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JP6376802B2 - Metal bonding material - Google Patents
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JP6376802B2 - Metal bonding material - Google Patents

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JP6376802B2
JP6376802B2 JP2014071190A JP2014071190A JP6376802B2 JP 6376802 B2 JP6376802 B2 JP 6376802B2 JP 2014071190 A JP2014071190 A JP 2014071190A JP 2014071190 A JP2014071190 A JP 2014071190A JP 6376802 B2 JP6376802 B2 JP 6376802B2
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bonding material
metal bonding
metal particles
electronic component
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JP2015193865A (en
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正人 廣瀬
正人 廣瀬
貴則 嶋崎
貴則 嶋崎
裕樹 横田
裕樹 横田
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Tamura Corp
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Description

本発明は、金属粒子と有機溶媒を含有した金属接合材料、より詳細には、基板へのスクリーン印刷法やインクジェット印刷法などの公知の印刷方法や、ディスペンサー法など、公知の吐出方法を用いた塗布により、低温(例えば、200℃程度)の熱処理にて、前記基板上に電子部品を接合できる金属接合材料に関するものである。   The present invention uses a metal bonding material containing metal particles and an organic solvent, more specifically, a known printing method such as a screen printing method or an ink jet printing method on a substrate, or a known ejection method such as a dispenser method. The present invention relates to a metal bonding material capable of bonding an electronic component onto the substrate by heat treatment at a low temperature (for example, about 200 ° C.) by coating.

基板に電子部品を実装する分野において、電気的接合は、鉛フリーはんだ、例えば、スズ‐銀系、スズ‐銅系、スズ-銀-銅系のはんだが主流となっている(特許文献1)。しかし、鉛フリーはんだは高融点であり、実装温度が250℃以上と高くなる。よって、電子部品や基板が熱損傷を起こすことがあり、全ての電子部品や基板に対応できるものではない。そこで、PETなど耐熱性に劣った基板を用いる場合やモジュールの耐熱性の問題等で低温にて接合せざるを得ない場合には、比較的低温で電気的接合が可能なビスマスやインジウム系合金を使用していた。しかし、ビスマスは接合強度や合金の脆さに問題があり、インジウム系合金は高価という問題がある。   In the field of mounting electronic components on a substrate, lead-free solder, for example, tin-silver solder, tin-copper solder, tin-silver-copper solder is mainly used for electrical joining (Patent Document 1). . However, lead-free solder has a high melting point, and the mounting temperature is as high as 250 ° C. or higher. Therefore, the electronic component or the substrate may be thermally damaged, and it cannot be applied to all the electronic components and the substrate. Therefore, when using a substrate with poor heat resistance, such as PET, or when it must be bonded at a low temperature due to the heat resistance problem of the module, etc., bismuth and indium alloys that can be electrically bonded at a relatively low temperature Was used. However, bismuth has a problem in bonding strength and alloy brittleness, and an indium alloy has a problem in that it is expensive.

一方で、耐熱性の点ではんだ付けに不向きな電子部品の実装やモジュールの組み立てには、比較的低温で電気的接合が可能な銀ペーストが用いられ、導通抵抗の上昇を防止するために、銀ペーストに低融点金属や導電フィラー、金属ナノ粒子を添加することが行なわれている。金属ナノ粒子は、比表面積が大きく反応活性が高いので、金属バルクと比較して、低温で融着する低温焼結という特性を有する。例えば、銀ナノ粒子の場合、本来の融点964℃より格段に低い200℃程度の加熱処理で融着接合現象が起こり、金属バルクと同等程度の導通性を示すことが知られている。しかし、導電性、接合強度が不十分であるという問題がある。   On the other hand, silver paste that can be electrically joined at a relatively low temperature is used for mounting electronic components and modules that are unsuitable for soldering in terms of heat resistance, in order to prevent an increase in conduction resistance. Addition of a low melting point metal, a conductive filler, or metal nanoparticles to the silver paste is performed. Since metal nanoparticles have a large specific surface area and high reaction activity, they have the characteristic of low-temperature sintering that fuses at a low temperature compared to metal bulk. For example, in the case of silver nanoparticles, it is known that a fusion-bonding phenomenon occurs by heat treatment at about 200 ° C., which is much lower than the original melting point of 964 ° C., and exhibits the same level of conductivity as a metal bulk. However, there is a problem that conductivity and bonding strength are insufficient.

また、近年、電子部品のさらなる小型化と電子部品が発する熱による熱損傷に対応するために、金属接合材料を200℃程度の加熱処理で焼結(以下、「低温焼結」ということがある。)するだけではなく、高放熱性を有する接合材料が求められている。また、高放熱性のためには、塗布の際に金属接合材料の厚みを薄く制御することも要求されており、従って、供給量を制限した塗布、例えば、ディスペンサーによる微少量の吐出への対応も要求されている。微少量の吐出(塗布)にあたって、金属接合材料中における金属粒子の分散性が低いと、シリンジ内で固液分離が生じて、シリンジのノズル口での詰まりや金属接合材料の供給量の不安定化等、吐出(塗布)不良が生じやすいという問題があった。特に、金属接合材料の供給量過多は、電子部品の側面に金属接合材料がはみ出し、短絡が生じる場合がある。   In recent years, in order to cope with further downsizing of electronic components and thermal damage due to heat generated by electronic components, metal bonding materials are sintered by heat treatment at about 200 ° C. (hereinafter, referred to as “low temperature sintering”). In addition to the above, a bonding material having high heat dissipation is required. In addition, for high heat dissipation, it is also required to control the thickness of the metal bonding material to be thin during coating, and therefore, it is possible to deal with coating with a limited supply amount, for example, dispensing a small amount by a dispenser. Is also required. When dispensing (coating) a very small amount, if the dispersibility of the metal particles in the metal bonding material is low, solid-liquid separation occurs in the syringe, causing clogging at the nozzle opening of the syringe and unstable supply of the metal bonding material. There has been a problem that ejection (coating) defects such as conversion are likely to occur. In particular, when the supply amount of the metal bonding material is excessive, the metal bonding material may protrude from the side surface of the electronic component and a short circuit may occur.

そこで、少量の吐出(塗布)時に固液分離が生じるのを防止するために、高放熱材料である銀粒子等の金属粒子にアクリル系のコポリマーである分散剤を添加した金属接合材料を用いて、基板に電子部品を実装することも行われている。   Therefore, in order to prevent solid-liquid separation when a small amount is discharged (applied), a metal bonding material in which a dispersing agent that is an acrylic copolymer is added to metal particles such as silver particles that are high heat dissipation materials is used. An electronic component is also mounted on a substrate.

しかし、上記金属接合材料でも、依然として、固液分離が生じる傾向にあり、シリンジのノズル口での詰まり防止や金属接合材料の供給量の安定化等が不十分であった。また、上記分散剤は加熱処理時における融着接合現象を阻害して、十分な接合強度も得られなかった。   However, solid-liquid separation still tends to occur in the metal bonding material, and the clogging prevention at the nozzle opening of the syringe, stabilization of the supply amount of the metal bonding material, and the like are insufficient. In addition, the dispersant hindered the fusion bonding phenomenon during the heat treatment, and sufficient bonding strength was not obtained.

特開2013−258399号公報JP 2013-258399 A

本発明は、上記事情に鑑み、接合部の導電性と焼結後の接合強度に優れ、さらに、固液分離が生じるのを防止して少量の吐出(塗布)時であっても吐出(塗布)不良を抑制できる金属接合材料を提供することを目的とする。   In view of the above circumstances, the present invention is excellent in the electrical conductivity of the joint and the bonding strength after sintering, and further prevents the occurrence of solid-liquid separation, and discharge (coating) even at the time of small amount (coating). ) It is an object to provide a metal bonding material capable of suppressing defects.

本発明の態様は、(A)金属粒子と、(B)有機溶媒からなる溶媒と、(C)フッ素系分散剤と、を含有する金属接合材料である。   An aspect of the present invention is a metal bonding material containing (A) metal particles, (B) a solvent composed of an organic solvent, and (C) a fluorine-based dispersant.

本発明の態様は、前記(C)フッ素系分散剤が、下記一般式(I)

Figure 0006376802
(式中、R、R、R、Rは、それぞれ、独立に、F、CFCF=CF−CF 、Cを表す。)で表される化合物、前記一般式(I)で表される化合物のオリゴマー、または前記一般式(I)で表される化合物のオリゴマーを主骨格とする化合物である金属接合材料である。上記「一般式(I)で表される化合物オリゴマー」とは、一般式(I)で表される化合物が2〜100個結合した重合体を意味する。 In an embodiment of the present invention, the (C) fluorine-based dispersant is represented by the following general formula (I):
Figure 0006376802
(Wherein R 1 , R 2 , R 3 and R 4 each independently represents F, CF 3 , CF═CF—CF 3 , or C 3 F 7 ); A metal bonding material which is a compound having a main skeleton of an oligomer of a compound represented by the formula (I) or an oligomer of a compound represented by the general formula (I). The “compound oligomer represented by the general formula (I)” means a polymer in which 2 to 100 compounds represented by the general formula (I) are bonded.

本発明の態様は、前記一般式(I)で表される化合物が、ヘキサフルオロプロペンまたはヘキサフルオロプロペントリマーである金属接合材料である。   An aspect of the present invention is a metal bonding material in which the compound represented by the general formula (I) is hexafluoropropene or hexafluoropropene trimer.

本発明の態様は、前記(A)金属粒子が、(A1)平均一次粒子径の粒度分布が100nm〜6000nmの範囲にある第1の金属粒子と(A2)平均一次粒子径の粒度分布が0.5μm〜10μmの範囲にある第2の金属粒子とからなる金属接合材料である。   In the aspect of the present invention, the (A) metal particles have (A1) first metal particles having an average primary particle size particle size distribution in the range of 100 nm to 6000 nm and (A2) an average primary particle size particle size distribution of 0. A metal bonding material comprising second metal particles in the range of 5 μm to 10 μm.

本発明の態様は、前記(A1)第1の金属粒子及び前記(A2)第2の金属粒子が、銀、銀合金、または銀若しくは銀合金で被覆された銅である金属接合材料である。   An aspect of the present invention is a metal bonding material in which the (A1) first metal particles and the (A2) second metal particles are silver, a silver alloy, or copper coated with silver or a silver alloy.

本発明の態様は、前記(A1)第1の金属粒子の質量:前記(A2)第2の金属粒子の質量が、3:7〜7:3である金属接合材料である。   An aspect of the present invention is a metal bonding material in which (A1) the mass of the first metal particles: (A2) the mass of the second metal particles is 3: 7 to 7: 3.

本発明の態様は、上記金属接合材料を用いて、基板に電子部品を実装した電子部品接合体である。   An aspect of the present invention is an electronic component assembly in which an electronic component is mounted on a substrate using the metal bonding material.

本発明の態様は、前記電子部品が、LED素子またはパワーデバイスである電子部品接合体である。   An aspect of the present invention is an electronic component assembly in which the electronic component is an LED element or a power device.

本発明の態様によれば、フッ素系分散剤を配合することにより、導電性と接合強度に優れるだけでなく、さらに、固液分離が生じるのを防止して少量の吐出(塗布)時であっても吐出(塗布)不良を抑制できる。   According to the aspect of the present invention, the blending of the fluorine-based dispersant not only provides excellent electrical conductivity and bonding strength, but also prevents solid-liquid separation and can be performed during a small amount of discharge (application). Even so, ejection (application) defects can be suppressed.

本発明の態様によれば、上記一般式(I)のフッ素系分散剤により、固液分離、特に、微細なシリンジ内でも固液分離が生じるのを確実に防止できる。   According to the aspect of the present invention, the fluorine-based dispersant of the general formula (I) can reliably prevent solid-liquid separation, particularly, solid-liquid separation even in a fine syringe.

本発明の態様によれば、(A)金属粒子が、(A1)平均一次粒子径の粒度分布が100nm〜6000nmの範囲にある第1の金属粒子と(A2)平均一次粒子径の粒度分布が0.5μm〜10μmの範囲にある第2の金属粒子とからなることにより、確実に、機械的接合強度を有しつつ、200℃程度の加熱処理で融着接合現象が生じる。   According to an aspect of the present invention, (A) the metal particles are (A1) the first primary metal particles having an average primary particle size distribution in the range of 100 nm to 6000 nm and (A2) the average primary particle size distribution is By comprising the second metal particles in the range of 0.5 μm to 10 μm, the fusion bonding phenomenon occurs by heat treatment at about 200 ° C. with surely having mechanical bonding strength.

試験片である基板表面の温度プロファイルを説明する図である。It is a figure explaining the temperature profile of the substrate surface which is a test piece.

次に、本発明の金属接合材料について説明する。本発明の金属接合材料は、(A)金属粒子と、(B)有機溶剤からなる溶媒と、(C)フッ素系分散剤と、を含有する。   Next, the metal bonding material of the present invention will be described. The metal bonding material of the present invention contains (A) metal particles, (B) a solvent composed of an organic solvent, and (C) a fluorine-based dispersant.

(A)金属粒子
金属粒子は、導電性を有する粉末状のものであれば、種類、粒子径とも、特に限定されない。金属種としては、例えば、金、銀、銅、白金、パラジウム、ニッケル、ビスマス、鉛、インジウム、スズ、亜鉛、チタン、アルミニウム及びアンチモンなど、はんだに使用される金属単体や上記金属種を含有する金属合金を挙げることができる。上記金属種のうち、導電性と高い放熱性の点から、銀、銀合金、または銀若しくは銀合金で被覆された銅が好ましい。上記金属は、単独で使用してもよく、2種以上を混合して使用してもよい。
(A) Metal particles The metal particles are not particularly limited in terms of type and particle diameter as long as the particles are conductive powder. As a metal seed | species, the metal simple substance used for solder, such as gold | metal | money, silver, copper, platinum, palladium, nickel, bismuth, lead, indium, tin, zinc, titanium, aluminum, and antimony, and the said metal seed | species are contained, for example. Mention may be made of metal alloys. Among the above metal species, silver, a silver alloy, or copper coated with silver or a silver alloy is preferable from the viewpoint of conductivity and high heat dissipation. The said metal may be used individually and may be used in mixture of 2 or more types.

金属粒子の粒子径としては、例えば、平均一次粒子径10nm〜10μmであり、比表面積が大きく粒子表面の反応活性が高くなることから金属本来の融点よりもはるかに低い加熱温度で電子部品を基板に電気的に接合できる点から、ナノオーダーの平均一次粒子径(すなわち、平均一次粒子径10nm以上1000μm未満)の金属粒子を含むことが好ましく、ボイドの発生を抑制して良好な機械的接合強度を得る点から、(A1)平均一次粒子径の粒度分布が100nm〜6000nmの範囲にある第1の金属粒子と(A2)平均一次粒子径の粒度分布が0.5μm〜10μmの範囲にある第2の金属粒子とからなる金属粒子が特に好ましい。   The particle diameter of the metal particles is, for example, an average primary particle diameter of 10 nm to 10 μm, and since the specific surface area is large and the reaction activity on the particle surface is high, the electronic component is boarded at a heating temperature much lower than the original melting point of the metal. It is preferable to include metal particles having an average primary particle size of nano-order (that is, an average primary particle size of 10 nm or more and less than 1000 μm) from the point of being able to be electrically bonded to the metal, and good mechanical bonding strength by suppressing generation of voids. (A1) first metal particles having an average primary particle size distribution in the range of 100 nm to 6000 nm and (A2) particles having an average primary particle size distribution in the range of 0.5 μm to 10 μm. Particularly preferred are metal particles comprising 2 metal particles.

また、(A1)第1の金属粒子と(A2)第2の金属粒子の、それぞれの最大ピーク一次粒子径は、特に限定されないが、ボイドの発生を確実に防止して、機械的接合強度に優れた金属接合部を得る点から、(A1)第1の金属粒子の、最大ピーク一次粒子径は、200nm〜800nmが好ましく、(A2)第2の金属粒子の、最大ピーク一次粒子径は、500nm〜2200nmが好ましい。さらに、(A1)第1の金属粒子の質量:(A2)第2の金属粒子の質量は、特に限定されないが、粒度分布を広範囲とすることで高密度の接合を形成する点から3:7〜7:3が好ましい。   In addition, the maximum peak primary particle diameter of each of the (A1) first metal particles and the (A2) second metal particles is not particularly limited. From the viewpoint of obtaining an excellent metal joint, (A1) the maximum peak primary particle diameter of the first metal particles is preferably 200 nm to 800 nm, and (A2) the maximum peak primary particle diameter of the second metal particles is 500 nm to 2200 nm is preferable. Further, (A1) Mass of the first metal particles: (A2) The mass of the second metal particles is not particularly limited, but it is 3: 7 from the viewpoint of forming a high-density joint by widening the particle size distribution. ~ 7: 3 is preferred.

また、(A)成分である金属粒子の配合割合は、適宜選択可能であるが、例えば、その下限値は、良好な導電性を有する接合部を得る点から、金属接合材料中に80質量%含まれるのが好ましく、90質量%が特に好ましい。一方、前記配合割合の上限値は、(B)成分である有機溶剤の配合の点から96質量%が好ましく、95質量%が特に好ましい。   Further, the blending ratio of the metal particles as the component (A) can be appropriately selected. For example, the lower limit is 80% by mass in the metal bonding material from the viewpoint of obtaining a bonded portion having good conductivity. It is preferably included, and 90% by mass is particularly preferable. On the other hand, the upper limit of the blending ratio is preferably 96% by weight, particularly preferably 95% by weight, from the viewpoint of blending the organic solvent which is the component (B).

(B)有機溶媒
有機溶媒を配合することで、金属接合材料の粘度を調整して、例えばペースト状とすることで、金属接合材料の塗布性を向上させることができる。また、有機溶媒は、焼結時に金属粒子が導電性材料ペースト中を移動する際の潤滑剤としても機能する。
(B) Organic solvent By mix | blending an organic solvent, the viscosity of a metal joining material is adjusted, for example, it can be made paste-like, and the applicability | paintability of a metal joining material can be improved. The organic solvent also functions as a lubricant when the metal particles move in the conductive material paste during sintering.

有機溶媒は特に限定されず、例えば、デカン、テトラデカン、オクタデカン、ナフテン等の飽和または不飽和脂肪族炭化水素類、メチルエチルケトン、シクロヘキサノンなどのケトン類、トルエン、キシレン、テトラメチルベンゼンなどの芳香族炭化水素類、ジエチレングリコールモノヘキシルエーテル等のグリコールエーテル類、酢酸エチル、酢酸ブチル、セロソルブアセテート及び上記グリコールエーテル類のエステル化物などのエステル類;ノナン-1-オール、2-エチル-1,3-ヘキサンジオール、テルピネオール、ターピネオール等のアルコール類等を挙げることができる。   The organic solvent is not particularly limited, and examples thereof include saturated or unsaturated aliphatic hydrocarbons such as decane, tetradecane, octadecane, and naphthene, ketones such as methyl ethyl ketone and cyclohexanone, and aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene. , Esters such as glycol ethers such as diethylene glycol monohexyl ether, ethyl acetate, butyl acetate, cellosolve acetate and esterified products of the above glycol ethers; nonan-1-ol, 2-ethyl-1,3-hexanediol, Examples thereof include alcohols such as terpineol and terpineol.

これらのうち、本発明の金属接合材料を金属間の接合に使用するにあたり、接合強度に優れ、さらに、接合部の厚みを薄く制御することができる点から、沸点が243℃〜275℃及び25℃の蒸気圧が0.010Pa〜4.0Paである有機溶媒が好ましい。上記有機溶媒は、室温で揮発しにくいので、室温で行われる基板等への金属接合材料の塗布後、金属接合材料は室温にて長時間にわたりペースト状を維持でき、ひいては、電子部品等を基板に搭載する際に所定の荷重をかけることで塗布した金属接合材料を所望の厚さに調整できるためと考えられる。また、接合強度に優れるのは、電子部品等と基板とを接合する際に、金属接合材料がペースト状に維持された状態にて加熱処理(例えば、200℃程度)を行うと、上記有機溶媒が円滑に揮発するためと考えられる。   Among these, in using the metal bonding material of the present invention for bonding between metals, the boiling point is 243 ° C. to 275 ° C. and 25 ° C. because the bonding strength is excellent and the thickness of the bonding portion can be controlled thinly. An organic solvent having a vapor pressure at 0 ° C. of 0.010 Pa to 4.0 Pa is preferable. Since the organic solvent is less volatile at room temperature, after the metal bonding material is applied to the substrate or the like performed at room temperature, the metal bonding material can be maintained in a paste state for a long time at room temperature. This is considered to be because the applied metal bonding material can be adjusted to a desired thickness by applying a predetermined load when mounted on the substrate. Further, the bonding strength is excellent when the heat treatment (for example, about 200 ° C.) is performed in a state where the metal bonding material is maintained in a paste state when bonding an electronic component or the like to the substrate. This is thought to be due to volatilization smoothly.

沸点が243℃〜275℃及び25℃の蒸気圧が0.010Pa〜4.0Paである有機溶媒としては、例えば、水酸基、エステル結合及び/またはエーテル構造を有する化合物が挙げられ、具体的な例としては、水酸基を有する化合物として、ジエチレングリコールモノブチルエーテル、ジエチレングリコールモノヘキシルエーテル、ジエチレングリコールモノエチルヘキシルエーテル等のC〜C14のグリコールエーテル類、ノナン-1-オール、ドデカン-1-オール、テトラデカン-1-オール等のC〜C14の非環式の脂肪族モノアルコール類、ペンタンジオール、ヘキサンジオール及びヘプタンジオール等のC〜Cの直鎖脂肪族ジアルコール類、2-エチル-1,3-ヘキサンジオール、2,5-ジメチル-2,5-ヘキサンジオール等の分岐鎖を有する非環式のC〜C脂肪族ジアルコール類が挙げられる。また、水酸基を有さない化合物としては、ジエチレングリコールモノブチルエーテルアセテート等、上記グリコールエーテル類とアクリル酸またはメタクリル酸とのエステルなどのエステル類を挙げることができる。これらの化合物は、単独で使用してもよく、2種以上を混合して使用してもよい。 Examples of the organic solvent having a boiling point of 243 ° C. to 275 ° C. and a vapor pressure of 0.010 Pa to 4.0 Pa at 25 ° C. include, for example, compounds having a hydroxyl group, an ester bond and / or an ether structure. As a compound having a hydroxyl group, C 8 to C 14 glycol ethers such as diethylene glycol monobutyl ether, diethylene glycol monohexyl ether, diethylene glycol monoethyl hexyl ether, nonan-1-ol, dodecane-1-ol, tetradecane-1-ol, and the like. C 9 -C 14 acyclic aliphatic monoalcohols such as all, C 5 -C 7 straight chain aliphatic dialcohols such as pentanediol, hexanediol and heptanediol, 2-ethyl-1,3 -Branched chains such as hexanediol and 2,5-dimethyl-2,5-hexanediol And acyclic C 6 -C 9 aliphatic dialcohols having the formula: In addition, examples of the compound having no hydroxyl group include esters such as diethylene glycol monobutyl ether acetate and esters of the above glycol ethers with acrylic acid or methacrylic acid. These compounds may be used alone or in combination of two or more.

沸点が243℃〜275℃及び25℃の蒸気圧が0.010Pa〜4.0Paである有機溶媒の配合割合は、適宜選択可能であるが、例えば、その下限値は、良好なペースト性状を得る点から、金属接合材料中に4.0質量%含まれるのが好ましく、5.0質量%が特に好ましい。一方、前記配合割合の上限値は、良好なディスペンス性を確保する点から10質量%が好ましく、8.0質量%が特に好ましい。   The blending ratio of the organic solvent having a boiling point of 243 ° C. to 275 ° C. and a vapor pressure of 25 ° C. of 0.010 Pa to 4.0 Pa can be selected as appropriate. For example, the lower limit value provides good paste properties. From the viewpoint, it is preferable that 4.0% by mass is contained in the metal bonding material, and 5.0% by mass is particularly preferable. On the other hand, the upper limit of the blending ratio is preferably 10% by mass and particularly preferably 8.0% by mass from the viewpoint of ensuring good dispensing properties.

(C)フッ素系分散剤
フッ素系分散剤を配合することで、低温焼結性を損なうことなく、金属接合材料中における金属粒子と有機溶媒との分離を防止できるので、塗布装置の吐出口における金属接合材料の詰まりや塗布量の不均一化を抑制できる。
(C) Fluorine-based dispersant By blending a fluorine-based dispersant, it is possible to prevent separation of the metal particles and the organic solvent in the metal bonding material without impairing the low-temperature sinterability. It is possible to suppress clogging of the metal bonding material and uneven application amount.

フッ素系分散剤であれば、特に限定されないが、金属粒子と有機溶媒との分離を確実に防止して、ディスペンサーなどのノズル口径100〜200μmと微細な吐出装置でも、ノズル内の詰まりを防止し、かつ微少な供給量でも金属粒子の塗布量を均一化できる点から、下記一般式(I)   Although it is not particularly limited as long as it is a fluorine-based dispersant, the separation of the metal particles and the organic solvent is surely prevented, and clogging in the nozzle is prevented even with a nozzle having a nozzle diameter of 100 to 200 μm such as a dispenser. In addition, since the coating amount of the metal particles can be made uniform even with a minute supply amount, the following general formula (I)

Figure 0006376802
Figure 0006376802

(式中、R、R、R、Rは、それぞれ、独立に、F、CFCF=CF−CF 、Cを表す。)で表される化合物、前記一般式(I)で表される化合物のオリゴマー、または前記一般式(I)で表される化合物のオリゴマーを主骨格とする化合物が好ましく、前記一般式(I)で表される化合物は、ヘキサフルオロプロペンまたはヘキサフルオロプロペントリマーが特に好ましい。なお、上記「一般式(I)で表される化合物オリゴマー」とは、一般式(I)で表される化合物が2〜100個結合した重合体を意味する。これらの化合物は、単独で使用してもよく、2種以上を混合して使用してもよい。 (Wherein R 1 , R 2 , R 3 and R 4 each independently represents F, CF 3 , CF═CF—CF 3 , or C 3 F 7 ); A compound having a main skeleton of an oligomer of a compound represented by formula (I) or an oligomer of a compound represented by general formula (I) is preferred, and the compound represented by general formula (I) is hexafluoro Propene or hexafluoropropene trimer is particularly preferred. The “compound oligomer represented by the general formula (I)” means a polymer in which 2 to 100 compounds represented by the general formula (I) are bonded. These compounds may be used alone or in combination of two or more.

分散剤の配合割合は、適宜選択可能であるが、例えば、その下限値は、金属接合材料の詰まりや塗布量の不均一化を抑制する点から、金属接合材料中に0.3質量%含まれるのが好ましく、0.4質量%が特に好ましい。一方、前記配合割合の上限値は、分散剤過多による特性の低下を防止する点から2.0質量%が好ましく、1.0質量%が特に好ましい。   The mixing ratio of the dispersing agent can be selected as appropriate. For example, the lower limit value is 0.3% by mass in the metal bonding material from the viewpoint of suppressing clogging of the metal bonding material and uneven application amount. It is preferably 0.4% by mass. On the other hand, the upper limit of the blending ratio is preferably 2.0% by mass, and particularly preferably 1.0% by mass from the viewpoint of preventing deterioration of characteristics due to excessive dispersant.

本発明の金属接合材料には、用途に応じて、適宜、慣用の添加剤を配合してもよい。添加剤としては、例えば、光沢付与剤、金属腐食防止剤、安定剤、流動性向上剤、増粘剤、粘度調整剤、保湿剤、消泡剤、殺菌剤、充填材などを挙げることができる。これらの添加剤は、単独で使用してもよく、2種以上を混合して使用してもよい。   In the metal bonding material of the present invention, a conventional additive may be appropriately blended depending on the application. Examples of the additive include a gloss imparting agent, a metal corrosion inhibitor, a stabilizer, a fluidity improver, a thickener, a viscosity modifier, a moisturizer, an antifoaming agent, a disinfectant, and a filler. . These additives may be used alone or in combination of two or more.

次に、本発明の金属接合材料の製造方法について説明する。本発明の金属接合材料の製造方法は、特に限定されず、例えば、上記(A)〜(C)成分、および必要に応じてその他の成分を所定割合で配合後、室温にて、三本ロール、ボールミル、サンドミル等の混練手段、またはスーパーミキサー、プラネタリーミキサー等の攪拌手段により混練または混合して製造することができる。   Next, the manufacturing method of the metal joining material of this invention is demonstrated. The method for producing the metal bonding material of the present invention is not particularly limited. For example, after blending the above components (A) to (C) and other components at a predetermined ratio as necessary, a three-roll roll at room temperature. And kneading or mixing with a kneading means such as a ball mill or a sand mill, or a stirring means such as a super mixer or a planetary mixer.

次に、本発明の金属接合材料の用途例について説明する。本発明の金属接合材料は、部品間を金属接合するための材料として広汎に使用することができ、例えば、200℃以下の低温で実装かつ微細な接合が要求される高輝度LEDを基板に搭載するための材料、またはパワーデバイスを基板に接合するための材料等、配線板に電子部品を電気的かつ物理的に接合する導電性の接合材料として使用できる。   Next, application examples of the metal bonding material of the present invention will be described. The metal bonding material of the present invention can be widely used as a material for metal bonding between parts. For example, a high-brightness LED that is required to be mounted at a low temperature of 200 ° C. or lower and requires fine bonding is mounted on a substrate. It can be used as a conductive bonding material for electrically and physically bonding electronic components to a wiring board, such as a material for bonding or a power device to a substrate.

次に、本発明の金属接合材料の使用例について説明する。本発明の金属接合材料を導電性の接合材料として使用する場合、例えば、基板上の電子部品(半導体等)を接合する位置に、本発明の金属接合材料を所定量塗布し、塗布した金属接合材料の上に電子部品を載置後、焼成処理して、基板上に電子部品を接合する。金属接合材料の塗布方法は、特に限定されず、例えば、スクリーン印刷法、ディスペンサー法、インクジェット法などが挙げられる。金属接合材料の塗布量は、適宜選択可能であり、例えば、1〜20μmの厚さ、幅100〜1000μmにて塗布する。焼成温度は、金属粒子が相互に融着して焼結する温度であれば、特に限定されず、例えば、金属粒子が、ナノオーダーの平均一次粒子径を有する金属粒子を含み、金属種が銅または銀の場合、180〜230℃であり、好ましくは190〜210℃である。また、焼成時間は、適宜選択可能であり、例えば、30〜120分である。   Next, usage examples of the metal bonding material of the present invention will be described. When the metal bonding material of the present invention is used as a conductive bonding material, for example, a predetermined amount of the metal bonding material of the present invention is applied to a position where an electronic component (semiconductor, etc.) on the substrate is bonded. After placing the electronic component on the material, the electronic component is bonded onto the substrate by baking. The method for applying the metal bonding material is not particularly limited, and examples thereof include a screen printing method, a dispenser method, and an ink jet method. The application amount of the metal bonding material can be selected as appropriate, and for example, it is applied with a thickness of 1 to 20 μm and a width of 100 to 1000 μm. The firing temperature is not particularly limited as long as the metal particles are fused to each other and sintered. For example, the metal particles include metal particles having an average primary particle diameter of nano-order, and the metal species is copper. Or in the case of silver, it is 180-230 degreeC, Preferably it is 190-210 degreeC. Moreover, baking time can be selected suitably and is 30 to 120 minutes, for example.

次に、実施例を用いて本発明の金属接合材料をさらに詳細に説明する。ただし、本発明の金属接合材料は、以下に示す実施例の態様に限定されるものではない。   Next, the metal bonding material of the present invention will be described in more detail using examples. However, the metal bonding material of the present invention is not limited to the embodiments shown below.

実施例1〜5、比較例1〜6
下記表1に示す各成分を下記表1に示す配合割合にて配合し、3本ロールにて混合分散させて、実施例1〜5、比較例1〜6にて使用するペースト状の金属接合材料を調製した。そして、調製した金属接合材料を以下のように基板に塗布して試験片を作製した。なお、表1中の配合割合の数値は質量部を示し、配合割合の「−」部は0質量部を意味する。
Examples 1-5, Comparative Examples 1-6
Each component shown in the following Table 1 is blended at a blending ratio shown in the following Table 1, mixed and dispersed by three rolls, and used in Examples 1 to 5 and Comparative Examples 1 to 6 in a paste-like metal joint. The material was prepared. And the prepared metal joining material was apply | coated to the board | substrate as follows, and the test piece was produced. In addition, the numerical value of the mixture ratio in Table 1 shows a mass part, and the "-" part of a mixture ratio means 0 mass part.

焼成条件
焼成:200℃、60min、昇温速度0.8℃/min
山陽精工製リフローシミュレーター「SMT Scope SK-5000」にて基板表面温度が図1に示すプロファイルの温度条件で焼成した。
Firing conditions Firing: 200 ° C., 60 min, heating rate 0.8 ° C./min
The substrate surface temperature was baked with the reflow simulator “SMT Scope SK-5000” manufactured by Sanyo Seiko under the temperature condition of the profile shown in FIG.

評価
(1)体積抵抗率
スライドガラス上に、上記のように調製した金属接合材料のペーストを、50μm厚メタルマスクを用いて5cm×1cmの面積にスクリーン印刷により薄膜状に塗布し、上記の焼成条件にて薄膜を焼成し、得られた焼成薄膜に対して、JIS K 7194に準じた四探針法により、(株)三菱化学アナリテック製「ロレスターGP」により、体積抵抗(比抵抗)率を測定した。
Evaluation (1) Volume resistivity On the slide glass, the paste of the metal bonding material prepared as described above was applied in the form of a thin film by screen printing on an area of 5 cm × 1 cm using a 50 μm-thick metal mask, and the above firing was performed. The thin film was fired under the conditions, and the obtained fired thin film was subjected to a four-probe method according to JIS K 7194, and “Lorestar GP” manufactured by Mitsubishi Chemical Analytech Co., Ltd. Was measured.

(2)接合剪断強度
酢酸エチルで脱脂した10mm×10mm×厚さ1mmのAu/NiメッキCu基板にNordson EFD製ディスペンサー装置「DISPENSER ULTIMUS V 100PSI」を用いて、直径がφ150〜250μm、質量が8〜12μgになるように金属接合材料を塗布(吐出)し、YAMAHA製チップマウンタ「YV100Xg」を用いて1mm×1mmのAu/NiメッキSiダミーチップを搭載した。次に、上記の焼成条件にて焼成後、Nordson DAGE製ボンドテスタ「DAGE4000」を用いて83.3μm/sec(5mm/min)の速度で剪断強度を測定した。
結果は、○:チップの剪断強度が40MPa以上、△:チップの剪断強度が20MPa以上40MPa未満、×:チップの剪断強度が20MPa未満の3段階で評価した。
(2) Joint shear strength Using a Nordson EFD dispenser device “DISPENSER ULTIMUS V 100PSI” on a 10 mm × 10 mm × 1 mm thick Au / Ni plated Cu substrate degreased with ethyl acetate, the diameter is 150 to 250 μm, and the mass is 8 A metal bonding material was applied (discharged) to ˜12 μg, and a 1 mm × 1 mm Au / Ni plated Si dummy chip was mounted using a chip mounter “YV100Xg” manufactured by YAMAHA. Next, after firing under the above firing conditions, the shear strength was measured at a rate of 83.3 μm / sec (5 mm / min) using a bond tester “DAGE4000” manufactured by Nordson DAGE.
The results were evaluated in three stages: ◯: chip shear strength of 40 MPa or more, Δ: chip shear strength of 20 MPa or more and less than 40 MPa, and X: chip shear strength of less than 20 MPa.

(3)大気中放置後の接合剪断強度(乾燥性)
上記(2)における金属接合材料の塗布(吐出)後であってダミーチップを搭載する前に、25℃、湿度55%の環境下で1時間放置し、その後、上記(2)と同様の工程で、ダミーチップを搭載し、焼成をしたものについて、上記(2)と同様にして、剪断強度を測定した。
結果は、○:チップの剪断強度が40MPa以上、△:チップの剪断強度が20MPa以上40MPa未満、×:チップの剪断強度が20MPa未満の3段階で評価した。
(3) Bonding shear strength after drying in the air (drying property)
After applying (discharging) the metal bonding material in (2) above and before mounting the dummy chip, it is left for 1 hour in an environment of 25 ° C. and 55% humidity, and then the same process as in (2) above Then, the shear strength was measured in the same manner as in the above (2) for the sample that was mounted with a dummy chip and fired.
The results were evaluated in three stages: ◯: chip shear strength of 40 MPa or more, Δ: chip shear strength of 20 MPa or more and less than 40 MPa, and X: chip shear strength of less than 20 MPa.

(4)分離性
10ccのガラス瓶に約2gの金属接合材料を測り採り、2000rpm、1minの条件で遠心分離を行い、固液分離が生じているかどうかを目視で確認した。
結果は、○:液体の浮きが見られず、分離が起こっていない状態、△:表面に液体が浮き出ている状態、×:傾けると浮き出た液体が流動するくらいに分離している状態の3段階で評価した。
(4) Separability About 2 g of metal bonding material was measured in a 10 cc glass bottle, centrifuged at 2000 rpm for 1 min, and it was visually confirmed whether solid-liquid separation had occurred.
The results are as follows: ○: no liquid floating is observed, no separation occurs, Δ: liquid is floating on the surface, x: liquid is separated so that the liquid that floats when it is tilted 3 Rated by stage.

(5)連続吐出性 (ドット数)
Nordson EFD社製Airディスペンサー「ULTIMUS」にて、φ0.15mmの精密ノズルを装着した10ccシリンジで平坦なスライドガラスに連続的に金属接合材料の吐出を行い、詰まりが発生する直前までの点数を計測した。
(5) Continuous discharge (number of dots)
The Nordic EFD Air Dispenser “ULTIMUS” uses a 10cc syringe equipped with a precision nozzle of φ0.15mm to continuously discharge metal bonding material onto a flat glass slide and measure the number of points until just before clogging occurs. did.

(6)連続吐出時の固液分離
上記(5)の試験中に、前記10ccシリンジ内で金属接合材料の固液分離が確認されるかどうかを目視で確認した。
結果は、○:固液分離が観察されない、×:固液分離ありの2段階で評価した。
(6) Solid-liquid separation during continuous discharge During the test of (5) above, it was visually confirmed whether solid-liquid separation of the metal bonding material was confirmed in the 10 cc syringe.
The results were evaluated in two stages: ○: solid-liquid separation not observed, x: solid-liquid separation.

実施例1〜5、比較例1〜6についての各評価結果を下記表1に示す。なお、参考として、実施例にて使用した有機溶媒の沸点と25℃の蒸気圧を下記表2に示す。   Each evaluation result about Examples 1-5 and Comparative Examples 1-6 is shown in the following Table 1. For reference, the boiling points of the organic solvents used in the examples and the vapor pressure at 25 ° C. are shown in Table 2 below.

Figure 0006376802
Figure 0006376802

Figure 0006376802
Figure 0006376802

表1、2に示すように、フッ素系分散剤を使用した実施例1〜5では、体積抵抗率の値を5.0Ω・cm以下に低減、つまり、導電性を損なうことなく、連続吐出時における固液分離を抑制でき、厳しい遠心分離条件であっても金属接合材料に固液分離が発生するのを防止できた。また、フッ素系分散剤を使用した実施例1〜5では、0.15mmと微少なノズル径にて、連続して吐出しても、10000点までノズル内の詰まりが発生せず、ノズル内の詰まり発生を抑制できた。さらに、固液分離を抑制できた実施例1〜5では、接合剪断強度と大気中放置後の接合剪断強度ともに40MPa以上と良好であり、塗布後すぐの焼成でも、塗布後時間の経過した焼成でも、いずれも、機械的強度に優れた接合部を形成できた。   As shown in Tables 1 and 2, in Examples 1 to 5 using a fluorine-based dispersant, the value of volume resistivity is reduced to 5.0 Ω · cm or less, that is, without continuous loss without impairing conductivity. The solid-liquid separation can be suppressed, and the solid-liquid separation can be prevented from occurring in the metal bonding material even under severe centrifugal conditions. Further, in Examples 1 to 5 using a fluorine-based dispersant, clogging in the nozzle does not occur up to 10000 points even when the nozzle is continuously discharged with a small nozzle diameter of 0.15 mm, The clogging could be suppressed. Furthermore, in Examples 1 to 5 in which solid-liquid separation could be suppressed, both the joint shear strength and the joint shear strength after being left in the atmosphere were as good as 40 MPa or more, and even after firing immediately after coating, firing after the passage of time. However, in both cases, it was possible to form a joint having excellent mechanical strength.

実施例1と実施例3から、有機溶媒として沸点が243℃〜272℃及び25℃の蒸気圧が0.013Pa〜3.9Paの範囲内にあるであるグリコールエーテル系を使用すると、導電性がより向上する傾向があった。   From Example 1 and Example 3, when a glycol ether system having a boiling point of 243 ° C. to 272 ° C. and a vapor pressure of 25 ° C. in the range of 0.013 Pa to 3.9 Pa is used as the organic solvent, the conductivity is increased. There was a tendency to improve.

一方、比較例1〜5から、フッ素系分散剤以外の分散剤を使用または分散剤を使用しないと、連続吐出時における金属接合材料の固液分離を抑制できず、遠心分離条件でも金属接合材料に固液分離が発生した。また、比較例1〜5では、0.15mmと微少なノズル径にて、連続して吐出すると、6000点以下でノズル内の詰まりが発生してしまった。また、比較例6からソルビトール系分散剤を使用すると、連続吐出時でも遠心分離条件でも固液分離が発生するのを防止でき、0.15mmと微少なノズル径にて連続して吐出しても10000点までノズル内の詰まりが発生しなかったが、接合剪断強度と大気中放置後の接合剪断強度ともに20MPa未満に低下し、接合強度が得られなかった。   On the other hand, from Comparative Examples 1 to 5, if a dispersant other than the fluorine-based dispersant is used or a dispersant is not used, solid-liquid separation of the metal bonding material at the time of continuous discharge cannot be suppressed, and the metal bonding material even under centrifugal conditions Solid-liquid separation occurred. Further, in Comparative Examples 1 to 5, when the nozzles were continuously discharged at a minute nozzle diameter of 0.15 mm, the nozzles were clogged at 6000 points or less. Further, when a sorbitol-based dispersant is used from Comparative Example 6, it is possible to prevent solid-liquid separation from occurring even during continuous discharge or under centrifugal conditions, and even when discharged continuously with a very small nozzle diameter of 0.15 mm. Although clogging in the nozzle did not occur up to 10,000 points, both the joint shear strength and the joint shear strength after standing in the air decreased to less than 20 MPa, and the joint strength was not obtained.

本発明の金属接合材料は、接合部の導電性と焼結後の接合強度に優れので、金属間接合の接合剤として広汎に、例えば、LED素子やパワーデバイス等といった半導体部品の基板への搭載の分野で利用でき、また、本発明の金属接合材料は、固液分離が生じるのを防止して少量の吐出時であっても吐出不良を抑制できるので、微細な接合部による基板への実装が要求される高輝度LED素子の分野で利用できる。   Since the metal bonding material of the present invention is excellent in the electrical conductivity of the bonded portion and the bonding strength after sintering, it is widely used as a bonding agent for intermetallic bonding, for example, mounting of semiconductor components such as LED elements and power devices on a substrate. In addition, the metal bonding material of the present invention can prevent solid-liquid separation and suppress discharge failure even during a small amount of discharge. Can be used in the field of high-brightness LED devices.

Claims (8)

(A)金属粒子と、(B)有機溶媒からなる溶媒と、(C)フッ素系分散剤と、を含有する金属接合材料であって、
前記(A)金属粒子が、(A1)平均一次粒子径の粒度分布が100nm〜6000nmの範囲にある第1の金属粒子と(A2)平均一次粒子径の粒度分布が0.5μm〜10μmの範囲にある第2の金属粒子とからなり、
前記(B)有機溶媒からなる溶媒が、沸点が243℃〜275℃及び25℃の蒸気圧が0.010Pa〜4.0Paである有機溶媒を含む金属接合材料。
A metal bonding material containing (A) metal particles, (B) a solvent composed of an organic solvent, and (C) a fluorine-based dispersant,
The (A) metal particles are (A1) first metal particles having an average primary particle size distribution in a range of 100 nm to 6000 nm and (A2) a particle size distribution of an average primary particle size in a range of 0.5 μm to 10 μm. The second metal particles in
(B) The metal joining material containing the organic solvent whose solvent consisting of the organic solvent has a boiling point of 243 ° C. to 275 ° C. and a vapor pressure of 0.010 Pa to 4.0 Pa at 25 ° C.
前記(C)フッ素系分散剤が、下記一般式(I)
Figure 0006376802
(式中、R、R、R、Rは、それぞれ、独立に、F、CF、CF=CF−CF、Cを表す。)で表される化合物、前記一般式(I)で表される化合物のオリゴマー、または前記一般式(I)で表される化合物のオリゴマーを主骨格とする化合物である請求項1に記載の金属接合材料。
The (C) fluorine-based dispersant is represented by the following general formula (I)
Figure 0006376802
(Wherein R 1 , R 2 , R 3 and R 4 each independently represents F, CF 3 , CF═CF—CF 3 , or C 3 F 7 ), the above general formula The metal bonding material according to claim 1, which is a compound having a main skeleton of an oligomer of a compound represented by the formula (I) or an oligomer of a compound represented by the general formula (I).
前記一般式(I)で表される化合物が、ヘキサフルオロプロペンまたはヘキサフルオロプロペントリマーである請求項2に記載の金属接合材料。   The metal bonding material according to claim 2, wherein the compound represented by the general formula (I) is hexafluoropropene or hexafluoropropene trimer. ディスペンサー用である請求項1に記載の金属接合材料。   The metal bonding material according to claim 1, which is used for a dispenser. 前記(A1)第1の金属粒子及び前記(A2)第2の金属粒子が、銀、銀合金、または銀若しくは銀合金で被覆された銅である請求項1に記載の金属接合材料。   The metal bonding material according to claim 1, wherein the (A1) first metal particles and the (A2) second metal particles are silver, a silver alloy, or copper coated with silver or a silver alloy. 前記(A1)第1の金属粒子の質量:前記(A2)第2の金属粒子の質量が、3:7〜7:3である請求項1または5に記載の金属接合材料。   The metal bonding material according to claim 1 or 5, wherein (A1) mass of the first metal particles: (A2) mass of the second metal particles is 3: 7 to 7: 3. 基板上の電子部品を接合する位置に、請求項1乃至6のいずれか1項に記載の金属接合材料を所定量塗布し、塗布した前記金属接合材料の上に前記電子部品を載置後、焼成処理して前記基板に前記電子部品を実装することを特徴とする電子部品接合体の製造方法 A predetermined amount of the metal bonding material according to any one of claims 1 to 6 is applied to a position where the electronic component on the substrate is bonded, and after placing the electronic component on the applied metal bonding material, and sintering treatment, a method of manufacturing an electronic component joined body, which comprises mounting the electronic component on the substrate. 前記電子部品が、LED素子またはパワーデバイスであることを特徴とする請求項7に記載の電子部品接合体の製造方法The method of manufacturing an electronic component assembly according to claim 7, wherein the electronic component is an LED element or a power device.
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