JP6428575B2 - Transport equipment - Google Patents

Description

  The present invention relates to a facility for transporting a container for storing articles, and more particularly to a transport facility for transporting a storage container for storing articles such as glass substrates and semiconductor substrates that require high cleanliness.

  In order to increase the yield in the manufacture of precision equipment such as flat panel displays and semiconductor elements, glass substrates used in the manufacturing process of flat panel displays and semiconductor substrates (silicon wafers, etc.) used in the manufacturing process of semiconductor elements When handling such a material substrate in a production facility, it is required to keep the substrate highly clean so that unintended external substances such as dust do not adhere to the substrate.

  Therefore, when transporting these substrates in equipment such as a manufacturing factory, as described in Patent Document 1, a rectangular storage container that can store a plurality of substrates arranged in the vertical direction is used. There is a case in which a FFU (fan filter unit) is attached to one side of the opening formed at both ends of the rectangular storage container. According to this method, the cleanliness in the storage container can be maintained by continuing to blow the air purified by the FFU through the filter into the storage container.

  However, in order for the FFU to continuously blow air into the storage container, power for driving the fan needs to be supplied to the FFU. Therefore, in the transport facility described in Patent Document 1, the power receiving unit of the non-contact power feeding device for feeding power to the FFU in a non-contact manner is provided in the storage container, and further the storage for storing the storage container. The power supply unit of the non-contact power supply device is provided on the shelf. When the storage container is stored in the storage shelf, power is supplied in a non-contact manner from the power supply unit of the storage shelf to the power receiving unit of the storage container. As a result, the driving power of the FFU is secured.

  Here, in order to continue the power supply in the non-contact method, it is necessary to keep the power supply unit (power transmission unit) of the non-contact power supply device close to the power reception unit. In the transporting facility, the storage container is transported by the stacker crane that travels in the facility. Therefore, the power feeding unit and the power receiving unit are separated while the storage container is transported by the stacker crane. Therefore, in Patent Document 1, a battery that stores the power supplied to the storage container is provided, and the FFU is driven by the power stored in the battery while the power feeding unit and the power receiving unit are separated.

  However, if a battery is attached to each of the storage containers that are used in the facility, the cost of constructing the facility increases, and in the long term, the function of the battery deteriorates due to its service life. Equipment operation costs are expensive.

  Therefore, as shown in FIG. 8A, there is a method in which a power transmission pad 89b (power transmitter) is provided on a fork 85 that moves from the main body of the stacker crane 80 toward the storage shelf 81 during transfer. is there. If power is supplied from the power transmission pad 89b on the fork 85 to the power reception pad 89a (power receiver) of the storage container 82 during the transfer, the FFU 84 can be continuously driven during the transfer. With this method, since it is not necessary to attach a battery to each storage container 82, it is possible to construct equipment at a much lower cost than in the case of using a battery, and there is no need for trouble such as battery replacement. Operation costs can be reduced.

JP 2011-91270 A

By the way, when the fork 85 comes closest to the storage shelf 81 during the transfer operation of the storage container 82 (when the fork 85 moves further toward the storage shelf 81 than the position shown in FIG. 8A), the fork 85 is moved. In order to prevent the power transmission pad 89b on the side from colliding with the power transmission pad 88b on the storage shelf 81 side, the position of the power transmission pad 89b on the fork 85 side when the fork 85 comes closest to the storage shelf 81, and the storage shelf 81 The position of the power transmission pad 88b on the side needs to be different.
Therefore, in addition to the power receiving pad 89a for receiving power on the fork 85, the power receiving pad 88a for receiving power on the storage shelf 81 is attached to the storage container 82, and the two power receiving pads 88a and 89a are attached. Measures may be taken to keep them apart. In particular, as shown in FIGS. 8A and 8B, if the power receiving pad 88a and the power receiving pad 89a are arranged apart from each other in the width direction of the fork 85, the storage shelves for supplying power to them respectively. Since the power transmission pad 88b on the 81 side and the power transmission pad 89b on the fork 85 side are also arranged at different positions in the width direction, the power transmission pad 89b on the fork 85 side is placed in the storage shelf during the transfer operation of the storage container 82. It does not collide with the power transmission pad 88b on the 81 side.

  In this way, when the storage container 82 is on the fork 85 as shown in FIG. 8A, power is supplied from the power transmission pad 89b on the fork 85 side to the power reception pad 89a for the fork 85. When the storage container 82 is on the storage shelf 81 as shown in FIG. 8B, power is supplied from the power transmission pad 88b on the storage shelf 81 side to the power reception pad 88a for the storage shelf 81. The power supply to the FFU 84 is performed without interruption.

  However, in spite of the fact that a battery is not attached in order to reduce the cost of each storage container 82, in such a configuration, two power receiving pads 88a, 89a are provided for one storage container 82. Therefore, the cost for each storage container 82 is expensive.

  When the power transmission pad 89b is provided on the fork 85 that moves between the main body of the stacker crane 80 and the storage shelf 81 during the transfer operation, a power cable for supplying power to the power transmission pad 89b is provided. Since it is necessary to be able to follow the movement of the fork 85, an expensive cable having high flexibility has to be routed over a long distance, and the cost for this cable wiring is high.

As described above, in the conventional method, there is a problem that the equipment construction cost of the transport facility is increased in order to keep the cleanliness in the storage container 82 high.
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a transport facility capable of constructing equipment at a low cost while maintaining high cleanliness in a storage container for storing articles such as substrates. .

In order to solve the above-described problems, a transport facility according to the present invention is provided with transport means for transporting the storage container and a storage unit for storing the storage container in a transport facility for transporting a storage container for storing articles. The transfer means has a transfer device for transferring the storage container between the transfer means and the storage unit, and the storage container transfers the purified air into the storage container. A blower that blows air, while the storage container is being transported by the transport means and while the storage container is being stored by the storage section, the air blower from the transport means or the storage section; Power transmission means for supplying operating power to the apparatus is provided in each of the transfer means and the storage unit, and the storage container is transferred between the transfer means and the storage unit by the transfer device. Have In the meantime, it is possible to maintain a state in which the internal pressure is higher than the surrounding environment by the blowing performed before the start of the transfer by the blowing device, so that the external substance from the surrounding environment during the transfer can be maintained. It is possible to prevent inflow.
More specifically, the transport facility according to the present invention is provided with transport means for transporting the storage container and a storage unit for storing the storage container, and the storage container can store articles therein. A container body having a storage space; a blower for blowing purified air into the storage space; and a container power receiver for receiving operating power of the blower supplied by a non-contact method. And the transfer means includes a support part for supporting the storage container, a transfer means for moving the support part between a transfer position on the transfer means side and a storage position on the storage part side, A transfer means power transmitter for transmitting power in a non-contact manner to the container power receiver of the storage container supported by the support section at a transfer position, and the storage section holds the storage container A storage shelf for storage; and A storage unit power transmitter that transmits power in a non-contact manner to the container power receiver of the storage container stored in a tube shelf, and the transfer means is in a state of supporting the storage container. By moving the support part between the transport position and the storage position, the storage container can be transferred between the transport means and the storage part. While the transfer means is moved between the transfer position and the storage position, the internal pressure is higher than the surrounding environment by the air blown by the air blower before the start of movement. By being able to be maintained, it is possible to prevent inflow of external substances from the surrounding environment while being moved.
According to this configuration, since the inflow of external substances such as dust is prevented by the internal pressure in the storage space while the storage container is being transferred, the blower such as the FFU can receive power during transfer. Even if it stops without stopping, the cleanliness in the accommodation space is kept high.

Further, in addition to the above-described configuration, the transport facility according to the present invention has a first opening formed in the first surface of the outer surface of the container body, which is connected to the storage space, and the first surface. A second opening opposite to the first opening is formed on the second surface opposite to the first opening, and the first opening is opened by attaching and detaching a lid to the first surface. Alternatively, the air blower is attachable to the second surface, and the air blower blows air from the second opening toward the first opening closed by the lid. Thus, the internal pressure of the storage space may be higher than the surrounding environment.
According to this configuration, the air blown from the blower is sent toward the first opening at a position facing the blower, but is stored because the first opening is closed by the lid. I can't get out of space. While the air sent toward the first opening cannot go outside, air continues to be sent from the second opening by the blower, so the air density in the storage space is higher than the surrounding environment. It will be raised. In this way, the internal pressure in the storage space is reliably increased. Further, since the air in the storage space is blocked by the lid from flowing out to the surrounding environment, the internal pressure does not decrease immediately even when the blowing by the blowing device is stopped.

In addition to the above-described configuration, the transport facility according to the present invention includes a swivel for swiveling the support unit and the transfer means in a horizontal plane, and the swivel includes the swivel An extension frame extending in a direction opposite to the moving direction of the support portion by the transfer means may be attached, and the transfer means power transmitter may be attached to the extension frame.
According to this configuration, the transfer means power transmitter can be provided outside the swivel base and thus outside the support portion. Therefore, even if the container power receiver is positioned outside the support part when the storage container is supported by the support part, there is no problem on the outside of the support part from the transport means power transmitter to the container power receiver. Can be fed. Furthermore, since the direction in which the extension frame extends is opposite to the moving direction of the support portion, the extension frame does not hinder the movement of the support portion.

In addition to the above-described configuration, the transport facility according to the present invention is supported by the relative position of the storage unit power transmitter with respect to the container power receiver of the storage container stored in the storage unit, and the support unit of the transport unit at the transport position. The container power receiver, the storage unit power transmitter, and the transport unit power transmitter may be arranged so that the relative position of the transport unit power transmitter with respect to the container power receiver of the storage container is the same.
According to this configuration, the positional relationship between the power transmitter and the power receiver for non-contact power feeding is the same regardless of whether the storage container is stored in the storage unit or in the state where the storage container is transported by the transport unit. It is possible to make the electromagnetic conditions uniform between the non-contact power feeding in and the non-contact power feeding in the conveying means. Therefore, the operation of the blower can be kept constant except during the transfer operation, and the internal pressure in the storage space, and hence the cleanliness, can be kept constant.

According to the present invention, since the cleanliness in the storage container can be kept high even if the blower is stopped during the transfer of the storage container, the transfer container is supported in the transfer direction while supporting the storage container during the transfer. It is not necessary to provide a power transmitter in the moving support part. Therefore, it is not necessary to route a highly flexible cable that can follow the movement of the support portion over a long distance, and the wiring cost can be kept low.
In addition, if no power transmitter is provided in the support unit that moves between the transport means and the storage unit during the transfer operation, the power transmitter on the support unit side and the power transmitter on the storage unit side during the transfer operation. Therefore, it is not necessary to consider the possibility of collision, so that the transport unit power transmitter and the storage unit power transmitter can be arranged at the same position in the width direction. With such an arrangement, the air blower can receive power supply from the same container power receiver both during transport by the transport means and during storage in the storage unit. Only one appliance is needed. That is, since it is not necessary to attach two power receivers to the storage container, the cost for each storage container can be kept low. Therefore, it is possible to construct the transport facility at a low cost.

The top view which shows an example of embodiment of the conveyance equipment which concerns on this invention. The schematic side view of the conveyance equipment shown in FIG. The perspective view which shows the storage container used in the conveyance equipment of the embodiment. The schematic plan view which shows the state in which the conveyance trolley is located in front of the storage part in the conveyance equipment of the embodiment. The AA arrow directional view of FIG. FIG. 6 is a schematic plan view illustrating a state in which a bending / extending arm of the transport carriage illustrated in FIGS. The BB arrow line view of FIG. It is a schematic plan view which shows the mode of the electric power feeding with respect to FFU of the storage container in a prior art, (a) is a figure which shows the state currently transferred while the storage container is supported by the fork, (b) is a storage container is a storage shelf. The figure which shows the state currently mounted in.

An example of an embodiment of a transport facility according to the present invention will be described with reference to FIGS.
(Transport equipment)
In the transport facility 10 schematically shown in FIG. 1, a flat article such as a glass substrate is transported in a state of being stored in the storage container 20. A transport carriage 50 (stacker crane) as a transport means for transporting the container 20 travels along a transport path extending in the transport direction W within the transport facility 10. On the side of the transfer direction Y that intersects the transfer direction W at right angles to the transfer path of the transfer carriage 50, a rack 11 as a storage unit for storing the storage container 20 is disposed.
In the drawings, the storage container 20 and the members attached thereto may be indicated by phantom lines in order to facilitate understanding of the positional relationship between the members.

(Storage Department)
In the transport facility 10 shown in FIGS. 1 and 2, two racks 11 as storage units are provided facing each other with a transport path of the transport carriage 50 interposed therebetween. In other words, the racks 11 are provided on the left and right sides when the conveyance cart 50 faces the conveyance direction W along the conveyance route, and the traveling route of the conveyance vehicle 50 is set between the left and right racks 11. That is.
In the rack 11, a plurality of storage shelves 13 are provided so as to be arranged in the transport direction W, and each of the storage shelves 13 can store the storage container 20. As shown in the schematic side view of FIG. 2, a plurality of upper and lower storage shelves 13 are also provided in the vertical direction H so as to overlap. The rack 11 has a plurality of pillars 16 extending in the vertical direction H, and each of the storage shelves 13 is divided by the pillars 16 in the transport direction W as shown in FIG. And the shelf board 17 is provided so that it may span between the two pillars 16 lined up along the transfer direction Y, and as shown in FIG. Two storage shelves 13 are partitioned.
As shown in FIG. 1, the shelf plate 17 does not greatly expand in the transport direction W, and among the spaces formed between the columns 16 aligned in the transport direction W, the end portion (the shelf column 16 in the transport direction W). Only in the vicinity). As a result, one storage shelf 13 includes two shelf plates 17, that is, a left shelf plate 17 and a right shelf plate 17 as viewed in the transfer direction Y from the transport carriage 50. A space is widened between the shelf boards 17. The distance between the two left and right columns 16 when viewed in the transfer direction Y from the transport carriage 50 is larger than the width of the storage container 20, and the interval between the shelf plates 17 is smaller than the width of the storage container 20. For this reason, when the storage container 20 is stored on the storage shelf 13, only the both ends in the width direction are supported by the two shelf plates 17.
Further, one of the two shelf plates 17 included in one storage shelf 13 (here, the right side when facing the transfer direction Y from the transport carriage 50), the side closer to the transport path of the transport carriage 50 (conveyance) A storage shelf pad 18 for non-contact power feeding is provided as a storage unit power transmitter (power transmission means) at the end on the front side when viewed from the carriage 50. The storage shelf pad 18 is formed of a plate embedded with a coil that generates a magnetic flux when a current from an external power source flows.

(Storage container)
The structure of the storage container 20 to be transported in the transport facility 10 is shown in FIG.
The storage container 20 includes a rectangular tube-shaped container body 25 that is open in two opposing faces of a substantially rectangular parallelepiped shape, and a substrate storage space 27 serving as a storage space for storing articles within the container body 25. Is provided with a plurality of substrate mounting bars 27a which can support the substrate in a mounted state so that a plurality of flat articles (not shown) such as glass substrates can be stored side by side in the vertical direction H. ing.
A shutter 21 as a lid and an FFU 24 (fan filter unit) as a blower are attached to two open surfaces of the container body 25, that is, the first opening 25a and the second opening 25b, respectively. It is done.
A substrate to be stored is taken into and out of the substrate storage space 27 through the first opening 25a. The first opening 25a is closed by the shutter 21 during a period other than the substrate loading / unloading operation.
The FFU 24 is attached to the FFU mounting plate 22 that can cover the second opening 25b. When the FFU mounting plate 22 covers the second opening 25b, the FFU 24 is connected to the second opening 25b. The posture is to blow air from 25b toward the first opening 25a. Further, a container pad 28 is attached to the FFU mounting plate 22 as a container power receiver for receiving the driving power of the fan of the FFU 24 from the outside by a non-contact power feeding method. The container pad 28 is formed of a plate in which a coil for generating a current according to an external magnetic flux fluctuation is embedded.
The shutter 21 and the FFU mounting plate 22 are provided with a plurality of engaging portions 21a and 22a, respectively, and are provided on the side surface of the container main body 25 while lowering the shutter 21 and the FFU mounting plate 22 along the vertical direction H. The first opening 25a and the second opening 25b are closed by the shutter 21 and the FFU mounting plate 22, respectively, by hooking the engaging portions 21a and 22a on the locking portions 26a and 26b.

(Transport cart)
1 is a traveling device such as a stacker crane that can travel in the transport direction W on rails laid along a transport path defined in the transport facility 10. The transport cart 50 illustrated in FIG. . The transport carriage 50 includes a fork 55 as a support portion for supporting the storage container 20, and the transport carriage 50 travels on the rail while the storage container 20 is supported on the fork 55. The storage container 20 is transported in the transport facility 10. The transport carriage 50 has two masts 51 arranged in the transport direction W. The mast 51 extends in the vertical direction H as shown in FIG. The fork 55 can move up and down in the vertical direction H along the mast 51, and the transport carriage 50 moves the fork 55 in a state of supporting the storage container 20 in the vertical direction H to move up and down a plurality of stages. The position of the storage container 20 in the vertical direction H can be matched to each of the storage shelves 13. In addition, while the fork 55 is moved up and down in the vertical direction H or while turning as described later, the traveling of the transport carriage 50 along the transport direction W may be temporarily stopped. Since such a temporary stop state is also a part of the process up to the storage shelf 13 as the destination, in the present embodiment, not only while the transport carriage 50 is traveling in the transport direction W, but also ascending and descending -While turning, it is considered that the storage container 20 is being transported by the transport carriage 50 except when the storage container 20 is supported on the fork 55 except during the transfer operation described later.

(Swivel stand)
As shown in FIGS. 4 and 5, the transport carriage 50 has a swivel base 53 between the masts 51, and the fork 55 is mounted on the swivel base 53 via a bendable arm 52 as a transfer means. ing. The bending / extending arm 52 and the fork 55 constitute a transfer device. The swivel base 53 turns the bending / extending arm 52 and the fork 55 in a horizontal plane, whereby the postures of the bending / extending arm 52 and the fork 55 can be changed. The swivel base 53, the bending / extending arm 52, and the fork 55 are mounted on a lift base 57, and are moved up and down in the vertical direction H together. By turning the fork 55 and the bendable / extendable arm 52 by the swivel base 53, it is possible to switch which of the racks 11 provided on the left and right sides in the transport direction W is to be transferred.
In FIG. 1, the fork 55 is in a posture in which the longitudinal direction thereof coincides with the transport direction W, but in FIG. 4, the fork 55 is turned 90 ° from the posture in FIG. Is in a posture that matches the transfer direction Y.

(fork)
The fork 55 is composed of a substantially rectangular plate, and its short dimension is smaller than the interval between the two shelf plates 17 of the storage shelf 13.
The fork 55 can be moved in the horizontal direction by bending and stretching the bendable arm 52. In particular, when the bendable arm 52 is bent and extended when the longitudinal direction of the fork 55 coincides with the transfer direction Y as shown in FIG. 4, the fork 55 moves in the transfer direction Y. Yes. When the fork 55 is moved in the transfer direction Y by the bending / extending of the bending / extending arm 52, as shown in FIGS. 5 and 7, the conveying position 55a on the swivel 53 (conveying means side) and the inside of the storage shelf 13 (the storage unit) The fork 55 moves to and from the storage position 55b.
Then, after the fork 55 supporting the storage container 20 is swung to a posture in which the longitudinal direction coincides with the transfer direction Y as shown in FIG. 4, the fork 55 is moved from the transport position 55a to the storage position 55b. The storage container 20 can be fed into the storage shelf 13 by moving and inserting the fork 55 between the shelf plates 17 as shown in FIG.

(Extended frame)
As shown in FIGS. 1 to 7, an extension frame 59 is attached on the swivel base 53 in addition to the bendable arm 52. As shown in FIG. 6, the extension frame 59 has a T-shape in plan view, and the tip of the T-shaped vertical side portion is attached on the swivel base 53. Then, as shown in FIG. 7, the T-shaped vertical side portion extends to the opposite side to the direction in which the bending-extension-type arm 52 extends, bends upward in an L shape in a side view, and goes to the T-shaped horizontal side portion. It is connected with. Further, as shown in FIG. 6, a conveyance carriage pad 58 for non-contact power feeding is provided as a conveyance means power transmitter (power transmission means) on one end side of the T-shaped lateral side portion. The transport carriage pad 58 is formed of a plate embedded with a coil that generates a magnetic flux when a current from an external power source flows.

(Transfer operation)
Here, a transfer operation when the storage container 20 being transferred by the transfer carriage 50 is transferred to the storage shelf 13 will be described. First, the fork 55 in a state where the storage container 20 is supported is lifted up and down slightly above the shelf 17 in the vertical direction H, and the fork 55 is rotated to a posture in which the longitudinal direction of the fork 55 coincides with the transfer direction Y. As shown in FIG. 5, the storage container 20 faces the entrance of the storage shelf 13. Thereafter, when the fork 55 is extended from the transfer position 55a to the storage position 55b by extending the bending-extension arm 52, and then the fork 55 is lowered below the shelf board 17, the space between the shelf boards 17 is increased. Since the fork 55 passes between the shelves 17 because it is larger than the short dimension of the fork 55 and shorter than the width of the storage container 20, the storage container 20 rests on the shelf 17 as shown in FIG. It will be in the state shown. In this manner, the storage container 20 supported on the fork 55 is transferred onto the shelf board 17 as shown in FIG. Although the transfer of the storage container 20 is completed, the retractable arm 52 is retracted to return the fork 55 to the transfer position 55a so that the transfer cart 50 can move to the next operation. 53, the fork 55 and the bendable arm 52 are turned to return to a posture in which the longitudinal direction of the fork 55 coincides with the conveying direction W.
When the storage container 20 stored in the storage shelf 13 is taken out and transferred to the transport carriage 50, the fork 55 is placed between the shelf boards 17 at a position slightly below the shelf board 17 in the vertical direction H. The storage container 20 can be transferred from the top of the shelf board 17 to the fork 55 by raising the fork 55 after being inserted therebetween (state of FIG. 7). Thereafter, the fork 55 in a state in which the storage container 20 is supported at the storage position 55b is retracted to the transfer position 55a on the transfer carriage 50 side by contracting the retractable arm 52 (state of FIG. 5). Transferred from the storage shelf 13 to the transport carriage 50.

(Before transfer start)
A state in the substrate storage space 27 when the storage container 20 is transferred from the transport carriage 50 to the storage shelf 13 will be described.
Before the transfer start, as shown in FIGS. 4 and 5, since the carriage cart pad 58 serving as the power transmission side of the non-contact power feeding and the container pad 28 serving as the power receiving side are kept close, Driving power is continuously supplied to the FFU 24 by non-contact power feeding. Therefore, the fan of the FFU 24 continues to send the cleaned air into the substrate storage space 27 through the filter. In this state, air is sent into the substrate storage space 27 by the FFU 24, so that the internal pressure of the storage container 20 is higher than that of the surrounding environment, and external substances such as dust enter the substrate storage space 27 from the surrounding environment. I can't. For this reason, the cleanliness in the substrate storage space 27 is kept high, and dust or the like does not adhere to the substrate stored in the storage container 20.

(Transferring)
While the fork 55 is moved from the transport position 55a to the storage position 55b for transfer, the container pad 28 attached to the storage container 20 on the fork 55 is separated from the transport cart pad 58. , The FFU 24 can no longer be supplied with driving power, and blowing by the FFU 24 is stopped.
However, as shown in FIG. 3, the storage container 20 has a structure in which the first opening 25a and the second opening 25b connected to the substrate storage space 27 are closed and sealed by the shutter 21 and the FFU mounting plate 22, respectively. Therefore, the air in the substrate storage space 27 cannot escape to the outside. Therefore, the internal pressure of the substrate storage space 27 increased by the FFU 24 blowing on the fork 55 at the transfer position 55a before the start of transfer is maintained higher than the surrounding environment.
Since the internal pressure of the substrate storage space 27 remains higher than that of the surrounding environment, even if the blowing of the FFU 24 is stopped during the transfer, external substances cannot enter the substrate storage space 27 from the surrounding environment. The cleanliness in the substrate storage space 27 is kept high.

(After transfer)
In a state where the transfer is completed and the storage container 20 is supported by the shelf 17 on the storage shelf 13 as shown in FIGS. 6 and 7, the storage shelf pad 18 on the non-contact power transmission side is the container pad. 28 is approaching, the driving power is supplied to the FFU 24 again. Therefore, after the transfer is completed, the FFU 24 resumes blowing air into the substrate storage space 27, so that the internal pressure of the substrate storage space 27 is kept high and the cleanliness in the substrate storage space 27 is maintained.
As described above, in the transfer facility 10 according to the present embodiment, although there is a period during which air blown by the FFU 24 is interrupted during transfer, the cleanliness in the substrate storage space 27 is improved from before the transfer is started to after the transfer is completed. It is kept high up to.

(Advantages of this embodiment)
In the transfer facility 10 of the present embodiment, even if the FFU 24 stops during the transfer, the cleanliness in the substrate storage space 27 is maintained, so that it is not necessary to continue supplying power to the FFU 24 during the transfer. Therefore, the transport carriage pad 58 on the extension frame 59 does not need to follow the movement of the fork 55 in the transfer direction Y during the transfer. Therefore, it is not necessary to use a highly flexible cable for wiring, and the transport facility 10 can be constructed at a low cost.
Further, in the present embodiment, the non-contact power supply pad attached to the storage container 20 for supplying the driving power of the FFU 24 is only one of the container pads 28, as in the prior art shown in FIG. There is no need to provide the two power receiving pads 88a and 89a. For this reason, the cost required for preparing each storage container 20 can be kept low.

  In the present embodiment, since the first opening 25a and the second opening 25b connected to the substrate storage space 27 are closed and the storage container 20 is in a sealed state, the substrate storage space is blown by the FFU 24. Once the internal pressure of 27 is once increased, the internal pressure is unlikely to decrease even after the air blowing is stopped. Therefore, even if it takes some time for transfer, there is no possibility that the internal pressure drops during this time and the external substance flows into the substrate storage space 27.

In this embodiment, since the transport carriage pad 58 is provided on the extension frame 59 attached to the swivel base 53, the transport carriage pad 58 is provided outside the fork 55 as shown in FIGS. Can be provided. Therefore, as shown in FIG. 4, even when the container pad 28 is positioned outside the fork 55 when the storage container 20 is supported on the fork 55, the container pad 28 is positioned outside the fork 55. By appropriately designing the shape of the extension frame 59 so that non-contact power feeding can be performed, the position of the transport carriage pad 58 can be adjusted and provided. In addition, since the extension frame 59 extends in the direction opposite to the bending / extending direction of the bending / extending arm 52, that is, the moving direction of the fork 55, the expansion frame 59 does not prevent the bending / extending of the bending / extending arm 52 and the movement of the fork 55. Further, since the expansion frame 59 and the transport carriage pad 58 are rotated together with the fork 55, the power supply to the container pad 28 can be continued until immediately before the transfer operation by the bending / extending arm 52 is started.
Furthermore, if the shape of the expansion frame 59 is appropriate, the transport cart pad 58 and the container pad 28 in a state where the storage container 20 is supported on the fork 55 at the transport position 55a as shown in FIGS. The positional relationship between the storage shelf pad 18 and the container pad 28 when the storage container 20 is stored in the storage shelf 13 as shown in FIGS. 6 and 7 can be made the same. Then, it is possible to make the electromagnetic conditions of non-contact power supply the same regardless of whether the storage container 20 is stored on the storage shelf 13 or is transported on the transport carriage 50. Other than the above, the operation of the FFU 24 can be made constant, and the internal pressure in the substrate storage space 27 and thus the cleanliness can be kept stable.

(Modification)
In the present embodiment, as shown in FIG. 3, the FFU 24 blows air from the second opening 25b opposite to the first opening 25a serving as a substrate loading / unloading port. However, the blowing direction is limited to this. Instead, it is only necessary that the internal pressure in the substrate storage space 27 can be increased by blowing air. For example, air may be blown from the upper surface side of the storage container 20. In this embodiment, the FFU 24 and the container pad 28 are both attached to the second opening 25b side. However, if the FFU 24 and the container pad 28 are connected by a power cable, the FFU 24 is different from the container pad 28 (for example, It can also be attached to the top surface.
In the present embodiment, the FFU 24 is attached to the FFU attachment plate 22, and the FFU attachment plate 22 can be attached to and detached from the second opening 25b to open the second opening 25b. Although it is possible to close, the surface on the side where the FFU 24 is attached in the storage container 20 may be always closed. That is, the FFU 24 may be attached to the FFU attachment plate 22 integrated with the container body 25 so that the FFU attachment plate 22 forms one surface of the container body 25.

  In the present embodiment, the positional relationship between the power transmission side and the power reception side of the non-contact power feeding is the same in both the storage shelf 13 and the fork 55 at the transport position 55a, but their relative positions are strictly the same. The pad on the power transmission side (storage shelf pad) so that non-contact power feeding to the FFU 24 is performed during a period other than during the transfer operation (period during which the bending / extension arm 52 extends and contracts). 18, the transport cart pad 58) and the power receiving side pad (container pad 28) need only be arranged so as to be sufficiently close to each other.

  In this embodiment, the transport carriage pad 58 is attached to the swivel base 53 via the extension frame 59. However, the extension frame 59 is not necessarily provided, and the structure of the transport carriage 50, the storage container 20, the storage shelf 13, and the like. In particular, the arrangement of the transport carriage pad 58 may be changed according to the arrangement of the container pad 28 and the storage shelf pad 18. For example, if the swivel base 53 has a shape that extends to the outside of the fork 55 in plan view, the transport carriage pad 58 may be directly attached on the swivel base 53 that is outside the fork 55.

  In the present embodiment, the container pad 28, the storage shelf pad 18, and the transport carriage pad 58 are configured to perform power transmission / reception by a non-contact power feeding method, but measures against generation of dust and sparks due to mechanical contact, If treatment for performing accurate alignment is performed, these pads may be configured as a contact power supply method, for example, a method of supplying power by bringing metal terminal lands spread in a planar shape into contact with each other.

  In the present embodiment, the storage container 20 is transported using the transport carriage 50 traveling on the rail laid along the transport path as the transport means. However, the transport means is not limited to this, for example, A ceiling transport vehicle that transports the storage container 20 while being suspended from the ceiling side of the facility may be used. Further, the storage unit is not limited to the storage shelf 13 of the present embodiment. For example, the storage unit 20 may be stored by placing the storage container 20 on a pallet provided with a non-contact power feeding device. In addition, the storage unit may be configured by a single storage shelf instead of the storage shelf 13 as in the present embodiment.

10 Transport Equipment 11 Rack 13 Storage Shelf 18 Storage Shelf Pad 20 Storage Container 21 Shutter 24 FFU
28 Container pad 50 Transport cart 55 Fork 55a Transport position 55b Storage position 58 Transport cart pad 59 Expansion frame

Claims (5)

In transport equipment for transporting storage containers for storing goods,
Transport means for transporting the storage container, and a storage unit for storing the storage container,
The transport means includes a transfer device that transfers the storage container between the transport means and the storage unit,
The storage container has a blower that blows purified air into the storage container,
While the storage container is being transported by the transport means and while the storage container is being stored by the storage section, power transmission means for supplying operating power from the transport means or the storage section to the blower Are respectively provided in the transport means and the storage unit,
While the storage container is being transferred between the transfer means and the storage unit by the transfer device, the internal pressure is higher than the surrounding environment due to the air blown by the air blower before the start of transfer. A transfer facility characterized in that it is possible to prevent an inflow of external substances from the surrounding environment while being transferred by being able to maintain an elevated state. The storage container further includes a container body having a storage space capable of storing articles therein, and a container power receiver for receiving operating power of the blower supplied by a non-contact method,
The transfer device includes a support unit for supporting the storage container, and a transfer unit that moves the support unit between a transfer position on the transfer unit side and a storage position on the storage unit side. And
The transport means includes a transport means power transmitter that transmits power in a non-contact manner to the container power receiver of the storage container supported by the support portion at the transport position;
The storage unit includes a storage shelf for storing the storage container, and a storage unit transmitter that transmits power to the container power receiver of the storage container stored in the storage shelf in a non-contact manner. And
The transfer means moves the support section in a state of supporting the storage container between the transport position and the storage position, thereby moving the storage container between the transport means and the storage section. Can be transferred to
While the storage container is moved between the transfer position and the storage position by the transfer means, the internal pressure is higher than the surrounding environment by the air blown by the air blower before the start of the movement. The conveyance equipment according to claim 1, wherein an inflow of an external substance from the surrounding environment while being moved can be prevented by being maintained. Of the outer surface of the container body, the first surface is formed with a first opening connected to the storage space, and the second surface opposite to the first surface is formed with the first opening. An opposing second opening is formed;
The first opening can be opened or closed by attaching or detaching a lid to the first surface;
A blower is attached to the second surface, and the blower blows air from the second opening toward the first opening closed by the lid, thereby The conveying equipment according to claim 2, wherein the internal pressure is higher than the surrounding environment. The transport means has a swivel that swivels the support portion and the transfer means in a horizontal plane,
An extension frame extending in a direction opposite to the moving direction of the support portion by the transfer means is attached to the swivel base,
The transfer equipment according to claim 2, wherein the transfer means power transmitter is attached to the extension frame. A relative position of the storage unit power transmitter with respect to the container power receiver of the storage container stored in the storage unit;
A relative position of the transport means power transmitter with respect to the container power receiver of the storage container supported by the support portion of the transport means at the transport position;
The transport equipment according to any one of claims 2 to 4, wherein the container power receiver, the storage unit power transmitter, and the transport means power transmitter are arranged so that the power is the same.

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