JP6422197B2 - Method for manufacturing a microchemical chip - Google Patents

Description

  The present invention relates to a microchemical chip used by attaching to a microanalyzer that chemically synthesizes a trace amount of a useful substance such as a biocomponent that exhibits a pharmacological action, or a device that analyzes a biocomponent using a biological sample as a test object. .

  Using a test sample that is a biological specimen such as blood or urine in a minute amount of μl, and utilizing the specific substrate selectivity of the enzyme, the amount of the enzyme reaction that acts on the substrate in the specimen and its base mass are determined as the enzyme or substrate. A microbiochip is used for quantification based on the degree of coloring by a reagent that develops color. In addition, an enzyme-containing membrane is used to convert the amount of enzyme reaction into an electrical signal with an electrode to quantify the substrate mass, DNA extraction and its polymerase chain reaction (PCR) amplification, ion concentration measurement, nucleic acid, sugar A microreactor chip is used when microsynthesis of protein or peptide is performed on the order of μM.

  These microchemical chips such as microbiochips and microreactor chips have groove-shaped micro-channels as reaction channels for pressurizing and flowing samples and reagents to mix, react, separate, and detect them. Yes. A conventional microchemical chip has a fineness of several tens to several hundreds of μm on a stainless steel base, a silicon base, a quartz base, an inorganic base that is a glass base, or an organic base that is a resin base or a rubber base. The flow path is formed by cutting or etching.

  Micro chemical chips formed of stainless steel base, silicon base or quartz base are hard to be deformed even when the bases are joined together. It cannot be mass-produced, is expensive, and lacks versatility. A microchemical chip formed of a glass substrate is coated with a metal such as chrome and a photoresist sequentially on the surface of the glass substrate, and after exposing the photoresist to a microchannel pattern, It has to go through troublesome processes such as resist development, chemical etching with hydrofluoric acid, and removal of photoresist, and it is difficult to precisely form a fine channel, which is complicated and unsuitable for mass production.

  On the other hand, a microchemical chip formed of an organic substrate is formed of a highly transparent plastic resin as disclosed in Patent Document 1. Since a resin base material and a rubber base material are easy to mold and cut, a microchemical chip formed by sticking them with an adhesive or heat-sealing them is suitable for mass production. In particular, when it is formed of a transparent resin substrate, it is convenient for optical system analysis.

  A microchemical chip formed with an organic substrate is resistant to chemical degradation when using a water-soluble specimen or a reagent such as a strong acid such as hydrofluoric acid that dissolves metals or a water-soluble drug. Stable. However, the bonding strength is low because the resin sheet or rubber sheet in which the channel is formed is affixed or heat-sealed with an adhesive, and when the specimen or reagent flows through the channel at a high pressure, The substrate is unable to withstand pressure, peels off and is easily damaged, and is physically weak. Even if a sample or reagent is fed into a finely branched flow path with a complicated pattern shape at a low pressure that does not damage the microchip, it is difficult to reliably reach the end of the flow path. A microchemical chip made by pasting or heat-sealing a transparent resin sheet with a flow path attached with an adhesive, the adhesive protrudes into the flow path or has a refractive index due to the presence of adhesive or overheating. It is difficult to ensure uniform transparency on the flow path, which is important for precise optical system analysis by causing fluctuations, thermal deformation and distortion.

JP 2006-218611 A

  The present invention has been made to solve the above-mentioned problems, and a fine flow path for flowing a precious sample such as a small amount of a biological sample or a thin and small amount of a reagent is reliably formed. Even if pressurized and flowed at low or high temperature, it does not break and can be accurately and reliably sent to the flow path as desired. Analyzing useful substances such as biocomponents in the sample accurately and simply in a short period of time It is an object of the present invention to provide a simple and small-sized microchemical chip that can be manufactured and reacted, and can be manufactured in a large amount and uniformly with a high yield.

The method for producing a microchemical chip according to claim 1, which has been made in order to achieve the above object, comprises a flow path for applying a chemical reaction by pressurizing a flow sample selected from a specimen and a reagent. A flow path forming step for forming a fluid sample transfer site and a fluid sample transfer site corresponding to each of the plurality of rubber sheets sandwiched between the base material sheets, metal, ceramics, glass, and resin An opening step for forming a hole for introducing the fluid sample into the flow path and a hole for discharging the fluid sample that has been poured into the base sheet selected from the above-mentioned plurality of rubber sheets, N-2- (aminoethyl) -3-aminopropylmethyldimethoxysilane, N-2- (aminoethyl) -3- Aminopropyl Silane coupling agent having amino group and alkoxy group selected from methoxysilane, N-2- (aminoethyl) -3-aminopropyltriethoxysilane, 3-aminopropyltrimethoxysilane, and 3-aminopropyltriethoxysilane The substrate sheet is dried after being treated, and is treated again with the silane coupling agent and dried by the chemical bonding mediated by the silane coupling agent on the front and back surfaces thereof, thereby out of the region of the flow path. In the method, a microchemical chip is manufactured by having a bonding step of bonding to the base sheet.
A method for producing a microchemical chip according to claim 2 is the method according to claim 1, wherein the rubber sheet is sandwiched between the base material sheets under reduced pressure, and the base is bonded by the chemical bond. It is characterized by being bonded to a material sheet.
The method for producing a microchemical chip according to claim 3 is the method according to claim 1, wherein the rubber sheet is sandwiched between the base material sheets under reduced pressure and / or pressure, and the chemical bonding is performed. To be bonded to the base sheet.
The method for producing a microchemical chip according to claim 4 is the method according to claim 1, wherein the rubber sheet is sandwiched between the base material sheets under reduced pressure, and then under pressure and / or heating. It is characterized by being sandwiched below and bonded to the base sheet by the chemical bond.
The method for producing a microchemical chip according to claim 5 is the method according to claim 1, wherein the rubber sheet formed of silicone rubber or non-silicone rubber and the base sheet are joined together. At least one of the surfaces is activated by corona discharge treatment, plasma treatment and / or ultraviolet irradiation treatment, and bonded by the chemical bond.
Microchemical chip, a plurality of rubber sheet sandwiched between the base sheet, are laminated, passage of chemically reacting pouring pressurized flow sample selected from a sample and reagent extends through the rubber sheet , metal, ceramics, glass, and the front and back surfaces with the rubber sheet is sandwiched between the base sheet selected from the resin, N-2- (aminoethyl) -3-aminopropyl methyl dimethoxysilane, N-2 Selected from-(aminoethyl) -3-aminopropyltrimethoxysilane, N-2- (aminoethyl) -3-aminopropyltriethoxysilane, 3-aminopropyltrimethoxysilane, and 3-aminopropyltriethoxysilane Bonded to the base sheet outside the region of the flow path by chemical bonding via at least one silane coupling agent having an amino group and an alkoxy group , A hole for injecting the fluid sample and a hole for discharging the fluid sample that has been poured are opened in the base sheet, and each of the plurality of rubber sheets has a fluid sample transfer site and a fluid sample import site corresponding thereto. door may be provided.

In this microchemical chip, for example, the rubber sheet and the base sheet are joined by the chemical bond under reduced pressure and / or pressure .

The microchemical chip, for example, with said rubber sheet and the substrate sheet, the chemical bond between the reduced pressure and subsequent pressure and / or under heating to, those that are joined.

The microchemical chip, for example, the rubber sheet and / or the bonding surface of the substrate sheet is what is the surface being treated activated.

In this microchemical chip, for example, a plurality of the rubber sheets sandwiched between the base sheets are laminated, and the fluid sample transfer site and the fluid sample transfer site respectively provided on the plurality of rubber sheets correspond to each other. to the substrate sheet is for insole sandwiched rubber sheet the plurality of in position, in which may flow sample transfer holes may have a check valve is provided.

The microchemical chip, for example, those outermost of the base sheet is in the disable omissions a flowable sample is sandwiched a plate-shaped holder is fixed by the rubber sheet.

The microchemical chip, for example, the rubber sheet, those which are formed of silicone rubber.

In this microchemical chip, for example, the rubber sheet formed of silicone rubber and the base sheet are activated by corona discharge treatment, plasma treatment and / or ultraviolet irradiation treatment at at least one of their joint surfaces. it is, by chemical bonds directly, those that are joined.

This microchemical chip has, for example , a corona discharge treatment, a plasma treatment and / or an ultraviolet irradiation at at least one of the joining surfaces of the rubber sheet formed of silicone rubber or non-silicone rubber and the base sheet. process has been activated by, the chemical coupling through the silane coupling agent having an amino group and / or alkoxy groups, are those that are joined.

The microchemical chip, for example, the substrate sheet are those polycarbonate resin, Ru least one Tei formed in said resin selected from the cycloolefin resin, polyethylene terephthalate resin, an acrylic resin, and epoxy resin.

The microchemical chip, for example, the rubber sheet is one that is coated with the wall surface of at least said channel.

  The microchemical chip of the present invention has a strong adhesion by direct or indirect chemical intermolecular bonding through one molecule of a silane coupling agent, and the rubber sheet and the base sheet are outside the flow path region of the rubber sheet. It is firmly joined at the joint surface. For this reason, a minute flow path that allows a precious sample such as a small amount of biological sample or a dilute and small amount of reagent to flow under pressure without leaking is reliably formed.

  This microchemical chip has a fine flow path with a width of 0.5 μm to 5 mm in a linear shape combining a rubber sheet with a straight line or a curved line or a complicated pattern shape that is enlarged or converged or branched in the middle or at the end. Precisely formed. Even if such a fine flow path is provided, the fluid sheet, which is a specimen or reagent, is pressurized and sent, and the rubber sheet and the base sheet are not peeled off when flowing through the flow path. The microchemical chip is not damaged.

  This microchemical chip has a temperature of about 5 to 5 atm. A liquid or gaseous fluid such as a sample or reagent is fed into a fine channel under ice-cooling to about 80 ° C., generally 20 Even if the specimen or reagent is fed while repeating heating and cooling in a low to high temperature range of about -80 ° C, the flow path is not damaged by the elasticity of the rubber sheet.

  According to this microchemical chip, a specimen or a reagent can be reliably and accurately fed into a desired flow path. As a result, useful substances such as biocomponents in the specimen can be analyzed and reacted in a short period of time accurately and simply.

  This microchemical chip can make the flow path of the rubber sheet fine so as to suppress contact between the specimen or reagent and the rubber sheet as much as possible, and to prevent contamination or adsorption of the specimen or reagent.

  When such a microchemical chip is used in a disposable manner, there is no fear of contamination due to mixing of another specimen or reagent, and a reliable result can be obtained.

  This microchemical chip has an external shape of several millimeters to several tens of centimeters square and is extremely small and has a simple structure. This microchemical chip has a large number of serial, parallel, or branched flow paths even in a small size, and can be provided with a large number of inlets and outlets so as to be multi-functional through a plurality of reaction processes in series or in parallel. Therefore, a plurality of types of qualitative / quantitative analyzes can be quickly performed not only indoors but also outdoors using a portable analyzer without using a large analyzer. Furthermore, the amount of analysis reagents and reaction reagents used in the microchemical chip is extremely small, and the amount of waste liquid is significantly reduced compared to analysis and reaction in flasks and test tubes, contributing to environmental conservation.

  According to the method for producing a microchemical chip of the present invention, a fine channel can be formed on a rubber sheet by a simple method such as laser processing without developing or etching using a photoresist. The rubber sheet and the base material sheet directly form a chemical intermolecular bond that is an ether bond by contact outside the flow path region, or through one molecule by application, spraying, or immersion of a silane coupling agent. It forms a chemical intermolecular bond that is an interaction by indirect covalent bond, hydrogen bond and / or electrostatic attraction, and it is simply and much stronger than an adhesive. Such molecular adhesion does not require heating at such a high temperature as to cause the thermoplastic resin to be thermally fused, and is sufficiently induced if heated for a short time at a temperature lower than the thermal fusion temperature. Therefore, there is no refractive index variation or thermal deformation / distortion that hinders the accuracy of optical analysis.

  This manufacturing method is very simple, and can produce a high-quality and homogeneous microchemical chip in a short process and in a large amount at a low yield with a high yield.

It is a typical perspective view which shows the middle of manufacture of the microchemical chip to which this invention is applied. It is a typical perspective view which shows the middle of manufacture of another microchemical chip to which this invention is applied. It is a perspective view which shows the use condition of the microchemical chip to which this invention is applied.

  Hereinafter, examples of preferable modes for carrying out the present invention will be described in detail, but the scope of the present invention is not limited to these modes.

  An example of a microchemical chip 1 to which the present invention is applied is a rubber sheet between a metal substrate sheet 10 for a cover and a metal substrate sheet 30 for supporting a bottom surface as shown in FIG. 20 is the flexible one superimposed.

  A groove-like channel 26 is formed through the front and back surfaces of the rubber sheet 20 to pressurize and flow a fluid sample, which is a liquid or gaseous specimen or reagent, to cause a chemical reaction. The flow path 26 extends from the flow sample injection sites 21a and 21b, which are the starting end, and merges downstream, and branches into a tributary extending from the flow sample discharge site 22a and a main flow extending to the flow sample discharge sites 22b and 22c. Then, the main stream extends and branches to the flow sample discharge portions 22b and 22c which are the end points at the downstream end. The surfaces of the upper surface 24 and the lower surface 25 of the rubber sheet 20 are activated outside the region of the flow path 26.

  In the cover base sheet 10 of the same size that overlaps the rubber sheet 20, the fluid sample injection holes 11a and 11b are respectively provided at positions corresponding to the fluid sample injection sites 21a and 21b and the fluid sample discharge sites 22a, 22b, and 22c. And the fluid sample discharge holes 12a, 12b, and 12c are open. The lower surface 15 of the cover base sheet 10 facing the rubber sheet 20 has its surface activated outside the region of the flow sample injection holes 11a and 11b and the flow sample discharge holes 12a, 12b and 12c.

  The entire upper surface 34 of the base sheet 30 for supporting the bottom surface facing the rubber sheet 20 is activated.

  On the surface of the base sheet 10/30 and the rubber sheet 20, activated groups such as hydroxyl groups that are activated or inherently dehydrated to form ether bonds, which are strong covalent bonds, or silane A new covalent bond is generated through a plurality of functional groups in the molecule of the coupling agent, and both sheets are directly bonded chemically.

  The rubber sheet 20 may be formed of any silicone rubber or non-silicone rubber. Specifically, the rubber sheet 20 is mainly composed of peroxide-crosslinked silicone rubber, addition-crosslinked silicone rubber, silicone rubber exemplified by condensation-crosslinked silicone rubber, and a co-blend of these silicone rubber and olefin rubber. It is a silicone rubber elastic sheet produced by putting the illustrated three-dimensional silicone rubber or non-silicone rubber into a molding die or the like and then cross-linking as necessary. These rubber materials have an average number molecular weight of 10,000 to 1,000,000.

  The peroxide-crosslinked silicone rubber as the material of the rubber sheet 20 is not particularly limited as long as it is synthesized using a silicone raw material compound that can be crosslinked with a peroxide-based crosslinking agent. Specifically, polydimethylsiloxane, vinyl Methylsiloxane / polydimethylsiloxane copolymer, vinyl terminated polydimethylsiloxane, vinyl terminated diphenylsiloxane / polydimethylsiloxane copolymer, vinyl terminated diethylsiloxane / polydimethylsiloxane copolymer, vinyl terminated trifluoropropylmethylsiloxane / polydimethylsiloxane copolymer, vinyl terminated poly Phenylmethylsiloxane, vinylmethylsiloxane / dimethylsiloxane copolymer, trimethylsiloxane-terminated dimethylsiloxane / vinylmethylsiloxane copolymer Limmer, trimethylsiloxane terminated dimethylsiloxane / vinylmethylsiloxane / diphenylsiloxane copolymer, trimethylsiloxane terminated dimethylsiloxane / vinylmethylsiloxane / ditrifluoropropylmethylsiloxane copolymer, trimethylsiloxane terminated polyvinylmethylsiloxane, methacryloxypropyl terminated poly Examples include dimethylsiloxane, acryloxypropyl group-terminated polydimethylsiloxane, (methacryloxypropyl) methylsiloxane / dimethylsiloxane copolymer, and (acryloxypropyl) methylsiloxane / dimethylsiloxane copolymer.

  Examples of the peroxide-based crosslinking agent to be coexisted include ketone peroxides, diacyl peroxides, hydroperoxides, dialkyl peroxides, peroxyketals, alkyl peresters, and percarbonates. Include ketone peroxide, peroxyketal, hydroperoxide, dialkyl peroxide, peroxycarbonate, peroxy ester, benzoyl peroxide, dicumyl peroxide, dibenzoyl peroxide, t-butyl hydroperoxide, di-t-butyl Hydroperoxide, di (dicyclobenzoyl) peroxide, 2,5-dimethyl-2,5bis (t-butylperoxy) hexane, 2,5-dimethyl-2,5bis (t-butylperoxy) Xing, benzophenone, Mihiraaketon, dimethylaminobenzoic acid ethyl ester, benzoin ethyl ether.

  The amount of the peroxide-based crosslinking agent used is appropriately selected according to the type of silicone rubber obtained, the properties of the rubber sheet 20 molded with the silicone rubber, and the properties of the silane coupling agent used as necessary. However, it is preferable that 0.01 to 10 parts by mass, preferably 0.1 to 2 parts by mass is used with respect to 100 parts by mass of the silicone rubber. If it is less than this range, the crosslinking degree is too low to be used as silicone rubber. On the other hand, if the amount is larger than this range, the degree of crosslinking is too high and the elasticity of the silicone rubber is reduced.

The addition-type silicone rubber as the material of the rubber sheet 20 includes vinylmethylsiloxane / polydimethylsiloxane copolymer, vinyl-terminated polydimethylsiloxane, vinyl-terminated diphenylsiloxane / polydimethylsiloxane copolymer, vinyl-terminated diethylsiloxane / polysiloxane synthesized in the presence of Pt catalyst. Dimethylsiloxane copolymer, vinyl-terminated trifluoropropylmethylsiloxane / polydimethylsiloxane copolymer, vinyl-terminated polyphenylmethylsiloxane, vinylmethylsiloxane / dimethylsiloxane copolymer, trimethylsiloxane group-terminated dimethylsiloxane / vinylmethylsiloxane / diphenylsiloxane copolymer, trimethylsiloxane group Terminal dimethylsiloxane / vinylmethylsiloxane / ditrifluoropropylmethylsilane Xylene copolymer, vinyl group-containing polysiloxane such as trimethylsiloxane group-terminated polyvinylmethylsiloxane, and H-terminated polysiloxane, methyl Hsiloxane / dimethylsiloxane copolymer, polymethylHsiloxane, polyethylHsiloxane, H-terminated polyphenyl (dimethylHsiloxy) siloxane H group-containing polysiloxane compositions exemplified by methyl H siloxane / phenyl methyl siloxane copolymer, methyl H siloxane / octyl methyl siloxane copolymer,
Amino groups exemplified by aminopropyl-terminated polydimethylsiloxane, aminopropylmethylsiloxane / dimethylsiloxane copolymer, aminoethylaminoisobutylmethylsiloxane / dimethylsiloxane copolymer, aminoethylaminopropylmethoxysiloxane / dimethylsiloxane copolymer, dimethylamino-terminated polydimethylsiloxane Containing polysiloxane, epoxypropyl-terminated polydimethylsiloxane, epoxy group-containing polysiloxane exemplified by (epoxycyclohexylethyl) methylsiloxane / dimethylsiloxane copolymer, acid anhydride group containing oxalic anhydride-terminated polydimethylsiloxane Isocyanates such as polysiloxane and toluyl diisocyanate, 1,6-hexamethylene diisocyanate It is obtained from the composition of the group containing compounds.

  The processing conditions for producing the rubber sheet 20 from these compositions vary depending on the type and characteristics of the addition reaction, and therefore cannot be uniquely determined, but generally the heating is performed at 0 to 200 ° C. for 1 minute to 24 hours. It is. Thereby, an addition-type silicone rubber is obtained as the rubber sheet 20. When the physical properties of the silicone rubber are better under low temperature processing conditions, the reaction time becomes longer. When productivity faster than physical properties is required, the processing is performed at a high temperature for a short time. When machining must be performed within a certain period of time depending on the production process and work environment, the machining temperature is set to a relatively high temperature within the above range in accordance with the desired machining time.

Condensation type silicone rubber as the material of the rubber sheet 20 is made of silanol-terminated polydimethylsiloxane, silanol-terminated polydiphenylsiloxane, silanol-terminated polytrifluoromethylsiloxane, silanol-terminated diphenylsiloxane / dimethylsiloxane copolymer synthesized in the presence of a tin-based catalyst. A composition of a single condensation component comprising a silanol group-terminated polysiloxane exemplified by
These silanol-terminated polysiloxanes, tetraacetoxysilane, triacetoxymethylsilane, di-t-butoxydiacetoxysilane, vinyltriacetoxysilane, tetraethoxysilane, trienoxymethylsilane, bis (triethoxysilyl) ethane, tetra -N-propoxysilane, vinyltrimethoxysilane, methyltris (methylethylketoxime) silane, vinyltris (methylethylketoxyimino) silane, vinyltriisopropenooxysilane, triacetoxymethylsilane, tri (ethylmethyl) oximemethylsilane, bis ( N-methylbenzoamido) ethoxymethylsilane, tris (cyclohexylamino) methylsilane, triacetamidomethylsilane, tridimethylaminomethylsilane The composition of the agent,
The silanol group-terminated polysiloxane is obtained from a composition of a terminal block polysiloxane exemplified by chloro-terminated polydimethylsiloxane, diacetoxymethyl-terminated polydimethylsiloxane, and terminal polysiloxane.

  The processing conditions for preparing the condensation-type silicone rubber from these compositions vary depending on the type and characteristics of the condensation reaction, and therefore cannot be uniquely determined, but in general, heating at 0 to 100 ° C. for 10 minutes to 24 hours. Is. Thereby, a condensation type silicone rubber is obtained as the rubber sheet 20. When the physical properties of the silicone rubber are better under low temperature processing conditions, the reaction time becomes longer. When productivity faster than physical properties is required, the processing is performed at a high temperature for a short time. When machining must be performed within a certain period of time depending on the production process and work environment, the machining temperature is set to a relatively high temperature within the above range in accordance with the desired machining time.

  The olefin rubber used in the co-blend of silicone rubber and olefin rubber of the rubber sheet 20 is 1,4-cis butadiene rubber, isoprene rubber, styrene / butadiene copolymer rubber, polybutene rubber, polyisobutylene rubber, Examples include ethylene / propylene rubber, ethylene-propylene-diene rubber, chlorinated ethylene propylene rubber, and chlorinated butyl rubber.

  As the non-silicone rubber of the rubber sheet 20, natural rubber, 1,4-cisbutadiene rubber, isoprene rubber, polychloroprene, styrene / butadiene copolymer rubber, hydrogenated styrene / butadiene copolymer rubber, acrylonitrile / butadiene copolymer Rubber, hydrogenated acrylonitrile / butadiene copolymer rubber, polybutene rubber, polyisobutylene rubber, ethylene / propylene rubber, ethylene-propylene-diene rubber, ethylene oxide-epichlorohydrin copolymer rubber, chlorinated polyethylene rubber, chlorsulfonated Polyethylene rubber, alkylated chlorosulfonated polyethylene rubber, chloroprene rubber, chlorinated acrylic rubber, brominated acrylic rubber, fluoro rubber, epichlorohydrin and its copolymer rubber, chlorinated ethylene propylene rubber , Chlorinated butyl rubber, brominated butyl rubber, homopolymer rubbers such as tetrafluoroethylene, hexafluoropropylene, vinylidene fluoride and tetrafluoroethylene, and their binary and terpolymer rubbers, ethylene / tetrafluoroethylene copolymer Polymerized rubber, propylene / tetrafluoroethylene copolymer rubber, ethylene acrylic rubber, epoxy rubber, urethane rubber, and a mixture of raw rubber materials exemplified by linear polymers such as unsaturated elastomers at both terminals Is mentioned. These may be used alone or in combination.

  The material for the rubber sheet 20 is preferably silicone rubber.

  The flow path 26 of the rubber sheet 20 has a width of 0.5 μm to 5 mm, preferably 10 to 1000 μm, and the shape thereof is not particularly limited, and may be a continuous line and / or a branched line, either a straight line or a curved line. A single or a plurality of them may be provided in parallel. The thickness of the rubber sheet 20 is preferably 5 to 100 μm. Since the flow path 26 is narrow and the thickness of the rubber sheet 20 is thin, the contact area between the specimen and the reagent and the rubber sheet can be minimized, and the specimen and the reagent due to leakage of the rubber component from the rubber sheet can be suppressed. Contamination and adsorption to rubber components can be prevented. The rubber sheet 20 has a non-reactive resin, for example, a fluororesin such as polytetrafluoroethylene resin, 2-methacryloyloxyethyl, so that at least the wall surface 27 of the flow path 26 does not contaminate or adsorb the specimen or reagent. When coated or vapor-deposited with a phosphoric resin such as phosphorylcholine (MPC) polymer, paraxylylene resin such as parylene, or with a non-reactive inorganic substance such as titanium dioxide or silicon dioxide, a rubber sheet And contact with the specimen or reagent can be completely avoided, so that contamination and adsorption of the specimen and reagent can be further prevented.

  The base sheet 10/30 is formed of ceramics, glass, or resin in addition to metal, and may be formed in a single plate shape or thin layer shape, or may be laminated. The substrate sheets 10 and 30 are relatively stable with respect to the specimen and the reagent, but it is preferable that the portion in contact with the specimen and the reagent is formed of resin, coated, or laminated.

  Metals constituting the base sheet 10/30 are gold, silver, copper, iron, cobalt, silicone, lead, manganese, tungsten, tantalum, platinum, cadmium, tin, palladium, nickel, chromium, titanium, zinc, aluminum, magnesium And the metals exemplified by (2), binary, ternary and multicomponent alloys of these metals.

  Ceramics constituting the base sheet 10/30 are silver, copper, iron, cobalt, silicone, lead, manganese, tungsten, tantalum, platinum, cadmium, tin, palladium, nickel, chromium, indium, titanium, zinc, calcium, barium. And oxides, nitrides, and carbides of metals such as aluminum, magnesium, sodium, and potassium, and simple substances or composites thereof.

  Examples of the glass forming the base sheet 10 or 30 include quartz, borosilicate glass, and alkali-free glass.

  The resin forming the base sheet 10/30 is polycarbonate resin, cycloolefin resin, acrylic resin, epoxy resin, polyethylene terephthalate resin, polybutene terephthalate resin, cellulose and its derivatives, hydroxyethyl cellulose, starch, cellulose diacetate, surface ken Vinyl acetate resin, low density polyethylene, high density polyethylene, i-polypropylene, petroleum resin, polystyrene, s-polystyrene, chroman indene resin, terpene resin, styrene divinylbenzene copolymer, ABS resin, polymethyl acrylate, Polyethyl acrylate, polyacrylonitrile, polymethyl methacrylate, polyethyl methacrylate, polycyanoacrylate, polyvinyl acetate, polyvinyl alcohol, polyvinyl formal, polymer Vinyl acetal, polyvinyl chloride, vinyl chloride / vinyl acetate copolymer, vinyl chloride / ethylene copolymer, polyvinylidene fluoride, vinylidene fluoride / ethylene copolymer, vinylidene fluoride / propylene copolymer, 1,4- Transpolybutadiene, polyoxymethylene, polyethylene glycol, polypropylene glycol, phenol / formalin resin, cresol / formalin resin, resorcin resin, melamine resin, xylene resin, toluene resin, glyphal resin, modified glyphal resin, unsaturated polyester resin, allyl ester Resin, 6-nylon, 6,6-nylon, 6,10-nylon, polyimide, polyamide, polybenzimidazole, polyamideimide, silicon resin, silicone rubber, silicone resin, furan resin, Polyurethane resin, polyphenylene oxide, polydimethylphenylene oxide, polyphenylene oxide or polydimethylphenylene oxide and triallyl isocyanuric blend, (polyphenylene oxide or polydimethylphenylene oxide, triallyl isocyanuric, peroxide) blend, polyxylene, polyphenylene sulfide (PPS), polysulfone (PSF), polyethersulfone (PES), polyetheretherketone (PEEK), polyimide (PPI, Kapton), polytetrafluoroethylene (PTFE), liquid crystal resin, Kevlar fiber, carbon fiber and more Examples thereof include a polymer material exemplified by a blend of materials and a crosslinked product thereof.

  In the case of artificially activating the joint surface between the base sheet 10/30 and the rubber sheet 20, for example, it is activated by performing activation treatment of corona discharge treatment, plasma treatment, and ultraviolet irradiation treatment.

  The metal, ceramic or glass base sheet 10/30 and the silicone rubber rubber sheet 20 are firmly joined by an ether bond formed by dehydration of active groups such as hydroxyl groups generated by activation treatment. doing. When the active group such as a hydroxyl group is sufficiently exposed in advance so that an ether bond can be formed only by laminating the two, the activation treatment may not be performed.

  The example in which the base sheet 10/30 and the rubber sheet 20 are directly bonded via an ether bond has been shown, but indirectly through a chemical bond such as a covalent bond or a hydrogen bond via a silane coupling agent. May be joined. In this case, one molecule of the silane coupling agent can be interposed between the base sheet 10 or 30 and the rubber sheet 20 to form a chemical bond. For example, a rubber sheet 20 made of silicone rubber or non-silicone rubber and a base sheet 10/30 made of metal, ceramics, glass, or resin may be corona discharge treatment, plasma treatment, ultraviolet ray at at least one of the joining surfaces thereof. Silane which has been activated by irradiation treatment and has a hydrolyzable alkoxy group equivalent group capable of reacting with an amino group and / or an alkoxy group having 1 to 4 carbon atoms or a hydroxyl group in the same manner to form an ether group It joins by this chemical bond through a coupling agent.

  The amino group-free silane coupling agent having an alkoxy group is exemplified by commercially available silane coupling agents, specifically vinyltrimethoxysilane (KBM-1003) and vinyltriethoxysilane (KBE-1003). Vinyl group and alkoxy group-containing silane coupling agent; 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane (KBM-303), 3-glycidoxypropylmethyldimethoxysilane (KBM-402), 3-glycid Epoxy group and alkoxy group exemplified by xylpropyltrimethoxysilane (KBM-403), 3-glycidoxypropylmethyldiethoxysilane (KBE-402), 3-glycidoxypropyltriethoxysilane (KBE-403) -Containing silane coupling agent; styryl group and alkoxy group-containing silane coupling agent exemplified by p-styryltrimethoxysilane (KBM-1403); 3-methacryloxyp Pyrmethyldimethoxysilane (KBM-502), 3-methacryloxypropyltrimethoxysilane (KBM-503), 3-methacryloxypropylmethyldiethoxysilane (KBE-502), 3-methacryloxypropylmethyldiethoxysilane (KBE) -503), (meth) acrylic group and alkoxy group-containing silane coupling agent exemplified by 3-acryloxypropyltrimethoxysilane (KBM-5103); exemplified by 3-ureidopropyltriethoxysilane (KBE-585) A ureido group and an alkoxy-containing silane coupling agent; 3-mercaptopropylmethyldimethoxysilane (KBM-802), a mercapto group exemplified by 3-mercaptopropyltrimethoxysilane (KBM-803); and an alkoxy-containing silane coupling agent; Sulfide group exemplified by bis (triethoxysilylpropyl) tetrasulfide (KBE-846) and alkoxy-containing sila Coupling agent: Isocyanate group and alkoxy-containing silane coupling agent exemplified by 3-isocyanatopropyltriethoxysilane (KBE-9007) (all of which are manufactured by Shin-Etsu Silicone Co., Ltd .; trade names), and vinyl tri Vinyl group and acetoxy-containing silane coupling agent exemplified by acetoxysilane (Z-6075); Allyl group and alkoxy-containing silane coupling agent exemplified by allyltrimethoxysilane (Z-6825); Methyltrimethoxysilane (Z -6366), dimethyldimethoxysilane (Z-6329), trimethylmethoxysilane (Z-6013), methyltriethoxysilane (Z-6383), methyltriphenoxysilane (Z-6721), ethyltrimethoxysilane (Z-6321) ), N-propyltrimethoxysilane (Z-6265), diisopropyldimethoxysilane (Z-6258), isobutyltrimethoxysilane (Z -2306), diisobutyldimethoxysilane (Z-6275), isobutyltriethoxysilane (Z-6403), n-hexyltrimethoxysilane (Z-6583), n-hexyltriethoxysilane (Z-6586), cyclohexylmethyldimethoxy Silane (Z-6187), n-octyltriethoxysilane (Z-6341), alkyl group and alkoxy group-containing silane coupling agents exemplified by n-decyltrimethoxysilane (Z-6210); phenyltrimethoxysilane ( Z-6124) aryl group and alkoxy group-containing silane coupling agent; n-octyldimethylchlorosilane (ACS-8) exemplified alkyl group and chlorosilane group-containing silane coupling agent; tetraethoxysilane (Z- 6697), a silane coupling agent (all above, manufactured by Toray Dow Corning Co., Ltd .; trade name).

The amino group-free silane coupling agent having an alkoxy group is a hydrosilyl group (SiH group) -containing alkoxysilyl compound, for example,
(CH ₃ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(CH ₃ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (OCH ₃ ) ₂ OSi (OCH ₃ ) ₃ ,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (OCH ₃ ) ₂ OSi (OCH ₃ ) ₃ ,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ H,
(CH ₃ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ H,
(iC ₃ H ₇ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) H ₂ ,
(nC ₃ H ₇ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ Si (CH ₃ ) ₂ H,
(nC ₄ H ₉ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(tC ₄ H ₉ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(C ₂ H ₅ O) ₂ CH ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(CH ₃ O) ₂ CH ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ Si (CH ₃ ) ₂ H,
CH ₃ O (CH ₃ ) ₂ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(nC ₃ H ₇ ) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(iC ₃ H ₇ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(nC ₄ H ₉ ) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(tC ₄ H ₉ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ H,
(CH ₃ O) ₃ SiCH ₂ C ₆ H ₄ CH ₂ CH ₂ Si (CH ₃ ) ₂ C ₆ H ₄ Si (CH ₃ ) ₂ H,
(CH ₃ O) ₂ CH ₃ SiCH ₂ C ₆ H ₄ CH ₂ CH ₂ Si (CH ₃ ) ₂ C ₆ H ₄ Si (CH ₃ ) ₂ H,
CH ₃ O (CH ₃ ) ₂ SiCH ₂ C ₆ H ₄ CH ₂ CH ₂ Si (CH ₃ ) ₂ C ₆ H ₄ Si (CH ₃ ) ₂ H,
(C ₂ H ₅ O) ₃ SiCH ₂ C ₆ H ₄ CH ₂ CH ₂ Si (CH ₃ ) ₂ C ₆ H ₄ Si (CH ₃ ) ₂ H,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ C ₆ H ₄ OC ₆ H ₄ Si (CH ₃ ) ₂ H,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ C ₂ H ₄ Si (CH ₃ ) ₂ H,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ O [Si (CH ₃ ) ₂ O] _p1 Si (CH ₃ ) ₂ H,
C ₂ H ₅ O (CH ₃ ) ₂ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ O [Si (CH ₃ ) ₂ O] _p2 Si (C ₂ H ₅ ) ₂ H,
(C ₂ H ₅ O) ₂ CH ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ O [Si (CH ₃ ) ₂ O] _p3 Si (CH ₃ ) ₂ H,
(CH ₃ ) ₃ SiOSiH (CH ₃ ) O [SiH (CH ₃ ) O] _p4 Si (CH ₃ ) ₃ ,
(CH ₃ ) ₃ SiO [(C ₂ H ₅ OSi (CH ₃ ) CH ₂ CH ₂ CH ₂ ) SiCH ₃ ] O [SiH (CH ₃ ) O] _p5 Si (CH ₃ ) ₃ ,
(CH ₃ ) ₃ SiO [(C ₂ H ₅ OSiOCH ₃ CH ₂ CH ₂ CH ₂ ) SiCH ₃ ] O [SiH (CH ₃ ) O] _p6 Si (CH ₃ ) ₃ ,
(CH ₃ ) ₃ SiO [(C ₂ H ₅ OSi (CH ₃ ) CH ₂ CH ₂ CH ₂ ) SiCH ₃ ] O [SiH (CH ₃ ) O] _p7 Si (CH ₃ ) ₃ ,
(CH ₃ ) ₃ SiO [(Si (OC ₂ H ₅ ) ₂ CH ₂ CH ₂ CH ₂ ) SiCH ₃ ] O [SiH (CH ₃ ) O] _p8 Si (CH ₃ ) ₃ ,
(CH ₃ ) ₃ SiOSi (OC ₂ H ₅ ) ₂ O [SiH (CH ₃ ) O] _p9 [Si (CH ₃ ) ₂ O] _q1 Si (CH ₃ ) ₃ ,
(CH ₃ ) ₃ SiO [(C ₂ H ₅ Osi (CH ₃ ) CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [SiH (CH ₃ ) O] _p10 [Si (CH ₃ ) ₂ O] _q2 Si (CH ₃ ) ₃ ,
(CH ₃ ) ₃ SiO [(Si (OCH ₃ ) ₃ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [SiH (CH ₃ ) O] _p11 [Si (CH ₃ ) ₂ O] _q3 Si (CH ₃ ) ₃ ,
(CH ₃ ) ₃ SiOSi (OC ₂ H ₅ ) ₂ O [SiH (C ₂ H ₅ ) O] _p12 Si (CH ₃ ) ₃ ,
(CH ₃ ) ₃ SiO [(Si (OC ₂ H ₅ ) ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (C ₂ H ₅ )] O [SiH (C ₂ H ₅ ) O] _p13 Si (CH ₃ ) ₃ ,
(CH ₃ ) ₃ SiO [(C ₂ H ₅ OSi (CH ₃ ) CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (C ₂ H ₅ )] O [SiH (C ₂ H ₅ ) O] _p14 Si (CH ₃ ) ₃ ,
C ₂ H ₅ OSi (CH ₃ ) ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ (CH ₃ ) ₂ SiO [HSi (CH ₃ ) ₂ OSiC ₆ H ₅ O] _p15 Si (CH ₃ ) ₂ H,
Si (OCH ₃ ) ₃ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ (CH ₃ ) ₂ SiO [HSi (CH ₃ ) ₂ OSiC ₆ H ₅ O] _p16 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(C ₂ H ₅ OSi (CH ₃ ) ₂ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p17 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(C ₂ H ₅ OSi (CH ₃ ) ₂ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p18 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(C ₂ H ₅ OSi (CH ₃ ) ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p19 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(C ₂ H ₅ OSi (CH ₃ ) ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p20 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(C ₂ H ₅ OSi (CH ₃ ) ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p21 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ CH ₂ C ₆ H ₄ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p22 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ C ₆ H ₄ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p23 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ C ₆ H ₄ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p24 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ C ₆ H ₄ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p25 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p26 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p27 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p28 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p29 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p30 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ CH ₂ C ₆ H ₄ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p31 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ C ₆ H ₄ CH ₂ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p32 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ C ₆ H ₄ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p33 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ C ₆ H ₄ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p34 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(Si (OCH ₃ ) ₃ CH ₂ CH ₂ C ₆ H ₄ CH ₂ CH ₂ ) Si (CH ₃ ) O] [HSiCH ₃ O] _p35 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [(CH ₃ O) Si (CH ₃ ) CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSiC ₆ H ₅ O] _p36 [HSi (CH ₃ ) ₂ OSiC ₆ H ₅ O] _q4 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [Si (OCH ₃ ) ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSiC ₆ H ₅ O] _p37 [HSi (CH ₃ ) ₂ OSiC ₆ H ₅ O] _q5 Si (CH ₃ ) ₂ H,
C ₂ H ₅ O (CH ₃ ) ₂ SiO [SiH (CH ₃ ) O] _p38 [SiCH ₃ (C ₆ H ₅ ) O] _q6 Si (CH ₃ ) ₂ H,
Si (OC ₂ H ₅ ) ₃ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ (CH ₃ ) ₂ SiO [SiH (CH ₃ ) O] _p39 [SiCH ₃ (C ₆ H ₅ ) O] _q7 Si (CH ₃ ) ₂ H,
C ₂ H ₅ OSi (CH ₃ ) ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ (CH ₃ ) ₂ SiO [SiH (CH ₃ ) O] _p40 [SiCH ₃ (C ₆ H ₅ ) O] _q8 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO (C ₂ H ₅ O) Si (CH ₃ ) O [SiH (CH ₃ ) O] _p41 [SiCH ₃ (C ₆ H ₅ ) O] _q9 Si (CH ₃ ) ₂ H,
H (CH ₃ ) ₂ SiO [Si (OC ₂ H ₅ ) ₃ CH ₂ CH ₂ CH ₂ Si (CH ₃ )] O [SiH (CH ₃ ) O] _p42 [SiCH ₃ (C ₆ H ₅ ) O] _q10 Si (CH ₃ ) ₂ H
It may be. In these groups, p1 to p42 and q1 to q10 are numbers from 1 to 100. One molecule preferably has 1 to 99 hydrosilyl groups.

An amino group-free silane coupling agent having an alkoxy group is an alkoxysilyl compound containing a hydrosilyl group, for example,
(C ₂ H ₅ O) ₃ SiCH ₂ CH = CH ₂ ,
(CH ₃ O) ₃ SiCH ₂ CH ₂ CH = CH ₂ ,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH = CH ₂ ,
(CH ₃ O) ₃ SiCH ₂ CH ₂ CH ₂ CH ₂ CH = CH ₂ ,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ CH ₂ CH = CH ₂ ,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ CH = CH ₂ ,
(CH ₃ O) ₃ SiCH ₂ (CH ₂ ) ₇ CH = CH ₂ ,
(C ₂ H ₅ O) ₂ Si (CH = CH ₂ ) OSi (OC ₂ H ₅ ) CH = CH ₂ ,
(CH ₃ O) ₃ SiCH ₂ CH ₂ C ₆ H ₄ CH = CH ₂ ,
(CH ₃ O) ₂ Si (CH = CH ₂ ) O [SiOCH ₃ (CH = CH ₂ ) O] _t1 Si (OCH ₃ ) ₂ CH = CH ₂ ,
(C ₂ H ₅ O) ₂ Si (CH = CH ₂ ) O [SiOC ₂ H ₅ (CH = CH ₂ ) O] _t2 Si (OC ₂ H ₅ ) ₃ ,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ CH ₂ CH ₂ [Si (CH ₃ ) ₂ O] _t3 CH = CH ₂ ,
(CH ₃ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ CH ₂ CH ₂ [Si (CH ₃ ) ₂ O] _t4 CH = CH ₂ ,
CH ₃ O (CH ₃ ) ₂ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ CH ₂ CH ₂ [Si (CH ₃ ) ₂ O] _t5 CH = CH ₂ ,
(C ₂ H ₅ O) ₂ CH ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ CH ₂ CH ₂ [Si (CH ₃ ) ₂ O] _t6 CH = CH,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ CH ₂ CH ₂ [Si (CH ₃ ) ₂ O] _t7 CH = CH,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ CH ₂ CH ₂ (Si (CH ₃ ) ₃ O) Si (CH ₃ ) O [SiCH ₃ (- ) O] _u1 Si (CH ₃ ) ₃ CH = CH ₂ ,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ CH ₂ Si (CH ₃ ) ₂ OSi (CH ₃ ) ₂ CH ₂ CH ₂ (Si (CH ₃ ) ₃ O) Si (CH ₃ ) O [SiCH ₃ (- ) O] _u2 [Si (CH ₃ ) ₂ O] _t8 Si (CH ₃ ) ₃ CH = CH ₂ ,
(C ₂ H ₅ O) ₂ Si (CH = CH ₂ ) O [SiCH ₃ (OC ₂ H ₅ ) O] _u3 Si (OC ₂ H ₅ ) ₂ CH = CH ₂ ,
(C ₂ H ₅ O) ₂ Si (CH = CH ₂ ) O [Si (OC ₂ H ₅ ) ₂ O] _u4 Si (OC ₂ H ₅ ) ₂ CH = CH ₂ ,
(C ₂ H ₅ O) ₂ Si (CH = CH ₂ ) O [Si (OC ₂ H ₅ ) ₂ O] _u5 Si (OC ₂ H ₅ ) ₂ CH = CH ₂
Is mentioned. In these groups, t1 to t8 and u1 to u5 are numbers from 1 to 30. One molecule preferably has 1 to 30 vinyl groups.

  The reaction between the vinyl group and the SiH group may be promoted with a metal catalyst such as a platinum-containing compound to join the base sheet and the rubber sheet.

As an amino group-free silane coupling agent having an alkoxy group, an alkoxysilyl compound containing an alkoxysilyl group at both ends, for example,
(C ₂ H ₅ O) ₃ SiCH ₂ CH ₂ Si (OC ₂ H ₅ ) ₃ ,
(C ₂ H ₅ O) ₂ CH ₃ SiCH ₂ CH ₂ Si (OC ₂ H ₅ ) ₃ ,
(C ₂ H ₅ O) ₃ SiCH = CHSi (OC ₂ H ₅ ) ₃ ,
(CH ₃ O) ₃ SiCH ₂ CH ₂ Si (OCH ₃ ) ₃ (CH ₃ O) ₃ SiCH ₂ CH ₂ C ₆ H ₄ CH ₂ CH ₂ Si (OCH ₃ ) ₃ ,
(CH ₃ O) ₃ Si [CH ₂ CH ₂ ] ₃ Si (OCH ₃ ) ₃ ,
(CH ₃ O) ₂ Si [CH ₂ CH ₂ ] ₄ Si (OCH ₃ ) ₃ ,
(C ₂ H ₅ O) ₂ Si (OC ₂ H ₅ ) ₂ ,
(CH ₃ O) ₂ CH ₃ SiCH ₂ CH ₂ Si (OCH ₃ ) ₂ CH ₃ ,
(C ₂ H ₅ O) ₂ CH ₃ SiOSi (OC ₂ H ₅ ) ₂ CH ₃ ,
(CH ₃ O) ₃ SiO [Si (OCH ₃ ) ₂ O] _v1 Si (OCH ₃ ) ₃ ,
(C ₂ H ₅ O) ₃ SiO [Si (OC ₂ H ₅ ) ₂ O] _v2 Si (OC ₂ H ₅ ) ₃ ,
(C ₃ H ₇ O) ₃ SiO [Si (OC ₃ H ₇ ) ₂ O] _v3 Si (OC ₃ H ₇ ) ₃
It may be. In these groups, v1 to v3 are numbers from 0 to 30.

As an amino group-free silane coupling agent having an alkoxy group, an alkoxysilyl compound containing a hydrolyzable group-containing silyl group, for example,
CH ₃ Si (OCOCH ₃ ) ₃ , (CH ₃ ) ₂ Si (OCOCH ₃ ) ₂ , nC ₃ H ₇ Si (OCOCH ₃ ) ₃ , CH ₂ = CHCH ₂ Si (OCOCH ₃ ) ₃ , C ₆ H ₅ Si ( OCOCH ₃ ) ₃ , CF ₃ CF ₂ CH ₂ CH ₂ Si (OCOCH ₃ ) ₃ , CH ₂ = CHCH ₂ Si (OCOCH ₃ ) ₃ , CH ₃ OSi (OCOCH ₃ ) ₃ , C ₂ H ₅ OSi (OCOCH ₃ ) ₃ , CH ₃ Si (OCOC ₃ H ₇ ) ₃ , CH ₃ Si [OC (CH ₃ ) = CH ₂ ] ₃ , (CH ₃ ) ₂ Si [OC (CH ₃ ) = CH ₂ ] ₃ , nC ₃ H ₇ Si [OC (CH ₃ ) = CH ₂ ] ₃ , CH ₂ = CHCH ₂ Si [OC (CH ₃ ) = CH ₂ ] ₃ , C ₆ H ₅ Si [OC (CH ₃ ) = CH ₂ ] ₃ , CF ₃ CF ₂ CH ₂ CH ₂ Si [OC (CH ₃ ) = CH ₂ ] ₃ , CH ₂ = CHCH ₂ Si [OC (CH ₃ ) = CH ₂ ] ₃ , CH ₃ OSi [OC (CH ₃ ) = CH ₂ ] ₃ , C ₂ H ₅ OSi [OC (CH ₃ ) = CH ₂ ] ₃ , CH ₃ Si [ON = C (CH ₃ ) C ₂ H ₅ ] ₃ , (CH ₃ ) ₂ Si [ON = C (CH ₃ ) C ₂ H ₅ ] ₂ , nC ₃ H ₇ Si [ON = C (CH ₃ ) C ₂ H ₅ ] ₃ , CH ₂ = CHCH ₂ Si [ON = C (CH ₃ ) C ₂ H ₅ ] ₃ , C ₆ H ₅ Si [ON = C (CH ₃ ) C ₂ H ₅ ] ₃ , CF ₃ CF ₂ CH ₂ CH ₂ Si [ON = C (CH ₃ ) C ₂ H ₅ ] ₃ , CH ₂ = CHCH ₂ Si [ ON = C (CH ₃ ) C ₂ H ₅ ] ₃ , CH ₃ OSi [ON = C (CH ₃ ) C ₂ H ₅ ] ₃ , C ₂ H ₅ OSi [ON = C (CH ₃ ) C ₂ H ₅ ] ] ₃ , CH ₃ Si [ON = C (CH ₃ ) C ₂ H ₅ ] ₃ , CH ₃ Si [ N (CH ₃ )] ₃ , (CH ₃ ) ₂ Si [N (CH ₃ )] ₂ , nC ₃ H ₇ Si [N (CH ₃ )] ₃ , CH ₂ = CHCH ₂ Si [N (CH ₃ )] ₃ , C ₆ H ₅ Si [N (CH ₃ )] ₃ , CF ₃ CF ₂ CH ₂ CH ₂ Si [N (CH ₃ )] ₃ , CH ₂ = CHCH ₂ Si [N (CH ₃ )] ₃ , CH _It may be a hydrolyzable organosilane such as ₃ OSi [N (CH ₃ )] ₃ , C ₂ H ₅ OSi [N (CH ₃ )] ₃ , CH ₃ Si [N (CH ₃ )] ₃ .

  As an amino group-containing silane coupling agent having an alkoxy group, a commercially available silane coupling agent, specifically N-2- (aminoethyl) -3-aminopropylmethyldimethoxysilane (KBM-602), N- 2- (aminoethyl) -3-aminopropyltrimethoxysilane (KBM-603), N-2- (aminoethyl) -3-aminopropyltriethoxysilane (KBE-603), 3-aminopropyltrimethoxysilane ( KBM-903), 3-aminopropyltriethoxysilane (KBE-903), 3-triethoxysilyl-N- (1,3-dimethyl-butylidene) propylamine (KBE-9103), N-phenyl-3-amino Amino group-containing alkoxysilyl compound exemplified by propyltrimethoxysilane (KBM-573), N- (vinylbenzyl) -2-aminoethyl-3-aminopropyltrimethoxysilane hydrochloride (KBM-575) Shin-Etsu Silicone Co., Ltd .; trade name) 3-aminopropyltrimethoxysilane (Z-6610), 3-aminopropyltrimethoxysilane (Z-6611), 3- (2-aminoethyl) aminopropyltrimethoxysilane (Z-6094), 3-phenylaminopropyl Trimethoxysilane (Z-6883), N- [3- (trimethoxysilyl) propyl] -N '-[(ethenylphenyl) methyl-1,2-ethanediamine ・ hydrochloride (Z-6032) Amino group-containing alkoxysilyl compounds (made by Toray Dow Corning Co., Ltd .; trade names).

  When the base sheets 10 and 30 are formed of metal, ceramics, or glass and the rubber sheet 20 is formed of silicone rubber, it is preferable that both are directly bonded by an ether bond. In this case, the base sheet 10/30 and the rubber sheet 20 are subjected to corona discharge treatment to generate an active group such as a hydroxyl group on the surface, and the base sheet 10/30 and the rubber are pressed by pressure bonding or pressure reduction. The sheet 20 is dehydrated to form an ether bond.

  When the base sheet 10/30 is formed of metal, ceramics, or glass, and the rubber sheet 20 is formed of non-silicone rubber, both of them are via an amino group-free silane coupling agent having an alkoxy group. It is preferable that they are bonded by a covalent bond of oxygen-carbon bond, carbon-carbon bond, and oxygen-silicon bond. In this case, the base sheet 10/30 and the rubber sheet 20 are subjected to corona discharge treatment to generate an active group such as a hydroxyl group on the surface thereof, an alkoxy group or an alkoxy group equivalent group, and an unsaturated group if necessary, By attaching a silane coupling agent containing an epoxy group, a ureido group, a sulfide group, an isocyanate group and not containing an amino group, at the time of pressure bonding under normal pressure, pressure or reduced pressure at normal temperature or by heating. These covalent bonds are formed.

  When the base sheet 10/30 is formed of resin and the rubber sheet 20 is formed of silicone rubber or non-silicone rubber, both are oxygen-containing via an amino group-containing silane coupling agent having an alkoxy group. Bonding is preferably performed by a chemical bond between a covalent bond of a silicon bond and a hydrogen bond of a hydroxyl group-amino group, or a covalent bond such as an amide bond or an imino bond with a newly formed carboxyl group or carbonyl group. In this case, the base sheet 10/30 and the rubber sheet 20 are subjected to corona discharge treatment to produce an active group such as a hydroxyl group on the surface thereof, and a silane cup containing an alkoxy group or an alkoxy group equivalent group and an amino group By attaching the ring agent, these chemical bonds are formed at the time of pressure bonding at normal temperature, under pressure or under reduced pressure at room temperature or under heating. In this case, the amino group of the silane coupling agent is easily adsorbed to the resin, and when the resin is a polycarbonate resin, a cycloolefin resin, a polyethylene terephthalate resin, an acrylic resin, or an epoxy resin, the reaction proceeds particularly quickly and quickly. Easy to join firmly. Of these, polycarbonate resins and cycloolefin resins are particularly excellent in water resistance.

The proximity of the active groups such as the hydroxyl groups of the base sheet 10/30 and the hydroxyl group of the rubber sheet 20, or the reactive functional groups of the silane coupling agent that react with them, under reduced pressure or vacuum conditions, for example, 50 torr or less, More specifically, under reduced pressure conditions of 50 to 10 torr, or less than 10 torr, more specifically under vacuum conditions of less than 10 torr to less than 1 × 10 ⁻³ torr, preferably less than 10 torr to 1 × 10 ⁻² torr. This is facilitated by removing the gaseous medium at the contact interface or by heating the contact interface by applying stress (load), for example 10-200 kgf, to the contact interface. It is preferable that pressure is uniformly applied to the entire bonding surface between the hydroxyl group of the base sheet 10 or 30 and the rubber sheet 20 under reduced pressure or pressurized conditions. If it is out of the above range, the pressure may not be applied uniformly.

  Such a microchemical chip 1 is manufactured as follows with reference to FIG. 1 as an example.

The silicone rubber sheet 20 is cut into a rectangular parallelepiped. The rubber sheet 20 is cut out and penetrated by laser processing, and the fine flow path 26 is attached to the rubber sheet 20. The flow path 26 is formed by laser processing, extending from the flow sample injection sites 21a and 21b at the start end, joining downstream, and extending from there to the flow sample discharge site 22a, and a main flow extending to the flow sample discharge sites 22b and 22c. The main stream is formed in a shape that extends downstream and branches to the end-end flow sample discharge sites 22b and 22c. Next, the cover metal base sheet 10 having the same size as the rubber sheet 20 is cut out. In the metal base sheet 10, the flow sample injection holes 11a and 11b and the flow sample discharge holes 12a, 12b, and 12c are respectively provided at positions corresponding to the flow sample injection portions 21a and 21b and the flow sample discharge portions 22a, 22b, and 22c. Are drilled or punched with a drill. Next, the metal base sheet 30 for supporting the bottom surface is cut out to the same size as the rubber sheet 20.
The base sheet 10.30 and the rubber sheet 20 are washed with alcohol and water. When the lower surface 15 of the base material sheet 10, the upper surface 34 of the base material sheet 30, and the upper and lower surfaces 24 and 25 of the rubber sheet 20 are subjected to corona discharge treatment, new hydroxyl groups are generated on the surfaces. The rubber sheet 20 is sandwiched between the base material sheets 10 and 30, and the pressure is reduced, for example, 10 torr or less. Next, for example, when pressed at 10 to 200 kgf and heated at, for example, 80 to 120 ° C. and thermocompression bonded, the hydroxyl groups of the base sheet 10/30 and the hydroxyl group of the rubber sheet 20 are dehydrated to form an ether bond. A microchemical chip 1 is obtained.

  In addition, although the example which performed the corona discharge to the base material sheet 10 * 30 and the rubber sheet 20 was shown, you may perform an atmospheric pressure plasma process or ultraviolet irradiation. By these treatments, an active group that is a hydroxyl group is generated on the surface of the organic or inorganic base sheet 10 or 30 or the rubber sheet 20, or a carboxyl group is further formed on the surface of the organic base sheet 10 or 30 or the rubber sheet 20. An active group exemplified by a group or a carbonyl group may be formed.

  The base sheet 10/30 and the rubber sheet 20 may or may not have a hydroxyl group from the beginning, but a corona discharge, an atmospheric pressure plasma treatment, or an ultraviolet irradiation treatment may be applied even if these surfaces do not have a hydroxyl group. Thus, hydroxyl groups are efficiently generated there.

  The optimum processing conditions vary depending on the material type and history of the base material surface of the base sheet 10, 30 or the rubber sheet 20, but the processing may be continued until a surface tension of 55 kJ / m or more is obtained on the surface. is important. Thereby, sufficient adhesive strength is obtained.

  Specifically, the corona discharge treatment of the base sheet 10.30 or the rubber sheet 20 is performed using, for example, a power source: AC100V, output using a corona surface reformer (for example, Corona Master manufactured by Shinko Electric Measurement Co., Ltd.). Voltage: 0 to 20 kV, oscillation frequency: 0 to 40 kHz, 0.1 second to 60 seconds, temperature 0 to 60 ° C.

  The atmospheric pressure plasma treatment of the base sheet 10.30 or the rubber sheet 20 is performed using, for example, an atmospheric pressure plasma generator (for example, trade name Aiplasuma manufactured by Matsushita Electric Works Co., Ltd.), for example, a plasma treatment speed of 10 to 100 mm / s. , Power source: 200 or 220V AC (30 A), compressed air: 0.5 MPa (1 NL / min), 10 kHz / 300 W to 5 GHz, power: 100 W to 400 W, irradiation time: 0.1 second to 60 seconds.

Ultraviolet irradiation of the base material sheets 10 and 30 and the rubber sheet 20 is performed using an ultraviolet-light emitting diode (UV-LED) irradiation device (for example, UV-LED irradiation device manufactured by OMRON Corporation: trade name ZUV-C30H). For example, it is performed under the conditions of wavelength: 200 to 400 nm, power source: 100 V AC, light source peak illuminance: 400 to 3000 mW / cm ² , irradiation time: 1 to 60 seconds.

  After the activation treatment such as corona discharge, the surfaces 15 and 34 to be joined of the base sheet 10 and 30 are immersed or sprayed with a silane coupling agent solution that is a molecular adhesive, and then the base sheet 10 and 30 The rubber sheet 20 may be contacted. There is no restriction | limiting in the time of immersion and spraying, and it is important that the base-material surface of the base material sheet 10 * 30 is uniformly moistened.

  The base sheet 10/30 with the silane coupling agent is put in an oven, blown with warm air with a dryer, or irradiated with a high frequency to be dried while being heated. Heating and drying are performed in a temperature range of 50 to 250 ° C. for 1 to 60 minutes. If it is less than 50 degreeC, the reaction time of the hydroxyl group produced | generated on the base-material sheet | seat 10 * 30 surface and a silane coupling agent will take too long, productivity will fall, and it will raise cost. On the other hand, when the temperature exceeds 250 ° C., the surface of the base sheet 10/30 is deformed or decomposed even if the heat drying time is short. Since heat transfer is insufficient in heat drying for less than 1 minute, the bonding between the hydroxyl groups on the surface of the base sheet 10, 30 and the silane coupling agent is insufficient. On the other hand, when it exceeds 60 minutes, productivity falls.

  When the reaction between the hydroxyl group on the surface of the substrate sheet 10/30 and the silane coupling agent is insufficient, the dipping and drying may be repeated about 1 to 5 times. As a result, it is possible to sufficiently advance the reaction by shortening the time of dipping and drying per time and increasing the number of reactions.

  The microchemical chip 1 is used as follows, for example, with reference to FIG. The microchemical chip 1 is mounted on a microreactor (not shown). Syringes (not shown) are air-tightly inserted into the flow sample injection holes 11a and 11b of the cover base sheet 10, respectively, and the liquid sample and the liquid reagent separately from each syringe are transferred from 100 kPa to 3 MPa or less. The sample is fed into the flow path 26 through the flow sample injection portions 21a and 21b while being pressurized. Both flow samples flow through the flow path 26, join and mix, and react with each other. If necessary, the waste liquid is discharged from the flow sample discharge hole 12a through the flow sample discharge portion 22a which is a tributary. Branching in the main stream, the flow sample containing the product synthesized in a small amount is discharged from the flow sample discharge holes 12b and 12c through the flow sample discharge portions 22b and 22c, respectively, and the target product is obtained.

  Another embodiment of the microchemical chip 1 is shown in FIG. The microchemical chip 1 includes a metal substrate sheet 10 for a cover, a first rubber sheet 20, a metal substrate sheet 30 for an insole, a second rubber sheet 40, and a metal substrate sheet 50 for supporting the bottom surface in this order. It is a superposition.

  The rubber sheets 20 and 40 are formed with flow paths 26 and 46 penetrating the front and back. The flow path 26 extends from the flow sample injection sites 21a and 21b, which are the starting end of the rubber sheet 20, and merges downstream, and then flows into a tributary that extends to the flow sample discharge site 22a and a main flow that extends to the flow sample transfer site 23. Branched. The insole metal base sheet 30 has a fluid sample transport hole 33 at a position corresponding to the fluid sample transport site 23. A check valve may be provided in the flow sample transfer hole 33. The second rubber sheet 40 is provided with a flow sample transfer portion 43 at a position corresponding to the flow sample transfer hole 33, and extends from the flow sample injection portion 41 a, which is another starting point end, and joins it downstream. The flow path 46 branched from the flow sample discharge portions 42a and 42b, which are the end points, is formed through the front and back surfaces. A flow sample injection hole 51a and flow sample discharge holes 52a and 52b are formed in the metal substrate sheet 50 for supporting the bottom surface at positions corresponding to the flow sample injection portion 41a and the flow sample discharge portions 42a and 42b. The base material sheets 10, 20, and 30 and the rubber sheets 20, 40 are directly bonded via an ether bond as in FIG. The base material sheets 10, 20, 30 and the rubber sheets 20, 40 may have the above-described materials and shapes, and may be joined via a silane coupling agent. The microchemical chip 1 is used by feeding a fluid sample under pressure as in the case of FIG. The microchemical chip 1 can prevent unintentional mixing when injecting fluid samples having different molecular weights, composition components, and composition properties in the flow paths 26 and 46 of the plurality of rubber sheets 20 and 40, respectively. Alternatively, the sample may be appropriately separated when the fluid sample reacts in the channels 26 and 46 and the molecular weight of the target substance in the fluid sample changes or the specific gravity of the fluid sample changes.

  Another embodiment of the microchemical chip 1 is shown in FIG. The microchemical chip 1 is composed of the base material sheets 10 and 30 and the rubber sheet 20 shown in FIG. 1, and the outermost base material sheets 10 and 30 together with the rubber sheet 20 are bent by two resin plates or metal plates. It is sandwiched between rigid holders 60a and 60b. These are screwed and fixed. At the positions corresponding to the flow sample injection holes 11a, 11b and the flow sample discharge holes 12a, 12b, 12c of the base sheet 10, 30 to the holders 60a, 60b, the injection guide holes 61a, 61b and the discharge guide holes 62a, 62b, 62c is open. The microchemical chip 1 is used by applying a fluid sample to the flow channel 26 under pressure as in the case of FIG. The holders 60a and 60b are tightened to such a degree that the fluid sample flows through the flow path 26 while correcting the flexible base sheets 10 and 30 and the rubber sheet 20 so as not to bend. The microchemical chip 1 may have a base sheet 10, 30, 50 and a rubber sheet 20, 40 shown in FIG. The microchemical chip 1 in FIGS. 1 and 2 may be joined by inserting a heater between the base sheet 10/30 and the rubber sheet 20, and the heater is arranged on the holder in FIG. (Not shown). The microchemical chip 1 has a specimen / reagent / reaction product in any one of the fluid sample injection sites 21a and 21b, the fluid sample discharge sites 22a, 22b, and 22c, the fluid sample injection site, and the fluid sample discharge sites 41a, 42a, and 42b. A sensor such as an electrode for detecting the above may be wired.

  Examples of the present invention will be described in detail below, but the scope of the present invention is not limited to these examples.

Example 1
The microchemical chip 1 shown in FIG. 1 was produced with the cycloolefin resin substrate sheet 10/30 and the silicone rubber sheet 20. The cycloolefin resin base sheet 10.30 is formed of ZEONOR (registered trademark, manufactured by Nippon Zeon Co., Ltd.), which is a cycloolefin resin, and has a thickness of 2 mm and a size of 30 × 40 mm. The silicone rubber sheet 20 is formed of SH-851-U (trade name, manufactured by Toray Dow Corning Co., Ltd.), which is the same shape as the cycloolefin resin substrate sheet 10/30 and is polydimethylsiloxane, and has a thickness of 50 μm. . As shown in FIG. 1, the flow path 26 branched in a groove shape having a width of 500 μm having flow sample injection portions 21a and 21b and flow sample discharge portions 22a, 22b and 22c having a diameter of 1 mm as shown in FIG. The machine (model LaserPro SPIRIT (manufactured by Comnet Corporation), processing conditions: speed10, power30, PPI400). The fluid sample injection holes 11a and 11b and the fluid sample discharge holes 12a and 12c were drilled in the cover base sheet 10 with a drill. After the cover base sheet 10 and the bottom support base sheet 30 were washed with ethanol and water, the surface was activated by corona discharge three times at a gap length of 1 mm, a voltage of 13.5 kV, and 70 mm / sec. Processed. Substrate sheets 10 and 30 are immersed in an ethanol solution of 0.1% by weight of 3- (2-aminoethylamino) propyltrimethoxysilane, which is a silane coupling agent, washed with ion-exchanged water, and then with an air gun. It was air-dried, heated at 80 ° C. for 10 minutes, washed with ethanol, treated with 3- (2-aminoethylamino) propyltrimethoxysilane and dried again, and then subjected to corona discharge treatment under the same conditions. While aligning the flow sample injection sites 21a, 21b, the flow sample discharge sites 22a, 22b, 22c, the flow sample injection holes 11a, 11b, and the flow sample discharge holes 12a, 12b, 12c, between the base sheet 10, 30 The rubber sheet 20 was sandwiched between the two. After exposing it to a reduced pressure condition of 10 torr for 15 seconds, it was pressed at 70 kgf at 80 ° C. for 15 minutes and thermocompression bonded to obtain a microchemical chip 1.
When the flow sample injection hole 11b and the flow sample discharge holes 12a, 12b, and 12c were closed and pressurized air was introduced from the flow sample injection portion 21a through the flow sample injection hole 11a, pressure resistance was shown to 1.5 MPa.

(Example 2)
A microchemical chip 1 shown in FIG. 1 was produced with stainless base sheets 10 and 30 having a thickness of 30 mm in length and width of 2 mm, and a silicone rubber sheet 20 having the same shape and thickness of 50 μm. As shown in FIG. 1, a flow path 26 having fluid sample injection sites 21a, 21b, and 21b and fluid sample discharge sites 22a, 22b, and 22c was formed in the silicone rubber sheet 20 with a laser processing machine. The fluid sample injection holes 11a and 11b and the fluid sample discharge holes 12a, 12b, and 12c were drilled in the base sheet 10 with a drill. The base sheet 10.30 was washed with ethanol and water. After the base material sheets 10 and 30 and the rubber sheet 20 were washed with ethanol and water, corona discharge treatment was performed under the same conditions as in Example 1 to activate the surface. While aligning the flow sample injection sites 21a, 21b, the flow sample discharge sites 22a, 22b, 22c, the flow sample injection holes 11a, 11b, and the flow sample discharge holes 12a, 12b, 12c, between the base sheet 10, 30 The rubber sheet 20 was sandwiched between the two. After exposing it to a reduced pressure condition of 10 torr for 15 seconds, it was pressed at 70 kgf at 80 ° C. for 15 minutes and thermocompression bonded to obtain a microchemical chip 1.
The pressure resistance equivalent to that of the microchemical chip of Example 1 was exhibited.

  The microchemical chip of the present invention analyzes the biological components of patients in emergency medical settings where it is necessary to quickly know the analysis results, and extracts DNA from remains such as traces of blood stains, body fluids, hair, and biological tissue cells in crime scenes. Extraction, PCR amplification to increase the DNA, DNA analysis to identify DNA by electrophoresis, physical properties and efficacy evaluation of various drug candidates for new drug search, diagnosis for customized medicine, peptides, DNA and functions It is used for the synthesis of low-molecular-weight small molecules.

  Since the microchemical chip can easily form a freely shaped flow path, it can be used for custom-made medical care and identification of DNA analysis of various animals and plants.

  The microchemical chip obtained by the method for producing the microchemical chip of the present invention is attached to the analysis device or microreactor to perform a medical examination or treatment, or a criminal investigation field using a biological sample. It can be used for various analyzes in Japan, microorganism search using an underwater robot in remote areas such as the ocean and lakes, and various synthesis in drug development.

  1 is a microchemical chip, 10 is a base sheet, 11a and 11b are fluid sample injection holes, 12a, 12b and 12c are fluid sample discharge holes, 15 is a bottom surface, 20 is a rubber sheet, 21a and 21b are fluid sample injection sites, 22a, 22b and 22c are fluid sample discharge sites, 23 is a fluid sample transport site, 24 is a top surface, 25 is a bottom surface, 26 is a flow path, 27 is a wall surface, 30 is a base sheet, 33 is a fluid sample transport hole, and 34 is Upper surface, 40 is a rubber sheet, 41a is a flow sample injection site, 42a and 42b are flow sample discharge sites, 43 is a flow sample transfer site, 50 is a base sheet, 51a is a flow sample injection hole, and 52a and 52b are flow sample discharges Holes 60a and 60b are holders, 61a and 61b are injection guide holes, and 62a, 62b, and 62c are discharge guide holes.

Claims (5)

The passage of chemically reacting pouring flow sample selected from a sample and a reagent pressurized, each of the plurality of rubber sheet sandwiched between the substrate sheet, while forming by penetrating, and corresponding flow sample transfer portion flow A flow path forming step for forming a sample transfer site ;
An opening step for forming a hole for introducing the fluid sample into the flow path and a hole for discharging the fluid sample poured into a base sheet selected from metal, ceramics, glass, and resin,
The plurality of rubber sheets, corresponding to a flowable sample transfer portion and flowable sample transfer portion while sandwiched between the substrate sheet, N-2- (aminoethyl) -3-aminopropyl methyl dimethoxy silane N-2- (aminoethyl) -3-aminopropyltrimethoxysilane, N-2- (aminoethyl) -3-aminopropyltriethoxysilane, 3-aminopropyltrimethoxysilane, and 3-aminopropyltriethoxy Silane coupling agents having amino groups and alkoxy groups selected from silanes, the substrate sheet is dried after being treated, the silanes on the front and back surfaces thereof are dried again by treating with the silane coupling agent and drying. A bonding step of bonding to the base sheet outside the region of the flow path by coupling agent-mediated chemical bonding;
A method of producing a microchemical chip by having A method in which the rubber sheet while sandwiching at reduced pressure between the substrate sheet, by chemical coupling, to produce a microchemical chip according to claim 1, characterized in that makes joining to the substrate sheet. 2. The microchemical chip according to claim 1, wherein the rubber sheet is sandwiched between the base material sheets under reduced pressure and / or pressure and bonded to the base material sheet by the chemical bonding. how to. The rubber sheet is sandwiched between the base sheets under reduced pressure, and then sandwiched between the subsequent pressurization and / or heating, and bonded to the base sheet by the chemical bond. A method for producing the described microchemical chip. The rubber sheet formed of silicone rubber or non-silicone rubber and the base sheet are activated by corona discharge treatment, plasma treatment and / or ultraviolet irradiation treatment on at least one of their joint surfaces, The method for producing a microchemical chip according to claim 1, wherein bonding is performed by chemical bonding.

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