JP6348094B2 - Cooling device and vacuum processing device - Google Patents

Description

  The present invention relates to a cooling device that cools an object to be cooled.

  A vacuum processing apparatus such as a film forming apparatus or a vapor deposition apparatus includes a cryomechanism, and the cryomechanism depressurizes the inside of the vacuum treatment apparatus by condensing and capturing the gas in the apparatus (for example, see Patent Document 1). ). Further, in the vacuum processing apparatus, a cooling plate that cools a substrate to be processed by, for example, thermal radiation is used (for example, see Patent Document 2). The cooling plate is cooled by cooling water flowing through a pipe disposed inside the cooling plate, and the opposite surface of the cooling plate absorbs heat from the substrate to cool the substrate.

Japanese Patent Laid-Open No. 11-166477 JP 2005-332619 A

  By the way, when the cooling plate cools the substrate, the size of the facing surface in the cooling plate is preferably closer to the size of the substrate, and the distance between the substrate and the facing surface is preferably smaller. However, the larger the facing surface, the smaller the gap between the cooling plate and the inner peripheral surface of the vacuum processing apparatus, and the smaller the distance between the substrate and the facing surface, the smaller the gap between the cooling plate and the substrate. . In other words, when the gap between the cooling plate as the cooling body and the substrate is reduced, the conductance is reduced, and as a result, the exhaust speed is reduced.

Such matters are not limited to the cooling device in which the cooling body is cooled by the cooling water, but are common to the cooling device cooled by the cryomechanism.
An object of this invention is to provide the cooling device which enabled it to suppress the fall of exhaust speed in the space in which the cooling object is accommodated.

  A cooling device for solving the above-described problem is a cooling body having a cooling unit, a first surface connected to the cooling unit, and a second surface opposite to the first surface, The cooling body including a passage through which a gas flows between a surface and the second surface and cooled by the cooling unit.

According to the above configuration, since the passage through which the gas flows between the first surface and the second surface is formed in the cooling body, the gas along the first surface of the cooling body is compared with the configuration without the passage. A flow and a gas flow along the second surface are easily formed. Therefore, it becomes easy for gas to enter the cooling body, and as a result, a decrease in the exhaust speed is suppressed in the space in which the object to be cooled is accommodated.
In the cooling device, the cooling body has a plate shape that extends along a first direction that is one direction and a second direction that intersects the first direction, and the passage extends in the first direction. And a plurality of cooling members having different sizes may be included in the plurality of cooling members.

  In the cooling device, the cooling body has a plate shape that extends along a first direction that is one direction and a second direction that intersects the first direction, and the passage extends in the first direction. The slit which extends along and divides the cooling body into a plurality of cooling members may be used. Of the plurality of cooling members, at least one of the cooling members positioned at the end in the second direction is an end member, and the size of the end member is that of the other cooling member other than the end member. It may be smaller than the size.

  According to the said structure, since a channel | path is located near the edge in a 2nd direction among cooling bodies, the gas which flows around a cooling body becomes easy to enter a cooling body. Therefore, a gas flow along the first surface and a gas flow along the second surface are easily formed, and a reduction in the exhaust speed is suppressed in the space in which the object to be cooled is accommodated.

  In the cooling device, the cooling body has a plate shape that extends along a first direction that is one direction and a second direction that intersects the first direction, and the passage extends in the first direction. The slit which extends along and divides the cooling body into a plurality of cooling members may be used. And among the cooling members, the cooling member located at the center in the second direction is a central member, and the size of the central member is larger than the size of the other cooling members other than the central member. It may be small.

  According to the above configuration, since the gas flowing around the cooling body can easily enter the cooling body, a gas flow along the first surface of the cooling body and a gas flow along the second surface are formed. It becomes easy and the fall of exhaust speed is suppressed in the space in which the cooling object is accommodated.

  In the cooling device, the cooling body has a plate shape that extends along a first direction that is one direction and a second direction that intersects the first direction, and the passage extends in the first direction. It is preferable that the slit extends along the cooling body and partitions the cooling body into a plurality of cooling members. The cooling members preferably have substantially the same shape as all the other cooling members, and are arranged at equal intervals in the second direction.

  According to the above configuration, a gas flow along the first surface is easily formed over the entire first surface, and a gas flow along the second surface is easily formed over the entire second surface. A reduction in exhaust speed is suppressed in the space in which the object is accommodated.

  In the cooling device, a surface defined by the first direction and the second direction is a reference surface, and at least one of the plurality of cooling members is positioned along a plane inclined with respect to the reference surface. An inclined member is preferable. And it is preferable that the said inclination member has an edge in the said 2nd direction, and the said edge overlaps with the said other cooling member adjacent to the said inclination member in the said 2nd direction.

  According to the above configuration, in the cooling body, in the portion where the edge of the inclined member in the second direction overlaps with the adjacent cooling member in the second direction, two cooling when viewed from the direction facing the second surface. The gap between the members is not visually recognized. Therefore, it is difficult to form a gap in a region where each of the two cooling members cools when viewed from the direction facing the second surface. As a result, the efficiency with which the cooling device cools the object to be cooled increases.

The block diagram which shows the schematic structure of one Embodiment which actualized the cooling device of this invention with the vacuum processing apparatus by which a cooling device is mounted. The perspective view which shows the perspective structure of a cooling body with a reference surface. The top view which shows the planar structure of the cooling body in the planar view facing the 2nd surface of a cooling body. The figure which shows the cross-section of a cooling body with a cooling unit. The top view which shows the planar structure of the cooling body in the planar view facing the 1st surface of a cooling body. The top view which shows the planar structure of the cooling body in the planar view facing the 2nd surface of the cooling body in a modification. The perspective view which shows the perspective structure of the cooling body in a modification with a reference plane. The perspective view which shows the perspective structure of the cooling body in a modification with a reference plane. The top view which shows the planar structure of the cooling body in the planar view facing the 2nd surface of the cooling body in a modification.

  With reference to FIGS. 1 to 5, one embodiment in which the cooling device is embodied will be described. Hereinafter, a schematic configuration of a film forming apparatus which is an example of a vacuum processing apparatus on which the cooling apparatus is mounted, a configuration of the cooling apparatus, and an operation of the cooling apparatus will be described in order.

[Schematic configuration of deposition system]
A schematic configuration of the film forming apparatus will be described with reference to FIG. FIG. 1 is a block diagram schematically showing a configuration of the film forming apparatus viewed from above.

  As shown in FIG. 1, the cooling device 10 includes a cooling unit 11 and a cooling body 12 cooled by the cooling unit 11, and the cooling body 12 includes a first surface 12 a connected to the cooling unit 11, and a first surface. It has the 2nd surface 12b on the opposite side to the surface 12a.

  The cooling apparatus 10 is mounted on the film forming apparatus 100, and the film forming apparatus 100 is, for example, either a sputtering apparatus or a vapor deposition apparatus. The film forming apparatus 100 is a film forming target, and includes a vacuum chamber 101 that stores the cooling target Tg of the cooling device 10, a film forming unit 102 that discharges a film forming species toward the cooling target Tg, and a cooling target Tg. And a support portion 103 that supports the lower end. When the film forming apparatus 100 is a sputtering apparatus, the film forming section 102 is a cathode apparatus, and when the film forming apparatus 100 is a vapor deposition apparatus, the film forming section 102 is a vapor deposition source.

  In the film forming apparatus 100, the cooling device 10 is arranged in a state where the second surface 12 b of the cooling body 12 faces the film forming section 102, and the support section 103 in the direction in which the cooling body 12 and the film forming section 102 face each other. Is located between the cooling body 12 and the film forming unit 102.

  The film forming apparatus 100 includes an exhaust unit 104 that depressurizes the inside of the film forming apparatus 100 to a predetermined pressure and forms a gas flow inside the film forming apparatus 100.

  When the film forming process is performed on the cooling target Tg, the cooling device 10 cools the cooling target Tg and condenses the gas in the vacuum chamber 101 to reduce the pressure of the space in which the cooling target Tg is accommodated. . The first distance L1 that is the distance between the second surface 12b of the cooling body 12 and the cooling target Tg is, for example, about several tens of mm. Further, the minimum value of the second distance L2, which is the distance between the edge of the cooling body 12 and the portion of the inner peripheral surface of the vacuum chamber 101 facing the edge of the cooling body 12, is about several tens of mm, for example.

[Configuration of cooling device]
The configuration of the cooling device will be described in more detail with reference to FIGS.
As shown in FIG. 2, the cooling body 12 has a plate shape that expands along a first direction D <b> 1 that is one direction and a second direction D <b> 2 that is orthogonal to the first direction D <b> 1. The cooling body 12 includes a passage through which gas flows between the first surface 12a and the second surface 12b. In the present embodiment, the passage is a slit 21 s that extends along the first direction D <b> 1 and partitions the cooling body 12 into a plurality of cooling members 21. In the plurality of cooling members 21, each cooling member 21 has substantially the same shape as all the other cooling members 21, and is arranged at equal intervals in the second direction D2.

  According to such a cooling body 12, a gas flow along the first surface 12a is easily formed on the entire first surface 12a, and a gas flow along the second surface 12b is formed on the entire second surface 12b. Therefore, a decrease in the exhaust speed is suppressed in the space in which the cooling target Tg is accommodated.

  A plane defined by the first direction D1 and the second direction D2 is the reference plane R. All of the plurality of cooling members 21 are inclined members 21t positioned along a plane inclined with respect to the reference plane R, and the inclined member 21t has an edge 21e in the second direction D2. The edge 21e of the inclined member 21t overlaps with another inclined member 21t adjacent to the inclined member 21t in the second direction D2.

  Each inclined member 21t is substantially parallel to all the other inclined members 21t, and the inclined angle θ, which is an angle formed by each inclined member 21t and the reference plane R, may be larger than 0 ° and not larger than 90 °. 30 ° or more and 60 ° or less is preferable. The inclination angle θ may be set in consideration of the efficiency of heat absorption by the cooling body 12 and the exhaust speed.

  Each inclined member 21t has a first inclined surface 21a connected to the cooling unit 11 and a second inclined surface 21b facing the cooling target Tg. When viewed from the direction facing the first inclined surface 21 a of each inclined member 21 t, the plurality of first inclined surfaces 21 a are connected to the cooling unit 11, that is, the first surface 12 a of the cooling body 12. It is composed. Further, when viewed from the direction facing the second inclined surface 21b of each inclined member 21t, the plurality of second inclined surfaces 21b are formed as one surface facing the cooling target Tg, that is, the second surface 12b of the cooling body 12. It is composed. In other words, each first inclined surface 21a includes a part of a different first surface 12a, and each second inclined surface 21b includes a part of a different second surface 12b.

  That is, as shown in FIG. 3, since the edge 21e of each inclined member 21t overlaps with another inclined member 21t adjacent to each inclined member 21t in the second direction D2, the direction from the direction facing the reference plane R As seen, the plurality of inclined members 21t constitute one first surface 12a and one second surface 12b.

  In the film forming apparatus 100, when the cooling body 12 is viewed from the cooling target Tg, the second surface 12b is a single surface and has a portion penetrating between the second surface 12b and the first surface 12a. It is visually recognized not to. That is, in the cooling target Tg, almost the entire portion facing the second surface 12 b faces any one of the cooling members 21 constituting the cooling body 12.

  As described above, in the cooling body 12, the position of the edge 21e of the inclined member 21t in the second direction D2 overlaps with the adjacent inclined member 21t in the second direction D2, as viewed from the direction facing the second surface 12b. Thus, the gap between the two inclined members 21t is not visually recognized. Therefore, when viewed from the direction facing the second surface 12b, it is difficult to form a gap between regions where the inclined members 21t are cooled. As a result, the efficiency with which the cooling device 10 cools the object to be cooled increases.

  Each inclined member 21t is a metal plate member, and the forming material of the inclined member 21t may be, for example, stainless steel, titanium alloy, and copper.

  In each inclined member 21t, it is preferable that at least a part of the second inclined surface 21b has a black color, and it is more preferable that the entire second inclined surface 21b has a black color. That is, the emissivity of at least a part of the second inclined surface 21b is preferably 0.8 or more, and the emissivity of the entire second inclined surface 21b is more preferably 0.8 or more. Since the second inclined surface 21b is black, the cooling body 12 increases the efficiency of heat absorption by radiation, and as a result, the cooling efficiency of the cooling target Tg by the cooling body 12 increases.

In each inclined member 21t, at least a part of the first inclined surface 21a may have a black color. That is, in each inclined member 21t, the emissivity of at least a part of the first inclined surface 21a may be 0.8 or more. In each inclined member 21t, the difference between the distance between the object to be cooled Tg and the second inclined surface 21b and the distance between the object to be cooled Tg and the first inclined surface 21a decreases as the inclination angle θ described above increases. Become. Thus, since the first inclined surface 21 a increases the degree contribute to the cooling of the cool target Tg by radiation, it preferably has at least a portion also black of the first inclined surface 21 a.

  The first inclined surface 21a and the second inclined surface 21b having black can be formed, for example, by oxidizing each of the first inclined surface 21a and the second inclined surface 21b of the inclined member 21t. Moreover, the color of the 1st inclined surface 21a and the 2nd inclined surface 21b can also be made black by apply | coating the coating material which has black to the board member which comprises the inclined member 21t.

  On the other hand, the surface roughness of the first inclined surface 21a may be smaller than the surface roughness of the second inclined surface 21b in order to facilitate gas condensation on the second inclined surface 21b. Here, the first inclined surface 21a may be a step surface having a step having a size that does not change the emissivity of the inclined member 21t, but changes the heat absorption amount of the inclined member 21t. The one inclined surface 21a may be a step surface having a minute step enough to change the emissivity of the inclined member 21t.

  Furthermore, the first inclined surface 21a may be a step surface having both a step having a size enough to change the amount of heat absorption in the inclined member 21t and a fine step enough to change the emissivity. Even if any of these two steps in the second inclined surface 21b is made smaller than the step in the second inclined surface 21b, the amount of heat absorbed by the first inclined surface 21a can be reduced.

  Therefore, the first inclined surface 21a is less likely to absorb heat than the configuration in which the surface roughness of the first inclined surface 21a is equal to or greater than the surface roughness of the second inclined surface 21b. As a result, gas condensation is likely to occur on the first inclined surface 21a as much as the temperature of the first inclined surface 21a is less likely to increase.

  The surface roughness of the first inclined surface 21a can be made smaller than the surface roughness of the second inclined surface 21b, for example, by performing mirror finishing on the first inclined surface 21a.

  FIG. 4 is a cross-sectional view showing a cross-sectional structure perpendicular to the reference surface R in the cooling body 12 and the refrigerant passage. In FIG. 4, for convenience of explanation, a block diagram of the refrigerant circulation portion connected to the refrigerant passage is shown in FIG. Shown with a cross-sectional structure.

  As shown in FIG. 4, the cooling unit 11 includes a refrigerant passage 11a having a tubular shape through which the cooling body 12 is cooled using a refrigerant and through which the refrigerant passes, and a refrigerant circulation unit 11b connected to the refrigerant passage 11a. . The refrigerant circulation unit 11b is connected to two ends of the refrigerant passage 11a, and circulates the refrigerant from one end of the refrigerant passage 11a toward the other end while maintaining the temperature of the refrigerant at a predetermined temperature.

  The refrigerant passage 11a is a metal pipe member, and the material forming the refrigerant passage 11a is preferably, for example, copper or a metal having a thermal conductivity comparable to copper. The refrigerant passage 11a is directly cooled by the refrigerant flowing inside the refrigerant passage 11a, and the temperature of the refrigerant passage 11a is cooled to, for example, 90K or more and 150K or less. Thereby, gas is condensed on the outer surface of the refrigerant passage 11a, and the inside of the vacuum chamber 101 is decompressed.

  The first inclined surface 21a of each inclined member 21t is attached to a part of the refrigerant passage 11a, and each inclined member 21t is cooled by the refrigerant flowing through the refrigerant passage 11a. The temperature of the inclined member 21t is cooled to, for example, the same level as that of the refrigerant passage 11a, and the gas condenses on the first inclined surface 21a and the second inclined surface 21b of each inclined member 21t.

  The outer surface of the refrigerant passage 11a may have a black color, and the outer surface having a black color can be formed by oxidizing the outer surface of the refrigerant passage 11a. Alternatively, the black outer surface can be formed by forming a black metal film on the outer surface of the pipe member constituting the refrigerant passage 11a by plating. Moreover, the color of the outer surface of the refrigerant path 11a can also be made black by applying a black paint to the pipe member constituting the refrigerant path 11a.

  The refrigerant passage 11a receives a considerable amount of heat radiated from the cooling target Tg. Therefore, when the outer surface of the refrigerant passage 11a is black, the cooling efficiency of the cooling target Tg by the cooling device 10 can be increased as compared with the configuration in which the outer surface of the refrigerant passage 11a has a metallic color.

  In the second direction D2, the distance L between the two inclined members 21t adjacent to each other is preferably 50 mm or greater and 100 mm or less. When the distance L is 50 mm or more, the gas in the vacuum chamber 101 can easily flow into the slit 21s. In addition, when the distance L is 100 mm or less, the width of the inclined member 21t in the second direction D2 can be easily cooled by the refrigerant passage 11a.

  As shown in FIG. 5, in a plan view facing the first surface 12a, the refrigerant passage 11a has a polygonal line shape having a plurality of bent portions. The refrigerant passage 11a has a plurality of straight portions 11a1 each having a linear shape extending along the first direction D1, and a plurality of bends extending between the two straight portions 11a1 and extending along the second direction D2. It is comprised from the part 11a2.

  The length along the first direction D1 in each straight line portion 11a1 is substantially equal to the length along the first direction D1 in all other straight line portions 11a1, and the straight line portions 11a1 are positioned at equal intervals along the second direction D2. doing.

  Of each inclined member 21t, the first inclined surface 21a is attached to one different linear portion 11a1, and a plurality of inclined members 21t are continuous in the second direction D2. The length along the first direction D1 in each inclined member 21t is larger than the length along the first direction D1 in each linear portion 11a1. Therefore, since the heat exchange is performed between the refrigerant and the inclined member 21t while the refrigerant flows through the linear portion 11a1, the inclined member is compared with the configuration in which the linear portion 11a1 protrudes from the inclined member 21t in the first direction. The efficiency of cooling 21t is increased.

[Operation of cooling device]
The operation of the cooling device 10 will be described below.
As described above, if the first distance L1 is about several tens of millimeters, the gas in the vacuum chamber 101 hardly flows between the cooling target Tg and the second surface 12b of the cooling body 12, so that the cooling body No gas enters the 12 second surface 12b. Thereby, since the condensation of gas hardly occurs on the second surface 12b of the cooling body 12, the exhaust speed on the second surface 12b decreases.

  Further, if the second distance L2 is about several tens of millimeters, it is difficult for gas to enter between the edge of the cooling body 12 and the inner peripheral surface of the vacuum chamber 101, and thus it is difficult for gas to enter the first surface 12a. As a result, the exhaust speed at the first surface 12a also decreases.

  On the other hand, in the cooling device 10 described above, the cooling body 12 has a plurality of slits 21s as a passage penetrating between the first surface 12a and the second surface 12b of the cooling body 12. Therefore, compared with a cooling body having no slit, the pressure is reduced in the slit 21s, and the gas in the vacuum chamber 101 flows between the second surface 12b and the first surface 12a through the slit 21s. Thereby, in each of the 1st surface 12a and the 2nd surface 12b of the cooling body 12, since it becomes easy for gas to enter the cooling body 12, condensation of gas also occurs easily. As a result, a reduction in the exhaust speed by the cooling device 10 can be suppressed.

As described above, according to one embodiment of the cooling device, the effects listed below can be obtained.
(1) Since the passage through which the gas flows between the first surface 12a and the second surface 12b is formed in the cooling body 12, it is along the first surface 12a of the cooling body 12 as compared with the configuration having no passage. The gas flow and the gas flow along the second surface 12b are easily formed. Therefore, it becomes easy for gas to enter the cooling body 12, and as a result, a decrease in the exhaust speed in the space in which the cooling target Tg is accommodated is suppressed.

  (2) Since the cooling members 21 have substantially the same shape and are arranged at equal intervals along the second direction D2, a gas flow along the first surface 12a is likely to be formed on the entire first surface 12a. In addition, a gas flow along the second surface 12b is easily formed on the entire second surface 12b. As a result, a decrease in the exhaust speed in the space in which the cooling target Tg is accommodated is suppressed.

  (3) Since the position of the edge 21e of the inclined member 21t in the second direction D2 overlaps with the adjacent inclined member 21t in the second direction D2, it is between the two inclined members 21t when viewed from the direction facing the second surface 12b. The gap is not visible. Therefore, it is difficult to form a gap in a region where each of the inclined members 21t cools, and as a result, the efficiency with which the cooling device 10 cools the cooling target Tg increases.

The embodiment described above can be implemented with appropriate modifications as follows.
The two or more inclined members 21t may include two or more types of inclined members 21t having different inclination angles θ. Even in such a configuration, if the edge 21e in the second direction D2 of one inclined member 21t overlaps another inclined member 21t adjacent in the second direction D2, the same effect as (3) described above can be obtained. Can get.

  In the inclined member 21t, of the two edges arranged along the second direction D2, the edge having a small distance from the cooling unit 11 is the base end, and the edge other than the base end is the front end. As described above, the inclined member 21t may have a positive inclination with respect to the reference plane R such that the base end is positioned above the tip, or the base end is below the tip. You may have the negative inclination which is an inclination which is located with respect to the reference plane R. FIG. The plurality of inclined members 21t may include an inclined member 21t having a positive inclination and an inclined member 21t having a negative inclination.

  Even in these configurations, as long as the edge 21e in the second direction D2 of one inclined member 21t overlaps with another inclined member 21t adjacent in the second direction D2, the same effect as (3) described above is obtained. Can get.

  -Of the plurality of inclined members 21t, only the edge 21e of some inclined members 21t may overlap with the adjacent inclined member 21t in the second direction D2. Even in such a configuration, an effect equivalent to the above-described (3) can be obtained in a portion where the edge 21e of one inclined member 21t overlaps the adjacent inclined member 21t in the second direction D2.

  -While some cooling members 21 are the inclined members 21t among several cooling members 21, the remaining cooling members 21 may be located along the reference plane R. Even in such a configuration, in the portion where the edge 21e of the inclined member 21t overlaps the adjacent cooling member 21, an effect equivalent to the above (3) can be obtained. Moreover, if each cooling member 21 is partitioned by the slits 21s in the second direction D2 and each cooling member 21 has substantially the same shape, the same effects as (1) and (2) described above are obtained. I can.

  As shown in FIG. 6, all of the plurality of cooling members 31 constituting the cooling body 12 may be positioned along the reference plane R. Even in this configuration, if each cooling member 31 is partitioned by the slits 31s and each cooling member 31 has substantially the same shape, the same effects as (1) and (2) described above are obtained. I can.

When the cooling body 12 includes a plurality of cooling members, the plurality of cooling members may include two or more types of cooling members having different shapes.
For example, as shown in FIG. 7, the cooling body 12 has a plate shape that expands along the first direction D1 and the second direction D2, and extends along the first direction D1, and the cooling body 12 includes a plurality of cooling members. The slit 41 s is divided into 41. Of the plurality of cooling members 41, each of the cooling members 41 positioned at the end in the second direction D2 is an end member 41a. In the plurality of cooling members 41, the size of the end member 41a is smaller than the size of the other cooling members 41 other than the end member 41a.

  That is, the cooling body 12 includes two end members 41a and a central member 41b that is one cooling member 41 sandwiched between the two end members 41a in the second direction D2. In the first direction D1, the length of the end member 41a and the length of the central member 41b are equal to each other, while in the second direction D2, the length of the end member 41a is smaller than the length of the central member 41b.

  Each cooling member 41 is an inclined member positioned along a plane that is inclined with respect to the reference plane R described above, and the edge 41e in the second direction D2 of each cooling member 41 is adjacent to the cooling member in the second direction D2. It overlaps 41.

According to the configuration described above, the following effects can be obtained.
(4) Since the passage is located near the end in the second direction D <b> 2 of the cooling body 12, the gas flowing around the cooling body 12 can easily enter the cooling body 12. Therefore, a gas flow along the first surface 12a and a gas flow along the second surface 12b are easily formed, and a reduction in the exhaust speed is suppressed in the space in which the cooling target Tg is accommodated.

  In the configuration described with reference to FIG. 7, only the edge 41e in a part of the cooling member 41 may overlap the adjacent cooling member 41 in the second direction D2, and even in such a configuration, the cooling member In the portion where the edge 41e of 41 overlaps the other cooling member 41, the same effect as (3) described above can be obtained. Further, only a part of the cooling member 41 may be an inclined member, or all of the plurality of cooling members 41 may be located along the reference plane R. Even if it is such a structure, as long as the cooling body 12 has the slit 41s, the effect equivalent to (1) mentioned above can be acquired.

  In the configuration described with reference to FIG. 7, the cooling body 12 may include two or more central members 41 b as long as the central member 41 b sandwiched between the end members 41 a is larger than the end member 41 a. Even with such a configuration, as long as the central member 41b sandwiched between the end members 41a is larger than the end member 41a, it is possible to obtain the same effect as the above-described (4).

  In the configuration described with reference to FIG. 7, only one of the cooling members 41 located at the end in the second direction D <b> 2 may be an end member 41 a that is smaller than the other cooling members 41. Even in such a configuration, an effect equivalent to the above-described (4) can be obtained in the portion where the end member 41a is located in the end in the second direction D2.

-The structure demonstrated below may be sufficient as the structure in which a some cooling member contains 2 or more types of cooling members which are mutually different.
As shown in FIG. 8, the cooling body 12 has a plate shape that expands along the first direction D <b> 1 and the second direction D <b> 2, and extends along the first direction D <b> 1, so that the cooling body 12 becomes a plurality of cooling members 51. It has a slit 51s for partitioning. Among the plurality of cooling members 51, the cooling member 51 located at the center in the second direction D2 is the central member 51a, and the size of the central member 51a is smaller than the size of the other cooling members 51 other than the central member 51a. .

  That is, the cooling body 12 includes one central member 51a and two end members 51b facing each other across the central member 51a in the second direction D2. In the first direction D1, the length of the central member 51a and the length of the end member 51b are equal to each other, while in the second direction D2, the length of the central member 51a is smaller than the length of the end member 51b.

  Each cooling member 51 is an inclined member that is positioned along a plane that is inclined with respect to the reference plane R described above, and an edge 51e in the second direction D2 of each cooling member 51 is adjacent to the cooling member in the second direction D2. It overlaps with 51.

According to the configuration described above, the following effects can be obtained.
(5) Since the gas flowing around the cooling body 12 easily enters the center of the cooling body 12, the gas flow along the first surface 12 a of the cooling body 12 and the gas along the second surface 12 b A flow is easily formed, and a decrease in exhaust speed is suppressed in a space in which the cooling target Tg is accommodated.

  In the configuration described with reference to FIG. 8, only the edge 51e in a part of the cooling member 51 may overlap the adjacent cooling member 51 in the second direction D2, and even in such a configuration, the cooling member In the part where the edge 51e of 51 overlaps with the other cooling member 51, the same effect as (3) described above can be obtained. Further, only a part of the cooling member 51 may be an inclined member, or all of the plurality of cooling members 51 may be positioned along the reference plane R. Even if it is such a structure, as long as the cooling body 12 has the slit 51s, the effect equivalent to (1) mentioned above can be acquired.

  In the configuration described with reference to FIG. 8, if the cooling members 51 other than the central member 51a are larger than the central member 51a, the cooling body 12 includes three or more cooling members 51 in addition to the central member 51a. But you can. Even if it is such a structure, as long as the center member 51a is smaller than the other cooling member 51, the effect equivalent to (5) mentioned above can be acquired.

As shown in FIG. 9, the cooling body 12 includes a single cooling member 61 having a plate shape, and passes through the through hole 61 a that penetrates the cooling member 61 along the thickness direction of the cooling member 61. It may be configured as follows. The cooling member 61 has a plurality of through-holes 61a, and each through-hole 61a extends along the first direction D1 and is arranged along the second direction D2, but the cooling member 61 has one through-hole. You may have only the hole 61a. Further, the through hole 61a may extend along the second direction D2, or may be a circular hole defined by a cylindrical surface.
Even if it is such a structure, as long as the cooling body 12 has the channel | path through which gas flows between the 1st surface 12a and the 2nd surface 12b, the effect equivalent to (1) mentioned above can be acquired.

  The second direction D2 is not limited to the direction orthogonal to the first direction D1, and may be a direction in which the angle formed by the first direction D1 and the second direction D2 is other than 90 °.

  The cooling unit 11 is not limited to a mechanism that cools the cooling body 12 using a refrigerant, but may be a cryomechanism, and the cryomechanism connects the refrigerator to a refrigerator and a cooling member that constitutes the cooling body 12. It is only necessary to include a connection portion for performing the above. When the cooling body 12 is composed of a plurality of cooling members, the cooling device 10 may include a single cryo mechanism and a plurality of cooling members connected to one refrigerator. The cooling device 10 may include a plurality of cryomechanisms and one cryomechanism connected to one cooling member.

  DESCRIPTION OF SYMBOLS 10 ... Cooling device, 11 ... Cooling part, 11a ... Refrigerant passage, 11a1 ... Linear part, 11a2 ... Bending part, 11b ... Refrigerant circulation part, 12 ... Cooling body, 12a ... First surface, 12b ... Second surface, 21, 31, 41, 51, 61 ... cooling member, 21a ... first inclined surface, 21b ... second inclined surface, 21e, 41e, 51e ... edge, 21s, 31s, 41s, 51s ... slit, 21t ... inclined member, 41a, 51b ... End members, 41b, 51a ... Central member, 61a ... Through-hole, 100 ... Film-forming device, 101 ... Vacuum chamber, 102 ... Film-forming part, 103 ... Support part, 104 ... Exhaust part, R ... Reference plane, Tg ... cooling target.

Claims (6)

A cooling section;
A cooling body having a first surface connected to the cooling section and a second surface opposite to the first surface, wherein a passage through which a gas flows between the first surface and the second surface Including the cooling body cooled by the cooling unit ,
The second surface is a surface facing the object to be cooled,
The cooling device in which the surface roughness of the first surface is smaller than the surface roughness of the second surface .   The cooling body has a plate shape that extends along a first direction that is one direction and a second direction that intersects the first direction;
  The passage is a slit that extends along the first direction and divides the cooling body into a plurality of cooling members,
  The plurality of cooling members include two or more types of cooling members having different sizes.
  The cooling device according to claim 1. The cooling body has a plate shape that extends along a first direction that is one direction and a second direction that intersects the first direction;
The passage is a slit that extends along the first direction and divides the cooling body into a plurality of cooling members,
Among the plurality of cooling members, at least one of the cooling members located at the end in the second direction is an end member,
The cooling device according to claim 1, wherein a size of the end member is smaller than a size of the cooling member other than the end member. The cooling body has a plate shape that extends along a first direction that is one direction and a second direction that intersects the first direction;
The passage is a slit that extends along the first direction and divides the cooling body into a plurality of cooling members,
Among the plurality of cooling members, the cooling member located at the center in the second direction is a central member,
The cooling device according to claim 1, wherein the size of the central member is smaller than the size of the cooling member other than the central member. The cooling body has a plate shape that extends along a first direction that is one direction and a second direction that intersects the first direction;
The passage is a slit that extends along the first direction and divides the cooling body into a plurality of cooling members,
The cooling device according to claim 1, wherein each of the cooling members has substantially the same shape as all the other cooling members and is arranged at equal intervals in the second direction. A vacuum chamber;
A support part for supporting the cooling object;
A cooling device according to any one of claims 2 to 5,
A plane defined by the first direction and the second direction is a reference plane;
At least one of the plurality of cooling members is an inclined member positioned along a plane inclined with respect to the reference plane;
The distance between the inclined members adjacent to each other is 50 mm or more and 100 mm or less,
The distance between the vacuum chamber and the cooling body is 10 mm or more and less than 100 mm,
The support portion supports the cooling target such that a distance between the cooling target and the cooling body is 10 mm or more and less than 100 mm.
Vacuum processing equipment.