JP6337652B2 - Heat treatment equipment - Google Patents

Description

  The present invention relates to a heat treatment apparatus, and more particularly to a heat treatment apparatus that performs a heat treatment such as brazing on an object placed inside an apparatus main body.

  Conventionally, as a heat treatment apparatus for performing heat treatment such as brazing on an object, for example, a first heating chamber, a second heating chamber, a first cooling chamber, and a second cooling chamber in which a metal product as an object is in a substantially vacuum state. What is comprised so that it may convey sequentially to a cooling chamber with a conveyance means is known.

  In such a heat treatment apparatus, the object is heated to the vicinity of the melting point of the brazing material by induction heating in the first heating chamber, and then transferred to the second heating chamber where the heater or the like is internal air. The object is heated to the brazing temperature by heating. In the heat treatment apparatus, the object thus heated is transported in the order of the first cooling chamber and the second cooling chamber, and the desired brazed product is manufactured by cooling in the respective chambers. (For example, refer to Patent Document 1).

JP 2009-115413 A

  However, in the above-described heat treatment apparatus, it is necessary to transport the metal product, which is an object, to a plurality of chambers that are in a substantially vacuum state, ie, the first heating chamber, the second heating chamber, the first cooling chamber, and the second cooling chamber. As a result, a plurality of chambers and a conveying means are required, which leads to an increase in the size of the entire apparatus. Further, in the second heating chamber, the object is heated by heating the internal air with a heater or the like, so it is necessary to sufficiently heat the internal air in the second heating chamber before the object is transported. In addition, the amount of power consumed during heat insulation was sufficiently large.

  In Patent Document 1, a heat treatment apparatus in which the first heating chamber and the second heating chamber are integrated is also proposed. However, even if the first heating chamber and the second heating chamber are integrated, these devices are proposed. Since the object heated in the heating chamber is transferred to the first cooling chamber and the second cooling chamber by the transfer means, there still remains a problem that leads to an increase in the size of the entire apparatus. In addition, even if the first heating chamber and the second heating chamber are integrated, heating by induction heating is performed in the first half of the integrated heating chamber, and heating is performed by the heater in the second half of the heating chamber. Still, the amount of power consumed during heat insulation was sufficiently large.

  In view of the above circumstances, an object of the present invention is to provide a heat treatment apparatus capable of downsizing the entire apparatus and reducing power consumption.

In order to achieve the above object, a heat treatment apparatus according to the present invention is arranged in a heat treatment apparatus for performing heat treatment on an object placed inside the apparatus main body so as to cover the periphery of the object. When the object is disposed and driven in a state where a heat insulating member is interposed between the cover body for positioning the object in a substantially sealed space and the object, the object An induction heating means for indirectly heating the object by heating a heating element on which the object is placed by induction heating, and supplying an inert gas to the space formed by the cover body to thereby create an atmosphere in the space An atmosphere adjusting means to be adjusted, and a control means for driving the induction heating means to heat the object when a heat treatment instruction is given, and installed between the induction heating means and the heating element And the thickness is 0.0 A is 5mm or less electrical resistivity, characterized in that a 5 × 10 ^-7 Ωm or more sheet metal.

  In the heat treatment apparatus according to the present invention, the thin metal plate is non-magnetic stainless steel.

  Further, the present invention is characterized in that the heat treatment apparatus includes a metal sheet cooling means for cooling the metal sheet.

  In the heat treatment apparatus, the heat treatment apparatus may further include a blowing unit that sends out air to the induction heating unit and cools the induction heating unit when the heating process and the cooling process of the object are performed. It is characterized by that.

  In the heat treatment apparatus according to the present invention, the cover body is formed of a heat insulating material.

  In the heat treatment apparatus according to the present invention, when the heat treatment of the object is performed, the control unit stops driving the induction heating unit and supplies the inert gas by the atmosphere adjusting unit. The object is cooled and the object is cooled.

  In the heat treatment apparatus according to the present invention, when the heat treatment command is given, the control means is configured such that the oxygen concentration in the space becomes equal to or less than a predetermined threshold value due to the supply of the inert gas by the atmosphere adjustment means. And driving the induction heating means.

  According to the present invention, when a heat treatment instruction is given, the induction heating means is driven to heat the object, and after the heating process is finished, the induction heating means is stopped to cool the object. As a result, it is possible to reduce the size of the entire apparatus without requiring a transfer means for transferring the object from the heating chamber to the cooling chamber as in the prior art. Moreover, since the object is heated by induction heating, it is not necessary to preliminarily heat the internal air with a heater or the like as in the prior art, and as a result, it is possible to reduce the amount of power consumed during heat retention. . As a result, the entire apparatus can be reduced in size and the power consumption can be reduced.

In addition, by installing a thin metal plate with a thickness of 0.005 mm or less and an electrical resistivity of 5 × 10 ⁻⁷ Ωm or more between the induction heating means and the heating element, the magnetic field lines are passed and the magnetic field is blocked. In addition, by reflecting the radiant heat of the heating element, heat transfer to the induction heating coil side can be suppressed, and the heat insulation effect can be improved. Thereby, it is possible to reduce the heat radiation by the heating element to save power, and to improve the heating capacity and to improve the productivity.

FIG. 1 is a schematic view schematically showing a heat treatment apparatus according to an embodiment of the present invention. FIG. 2 is a block diagram showing a characteristic control system of the heat treatment apparatus according to the embodiment of the present invention. FIG. 3 is a chart showing the relationship between electrical resistivity and calorific value. FIG. 4 is a chart showing the relationship between the thickness of the metal plate and the amount of heat generated, and the relationship between the thickness of the metal plate and the water reduction rate of the heating element. FIG. 5 is a flowchart showing the contents of processing performed by the control unit constituting the heat treatment apparatus according to the embodiment of the present invention. FIG. 6 is a flowchart showing the contents of the atmosphere adjustment process shown in FIG. FIG. 7 is a flowchart showing the processing contents of the heating process shown in FIG. FIG. 8 is a flowchart showing the contents of the cooling process shown in FIG.

  Hereinafter, preferred embodiments of a heat treatment apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a schematic diagram schematically showing a heat treatment apparatus according to an embodiment of the present invention, and FIG. 2 is a block diagram showing a characteristic control system of the heat treatment apparatus according to an embodiment of the present invention. . The heat treatment apparatus exemplified here includes an apparatus main body 10, a heating element 20, a cover body 30, an induction heating coil 40, and a fan 50.

  The apparatus main body 10 includes a heat insulating plate 11, leg portions 12, and a box body 13. There are a plurality (two in the illustrated example) of heat insulating plates 11 (11a and 11b), and each is a rectangular plate-like body formed of ceramics or the like. Of these heat insulating plates 11, the upper heat insulating plate 11a is a transparent plate-like body.

  These heat insulating plates 11 are laminated in a state where they are separated from each other with a thin metal plate 14 interposed therebetween. That is, the metal thin plate 14 is installed between the two heat insulating plates 11 (11a and 11b). The metal thin plate 14 will be described later.

  A plurality of (for example, four) leg portions 12 are provided, and each leg portion 12 is provided so as to extend downward from the lower surfaces of the four top portions of the lower heat insulating plate 11b.

  The box 13 has a rectangular shape with an open bottom surface. Such a box 13 is mounted on the upper surface of each edge of the upper heat insulating plate 11a by placing the lower ends of the front, rear, left side, and right side on the upper surface of the upper heat insulating plate 11a. The outer wall is covered.

The heating element 20 has a disk shape. The heating element 20 is formed of a material having an electrical resistivity of about 1.0 × 10 ⁻⁵ Ωm such as graphite or graphite. Such a heating element 20 is placed on the upper surface of the central region of the upper heat insulating plate 11a. The heating element 20 has a target object (for example, copper, silver, etc.) 1 to be heat-treated placed on the upper surface thereof.

  The cover body 30 is formed from a heat insulating material and has, for example, a hemispherical shape. Such a cover body 30 covers the periphery of the heating element 20 and the object 1 by being placed on the upper heat insulating plate 11a in such a manner that its opening is closed by the upper heat insulating plate 11a. It is arranged in a manner. Thereby, the target object 1 and the heat generating body 20 will be located in the substantially sealed space. The inner surface of the cover body 30 constitutes a reflection surface.

  The cover body 30 has an air supply port and an exhaust port (not shown). The air supply port communicates with the air supply line 21. The air supply line 21 is provided so as to pass through a first through hole (not shown) provided in the box 13 and covers an inert gas such as nitrogen gas sealed in a cylinder (not shown). It is for supplying to the space formed by the body 30. A valve 22 is provided in the middle of the air supply line 21. The opening of the valve 22 is adjusted by a command from the control unit 70 described later. When the valve 22 is closed, the passage of the inert gas is restricted. When the valve 22 is opened, the passage of the inert gas is performed. Is allowed.

  The exhaust port communicates with the exhaust line 23. The exhaust line 23 is provided in such a manner that it passes through a second through hole (not shown) provided in the box 13. The exhaust line 23 is for exhausting the gas flowing in from the exhaust port to the outside.

  The induction heating coil 40 is disposed below the lower heat insulating plate 11b. More detailed description is as follows. A pair of left and right support members 41 are installed between the pair of front and rear legs 12 of the legs 12 constituting the apparatus main body 10. Each of these support members 41 has an upper extension 42 extending in a manner of projecting upward. The induction heating coil 40 is wound in a spiral shape, and is disposed in a manner that is supported by the tip portions of the upper extension portions 42.

  Such an induction heating coil 40 is induction heating means for heating the heating element 20 by induction heating when a voltage having a specific frequency is applied from the electrically connected power converter 43. Here, the power converter 43 incorporates what is called an inverter circuit, and gives the alternating current provided from the commercial power supply 44 to the induction heating coil 40 as alternating current of a specific frequency.

  The fan 50 is disposed on the lower side of the induction heating coil 40 so as to straddle the pair of left and right support members 41. The fan 50 is driven by a command from the control unit 70, and is a blowing unit that sends air to the induction heating coil 40 when driven.

  Such a heat treatment apparatus includes an input unit 61, an oxygen concentration detection sensor 62, a temperature detection sensor 63, and a control unit 70 in addition to the above configuration.

  The input means 61 is, for example, a remote controller numeric keypad, a keyboard, or a touch panel screen, and is an operation input unit for an operator using the heat treatment apparatus to input various commands.

  The oxygen concentration detection sensor 62 is disposed at a predetermined location on the inner surface of the cover body 30. The oxygen concentration detection sensor 62 detects the oxygen concentration in the space formed by the cover body 30 when the cover body 30 is provided. The oxygen concentration detected by the oxygen concentration detection sensor 62 is output to the control unit 70 as an oxygen concentration signal.

  The temperature detection sensor 63 is disposed at a predetermined location on the surface of the heating element 20. The temperature detection sensor 63 detects the temperature of the heating element 20. The temperature detected by the temperature detection sensor 63 is output to the control unit 70 as a temperature signal.

  The control unit 70 comprehensively controls the operation of the heat treatment apparatus, that is, the heat treatment in accordance with the program and data stored in the memory 80. The input processing unit 71, the comparison unit 72, the valve drive processing unit 73, the inverter drive processing unit 74, a fan drive processing unit 75 is provided. Here, various information is stored in the memory 80, and reference density information and target temperature information are stored as characteristic features in the present embodiment. The reference concentration information is information including a reference concentration (for example, 100 ppm) that becomes a threshold value in the heat treatment described later. The target temperature information is information including a target temperature that is a target value in the heat treatment described later.

  The input processing unit 71 inputs and processes commands and signals from the input means 61 and various sensors 62. The comparison unit 72 compares the detected concentration input through the input processing unit 71 with the reference concentration read out from the memory 80, and compares the detected temperature input through the input processing unit 71 with the target temperature read out from the memory 80. To do.

  The valve drive processing unit 73 gives a command to the valve 22 to open, close, and increase / decrease the opening degree.

  The inverter drive processing unit 74 gives a command to the power conversion device 43 to drive or stop the power conversion device 43. Moreover, the inverter drive processing unit 74 increases or decreases the frequency of the voltage applied to the induction heating coil 40 by increasing or decreasing the output of the power conversion device 43 by giving a command to the power conversion device 43.

  The fan drive processing unit 75 drives and stops driving the fan 50 by giving a command to the fan 50.

Next, the metal thin plate 14 described above will be described. The thin metal plate 14 is a plate-like body having a substantially rectangular shape, and has a slightly smaller area than the heating element 20. The metal thin plate 14 preferably has a thickness of 0.005 mm or less and an electrical resistivity of 5 × 10 ⁻⁷ Ωm or more. In the present embodiment, the thickness is 0.005 mm, such as SUS304. Made of non-magnetic stainless steel. Reference numeral 15 in FIG. 1 denotes a metal thin plate cooling means that supplies cooling air to the metal thin plate 14 to cool the metal thin plate 14.

  By installing such a thin metal plate 14 between the two heat insulating plates 11a and 11b, that is, between the heating element 20 and the induction heating coil 40, heat insulation is performed without blocking the magnetic field as described below. The effect can be improved.

  In general, in the case of electromagnetic induction, when a metal plate is present in an alternating magnetic field, eddy currents generate magnetic lines in the direction opposite to the direction of the magnetic lines when the magnetic lines are linked (passed) through the metal plate, that is, in the direction of canceling. Flows. The eddy current is consumed as heat due to the electrical resistance of the metal plate (Joule heating). Conversely, when an insulating plate is present instead of such a metal plate, when the lines of magnetic force are linked, the eddy current does not flow (or hardly flows) because the electric resistance is high even if an eddy current is attempted to flow. For this reason, since the magnetic force line for negating a magnetic force line does not arise, a magnetic force line will pass as it is. Therefore, the electromagnetic induction phenomenon does not occur in the insulating plate (insulator).

  That is, in induction heating, if the electrical resistance is high, heat generation is high, but if it is too high, eddy currents are hardly generated and heat generation is small. Thereby, in the relationship between the electrical resistivity and the calorific value, the calorific value peak exists somewhere as shown in FIG.

  And since the said metal thin plate 14 is as small as 0.005 mm, the longitudinal cross-sectional area becomes small. Therefore, even if the magnetic lines of force pass, there are fewer lines of magnetic force in the direction to cancel it, and even if the electric resistance is high, the amount of eddy current generated when the lines of magnetic force pass is small. As a result, as shown in FIG. The calorific value of the thin metal plate 14 is reduced.

  Therefore, even if the metal thin plate 14 exists between the heating element 20 and the induction heating coil 40, the magnetic lines of force pass through and reach the heating element 20 to heat the heating element 20. Moreover, the metal thin plate 14 has a low emissivity due to the characteristics of the material, reflects the radiant heat generated by the heating element 20, and can reduce the outflow of radiant heat.

  In this way, by installing the thin metal plate 14 between the heating element 20 and the induction heating coil 40, the induction heating coil 40 does not block the magnetic field by passing the lines of magnetic force and reflects the radiant heat of the heating element 20. It is possible to suppress heat transfer to the side and improve the heat insulation effect. Further, the heating efficiency of the heating element 20 can be improved by reflecting the radiant heat of the heating element 20.

  In the heat treatment apparatus having the above-described configuration, a substantially sealed space is formed by disposing the cover body 30 after the object 1 is placed on the heating element 20, and an air supply line By arranging the box 13 after the 21 and the exhaust line 23 are disposed, the following heat treatment can be performed.

  FIG. 5 is a flowchart showing the contents of processing performed by the control unit 70 constituting the heat treatment apparatus according to the embodiment of the present invention.

  The control unit 70 is waiting for an input of a heat treatment command by the operator as a user through the input means 61 (step S100). And when an operator inputs the heat processing instruction | command through the input means 61 and inputs the heat processing instruction | command through the input process part 71 (step S100: Yes), the control part 70 implements an atmosphere adjustment process (step S200). .

  FIG. 6 is a flowchart showing the contents of the atmosphere adjustment process shown in FIG.

  In this atmosphere adjustment process, the control unit 70 gives an open command to the valve 22 through the valve drive processing unit 73 to open the valve 22 (step S201). The control unit 70 that has opened the valve 22 in this way waits for an oxygen concentration signal to be input through the input processing unit 71 (step S202), that is, waits for oxygen concentration detection by the oxygen concentration detection sensor 62.

  When the oxygen concentration signal is input through the input processing unit 71 (step S202: Yes), the control unit 70 reads out the reference concentration information from the memory 80 through the comparison unit 72, and the detected concentration included in the oxygen concentration signal becomes the reference concentration information. It is compared whether it is below the reference concentration (100 ppm) contained (step S203).

  When the detected concentration is equal to or lower than the reference concentration (step S203: Yes), the control unit 70 decreases the opening degree of the valve 22 by giving a command for decreasing the opening degree to the valve 22 through the valve drive processing unit 73. (Step S204), and then the procedure is returned to end the current atmosphere adjustment process. Here, although the opening degree of the valve 22 is decreased in step S204, the valve 22 is still opened even if the opening degree is decreased.

  According to such an atmosphere adjustment process, the oxygen concentration in the space substantially sealed by the cover body 30 can be adjusted to 100 ppm or less.

  On the other hand, when the detected concentration exceeds the reference concentration (step S203: No), the control unit 70 gives an instruction to increase the opening degree to the valve 22 through the valve drive processing unit 73, whereby the opening degree of the valve 22 is set. Is increased (step S205), and then the process returns to step S202. That is, the processes in step S202, step S203, and step S205 are repeated until the detected density is equal to or lower than the reference density.

  Thus, the control part 70 which implemented the atmosphere adjustment process implements a heat processing (step S300).

  FIG. 7 is a flowchart showing the processing contents of the heating process shown in FIG.

  In this heat treatment, the control unit 70 gives a drive command to the power conversion device 43 through the inverter drive processing unit 74 to drive the power conversion device 43, and issues a drive command to the fan 50 through the fan drive processing unit 75. Then, the fan 50 is driven (step S301, step S302).

  According to this, a voltage having a specific frequency is applied to the induction heating coil 40, and the heating element 20 is induction heated by the induction heating coil 40. When the heating element 20 is heated in this manner, the object 1 placed on the heating element 20 is directly applied from the heating element 20 through the internal atmosphere of the sealed space formed by the cover body 30 or the inner surface of the cover body 30. The object 1 is heated by the heat reflected and reflected. And by driving the fan 50, air can be sent to the induction heating coil 40, and it can suppress that the induction heating coil 40 becomes high temperature more than necessary.

  The control unit 70 that has driven the power conversion device 43 and the fan 50 in this way performs a temperature control process until a predetermined time set in advance by an internal clock elapses (steps S303 to S307).

  In this temperature control process, when the temperature signal is input through the input processing unit 71 (step S303: Yes), the control unit 70 reads the target temperature information from the memory 80 through the comparison unit 72, and the detected temperature included in the temperature signal is detected. It is compared whether or not the temperature is equal to or higher than the target temperature included in the target temperature information (step S304).

  When the detected temperature is equal to or higher than the target temperature (step S304: Yes), the control unit 70 gives an instruction to reduce the output to the power conversion device 43 through the inverter drive processing unit 74 to thereby induce the induction heating coil 40. On the other hand, when the detected temperature is lower than the target temperature (step S304: No), a command to increase the output to the power converter 43 through the inverter drive processing unit 74 is decreased (step S305). To increase the frequency applied to the induction heating coil 40 (step S306).

  The control unit 70 performs such a temperature control process until a predetermined time elapses. When the predetermined time elapses (step S307: Yes), a drive stop command is sent to the power converter 43 through the inverter drive processing unit 74. To stop driving the power converter 43 (step S308), and then return the procedure to end the current heating process.

  According to such heat treatment, the object 1 can be heat-treated by induction heating the heating element 20 so as to match the target temperature. Further, during this heat treatment, the amount of inert gas supplied is reduced as compared with the next cooling treatment, thereby preventing the temperature of the space formed by the cover body 30 from being lowered more than necessary.

  The control unit 70 that has performed the heat treatment in this manner performs a cooling process (step S400).

  FIG. 8 is a flowchart showing the contents of the cooling process shown in FIG.

  In this cooling process, the control unit 70 gives an instruction to increase the opening degree to the valve 22 through the valve drive processing unit 73 to increase the opening degree of the valve 22 (step S401).

  According to this, the amount of the inert gas supplied to the space formed by the cover body 30 can be increased, and the object 1 can be gradually cooled by the inert gas. Further, since the driving of the fan 50 is continued while the object 1 is being cooled, the air is continuously sent to the induction heating coil 40, and the heat of the object 1 is transmitted to the induction heating coil 40. And it can suppress that it becomes unnecessarily high temperature.

  The controller 70 having increased the opening degree of the valve 22 in this way confirms whether or not a predetermined time set in advance has passed through a built-in clock (step S402). The predetermined time in step S402 is a time necessary and sufficient for cooling the object 1 to room temperature with an inert gas, and is determined experimentally in advance.

  When the predetermined time has elapsed (step S402: Yes), the control unit 70 gives a close command to the valve 22 through the valve drive processing unit 73 to close the valve 22 (step S403), and the fan drive processing unit. A drive stop command is given to the fan 50 through 75 to stop the drive of the fan 50 (step S404), and then the procedure is returned to end the current cooling process.

  According to such a cooling process, the object 1 can be cooled to room temperature by supplying an inert gas.

  And the control part 70 which implemented such a cooling process complete | finishes the process based on this heat processing instruction | command. Thereby, the operator can take out the desired brazing product manufactured by heat-treating the object 1 by removing the cover body 30 while detaching the box body 13 from the upper heat insulating plate 11a.

  As described above, in the heat treatment apparatus according to the present embodiment, the air supply line 21 and the valve 22 are provided with an atmosphere adjusting means for adjusting the atmosphere of the space by supplying an inert gas to the space formed by the cover body 30. It is composed.

  As described above, according to the heat treatment apparatus according to the embodiment of the present invention, when a heat treatment command is given, the inert gas is supplied to the space formed by the cover body 30 to thereby change the atmosphere of the space. After the adjustment, a voltage having a specific frequency is applied to the induction heating coil 40 to heat the heating element 20 by induction heating, so that the object 1 is indirectly heat-treated. Since the application of voltage is stopped and the supply amount of the inert gas to the space is increased to cool the object 1, the object 1 is conveyed from the heating chamber to the cooling chamber as in the prior art. No means is required, and the entire apparatus can be reduced in size. Moreover, since the heating element 20 is heated indirectly by induction heating, the object 1 is indirectly heated, so that it is not necessary to preliminarily heat the internal air with a heater or the like as in the prior art, and as a result the temperature is kept. Power consumption at the time can be reduced. Furthermore, the temperature of the space formed by the cover body 30 can be prevented from being lowered more than necessary by reducing the supply amount of the inert gas during the heat treatment by induction heating than during the cooling treatment. Therefore, it is possible to reduce the size of the entire apparatus and reduce the power consumption.

  In particular, by installing a metal thin plate 14 having a thickness of 0.005 mm and made of nonmagnetic stainless steel (SUS304) between the two heat insulating plates 11a and 11b, that is, between the heating element 20 and the induction heating coil 40, a magnetic field is provided. It is possible to improve the heat insulation effect without shutting off the heat, thereby reducing the heat radiation by the heating element 20 to save power and improving the heating capacity and improving the productivity. can do.

  According to the heat treatment apparatus, when the heating process and the cooling process of the object 1 are performed, the fan 50 is driven to send air to the induction heating coil 40, so that the induction heating coil 40 is more than necessary. Can be prevented from becoming too high.

  According to the heat treatment apparatus, since the cover body 30 is formed of a heat insulating material, the rate at which heat in the space formed by disposing the cover body 30 is released to the outside through the cover body 30 is calculated. Can be reduced.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to this, and various modifications can be made.

In the embodiment described above, non-magnetic stainless steel such as SUS304 is used as the metal thin plate 14, but in the present invention, a metal other than SUS304 may be used as long as the electrical resistivity is 5 × 10 ⁻⁷ Ωm or more. .

DESCRIPTION OF SYMBOLS 1 Target object 10 Apparatus main body 11 Heat insulation board 14 Metal thin plate 15 Metal thin plate cooling means 20 Heat generating body 22 Valve 30 Cover body 40 Induction heating coil 43 Power converter 50 Fan 62 Oxygen concentration detection sensor 63 Temperature detection sensor 70 Control part 71 Input processing Unit 72 Comparison unit 73 Valve drive processing unit 74 Inverter drive processing unit 75 Fan drive processing unit 80 Memory

Claims (7)

In a heat treatment apparatus for performing heat treatment on an object placed inside the apparatus main body,
A cover body for positioning the object in a substantially sealed space by being arranged in a manner covering the periphery of the object;
When a heat-insulating member is interposed between the object and the object body, the heat generator on which the object is placed is heated by induction heating when the device is driven, and the object is indirectly heated. Induction heating means for heating automatically,
Atmosphere adjusting means for adjusting the atmosphere of the space by supplying an inert gas to the space formed by the cover body;
When a heat treatment instruction is given, control means for driving the induction heating means to heat the object,
A heat treatment apparatus comprising: a thin metal plate installed between the induction heating means and the heating element and having a thickness of 0.005 mm or less and an electrical resistivity of 5 × 10 ⁻⁷ Ωm or more. .   The heat treatment apparatus according to claim 1, wherein the metal thin plate is nonmagnetic stainless steel.   The heat treatment apparatus according to claim 1, further comprising a thin metal sheet cooling unit that cools the thin metal sheet.   The air blower which sends out air with respect to the said induction heating means and cools this induction heating means when the heat processing and cooling process of the said target object are performed was provided. The heat treatment apparatus according to any one of 3.   The heat treatment apparatus according to claim 1, wherein the cover body is formed of a heat insulating material.   When the heating process of the object is performed, the control unit stops the driving of the induction heating unit and increases the supply of inert gas by the atmosphere adjusting unit to perform the cooling process of the object. It performs, The heat processing apparatus as described in any one of Claims 1-5 characterized by the above-mentioned.   When the heat treatment command is given, the control means drives the induction heating means when the oxygen concentration in the space becomes equal to or less than a predetermined threshold due to the supply of the inert gas by the atmosphere adjustment means. The heat treatment apparatus according to any one of claims 1 to 6.

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