JP6410619B2 - Pure water purification equipment - Google Patents

Description

  The present invention relates to a pure water purifier, particularly an ion exchange resin container.

  The pure water used in the semiconductor device manufacturing process is one in which impurities have been removed to near the limit compared to tap water, etc., and the ion content from the fresh water from which some impurities have been removed by a filter or the like by ion exchange means. Removal is usually done. Pure water is also used in cutting devices that cut and divide semiconductor wafers, etc., and is a type of pure water purification device that removes cutting debris and various ions from the processing water discharged from the cutting device and supplies the cutting device again. An ion exchange means is also used in a processing waste liquid treatment apparatus (see, for example, Patent Document 1).

  The ion exchange means of these devices is to remove the ion content by storing the ion exchange resin in a resinous hard container reinforced with glass fiber or the like and passing clean water through the ion exchange resin in the container. Purified into water. Since the structure of the hard container is complicated, it is expensive and heavy, and there is a problem that replacement requires cost and man-hours. Therefore, the inventor of the present application has devised a pure water purifying apparatus that makes it possible to use an inexpensive and light single-layer resin container.

Japanese Patent No. 5086123

  When the pure water purification apparatus is connected to, for example, a cutting apparatus, if the cutting apparatus stops operating, water supplied to the pure water purification apparatus is also stopped. In this case, in the container type in which fresh water is supplied from the lower side of the container and pure water is discharged from the upper side, the air in the container is easily discharged to the outside of the container, but the ion exchange resin moves upward in the container along the flow of water. When the supply of fresh water is stopped, the ion exchange resin accumulated above falls toward the bottom of the container. Furthermore, this phenomenon becomes more prominent because the volume of the resin itself shrinks when the ion exchange resin adsorbs ions, and the space in the container increases. At this time, the cation resin (strongly acidic cation exchange resin) and the anion resin (strongly basic anion exchange resin) mixed at a predetermined mixing ratio as the ion exchange resin are classified by the specific gravity ratio difference (reference) : The specific gravity of the cationic resin is larger), and there is a problem that the effect of ion exchange cannot be sufficiently exhibited.

  The present invention has been considered in view of the above problems, and an object of the present invention is to provide a pure water purifier capable of sufficiently exhibiting the effect of ion exchange.

In order to solve the above-described problems and achieve the object, the pure water purifying apparatus of the present invention comprises ion exchange means for purifying fresh water to be supplied into pure water, and pure water purified by the ion exchange means. A deionized water purification apparatus comprising: a delivery means for delivering from an ion exchange means, wherein the ion exchange means comprises: a ceiling part comprising an ion exchange resin and an inlet; a bottom comprising a delivery outlet; the ceiling part; And a container for containing the ion exchange resin, and the fresh water is supplied from the upper inlet to the container, and the container is a pipe for supplying the fresh water. Connecting means for connecting the pipe to the inlet, the connecting means being connected to the pipe, a connecting and fixing portion for fixing the pipe to the inlet, and being inserted into the container to supply the fresh water to the container The introduction pipe part has a frustoconical shape with a wide bottom part. In, spout the inclined sides are formed along the circumferential direction, said bottom becomes baffles該清water supplied from該噴outlet of the introduction pipe portion, that ejected radially from該噴outlet Features.

  Therefore, in the pure water purifying apparatus of the present invention, since the ion exchange means is configured to pass clear water by so-called downflow, there is an effect that the effect of ion exchange can be sufficiently exhibited.

FIG. 1 is a perspective view illustrating a configuration example of a cutting device as a processing device adjacent to a pure water purification device according to an embodiment. FIG. 2 is an exploded perspective view showing an exploded configuration example of the pure water purifying apparatus according to the embodiment. FIG. 3 is a side sectional view showing the ion exchange means of the pure water purifying apparatus according to the embodiment. FIG. 4 is a diagram illustrating a connection member of the ion exchange means of the pure water purification apparatus according to the embodiment. FIG. 5 is a diagram illustrating a connection member of an ion exchange unit of a pure water purifier according to a modification of the embodiment.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment
A pure water purifier according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view illustrating a configuration example of a cutting device as a processing device adjacent to a pure water purification device according to an embodiment. FIG. 2 is an exploded perspective view showing an exploded configuration example of the pure water purifying apparatus according to the embodiment. FIG. 3 is a side sectional view showing the ion exchange means of the pure water purifying apparatus according to the embodiment. Fig.4 (a) is a side view which shows the connection member of the ion exchange means of the pure water refiner | purifier which concerns on embodiment. FIG.4 (b) is a top view which shows the connection member of the ion exchange means of the pure water refiner | purifier which concerns on embodiment.

  The pure water purification apparatus 1 according to the embodiment is disposed adjacent to a cutting apparatus 100 as a processing apparatus shown in FIG. As shown in FIG. 1, the cutting apparatus 100 includes a chuck table 110 that holds a workpiece W, a cutting blade 121 for cutting the workpiece W held on the chuck table 110, and cutting water on the cutting blade 121. A cutting means 120 having a cutting supply nozzle 122 for supplying the X-axis, an X-axis moving means (not shown) for moving the chuck table 110 in the X-axis direction, and a Y-axis movement for moving the cutting means 120 in the Y-axis direction. Means (not shown), Z-axis moving means (not shown) for moving the cutting means 120 in the Z-axis direction, and a rotation drive source (not shown) for rotating the chuck table 110 about an axis parallel to the Z-axis. Etc.). The cutting apparatus 100 includes an X-axis moving unit, a Y-axis moving unit, a Z-axis moving unit, and a rotational drive source to move the chuck table 110 and the cutting unit 120 in the X-axis direction, the Y-axis direction, the Z-axis direction, and the Z-axis. The workpiece W is cut and divided into chips by relatively moving around an axis parallel to the workpiece.

  In the present embodiment, the workpiece W is a disk-shaped semiconductor wafer or optical device wafer whose base material is silicon, sapphire, gallium, or the like. In the present invention, the workpiece W may be various ceramic substrates, resin substrates, glass substrates and the like used for electronic components. As shown in FIG. 1, the workpiece W is attached to the adhesive sheet S, the annular frame F is attached to the adhesive sheet S, and the workpiece W is attached to the annular frame F via the adhesive sheet S.

  Further, the cutting apparatus 100 cleans the workpiece W after cutting, a cassette elevator 130 that houses a plurality of workpieces W before and after cutting, a loading / unloading means 140 that puts and removes the workpiece W into and from the cassette elevator 130. A cleaning unit 150, a carry-in / out unit 140, a chuck table 110, and a transport unit 160 that transports the workpiece W across the cleaning unit 150 are provided.

  The cutting apparatus 100 takes out the workpiece W before cutting from the cassette elevator 130 by the carry-in / out means 140, and conveys the removed workpiece W to the chuck table 110 by the conveying means 160. The cutting apparatus 100 holds the workpiece W by the chuck table 110, and the chuck table 110 and the cutting means 120 are moved by the X-axis moving unit, the Y-axis moving unit, the Z-axis moving unit, and the rotational drive source. The workpiece W is moved relative to the X-axis direction, the Y-axis direction, the Z-axis direction, and the Z-axis direction, and the workpiece W is cut and divided into chips while supplying cutting water. The cutting apparatus 100 transports the workpiece W after cutting from the chuck table 110 to the cleaning unit 150 by the transport unit 160 and then cleans it by the cleaning unit 150. Then, the cutting apparatus 100 conveys the workpiece W after cleaning to the carry-in / out means 140 by the conveyance means 160 and accommodates it in the cassette elevator 130 by the carry-in / out means 140.

  The pure water purifying apparatus 1 is for purifying and reusing a waste liquid composed of cutting waste and cutting water from the cutting apparatus 100 into pure water. As shown in FIG. 2, the pure water purification apparatus 1 includes a waste liquid storage means 20, a waste liquid filtration means 30, a fresh water storage means 40, a pure water purification means 50, a pure water temperature adjustment means 90, and a control (not shown). Means.

  The waste liquid storage means 20 stores the waste liquid discharged by the cutting device 100. The waste liquid storage means 20 includes a waste liquid tank 21 that stores the waste liquid supplied from the cutting device 100 through the pipe 23, and a waste liquid supply pump 22 that supplies the waste liquid in the waste liquid tank 21.

  The waste liquid filtration means 30 removes cutting waste from the waste liquid fed from the waste liquid storage means 20 and purifies it into fresh water. The waste liquid filtering means 30 includes a first filter 32 into which the waste liquid fed from the waste liquid storage means 20 is introduced through the pipe 31, a second filter 33 into which the waste liquid is introduced through the pipe 31, and a second filter 33. A fresh water receiving pan 36 in which the first filter 32 and the second filter 33 are detachably provided is provided. The piping 31 that connects the waste liquid feed pump 22 to the first filter 32 and the second filter 33 is provided with electromagnetic on-off valves 34a and 34b. When the electromagnetic on-off valves 34 a and 34 b are opened, the waste liquid is introduced into the first filter 32 and the second filter 33. Further, a pressure detection means 35 for detecting the pressure of the waste liquid is attached to the pipe 31.

  The first filter 32 and the second filter 33 filter the introduced waste liquid, capture the cutting waste in the waste liquid, and purify it into fresh water. The first filter 32 and the second filter 33 flow the purified fresh water onto the fresh water receiving pan 36. The fresh water receiving pan 36 sends fresh water to the fresh water storage means 40 through a pipe 37 made of a flexible hose or the like.

  The fresh water storage means 40 stores fresh water from the waste liquid filtering means 30. The fresh water storage means 40 includes a fresh water storage tank 41 that stores fresh water supplied from the waste liquid filtering means 30 through the pipe 37.

  The pure water purifying means 50 purifies fresh water into pure water. The pure water purifying means 50 includes a pressurizing pump 51, an ultraviolet irradiation means 52, a first ion exchange means 53, a second ion exchange means 54, a suction pump 55 (corresponding to a delivery means), a precision filter. 56 and the like. The pressurizing pump 51 supplies the fresh water in the fresh water storage tank 41 to the ultraviolet irradiation means 52 through the pipe 57. The ultraviolet irradiation means 52 irradiates the introduced fresh water with ultraviolet rays to decompose and sterilize organic substances. The ultraviolet irradiation means 52 is connected to the inlet 71 (shown in FIG. 3) of the first ion exchange means 53 and the second ion exchange means 54 through the pipe 58. Electromagnetic on-off valves 59a and 59b are provided in a pipe 58 that connects the ultraviolet irradiation means 52 to the first ion exchange means 53 and the second ion exchange means 54. When the electromagnetic on-off valves 59a and 59b are opened, fresh water is introduced into the first ion exchange means 53 and the second ion exchange means 54.

  The 1st ion exchange means 53 and the 2nd ion exchange means 54 ion-exchange the fresh water sent from the fresh water storage means 40, and refine | purify it to a pure water. Further, the first ion exchange means 53 and the second ion exchange means 54 are connected to the outlet 72 (shown in FIG. 3), the pipe 60 connecting the suction pump 55 and the precision filter 56 with the first ion exchange means. 53 and pressure detection means 61a and 61b for detecting the pressure of pure water from the outlet 72 of the second ion exchange means 54 are attached.

  The suction pump 55 is disposed downstream of the pressure detection means 61a and 61b, and the pure water purified by the first ion exchange means 53 and the second ion exchange means 54 in the pipe 60 is subjected to the first ion exchange. It is sent from the means 53 and the second ion exchange means 54 toward the precision filter 56 and the pure water temperature adjusting means 90 at a predetermined water pressure. In this embodiment, the suction pump 55 passes the pure water purified by the first ion exchange means 53 and the second ion exchange means 54 through the pipe 60 at a predetermined pressure of 0.3 MPa (gauge pressure). Send to precision filter 56. The precision filter 56 captures fine substances such as resin waste such as ion exchange resin 74 (shown in FIG. 3). The pure water temperature adjusting means 90 adjusts the pure water to a predetermined temperature and circulates it to the cutting water supply means of the cutting apparatus 100.

  As shown in FIG. 3, the first ion exchange means 53 and the second ion exchange means 54 include an inflow port 71 and an outflow port 72, and the suction pump 55 is connected to the outflow port 72 via a pipe 60. It is comprised from the container 73 and the ion exchange resin 74 accommodated in the container 73. FIG.

  The container 73 accommodates the ion exchange resin 74. As shown in FIG. 3, the container 73 includes a ceiling portion 73a having an inflow port 71, a bottom portion 73b having an outflow port 72, facing the ceiling portion 73a, and disposed below the ceiling portion 73a, and a ceiling portion. It has a cylindrical side portion 73c that connects 73a and the bottom portion 73b, and the inside is sealed except for the inflow port 71 and the outflow port 72. The inflow port 71 and the outflow port 72 are formed in a cylindrical shape, and are arranged coaxially with the ceiling part 73a, the bottom part 73b, and the side part 73c. The ceiling part 73a and the bottom part 73b are formed in a truncated cone shape. An angle Θ1 formed with the axis P of the entire container 73 on the surface of the ceiling 73a (indicated by a dashed line in FIG. 3) is larger than an angle Θ2 formed with the axis P of the surface of the bottom 73b.

  The container 73 is made of PO (polyolefin), PET (polyethylene terephthalate), PE (polyethylene), PVC (polyvinyl chloride), or the like, and is formed of a single layer resin. The container 73 has a strength that can withstand an internal water pressure of about 0 to -0.01 MPa (gauge pressure). For this reason, if the internal water pressure changes greatly, the container 73 will be deformed according to the internal water pressure. The container 73 is manufactured by a method that can be mass-produced at low cost, such as injection molding, blow molding, and extrusion molding.

  The container 73 includes a connecting means 75 for connecting a pipe 58 for supplying fresh water to the inflow port 71 and an outflow side connecting means 76 for connecting the pipe 60 for sending pure water to the outflow port 72. Fresh water is supplied into the container 73 from the inflow port 71. Since the connecting means 75 and the outflow side connecting means 76 have the same configuration, the connecting means 75 will be described below as a representative.

  The connection means 75 includes a connection member 77 that connects the pipe 58 to the inflow port 71, and a detachable cap 78 that can be fixed to the pipe 58 and the connection member 77 and can fix the connection member 77 to the inflow port 71. As shown in FIGS. 4A and 4B, the connecting member 77 is connected to the pipe 58, and is inserted into the container 73 and a connecting and fixing portion 77a that fixes the pipe 58 to the inlet 71. Is integrally provided with an introduction pipe portion 77 b for supplying the liquid to the container 73. The connection fixing portion 77 a is formed in a cylindrical shape, passes through the inflow port 71 and protrudes out of the container 73, and is inserted into the pipe 58 to be connected to the pipe 58.

  The introduction pipe part 77b is connected to the inner end of the container 73 of the connection fixing part 77a. The introduction pipe portion 77b is formed in a truncated cone shape. The bottom 77c facing the outflow port 72 of the introduction pipe 77b is formed wider than the outer diameter of the connecting and fixing 77a. A side surface 77d that connects the connecting and fixing portion 77a and the bottom portion 77c of the introduction pipe portion 77b is inclined with respect to the axis P so that the outer diameter gradually increases from the connecting and fixing portion 77a toward the bottom portion 77c. . On the inclined side surface 77d, jet outlets 77e for guiding fresh water into the container 73 are formed at intervals along the circumferential direction. In the present embodiment, the jet outlet 77e extends linearly in a direction from the connection fixing portion 77a toward the bottom portion 77c. The bottom 77c is not provided with any openings or holes.

  The introduction pipe portion 77 b is supplied with fresh water through the pipe 58. The fresh water supplied to the introduction pipe portion 77b serves as a baffle at the bottom 77c, and is supplied into the container 73 through the spout 77e. And the fresh water supplied in the container 73 from the jet outlet 77e of the introduction pipe part 77b is bounced off by the bottom part 77c, and is ejected radially diagonally upward from the jet outlet 77e.

  Further, as shown in FIG. 3, the connection member 77 of the outflow side connection means 76 is inserted into the pipe 60 and inserted into the pipe 60 while the coupling fixing portion 77 a is passed through the outlet 72 and protrudes out of the container 73. The introduction pipe portion 77b is inserted into the container 73 with the bottom portion 77c facing the inflow port 71, and the outer diameter gradually increases as the side surface 77d moves from the connection fixing portion 77a toward the bottom portion 77c. Is inclined with respect to the axis P. The connection member 77 of the outflow side connection means 76 takes in pure water purified by the ion exchange resin 74 from the jet outlet 77e, and supplies the taken pure water to the pipe 60 through the introduction pipe portion 77b.

  The detachable cap 78 allows the connecting and fixing portion 77 a of the connecting member 77 to be freely attached to and detached from the inflow port 71 and the outflow port 72. The detachable cap 78 may have a two-layer structure or a combination of a plurality of materials. As the ion exchange resin 74, at least one of an anion exchange resin and a cation exchange resin is used. In the present embodiment, as the ion exchange resin 74, both the anion exchange resin and the cation exchange resin are filled in the container 73 at a predetermined ratio. Cationic resins have a higher specific gravity than anionic resins. When fresh water is supplied to the ion exchange resin 74, ions are adsorbed to cause volume contraction and create a gap between the ion exchange resins 74.

  The first ion exchange means 53 and the second ion exchange means 54 guide the fresh water introduced from the inflow port 71 between the ion exchange resins 74 in the container 73, and exchange ions with the ion exchange resin 74 to obtain pure water. Purified and sent out from the outlet 72 to the suction pump 55.

  The control means controls the above-described components constituting the pure water purifying apparatus 1 so that the waste water is purified to pure water by the pure water purifying apparatus 1. The control means controls the electromagnetic on-off valves 34a, 34b, 59a, 59b, the pressurization pump 51, and the suction pump 55 based on the detection results of the pressure detection means 35, 61a, 61b, and supplies the waste liquid to the waste liquid storage means 20. After being accommodated, it is filtered by the waste liquid filtering means 30 to be purified into fresh water, and after the fresh water is accommodated in the fresh water accommodating means 40, it is purified to pure water by the pure water purifying means 50, and the precision filter 56 and the pure water temperature adjusting means 90 The waste liquid is purified to pure water by the pure water purifier 1. Note that the control means is configured mainly by a microprocessor (not shown) provided with an arithmetic processing unit constituted by a CPU or the like, a ROM, a RAM, or the like. Further, an operation panel (not shown) for inputting processing information such as pure water purification start information is connected to the control means.

  The control means adjusts the pressure of pure water sent from the suction pump 55 to the precision filter 56 to 0.3 MPa (gauge pressure) when the pure water purifier 1 purifies the waste liquid into pure water. Based on the detection results of the pressure detection means 61a and 61b, the control means sets the pressure of pure water flowing out from the pipe 60, that is, the outlet 72, from 0 MPa (gauge pressure) to -0.01 MPa (gauge pressure). Thus, the pressurizing pump 51 is controlled. That is, the control means maintains the pressure of pure water in the containers 73 of the first ion exchange means 53 and the second ion exchange means 54 from 0 MPa (gauge pressure) to -0.01 MPa (gauge pressure).

  When the pressure of pure water in the container 73 of the first ion exchange means 53 and the second ion exchange means 54 becomes lower than −0.01 MPa (gauge pressure), the ion exchange resin 74 adheres to the container 73. A large amount of the generated bubbles are generated, and the performance of the ion exchange resin 74 cannot be sufficiently exhibited. Further, when the pressure of pure water in the container 73 of the first ion exchange means 53 and the second ion exchange means 54 becomes higher than 0 MPa (gauge pressure), a positive pressure is applied in the container 73, and the container 73 is made strong. This is because it is necessary to use a pressure vessel. By doing so, the pure water purifier 1 relaxes the suction force applied to the first ion exchange means 53 and the second ion exchange means 54 by the suction pump 55 by pressurizing the fresh water of the pressurization pump 51.

  As described above, according to the pure water purifying apparatus 1 according to the embodiment, the inlet 71 is provided above the container 73, the outlet 72 is provided below the container 73, and the containers 73 of the ion exchange means 53 and 54 are provided. In the inside, it is set as the structure which flows clear water by what is called a down flow to which clear water is always flowed from upper direction toward the downward direction. For this reason, the pure water purifying apparatus 1 indicates that even if the supply of fresh water to the ion exchange means 53, 54 is stopped, the ion exchange resins 74 whose volumes have changed due to ion adsorption or the like move within the container 73. Can be suppressed. Therefore, even if the supply of fresh water to the ion exchange means 53 and 54 is stopped, the pure water purifier 1 can prevent the anion resin and the cation resin that are the ion exchange resin 74 from being separated in the container 73. it can. Therefore, even if supply and stop of fresh water are repeated, the pure water purification apparatus 1 can suppress the separation of the ion exchange resin 74, and has an effect that the effect of ion exchange can be sufficiently exhibited.

  Further, the pure water purifying apparatus 1 has a connecting member 77 of the ion exchange means 53, 54 having a bottom 77c and a side surface 77d provided with a jet outlet 77e, and the appearance is formed in a truncated cone shape. For this purpose, the pure water purifying apparatus 1 has a jet outlet provided on the inclined side surface 77d of the introduction pipe portion 77b when the clear water introduced into the connection member 77 of the ion exchange means 53, 54 collides with the bottom portion 77c. From 77e, fresh water is ejected radially upward and supplied into the container 73. Therefore, the pure water purifying apparatus 1 can efficiently exhaust air from the inside of the container 73 of the ion exchange means 53 and 54 even when the initial water flow is filled at the start of use, and fresh water can be discharged through the shortest path of downflow. Without being discharged, fresh water can be spread over the ion exchange resin 74 in every corner of the container 73. Therefore, the pure water purification apparatus 1 can bring fresh water into contact with the ion exchange resin 74 for as long as possible, and also has an effect that ion exchange of fresh water, that is, purification into pure water can be performed with certainty.

  Further, in the pure water purifying apparatus 1, since the angle Θ1 with respect to the axis P of the surface of the ceiling 73a of the vessel 73 of the ion exchange means 53, 54 is larger than the angle Θ2 with respect to the axis P of the surface of the bottom 73b, It can suppress that the container 73 of the exchange means 53 and 54 is upside down. In particular, the pure water purifying apparatus 1 suppresses erroneous installation of the upper and lower sides, that is, the water flow direction when a plurality of ion exchange resins 74 are accommodated in the containers 73 of the ion exchange means 53 and 54 in a multilayered manner. Can do.

  Further, in the pure water purifying apparatus 1, the angle Θ1 with respect to the axis P of the surface of the ceiling 73a of the vessel 73 of the ion exchange means 53, 54 is larger than the angle Θ2 with respect to the axis P of the surface of the bottom 73b. It can suppress that the clear water introduce | transduced from the inlet_port | entrance 71 and ejected diagonally upward from the jet outlet 77e interferes with the ceiling part 73a. Therefore, the pure water purifier 1 can spread the fresh water introduced from the inlet 71 and ejected from the outlet 77e to the ion exchange resins 74 in every corner of the container 73.

  Further, the pure water purifying apparatus 1 has an angle Θ1 with respect to the axis P of the surface of the ceiling 73a of the container 73 of the ion exchange means 53, 54 larger than the angle Θ2 with respect to the axis P of the surface of the bottom 73b. At the lower end of 73, pure water purified by ion exchange can be quickly collected at the outlet 72.

  Since the water pressure applied to the containers 73 of the first ion exchange means 53 and the second ion exchange means 54 can be low, the container 73 is composed of a single layer of a resin such as PO (polyolefin) or PET (polyethylene terephthalate). Can be used as a container for the ion exchange means 53 and 54. For this reason, when the used ion exchange resin 74 is discarded together with the container 73, the ion exchange means 53 and 54 are lightweight, so that the processing work is facilitated and the processing cost can be reduced. In addition, since the ion exchange means 53 and 54 are light and simple, the transportation cost is low and the exchange of the ion exchange resin 74 is easy. Therefore, the pure water purifier 1 can reduce the running cost.

  Further, the pure water purifying apparatus 1 always has a configuration in which the container 73 of the ion exchange means 53, 54 is easily deformed in accordance with the water pressure and is always downward from above in the container 73 of the ion exchange means 53, 54. Since fresh water is poured toward the surface, the separation of the ion exchange resin 74 can be suppressed, and the effect of ion exchange can be sufficiently exhibited.

[Modification]
The pure water refiner | purifier which concerns on the modification of embodiment of this invention is demonstrated based on drawing. Fig.5 (a) is a side view which shows the connection member of the ion exchange means of the pure water refiner | purifier which concerns on the modification of embodiment. FIG.5 (b) is a top view which shows the connection member of the ion exchange means of the pure water refiner | purifier which concerns on the modification of embodiment. In FIG. 5, the same parts as those of the embodiment are denoted by the same reference numerals and description thereof is omitted.

  In the connection member 77 of the connection means 75, 76 of the pure water purifying apparatus 1 according to the modification of the embodiment, the jet outlet 77e that guides fresh water into the container 73 to the side surface 77d of the introduction pipe portion 77b is linear along the circumferential direction. Is formed. In the modification of the embodiment, the ejection port 77e is provided over substantially the entire circumference of the side surface 77d. In the present invention, a plurality of jet outlets 77e may be formed at equal intervals along the circumferential direction. The introduction pipe portion 77b of the connection member 77 of the connection means 75, 76 of the pure water purifying apparatus 1 according to the modification serves as a baffle plate for the fresh water supplied to the bottom portion 77c, and supplies the fresh water into the container 73 through the spout 77e. . And the fresh water supplied in the container 73 from the jet outlet 77e of the introduction pipe part 77b is bounced off by the bottom part 77c, and is ejected radially diagonally upward from the jet outlet 77e.

  According to the pure water purifying apparatus 1 according to the modified example of the embodiment, as in the embodiment, the fresh water is passed through the so-called down flow in which the fresh water is flowed from the upper side to the lower side in the container 73 of the ion exchange means 53 and 54. Since it is set as the structure which waters, there exists an effect that the effect of ion exchange can fully be exhibited.

  In the present invention, the pure water purifying apparatus 1 is not limited to the cutting apparatus 100 and may purify waste liquid from a polishing apparatus or a grinding apparatus as a processing apparatus into pure water.

  The present invention is not limited to the above embodiment. That is, various modifications can be made without departing from the scope of the present invention.

DESCRIPTION OF SYMBOLS 1 Pure water refinement | purification apparatus 53 1st ion exchange means 54 2nd ion exchange means 55 Suction pump (delivery means)
58, 60 Piping 71 Inlet 72 Outlet 73 Container 73a Ceiling part 73b Bottom part 73c Side part 74 Ion exchange resin 75 Connection means 77a Connection fixing part 77b Introducing pipe part 77c Bottom part 77d Side face 77e Spout

Claims (1)

A pure water purifier comprising: ion exchange means for purifying purified water to be purified into pure water; and sending means for sending pure water purified by the ion exchange means from the ion exchange means,
The ion exchange means
A container having an ion exchange resin and a ceiling portion having an inlet, a bottom portion having a delivery port, a side portion connecting the ceiling portion and the bottom portion, and containing the ion exchange resin;
The fresh water is supplied to the container from the upper inlet ,
The container includes connection means for connecting a pipe for supplying the fresh water to the inflow port,
The connecting means includes
A connecting and fixing part that connects to the pipe and fixes the pipe to the inlet;
An introduction pipe part that is inserted into the container and supplies the fresh water to the container;
The introduction pipe part is
The bottom is a wide frustoconical shape, and a spout is formed along the circumferential direction on the inclined side.
Said bottom is a baffle plate,該清water supplied from該噴outlet of the introduction pipe portion, pure water purifier you characterized in that ejected radially from該噴outlet.

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