JP6417115B2 - Damping mechanism and grinding device - Google Patents

Description

  The present invention relates to a vibration damping mechanism that suppresses vibration generated during processing of a workpiece, and a grinding apparatus that includes the vibration damping mechanism and grinds the workpiece.

  A grinding apparatus for grinding a plate-shaped workpiece, which is a workpiece, includes at least a chuck table that holds the plate-shaped workpiece and a grinding means that includes a grindstone, and a rotating grindstone is brought into contact with the upper surface of the plate-shaped workpiece. The plate-like workpiece is ground until it reaches a predetermined thickness.

  When the plate-shaped workpiece to be ground with a grindstone is hard, the amount of scraping the plate-shaped workpiece per unit time decreases, so the surface to be ground of the plate-shaped workpiece (surface to be ground by contact with the grindstone) As a result, the grindstone may be in a sliding state, and may not be ground. If such a state continues, the thickness of the plate-like workpiece does not decrease. The grinding means is ground at a predetermined grinding feed speed and presses the grindstone against the plate-like workpiece. However, when a symptom that the thickness of the plate-like workpiece does not decrease occurs, the grinding means vibrates, and the grindstone vibrates the vibration. In some cases, the abrasive grains may drop off suddenly, resulting in abnormal wear of the grindstone. In addition, when the grinding wheel vibrates, the grinding stone does not hit the surface to be ground of the plate-like workpiece at a constant pressure due to the influence of the vibration, so a striped pattern is formed on the surface to be ground of the plate-like workpiece, and the thickness accuracy of the plate-like workpiece There is also a problem of adversely affecting the uniformity of the image.

  In order to avoid the occurrence of harmful effects due to vibration, for example, in Patent Documents 1 and 2 below, a buffer is provided between the grindstone and the wheel mount in order to prevent the vibration of the grindstone from being transmitted to the plate-like workpiece. There has been proposed a method for grinding a plate-like workpiece by interposing. In Patent Document 3 below, a rubber damping pad is placed on the grinding wheel head, and a small damping device capable of spontaneously damping the vibration by receiving the vibration of the grinding wheel head is mounted thereon. Has been proposed.

JP 2005-335014 A JP 2009-095947 A JP 2007-152460 A

  However, in the grinding method and grinding apparatus as described above, adjustment according to the vibration frequency and amplitude amount of the grinding wheel vibration that occurs during grinding of the plate-like workpiece cannot be performed, and the grinding wheel is adjusted at an appropriate timing. There is a problem that vibration cannot be attenuated.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to make it possible to control the vibration of the grindstone according to the vibration frequency and the amplitude of the vibration of the grindstone.

The first invention is a damping mechanism for damping the vibration of a vibrating body, and includes a weight, two side plates sandwiching the weight in the horizontal direction, and the weight and the two side plates, respectively. A vibration-absorbing cushioning material disposed, and an interval adjusting unit that adjusts an interval between the two side plates, and the interval adjusting unit includes an upper adjusting unit that adjusts an upper interval between the side plates. A lower adjustment portion that adjusts the lower space of the side plate, and a second shock absorbing material that absorbs vibration between the lower adjustment portion and the weight . The distance between the two side plates is adjusted to attenuate the vibration.

  In the vibration control mechanism, it is preferable that the weight includes a weight increase / decrease unit that can increase / decrease the weight of the weight, and the weight increase / decrease unit increases / decreases the weight of the weight to attenuate the vibration.

  According to a second aspect of the present invention, there is provided a holding means for holding a plate-shaped work, a processing means for making a grinding stone contact with the plate-like work held by the holding means, and the above-described control for damping the vibration of the processing means. And a vibration measuring means for measuring a vibration frequency and an amplitude of vibration generated in the processing means when the grindstone is brought into contact with a plate-shaped workpiece, and the vibration measuring means. And a control unit that adjusts the interval between the two side plates by operating the interval adjusting unit in accordance with the measured value measured by.

  The vibration damping mechanism of the present invention adjusts the distance between the weight, the two side plates sandwiching the weight, the shock absorbing shock absorbing material disposed between the weight and the two side plates, and the two side plates. Therefore, by adjusting the distance between the two side plates, the degree of crushing of the buffer material can be adjusted to change the vibration frequency of the vibrating body. Therefore, the vibration frequency of the vibrating body and the vibration frequency on the weight side can be made the same, and the vibration amplitude can be attenuated.

  If the weight constituting the vibration control mechanism is provided with a weight increasing / decreasing unit that can increase or decrease the weight of the weight, the amplitude can be adjusted by adjusting the weight of the weight.

  In the processing apparatus of the present invention, a grindstone is brought into contact with a plate-like workpiece to measure the vibration frequency and amplitude of vibration generated in the processing means during processing, and the control unit determines the interval between the two side plates according to the measured value. In order to adjust, the vibration of the grindstone can be attenuated at an appropriate timing. Therefore, it is possible to prevent abnormal wear from occurring on the grindstone and to finish the plate-like workpiece in a uniform state with good thickness accuracy.

It is a perspective view which shows the structure of a grinding apparatus. It is sectional drawing which shows the 1st example of a damping mechanism. It is a perspective view which shows the structure of a weight. It is sectional drawing which shows the state where the buffer material was crushed in the damping mechanism. It is sectional drawing which shows the 2nd example of a damping mechanism. It is sectional drawing which shows the state which the shock absorbing material was crushed in the 2nd example of a damping mechanism. It is sectional drawing which shows the 3rd example of a damping mechanism. It is sectional drawing which shows the state which the shock absorbing material was crushed in the 3rd example of a damping mechanism.

  A grinding device 1 shown in FIG. 1 has a device base 2 extending in the Y-axis direction. A holding table 4 that is movable and rotatable in the Y-axis direction is disposed on the upper surface 2 a of the apparatus base 2. The periphery of the holding table 4 is covered with a cover 3. The holding table 4 has a holding surface 4a for sucking and holding the plate-like workpiece from below. The holding table 4 can move in the Y-axis direction with the expansion and contraction of the bellows 5.

  A column 6 extending in the Z-axis direction is erected on the rear side (+ Y direction side) of the apparatus base 2 in the Y-axis direction. On the side of the column 6, the grinding means 10, which is a processing means for grinding the plate-like workpiece, and the direction (Z-axis direction) approaching and separating from the plate-like workpiece held by the holding table 4. Elevating means 20 for elevating and lowering the grinding means 10 is provided.

  The grinding means 10 includes a spindle unit 11 having an axis in the Z-axis direction, a holder 12 that supports the spindle unit 11, a motor 13 connected to one end of the spindle unit 11, and a mount 14 at the lower end of the spindle unit 11. And a grinding wheel 15 mounted thereon. A grindstone 16 is fixed to the lower part of the grinding wheel 15 in an annular shape. In the grinding means 10, the grinding wheel 15 can be rotated at a predetermined rotational speed by driving by the motor 13.

  The elevating means 20 includes a ball screw 21 extending in the Z-axis direction, a motor 22 connected to one end of the ball screw 21, a pair of guide rails 23 extending in parallel with the ball screw 21, and nuts provided therein are screwed into the ball screw 21. In addition, a side plate is provided with a lifting plate 24 slidably contacting the guide rail 23. In the elevating means 20, the ball screw 21 is rotated by being driven by the motor 22, whereby the elevating plate 24 moves in the Z-axis direction along the pair of guide rails 23, and the grinding means 10 coupled to the elevating plate 24. Can be moved up and down in the Z-axis direction.

  The grinding apparatus 1 includes a vibration control mechanism 30 that controls vibration generated in the grinding means 10 when the grinding means 10 grinds the plate workpiece. In the illustrated example, two vibration control mechanisms 30 are provided. The vibration damping mechanism 30 has a casing 31 and is disposed on the upper surface 11 a of the spindle unit 11. As shown in FIG. 2, the vibration damping mechanism 30 is disposed between the weight 32 disposed inside the casing 31, the two side plates 310 and 311, and the weight 32 and the side plates 310 and 311. In addition, the vibration absorbing buffer 33 and the distance adjusting portions 36a and 36b for adjusting the distance between the side plate 310 and the side plate 311 are provided. 2, illustration of the casing 31 shown in FIG. 1 is omitted.

  The cushioning material 33 is formed of a deformable material, and two cushioning materials 33 are disposed between the weight 32 and the side plate 310 and between the weight 32 and the side plate 311. The material of the buffer material 33 is urethane or sorbosein, for example.

  The interval adjusting unit 36 a is disposed on the upper side of the weight 32. The distance adjusting unit 36a includes at least a pair of opposing adjusting screws 360 extending in the X-axis direction and an upper plate 361 having a female screw that is screwed into a male screw at the tip of each adjusting screw 360. The interval adjusting unit 36 b is disposed on the lower side of the weight 32. The interval adjusting unit 36b has the same configuration as the interval adjusting unit 36a, and has a pair of opposing adjusting screws 360 extending in the X-axis direction, and a bottom plate having a female screw that is screwed into a male screw at the tip of each adjusting screw 360. 362 at least. In the interval adjusting portions 36a and 36b configured as described above, for example, when an operator turns each adjusting screw 360, each adjusting screw 360 moves forward or backward with respect to the upper plate 361 and the bottom plate 362, thereby the side plate 310. And the side plate 311 are moved in the X-axis direction so as to approach or separate from each other, and the distance between the side plate 310 and the side plate 311 can be adjusted.

  As shown in FIG. 3, the weight 32 is formed with a plurality of receiving holes 320. In the accommodation hole 320, the weight member 39 corresponding to the shape can be accommodated. Depending on the amplitude of vibration of the grinding means 10 shown in FIG. 1, the weight member 39 is accommodated in the plurality of accommodation holes 320, or the weight member 39 is removed from the accommodation holes 320. Can be adjusted. That is, the weight member 39 functions as a weight increasing / decreasing unit that increases or decreases the weight of the weight 32. The weight member 39 in the example of FIG. 3 is formed in a bar shape, but is not limited to this shape.

  The grinding apparatus 1 shown in FIG. 1 includes a vibration measuring means 40 that measures the vibration frequency and amplitude of vibration of the grinding means 10 that is generated when the grindstone 16 is brought into contact with a plate-like workpiece and is ground, and the vibration measuring means 40 includes A control unit 50 is provided that operates the interval adjusting units 36a and 36b of the vibration damping mechanism 30 shown in FIG. 2 in accordance with the measured values to adjust the interval between the two side plates 310 and 311.

  The vibration measuring means 40 is disposed on the upper surface 11 a of the spindle unit 11. The vibration measuring unit 40 is connected to the control unit 50, measures the vibration frequency and amplitude of the vibration of the grinding unit 10 generated when the grindstone 16 grinds the plate-like workpiece, and sends the data to the control unit 50. Can send. The control unit 50 includes at least a CPU and a memory, and is connected to each vibration control mechanism 30. The control unit 50 can adjust the interval between the side plate 310 and the side plate 311 by operating the interval adjusting units 36 a and 36 b shown in FIG. 2 in accordance with the vibration frequency sent from the vibration measuring means 40.

  Next, the operation of the grinding device 1 when grinding the plate-like workpiece W in the grinding device 1 and the operation of damping the vibration of the grinding means 10 using the vibration damping mechanism 30 will be described. The plate-like workpiece W is an example of a workpiece, and devices D are formed on the surface Wa in each region partitioned by a grid-like division planned line S, respectively. A back surface Wb that is the surface opposite to the surface Wa of the plate-like workpiece W is a surface to be ground that is ground by the grindstone 16.

  A protective tape is attached to the surface Wa of the plate-like workpiece W, and the holding table 4 moves to the + Y direction and holds after holding the surface Wa side of the plate-like workpiece W by the holding surface 4a by the operation of the suction source. The table 4 is moved below the grinding means 10.

  Next, the motor 13 rotates the grindstone 16, and the motor 22 drives the ball screw 21 to lower the grinding means 10 in the −Z direction, and presses the rotating grindstone 16 against the back surface Wb of the plate-like workpiece W to obtain a desired value. Grind until the thickness is reached.

  When grinding is performed with the grindstone 16 in contact with the back surface Wb of the plate-like workpiece W, vibration in the X-axis direction or the Z-axis direction is generated in the grinding means 10 due to the grinding resistance. When the amplitude of the vibration of the grinding means 10 is large, the abrasive grains constituting the grindstone 16 drop off, and abnormal wear occurs on the grindstone 16. Further, there is a problem that the uniformity of the thickness accuracy of the plate-like workpiece W is adversely affected because the grinding stone 16 does not hit the back surface Wb of the plate-like workpiece W at a constant pressure due to the influence of vibration. Therefore, the vibration control mechanism 30 controls the vibration of the grinding means 10.

  The vibration measuring unit 40 measures the vibration frequency and amplitude of the vibration generated in the grinding unit 10 and sends the values to the control unit 50. The control unit 50 operates the interval adjusting units 36 a and 36 b in accordance with the vibration frequency generated in the grinding means 10 to adjust the interval between the two side plates 310 and 311.

  As shown in FIG. 4, the side plates 310 and 311 are moved by, for example, the direction in which the side plates 310 and 311 approach each other by the distance adjusting units 36 a and 36 b, and the side plates 310 and 311 are crushed toward the weight 32 by the cushioning material 33. Narrow the interval. By adjusting the degree of crushing the buffer material 33, the vibration frequency of the weight 32 can be adjusted. In this way, the vibration frequency of the weight 32 is adjusted so that the vibration frequency of the grinding means 10 measured by the vibration measuring means 40 and the vibration frequency of the weight 32 are substantially the same, so that the vibration of the grinding means 10 is canceled. When vibrated, the amplitude of vibration of the grinding means 10 can be attenuated.

  Further, the weight 32 is adjusted by using the weight increasing / decreasing unit 39 shown in FIG. 3 according to the amplitude measured by the vibration measuring means 40 of the vibration generated in the grindstone 16. For example, when the amplitude is increased by grinding a hard plate-shaped workpiece, the weight 32 is increased in weight by increasing the number of weight increase / decrease portions 39 accommodated in the plurality of accommodation holes 320. On the other hand, if the amplitude is small, the weight increasing / decreasing portion 39 accommodated in the accommodation hole 320 is extracted from the accommodation hole 320 to reduce the weight of the weight 32. In this way, even if the amplitude of vibration of the grinding means 10 varies depending on the type of the plate-like workpiece W to be ground and the state of the plate-like workpiece W being ground, the weight 32 has the weight of the grinding means 10 depending on its weight. The amplitude of vibration can be adjusted.

  Further, the natural frequency of the grinding means 10 can be adjusted by the weight of the weight 32. Therefore, by adjusting the number of the weight increase / decrease portions 39 accommodated in the accommodation holes 320 and adjusting the natural frequency of the grinding means 10, the vibration of the grinding means 10 is canceled and the vibration amplitude of the grinding means 10 is attenuated. Can do.

  As described above, in the grinding apparatus 1, by changing the weight of the weight 32, the amplitude of vibration of the grinding means 10 can be adjusted, and the natural frequency can be adjusted. Further, the amplitude of vibration of the grinding means 10 can be attenuated by adjusting the degree of crushing of the buffer material 33 and adjusting the frequency of vibration to vibrate the weight 32 so as to cancel the vibration of the grinding means 10. Therefore, the vibration of the grinding means 10 can be controlled according to the vibration frequency and amplitude of the vibration of the grinding means 10. The number and material of the buffer material 33 are not particularly limited, but if sorbosein is used as the buffer material 33, vibration of the grinding means 10 can be more effectively suppressed.

  A vibration damping mechanism 30a shown in FIG. 5 is a second example of the vibration damping mechanism. The vibration damping mechanism 30a is a vibration-absorbing cushioning material disposed between the space adjusting portions 36a and 36b for adjusting the space between the side plate 310 and the side plate 311 and the weight 32 and the bottom plate 363 of the space adjusting portion 36b. 35, and the bottom plate 363 is configured to be placed on the upper surface 11 a, and the other configuration is the same as that of the vibration damping mechanism 30. At least one cushioning material 35 is disposed between the weight 32 and the bottom plate 363. The number and material of the buffer material 35 are not particularly limited.

  When the vibration of the grinding means 10 shown in FIG. 1 is controlled using the vibration control mechanism 30a, the control unit 50 shown in FIG. As shown in FIG. 6, the side plates 310 and 311 are moved in the X-axis direction so as to approach each other, and the cushioning material 33 is crushed toward the weight 32 by the side plates 310 and 311. In addition, the buffer material 35 absorbs vibration in the Z-axis direction and reduces the amplitude of vibration in the Z-axis direction. Thus, since the damping mechanism 30a has a configuration in which the buffer material 35 is interposed between the weight 32 and the bottom plate 363, vibration in the Z-axis direction can also be attenuated.

  A vibration damping mechanism 30b shown in FIG. 7 is a third example of the vibration damping mechanism. The vibration damping mechanism 30 b includes a casing 37, and includes a weight 32 disposed inside the casing 37, a side plate 370 and a side plate 371 constituting the casing 37, and the weight 32 and the side plates 370 and 371. The vibration-absorbing shock absorbing material 33 and a pair of interval adjusting portions 38 that adjust the interval between the side plate 370 and the side plate 371 are provided. The side plate 370 and the side plate 371 are formed in an L-shaped cross section, and are supported from below by the respective spacing adjustment portions 38.

  The interval adjustment unit 38 is parallel to the adjustment screw 380 extending in the X-axis direction, the motor 381 connected to one end of the adjustment screw 380, the support plate 382 for supporting the side plate 370 and the side plate 371 from below, and the adjustment screw 380. And at least a guide rail 383 disposed on the surface. A leg portion 372 and two leg portions 373 are connected to the lower portions of the side plate 370 and the side plate 371, respectively, and a nut formed at the center of the leg portion 372 is screwed into the adjustment screw 380. Then, when the motor 381 is driven and the adjustment screw 380 is rotated, as shown in FIG. 8, the side plates 370 and 371 are moved along the guide rail 383 in the X-axis direction to reduce the distance between the two. The material 33 can be crushed.

  In the vibration damping mechanism 30b, as shown in FIG. 7, vibration measuring means 40a is disposed below the weight 32, and the vibration measuring means 40a is connected to the control unit 50a. The vibration measuring means 40a can measure the vibration frequency and amplitude of vibration on the spindle unit 11 side and send it to the control unit 50a. The control unit 50a is connected to each vibration control mechanism 30d, and the interval adjustment unit 38 operates according to the vibration frequency sent from the vibration measuring means 40a, and crushes the buffer material 33 with the side plates 370 and 371.

  Thus, in the vibration damping mechanism 30b, the amplitude of the vibration and the natural frequency of the grinding means 10 can be adjusted by changing the weight of the weight 32, and the grinding means can be adjusted by adjusting the degree to which the cushioning material 33 is crushed. In addition to being able to attenuate the amplitude of the vibration of the grinding means 10 by canceling the weight 32 so as to cancel out the vibration of 10, it is possible to attenuate the amplitude by absorbing the vibration of the grinding means 10 in the Z-axis direction. . Further, the control unit 50a reads the measured value of the vibration frequency of the grinding means 10 by the vibration measuring means 40a, controls the motor 381 based on the value, and moves the side plates 370 and 371 to change the degree of collapse of the buffer material 33. Therefore, it is possible to automatically adjust the vibration frequency and amplitude amount of the processing means 10 according to the vibration frequency.

In the first to third examples, the two side plates 310 and 311 move in the X-axis direction to crush the cushioning material in the X-axis direction. However, instead of the two side plates 310 and 311, or 2 In addition to the two side plates 310 and 311, two side plates that move in the Y-axis direction may be provided, and the cushioning material may be crushed in the Y-axis direction.
Further, the vibrator includes not only the processing means 10 of the grinding apparatus 1 but also processing means of other processing apparatuses.

  Even if the distance between the two side plates 310 and 311 is adjusted to change the degree of crushing of the cushioning material 33 or the weight 32 is changed, vibration that cannot be canceled by itself may occur. In that case, the area and thickness of the portion of the cushioning material 33 that contacts the weight 32 are adjusted. When the amplitude is large, the weight 32 is made heavy, the thickness of the buffer material 33 is increased, and the area of the portion of the buffer material 33 that contacts the weight 32 is increased. When the amplitude is small, the weight 32 is lightened, the thickness of the buffer material 33 is reduced, and the area of the portion of the buffer material 33 that contacts the weight 32 is reduced.

1: Grinding device 2: Device base 2a: Upper surface 3: Moving base 4: Holding table 4a: Holding surface 5: Bellows 6: Column 10: Grinding means 11: Spindle unit 11a Upper surface 12: Holder 13: Motor 14: Mounter 15 : Grinding wheel 16: Grinding wheel 20: Lifting means 21: Ball screw 22: Motor 23: Guide rail 24: Lift plate 30, 30a, 30b, 30c, 30d, 30e: Damping mechanism 31: Casing 310, 311: Side plate 32: Weight 320: receiving hole 33, 35: cushioning material 36a, 36a, 36c: interval adjusting portion 360: adjusting screw 361: upper plate 362: bottom plate 363: bottom plate 37: casing 370, 371: side plate 372: leg portion 373: leg portion 38 : Space adjustment unit 380: Adjustment screw 381: Motor 382: Support base 39: Weight member (weight increase / decrease unit)
40, 40a: Vibration measuring means 50, 50a: Control unit

Claims (3)

A vibration control mechanism for controlling vibration of a vibrating body,
A weight, two side plates sandwiching the weight in the horizontal direction, a shock absorbing shock absorbing material disposed between the weight and the two side plates, and a distance between the two side plates. An interval adjusting unit to adjust,
The interval adjustment unit includes an upper adjustment unit that adjusts the upper interval of the side plate, and a lower adjustment unit that adjusts the lower interval of the side plate,
Between the lower adjustment portion and the weight, a second cushioning material having vibration absorption is provided,
A vibration damping mechanism characterized by adjusting the distance between the two side plates by the distance adjusting section to attenuate the amplitude of vibration. The weight includes a weight increasing / decreasing portion that can increase or decrease the weight of the weight,
2. The vibration control mechanism according to claim 1, wherein the weight is increased or decreased to attenuate the vibration. The holding means for holding the plate-like workpiece, the processing means for making a grinding stone contact with the plate-like workpiece held by the holding means, and the vibration of the processing means are damped. A grinding device comprising a vibration mechanism,
Vibration measuring means for measuring the vibration frequency and amplitude of vibration generated during processing by bringing the grindstone into contact with a plate-like workpiece;
A grinding apparatus comprising: a control unit that operates the interval adjusting unit according to a measurement value measured by the vibration measuring unit to adjust an interval between the two side plates.

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