JP6316652B2 - Grinding equipment - Google Patents

Description

  The present invention relates to a grinding apparatus for grinding a workpiece.

  A grinding apparatus for grinding a workpiece includes a holding table for holding the workpiece, a grinding means having a grinding wheel to which a grinding wheel is fixed in an annular shape, and grinding for supplying a grinding liquid to the workpiece and the grinding wheel. And at least a liquid supply means. While the grinding liquid is supplied to the upper surface of the workpiece by the grinding liquid supply means, the upper surface of the workpiece is pressed with a grinding wheel to grind the workpiece. In such a grinding apparatus, since grinding is performed while supplying the grinding liquid between the upper surface of the workpiece and the grinding wheel by the grinding liquid supply means, grinding dust generated when the workpiece is ground with the grinding wheel. Can be removed. In addition, the grinding fluid is supplied to the processing area where the upper surface of the workpiece and the grinding surface of the grinding wheel come into contact with each other, so that the heat generated by the grinding is cooled to prevent the occurrence of surface burn and the workpiece to be ground. It is also possible to prevent the surface from being rough and finished.

  As the grinding liquid supply means, there is a type that has a nozzle disposed outside the grinding wheel and supplies the grinding liquid from the nozzle to the grinding wheel and the workpiece (for example, Patent Document 1 below). reference). There is also a type that supplies a grinding fluid to a grinding wheel and a workpiece through a grinding fluid supply path formed inside the grinding wheel (see, for example, Patent Document 2 below).

Japanese Patent Laid-Open No. 07-223152 Japanese Utility Model Publication No. 07-031268

  However, when the workpiece is ground in the grinding apparatus as described above, an air layer is formed around the grinding wheel by the rotation of the grinding wheel, so that the grinding liquid is difficult to reach the grinding wheel. In addition, the grinding fluid that collides with the rotating grinding wheel scatters to the surrounding area, so that the grinding fluid is not efficiently supplied to the processing area, and the cutting waste contained in the grinding fluid scatters and adheres to the workpiece. There is also the problem of doing.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to enable a grinding apparatus to supply a grinding liquid to a processing region more effectively than in the past.

The present invention relates to a holding table that holds a workpiece and is rotatable in a predetermined direction, a grinding means having a grinding wheel including a grinding wheel for grinding the workpiece held by the holding table, and the workpiece And a grinding fluid supply means for supplying a grinding fluid to the grinding wheel , wherein the grinding wheel has a plurality of grinding wheels at a predetermined interval at a free end of a base. The grinding fluid supply means is configured to be arranged in an annular shape, and the grinding fluid supply means has a grinding fluid from a processing region where the grinding wheel acts on the workpiece toward the upper surface of the workpiece from the rear side in the rotation direction of the holding table. A predetermined gap on the upper surface side of the workpiece between the grinding fluid supply port and the grinding wheel in the machining area, and the workpiece from the grinding fluid supply port Grinding fluid supplied to the upper surface moves along the processing area as the holding table rotates. An upper wall portion forming the grinding fluid supply layer which flows toward the grinding wheel, is arranged in the rotation direction front side of the holding table from the processing region, supplied to the upper surface of the workpiece from the grinding fluid supply inlet A suction part having a suction port for sucking the grinding liquid discharged to the outside of the grinding wheel after reaching the processing region .

The grinding fluid supply means provided in the grinding apparatus of the present invention is a grinding for supplying the grinding fluid toward the upper surface of the workpiece on the rear side in the rotation direction of the holding table from the machining area where the grinding wheel acts on the workpiece. Since there is a liquid supply port and an upper wall portion having a predetermined interval on the upper surface side of the workpiece between the grinding liquid supply port and the grinding wheel in the machining area, the workpiece is ground during grinding. The grinding fluid supplied to the upper surface of the workpiece flows between the upper wall and the upper surface of the workpiece as the holding table rotates, and a grinding fluid supply layer that flows around the grinding wheel in the machining area is provided. Form. As a result, the grinding fluid supply layer blocks the air layer generated around the rotating grinding wheel, so that the grinding fluid flow is not obstructed by the air layer, and the grinding fluid sufficiently reaches the machining area. be able to.
Further, since the grinding fluid supply means supplies the grinding fluid from the grinding fluid supply port toward the upper surface of the workpiece, the possibility that the grinding fluid collides with the side wall of the grinding wheel and is scattered around is reduced. Therefore, it is possible to suppress the amount of the grinding fluid used compared to the prior art and to effectively supply the grinding fluid to the processing region. Furthermore, it is possible to prevent the grinding liquid containing the grinding scraps from scattering and the grinding scraps from adhering to the workpiece.

It is a perspective view which shows an example of a grinding device. It is a perspective view which shows the structure of a grinding fluid supply means. It is sectional drawing which shows the structure of the grinding fluid supply means arrange | positioned between the grinding wheel and the holding table. It is sectional drawing which shows the state which grinds a workpiece, supplying a grinding fluid to a workpiece and a grinding wheel. It is explanatory drawing of the state which supplies a grinding fluid to a process area | region from a grinding fluid supply port. It is explanatory drawing of the state which supplies a grinding fluid to a process area | region from the modification of a grinding fluid supply port. It is sectional drawing which shows the state which grinds a to-be-processed object, supplying a grinding fluid to a to-be-processed object and a grinding wheel in the state in which the grinding wheel was worn out.

  A grinding device 1 shown in FIG. 1 is an example of a grinding device that grinds a workpiece, and has a device base 2 that extends in the Y-axis direction. On the upper surface 2a of the apparatus base 2, a cassette 4a for accommodating a workpiece before grinding and a cassette 4b for accommodating a workpiece after grinding are disposed. Between the cassette 4a and the cassette 4b, there is disposed a conveying means 5 for carrying out the workpiece before grinding from the cassette 4a and carrying the workpiece after grinding into the cassette 4b. Temporary placing means 6 for temporarily placing the workpiece and cleaning means 7 for washing the workpiece after grinding are disposed in the movable region of the conveying means 5.

  The apparatus base 2 is provided with a holding table 10 that holds and rotates a workpiece. The periphery of the holding table 10 is covered by a holding table cover 11, and the holding table 10 can reciprocate in the Y-axis direction together with the holding table cover 11 with the expansion and contraction of the bellows 9 extending in the Y-axis direction. In the vicinity of the temporary placement means 6, a first transport means 8 a for transporting the workpiece before grinding from the temporary placement means 6 to the holding table 10 is disposed. In addition, a second transport unit 8b is disposed adjacent to the first transport unit 8a to transport the workpiece after grinding from the holding table 10 to the cleaning unit 7.

  A column 3 extending in the Z-axis direction is erected on the rear side of the apparatus base 2 in the Y-axis direction, and a grinding means 20 for grinding the workpiece on the side of the column 3 via the elevating means 30 is provided. It is arranged. The grinding means 20 includes a spindle 21 (shown in FIG. 2A) having an axis in the Z-axis direction, a spindle housing 22 that rotatably surrounds the spindle 21, and a support portion 27 that supports the spindle housing 22. The motor 23 connected to one end of the spindle 21, the grinding wheel 25 mounted via the mount 24 at the lower end of the spindle 21, and the free end (lower part) of the grinding wheel 25 having a predetermined interval with each other And a plurality of grinding wheels 26 fixed to each other. The grinding means 20 can rotate the grinding wheel 25 at a predetermined rotational speed by being driven by the motor 23.

  The elevating means 30 includes a ball screw 31 extending in the Z-axis direction, a motor 32 connected to one end of the ball screw 31, a pair of guide rails 33 extending in parallel with the ball screw 31, and one surface supporting the spindle housing 22. And an elevating plate 34 connected to the portion 27. A pair of guide rails 33 are in sliding contact with the other surface of the elevating plate 34, and a ball screw 31 is screwed into a nut formed at the center of the elevating plate 34. When the ball screw 31 is rotated by being driven by the motor 32, the lifting plate 32 can be moved up and down in the Z-axis direction along the pair of guide rails 33, and the grinding means 20 can be moved up and down in the Z-axis direction.

  As shown in FIG. 1, the grinding apparatus 1 is a grinding liquid that supplies a grinding liquid between a grinding means 20 and a holding table 10 to a workpiece held by the holding table 10 and a grinding wheel 26 of the grinding means 20. Supply means 40 is provided. As shown in FIG. 2A, the grinding fluid supply means 40 includes a plate portion 41 formed in a substantially disc shape, and a cover portion 45 whose both ends are bent downward from the outer peripheral side of the holding table 10. ing. The cover 45 is fixed to the base 2 a and the like and does not move, but may be disposed on the holding table cover 11.

  As shown in FIG. 2B, a ring-shaped opening 411 is formed between the outer peripheral portion 410 of the plate portion 41 and the inner peripheral wall 450 of the cover portion 45. A configuration in which the grinding wheel 26 fixed to the free end of the grinding wheel 25 is inserted into the opening 411 as shown in FIG. 2C by lowering the grinding means 20 shown in FIG. 1 in the Z-axis direction. It has become. The opening 411 is formed such that, of the grinding wheel 26 arranged in an annular shape, at least a portion to be processed in contact with the workpiece held on the holding table 10 protrudes downward. Therefore, as shown in FIG. 3, the opening 411 penetrates vertically in the processing region P, which is a region where the grinding wheel 26 exerts a grinding action by pressing the upper surface Wa of the workpiece W. On the other hand, on the opposite side of the processing region P across the rotation center of the grinding wheel 25, an arc-shaped escape groove 412 is formed to prevent the grinding wheel 26 from contacting the plate portion 41. A predetermined gap is formed between the groove bottom 413 of the escape groove 412 and the grinding surface 260 of the grinding wheel 26. Moreover, the plate part 41 and the cover part 45 may be formed integrally, and may be formed separately. In addition, in FIG.2 (c), although the lower part of the cover part 45 is cut out and shown, the cover part 45 has the structure extended below, as shown in FIG.1 and FIG.3. .

  As shown in FIG. 3, the grinding fluid supply means 40 includes an upper wall portion 44 that forms a space 440 with the upper surface Wa side of the workpiece W formed on the plate portion 41 and held on the holding table 10. I have. The upper wall portion 44 is the lower surface of the plate portion 41.

  The grinding fluid supply port 42 is composed of, for example, a plurality of ejection holes 420 shown in FIG. 2C, and the processing region P of the grinding wheel 26 shown in FIG. 3 (the grinding wheel 26 is the upper surface Wa of the workpiece W). Are formed in a circular arc shape along a region where the grinding action is exerted by pressing. As shown in FIG. 3, a grinding fluid supply path 43 is formed inside the plate portion 41, one end communicating with the grinding fluid supply port 42 and the other end connected to a grinding fluid supply source 46.

  The upper wall portion 44 forms a space 440 between the upper surface Wa of the workpiece W held on the holding table 10, and the grinding liquid supplied to the upper surface Wa of the workpiece W is placed in the space 440. As the holding table 10 rotates, it can be made to flow toward the grinding wheel 26 in the processing region P.

  Although not shown, the grinding fluid supply means 40 may be provided with a lifting mechanism. In that case, the height of the upper wall portion 44 can be adjusted by moving the plate portion 41 in the vertical direction by the lifting mechanism.

  As shown in FIG. 3, a non-contact type thickness measuring unit 12 that measures the thickness of the workpiece is embedded in the plate unit 41. The thickness measuring unit 12 includes, for example, an optical sensor, and can measure the thickness of the workpiece from above the workpiece held on the holding table 10. The thickness measuring unit 12 is disposed at a position away from the grinding fluid supply port 42. By disposing the thickness measuring unit 12 at a position away from the grinding fluid supply port 42, the grinding fluid does not intervene between the thickness measuring unit 12 and the upper surface Wa of the workpiece W during grinding. In the measurement by the thickness measuring unit, it is possible to measure with high accuracy without being affected by the grinding fluid.

  The grinding fluid supply means 40 includes a suction portion 47 that sucks the grinding fluid that is supplied from the grinding fluid supply port 42 to the upper surface Wa of the workpiece W, reaches the processing region P, and is discharged outside the grinding wheel 26. . The suction unit 47 includes a suction port 470 that faces the workpiece held on the holding table 10, and a suction path 471 that has one end communicating with the suction port 470 and the other end connected to the suction source 49 via the valve 48. And. As shown in FIG. 2C, the suction port 470 is formed longer than the arc-shaped row of the ejection ports 420, and can sufficiently suck the grinding liquid discharged to the outside of the grinding wheel 26. .

  Next, an operation example of the grinding apparatus 1 shown in FIG. 1 will be described. The material to be processed W shown in FIG. 3 is not particularly limited, and the surface to be ground by the grinding wheel 26 is the upper surface Wa. A plurality of workpieces W before grinding are accommodated in the cassette 4a.

  First, the conveying means 5 takes out the workpiece W before grinding from the cassette 4 a and conveys it to the temporary placing means 6. After the workpiece W is aligned by the temporary placement means 6, the first transport means 8 a transports the work W to the holding table 10. Thereafter, the workpiece W is sucked and held by the holding table 10 and the holding table cover 11 is moved in the Y-axis direction along with the expansion and contraction of the bellows 9, and the holding table 10 is moved below the grinding means 20 as shown in FIG. Move to. At this time, the holding table 10 is rotated, for example, in the direction of arrow B by a rotating means (not shown).

  As shown in FIG. 4, the grinding wheel 25 is lowered toward the workpiece W held on the holding table 10 by the lifting / lowering means 30 shown in FIG. 1 while rotating the grinding wheel 25 in the direction of arrow A, for example. In this way, the grinding wheel 26 that descends while rotating is inserted into the ring-shaped opening 411 of the grinding liquid supply means 40 and is ground while pressing the upper surface Wa of the workpiece W. During grinding, the grinding wheel 26 always passes through the center of the workpiece W. The diameter of the rotation trajectory of the grinding wheel 26 is equal to or greater than the diameter of the workpiece W. Although not explicitly shown in FIGS. 3 and 4, the holding surface 100 that holds the workpiece W in the holding table 10 is a conical surface with a gentle slope with the center as the apex (for example, a diameter φ of 200 mm and the apex and the bottom of the cross section). And the axis of the spindle 21 is relative to the rotation axis of the holding table 10 so that the holding surface 100 and the grinding surface 260 of the grinding wheel 26 are parallel to each other in the processing region P. Therefore, the grinding wheel 26 comes into contact with the upper surface Wa of the workpiece W in the processing region P shown in FIG. In other words, half of the grinding wheel 26 positioned above the workpiece W acts on the upper surface Wa of the workpiece W to perform grinding.

  During grinding of the workpiece W, the grinding fluid is supplied between the grinding wheel 26 and the upper surface Wa of the workpiece W by the grinding fluid supply means 40. Specifically, the grinding fluid supply source 46 is activated, and the grinding fluid is supplied from the grinding fluid supply port 42 toward the upper surface Wa of the workpiece W held on the holding table 10 through the grinding fluid supply path 43. . As shown in FIG. 5, the grinding fluid supply port 42 is located on the rear side (upstream side) in the rotation direction of the holding table 10 with respect to the processing region P, and the grinding fluid is ejected from the ejection holes 420 at this position. The grinding liquid ejected from the ejection holes 420 and supplied to the upper surface Wa of the workpiece W is ground in the space 440 between the upper wall portion 44 and the upper surface Wa of the workpiece W shown in FIG. A predetermined distance between the liquid supply port 42 and the grinding wheel 26 in the processing region P flows to the front side (downstream side) in the rotation direction of the holding table 10. That is, the grinding fluid supplied from the grinding fluid supply port 42 to the upper surface Wa of the workpiece W forms a grinding fluid supply layer 50 that flows toward the grinding wheel 26 in the processing region P as the holding table 10 rotates. To do. As shown in FIG. 4, the grinding fluid supply layer 50 blocks an air layer generated around the rotating grinding wheel 26, so that the grinding fluid is not prevented from reaching the processing region P. . During grinding, the thickness measuring unit 12 measures the thickness of the workpiece W. The thickness measuring unit 12 is located away from the grinding fluid supply port 42 and is opposite to the direction in which the grinding fluid flows. Since it is disposed in the direction (position where the grinding fluid supply layer 50 is not formed), the thickness can be measured without being affected by the grinding fluid.

  Since the suction portion 47 is disposed on the front side in the rotation direction of the holding table 10 with respect to the processing area P, the grinding liquid supplied to the upper surface Wa of the workpiece W is directed toward the front side in the rotation direction of the holding table 10. Then, after reaching the machining area P and discharged to the outside of the grinding wheel 26 in the machining area P, the suction fluid is sucked by the suction portion 47. Specifically, the suction force from the suction source 49 acts on the suction port 470, and the grinding liquid is sucked from the suction port 470 and discarded outside the apparatus. By sucking the grinding fluid used for grinding by the suction portion 47, it is possible to effectively create a flow of the grinding fluid from the grinding fluid supply port 42 toward the grinding wheel 26 in the processing region P.

  Here, when supplying the grinding liquid to the processing region P, in order to more effectively remove the grinding dust generated in the processing region P or to sufficiently cool the heat generated in the processing region P, the processing region P The faster the flow rate of the grinding fluid that reaches In the grinding fluid supply means 40 of this embodiment, it becomes possible to supply the grinding fluid to the machining area P at a sufficiently high flow rate by the centrifugal force accompanying the rotation of the holding table 10. Further, the height position of the upper wall portion 44 is adjusted according to the thickness of the workpiece W by an elevating mechanism (not shown), and the interval between the upper wall portion 44 and the upper surface Wa of the workpiece W is narrowed. By doing so, the flow rate of the grinding fluid can be increased. The height position of the upper wall portion 44 is adjusted before the workpiece W is ground.

  Further, since the outer peripheral side of the rotating holding table 10 has a higher peripheral speed than the central side, and the amount of work of the grinding wheel 26 for grinding the workpiece W increases, the grinding fluid supply means 40 is provided with the workpiece W. It is desirable to increase the amount of the grinding fluid in proportion to the work amount of the grinding wheel 26 for grinding. For example, at a position facing the outer peripheral side of the workpiece W held on the rotating holding table 10, the number of the ejection holes 420 is increased and the outer peripheral side of the workpiece W is arranged as shown in FIG. 5. The interval between the adjacent ejection holes 420 is narrowed. In this way, a large amount of grinding fluid can be efficiently supplied to the entire processing region P.

  Further, the grinding liquid supply means 42 may be provided with a slit-shaped slit-shaped grinding liquid supply port 42a along the processing region P shown in FIG. The slit-shaped grinding fluid supply port 42a is formed so as to become wider toward the outer peripheral side of the workpiece W, and a large amount of the slit-shaped grinding fluid supply port 42a is formed in the entire processing region P like the grinding fluid supply port 42 shown in FIG. It is possible to supply the grinding fluid efficiently.

  As shown in FIG. 7, the plate portion 41 is worn to the shortest length that the grinding wheel 26 can be used, and even if the grinding wheel 25 is lowered during grinding, the grinding wheel 25 and the plate portion 41 are not connected. Set to a thickness that does not interfere. Thereby, even if it grinds continuously the some workpiece W with the grinding stone 26, the grinding wheel 25 does not contact the plate part 41 and it can prevent that an apparatus is damaged.

  As described above, the workpiece W is ground while supplying the grinding liquid to the processing region P, and the thickness measuring unit 12 measures the thickness of the workpiece W, and the workpiece W reaches a desired thickness. The grinding means 20 is raised by the lifting means 30 shown in FIG. After the grinding, the holding table 10 is moved to the movable range of the second conveying means 8b. The second conveyance means 8b conveys the workpiece W after grinding from the holding table 10 to the cleaning means 7, and after cleaning in the cleaning means 7, the workpiece W after cleaning by the conveyance means 5 is accommodated in the cassette 4b. .

The grinding apparatus 1 according to the present invention includes a grinding fluid supply means 40 that supplies a grinding fluid toward the upper surface Wa of the workpiece W on the rear side in the rotation direction of the holding table 10, and during grinding of the workpiece W, By supplying the grinding fluid from the grinding fluid supply port 42 formed along the machining region P toward the upper surface Wa of the workpiece W, the grinding fluid is brought into contact with the upper wall portion 44 and the workpiece with the rotation of the holding table 10. Since it flows toward the processing region P between the workpiece W and the upper surface Wa, the grinding fluid supply layer 50 can be formed around the grinding wheel 26. That is, the upper surface Wa of the workpiece W is used as a part of the grinding fluid outlet path for guiding the grinding fluid to the grinding wheel 26, and the grinding defined by the upper wall portion 44 and the upper surface Wa of the workpiece W is performed. The liquid lead-out path is used as a means for blocking an air layer formed around the grinding wheel 26. Thereby, since the grinding fluid supply layer 50 blocks the air layer generated around the rotating grinding wheel 26, the grinding fluid can sufficiently reach the processing region P.
In addition, the grinding fluid supply means 40 grinds the sidewall of the grinding wheel 26 in order to supply the grinding fluid from the grinding fluid supply port 42 disposed above the workpiece W toward the upper surface Wa of the workpiece W. The risk of liquid collision and scattering is also reduced. This eliminates the need to supply an excessively large amount of grinding fluid to the workpiece W as in the prior art.

1: Grinding device 2: Device base 2a: Upper surface 3: Columns 4a, 4b: Cassette 5: Conveying means 6: Temporary placing means 7: Cleaning means 8a: First conveying means 8b: Second conveying means 9: Bellows 10 : Holding table 11: Holding table cover 12: Non-contact thickness gauge 20: Grinding means 21: Spindle 22: Housing 23: Motor 24: Mount 25: Grinding wheel 26: Grinding wheel 27: Supporting part 30: Lifting means 31: Ball screw 32 : Motor 33: Guide rail 34: Elevating plate 40: Grinding fluid supply means 41: Plate portion 410: Outer peripheral portion 411: Opening portion 42: Grinding fluid supply port 420: Ejection hole 42a: Slit-shaped grinding fluid supply port 43: Grinding fluid Supply path 44: Upper wall part 45: Cover part 46: Grinding fluid supply source 47: Suction part 470: Suction port 48: Valve 49: Suction source 50: Grinding Liquid supply layer

Claims (1)

A holding table that holds a workpiece and is rotatable in a predetermined direction, a grinding means having a grinding wheel including a grinding wheel for grinding the workpiece held by the holding table, a workpiece, and the grinding wheel And a grinding liquid supply means for supplying a grinding liquid to
The grinding wheel is configured such that a plurality of grinding wheels are annularly arranged at a free end of a base with a predetermined interval from each other,
The grinding fluid supply means comprises a grinding fluid supply port for supplying a grinding fluid from a processing region where the grinding wheel acts on the workpiece toward the upper surface of the workpiece from the rear side in the rotation direction of the holding table;
A predetermined interval is provided on the upper surface side of the workpiece between the grinding fluid supply port and the grinding wheel in the processing region, and the grinding fluid supplied from the grinding fluid supply port to the upper surface of the workpiece is An upper wall portion that forms a grinding fluid supply layer that flows toward the grinding wheel in the processing region as the holding table rotates;
Grinding liquid disposed on the front side in the rotation direction of the holding table from the machining area, supplied to the upper surface of the workpiece from the grinding liquid supply port, and discharged to the outside of the grinding wheel after reaching the machining area. A suction part having a suction port for suction;
A grinding apparatus comprising:

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