JP6358802B2 - Indicator light - Google Patents

Description

  The present invention relates to an indicator lamp, and for example, relates to an indicator lamp for displaying a status such as an operating status or a malfunction status in various devices such as a processing device.

  2. Description of the Related Art Conventionally, there is known an indicator lamp that is provided in various devices such as a processing device and displays the status (operation status, malfunction status, etc.) of the device (for example, see Patent Document 1). Such an indicator lamp is provided so as to protrude from the upper surface or side surface of the apparatus in a room where the apparatus is installed in order to ensure visibility for an operator or the like. In general, when the indicator lamp is provided on the side surface of the apparatus, the indicator lamp is arranged at two positions on the front and rear faces of the apparatus in order to ensure visibility on the front side and the rear side of the apparatus.

JP 2008-181896 A

  However, when the indicator lamp as described above is provided on the upper surface of the apparatus, it is assumed that the indicator lamp comes into contact with a part of the entrance at the time of carrying in the apparatus and the like, and there is a problem that the carrying-in work becomes complicated. is there. When the indicator lamp is configured to be detachable, the above problem can be solved, but there is a problem that an operation for attaching the indicator lamp is necessary after the apparatus is installed. On the other hand, when the indicator lamp is provided on the side surface of the apparatus, there are problems that the number of indicator lamps increases, the display control becomes complicated, and the cost required for manufacturing the apparatus increases.

  In addition, the malfunction status of the apparatus affects the operating rate of the apparatus, and it is desirable to find it immediately and take measures such as maintenance. For this reason, the indicator lamp is required to provide a display that is easy to confirm regardless of the position of the confirmer so that an operator or the like can quickly grasp the situation including the malfunction state of the device. As described above, when the indicator lamp is provided on the upper surface or the side surface of the apparatus, it is assumed that it is difficult for an operator or the like to confirm depending on the installation status of the apparatus.

  The present invention has been made in view of such problems, and is an indicator light that makes it easy to check the status of the apparatus regardless of the position of the operator or the like while simplifying the installation work of the apparatus provided with the indicator lamp. The purpose is to provide.

The indicator lamp according to the present invention is an indicator lamp that indicates the status of the apparatus, and includes a light emitting unit that emits light from the outer wall of the apparatus, and a room having a different cleanliness from the clean room in which the apparatus is installed at the upper part of the apparatus. A partition member made of a transparent member for partitioning is disposed, and the partition member includes a display area for displaying light emitted from the light emitting unit, and the display area reflects light emitted from the light emitting unit, The light emitted from the light emitting part is transmitted, and the light emitted from the light emitting part is reflected in the display area, whereby the status of the apparatus is indirectly displayed in the display area .

According to the indicator lamp, the status of the device is indirectly displayed by the reflected light of the light emitted from the outer wall of the device toward the display area by the light emitting unit. Thereby, since the situation of the apparatus can be notified to the worker or the like by the reflected light in the display area arranged at the upper part of the apparatus, the situation of the apparatus can be easily confirmed regardless of the position of the worker or the like. In addition, since the indicator lamp radiates light from the outer wall of the apparatus, it is possible to avoid a configuration in which the indicator lamp protrudes from the upper part of the apparatus and a structure in which the indicator lamps are arranged on both the front side and the rear side of the apparatus. As a result, it is possible to prevent a situation in which the indicator lamp contacts the carry-in entrance at the time of carrying in or the like, or a situation such as an increase in cost due to the number of indicator lights. As a result, it is possible to provide an indicator lamp that makes it easy to check the status of the apparatus regardless of the position of the operator or the like while simplifying the installation work of the apparatus provided with the indicator lamp. In addition, by transmitting the light emitted from the light emitting unit to the display area of the partition member, the status of the device can be displayed in the display area, so the status of the device can be confirmed by workers in both clean rooms and rooms with different cleanliness. Can be made easier.

For example, in the above indicator lamp, the light emitted from the light emitting unit is a laser beam, and characters and images are displayed by the laser beam emitted to the display area to display the status of the apparatus. In this case, since the status of the apparatus can be notified to an operator or the like using characters or images drawn with a laser beam, the operator or the like can intuitively grasp the status of the apparatus.

  The indicator lamp includes color changing means for changing the color of light emitted from the light emitting unit, and the status of the apparatus can be notified by changing the color. In this case, since the status of the apparatus can be notified to the operator or the like by changing the emission color, the operator or the like can grasp the status of the apparatus through the emission color.

In the above indicator comprises an angle changing means for radiating the display area is inclined forward of the angle of the light emitting device from the light emitting unit, the status of the device by light reflected by the display area spaced from the device I can inform you. In this case, it is possible to display the status of the device by the reflected light in the display area arranged on the front side of the device, even when the display area located above the display lights located blind from the operator or the like Thus, it is possible to make it easier for an operator or the like to check the status of the apparatus.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the indicator light which is easy to confirm the condition of an apparatus irrespective of the position of an operator etc., simplifying the installation operation | work of the apparatus provided with the indicator light.

It is a perspective view which shows the external appearance of the apparatus provided with the indicator lamp which concerns on 1st Embodiment. It is explanatory drawing of the mode of the light radiated | emitted from the indicator lamp which concerns on 1st Embodiment. It is explanatory drawing of the mode of the light radiated | emitted ahead of an apparatus from the indicator lamp which concerns on 1st Embodiment. It is explanatory drawing of the installation condition of the apparatus provided with the indicator lamp which concerns on 1st Embodiment. It is a perspective view which shows the external appearance of the apparatus provided with the indicator lamp which concerns on 2nd Embodiment. It is explanatory drawing of the mode of the light radiated | emitted from the indicator lamp which concerns on 2nd Embodiment. It is explanatory drawing of the installation condition of the apparatus provided with the indicator lamp which concerns on 3rd Embodiment.

  Hereinafter, a plurality of embodiments of the present invention will be described with reference to the drawings. In the following, description will be made using a processing apparatus for processing a workpiece such as a semiconductor wafer as an apparatus provided with the indicator lamp according to the present invention. However, the apparatus provided with the indicator lamp according to the present invention is not limited to the processing apparatus, and can be applied to any apparatus that needs to notify the operating status, the malfunction status, and the like.

(First embodiment)
FIG. 1 is a perspective view showing an appearance of an apparatus provided with an indicator lamp according to the first embodiment. In FIG. 1, for convenience of explanation, the operation panel 3 side described later is called the front side (or simply the front side) of the apparatus, and the opposite side is called the rear side (or simply the rear side) of the apparatus. . The same applies to the drawings subsequent to FIG.

  As shown in FIG. 1, a processing apparatus 1 as an apparatus provided with an indicator lamp according to the present embodiment has a generally rectangular parallelepiped housing 2. For example, a processing unit that processes a workpiece and a control unit for controlling the processing unit are accommodated in the housing 2. On the front surface of the housing 2, an operation panel 3 that receives an instruction to the processing device 1, a window portion 4 for visually recognizing a processing portion in the housing 2, and an emergency stop for stopping the operation of the processing device 1 Button 5 is provided.

  The operation panel 3 is composed of, for example, a touch panel, and is configured to be able to display an operation input screen designed for operation of the processing apparatus 1. The window portion 4 is formed of a transparent material such as glass or acrylic and is configured to be openable and closable. The emergency stop button 5 is provided near the lower side of the operation panel 3 and is configured by a push type button. For example, an operator of the processing apparatus 1 can input an instruction to the processing apparatus 1 from the operation panel 3 while visually checking the processing part through the window part 4. In addition, when a problem occurs, the operator can immediately stop the machining apparatus by the emergency stop button 5 while checking the error message displayed on the operation panel 3.

  On both side surfaces of the processing apparatus 1 are provided doors 6 for performing maintenance of the processing unit and the control unit in the housing 2 (the door unit 6 provided on the right side of the processing apparatus 1 is shown in FIG. 1). Not shown). The door part 6 is formed of a transparent material such as glass or acrylic and is configured to be openable and closable, like the window part 4. An operator who performs maintenance of the processing apparatus 1 can perform operations such as position adjustment and replacement of parts in the processing portion in the housing 2 by opening the door 6.

  A circular opening 101 is provided on the upper surface of the processing apparatus 1 on the left side and near the front surface. The opening 101 is disposed at a position corresponding to a light emitting portion 71 of the indicator lamp 7 described later, and is closed by a plate made of a transparent material such as acrylic. The opening 101 is provided in order to secure a radiation path when changing the angle of light from the light emitting unit 71 by an angle changing unit 75 described later.

  The position of the opening 101 is not limited to the position on the left side and the front side of the processing apparatus 1 and can be changed to an arbitrary position according to the position of the light emitting unit 71 described later. The shape of the opening 101 is not limited to a circular shape, and can be a shape that matches the angle of light from the light emitting unit 71 that can be adjusted by an angle changing unit 75 described later. For example, when the light from the light emitting unit 71 can be angle-adjusted to the front, rear, left, and right of the processing apparatus 1, the shape of the opening 101 can be a cross shape.

  Inside the opening 101, an indicator lamp 7 capable of indirectly displaying the status of the processing apparatus 1 is provided. The indicator lamp 7 is provided with a light emitting portion 71 that emits light upward. The indicator lamp 7 is provided in the vicinity of the upper surface of the processing apparatus 1 so that the light emitting portion 71 is disposed to face the opening 101. By being arranged in this way, the light emitting unit 71 is configured to emit light from the outer wall of the processing apparatus 1 through the opening 101. For example, the light emitted from the light emitting unit 71 is applied to the ceiling 10a of the room 10 where the processing apparatus 1 is installed (see FIG. 2).

  The light emitting unit 71 has a single or a plurality of arbitrary light sources. For example, the light emitting unit 71 includes a laser light source and can be configured to emit a laser beam. In the following, it is assumed that the light emitting unit 71 includes a laser light source capable of emitting red, blue, and green laser beams. The light emitting unit 71 is configured to be able to switch and emit red, blue, and green laser beams under the control of an indicator lamp control unit 72 described later.

  In particular, the light emitting unit 71 can draw characters and images on a radiation target such as a ceiling with a laser beam emitted from a laser light source. In addition, although it is set as the structure which draws a character and an image on a ceiling etc. with a laser beam here by the light emission part 71, it can also be set as the structure which draws any one of a character and an image. Further, the configuration for driving the light emitting unit 71 to draw characters and images on the radiation target is not particularly limited, and any configuration can be adopted. For example, a configuration in which the light emitting unit 71 itself is horizontally moved to the front, rear, left, and right of the processing apparatus 1 or a configuration in which the angle of the light emitting unit 71 itself or the angle of the laser beam is changed can be employed.

  Further, the indicator lamp 7 is provided with an indicator lamp control unit 72 that controls the presence / absence of light emission, the emission color, and the emission angle of the indicator lamp 7. The indicator light control unit 72 includes a lighting control unit 73 that controls the presence or absence of light emitted from the light emitting unit 71, that is, the presence or absence of lighting of the light emitting unit 71, and a color that changes the color of the light emitted from the light emitting unit 71. The change part 74 and the angle change part 75 which changes the angle of the light radiated | emitted from the light emission part 71 are comprised. The indicator light control unit 72 controls the presence / absence of light emission, the emission color, and the emission angle of the indicator lamp 7 in accordance with an instruction from a main control unit (hereinafter simply referred to as “main control unit”) of the processing apparatus 1 (not shown).

  The lighting control unit 73 controls whether or not the light emitting unit 71 is turned on in accordance with an instruction from the main control unit. For example, the lighting control unit 73 turns on the light emitting unit 71 when it is necessary to notify an operator or the like of the operating status or malfunction status of the processing apparatus 1. Moreover, the lighting control part 73 can blink the light emission part 71 according to the content to alert | report. By blinking the light emitting unit 71, it is possible to notify an operator or the like of two or more different contents even in the same emission color.

  The color changing unit 74 constitutes a color changing unit, and changes the color of light emitted from the light emitting unit 71 in accordance with an instruction from the main control unit. For example, the color changing unit 74 changes the color of light emitted from the light emitting unit 71 by switching a laser light source included in the light emitting unit 71. Specifically, the color changing unit 74 selects the blue laser light source when the processing apparatus 1 is operating without any problem, while selecting the red laser light source when there is an emergency problem. can do.

  The angle changing unit 75 constitutes an angle changing unit, and changes the angle of light emitted from the light emitting unit 71 in accordance with an instruction from the main control unit. More specifically, the angle changing unit 75 adjusts so that the angle of the light emitted from the light emitting unit 71 is tilted forward of the processing apparatus 1. For example, the angle changing unit 75 may include a drive motor that tilts the entire indicator lamp 7 and a reflecting mirror that changes the reflection angle of light from the light emitting unit 71. The angle changing unit 75 is used, for example, when moving the light emitted from the light emitting unit 71 to a position that can be easily confirmed by an operator or the like. The angle changing unit 75 can also be used when drawing characters or images with the laser beam emitted from the light emitting unit 71.

  Here, the state of the light emitted from the indicator lamp 7 according to the present embodiment will be described with reference to FIGS. FIG. 2 is an explanatory diagram of the state of light emitted from the indicator lamp 7 according to the first embodiment. FIG. 3 is an explanatory diagram of the state of light emitted from the indicator lamp 7 according to the first embodiment to the front of the apparatus. FIG. 4 is an explanatory diagram of the installation status of the apparatus provided with the indicator lamp 7 according to the first embodiment.

  2 to 4 show an example in which the processing apparatus 1 has a configuration including a drive motor that tilts the entire indicator lamp 7 as the angle changing unit 75. Further, FIG. 2 shows an initial state where the angle changing unit 75 does not change the angle of the light emitting unit 71. Here, the light emitting unit 71 in the initial state is arranged in a direction in which the emitted light is directed directly above the processing apparatus 1. 3 and 4 show a state in which the angle changing unit 75 changes the angle of the light emitting unit 71 to the front of the apparatus.

  FIG. 2 shows a case where the processing apparatus 1 is installed in a partitioned room 10 such as a clean room. The light emitted from the light emitting unit 71 is reflected on the ceiling 10 a disposed just above the light emitting unit 71. The lighting control unit 73 controls the lighting of the light reflected on the ceiling 10a in this way. By such lighting control by the lighting control unit 73, the indicator lamp 7 can indirectly display the status of the processing apparatus 1 by the reflected light reflected on the ceiling 10a. In this way, since the situation of the processing apparatus 1 can be notified to the worker or the like by the reflected light on the ceiling 10a of the room 10 where the processing apparatus 1 is installed, the situation of the processing apparatus 1 can be confirmed regardless of the position of the worker or the like. Can be made easier.

  The indicator lamp 7 is disposed inside the upper surface (more specifically, the opening 101) of the processing apparatus 1, and adopts a configuration that emits light from the outer wall of the processing apparatus 1. For this reason, the structure which the indicator lamp 7 protrudes from the apparatus upper part, and the structure where the indicator lamp 7 is arrange | positioned in both an apparatus front part and a rear surface part can be avoided. Thereby, the situation where the indicator lamp 7 contacts the carry-in entrance at the time of carrying-in or the like, or the situation such as the cost increase due to the number of the indicator lamps 7 can be prevented. As a result, the installation work of the processing apparatus 1 provided with the indicator lamp 7 can be simplified.

  Moreover, in the indicator lamp 7 which concerns on this Embodiment, the light emission part 71 can draw a character and an image on the ceiling 10a with the laser beam radiated | emitted from a laser light source as mentioned above. Therefore, since the operator or the like can be notified of the status of the processing apparatus 1 using characters or images drawn with a laser beam, the operator or the like can intuitively grasp the status of the processing apparatus 1.

  Furthermore, in the indicator lamp 7 according to the present embodiment, the color changing unit 74 can change the color of light emitted from the light emitting unit 71. As a result, the operator can be notified of the status of the processing apparatus 1 by changing the color of the light emitted from the light-emitting unit 71, so that the operator can see the status of the processing apparatus 1 through the emission color from the indicator lamp 7. Can be grasped.

  For example, in the indicator lamp 7 according to the present embodiment, it is possible to notify a plurality of types of situations in the processing apparatus 1 by combining lighting and blinking of the red, blue, and green laser beams described above. For example, in the indicator lamp 7, the stop state of the processing apparatus 1 caused by a malfunction or the like can be notified by lighting of a red laser beam, and the normal operation state of the processing apparatus 1 can be notified by lighting of a blue laser beam. The standby state of the processing apparatus 1 can be notified by lighting. Moreover, in the indicator lamp 7, although the malfunction etc. have generate | occur | produced, the condition etc. which can process a to-be-processed object can be alert | reported by blinking of a red laser beam.

  3 and 4 show a situation in which, for example, a plurality (here, two) of processing apparatuses 1 (1a, 1b) facing the passage 11 are arranged in a line. 3 and 4, the angle of the indicator lamp 7 is adjusted by the angle changing unit 75 so that the light from the light emitting unit 71 is emitted to the front side of the processing devices 1a and 1b, that is, the passage 11 side. Yes. In this case, the light emitted from the light emitting unit 71 is reflected on the ceiling 10b disposed on the front side of the processing apparatuses 1a and 1b. Therefore, since the status of the processing devices 1a and 1b can be displayed by the reflected light from the ceiling 10b spaced forward from the processing devices 1a and 1b, the ceiling located above the indicator lamp 7 is positioned at a blind spot from an operator or the like. Even so, it is possible to make it easier for an operator or the like to check the status of the processing apparatuses 1a and 1b.

  For example, when a partition wall that reaches from the floor surface to the ceiling 10b is installed between the processing apparatuses 1a and 1b shown in FIG. 4, for an operator located on the processing apparatus 1a side, the processing apparatus 1b is directly above. The ceiling located at can be blind spot by the partition wall. Even in such a case, as shown in FIGS. 3 and 4, the angle 10 of the light emitted from the light emitting unit 71 is changed by the angle changing unit 83, and the ceiling 10 b located on the front side of the processing apparatus 1 b. By appropriately adjusting the position of the reflected light, it is possible to appropriately notify the operator or the like of the status of the processing apparatus 1b.

(Second Embodiment)
In the indicator lamp 7 according to the first embodiment, a single light emitting unit 71 is provided, and the status of the processing apparatus 1 is indirectly displayed by reflected light on a ceiling or the like above the processing apparatus 1. The indicator lamp which concerns on 2nd Embodiment is provided with several light emission parts, and is 1st Embodiment by the point which displays the condition of a processing apparatus indirectly by the intersection of the light radiated | emitted from these light emission parts. It is different from the indicator lamp 7 concerning.

  Hereinafter, the configuration of the processing apparatus provided with the indicator lamp according to the second embodiment will be described with reference to FIGS. 5 and 6. FIG. 5 is a perspective view showing an appearance of a processing apparatus provided with an indicator lamp according to the second embodiment. FIG. 6 is an explanatory diagram of the state of light emitted from the indicator lamp according to the second embodiment. 5 and 6, the same reference numerals are assigned to components common to the processing apparatus 1 illustrated in FIG. 1, and detailed description thereof is omitted. In FIG. 5, the opening 101 formed on the upper surface of the housing 2 is omitted.

  As shown in FIG.5 and FIG.6, the indicator lamp 7a which concerns on this Embodiment is provided with the light emission parts 71a and 71b which radiate | emit light toward the upper side (two in this Embodiment). These light emitting units 71a and 71b are provided in the vicinity of the upper surface of the housing 2 of the processing apparatus 1c so that emitted light intersects in an initial state where the angle is not adjusted by the angle changing unit 75. More specifically, the light emitted from the light emitting units 71a and 71b is arranged to be inclined inward so that they intersect each other in the space between the upper surface of the processing apparatus 1c and the ceiling 10b. In addition, these light emission parts 71a and 71b can be set as the structure provided with a laser light source, for example like 1st Embodiment.

  According to this configuration, the state of the processing apparatus 1c can be displayed by the intersection 12 of the light emitted from the light emitting units 71a and 71b. Thereby, even if it is a case where the upper surface of the processing apparatus 1c is separated to the ceiling 10b, it is possible to make it easy for an operator or the like to check the status of the processing apparatus 1c. In addition, about the display mode in this intersection 12, the lighting and blinking of the red, blue, and green laser beam mentioned above can be combined similarly to 1st Embodiment, for example. Further, by changing the angle of the laser beam emitted from the light emitting units 71a and 71b, it is possible to draw characters and images along the locus of the intersection point 12.

  Moreover, in the indicator lamp 7a which concerns on this Embodiment, the display aspect in the intersection 12 can further be increased by radiating | emitting the light of a different color from the two light emission parts 71a and 71b. For example, the emission color at the intersection 12 can be set to yellow by emitting a red laser beam from the light emitting unit 71a and emitting a green laser beam from the light emitting unit 71b. Thus, by associating the situation of the different processing apparatus 1c with the color formed by the combination of different colors, it becomes possible to increase the variation of the situation of the processing apparatus 1c to notify the operator or the like.

  Furthermore, in the indicator lamp 7a according to the present embodiment, the position of the intersection 12 of the light emitted from the light emitting units 71a and 71b by the angle changing unit 75 is adjusted to a position that can be easily confirmed by an operator or the like. It is preferable as the form. For example, it is conceivable to move up and down in the space between the processing apparatus 1c and the ceiling 10b, or to move the processing apparatus 1c to the front side. In this case, it is possible to provide the indicator lamp 7a that makes it easier to confirm the status of the processing apparatus 1c without depending on the work position of the worker or the like and the height of the ceiling 10b.

(Third embodiment)
In the indicator lamp 7 according to the first embodiment, the status of the processing apparatus 1 is indirectly displayed by the reflected light on the ceiling or the like above the processing apparatus 1. The indicator lamp which concerns on 3rd Embodiment is the point which displays the condition of a processing apparatus indirectly by the reflected light in a part of partition member arrange | positioned between the ceiling above the processing apparatus. It differs from the indicator lamp 7 which concerns on embodiment.

  Hereinafter, the configuration of the processing apparatus provided with the indicator lamp according to the third embodiment will be described with reference to FIG. FIG. 7 is an explanatory diagram of an installation situation of an apparatus provided with an indicator lamp according to the third embodiment. In FIG. 7, components common to the processing apparatus 1 shown in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted. In FIG. 7, the opening 101 formed on the upper surface of the housing 2 is omitted.

  As shown in FIG. 7, the processing apparatus 1d provided with the indicator lamp 7b according to the third embodiment has a front surface provided with the operation panel 3 disposed in a clean room and a maintenance door 6 provided. A rear side portion is arranged in the gray room from the side surface portion. In 3rd Embodiment, the partition member 13 which consists of a transparent member which partitions off a clean room and this clean room and the gray room from which cleanliness differs is arrange | positioned at the upper part of the processing apparatus 1d installed in this way. . A display area 131 for displaying the light emitted from the light emitting unit 71 is provided at a predetermined position of the partition member 13.

  The display area 131 is configured by, for example, an altered layer that diffusely reflects light emitted from the light emitting unit 71. In the deteriorated layer, for example, a minute uneven portion is provided on the surface of the partition member 13. When the light emitted from the light emitting unit 71 is irregularly reflected by the uneven portion, the status of the processing apparatus 1d can be displayed. The concavo-convex portions constituting the deteriorated layer are formed by, for example, sandblasting the display area 131 of the partition member 13.

  In the indicator lamp 7b according to the present embodiment, the light emitting unit 71 is provided in the vicinity of the upper surface so that the emitted light is transmitted through the partition member 13 in the initial state where the angle is not adjusted by the angle changing unit 75. . More specifically, the light emitting unit 71 is disposed so as to have an angle such that the radiated light is applied to the display area 131 of the partition member 13.

  According to this configuration, the state of the processing apparatus 1 d can be displayed in the display area 131 of the partition member 13 by transmitting the light emitted from the light emitting unit 71 to the partition member 13. Thereby, it is possible to easily confirm the status of the processing apparatus 1d by workers in both the clean room and the gray room. In addition, about the display mode in this display area 131, lighting and blinking of the red, blue, and green laser beam mentioned above can be combined similarly to 1st Embodiment, for example. Further, by changing the angle of the laser beam emitted from the light emitting unit 71, it is possible to draw a character or an image with the locus of the light spot on the display area 131.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the above-described embodiment, the case where the light emitting unit 71 constituting the indicator lamp 7 is provided in the vicinity of the upper surface of the processing apparatus 1 is described. However, the position of the processing apparatus 1 where the light emitting unit 71 is provided is not limited to this, and can be changed as appropriate. For example, light is emitted to the side of the processing apparatus 1 or the inside of the vicinity of the front surface on the condition that it can radiate toward a desired position in the ceiling of the room where the processing apparatus 1 is installed or the space between the upper surface and the ceiling of the processing apparatus 1. The part 71 may be provided. In this case, the light radiated from the light emitting unit 71 is radiated from the side surface or the front surface constituting the outer wall of the processing apparatus 1.

  Moreover, in the said embodiment, the case where the light emission part 71 which comprises the indicator lamp 7 is provided with a laser light source is demonstrated. However, the light source included in the light emitting unit 71 is not limited to this and can be changed as appropriate. For example, a light source such as an LED element that is a semiconductor light emitting element or an electroluminescence (EL) light emitting element may be provided.

  Furthermore, in the said embodiment, the case where the color change part 74 changes the color of the light radiated | emitted from the light emission part 71 by switching the laser light source with which the light emission part 71 is provided is demonstrated. However, the configuration of the color changing unit 74 is not limited to this, and any mechanism or control is adopted on the condition that the color of light emitted from the light emitting unit 71 can be changed to a desired color. It is possible. For example, while the light emitted from the light emitting unit 71 is white, a filter of a desired color is arranged on the optical path in a switchable manner, and the color of the light emitted from the light emitting unit 71 is switched by switching each color filter. May be changed.

  Furthermore, in the said embodiment, the case where the angle change part 75 adjusts so that the angle of the light radiated | emitted from the light emission part 71 may incline ahead of the processing apparatus 1 is demonstrated. However, the angle of the light changed by the angle changing unit 75 is not limited to the angle inclined toward the front side of the processing apparatus 1 and can be changed to an arbitrary angle. For example, it is possible to adjust the light from the light emitting unit 71 to an angle that can be easily confirmed according to an operator who confirms the display content of the indicator lamp 7 (for example, an operator who performs maintenance or an operator who performs an operation). It is preferable as the form. For example, the angle changing unit 75 may adjust the light from the light emitting unit 71 to be inclined to the side of the processing apparatus 1 in accordance with the maintenance worker.

  Furthermore, in the said embodiment, it illustrates about the case where the angle change part 75 has a structure provided with the drive motor which inclines the indicator lamp 7 whole, and the reflective mirror which changes the reflection angle of the light from the light emission part 71. ing. However, the configuration of the angle changing unit 75 is not limited to this, and any mechanism or control is adopted on the condition that the angle of light emitted from the light emitting unit 71 can be changed in a desired direction. Is possible.

  Furthermore, in the said 2nd Embodiment, the case where the two light emission parts 71a and 71b are provided is illustrated. However, three or more light emitting units 71 may be provided. When three or more light emitting units 71 are provided as described above, the intersection point 12 can be formed by causing at least two or more light emitting units 71 to emit light, and the state of the processing apparatus 1c can be displayed by the intersection point 12. .

  As described above, according to the present invention, while simplifying the installation work of the apparatus provided with the indicator light, it has an effect that the status of the apparatus can be easily confirmed regardless of the position of the operator, etc. This is useful for any device that needs to inform the operator of the status of the device.

DESCRIPTION OF SYMBOLS 1, 1a-1d Processing apparatus 2 Case 3 Operation panel 4 Window part 5 Emergency stop button 6 Door part 7, 7a, 7b Indicator lamp 71, 71a, 71b Light emission part 72 Indicator lamp control part 73 Lighting control part 74 Color change part 75 Angle change part 10 Room 10a, 10b Ceiling 11 Passage 12 Intersection 13 Partition member 131 Display area

Claims (4)

An indicator light indicating the status of the device,
It has a light emitting part that emits light from the outer wall of the device ,
The top of the equipment, is arranged a partition member made of a transparent member cleanroom and cleanliness device is installed partitioning different rooms,
The partition switching member is provided with a display area for displaying the light emitted from the light emitting unit,
The display area reflects light emitted from the light emitting unit,
In the display area, Rutotomoni by transmitting light emitted from the light emitting unit, by the light emitted from the light emitting portion is reflected by the display area, the display to indirectly view the status of the device in the display area light. The indicator lamp according to claim 1, wherein the light emitted from the light emitting unit is a laser beam, and characters and images are displayed with the laser beam emitted to the display area to display the status of the apparatus.   The indicator lamp according to claim 1, further comprising color changing means for changing the color of light emitted by the light emitting unit, and notifying the status of the apparatus by changing the color. Comprising an angle changing means for radiating to the display area by tilting the front of the apparatus the angle of light emitted from the light emitting unit, according to claim 1, wherein informing the status of device by light reflected by said display area spaced from the device Indicator light.

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