JP6406537B2 - Method for producing phenol novolac resin, method for producing insulating cured product, and method for producing resist material - Google Patents
Method for producing phenol novolac resin, method for producing insulating cured product, and method for producing resist material Download PDFInfo
- Publication number
- JP6406537B2 JP6406537B2 JP2014106112A JP2014106112A JP6406537B2 JP 6406537 B2 JP6406537 B2 JP 6406537B2 JP 2014106112 A JP2014106112 A JP 2014106112A JP 2014106112 A JP2014106112 A JP 2014106112A JP 6406537 B2 JP6406537 B2 JP 6406537B2
- Authority
- JP
- Japan
- Prior art keywords
- producing
- catalyst
- phenol
- resin
- phenol novolac
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 title claims description 56
- 229920003986 novolac Polymers 0.000 title claims description 53
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 239000000463 material Substances 0.000 title claims description 14
- 239000003054 catalyst Substances 0.000 claims description 43
- 229920005989 resin Polymers 0.000 claims description 37
- 239000011347 resin Substances 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 32
- 150000002989 phenols Chemical class 0.000 claims description 29
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 claims description 24
- 239000002994 raw material Substances 0.000 claims description 20
- 238000006482 condensation reaction Methods 0.000 claims description 14
- 238000005292 vacuum distillation Methods 0.000 claims description 13
- 239000011342 resin composition Substances 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 11
- 230000002378 acidificating effect Effects 0.000 claims description 10
- 238000002156 mixing Methods 0.000 claims description 8
- 239000002253 acid Substances 0.000 claims description 7
- 238000010494 dissociation reaction Methods 0.000 claims description 7
- 230000005593 dissociations Effects 0.000 claims description 7
- DAJPMKAQEUGECW-UHFFFAOYSA-N 1,4-bis(methoxymethyl)benzene Chemical compound COCC1=CC=C(COC)C=C1 DAJPMKAQEUGECW-UHFFFAOYSA-N 0.000 claims description 6
- 238000004821 distillation Methods 0.000 claims description 2
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 claims 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Natural products P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 23
- 150000001299 aldehydes Chemical class 0.000 description 22
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 21
- 239000004593 Epoxy Substances 0.000 description 16
- 238000006243 chemical reaction Methods 0.000 description 16
- -1 imidazole compound Chemical class 0.000 description 16
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 14
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 10
- 239000003505 polymerization initiator Substances 0.000 description 10
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 10
- 239000007983 Tris buffer Substances 0.000 description 9
- 238000005227 gel permeation chromatography Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 8
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 229930040373 Paraformaldehyde Natural products 0.000 description 7
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 7
- 235000006408 oxalic acid Nutrition 0.000 description 7
- 229920002866 paraformaldehyde Polymers 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 6
- 239000003999 initiator Substances 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- 239000000945 filler Substances 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000006116 polymerization reaction Methods 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- XOUQAVYLRNOXDO-UHFFFAOYSA-N 2-tert-butyl-5-methylphenol Chemical compound CC1=CC=C(C(C)(C)C)C(O)=C1 XOUQAVYLRNOXDO-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 238000007664 blowing Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000005011 phenolic resin Substances 0.000 description 4
- 238000012719 thermal polymerization Methods 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- BVYPJEBKDLFIDL-UHFFFAOYSA-N 3-(2-phenylimidazol-1-yl)propanenitrile Chemical compound N#CCCN1C=CN=C1C1=CC=CC=C1 BVYPJEBKDLFIDL-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 150000001639 boron compounds Chemical class 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000001308 synthesis method Methods 0.000 description 3
- USFPINLPPFWTJW-UHFFFAOYSA-N tetraphenylphosphonium Chemical compound C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 USFPINLPPFWTJW-UHFFFAOYSA-N 0.000 description 3
- JIRHAGAOHOYLNO-UHFFFAOYSA-N (3-cyclopentyloxy-4-methoxyphenyl)methanol Chemical compound COC1=CC=C(CO)C=C1OC1CCCC1 JIRHAGAOHOYLNO-UHFFFAOYSA-N 0.000 description 2
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 2
- OGRAOKJKVGDSFR-UHFFFAOYSA-N 2,3,5-trimethylphenol Chemical compound CC1=CC(C)=C(C)C(O)=C1 OGRAOKJKVGDSFR-UHFFFAOYSA-N 0.000 description 2
- QWBBPBRQALCEIZ-UHFFFAOYSA-N 2,3-dimethylphenol Chemical compound CC1=CC=CC(O)=C1C QWBBPBRQALCEIZ-UHFFFAOYSA-N 0.000 description 2
- NKTOLZVEWDHZMU-UHFFFAOYSA-N 2,5-xylenol Chemical compound CC1=CC=C(C)C(O)=C1 NKTOLZVEWDHZMU-UHFFFAOYSA-N 0.000 description 2
- DIZBQMTZXOUFTD-UHFFFAOYSA-N 2-(furan-2-yl)-3h-benzimidazole-5-carboxylic acid Chemical compound N1C2=CC(C(=O)O)=CC=C2N=C1C1=CC=CO1 DIZBQMTZXOUFTD-UHFFFAOYSA-N 0.000 description 2
- NMPVEAUIHMEAQP-UHFFFAOYSA-N 2-Bromoacetaldehyde Chemical compound BrCC=O NMPVEAUIHMEAQP-UHFFFAOYSA-N 0.000 description 2
- GJYCVCVHRSWLNY-UHFFFAOYSA-N 2-butylphenol Chemical compound CCCCC1=CC=CC=C1O GJYCVCVHRSWLNY-UHFFFAOYSA-N 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 2-phenyl-1h-imidazole Chemical compound C1=CNC(C=2C=CC=CC=2)=N1 ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 0.000 description 2
- YCOXTKKNXUZSKD-UHFFFAOYSA-N 3,4-xylenol Chemical compound CC1=CC=C(O)C=C1C YCOXTKKNXUZSKD-UHFFFAOYSA-N 0.000 description 2
- TUAMRELNJMMDMT-UHFFFAOYSA-N 3,5-xylenol Chemical compound CC1=CC(C)=CC(O)=C1 TUAMRELNJMMDMT-UHFFFAOYSA-N 0.000 description 2
- UIDDPPKZYZTEGS-UHFFFAOYSA-N 3-(2-ethyl-4-methylimidazol-1-yl)propanenitrile Chemical compound CCC1=NC(C)=CN1CCC#N UIDDPPKZYZTEGS-UHFFFAOYSA-N 0.000 description 2
- HMNKTRSOROOSPP-UHFFFAOYSA-N 3-Ethylphenol Chemical compound CCC1=CC=CC(O)=C1 HMNKTRSOROOSPP-UHFFFAOYSA-N 0.000 description 2
- ASHGTJPOSUFTGB-UHFFFAOYSA-N 3-methoxyphenol Chemical compound COC1=CC=CC(O)=C1 ASHGTJPOSUFTGB-UHFFFAOYSA-N 0.000 description 2
- HXDOZKJGKXYMEW-UHFFFAOYSA-N 4-ethylphenol Chemical compound CCC1=CC=C(O)C=C1 HXDOZKJGKXYMEW-UHFFFAOYSA-N 0.000 description 2
- HGINCPLSRVDWNT-UHFFFAOYSA-N Acrolein Chemical compound C=CC=O HGINCPLSRVDWNT-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- KYQCOXFCLRTKLS-UHFFFAOYSA-N Pyrazine Chemical compound C1=CN=CC=N1 KYQCOXFCLRTKLS-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000003377 acid catalyst Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 2
- 229940092714 benzenesulfonic acid Drugs 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 239000003431 cross linking reagent Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- CCIVGXIOQKPBKL-UHFFFAOYSA-M ethanesulfonate Chemical compound CCS([O-])(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-M 0.000 description 2
- 238000006266 etherification reaction Methods 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- LEQAOMBKQFMDFZ-UHFFFAOYSA-N glyoxal Chemical compound O=CC=O LEQAOMBKQFMDFZ-UHFFFAOYSA-N 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 230000000977 initiatory effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229940098779 methanesulfonic acid Drugs 0.000 description 2
- 150000007522 mineralic acids Chemical class 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- NXPPAOGUKPJVDI-UHFFFAOYSA-N naphthalene-1,2-diol Chemical compound C1=CC=CC2=C(O)C(O)=CC=C21 NXPPAOGUKPJVDI-UHFFFAOYSA-N 0.000 description 2
- LQNUZADURLCDLV-UHFFFAOYSA-N nitrobenzene Chemical compound [O-][N+](=O)C1=CC=CC=C1 LQNUZADURLCDLV-UHFFFAOYSA-N 0.000 description 2
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 2
- 150000007524 organic acids Chemical class 0.000 description 2
- 235000005985 organic acids Nutrition 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 229920003987 resole Polymers 0.000 description 2
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- QJIMTLTYXBDJFC-UHFFFAOYSA-N (4-methylphenyl)-diphenylphosphane Chemical compound C1=CC(C)=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 QJIMTLTYXBDJFC-UHFFFAOYSA-N 0.000 description 1
- GIWQSPITLQVMSG-UHFFFAOYSA-N 1,2-dimethylimidazole Chemical compound CC1=NC=CN1C GIWQSPITLQVMSG-UHFFFAOYSA-N 0.000 description 1
- BGJSXRVXTHVRSN-UHFFFAOYSA-N 1,3,5-trioxane Chemical compound C1OCOCO1 BGJSXRVXTHVRSN-UHFFFAOYSA-N 0.000 description 1
- FBHPRUXJQNWTEW-UHFFFAOYSA-N 1-benzyl-2-methylimidazole Chemical compound CC1=NC=CN1CC1=CC=CC=C1 FBHPRUXJQNWTEW-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- BAXOFTOLAUCFNW-UHFFFAOYSA-N 1H-indazole Chemical compound C1=CC=C2C=NNC2=C1 BAXOFTOLAUCFNW-UHFFFAOYSA-N 0.000 description 1
- USYCQABRSUEURP-UHFFFAOYSA-N 1h-benzo[f]benzimidazole Chemical compound C1=CC=C2C=C(NC=N3)C3=CC2=C1 USYCQABRSUEURP-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- NWQWQKUXRJYXFH-UHFFFAOYSA-N 2,2-Dichloroacetaldehyde Chemical compound ClC(Cl)C=O NWQWQKUXRJYXFH-UHFFFAOYSA-N 0.000 description 1
- ZCONCJFBSHTFFD-UHFFFAOYSA-N 2,3,5-triethylphenol Chemical compound CCC1=CC(O)=C(CC)C(CC)=C1 ZCONCJFBSHTFFD-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- IXQGCWUGDFDQMF-UHFFFAOYSA-N 2-Ethylphenol Chemical compound CCC1=CC=CC=C1O IXQGCWUGDFDQMF-UHFFFAOYSA-N 0.000 description 1
- QIRNGVVZBINFMX-UHFFFAOYSA-N 2-allylphenol Chemical compound OC1=CC=CC=C1CC=C QIRNGVVZBINFMX-UHFFFAOYSA-N 0.000 description 1
- QSKPIOLLBIHNAC-UHFFFAOYSA-N 2-chloro-acetaldehyde Chemical compound ClCC=O QSKPIOLLBIHNAC-UHFFFAOYSA-N 0.000 description 1
- SUKZIEQXDVGCJR-UHFFFAOYSA-N 2-ethyl-4-prop-1-en-2-ylphenol Chemical compound CCC1=CC(C(C)=C)=CC=C1O SUKZIEQXDVGCJR-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- UITUMGKYHZMNKN-UHFFFAOYSA-N 2-methyl-4-prop-1-en-2-ylphenol Chemical compound CC(=C)C1=CC=C(O)C(C)=C1 UITUMGKYHZMNKN-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- BKCCAYLNRIRKDJ-UHFFFAOYSA-N 2-phenyl-4,5-dihydro-1h-imidazole Chemical compound N1CCN=C1C1=CC=CC=C1 BKCCAYLNRIRKDJ-UHFFFAOYSA-N 0.000 description 1
- WUQYBSRMWWRFQH-UHFFFAOYSA-N 2-prop-1-en-2-ylphenol Chemical compound CC(=C)C1=CC=CC=C1O WUQYBSRMWWRFQH-UHFFFAOYSA-N 0.000 description 1
- IKEHOXWJQXIQAG-UHFFFAOYSA-N 2-tert-butyl-4-methylphenol Chemical compound CC1=CC=C(O)C(C(C)(C)C)=C1 IKEHOXWJQXIQAG-UHFFFAOYSA-N 0.000 description 1
- LLEASVZEQBICSN-UHFFFAOYSA-N 2-undecyl-1h-imidazole Chemical compound CCCCCCCCCCCC1=NC=CN1 LLEASVZEQBICSN-UHFFFAOYSA-N 0.000 description 1
- QQOMQLYQAXGHSU-UHFFFAOYSA-N 236TMPh Natural products CC1=CC=C(C)C(O)=C1C QQOMQLYQAXGHSU-UHFFFAOYSA-N 0.000 description 1
- SESYNEDUKZDRJL-UHFFFAOYSA-N 3-(2-methylimidazol-1-yl)propanenitrile Chemical compound CC1=NC=CN1CCC#N SESYNEDUKZDRJL-UHFFFAOYSA-N 0.000 description 1
- SZUPZARBRLCVCB-UHFFFAOYSA-N 3-(2-undecylimidazol-1-yl)propanenitrile Chemical compound CCCCCCCCCCCC1=NC=CN1CCC#N SZUPZARBRLCVCB-UHFFFAOYSA-N 0.000 description 1
- MFKRHJVUCZRDTF-UHFFFAOYSA-N 3-methoxy-3-methylbutan-1-ol Chemical compound COC(C)(C)CCO MFKRHJVUCZRDTF-UHFFFAOYSA-N 0.000 description 1
- YYMPIPSWQOGUME-UHFFFAOYSA-N 3-propoxyphenol Chemical compound CCCOC1=CC=CC(O)=C1 YYMPIPSWQOGUME-UHFFFAOYSA-N 0.000 description 1
- CYEKUDPFXBLGHH-UHFFFAOYSA-N 3-tert-Butylphenol Chemical compound CC(C)(C)C1=CC=CC(O)=C1 CYEKUDPFXBLGHH-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- LKVFCSWBKOVHAH-UHFFFAOYSA-N 4-Ethoxyphenol Chemical compound CCOC1=CC=C(O)C=C1 LKVFCSWBKOVHAH-UHFFFAOYSA-N 0.000 description 1
- JAGRUUPXPPLSRX-UHFFFAOYSA-N 4-prop-1-en-2-ylphenol Chemical compound CC(=C)C1=CC=C(O)C=C1 JAGRUUPXPPLSRX-UHFFFAOYSA-N 0.000 description 1
- KIIIPQXXLVCCQP-UHFFFAOYSA-N 4-propoxyphenol Chemical compound CCCOC1=CC=C(O)C=C1 KIIIPQXXLVCCQP-UHFFFAOYSA-N 0.000 description 1
- QHPQWRBYOIRBIT-UHFFFAOYSA-N 4-tert-butylphenol Chemical compound CC(C)(C)C1=CC=C(O)C=C1 QHPQWRBYOIRBIT-UHFFFAOYSA-N 0.000 description 1
- TYOXIFXYEIILLY-UHFFFAOYSA-N 5-methyl-2-phenyl-1h-imidazole Chemical compound N1C(C)=CN=C1C1=CC=CC=C1 TYOXIFXYEIILLY-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- STNJBCKSHOAVAJ-UHFFFAOYSA-N Methacrolein Chemical compound CC(=C)C=O STNJBCKSHOAVAJ-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- PCNDJXKNXGMECE-UHFFFAOYSA-N Phenazine Natural products C1=CC=CC2=NC3=CC=CC=C3N=C21 PCNDJXKNXGMECE-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- CZPWVGJYEJSRLH-UHFFFAOYSA-N Pyrimidine Chemical compound C1=CN=CN=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-N 0.000 description 1
- PAURUVKTEQARRE-UHFFFAOYSA-M [Br-].P(=O)(O)(O)O.[Li+].CN1C(CCC1)=O Chemical compound [Br-].P(=O)(O)(O)O.[Li+].CN1C(CCC1)=O PAURUVKTEQARRE-UHFFFAOYSA-M 0.000 description 1
- IKHGUXGNUITLKF-XPULMUKRSA-N acetaldehyde Chemical compound [14CH]([14CH3])=O IKHGUXGNUITLKF-XPULMUKRSA-N 0.000 description 1
- OHBRHBQMHLEELN-UHFFFAOYSA-N acetic acid;1-butoxybutane Chemical compound CC(O)=O.CCCCOCCCC OHBRHBQMHLEELN-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000005036 alkoxyphenyl group Chemical group 0.000 description 1
- 125000005037 alkyl phenyl group Chemical group 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000003849 aromatic solvent Substances 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- 230000001588 bifunctional effect Effects 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- LLEMOWNGBBNAJR-UHFFFAOYSA-N biphenyl-2-ol Chemical compound OC1=CC=CC=C1C1=CC=CC=C1 LLEMOWNGBBNAJR-UHFFFAOYSA-N 0.000 description 1
- VCCBEIPGXKNHFW-UHFFFAOYSA-N biphenyl-4,4'-diol Chemical group C1=CC(O)=CC=C1C1=CC=C(O)C=C1 VCCBEIPGXKNHFW-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- BEVHTMLFDWFAQF-UHFFFAOYSA-N butyl(triphenyl)phosphanium Chemical compound C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CCCC)C1=CC=CC=C1 BEVHTMLFDWFAQF-UHFFFAOYSA-N 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 238000012663 cationic photopolymerization Methods 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000003925 fat Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- 229940015043 glyoxal Drugs 0.000 description 1
- 229940093915 gynecological organic acid Drugs 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000005453 ketone based solvent Substances 0.000 description 1
- 150000002605 large molecules Chemical class 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000004184 methoxymethyl group Chemical group [H]C([H])([H])OC([H])([H])* 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 150000002921 oxetanes Chemical class 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- 235000011007 phosphoric acid Nutrition 0.000 description 1
- 150000003016 phosphoric acids Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 150000008442 polyphenolic compounds Polymers 0.000 description 1
- PBMFSQRYOILNGV-UHFFFAOYSA-N pyridazine Chemical compound C1=CC=NN=C1 PBMFSQRYOILNGV-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- BJQWBACJIAKDTJ-UHFFFAOYSA-N tetrabutylphosphanium Chemical compound CCCC[P+](CCCC)(CCCC)CCCC BJQWBACJIAKDTJ-UHFFFAOYSA-N 0.000 description 1
- 150000003536 tetrazoles Chemical class 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- XKFPGUWSSPXXMF-UHFFFAOYSA-N tributyl(methyl)phosphanium Chemical compound CCCC[P+](C)(CCCC)CCCC XKFPGUWSSPXXMF-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 150000003739 xylenols Chemical class 0.000 description 1
Landscapes
- Phenolic Resins Or Amino Resins (AREA)
- Organic Insulating Materials (AREA)
Description
本発明は、フェノールノボラック樹脂の製造方法及びその製造方法により得られるフェノールノボラック樹脂を使用した絶縁性硬化物の製造方法及びレジスト材料の製造方法に関する。 The present invention relates to a process for producing a preparation and the resist material of the phenolic novolak resin preparation and the insulating cured product using the phenol novolak resins obtained by the production method.
熱可塑性樹脂であるフェノールノボラック樹脂の重量平均分子量を向上させる手法としては種々報告されている。例えば、2段階の反応を行うことによって、重量平均分子量を大きくしながら、フェノールダイマーを低減する合成方法が挙げられる(特許文献1参照)。他にも、重量平均分子量を高くしながら、未反応フェノール類を削減するトリアジン変性フェノールノボラック樹脂を製造する報告が開示されている(特許文献2参照)。 Various techniques for improving the weight average molecular weight of a phenol novolac resin, which is a thermoplastic resin, have been reported. For example, a synthesis method that reduces phenol dimer while increasing the weight average molecular weight by carrying out a two-stage reaction can be mentioned (see Patent Document 1). In addition, a report for producing a triazine-modified phenol novolak resin that reduces unreacted phenols while increasing the weight average molecular weight is disclosed (see Patent Document 2).
しかしながら、これらの報告では、1段階目のフェノールノボラック樹脂を合成する際に、リン酸類での重合を行うことを必須とする限定的な手法であり、汎用性が高いとは言い難い。加えて、フェノールダイマーもしくは未反応のフェノール類を低減するために、2段階目の反応時に、pHを制御し、アルデヒド類の添加を必要としている点から、時間においても制限の多い手法となっており、簡便にフェノールノボラック樹脂の分子量を高くしているとは言い難い。また、p−クレゾールを50質量%以上含有するフェノールノボラック樹脂の分子量を高分子量化させる製造方法が開示されている(特許文献3参照)。この方法は樹脂骨格が制限される限定的な手法であり、その高分子量化効果も十分とは言えない。 However, in these reports, it is a limited technique that requires the polymerization with phosphoric acids when synthesizing the first-stage phenol novolac resin, and it is difficult to say that the versatility is high. In addition, in order to reduce phenol dimers or unreacted phenols, the pH is controlled and the addition of aldehydes is required during the second stage reaction, which is a method with many restrictions in time. Therefore, it cannot be said that the molecular weight of the phenol novolac resin is simply increased. Moreover, the manufacturing method which makes high molecular weight the molecular weight of the phenol novolak resin containing 50 mass% or more of p-cresol is disclosed (refer patent document 3). This method is a limited method in which the resin skeleton is limited, and the high molecular weight effect is not sufficient.
一方、熱硬化性樹脂であるレゾール型フェノール樹脂においては、メラミンとの共縮合物の製造方法が報告されている(特許文献4参照)。しかしながら、原料樹脂となるフェノール樹脂の合成方法が、ノボラック型とレゾ−ル型では異なるために、同手法をフェノールノボラック樹脂へ応用することは、困難であった。 On the other hand, in the resol type phenol resin which is a thermosetting resin, the manufacturing method of the cocondensate with a melamine has been reported (refer patent document 4). However, since the synthesis method of the phenol resin used as the raw resin is different between the novolak type and the resole type, it is difficult to apply this method to the phenol novolak resin.
本発明は上記問題を解決することを目的とする。即ち、フェノールノボラック樹脂を簡便に高分子量化するとともに、高耐熱性を有し、かつフォトレジスト材料として使用可能なフェノールノボラック樹脂の製造方法、並びに該フェノールノボラック樹脂を用いた絶縁性硬化物の製造方法及びレジスト材料の製造方法を提供することを目的とする。 The present invention aims to solve the above problems. That is, the conveniently high molecular weight phenolic novolak resin, a high heat resistance have, and phenol novolak tree method for producing fats which can be used as a photoresist material, and the insulating cured product using the phenol novolak resin and to provide a manufacturing method of preparation and the resist material.
本発明者らは、前記課題を解決するために鋭意検討を重ねた結果、添加剤として1,4−ビス(メトキシメチル)ベンゼンを使用し、フェノール類とアルデヒド類の付加縮合反応過程ののち、加熱減圧蒸留を行う前に第2の触媒を添加して製造されるフェノールノボラック樹脂が高分子量であり、高耐熱性を有し、かつフォトレジスト用フェノール樹脂として使用可能であることを見出し、本発明をなすに至った。 As a result of intensive studies to solve the above problems, the present inventors have used 1,4-bis (methoxymethyl) benzene as an additive, and after the addition condensation reaction process of phenols and aldehydes, The phenol novolak resin produced by adding the second catalyst before heating and vacuum distillation is found to have a high molecular weight, high heat resistance, and can be used as a phenolic resin for photoresist. Invented the invention.
本発明は、以下に関する。
(1) m−クレゾールを含むフェノール類と、1,4−ビス(メトキシメチル)ベンゼンと、アルデヒド類と、第1の触媒とを混合し、前記フェノール類と前記アルデヒド類の付加縮合反応を行う工程、前記の付加縮合反応を行う工程後、加熱減圧蒸留を行う前に第2の触媒を添加する工程を有し、前記第2の触媒が、酸解離定数(pKa)が−2以下の酸性触媒で、その添加量が、原料全体のモル量を1当量として0.001〜0.005当量であって、前記加熱減圧蒸留を行って得られるフェノールノボラック樹脂の重量平均分子量が20,000以上であるフェノールノボラック樹脂の製造方法。
(2) 前記m−クレゾールを含むフェノール類と前記アルデヒド類との配合比(モル比)が0.6以上である前記(1)に記載のフェノールノボラック樹脂の製造方法。
(3) 前記(1)又は(2)に記載のフェノールノボラック樹脂の製造方法によって得られるフェノールノボラック樹脂を含む硬化性樹脂組成物を硬化させる絶縁性硬化物の製造方法。
(4) 前記(3)に記載の絶縁性硬化物の製造方法を含むレジスト材料の製造方法。
The present invention relates to the following.
(1) A phenol containing m-cresol, 1,4-bis (methoxymethyl) benzene, an aldehyde, and a first catalyst are mixed, and an addition condensation reaction of the phenol and the aldehyde is performed. A step of adding a second catalyst after the step of performing the addition condensation reaction and before performing the heating and vacuum distillation, wherein the second catalyst has an acid dissociation constant (pKa) of −2 or less. The catalyst is added in an amount of 0.001 to 0.005 equivalents, where the molar amount of the whole raw material is 1 equivalent, and the weight average molecular weight of the phenol novolac resin obtained by performing the heating and vacuum distillation is 20,000 or more. A method for producing a phenol novolac resin.
(2) The manufacturing method of the phenol novolak resin as described in said (1) whose compounding ratio (molar ratio) of the phenols containing the said m-cresol and the said aldehydes is 0.6 or more .
( 3 ) A method for producing an insulating cured product , wherein a curable resin composition containing a phenol novolac resin obtained by the method for producing a phenol novolac resin according to (1) or (2) is cured.
(4) The method of producing a resist material including a method of manufacturing an insulating cured product according to (3).
本発明により、フェノールノボラック樹脂を簡便に高分子量化するとともに、高耐熱性を有し、かつフォトレジスト材料として使用可能なフェノールノボラック樹脂及びその製造方法、並びに該フェノールノボラック樹脂を用いた絶縁性硬化物及びレジスト材料を提供することが可能となる。 According to the present invention, a phenol novolac resin is easily made to have a high molecular weight, has a high heat resistance and can be used as a photoresist material, a method for producing the same, and insulating curing using the phenol novolac resin. And a resist material can be provided.
本発明のフェノールノボラック樹脂の製造方法は、m−クレゾールを含むフェノール類と、1,4−ビス(メトキシメチル)ベンゼンと、アルデヒド類と、第1の触媒とを混合し、前記フェノール類と前記アルデヒド類の付加縮合反応を行う工程、前記の付加縮合反応を行う工程後、加熱減圧蒸留を行う前に第2の触媒を添加する工程を有し、前記第2の触媒が、酸解離定数(pKa)が−2以下の酸性触媒である。また、本発明のフェノールノボラック樹脂は、前記のフェノールノボラック樹脂の製造方法により得られるものである。 The method for producing a phenol novolac resin of the present invention comprises mixing phenols containing m-cresol, 1,4-bis (methoxymethyl) benzene, aldehydes, and a first catalyst, and the phenols and the above After the step of performing an addition condensation reaction of aldehydes, the step of performing the above addition condensation reaction, and the step of adding a second catalyst before performing heating and vacuum distillation, the second catalyst has an acid dissociation constant ( pKa) is an acidic catalyst of -2 or less. The phenol novolac resin of the present invention is obtained by the above-described method for producing a phenol novolac resin.
本実施形態のフェノールノボラック樹脂は、フェノール類とアルデヒド類とを原料とし、第1の触媒である酸性触媒によって付加縮合させる公知のフェノールノボラック合成方法に加え、1,4−ビス(メトキシメチル)ベンゼンを原料に混合し、フェノール類とアルデヒド類の付加縮合反応過程ののち、加熱減圧蒸留を行う前に第2の触媒を添加することで製造することができる。すなわち、本実施形態のフェノールノボラック樹脂の製造方法を行うことにより、簡易に重量平均分子量が20,000以上の高分子量フェノールノボラック樹脂の合成が可能であり、フォトレジスト用フェノール樹脂として有用な耐熱性のあるフェノールノボラック樹脂を得ることができる。なお、分子量はGPC(ゲルパーミエーションクロマトグラフィー)によって測定し、スチレン標準サンプルによって作成した検量線に基づいて補正した重量平均分子量を示す。 The phenol novolac resin of the present embodiment uses 1,4-bis (methoxymethyl) benzene in addition to a known phenol novolac synthesis method in which phenols and aldehydes are used as raw materials and addition condensation is performed using an acidic catalyst as a first catalyst. Can be produced by adding a second catalyst after the addition condensation reaction process of phenols and aldehydes and before heating and vacuum distillation. That is, by carrying out the method for producing a phenol novolak resin of this embodiment, a high molecular weight phenol novolac resin having a weight average molecular weight of 20,000 or more can be easily synthesized, and heat resistance useful as a phenol resin for photoresists. A phenol novolac resin having a high molecular weight can be obtained. The molecular weight is measured by GPC (gel permeation chromatography) and indicates a weight average molecular weight corrected based on a calibration curve prepared with a styrene standard sample.
使用されるフェノール類としては、m−クレゾールを含み、置換又は非置換のフェノール化合物を用いることができる。具体的には、m−クレゾール、o−クレゾール、p−クレゾール、フェノール、2−アリルフェノール、2,3−キシレノール、2,5−キシレノール、3,5−キシレノール、3,4−キシレノール等のキシレノール類、m−エチルフェノール、p−エチルフェノール、o−エチルフェノール、2,3,5−トリメチルフェノール、2,3,5−トリエチルフェノール、4−tert−ブチルフェノール、3−tert−ブチルフェノール、2−tert−ブチルフェノール、2−tert−ブチル−4−メチルフェノール、2−tert−ブチル−5−メチルフェノール、6−tert−ブチル−3−メチルフェノール等のアルキルフェノール類、p−メトキシフェノール、m−メトキシフェノール、p−エトキシフェノール、m−エトキシフェノール、p−プロポキシフェノール、m−プロポキシフェノール等のアルコキシフェノール類、o−イソプロペニルフェノール、p−イソプロペニルフェノール、2−メチル−4−イソプロペニルフェノール、2−エチル−4−イソプロペニルフェノール等のイソプロペニルフェノール類、4,4´−ジヒドロキシビフェニル、ビスフェノールA、フェニルフェノール、レゾルシノール、ヒドロキノン、ピロガロール等のポリヒドロキシフェノール類、α−ナフトール、β−ナフトール、ジヒドロキシナフタレン類などを挙げることができる。 As phenols to be used, substituted or unsubstituted phenol compounds containing m-cresol can be used. Specifically, xylenol such as m-cresol, o-cresol, p-cresol, phenol, 2-allylphenol, 2,3-xylenol, 2,5-xylenol, 3,5-xylenol, 3,4-xylenol, etc. M-ethylphenol, p-ethylphenol, o-ethylphenol, 2,3,5-trimethylphenol, 2,3,5-triethylphenol, 4-tert-butylphenol, 3-tert-butylphenol, 2-tert Alkylphenols such as butylphenol, 2-tert-butyl-4-methylphenol, 2-tert-butyl-5-methylphenol, 6-tert-butyl-3-methylphenol, p-methoxyphenol, m-methoxyphenol, p-ethoxyphenol, m-eth Alkoxyphenols such as siphenol, p-propoxyphenol, m-propoxyphenol, o-isopropenylphenol, p-isopropenylphenol, 2-methyl-4-isopropenylphenol, 2-ethyl-4-isopropenylphenol, etc. And polyhydroxyphenols such as 4,4′-dihydroxybiphenyl, bisphenol A, phenylphenol, resorcinol, hydroquinone, pyrogallol, α-naphthol, β-naphthol, and dihydroxynaphthalene.
この場合、フェノール類は、m−クレゾールを含み、1種又は2種以上の混合物を用いてもよい。このとき、フェノール類の2種以上の混合物としては、2官能フェノール類と3官能フェノール類を用いることが好ましい。フェノール類の仕込み方法は、原料と共に一括して仕込む方法、あるいは反応の進行と共に分割して加えていく方法など、目的に適した方法を採用してよい。 In this case, phenols contain m-cresol and may use 1 type, or 2 or more types of mixtures. At this time, it is preferable to use bifunctional phenols and trifunctional phenols as a mixture of two or more phenols. As a method for charging phenols, a method suitable for the purpose, such as a method of charging together with raw materials or a method of adding by dividing as the reaction proceeds, may be adopted.
一方、フェノールノボラック樹脂を得るために用いるアルデヒド類は、公知のものが使用できる。具体的には、ホルムアルデヒド、パラホルムアルデヒド、クロロアセトアルデヒド、ジクロロアセトアルデヒド、ブロモアセトアルデヒド、トリオキサン、アセトアルデヒド、グリオキザール、アクロレイン、メタクロレイン等が挙げられ、特にホルムアルデヒド、パラホルムアルデヒドが好ましい。この場合、アルデヒド類は1種又は2種以上の混合物を用いてもよい。アルデヒド類等の仕込み方法は、原料と共に一括して仕込む方法、反応の進行と共に分割して加えていく方法など、目的に適した方法を採用してよい。 On the other hand, known aldehydes can be used for obtaining the phenol novolac resin. Specific examples include formaldehyde, paraformaldehyde, chloroacetaldehyde, dichloroacetaldehyde, bromoacetaldehyde, trioxane, acetaldehyde, glyoxal, acrolein, methacrolein and the like, and formaldehyde and paraformaldehyde are particularly preferable. In this case, aldehydes may be used alone or as a mixture of two or more. As the charging method for aldehydes and the like, a method suitable for the purpose, such as a method of charging together with the raw material or a method of adding by dividing with the progress of the reaction may be adopted.
フェノール類とアルデヒド類等との配合比(アルデヒド類等/フェノール類)は特に限定されるものではないが、好ましくは、モル基準で0.6以上、より好ましくは0.7〜0.8である。配合比が0.6以上であれば、フェノール類ダイマー以下の成分含有量を減少させることが容易になり、かつ未反応のアルデヒド類等が極端に増加するようなこともなく生産効率の面でも好適である。また、0.8を超える添加量では、樹脂の反応が進みすぎて、ゲル化を起こす可能性が出てくる場合がある。 The blending ratio of phenols and aldehydes (aldehydes / phenols / phenols) is not particularly limited, but is preferably 0.6 or more on a molar basis, more preferably 0.7 to 0.8. is there. If the blending ratio is 0.6 or more, it becomes easy to reduce the content of components below the phenol dimer, and there is no extreme increase in unreacted aldehydes, etc., in terms of production efficiency. Is preferred. On the other hand, when the addition amount exceeds 0.8, there is a possibility that the reaction of the resin proceeds so much that gelation may occur.
本発明で用いられる第1の触媒は、通常、酸性触媒である。第1の触媒である酸性触媒としては、塩酸、硫酸、ホウ酸等の無機酸類、蓚酸、酢酸、ベンゼンスルホン酸、p−トルエンスルホン酸、キシレンスルホン酸、p−フェノールスルホン酸、メタンスルホン酸、エタンスルホン酸等の有機酸類が挙げられ、1種又は2種以上を組み合わせて用いることができる。なお、酸性触媒(第1の触媒)の添加量については、原料全体のモル量を1当量として0.001〜0.005当量であればよく、好ましくは0.015〜0.025当量である。このとき、酸性触媒(第1の触媒)の添加方法は、原料と共に一括して仕込む方法、反応の進行と共に分割して加えていく方法など、目的に適した方法を採用してよい。また、添加時の温度については、安全性を考慮し、40℃以下とすることが好ましい。 The first catalyst used in the present invention is usually an acidic catalyst. As the acidic catalyst as the first catalyst, inorganic acids such as hydrochloric acid, sulfuric acid, boric acid, oxalic acid, acetic acid, benzenesulfonic acid, p-toluenesulfonic acid, xylenesulfonic acid, p-phenolsulfonic acid, methanesulfonic acid, Organic acids such as ethanesulfonic acid can be mentioned, and one or more can be used in combination. In addition, about the addition amount of an acidic catalyst (1st catalyst), the molar amount of the whole raw material should just be 0.001-0.005 equivalent, Preferably it is 0.015-0.025 equivalent. . At this time, as an addition method of the acidic catalyst (first catalyst), a method suitable for the purpose, such as a method of charging all together with the raw material, a method of adding in a divided manner as the reaction proceeds may be adopted. Further, the temperature at the time of addition is preferably 40 ° C. or less in consideration of safety.
また、本発明で用いられる第2の触媒は、酸解離定数(pKa)が−2以下の酸性触媒である。具体的には塩酸、硫酸等の無機酸類、ベンゼンスルホン酸、p−トルエンスルホン酸、キシレンスルホン酸、p−フェノールスルホン酸、メタンスルホン酸、エタンスルホン酸等の有機酸類が挙げられ、1種又は2種以上を組み合わせて用いることができる。そして、酸解離定数(pKa)が−2以下の酸性触媒を、付加縮合反応後、加熱減圧蒸留を行う前に添加することにより、重量平均分子量が20,000以上のフェノールノボラック樹脂を得ることができる。なお、酸性触媒(第2の触媒)の添加量については、原料全体のモル量を1当量として0.001〜0.005当量であればよく、好ましくは0.0015〜0.0025当量である。このとき、酸性触媒(第2の触媒)の添加方法は、原料へ一括して仕込む方法、反応の進行と共に分割して加えていく方法など、目的に適した方法を採用してよい。また、添加時の温度については、安全性を考慮し、40℃以下とすることが好ましい。
The second catalyst used in the present invention is an acidic catalyst having an acid dissociation constant (pKa) of −2 or less. Specific examples include inorganic acids such as hydrochloric acid and sulfuric acid, and organic acids such as benzenesulfonic acid, p-toluenesulfonic acid, xylenesulfonic acid, p-phenolsulfonic acid, methanesulfonic acid, and ethanesulfonic acid. Two or more kinds can be used in combination. Then, an acid catalyst having an acid dissociation constant (pKa) of −2 or less is added after the addition condensation reaction and before the heating and vacuum distillation to obtain a phenol novolak resin having a weight average molecular weight of 20,000 or more. it can. Note that the amount of acid catalyst (second catalyst), the molar amount of the entire raw material may be a 0.001 to 0.005 equivalents as 1 equivalent, it is preferably from 0.0015 to 0.0025 equivalents . At this time, as an addition method of the acidic catalyst (second catalyst), a method suitable for the purpose, such as a method of charging the raw material at once or a method of adding the catalyst in a divided manner as the reaction proceeds, may be employed. Further, the temperature at the time of addition is preferably 40 ° C. or less in consideration of safety.
公知のフェノールノボラック樹脂の合成方法は原料を仕込んだ反応釜を反応温度まで昇温してフェノール類とアルデヒド類を付加縮合反応させ、加熱減圧蒸留を行う。加熱減圧蒸留過程ではさらに付加縮合反応が進むとともに、水及び未反応モノマーの除去を行う。本発明では、付加縮合反応過程を終了し、第2の触媒を添加した後に加熱減圧蒸留を行う。第2の触媒の添加前の付加縮合反応中の温度については、高温にするほど、反応時間を短くすることができるが、極端に高温にしてしまうと、反応を制御しづらくなるために、100℃以下の温度で反応を行うことが好ましい。反応時間は、反応温度、反応系の含水量、生成物の縮合状況などを考慮しながら決定されるが一般的には1〜20時間程度である。なお、フェノール類とアルデヒド類の付加縮合反応後、必要に応じ、20〜60℃まで冷却してから、第2の触媒を添加してもよい。また、第2の触媒を添加した後の加熱減圧蒸留の条件としては、例えば、100〜200℃、1〜10時間程度である。 In a known method for synthesizing a phenol novolac resin, a reaction kettle charged with raw materials is heated to a reaction temperature to cause an addition condensation reaction of phenols and aldehydes, followed by heating under reduced pressure. In the heating and vacuum distillation process, addition condensation reaction further proceeds, and water and unreacted monomers are removed. In the present invention, after the addition condensation reaction process is completed and the second catalyst is added, heating and vacuum distillation are performed. Regarding the temperature during the addition condensation reaction before the addition of the second catalyst, the reaction time can be shortened as the temperature is increased. However, if the temperature is extremely increased, the reaction becomes difficult to control. It is preferable to carry out the reaction at a temperature of 0 ° C. or lower. The reaction time is determined in consideration of the reaction temperature, the water content of the reaction system, the condensation state of the product, etc., but is generally about 1 to 20 hours. In addition, after addition condensation reaction of phenols and aldehydes, after cooling to 20-60 degreeC as needed, you may add a 2nd catalyst. Moreover, as conditions of the heat | fever vacuum distillation after adding a 2nd catalyst, they are 100-200 degreeC and about 1 to 10 hours, for example.
本発明によって得られたフェノールノボラック樹脂は、公知の架橋剤、重合開始剤、溶剤、添加剤等を配合することにより硬化性樹脂組成物とすることができる。例えば、熱重合開始剤を含む硬化性樹脂組成物はプリプレグ材料や接着材料等に好適に用いることができ、光重合開始剤を含む硬化性樹脂組成物はレジスト材料に好適に用いることができる。あるいは、本発明のフェノールノボラック樹脂を含む硬化性樹脂組成物を硬化させて、絶縁性硬化物とし、前記の絶縁性硬化物をレジスト材料としてもよい。 The phenol novolac resin obtained by the present invention can be made into a curable resin composition by blending a known crosslinking agent, polymerization initiator, solvent, additive and the like. For example, a curable resin composition containing a thermal polymerization initiator can be suitably used for a prepreg material or an adhesive material, and a curable resin composition containing a photopolymerization initiator can be suitably used for a resist material. Alternatively, the curable resin composition containing the phenol novolac resin of the present invention may be cured to form an insulating cured product, and the insulating cured product may be used as a resist material.
架橋剤は、フェノールノボラック樹脂中のヒドロキシ基と反応する官能基を一分子中に二つ以上有する化合物であり、例えば、多官能エポキシ化合物、オキセタン化合物等が例示でき、多官能エポキシ化合物を用いることが好ましい。 The cross-linking agent is a compound having two or more functional groups that react with the hydroxy group in the phenol novolac resin in one molecule, and examples thereof include polyfunctional epoxy compounds and oxetane compounds, and the use of polyfunctional epoxy compounds. Is preferred.
多官能エポキシ化合物としては、一分子中に二つ以上のグリシジル基を有する化合物であれば特に制限はなく、例えば、ビスフェノールA型エポキシ、ビフェニル型エポキシ、ナフタレン型エポキシ、ビスフェノールF型エポキシ、リン含有エポキシ、ビスフェノールS型エポキシ、脂環式エポキシ、脂肪族鎖状エポキシ、フェノールノボラック型エポキシ、クレゾールノボラック型エポキシ、ビスフェノールAノボラック型エポキシ、ビスフェノールのジグリシジルエーテル化物、ナフタレンジオールのジグリシジルエーテル化物、フェノール類のジグリシジルエーテル化物、アルコール類のジグリシジルエーテル化物、およびこれらのアルキル置換体、ハロゲン化物、水素添加物、およびこれらの一種以上を複数含有する高分子量体等を例示でき、これらのエポキシ化合物は単独で、または2種以上を組み合わせて用いることができる。 The polyfunctional epoxy compound is not particularly limited as long as it is a compound having two or more glycidyl groups in one molecule, for example, bisphenol A type epoxy, biphenyl type epoxy, naphthalene type epoxy, bisphenol F type epoxy, phosphorus-containing Epoxy, bisphenol S type epoxy, cycloaliphatic epoxy, aliphatic chain epoxy, phenol novolak type epoxy, cresol novolak type epoxy, bisphenol A novolak type epoxy, diglycidyl etherified product of bisphenol, diglycidyl etherified product of naphthalenediol, phenol Diglycidyl etherification products of alcohols, diglycidyl etherification products of alcohols, and alkyl-substituted products, halides, hydrogenated products thereof, and high molecular weight compounds containing one or more of these. Shows possible, these epoxy compounds may be used alone or in combination of two or more.
多官能エポキシ化合物の添加量は、硬化の効率によって異なるが、硬化性樹脂組成物の固形分量に対して0.1〜80質量%が好ましく、1〜60質量%がより好ましい。80質量%を超えると硬化剤の性質に支配される傾向にあり、0.1質量%未満だと十分な架橋反応を示さず硬化性に劣る傾向がある。 Although the addition amount of a polyfunctional epoxy compound changes with the efficiency of hardening, 0.1-80 mass% is preferable with respect to the solid content of a curable resin composition, and 1-60 mass% is more preferable. If it exceeds 80% by mass, it tends to be governed by the properties of the curing agent.
重合開始剤としては、ヒドロキシ基とグリシジル基、グリシジル基間の反応を開始または促進する化合物で、特定の温度で重合開始機能を発現する熱重合開始剤と、特定の波長の光の照射によって重合開始機能を発現する光重合開始剤に大別することができる。 The polymerization initiator is a compound that initiates or accelerates the reaction between a hydroxy group, a glycidyl group, and a glycidyl group. Photopolymerization initiators that exhibit an initiating function can be broadly classified.
熱重合開始剤としては、熱によって重合機能を発現または促進するものであれば特に制限はないが、イミダゾール化合物、第3級アミン化合物、有機ホスフィン化合物、有機ホスフィン化合物と有機ボロン化合物との錯体等を例示でき、上市されている種類が豊富であり効率と開始温度を選択しやすい点でイミダゾール化合物、有機ホスフィン化合物、及び有機ホスフィン化合物と有機ボロン化合物との錯体が好ましい。 The thermal polymerization initiator is not particularly limited as long as it exhibits or accelerates the polymerization function by heat, but an imidazole compound, a tertiary amine compound, an organic phosphine compound, a complex of an organic phosphine compound and an organic boron compound, or the like. The imidazole compound, the organic phosphine compound, and the complex of the organic phosphine compound and the organic boron compound are preferable in that there are many types on the market and it is easy to select the efficiency and the starting temperature.
イミダゾール類としては、イミダゾール、2−メチルイミダゾール、2−ウンデシルイミダゾール、1,2−ジメチルイミダゾール、2−エチル−4−イミダゾール、2−フェニルイミダゾール、2−フェニル−4−メチルイミダゾール、1−ベンジル−2−フェニルイミダゾール、1−ベンジル−2−メチルイミダゾール、1−シアノエチル−2−フェニルイミダゾール、1−シアノエチル−2−エチル−4−メチルイミダゾール、1−シアノエチル−2−フェニルイミダゾール、2−フェニルイミダゾリン、ナフトイミダゾール、ピラゾール、トリアゾール、テトラゾール、インダゾール、ピリジン、ピラジン、ピリダジン、ピリミジン、ベンゾトリアゾール、1−シアノエチル−2−メチルイミダゾール、1−シアノエチル−2−エチル−4−メチルイミダゾール、1−シアノエチル−2−ウンデシルイミダゾール、1−シアノエチル−2−フェニルイミダゾール、1−シアノエチル−2−ウンデシルイミダゾリウムトリメリテイト、1−シアノエチル−2−フェニルイミダゾリウムトリメリテイト等を例示できる。 Examples of imidazoles include imidazole, 2-methylimidazole, 2-undecylimidazole, 1,2-dimethylimidazole, 2-ethyl-4-imidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 1-benzyl. 2-phenylimidazole, 1-benzyl-2-methylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 1-cyanoethyl-2-phenylimidazole, 2-phenylimidazoline , Naphthimidazole, pyrazole, triazole, tetrazole, indazole, pyridine, pyrazine, pyridazine, pyrimidine, benzotriazole, 1-cyanoethyl-2-methylimidazole, 1-cyanoethyl-2-ethyl -4-methylimidazole, 1-cyanoethyl-2-undecylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-undecylimidazolium trimellitate, 1-cyanoethyl-2-phenylimidazolium trimellitate Tate etc. can be illustrated.
有機ホスフィン化合物としては、トリフェニルホスフィン、ジフェニル(p−トリル)ホスフィン、トリス(アルキルフェニル)ホスフィン、トリス(アルコキシフェニル)ホスフィン、トリス(アルキル・アルコキシフェニル)ホスフィン、トリス(ジアルキルフェニル)ホスフィン、トリス(トリアルキルフェニル)ホスフィン、トリス(テトラアルキルフェニル)ホスフィン、トリス(ジアルコキシフェニル)ホスフィン、トリス(トリアルコキシフェニル)ホスフィン、トリス(テトラアルコキシフェニル)ホスフィン、トリアルキルホスフィン、ジアルキルアリールホスフィン、アルキルジアリールホスフィン等を例示できる。 Examples of organic phosphine compounds include triphenylphosphine, diphenyl (p-tolyl) phosphine, tris (alkylphenyl) phosphine, tris (alkoxyphenyl) phosphine, tris (alkylalkoxyphenyl) phosphine, tris (dialkylphenyl) phosphine, tris ( Trialkylphenyl) phosphine, tris (tetraalkylphenyl) phosphine, tris (dialkoxyphenyl) phosphine, tris (trialkoxyphenyl) phosphine, tris (tetraalkoxyphenyl) phosphine, trialkylphosphine, dialkylarylphosphine, alkyldiarylphosphine, etc. Can be illustrated.
有機ホスフィン化合物と有機ボロン化合物との錯体としては、テトラフェニルホスホニウム・テトラフェニルボレート、テトラフェニルホスホニウム・テトラ−p−トリルボレート、テトラブチルホスホニウム・テトラフェニルボレート、テトラフェニルホスホニウム・n−ブチルトリフェニルボレート、ブチルトリフェニルホスホニウム・テトラフェニルボレート、メチルトリブチルホスホニウム・テトラフェニルボレート等を例示できる。 Examples of the complex of an organic phosphine compound and an organic boron compound include tetraphenylphosphonium / tetraphenylborate, tetraphenylphosphonium / tetra-p-tolylborate, tetrabutylphosphonium / tetraphenylborate, tetraphenylphosphonium / n-butyltriphenylborate And butyltriphenylphosphonium / tetraphenylborate and methyltributylphosphonium / tetraphenylborate.
熱重合開始剤は1種類単独でも2種類以上を併用して用いてもよい。後述の半硬化エポキシ樹脂組成物および硬化エポキシ樹脂組成物を効率よく作製する手法として、エポキシ樹脂モノマーとフェノールノボラック樹脂との反応開始温度および反応速度が異なる2種類の硬化促進剤を混合して用いる方法が挙げられる。 One thermal polymerization initiator may be used alone, or two or more thermal polymerization initiators may be used in combination. As a method for efficiently producing a semi-cured epoxy resin composition and a cured epoxy resin composition described later, two types of curing accelerators having different reaction start temperatures and reaction rates between an epoxy resin monomer and a phenol novolac resin are used in combination. A method is mentioned.
なお、硬化性樹脂組成物の熱重合開始剤の含有率は特に制限されないが、感度と透過率の観点から、熱硬化性樹脂組成物の固形分の合計100質量%中、0.1〜5.0質量%であることが好ましく、0.2〜3.0質量%であることがより好ましく、0.5〜2.0質量%であることがさらに好ましい。 In addition, although the content rate in particular of the thermopolymerization initiator of a curable resin composition is not restrict | limited, from a viewpoint of a sensitivity and the transmittance | permeability, 0.1-5 in total 100 mass% of solid content of a thermosetting resin composition. It is preferably 0.0% by mass, more preferably 0.2 to 3.0% by mass, and even more preferably 0.5 to 2.0% by mass.
光重合開始剤としては、特定の波長の光照射によって重合機能を発現するものであれば特に制限はないが、光カチオン重合開始剤を用いることが、市販されている種類が豊富であり、効率と光の波長を選択しやすい点で好ましい。例えば、紫外線領域で重合を開始する光カチオン重合開始剤としては、公知の文献に示される開始剤のいずれを用いることが可能であるが、芳香族ヨードニウム塩、芳香族スルホニウム塩、芳香族オニウム塩が、取り扱いやすさと効率の観点から好ましい。光カチオン重合開始剤は、硬化性樹脂組成物の固形分の合計100質量%中、0.1〜5.0質量%であることが好ましく、0.2〜3.0質量%であることがより好ましく、0.5〜2.0質量%であることがさらに好ましい。 The photopolymerization initiator is not particularly limited as long as it exhibits a polymerization function by irradiation with light of a specific wavelength, but there are many commercially available types of photocationic polymerization initiators, which are efficient. It is preferable in that it is easy to select the wavelength of light. For example, as the cationic photopolymerization initiator that initiates polymerization in the ultraviolet region, any of the initiators shown in the known literature can be used, and aromatic iodonium salts, aromatic sulfonium salts, aromatic onium salts can be used. Is preferable from the viewpoint of ease of handling and efficiency. The photocationic polymerization initiator is preferably 0.1 to 5.0% by mass, and preferably 0.2 to 3.0% by mass, out of a total of 100% by mass of the solid content of the curable resin composition. More preferably, it is more preferable that it is 0.5-2.0 mass%.
また、硬化性樹脂組成物の硬化性を阻害しないかぎり添加剤を自由に加えることができ、例えば、増感剤、溶解促進剤、密着向上剤、染料、顔料、界面活性剤、レベリング剤、難燃剤、ゴム系エラストマ、イオントラップ剤、消泡剤、導電粒子、フィラ等を添加することができる。 Further, additives can be freely added as long as they do not hinder the curability of the curable resin composition. For example, sensitizers, dissolution accelerators, adhesion improvers, dyes, pigments, surfactants, leveling agents, difficulty A flame retardant, rubber-based elastomer, ion trapping agent, antifoaming agent, conductive particles, filler, and the like can be added.
例えば、光の吸収を効率的にするために増感剤を添加することが有効である。増感剤は照射する光源の波長によって選択される。増感剤の添加量は特に制限はないが、樹脂の特性を維持しつつ効率的に像形成させるために樹脂の固形分に対して0.01〜20質量%が好ましく、0.1〜10質量%が特に好ましい。 For example, it is effective to add a sensitizer for efficient light absorption. The sensitizer is selected according to the wavelength of the light source to be irradiated. The addition amount of the sensitizer is not particularly limited, but is preferably 0.01 to 20% by mass with respect to the solid content of the resin in order to efficiently form an image while maintaining the properties of the resin. Mass% is particularly preferred.
また、例えばフィラを配合することにより、膨張率、電気特性を改善できる。フィラとしては、シリカ、アルミナ、チタニア、ジルコニア等を例示することができる。フィラの最大粒径は500nm以下とすることが好ましい。粒子の粒径が500nmより大きいと硬化膜とした時に欠陥を生ずる可能性が高まり好ましくない。フィラの配合量は、樹脂100質量%のうち1〜90質量%になるようにするのが好ましい。1質量%未満であると粒子の効果が少なく、90質量%超であると欠陥の発生等により信頼性の低下を招くため好ましくない。 Further, for example, by adding filler, the expansion coefficient and electrical characteristics can be improved. Examples of the filler include silica, alumina, titania, zirconia and the like. The maximum particle size of the filler is preferably 500 nm or less. If the particle diameter is larger than 500 nm, the possibility of causing defects when a cured film is formed is not preferable. The filler content is preferably 1 to 90% by mass in 100% by mass of the resin. If the amount is less than 1% by mass, the effect of the particles is small, and if it exceeds 90% by mass, the reliability is lowered due to generation of defects and the like, which is not preferable.
溶剤としては、上記材料を均一に溶解、または分散できれば特に制限はないが、溶剤の沸点が重合開始剤の重合開始温度より低いことがフィルム等を形成する際の作業性の観点から好まく、アセトン、メチルエチルケトン、メチルイソブチルケトン等のケトン系溶媒、トルエン、キシレン、ニトロベンゼン等の芳香族溶媒、エチレングリコール、ジエチレングリコール、トリエチレングリコール、プロピレングリコール、ジエチレングリコールモノメチルエーテル、トリエチレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテル,3−メトキシ−3−メチル−1−ブタノール、エチレングリコールモノメチルエーテルアセテート、PMA(プロピレングリコールモノメチルエーテルアセテート)、ジエチレングリコールモノブチルエーテルアセテート及びジエチレングリコールモノエチルエーテルアセテート等のグリコール系溶媒を例示することができる。 The solvent is not particularly limited as long as the above materials can be uniformly dissolved or dispersed, but the boiling point of the solvent is preferably lower than the polymerization initiation temperature of the polymerization initiator from the viewpoint of workability when forming a film or the like. Ketone solvents such as acetone, methyl ethyl ketone, methyl isobutyl ketone, aromatic solvents such as toluene, xylene, nitrobenzene, ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, diethylene glycol monomethyl ether, triethylene glycol monomethyl ether, propylene glycol monomethyl ether , 3-methoxy-3-methyl-1-butanol, ethylene glycol monomethyl ether acetate, PMA (propylene glycol monomethyl ether acetate), diethylene glycol It can be exemplified glycol solvents such as mono butyl ether acetate and diethylene glycol monoethyl ether acetate.
また、上記硬化性樹脂組成物の配合における重合開始剤に代えて、溶解阻害剤を配合することにより、ポジ型のレジスト等に適用することも可能である。 Moreover, it can be applied to a positive resist or the like by blending a dissolution inhibitor instead of the polymerization initiator in blending the curable resin composition.
以下、実施例及び比較例を示して本発明を具体的に説明するが、本発明は、下記実施例に制限されるものではない。
なお、GPC測定は以下の条件にて測定した。
測定装置:株式会社日立製作所製「HPLC−L7000シリ−ズ」
カラム:Shodex「GPC KD−806M」
検出器:RI検出器 株式会社日立製作所製「I−7490」
データ処理:株式会社日立製作所製「D7000G」
測定条件:カラム温度 30℃
展開溶媒 NMP(N-メチル-ピロリドン)リン酸リチウムブロマイド溶液
流速 1.0 ml/分、使用ポリスチレン TOSOH製標準ポリスチレン
試料 樹脂固形分換算で1質量%のNMP溶液をマイクロフィルターでろ過したもの
EXAMPLES Hereinafter, although an Example and a comparative example are shown and this invention is demonstrated concretely, this invention is not restrict | limited to the following Example.
The GPC measurement was performed under the following conditions.
Measuring apparatus: “HPLC-L7000 series” manufactured by Hitachi, Ltd.
Column: Shodex “GPC KD-806M”
Detector: RI detector “I-7490” manufactured by Hitachi, Ltd.
Data processing: “D7000G” manufactured by Hitachi, Ltd.
Measurement conditions: Column temperature 30 ° C
Developing solvent NMP (N-methyl-pyrrolidone) lithium phosphate bromide solution Flow rate 1.0 ml / min, used polystyrene TOSOH standard polystyrene
Sample 1% by mass of NMP solution in terms of resin solid content filtered through a microfilter
[実施例1]
温度計、冷却管、撹拌器を取り付けたフラスコに、フェノール類としてmークレゾールを44.8g及びp−クレゾールを29.9g、アルデヒド類としてパラホルムアルデヒドを15.8g及び1,4−ビス(メトキシメチル)ベンゼンを4.6g(原料の総量を1当量としたとき0.017当量)、第1の触媒としてシュウ酸(pKa=1.27)を0.44g(原料の総量を1当量としたとき0.002当量)、メタノールを14.2g混合し、窒素を吹き込みながら90℃で4時間撹拌した。この後、40℃以下に冷却して第2の触媒としてp−トルエンスルホン酸(pKa=−2.8)を0.66g(原料の総量を1当量としたとき0.002当量)添加し、180℃で2時間減圧蒸留を行った。得られた樹脂をGPCにて測定したところ、重量平均分子量が120,000である樹脂が得られた。
[Example 1]
In a flask equipped with a thermometer, condenser, and stirrer, 44.8 g of m-cresol and 29.9 g of p-cresol as phenols, 15.8 g of paraformaldehyde as aldehydes and 1,4-bis (methoxymethyl). ) 4.6 g of benzene (0.017 equivalent when the total amount of raw materials is 1 equivalent), 0.44 g of oxalic acid (pKa = 1.27) as the first catalyst (when the total amount of raw materials is 1 equivalent) 0.002 equivalent) and 14.2 g of methanol were mixed and stirred at 90 ° C. for 4 hours while blowing nitrogen. Then, it cooled to 40 degrees C or less, added 0.66g (0.002 equivalent when the total amount of a raw material is 1 equivalent) p-toluenesulfonic acid (pKa = -2.8) as a 2nd catalyst, Distillation under reduced pressure was performed at 180 ° C. for 2 hours. When the obtained resin was measured by GPC, a resin having a weight average molecular weight of 120,000 was obtained.
[実施例2]
実施例1の組成のうち、アルデヒド類としてパラホルムアルデヒドを12.4g及び1,4−ビス(メトキシメチル)ベンゼンを13.8g(原料の総量を1当量としたとき0.053当量)に変更した以外は、実施例1と同様にしてフェノールノボラック樹脂を得た。得られた樹脂をGPCにて測定したところ、重量平均分子量が28,000である樹脂が得られた。
[Example 2]
In the composition of Example 1, 12.4 g of paraformaldehyde and 13.8 g of 1,4-bis (methoxymethyl) benzene (0.053 equivalent when the total amount of raw materials is 1 equivalent) were changed as aldehydes. Except for the above, a phenol novolac resin was obtained in the same manner as in Example 1. When the obtained resin was measured by GPC, a resin having a weight average molecular weight of 28,000 was obtained.
[比較例1]
温度計、冷却管、撹拌器を取り付けたフラスコに、フェノール類としてm−クレゾールを49.7g及びp−クレゾールを33.1g、アルデヒド類としてパラホルムアルデヒドを18.3g、酸性触媒としてシュウ酸を0.48g(原料の総量を1当量としたとき0.002当量)、メタノールを14.7g混合し、窒素を吹き込みながら90℃で4時間撹拌した。この後、180℃で2時間減圧蒸留を行った。得られた樹脂をGPCにて測定したところ、重量平均分子量が11,000である樹脂が得られた。
[Comparative Example 1]
In a flask equipped with a thermometer, condenser, and stirrer, 49.7 g of m-cresol and 33.1 g of p-cresol as phenols, 18.3 g of paraformaldehyde as aldehydes, and 0 oxalic acid as an acidic catalyst .48 g (0.002 equivalent when the total amount of raw materials was 1 equivalent) and 14.7 g of methanol were mixed and stirred at 90 ° C. for 4 hours while blowing nitrogen. Thereafter, vacuum distillation was performed at 180 ° C. for 2 hours. When the obtained resin was measured by GPC, a resin having a weight average molecular weight of 11,000 was obtained.
[比較例2]
温度計、冷却管、撹拌器を取り付けたフラスコに、フェノール類としてm−クレゾールを59.6g及びp−クレゾールを39.7g、アルデヒド類としてパラホルムアルデヒドを22.0g、第1の触媒としてシュウ酸を0.58g(原料の総量を1当量としたとき0.002当量)、メタノールを20.6g混合し、窒素を吹き込みながら90℃で4時間撹拌した。この後、40℃以下に冷却して第2の触媒としてp−トルエンスルホン酸を0.87g(原料の総量を1当量としたとき0.002当量)添加し、180℃で2時間減圧蒸留を行った。得られた樹脂をGPCにて測定したところ、重量平均分子量が17,000である樹脂が得られた。
[Comparative Example 2]
In a flask equipped with a thermometer, condenser, and stirrer, 59.6 g of m-cresol and 39.7 g of p-cresol as phenols, 22.0 g of paraformaldehyde as aldehydes, and oxalic acid as the first catalyst 0.58 g (0.002 equivalent when the total amount of raw materials is 1 equivalent) and 20.6 g of methanol were mixed and stirred at 90 ° C. for 4 hours while blowing nitrogen. Thereafter, the mixture is cooled to 40 ° C. or lower, 0.88 g of p-toluenesulfonic acid is added as a second catalyst (0.002 equivalent when the total amount of raw materials is 1 equivalent), and vacuum distillation is performed at 180 ° C. for 2 hours. went. When the obtained resin was measured by GPC, a resin having a weight average molecular weight of 17,000 was obtained.
[比較例3]
温度計、冷却管、撹拌器を取り付けたフラスコに、フェノール類としてm−クレゾールを44.8g及びp−クレゾールを29.9g、アルデヒド類としてパラホルムアルデヒドを15.7g及び1,4−ビス(メトキシメチル)ベンゼンを4.3g(原料の総量を1当量としたとき0.015当量)、第1の触媒としてシュウ酸を0.44g(原料の総量を1当量としたとき0.002当量)、メタノールを14.7g混合し、窒素を吹き込みながら90℃で4時間撹拌した。この後、40℃以下に冷却して第2の触媒としてシュウ酸(pKa=1.27)を1.74g(原料の総量を1当量としたとき0.008当量)添加し、180℃で2時間減圧蒸留を行った。得られた樹脂をGPCにて測定したところ、重量平均分子量が8,100である樹脂が得られた。
[Comparative Example 3]
A flask equipped with a thermometer, a condenser, and a stirrer was charged with 44.8 g of m-cresol and 29.9 g of p-cresol as phenols, 15.7 g of paraformaldehyde as aldehydes and 1,4-bis (methoxy). Methyl) benzene 4.3 g (0.015 equivalent when the total amount of raw materials is 1 equivalent), 0.44 g of oxalic acid as the first catalyst (0.002 equivalent when the total amount of raw materials is 1 equivalent), 14.7 g of methanol was mixed and stirred at 90 ° C. for 4 hours while blowing nitrogen. Thereafter, the mixture was cooled to 40 ° C. or lower, and 1.74 g of oxalic acid (pKa = 1.27) was added as a second catalyst (0.008 equivalent when the total amount of raw materials was 1 equivalent), and 2 at 180 ° C. Vacuum distillation was performed for a period of time. When the obtained resin was measured by GPC, a resin having a weight average molecular weight of 8,100 was obtained.
実施例1〜2及び比較例1〜3の樹脂の重量平均分子量及び融点を取り纏め、表1に示した。 The weight average molecular weights and melting points of the resins of Examples 1-2 and Comparative Examples 1-3 are summarized and shown in Table 1.
表1に示したように、第2の触媒として酸解離定数(pKa)が−2以下のp−トルエンスルホン酸(pKa=−2.8)を使用した実施例1〜2のフェノールノボラック樹脂は、重量平均分子量が20,000以上であった。それに対し、フェノール化合物を使用しない比較例1〜2及び第2の触媒として酸解離定数(pKa)が−2を超えるシュウ酸(pKa=1.27)を使用した比較例3においては、得られたフェノールノボラック樹脂の重量平均分子量は20,000未満であった。 As shown in Table 1, the phenol novolak resins of Examples 1 and 2 using p-toluenesulfonic acid (pKa = −2.8) having an acid dissociation constant (pKa) of −2 or less as the second catalyst The weight average molecular weight was 20,000 or more. On the other hand, in Comparative Examples 1 and 2 in which no phenol compound is used and Comparative Example 3 in which oxalic acid (pKa = 1.27) having an acid dissociation constant (pKa) of more than −2 is used as the second catalyst, it is obtained. The weight average molecular weight of the phenol novolac resin was less than 20,000.
(耐熱性)
表1に示したように、実施例1〜2及び比較例1〜3のフェノールノボラック樹脂の耐熱性を評価するため、得られたフェノールノボラック樹脂の融点を測定した。その結果、実施例1〜2のフェノールノボラック樹脂の融点はおおむね高いものが得られた。比較例2、3のフェノールノボラック樹脂の融点は実施例1のフェノールノボラック樹脂の融点よりも高く、高耐熱性であるが、上記表1の結果から、比較例2、3のフェノールノボラック樹脂は重量平均分子量が小さく、フォトレジスト材料としては不十分なものであった。
(Heat-resistant)
As shown in Table 1, in order to evaluate the heat resistance of the phenol novolac resins of Examples 1-2 and Comparative Examples 1-3, the melting points of the obtained phenol novolac resins were measured. As a result, the melting point of the phenol novolac resins of Examples 1 and 2 was generally high. The melting points of the phenol novolak resins of Comparative Examples 2 and 3 are higher than the melting point of the phenol novolak resin of Example 1 and have high heat resistance. From the results in Table 1, the phenol novolak resins of Comparative Examples 2 and 3 are The average molecular weight was small and it was insufficient as a photoresist material.
Claims (4)
前記の付加縮合反応を行う工程後、加熱減圧蒸留を行う前に第2の触媒を添加する工程を有し、
前記第2の触媒が、酸解離定数(pKa)が−2以下の酸性触媒で、その添加量が、原料全体のモル量を1当量として0.001〜0.005当量であって、前記加熱減圧蒸留を行って得られるフェノールノボラック樹脂の重量平均分子量が20,000以上であるフェノールノボラック樹脂の製造方法。
a step of mixing a phenol containing m-cresol, 1,4-bis (methoxymethyl) benzene, an aldehyde, and a first catalyst, and performing an addition condensation reaction of the phenol and the aldehyde;
After the step of performing the addition condensation reaction, the step of adding a second catalyst before performing the heating and vacuum distillation,
The second catalyst is an acidic catalyst having an acid dissociation constant (pKa) of −2 or less , and the addition amount is 0.001 to 0.005 equivalents with the molar amount of the whole raw material as one equivalent, and the heating A method for producing a phenol novolac resin, wherein the weight average molecular weight of a phenol novolak resin obtained by distillation under reduced pressure is 20,000 or more .
The method for producing a phenol novolac resin according to claim 1, wherein a mixing ratio (molar ratio) of the phenols containing m-cresol and the aldehydes is 0.6 or more .
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