JP6421161B2 - Photosensitive resin composition - Google Patents
Photosensitive resin composition Download PDFInfo
- Publication number
- JP6421161B2 JP6421161B2 JP2016211827A JP2016211827A JP6421161B2 JP 6421161 B2 JP6421161 B2 JP 6421161B2 JP 2016211827 A JP2016211827 A JP 2016211827A JP 2016211827 A JP2016211827 A JP 2016211827A JP 6421161 B2 JP6421161 B2 JP 6421161B2
- Authority
- JP
- Japan
- Prior art keywords
- acid
- photosensitive resin
- group
- epoxy resin
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011342 resin composition Substances 0.000 title claims description 38
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 54
- -1 phthalocyanine compound Chemical class 0.000 claims description 42
- 229920005989 resin Polymers 0.000 claims description 41
- 239000011347 resin Substances 0.000 claims description 41
- 239000003999 initiator Substances 0.000 claims description 37
- 125000004432 carbon atom Chemical group C* 0.000 claims description 26
- 150000001875 compounds Chemical class 0.000 claims description 23
- 239000004593 Epoxy Substances 0.000 claims description 20
- 239000003086 colorant Substances 0.000 claims description 19
- 238000000016 photochemical curing Methods 0.000 claims description 8
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 7
- 125000000217 alkyl group Chemical group 0.000 claims description 6
- YILWOUDYBRFIMW-UHFFFAOYSA-N (9-ethyl-6-nitrocarbazol-3-yl)-[4-(1-methoxypropan-2-yloxy)-2-methylphenyl]methanone Chemical compound CCN1C2=CC=C(C=C2C2=C1C=CC(=C2)C(=O)C1=C(C)C=C(OC(C)COC)C=C1)[N+]([O-])=O YILWOUDYBRFIMW-UHFFFAOYSA-N 0.000 claims description 3
- 125000003545 alkoxy group Chemical group 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 3
- 239000006229 carbon black Substances 0.000 claims description 2
- 239000003822 epoxy resin Substances 0.000 description 90
- 229920000647 polyepoxide Polymers 0.000 description 90
- 238000000576 coating method Methods 0.000 description 43
- 239000011248 coating agent Substances 0.000 description 42
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 26
- 230000035945 sensitivity Effects 0.000 description 25
- 239000002253 acid Substances 0.000 description 24
- 125000003700 epoxy group Chemical group 0.000 description 20
- 238000000034 method Methods 0.000 description 16
- 235000014113 dietary fatty acids Nutrition 0.000 description 15
- 239000000194 fatty acid Substances 0.000 description 15
- 229930195729 fatty acid Natural products 0.000 description 15
- 229920003986 novolac Polymers 0.000 description 15
- 150000004665 fatty acids Chemical class 0.000 description 14
- 150000007519 polyprotic acids Polymers 0.000 description 14
- 239000000047 product Substances 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 13
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 12
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 12
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 10
- 150000003254 radicals Chemical class 0.000 description 10
- 238000012360 testing method Methods 0.000 description 10
- 150000008065 acid anhydrides Chemical class 0.000 description 9
- 239000003085 diluting agent Substances 0.000 description 9
- 238000002156 mixing Methods 0.000 description 9
- 239000007787 solid Substances 0.000 description 9
- 239000002904 solvent Substances 0.000 description 9
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 8
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 8
- 238000009413 insulation Methods 0.000 description 8
- 238000002360 preparation method Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 7
- 206010034972 Photosensitivity reaction Diseases 0.000 description 7
- 150000007513 acids Chemical class 0.000 description 7
- 238000011161 development Methods 0.000 description 7
- 238000001035 drying Methods 0.000 description 7
- 230000036211 photosensitivity Effects 0.000 description 7
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 6
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 6
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 6
- 235000010290 biphenyl Nutrition 0.000 description 6
- 239000004305 biphenyl Substances 0.000 description 6
- 125000000609 carbazolyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3NC12)* 0.000 description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 6
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 6
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 6
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 5
- 150000008064 anhydrides Chemical class 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 239000003063 flame retardant Substances 0.000 description 5
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 150000002430 hydrocarbons Chemical group 0.000 description 5
- 150000004668 long chain fatty acids Chemical class 0.000 description 5
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 5
- 239000000049 pigment Substances 0.000 description 5
- LAQYHRQFABOIFD-UHFFFAOYSA-N 2-methoxyhydroquinone Chemical compound COC1=CC(O)=CC=C1O LAQYHRQFABOIFD-UHFFFAOYSA-N 0.000 description 4
- 239000004925 Acrylic resin Substances 0.000 description 4
- 229930185605 Bisphenol Natural products 0.000 description 4
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 125000004122 cyclic group Chemical group 0.000 description 4
- UKMSUNONTOPOIO-UHFFFAOYSA-N docosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCCCC(O)=O UKMSUNONTOPOIO-UHFFFAOYSA-N 0.000 description 4
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 4
- KEMQGTRYUADPNZ-UHFFFAOYSA-N heptadecanoic acid Chemical compound CCCCCCCCCCCCCCCCC(O)=O KEMQGTRYUADPNZ-UHFFFAOYSA-N 0.000 description 4
- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 description 4
- 238000004898 kneading Methods 0.000 description 4
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 4
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- ARCGXLSVLAOJQL-UHFFFAOYSA-N trimellitic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 ARCGXLSVLAOJQL-UHFFFAOYSA-N 0.000 description 4
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 4
- LGNPNSQUCXPYKF-UHFFFAOYSA-N (methylideneamino) acetate Chemical compound CC(=O)ON=C LGNPNSQUCXPYKF-UHFFFAOYSA-N 0.000 description 3
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- 239000004606 Fillers/Extenders Substances 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- TUNFSRHWOTWDNC-UHFFFAOYSA-N Myristic acid Natural products CCCCCCCCCCCCCC(O)=O TUNFSRHWOTWDNC-UHFFFAOYSA-N 0.000 description 3
- 229910019142 PO4 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000007983 Tris buffer Substances 0.000 description 3
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical group C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- 238000013329 compounding Methods 0.000 description 3
- QSAWQNUELGIYBC-UHFFFAOYSA-N cyclohexane-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCCCC1C(O)=O QSAWQNUELGIYBC-UHFFFAOYSA-N 0.000 description 3
- GHVNFZFCNZKVNT-UHFFFAOYSA-N decanoic acid Chemical compound CCCCCCCCCC(O)=O GHVNFZFCNZKVNT-UHFFFAOYSA-N 0.000 description 3
- 238000010292 electrical insulation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- WQEPLUUGTLDZJY-UHFFFAOYSA-N pentadecanoic acid Chemical compound CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 3
- 239000003208 petroleum Substances 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 3
- 239000010452 phosphate Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- VHOCUJPBKOZGJD-UHFFFAOYSA-N triacontanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCCCCCCCCCCCC(O)=O VHOCUJPBKOZGJD-UHFFFAOYSA-N 0.000 description 3
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 3
- NIDNOXCRFUCAKQ-UMRXKNAASA-N (1s,2r,3s,4r)-bicyclo[2.2.1]hept-5-ene-2,3-dicarboxylic acid Chemical compound C1[C@H]2C=C[C@@H]1[C@H](C(=O)O)[C@@H]2C(O)=O NIDNOXCRFUCAKQ-UMRXKNAASA-N 0.000 description 2
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 2
- XDOFQFKRPWOURC-UHFFFAOYSA-N 16-methylheptadecanoic acid Chemical compound CC(C)CCCCCCCCCCCCCCC(O)=O XDOFQFKRPWOURC-UHFFFAOYSA-N 0.000 description 2
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 2
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 2
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- ODGCZQFTJDEYNI-UHFFFAOYSA-N 2-methylcyclohex-3-ene-1,2-dicarboxylic acid Chemical compound OC(=O)C1(C)C=CCCC1C(O)=O ODGCZQFTJDEYNI-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- GLVRUIAMYISNHU-UHFFFAOYSA-N 3-ethylcyclohexane-1,2-dicarboxylic acid Chemical compound CCC1CCCC(C(O)=O)C1C(O)=O GLVRUIAMYISNHU-UHFFFAOYSA-N 0.000 description 2
- WXYTXCXWNITTLN-UHFFFAOYSA-N 3-methylcyclohexane-1,2-dicarboxylic acid Chemical compound CC1CCCC(C(O)=O)C1C(O)=O WXYTXCXWNITTLN-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- IODOHPXRYMDKQF-UHFFFAOYSA-N 4-ethylcyclohexane-1,2-dicarboxylic acid Chemical compound CCC1CCC(C(O)=O)C(C(O)=O)C1 IODOHPXRYMDKQF-UHFFFAOYSA-N 0.000 description 2
- YWVFNWVZBAWOOY-UHFFFAOYSA-N 4-methylcyclohexane-1,2-dicarboxylic acid Chemical compound CC1CCC(C(O)=O)C(C(O)=O)C1 YWVFNWVZBAWOOY-UHFFFAOYSA-N 0.000 description 2
- PZIGGBBMBDRHPX-UHFFFAOYSA-N 5-ethylcyclohex-3-ene-1,2-dicarboxylic acid Chemical compound CCC1CC(C(O)=O)C(C(O)=O)C=C1 PZIGGBBMBDRHPX-UHFFFAOYSA-N 0.000 description 2
- SVLTVRFYVWMEQN-UHFFFAOYSA-N 5-methylcyclohex-3-ene-1,2-dicarboxylic acid Chemical compound CC1CC(C(O)=O)C(C(O)=O)C=C1 SVLTVRFYVWMEQN-UHFFFAOYSA-N 0.000 description 2
- UAGYBFHMVLFZDN-UHFFFAOYSA-N 6-ethylcyclohex-3-ene-1,2-dicarboxylic acid Chemical compound CCC1CC=CC(C(O)=O)C1C(O)=O UAGYBFHMVLFZDN-UHFFFAOYSA-N 0.000 description 2
- GPYZZWFCOCCLQZ-UHFFFAOYSA-N 6-methylcyclohex-3-ene-1,2-dicarboxylic acid Chemical compound CC1CC=CC(C(O)=O)C1C(O)=O GPYZZWFCOCCLQZ-UHFFFAOYSA-N 0.000 description 2
- AMOKUAKXKXBFIW-WJDWOHSUSA-N 9-[(z)-non-3-enyl]-10-octylnonadecanedioic acid Chemical compound OC(=O)CCCCCCCCC(CCCCCCCC)C(CCCCCCCC(O)=O)CC\C=C/CCCCC AMOKUAKXKXBFIW-WJDWOHSUSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 235000021357 Behenic acid Nutrition 0.000 description 2
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- QEVGZEDELICMKH-UHFFFAOYSA-N Diglycolic acid Chemical compound OC(=O)COCC(O)=O QEVGZEDELICMKH-UHFFFAOYSA-N 0.000 description 2
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 235000021314 Palmitic acid Nutrition 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- 235000021355 Stearic acid Nutrition 0.000 description 2
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- BXWJSZFPMIBKFS-UHFFFAOYSA-N [[(9-ethyl-6-nitrocarbazol-3-yl)-[4-(1-methoxypropan-2-yloxy)-2-methylphenyl]methylidene]amino] acetate Chemical compound C1=C2C3=CC([N+]([O-])=O)=CC=C3N(CC)C2=CC=C1C(=NOC(C)=O)C1=CC=C(OC(C)COC)C=C1C BXWJSZFPMIBKFS-UHFFFAOYSA-N 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 239000001361 adipic acid Substances 0.000 description 2
- 235000011037 adipic acid Nutrition 0.000 description 2
- XSAOTYCWGCRGCP-UHFFFAOYSA-K aluminum;diethylphosphinate Chemical compound [Al+3].CCP([O-])(=O)CC.CCP([O-])(=O)CC.CCP([O-])(=O)CC XSAOTYCWGCRGCP-UHFFFAOYSA-K 0.000 description 2
- 239000002518 antifoaming agent Substances 0.000 description 2
- 150000003934 aromatic aldehydes Chemical class 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 229940116226 behenic acid Drugs 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 230000001588 bifunctional effect Effects 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 2
- 229930016911 cinnamic acid Natural products 0.000 description 2
- 235000013985 cinnamic acid Nutrition 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- IFDVQVHZEKPUSC-UHFFFAOYSA-N cyclohex-3-ene-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCC=CC1C(O)=O IFDVQVHZEKPUSC-UHFFFAOYSA-N 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- ZSWFCLXCOIISFI-UHFFFAOYSA-N cyclopentadiene Chemical compound C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 2
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 2
- 125000005442 diisocyanate group Chemical group 0.000 description 2
- KIQKWYUGPPFMBV-UHFFFAOYSA-N diisocyanatomethane Chemical compound O=C=NCN=C=O KIQKWYUGPPFMBV-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
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- HZSAGZAJGQNWSD-UHFFFAOYSA-J [Ti+4].[O-]P(=O)(c1ccccc1)c1ccccc1.[O-]P(=O)(c1ccccc1)c1ccccc1.[O-]P(=O)(c1ccccc1)c1ccccc1.[O-]P(=O)(c1ccccc1)c1ccccc1 Chemical compound [Ti+4].[O-]P(=O)(c1ccccc1)c1ccccc1.[O-]P(=O)(c1ccccc1)c1ccccc1.[O-]P(=O)(c1ccccc1)c1ccccc1.[O-]P(=O)(c1ccccc1)c1ccccc1 HZSAGZAJGQNWSD-UHFFFAOYSA-J 0.000 description 1
- BBUVVWFDWAGLPU-UHFFFAOYSA-L [Zn++].CC(C)(C)P([O-])=O.CC(C)(C)P([O-])=O Chemical compound [Zn++].CC(C)(C)P([O-])=O.CC(C)(C)P([O-])=O BBUVVWFDWAGLPU-UHFFFAOYSA-L 0.000 description 1
- CQCGPNRIAFVNBY-UHFFFAOYSA-N [ethenyl(phenyl)phosphoryl]benzene Chemical compound C=1C=CC=CC=1P(=O)(C=C)C1=CC=CC=C1 CQCGPNRIAFVNBY-UHFFFAOYSA-N 0.000 description 1
- GUCYFKSBFREPBC-UHFFFAOYSA-N [phenyl-(2,4,6-trimethylbenzoyl)phosphoryl]-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C(=O)C1=C(C)C=C(C)C=C1C GUCYFKSBFREPBC-UHFFFAOYSA-N 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QNNHFEIZWVGBTM-UHFFFAOYSA-K aluminum;diphenylphosphinate Chemical compound [Al+3].C=1C=CC=CC=1P(=O)([O-])C1=CC=CC=C1.C=1C=CC=CC=1P(=O)([O-])C1=CC=CC=C1.C=1C=CC=CC=1P(=O)([O-])C1=CC=CC=C1 QNNHFEIZWVGBTM-UHFFFAOYSA-K 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- HGZJAPYAZZMDTJ-UHFFFAOYSA-N bis(2-hydroxyethyl) 2-methylbutanedioate Chemical compound OCCOC(=O)C(C)CC(=O)OCCO HGZJAPYAZZMDTJ-UHFFFAOYSA-N 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- QDVNNDYBCWZVTI-UHFFFAOYSA-N bis[4-(ethylamino)phenyl]methanone Chemical compound C1=CC(NCC)=CC=C1C(=O)C1=CC=C(NCC)C=C1 QDVNNDYBCWZVTI-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000000038 blue colorant Substances 0.000 description 1
- 125000001246 bromo group Chemical group Br* 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000011353 cycloaliphatic epoxy resin Substances 0.000 description 1
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 description 1
- ZWAJLVLEBYIOTI-UHFFFAOYSA-N cyclohexene oxide Chemical group C1CCCC2OC21 ZWAJLVLEBYIOTI-UHFFFAOYSA-N 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000006471 dimerization reaction Methods 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- WSFSSNUMVMOOMR-BJUDXGSMSA-N methanone Chemical compound O=[11CH2] WSFSSNUMVMOOMR-BJUDXGSMSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- GKTNLYAAZKKMTQ-UHFFFAOYSA-N n-[bis(dimethylamino)phosphinimyl]-n-methylmethanamine Chemical class CN(C)P(=N)(N(C)C)N(C)C GKTNLYAAZKKMTQ-UHFFFAOYSA-N 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000003261 o-tolyl group Chemical group [H]C1=C([H])C(*)=C(C([H])=C1[H])C([H])([H])[H] 0.000 description 1
- YAFOVCNAQTZDQB-UHFFFAOYSA-N octyl diphenyl phosphate Chemical compound C=1C=CC=CC=1OP(=O)(OCCCCCCCC)OC1=CC=CC=C1 YAFOVCNAQTZDQB-UHFFFAOYSA-N 0.000 description 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- LYXOWKPVTCPORE-UHFFFAOYSA-N phenyl-(4-phenylphenyl)methanone Chemical compound C=1C=C(C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 LYXOWKPVTCPORE-UHFFFAOYSA-N 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 150000003016 phosphoric acids Chemical class 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 238000011417 postcuring Methods 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- QZZGJDVWLFXDLK-UHFFFAOYSA-N tetracosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCCCCCC(O)=O QZZGJDVWLFXDLK-UHFFFAOYSA-N 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- STCOOQWBFONSKY-UHFFFAOYSA-N tributyl phosphate Chemical compound CCCCOP(=O)(OCCCC)OCCCC STCOOQWBFONSKY-UHFFFAOYSA-N 0.000 description 1
- XEZVDURJDFGERA-UHFFFAOYSA-N tricosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCCCCC(O)=O XEZVDURJDFGERA-UHFFFAOYSA-N 0.000 description 1
- 125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- DQWPFSLDHJDLRL-UHFFFAOYSA-N triethyl phosphate Chemical compound CCOP(=O)(OCC)OCC DQWPFSLDHJDLRL-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical class OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- WVLBCYQITXONBZ-UHFFFAOYSA-N trimethyl phosphate Chemical compound COP(=O)(OC)OC WVLBCYQITXONBZ-UHFFFAOYSA-N 0.000 description 1
- XZZNDPSIHUTMOC-UHFFFAOYSA-N triphenyl phosphate Chemical compound C=1C=CC=CC=1OP(OC=1C=CC=CC=1)(=O)OC1=CC=CC=C1 XZZNDPSIHUTMOC-UHFFFAOYSA-N 0.000 description 1
- JEJAMASKDTUEBZ-UHFFFAOYSA-N tris(1,1,3-tribromo-2,2-dimethylpropyl) phosphate Chemical class BrCC(C)(C)C(Br)(Br)OP(=O)(OC(Br)(Br)C(C)(C)CBr)OC(Br)(Br)C(C)(C)CBr JEJAMASKDTUEBZ-UHFFFAOYSA-N 0.000 description 1
- VRRIVXLVXXAHJA-UHFFFAOYSA-N tris(2,3,4-tribromophenyl) phosphate Chemical compound BrC1=C(Br)C(Br)=CC=C1OP(=O)(OC=1C(=C(Br)C(Br)=CC=1)Br)OC1=CC=C(Br)C(Br)=C1Br VRRIVXLVXXAHJA-UHFFFAOYSA-N 0.000 description 1
- MHEGXVLDEDJADA-UHFFFAOYSA-N tris(2,3,4-trimethylphenyl) phosphate Chemical compound CC1=C(C)C(C)=CC=C1OP(=O)(OC=1C(=C(C)C(C)=CC=1)C)OC1=CC=C(C)C(C)=C1C MHEGXVLDEDJADA-UHFFFAOYSA-N 0.000 description 1
- LRSNDFOWYYKLHB-UHFFFAOYSA-N tris(2,3-dibromophenyl) phosphate Chemical compound BrC1=CC=CC(OP(=O)(OC=2C(=C(Br)C=CC=2)Br)OC=2C(=C(Br)C=CC=2)Br)=C1Br LRSNDFOWYYKLHB-UHFFFAOYSA-N 0.000 description 1
- JZZBTMVTLBHJHL-UHFFFAOYSA-N tris(2,3-dichloropropyl) phosphate Chemical compound ClCC(Cl)COP(=O)(OCC(Cl)CCl)OCC(Cl)CCl JZZBTMVTLBHJHL-UHFFFAOYSA-N 0.000 description 1
- KOWVWXQNQNCRRS-UHFFFAOYSA-N tris(2,4-dimethylphenyl) phosphate Chemical compound CC1=CC(C)=CC=C1OP(=O)(OC=1C(=CC(C)=CC=1)C)OC1=CC=C(C)C=C1C KOWVWXQNQNCRRS-UHFFFAOYSA-N 0.000 description 1
- WTLBZVNBAKMVDP-UHFFFAOYSA-N tris(2-butoxyethyl) phosphate Chemical compound CCCCOCCOP(=O)(OCCOCCCC)OCCOCCCC WTLBZVNBAKMVDP-UHFFFAOYSA-N 0.000 description 1
- HQUQLFOMPYWACS-UHFFFAOYSA-N tris(2-chloroethyl) phosphate Chemical compound ClCCOP(=O)(OCCCl)OCCCl HQUQLFOMPYWACS-UHFFFAOYSA-N 0.000 description 1
- GTRSAMFYSUBAGN-UHFFFAOYSA-N tris(2-chloropropyl) phosphate Chemical compound CC(Cl)COP(=O)(OCC(C)Cl)OCC(C)Cl GTRSAMFYSUBAGN-UHFFFAOYSA-N 0.000 description 1
- LIPMRGQQBZJCTM-UHFFFAOYSA-N tris(2-propan-2-ylphenyl) phosphate Chemical compound CC(C)C1=CC=CC=C1OP(=O)(OC=1C(=CC=CC=1)C(C)C)OC1=CC=CC=C1C(C)C LIPMRGQQBZJCTM-UHFFFAOYSA-N 0.000 description 1
- SPUXJWDKFVXXBI-UHFFFAOYSA-N tris(2-tert-butylphenyl) phosphate Chemical compound CC(C)(C)C1=CC=CC=C1OP(=O)(OC=1C(=CC=CC=1)C(C)(C)C)OC1=CC=CC=C1C(C)(C)C SPUXJWDKFVXXBI-UHFFFAOYSA-N 0.000 description 1
- GNFABDZKXNKQKN-UHFFFAOYSA-N tris(prop-2-enyl)phosphane Chemical compound C=CCP(CC=C)CC=C GNFABDZKXNKQKN-UHFFFAOYSA-N 0.000 description 1
- 150000004670 unsaturated fatty acids Chemical class 0.000 description 1
- 235000021122 unsaturated fatty acids Nutrition 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000001060 yellow colorant Substances 0.000 description 1
- DXZMANYCMVCPIM-UHFFFAOYSA-L zinc;diethylphosphinate Chemical compound [Zn+2].CCP([O-])(=O)CC.CCP([O-])(=O)CC DXZMANYCMVCPIM-UHFFFAOYSA-L 0.000 description 1
- PJEUXMXPJGWZOZ-UHFFFAOYSA-L zinc;diphenylphosphinate Chemical compound [Zn+2].C=1C=CC=CC=1P(=O)([O-])C1=CC=CC=C1.C=1C=CC=CC=1P(=O)([O-])C1=CC=CC=C1 PJEUXMXPJGWZOZ-UHFFFAOYSA-L 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Description
本発明は、被覆材料、例えば、プリント配線板等の基板に形成された導体回路パターンを被覆するための被覆材料に適した感光性樹脂組成物、及びこれを硬化させた硬化物を被覆したプリント配線板等の配線基板に関するものである。 The present invention relates to a photosensitive resin composition suitable for a coating material for coating a coating material, for example, a conductor circuit pattern formed on a substrate such as a printed wiring board, and a print coated with a cured product obtained by curing the photosensitive resin composition. The present invention relates to a wiring board such as a wiring board.
プリント配線板にソルダーレジスト膜を形成するにあたり、従来、プリント配線板の塗膜上にフォトマスクを設け、プリント配線板全面を露光する一括露光の方法にて、露光工程を行っていた。しかし、近年、プリント配線板上に塗工した感光性樹脂組成物を露光する際、CADデータを用いて直接画像を描く直描装置による露光が注目されている。 In forming a solder resist film on a printed wiring board, conventionally, an exposure process is performed by a batch exposure method in which a photomask is provided on a coating film of the printed wiring board and the entire surface of the printed wiring board is exposed. However, in recent years, when a photosensitive resin composition coated on a printed wiring board is exposed, exposure by a direct drawing apparatus that draws an image directly using CAD data has attracted attention.
従来の一括露光に使用する感光性樹脂組成物は、光重合開始剤として、α-アミノアルキルフェノン系光重合開始剤(特許文献1)、アシルフォスフィンオキサイド系光重合開始剤(特許文献2)等が使用されていた。 The photosensitive resin composition used for the conventional batch exposure includes an α-aminoalkylphenone photopolymerization initiator (Patent Document 1) and an acylphosphine oxide photopolymerization initiator (Patent Document 2) as photopolymerization initiators. Etc. were used.
しかし、直描露光では、露光の際、酸素分子による障害を受けるので、塗膜の内部では、光重合反応が進みにくく、良好な感度が得られない。また、感光性樹脂組成物に着色剤を配合すると、塗膜の隠蔽力が高くなるので、塗膜の内部ではさらに光重合反応が進みにくくなってしまう。結果として、塗膜の深部では十分な光硬化が得られず、硬化塗膜にアンダーカットが発生してライン形状が劣化してしまうという問題があった。また、ライン形状が劣化してしまうので、ファインピッチの回路パターンに対応できず、場合によってはラインの剥離や欠損等が生じてしまうという問題があった。さらに、着色剤を配合すると上記問題がより顕著となっていた。このライン形状劣化の問題に対応するためには、一括露光よりも光硬化工程における露光量を増やすことによって、塗膜の深部でも十分に光硬化させなければならない。しかし、露光量を増大させると、生産効率の向上を妨げてしまう、という問題があった。 However, in direct drawing exposure, the exposure is affected by oxygen molecules, so that the photopolymerization reaction hardly progresses inside the coating film, and good sensitivity cannot be obtained. Moreover, since the concealing power of a coating film will become high when a coloring agent is mix | blended with the photosensitive resin composition, it will become difficult to advance a photopolymerization reaction further inside a coating film. As a result, there was a problem that sufficient photocuring could not be obtained in the deep part of the coating film, and an undercut occurred in the cured coating film and the line shape deteriorated. In addition, since the line shape deteriorates, it cannot cope with a fine-pitch circuit pattern, and in some cases, there is a problem that line peeling or chipping occurs. Furthermore, the said problem became more remarkable when a coloring agent was mix | blended. In order to cope with this problem of line shape deterioration, it is necessary to sufficiently photocure even in the deep part of the coating film by increasing the exposure amount in the photocuring process rather than the batch exposure. However, there has been a problem that increasing the exposure amount hinders improvement in production efficiency.
上記事情に鑑み、本発明の目的は、電気絶縁性等の基本特性を損なうことなく、直描装置による露光であっても、一括露光と同様に、塗膜の内部まで光硬化性を有する良好な感度が得られ、硬化物のライン形状の劣化を防止し、優れた解像性が得られる感光性樹脂組成物を提供することである。 In view of the above circumstances, the object of the present invention is to have good photo-curing properties up to the inside of the coating film as in the case of collective exposure, without damaging basic characteristics such as electrical insulation, even with exposure by a direct drawing apparatus. It is to provide a photosensitive resin composition capable of obtaining excellent sensitivity, preventing deterioration of the line shape of a cured product, and obtaining excellent resolution.
本発明の態様は、(A)カルボキシル基含有感光性樹脂と、(B)光重合開始剤と、(C)エポキシ化合物と、(D)着色剤とを含む感光性樹脂組成物であって、前記(B)光重合開始剤が、下記一般式 An aspect of the present invention is a photosensitive resin composition comprising (A) a carboxyl group-containing photosensitive resin, (B) a photopolymerization initiator, (C) an epoxy compound, and (D) a colorant, The (B) photopolymerization initiator has the following general formula
(式中、R1は、水素、炭素数1〜17のアルキル基または炭素数1〜17のアルコキシ基を表し、R2は、フェニル基、または炭素数1〜5のアルキル基、−O−CmH2m−CH3及び−O−CnH2n−O−CpH2p−CH3からなる群から選択された少なくとも1つの置換基で置換されたフェニル基を表し、mは0または1〜5の整数、nは1〜5の整数、pは0または1〜5の整数を表す。)で表される化合物であることを特徴とする感光性樹脂組成物である。 (In the formula, R 1 represents hydrogen, an alkyl group having 1 to 17 carbon atoms or an alkoxy group having 1 to 17 carbon atoms, R 2 represents a phenyl group or an alkyl group having 1 to 5 carbon atoms, —O— represents C m H 2m -CH 3 and -O-C n H 2n -O- C p H 2p least one substituted phenyl group substituted with a group selected from the group consisting of -CH 3, m is 0 or It is an integer of 1-5, n is an integer of 1-5, p represents 0 or an integer of 1-5.) It is a compound represented by the photosensitive resin composition characterized by the above-mentioned.
本発明の態様は、前記(B)光重合開始剤が、(9−エチル−6−ニトロ−9H−カルバゾール−3−イル)(4−((1−メトキシプロパン−2−イル)オキシ)−2−メチルフェニル)メタノン O−アセチルオキスムであることを特徴とする感光性樹脂組成物である。 In an embodiment of the present invention, the (B) photopolymerization initiator is (9-ethyl-6-nitro-9H-carbazol-3-yl) (4-((1-methoxypropan-2-yl) oxy)- It is a photosensitive resin composition characterized by being 2-methylphenyl) methanone O-acetyl oxime.
本発明の態様は、前記(B)光重合開始剤が、前記(A)カルボキシル基含有感光性樹脂100質量部に対して、0.1〜2.5質量部含むことを特徴とする感光性樹脂組成物である。 In an embodiment of the present invention, the photopolymerization initiator (B) contains 0.1 to 2.5 parts by mass with respect to 100 parts by mass of the (A) carboxyl group-containing photosensitive resin. It is a resin composition.
本発明の態様は、上記感光性樹脂組成物の光硬化膜を有するプリント配線板である。 The aspect of this invention is a printed wiring board which has the photocured film of the said photosensitive resin composition.
本発明の態様によれば、光重合開始剤として、1分子中にニトロ基を有するカルバゾール骨格を1つ有するオキシムエステル化合物である、上記一般式で表される化合物を使用することにより、電気絶縁性等の基本特性を損なうことなく、直描装置による露光であっても、一括露光と同様に、塗膜の内部まで光硬化性を有する良好な感度が得られるので、硬化塗膜にアンダーカットが発生してライン形状が劣化してしまうのを防止できる。また、直描装置による露光であっても硬化塗膜のライン形状の劣化を防止できるので、ファインピッチの回路パターンであっても、ラインの剥離や欠損等を防止でき、優れた解像性が得られる。さらに、直描装置による露光量を一括露光の露光量と同程度にできるので、直描装置の露光工程を短縮化でき、生産効率がより向上する。 According to the aspect of the present invention, by using a compound represented by the above general formula, which is an oxime ester compound having one carbazole skeleton having a nitro group in one molecule, as a photopolymerization initiator, Even if exposure is performed with a direct-drawing device without impairing basic properties such as the properties of the film, it is possible to obtain a good sensitivity with photo-curing properties up to the inside of the coating film, as in batch exposure. Can prevent the line shape from being deteriorated. In addition, since the line shape of the cured coating film can be prevented from being deteriorated even by exposure using a direct drawing apparatus, even if it is a fine pitch circuit pattern, it is possible to prevent line peeling and defects, and excellent resolution. can get. Furthermore, since the exposure amount by the direct drawing apparatus can be made the same as the exposure amount of the batch exposure, the exposure process of the direct drawing apparatus can be shortened, and the production efficiency is further improved.
また、光重合開始剤として、上記一般式で表される、1分子中にニトロ基を有するカルバゾール骨格を1つ有するオキシムエステル化合物を使用することにより、塗膜深部までの光硬化性がさらに向上し、特に、波長365nmとその近傍、波長385nmとその近傍、波長405nmとその近傍の各活性エネルギー線に対する感度が向上し、より優れた解像性が得られる。 In addition, as a photopolymerization initiator, by using an oxime ester compound having one carbazole skeleton having a nitro group in one molecule, represented by the above general formula, the photocurability up to the deep part of the coating film is further improved. In particular, the sensitivity to each active energy ray at a wavelength of 365 nm and its vicinity, a wavelength of 385 nm and its vicinity, and a wavelength of 405 nm and its vicinity is improved, and more excellent resolution can be obtained.
本発明の態様によれば、上記一般式で表される、1分子中にニトロ基を有するカルバゾール骨格を1つ有するオキシムエステル化合物として、(9−エチル−6−ニトロ−9H−カルバゾール−3−イル)(4−((1−メトキシプロパン−2−イル)オキシ)−2−メチルフェニル)メタノン O−アセチルオキスムを使用することにより、塗膜深部での光硬化性がさらに向上して優れた感度が得られる。 According to the embodiment of the present invention, as the oxime ester compound represented by the above general formula and having one carbazole skeleton having a nitro group in one molecule, (9-ethyl-6-nitro-9H-carbazole-3- Yl) (4-((1-methoxypropan-2-yl) oxy) -2-methylphenyl) methanone O -acetyl oxime further improves the photocurability in the deep part of the coating film and is excellent Sensitivity is obtained.
本発明の態様によれば、上記一般式で表される光重合開始剤が、カルボキシル基含有感光性樹脂100質量部に対して、0.1〜2.5質量部含むことにより、直描装置による露光量を一括露光の露光量と同程度にしても良好な感度が得られ、硬化塗膜のライン形状の劣化を確実に防止できる。 According to the aspect of the present invention, when the photopolymerization initiator represented by the above general formula contains 0.1 to 2.5 parts by mass with respect to 100 parts by mass of the carboxyl group-containing photosensitive resin, the direct drawing apparatus A good sensitivity can be obtained even when the exposure amount by the same amount as the exposure amount of the batch exposure, and the deterioration of the line shape of the cured coating film can be surely prevented.
次に、本発明の感光性樹脂組成物について、詳細に説明する。本発明の感光性樹脂組成物は、(A)カルボキシル基含有感光性樹脂と、(B)光重合開始剤と、(C)エポキシ化合物と、(D)着色剤とを含む感光性樹脂組成物であって、前記(B)光重合開始剤が、上記一般式で表される、1分子中にニトロ基を有するカルバゾール骨格を1つ有するオキシムエステル化合物である。 Next, the photosensitive resin composition of the present invention will be described in detail. The photosensitive resin composition of the present invention comprises (A) a carboxyl group-containing photosensitive resin, (B) a photopolymerization initiator, (C) an epoxy compound, and (D) a colorant. And the said (B) photoinitiator is an oxime ester compound which has one carbazole skeleton which has a nitro group in 1 molecule represented by the said general formula.
(A)カルボキシル基含有感光性樹脂
カルボキシル基含有感光性樹脂は、特に限定されず、例えば、感光性の不飽和二重結合を1個以上有する感光性のカルボキシル基含有樹脂が挙げられる。カルボキシル基含有感光性樹脂の例として、1分子中にエポキシ基を2個以上有する多官能性エポキシ樹脂のエポキシ基の少なくとも一部に、アクリル酸やメタクリル酸(以下、「(メタ)アクリル酸」ということがある。)等のラジカル重合性不飽和モノカルボン酸を反応させて、エポキシ(メタ)アクリレート等のラジカル重合性不飽和モノカルボン酸化エポキシ樹脂を得、生成した水酸基にさらに多塩基酸又はその無水物を反応させて得られる、多塩基酸変性エポキシ(メタ)アクリレート等の多塩基酸変性ラジカル重合性不飽和モノカルボン酸化エポキシ樹脂を挙げることができる。
(A) Carboxyl group-containing photosensitive resin The carboxyl group-containing photosensitive resin is not particularly limited, and examples thereof include a photosensitive carboxyl group-containing resin having one or more photosensitive unsaturated double bonds. As an example of a carboxyl group-containing photosensitive resin, acrylic acid or methacrylic acid (hereinafter referred to as “(meth) acrylic acid”) is added to at least a part of the epoxy group of a polyfunctional epoxy resin having two or more epoxy groups in one molecule. A radical polymerizable unsaturated monocarboxylic acid such as epoxy (meth) acrylate to obtain a radical polymerizable unsaturated monocarboxylic oxide epoxy resin, and a polybasic acid or Mention may be made of polybasic acid-modified radical polymerizable unsaturated monocarboxylic oxide epoxy resins such as polybasic acid-modified epoxy (meth) acrylates obtained by reacting the anhydride.
前記多官能性エポキシ樹脂は、2官能以上のエポキシ樹脂であればいずれでも使用可能である。多官能性エポキシ樹脂のエポキシ当量は特に限定されないが、2000g/eq以下が好ましく、1000g/eq以下がより好ましく、100〜500g/eqが特に好ましい。多官能性エポキシ樹脂には、例えば、ビフェニル型エポキシ樹脂、ナフタレン型エポキシ樹脂、ジシクロペンタジエン型エポキシ樹脂、シリコーン変性エポキシ樹脂等のゴム変性エポキシ樹脂、ε−カプロラクトン変性エポキシ樹脂、ビスフェノールA型、ビスフェノールF型、ビスフェノールAD型等のフェノールノボラック型エポキシ樹脂、о−クレゾールノボラック型等のクレゾールノボラック型エポキシ樹脂、ビスフェノールAノボラック型エポキシ樹脂、環状脂肪族多官能エポキシ樹脂、グリシジルエステル型多官能エポキシ樹脂、グリシジルアミン型多官能エポキシ樹脂、複素環式多官能エポキシ樹脂、ビスフェノール変性ノボラック型エポキシ樹脂、多官能変性ノボラック型エポキシ樹脂、フェノール類とフェノール性水酸基を有する芳香族アルデヒドとの縮合物型エポキシ樹脂等を挙げることができる。また、これらの樹脂にBr、Cl等のハロゲン原子を導入したものも使用可能である。これらのエポキシ樹脂は単独で使用してもよく、また2種以上を混合して使用してもよい。 Any polyfunctional epoxy resin can be used as long as it is a bifunctional or higher functional epoxy resin. Although the epoxy equivalent of a polyfunctional epoxy resin is not specifically limited, 2000 g / eq or less is preferable, 1000 g / eq or less is more preferable, 100-500 g / eq is especially preferable. Examples of the polyfunctional epoxy resin include biphenyl type epoxy resin, naphthalene type epoxy resin, dicyclopentadiene type epoxy resin, rubber modified epoxy resin such as silicone modified epoxy resin, ε-caprolactone modified epoxy resin, bisphenol A type, bisphenol. Phenol type novolak type epoxy resin such as F type, bisphenol AD type, cresol novolac type epoxy resin such as о-cresol novolak type, bisphenol A novolak type epoxy resin, cyclic aliphatic polyfunctional epoxy resin, glycidyl ester type polyfunctional epoxy resin, Glycidylamine type polyfunctional epoxy resin, heterocyclic polyfunctional epoxy resin, bisphenol modified novolac type epoxy resin, polyfunctional modified novolak type epoxy resin, phenols and phenolic hydroxyl group Examples thereof include condensate type epoxy resins with aromatic aldehydes. Moreover, what introduce | transduced halogen atoms, such as Br and Cl, to these resin can also be used. These epoxy resins may be used alone or in combination of two or more.
ラジカル重合性不飽和モノカルボン酸は、特に限定されず、例えば、アクリル酸、メタクリル酸、クロトン酸、桂皮酸などを挙げることができ、アクリル酸、メタクリル酸が好ましい。エポキシ樹脂とラジカル重合性不飽和モノカルボン酸との反応方法は特に限定されず、例えば、エポキシ樹脂とラジカル重合性不飽和モノカルボン酸とを適当な希釈剤中で加熱することにより反応させることができる。 The radically polymerizable unsaturated monocarboxylic acid is not particularly limited, and examples thereof include acrylic acid, methacrylic acid, crotonic acid, cinnamic acid, and acrylic acid and methacrylic acid are preferable. The reaction method of the epoxy resin and the radically polymerizable unsaturated monocarboxylic acid is not particularly limited. For example, the epoxy resin and the radically polymerizable unsaturated monocarboxylic acid can be reacted by heating in an appropriate diluent. it can.
多塩基酸、多塩基酸無水物は、前記エポキシ樹脂とラジカル重合性不飽和モノカルボン酸との反応により生成した水酸基に反応することで、樹脂に遊離のカルボキシル基を導入させるものである。多塩基酸又はその無水物は特に限定されず、飽和、不飽和のいずれも使用可能である。具体的な多塩基酸としては、例えば、コハク酸、マレイン酸、アジピン酸、クエン酸、フタル酸、テトラヒドロフタル酸、3−メチルテトラヒドロフタル酸、4−メチルテトラヒドロフタル酸、3−エチルテトラヒドロフタル酸、4−エチルテトラヒドロフタル酸、ヘキサヒドロフタル酸、3−メチルヘキサヒドロフタル酸、4−メチルヘキサヒドロフタル酸、3−エチルヘキサヒドロフタル酸、4−エチルヘキサヒドロフタル酸、メチルテトラヒドロフタル酸、メチルヘキサヒドロフタル酸、エンドメチレンテトラヒドロフタル酸、メチルエンドメチレンテトラヒドロフタル酸、トリメリット酸、ピロメリット酸及びジグリコール酸等が挙げられ、具体的な多塩基酸無水物としては、これらの無水物が挙げられる。これらの化合物は単独で使用してもよく、2種以上混合して使用してもよい。 The polybasic acid and the polybasic acid anhydride are those for introducing a free carboxyl group into the resin by reacting with the hydroxyl group generated by the reaction of the epoxy resin and the radical polymerizable unsaturated monocarboxylic acid. The polybasic acid or its anhydride is not particularly limited, and either saturated or unsaturated can be used. Specific examples of the polybasic acid include succinic acid, maleic acid, adipic acid, citric acid, phthalic acid, tetrahydrophthalic acid, 3-methyltetrahydrophthalic acid, 4-methyltetrahydrophthalic acid, and 3-ethyltetrahydrophthalic acid. 4-ethyltetrahydrophthalic acid, hexahydrophthalic acid, 3-methylhexahydrophthalic acid, 4-methylhexahydrophthalic acid, 3-ethylhexahydrophthalic acid, 4-ethylhexahydrophthalic acid, methyltetrahydrophthalic acid, Examples include methylhexahydrophthalic acid, endomethylenetetrahydrophthalic acid, methylendomethylenetetrahydrophthalic acid, trimellitic acid, pyromellitic acid and diglycolic acid. Specific polybasic acid anhydrides include these anhydrides. Is mentioned. These compounds may be used alone or in combination of two or more.
上記した多塩基酸変性不飽和モノカルボン酸化エポキシ樹脂もカルボキシル基含有感光性樹脂として使用できるが、必要に応じて、上記した多塩基酸変性不飽和モノカルボン酸化エポキシ樹脂のカルボキシル基に、1つ以上のラジカル重合性不飽和基とエポキシ基とを有するグリシジル化合物を反応させることにより、ラジカル重合性不飽和基を更に導入して、感光性をより向上させたカルボキシル基含有感光性樹脂を用いてもよい。 The polybasic acid-modified unsaturated monocarboxylic oxide epoxy resin described above can also be used as a carboxyl group-containing photosensitive resin, but if necessary, one carboxyl group is added to the carboxyl group of the polybasic acid-modified unsaturated monocarboxylic oxide epoxy resin. By using a carboxyl group-containing photosensitive resin in which the radical polymerizable unsaturated group is further introduced by reacting the glycidyl compound having the above-mentioned radical polymerizable unsaturated group and an epoxy group to further improve the photosensitivity. Also good.
この感光性をより向上させたカルボキシル基含有感光性樹脂は、前記グリシジル化合物の反応によって、ラジカル重合性不飽和基が多塩基酸変性不飽和モノカルボン酸化エポキシ樹脂骨格の側鎖に結合することから、光重合反応性がより向上し、優れた感光特性を有する樹脂となる。1つ以上のラジカル重合性不飽和基とエポキシ基とを有する化合物としては、特に限定されないが、例えば、グリシジルアクリレート、グリシジルメタクリレート、アリルグリシジルエーテル、ペンタエリスリトールトリアクリレートモノグリシジルエーテル等が挙げられる。なお、グリシジル基は1分子中に複数有していてもよい。上記した1つ以上のラジカル重合性不飽和基とエポキシ基とを有する化合物は、単独で使用してもよく、2種以上を混合して使用してもよい。 In this carboxyl group-containing photosensitive resin with improved photosensitivity, the radical polymerizable unsaturated group is bonded to the side chain of the polybasic acid-modified unsaturated monocarboxylic oxide epoxy resin skeleton by the reaction of the glycidyl compound. , The photopolymerization reactivity is further improved, and the resin has excellent photosensitive properties. The compound having one or more radically polymerizable unsaturated groups and an epoxy group is not particularly limited, and examples thereof include glycidyl acrylate, glycidyl methacrylate, allyl glycidyl ether, pentaerythritol triacrylate monoglycidyl ether, and the like. In addition, you may have multiple glycidyl groups in 1 molecule. The above-mentioned compound having one or more radically polymerizable unsaturated groups and an epoxy group may be used alone or in combination of two or more.
さらに、カルボキシル基含有感光性樹脂として、例えば、a)1分子中に2つ以上のエポキシ基を有するエポキシ樹脂のエポキシ基に、b)カルボキシル基1つあたりの炭素数が10以上である少なくとも1種の脂肪酸とc)エチレン性不飽和基含有カルボン酸を反応させることで、反応生成物である長鎖脂肪酸変性エチレン性不飽和基含有変性エポキシ樹脂を得、さらに長鎖脂肪酸及び/またはエチレン性不飽和基含有カルボン酸のカルボキシル基とエポキシ樹脂のエポキシ基との反応により生成する水酸基(主に2級)に、d)多塩基酸無水物を付加させて上記樹脂に遊離のカルボキシル基を導入したものを挙げることができる。 Further, as the carboxyl group-containing photosensitive resin, for example, a) an epoxy group of an epoxy resin having two or more epoxy groups in one molecule, b) at least 1 carbon number per carboxyl group is 10 or more. A reaction product of a long-chain fatty acid-modified ethylenically unsaturated group-containing modified epoxy resin is obtained by reacting a seed fatty acid with c) an ethylenically unsaturated group-containing carboxylic acid. D) Polybasic acid anhydride is added to the hydroxyl group (mainly secondary) generated by the reaction of the carboxyl group of the unsaturated group-containing carboxylic acid and the epoxy group of the epoxy resin to introduce a free carboxyl group into the resin. Can be mentioned.
a)1分子中に2つ以上のエポキシ基を有するエポキシ樹脂
1分子中に2つ以上のエポキシ基を有するエポキシ樹脂は、2官能以上のエポキシ樹脂であればいずれでも使用可能である。1分子中に2つ以上のエポキシ基を有するエポキシ樹脂のエポキシ当量は特に限定されないが、エチレン性不飽和基含有カルボン酸と長鎖脂肪酸の導入割合の低下による感光性と柔軟性の低下を防止する点から、2000g/eq以下が好ましく、1000g/eq以下がより好ましく、100〜500g/eqが特に好ましい。
a) Epoxy resin having two or more epoxy groups in one molecule Any epoxy resin having two or more epoxy groups in one molecule can be used as long as it is a bifunctional or more epoxy resin. The epoxy equivalent of an epoxy resin having two or more epoxy groups in one molecule is not particularly limited, but prevents deterioration in photosensitivity and flexibility due to a decrease in the ratio of introduction of ethylenically unsaturated group-containing carboxylic acid and long chain fatty acid. In view of the above, 2000 g / eq or less is preferable, 1000 g / eq or less is more preferable, and 100 to 500 g / eq is particularly preferable.
1分子中に2つ以上のエポキシ基を有するエポキシ樹脂には、例えば、ビフェニルアラルキル型エポキシ樹脂、フェニルアラルキル型エポキシ樹脂、ビフェニル型エポキシ樹脂、ナフタレン型エポキシ樹脂、ジシクロペンタジエン型エポキシ樹脂、シリコーン変性エポキシ樹脂等のゴム変性エポキシ樹脂、ε−カプロラクトン変性エポキシ樹脂、ビスフェノールA型、ビスフェノールF型、ビスフェノールAD型等のフェノールノボラック型エポキシ樹脂、о−クレゾールノボラック型等のクレゾールノボラック型エポキシ樹脂、環状脂肪族多官能エポキシ樹脂、グリシジルエステル型多官能エポキシ樹脂、グリシジルアミン型多官能エポキシ樹脂、複素環式多官能エポキシ樹脂、ビスフェノール変性ノボラック型エポキシ樹脂、多官能変性ノボラック型エポキシ樹脂、フェノール類とフェノール性水酸基を有する芳香族アルデヒドとの縮合物型エポキシ樹脂、フルオレン骨格を含有するエポキシ樹脂、アダマンタン骨格を導入したエポキシ樹脂等を挙げることができる。また、これらの樹脂にBr、Cl等のハロゲン原子を導入したものも使用可能である。 Examples of the epoxy resin having two or more epoxy groups in one molecule include biphenyl aralkyl type epoxy resin, phenyl aralkyl type epoxy resin, biphenyl type epoxy resin, naphthalene type epoxy resin, dicyclopentadiene type epoxy resin, and silicone-modified. Rubber modified epoxy resin such as epoxy resin, ε-caprolactone modified epoxy resin, phenol novolac type epoxy resin such as bisphenol A type, bisphenol F type, bisphenol AD type, cresol novolac type epoxy resin such as о-cresol novolac type, cyclic fat Polyfunctional epoxy resin, glycidyl ester type polyfunctional epoxy resin, glycidylamine type polyfunctional epoxy resin, heterocyclic polyfunctional epoxy resin, bisphenol-modified novolac type epoxy resin, polyfunctional modified type Examples thereof include a borac type epoxy resin, a condensate type epoxy resin of a phenol and an aromatic aldehyde having a phenolic hydroxyl group, an epoxy resin containing a fluorene skeleton, and an epoxy resin into which an adamantane skeleton is introduced. Moreover, what introduce | transduced halogen atoms, such as Br and Cl, to these resin can also be used.
これらのうち、感光性樹脂組成物の感度、硬化物の解像性、柔軟性及び低反り性に優れ、さらに、良好な絶縁性と耐熱性が得られる点から、ビフェニルアラルキル型エポキシ樹脂、ジシクロペンタジエン型エポキシ樹脂が好ましい。 Among these, the sensitivity of the photosensitive resin composition, the resolution of the cured product, the flexibility and the low warpage are excellent, and further, good insulating properties and heat resistance can be obtained. A cyclopentadiene type epoxy resin is preferred.
b)カルボキシル基1つあたりの炭素数が10以上である脂肪酸
カルボキシル基1つあたりの炭素数が10以上である脂肪酸は、1分子中に2つ以上のエポキシ基を有するエポキシ樹脂のエポキシ基と反応して、該樹脂に上記脂肪酸由来の長鎖炭化水素構造が導入されることで、感光性樹脂組成物の硬化物の柔軟性(フレキシブル性)と絶縁性を向上させることができる。カルボキシル基1つあたりの炭素数が10以上である脂肪酸は、特に限定されず、飽和、不飽和のいずれも使用可能であり、また、直鎖状、分岐状のいずれも使用可能である。上記脂肪酸には、例えば、炭素数が10以上の一塩基酸、炭素数20以上の二塩基酸が挙げられ、柔軟性と指触乾燥性のバランスの点から、上記一塩基酸及び二塩基酸は、直鎖状または炭素数2以下の側鎖を2本以下有する分岐状が好ましい。
b) Fatty acid having 10 or more carbon atoms per carboxyl group Fatty acid having 10 or more carbon atoms per carboxyl group is an epoxy group of an epoxy resin having two or more epoxy groups in one molecule. By reacting and introducing the long-chain hydrocarbon structure derived from the fatty acid into the resin, the flexibility (flexibility) and insulation of the cured product of the photosensitive resin composition can be improved. The fatty acid having 10 or more carbon atoms per carboxyl group is not particularly limited, and either saturated or unsaturated can be used, and either linear or branched can be used. Examples of the fatty acid include monobasic acids having 10 or more carbon atoms and dibasic acids having 20 or more carbon atoms. From the viewpoint of the balance between flexibility and dryness to touch, the monobasic acids and dibasic acids are mentioned. Is preferably linear or branched having 2 or less side chains having 2 or less carbon atoms.
また、長鎖脂肪酸構造をエポキシ樹脂に導入しつつ、さらに、上記エポキシ樹脂の異なるエポキシ基が脂肪酸を介して相互に結合することで、エポキシ樹脂が有する比較的剛直な骨格を長鎖脂肪酸由来の柔軟性の高い長鎖炭化水素骨格にて共有結合により架橋された構造とすることができ、ひいては該構造が硬化塗膜の柔軟性及びはんだ耐熱性に寄与する点から、脂肪酸は少なくとも1種の二塩基酸を含有することが好ましい。 In addition, while introducing a long-chain fatty acid structure into the epoxy resin, different epoxy groups of the epoxy resin are bonded to each other via a fatty acid, so that a relatively rigid skeleton of the epoxy resin is derived from the long-chain fatty acid. The structure can be a structure in which a long-chain hydrocarbon skeleton having high flexibility is covalently cross-linked, and thus the structure contributes to the flexibility of the cured coating film and the solder heat resistance. It is preferable to contain a dibasic acid.
さらに、長鎖脂肪酸に由来する柔軟性と絶縁性の高い長鎖炭化水素骨格をより多く導入することで硬化塗膜の柔軟性と絶縁性をより向上させることができるところ、上記したカルボキシル基1つあたりの炭素数が10以上である二塩基酸に加えて、カルボキシル基1つあたりの炭素数が10以上である一塩基酸を併用することにより、脂肪酸と多官能エポキシ樹脂とエチレン性不飽和基含有カルボン酸との反応生成物の分子量を、長鎖脂肪酸に由来する成分の組成比率を向上させながら適度に制御することができる。このように、前記分子量を適度に制御することで、乾燥後の塗膜の指触乾燥性と弱アルカリ現像液への溶解性(すなわち現像性)と感度とをバランスよく確実に向上させることができる。また、一塩基酸と二塩基酸を併用することで絶縁性とはんだ耐熱性のバランスのよい向上にも確実に寄与することができる。 Furthermore, the flexibility and insulation of the cured coating can be further improved by introducing more long-chain hydrocarbon skeletons having high flexibility and insulation properties derived from long-chain fatty acids. In addition to a dibasic acid having 10 or more carbon atoms per unit, a monobasic acid having 10 or more carbon atoms per carboxyl group is used in combination with a fatty acid, a polyfunctional epoxy resin, and an ethylenically unsaturated group. The molecular weight of the reaction product with the group-containing carboxylic acid can be appropriately controlled while improving the composition ratio of the component derived from the long-chain fatty acid. Thus, by appropriately controlling the molecular weight, it is possible to reliably improve the touch-drying property of the coating film after drying, the solubility in weak alkaline developer (that is, developability) and sensitivity in a balanced manner. it can. Moreover, the combined use of a monobasic acid and a dibasic acid can surely contribute to a good improvement in insulation and solder heat resistance.
前記分子量をより適度に制御することで、上記諸特性をよりバランスよく向上させる点から、カルボキシル基1つあたりの炭素数が18以上である直鎖状飽和一塩基酸を含むことが特に好ましい。 It is particularly preferable to include a linear saturated monobasic acid having 18 or more carbon atoms per carboxyl group from the viewpoint of improving the above properties in a more balanced manner by controlling the molecular weight more appropriately.
カルボキシル基1つあたりの炭素数は、硬化物に柔軟性と絶縁性を付与する点から8以上であり、10以上が好ましい。一方、カルボキシル基1つあたりの炭素数の上限値は、特に限定されないが、良好な現像性を維持する点から24以下が好ましく、22以下が特に好ましい。 The number of carbon atoms per carboxyl group is 8 or more, preferably 10 or more, from the viewpoint of imparting flexibility and insulation to the cured product. On the other hand, the upper limit of the number of carbon atoms per carboxyl group is not particularly limited, but is preferably 24 or less, particularly preferably 22 or less, from the viewpoint of maintaining good developability.
カルボキシル基1つあたりの炭素数が10以上である脂肪酸の具体例には、一塩基酸としては、カプリン酸(デカン酸:C10)、ウンデカン酸(C11)、ラウリン酸(ドデカン酸:C12)、トリデシル酸(C13)、ミリスチン酸(テトラデカン酸:C14)、ペンタデシル酸(C15)、パルミチン酸(ヘキサデカン酸:C16)、マルガリン酸(ヘプタデカン酸:C17)、ステアリン酸(C18)、イソステアリン酸(C18)、ツベルクロスステアリン酸(C19)、アラキジン酸(C20)、ベヘニン酸(C22)、トリコシル酸(C23)、テトラコサン酸(C24)、ヘキサコサン酸(C26)、オクタコサン酸(C28)、トリアコンタン酸(C30)等が挙げられる。 Specific examples of fatty acids having 10 or more carbon atoms per carboxyl group include monobasic acids such as capric acid (decanoic acid: C10), undecanoic acid (C11), lauric acid (dodecanoic acid: C12), Tridecyl acid (C13), myristic acid (tetradecanoic acid: C14), pentadecylic acid (C15), palmitic acid (hexadecanoic acid: C16), margaric acid (heptadecanoic acid: C17), stearic acid (C18), isostearic acid (C18) , Tuberculostearic acid (C19), arachidic acid (C20), behenic acid (C22), tricosylic acid (C23), tetracosanoic acid (C24), hexacosanoic acid (C26), octacosanoic acid (C28), triacontanoic acid (C30) ) And the like.
二塩基酸としては、エイコサン二酸(C20)、エチルオクタデカン二酸(C20)、エイコサジエン二酸(C20)、ビニルオクタデカエン二酸(C20)、ジメチルエイコサジエン二酸(C22)、ジメチルエイコサン二酸(C22)、ジフェニルヘキサデカン二酸(C28)、オレイン酸(C18)等の不飽和脂肪酸の二量体化反応によるC36ダイマー酸、該ダイマー酸のオレフィン性二重結合を水素化してなることを特徴とする水添C36ダイマー酸等を挙げることができる。 Dibasic acids include eicosane diacid (C20), ethyl octadecanedioic acid (C20), eicosadiene diacid (C20), vinyl octadecaenedioic acid (C20), dimethyl eicosadiene diacid (C22), dimethyleico C36 dimer acid by dimerization reaction of unsaturated fatty acids such as sundioic acid (C22), diphenylhexadecanedioic acid (C28), oleic acid (C18), etc., and hydrogenated olefinic double bond of the dimer acid Examples thereof include hydrogenated C36 dimer acid.
上記したカルボキシル基1つあたりの炭素数が10以上である脂肪酸は、単独で使用してもよく、2種以上を混合して使用してもよい。 The above fatty acids having 10 or more carbon atoms per carboxyl group may be used alone or in combination of two or more.
1分子中に2つ以上のエポキシ基を有するエポキシ樹脂とカルボキシル基1つあたりの炭素数が10以上である少なくとも1種の脂肪酸との反応方法は、公知の方法でよく、例えば、上記エポキシ樹脂と上記脂肪酸を適当な希釈剤中で加熱する反応方法が挙げられる。 The reaction method of an epoxy resin having two or more epoxy groups in one molecule and at least one fatty acid having 10 or more carbon atoms per carboxyl group may be a known method, for example, the above epoxy resin And a reaction method in which the fatty acid is heated in a suitable diluent.
カルボキシル基含有感光性樹脂中におけるカルボキシル基1つあたりの炭素数が10以上である脂肪酸の割合(仕込み割合)は、特に限定されないが、例えば、その下限値は、硬化物の柔軟性と絶縁性をより向上させる点から10質量%が好ましく、柔軟性と絶縁性を確実に向上させる点から15質量%が特に好ましい。一方で、その上限値は、エチレン性不飽和基含有カルボン酸の導入量を適度に維持することで優れた感光性と解像性を維持する点から50質量%が好ましく、40質量%が特に好ましい。 The ratio of fatty acids having 10 or more carbon atoms per carboxyl group in the carboxyl group-containing photosensitive resin (preparation ratio) is not particularly limited. For example, the lower limit is the flexibility and insulation of the cured product. 10 mass% is preferable from the point which improves more, and 15 mass% is especially preferable from the point which improves a softness | flexibility and insulation reliably. On the other hand, the upper limit is preferably 50% by mass, particularly 40% by mass from the viewpoint of maintaining excellent photosensitivity and resolution by appropriately maintaining the amount of the ethylenically unsaturated group-containing carboxylic acid introduced. preferable.
c)エチレン性不飽和基含有カルボン酸
エチレン性不飽和基含有カルボン酸は、1分子中に2つ以上のエポキシ基を有するエポキシ樹脂のエポキシ基と反応して、エポキシ樹脂に光重合開始剤により発生するフリーラジカルによって重合することができる光硬化性基を導入する。エチレン性不飽和基含有カルボン酸は、エポキシ樹脂に光硬化性を付与するものであれば、特に限定されず、例えば、ラジカル重合性不飽和モノカルボン酸を挙げることができ、具体的には、例えば、アクリル酸、メタクリル酸、β−アクリロキシプロピオン酸、ω−カルボキシ−ポリカプロラクトン−(メタ)アクリル酸、クロトン酸、桂皮酸など、アクリロイル基またはメタクリロイル基をエポキシ樹脂に導入できるカルボン酸を挙げることができる。このうち、アクリル酸、メタクリル酸が好ましく、アクリル酸が特に好ましい。これらは、単独で使用してもよく、2種以上を混合して使用してもよい。
c) Ethylenically unsaturated group-containing carboxylic acid Ethylenically unsaturated group-containing carboxylic acid reacts with an epoxy group of an epoxy resin having two or more epoxy groups in one molecule, and the epoxy resin is reacted with a photopolymerization initiator. A photocurable group is introduced that can be polymerized by the generated free radicals. The ethylenically unsaturated group-containing carboxylic acid is not particularly limited as long as it imparts photocurability to the epoxy resin, and examples thereof include a radically polymerizable unsaturated monocarboxylic acid. Specifically, Examples thereof include carboxylic acids that can introduce an acryloyl group or a methacryloyl group into an epoxy resin, such as acrylic acid, methacrylic acid, β-acryloxypropionic acid, ω-carboxy-polycaprolactone- (meth) acrylic acid, crotonic acid, cinnamic acid. be able to. Among these, acrylic acid and methacrylic acid are preferable, and acrylic acid is particularly preferable. These may be used alone or in combination of two or more.
カルボキシル基含有感光性樹脂中におけるエチレン性不飽和基含有カルボン酸の割合(仕込み割合)は、特に限定されないが、例えば、その下限値は、硬化物の優れた感光性と解像性を維持する点から2.0質量%が好ましく、3.0質量%が特に好ましい。一方で、その上限値は、カルボキシル基1つあたりの炭素数が10以上である脂肪酸の導入量を適度に維持することで優れた柔軟性と絶縁性を得る点から10質量%が好ましく、8.0質量%が特に好ましい。 Although the ratio (preparation ratio) of the ethylenically unsaturated group-containing carboxylic acid in the carboxyl group-containing photosensitive resin is not particularly limited, for example, the lower limit thereof maintains the excellent photosensitivity and resolution of the cured product. From the point of view, 2.0 mass% is preferable, and 3.0 mass% is particularly preferable. On the other hand, the upper limit is preferably 10% by mass from the viewpoint of obtaining excellent flexibility and insulation by appropriately maintaining the amount of fatty acid having 10 or more carbon atoms per carboxyl group. 0.0 mass% is particularly preferable.
1分子中に2つ以上のエポキシ基を有するエポキシ樹脂とエチレン性不飽和基含有カルボン酸との反応方法は特に限定されず、例えば、上記エポキシ樹脂とエチレン性不飽和基含有カルボン酸を適当な希釈剤中で加熱する反応方法が挙げられる。 The reaction method of the epoxy resin having two or more epoxy groups in one molecule and the ethylenically unsaturated group-containing carboxylic acid is not particularly limited. For example, the epoxy resin and the ethylenically unsaturated group-containing carboxylic acid are appropriately used. A reaction method of heating in a diluent is mentioned.
d)多塩基酸無水物
多塩基酸無水物は、前記エポキシ樹脂とカルボキシル基1つあたりの炭素数が10以上である少なくとも1種の脂肪酸との反応により生成した水酸基及び前記エポキシ樹脂とエチレン性不飽和基含有カルボン酸との反応により生成した水酸基に反応して、前記エポキシ樹脂に遊離のカルボキシル基を導入する。多塩基酸無水物としては、特に限定されず、飽和、不飽和のいずれも使用可能である。多塩基酸無水物には、例えば、コハク酸、マレイン酸、アジピン酸、クエン酸、フタル酸、テトラヒドロフタル酸、3−メチルテトラヒドロフタル酸、4−メチルテトラヒドロフタル酸、3−エチルテトラヒドロフタル酸、4−エチルテトラヒドロフタル酸、ヘキサヒドロフタル酸、3−メチルヘキサヒドロフタル酸、4−メチルヘキサヒドロフタル酸、3−エチルヘキサヒドロフタル酸、4−エチルヘキサヒドロフタル酸、メチルテトラヒドロフタル酸、メチルヘキサヒドロフタル酸、エンドメチレンテトラヒドロフタル酸、メチルエンドメチレンテトラヒドロフタル酸、トリメリット酸、ピロメリット酸及びジグリコール酸等の多塩基酸の無水物が挙げられる。なお、これらの化合物は単独で使用してもよく、現像性を適度に調整するために、2種以上混合して使用してもよい。
d) Polybasic acid anhydride The polybasic acid anhydride is formed by reacting the epoxy resin with at least one fatty acid having 10 or more carbon atoms per carboxyl group and the epoxy resin and ethylenic acid. It reacts with the hydroxyl group produced by the reaction with the unsaturated group-containing carboxylic acid to introduce a free carboxyl group into the epoxy resin. The polybasic acid anhydride is not particularly limited, and either saturated or unsaturated can be used. Examples of the polybasic acid anhydride include succinic acid, maleic acid, adipic acid, citric acid, phthalic acid, tetrahydrophthalic acid, 3-methyltetrahydrophthalic acid, 4-methyltetrahydrophthalic acid, 3-ethyltetrahydrophthalic acid, 4-ethyltetrahydrophthalic acid, hexahydrophthalic acid, 3-methylhexahydrophthalic acid, 4-methylhexahydrophthalic acid, 3-ethylhexahydrophthalic acid, 4-ethylhexahydrophthalic acid, methyltetrahydrophthalic acid, methyl Examples thereof include anhydrides of polybasic acids such as hexahydrophthalic acid, endomethylenetetrahydrophthalic acid, methylendomethylenetetrahydrophthalic acid, trimellitic acid, pyromellitic acid and diglycolic acid. In addition, these compounds may be used independently and may mix and use 2 or more types in order to adjust developability moderately.
カルボキシル基含有感光性樹脂中における多塩基酸無水物の割合(仕込み割合)は、特に限定されないが、例えば、その下限値は、現像性の向上の点から5.0質量%が好ましく、8.0質量%が特に好ましい。一方で、その上限値は、優れた絶縁性を得る点から25質量%が好ましく、20質量%が特に好ましい。 Although the ratio (preparation ratio) of the polybasic acid anhydride in the carboxyl group-containing photosensitive resin is not particularly limited, for example, the lower limit is preferably 5.0% by mass from the viewpoint of improving developability, and 8. 0% by mass is particularly preferred. On the other hand, the upper limit is preferably 25% by mass and particularly preferably 20% by mass from the viewpoint of obtaining excellent insulating properties.
さらに、カルボキシル基含有感光性樹脂として、例えば、酸変性ウレタン化エポキシ(メタ)アクリレート樹脂を使用してもよい。酸変性ウレタン化エポキシ(メタ)アクリレート樹脂は、例えば、まず、上記のようにしてエポキシ(メタ)アクリレートを得、生成した水酸基に、上記した多塩基酸またはその無水物と1分子中に2つ以上のイソシアネート基を有する化合物とを反応させることで得られる。 Furthermore, as a carboxyl group-containing photosensitive resin, for example, an acid-modified urethanized epoxy (meth) acrylate resin may be used. The acid-modified urethanized epoxy (meth) acrylate resin is obtained, for example, by first obtaining an epoxy (meth) acrylate as described above, and the resulting hydroxyl group has two polybasic acids or anhydrides per molecule. It can be obtained by reacting the above compound having an isocyanate group.
1分子中に2つ以上のイソシアネート基を有する化合物としては、特に限定されないが、例えば、ヘキサメチレンジイソシアネアート(HDI)、イソホロンジイソシアネート(IPDI)、メチレンジイソシアネート(MDI)、メチレンビスシクロヘキシルイソシアネート、トリメチルヘキサメチルジイソシアネート、ヘキサンジイソシアネート、ヘキサメチルアミンジイソシアネート、トルエンジイソシアネート、1,2−ジフェニルエタンジイソシアネート、1,3−ジフェニルプロパンジイソシアネート、ジフェニルメタンジイソシアネート、ジシクロヘキシルメチルジイソシアネートなどのジイソシアネートが挙げられる。これらの化合物は単独で使用してもよく、2種以上混合して使用してもよい。 The compound having two or more isocyanate groups in one molecule is not particularly limited. For example, hexamethylene diisocyanate (HDI), isophorone diisocyanate (IPDI), methylene diisocyanate (MDI), methylene biscyclohexyl isocyanate, Examples include diisocyanates such as trimethylhexamethyl diisocyanate, hexane diisocyanate, hexamethylamine diisocyanate, toluene diisocyanate, 1,2-diphenylethane diisocyanate, 1,3-diphenylpropane diisocyanate, diphenylmethane diisocyanate, and dicyclohexylmethyl diisocyanate. These compounds may be used alone or in combination of two or more.
本発明においては、上記した酸変性ウレタン化エポキシ(メタ)アクリレート樹脂もカルボキシル基含有感光性樹脂として使用できるが、必要に応じて、上記した酸変性ウレタン化エポキシ(メタ)アクリレート樹脂のカルボキシル基に、上記した1つ以上のラジカル重合性不飽和基とエポキシ基とを有するグリシジル化合物を反応させることにより、ラジカル重合性不飽和基を更に導入し、感光性をより向上させたカルボキシル基含有感光性樹脂としてもよい。 In the present invention, the above-mentioned acid-modified urethanized epoxy (meth) acrylate resin can also be used as a carboxyl group-containing photosensitive resin, but if necessary, the carboxyl group of the above-mentioned acid-modified urethanized epoxy (meth) acrylate resin. Carboxyl group-containing photosensitivity with further improved photosensitivity by further introducing a radical polymerizable unsaturated group by reacting the glycidyl compound having one or more radical polymerizable unsaturated groups and an epoxy group. It is good also as resin.
カルボキシル基含有感光性樹脂の酸価は、特に限定されないが、その下限値は、確実なアルカリ現像の点から30mgKOH/gが好ましく、40mgKOH/gが特に好ましい。一方、酸価の上限値は、アルカリ現像液による露光部の溶解防止の点から200mgKOH/gが好ましく、硬化物の耐湿性と電気特性の劣化防止の点から150mgKOH/gが特に好ましい。 The acid value of the carboxyl group-containing photosensitive resin is not particularly limited, but the lower limit is preferably 30 mg KOH / g, particularly preferably 40 mg KOH / g, from the viewpoint of reliable alkali development. On the other hand, the upper limit of the acid value is preferably 200 mgKOH / g from the viewpoint of preventing dissolution of the exposed area with an alkali developer, and particularly preferably 150 mgKOH / g from the viewpoint of preventing moisture from being cured and preventing deterioration of electrical characteristics.
また、カルボキシル基含有感光性樹脂の質量平均分子量は、特に限定されないが、その下限値は、硬化物の強靭性及び指触乾燥性の点から3000が好ましく、5000が特に好ましい。一方、質量平均分子量の上限値は、円滑なアルカリ現像性の点から200000が好ましく、50000が特に好ましい。 Further, the mass average molecular weight of the carboxyl group-containing photosensitive resin is not particularly limited, but the lower limit is preferably 3000 and particularly preferably 5000 from the viewpoint of toughness of the cured product and dryness to touch. On the other hand, the upper limit value of the mass average molecular weight is preferably 200000, particularly preferably 50000, from the viewpoint of smooth alkali developability.
カルボキシル基含有感光性樹脂として市販されているものには、例えば、サイクロマーP(ACA)Z−251(ダイセル・オルネクス(株)製)、ZCR−1601H、ZAR−2000、ZFR−1122、FLX−2089、ZCR−1569H(以上、日本化薬(株)製)、リポキシ SP−4621(昭和高分子(株)製)等を挙げることができる。これらの樹脂は、単独で使用してもよく、2種以上を混合して使用してもよい。 Examples of commercially available carboxyl group-containing photosensitive resins include Cyclomer P (ACA) Z-251 (Daicel Ornex Co., Ltd.), ZCR-1601H, ZAR-2000, ZFR-1122, FLX- 2089, ZCR-1569H (above, manufactured by Nippon Kayaku Co., Ltd.), Lipoxy SP-4621 (manufactured by Showa Polymer Co., Ltd.), and the like. These resins may be used alone or in combination of two or more.
(B)光重合開始剤
本発明の感光性樹脂組成物では、(B)成分の光重合開始剤として、1分子中にニトロ基を有するカルバゾール骨格を1つ有するオキシムエステル化合物である、下記一般式
(B) Photopolymerization initiator In the photosensitive resin composition of the present invention, the photopolymerization initiator as the component (B) is an oxime ester compound having one carbazole skeleton having a nitro group in one molecule, as described below. formula
(式中、R1は、水素、炭素数1〜17のアルキル基または炭素数1〜17のアルコキシ基を表し、R2は、フェニル基、または炭素数1〜5のアルキル基、−O−CmH2m−CH3及び−O−CnH2n−O−CpH2p−CH3からなる群から選択された少なくとも1つの置換基で置換されたフェニル基を表し、mは0または1〜5の整数、nは1〜5の整数、pは0または1〜5の整数を表す。)で表される化合物を使用している。 (In the formula, R 1 represents hydrogen, an alkyl group having 1 to 17 carbon atoms or an alkoxy group having 1 to 17 carbon atoms, R 2 represents a phenyl group or an alkyl group having 1 to 5 carbon atoms, —O— represents C m H 2m -CH 3 and -O-C n H 2n -O- C p H 2p least one substituted phenyl group substituted with a group selected from the group consisting of -CH 3, m is 0 or An integer of 1 to 5, n is an integer of 1 to 5, and p is 0 or an integer of 1 to 5).
上記一般式で表されるオキシムエステル化合物を使用することにより、直描装置による露光であっても、一括露光と同様に、塗膜の内部まで光硬化性を有する良好な感度が得られるので、硬化塗膜にアンダーカットが発生してライン形状が劣化してしまうのを防止できる。また、上記一般式で表されるオキシムエステル化合物を使用することにより、特に、波長365nmとその近傍、波長385nmとその近傍、波長405nmとその近傍の各活性エネルギー線に対する感度が向上するので、上記各波長の活性エネルギー線を用いると、優れた塗膜深部までの光硬化性、すなわち、塗膜深部での優れた感度が得られ、解像性が向上する。 By using the oxime ester compound represented by the above general formula, even with exposure by a direct drawing device, as in the case of collective exposure, good sensitivity having photocurability up to the inside of the coating film can be obtained. It is possible to prevent the line shape from being deteriorated due to the occurrence of undercut in the cured coating film. Moreover, by using the oxime ester compound represented by the above general formula, in particular, the sensitivity to each active energy ray at a wavelength of 365 nm and its vicinity, a wavelength of 385 nm and its vicinity, and a wavelength of 405 nm and its vicinity is improved. When the active energy ray of each wavelength is used, excellent photocurability up to the deep part of the coating film, that is, excellent sensitivity at the deep part of the coating film is obtained, and the resolution is improved.
光重合開始剤は、上記一般式のオキシムエステル化合物であれば、特に限定されないが、例えば、下記化学構造を有する(9−エチル−6−ニトロ−9H−カルバゾール−3−イル)(4−((1−メトキシプロパン−2−イル)オキシ)−2−メチルフェニル)メタノン O−アセチルオキスムを挙げることができる。 Although a photoinitiator will not be specifically limited if it is an oxime ester compound of the said general formula, For example, it has the following chemical structure (9-ethyl-6-nitro-9H-carbazol-3-yl) (4- ( Mention may be made of (1-methoxypropan-2-yl) oxy) -2-methylphenyl) methanone O -acetyl oxime.
上記一般式のオキシムエステル化合物の含有量は特に限定されず、例えば、その下限値は、カルボキシル基含有感光性樹脂100質量部(固形分、以下同じ)に対して、直描装置による露光量を一括露光の露光量と同程度にしても、着色剤が含まれる塗膜でもライン形状の劣化を確実に防止する点から0.1質量部が好ましく、現像時の感度とライン形状をより向上させる点から0.2質量部が特に好ましい。一方、その上限値は、例えば、カルボキシル基含有感光性樹脂100質量部に対して、加熱処理時にミストが発生するのを抑制する点から4.0質量部が好ましく、ライン形状の点から2.5質量部が特に好ましい。 The content of the oxime ester compound of the above general formula is not particularly limited. For example, the lower limit value is the exposure amount by the direct drawing apparatus with respect to 100 parts by mass of the carboxyl group-containing photosensitive resin (solid content, hereinafter the same). Even if the exposure amount is the same as that of the batch exposure, 0.1 part by mass is preferable from the viewpoint of reliably preventing the deterioration of the line shape even in the coating film containing the colorant, and further improves the sensitivity and the line shape during development. In particular, 0.2 parts by mass is particularly preferable. On the other hand, the upper limit is preferably 4.0 parts by mass from the viewpoint of suppressing the occurrence of mist during heat treatment, for example, 100 parts by mass of the carboxyl group-containing photosensitive resin, and 2. 5 parts by mass is particularly preferred.
また、上記一般式のオキシムエステル化合物に加えて、必要に応じて、さらに、他の光重合開始剤を配合してもよい。他の光重合開始剤としては、特に限定されないが、例えば、チオキサントン系光重合開始剤を挙げることができる。チオキサントン系光重合開始剤を配合することで、ライン形状のアンダーカットを低減して解像性をより向上させることができる場合がある。チオキサントン系光重合開始剤としては、チオキサントン構造を有する光重合開始剤であれば特に限定されず、例えば、2‐メチルチオキサントン、2‐エチルチオキサントン、2‐クロルチオキサントン、2,4‐ジメチルチオキサントン、2,4‐ジエチルチオキサントン等を挙げることができる。 In addition to the oxime ester compound of the above general formula, if necessary, another photopolymerization initiator may be further blended. Although it does not specifically limit as another photoinitiator, For example, a thioxanthone type photoinitiator can be mentioned. By blending the thioxanthone-based photopolymerization initiator, the line-shaped undercut may be reduced to further improve the resolution. The thioxanthone photopolymerization initiator is not particularly limited as long as it is a photopolymerization initiator having a thioxanthone structure. For example, 2-methylthioxanthone, 2-ethylthioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone, 2 , 4-diethylthioxanthone and the like.
チオキサントン系光重合開始剤の含有量は特に限定されず、例えば、その下限値は、カルボキシル基含有感光性樹脂100質量部に対して、解像性が確実に向上する点から0.05質量部が好ましく、0.1質量部が特に好ましい。一方、その上限値は、例えば、カルボキシル基含有感光性樹脂100質量部に対して、ライン太りの防止の点から1.0質量部が好ましく、0.5質量部が特に好ましい。 The content of the thioxanthone photopolymerization initiator is not particularly limited. For example, the lower limit is 0.05 parts by mass from the viewpoint that the resolution is reliably improved with respect to 100 parts by mass of the carboxyl group-containing photosensitive resin. Is preferable, and 0.1 part by mass is particularly preferable. On the other hand, the upper limit is preferably 1.0 part by mass, particularly preferably 0.5 part by mass with respect to 100 parts by mass of the carboxyl group-containing photosensitive resin, from the viewpoint of preventing line thickening.
チオキサントン系光重合開始剤以外の他の光重合開始剤としては、例えば、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、ベンゾイン‐n‐ブチルエーテル、ベンゾインイソブチルエーテル、アセトフェノン、ジメチルアミノアセトフェノン、2,2‐ジメトキシ‐2‐フェニルアセトフェノン、2,2‐ジエトキシ‐2‐フェニルアセトフェノン、2‐ヒドロキシ‐2‐メチル‐1‐フェニルプロパン‐1‐オン、1‐ヒドロキシシクロヘキシルフェニルケトン、2‐メチル‐1‐〔4‐(メチルチオ)フェニル〕‐2‐モルフォリノ‐プロパン‐1‐オン、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)-ブタノン-1、4‐(2‐ヒドロキシエトキシ)フェニル‐2‐(ヒドロキシ‐2‐プロピル)ケトン、ベンゾフェノン、p‐フェニルベンゾフェノン、4,4′‐ジエチルアミノベンゾフェノン、ジクロルベンゾフェノン、2‐メチルアントラキノン、2‐エチルアントラキノン、2‐ターシャリーブチルアントラキノン、2‐アミノアントラキノン、2,4,6-トリメチルベンゾイルジフェニルホスフィンオキサイド、ビス(2、4,6-トリメチルベンゾイル)フェニルホスフィンオキサイド、ビス(2,6-ジメトキシベンゾイル)-2,4,4-トリメチル-ペンチルホスフィンオキサイド、(2,4,6‐トリメチルベンゾイル)エトキシフェニルフォスフィンオキサイド、1,2-オクタンジオン等を挙げることができる。 Examples of photopolymerization initiators other than thioxanthone photopolymerization initiators include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin-n-butyl ether, benzoin isobutyl ether, acetophenone, dimethylaminoacetophenone, 2 , 2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1-hydroxycyclohexyl phenyl ketone, 2-methyl-1 -[4- (Methylthio) phenyl] -2-morpholino-propan-1-one, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1, 4- (2-hydroxyethoxy) ) Phenyl- 2- (hydroxy-2-propyl) ketone, benzophenone, p-phenylbenzophenone, 4,4'-diethylaminobenzophenone, dichlorobenzophenone, 2-methylanthraquinone, 2-ethylanthraquinone, 2-tert-butylanthraquinone, 2-amino Anthraquinone, 2,4,6-trimethylbenzoyldiphenylphosphine oxide, bis (2,4,6-trimethylbenzoyl) phenylphosphine oxide, bis (2,6-dimethoxybenzoyl) -2,4,4-trimethyl-pentylphosphine oxide (2,4,6-trimethylbenzoyl) ethoxyphenylphosphine oxide, 1,2-octanedione and the like.
他の光重合開始剤も配合する場合における、上記一般式のオキシムエステル化合物と他の光重合開始剤の配合割合(質量比)は、特に限定されないが、加熱処理時にミストが発生するのを抑制する点から、上記一般式のオキシムエステル化合物:他の光重合開始剤=1.0:0.5〜20が好ましく、優れた感度とライン形状を得る点から、上記一般式のオキシムエステル化合物:他の光重合開始剤=1.0:1.0〜10が特に好ましい。 The blending ratio (mass ratio) of the oxime ester compound of the above general formula and the other photopolymerization initiator in the case of blending other photopolymerization initiator is not particularly limited, but suppresses the generation of mist during the heat treatment. The oxime ester compound of the above general formula: other photopolymerization initiator = 1.0: 0.5 to 20 is preferable, and the oxime ester compound of the above general formula: Other photopolymerization initiators = 1.0: 1.0 to 10 are particularly preferable.
(C)エポキシ化合物
エポキシ化合物は、硬化物の架橋密度を上げて、十分な機械的強度を有する硬化塗膜等の硬化物を得るためのものである。エポキシ化合物には、例えば、エポキシ樹脂を挙げることができる。エポキシ樹脂の構造は、特に限定されないが、例えば、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ノボラック型エポキシ樹脂(ビフェニルノボラック型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、o−クレゾールノボラック型エポキシ樹脂、p−tert−ブチルフェノールノボラック型エポキシ樹脂等)、ビスフェノールFやビスフェノールSにエピクロルヒドリンを反応させて得られたビスフェノールF型やビスフェノールS型のエポキシ樹脂、さらにシクロヘキセンオキシド基、トリシクロデカンオキシド基、シクロペンテンオキシド基などを有する脂環式エポキシ樹脂、ジシクロペンタジエン型エポキシ樹脂、アダマンタン型エポキシ樹脂、ビフェニルアラルキル型エポキシ樹脂、フェニルアラルキル型エポキシ樹脂、ビフェニル型エポキシ樹脂等を挙げることができる。これらの化合物は単独で使用してもよく、2種以上混合して使用してもよい。
(C) Epoxy compound The epoxy compound is for increasing the crosslinking density of the cured product to obtain a cured product such as a cured coating film having sufficient mechanical strength. Examples of the epoxy compound include an epoxy resin. The structure of the epoxy resin is not particularly limited. For example, bisphenol A type epoxy resin, bisphenol F type epoxy resin, novolak type epoxy resin (biphenyl novolak type epoxy resin, phenol novolak type epoxy resin, o-cresol novolak type epoxy resin, p-tert-butylphenol novolac type epoxy resin), bisphenol F type and bisphenol S type epoxy resin obtained by reacting bisphenol F and bisphenol S with epichlorohydrin, cyclohexene oxide group, tricyclodecane oxide group, cyclopentene oxide Group cycloaliphatic epoxy resin, dicyclopentadiene type epoxy resin, adamantane type epoxy resin, biphenyl aralkyl type epoxy resin, phenyl group Alkyl type epoxy resins, biphenyl type epoxy resins and the like. These compounds may be used alone or in combination of two or more.
エポキシ化合物の含有量は、特に限定されないが、柔軟性を損なうことなく十分な機械的強度の硬化塗膜を得る点から、カルボキシル基含有感光性樹脂100質量部に対して、10〜100質量部が好ましく、20〜70質量部が特に好ましい。 The content of the epoxy compound is not particularly limited, but is 10 to 100 parts by mass with respect to 100 parts by mass of the carboxyl group-containing photosensitive resin from the viewpoint of obtaining a cured coating film having sufficient mechanical strength without impairing flexibility. Is preferable, and 20-70 mass parts is especially preferable.
(D)着色剤
着色剤は、顔料、色素等、特に限定されず、また、白色着色剤、青色着色剤、黄色着色剤、黒色着色剤等、いずれの色も使用可能である。上記着色剤には、例えば、白色着色剤である酸化チタン、黒色着色剤であるカーボンブラック等の無機系着色剤や、フタロシアニングリーン、フタロシアニンブルー、リオノールブルー等のフタロシアニン系、アントラキノン系等の有機系着色剤等を挙げることができる。これらの着色剤は単独で使用してもよく、2種以上混合して使用してもよい。
(D) Colorant The colorant is not particularly limited, such as a pigment or a dye, and any color such as a white colorant, a blue colorant, a yellow colorant, and a black colorant can be used. Examples of the colorant include inorganic colorants such as titanium oxide, which is a white colorant, and carbon black, which is a black colorant, and organic materials such as phthalocyanine-type, anthraquinone-type, such as phthalocyanine green, phthalocyanine blue, and lionol blue. Examples thereof include system colorants. These colorants may be used alone or in combination of two or more.
着色剤の含有量は特に限定されず、例えば、カルボキシル基含有感光性樹脂100質量部に対して、1〜10質量部が好ましい。 Content of a coloring agent is not specifically limited, For example, 1-10 mass parts is preferable with respect to 100 mass parts of carboxyl group-containing photosensitive resin.
本発明の感光性樹脂組成物には、上記した(A)〜(D)成分の他に、必要に応じて、種々の添加成分、例えば、反応性希釈剤、消泡剤、体質顔料、難燃剤、溶剤、各種添加剤等を、適宜、含有させることができる。 In the photosensitive resin composition of the present invention, in addition to the components (A) to (D) described above, various additive components such as a reactive diluent, an antifoaming agent, an extender pigment, a difficult pigment, A flame retardant, a solvent, various additives, etc. can be contained suitably.
反応性希釈剤とは、例えば、光重合性モノマーであり、1分子当たり少なくとも1つの重合性二重結合を有する化合物である。反応性希釈剤は、感光性樹脂組成物の光硬化を十分にして、耐酸性、耐熱性、耐アルカリ性などを有する硬化物を得るために使用する。 The reactive diluent is, for example, a photopolymerizable monomer and a compound having at least one polymerizable double bond per molecule. The reactive diluent is used to obtain a cured product having sufficient acid resistance, heat resistance, alkali resistance, etc., by sufficiently photocuring the photosensitive resin composition.
反応性希釈剤は、上記化合物であれば特に限定されず、例えば、(メタ)アクリル酸2−ヒドロキシエチル、フェノキシエチル(メタ)アクリレート、ジエチレングルコールモノ(メタ)アクリレート、2‐ヒドロキシ‐3‐フェノキシプロピル(メタ)アクリルレート、1,4‐ブタンジオールジ(メタ)アクリレート、1,6‐ヘキサンジオールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、ジエチレングリコールジ(メタ)アクリレート、ネオペンチルグリコールアジペートジ(メタ)アクリレート、ヒドロキシピバリン酸ネオペンチルグリコールジ(メタ)アクリレート、ジシクロペンタニルジ(メタ)アクリレート、カプロラクトン変性ジシクロペンテニルジ(メタ)アクリレート、エチレンオキサイド変性燐酸ジ(メタ)アクリレート、アリル化シクロヘキシルジ(メタ)アクリレート、イソシアヌレートジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ジトリメチロールプロパンテトラ(メタ)アクリレート、ジペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、プロピレンオキシド変性トリメチロールプロパントリ(メタ)アクリレート、トリス(アクリロキシエチル)イソシアヌレート、プロピオン酸変性ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、カプロラクトン変性ジペンタエリスリトールヘキサ(メタ)アクリレート等が挙げられる。これらは単独で使用してもよく、2種以上を混合して使用してもよい。 The reactive diluent is not particularly limited as long as it is the above compound. For example, 2-hydroxyethyl (meth) acrylate, phenoxyethyl (meth) acrylate, diethylene glycol mono (meth) acrylate, 2-hydroxy-3- Phenoxypropyl (meth) acrylate, 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, neopentyl Glycol adipate di (meth) acrylate, hydroxypivalate neopentyl glycol di (meth) acrylate, dicyclopentanyl di (meth) acrylate, caprolactone modified dicyclopentenyl di (meth) acrylate, ethylene oxa De-modified phosphate di (meth) acrylate, allylated cyclohexyl di (meth) acrylate, isocyanurate di (meth) acrylate, trimethylolpropane tri (meth) acrylate, ditrimethylolpropane tetra (meth) acrylate, dipentaerythritol tri (meth) ) Acrylate, pentaerythritol tri (meth) acrylate, propylene oxide modified trimethylolpropane tri (meth) acrylate, tris (acryloxyethyl) isocyanurate, propionic acid modified dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) ) Acrylate, caprolactone-modified dipentaerythritol hexa (meth) acrylate, and the like. These may be used alone or in combination of two or more.
消泡剤は、特に限定されないが、例えば、シリコーン系、炭化水素系、アクリル系等を挙げることができる。体質顔料は、硬化物の強度と剛性を上げるためのものであり、例えば、硫酸バリウム、シリカ、アルミナ、水酸化アルミニウム、タルク、マイカ等を挙げることができる。 Although an antifoamer is not specifically limited, For example, a silicone type, a hydrocarbon type, an acrylic type etc. can be mentioned. The extender pigment is for increasing the strength and rigidity of the cured product, and examples thereof include barium sulfate, silica, alumina, aluminum hydroxide, talc, and mica.
難燃剤を配合することで、本発明の感光性樹脂組成物の硬化物に難燃性を付与することができる。難燃剤は特に限定されず、公知のものを使用できる。難燃剤としては、例えば、リン元素含有化合物等を挙げることができる。リン元素含有化合物の具体例としては、トリス(クロロエチル)ホスフェート、トリス(2,3−ジクロロプロピル)ホスフェート、トリス(2−クロロプロピル)ホスフェート、トリス(2,3−ブロモプロピル)ホスフェート、トリス(ブロモクロロプロピル)ホスフェート、2,3−ジブロモプロピル−2,3−クロロプロピルホスフェート、トリス(トリブロモフェニル)ホスフェート、トリス(ジブロモフェニル)ホスフェート、トリス(トリブロモネオペンチル)ホスフェートなどの含ハロゲン系リン酸エステル;トリメチルホスフェート、トリエチルホスフェート、トリブチルホスフェート、トリオクチルホスフェート、トリブトキシエチルホスフェート等のノンハロゲン系脂肪族リン酸エステル;トリフェニルホスフェート、クレジルジフェニルホスフェート、ジクレジルフェニルホスフェート、トリクレジルホスフェート、トリキシレニルホスフェート、キシレニルジフェニルホスフェート、トリス(イソプロピルフェニル)ホスフェート、イソプロピルフェニルジフェニルホスフェート、ジイソプロピルフェニルフェニルホスフェート、トリス(トリメチルフェニル)ホスフェート、トリス(t−ブチルフェニル)ホスフェート、ヒドロキシフェニルジフェニルホスフェート、オクチルジフェニルホスフェート、3−グリシジルオキシプロピレンジフェニルホスフィンオキシド、3−グリシジルオキシジフェニルホスフィンオキシド、ジフェニルビニルホスフィンオキシド、10−(2,5−ジヒドロキシフェニル)−10H−9−オキサ−10−ホスファフェナントレン−10−オキシド、2−(9,10−ジヒドロ−9−オキサ−10−オキサイド−10−ホスファフェナントレン−10−イル)メチルコハク酸ビス−(2−ヒドロキシエチル)−エステル重合物などのノンハロゲン系芳香族リン酸エステル;トリスジエチルホスフィン酸アルミニウム、ジエチルホスフィン酸アルミニウム、トリスメチルエチルホスフィン酸アルミニウム、トリスジフェニルホスフィン酸アルミニウム、ビスジエチルホスフィン酸亜鉛、ビスメチルエチルホスフィン酸亜鉛、ビスジフェニルホスフィン酸亜鉛、ビスジエチルホスフィン酸チタニル、テトラキスジエチルホスフィン酸チタン、ビスメチルエチルホスフィン酸チタニル、テトラキスメチルエチルホスフィン酸チタン、ビスジフェニルホスフィン酸チタニル、テトラキスジフェニルホスフィン酸チタンなどのホスフィン酸の金属塩、環状フェノキシホスファゼン、環状シアノフェノキシホスファゼンなどの、置換若しくは非置換のフェノキシ基または置換若しくは非置換のナフトキシ基を有する環状若しくは鎖状のホスファゼン系化合物、トリアリルホスフィン等が挙げられる。 By mix | blending a flame retardant, a flame retardance can be provided to the hardened | cured material of the photosensitive resin composition of this invention. A flame retardant is not specifically limited, A well-known thing can be used. Examples of the flame retardant include phosphorus element-containing compounds. Specific examples of the phosphorus element-containing compound include tris (chloroethyl) phosphate, tris (2,3-dichloropropyl) phosphate, tris (2-chloropropyl) phosphate, tris (2,3-bromopropyl) phosphate, tris (bromo). Halogenated phosphoric acid such as chloropropyl) phosphate, 2,3-dibromopropyl-2,3-chloropropyl phosphate, tris (tribromophenyl) phosphate, tris (dibromophenyl) phosphate, tris (tribromoneopentyl) phosphate Esters; non-halogen aliphatic phosphate esters such as trimethyl phosphate, triethyl phosphate, tributyl phosphate, trioctyl phosphate, tributoxyethyl phosphate; triphenyl phosphate Cresyl diphenyl phosphate, dicresyl phenyl phosphate, tricresyl phosphate, trixylenyl phosphate, xylenyl diphenyl phosphate, tris (isopropylphenyl) phosphate, isopropylphenyl diphenyl phosphate, diisopropylphenylphenyl phosphate, tris (trimethylphenyl) phosphate, Tris (t-butylphenyl) phosphate, hydroxyphenyl diphenyl phosphate, octyl diphenyl phosphate, 3-glycidyloxypropylene diphenylphosphine oxide, 3-glycidyloxydiphenylphosphine oxide, diphenylvinylphosphine oxide, 10- (2,5-dihydroxyphenyl) -10H-9-oxa-10-phosphafena Non-halogens such as entolen-10-oxide, 2- (9,10-dihydro-9-oxa-10-oxide-10-phosphaphenanthrene-10-yl) methylsuccinic acid bis- (2-hydroxyethyl) -ester polymer Aromatic phosphoric acid ester; aluminum trisdiethylphosphinate, aluminum diethylphosphinate, aluminum trismethylethylphosphinate, aluminum trisdiphenylphosphinate, zinc bisdiethylphosphinate, zinc bismethylethylphosphinate, zinc bisdiphenylphosphinate, Bisdiethylphosphinate titanyl, tetrakisdiethylphosphinate titanium, bismethylethylphosphinate titanyl, tetrakismethylethylphosphinate titanium, bisdiphenylphosphinate titani Cyclic or chain phosphazene compounds having a substituted or unsubstituted phenoxy group or a substituted or unsubstituted naphthoxy group, such as metal salts of phosphinic acids such as titanium tetrakisdiphenylphosphinate, cyclic phenoxyphosphazenes, and cyclic cyanophenoxyphosphazenes And triallylphosphine.
溶剤(非反応性希釈剤)は、感光性樹脂組成物の粘度や乾燥性を調節するためのものである。溶剤としては、特に限定されないが、例えば、メチルエチルケトン、シクロヘキサノン等のケトン類、トルエン、キシレン等の芳香族炭化水素類、メタノール、イソプロパノール、シクロヘキサノールなどのアルコール類、シクロヘキサン、メチルシクロヘキサン等の脂環式炭化水素類、石油エーテル、石油ナフサ等の石油系溶剤類、セロソルブ、ブチルセロソルブ等のセロソルブ類、カルビトール、ブチルカルビトール等のカルビトール類、酢酸エチル、酢酸ブチル、セロソルブアセテート、ブチルセロソルブアセテート、カルビトールアセテート、ブチルカルビトールアセテート、エチルジグリコールアセテート、ジエチレングリコールモノメチルエーテルアセテート、ジエチレングリコールモノエチルエーテルアセテート等のエステル類等を挙げることができる。これらは単独で使用してもよく、2種以上を混合して使用してもよい。 The solvent (non-reactive diluent) is for adjusting the viscosity and drying property of the photosensitive resin composition. The solvent is not particularly limited. For example, ketones such as methyl ethyl ketone and cyclohexanone, aromatic hydrocarbons such as toluene and xylene, alcohols such as methanol, isopropanol and cyclohexanol, and alicyclic such as cyclohexane and methylcyclohexane. Petroleum solvents such as hydrocarbons, petroleum ether, petroleum naphtha, cellosolves such as cellosolve and butylcellosolve, carbitols such as carbitol and butylcarbitol, ethyl acetate, butyl acetate, cellosolve acetate, butyl cellosolve acetate, carbitol Esters such as acetate, butyl carbitol acetate, ethyl diglycol acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate And the like can be given. These may be used alone or in combination of two or more.
各種添加剤には、ジシアンジアミド(DICY)及びその誘導体、メラミン及びその誘導体等の潜在性硬化剤、酸化防止剤、カップリング剤、硬化物に対して柔軟性を付与することに寄与するウレタン(メタ)アクリレート等が挙げられる。 Various additives include urethane (meta) that contributes to imparting flexibility to latent curing agents such as dicyandiamide (DICY) and its derivatives, melamine and its derivatives, antioxidants, coupling agents, and cured products. ) Acrylate and the like.
上記した本発明の感光性樹脂組成物の製造方法は、特定の方法に限定されず、例えば、上記各成分を所定割合で配合後、室温にて、三本ロール、ボールミル、サンドミル等の混練手段、またはスーパーミキサー、プラネタリーミキサー等の攪拌手段により混練または混合して製造することができる。また、前記混練または混合の前に、必要に応じて、予備混練または予備混合してもよい。 The method for producing the photosensitive resin composition of the present invention described above is not limited to a specific method. For example, after blending the above components at a predetermined ratio, at room temperature, a kneading means such as a three roll, ball mill, sand mill, or the like. Alternatively, it can be produced by kneading or mixing by a stirring means such as a super mixer or a planetary mixer. Further, prior to the kneading or mixing, if necessary, preliminary kneading or premixing may be performed.
次に、上記した本発明の感光性樹脂組成物の使用方法について説明する。ここでは、本発明の感光性樹脂組成物を、回路基板上にソルダーレジスト膜として塗工する場合を例にとって説明する。 Next, the usage method of the above-mentioned photosensitive resin composition of this invention is demonstrated. Here, the case where the photosensitive resin composition of the present invention is applied as a solder resist film on a circuit board will be described as an example.
上記のようにして得られた本発明の感光性樹脂組成物を、例えば、銅箔をエッチングして形成した回路パターンを有するプリント配線板上に、スクリーン印刷、スプレーコータ、バーコータ、アプリケータ、ブレードコータ、ナイフコータ、ロールコータ、グラビアコータ等、公知の塗工方法を用いて所望の厚さに塗布する。塗布後、感光性樹脂組成物に溶剤(非反応性希釈剤)を配合した場合には、感光性樹脂組成物中の溶剤を揮散させるために、60〜80℃程度の温度で15〜60分間程度加熱する予備乾燥を行ってタックフリーの塗膜を形成する。次に、感光性樹脂組成物上に、直描装置にて、直接、活性エネルギー線(例えば、紫外線)を所望のパターンに応じて照射して、該パターン状に塗膜を光硬化させる。次に、希アルカリ水溶液で非露光領域を除去することにより塗膜を現像する。上記現像方法には、例えば、スプレー法、シャワー法等が用いられ、希アルカリ水溶液としては、例えば、0.5〜5質量%の炭酸ナトリウム水溶液が挙げられる。次に、130〜170℃の熱風循環式の乾燥機等で20〜80分間ポストキュアを行うことにより、現像した塗膜を熱硬化させて、目的とするパターンを有する硬化塗膜をプリント配線板上に形成させることができる。 The photosensitive resin composition of the present invention obtained as described above, for example, on a printed wiring board having a circuit pattern formed by etching a copper foil, screen printing, spray coater, bar coater, applicator, blade The coating is applied to a desired thickness using a known coating method such as a coater, knife coater, roll coater or gravure coater. After application, when a solvent (non-reactive diluent) is added to the photosensitive resin composition, the solvent in the photosensitive resin composition is volatilized at a temperature of about 60 to 80 ° C. for 15 to 60 minutes. A tack-free coating film is formed by preliminary drying with heating to a certain degree. Next, an active energy ray (for example, ultraviolet rays) is directly irradiated on the photosensitive resin composition according to a desired pattern using a direct drawing apparatus, and the coating film is photocured in the pattern. Next, the coating film is developed by removing non-exposed areas with a dilute alkaline aqueous solution. For example, a spray method, a shower method, or the like is used as the developing method, and examples of the dilute alkaline aqueous solution include a 0.5 to 5% by mass sodium carbonate aqueous solution. Next, the developed coating film is thermally cured by performing post-cure for 20 to 80 minutes with a hot air circulation dryer or the like at 130 to 170 ° C., and a cured coating film having a target pattern is printed on the printed wiring board. Can be formed on top.
次に、本発明の実施例を説明するが、本発明はその趣旨を超えない限り、これらの例に限定されるものではない。 Next, examples of the present invention will be described. However, the present invention is not limited to these examples as long as the gist thereof is not exceeded.
実施例1〜12、比較例1〜3
下記表1に示す各成分を下記表1に示す配合割合にて配合し、3本ロールを用いて室温にて混合分散させて、実施例1〜12、比較例1〜3にて使用する感光性樹脂組成物を調製した。下記表1に示す各成分の配合量は、特に断りのない限り質量部を示し、また、配合量の空欄は、配合が0質量部であることを意味する。
Examples 1-12, Comparative Examples 1-3
Each component shown in the following Table 1 is blended in the blending ratio shown in the following Table 1, mixed and dispersed at room temperature using three rolls, and used in Examples 1 to 12 and Comparative Examples 1 to 3. A functional resin composition was prepared. Unless otherwise indicated, the compounding amount of each component shown in Table 1 below indicates parts by mass, and the blank of the compounding amount means that the compounding is 0 part by mass.
なお、表1中の各成分についての詳細は、以下の通りである。
(A)カルボキシル基含有感光性樹脂
・ZAR−2000:日本化薬(株)製(固形分65質量%、ジエチレングリコールモノエチルエーテルアセテート25質量%、ソルベントナフサ10質量%)。
・FLX−2089:日本化薬(株)製(固形分65質量%、ジエチレングリコールモノエチルエーテルアセテート35質量%)。
・ZCR−1569H:日本化薬(株)製(固形分65質量%、プロピレングリコールモノメチルエーテルアセテート35質量%)。
In addition, the detail about each component in Table 1 is as follows.
(A) Carboxy group-containing photosensitive resin ZAR-2000: manufactured by Nippon Kayaku Co., Ltd. (solid content 65% by mass, diethylene glycol monoethyl ether acetate 25% by mass, solvent naphtha 10% by mass).
-FLX-2089: Nippon Kayaku Co., Ltd. (solid content 65 mass%, diethylene glycol monoethyl ether acetate 35 mass%).
-ZCR-1569H: Nippon Kayaku Co., Ltd. product (solid content 65 mass%, propylene glycol monomethyl ether acetate 35 mass%).
合成樹脂A−1
撹拌機、還流冷却管を備えた500mLセパラブルフラスコに、窒素・空気(2:1)雰囲気下でジエチレングリコールモノエチルエーテルアセテート(以下「EDGAC」)86.45g、8−エチルオクタデカン二酸(岡村製油(株)製、SB−20)26.54g(6.3質量部)、ベヘニン酸45.35g(10.7質量部)、ステアリン酸9.71g(2.3質量部)、アクリル酸14.36g(3.4質量部)、トリフェニルホスフィン(TPP)0.65g(0.1質量部)、メトキシハイドロキノン(MEHQ)0.43g(0.1質量部)を仕込み、反応容器内に窒素・空気(2:1)を0.3mL/sec吹き込みながら、110℃で溶解するまで加熱撹拌した。別途、EDGAC溶媒59.8g中にビフェニルアラルキル型エポキシ樹脂(日本化薬(株)製、NC−3000、エポキシ当量265〜285g/eq)137.65g(32.6質量部)を80℃まで加熱して均一に溶解して上記フラスコ内に投入し、115℃にて15〜17時間、加熱撹拌させ、反応溶液の酸価が6mgKOH/g以下になるまで反応させた。この反応物に、さらに水素添加トリメリット酸無水物(三菱ガス化学(株)製、HTMAn)を42.23g(9.9質量部)加え空気雰囲気下100℃で2〜3時間撹拌した。酸無水物が消失したことを、FT−IR(赤外分光光度計)により確認した。これにより、上記表1に示す固形分65質量%、酸価85mgKOH/gの合成樹脂A−1を得た。
Synthetic resin A-1
In a 500 mL separable flask equipped with a stirrer and a reflux condenser, 86.45 g of diethylene glycol monoethyl ether acetate (hereinafter “EDGAC”), 8-ethyloctadecanedioic acid (Okamura Oil Co., Ltd.) in a nitrogen / air (2: 1) atmosphere. SB-20 (26.54 g, 6.3 parts by mass), behenic acid 45.35 g (10.7 parts by mass), stearic acid 9.71 g (2.3 parts by mass), and acrylic acid 14.4 g. 36 g (3.4 parts by mass), 0.65 g (0.1 parts by mass) of triphenylphosphine (TPP), and 0.43 g (0.1 parts by mass) of methoxyhydroquinone (MEHQ) were charged. While blowing air (2: 1) at 0.3 mL / sec, the mixture was heated and stirred until dissolved at 110 ° C. Separately, 137.65 g (32.6 parts by mass) of biphenylaralkyl type epoxy resin (manufactured by Nippon Kayaku Co., Ltd., NC-3000, epoxy equivalent of 265 to 285 g / eq) was heated to 80 ° C. in 59.8 g of EDGAC solvent. Then, the solution was uniformly dissolved and charged into the flask, heated and stirred at 115 ° C. for 15 to 17 hours, and reacted until the acid value of the reaction solution became 6 mgKOH / g or less. To this reaction product, 42.23 g (9.9 parts by mass) of hydrogenated trimellitic anhydride (manufactured by Mitsubishi Gas Chemical Co., Ltd., HTAn) was added and stirred at 100 ° C. for 2 to 3 hours in an air atmosphere. The disappearance of the acid anhydride was confirmed by FT-IR (infrared spectrophotometer). As a result, a synthetic resin A-1 having a solid content of 65% by mass and an acid value of 85 mgKOH / g shown in Table 1 was obtained.
(B)光重合開始剤
・NCI−831:ADEKA社製。
(B) Photopolymerization initiator, NCI-831: manufactured by ADEKA.
(C)エポキシ化合物
・EPICRON860:DIC社製。
(C) Epoxy compound / EPICRON 860: manufactured by DIC Corporation.
(D)着色剤
・デンカブラック:電気化学工業(株)製。
・リオノールブルー FG−7351:東洋インキ製造(株)製。
(D) Colorant / Denka Black: manufactured by Denki Kagaku Kogyo Co., Ltd.
-Lionol Blue FG-7351: manufactured by Toyo Ink Manufacturing Co., Ltd.
(B)成分以外の光重合開始剤
・OXE−02、Irgacure369、Irgacure907:BASF社製。
・chemcureDETX:日本シイベルヘグナー社製。
添加剤
・EBECRYL8405:ダイセル・オルネクス(株)製。
体質顔料
・ハイジライト H−42STV:昭和電工(株)製。
溶剤
・ジエチレングリコールモノエチルエーテルアセテート:三洋化成品(株)製。
消泡剤
・KS−66:信越化学工業(株)製。
難燃剤
エクソリットOP−935:クラリアントジャパン社製。
(B) Photopolymerization initiator other than the component OXE-02, Irgacure 369, Irgacure 907: manufactured by BASF Corporation.
* ChemcureDETX: manufactured by Nippon Shibel Hegner.
Additive • EBECRYL 8405: manufactured by Daicel Ornex Co., Ltd.
Extender pigment, Heidilite H-42STV: manufactured by Showa Denko K.K.
Solvent, diethylene glycol monoethyl ether acetate: manufactured by Sanyo Chemicals.
Antifoaming agent, KS-66: manufactured by Shin-Etsu Chemical Co., Ltd.
Flame retardant Exolit OP-935: manufactured by Clariant Japan.
試験片作製工程
基板(ガラスエポキシ基板、「FR4」、Cu厚み25μm)を、希硫酸(5質量%)により表面処理後、スクリーン印刷法にて、上記のように調製した実施例及び比較例の感光性樹脂組成物を、それぞれ塗布した。塗布後、BOX炉にて80℃で20分の予備乾燥を行った。予備乾燥後、塗膜上に、下記表2に示す直描露光機1〜3の露光条件にて、下記表2に示す所定波長の活性エネルギー線を所定量露光した。露光後、1質量%の炭酸ナトリウム水溶液を用いて、現像温度30℃、現像圧力0.2MPaのスプレー圧にて現像した。現像後、BOX炉にて150℃で60分のポストキュアを行うことで、基板上に硬化塗膜を形成した。硬化塗膜の厚みは、20〜23μmであった。
Test piece preparation process After the surface treatment of the substrate (glass epoxy substrate, “FR4”, Cu thickness 25 μm) with dilute sulfuric acid (5 mass%), the screen printing method and the examples prepared as described above and comparative examples Each photosensitive resin composition was applied. After coating, preliminary drying was performed at 80 ° C. for 20 minutes in a BOX furnace. After preliminary drying, a predetermined amount of active energy rays having a predetermined wavelength shown in the following Table 2 were exposed on the coating film under the exposure conditions of the direct drawing exposure machines 1 to 3 shown in the following Table 2. After the exposure, development was performed using a 1% by mass aqueous sodium carbonate solution at a development temperature of 30 ° C. and a development pressure of 0.2 MPa. After development, a cured coating film was formed on the substrate by post-curing at 150 ° C. for 60 minutes in a BOX furnace. The thickness of the cured coating film was 20-23 μm.
評価
(1)感度
上記試験片作製工程の予備乾燥工程まで行った基板に対し、感度測定用ステップタブレット(コダック社製、21段)を塗膜上に密着させ、このステップタブレットを通して、表2に示す直描露光機1〜3の露光条件にて照射したものをテストピ−スとした。このテストピースに、上記試験片作製工程と同様にして現像を行った。現像後の感度段数が100%残っている最大の段数を感度として評価した。段数が大きいほど感度が良好であることを示す。
Evaluation (1) Sensitivity Stepped tablets for sensitivity measurement (21 steps made by Kodak Co., Ltd.) are adhered to the coating film on the substrate that has been subjected to the preliminary drying step of the above-described test piece preparation step. What was irradiated on the exposure conditions of the direct drawing exposure machines 1-3 shown was made into the test piece. The test piece was developed in the same manner as in the test piece preparation step. The maximum number of stages with 100% remaining sensitivity after development was evaluated as sensitivity. The larger the number of steps, the better the sensitivity.
(2)解像性
ライン幅30μm〜200μmのパターンを持つフォトマスクを用いて露光し、硬化塗膜の厚みが40μmであること以外は、上記試験片作製工程に準じて感光性樹脂組成物を塗工した。作製した硬化塗膜について、ラインとして完全な形状で基板上に残存している最も細いライン幅(μm)を、目視にて観察し、解像性として評価した。
(2) Resolution The photosensitive resin composition was prepared according to the above test piece preparation step except that the photomask was exposed using a photomask having a pattern with a line width of 30 μm to 200 μm and the thickness of the cured coating film was 40 μm. Coated. About the produced cured coating film, the thinnest line width (micrometer) remaining on a board | substrate with a perfect shape as a line was observed visually, and it evaluated as resolution.
(3)電気絶縁性
基板を櫛形テストパターン(線幅100μm、線間100μm、ガラスエポキシ基板(板厚1.6mm、導体厚18μm))に変更して、上記試験片作製工程に準じて感光性樹脂組成物を塗工し、硬化塗膜を形成した。得られた試験片を、温度85℃、湿度85%の雰囲気の槽中で、直流50V印加して1000時間放置後、試験片を槽外に取り出し、HIGH RESISTANCE METER(Agilent社製)にて絶縁抵抗値(単位:Ω)を測定し、電気絶縁性を評価した。
(3) Electrical insulation The substrate is changed to a comb-shaped test pattern (line width 100 μm, line spacing 100 μm, glass epoxy substrate (plate thickness 1.6 mm, conductor thickness 18 μm)), and photosensitive according to the above test piece preparation process. The resin composition was applied to form a cured coating film. The obtained test piece was applied in a tank of 85 ° C. and 85% humidity and left to stand for 1000 hours by applying a direct current of 50 V. Then, the test piece was taken out of the tank and insulated with HIGH RESISTANCE METER (manufactured by Agilent). A resistance value (unit: Ω) was measured to evaluate electrical insulation.
評価結果を、下記表3に示す。 The evaluation results are shown in Table 3 below.
表3の実施例1〜12から、光重合開始剤として、上記一般式で表される化合物である(9−エチル−6−ニトロ−9H−カルバゾール−3−イル)(4−((1−メトキシプロパン−2−イル)オキシ)−2−メチルフェニル)メタノン O−アセチルオキスムを使用すると、露光量50〜100mJ/cm2 での直描露光機における露光であっても、電気絶縁性を損なうことなく、感度が4段以上に向上し、解像性が30〜60μmと、細いライン幅であっても、完全な形状のラインを得ることができた。また、実施例1、2、5、6、7から、(9−エチル−6−ニトロ−9H−カルバゾール−3−イル)(4−((1−メトキシプロパン−2−イル)オキシ)−2−メチルフェニル)メタノン O−アセチルオキスムが、カルボキシル基含有感光性樹脂100質量部(固形分)に対して、約0.5質量部含むと、約0.2質量部含む実施例3と比較して、感度がさらに向上し、同等以上の解像性が得られた。特に、波長365nm、385nm及び405nmの活性エネルギー線からなる露光、波長375nm及び405nmの活性エネルギー線からなる露光では、解像性もさらに向上した。また、実施例4、12から、(9−エチル−6−ニトロ−9H−カルバゾール−3−イル)(4−((1−メトキシプロパン−2−イル)オキシ)−2−メチルフェニル)メタノン O−アセチルオキスムが、カルボキシル基含有感光性樹脂100質量部(固形分)に対して、約2.0質量部含むと、他の実施例と比較して、さらに優れた感度と解像性が得られた。 From Examples 1 to 12 in Table 3, as the photopolymerization initiator, (9-ethyl-6-nitro-9H-carbazol-3-yl) (4-((1- with methoxypropan-2-yl) oxy) -2-methylphenyl) methanone O- acetyl Oki Sum, even exposure in direct drawing exposure machine with an exposure amount 50~100mJ / cm 2, an electrically insulating Without loss, the sensitivity was improved to four or more stages, and even with a thin line width of 30 to 60 μm, a perfectly shaped line could be obtained. Also, from Examples 1, 2, 5, 6, and 7, (9-ethyl-6-nitro-9H-carbazol-3-yl) (4-((1-methoxypropan-2-yl) oxy) -2 -Methylphenyl) methanone When O-acetyl oxime is contained in an amount of about 0.5 parts by mass with respect to 100 parts by mass (solid content) of the carboxyl group-containing photosensitive resin, it is compared with Example 3 containing about 0.2 parts by mass. As a result, the sensitivity was further improved, and the same or better resolution was obtained. In particular, in the exposure consisting of active energy rays with wavelengths of 365 nm, 385 nm and 405 nm and the exposure consisting of active energy rays with wavelengths of 375 nm and 405 nm, the resolution was further improved. Also, from Examples 4 and 12, (9-ethyl-6-nitro-9H-carbazol-3-yl) (4-((1-methoxypropan-2-yl) oxy) -2-methylphenyl) methanone O -When acetyl oxime contains about 2.0 mass parts with respect to 100 mass parts (solid content) of carboxyl group-containing photosensitive resin, compared with another Example, the further outstanding sensitivity and resolution will be. Obtained.
また、実施例1と実施例8、実施例5と実施例9、実施例6と実施例10、実施例7と実施例11の対比から、(9−エチル−6−ニトロ−9H−カルバゾール−3−イル)(4−((1−メトキシプロパン−2−イル)オキシ)−2−メチルフェニル)メタノン O−アセチルオキスムが、カルボキシル基含有感光性樹脂100質量部(固形分)に対して、約0.5質量部含むと、(B)成分以外の光重合開始剤をさらに配合しなくても、(B)成分以外の光重合開始剤をさらに配合した場合と同等の感度が得られた。また、実施例4と実施例12の対比から、(9−エチル−6−ニトロ−9H−カルバゾール−3−イル)(4−((1−メトキシプロパン−2−イル)オキシ)−2−メチルフェニル)メタノン O−アセチルオキスムが、カルボキシル基含有感光性樹脂100質量部(固形分)に対して、約2.0質量部含むと、(B)成分以外の光重合開始剤をさらに配合しなくても、(B)成分以外の光重合開始剤をさらに配合した場合と同等の感度と解像性が得られた。 Further, from the comparison of Example 1 and Example 8, Example 5 and Example 9, Example 6 and Example 10, Example 7 and Example 11, (9-ethyl-6-nitro-9H-carbazole- 3-yl) (4-((1-methoxypropan-2-yl) oxy) -2-methylphenyl) methanone O-acetyl oxime is based on 100 parts by mass (solid content) of a carboxyl group-containing photosensitive resin. When about 0.5 parts by mass is contained, the sensitivity equivalent to that when a photopolymerization initiator other than the component (B) is further blended can be obtained without further blending a photopolymerization initiator other than the component (B). It was. Further, from comparison between Example 4 and Example 12, (9-ethyl-6-nitro-9H-carbazol-3-yl) (4-((1-methoxypropan-2-yl) oxy) -2-methyl When phenyl) methanone O-acetyl oxime contains about 2.0 parts by mass with respect to 100 parts by mass (solid content) of the carboxyl group-containing photosensitive resin, a photopolymerization initiator other than the component (B) is further blended. Even without this, the same sensitivity and resolution as when a photopolymerization initiator other than the component (B) was further blended were obtained.
また、表3から、波長365nm、385nm及び405nmの活性エネルギー線からなる露光では、露光量が50mJ/cm2に低減されても、他の波長の活性エネルギー線における露光量70〜100mJ/cm2と同等以上の感度と解像性が得られた。従って、波長365nm、385nm及び405nmの活性エネルギー線を用いると、生産性がより向上することが判明した。 Further, from Table 3, in exposure composed of active energy rays with wavelengths of 365 nm, 385 nm, and 405 nm, even if the exposure dose is reduced to 50 mJ / cm 2 , the exposure dose with active energy rays of other wavelengths is 70 to 100 mJ / cm 2 Sensitivity and resolution equivalent to or better than the above were obtained. Therefore, it has been found that the use of active energy rays having wavelengths of 365 nm, 385 nm, and 405 nm further improves productivity.
一方、比較例2、3から、上記一般式で表される化合物ではない、1分子中に1つのカルバゾール骨格を有するオキシムエステル系光重合開始剤を使用すると、解像性が80μm以上と、細いライン幅では、完全な形状のラインを得ることができなかった。また、比較例1から、上記一般式で表される光重合開始剤を配合しないと、感度が1段以下、解像性が200μm以上となり、感度、解像性とも得られなかった。 On the other hand, from Comparative Examples 2 and 3, when using an oxime ester photopolymerization initiator having one carbazole skeleton in one molecule, which is not a compound represented by the above general formula, the resolution is as thin as 80 μm or more. With the line width, a complete line could not be obtained. Further, from Comparative Example 1, when the photopolymerization initiator represented by the above general formula was not blended, the sensitivity was 1 step or less, the resolution was 200 μm or more, and neither sensitivity nor resolution was obtained.
本発明の感光性樹脂組成物は、露光の際、塗膜の光重合反応が従来よりも促進され、塗膜の深部までより十分な光硬化が得られるので、特に、直描露光にて塗膜を光硬化する分野で利用価値が高い。 In the photosensitive resin composition of the present invention, the photopolymerization reaction of the coating film is promoted more than before, and more sufficient photocuring can be obtained up to the deep part of the coating film. High utility value in the field of photocuring films.
Claims (4)
前記(B)光重合開始剤が、下記一般式
前記(D)着色剤が、カーボンブラックとフタロシアニン化合物とを含むことを特徴とする直描露光用感光性樹脂組成物。 (A) a photosensitive resin composition for direct exposure comprising a carboxyl group-containing photosensitive resin, (B) a photopolymerization initiator, (C) an epoxy compound, and (D) a colorant,
The (B) photopolymerization initiator has the following general formula
The photosensitive resin composition for direct drawing exposure, wherein the colorant (D) contains carbon black and a phthalocyanine compound .
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| JP6789193B2 (en) * | 2017-08-09 | 2020-11-25 | 太陽インキ製造株式会社 | Photosensitive resin compositions, dry films, cured products, and printed wiring boards |
| JP6596550B2 (en) * | 2017-09-08 | 2019-10-23 | 株式会社タムラ製作所 | Photosensitive resin composition, dry film coated with photosensitive resin composition, and printed wiring board having photocured film of photosensitive resin composition |
| JP6916831B2 (en) * | 2018-04-27 | 2021-08-11 | 株式会社タムラ製作所 | Photosensitive resin composition |
| JP6781216B2 (en) * | 2018-08-30 | 2020-11-04 | 株式会社タムラ製作所 | Photosensitive resin composition |
| JP7281263B2 (en) * | 2018-09-27 | 2023-05-25 | 味の素株式会社 | Resin composition, photosensitive film, photosensitive film with support, printed wiring board and semiconductor device |
| JP7313136B2 (en) * | 2018-11-29 | 2023-07-24 | 東京応化工業株式会社 | Photosensitive resin composition, method for producing patterned cured film, and patterned cured film |
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| TWI296738B (en) * | 2001-03-29 | 2008-05-11 | Hitachi Chemical Co Ltd | |
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