JP6360441B2 - Water storage tank - Google Patents

Description

  The present invention is attached to a processing device such as a cutting device that cuts a workpiece such as a semiconductor wafer, and processing wastewater in a processing wastewater treatment device that processes wastewater supplied during processing is filtered by a filtering means. The present invention relates to a water tank for storing fresh water.

  In the semiconductor device manufacturing process, a plurality of regions are partitioned by division lines arranged in a lattice pattern on the surface of a substantially disc-shaped semiconductor wafer, and devices such as ICs and LSIs are formed in the partitioned regions. . Then, the semiconductor wafer is cut along the planned division line to divide the region where the device is formed to manufacture individual semiconductor devices. In addition, optical device wafers with gallium nitride compound semiconductors laminated on the surface of sapphire substrates are also divided into individual optical devices such as light-emitting diodes and laser diodes by cutting along the planned division lines, and are widely used in electrical equipment. It's being used.

  The cutting along the division lines such as the above-described semiconductor wafer and optical device wafer is usually performed by a cutting device called a dicer. This cutting apparatus includes a chuck table for holding a workpiece such as a semiconductor wafer, a cutting means having a cutting blade for cutting the workpiece held on the chuck table, and supplying cutting water to the cutting blade. A cutting water supply means for cooling the cutting blade by supplying the cutting water to the cutting blade that rotates, and supplying the cutting water to the cutting portion of the workpiece by the cutting blade. Carry out cutting work.

  As described above, cutting waste generated by cutting silicon or a gallium nitride compound semiconductor is mixed into the processing water supplied at the time of cutting. Since the processing wastewater mixed with the cutting waste made of this semiconductor material contaminates the environment, it is reused or discarded after the cutting waste is removed using the processing wastewater treatment device (for example, Patent Document 1). reference).

  The processing wastewater treatment apparatus includes a wastewater filtering means for filtering the processing wastewater generated by the processing water supplied during the processing of the processing equipment and refining it into fresh water, and the fresh water purified by the wastewater filtering means. A storage tank for storing water, an ultraviolet irradiation means for irradiating the clean water sent from the storage tank with ultraviolet rays to sterilize and destroy organic matter, an ion exchange resin and a precision filter for purifying the pure water irradiated with ultraviolet rays into pure water A pure water generating unit including the pure water purified by the pure water generating unit is circulated to the processing water supply unit of the processing apparatus.

JP 2009-190128 A

  Thus, the processing wastewater treatment apparatus has a problem that the number of components is large and the apparatus becomes large.

  The present invention has been made in view of the above-mentioned facts, and the technical problem thereof is that of an ultraviolet irradiation means for sterilizing and destroying organic matter by irradiating the fresh water with ultraviolet rays in a water storage tank for storing the purified water purified by the wastewater filtration means. The purpose of the present invention is to provide a water storage tank capable of reducing the size of a processing wastewater treatment apparatus by providing a function.

In order to solve the above technical problem, according to the present invention, a processing tank is a water storage tank for storing fresh water filtered by a filtering means,
A water tank main body for storing fresh water, a partition plate disposed at the bottom of the water tank main body to partition the inside of the water tank main body into an upper chamber and a lower chamber, and provided with a circulation port at one end, and the upper chamber An inlet that opens and introduces fresh water, a discharge port that opens on the side opposite to the flow port provided in the partition plate in the lower chamber, and a flow port that is disposed in the lower chamber and flows into the lower chamber from the flow port An ultraviolet irradiation means for irradiating the purified water with ultraviolet rays to sterilize and destroy organic matter,
The ultraviolet irradiating means is disposed from one end side to the other end side along the partition plate, and has at least one end opened through the side wall of the water tank main body, and the cylindrical transparent tube. It consists of a UV irradiation lamp that is housed,
The fresh water introduced from the inlet into the upper chamber through the flow port provided in the partition plate and into the lower chamber is irradiated with the ultraviolet rays from the ultraviolet irradiation lamp along the transparent tube. I made it flow toward the exit,
A water tank is provided.

  The partition plate is provided with a transparent plate that causes the ultraviolet light irradiated by the ultraviolet irradiation lamp to act on fresh water staying in the upper chamber.

  A water storage tank for storing fresh water in which processed wastewater is filtered by a filtering means according to the present invention includes a water tank main body for storing fresh water, and an upper chamber and a lower part disposed in the bottom of the water storage tank main body. A partition plate that is partitioned into a chamber and has a circulation port at one end, an introduction port that opens into the upper chamber and introduces fresh water, and a discharge port that opens on the opposite side of the distribution port provided in the partition plate in the lower chamber And ultraviolet irradiation means for sterilizing and destroying organic matter by irradiating the clean water flowing into the lower chamber from the circulation port disposed in the lower chamber with ultraviolet irradiation means from the one end side along the partition plate. Consists of a cylindrical transparent tube that is disposed over the other end and opens at one end through the side wall of the water tank main body, and an ultraviolet irradiation lamp that is accommodated in the cylindrical transparent tube. Installed in the partition The fresh water that has flowed into the lower chamber through the circulation port flows along the transparent tube toward the discharge port while being irradiated with ultraviolet rays from the ultraviolet irradiation lamp, so the fresh water that has flowed into the lower chamber reaches the discharge port. In the meantime, the ultraviolet rays from the ultraviolet irradiation lamp are sufficiently irradiated, so that it is sufficiently sterilized and the contained organic matter is destroyed. Thus, since the water storage tank according to the present invention has a function of sterilizing fresh water and destroying organic substances contained therein, it is not necessary to arrange ultraviolet irradiation means independently. Can be realized.

The perspective view of the processing wastewater treatment apparatus provided with the water tank comprised according to this invention. The perspective view which fractures | ruptures and shows a part of water tank comprised according to this invention. Sectional drawing of the principal part of the water storage tank shown in FIG.

  Hereinafter, a preferred embodiment of a water tank configured according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 shows a perspective view of a processing wastewater treatment apparatus having a water tank constructed according to the present invention.
A processing wastewater treatment apparatus 1 shown in FIG. 1 includes a wastewater tank 11 that stores processing wastewater collected from a processing apparatus such as a cutting apparatus, and a wastewater feed pump 12 that supplies the processing wastewater stored in the wastewater tank 11. And wastewater filtering means 13 having a filter for filtering the processed wastewater fed by the wastewater feed pump 12 to purify it into fresh water, and for storing fresh water filtered by the wastewater filtering means 13. The water tank 2 is provided. The water tank 2 will be described in detail later.

  If it continues description with reference to FIG. 1, the processing wastewater treatment apparatus 1 will supply the fresh water feed pump 14 which feeds the fresh water stored in the water storage tank 2, and the fresh water supplied by this fresh water feed pump 14. A pure water generating unit 15 including an ion exchange resin 151 to be purified to pure water and a precision filter 152 is provided, and the pure water purified by the pure water generating unit 15 is sent to the processing water supply unit 16 of the processing apparatus. .

Next, the water tank 2 will be described with reference to FIGS. 2 and 3.
The water tank 2 shown in FIGS. 2 and 3 is disposed at the bottom of the water tank main body 3 for storing fresh water and partitions the water tank main body into an upper chamber 3a and a lower chamber 3b. A partition plate 4 provided with a circulation port 40 at one end, and ultraviolet irradiation means 5 disposed in the lower chamber 3b for sterilizing and destroying organic matter by irradiating the fresh water flowing from the circulation port 40 into the lower chamber 3b. It has. In the illustrated embodiment, the water storage tank body 3 is formed in a rectangular parallelepiped shape by side walls 33, 34 and 35, 36 facing the bottom wall 31 and the upper wall 32. An inlet port 321 that opens into the upper chamber 3a and introduces fresh water is provided in the upper wall 32 of the water storage tank body 3 formed in this way, and the side wall 36 opposite to the circulation port 40 provided in the partition plate 4 is provided. A carry-out port 361 that opens to the lower chamber 3b is provided.

  In the illustrated embodiment, the partition plate 4 includes a first partition portion 41 and a second partition portion 42 that are bent at the center, and the first partition portion 41 is disposed horizontally, The side edges of the two partition portions 42 are positioned at the corners of the bottom wall 31 and the side wall 33 that form the water tank body 3. A circulation port 40 is formed at one end of the first partition portion 41 of the partition plate 4 thus formed, and a transparent plate 44 is disposed at the center.

  As shown in FIG. 3, the ultraviolet irradiating means 5 includes a transparent tube 51 disposed from one end side (side wall 35 side) to the other end side (side wall 36 side) along the partition plate 4, and the transparent tube. The ultraviolet irradiation lamp 52 accommodated in 51 is comprised. In the illustrated embodiment, the transparent tube 51 is provided with an opening 511 having one end (side wall 35 side) opened through the side wall 35 of the water tank main body 3 and the other end (side wall 36 side) closed. The transparent tube 51 may have at least one end opened so that the ultraviolet irradiation lamp 52 can be inserted, and therefore both ends may be opened. The ultraviolet irradiation lamp 52 irradiates ultraviolet rays having a wavelength of 185 nm to 254 nm. In this way, the organic matter is destroyed by the ultraviolet ray having a wavelength of 185 nm irradiated from the ultraviolet irradiation lamp 52, and sterilized by the ultraviolet ray having a wavelength of 254 nm.

The water tank 2 in the illustrated embodiment is configured as described above, and the operation thereof will be described below.
The fresh water from which the processing wastewater is filtered by the wastewater filtering means 13 is introduced from the introduction port 321 of the water storage tank 2 into the upper chamber 3a. The fresh water introduced into the upper chamber 3a flows into the lower chamber 3b through the circulation port 40 formed in the partition plate 4. On the other hand, the ultraviolet irradiation lamp 52 constituting the ultraviolet irradiation means 5 is operated to irradiate the fresh water flowing into the lower chamber 3b through the transparent tube 51 with ultraviolet rays having a wavelength of 185 nm to 254 nm. Thus, the fresh water introduced from the introduction port 321 into the upper chamber 3 a and flowing into the lower chamber 3 b through the circulation port 40 formed in the partition plate 4 emits ultraviolet rays from the ultraviolet irradiation lamp 52 along the transparent tube 51. It flows toward the discharge port 361 while being irradiated. As a result, the fresh water that has flowed into the lower chamber 3b through the circulation port 40 formed in the partition plate 4 has sufficient ultraviolet rays from the ultraviolet irradiation lamp 52 to reach the discharge port 361 that opens on the opposite side of the circulation port 40. As a result, the organic matter contained therein is destroyed while being sufficiently sterilized. In this way, the fresh water that has been sufficiently sterilized and the organic matter contained therein has been destroyed is discharged from the discharge port 361 by the operation of the fresh water feed pump 14 as shown in FIG. It is generated in pure water by the exchange resin 151 and the precision filter 152 and is circulated to the processing water supply means 16 of the processing apparatus.

In the embodiment described above, since the partition plate 4 is provided with the transparent plate 44, the ultraviolet rays irradiated from the ultraviolet irradiation lamp 52 act on the fresh water staying in the upper chamber 3 a through the transparent plate 44. Preliminary sterilization of fresh water and preliminary destruction of the organic matter contained are performed.
In the illustrated embodiment, the transparent plate 44 is disposed on the partition plate 4. However, the partition plate itself may be formed of a transparent plate made of acrylic resin or the like.

1: Processing waste water treatment device 11: Waste water tank 12: Waste water feed pump 13: Waste water filtering means 14: Fresh water feed pump 15: Pure water generating means 16: Processing water supply means 2: Water tank 3: Water tank body 3a : Upper chamber 3b: Lower chamber 4: Partition plate 40: Distribution port 44: Transparent plate 5: Ultraviolet irradiation means 51: Transparent tube 52: Ultraviolet irradiation lamp

Claims (2)

A water storage tank for storing fresh water in which processing wastewater is filtered by a filtering means,
A water tank main body for storing fresh water, a partition plate disposed at the bottom of the water tank main body to partition the inside of the water tank main body into an upper chamber and a lower chamber, and provided with a circulation port at one end, and the upper chamber An inlet that opens and introduces fresh water, a discharge port that opens on the side opposite to the flow port provided in the partition plate in the lower chamber, and a flow port that is disposed in the lower chamber and flows into the lower chamber from the flow port An ultraviolet irradiation means for irradiating the purified water with ultraviolet rays to sterilize and destroy organic matter,
The ultraviolet irradiating means is disposed from one end side to the other end side along the partition plate, and one end is opened through the side wall of the water storage tank main body, and is accommodated in the cylindrical transparent tube. Composed of an ultraviolet irradiation lamp to be
The fresh water introduced from the inlet into the upper chamber through the flow port provided in the partition plate and into the lower chamber is irradiated with the ultraviolet rays from the ultraviolet irradiation lamp along the transparent tube. I made it flow toward the exit,
A water tank characterized by that.   The water storage tank according to claim 1, wherein the partition plate is provided with a transparent plate that causes the ultraviolet rays irradiated by the ultraviolet irradiation lamp to act on fresh water staying in the upper chamber.