JP6420640B2 - Polycrystalline silicon lump crusher, method for producing polycrystalline silicon crushed material, and polycrystalline silicon crushed material - Google Patents

Description

  The present invention relates to a polycrystalline silicon lump crushing apparatus suitably used for producing a polycrystalline silicon crushed material with reduced surface metal contamination.

The Siemens method is known as a method for producing polycrystalline silicon, also called polysilicon. In the Siemens method, a silicon core wire disposed inside a bell jar type reaction vessel is heated to a silicon deposition temperature by energization, and gas and hydrogen of a silane compound such as trichlorosilane (SiHCl ₃ ) or monosilane (SiH ₄ ) are supplied thereto. Then, polycrystalline silicon is deposited on the silicon core wire by chemical vapor deposition to obtain a high purity polycrystalline silicon rod.

  The obtained polycrystalline silicon rod is crushed and sorted into a size suitable for manufacturing an apparatus used in the next process or a manufacturing object in the next process, and is transported to the next process. Specifically, the polycrystalline silicon rod is crushed by a hammer made of a hard metal such as tungsten carbide to obtain a raw material polycrystalline silicon lump (for example, Patent Document 1 and Patent Document 2). Thereafter, the raw material polycrystalline silicon lump is further crushed to a desired particle size by a crushing device, and then, if necessary, classified to a desired size by a classification device made of the same material, and crushing polycrystalline silicon having the desired particle size Get things. The obtained polycrystalline silicon crushed material is called dust, powder, chip, nugget, chunk or the like depending on its size, but there is no strict classification standard.

  When the polycrystalline silicon rod is crushed, the rod and the crushed material come into contact with the external force load member of the polycrystalline silicon lump crushing device, and contaminants from these adhere to the surface oxide layer on the surface. In addition, metal fines are generated due to wear inside the crushing device, and may adhere to the surface oxide layer of the crushed material and contaminate it. These are called surface metal contamination. Surface metal contamination tends to increase as the particle size of the crushed material decreases.

  Applying wet chemical treatment such as acid treatment to polycrystalline silicon is widely performed. By such wet chemical treatment, the surface metal contamination of the polycrystalline silicon crushed material can be reduced to the order of ppbw or less. Therefore, when extremely high purity is required as a raw material for growing a silicon single crystal, wet chemical treatment is performed to reduce the impurity level in the polycrystalline silicon crushed material as much as possible. However, wet chemical processing is costly.

  Therefore, it is desirable to prevent as much as possible the metal from adhering to the surface of the crushed material when the polycrystalline silicon rod is crushed. In the crushing device, an external force loading member for the polycrystalline silicon rod, specifically, a jaw crusher. If so, it has been attempted to make the material of the movable teeth and fixed teeth with a hard metal such as tungsten carbide (for example, Patent Document 3 and Patent Document 4).

JP 10-6242 A JP2010-30026 JP2004-161595 Japanese Patent No. 4351666

  However, in the polycrystalline silicon lump crushing apparatus according to the prior art, even if the material of the external force load member is made of a hard metal such as tungsten carbide, the surface metal contamination of the obtained polycrystalline silicon crush is sufficiently reduced. However, a polycrystalline silicon lump crusher that can reduce surface metal contamination to a satisfactory level has not been realized.

  This invention is made | formed in view of such a subject, The objective of this invention is providing the polycrystalline silicon lump crushing apparatus which can reduce adhesion to the polycrystalline silicon crushed material at the time of crushing. is there.

  The present inventors diligently studied to solve the above problem, and the cause of the surface metal contamination of the polycrystalline silicon crushed material obtained by the polycrystalline silicon lump crushing apparatus is due to the external force load member that crushes the polycrystalline silicon lump. In addition to the origin, the inventors have found that the amount of sliding dust from the sliding portion that slides by the movement of the external force load member is scattered and adheres to the surface of the crushed material is also a considerable amount. And based on this knowledge, in the polycrystalline silicon lump crushing device, the surface metal contamination of the obtained polycrystalline silicon crushed material can be further reduced by providing the sliding dust suction part for sucking the sliding dust. As a result, the present invention has been completed.

The present invention for achieving the above object includes the following gist.
That is, the polycrystalline silicon lump crushing device according to the present invention mechanically crushes the raw material polycrystalline silicon lump by moving the external force load member that applies external force to the raw material polycrystalline silicon lump. In the generated polycrystalline silicon lump crusher,
It has a sliding part which slides by the movement of the external force load member, and has a sliding dust suction part which sucks the sliding dust generated from the sliding part.

  In addition, for example, the external force load member has movable movable teeth and fixed stationary teeth, and the crushing portion including the external force load member includes the raw material polycrystalline silicon lump, the movable teeth and the fixed teeth. It may be a structure that is sandwiched between teeth and crushed.

  The method for producing a polycrystalline silicon crushed material according to the present invention uses any of the above-described silicon crushing devices, and the polycrystalline silicon crushed material according to the present invention is produced using any of the above-described silicon crushing devices. Obtained by the method.

  Since the polycrystalline silicon lump crushing device of the present invention has a sliding dust suction part that sucks sliding dust generated from the sliding part inside the crushing device, when the raw material polycrystalline silicon lump is crushed using this The sliding dust generated from the sliding portion is efficiently removed by suction. Therefore, the amount of sliding dust scattered in the apparatus can be reduced, and adhesion to the surface of the manufactured polycrystalline silicon crushed material can be greatly suppressed. As a result, a polycrystalline silicon crushed material with a highly reduced surface metal contamination can be obtained efficiently.

FIG. 1 is a schematic perspective view of a polycrystalline silicon lump crusher according to an embodiment of the present invention. FIG. 2 is a conceptual diagram showing a cross-sectional structure of the polycrystalline silicon lump crusher shown in FIG.

  Hereinafter, the present invention will be described in detail by showing specific embodiments.

  The polycrystalline silicon lump crushing apparatus of the present invention includes a crushing unit that mechanically crushes the raw material polycrystalline silicon lump by moving an external force load member that applies external force to the raw material polycrystalline silicon lump. This crushing part crushes the raw material polycrystalline silicon lump introduced from the upper insertion port by sandwiching it between the movable tooth and the fixed tooth by an external force load member having a movable tooth that is movable and a fixed tooth that is fixed. Thus, a crushing part structure of a crushing device called a jaw crusher having a structure in which the generated crushed material is discharged from a lower discharge port is preferable because of high crushing efficiency.

  In addition, the crushing part of the polycrystalline silicon lump crushing device is a so-called roll crusher having a structure that breaks the raw material polycrystalline silicon lump through two rolls that rotate in opposite directions as the external force load member. The crushing part structure of the crushing device called, and further, the crushing called so-called hammer crusher, which is a structure in which the raw material polycrystalline silicon lump is struck by the head of the swinging hammer that is the external force loading member. The crushing part structure of an apparatus etc. may be sufficient.

  Moreover, as a polycrystalline silicon lump crushing device, it is located below the crushing part, located below the falling movement part, a falling movement part that moves the polycrystalline silicon crushed material that has come out from the discharge port according to gravity, What further has the receiving part which receives the polycrystalline silicon crushed material after falling and moving the fall moving part is illustrated.

  In such a polycrystalline silicon lump crushing device, sliding occurs on a movable shaft for moving an external force load member such as a movable tooth, a roll, a hammer, or a bearing that supports the movable shaft. This may cause metal contamination on the surface of the silicon crushed material. However, heretofore, there has been no analysis of how much sliding dust generated in sliding parts including movable shafts and bearings contributes to metal contamination on the surface of the obtained polycrystalline silicon crushed material No response was made.

  Therefore, the greatest feature of the present invention is that in the polycrystalline silicon lump crushing apparatus, a sliding dust suction part for sucking sliding dust is provided in the sliding part. Hereinafter, the polycrystalline silicon lump crushing apparatus of the present invention will be described in more detail by taking as an example the case where the crushing part has a crushing part structure of the jaw crusher.

  FIG. 1 is an external view of a jaw crusher 10 according to an embodiment of the present invention, and FIG. 2 is a schematic cross-sectional view showing an internal structure of the jaw crusher 10. As shown in FIG. 2, the jaw crusher 10 includes a crushing unit 30 that crushes the raw material polycrystalline silicon lump 83, a drop moving unit 32 in which the polycrystalline silicon crushed material 93 produced by the crushing unit 30 moves and drops, And a receiving portion 34 for receiving the polycrystalline silicon crushed material 85 after falling and moving the moving portion 32.

  In the jaw crusher 10, the crushing unit 30 sandwiches the raw material polycrystalline silicon lump 83 introduced into the crushing unit 30 from the inlet 30 a above the crushing unit 30 between the movable movable tooth 24 and the fixed stationary tooth 14. And crushed polycrystalline silicon 93 before passing through the drop moving part 32 is generated. Here, the raw material polycrystalline silicon lump 83 may be manufactured by roughly dividing a polycrystalline silicon rod manufactured by the Siemens method or the like to a size that can be put into the jaw crusher 10 using a hard metal hammer or the like.

  The fixed teeth 14 are fixed to the front frame 12. On the other hand, the movable tooth 24 is fixed to the swing jaw 22 provided in the central part of the jaw crusher 10. The upper part of the swing jaw 22 to which the movable tooth 24 is fixed is attached to the eccentric shaft 20, and the swing jaw 22 and the movable tooth 24 fixed to the swing jaw 22 swing along with the eccentric rotation of the eccentric shaft 20. Both sides of the eccentric shaft 20 (both sides in the depth direction in FIG. 2) are connected to a driving pulley 60 via a rotation shaft (not shown) that is not eccentric. The driving pulley 60 rotates upon receiving a driving force from a driving electric motor (not shown). The swinging jaw 22 and the movable teeth 24 that swing are supported by bearings from both sides.

  A toggle plate 50 and a tension rod 54 are connected to the lower end portion of the swing jaw 22. The toggle plate 50 connects the lower end of the swing jaw 22 and the plate receiver 52 fixed to the rear frame so as to be relatively movable. A tension spring 56 is attached to the tension rod 54 to urge the lower end portion of the swing jaw 22 in a direction away from the fixed tooth 14.

  The polycrystalline silicon crushed material 93 generated in the crushing unit 30 is discharged from the discharge port 30 b below the crushing unit 30. The drop moving unit 32 continues below the discharge port 30b, and the polycrystalline silicon crushed material 93 that has come out of the discharge port 30b drops and moves in the drop moving unit 32 according to gravity. The drop moving unit 32 includes a discharge port cover 28 that covers the discharge port 30b. Moreover, it is preferable to provide the fall moving part 32 with a length of 20 to 80 cm, and more preferably with a length of 30 to 70 cm.

  The polycrystalline silicon crushed material 85 after being dropped and moved by the drop moving part 32 is received by the receiving part 34 located below the drop moving part 32. As shown in FIG. 2, the receiving portion 34 may be configured by a belt conveyor capable of transporting the polycrystalline silicon crushed material 85, but may be a storage box for storing the polycrystalline silicon crushed material 85. Absent.

  The jaw crusher shown in FIGS. 1 and 2 has sliding dust suction portions 42, 44, and 46 that suck sliding dust generated from a sliding portion that slides as the movable tooth 24 moves. The specific configuration of the sliding dust suction unit is not particularly limited as long as it sucks the sliding dust. For example, the sliding dust suction unit is connected to a cover or the like that covers the sliding unit, and includes a suction tube that sucks the sliding dust. Have. In the jaw crusher 10, the sliding dust suction part 42 is constituted by a suction pipe connected to the central cover 26. The center cover 26 is provided at the upper center of the jaw crusher 10 and covers the swing jaw 22, the eccentric shaft 20, the rotation shaft, and the like, and the sliding dust suction portion 42 includes the swing jaw 22, the eccentric shaft 20, and the rotation. The sliding dust generated from the shaft is sucked.

  The sliding dust suction unit 44 is configured by a suction pipe connected to the side cover 62 that covers the driving pulley 60, and sucks the sliding dust generated from the driving pulley 60. The sliding dust suction part 46 is constituted by a suction pipe connected to a rear cover 58 that covers the toggle plate 50, the tension rod 54, and the like. The sliding dust generated from connecting parts such as frames is sucked.

The jaw crusher 10 provided with such sliding dust suction parts 42, 44, 46 can reduce the amount of impurities contained in the generated polycrystalline silicon crushed material 85. In particular, it is possible to effectively prevent surface contamination of the polycrystalline silicon crushed materials 93 and 85 due to the metal contained in the sliding dust. In order to sufficiently enhance the suction effect of the sliding dust from the sliding dust suction portions 42, 44, 46, the diameter of the sliding dust suction portion 42 is set to 0. 0 relative to the inner volume of the central cover 26. 5 to 10 mm / L, more preferably from 1.5~8mm / L, 1~15m ³ / min from the sliding dust suction part 42 of the bore, more preferably of 1 to 10 m ³ / min suction amount It is desirable to inhale at. Further, the diameter of the sliding dust suction portion 44 is preferably 0.1 to 1.5 mm / L, and preferably 0.3 to 1.3 mm / L with respect to the inner volume of the side cover 62 that covers the driving pulley 60. It is more preferable that air is sucked from the sliding dust suction part 44 having this diameter at a suction amount of 0.5 to 5 m ³ / min, more preferably 1 to ³ m ³ / min. Further, the diameter of the sliding dust suction portion 46 is preferably 0.2 to 5 mm / L, and preferably 0.5 to 4 mm / L with respect to the inner volume of the rear cover 58 that covers the toggle plate 50, the tension rod 54, and the like. More preferably, it is desirable that air is sucked from the sliding dust suction portion 46 having this diameter at a suction amount of 1 to 20 m ³ / min, more preferably 2 to 15 m ³ / min. Decreasing the amount of suction below the lower limit is not preferable because a sufficient suction effect cannot be obtained. Moreover, increasing beyond the above upper limit is not efficient from the viewpoint of the balance between surface metal contamination and economy.

  In addition, the aspect of the sliding part which is the target of suction by the sliding suction part is not particularly limited, and the sliding part constituted by a shaft and a bearing, a member that performs a linear or arc-shaped reciprocating motion, and this are supported. The sliding part etc. which are comprised with a member are illustrated. Further, the sliding portion that is a target of suction by the sliding suction portion may be a combination of a movable member and a stationary member, or may be constituted by two movable members.

  Further, the jaw crusher 10 may have a structure having a suction removing unit 40 and an inlet suction unit 48 as necessary. The suction removing unit 40 has a suction tube connected to the drop moving unit 32, and a part of the powder contained in the polycrystalline silicon crushed material 93 that is falling and moving in the drop moving unit 32 according to gravity after crushing. (Mainly fine powder or dust of 1000 μm or less) is removed by suction in a direction different from the falling movement direction. The inlet suction part 48 is constituted by a suction pipe connected to the inlet cover 16 that covers the inlet 30a, and sucks dust and the like that rises during crushing in the crushing part 30.

The suction amount of the suction removing unit 40 is preferably 1 to 20 m ³ / min, more preferably 2 to 15 m ³ / min. The suction amount of the inlet suction part 48 is preferably 0.5 to ⁵ m ³ / min, more preferably 1 to ³ m ³ / min. In addition, a part or all of the suction removing unit 40, the sliding dust suction units 42, 44, 46, and the inlet suction unit 48 described above may be connected to a common negative pressure forming pump, and different negative pressure generations may be performed. It may be connected to a pump.

  By using the polycrystalline silicon lump crushing apparatus of the present invention, the raw material polycrystalline silicon lump can be crushed to a desired particle size. Here, the crushed polycrystalline silicon is called powder, chip, nugget, chunk or the like depending on its size, but there is no strict classification standard. The polycrystalline silicon crushed material is generally called chips or chunks, but also includes powder and nuggets.

  The particle size of the polycrystalline silicon crushed material is usually selected from a wide range of 2 to 120 mm. In this specification, the particle size of the polycrystalline silicon crushed material means the average value of the major axis of the crushed material, and the particle size is obtained by measuring the major axis of the crushed material for 5 kg with a measuring instrument such as a caliper. Desired.

  In addition, the range of the particle size distribution disclosed in this specification not only discloses the range itself, but also discloses any range included in the range including the boundary of the range. For example, the disclosure of the range of 2-40 mm includes not only the range of 2-40 mm, but also 3 mm, 4 mm, 5 mm, 6 mm, 7 mm, 34 mm, 35 mm and other numerical values included in this range. Further, for example, in the disclosure of the range of 2 to 40 mm, 2 to 5 mm and 2 to 35 mm are included in the same manner as other partial ranges included in the range, and the ranges disclosed herein are also included. Equivalent ranges are included as well.

  The polycrystalline silicon crushed material obtained in this way is preferable because surface metal contamination is reduced. That is, by providing the sliding dust suction portions 42, 44, and 46 as shown in the embodiment, it is possible to reduce the surface contamination of the obtained polycrystalline silicon crushed material by metal to about 0.5 to 50 ppbw. .

  The sliding dust suction portion according to the present embodiment is combined with other surface metal contamination prevention means such as a hard metal material of the external force load member (the fixed tooth 14 and the movable tooth 24 in the present embodiment). It is possible to further reduce the surface metal contamination of the obtained polycrystalline silicon crushed material. Also in an aspect combined with other means for preventing surface metal contamination, the surface contamination of the polycrystalline silicon lump obtained by the polycrystalline silicon lump crusher having the sliding dust suction part is preferably 0.5 to 50 ppbw. Yes, more preferably 2 to 40 ppbw. In addition, in this specification, ppbw means the billion parts ratio on a weight basis.

  In the present invention, the metal that contaminates the surface of the polycrystalline silicon crushed material preferably includes the group consisting of Na, Cr, Fe, Ni, Cu, Zn, Co, and W. The surface metal contamination is measured by the method described in Examples described later.

  The surface contamination by the metal of the polycrystalline silicon crushed material is preferably 0.5 to 50 ppbw, particularly preferably 2 to 40 ppbw when 90% by weight or more of the crushed material has a particle size of 2 to 90 mm. Moreover, when 90 weight% or more of crushed materials have a particle size of 4-60 mm, it is preferable that it is 2-30 ppbw, Most preferably, it is 3-20 ppbw. When 90% by weight or more of the crushed material has a particle size of 2 to 40 mm, it is preferably 10 to 50 ppbw, particularly preferably 15 to 30 ppbw. Moreover, when 90 weight% or more of crushed materials have a particle size of 20-90 mm, it is preferable that it is 1-10 ppbw, Most preferably, it is 2-8 ppbw. By setting it to the upper limit or less, good quality of the polycrystalline silicon crushed material is secured, and by setting the upper limit value or more, the manufacturing cost can be suppressed.

  The polycrystalline silicon crushed material obtained by using the polycrystalline silicon lump crushing apparatus of the present invention is preferably used as a raw material for growing a silicon single crystal. In this application, the polycrystalline silicon crushed material is filled in a melting container, and is melted and pulled up. When the particle size of the polycrystalline silicon crushed material is controlled, it is preferable that the fluidity is constant when the molten container is filled and stable supply is possible. The control of the particle size of the polycrystalline silicon crushed material is performed using a sorting machine or a classification device after crushing by the polycrystalline silicon lump crusher, for example. Thereby, a polycrystalline silicon crushed material having a desired particle size and particle size distribution can be obtained.

  Furthermore, the polycrystalline silicon crushed material may be subjected to an impurity removal treatment using magnetic force or air blow as an optional treatment.

  For example, the polycrystalline silicon crushed material obtained by the polycrystalline silicon lump crushing apparatus is then sent to a cleaning process such as a classification process and an air blow process and processed. The polycrystalline silicon crushed material is conveyed to these next processes by a conveyor belt conveyor or the like. In the classification step, the polycrystalline silicon crushed material is classified to a desired particle size. The classification device used in the classification process is not particularly limited, and for example, a vibration sieving machine, a roller classifier, or the like is used. On the other hand, in the air blowing process, cleaning (removal) processing of silicon dust adhering to the polycrystalline silicon crushed material is performed.

  Further, the surface metal contamination of the polycrystalline silicon crushed material can be further reduced by subjecting the crushed material obtained by the polycrystalline silicon lump crushing device to wet chemical treatment with an acid. When the value of the impurity concentration to be produced is extremely small, the obtained crushed material is further subjected to wet chemical treatment. Also in that case, it is preferable that the crushed material before the wet chemical treatment is prepared using the polycrystalline silicon lump crusher of the present invention, so that the degree of the wet chemical treatment can be reduced.

  In addition, the polycrystalline silicon crushed material has applications in which excessive purity is not required and cost is important, such as a solar panel manufacturing raw material. When preparing polycrystalline silicon crushed material used for such applications, according to the polycrystalline silicon lump crushing device of the present invention, surface metal contamination in the obtained polycrystalline silicon crushed material, even without wet chemical treatment. The value of can be made below the allowable value. That is, the polycrystalline silicon crushed material obtained by the polycrystalline silicon lump crushing device of the present invention can be usefully used for such applications without performing the above-described wet chemical treatment. The accompanying environmental load can be reduced.

  The raw material polycrystalline silicon lump supplied to the polycrystalline silicon lump crushing apparatus of the present invention may be obtained by any method. For example, a polycrystalline silicon rod produced by the Siemens method is used as a tungsten carbide or the like. It can be obtained by crushing with a hammer made of hard metal. The size is not particularly limited as long as it is roughly divided to a size that can be charged into the jaw crusher 10 described above, but the major axis of the raw material polycrystalline silicon lump is preferably about 10 to 30 cm, more Preferably it is about 15-25 cm.

  In the polycrystalline silicon rod obtained by the Siemens method, the bulk impurities of boron, phosphorus, carbon and all metals are suppressed to a very low concentration. Here, the bulk impurity means an impurity inevitably contained in the rod, the raw material polycrystalline silicon lump, or the polycrystalline silicon crushed material depending on the manufacturing conditions, and is different from the surface metal contaminant. However, if the concentration of bulk impurities for a given metal is sufficiently low compared to surface metal contaminants, or if silicon fragments are obtained from the same polycrystalline silicon rod, the presence of bulk impurities is permitted. May be considered within the error range. In addition, paying attention to the metal element used in the sliding part, or by changing the particle size of the polycrystalline silicon crushed material (the smaller the particle size, the greater the influence of surface metal contamination) The change in surface metal contamination by the sliding dust suction parts 42, 44, 46 can be analyzed.

  Hereinafter, although this invention is demonstrated based on a more detailed Example, this invention is not limited to these Examples.

Example 1
The silicon rod obtained by the Siemens method was crushed with a tungsten carbide hammer to obtain a raw material polycrystalline silicon lump.
The raw material polycrystalline silicon lump was charged into the inlet of the polycrystalline silicon lump crushing apparatus 10 shown in the figure, and was crushed so that 90% by mass or more of the polycrystalline silicon crushed material had a particle size of 4 to 60 mm. The apparatus having the configuration shown in the figure was tested in the following three modes depending on the presence or absence of suction. The raw material polycrystalline silicon lump used in the three embodiments was obtained from the same silicon rod.

A: No suction (comparative example)
B: The sliding part around the toggle plate was suctioned (suction by the sliding dust suction part 46).
C: The sliding part (suction by the sliding dust suction parts 42 and 46) around the toggle plate and the eccentric rotation shaft, and the suction of the pulley cover part (suction by the sliding dust suction part 44) were performed.

In the polycrystalline silicon lump breaking device 10, the material of the movable teeth 24 and the fixed teeth 14 is tungsten carbide, and the drop moving part 32 is 50 cm long. The sliding dust suction part 42 has a diameter of 3.5 mm / L with respect to the inner volume of the central cover 26, and the suction amount in the mode C is 3 m ³ / min. The diameter of the sliding dust suction portion 44 was 0.7 mm / L with respect to the inner volume of the side cover 62 covering the driving pulley 60, and the suction amount in the aspect C was 2 m ³ / min. The diameter of the sliding dust suction portion 46 is 1.9 mm / L with respect to the inner volume of the rear cover 58 that covers the toggle plate 50, the tension rod 54, etc., and the suction amount in the modes B and C is 5 m ³ / min. did.

About the surface metal contamination of the obtained polycrystalline silicon crushed material, the contents of Na, Cr, Fe, Ni, Cu, Zn, Co and W were measured. The results are shown in Table 1.
In Table 1, the surface metal contamination represented by the concentration of each metal element is obtained by decomposing and removing the surface oxide layer of the polycrystalline silicon crushed material with a hydrofluoric acid mixed solution, and inductively coupled plasma mass spectrometry for each metal element in the sample. (ICP-MS) was used for analysis and quantification.

(Example 2)
In Example 1, except for crushing the raw material polycrystalline silicon lump by the polycrystalline silicon lump crushing apparatus 10 so that the particle size of the polycrystalline silicon crushed material is 90% by mass or more is 2 to 40 mm. 1 was carried out. The results are shown in Table 2.

(Example 3)
In Example 1, except for crushing the raw material polycrystalline silicon lump by the polycrystalline silicon lump crushing device 10 so that the particle size of the polycrystalline silicon crush is 90 to 90% by mass is 20 to 90 mm. 1 was carried out. The results are shown in Table 3.

10 ... Jaw crusher (Polycrystalline silicon lump crusher)
DESCRIPTION OF SYMBOLS 14 ... Fixed tooth 24 ... Movable tooth 30 ... Crushing part 30a ... Input port 30b ... Discharge port 32 ... Drop moving part 34 ... Receiving part 40 ... Suction removal part 42, 44, 46 ... Sliding dust suction part

Claims (3)

In a polycrystalline silicon lump crushing device that mechanically crushes the polycrystalline silicon lump to generate a polycrystalline silicon lump by moving an external force load member that applies external force to the raw material polycrystalline silicon lump,
A polycrystalline silicon lump crusher having a sliding part that slides by the movement of the external force load member and a sliding dust suction part that sucks the sliding dust generated from the sliding part.   The external force load member has movable movable teeth and fixed stationary teeth, and the crushing portion including the external force load member has the raw material polycrystalline silicon mass between the movable teeth and the fixed teeth. The polycrystalline silicon lump crushing apparatus according to claim 1, wherein the apparatus is a structure that is crushed by being sandwiched between.   A method for producing a polycrystalline silicon crushed material using the polycrystalline silicon lump crushing device according to claim 1.

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