JP6446808B2 - Two-fluid spray device and method for stopping two-fluid spray device - Google Patents

Description

  This embodiment is a two-fluid spraying device that sprays a sprayed fluid obtained by supplying a compressed gas such as compressed air and a liquid such as a liquid pressurized with water to a two-fluid nozzle to an atomizing fluid use destination, two-fluid The present invention relates to a spraying device stop method.

  In the invention of Patent Document 1, spraying is performed while preventing dripping from a two-fluid nozzle by means of a nozzle having siphon characteristics for sucking water and a continuous water supply tank for the nozzle to pump liquid.

JP 2007-144396 A JP-A-8-278047 JP 2010-63960 A JP 2007-154733 A

  In the invention of Patent Document 1, the liquid remaining in the pipe is blown by blowing air from another flow path to prevent liquid dripping, but there are the following problems.

(1) When the amount to be sprayed is reduced, there is a risk that the liquid will be ejected after stopping due to the residual pressure of the pipe, or that the liquid in the pipe will droop.

(2) When the amount to be sprayed is increased, it takes a considerable time to blow, and thus cannot be used for a control device that requires finely controlling the spray amount.

(3) When used in a large-scale spray system (for example, when 20 nozzles are linearly arranged at a length of 20 m, etc.), dripping of all nozzles can be effectively performed at low cost. It was difficult to prevent dripping.

  Further, in Patent Document 2, there are up to four nozzles that can be attached to one unit, and the nozzles can be arranged only in a concentrated manner, resulting in problems such as cost of the unit and difficulty in installation. .

  Further, in Patent Document 3, since a large amount of air enters the liquid piping, the compressed air in the water piping is stopped when the supply of air to the nozzle is stopped unless almost all the water in the water piping is returned to the buffer tank. As a result of the expansion, a little water remaining at various places in the system is pushed out, and there is a problem that dripping occurs.

  An object of the present embodiment is to provide a two-fluid spray device that can easily prevent dripping and a method for stopping the two-fluid spray device.

  Embodiment 1 is a compressed gas supply system that supplies a desired compressed gas, a pressurized liquid supply system that supplies a desired pressurized liquid, and an atomized fluid obtained by mixing the compressed gas and the pressurized liquid. A plurality of two-fluid nozzles for spraying the atomizing fluid to be used, and pressurization in the liquid flow passage of the two-fluid nozzle on the liquid inflow side when stopping the spraying operation of the two-fluid nozzle And a means for preventing dripping from the two-fluid nozzle by releasing the pressure of the liquid to the outside and pulling out the liquid in the liquid flow passage.

  In the second embodiment, a compressed gas supply system that supplies a desired compressed gas, a pressurized liquid supply system that supplies a desired pressurized liquid, and a pressurized liquid from the pressurized liquid supply system are not supplied. When only the compressed gas from the compressed gas supply system is supplied, the pressure of the compressed gas from the compressed gas supply system is transmitted to the liquid flow path on the discharge side of the pressurized liquid supply system, and the compressed gas is supplied. However, when stopping the spraying operation of the two-fluid nozzle and the two-fluid nozzle having the characteristic of flowing in the direction opposite to the direction in which the pressurized liquid originally flows in the liquid-flow passage, And a means for preventing dripping from the two-fluid nozzle by pulling out the liquid in the liquid flow passage.

The schematic block diagram of the system with which the two-fluid spraying apparatus of this embodiment is applied. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic configuration diagram for explaining a two-fluid spray device using a compressed gas pressurization method according to a first embodiment and showing a state during normal spraying. The schematic block diagram which shows the state which starts the dripping prevention stop control in the two fluid spraying apparatus of FIG. The schematic block diagram which shows the state which made the drainage valve the open state during the pressure fall of the compressed gas in the two fluid spraying apparatus of FIG. The schematic block diagram which shows the dripping prevention stop control completion state in the two fluid spraying apparatus of FIG. The figure which shows the dripping prevention control timing chart in the two fluid spraying apparatus of FIG. The figure which shows concretely the connection structure of the two fluid nozzle 9 in FIG. 1, and the compressed gas piping and pressurized liquid piping of a nozzle control board.

  Hereinafter, embodiments will be described with reference to the drawings.

  First, an outline of a system to which a two-fluid spraying apparatus, which is the apparatus (main body unit in FIG. 7) 100 of the present invention described below, is applied will be described with reference to FIG.

For example, the semiconductor manufacturing apparatus 02 is installed in the clean room 01, and air is supplied to and returned from the air conditioner 03 so that the temperature and humidity inside the clean room 01 become predetermined values. The temperature and humidity in 01 are detected by a detector, and this is taken into the air conditioning control panel 09 and proportional to the chilled water supply system supplied to the cooling coil 04 in the air conditioner 03 according to the difference between these and the target value. The command of the control valve 011 is changed, and further, the command of the proportional control valve 012 of the hot water supply system supplied to the heating coil 05 provided in the air conditioner 03 is changed.

  As a configuration other than this, in the air conditioner 03, the two-fluid spray header unit 06 having a plurality of two-fluid nozzles 9 and the atmosphere sprayed from the two-fluid spray header unit 06 are forced into the clean room 01. And a steam humidifying unit 08 to be described later.

  The steam humidification unit 08 is supplied with the steam on the secondary side of the proportional control valve 013 provided in the steam system installed outside the air conditioner 03, and the command of the proportional control valve 013 is from a nozzle control panel 010 described later. It has come to be given.

  The two-fluid spray control panel 010 is provided with the existing steam humidification command from the air conditioning control panel 09, and based on this, the command of the proportional control valve 013 is provided. The two-fluid spray control panel 010 is supplied with the pressurized liquid supply system L. For example, a pure water supply system and a compressed air (compressed air) supply system are connected, and the pure water from the pure water supply system and the compressed air from the compressed air supply system are supplied to each nozzle 9 of the two-fluid spray header unit 06, respectively. And a two-fluid spraying device using a pressurized liquid supply device such as a pressure pump or a pressurized liquid supply device such as a pressure pump according to the present embodiment.

  Here, the two-fluid nozzle 9 to be used supplies compressed air from a compressed gas supply system, for example, an air supply system and water from a pressurized liquid supply system, for example, a pure water supply system, as shown in Patent Document 4, for example, A plurality of two-fluid nozzles that can make the atomized fluid obtained by mixing water and fine particles into a desired location, and each nozzle affects the pressurized water supply system, If the pressurized water of the pressurized water supply system is not pressurized, this is a so-called internal mixing type nozzle that has a characteristic that the compressed air flows back to the pressurized water supply system.

  The first embodiment includes a pressurized liquid supply system L, a compressed gas supply system G, and a drainage system D described below, as shown in FIGS. The pressurized liquid supply system L includes a common pressurized liquid supply source 1 that supplies a liquid to be pressurized, such as pure water, and a pressurized liquid that supplies the pressurized fluid from the liquid supply source 1 to the two-fluid nozzle 9. A supply pipe 3 and a valve (PW2V) 16 such as an electromagnetic valve, which is provided in the middle of the liquid supply pipe 3 and opens and closes the passage of the liquid supply source 1 constituting the liquid supply stop means, are provided.

  Compressed gas supply system G In addition, a compressed gas pipe 22 that supplies compressed gas from the compressed gas supply source 6 to the two-fluid nozzle 9, and a compressed gas passage from the compressed gas supply source 6 that is provided in the middle of the compressed gas pipe 22. A valve (PA1V) 23 that opens and closes, for example, an electromagnetic valve, and a gas supply pressure that is set between the valve 23 and the two-fluid nozzle 9 in the compressed gas supply pipe 22 and can set the pressure of the compressed gas that is applied to the two-fluid nozzle 9 A controller (AEPR) 7 such as an electropneumatic regulator is provided.

  The drainage system D is a pressurized liquid supply pipe 3 of the pressurized liquid supply system L, and is provided between the valve 16 and the two-fluid nozzle 9 to discharge the liquid in the pressurized liquid supply pipe 3. It constitutes a possible drainage pipe 19 and a pressurized liquid pressure release means provided in the drainage pipe 19, and is pressurized by opening the liquid in the pressurized liquid supply pipe 3 at the time of discharge. A liquid supply pipe 3 is provided with a drain valve 20 that can be set to atmospheric pressure and is closed when not discharged.

  Furthermore, the control means 21 described below is provided. When the spraying of the two-fluid nozzle 9 is stopped, the control unit 21 closes the valve 16 to stop the supply of the pressurized liquid to the two-fluid nozzle 9 and applies the compression applied to the two-fluid nozzle 9. Before the gas pressure drops, the liquid pressure is opened to the atmospheric pressure by the drainage valve 20 at a position upstream of the two-fluid nozzle 9 and lower than the injection part of the two-fluid nozzle 9, By using both the force of the siphon effect due to the difference in height from the mist injection portion of the two-fluid nozzle 9 and the force that the compressed gas applied to the two-fluid nozzle 9 flows backward to the liquid introduction path, the two-fluid nozzle 9 By causing the liquid upstream of the liquid introduction path to flow backward from the two-fluid nozzle 9 side in the direction opposite to the original flow direction, no dripping occurs from the tip of the two-fluid nozzle 9. To stop spraying .

  The operation of the embodiment configured as described above will be described below with reference to the drawings. FIG. 2 shows a state in which the two-fluid nozzle 9 is in a normal spray. The pressure of the gas pressure controller 7 of the compressed gas supply system G is set to 350 kpa, for example, and the pressurized liquid supply system L The pressure of the liquid of the pressurized liquid supply source 1 is, for example, 330 kpa, the valves 23 and 16 are in an open state, and the valve 20 is in a closed state.

  FIG. 3 is a view for explaining a start state of dripping prevention control of the two-fluid nozzle 9 in a state where the spraying operation in the two-fluid nozzle 9 is stopped, and a gas pressure controller of the compressed gas supply system G 7 is set, for example, from 350 kpa to 0 kpa, the pressure of the liquid of the pressurized liquid supply source 1 of the pressurized liquid supply system L is, for example, 330 kpa, the valve 23 is in the open state, and the valve 16, Both 20 are closed. In this case, the dripping prevention control start command closes the valve 16 and stops the supply of the liquid to the header liquid pipe. At the same time, the pressure of the output of the gas pressure controller 7 is set from 350 kpa to 0 kpa, for example. Therefore, the pressure in the compressed gas supply pipe 22 gradually becomes 0 kpa.

  FIG. 4 is a view for explaining the state of FIG. 3, that is, the state in which the valve 20 is opened while the pressure of the compressed gas is decreasing. Specifically, when the pressure measurement value of the output of the gas pressure controller 7 becomes 150 kpa, for example, when the valve 20 is opened, the liquid in the nozzle header causes the reverse pressure of the compressed gas from the two-fluid nozzle 9 Then, the liquid in the nozzle header is drawn to the outside by the siphon effect generated when the valve 20 is opened.

  FIG. 5 is a view for explaining the stop state of the dripping prevention control of the two-fluid nozzle 9 in a state where the spraying operation in the two-fluid nozzle 9 is stopped, and a gas pressure controller of the compressed gas supply system G 7 is set to 0 kpa, for example, the pressure of the liquid of the pressurized liquid supply source 1 of the pressurized liquid supply system L is, for example, 330 kpa, the valve 23 is in an open state, and the valves 16 and 20 are Both are closed. In FIG. 4, the valve 20 in the open state is placed in a closed state when the liquid in the nozzle header is discharged moderately, so that no dripping that may occur in the two-fluid nozzle 9 occurs. , Spraying can be stopped.

FIG. 6 is a time chart for explaining the operation of the control means 21 described above. Specifically, the relationship between the gas pressure controller 7 and the opening / closing timing of the valves 16, 20, 23 is a time chart. In the figure, t1 is when the spray command is stopped and the valve 16 is closed, t2 is when the spray command is given again, and t3 is when the valve 16 is opened.
FIG. 7 shows a liquid header pipe 92 for supplying pressurized liquid from the pressurized liquid supply system L to the two-fluid nozzle 9 and a compressed gas from the compressed gas supply system G to the two-fluid nozzle 9. It is a figure which shows the connection structure with the gas header piping 91 for doing specifically.

FIG. 7 is configured as follows. That is, in a two-fluid spray device that sprays atomized fluid obtained by mixing compressed gas and pressurized liquid with the two-fluid nozzle 9 onto the atomizing fluid use destination, the compressed gas from the compressed gas supply source 6 circulates. A gas header pipe 91, a gas buffer pipe 96 connected to the gas header pipe 91 in a vertical direction and an opening positioned upward;
A liquid header pipe (liquid header pipe main flow passage) 92 having a structure in which the pressurized liquid from the pressurized liquid supply source 1 flowing inside flows from the terminal end side to the starting end side, for example, a straight pipe is inclined; The liquid buffer pipe 93e is connected to the terminal end of the liquid header pipe 92 in a vertical direction so that the opening is positioned upward and is higher than the height of the terminal end of the liquid header pipe 92. At least one liquid buffer pipe 93 connected to a portion other than the terminal end portion of the header pipe 92 in the vertical direction so that the opening is positioned upward, the compressed gas from the gas buffer pipe 96, and the liquid buffer pipe 92. The pressurized liquid from 92 is mixed, and the atomized fluid obtained by mixing is mixed with at least two two-fluid nozzles 9 for spraying the atomized fluid to the use destination, and each liquid bag. At least two pipe connection joints (manifolds) 94 connected to the openings of the flange pipes 93e and 93, respectively, both ends of the pipe connection joints 94 and the liquid supply part of the two-fluid nozzle 9 are connected to each other. At least two pressurized liquid supply pipes 95 for supplying pressurized liquid from the header pipe 92, for example, a flexible vinyl pipe are provided.

  As a result, when the two-fluid nozzle 9 is spraying, no air remains in the liquid header pipe 92, and when the two-fluid nozzle 9 temporarily stops spraying, the air concentrated locally in the liquid header pipe 92 Therefore, the compressed gas is quickly discharged from the two-fluid nozzle 9 when the next spraying is resumed.

  According to the first embodiment described above, it is possible to provide a two-fluid spray device capable of easily preventing dripping. The first embodiment satisfies the following conditions.

  1) The liquid header pipe 92 maintains a structure in which pressurized liquid flows from the terminal end side to the starting end side, that is, an upward gradient.

  2) All the liquid buffer pipes 93 and 93e are provided vertically upward from the liquid header pipe 92.

  3) A buffer pipe 93e is always arranged at the final end of the liquid header pipe 92 so that no air pool remains in the liquid header pipe 92.

  4) Of at least two, except for the terminal buffer pipe 93e, the other buffer pipes 93 always extend to a position higher than the height of the terminal buffer pipe 93e.

  5) The pressurized liquid supply pipe 95 for supplying the pressurized liquid to the two-fluid nozzle 9 is connected to the upper end of the pipe connection joint 94.

  6) At least one two-fluid nozzle 9 is connected to all the buffer pipes.

Since the above-described embodiment satisfies the above conditions, it is possible to prevent a gas reservoir from locally gathering in the liquid header pipe 92 and prevent the air from taking a long time at the start of the next spraying. It is possible to prevent the pool from remaining in the liquid path and leading to the failure of the dripping prevention control when the spraying is stopped.

  The embodiment described above may be modified as follows.

(1) During spraying, a configuration in which gas bubbles do not remain in the compressed gas supply system, specifically, a configuration in which all the plurality of buffer pipes 95 are directed vertically upward so as not to form a convex portion. Is desirable.

(2) In the above-described embodiment, as the two-fluid nozzle 9, a reverse pressure type nozzle (so-called internal mixing type nozzle) is taken as an example, but a non-back pressure type nozzle (so-called internal mixing type nozzle), Specifically, the pressure of the compressed gas does not affect the pressurized liquid supply system, and the two-fluid nozzle has the characteristic that the compressed gas does not flow back into the pressurized liquid supply system even if the pressurized liquid of the pressurized liquid supply system is not pressurized. May be used.

(3) The pressurized liquid supply source 1 of the above-described embodiment is not provided with a dedicated liquid supply source for constituting this embodiment, for example, a liquid supply source for another purpose arranged in a factory. Although the case where it is used has been described, it is needless to say that any liquid supply source may be used.

(4) In the above-described embodiment, as an example of the dripping prevention means, the dripping from the two-fluid nozzle is prevented by drawing the pressurized liquid in the piping of the roughly pressurized liquid supply system by the siphon principle. However, the present invention is not limited to this, and when stopping the spraying operation of the two-fluid nozzle, the pressure of the pressurized liquid in the liquid flow passage on the liquid inflow side of the two-fluid nozzle is released to the outside. At the same time, it may be a means for preventing dripping from the two-fluid nozzle by drawing out the liquid in the liquid flow passage.

(5) Further, as a control means for preventing dripping, when the spraying of the two-fluid nozzle is stopped, the pressurized liquid and compression from the pressurized liquid supply system with the first and second valves closed. The supply of compressed gas from the gas supply system is stopped, the draining means is opened, and the liquid from the two-fluid nozzle is removed by drawing the pressurized liquid in the pressurized liquid supply system piping by the siphon principle. You may prevent.

(6) Further, the control means may be as follows instead of the above-described embodiment. That is, when the spraying of the two-fluid nozzle is stopped, the supply of the pressurized liquid to the two-fluid nozzle is stopped by the liquid supply stop means, and before the pressure of the compressed gas applied to the two-fluid nozzle drops, By releasing the liquid pressure to the atmospheric pressure by the pressurized liquid pressure releasing means at a position upstream from the two-fluid nozzle and lower than the jet part of the two-fluid nozzle, the pressurized liquid pressure releasing means and the two-fluid nozzle By using both the force of the siphon effect due to the difference in height from the mist injection part and the force of the compressed gas applied to the two-fluid nozzle flowing back to the liquid introduction passage, it is upstream of the liquid introduction passage of the two-fluid nozzle. By causing the liquid on the side to flow backward from the two-fluid nozzle side in the direction opposite to the original flow direction, spraying is stopped so that no dripping occurs from the tip of the two-fluid nozzle.

(7) As a modification of FIG. 7, the liquid header pipe 92 and the liquid buffer pipes 93 and 93e are not provided. Instead, the liquid flow passage main portion and the liquid flow passage branching portion are provided with an integral liquid flow passage. There may be.

(8) As a modification of FIG. 7, the gas buffer pipe 96 may not be provided, and the two-fluid nozzle 9 may be directly attached to the gas header pipe 91.

(9) As a modification of FIG. 7, the gas buffer pipe 96, the pipe connecting joint 94, and the pressurized liquid supply pipe 95 may be omitted, and the nozzle 9 may be directly attached to the opening of the liquid buffer pipe 93.

(10) Gas supply stop means for stopping supply of compressed gas, which is the two-fluid spray device shown in FIGS. 2 to 5, for example, a compressed gas supply system G having an electromagnetic valve 23, and supply of pressurized liquid can be stopped. A liquid supply stop means, for example, a solenoid valve 16, and a pressurized liquid pressure release means, for example, a pressure liquid supply system L having a drainage valve 20 for arbitrarily releasing the pressure to atmospheric pressure, and a pressurized liquid A liquid introduction path such as the pressurized liquid pipe 3 and a gas introduction path such as the compressed gas pipe 22 for introducing the compressed gas are used, and the atomized fluid obtained by introducing the pressurized liquid and the compressed gas is used as the atomizing fluid. When the pressurized liquid from the pressurized liquid supply system L is supplied by the operation of the electromagnetic valve 16 and only the compressed gas from the compressed gas supply system G is supplied by the electromagnetic valve 23. Compressed gas pressure from compressed gas supply system G is increased A two-fluid nozzle 9 having a characteristic that the compressed gas from the compressed gas supply system G flows in the direction opposite to the direction in which the pressurized liquid flows through the pressurized liquid pipe 3 while being transmitted to the body supply system L. In the two-fluid spraying device provided with That is, as shown in FIG. 6, when spraying of the two-fluid nozzle 9 is stopped, the liquid solenoid valve 16 applies the pressurized liquid to the two-fluid nozzle 9 in a state where the supply of the pressurized liquid is stopped. Before the pressure of the compressed gas is lowered, the first pressure is released to the atmospheric pressure by the pressurized liquid pressure release means at a position upstream of the two-fluid nozzle 9 and lower than the injection portion of the two-fluid nozzle 9. The force of the siphon effect due to the height difference between the step, the drain valve 20 and the mist injection portion of the two-fluid nozzle 9, and the force of the compressed gas applied to the two-fluid nozzle 9 flowing back to the pressurized liquid pipe 3 By using both, the second step of causing the liquid upstream of the pressurized liquid pipe 3 of the two-fluid nozzle 9 to flow backward from the two-fluid nozzle 9 in the direction opposite to the original flow direction is performed. Is a method of stopping a two-fluid spraying device .

  The method for stopping the two-fluid spray device is actually performed by the control means 21 comprising a microprocessor. As a result, spraying can be stopped so that dripping does not occur from the tip of the two-fluid nozzle 9.

(11) The two-fluid spray device described in FIGS. 2 to 5 and 7, which is a gas supply stop means that can stop supply of compressed gas, for example, a compressed gas supply system G having an electromagnetic valve 23, and a pressurized liquid A pressurized liquid supply system L having a liquid supply stop means for enabling the supply stop, for example, an electromagnetic valve 16, and further a pressurized liquid pressure releasing means for releasing the pressure to atmospheric pressure, for example, a drain valve 20; It has a liquid introduction path for introducing pressurized liquid, such as a pressurized liquid pipe 3, and a gas introduction path for introducing compressed gas, for example, a compressed gas pipe 22, and atomizes the atomized fluid obtained by introducing the pressurized liquid and compressed gas. The pressurized fluid supplied from the pressurized liquid supply system L is not supplied by the operation of the electromagnetic valve 16, but only the compressed gas from the compressed gas supply system G is supplied by the electromagnetic valve 23. The pressure of the compressed gas from the compressed gas supply system G And a plurality of two-fluid nozzles 9 having characteristics of flowing in the direction opposite to the direction in which the pressurized liquid originally flows through the pressurized liquid pipe 3, the discharge side of the pressurized liquid supply system L, Disposed between the liquid introduction side of the two-fluid nozzle 9 and one end of the pressurized liquid supply system L so that the pressurized liquid from the pressurized liquid supply system L flows to each two-fluid nozzle 9. A common liquid header pipe 92 communicated with the other side, and a plurality of liquid branch pipes having one end communicated with the other end of the liquid header pipe 92 and the other end communicated with the liquid introduction side of each two-fluid nozzle 9 (Liquid buffer pipe 93), and between the discharge side of the compressed gas supply system G and the gas introduction side of each two-fluid nozzle 9, the compressed gas from the compressed gas supply system G is supplied to each two-fluid nozzle 9 One end of which is in communication with the discharge side of the compressed gas supply system G And a plurality of gas branch pipes (gas buffers) 96 having one end connected to the other end of the gas header pipe 91 and the other end connected to the gas introduction side of each two-fluid nozzle 9. A liquid supply system pressure release valve, for example, a drain valve 20, disposed so as to open the pressurized liquid to atmospheric pressure upstream of the liquid header pipe 92 or the pressurized liquid supply system L. In the two-fluid spray device, the two-fluid spray device is stopped as follows.

  In the two-fluid spraying device having such a configuration, when the spraying of the two-fluid nozzle 9 is stopped as shown in FIG. 6, the pressure of the gas header pipe 91 is reduced while the supply of the liquid to the liquid header pipe 92 is stopped. Before lowering, the first step of releasing the pressure of the liquid header pipe 92 to the atmospheric pressure by the drain valve 20, the force of siphon effect due to the difference in height between the opening and the place where each of the two fluid nozzles 9 is installed, By using both of the forces in which the gas applied to the fluid nozzle 9 flows backward to the liquid header pipe 92, the liquid upstream of the liquid flow passage of the two-fluid nozzle 9 is transferred from the two-fluid nozzle 9 side to the liquid header pipe 92 side. This is a stopping method for carrying out the second step of making the air flow backward. The method for stopping the two-fluid spray device is actually performed by the control means 21 comprising a microprocessor.

 As a result, spraying can be stopped so that dripping does not occur from the tip of the two-fluid nozzle 9.

  DESCRIPTION OF SYMBOLS 01 ... Clean room, 02 ... Semiconductor manufacturing apparatus, 03 ... Air conditioner, 04 ... Cooling coil, 05 ... Heating coil, 06 ... Nozzle coil unit, 07 ... Fan, 08 ... Steam humidification unit, 09 ... Air conditioning control panel, 010 ... Nozzle Control panel, 011 ... proportional control valve, 012 ... proportional control valve, 013 ... proportional control valve, 1 ... pressurized liquid supply source, 3 ... pressurized liquid piping, 6 ... compressed gas supply source, 7 ... gas supply pressure controller , 9 ... Two-fluid nozzle, 16, 23 ... Valve, 19 ... Drain pipe, 20 ... Drain valve, 21 ... Control means, 22 ... Compressed gas pipe, 91 ... Gas header pipe, 92 ... Liquid header pipe, 93 ... Liquid buffer pipe, 94... Pipe connection joint, 95. Pressurized liquid supply pipe, 96. Gas buffer pipe, 100.

Claims (2)

A gas header pipe through which compressed gas from a compressed gas supply source flows;
A liquid header pipe having a structure in which the pressurized liquid from the pressurized liquid supply source circulating inside flows from the terminal end side to the starting end side;
A terminal liquid buffer pipe connected to a terminal portion of the liquid header pipe in a vertical direction with an opening portion positioned upward and higher than a height of the terminal portion of the liquid header pipe, and the liquid Other liquid buffer pipes connected to a part other than the terminal part of the header pipe in a vertical direction so that the opening is positioned upward and extending to a position higher than the height of the terminal liquid buffer pipe ;
Each of the gas header pipes is connected to the pressurized liquid from the liquid buffer pipe and the compressed gas from the gas header pipe, and the atomized fluid obtained by mixing is atomized. At least two two-fluid nozzles for spraying the fluid destination;
At least two pipe connection joints respectively connected to the openings of the liquid buffer pipes;
At least two pressurized liquid supply pipes for supplying pressurized liquid from the liquid header pipe, both ends of which are respectively connected to the upper end of each joint for pipe connection and the liquid supply part of the two-fluid nozzle,
Comprising
When the two-fluid nozzle is sprayed, no air pool remains in the liquid header pipe, and when the two-fluid nozzle temporarily stops spraying, an air pool concentrated in the liquid header pipe cannot be formed locally. The two-fluid spraying device is characterized in that the compressed gas is quickly discharged from the two-fluid nozzle when the next spraying is resumed. A gas header pipe through which compressed gas from a compressed gas supply source flows;
A gas buffer pipe connected to the gas header pipe in a vertical direction so that the opening is positioned upward;
A liquid header pipe having a structure in which the pressurized liquid from the pressurized liquid supply source circulating inside flows from the terminal end side to the starting end side;
A terminal liquid buffer pipe connected to a terminal portion of the liquid header pipe in a vertical direction with an opening portion positioned upward and higher than a height of the terminal portion of the liquid header pipe, and the liquid Other liquid buffer pipes connected to a part other than the terminal part of the header pipe in a vertical direction so that the opening is positioned upward and extending to a position higher than the height of the terminal liquid buffer pipe ;
An atomized fluid obtained by mixing the compressed gas from the gas buffer pipe and the pressurized liquid from the liquid buffer pipe is connected to the opening of each gas buffer pipe. , At least two two-fluid nozzles for spraying the atomizing fluid usage destination;
At least two pipe connection joints respectively connected to the openings of the liquid buffer pipes;
At least two pressurized liquid supply pipes for supplying pressurized liquid from the liquid header pipe, both ends of which are respectively connected to the upper end of each joint for pipe connection and the liquid supply part of the two-fluid nozzle,
Comprising
When the two-fluid nozzle is sprayed, no air pool remains in the liquid header pipe, and when the two-fluid nozzle temporarily stops spraying, an air pool concentrated in the liquid header pipe cannot be formed locally. The two-fluid spraying device is characterized in that the compressed gas is quickly discharged from the two-fluid nozzle when the next spraying is resumed.

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