZSVDCOHZSOW-UHFFFAOYSA-N 1,2-bis(ethenoxy)-2-methylpropane Chemical compound C=COC(C)(C)COC=C QYIZSVDCOHZSOW-UHFFFAOYSA-N 0.000 description 2
- QDXYBNYKACUCOJ-UHFFFAOYSA-N 1,2-bis(ethenoxy)butane Chemical compound C=COC(CC)COC=C QDXYBNYKACUCOJ-UHFFFAOYSA-N 0.000 description 2
- ZXHDVRATSGZISC-UHFFFAOYSA-N 1,2-bis(ethenoxy)ethane Chemical compound C=COCCOC=C ZXHDVRATSGZISC-UHFFFAOYSA-N 0.000 description 2
- LXSVCBDMOGLGFA-UHFFFAOYSA-N 1,2-bis(ethenoxy)propane Chemical compound C=COC(C)COC=C LXSVCBDMOGLGFA-UHFFFAOYSA-N 0.000 description 2
- OWNPXWJVIZFPBK-UHFFFAOYSA-N 1,2-bis[2-[2-(2-ethenoxyethoxy)ethoxy]ethoxy]ethane Chemical compound C=COCCOCCOCCOCCOCCOCCOCCOC=C OWNPXWJVIZFPBK-UHFFFAOYSA-N 0.000 description 2
- YCADXCSWOBLSPP-UHFFFAOYSA-N 1,3-bis(ethenoxy)-2-methylpropane Chemical compound C=COCC(C)COC=C YCADXCSWOBLSPP-UHFFFAOYSA-N 0.000 description 2
- CGHMMUAOPPRRMX-UHFFFAOYSA-N 1,4-bis(ethenoxy)cyclohexane Chemical compound C=COC1CCC(OC=C)CC1 CGHMMUAOPPRRMX-UHFFFAOYSA-N 0.000 description 2
- DQNSRQYYCSXZDF-UHFFFAOYSA-N 1,4-bis(ethenoxymethyl)cyclohexane Chemical compound C=COCC1CCC(COC=C)CC1 DQNSRQYYCSXZDF-UHFFFAOYSA-N 0.000 description 2
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
- BJOSJQGXIADAIQ-UHFFFAOYSA-N 1,5-bis(ethenoxy)pentane Chemical compound C=COCCCCCOC=C BJOSJQGXIADAIQ-UHFFFAOYSA-N 0.000 description 2
- JOSFJABFAXRZJQ-UHFFFAOYSA-N 1,6-bis(ethenoxy)hexane Chemical compound C=COCCCCCCOC=C JOSFJABFAXRZJQ-UHFFFAOYSA-N 0.000 description 2
- NORWDHQOQKMHHH-UHFFFAOYSA-N 1-(1-ethenoxyethyl)cyclohexene Chemical compound C(=C)OC(C)C1=CCCCC1 NORWDHQOQKMHHH-UHFFFAOYSA-N 0.000 description 2
- ADGJQDAWLMKTFR-UHFFFAOYSA-N 1-(1-ethenoxyethyl)cyclopentene Chemical compound C(=C)OC(C)C1=CCCC1 ADGJQDAWLMKTFR-UHFFFAOYSA-N 0.000 description 2
- UEIPWOFSKAZYJO-UHFFFAOYSA-N 1-(2-ethenoxyethoxy)-2-[2-(2-ethenoxyethoxy)ethoxy]ethane Chemical compound C=COCCOCCOCCOCCOC=C UEIPWOFSKAZYJO-UHFFFAOYSA-N 0.000 description 2
- AYMDJPGTQFHDSA-UHFFFAOYSA-N 1-(2-ethenoxyethoxy)-2-ethoxyethane Chemical compound CCOCCOCCOC=C AYMDJPGTQFHDSA-UHFFFAOYSA-N 0.000 description 2
- UNMYKPSSIFZORM-UHFFFAOYSA-N 1-(2-ethenoxyethoxy)butane Chemical compound CCCCOCCOC=C UNMYKPSSIFZORM-UHFFFAOYSA-N 0.000 description 2
- WIYAXONDECMBFL-UHFFFAOYSA-N 1-(ethenoxymethyl)-3,4-dimethylcyclohexene Chemical compound C(=C)OCC1=CC(C(CC1)C)C WIYAXONDECMBFL-UHFFFAOYSA-N 0.000 description 2
- XBVZAHJDGDZLLH-UHFFFAOYSA-N 1-(ethenoxymethyl)-3-methylcyclohexene Chemical compound C(=C)OCC1=CC(CCC1)C XBVZAHJDGDZLLH-UHFFFAOYSA-N 0.000 description 2
- BEEJIIWFSXOAIP-UHFFFAOYSA-N 1-(ethenoxymethyl)-4-phenylbenzene Chemical compound C1=CC(COC=C)=CC=C1C1=CC=CC=C1 BEEJIIWFSXOAIP-UHFFFAOYSA-N 0.000 description 2
- OBNNIFUYDKOJJY-UHFFFAOYSA-N 1-(ethenoxymethyl)cyclohexene Chemical compound C=COCC1=CCCCC1 OBNNIFUYDKOJJY-UHFFFAOYSA-N 0.000 description 2
- RJTJPFYIGZWFMK-UHFFFAOYSA-N 1-[2-(2-ethenoxyethoxy)ethoxy]-2-methoxyethane Chemical compound COCCOCCOCCOC=C RJTJPFYIGZWFMK-UHFFFAOYSA-N 0.000 description 2
- WAKXWSHSOACKRD-UHFFFAOYSA-N 1-butyl-4-ethenoxycyclohexane Chemical compound CCCCC1CCC(OC=C)CC1 WAKXWSHSOACKRD-UHFFFAOYSA-N 0.000 description 2
- BKPOUCUMZXFOPE-UHFFFAOYSA-N 1-cyclohexyl-4-ethenoxycyclohexane Chemical compound C(=C)OC1CCC(CC1)C1CCCCC1 BKPOUCUMZXFOPE-UHFFFAOYSA-N 0.000 description 2
- GJNDXPONYMDBFD-UHFFFAOYSA-N 1-ethenoxy-2,2-dimethylpropane Chemical compound CC(C)(C)COC=C GJNDXPONYMDBFD-UHFFFAOYSA-N 0.000 description 2
- GNYZSFNRLVEEIF-UHFFFAOYSA-N 1-ethenoxy-2,3-dimethylbenzene Chemical compound CC1=CC=CC(OC=C)=C1C GNYZSFNRLVEEIF-UHFFFAOYSA-N 0.000 description 2
- VTRYNSCEPFJVQI-UHFFFAOYSA-N 1-ethenoxy-2,4-dimethylbenzene Chemical compound CC1=CC=C(OC=C)C(C)=C1 VTRYNSCEPFJVQI-UHFFFAOYSA-N 0.000 description 2
- SSOZLSNWPFIHKP-UHFFFAOYSA-N 1-ethenoxy-2,6,8-trimethylnonane Chemical compound CC(C)CC(C)CCCC(C)COC=C SSOZLSNWPFIHKP-UHFFFAOYSA-N 0.000 description 2
- SAMJGBVVQUEMGC-UHFFFAOYSA-N 1-ethenoxy-2-(2-ethenoxyethoxy)ethane Chemical compound C=COCCOCCOC=C SAMJGBVVQUEMGC-UHFFFAOYSA-N 0.000 description 2
- FOWNZLLMQHBVQT-UHFFFAOYSA-N 1-ethenoxy-2-[2-(2-ethenoxypropoxy)propoxy]propane Chemical compound C=COCC(C)OCC(C)OCC(C)OC=C FOWNZLLMQHBVQT-UHFFFAOYSA-N 0.000 description 2
- TWWWGBSUPNNTMJ-UHFFFAOYSA-N 1-ethenoxy-2-methylbenzene Chemical compound CC1=CC=CC=C1OC=C TWWWGBSUPNNTMJ-UHFFFAOYSA-N 0.000 description 2
- MCFJPSJMZXHGCW-UHFFFAOYSA-N 1-ethenoxy-2-methyloctane Chemical compound CCCCCCC(C)COC=C MCFJPSJMZXHGCW-UHFFFAOYSA-N 0.000 description 2
- OZCMOJQQLBXBKI-UHFFFAOYSA-N 1-ethenoxy-2-methylpropane Chemical compound CC(C)COC=C OZCMOJQQLBXBKI-UHFFFAOYSA-N 0.000 description 2
- ZBUCIAUZAGKZOS-UHFFFAOYSA-N 1-ethenoxy-3-methylbenzene Chemical compound CC1=CC=CC(OC=C)=C1 ZBUCIAUZAGKZOS-UHFFFAOYSA-N 0.000 description 2
- VWLRJRWNULXIMC-UHFFFAOYSA-N 1-ethenoxy-3-methylbut-2-ene Chemical compound CC(C)=CCOC=C VWLRJRWNULXIMC-UHFFFAOYSA-N 0.000 description 2
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- CRGRWBQSZSQVIE-UHFFFAOYSA-N diazomethylbenzene Chemical compound [N-]=[N+]=CC1=CC=CC=C1 CRGRWBQSZSQVIE-UHFFFAOYSA-N 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 1
- WHGNXNCOTZPEEK-UHFFFAOYSA-N dimethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](C)(OC)CCCOCC1CO1 WHGNXNCOTZPEEK-UHFFFAOYSA-N 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- HASCQPSFPAKVEK-UHFFFAOYSA-N dimethyl(phenyl)phosphine Chemical compound CP(C)C1=CC=CC=C1 HASCQPSFPAKVEK-UHFFFAOYSA-N 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- HTDKEJXHILZNPP-UHFFFAOYSA-N dioctyl hydrogen phosphate Chemical compound CCCCCCCCOP(O)(=O)OCCCCCCCC HTDKEJXHILZNPP-UHFFFAOYSA-N 0.000 description 1
- XMQYIPNJVLNWOE-UHFFFAOYSA-N dioctyl hydrogen phosphite Chemical compound CCCCCCCCOP(O)OCCCCCCCC XMQYIPNJVLNWOE-UHFFFAOYSA-N 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- NJLLQSBAHIKGKF-UHFFFAOYSA-N dipotassium dioxido(oxo)titanium Chemical compound [K+].[K+].[O-][Ti]([O-])=O NJLLQSBAHIKGKF-UHFFFAOYSA-N 0.000 description 1
- VTIXMGZYGRZMAW-UHFFFAOYSA-N ditridecyl hydrogen phosphite Chemical compound CCCCCCCCCCCCCOP(O)OCCCCCCCCCCCCC VTIXMGZYGRZMAW-UHFFFAOYSA-N 0.000 description 1
- XHWQYYPUYFYELO-UHFFFAOYSA-N ditridecyl phosphite Chemical compound CCCCCCCCCCCCCOP([O-])OCCCCCCCCCCCCC XHWQYYPUYFYELO-UHFFFAOYSA-N 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000007720 emulsion polymerization reaction Methods 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- WOXXJEVNDJOOLV-UHFFFAOYSA-N ethenyl-tris(2-methoxyethoxy)silane Chemical compound COCCO[Si](OCCOC)(OCCOC)C=C WOXXJEVNDJOOLV-UHFFFAOYSA-N 0.000 description 1
- 229940052303 ethers for general anesthesia Drugs 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- NEXSMEBSBIABKL-UHFFFAOYSA-N hexamethyldisilane Chemical compound C[Si](C)(C)[Si](C)(C)C NEXSMEBSBIABKL-UHFFFAOYSA-N 0.000 description 1
- NOKUWSXLHXMAOM-UHFFFAOYSA-N hydroxy(phenyl)silicon Chemical class O[Si]C1=CC=CC=C1 NOKUWSXLHXMAOM-UHFFFAOYSA-N 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
- 239000000347 magnesium hydroxide Substances 0.000 description 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
- UJNZOIKQAUQOCN-UHFFFAOYSA-N methyl(diphenyl)phosphane Chemical compound C=1C=CC=CC=1P(C)C1=CC=CC=C1 UJNZOIKQAUQOCN-UHFFFAOYSA-N 0.000 description 1
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- PHQOGHDTIVQXHL-UHFFFAOYSA-N n'-(3-trimethoxysilylpropyl)ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCN PHQOGHDTIVQXHL-UHFFFAOYSA-N 0.000 description 1
- LIBWSLLLJZULCP-UHFFFAOYSA-N n-(3-triethoxysilylpropyl)aniline Chemical compound CCO[Si](OCC)(OCC)CCCNC1=CC=CC=C1 LIBWSLLLJZULCP-UHFFFAOYSA-N 0.000 description 1
- KBJFYLLAMSZSOG-UHFFFAOYSA-N n-(3-trimethoxysilylpropyl)aniline Chemical compound CO[Si](OC)(OC)CCCNC1=CC=CC=C1 KBJFYLLAMSZSOG-UHFFFAOYSA-N 0.000 description 1
- KYTZHLUVELPASH-UHFFFAOYSA-N naphthalene-1,2-dicarboxylic acid Chemical compound C1=CC=CC2=C(C(O)=O)C(C(=O)O)=CC=C21 KYTZHLUVELPASH-UHFFFAOYSA-N 0.000 description 1
- NXPPAOGUKPJVDI-UHFFFAOYSA-N naphthalene-1,2-diol Chemical compound C1=CC=CC2=C(O)C(O)=CC=C21 NXPPAOGUKPJVDI-UHFFFAOYSA-N 0.000 description 1
- KHARCSTZAGNHOT-UHFFFAOYSA-N naphthalene-2,3-dicarboxylic acid Chemical compound C1=CC=C2C=C(C(O)=O)C(C(=O)O)=CC2=C1 KHARCSTZAGNHOT-UHFFFAOYSA-N 0.000 description 1
- 125000004957 naphthylene group Chemical group 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- XPPWLXNXHSNMKC-UHFFFAOYSA-N phenylboron Chemical class [B]C1=CC=CC=C1 XPPWLXNXHSNMKC-UHFFFAOYSA-N 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920003217 poly(methylsilsesquioxane) Polymers 0.000 description 1
- 229920001921 poly-methyl-phenyl-siloxane Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 239000004848 polyfunctional curative Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000003918 potentiometric titration Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 125000000467 secondary amino group Chemical group [H]N([*:1])[*:2] 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- IYMSIPPWHNIMGE-UHFFFAOYSA-N silylurea Chemical compound NC(=O)N[SiH3] IYMSIPPWHNIMGE-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- TXDNPSYEJHXKMK-UHFFFAOYSA-N sulfanylsilane Chemical compound S[SiH3] TXDNPSYEJHXKMK-UHFFFAOYSA-N 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 125000001302 tertiary amino group Chemical group 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 230000009974 thixotropic effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- GQIUQDDJKHLHTB-UHFFFAOYSA-N trichloro(ethenyl)silane Chemical compound Cl[Si](Cl)(Cl)C=C GQIUQDDJKHLHTB-UHFFFAOYSA-N 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
- 239000005050 vinyl trichlorosilane Substances 0.000 description 1
- UKRDPEFKFJNXQM-UHFFFAOYSA-N vinylsilane Chemical compound [SiH3]C=C UKRDPEFKFJNXQM-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- XAEWLETZEZXLHR-UHFFFAOYSA-N zinc;dioxido(dioxo)molybdenum Chemical compound [Zn+2].[O-][Mo]([O-])(=O)=O XAEWLETZEZXLHR-UHFFFAOYSA-N 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 150000003755 zirconium compounds Chemical class 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Epoxy Resins (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Polyesters Or Polycarbonates (AREA)
- Wire Bonding (AREA)
Description
本発明は、電子部品用液状樹脂組成物及び電子部品装置に関する。より詳しくは、厳しい信頼性を要求される電子部品装置の封止用に特に好適な電子部品用液状樹脂組成物、及びこの組成物で封止された素子を備えた電子部品装置に関する。 The present invention relates to a liquid resin composition for electronic components and an electronic component device. More specifically, the present invention relates to a liquid resin composition for electronic components that is particularly suitable for sealing electronic component devices that require strict reliability, and an electronic component device that includes an element sealed with the composition.
従来から、トランジスタ、IC等の電子部品装置の素子封止の分野では、生産性、コストなどの面から樹脂封止が主流となり、エポキシ樹脂組成物が広く用いられている。この理由としては、エポキシ樹脂が作業性、成形性、電気特性、耐湿性、耐熱性、機械特性、インサート品との接着性等の諸特性にバランスがとれているためである。COB(Chip on Board)、COG(Chip on Glass)、TCP(Tape Carrier Package)等のベアチップ実装した半導体装置においては、電子部品用液状樹脂組成物が封止材として広く使用されている。また、半導体素子をセラミック、ガラス/エポキシ樹脂、ガラス/イミド樹脂又はポリイミドフィルムなどを基板とする配線基板上に直接バンプ接続してなる半導体装置(フリップチップ)では、バンプ接続した半導体素子と配線基板の間隙(ギャップ)を充填するアンダーフィル材として電子部品用液状樹脂組成物が使用されている。これらの電子部品用液状樹脂組成物は電子部品を温湿度や機械的な外力から保護するために重要な役割を果たしている。 Conventionally, in the field of element sealing of electronic component devices such as transistors and ICs, resin sealing has been the mainstream in terms of productivity and cost, and epoxy resin compositions have been widely used. This is because the epoxy resin is balanced in various properties such as workability, moldability, electrical properties, moisture resistance, heat resistance, mechanical properties, and adhesiveness with inserts. Liquid resin compositions for electronic components are widely used as sealing materials in semiconductor devices mounted on bare chips such as COB (Chip on Board), COG (Chip on Glass), and TCP (Tape Carrier Package). Further, in a semiconductor device (flip chip) in which a semiconductor element is directly bump-connected on a wiring board using ceramic, glass / epoxy resin, glass / imide resin or polyimide film as a substrate, the bump-connected semiconductor element and wiring board A liquid resin composition for electronic parts is used as an underfill material for filling the gap. These liquid resin compositions for electronic parts play an important role in protecting electronic parts from temperature and humidity and mechanical external force.
フリップチップ実装を行なう場合、素子と基板はそれぞれ熱膨張係数が異なるため、接合部に熱応力が発生することから、接続信頼性の確保が重要な課題である。また、ベアチップは回路形成面が充分に保護されていないため、水分やイオン性不純物が浸入し易く耐湿信頼性の確保も重要な課題である。また、チップ保護のために、チップ側面にフィレットを形成するが、アンダーフィル材とチップとの熱膨張差に起因した熱応力によって、樹脂がクラックを生じ、その結果として最悪の場合、チップを破壊する恐れがある。アンダーフィル材の選定によっては温度サイクル試験などで繰り返し熱衝撃を受ける場合に接続部の保護が不充分なため、低サイクルで接合部が疲労破壊することがある。また、アンダーフィル材中にボイドが存在すると、バンプの保護が不充分なため、同様に低サイクルで接合部が疲労破壊することがある。 When flip-chip mounting is performed, the thermal expansion coefficient is different between the element and the substrate, so that thermal stress is generated at the joint. Therefore, ensuring connection reliability is an important issue. In addition, since the circuit forming surface of the bare chip is not sufficiently protected, moisture and ionic impurities are liable to enter, and ensuring moisture resistance reliability is also an important issue. In addition, a fillet is formed on the side of the chip to protect the chip, but the resin cracks due to the thermal stress caused by the difference in thermal expansion between the underfill material and the chip. As a result, in the worst case, the chip is destroyed. There is a fear. Depending on the selection of the underfill material, the joint may not be sufficiently protected when subjected to repeated thermal shocks in a temperature cycle test or the like, and the joint may be fatigued at low cycles. Further, if voids are present in the underfill material, the bumps are not sufficiently protected, and the joints may be similarly fatigued at low cycles.
上記状況の下、耐湿接着力、低応力性に優れた封止用エポキシ樹脂組成物、及びこれにより封止された素子を備えた信頼性(耐湿性、耐熱衝撃性)の高い電子部品装置を提供するため、(A)液状エポキシ樹脂、(B)液状芳香族アミンを含む硬化剤、(C)エラストマー、(D)界面活性剤を含有してなる封止用エポキシ樹脂組成物、及びこの封止用エポキシ樹脂組成物により封止された素子を備えた電子部品装置が開示されている(例えば、特許文献1参照)。 Under the above circumstances, an epoxy resin composition for sealing excellent in moisture-resistant adhesive strength and low stress resistance, and an electronic component device having high reliability (moisture resistance and thermal shock resistance) provided with an element sealed thereby In order to provide, (A) a liquid epoxy resin, (B) a curing agent containing a liquid aromatic amine, (C) an elastomer, (D) an epoxy resin composition for sealing containing a surfactant, and this sealing An electronic component device including an element sealed with a stopping epoxy resin composition is disclosed (for example, see Patent Document 1).
最近の素子の高集積度化、多機能化に伴いチップサイズが大きくなってきている一方、多ピン化によってバンプの小径化、狭ピッチ化、狭ギャップ化が、また、搭載機器の小型化に伴いチップ厚の薄型化が行なわれており、エラストマーと界面活性剤を添加したのみでは、電子部品装置の高い信頼性を確保することがますます難しくなってきている。 The chip size has increased with the recent high integration and multi-functionality of the elements, but with the increase in the number of pins, the bump diameter has been reduced, the pitch and the gap have been reduced, and the mounting equipment has also been reduced in size. Accordingly, the chip thickness has been reduced, and it has become increasingly difficult to ensure high reliability of electronic component devices only by adding an elastomer and a surfactant.
本発明は、このような事情に鑑みなされたもので、狭ギャップでの流動性が良好であり、ゲルタイムを速くすることで硬化温度の低温化を可能にし、チップにかかる熱応力を低減させ、更に成形時にボイド発生がない電子部品用液状樹脂組成物、及びこれにより封止された信頼性(耐湿性、耐温度サイクル性)の高い電子部品装置を提供することを目的とする。 The present invention has been made in view of such circumstances, the fluidity in a narrow gap is good, the gel temperature is accelerated, the curing temperature can be lowered, the thermal stress applied to the chip is reduced, It is another object of the present invention to provide a liquid resin composition for electronic components that does not generate voids during molding, and an electronic component device having high reliability (moisture resistance and temperature cycle resistance) sealed thereby.
本発明者らは、鋭意検討の結果、特定の硬化剤と硬化促進剤を含有する電子部品用液状樹脂組成物を見出した。より詳しくは、本発明は、以下に関する。
(1)(A)液状エポキシ樹脂、(B)液状芳香族アミン、及び(C)硬化促進剤として下記一般式(I)で表される構造を分子内に有する化合物を含有し、前記一般式(I)で表される構造を分子内に有する化合物が、脂肪族カルボン酸、脂環式カルボン酸、及び芳香族カルボン酸からなる群より選択される1種又は2種以上のカルボン酸類と、ビニルエーテル基を有する化合物とを、モル比(カルボン酸類:ビニルエーテル基を有する化合物)1:1.1〜1:4で付加反応させて得られる反応物である、電子部品用液状樹脂組成物。
As a result of intensive studies, the present inventors have found a liquid resin composition for electronic parts containing a specific curing agent and a curing accelerator. More specifically, the present invention relates to the following.
(1) (A) liquid epoxy resin, (B) liquid aromatic amine, and (C) a compound having a structure represented by the following general formula (I) in the molecule as a curing accelerator, The compound having a structure represented by (I) in the molecule is one or more carboxylic acids selected from the group consisting of aliphatic carboxylic acids, alicyclic carboxylic acids, and aromatic carboxylic acids; A liquid resin composition for electronic parts, which is a reaction product obtained by addition reaction of a compound having a vinyl ether group with a molar ratio (carboxylic acids: compound having a vinyl ether group) 1: 1.1 to 1: 4.
(R1及びR5はそれぞれ独立に、炭素数1〜18の二価の炭化水素基であり、R2〜R4はそれぞれ独立に、水素原子又は炭素数1〜18の一価の炭化水素基である。)
(R 1 and R 5 are each independently a divalent hydrocarbon group having 1 to 18 carbon atoms, and R 2 to R 4 are each independently a hydrogen atom or a monovalent hydrocarbon having 1 to 18 carbon atoms. Group.)
(2)前記一般式(I)で表される構造を分子内に有する化合物が、下記一般式(II)で表される化合物である上記(1)に記載の電子部品用液状樹脂組成物。 (2) The liquid resin composition for electronic components according to (1), wherein the compound having a structure represented by the general formula (I) in the molecule is a compound represented by the following general formula (II).
(R1及びR5はそれぞれ独立に、炭素数1〜18の二価の炭化水素基であり、R2〜R4及びR6〜R8はそれぞれ独立に、水素原子又は炭素数1〜18の一価の炭化水素基であり、nは1以上の整数を表す。)
(R 1 and R 5 are each independently a divalent hydrocarbon group having 1 to 18 carbon atoms, and R 2 to R 4 and R 6 to R 8 are each independently a hydrogen atom or 1 to 18 carbon atoms. A monovalent hydrocarbon group, and n represents an integer of 1 or more.)
(3)前記一般式(I)で表される構造を分子内に有する化合物が、下記一般式(VII)で表される化合物である上記(1)又は(2)に記載の電子部品用液状樹脂組成物。 (3) The liquid for electronic components according to the above (1) or (2), wherein the compound having a structure represented by the general formula (I) in the molecule is a compound represented by the following general formula (VII) Resin composition.
(R1及びR5はそれぞれ独立に、炭素数1〜18の二価の炭化水素基であり、R2〜R4及びR6〜R8はそれぞれ独立に、水素原子又は炭素数1〜18の一価の炭化水素基であり、nは1以上の整数を表す。)
(R 1 and R 5 are each independently a divalent hydrocarbon group having 1 to 18 carbon atoms, and R 2 to R 4 and R 6 to R 8 are each independently a hydrogen atom or 1 to 18 carbon atoms. A monovalent hydrocarbon group, and n represents an integer of 1 or more.)
(4)前記(B)液状芳香族アミンが、3,3’−ジエチル−4,4’−ジアミノジフェニルメタン及びジエチルトルエンジアミンの少なくともいずれか1つを含有する上記(1)〜(3)のいずれか1項に記載の電子部品用液状樹脂組成物。 (4) Any of (1) to (3) above, wherein the liquid aromatic amine (B) contains at least one of 3,3′-diethyl-4,4′-diaminodiphenylmethane and diethyltoluenediamine. 2. A liquid resin composition for electronic parts as set forth in claim 1.
(5)更に、(E)無機充填剤を含有し、該(E)無機充填剤の配合量が電子部品用液状樹脂組成物全体の50質量%以上80質量%以下の範囲にある上記(1)〜(4)のいずれか1項に記載の電子部品用液状樹脂組成物。 (5) Further, (E) an inorganic filler is contained, and the blending amount of the (E) inorganic filler is in the range of 50% by mass to 80% by mass of the whole liquid resin composition for electronic parts (1) The liquid resin composition for electronic parts of any one of (4)-(4).
(6)半導体素子の回路形成面と無機又は有機の基板の回路形成面とを対向させ、前記半導体素子の電極と前記基板の回路とがバンプを介して電気的に接続され、前記半導体素子と前記基板の隙間に上記(1)〜(5)のいずれか1項に記載の電子部品用液状樹脂組成物を封止してなる電子部品装置。 (6) The circuit formation surface of the semiconductor element and the circuit formation surface of the inorganic or organic substrate are opposed to each other, and the electrodes of the semiconductor element and the circuit of the substrate are electrically connected via bumps, The electronic component apparatus formed by sealing the liquid resin composition for electronic components of any one of said (1)-(5) in the clearance gap between the said board | substrates.
本発明の電子部品封止用液状樹脂組成物は、成形時のボイドの発生を抑制するとともに硬化温度の低温化を可能にする。また、硬化物は、吸湿による各種基材との接着力の低下が小さく、吸湿後においても各種基材との接着力が高い。よって、この電子部品封止用液状樹脂組成物を用いて電子部品を封止すれば、成形性、信頼性(耐湿性、耐温度サイクル性)の高い電子部品装置を得ることができるので、その工業的価値は大である。 The liquid resin composition for sealing an electronic component of the present invention suppresses the generation of voids during molding and enables the curing temperature to be lowered. Further, the cured product has a small decrease in adhesive strength with various substrates due to moisture absorption, and has high adhesive strength with various substrates even after moisture absorption. Therefore, if an electronic component is sealed using this liquid resin composition for sealing an electronic component, an electronic component device having high moldability and reliability (moisture resistance, temperature cycle resistance) can be obtained. Industrial value is great.
本発明は、液状エポキシ樹脂、液状芳香族アミン、硬化促進剤を含有する電子部品の封止に用いられる液状樹脂組成物に関するものであり、特定の硬化促進剤を用いることにより、ゲルタイムの短縮などの効果が得られるものである。なお、本発明における液状とは、常温(25℃)において液状であるものであり、また、反応などにより硬化した場合は、常温においても固体となる場合もある。本発明の詳細について、以下に記載する。 The present invention relates to a liquid resin composition used for sealing an electronic component containing a liquid epoxy resin, a liquid aromatic amine, and a curing accelerator. By using a specific curing accelerator, the gel time can be shortened. The effect of is obtained. The liquid in the present invention is a liquid at normal temperature (25 ° C.), and when cured by reaction or the like, it may become a solid even at normal temperature. Details of the present invention are described below.
(A)液状エポキシ樹脂
本発明で用いる(A)液状エポキシ樹脂は、1分子中に2個以上のエポキシ基を有するもので、常温において液状であれば制限はなく、電子部品用液状樹脂組成物で一般に使用されている液状エポキシ樹脂を用いることができる。本発明で使用できるエポキシ樹脂としては、例えば、ビスフェノールA、ビスフェノールF、ビスフェノールAD、ビスフェノールS、水添ビスフェノールA等のジグリシジルエーテル型エポキシ樹脂、オルソクレゾールノボラック型エポキシ樹脂を代表とするフェノール類とアルデヒド類を縮合又は共縮合させて得られるノボラック樹脂をエポキシ化したもの、フタル酸、ダイマー酸等の多塩基酸とエピクロルヒドリンの反応により得られるグリシジルエステル型エポキシ樹脂、p―アミノフェノール、ジアミノジフェニルメタン、イソシアヌル酸等のアミン化合物とエピクロルヒドリンの反応により得られるグリシジルアミン型エポキシ樹脂、オレフィン結合を過酢酸等の過酸により酸化して得られる線状脂肪族エポキシ樹脂、脂環族エポキシ樹脂などが挙げられ、これらを単独で用いても2種以上を組み合わせて用いてもよい。なかでも、流動性の観点からは液状ビスフェノール型エポキシ樹脂が好ましく、耐熱性、接着性及び流動性の観点から液状グリシジルアミン型エポキシ樹脂が好ましい。
(A) Liquid epoxy resin The (A) liquid epoxy resin used in the present invention has two or more epoxy groups in one molecule and is not limited as long as it is liquid at room temperature, and is a liquid resin composition for electronic components. The liquid epoxy resin generally used can be used. Examples of epoxy resins that can be used in the present invention include diglycidyl ether type epoxy resins such as bisphenol A, bisphenol F, bisphenol AD, bisphenol S, hydrogenated bisphenol A, and phenols typified by orthocresol novolac type epoxy resins. Epoxidized novolak resin obtained by condensation or co-condensation of aldehydes, glycidyl ester type epoxy resin obtained by reaction of polybasic acid such as phthalic acid and dimer acid and epichlorohydrin, p-aminophenol, diaminodiphenylmethane, Glycidylamine type epoxy resins obtained by reaction of amine compounds such as isocyanuric acid and epichlorohydrin, linear aliphatic epoxy resins obtained by oxidizing olefinic bonds with peracids such as peracetic acid, and alicyclic ethers. Carboxymethyl resins and the like, may be used in combination of two or more even with these alone. Among these, a liquid bisphenol type epoxy resin is preferable from the viewpoint of fluidity, and a liquid glycidylamine type epoxy resin is preferable from the viewpoint of heat resistance, adhesiveness, and fluidity.
上記した2種の液状エポキシ樹脂(液状ビスフェノール型エポキシ樹脂及び液状グリシジルアミン型エポキシ樹脂)はいずれか1種を単独で用いても2種以上を組合せて用いてもよいが、その配合量は、その性能を発揮するために液状エポキシ樹脂全量に対して合わせて20質量%以上とすることが好ましく、30質量%以上がより好ましく、50質量%以上とすることが更に好ましい。 The above two liquid epoxy resins (liquid bisphenol type epoxy resin and liquid glycidylamine type epoxy resin) may be used alone or in combination of two or more. In order to exhibit the performance, it is preferably 20% by mass or more, more preferably 30% by mass or more, and still more preferably 50% by mass or more, based on the total amount of the liquid epoxy resin.
液状エポキシ樹脂のエポキシ当量は、50以上5000以下であることが好ましく、70以上1000以下であることがより好ましく、70以上500以下であることが更に好ましい。 The epoxy equivalent of the liquid epoxy resin is preferably 50 or more and 5000 or less, more preferably 70 or more and 1000 or less, and still more preferably 70 or more and 500 or less.
また、本発明の電子部品用液状樹脂組成物には、本発明の効果が達成される範囲内であれば固形エポキシ樹脂を併用することもできるが、成形時の流動性の観点から併用する固形エポキシ樹脂はエポキシ樹脂全量に対して20質量%以下とすることが好ましい。 Further, in the liquid resin composition for electronic parts of the present invention, a solid epoxy resin can be used in combination as long as the effect of the present invention is achieved, but the solid resin used in combination from the viewpoint of fluidity during molding. The epoxy resin is preferably 20% by mass or less based on the total amount of the epoxy resin.
更に、これらのエポキシ樹脂の純度、特に加水分解性塩素量はIC等の素子上のアルミ配線腐食に係わるため少ない方が好ましく、耐湿性の優れた電子部品用液状樹脂組成物を得るためには500ppm以下であることが好ましい。ここで、加水分解性塩素量とは試料のエポキシ樹脂1gをジオキサン30mlに溶解し、1mol/L−KOHメタノール溶液5mlを添加して30分間リフラックス後、電位差滴定により求めた値を尺度としたものである。 Furthermore, the purity of these epoxy resins, particularly the amount of hydrolyzable chlorine, is preferable because it is related to corrosion of aluminum wiring on elements such as ICs, and in order to obtain a liquid resin composition for electronic parts having excellent moisture resistance. It is preferably 500 ppm or less. Here, the hydrolyzable chlorine amount was obtained by dissolving 1 g of the epoxy resin of the sample in 30 ml of dioxane, adding 5 ml of 1 mol / L-KOH methanol solution and refluxing for 30 minutes, and then using the value obtained by potentiometric titration as a scale. Is.
(B)液状芳香族アミン
本発明に用いられる(B)液状芳香族アミンは、常温で液状の芳香環を有するアミンを含むものであれば特に制限はなく、これらを例示すればジエチルトルエンジアミン、1−メチル−3,5−ジエチル−2,4−ジアミノベンゼン、1−メチル−3,5−ジエチル−2,6−ジアミノベンゼン、1,3,5−トリエチル−2,6−ジアミノベンゼン、3,3’−ジエチル−4,4’−ジアミノジフェニルメタン、3,5,3’,5’−テトラメチル−4,4’−ジアミノジフェニルメタンなどが挙げられる。これらの液状芳香族アミン化合物は、例えば、市販品として、jERキュアW(三菱化学株式会社(旧ジャパンエポキシレジン株式会社)製商品名)、カヤハードA−A、カヤハードA−B、カヤハードA−S(日本化薬株式会社製商品名)、トートアミンHM−205(東都化成株式会社製商品名)、アデカハードナーEH−101(旭電化工業株式会社製商品名)、エポミックQ−640、エポミックQ−643(三井化学株式会社製商品名)、DETDA80(Lonza社製商品名)などが入手可能で、これらは単独で用いても2種類以上を組み合わせて用いてもよい。
(B) Liquid aromatic amine (B) The liquid aromatic amine used in the present invention is not particularly limited as long as it contains an amine having a liquid aromatic ring at room temperature, and examples thereof include diethyltoluenediamine, 1-methyl-3,5-diethyl-2,4-diaminobenzene, 1-methyl-3,5-diethyl-2,6-diaminobenzene, 1,3,5-triethyl-2,6-diaminobenzene, 3 3,3′-diethyl-4,4′-diaminodiphenylmethane, 3,5,3 ′, 5′-tetramethyl-4,4′-diaminodiphenylmethane, and the like. These liquid aromatic amine compounds are, for example, jER Cure W (trade name, manufactured by Mitsubishi Chemical Corporation (former Japan Epoxy Resin Co., Ltd.), Kayahard AA, Kayahard AB, Kayahard AS, as commercially available products. (Nippon Kayaku Co., Ltd. trade name), Totoamine HM-205 (Toto Kasei Co., Ltd. trade name), Adeka Hardener EH-101 (Asahi Denka Kogyo Co., Ltd. trade name), Epomic Q-640, Epomic Q- 643 (trade name, manufactured by Mitsui Chemicals, Inc.), DETDA 80 (trade name, manufactured by Lonza) and the like are available, and these may be used alone or in combination of two or more.
そのなかでも保存安定性の観点から、3,3’−ジエチル−4,4’−ジアミノジフェニルメタン又はジエチルトルエンジアミンが好ましく、(B)液状芳香族アミンとしてこれらのいずれか又はこれらの混合物を主成分として含有することが好ましい。ジエチルトルエンジアミンとしては、3,5−ジエチルトルエン−2,4−ジアミン及び3,5−ジエチルトルエン−2,6−ジアミンが挙げられる。これらは単独で用いても混合物で用いてもよく、3,5−ジエチルトルエン−2,4−ジアミンを全(B)液状芳香族アミン中60質量%以上含むことが好ましい。 Among these, from the viewpoint of storage stability, 3,3′-diethyl-4,4′-diaminodiphenylmethane or diethyltoluenediamine is preferable, and (B) any one of these or a mixture thereof as a liquid aromatic amine is a main component. It is preferable to contain as. Examples of diethyltoluenediamine include 3,5-diethyltoluene-2,4-diamine and 3,5-diethyltoluene-2,6-diamine. These may be used alone or in a mixture, and it is preferable that 3,5-diethyltoluene-2,4-diamine is contained in 60% by mass or more in the total (B) liquid aromatic amine.
(B)液状芳香族アミンの活性水素当量は、30以上1000以下であることが好ましく、30以上500以下であることがより好ましく、30以上200以下であることが更に好ましい。 (B) The active hydrogen equivalent of the liquid aromatic amine is preferably 30 or more and 1000 or less, more preferably 30 or more and 500 or less, and still more preferably 30 or more and 200 or less.
また、本発明の電子部品用液状樹脂組成物には、本発明の効果が達成される範囲内であれば上記の液状芳香族アミンの他に、液状芳香族アミン以外のアミン系硬化剤、フェノール性硬化剤、酸無水物等の電子部品用液状樹脂組成物で一般に使用されている硬化剤を併用することができ、固形硬化剤も併用することもできる。他の硬化剤を併用する場合、(B)成分の配合量は、その性能を発揮するために硬化剤全量に対して60質量%以上とすることが好ましい。 In addition, the liquid resin composition for electronic parts of the present invention includes, in addition to the above liquid aromatic amine, an amine curing agent other than the liquid aromatic amine, phenol, as long as the effects of the present invention are achieved. Curing agents generally used in liquid resin compositions for electronic parts, such as basic curing agents and acid anhydrides, can be used in combination, and solid curing agents can also be used in combination. When other curing agents are used in combination, the blending amount of component (B) is preferably 60% by mass or more with respect to the total amount of the curing agent in order to exhibit its performance.
(A)成分を含むエポキシ樹脂と(B)成分を含む硬化剤との当量比は特に制限はないが、それぞれの未反応分を少なく抑えるために、エポキシ樹脂1.0当量に対して硬化剤を0.7当量以上1.8当量以下の範囲に設定することが好ましく、0.8当量以上1.6当量以下がより好ましく、1.0以上1.5当量以下が更に好ましい。 The equivalent ratio of the epoxy resin containing the component (A) and the curing agent containing the component (B) is not particularly limited, but the curing agent is used with respect to 1.0 equivalent of the epoxy resin in order to reduce each unreacted component. Is preferably set in the range of 0.7 equivalents to 1.8 equivalents, more preferably 0.8 equivalents to 1.6 equivalents, and even more preferably 1.0 to 1.5 equivalents.
(C)硬化促進剤
本発明に用いる(C)硬化促進剤は、下記一般式(I)で表される構造を分子内に有する硬化促進剤を含有する。
(C) Curing accelerator The (C) curing accelerator used in the present invention contains a curing accelerator having a structure represented by the following general formula (I) in the molecule.
(R1及びR5はそれぞれ独立に、炭素数1〜18の二価の炭化水素基であり、R2〜R4はそれぞれ独立に、水素原子又は炭素数1〜18の一価の炭化水素基である。)
(R 1 and R 5 are each independently a divalent hydrocarbon group having 1 to 18 carbon atoms, and R 2 to R 4 are each independently a hydrogen atom or a monovalent hydrocarbon having 1 to 18 carbon atoms. Group.)
一般式(I)で表される基としては下記一般式(III)表される構造が挙げられる。 Examples of the group represented by the general formula (I) include structures represented by the following general formula (III).
(R1及びR5はそれぞれ独立に、炭素数1〜18の二価の炭化水素基である。)
(R 1 and R 5 are each independently a divalent hydrocarbon group having 1 to 18 carbon atoms.)
一般式(I)で表される構造を分子内に有する硬化促進剤としては、具体的には、下記一般式(II)や下記一般式(IV)で表される化合物などがあり、なかでも、一般式(II)で表される化合物が硬化促進作用、保存安定性及び各種信頼性の観点からより好ましい。 Specific examples of the curing accelerator having a structure represented by the general formula (I) in the molecule include compounds represented by the following general formula (II) and the following general formula (IV). The compounds represented by the general formula (II) are more preferable from the viewpoints of curing acceleration, storage stability, and various reliability.
(R1及びR5はそれぞれ独立に、炭素数1〜18の二価の炭化水素基であり、R2〜R4及びR6〜R8はそれぞれ独立に、水素原子又は炭素数1〜18の一価の炭化水素基であり、nは1以上の整数を表す。)
(R 1 and R 5 are each independently a divalent hydrocarbon group having 1 to 18 carbon atoms, and R 2 to R 4 and R 6 to R 8 are each independently a hydrogen atom or 1 to 18 carbon atoms. A monovalent hydrocarbon group, and n represents an integer of 1 or more.)
(R1は炭素数1〜18の二価の炭化水素基であり、R2〜R4及びR11〜R13はそれぞれ独立に、水素原子又は炭素数1〜18の一価の炭化水素基であり、R9及びR10はそれぞれ独立に、炭素数1〜18の一価の炭化水素基である。)
(R 1 is a divalent hydrocarbon group having 1 to 18 carbon atoms, each R 2 to R 4 and R 11 to R 13 are independently a hydrogen atom or a monovalent hydrocarbon group having 1 to 18 carbon atoms R 9 and R 10 are each independently a monovalent hydrocarbon group having 1 to 18 carbon atoms.)
一般式(II)で表される化合物としては下記一般式(V)で表される化合物が挙げられ、一般式(V)で表される化合物としては、下記一般式(VI)で表される化合物が挙げられる。 The compound represented by the general formula (II) includes a compound represented by the following general formula (V), and the compound represented by the general formula (V) is represented by the following general formula (VI). Compounds.
(R1及びR5はそれぞれ独立に、炭素数1〜18の二価の炭化水素基であり、nは1以上の整数を表す。)
(R 1 and R 5 are each independently a divalent hydrocarbon group having 1 to 18 carbon atoms, and n represents an integer of 1 or more.)
(R1は炭素数1〜18の二価の炭化水素基であり、R9及びR10はそれぞれ独立に、炭素数1〜18の一価の炭化水素基である。)
(R 1 is a divalent hydrocarbon group having 1 to 18 carbon atoms, and R 9 and R 10 are each independently a monovalent hydrocarbon group having 1 to 18 carbon atoms.)
一般式(I)〜(VI)におけるR1及びR5の具体例として、炭素数1〜18のアルキレン基、シクロアルキレン基、アルケニレン基、シクロアルケニレン基、フェニレン基、ビフェニレン基、ナフチレン基などが挙げられる。 Specific examples of R 1 and R 5 in the general formulas (I) to (VI) include an alkylene group having 1 to 18 carbon atoms, a cycloalkylene group, an alkenylene group, a cycloalkenylene group, a phenylene group, a biphenylene group, and a naphthylene group. Can be mentioned.
前記R1としては、炭素数1〜18のアルキレン基が好ましく、炭素数1〜10のアルキレン基がより好ましく、炭素数2〜8のアルキレン基が更に好ましく、炭素数3〜5のアルキレン基が更に好ましく、プロピレン基が特に好ましい。 R 1 is preferably an alkylene group having 1 to 18 carbon atoms, more preferably an alkylene group having 1 to 10 carbon atoms, still more preferably an alkylene group having 2 to 8 carbon atoms, and an alkylene group having 3 to 5 carbon atoms. Further preferred is a propylene group.
前記R5としては、炭素数1〜18のアルキレン基が好ましく、炭素数1〜10のアルキレン基がより好ましく、炭素数2〜8のアルキレン基が更に好ましく、炭素数3〜5のアルキレン基が更に好ましく、プロピレン基又はブチレン基が特に好ましい。 R 5 is preferably an alkylene group having 1 to 18 carbon atoms, more preferably an alkylene group having 1 to 10 carbon atoms, still more preferably an alkylene group having 2 to 8 carbon atoms, and an alkylene group having 3 to 5 carbon atoms. More preferred is a propylene group or butylene group.
前記R2〜R4、R6〜R8、及びR11〜R13はそれぞれ独立に、水素原子、炭素数1〜18のアルキル基、シクロアルキル基、アルケニル基、シクロアルケニル基、フェニル基、ビフェニル基、ナフチル基などが挙げられ、水素原子又は炭素数1〜18のアルキル基が好ましく、水素原子又は炭素数1〜10のアルキル基がより好ましく、水素原子又はメチル基が更に好ましく、水素原子が特に好ましい。 R 2 to R 4 , R 6 to R 8 , and R 11 to R 13 are each independently a hydrogen atom, an alkyl group having 1 to 18 carbon atoms, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, a phenyl group, A biphenyl group, a naphthyl group, etc. are mentioned, A hydrogen atom or a C1-C18 alkyl group is preferable, A hydrogen atom or a C1-C10 alkyl group is more preferable, A hydrogen atom or a methyl group is still more preferable, A hydrogen atom Is particularly preferred.
前記R9及びR10はそれぞれ独立に、炭素数1〜18のアルキル基、シクロアルキル基、アルケニル基、シクロアルケニル基、フェニル基、ビフェニル基、ナフチル基などが挙げられ、炭素数1〜18のアルキル基又はアルケニル基が好ましく、炭素数1〜10のアルキル基又はアルケニル基がより好ましい。前記R9及びR10がエチレン性二重結合を有する場合、R9及びR10はそれぞれ独立に、炭素数1〜18のアルケニルオキシアルキル基であることが好ましく、炭素数1〜18のビニルオキシアルキル基であることがより好ましい。 R 9 and R 10 are each independently an alkyl group having 1 to 18 carbon atoms, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, a phenyl group, a biphenyl group, a naphthyl group, or the like. An alkyl group or an alkenyl group is preferable, and an alkyl group or alkenyl group having 1 to 10 carbon atoms is more preferable. When R 9 and R 10 have an ethylenic double bond, each of R 9 and R 10 is preferably independently an alkenyloxyalkyl group having 1 to 18 carbon atoms, and vinyloxy having 1 to 18 carbon atoms. More preferably, it is an alkyl group.
前記nは1以上の整数であり、1〜30の整数であることが好ましく、1〜20の整数であることがより好ましく、1〜10の整数であることが更に好ましい。 The n is an integer of 1 or more, preferably an integer of 1 to 30, more preferably an integer of 1 to 20, and still more preferably an integer of 1 to 10.
前記一般式(II)で表される構造を分子内に有する化合物のなかでも、下記一般式(VII)で表される化合物が好適である。下記一般式(VII)で表される化合物では、両末端がビニル基でカルボン酸基をブロックしているため、保存安定性及び各種信頼性の観点で優れる。 Of the compounds having a structure represented by the general formula (II) in the molecule, a compound represented by the following general formula (VII) is preferable. The compound represented by the following general formula (VII) is excellent in terms of storage stability and various reliability because both ends are blocked with carboxylic acid groups by vinyl groups.
(R1及びR5はそれぞれ独立に、炭素数1〜18の二価の炭化水素基であり、R2〜R4及びR6〜R8はそれぞれ独立に、水素原子又は炭素数1〜18の一価の炭化水素基であり、nは1以上の整数を表す。)
(R 1 and R 5 are each independently a divalent hydrocarbon group having 1 to 18 carbon atoms, and R 2 to R 4 and R 6 to R 8 are each independently a hydrogen atom or 1 to 18 carbon atoms. A monovalent hydrocarbon group, and n represents an integer of 1 or more.)
前記一般式(VII)におけるR1〜R8は、上記で説明したR1〜R8と同様であり、好適な範囲についても同様である。一般式(VII)におけるnは上記で説明したnと同様であり、好適な範囲についても同様である。 R 1 to R 8 in the general formula (VII) is the same as R 1 to R 8 described above, the same applies to the preferred range. N in the general formula (VII) is the same as n described above, and the same applies to the preferred range.
一般式(VII)で表される化合物としては下記一般式(VIII)で表される化合物が挙げられる。 Examples of the compound represented by the general formula (VII) include a compound represented by the following general formula (VIII).
一般式(VIII)におけるR1及びR5はそれぞれ独立に、炭素数1〜18の二価の炭化水素基であり、上記で説明したR1及びR5と同様であり、好適な範囲についても同様である。一般式(VIII)におけるnは1以上の整数であり、上記で説明したnと同様であり、好適な範囲についても同様である。 In the general formula (VIII), R 1 and R 5 are each independently a divalent hydrocarbon group having 1 to 18 carbon atoms, and are the same as R 1 and R 5 described above. It is the same. In the general formula (VIII), n is an integer of 1 or more, is the same as n described above, and the same applies to the preferred range.
前記一般式(I)で表される構造を有する化合物の重量平均分子量は、取り扱い性に優れた粘度とする観点から、300〜20000であることが好ましく、500〜10000であることがより好ましく、500〜5000であることが更に好ましい。 The weight average molecular weight of the compound having the structure represented by the general formula (I) is preferably 300 to 20000, more preferably 500 to 10,000, from the viewpoint of a viscosity excellent in handleability. More preferably, it is 500-5000.
前記一般式(I)で表される構造を有する化合物における残存カルボン酸率が5%以下であることが好ましく、2%以下であることがより好ましく、0.5%以下であることが更に好ましい。残存カルボン酸率の測定は、13C NMRを用いて行うことができる。測定方法は、例えば、試料約100mgを0.5mlの重アセトンに溶解し、試料管に入れ、定量性の高いインバースゲートデカップリング法を用いて、繰り返し時間を30秒以上の条件で測定し、未反応のカルボン酸のカルボニル炭素と反応により生成したカルボニル炭素の積分比を比較することにより算出することができる。 The residual carboxylic acid ratio in the compound having the structure represented by the general formula (I) is preferably 5% or less, more preferably 2% or less, and further preferably 0.5% or less. . The residual carboxylic acid ratio can be measured using 13C NMR. For example, about 100 mg of a sample is dissolved in 0.5 ml of heavy acetone, put into a sample tube, and measured using a highly quantitative inverse gate decoupling method, for example, with a repetition time of 30 seconds or more. It can be calculated by comparing the integral ratio between the carbonyl carbon of the unreacted carboxylic acid and the carbonyl carbon produced by the reaction.
本発明で使用される前記一般式(I)で表される構造を有する化合物は、これに限定されるわけではないが、カルボン酸類とビニルエーテル化合物とを付加反応させて得られる反応物であることが好ましく、例えば、50℃〜150℃の温度範囲で3〜6時間程度反応させることによって得ることができる。窒素雰囲気下で行うことができ、またキシレン等の溶媒を用いてもよい。反応は酸性リン酸エステル等の酸触媒により促進することができる。反応終点は、残存するカルボン酸を水酸化カリウムのエタノール溶液で滴定することにより決定できる。 The compound having the structure represented by the general formula (I) used in the present invention is not limited to this, but is a reaction product obtained by addition reaction of a carboxylic acid and a vinyl ether compound. For example, it can be obtained by reacting in the temperature range of 50 ° C. to 150 ° C. for about 3 to 6 hours. The reaction can be performed in a nitrogen atmosphere, and a solvent such as xylene may be used. The reaction can be accelerated by an acid catalyst such as an acidic phosphate ester. The reaction end point can be determined by titrating the remaining carboxylic acid with an ethanol solution of potassium hydroxide.
また、前記一般式(VII)で表される化合物は、ジカルボン酸類とジビニルエーテル化合物を付加反応させることで得られる。ジビニルエーテル化合物の仕込みモル量を、ジカルボン酸類の仕込みモル量よりも多くすることで、両末端がビニル基でカルボン酸基がブロックされた上記一般式(VII)で表される化合物が得られ、残存カルボン酸率を下げることができる。残存カルボン酸率を下げるためには、ジカルボン酸類の仕込みモル量に対してジビニルエーテル化合物の仕込みモル量が1倍を超えていればよく、ジカルボン酸類:ジビニルエーテル化合物の仕込みモル比は、1:1.1〜1:4であることが好ましく、1:1.2〜1:3であることがより好ましく、1:1.2〜1:2であることが更に好ましい。 The compound represented by the general formula (VII) can be obtained by addition reaction of dicarboxylic acids and divinyl ether compounds. By making the charged molar amount of the divinyl ether compound larger than the charged molar amount of the dicarboxylic acids, a compound represented by the above general formula (VII) in which both ends are vinyl groups and the carboxylic acid groups are blocked is obtained, The residual carboxylic acid ratio can be lowered. In order to reduce the residual carboxylic acid ratio, the charged molar amount of the divinyl ether compound should be more than 1 times the charged molar amount of the dicarboxylic acid, and the charged molar ratio of dicarboxylic acid: divinyl ether compound is 1: It is preferably 1.1 to 1: 4, more preferably 1: 1.2 to 1: 3, and still more preferably 1: 1.2 to 1: 2.
またビニルエーテル化合物を過剰に含むことによって、ビニルエーテル化合物が脱離しても平衡反応によりカルボン酸基がブロックされ、保存安定性に優れる。また、過剰なビニルエーテル化合物により適切な分子量で重合反応が停止するため、粘度を所望の範囲内とすることも可能である。また、残存カルボン酸率を下げるために、カルボン酸類とビニルエーテル化合物が充分に反応できるように、充分な反応時間で反応させることが好ましい。反応が進行すればこの限りではないが、例えば、反応温度が100℃で、カルボン酸類:ビニルエーテル化合物の仕込みモル比が1:1.1〜1:1.4の場合には、4時間以上で反応させることが好ましく、1:1.5〜1:4の場合には、2時間以上で反応させることが好ましい。 Further, by containing an excessive amount of the vinyl ether compound, even if the vinyl ether compound is eliminated, the carboxylic acid group is blocked by the equilibrium reaction, and the storage stability is excellent. Further, since the polymerization reaction is stopped at an appropriate molecular weight due to an excess vinyl ether compound, the viscosity can be set within a desired range. Moreover, in order to reduce the residual carboxylic acid ratio, it is preferable that the reaction is performed for a sufficient reaction time so that the carboxylic acid and the vinyl ether compound can sufficiently react. For example, when the reaction temperature is 100 ° C. and the charged molar ratio of carboxylic acid: vinyl ether compound is 1: 1.1 to 1: 1.4, the reaction time is 4 hours or more. It is preferable to make it react, and when it is 1: 1.5-1: 4, it is preferable to make it react in 2 hours or more.
上記のカルボン酸類は、1分子中にカルボキシル基を2個以上有する化合物であればよく、脂肪族カルボン酸、脂環式カルボン酸、及び芳香族カルボン酸からなるカルボン酸群より選択される1種又は2種以上が挙げられる。カルボン酸類は、例えば、マロン酸、コハク酸、アジピン酸、グルタル酸、ピメリン酸、オクタン二酸、ノナン二酸、デカン二酸、アセチレンジカルボン酸、フマル酸、マレイン酸等の脂肪族ポリカルボン酸;フタル酸、イソフタル酸、テレフタル酸、トリメリット酸、ヘミメリット酸、トリメシン酸、メロファン酸、プレーニト酸、ピロメリット酸、メリット酸、ベンゼンペンタカルボン酸、1,4−ナフタレンジカルボン酸、2,3−ナフタレンジカルボン酸、2,6−ナフタレンジカルボン酸、1,4,5,8−ナフタレンテトラカルボン酸、2,2−ビフェニルジカルボン酸、4,4−ビフェニルジカルボン酸等の芳香族ポリカルボン酸;テトラヒドロフタル酸、ヘキサヒドロフタル酸、メチルヘキサフタル酸、1,3−シクロヘキサンカルボン酸、1,4−シクロヘキサンジカルボン酸等の脂環式ポリカルボン酸;及び1分子中にカルボキシル基を2個以上有するポリエステル樹脂、アクリル樹脂、ポリエーテル樹脂、ポリアミド樹脂、シリコーン樹脂、ポリアミドイミド樹脂などが挙げられる。 Said carboxylic acid should just be a compound which has two or more carboxyl groups in 1 molecule, and is 1 type selected from the carboxylic acid group which consists of aliphatic carboxylic acid, alicyclic carboxylic acid, and aromatic carboxylic acid Or 2 or more types are mentioned. Examples of carboxylic acids include aliphatic polycarboxylic acids such as malonic acid, succinic acid, adipic acid, glutaric acid, pimelic acid, octanedioic acid, nonanedioic acid, decanedioic acid, acetylenedicarboxylic acid, fumaric acid, and maleic acid; Phthalic acid, isophthalic acid, terephthalic acid, trimellitic acid, hemimellitic acid, trimesic acid, merophanic acid, planitic acid, pyromellitic acid, meritic acid, benzenepentacarboxylic acid, 1,4-naphthalenedicarboxylic acid, 2,3- Aromatic polycarboxylic acids such as naphthalenedicarboxylic acid, 2,6-naphthalenedicarboxylic acid, 1,4,5,8-naphthalenetetracarboxylic acid, 2,2-biphenyldicarboxylic acid, 4,4-biphenyldicarboxylic acid; tetrahydrophthal Acid, hexahydrophthalic acid, methylhexaphthalic acid, 1,3-cyclohex Alicyclic polycarboxylic acids such as carboxylic acid, 1,4-cyclohexanedicarboxylic acid; and polyester resins, acrylic resins, polyether resins, polyamide resins, silicone resins, polyamideimide resins having two or more carboxyl groups in one molecule Etc.
そのなかでも硬化促進性及び保存安定性の観点から、前記カルボン酸類としては、マロン酸、コハク酸、アジピン酸、グルタル酸、ピメリン酸、オクタン二酸、ノナン二酸、デカン二酸、アセチレンジカルボン酸、フマル酸、マレイン酸、フタル酸、イソフタル酸、テレフタル酸、トリメリット酸、ヘミメリット酸、トリメシン酸、メロファン酸、プレーニト酸、ピロメリット酸、メリット酸、ベンゼンペンタカルボン酸、1,4−ナフタレンジカルボン酸、2,3−ナフタレンジカルボン酸、2,6−ナフタレンジカルボン酸、1,4,5,8−ナフタレンテトラカルボン酸、2,2−ビフェニルジカルボン酸、4,4−ビフェニルジカルボン酸が好ましく、合成後のハンドリングの観点からマロン酸、コハク酸、アジピン酸、グルタル酸、ピメリン酸、オクタン二酸、ノナン二酸、デカン二酸、アセチレンジカルボン酸、フマル酸、マレイン酸がより好ましく、合成のしやすさからアジピン酸、グルタル酸、ピメリン酸が更に好ましく、グルタル酸が特に好ましい。 Among these, from the viewpoint of curing acceleration and storage stability, the carboxylic acids include malonic acid, succinic acid, adipic acid, glutaric acid, pimelic acid, octanedioic acid, nonanedioic acid, decanedioic acid, and acetylenedicarboxylic acid. , Fumaric acid, maleic acid, phthalic acid, isophthalic acid, terephthalic acid, trimellitic acid, hemimellitic acid, trimesic acid, merophanic acid, planitic acid, pyromellitic acid, meritic acid, benzenepentacarboxylic acid, 1,4-naphthalene Dicarboxylic acid, 2,3-naphthalenedicarboxylic acid, 2,6-naphthalenedicarboxylic acid, 1,4,5,8-naphthalenetetracarboxylic acid, 2,2-biphenyldicarboxylic acid, 4,4-biphenyldicarboxylic acid are preferred, Malonic acid, succinic acid, adipic acid, glutaric acid from the viewpoint of handling after synthesis Pimelic acid, octanedioic acid, nonanedioic acid, decanedioic acid, acetylenedicarboxylic acid, fumaric acid, and maleic acid are more preferred, and adipic acid, glutaric acid, and pimelic acid are more preferred for ease of synthesis, and glutaric acid is particularly preferred. preferable.
また、上記ビニルエーテル化合物としては、メチルビニルエーテル、エチルビニルエーテル、プロピルビニルエーテル、1−プロペニルビニルエーテル、1,2−ジメチルプロピルビニルエーテル、ブチルビニルエーテル、イソブチルビニルエーテル、tert−ブチルビニルエーテル、1,3−ジメチルブチルビニルエーテル、2−エチルブチルビニルエーテル、ビニルヘキシルエーテル、イソヘキシルビニルエーテル、2−エチルヘキシルビニルエーテル、5−メチルヘキシルビニルエーテル、1−ペンチルヘキシルビニルエーテル、n−ヘプチルビニルエーテル、1−メチルヘプチルビニルエーテル、オクチルビニルエーテル、4−エチル−1−メチルオクチルビニルエーテル、2−メチルオクチルビニルエーテル、n−ノニルビニルエーテル、n−デシルビニルエーテル、ウンデシルビニルエーテル、ドデシルビニルエーテル、トリデシルビニルエーテル、ペンタデシルビニルエーテル、ビニルヘキサデシルエーテル、ヘプタデシルビニルエーテル、n−エイコシルビニルエーテル、ヘニコシルビニルエーテル、n−ドコシルビニルエーテル、トリコシルビニルエーテル、テトラコシルビニルエーテル、ビニルテトラデシルエーテル、n−ペンチルビニルエーテル、イソペンチルビニルエーテル、オクタデシルビニルエーテル、ビニル(6−メチルヘプチル)エーテル、ビニルsec−ブチルエーテル、トリエチレングリコールメチルビニルエーテル、(1,5−ジメチル−1−ビニル−4−ヘキセニル)ビニルエーテル、ビニル(1−メチルエテニル)エーテル、1−メチルアリルビニルエーテル、2−メチルアリルビニルエーテル、ビニル2−ブテニルエーテル、2−ペンテニルビニルエーテル、cis−1−メチル−2−ブテニルビニルエーテル、trans−1−メチル−2−ブテニルビニルエーテル、1−エチルアリルビニルエーテル、1,3−ジメチル−2−ブテニルビニルエーテル、1−メチル−2−ヘキセニルビニルエーテル、フェニルビニルエーテル、(6−フェニル−2−ヘキセニル)ビニルエーテル、(2,2−ジメチルプロピル)ビニルエーテル、(1−エチルプロピル)ビニルエーテル、(1−イソプロピル−2−メチルプロピル)ビニルエーテル、p−フェニルベンジルビニルエーテル、ビニル(α−メチルベンジル)エーテル、フェネチルビニルエーテル、2−フェニルプロピルビニルエーテル、3−フェニルプロピルビニルエーテル、α,α−ジメチルベンジルビニルエーテル、ビニルベンズヒドリルエーテル、2−フェニルアリルビニルエーテル、1−メチル−2−フェニルアリルビニルエーテル、グリシジルビニルエーテル、アリルビニルエーテル、3−ヘキセニルビニルエーテル、4−ヘキセニルビニルエーテル、5−ヘキセニルビニルエーテル、1−ヘプテニルビニルエーテル、2−ヘプテニルビニルエーテル、3−ヘプテニルビニルエーテル、4−ヘプテニルビニルエーテル、5−ヘプテニルビニルエーテル、6−ヘプテニルビニルエーテル、1−オクテニルビニルエーテル、2−オクテニルビニルエーテル、3−オクテニルビニルエーテル、4−オクテニルビニルエーテル、5−オクテニルビニルエーテル、6−オクテニルビニルエーテル、7−オクテニルビニルエーテル、1−ノネニルビニルエーテル、2−ノネニルビニルエーテル、3−ノネニルビニルエーテル、4−ノネニルビニルエーテル、5−ノネニルビニルエーテル、6−ノネニルビニルエーテル、7−ノネニルビニルエーテル、8−ノネニルビニルエーテル、1−デセニルビニルエーテル、2−デセニルビニルエーテル、3−デセニルビニルエーテル、4−デセニルビニルエーテル、5−デセニルビニルエーテル、6−デセニルビニルエーテル、7−デセニルビニルエーテル、8−デセニルビニルエーテル、9−デセニルビニルエーテル、1−ウンデセニルビニルエーテル、2−ウンデセニルビニルエーテル、3−ウンデセニルビニルエーテル、4−ウンデセニルビニルエーテル、5−ウンデセニルビニルエーテル、6−ウンデセニルビニルエーテル、7−ウンデセニルビニルエーテル、8−ウンデセニルビニルエーテル、9−ウンデセニルビニルエーテル、10−ウンデセニルビニルエーテル、3,6−ジオキサ−1−デセン、1−ナフチルビニルエーテル、2−ナフチルビニルエーテル、o−トリルビニルエーテル、m−トリルビニルエーテル、p−トリルビニルエーテル、2,3−キシリルビニルエーテル、2,4−キシリルビニルエーテル、ベンジルビニルエーテル、シクロヘキシルビニルエーテル、4−n−ブチルシクロヘキシルビニルエーテル、ビニル(2−シクロヘキシリデンエチル)エーテル、4−[3−(2,2,4−トリメチル)ペンチル]−シクロヘキシルビニルエーテル、4−n−ドデシルシクロヘキシルビニルエーテル、4−シクロヘキシルシクロヘキシルビニルエーテル、ビニル(シクロヘキシルメチル)エーテル、1−シクロヘキシルエチルビニルエーテル、2−シクロヘキシルエチルビニルエーテル、2−デカヒドロナフチルビニルエーテル、2−シクロペンテン−1−イルビニルエーテル、2−シクロヘキセ−1−ニルビニルエーテル、1−(シクロペンテン−1−イル)メチルビニルエーテル、1−(シクロペンテン−1−イル)エチルビニルエーテル、(1−シクロヘキセニルメチル)ビニルエーテル、[1−(1−シクロヘキセニル)エチル]ビニルエーテル、(3−メチル−1−シクロヘキセニル)メチルビニルエーテル、[(3,4−ジメチル−1−シクロヘキセン−1−イル)メチル]ビニルエーテル、[(3−メチル−4−エトキシ−1−シクロヘキセン−1−イル)メチル]ビニルエーテル、シクロヘプテ−1−ニルメチルビニルエーテル、シクロオクテ−1−ニルメチルビニルエーテル、2−シクロブチリデンエチルビニルエーテル、2−シクロペンチリデンエチルビニルエーテル、2−シクロヘキシリデン−1−メチルエチルビニルエーテル、2−シクロヘプチリデンエチルビニルエーテル、2−シクロオクチリデンエチルビニルエーテル、テルピネイルビニルエーテル、メンチルビニルエーテル、ノルボニルビニルエーテル、2−フリルビニルエーテル、3−フリルビニルエーテル、フルフリルビニルエーテル、テトラヒドロフルフリルビニルエーテル、2−チエニルビニルエーテル、3−チエニルビニルエーテル、2−テニルビニルエーテル、2−ピリジルビニルエーテル、3−ピリジルビニルエーテル、4−ピリジルビニルエーテル、2,6,8−トリメチルノニルビニルエーテル、酢酸2−(ビニルオキシ)エチル、3−メチル−2−ブテニルビニルエーテル、ビニル(3,3−ジフェニル−2−プロペニル)エーテル、N,N−ジメチル−2−(ビニルオキシ)エタンアミン、[2−(2−エトキシエトキシ)エチル]ビニルエーテル、ジビニルエーテル、エチレングリコールジビニルエーテル、ジエチレングリコールジビニルエーテル、トリエチレングリコールジビニルエーテル、テトラエチレングリコールジビニルエーテル、ヘプタエチレングリコールジビニルエーテル、1,3−プロパンジオールジビニルエーテル、プロピレングリコールジビニルエーテル、1,4−ブタンジオールジビニルエーテル、1,3−ブタンジオールジビニルエーテル、1,2−ブタンジオールジビニルエーテル、2,3−ブタンジオールジビニルエーテル、1−メチル−1,3−プロパンジオールジビニルエーテル、2−メチル−1,3−プロパンジオールジビニルエーテル、2−メチル−1,2−プロパンジオールジビニルエーテル、1,5−ペンタンジオールジビニルエーテル、1,6−ヘキサンジオールジビニルエーテル、シクロヘキサン−1,4−ジオールジビニルエーテル、シクロヘキサン−1,4−ジメタノールジビニルエーテル、p−キシレングリコールジビニルエーテル、トリプロピレングリコールジビニルエーテル、テトラプロピレングリコールジビニルエーテル、ポリプロピレングリコールジビニルエーテル、3−ビニロキシプロピルビニルエーテル、3,9−ジオキサ−1,10−ウンデカジエン、10−ビニロキシデシルビニルエーテル、12−ビニロキシオクタデシルビニルエーテル、ジプロピレングリコールジビニルエーテル、レゾルシノールジビニルエーテル、m−フェニレンビス(エチレングリコール)ジビニルエーテル、ビスフェノールAジビニルエーテル等の脂肪族ビニルエーテル化合物、脂環式ビニルエーテル化合物及び芳香族ビニルエーテル化合物などが挙げられる。 Examples of the vinyl ether compound include methyl vinyl ether, ethyl vinyl ether, propyl vinyl ether, 1-propenyl vinyl ether, 1,2-dimethylpropyl vinyl ether, butyl vinyl ether, isobutyl vinyl ether, tert-butyl vinyl ether, 1,3-dimethylbutyl vinyl ether, 2 -Ethylbutyl vinyl ether, vinyl hexyl ether, isohexyl vinyl ether, 2-ethylhexyl vinyl ether, 5-methylhexyl vinyl ether, 1-pentylhexyl vinyl ether, n-heptyl vinyl ether, 1-methylheptyl vinyl ether, octyl vinyl ether, 4-ethyl-1- Methyl octyl vinyl ether, 2-methyl octyl vinyl ether, n-nonyl vinyl Ether, n-decyl vinyl ether, undecyl vinyl ether, dodecyl vinyl ether, tridecyl vinyl ether, pentadecyl vinyl ether, vinyl hexadecyl ether, heptadecyl vinyl ether, n-eicosyl vinyl ether, henicosyl vinyl ether, n-docosyl vinyl ether, tricosyl Vinyl ether, tetracosyl vinyl ether, vinyl tetradecyl ether, n-pentyl vinyl ether, isopentyl vinyl ether, octadecyl vinyl ether, vinyl (6-methylheptyl) ether, vinyl sec-butyl ether, triethylene glycol methyl vinyl ether, (1,5-dimethyl) -1-vinyl-4-hexenyl) vinyl ether, vinyl (1-methylethenyl) ether, 1-methyl Ruallyl vinyl ether, 2-methylallyl vinyl ether, vinyl 2-butenyl ether, 2-pentenyl vinyl ether, cis-1-methyl-2-butenyl vinyl ether, trans-1-methyl-2-butenyl vinyl ether, 1-ethylallyl Vinyl ether, 1,3-dimethyl-2-butenyl vinyl ether, 1-methyl-2-hexenyl vinyl ether, phenyl vinyl ether, (6-phenyl-2-hexenyl) vinyl ether, (2,2-dimethylpropyl) vinyl ether, (1- Ethylpropyl) vinyl ether, (1-isopropyl-2-methylpropyl) vinyl ether, p-phenylbenzyl vinyl ether, vinyl (α-methylbenzyl) ether, phenethyl vinyl ether, 2-phenylpropyl vinyl Ether, 3-phenylpropyl vinyl ether, α, α-dimethylbenzyl vinyl ether, vinylbenzhydryl ether, 2-phenylallyl vinyl ether, 1-methyl-2-phenylallyl vinyl ether, glycidyl vinyl ether, allyl vinyl ether, 3-hexenyl vinyl ether, 4- Hexenyl vinyl ether, 5-hexenyl vinyl ether, 1-heptenyl vinyl ether, 2-heptenyl vinyl ether, 3-heptenyl vinyl ether, 4-heptenyl vinyl ether, 5-heptenyl vinyl ether, 6-heptenyl vinyl ether, 1-octenyl vinyl ether, 2-octenyl vinyl ether, 3-octenyl vinyl ether, 4-octenyl vinyl ether, 5-octenyl vinyl ether, -Octenyl vinyl ether, 7-octenyl vinyl ether, 1-nonenyl vinyl ether, 2-nonenyl vinyl ether, 3-nonenyl vinyl ether, 4-nonenyl vinyl ether, 5-nonenyl vinyl ether, 6-nonenyl vinyl ether, 7-none Nyl vinyl ether, 8-nonenyl vinyl ether, 1-decenyl vinyl ether, 2-decenyl vinyl ether, 3-decenyl vinyl ether, 4-decenyl vinyl ether, 5-decenyl vinyl ether, 6-decenyl vinyl ether 7-decenyl vinyl ether, 8-decenyl vinyl ether, 9-decenyl vinyl ether, 1-undecenyl vinyl ether, 2-undecenyl vinyl ether, 3-undecenyl vinyl ether, 4-undecenyl vinyl ether, 5 Undecenyl vinyl ether, 6-undecenyl vinyl ether, 7-undecenyl vinyl ether, 8-undecenyl vinyl ether, 9-undecenyl vinyl ether, 10-undecenyl vinyl ether, 3,6-dioxa-1-decene, 1-naphthyl vinyl ether, 2-naphthyl vinyl ether, o-tolyl vinyl ether, m-tolyl vinyl ether, p-tolyl vinyl ether, 2,3-xylyl vinyl ether, 2,4-xylyl vinyl ether, benzyl vinyl ether, cyclohexyl vinyl ether, 4-n -Butylcyclohexyl vinyl ether, vinyl (2-cyclohexylideneethyl) ether, 4- [3- (2,2,4-trimethyl) pentyl] -cyclohexyl vinyl ether, 4-n-dodecylcyclohexyl Xyl vinyl ether, 4-cyclohexyl cyclohexyl vinyl ether, vinyl (cyclohexyl methyl) ether, 1-cyclohexyl ethyl vinyl ether, 2-cyclohexyl ethyl vinyl ether, 2-decahydronaphthyl vinyl ether, 2-cyclopenten-1-yl vinyl ether, 2-cyclohex-1- Nyl vinyl ether, 1- (cyclopenten-1-yl) methyl vinyl ether, 1- (cyclopenten-1-yl) ethyl vinyl ether, (1-cyclohexenylmethyl) vinyl ether, [1- (1-cyclohexenyl) ethyl] vinyl ether, ( 3-methyl-1-cyclohexenyl) methyl vinyl ether, [(3,4-dimethyl-1-cyclohexen-1-yl) methyl] vinyl ether, [(3-mes -4-ethyl-1-cyclohexen-1-yl) methyl] vinyl ether, cyclohept-1-nylmethyl vinyl ether, cyclooct-1-nylmethyl vinyl ether, 2-cyclobutylidene ethyl vinyl ether, 2-cyclopentylidene ethyl vinyl ether, 2-cyclohexylidene-1-methylethyl vinyl ether, 2-cycloheptylidene ethyl vinyl ether, 2-cyclooctylidene ethyl vinyl ether, terpineyl vinyl ether, menthyl vinyl ether, norbornyl vinyl ether, 2-furyl vinyl ether, 3-furyl vinyl ether , Furfuryl vinyl ether, tetrahydrofurfuryl vinyl ether, 2-thienyl vinyl ether, 3-thienyl vinyl ether, 2-tenyl vinyl ether 2-pyridyl vinyl ether, 3-pyridyl vinyl ether, 4-pyridyl vinyl ether, 2,6,8-trimethylnonyl vinyl ether, 2- (vinyloxy) ethyl acetate, 3-methyl-2-butenyl vinyl ether, vinyl (3,3-diphenyl) -2-propenyl) ether, N, N-dimethyl-2- (vinyloxy) ethanamine, [2- (2-ethoxyethoxy) ethyl] vinyl ether, divinyl ether, ethylene glycol divinyl ether, diethylene glycol divinyl ether, triethylene glycol divinyl ether , Tetraethylene glycol divinyl ether, heptaethylene glycol divinyl ether, 1,3-propanediol divinyl ether, propylene glycol divinyl ether, 1,4-butyl Tandiol divinyl ether, 1,3-butanediol divinyl ether, 1,2-butanediol divinyl ether, 2,3-butanediol divinyl ether, 1-methyl-1,3-propanediol divinyl ether, 2-methyl-1 , 3-propanediol divinyl ether, 2-methyl-1,2-propanediol divinyl ether, 1,5-pentanediol divinyl ether, 1,6-hexanediol divinyl ether, cyclohexane-1,4-diol divinyl ether, cyclohexane -1,4-dimethanol divinyl ether, p-xylene glycol divinyl ether, tripropylene glycol divinyl ether, tetrapropylene glycol divinyl ether, polypropylene glycol divinyl ether 3-vinyloxypropyl vinyl ether, 3,9-dioxa-1,10-undecadiene, 10-vinyloxydecyl vinyl ether, 12-vinyloxyoctadecyl vinyl ether, dipropylene glycol divinyl ether, resorcinol divinyl ether, m-phenylenebis (ethylene glycol) ) Aliphatic vinyl ether compounds such as divinyl ether and bisphenol A divinyl ether, alicyclic vinyl ether compounds, and aromatic vinyl ether compounds.
そのなかでも保存安定性の観点からジビニルエーテル、エチレングリコールジビニルエーテル、ジエチレングリコールジビニルエーテル、トリエチレングリコールジビニルエーテル、テトラエチレングリコールジビニルエーテル、ヘプタエチレングリコールジビニルエーテル、1,3−プロパンジオールジビニルエーテル、プロピレングリコールジビニルエーテル、1,4−ブタンジオールジビニルエーテル、1,3−ブタンジオールジビニルエーテル、1,2−ブタンジオールジビニルエーテル、2,3−ブタンジオールジビニルエーテル、1−メチル−1,3−プロパンジオールジビニルエーテル、2−メチル−1,3−プロパンジオールジビニルエーテル、2−メチル−1,2−プロパンジオールジビニルエーテル、1,5−ペンタンジオールジビニルエーテル、1,6−ヘキサンジオールジビニルエーテル、シクロヘキサン−1,4−ジオールジビニルエーテル、シクロヘキサン−1,4−ジメタノールジビニルエーテル、p−キシレングリコールジビニルエーテル、トリプロピレングリコールジビニルエーテル、テトラプロピレングリコールジビニルエーテル、ポリプロピレングリコールジビニルエーテルといったビニルエーテル基が2つのビニルエーテル化合物が好ましく、1,4−ブタンジオールジビニルエーテルがより好ましい。 Among these, from the viewpoint of storage stability, divinyl ether, ethylene glycol divinyl ether, diethylene glycol divinyl ether, triethylene glycol divinyl ether, tetraethylene glycol divinyl ether, heptaethylene glycol divinyl ether, 1,3-propanediol divinyl ether, propylene glycol Divinyl ether, 1,4-butanediol divinyl ether, 1,3-butanediol divinyl ether, 1,2-butanediol divinyl ether, 2,3-butanediol divinyl ether, 1-methyl-1,3-propanediol di Vinyl ether, 2-methyl-1,3-propanediol divinyl ether, 2-methyl-1,2-propanediol divinyl ether, 1,5-pentane All divinyl ether, 1,6-hexanediol divinyl ether, cyclohexane-1,4-diol divinyl ether, cyclohexane-1,4-dimethanol divinyl ether, p-xylene glycol divinyl ether, tripropylene glycol divinyl ether, tetrapropylene glycol A vinyl ether compound having two vinyl ether groups such as divinyl ether and polypropylene glycol divinyl ether is preferred, and 1,4-butanediol divinyl ether is more preferred.
また、合成後のハンドリングの観点からメチルビニルエーテル、エチルビニルエーテル、プロピルビニルエーテル、1−プロペニルビニルエーテル、1,2−ジメチルプロピルビニルエーテル、ブチルビニルエーテル、イソブチルビニルエーテル、tert−ブチルビニルエーテル、1,3−ジメチルブチルビニルエーテル、2−エチルブチルビニルエーテル、ビニルヘキシルエーテル、イソヘキシルビニルエーテル、2−エチルヘキシルビニルエーテル、5−メチルヘキシルビニルエーテル、1−ペンチルヘキシルビニルエーテル、n−ヘプチルビニルエーテル、1−メチルヘプチルビニルエーテル、オクチルビニルエーテル、4−エチル−1−メチルオクチルビニルエーテル、2−メチルオクチルビニルエーテル、n−ノニルビニルエーテル、n−デシルビニルエーテル、ウンデシルビニルエーテル、ドデシルビニルエーテル、トリデシルビニルエーテル、ペンタデシルビニルエーテル、ビニルヘキサデシルエーテル、ヘプタデシルビニルエーテル、n−エイコシルビニルエーテル、ヘニコシルビニルエーテル、n−ドコシルビニルエーテル、トリコシルビニルエーテル、テトラコシルビニルエーテル、ビニルテトラデシルエーテル、n−ペンチルビニルエーテル、イソペンチルビニルエーテル、オクタデシルビニルエーテル、ビニル(6−メチルヘプチル)エーテル、ビニルsec−ブチルエーテル、トリエチレングリコールメチルビニルエーテル、(1,5−ジメチル−1−ビニル−4−ヘキセニル)ビニルエーテル、ビニル(1−メチルエテニル)エーテル、1−メチルアリルビニルエーテル、2−メチルアリルビニルエーテル、ビニル2−ブテニルエーテル、2−ペンテニルビニルエーテル、cis−1−メチル−2−ブテニルビニルエーテル、trans−1−メチル−2−ブテニルビニルエーテル、1−エチルアリルビニルエーテル、1,3−ジメチル−2−ブテニルビニルエーテル、1−メチル−2−ヘキセニルビニルエーテル、フェニルビニルエーテル、(6−フェニル−2−ヘキセニル)ビニルエーテル、(2,2−ジメチルプロピル)ビニルエーテル、(1−エチルプロピル)ビニルエーテル、(1−イソプロピル−2−メチルプロピル)ビニルエーテル、p−フェニルベンジルビニルエーテル、ビニル(α−メチルベンジル)エーテル、フェネチルビニルエーテル、2−フェニルプロピルビニルエーテル、3−フェニルプロピルビニルエーテル、α,α−ジメチルベンジルビニルエーテル、ビニルベンズヒドリルエーテル、2−フェニルアリルビニルエーテル、1−メチル−2−フェニルアリルビニルエーテル、グリシジルビニルエーテル、アリルビニルエーテル、3−ヘキセニルビニルエーテル、4−ヘキセニルビニルエーテル、5−ヘキセニルビニルエーテル、1−ヘプテニルビニルエーテル、2−ヘプテニルビニルエーテル、3−ヘプテニルビニルエーテル、4−ヘプテニルビニルエーテル、5−ヘプテニルビニルエーテル、6−ヘプテニルビニルエーテル、1−オクテニルビニルエーテル、2−オクテニルビニルエーテル、3−オクテニルビニルエーテル、4−オクテニルビニルエーテル、5−オクテニルビニルエーテル、6−オクテニルビニルエーテル、7−オクテニルビニルエーテル、1−ノネニルビニルエーテル、2−ノネニルビニルエーテル、3−ノネニルビニルエーテル、4−ノネニルビニルエーテル、5−ノネニルビニルエーテル、6−ノネニルビニルエーテル、7−ノネニルビニルエーテル、8−ノネニルビニルエーテル、1−デセニルビニルエーテル、2−デセニルビニルエーテル、3−デセニルビニルエーテル、4−デセニルビニルエーテル、5−デセニルビニルエーテル、6−デセニルビニルエーテル、7−デセニルビニルエーテル、8−デセニルビニルエーテル、9−デセニルビニルエーテル、1−ウンデセニルビニルエーテル、2−ウンデセニルビニルエーテル、3−ウンデセニルビニルエーテル、4−ウンデセニルビニルエーテル、5−ウンデセニルビニルエーテル、6−ウンデセニルビニルエーテル、7−ウンデセニルビニルエーテル、8−ウンデセニルビニルエーテル、9−ウンデセニルビニルエーテル、10−ウンデセニルビニルエーテル、3,6−ジオキサ−1−デセン、1−ナフチルビニルエーテル、2−ナフチルビニルエーテル、o−トリルビニルエーテル、m−トリルビニルエーテル、p−トリルビニルエーテル、2,3−キシリルビニルエーテル、2,4−キシリルビニルエーテル、ベンジルビニルエーテル、シクロヘキシルビニルエーテル、4−n−ブチルシクロヘキシルビニルエーテル、ビニル(2−シクロヘキシリデンエチル)エーテル、4−[3−(2,2,4−トリメチル)ペンチル]−シクロヘキシルビニルエーテル、4−n−ドデシルシクロヘキシルビニルエーテル、4−シクロヘキシルシクロヘキシルビニルエーテル、ビニル(シクロヘキシルメチル)エーテル、1−シクロヘキシルエチルビニルエーテル、2−シクロヘキシルエチルビニルエーテル、2−デカヒドロナフチルビニルエーテル、2−シクロペンテン−1−イルビニルエーテル、2−シクロヘキセ−1−ニルビニルエーテル、1−(シクロペンテン−1−イル)メチルビニルエーテル、1−(シクロペンテン−1−イル)エチルビニルエーテル、(1−シクロヘキセニルメチル)ビニルエーテル、[1−(1−シクロヘキセニル)エチル]ビニルエーテル、(3−メチル−1−シクロヘキセニル)メチルビニルエーテル、[(3,4−ジメチル−1−シクロヘキセン−1−イル)メチル]ビニルエーテル、[(3−メチル−4−エトキシ−1−シクロヘキセン−1−イル)メチル]ビニルエーテル、シクロヘプテ−1−ニルメチルビニルエーテル、シクロオクテ−1−ニルメチルビニルエーテル、2−シクロブチリデンエチルビニルエーテル、2−シクロペンチリデンエチルビニルエーテル、2−シクロヘキシリデン−1−メチルエチルビニルエーテル、2−シクロヘプチリデンエチルビニルエーテル、2−シクロオクチリデンエチルビニルエーテル、テルピネイルビニルエーテル、メンチルビニルエーテル、ノルボニルビニルエーテル、2−フリルビニルエーテル、3−フリルビニルエーテル、フルフリルビニルエーテル、テトラヒドロフルフリルビニルエーテル、2−チエニルビニルエーテル、3−チエニルビニルエーテル、2−テニルビニルエーテル、2−ピリジルビニルエーテル、3−ピリジルビニルエーテル、4−ピリジルビニルエーテル、2,6,8−トリメチルノニルビニルエーテル、酢酸2−(ビニルオキシ)エチル、3−メチル−2−ブテニルビニルエーテル、ビニル(3,3−ジフェニル−2−プロペニル)エーテル、N,N−ジメチル−2−(ビニルオキシ)エタンアミン、[2−(2−エトキシエトキシ)エチル]ビニルエーテルといったビニルエーテル基が1つのビニルエーテル化合物が好ましく、プロピルビニルエーテル、2−エチルヘキシルビニルエーテルがより好ましい。 From the viewpoint of handling after synthesis, methyl vinyl ether, ethyl vinyl ether, propyl vinyl ether, 1-propenyl vinyl ether, 1,2-dimethylpropyl vinyl ether, butyl vinyl ether, isobutyl vinyl ether, tert-butyl vinyl ether, 1,3-dimethylbutyl vinyl ether, 2-ethylbutyl vinyl ether, vinylhexyl ether, isohexyl vinyl ether, 2-ethylhexyl vinyl ether, 5-methylhexyl vinyl ether, 1-pentylhexyl vinyl ether, n-heptyl vinyl ether, 1-methylheptyl vinyl ether, octyl vinyl ether, 4-ethyl-1 -Methyl octyl vinyl ether, 2-methyl octyl vinyl ether, n-nonyl vinyl ether N-decyl vinyl ether, undecyl vinyl ether, dodecyl vinyl ether, tridecyl vinyl ether, pentadecyl vinyl ether, vinyl hexadecyl ether, heptadecyl vinyl ether, n-eicosyl vinyl ether, henicosyl vinyl ether, n-docosyl vinyl ether, tricosyl Vinyl ether, tetracosyl vinyl ether, vinyl tetradecyl ether, n-pentyl vinyl ether, isopentyl vinyl ether, octadecyl vinyl ether, vinyl (6-methylheptyl) ether, vinyl sec-butyl ether, triethylene glycol methyl vinyl ether, (1,5-dimethyl) -1-vinyl-4-hexenyl) vinyl ether, vinyl (1-methylethenyl) ether, 1-methyl Ryl vinyl ether, 2-methylallyl vinyl ether, vinyl 2-butenyl ether, 2-pentenyl vinyl ether, cis-1-methyl-2-butenyl vinyl ether, trans-1-methyl-2-butenyl vinyl ether, 1-ethylallyl vinyl ether 1,3-dimethyl-2-butenyl vinyl ether, 1-methyl-2-hexenyl vinyl ether, phenyl vinyl ether, (6-phenyl-2-hexenyl) vinyl ether, (2,2-dimethylpropyl) vinyl ether, (1-ethyl) Propyl) vinyl ether, (1-isopropyl-2-methylpropyl) vinyl ether, p-phenylbenzyl vinyl ether, vinyl (α-methylbenzyl) ether, phenethyl vinyl ether, 2-phenylpropyl vinyl Ether, 3-phenylpropyl vinyl ether, α, α-dimethylbenzyl vinyl ether, vinylbenzhydryl ether, 2-phenylallyl vinyl ether, 1-methyl-2-phenylallyl vinyl ether, glycidyl vinyl ether, allyl vinyl ether, 3-hexenyl vinyl ether, 4- Hexenyl vinyl ether, 5-hexenyl vinyl ether, 1-heptenyl vinyl ether, 2-heptenyl vinyl ether, 3-heptenyl vinyl ether, 4-heptenyl vinyl ether, 5-heptenyl vinyl ether, 6-heptenyl vinyl ether, 1-octenyl vinyl ether, 2-octenyl vinyl ether, 3-octenyl vinyl ether, 4-octenyl vinyl ether, 5-octenyl vinyl ether, 6- Octenyl vinyl ether, 7-octenyl vinyl ether, 1-nonenyl vinyl ether, 2-nonenyl vinyl ether, 3-nonenyl vinyl ether, 4-nonenyl vinyl ether, 5-nonenyl vinyl ether, 6-nonenyl vinyl ether, 7-nonenyl Vinyl ether, 8-nonenyl vinyl ether, 1-decenyl vinyl ether, 2-decenyl vinyl ether, 3-decenyl vinyl ether, 4-decenyl vinyl ether, 5-decenyl vinyl ether, 6-decenyl vinyl ether, 7-decenyl vinyl ether, 8-decenyl vinyl ether, 9-decenyl vinyl ether, 1-undecenyl vinyl ether, 2-undecenyl vinyl ether, 3-undecenyl vinyl ether, 4-undecenyl vinyl ether, 5 -U Decenyl vinyl ether, 6-undecenyl vinyl ether, 7-undecenyl vinyl ether, 8-undecenyl vinyl ether, 9-undecenyl vinyl ether, 10-undecenyl vinyl ether, 3,6-dioxa-1-decene, 1-naphthyl vinyl ether, 2-naphthyl vinyl ether, o-tolyl vinyl ether, m-tolyl vinyl ether, p-tolyl vinyl ether, 2,3-xylyl vinyl ether, 2,4-xylyl vinyl ether, benzyl vinyl ether, cyclohexyl vinyl ether, 4-n -Butylcyclohexyl vinyl ether, vinyl (2-cyclohexylideneethyl) ether, 4- [3- (2,2,4-trimethyl) pentyl] -cyclohexyl vinyl ether, 4-n-dodecylcyclohexyl Vinyl ether, 4-cyclohexyl cyclohexyl vinyl ether, vinyl (cyclohexyl methyl) ether, 1-cyclohexyl ethyl vinyl ether, 2-cyclohexyl ethyl vinyl ether, 2-decahydronaphthyl vinyl ether, 2-cyclopenten-1-yl vinyl ether, 2-cyclohex-1- Nyl vinyl ether, 1- (cyclopenten-1-yl) methyl vinyl ether, 1- (cyclopenten-1-yl) ethyl vinyl ether, (1-cyclohexenylmethyl) vinyl ether, [1- (1-cyclohexenyl) ethyl] vinyl ether, ( 3-methyl-1-cyclohexenyl) methyl vinyl ether, [(3,4-dimethyl-1-cyclohexen-1-yl) methyl] vinyl ether, [(3-methyl 4-ethoxy-1-cyclohexen-1-yl) methyl] vinyl ether, cyclohept-1-nylmethyl vinyl ether, cyclooct-1-nylmethyl vinyl ether, 2-cyclobutylidene ethyl vinyl ether, 2-cyclopentylidene ethyl vinyl ether, 2- Cyclohexylidene-1-methyl ethyl vinyl ether, 2-cycloheptylidene ethyl vinyl ether, 2-cyclooctylidene ethyl vinyl ether, terpineyl vinyl ether, menthyl vinyl ether, norbornyl vinyl ether, 2-furyl vinyl ether, 3-furyl vinyl ether, full Furyl vinyl ether, tetrahydrofurfuryl vinyl ether, 2-thienyl vinyl ether, 3-thienyl vinyl ether, 2-thenyl vinyl ether, 2 Pyridyl vinyl ether, 3-pyridyl vinyl ether, 4-pyridyl vinyl ether, 2,6,8-trimethylnonyl vinyl ether, 2- (vinyloxy) ethyl acetate, 3-methyl-2-butenyl vinyl ether, vinyl (3,3-diphenyl-2 -Propenyl) ether, N, N-dimethyl-2- (vinyloxy) ethanamine, and [2- (2-ethoxyethoxy) ethyl] vinyl ether are preferably one vinyl ether group, more preferably propyl vinyl ether and 2-ethylhexyl vinyl ether. preferable.
一般式(I)で表される構造を有する化合物は、カルボン酸由来の部位が硬化促進剤としての役割を有し、ビニルエーテル由来の部位がカルボン酸をブロックし、保存安定性を向上する役割を果たしていると予測される。電子部品用液状樹脂組成物の保存時には、カルボキシル基がビニルエーテル基によりブロックされることにより、硬化促進剤としての効果が発揮されず、一方で電子部品用液状樹脂組成物を硬化させる際には、加熱することにより該ブロックが外れ、硬化促進剤としての効果が得られると考えられる。 In the compound having the structure represented by the general formula (I), a site derived from a carboxylic acid has a role as a curing accelerator, a site derived from a vinyl ether blocks a carboxylic acid, and plays a role of improving storage stability. Expected to play. At the time of storage of the liquid resin composition for electronic parts, the carboxyl group is blocked by the vinyl ether group, so that the effect as a curing accelerator is not exhibited, while when the liquid resin composition for electronic parts is cured, It is considered that the block is removed by heating, and an effect as a curing accelerator is obtained.
また、本発明の電子部品用液状樹脂組成物には、本発明の効果が達成される範囲内であれば(C)成分は、更に従来公知の硬化促進剤も併用することができる。これらを例示すれば1,8−ジアザ−ビシクロ[5.4.0]ウンデセン−7、1,5−ジアザ−ビシクロ[4.3.0]ノネン、5、6−ジブチルアミノ−1,8−ジアザ−ビシクロ[5.4.0]ウンデセン−7等のシクロアミジン化合物、トリエチレンジアミン、ベンジルジメチルアミン、トリエタノールアミン、ジメチルアミノエタノール、トリス(ジメチルアミノメチル)フェノール等の三級アミン化合物、2−メチルイミダゾール、2−エチル−4−メチルイミダゾール、2−フェニルイミダゾール、2−フェニル−4−メチルイミダゾール、2−フェニル−4−メチル−ヒドロキシイミダゾール、1−ベンジルー2−フェニルイミダゾール、1−ベンジルー2−メチルイミダゾール、2−フェニル−4,5−ジヒドロキシメチルイミダゾール、2−フェニル−4−メチル−5−ヒドロキシメチルイミダゾール、2,4−ジアミノ−6−(2’−メチルイミダゾリル−1’)−エチル−s−トリアジン、2−ヘプタデシルイミダゾール等のイミダゾール化合物、トリブチルホスフィン等のトリアルキルホスフィン、ジメチルフェニルホスフィン等のジアルキルアリールホスフィン、メチルジフェニルホスフィン等のアルキルジアリールホスフィン、トリフェニルホスフィン、アルキル基置換トリフェニルホスフィン等の有機ホスフィン類、及びこれらの化合物に無水マレイン酸、1,4−ベンゾキノン、2,5−トルキノン、1,4−ナフトキノン、2,3−ジメチルベンゾキノン、2,6−ジメチルベンゾキノン、2,3−ジメトキシ−5−メチル−1,4−ベンゾキノン、2,3−ジメトキシ−1,4−ベンゾキノン、フェニル−1,4−ベンゾキノン等のキノン化合物、ジアゾフェニルメタン、フェノール樹脂等のπ結合をもつ化合物を付加してなる分子内分極を有する化合物、及びこれらの誘導体などが挙げられ、更には2−エチル−4−メチルイミダゾールテトラフェニルボレート、N−メチルモルホリンテトラフェニルボレート等のフェニルボロン塩などが挙げられる。また、潜在性を有する硬化促進剤として、常温固体のアミノ基を有する化合物をコアとして、常温固体のエポキシ化合物のシェルを被覆してなるコア−シェル粒子が挙げられ、市販品としてアミキュア(味の素株式会社製、商品名)、マイクロカプセル化されたアミンをビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂に分散させたノバキュア(旭化成ケミカルズ株式会社製、商品名)などが使用できる。 Further, in the liquid resin composition for electronic parts of the present invention, the component (C) can be used in combination with a conventionally known curing accelerator as long as the effect of the present invention is achieved. For example, 1,8-diaza-bicyclo [5.4.0] undecene-7, 1,5-diaza-bicyclo [4.3.0] nonene, 5,6-dibutylamino-1,8- Cycloamidine compounds such as diaza-bicyclo [5.4.0] undecene-7, tertiary amine compounds such as triethylenediamine, benzyldimethylamine, triethanolamine, dimethylaminoethanol, tris (dimethylaminomethyl) phenol, 2- Methylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 2-phenyl-4-methyl-hydroxyimidazole, 1-benzyl-2-phenylimidazole, 1-benzyl-2- Methylimidazole, 2-phenyl-4,5-dihydroxymethyl Imidazole compounds such as imidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole, 2,4-diamino-6- (2′-methylimidazolyl-1 ′)-ethyl-s-triazine, 2-heptadecylimidazole, etc. , Trialkylphosphine such as tributylphosphine, dialkylarylphosphine such as dimethylphenylphosphine, alkyldiarylphosphine such as methyldiphenylphosphine, organic phosphines such as triphenylphosphine and alkyl-substituted triphenylphosphine, and anhydrous maleic compounds thereof Acid, 1,4-benzoquinone, 2,5-toluquinone, 1,4-naphthoquinone, 2,3-dimethylbenzoquinone, 2,6-dimethylbenzoquinone, 2,3-dimethoxy-5-methyl-1,4-benzo Compound having intramolecular polarization formed by adding a quinone compound such as non, 2,3-dimethoxy-1,4-benzoquinone and phenyl-1,4-benzoquinone, a compound having a π bond such as diazophenylmethane and phenol resin , And derivatives thereof, and further, phenylboron salts such as 2-ethyl-4-methylimidazole tetraphenylborate and N-methylmorpholine tetraphenylborate. Moreover, as a curing accelerator having a potential, core-shell particles formed by coating a shell having a normal temperature solid amino group as a core and a shell of a normal temperature solid epoxy compound can be cited. Amicure (Ajinomoto Co., Inc.) is commercially available. Novacure (trade name, manufactured by Asahi Kasei Chemicals Co., Ltd.) in which a microencapsulated amine is dispersed in a bisphenol A type epoxy resin or a bisphenol F type epoxy resin can be used.
(C)硬化促進剤の配合量は、硬化促進効果が達成される量であれば特に制限されるものではないが、全エポキシ樹脂の質量に対して0.2質量%〜20質量%の範囲が好ましく、0.5質量%〜17質量%の範囲がより好ましく、6質量%〜16質量%の範囲が更に好ましい。0.2質量%以上含有することで硬化促進剤の添加効果が充分に発揮することができ、結果として成形時のボイド発生の抑制や、反り低減効果を充分に得られやすくなる。20質量%以下であることで保存安定性に優れる。 (C) Although the compounding quantity of a hardening accelerator will not be restrict | limited especially if the hardening acceleration effect is achieved, it is the range of 0.2 mass%-20 mass% with respect to the mass of all the epoxy resins. Is preferable, the range of 0.5% by mass to 17% by mass is more preferable, and the range of 6% by mass to 16% by mass is still more preferable. When the content is 0.2% by mass or more, the effect of adding the curing accelerator can be sufficiently exerted, and as a result, the generation of voids during molding and the effect of reducing warpage can be sufficiently obtained. It is excellent in storage stability by being 20 mass% or less.
(E)無機充填剤
更に、熱膨張係数の低減などの観点から(E)無機充填剤を含むことが好ましい。無機充填剤としては、例えば、溶融シリカ、結晶シリカ等のシリカ、炭酸カルシウム、クレー、アルミナ、窒化珪素、炭化珪素、窒化ホウ素、珪酸カルシウム、チタン酸カリウム、窒化アルミ、ベリリア、ジルコニア、ジルコン、フォステライト、ステアタイト、スピネル、ムライト、チタニアなどがあり、これらの粉体、又はこれらを球形化したビーズの他、ガラス繊維などが挙げられる。更に、難燃効果のある無機充填剤としては水酸化アルミニウム、水酸化マグネシウム、硼酸亜鉛、モリブデン酸亜鉛などが挙げられる。これらの無機充填剤は単独で用いても2種類以上を組み合わせて用いてもよい。なかでも溶融シリカが好ましく、電子部品用液状樹脂組成物の微細間隙への流動性・浸透性の観点からは球形シリカがより好ましい。
(E) Inorganic filler Furthermore, it is preferable that (E) inorganic filler is included from viewpoints, such as reduction of a thermal expansion coefficient. Examples of inorganic fillers include silica such as fused silica and crystalline silica, calcium carbonate, clay, alumina, silicon nitride, silicon carbide, boron nitride, calcium silicate, potassium titanate, aluminum nitride, beryllia, zirconia, zircon, phosphor. There are stellite, steatite, spinel, mullite, titania, and the like. In addition to these powders or beads obtained by spheroidizing these, glass fibers and the like can be mentioned. Furthermore, examples of the inorganic filler having a flame retardant effect include aluminum hydroxide, magnesium hydroxide, zinc borate, and zinc molybdate. These inorganic fillers may be used alone or in combination of two or more. Of these, fused silica is preferred, and spherical silica is more preferred from the viewpoint of fluidity and permeability into the fine gaps of the liquid resin composition for electronic components.
無機充填剤の体積平均粒径は、特に球形シリカの場合、0.1μm以上10μm以下の範囲が好ましく、体積平均粒径0.3μm以上5μm以下の範囲がより好ましく、0.5μm以上3μm以下の範囲が更に好ましい。体積平均粒径が0.1μm以上とすることで液状樹脂への分散性に優れ、電子部品用液状樹脂組成物にチキソトロピック性が付与されにくく、流動特性に優れる効果が得られる。10μm以下とすることで、電子部品用液状樹脂組成物中での無機充填剤の沈降を低減でき、電子部品用液状樹脂組成物としての微細間隙への浸透性・流動性が向上してボイド・未充填を防止できる傾向がある。 The volume average particle diameter of the inorganic filler is preferably in the range of 0.1 μm to 10 μm, more preferably in the range of 0.3 μm to 5 μm, and more preferably in the range of 0.5 μm to 3 μm, particularly in the case of spherical silica. A range is more preferred. When the volume average particle size is 0.1 μm or more, the dispersibility in the liquid resin is excellent, the thixotropic property is hardly imparted to the liquid resin composition for electronic parts, and the effect of excellent flow characteristics is obtained. By setting the thickness to 10 μm or less, the sedimentation of the inorganic filler in the liquid resin composition for electronic parts can be reduced, and the permeability and fluidity to the fine gap as the liquid resin composition for electronic parts can be improved. There is a tendency to prevent unfilling.
無機充填剤の配合量は、電子部品用液状樹脂組成物全体の50質量%以上80質量%以下の範囲に設定することが好ましい。無機充填剤の配合量を55質量%以上75質量%以下に限定することが好ましく、更に好ましくは60質量%以上70質量%以下である。配合量が50質量%以上とすることで熱膨張係数の低減効果が得られやすく、80質量%を以下とすることで電子部品用液状樹脂組成物の粘度が上昇を防ぎ、流動性・浸透性及びディスペンス性の良好となる。 The blending amount of the inorganic filler is preferably set in the range of 50% by mass or more and 80% by mass or less of the entire liquid resin composition for electronic parts. The blending amount of the inorganic filler is preferably limited to 55% by mass to 75% by mass, and more preferably 60% by mass to 70% by mass. When the blending amount is 50% by mass or more, an effect of reducing the thermal expansion coefficient is easily obtained, and when the blending amount is 80% by mass or less, the viscosity of the liquid resin composition for electronic parts is prevented from increasing, and the fluidity and permeability In addition, the dispensing property is improved.
(F)その他添加剤
本発明の電子部品用液状樹脂組成物には耐熱衝撃性向上、半導体素子への応力低減などの観点から各種可撓剤を配合することができる。可撓剤としては、特に制限は無いがゴム粒子が好ましく、それらを例示すればスチレン−ブタジエンゴム(SBR)、ニトリル−ブタジエンゴム(NBR)、ブタジエンゴム(BR)、ウレタンゴム(UR)、アクリルゴム(AR)等のゴム粒子が挙げられる。なかでも耐熱性、耐湿性の観点からアクリルゴムからなるゴム粒子が好ましく、コアシェル型アクリル系重合体、すなわちコアシェル型アクリルゴム粒子がより好ましい。
(F) Other Additives Various flexible agents can be blended in the liquid resin composition for electronic parts of the present invention from the viewpoint of improving thermal shock resistance and reducing stress on semiconductor elements. The flexible agent is not particularly limited, but rubber particles are preferable. Examples thereof include styrene-butadiene rubber (SBR), nitrile-butadiene rubber (NBR), butadiene rubber (BR), urethane rubber (UR), and acrylic. Examples thereof include rubber particles such as rubber (AR). Among these, rubber particles made of acrylic rubber are preferable from the viewpoint of heat resistance and moisture resistance, and core-shell type acrylic polymers, that is, core-shell type acrylic rubber particles are more preferable.
また、上記以外のゴム粒子としてシリコーンゴム粒子も好適に用いることができ、それらを例示すれば、直鎖状のポリジメチルシロキサン、ポリメチルフェニルシロキサン、ポリジフェニルシロキサン等のポリオルガノシロキサンを架橋したシリコーンゴム粒子、シリコーンゴム粒子の表面をシリコーンレジンで被覆したもの、シリコーンゴム粒子の表面をエポキシ基で修飾したもの、乳化重合などで得られる固形シリコーン粒子のコアとアクリル樹脂等の有機重合体のシェルからなるコア−シェル重合体粒子などが挙げられる。 Silicone rubber particles can also be suitably used as the rubber particles other than those described above. For example, silicones obtained by crosslinking polyorganosiloxanes such as linear polydimethylsiloxane, polymethylphenylsiloxane, polydiphenylsiloxane, etc. Rubber particle, silicone rubber particle surface coated with silicone resin, silicone rubber particle surface modified with epoxy group, solid silicone particle core obtained by emulsion polymerization and organic polymer shell such as acrylic resin And core-shell polymer particles.
これらのシリコーンゴム粒子の形状は無定形であっても球形であっても使用することができるが、電子部品用液状樹脂組成物の成形性に関わる粘度を低く抑えるためには球形のものを用いることが好ましい。これらのシリコーン重合体粒子は東レ・ダウコーニング・シリコーン株式会社、信越化学工業株式会社などから市販品が入手可能である。 These silicone rubber particles can be used in an amorphous or spherical shape, but in order to keep the viscosity related to the moldability of the liquid resin composition for electronic parts low, use a spherical one. It is preferable. These silicone polymer particles are commercially available from Toray Dow Corning Silicone Co., Ltd. and Shin-Etsu Chemical Co., Ltd.
シリコーンゴム粒子の体積平均粒径は、耐熱衝撃性向上、半導体素子への応力低減などの観点から、0.001μm以上100μm以下であることが好ましく、0.01μm以上50μm以下であることがより好ましく、0.05μm以上10μm以下であることが更に好ましい。 The volume average particle size of the silicone rubber particles is preferably 0.001 μm or more and 100 μm or less, more preferably 0.01 μm or more and 50 μm or less, from the viewpoint of improving thermal shock resistance and reducing stress on the semiconductor element. And more preferably 0.05 μm or more and 10 μm or less.
また、必要に応じ、界面活性剤としての効果を持つシリコーン変性エポキシ樹脂を添加することが好ましい。シリコーン変性エポキシ樹脂は、エポキシ基と反応する官能基を有するオルガノシロキサンとエポキシ樹脂との反応物として得ることができる。このシリコーン変性エポキシ樹脂は、常温で液状であることが好ましい。エポキシ基と反応する官能基を有するオルガノシロキサンを例示すれば、アミノ基、カルボキシル基、水酸基、フェノール性水酸基、メルカプト基等の官能基を1分子中に1個以上有するジメチルシロキサン、ジフェニルシロキサン、メチルフェニルシロキサンなどが挙げられる。該オルガノシロキサンの重量平均分子量としては500以上5000以下の範囲が好ましい。この理由としては、500以上5000以下とすることで樹脂系との相溶性が適度であるためである。重量平均分子量が500以上では、樹脂系と適度に相溶し、添加剤としての効果が適切に発揮される。重量平均分子量が5000以下では、樹脂系に非相溶となるのが抑えられシリコーン変性エポキシ樹脂が成形時に分離したり染み出したりするのを抑制し、接着性や外観に優れるためである。 Moreover, it is preferable to add a silicone-modified epoxy resin having an effect as a surfactant as required. The silicone-modified epoxy resin can be obtained as a reaction product of an organosiloxane having a functional group that reacts with an epoxy group and an epoxy resin. This silicone-modified epoxy resin is preferably liquid at normal temperature. Examples of organosiloxanes having functional groups that react with epoxy groups include dimethylsiloxane, diphenylsiloxane, methyl having at least one functional group such as amino group, carboxyl group, hydroxyl group, phenolic hydroxyl group, and mercapto group in one molecule. Examples include phenylsiloxane. The weight average molecular weight of the organosiloxane is preferably in the range of 500 or more and 5000 or less. The reason for this is that the compatibility with the resin system is moderate by setting it to 500 or more and 5000 or less. When the weight average molecular weight is 500 or more, the resin system is properly compatible with the resin, and the effect as an additive is appropriately exhibited. When the weight average molecular weight is 5000 or less, incompatibility with the resin system is suppressed, and the silicone-modified epoxy resin is prevented from being separated or exuded at the time of molding, and the adhesiveness and appearance are excellent.
前記シリコーン変性エポキシ樹脂を得るためのエポキシ樹脂としては、電子部品用液状樹脂組成物の樹脂系に相溶するものであれば特に制限は無く、電子部品用液状樹脂組成物に一般に使用されているエポキシ樹脂を用いることができる。例えば、ビスフェノールA、ビスフェノールF、ビスフェノールAD、ビスフェノールS、ナフタレンジオール、水添ビスフェノールA等のフェノール類とエピクロルヒドリンの反応により得られるグリシジルエーテル型エポキシ樹脂、オルソクレゾールノボラック型エポキシ樹脂をはじめとするフェノール類とアルデヒド類とを縮合又は共縮合させて得られるノボラック樹脂をエポキシ化したノボラック型エポキシ樹脂、フタル酸、ダイマー酸等の多塩基酸とエピクロルヒドリンの反応により得られるグリシジルエステル型エポキシ樹脂、ジアミノジフェニルメタン、イソシアヌル酸等のポリアミンとエピクロルヒドリンの反応により得られるグリシジルアミン型エポキシ樹脂、オレフィン結合を過酢酸等の過酸で酸化して得られる線状脂肪族エポキシ樹脂、脂環族エポキシ樹脂などが挙げられる。これらを単独で用いても2種以上を組み合わせて用いてもよく、常温液状のものが好ましい。 The epoxy resin for obtaining the silicone-modified epoxy resin is not particularly limited as long as it is compatible with the resin system of the liquid resin composition for electronic parts, and is generally used for the liquid resin composition for electronic parts. Epoxy resin can be used. For example, phenols such as glycidyl ether type epoxy resins and orthocresol novolak type epoxy resins obtained by reaction of phenols such as bisphenol A, bisphenol F, bisphenol AD, bisphenol S, naphthalene diol, hydrogenated bisphenol A and epichlorohydrin. A novolak type epoxy resin obtained by epoxidizing a novolak resin obtained by condensation or co-condensation with aldehydes, a glycidyl ester type epoxy resin obtained by reaction of a polybasic acid such as phthalic acid or dimer acid and epichlorohydrin, diaminodiphenylmethane, Glycidylamine-type epoxy resin obtained by reaction of polyamines such as isocyanuric acid and epichlorohydrin, linear fat obtained by oxidizing olefinic bonds with peracids such as peracetic acid Family epoxy resin, alicyclic epoxy resin. These may be used alone or in combination of two or more, and those at room temperature are preferred.
シリコーン変性エポキシ樹脂の添加量は電子部品用液状樹脂組成物全体に対して、0.01質量%以上1.5質量%以下が好ましく、0.05質量%以上1質量%以下がより好ましい。0.01質量%以上とすることで充分な添加効果が得られ、1.5質量%以下とすることで硬化時に硬化物表面からの染み出しの発生を防止し、接着力の低下を防止できる。本発明の効果が得られる範囲であれば、シリコーン変性エポキシ樹脂以外にも、界面活性剤としての効果を持つ添加剤を添加することができる。 The addition amount of the silicone-modified epoxy resin is preferably 0.01% by mass or more and 1.5% by mass or less, and more preferably 0.05% by mass or more and 1% by mass or less with respect to the entire liquid resin composition for electronic components. A sufficient addition effect can be obtained by setting the content to 0.01% by mass or more. By setting the content to 1.5% by mass or less, occurrence of bleeding from the surface of the cured product at the time of curing can be prevented, and a decrease in adhesive strength can be prevented. . As long as the effect of the present invention is obtained, an additive having an effect as a surfactant can be added in addition to the silicone-modified epoxy resin.
本発明の電子部品用液状樹脂組成物には必要に応じて、樹脂と無機充填剤或いは樹脂と電子部品の構成部材との界面接着を強固にする目的でカップリング剤を使用することが好ましい。これらのカップリング剤には特に制限はなく、従来公知のものを用いることができるが、たとえば、1級及び/又は2級及び/又は3級アミノ基を有するシラン化合物、エポキシシラン、メルカプトシラン、アルキルシラン、ウレイドシラン、ビニルシラン等の各種シラン系化合物、チタン系化合物、アルミニウムキレート類、アルミニウム/ジルコニウム系化合物などが挙げられる。これらを例示すると、ビニルトリクロロシラン、ビニルトリエトキシシラン、ビニルトリス(β−メトキシエトキシ)シラン、γ−メタクリロキシプロピルトリメトキシシラン、β−(3,4−エポキシシクロヘキシル)エチルトリメトキシシラン、γ−グリシドキシプロピルトリメトキシシラン、γ−グリシドキシプロピルメチルジメトキシシラン、ビニルトリアセトキシシラン、γ−メルカプトプロピルトリメトキシシラン、γ−アミノプロピルトリメトキシシラン、γ−アミノプロピルメチルジメトキシシラン、γ−アミノプロピルトリエトキシシラン、γ−アミノプロピルメチルジエトキシシラン、γ−アニリノプロピルトリメトキシシラン、γ−アニリノプロピルトリエトキシシラン、γ−(N,N−ジメチル)アミノプロピルトリメトキシシラン、γ−(N,N−ジエチル)アミノプロピルトリメトキシシラン、γ−(N,N−ジブチル)アミノプロピルトリメトキシシラン、γ−(N−メチル)アニリノプロピルトリメトキシシラン、γ−(N−エチル)アニリノプロピルトリメトキシシラン、γ−(N,N−ジメチル)アミノプロピルトリエトキシシラン、γ−(N,N−ジエチル)アミノプロピルトリエトキシシラン、γ−(N,N−ジブチル)アミノプロピルトリエトキシシラン、γ−(N−メチル)アニリノプロピルトリエトキシシラン、γ−(N−エチル)アニリノプロピルトリエトキシシラン、γ−(N,N−ジメチル)アミノプロピルメチルジメトキシシラン、γ−(N,N−ジエチル)アミノプロピルメチルジメトキシシラン、γ−(N,N−ジブチル)アミノプロピルメチルジメトキシシラン、γ−(N−メチル)アニリノプロピルメチルジメトキシシラン、γ−(N−エチル)アニリノプロピルメチルジメトキシシラン、N−(トリメトキシシリルプロピル)エチレンジアミン、N−(ジメトキシメチルシリルイソプロピル)エチレンジアミン、メチルトリメトキシシラン、ジメチルジメトキシシラン、メチルトリエトキシシラン、γ−クロロプロピルトリメトキシシラン、ヘキサメチルジシラン、ビニルトリメトキシシラン、γ−メルカプトプロピルメチルジメトキシシラン等のシラン系カップリング剤、イソプロピルトリイソステアロイルチタネート、イソプロピルトリス(ジオクチルパイロホスフェート)チタネート、イソプロピルトリ(N−アミノエチル−アミノエチル)チタネート、テトラオクチルビス(ジトリデシルホスファイト)チタネート、テトラ(2,2−ジアリルオキシメチル−1−ブチル)ビス(ジトリデシル)ホスファイトチタネート、ビス(ジオクチルパイロホスフェート)オキシアセテートチタネート、ビス(ジオクチルパイロホスフェート)エチレンチタネート、イソプロピルトリオクタノイルチタネート、イソプロピルジメタクリルイソステアロイルチタネート、イソプロピルトリドデシルベンゼンスルホニルチタネート、イソプロピルイソステアロイルジアクリルチタネート、イソプロピルトリ(ジオクチルホスフェート)チタネート、イソプロピルトリクミルフェニルチタネート、テトライソプロピルビス(ジオクチルホスファイト)チタネート等のチタネート系カップリング剤などが挙げられ、これらの1種を単独で用いても2種類以上を組み合わせて用いてもよい。 In the liquid resin composition for electronic components of the present invention, a coupling agent is preferably used for the purpose of strengthening the interfacial adhesion between the resin and the inorganic filler or between the resin and the component of the electronic component, if necessary. These coupling agents are not particularly limited and conventionally known ones can be used. For example, silane compounds having primary and / or secondary and / or tertiary amino groups, epoxy silane, mercaptosilane, Examples thereof include various silane compounds such as alkyl silane, ureido silane, and vinyl silane, titanium compounds, aluminum chelates, and aluminum / zirconium compounds. Examples of these are vinyltrichlorosilane, vinyltriethoxysilane, vinyltris (β-methoxyethoxy) silane, γ-methacryloxypropyltrimethoxysilane, β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, γ-glycol. Sidoxypropyltrimethoxysilane, γ-glycidoxypropylmethyldimethoxysilane, vinyltriacetoxysilane, γ-mercaptopropyltrimethoxysilane, γ-aminopropyltrimethoxysilane, γ-aminopropylmethyldimethoxysilane, γ-aminopropyl Triethoxysilane, γ-aminopropylmethyldiethoxysilane, γ-anilinopropyltrimethoxysilane, γ-anilinopropyltriethoxysilane, γ- (N, N-dimethyl) aminopropyltrimethoxy Silane, γ- (N, N-diethyl) aminopropyltrimethoxysilane, γ- (N, N-dibutyl) aminopropyltrimethoxysilane, γ- (N-methyl) anilinopropyltrimethoxysilane, γ- (N -Ethyl) anilinopropyltrimethoxysilane, γ- (N, N-dimethyl) aminopropyltriethoxysilane, γ- (N, N-diethyl) aminopropyltriethoxysilane, γ- (N, N-dibutyl) amino Propyltriethoxysilane, γ- (N-methyl) anilinopropyltriethoxysilane, γ- (N-ethyl) anilinopropyltriethoxysilane, γ- (N, N-dimethyl) aminopropylmethyldimethoxysilane, γ- (N, N-diethyl) aminopropylmethyldimethoxysilane, γ- (N, N-dibutyl) aminopropy Rumethyldimethoxysilane, γ- (N-methyl) anilinopropylmethyldimethoxysilane, γ- (N-ethyl) anilinopropylmethyldimethoxysilane, N- (trimethoxysilylpropyl) ethylenediamine, N- (dimethoxymethylsilylisopropyl) ) Silane coupling agents such as ethylenediamine, methyltrimethoxysilane, dimethyldimethoxysilane, methyltriethoxysilane, γ-chloropropyltrimethoxysilane, hexamethyldisilane, vinyltrimethoxysilane, γ-mercaptopropylmethyldimethoxysilane, isopropyl Triisostearoyl titanate, isopropyl tris (dioctyl pyrophosphate) titanate, isopropyl tri (N-aminoethyl-aminoethyl) titanate, tetraoctane Rubis (ditridecyl phosphite) titanate, tetra (2,2-diallyloxymethyl-1-butyl) bis (ditridecyl) phosphite titanate, bis (dioctyl pyrophosphate) oxyacetate titanate, bis (dioctyl pyrophosphate) ethylene titanate, Isopropyltrioctanoyl titanate, isopropyldimethacrylisostearoyl titanate, isopropyltridodecylbenzenesulfonyl titanate, isopropylisostearoyl diacryl titanate, isopropyltri (dioctylphosphate) titanate, isopropyltricumylphenyl titanate, tetraisopropylbis (dioctylphosphite) titanate And titanate coupling agents such as A seed may be used independently or may be used in combination of 2 or more types.
また、本発明の電子部品用液状樹脂組成物には、必要に応じて下記一般式(1)又は(2)で表されるイオントラップ剤をIC等の半導体素子の耐マイグレーション性、耐湿性及び高温放置特性を向上させる観点から含有することが好ましい。
Mg1−xAlx(OH)2(CO3)x/2・mH2O ・・・(1)
(0<x≦0.5、mは正の数)
BiOx(OH)y(NO3)Z ・・・(2)
(0.9≦x≦1.1、 0.6≦y≦0.8、 0.2≦z≦0.4)
In addition, in the liquid resin composition for electronic components of the present invention, an ion trap agent represented by the following general formula (1) or (2) is added to the migration resistance, moisture resistance, and the like of a semiconductor element such as an IC as necessary. It is preferably contained from the viewpoint of improving the high temperature storage characteristics.
Mg 1-x Al x (OH) 2 (CO 3 ) x / 2 · mH 2 O (1)
(0 <x ≦ 0.5, m is a positive number)
BiO x (OH) y (NO 3 ) Z (2)
(0.9 ≦ x ≦ 1.1, 0.6 ≦ y ≦ 0.8, 0.2 ≦ z ≦ 0.4)
これらイオントラップ剤の添加量としては0.1質量%以上3.0質量%以下が好ましく、更に好ましくは0.3質量%以上1.5質量%以下である。イオントラップ剤の平均粒径は0.1μm以上3.0μm以下が好ましく、最大粒径は10μm以下が好ましい。なお、一般式(1)の化合物は市販品として協和化学工業株式会社製商品名DHT−4Aとして入手可能である。また、一般式(2)の化合物は市販品としてIXE500(東亞合成製商品名)として入手可能である。また必要に応じてその他の陰イオン交換体を添加することもできる。陰イオン交換体としては特に制限はなく、従来公知のものを用いることができる。たとえば、マグネシウム、アルミニウム、チタン、ジルコニウム、アンチモン等の元素の含水酸化物などが挙げられ、これらを単独又は2種以上を組み合わせて用いることができる。 The addition amount of these ion trapping agents is preferably 0.1% by mass or more and 3.0% by mass or less, and more preferably 0.3% by mass or more and 1.5% by mass or less. The average particle size of the ion trapping agent is preferably 0.1 μm or more and 3.0 μm or less, and the maximum particle size is preferably 10 μm or less. In addition, the compound of General formula (1) is available as Kyowa Chemical Industry Co., Ltd. brand name DHT-4A as a commercial item. Moreover, the compound of General formula (2) is available as IXE500 (Toagosei product name) as a commercial item. Further, other anion exchangers can be added as necessary. There is no restriction | limiting in particular as an anion exchanger, A conventionally well-known thing can be used. Examples thereof include hydrated oxides of elements such as magnesium, aluminum, titanium, zirconium, and antimony, and these can be used alone or in combination of two or more.
本発明の電子部品用液状樹脂組成物には、その他の添加剤として、染料、カーボンブラック等の着色剤、希釈剤、レベリング剤、消泡剤などを必要に応じて配合することができる。 In the liquid resin composition for electronic parts of the present invention, as other additives, coloring agents such as dyes and carbon black, diluents, leveling agents, antifoaming agents and the like can be blended as necessary.
本発明の電子部品用液状樹脂組成物は、上記各種成分を均一に分散混合できるのであれば、いかなる手法を用いても調製できるが、一般的な手法として、所定の配合量の成分を秤量し、らいかい機、ミキシングロール、プラネタリミキサなどを用いて混合、混練し、必要に応じて脱泡することによって得ることができる。 The liquid resin composition for electronic parts of the present invention can be prepared by any method as long as the above various components can be uniformly dispersed and mixed. However, as a general method, a component having a predetermined blending amount is weighed. It can be obtained by mixing, kneading using a raking machine, mixing roll, planetary mixer or the like, and defoaming as necessary.
本発明の電子部品用液状樹脂組成物の25℃における粘度は、0.01Pa・s〜1000Pa・sであることが好ましく、0.1Pa・s〜200Pa・sであることがより好ましく、1Pa・s〜50Pa・sであることが更に好ましい。
電子部品用液状樹脂組成物の25℃における粘度は、E型粘度計(コーン角度3°、回転数5rpm)を用いて測定する。
The viscosity at 25 ° C. of the liquid resin composition for electronic parts of the present invention is preferably 0.01 Pa · s to 1000 Pa · s, more preferably 0.1 Pa · s to 200 Pa · s, and more preferably 1 Pa · s. More preferably, it is s-50Pa * s.
The viscosity at 25 ° C. of the liquid resin composition for electronic parts is measured using an E-type viscometer (cone angle 3 °, rotation speed 5 rpm).
本発明の電子部品用液状樹脂組成物は、半導体素子と基板の隙間を封止するのに用いることができる。具体的には、本発明の電子部品用液状樹脂組成物を用いた電子部品装置は、半導体素子の回路形成面と無機又は有機基板の回路形成面とを対向させ、前記半導体素子の電極と前記基板の回路とがバンプを介して電気的に接続され、前記半導体素子と前記基板の隙間に本発明の電子部品用液状樹脂組成物を封止してなる。 The liquid resin composition for electronic components of the present invention can be used to seal a gap between a semiconductor element and a substrate. Specifically, in an electronic component device using the liquid resin composition for electronic components of the present invention, a circuit forming surface of a semiconductor element and a circuit forming surface of an inorganic or organic substrate are opposed to each other, The circuit of the board is electrically connected via bumps, and the liquid resin composition for electronic parts of the present invention is sealed in the gap between the semiconductor element and the board.
本発明の電子部品用液状樹脂組成物を用いて素子を封止する方法としては、ディスペンス方式、注型方式、印刷方式などが挙げられる。 Examples of a method for sealing an element using the liquid resin composition for electronic parts of the present invention include a dispensing method, a casting method, and a printing method.
次に実施例により本発明を更に具体的に説明するが、本発明はこれらの実施例に限定されるものではない。 EXAMPLES Next, although an Example demonstrates this invention further more concretely, this invention is not limited to these Examples.
(実施例1〜30、比較例1〜7)
液状エポキシ樹脂として、ビスフェノールFをエポキシ化して得られるエポキシ当量160の液状ジエポキシ樹脂(液状エポキシ1;三菱化学株式会社(旧ジャパンエポキシレジン株式会社)製、商品名jER806)、アミノフェノールをエポキシ化して得られるエポキシ当量95の3官能液状エポキシ樹脂(液状エポキシ2;三菱化学株式会社(旧ジャパンエポキシレジン株式会社)製、商品名jER630)、硬化剤として、活性水素当量45のジエチルトルエンジアミン(液状アミン1;三菱化学株式会社(旧ジャパンエポキシレジン株式会社)製、商品名jERキュアW)、活性水素当量63の3,3’−ジエチル−4,4’−ジアミノ−ジフェニルメタン(液状アミン2;日本化薬株式会社製商品名カヤハードA−A)、活性水素当量63のテトラメチル−ジアミノ−ジフェニルメタン(固形アミン;日本化薬株式会社製商品名カヤボンドC−200S)、酸無水物当量168の液状酸無水物(酸無水物;日立化成株式会社製商品名HN5500)、水酸基当量141のアリル化フェノールノボラック樹脂(フェノール樹脂;明和化成株式会社製商品名MEH−8000H)、硬化促進剤として、2−フェニル−4−メチル−ヒドロキシイミダゾール(硬化促進剤3)、無機充填剤として、体積平均粒径1μmの球状溶融シリカ(シリカ)、その他に、ジメチル型固形シリコーンゴム粒子の表面がエポキシ基で修飾された体積平均粒径2μmの球状のシリコーン粒子、γ−グリシドキシプロピルトリメトキシシラン、カーボンブラック(三菱化学株式会社製商品名MA−100)、ビスマス系イオントラップ剤(東亞合成株式会社製商品名IXE−500)を用意した。
(Examples 1-30, Comparative Examples 1-7)
As a liquid epoxy resin, an epoxy equivalent 160 liquid diepoxy resin obtained by epoxidizing bisphenol F (liquid epoxy 1; manufactured by Mitsubishi Chemical Corporation (formerly Japan Epoxy Resin Co., Ltd.), trade name jER806), aminophenol is epoxidized Trifunctional liquid epoxy resin having an epoxy equivalent of 95 (liquid epoxy 2; manufactured by Mitsubishi Chemical Corporation (former Japan Epoxy Resin Co., Ltd.), trade name: jER630), diethyltoluenediamine (liquid amine) having an active hydrogen equivalent of 45 as a curing agent 1; manufactured by Mitsubishi Chemical Corporation (formerly Japan Epoxy Resin Co., Ltd., trade name: jER Cure W), 3,3′-diethyl-4,4′-diamino-diphenylmethane having an active hydrogen equivalent of 63 (liquid amine 2; Nippon Kayaku) Yakuhin brand name Kayahard AA), active hydrogen Amount of tetramethyl-diamino-diphenylmethane (solid amine; Nippon Kayaku Co., Ltd. trade name Kayabond C-200S), acid anhydride equivalent 168 liquid acid anhydride (acid anhydride; Hitachi Chemical Co., Ltd. trade name HN5500) ), An allylated phenol novolak resin having a hydroxyl group equivalent of 141 (phenol resin; trade name MEH-8000H, manufactured by Meiwa Kasei Co., Ltd.), 2-phenyl-4-methyl-hydroxyimidazole (curing accelerator 3), inorganic as a curing accelerator As a filler, spherical fused silica (silica) having a volume average particle diameter of 1 μm, spherical silicone particles having a volume average particle diameter of 2 μm whose surface of dimethyl type solid silicone rubber particles is modified with an epoxy group, γ-glycid Xylpropyltrimethoxysilane, carbon black (trade name MA-10 manufactured by Mitsubishi Chemical Corporation) 0) and a bismuth-based ion trap agent (trade name IXE-500 manufactured by Toagosei Co., Ltd.) were prepared.
硬化促進剤1は、フラスコに48.2gのグルタル酸と51.8gの1,4−ブタンジオールジビニルエーテルを仕込み(グルタル酸と4−ブタンジオールジビニルエーテルのモル比は、1:0.6となる。)、100℃で2時間反応させることにより、R1がプロピレン基、R5がブチレン基である一般式(V)で表される化合物を得た。13C NMRから、ビニルエーテルと反応したカルボン酸と未反応のカルボン酸の比は96:4、すなわち、残存カルボン酸は4%であった。 The curing accelerator 1 was charged with 48.2 g of glutaric acid and 51.8 g of 1,4-butanediol divinyl ether in a flask (the molar ratio of glutaric acid and 4-butanediol divinyl ether was 1: 0.6. The compound represented by the general formula (V) in which R 1 is a propylene group and R 5 is a butylene group was obtained by reacting at 100 ° C. for 2 hours. From 13C NMR, the ratio of carboxylic acid reacted with vinyl ether to unreacted carboxylic acid was 96: 4, ie, the residual carboxylic acid was 4%.
硬化促進剤2は、フラスコに60.5gのグルタル酸と47.3gのn−プロピルビニルエーテルを仕込み、30分かけて常温から70℃まで上昇させた後、70℃で4時間反応させた。その後、ロータリーエバポレーターを用い、混合液から未反応のビニルエーテルを留去し、その後、真空ポンプにより真空乾燥することにより、R1がプロピレン基、R5がプロピレン基である一般式(III)に該当する化合物を得た。 The curing accelerator 2 was charged with 60.5 g of glutaric acid and 47.3 g of n-propyl vinyl ether in a flask, raised from room temperature to 70 ° C. over 30 minutes, and then reacted at 70 ° C. for 4 hours. Then, using a rotary evaporator, unreacted vinyl ether is distilled off from the mixed solution, and then vacuum-dried by a vacuum pump, so that R 1 is a propylene group and R 5 is a propylene group, and corresponds to the general formula (III) Was obtained.
硬化促進剤4は、フラスコに48.2gのグルタル酸と77.8gの1,4−ブタンジオールジビニルエーテルを仕込み(グルタル酸と4−ブタンジオールジビニルエーテルのモル比は、1:1.5となる。)、100℃で2時間反応させることにより、R1がプロピレン基、R5がブチレン基である一般式(V)及び(VIII)に該当する化合物を得た。13C NMRから、残存カルボン酸は検出されなかった。 The curing accelerator 4 was charged with 48.2 g of glutaric acid and 77.8 g of 1,4-butanediol divinyl ether in a flask (the molar ratio of glutaric acid and 4-butanediol divinyl ether was 1: 1.5. The compound corresponding to the general formulas (V) and (VIII) in which R 1 is a propylene group and R 5 is a butylene group was obtained by reacting at 100 ° C. for 2 hours. From 13C NMR, no residual carboxylic acid was detected.
硬化促進剤5は、フラスコに60.5gのグルタル酸と94.7gのn−プロピルビニルエーテルを仕込み(グルタル酸とn−プロピルビニルエーテルのモル比は、1:2.4となる。)、30分かけて常温から70℃まで上昇させた後、70℃で4時間反応させた。その後、ロータリーエバポレーターを用い、混合液から未反応のビニルエーテルを留去し、その後、真空ポンプにより真空乾燥することにより、R1がプロピレン基、R9及びR10がプロピル基である一般式(VI)で表される化合物を得た。 The curing accelerator 5 is charged with 60.5 g of glutaric acid and 94.7 g of n-propyl vinyl ether in a flask (molar ratio of glutaric acid and n-propyl vinyl ether is 1: 2.4), and 30 minutes. The temperature was raised from room temperature to 70 ° C., and then reacted at 70 ° C. for 4 hours. Then, using a rotary evaporator, unreacted vinyl ether is distilled off from the mixed solution, and then vacuum-dried by a vacuum pump, whereby R 1 is a propylene group and R 9 and R 10 are propyl groups. ) Was obtained.
硬化促進剤6は、フラスコに48.2gのグルタル酸と103.8gの1,4−ブタンジオールジビニルエーテルを仕込み(グルタル酸と4−ブタンジオールジビニルエーテルのモル比は、1:2となる。)、100℃で2時間反応させることにより、R1がプロピレン基、R5がブチレン基である一般式(V)及び(VIII)に該当する化合物を得た。13C NMRから、残存カルボン酸は検出されなかった。 The curing accelerator 6 is charged with 48.2 g of glutaric acid and 103.8 g of 1,4-butanediol divinyl ether in a flask (the molar ratio of glutaric acid and 4-butanediol divinyl ether is 1: 2. And by reacting at 100 ° C. for 2 hours, compounds corresponding to the general formulas (V) and (VIII) in which R 1 is a propylene group and R 5 is a butylene group were obtained. From 13C NMR, no residual carboxylic acid was detected.
硬化促進剤7は、フラスコに48.2gのグルタル酸と62.8gの1,4−ブタンジオールジビニルエーテルを仕込み(グルタル酸と4−ブタンジオールジビニルエーテルのモル比は、1:1.2となる。)、100℃で4時間反応させることにより、R1がプロピレン基、R5がブチレン基である一般式(V)及び(VIII)に該当する化合物を得た。13C NMRから、残存カルボン酸は検出されなかった。 The curing accelerator 7 was charged with 48.2 g of glutaric acid and 62.8 g of 1,4-butanediol divinyl ether in a flask (the molar ratio of glutaric acid and 4-butanediol divinyl ether was 1: 1.2. The compound corresponding to the general formulas (V) and (VIII) in which R 1 is a propylene group and R 5 is a butylene group was obtained by reacting at 100 ° C. for 4 hours. From 13C NMR, no residual carboxylic acid was detected.
硬化促進剤8は、フラスコに48.2gのグルタル酸と62.8gの1,4−ブタンジオールジビニルエーテルを仕込み(グルタル酸と4−ブタンジオールジビニルエーテルのモル比は、1:1.2となる。)、100℃で1時間反応させることにより、R1がプロピレン基、R5がブチレン基である一般式(V)及び(VIII)に該当する化合物を得た。13C NMRから、ビニルエーテルと反応したカルボン酸と未反応のカルボン酸の比は98:2、すなわち、残存カルボン酸は2%であった。 The curing accelerator 8 was charged with 48.2 g of glutaric acid and 62.8 g of 1,4-butanediol divinyl ether in a flask (the molar ratio of glutaric acid and 4-butanediol divinyl ether was 1: 1.2. By reacting at 100 ° C. for 1 hour, compounds corresponding to the general formulas (V) and (VIII) in which R 1 is a propylene group and R 5 is a butylene group were obtained. From 13C NMR, the ratio of carboxylic acid reacted with vinyl ether to unreacted carboxylic acid was 98: 2, that is, the residual carboxylic acid was 2%.
硬化促進剤9は、フラスコに48.2gのグルタル酸と51.9gの1,4−ブタンジオールジビニルエーテルを仕込み(グルタル酸と4−ブタンジオールジビニルエーテルのモル比は、1:1となる。)、100℃で1時間反応させることにより、R1がプロピレン基、R5がブチレン基である一般式(V)及び(VIII)に該当する化合物を得た。13C NMRから、ビニルエーテルと反応したカルボン酸と未反応のカルボン酸の比は95:5、すなわち、残存カルボン酸は5%であった。 The curing accelerator 9 is charged with 48.2 g of glutaric acid and 51.9 g of 1,4-butanediol divinyl ether in a flask (the molar ratio of glutaric acid and 4-butanediol divinyl ether is 1: 1). And by reacting at 100 ° C. for 1 hour, compounds corresponding to the general formulas (V) and (VIII) in which R 1 is a propylene group and R 5 is a butylene group were obtained. From 13C NMR, the ratio of carboxylic acid reacted with vinyl ether to unreacted carboxylic acid was 95: 5, ie, the residual carboxylic acid was 5%.
下記表1、2に示す組成で配合し、三本ロール及び真空擂潰機にて混練分散した後、実施例1〜30及び比較例1〜7の電子部品用液状樹脂組成物を作製した。なお表中の配合単位は特に記載のない限り質量部であり、空欄は配合無し、を表す。 After compounding with the composition shown in the following Tables 1 and 2 and kneading and dispersing with a three roll and vacuum crusher, liquid resin compositions for electronic parts of Examples 1 to 30 and Comparative Examples 1 to 7 were prepared. The blending unit in the table is part by mass unless otherwise specified, and the blank represents no blending.
得られた電子部品用液状樹脂組成物の評価結果について表3、4に示す。特性試験の試験方法を以下に説明する。なお、使用した電子部品用液状樹脂組成物の諸特性及び含浸時間、ボイドの観察、各種信頼性の評価は以下の方法及び条件で行った。 The evaluation results of the obtained liquid resin composition for electronic parts are shown in Tables 3 and 4. The test method of the characteristic test will be described below. In addition, various characteristics and impregnation time of the used liquid resin composition for electronic components, observation of a void, and evaluation of various reliability were performed with the following method and conditions.
信頼性の評価に使用した半導体装置の諸元は、チップサイズ20×20×0.55tmm(回路:アルミのデイジーチェーン接続、パッシベーション:ポリイミド膜HD4000,日立化成デュポンマイクロシステムズ株式会社製商品名)、バンプ:はんだボール(Sn−Ag−Cu、直径80μm、7,744pin)、バンプピッチ:190μm、基板:FR−5(ソルダーレジストSR7200,日立化成株式会社製商品名、60×60×0.8tmm)、チップ/基板間のギャップ:50μmである。 The specifications of the semiconductor device used for the reliability evaluation are as follows: chip size 20 × 20 × 0.55 tmm (circuit: daisy chain connection of aluminum, passivation: polyimide film HD4000, product name manufactured by Hitachi Chemical DuPont Microsystems), Bump: Solder ball (Sn—Ag—Cu, diameter 80 μm, 7,744 pin), bump pitch: 190 μm, substrate: FR-5 (solder resist SR7200, trade name, manufactured by Hitachi Chemical Co., Ltd., 60 × 60 × 0.8 tmm) Chip / substrate gap: 50 μm.
半導体装置は、電子部品用液状樹脂組成物をディスペンス方式でアンダーフィルし、130℃又は165℃の硬化温度で、2時間硬化することで作製した。また、各種試験片の硬化条件も同様な条件で行った。 The semiconductor device was produced by underfilling a liquid resin composition for electronic components by a dispense method and curing at 130 ° C. or 165 ° C. for 2 hours. The curing conditions for various test pieces were also the same.
(1)粘度(初期粘度)
電子部品用液状樹脂組成物の25℃における粘度をE型粘度計(コーン角度3°、回転数5rpm)を用いて測定した。但し、高粘度で回転数5rpmで測定できない試料については、2.5rpmで測定した。
(1) Viscosity (initial viscosity)
The viscosity at 25 ° C. of the liquid resin composition for electronic parts was measured using an E-type viscometer (cone angle 3 °, rotation speed 5 rpm). However, for samples with high viscosity that cannot be measured at 5 rpm, the measurement was performed at 2.5 rpm.
(2−1)ポットライフ1
電子部品用液状樹脂組成物を25℃で24時間放置後、25℃における粘度をE型粘度計(コーン角度3°、回転数5rpm)を用いて測定した(放置後粘度)。但し、高粘度で回転数5rpmで測定できない試料については、2.5rpmで測定した。ポットライフ(%)は、((放置後粘度)−(初期粘度))/(初期粘度)×100で算出した。
(2-1) Pot life 1
The liquid resin composition for electronic components was allowed to stand at 25 ° C. for 24 hours, and the viscosity at 25 ° C. was measured using an E-type viscometer (cone angle 3 °, rotation speed 5 rpm) (viscosity after standing). However, for samples with high viscosity that cannot be measured at 5 rpm, the measurement was performed at 2.5 rpm. The pot life (%) was calculated by ((viscosity after standing) − (initial viscosity)) / (initial viscosity) × 100.
(2−2)ポットライフ2
電子部品用液状樹脂組成物を35℃で24時間放置後、25℃における粘度をE型粘度計(コーン角度3°、回転数5rpm)を用いて測定した(放置後粘度)。但し、高粘度で回転数5rpmで測定できない試料については、2.5rpmで測定した。ポットライフ(%)は、((放置後粘度)−(初期粘度))/(初期粘度)×100で算出した。
(2-2) Pot life 2
The liquid resin composition for electronic parts was allowed to stand at 35 ° C. for 24 hours, and the viscosity at 25 ° C. was measured using an E-type viscometer (cone angle 3 °, rotation speed 5 rpm) (viscosity after standing). However, for samples with high viscosity that cannot be measured at 5 rpm, the measurement was performed at 2.5 rpm. The pot life (%) was calculated by ((viscosity after standing) − (initial viscosity)) / (initial viscosity) × 100.
(3)ゲルタイム
ゲル化試験機を用い、配合した電子部品用液状樹脂組成物を165℃又は130℃の熱板上に適量(約3ml)たらした後、ゲル化し始めるまでの時間を測定した。
(3) Gel time Using a gelation tester, an appropriate amount (about 3 ml) of the blended liquid resin composition for electronic components was placed on a hot plate at 165 ° C or 130 ° C, and then the time until gelation was started was measured.
(4)ガラス転移温度(Tg)
所定条件で硬化した試験片(3mm×3mm×20mm)を熱機械分析装置TMAQ400(ティー・エイ・インスツルメント製)を用い、荷重15g、測定温度0℃〜200℃、昇温速度10℃/分の条件で測定した。
(4) Glass transition temperature (Tg)
Using a thermomechanical analyzer TMAQ400 (manufactured by TA Instruments), a test piece (3 mm × 3 mm × 20 mm) cured under predetermined conditions was loaded with a load of 15 g, a measurement temperature of 0 ° C. to 200 ° C., and a temperature increase rate of 10 ° C. / The measurement was performed under the condition of minutes.
(5)接着力
・SiN接着力
P−SiN付きウェハー(住友商事九州株式会社製)の表面に電子部品用液状樹脂組成物を直径3mm高さ3mmに成形した試験片を作製し、ボンドテスターDS100型(DAGE製)を用いて、ヘッドスピード50μm/sec、25℃の条件でせん断応力をかけ、成形品がP−SiN付ウェハーから剥離する強度を測定した。この測定は、試験片成形直後、及び130℃、85%RHのHAST(Highly Accelerated Temperature and Humidity Stress Test)条件下で200h処理後に行った。
・PI接着力
感光性ポリイミドHD4100(日立化成デュポンマイクロシステムズ株式会社製商品名)の表面に電子部品用液状樹脂組成物を直径3mm高さ3mmに成形した試験片を作製し、ボンドテスターDS100型(DAGE製)を用いて、ヘッドスピード50μm/sec、25℃の条件においてせん断応力をかけ、成形品が感光性ポリイミドから剥離する強度を測定した。この測定は、試験片成形直後、及び130℃、85%RHのHAST条件下で200h処理後に行った。
(5) Adhesive strength / SiN adhesive strength A test piece was prepared by molding a liquid resin composition for electronic parts to a diameter of 3 mm and a height of 3 mm on the surface of a wafer with P-SiN (manufactured by Sumitomo Corporation Kyushu Co., Ltd.). Using a mold (manufactured by DAGE), a shear stress was applied under the conditions of a head speed of 50 μm / sec and 25 ° C., and the strength at which the molded product peeled from the wafer with P-SiN was measured. This measurement was performed immediately after molding of the test piece and after 200 h treatment at 130 ° C. and 85% RH HAST (Highly Accelerated Temperature and Humidity Stress Test) conditions.
-PI adhesive force A test piece was prepared by molding a liquid resin composition for electronic parts on a surface of photosensitive polyimide HD4100 (trade name, manufactured by Hitachi Chemical DuPont Microsystems Co., Ltd.) to a diameter of 3 mm and a height of 3 mm. The strength at which the molded product peels from the photosensitive polyimide was measured by applying a shear stress under the conditions of a head speed of 50 μm / sec and 25 ° C. This measurement was performed immediately after the test piece was molded and after 200 h treatment under HAST conditions of 130 ° C. and 85% RH.
(6)含浸時間
半導体装置を110℃に加熱したホットプレート上に置き、デイスペンサーを用いて電子部品用液状樹脂組成物の所定量(約1ml)をチップの側面(1辺)に滴下し、樹脂組成物が対向する側面に浸透するまでの時間を測定した。
(6) Impregnation time The semiconductor device is placed on a hot plate heated to 110 ° C., and a predetermined amount (about 1 ml) of the liquid resin composition for electronic components is dropped onto the side surface (one side) of the chip using a dispenser. The time until the resin composition penetrates into the opposite side surfaces was measured.
(7)ボイド観察
電子部品用液状樹脂組成物をアンダーフィルして作製した半導体装置の内部を超音波探傷装置AT−5500(日立建機株式会社製)で観察し、ボイドの有無を調べた。
(7) Void observation The inside of the semiconductor device produced by underfilling the liquid resin composition for electronic components was observed with an ultrasonic flaw detector AT-5500 (manufactured by Hitachi Construction Machinery Co., Ltd.) to examine the presence or absence of voids.
(8)チップ反り
電子部品用液状樹脂組成物をアンダーフィルして作製した半導体装置のチップ対角線上の反り量(μm)を、室温にて表面粗さ測定器サーフコーダSE−2300(小坂研究所製)を用いて測定した。
(8) Chip warpage The amount of warpage (μm) on the chip diagonal line of a semiconductor device produced by underfilling a liquid resin composition for electronic components was measured at room temperature using a surface roughness measuring instrument Surfcoder SE-2300 (Kosaka Laboratory). ).
(9)耐温度サイクル性
電子部品用液状樹脂組成物をアンダーフィルして作製した半導体装置を−55℃〜125℃、各30分のヒートサイクルで2000サイクル処理し、1000サイクルごとに導通試験を行いアルミ配線及びパッドの断線不良を調べ、不良パッケージ数/評価パッケージ数で評価した。
(9) Temperature resistance cycle resistance A semiconductor device prepared by underfilling a liquid resin composition for electronic components was treated for 2000 cycles at a heat cycle of −55 ° C. to 125 ° C. for 30 minutes each, and a continuity test was conducted every 1000 cycles. The disconnection defect of the aluminum wiring and the pad was examined, and the evaluation was performed by the number of defective packages / the number of evaluation packages.
(10)耐湿信頼性
電子部品用液状樹脂組成物をアンダーフィルして作製した半導体装置を130℃、85%RHのHAST条件下で200h処理後、アルミ配線及びパッドの断線有無を導通試験より確認し、不良パッケージ数/評価パッケージ数で評価した。
(10) Moisture resistance reliability After a semiconductor device manufactured by underfilling a liquid resin composition for electronic components under a HAST condition of 130 ° C. and 85% RH for 200 hours, the presence or absence of disconnection of aluminum wiring and pads is confirmed by a continuity test. The number of defective packages / the number of evaluation packages was evaluated.
本発明における(C)成分を含まない比較例1、2及び3では、ゲルタイムが長く、またボイドが発生した。更に、130℃硬化において、硬化物の接着力が低いために、耐温度サイクル性及び耐湿信頼性に劣り、特に耐温度サイクル性が著しく劣っていた。
また、(B)成分が固形アミンである比較例4では、粘度が高く、未充填で半導体装置を作製することができなかった。
In Comparative Examples 1, 2, and 3 not containing the component (C) in the present invention, the gel time was long and voids were generated. Furthermore, in 130 degreeC hardening, since the adhesive force of hardened | cured material is low, it was inferior to temperature cycling resistance and moisture-proof reliability, and especially temperature cycling resistance was inferior.
Moreover, in the comparative example 4 whose (B) component is a solid amine, the viscosity was high and the semiconductor device could not be produced without filling.
また、(B)成分が酸無水物である比較例6は、ゲルタイムは短くなるものの、HAST処理後の接着力が低下し、耐湿性が著しく低下した。
(B)成分がフェノール樹脂である比較例7は、比較例6と同様にゲルタイムは短くなるものの、Tgが低下したために温度サイクル性が著しく低下した。
Moreover, although the gel time became short in the comparative example 6 whose (B) component is an acid anhydride, the adhesive force after HAST processing fell and moisture resistance fell remarkably.
In Comparative Example 7 in which the component (B) is a phenol resin, the gel time was shortened as in Comparative Example 6, but Tg was lowered, so that the temperature cycle performance was significantly lowered.
また、(C)成分が硬化促進剤3である比較例5では、ゲルタイムが短くなるものの、硬化物のTg及びHAST処理後の接着力が低下し、耐湿性が著しく低下した。 Further, in Comparative Example 5 in which the component (C) is the curing accelerator 3, the gel time was shortened, but the adhesive strength after the Tg and HAST treatment of the cured product was reduced, and the moisture resistance was remarkably reduced.
これに対して、実施例1〜30は、比較例1〜3と比較してゲルタイムが短縮し、ボイドが発生せず、硬化物の接着力も向上し、耐温度サイクル性や耐湿性が向上した。特に、130℃硬化での接着力が向上し、耐温度サイクル性や耐湿性が向上しており、硬化温度を低く設定することでとチップ反り量が小さくすることも可能となった。また、比較例5と比較すると、HAST処理後の接着力が向上し、耐湿性に優れた半導体装置が得られており、比較例1〜7と比較して、成形性、信頼性においてバランスの良い半導体装置が得られた。 On the other hand, Examples 1-30 shortened gel time compared with Comparative Examples 1-3, a void did not generate | occur | produce, the adhesive force of hardened | cured material also improved, and temperature cycle resistance and moisture resistance improved. . In particular, the adhesive strength at 130 ° C. curing has been improved, and the temperature cycle resistance and moisture resistance have been improved, and it has become possible to reduce the chip warpage by setting the curing temperature low. Moreover, compared with the comparative example 5, the adhesive force after HAST processing has improved, and the semiconductor device excellent in moisture resistance has been obtained. Compared with the comparative examples 1 to 7, the balance in formability and reliability is improved. A good semiconductor device was obtained.
更に、実施例の中で、以下の比較検討を行った。
無機充填剤の配合量について、実施例2(65質量%)、実施例14(55質量%)、実施例15(75質量%)を比較すると、無機充填剤の配合量の多い実施例15は、粘度が高くなり、含浸時間がやや劣るが、チップ反りが低減し、耐温度サイクル性が向上しており、無機充填剤の配合量の少ない実施例14は、耐湿度サイクル性がやや低下するものの、流動性に優れていた。
Furthermore, the following comparative examination was performed in the Example.
When Example 2 (65% by mass), Example 14 (55% by mass), and Example 15 (75% by mass) are compared with respect to the blending amount of the inorganic filler, Example 15 having a large blending amount of the inorganic filler is In Example 14, the viscosity increases and the impregnation time is slightly inferior, but the chip warpage is reduced, the temperature cycle resistance is improved, and the amount of the inorganic filler is small, the humidity cycle resistance is slightly lowered. However, it was excellent in fluidity.
硬化剤について、実施例1及び2(液状アミン1)と実施例5及び6(液状アミン2)と実施例8及び9(液状アミン1及び2の併用)を比較すると、液状アミン1を含有すると流動性やポットライフに優れ、液状アミン2を含有すると、硬化物の接着力が向上し耐温度サイクル性が向上した。これら2種の液状アミンを併用することにより、これらの特性のバランス良く優れ、更にチップ反り、耐温度サイクル性に優れていた。 About Example 1 and 2 (liquid amine 1), Example 5 and 6 (liquid amine 2), and Example 8 and 9 (combined use of liquid amine 1 and 2) about a hardening | curing agent, when liquid amine 1 is contained, Excellent fluidity and pot life, and when liquid amine 2 was contained, the adhesive strength of the cured product was improved and the temperature cycle resistance was improved. By using these two kinds of liquid amines in combination, these properties were excellent in a well-balanced manner, and chip warpage and temperature cycle resistance were excellent.
エポキシ樹脂と硬化剤の当量比について、実施例9,11,12及び13を比較すると、硬化剤の量が多くなる(エポキシ樹脂と硬化剤の当量比が大きくなる)と流動性に優れ、少なくなると165℃の硬化において、Tgが上昇した。なお、130℃の硬化において、硬化剤の量が多くなるとTgが上昇するものの、硬化剤の量が多くなりすぎるとTgが低下した。 As for the equivalent ratio of the epoxy resin and the curing agent, when Examples 9, 11, 12 and 13 are compared, when the amount of the curing agent increases (the equivalent ratio of the epoxy resin and the curing agent increases), the fluidity is excellent and less As a result, Tg increased upon curing at 165 ° C. In the curing at 130 ° C., the Tg increased when the amount of the curing agent increased, but the Tg decreased when the amount of the curing agent increased excessively.
硬化促進剤について、実施例1及び2(硬化促進剤1)と実施例3及び4(硬化促進剤2)とを比較すると、硬化促進剤1を含有すると、ポットライフに優れ、硬化促進剤2を含有すると、ポットライフがやや悪化するものの、流動性に優れていた。
また、実施例2、16,18及び19を比較すると、硬化促進剤におけるビニルエーテル化合物の当量比が多くなると、ゲルタイムがやや低下したものの、ポットライフに優れていた。また、実施例2、19、20及び21を比較すると、硬化促進剤の残存カルボン酸量が少なくなるとゲルタイムがやや低下したものの、ポットライフに優れていた。
About a hardening accelerator, when Example 1 and 2 (hardening accelerator 1) and Example 3 and 4 (hardening accelerator 2) are compared, when it contains hardening accelerator 1, it is excellent in pot life, and hardening accelerator 2 However, the pot life was slightly deteriorated, but the fluidity was excellent.
Further, when Examples 2, 16, 18 and 19 were compared, when the equivalent ratio of the vinyl ether compound in the curing accelerator was increased, the gel time was slightly reduced, but the pot life was excellent. Further, when Examples 2, 19, 20 and 21 were compared, although the gel time was slightly reduced when the amount of residual carboxylic acid in the curing accelerator was reduced, the pot life was excellent.
硬化促進剤の配合量について、実施例7(エポキシ樹脂の配合量の1%)、実施例8(エポキシ樹脂の配合量の5%)、実施例9(エポキシ樹脂配合量の10%)及び実施例10(エポキシ樹脂の配合量の20%)を比較すると、配合量が少ない方が、ポットライフの観点からは好ましく、多い方が、ゲルタイムが短く、硬化物の接着性やチップ反りの低減や耐温度サイクル性に優れていた。硬化促進剤の配合量は、特に、130℃の硬化においての硬化物の接着力や耐湿信頼性への影響が大きかった。 About the compounding quantity of a hardening accelerator, Example 7 (1% of the compounding quantity of an epoxy resin), Example 8 (5% of the compounding quantity of an epoxy resin), Example 9 (10% of the compounding quantity of an epoxy resin), and implementation When Example 10 (20% of the amount of the epoxy resin compounded) is compared, the smaller amount is preferable from the viewpoint of pot life, and the larger amount is shorter in gel time, reducing the adhesiveness of the cured product and chip warpage. Excellent temperature cycle resistance. The blending amount of the curing accelerator had a great influence on the adhesive strength and moisture resistance reliability of the cured product particularly when cured at 130 ° C.
特に、本実施例1〜30の中では、硬化促進剤4を含有し、エポキシ樹脂と硬化剤の当量比を適切なバランスにし、硬化剤1及び硬化剤2を併用し、更に無機充填剤の配合量が60質量%〜70質量の範囲にある実施例16は特性のバランスが最も優れた。 In particular, in Examples 1 to 30, the curing accelerator 4 is contained, the equivalent ratio of the epoxy resin and the curing agent is appropriately balanced, the curing agent 1 and the curing agent 2 are used in combination, and the inorganic filler is further used. Example 16 having a blending amount in the range of 60% by mass to 70% by mass had the most excellent balance of properties.
Claims (4)
(R1及びR5はそれぞれ独立に、炭素数1〜18の二価の炭化水素基であり、R2〜R4はそれぞれ独立に、水素原子又は炭素数1〜18の一価の炭化水素基である。)
(R1及びR5はそれぞれ独立に、炭素数1〜18の二価の炭化水素基であり、R2〜R4及びR6〜R8はそれぞれ独立に、水素原子又は炭素数1〜18の一価の炭化水素基であり、nは1以上の整数を表す。) (A) liquid epoxy resin contains a compound having the structure represented in the the molecule with (B) a liquid aromatic amine, and (C) the following general formula as a curing accelerator (I), prior to following general formula (I The liquid resin composition for electronic components, wherein the compound having a structure represented by) in the molecule is a compound represented by the following general formula (VII).
(R 1 and R 5 are each independently a divalent hydrocarbon group having 1 to 18 carbon atoms, and R 2 to R 4 are each independently a hydrogen atom or a monovalent hydrocarbon having 1 to 18 carbon atoms. Group.)
(R 1 and R 5 are each independently a divalent hydrocarbon group having 1 to 18 carbon atoms, and R 2 to R 4 and R 6 to R 8 are each independently a hydrogen atom or 1 to 18 carbon atoms. A monovalent hydrocarbon group, and n represents an integer of 1 or more.)
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