JP6447049B2 - Physical quantity sensor, electronic device and mobile object - Google Patents

Description

  The present invention relates to a physical quantity sensor, an electronic device, and a moving object.

  In recent years, functional elements using, for example, silicon MEMS (Micro Electro Mechanical System) technology have been developed as vibration devices. And the gyro sensor which detects an angular velocity using the gyro element as an example of this functional element is known.

  As an example of such a gyro sensor, for example, in Patent Document 1, two masses (driving units) provided on the XY plane among three axes (X axis, Y axis, Z axis) orthogonal to each other are disclosed. A support substrate for supporting the two masses, a suspension spring for supporting the two masses on the support substrate so as to vibrate, a detection plate (electrode part) for detecting vibrations of the two masses, and a driving means for driving the two masses. Are disclosed.

  In the gyro sensor described in Patent Document 1, when two masses vibrate in opposite directions along the X-axis direction, when an angular velocity around the Y-axis is applied to the mass, the Coriolis force is exerted in the Z-axis direction. Acts to vibrate the mass in the Z-axis direction. Thereby, when the separation distance between the mass and the detection plate changes, the capacitance between them changes. The angular velocity around the Y axis can be detected based on such a change in capacitance.

  Moreover, the gyro sensor described in Patent Document 1 has a steering voltage member, and it is disclosed that unnecessary vibration applied to the mass is reduced by the steering voltage member. Specifically, it is unnecessary to apply the mass in the Z-axis direction by electrostatically attracting the mass in the direction of the steering voltage member by a steering voltage member provided adjacent to the two masses in the Z-axis direction. Reduces vibration.

  However, in the gyro sensor described in the cited document 1, since the area where the steering voltage member and the mass overlap as seen from the Z-axis direction is small, the electrostatic attractive force generated between them is small. Therefore, the movement of the mass in the Z-axis direction cannot be sufficiently suppressed, and as a result, there is a problem that the detection characteristic (accuracy) of the gyro sensor is deteriorated.

JP 2007-304099 A

  An object of the present invention is to provide a physical quantity sensor having excellent detection characteristics, an electronic device including the physical quantity sensor, and a moving body.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

[Application Example 1]
The physical quantity sensor according to this application example includes a fixed part,
A drive unit that vibrates along a first direction;
A first beam portion connecting the fixed portion and the drive portion;
A detector that vibrates along a second direction orthogonal to the first direction by Coriolis force acting on the drive unit;
A second beam part connecting the drive part and the detection part;
A compensation electrode that generates an electrostatic attraction along the second direction between the driving unit and the driving unit;
The drive unit has a plurality of non-electrode parts configured by holes or recesses that are open to the compensation electrode side, and the plurality of non-electrode parts are arranged along the first direction,
The compensation electrode has a plurality of electrode portions arranged along the first direction.

  Thereby, when it sees from a 2nd direction, the area where a drive part and an electrode part overlap can be enlarged compared with these conventional overlapping areas. Therefore, the electrostatic attractive force generated between the drive unit and the electrode unit can be increased. For example, the detection unit has a second direction component accompanying the vibration of the drive unit due to the processing accuracy of the first beam unit. Unnecessary vibrations that vibrate can be reduced sufficiently (efficiently). As a result, the physical quantity sensor can exhibit excellent vibration characteristics.

[Application Example 2]
In the physical quantity sensor according to this application example, it is preferable that the electrode unit is included in the non-electrode unit in an initial state when viewed from the second direction.

  Thereby, when the drive unit is in an initial state, that is, in a state where the drive unit is not vibrating along the first direction, it is possible to reduce the occurrence of electrostatic attraction between the drive unit and the electrode unit. Therefore, when the drive unit is in the initial state, the gap between the drive unit and the electrode unit is extremely small. That is, an unintended movement along the second direction, or a pull-in phenomenon in which the electrostatic attraction between them suddenly increases, causing the drive unit and the electrode unit to be attracted and contacted by the electrostatic attraction. Can be prevented.

[Application Example 3]
In the physical quantity sensor according to this application example, it is preferable that the non-electrode portion has a slit shape along a direction orthogonal to both the first direction and the second direction.

  Thereby, a non-electrode part can be efficiently arrange | positioned at a drive part, As a result, the enlargement of a physical quantity sensor can be prevented.

[Application Example 4]
In the physical quantity sensor according to this application example, it is preferable that the electrode portion has a slit shape along a direction orthogonal to both the first direction and the second direction.

  Thereby, when the drive part is displaced, the overlapping area of the electrode part and the drive part can be increased.

[Application Example 5]
The physical quantity sensor according to this application example preferably includes a support substrate having a convex portion that supports the compensation electrode.

  Thereby, since the distance between the drive part and the electrode part with which the electrode for compensation is provided can be made smaller, the electrostatic attractive force generated between the drive part and the electrode part can be further increased. As a result, unnecessary vibration can be further reduced.

[Application Example 6]
In the physical quantity sensor according to this application example, it is preferable that one pair of the compensation electrodes is provided along the first direction.

  Accordingly, only one necessary compensation electrode can be selected and used from the pair of compensation electrodes in accordance with the generation characteristics such as direction and magnitude of unnecessary vibration.

[Application Example 7]
The physical quantity sensor according to this application example preferably includes a power supply unit that applies a DC voltage between the compensation electrode and the driving unit.
Thereby, compared with the case where an alternating voltage is used, the structure of a physical quantity sensor can be simplified.

[Application Example 8]
An electronic apparatus according to this application example includes the physical quantity sensor according to this application example.
Thereby, an electronic device with high reliability can be provided.

[Application Example 9]
The moving body of this application example includes the physical quantity sensor of this application example.
Thereby, a reliable mobile body can be provided.

It is a top view which shows the physical quantity sensor which concerns on 1st Embodiment of this invention. It is the sectional view on the AA line in FIG. It is an enlarged plan view of the sensor element shown in FIG. It is a figure for demonstrating the state of a detection part when the drive part shown in FIG. 1 displaces along an X-axis direction. It is a figure for demonstrating the state of a detection part when the drive part shown in FIG. 1 displaces along an X-axis direction. It is a figure for demonstrating the displacement along the X-axis direction of the drive part shown in FIG. It is a figure for demonstrating the positional relationship of a drive part and a compensation electrode when the drive part shown in FIG. 1 displaces along an X-axis direction. It is a figure for demonstrating the effect | action of the electrode for compensation shown in FIG. It is a top view which shows the 1st reference example of the physical quantity sensor of this invention. It is the BB sectional view taken on the line in FIG. It is a top view which shows the 2nd reference example of the physical quantity sensor of this invention. It is CC sectional view taken on the line in FIG. 1 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic apparatus of the present invention is applied. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device of this invention is applied. It is a perspective view which shows the structure of the digital still camera to which the electronic device of this invention is applied. It is a perspective view which shows the motor vehicle to which the mobile body of this invention is applied.

  Hereinafter, a physical quantity sensor, an electronic device, and a moving body of the present invention will be described in detail based on preferred embodiments and reference examples shown in the accompanying drawings.

1. Physical quantity sensor << first embodiment >>
First, the physical quantity sensor 10 will be described.

  FIG. 1 is a plan view showing a physical quantity sensor according to the first embodiment of the present invention. 2 is a cross-sectional view taken along line AA in FIG. FIG. 3 is an enlarged plan view of the sensor element shown in FIG. 4 and 5 are diagrams for explaining the state of the detection unit when the drive unit shown in FIG. 1 is displaced along the X-axis direction. FIG. 6 is a diagram for explaining the displacement along the X-axis direction of the drive unit shown in FIG. 1. FIG. 7 is a diagram for explaining the positional relationship between the drive unit and the compensation electrode when the drive unit shown in FIG. 1 is displaced along the X-axis direction. FIG. 8 is a diagram for explaining the operation of the compensation electrode shown in FIG.

  1 to 8, for convenience of explanation, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other. In the following, a direction parallel to the X axis (first axis) is referred to as “X axis direction (first direction)”, and a direction parallel to the Y axis (third axis) is referred to as “Y axis direction (third direction)”. A direction parallel to the Z-axis (second axis) is referred to as a “Z-axis direction (second direction)”. In the following description, for convenience of explanation, the upper side in FIG. 2 is referred to as “upper”, the lower side is referred to as “lower”, the right side is referred to as “right”, and the left side is referred to as “left”. The right side is called “right” and the left side is called “left”. In FIG. 1, illustration of the lid member 22 and the first and second power supply units 71 and 72 included in the package 2 is omitted.

  A physical quantity sensor 10 shown in FIGS. 1 and 2 is an example of the physical quantity sensor of the present invention, and is a gyro sensor that detects an angular velocity around the Y axis.

  The physical quantity sensor 10 includes a package 2, two sensor elements 1A and 1B housed in the package 2, a first power supply unit (power supply unit) 71, and a second power supply unit (power supply unit) 72. .

<Package>
As shown in FIG. 2, the package 2 is a member that houses the sensor elements 1 </ b> A and 1 </ b> B, and includes a support substrate 21 and a plate-like lid member 22 provided on the support substrate 21.

  The support substrate 21 is formed with recesses 211A and 211B opened on the upper surface. Specifically, the support substrate 21 includes a bottom portion 212, a side wall portion 213 erected from the outer edge portion of the bottom portion 212, and a central wall portion 214 erected from the center portion of the bottom portion 212, thereby forming a recess. 211A and the recessed part 211B are formed. The sensor element 1A is provided on the recess 211A, and the sensor element 1B is provided on the recess 211B.

  In addition, four convex portions 215 are provided on the bottom portion 212. Of the four convex portions 215, two convex portions 215 are provided side by side in the X-axis direction in the concave portion 211A, and the remaining two convex portions 215 are provided in the concave portion 211B side by side in the X-axis direction. It has been. In the drawing, the bottom portion 212 and each convex portion 215 are formed separately and then joined via an adhesive or the like, but they may be integrally formed.

  The lid member 22 is joined to the upper surface of the support substrate 21 having such a configuration. The lid member 22 has a recess 221 that is open on the lower surface. By the lid member 22 being joined to the support substrate 21, a storage space S for hermetically storing the sensor elements 1A and 1B is formed by the recess 221 and the recesses 211A and 211B. The storage space S is in a vacuum state, for example.

  The constituent materials of the support substrate 21 and the lid member 22 are not particularly limited, and for example, a silicon material, a glass material, a ceramic material, or the like can be used.

<Sensor element>
As shown in FIGS. 1 and 2, the sensor elements 1A and 1B are provided side by side in the X-axis direction.

  As shown in FIG. 1, each of the sensor elements 1A and 1B includes a vibrating body 3 provided in the XY plane, a driving mechanism 4 that vibrates (drives) the vibrating body 3 in the X-axis direction, and a vibrating body. 3 and a pair of compensation electrodes 61 and 62 for reducing unnecessary vibration of the vibrating body 3.

  The sensor elements 1A and 1B will be described below. However, since the configurations of the sensor elements 1A and 1B are the same, the configuration of the sensor element 1A will be described as a representative, and the configuration of the sensor element 1B will be omitted. To do. However, when viewed from the Z-axis direction, the sensor element 1B is separated from the sensor element 1A by the axis D (center line along the Y-axis direction of the physical quantity sensor 10) along the Y-axis direction shown in FIG. They are arranged symmetrically.

(Vibrating body)
As shown in FIG. 3, the vibrating body 3 includes a frame-shaped driving unit 31, fixing units 321, 322, 323, and 324 that support the driving unit 31, and the driving unit 31 and fixing units 321, 322, 323, and 324. The first beam portions 331, 332, 333, and 334, the two detection portions 341 and 342 provided inside the drive portion 31, and the second beam portion that connects the detection portion 341 and the drive portion 31. 351 and 352, second beam portions 353 and 354 that connect the detection unit 342 and the drive unit 31, and a movable electrode unit 36 provided in the drive unit 31.

  The vibrating body 3 of the present embodiment has conductivity, and is formed of, for example, a silicon substrate doped with impurities such as phosphorus and boron, and includes a driving unit 31, fixing units 321, 322, 323, 324, The first beam portions 331, 332, 333, and 334, the detection portions 341 and 342, the second beam portions 351, 352, 353, and 354, and the movable electrode portion 36 are integrally formed.

--Drive part--
The drive unit 31 has a frame shape when viewed from the Z-axis direction. Specifically, the drive unit 31 connects a pair of X-axis direction extending portions 313 and 314 extending in the X-axis direction to the Y-axis direction and connecting the X-axis direction extending portions 313 and 314. And a pair of Y-axis direction extending portions 311, 312.

  The Y-axis direction extending portion 311 is formed with two elongated slits (non-electrode portions) 315 along the Y-axis direction. The two slits 315 are provided side by side in the X-axis direction, and each penetrates in the thickness direction (Z-axis direction) of the Y-axis direction extending portion 311. The two slits 315 are formed with substantially the same width (length in the X-axis direction) W1. The width W1 of each slit 315 is approximately the same as the amount of displacement in the X-axis direction when the drive unit 31 vibrates in the X-axis direction, that is, the amplitude of the drive unit 31.

  Such a Y-axis direction extending portion 311 has three long portions 316 extending in the Y-axis direction, and two slits 315 are formed between each of the three long portions 316. Yes.

  The three long portions 316 are formed with substantially the same width (length in the X-axis direction) W2. Further, the width W2 of each long portion 316 is formed substantially equal to the width W1 of the slit 315. Therefore, the width W2 of each long portion 316 is approximately the same as the displacement amount (amplitude) of the drive portion 31 in the X-axis direction.

  In the present embodiment, the width W2 of the long portion 316 is approximately the same as the width W1 of the slit 315, but may be different from the width W1 of the slit 315. However, the relationship between the widths W1 and W2 is preferably 0.8 ≦ W1 / W2 ≦ 2, for example. If W1 / W2 is too large, the vibrating body 3 is enlarged, and if W1 / W2 is too small, the vibrating body 3 (more specifically, the detection units 341 and 342) is caused by compensation electrodes 61 and 62 described later. There is a possibility that the function of reducing unnecessary vibration is slightly lowered.

  In the present embodiment, the width W1 of the slit 315 and the width W2 of the long portion 316 are approximately the same as the displacement amount of the drive unit 31 in the X-axis direction. It may be different from the amount.

  Further, as shown in FIG. 3, the configuration of the Y-axis direction extending portion 312 is the same as the configuration of the Y-axis direction extending portion 311 described above. That is, two elongated slits 315 along the Y-axis direction are formed in the Y-axis direction extending portion 312, and the Y-axis direction extending portion 312 has three elongated portions 316. . The configuration of the slit 315 and the long portion 316 of the Y-axis direction extending portion 312 is the same as the configuration of the slit 315 and the long portion 316 of the Y-axis direction extending portion 311 described above.

--Fixed part--
As shown in FIG. 3, the fixing portions 321, 322, 323, and 324 are respectively arranged corresponding to the corner portions of the driving portion 31. These fixing portions 321 and 322 are respectively joined to the upper surface of the side wall portion 213. Further, the fixing portions 323 and 324 are joined to the upper surface of the central wall portion 214.

--First beam part--
As shown in FIG. 3, the first beam portions 331, 332, 333, and 334 are connected to the driving portion 31 so that the driving portion 31 can vibrate in the X-axis direction with respect to the fixing portions 321, 322, 323, and 324. The fixing portions 321, 322, 323, and 324 are connected.

  The first beam portion 331 connects the upper left corner of the drive unit 31 and the fixed portion 321, and the first beam portion 332 connects the lower left corner of the drive unit 31 and the fixed portion 322, The beam portion 333 connects the lower right corner of the drive unit 31 and the fixed portion 323, and the first beam portion 334 connects the upper right corner of the drive unit 31 and the fixed portion 324.

  Each of the first beam portions 331, 332, 333, and 334 has a meandering shape that reciprocates in the Y-axis direction and extends in the X-axis direction. By forming the first beam portions 331, 332, 333, and 334 in such a shape, the first beam portions 331, 332, 333, and 334 are easily deformed (expanded) in the X-axis direction, and deformed in the Y-axis direction. It will be difficult. According to such first beam portions 331, 332, 333, and 334, the drive unit 31 can be vibrated more accurately in the X-axis direction.

--Detection unit--
As shown in FIG. 3, each of the detection units 341 and 342 has a plate shape. The detection units 341 and 342 are provided inside the drive unit 31 and separated from the drive unit 31. Each of the detection units 341 and 342 has a rectangular shape with the X-axis direction as a longitudinal direction when viewed from the Z-axis direction, and is provided so as to be separated from each other and aligned in the Y-axis direction.
Such detection units 341 and 342 also serve as a part of the detection mechanism 5 described later.

-Second beam-
As shown in FIG. 3, the second beam portions 351 and 352 connect the detection unit 341 and the drive unit 31 so that the detection unit 341 can vibrate in the Z-axis direction with respect to the drive unit 31. Similarly, the second beam portions 353 and 354 connect the detection unit 342 and the drive unit 31 so that the detection unit 342 can vibrate in the Z-axis direction with respect to the drive unit 31.

  The second beam portion 351 connects the upper left corner of the detection unit 341 and the drive unit 31, and the second beam unit 352 connects the upper right corner of the detection unit 341 and the drive unit 31. Since the second beam portions 351 and 352 are connected to the two corners of the detection unit 341 as described above, the detection unit 341 connected to the drive unit 31 by the second beam portions 351 and 352 is connected to the second beam portion. It can vibrate in the Z-axis direction with the portions 351 and 352 as fulcrums.

  Similarly, the second beam portion 353 connects the lower left corner of the detection unit 342 and the drive unit 31, and the second beam unit 354 connects the lower right corner of the detection unit 342 and the drive unit 31. doing. Thus, the detection unit 342 connected to the drive unit 31 by the second beam portions 353 and 354 can vibrate in the Z-axis direction with the second beam portions 353 and 354 as fulcrums.

--Moving electrode part--
As shown in FIG. 3, the movable electrode part 36 has six movable electrode fingers 361 extending from the drive part 31 in the Y-axis direction.

Of the six movable electrode fingers 361, three movable electrode fingers 361 extend from the X-axis direction extending portion 313 in the + Y-axis direction, and are arranged at regular intervals in the X-axis direction so as to form a comb shape. Yes. The remaining three movable electrode fingers 361 out of the six movable electrode fingers 361 extend from the X-axis direction extending portion 314 in the −Y-axis direction, and are constant in the X-axis direction so as to form a comb shape. Are lined up at intervals.
Moreover, such a movable electrode part 36 also serves as a part of the drive mechanism 4 described later.

(Drive mechanism)
As shown in FIG. 3, the driving mechanism 4 includes a first fixed electrode portion (fixed electrode portion) 41, a second fixed electrode portion (fixed electrode portion) 42, and the movable electrode portion 36 included in the vibrating body 3 described above. ,have.

  The first fixed electrode portion 41 has four elongated first fixed electrode fingers 411 along the Y-axis direction.

  The four first fixed electrode fingers 411 are respectively arranged on one side (−X direction side) of the movable electrode fingers 361 and are arranged in a comb-teeth shape that meshes with the corresponding movable electrode fingers 361 at intervals. It is out. In addition, each of the four first fixed electrode fingers 411 is joined to the upper surface of the side wall part 213 as one end part as a fixed end, and the other end part extends to the drive part 31 side as a free end to be on the recess 211A. Is located.

  The second fixed electrode portion 42 has four long second fixed electrode fingers 421 along the Y-axis direction.

  The four second fixed electrode fingers 421 are arranged on the other side (+ X direction side) of the movable electrode fingers 361, respectively, and are arranged in a comb-teeth shape that meshes with the corresponding movable electrode fingers 361 at an interval. Yes. In addition, each of the four second fixed electrode fingers 421 has one end joined to the upper surface of the side wall 213 as a fixed end, and the other end extended to the drive unit 31 side as a free end on the recess 211A. Is located.

  Such a drive mechanism 4 applies these voltages alternately between the first fixed electrode finger 411 and the movable electrode finger 361 and between the second fixed electrode finger 421 and the movable electrode finger 361. During this period, an electrostatic attractive force is generated at a predetermined frequency. As a result, the movable electrode finger 361 reciprocates (vibrates) in the X-axis direction, and thus vibrates the drive unit 31 in the X-axis direction.

  Hereinafter, a stationary state (natural state) in which the drive unit 31 does not vibrate along the X-axis direction as shown in FIG. 3 will be referred to as a “non-drive state (initial state)”, and the drive unit 31 is in the X-axis direction. A state that vibrates (drives) in the direction is called a “drive state”.

(Detection mechanism)
As shown in FIGS. 2 and 3, the detection mechanism 5 includes detection units 341 and 342 included in the above-described vibrating body 3 and detection electrodes 51 and 52 provided on the bottom 212.

  The detection electrode 51 is provided apart from the detection unit 341 in the Z-axis direction, and the detection electrode 52 is provided separately from the detection unit 342 in the Z-axis direction.

  Further, the detection electrode 51 is provided so as to overlap with the central portion excluding the edge of the detection unit 341 and to be included in the detection unit 341 when viewed from the Z-axis direction. Similarly, the detection electrode 52 is provided so as to overlap with the central portion except for the edge of the detection unit 342 and to be included in the detection unit 342 when viewed from the Z-axis direction.

  The constituent materials of the detection electrodes 51 and 52 are not particularly limited as long as they have conductivity. For example, gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), silver alloy, chromium (Cr), chromium alloy, copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), Examples thereof include metal materials such as zinc (Zn) and zirconium (Zr), and electrode materials such as ITO and ZnO.

  Such a detection mechanism 5 has a capacitance change amount between the detection electrode 51 and the detection unit 341 and between the detection electrode 52 and the detection unit 342 according to a change in each separation distance. Is detected.

(Compensation electrode)
As shown in FIGS. 2 and 3, the compensation electrode 61 (one compensation electrode) is provided corresponding to the Y-axis direction extending portion 311 of the drive unit 31, and the compensation electrode 62 (the other compensation electrode). Electrode) is provided corresponding to the Y-axis direction extending portion 312.

  The compensation electrode 61 has two (one pair) electrode portions 611 that form a strip shape (long shape) extending in the Y-axis direction. The two electrode portions 611 are respectively formed on the upper surface of the convex portion 215 of the support substrate 21 and are separated from each other in the X-axis direction. The two electrode portions 611 are respectively positioned below the Y-axis direction extending portion 311 and are separated from the Y-axis direction extending portion 311 in the Z-axis direction.

  Each of the two electrode portions 611 has a shape similar to the shape of the slit 315 when viewed from the Z-axis direction, and has a flat area smaller than the flat area of the slit 315. Each of such two electrode portions 611 is provided such that its longitudinal direction is arranged in parallel with the longitudinal direction of the slit 315 and is included in the slit 315 when viewed from the Z-axis direction.

  Such a compensation electrode 61 is detected by vibrating with the drive unit 31 by generating an electrostatic attractive force between the Y-axis direction extending part 311 and the electrode part 611 when the drive unit 31 is driven. It has a function of reducing unnecessary vibrations generated in the parts 341 and 342, respectively.

  As shown in FIG. 3, the configuration of the compensation electrode 62 is the same as the configuration of the compensation electrode 61 described above. That is, the compensation electrode 62 has two (one pair) electrode portions 621 that form a strip shape (long shape) extending in the Y-axis direction. Note that the configuration of the electrode portion 621 is the same as the configuration of the electrode portion 611 described above.

<Power supply unit>
As shown in FIG. 2, the first power supply unit (power supply unit) 71 is connected to the sensor element 1A, and the second power supply unit (power supply unit) 72 is connected to the sensor element 1B.

  Specifically, the first power supply unit 71 is connected to the vibrating body 3 included in the sensor element 1A and the pair of compensation electrodes 61 and 62, and corresponds to the Y-axis direction extending portions 311 and 312. An electrostatic attractive force can be generated between the compensating electrodes 61 and 62.

  Similarly, the second power supply unit 72 is connected to the vibrating body 3 included in the sensor element 1B and the pair of compensation electrodes 61 and 62, and the Y-axis direction extending portions 311 and 312 and the corresponding compensation are provided. An electrostatic attractive force can be generated between the working electrodes 61 and 62.

In the present embodiment, the first power supply unit 71 and the second power supply unit 72 are configured to apply a DC voltage to either one of the pair of compensation electrodes 61 and 62, respectively.
The configuration of the physical quantity sensor 10 has been briefly described above.

  The physical quantity sensor 10 having such a configuration detects an angular velocity applied to the physical quantity sensor 10 around the Y axis as follows.

  First, between the first fixed electrode finger 411 and the movable electrode finger 361 provided in the sensor elements 1A and 1B and between the second fixed electrode finger 421 and the movable electrode finger 361 by the first and second power supply units 71 and 72, respectively. A voltage is alternately applied between and the movable electrode finger 361 is reciprocated in the X-axis direction. Thereby, the drive unit 31 is alternately displaced in the + X-axis direction and the −X-axis direction at a predetermined frequency, that is, the drive unit 31 is vibrated (driven) in the X-axis direction.

  Here, as described above, the sensor elements 1A and 1B are arranged in a contrast with the axis D shown in FIG. 1 as a boundary. For this reason, when a voltage is applied as described above, the drive unit 31 included in the sensor element 1A and the drive unit 31 included in the sensor element 1B vibrate in mutually opposite phases (reverse phases) at a predetermined frequency, that is, They are displaced in opposite directions along the X axis.

  For example, as shown in FIG. 1, when the drive unit 31 included in the sensor element 1A is displaced in the α1 direction (−X axis direction), the drive unit 31 included in the sensor element 1B is moved in the α2 direction (+ X axis direction). Displace. For example, when the drive unit 31 included in the sensor element 1A is displaced in the β1 direction (+ X axis direction), the drive unit 31 included in the sensor element 1B is displaced in the β2 direction (−X axis direction).

  When the angular velocity around the Y-axis direction is applied to the physical quantity sensor 10 in a state where the respective drive units 31 included in the sensor elements 1A and 1B are vibrated in opposite phases to each other, the Coriolis force in the Z-axis direction is applied to each drive unit 31. Work. Accordingly, the detection units 341 and 342 are also displaced in the Z-axis direction. For example, in the detection units 341 and 342 included in the sensor element 1A and the detection units 341 and 342 included in the sensor element 1B, as shown in FIG. 4 or FIG. Are displaced in directions opposite to each other.

  In the example shown in FIG. 4, the detection units 341 and 342 included in the sensor element 1A are displaced in the + Z-axis direction as shown in FIG. 4A, and the detection units 341 and 342 included in the sensor element 1B are As shown in FIG. 4 (b), it is displaced in the −Z axis direction. In the example shown in FIG. 5, the detection units 341 and 342 included in the sensor element 1A are displaced in the −Z-axis direction, respectively, as illustrated in FIG. 5A, and the detection units 341 and 342 included in the sensor element 1B. Are displaced in the + Z-axis direction, respectively, as shown in FIG.

  Since the detection units 341 and 342 are displaced and vibrated in this manner, the distance between the detection units 341 and 342 and the detection electrodes 51 and 52 changes, so that the capacitance between them changes.

  Then, based on the amount of change in capacitance between each of the detection units 341 and 342 and each of the detection electrodes 51 and 52, a change in capacitance according to the angular velocity around the Y axis applied to the physical quantity sensor 10 is detected. can do.

  As described above, when the drive unit 31 vibrates (drives) in the X-axis direction, the drive unit 31 is ideally displaced substantially parallel to the X-axis direction from the non-driven state.

  For example, as shown in FIG. 6A, when the drive unit 31 included in the sensor element 1A is displaced in the α1 direction, the drive unit 31 ideally has X with respect to the drive unit 31 ′ when not driven. Displaces almost parallel to the axial direction.

  However, depending on the machining accuracy of each part of the vibrating body 3, particularly the first beam parts 331, 332, 333, and 334, oblique vibration having a component that vibrates in the Z-axis direction is generated in the drive unit 31 that vibrates in the X-axis direction. It may be added. Therefore, for example, as shown in FIG. 6B, when the drive unit 31 is displaced in the α1 direction, the drive unit 31 may be displaced obliquely with respect to the drive unit 31 'when not being driven. In the figure, the drive unit 31 is displaced obliquely upward to the left, but the drive unit 31 may be displaced obliquely upward to the right.

  As described above, the drive unit 31 may be displaced away from the bottom 212 due to the oblique vibration of the drive unit 31 caused by the processing accuracy of each part of the vibrating body 3.

  As the drive unit 31 obliquely vibrates, the detection units 341 and 342 may vibrate with a Z-axis direction component that is the direction of the detection vibration. That is, with the oblique vibration of the drive unit 31, unnecessary vibration including a Z-axis direction component may be applied to each of the detection units 341 and 342 even though no angular velocity is applied to the physical quantity sensor 10.

  In the present embodiment, such unnecessary vibration applied to the detection units 341 and 342 is reduced by the compensation electrodes 61 and 62.

  Hereinafter, reduction of unnecessary vibration applied to the detection units 341 and 342 by the compensation electrodes 61 and 62 will be described. The unnecessary vibration applied to each of the detection units 341 and 342 as described above occurs in the sensor element 1B in the same manner. However, since the sensor elements 1A and 1B have the same configuration, the sensor element 1A is hereinafter described. Is described as a representative. Further, since the compensation electrodes 61 and 62 included in the sensor element 1A have the same configuration, the compensation electrode 61 included in the sensor element 1A will be described below as a representative.

  The compensation electrode 61 is separated from the bottom 212 of the drive unit 31 by generating an electrostatic attractive force between the compensation electrode 61 and the Y-axis extending portion 311 and attracting the drive unit 31 toward the bottom 212 (+ Z axis direction). The displacement in the direction (−Z axis direction) is suppressed, and thus unnecessary vibrations generated in the detection units 341 and 342 are reduced.

  Specifically, as shown in FIG. 6B, for example, when the drive unit 31 is displaced obliquely with respect to the drive unit 31 ′ during non-drive, first, before the drive unit 31 is vibrated, the first A DC voltage is applied to the electrode unit 611 included in the compensation electrode 61 by the power supply unit 71. Then, with the voltage applied to the electrode unit 611, the drive unit 31 is vibrated in the X-axis direction as described above.

  In the vibration of the drive unit 31, for example, when the drive unit 31 is displaced in the α1 direction, the Y-axis direction extending portion 311 of the drive unit 31 is changed from the non-driven state shown in FIG. The state is displaced in the α1 direction (−X axis direction). Thus, in a state where the Y-axis direction extending portion 311 is displaced in the α1 direction, as shown in FIG. 7B, the plurality of long portions 316 of the Y-axis direction extending portion 311 are respectively separated from the Z-axis direction. When viewed, the electrode portion 611 overlaps with an area corresponding to the displacement amount of the driving portion 31. In this manner, the long portion 316 and the electrode portion 611 overlap with each other, so that a substantial electrostatic attractive force is generated between the long portion 316 and the electrode portion 611. As a result, as shown in FIG. 8, the drive unit 31 that is about to move away from the bottom portion 212 as shown by a broken line is attracted to the bottom portion 212 side like the drive unit 31 shown by a solid line.

  In this manner, the compensation electrode 61 attracts the drive unit 31 to the bottom 212 side, whereby the displacement in the direction away from the bottom 212 of the drive unit 31 can be suppressed.

  Here, as described above, in the present embodiment, the compensation electrode 61 includes a plurality of electrode portions 611, and the Y-axis direction extending portion 311 is provided with a plurality of slits 315 so as to correspond thereto. Yes. For this reason, when the drive unit 31 is displaced in the α1 direction, the overlapping area between the electrode unit 611 and the long portion 316 (drive unit 31) can be sufficiently increased. That is, the area where the electrode portion 611 and the long portion 316 overlap is determined according to the amount of displacement of the drive portion 31, but in this embodiment, there are a plurality of sets of slits 315 and electrode portions 611. Therefore, the overlapping area of the electrode part 611 and the long part 316 can be increased by the number of sets. Therefore, the electrostatic attractive force generated between the electrode portion 611 and the long portion 316 can be sufficiently increased. For this reason, the diagonal vibration of the drive part 31 can be reduced and the unnecessary vibration which arises in the detection parts 341 and 342 can fully be reduced. Accordingly, it is possible to reduce the cases where the detection units 341 and 342 detect angular velocities or cause errors in the detected angular velocities although no angular velocity is applied to the physical quantity sensor 10. That is, the detection characteristic (accuracy) of the physical quantity sensor 10 can be improved.

  As described above, each electrode portion 611 has a long shape along the Y-axis direction, and each slit 315 has a long shape along the Y-axis direction. Thus, each electrode part 611 and the slit 315 have a long shape in the Y-axis direction intersecting the X-axis direction that is the vibration direction of the drive part 31, so that the displacement amount of the drive part 31 displaced in the X-axis direction. Therefore, the overlapping area of the electrode part 611 and the long part 316 (drive part 31) can be further increased.

  Further, as described above, the electrode portion 611 is fixed on the convex portion 215 of the support substrate 21. For this reason, the separation distance between the electrode part 611 and the elongate part 316 can be made smaller. The electrostatic attraction generated between the electrode portion 611 and the long portion 316 increases as the distance between them decreases. For this reason, by fixing the electrode part 611 on the convex part 215, the electrostatic attraction produced between the electrode part 611 and the elongate part 316 can be increased, and thus the detection part 341, 342 is generated. Unnecessary vibration can be further reduced.

  For example, instead of providing the convex portion 215, a method of reducing the distance between the electrode portion 611 and the long portion 316 by reducing the depth of the concave portion 211A is also conceivable. However, in such a method, the separation distance between the detection electrodes 51 and 52 provided on the bottom 212 and the corresponding detection units 341 and 342 is also reduced. As a result, when the detection units 341 and 342 detect and vibrate in the Z-axis direction, the detection units 341 and 342 may come into contact with the detection electrodes 51 and 52 depending on the amplitude.

  Therefore, in the present embodiment, the detection electrodes 51 and 52 are provided on the bottom portion 212 and the electrode portion 611 is provided on the convex portion 215. Thereby, the electrostatic attraction produced between the electrode part 611 and the elongate part 316 can be made larger, preventing the contact between the detection parts 341 and 342 and the detection electrodes 51 and 52.

  From such a viewpoint, as shown in FIG. 2, the distance between the detection unit 341 and the detection electrode 51 in the non-driven state (and the distance between the detection unit 342 and the detection electrode 52) is d1, and the electrode unit 611 When the distance between the Y axis direction extending portion 311 is d2, it is preferable that the distance d1 and the distance d2 have the following relationship.

  For example, when the maximum value of the applied voltage applied to the compensation electrode 61 is 10 V, the relationship between the separation distance d1 and the separation distance d2 is preferably d2 ≦ d1 ≦ (10 × d2).

  Further, for example, when the applied voltage applied to the compensation electrode 61 is 3 V to 30 V, the relationship between the separation distance d1 and the separation distance d2 when not driven is (2 × d2) ≦ d1 ≦ (4 × d2) Is preferred.

  As described above, when the drive unit 31 is displaced in the α1 direction, each electrode unit 611 overlaps with the long portion 316 when viewed from the Z-axis direction, as shown in FIG. 7B. On the other hand, in the non-driven state, as shown in FIG. 7A, each electrode portion 611 does not overlap the long portion 316 but overlaps the slit 315 when viewed from the Z-axis direction. For this reason, in a non-driving state (stationary state), an electrostatic attraction is not substantially generated between the electrode portion 611 and the long portion 316, and the driving portion 31 is not attracted to the bottom portion 212 side. Therefore, in the non-driving state, it is possible to suppress the occurrence of a pull-in phenomenon in which the electrostatic attraction between the electrode portion 611 and the long portion 316 becomes extremely small and the electrostatic attraction between them increases rapidly. As a result, it is possible to avoid the long portion 316 from contacting the electrode portion 611 when not driven.

  The electrode unit 611 is included in the slit 315 when viewed from the Z-axis direction in the non-driven state, and when viewed from the Z-axis direction when the drive unit 31 moves in the α1 direction even slightly from the non-driven state. It arrange | positions so that it may overlap with the elongate part 316. FIG. Therefore, in the configuration of the present embodiment in which a DC voltage is applied to the electrode unit 611, the drive unit 31 can be attracted to the bottom 212 side as long as the drive unit 31 moves in the α1 direction from the non-driven state as described above. it can. In addition, the configuration of the present embodiment in which the DC voltage is applied to the electrode unit 611 as described above is a configuration in which an AC voltage is applied in accordance with a period in which the electrode unit 611 and the long unit 316 overlap when viewed from the Z-axis direction. Easier than.

  In the above description, the case where the compensation electrode 61 is used has been described. For example, when the drive unit 31 is displaced obliquely in the direction opposite to that shown in FIG. 6B, the compensation electrode 62 is used. do it. At that time, by applying a DC voltage to the compensation electrode 62 by the second power supply unit 72, for example, when the driving unit 31 is displaced in the β1 direction, the elongated portion 316 of the Y-axis direction extending portion 312 and the electrode By overlapping the portion 621, an electrostatic attractive force can be substantially generated between the Y-axis direction extending portion 312 and the electrode portion 621. Thereby, the drive unit 31 can be attracted to the bottom 212 side.

  As described above, in the present embodiment, since the pair of compensating electrodes 61 and 62 arranged side by side in the X-axis direction are provided, the generation characteristics such as the direction and magnitude of the oblique vibration generated in the drive unit 31 are obtained. Accordingly, one of the necessary compensation electrodes 61 or the compensation electrode 62 can be selected and used.

  Although the physical quantity sensor has been described based on the illustrated embodiment, the present invention is not limited to this, and the configuration of each unit can be replaced with an arbitrary configuration having the same function. In addition, any other component may be added to the present invention.

  In the above description, the configuration in which the slit is provided in the driving unit as the non-electrode unit has been described. However, the non-electrode unit does not penetrate in the thickness direction of the driving unit, for example, and opens to the compensation electrode side. It may be a recessed portion or the like.

  In the above description, the configuration in which two slits are provided in the Y-axis direction extending portion has been described, but the number of slits is not limited to this. For example, three or more slits may be provided in the Y-axis direction extending portion.

≪First Reference Example≫
Next, a first reference example of the physical quantity sensor of the present invention will be described.

  FIG. 9 is a plan view showing a first reference example of the physical quantity sensor of the present invention. 10 is a cross-sectional view taken along line BB in FIG.

  Hereinafter, the first reference example of the physical quantity sensor will be described, but the description will focus on differences from the above-described embodiment, and the description of the same matters will be omitted.

  In the physical quantity sensor 10 of the first reference example, the number of slits 315 and the number of electrode portions 611 and 621 are different from those of the first embodiment described above.

  Note that the physical quantity sensor 10 of the first reference example also includes the sensor elements 1A and 1B as in the first embodiment described above. Since these configurations are the same, the configuration of the sensor element 1A will be described below. This will be explained as a representative.

  In the sensor element 1A included in the physical quantity sensor 10 illustrated in FIGS. 9 and 10, one slit 315 is provided in each of the Y-axis direction extending portions 311 and 312 of the driving unit 31. The Y-axis direction extending portions 311 and 312 each have two long portions 316 extending in the Y-axis direction, and one slit 315 is formed between the two long portions 316.

  The compensation electrode 61 has one electrode portion 611, and the electrode portion 611 is provided so as to be included in the slit 315 of the Y-axis direction extending portion 311 when viewed from the Z-axis direction in the non-driven state. It has been. Similarly, the compensation electrode 62 has one electrode portion 621 so that the electrode portion 621 is included in the slit 315 of the Y-axis direction extending portion 312 when viewed from the Z-axis direction in the non-driven state. Is provided.

  Also with the physical quantity sensor 10 having such a configuration, it is possible to reduce the oblique vibration of the drive unit 31 and reduce unnecessary vibration applied to the detection units 341 and 342.

  In particular, also in the present reference example, each electrode portion 611 has a long shape along the Y-axis direction, and similarly, each slit 315 has a long shape along the Y-axis direction. Therefore, the overlapping area of the electrode part 611 and the Y-axis direction extending part 311 can be increased by the amount of displacement displaced in the X-axis direction. Therefore, the electrostatic attractive force generated between the electrode portion 611 and the long portion 316 can be further increased, and hence unnecessary vibration generated in the detection portions 341 and 342 can be further reduced.

≪Second reference example≫
Next, a second reference example of the physical quantity sensor of the present invention will be described.

  FIG. 11 is a plan view showing a second reference example of the physical quantity sensor of the present invention. 12 is a cross-sectional view taken along the line CC in FIG.

  Hereinafter, a second reference example of the physical quantity sensor will be described, but the description will focus on differences from the above-described embodiment, and the description of the same matters will be omitted.

  The physical quantity sensor 10 of the second reference example is different from the first embodiment described above in that the slit 315 is not provided.

  Note that the physical quantity sensor 10 of the second reference example also includes the sensor elements 1A and 1B as in the first embodiment described above, and since these configurations are the same, the configuration of the sensor element 1A will be described below. This will be explained as a representative.

  In the physical quantity sensor 10 shown in FIGS. 11 and 12, the slits 315 are not provided in the Y-axis direction extending portions 311 and 312 of the driving unit 31, and the driving unit 31 is a pair extending in the X-axis direction. X-axis direction extending portions 313 and 314 and a pair of Y-axis direction extending portions 311 and 312 extending in the Y-axis direction and connecting the X-axis direction extending portions 313 and 314. .

  The compensation electrode 61 has one electrode portion 611. The electrode portion 611 has a width larger than the width of the Y-axis extending portion 311 (length in the X-axis direction), and extends in the Y-axis direction when viewed from the Z-axis direction in a non-driven state. It is arranged so as to overlap the part 311.

  Similarly, the compensation electrode 62 has one electrode portion 621. The electrode portion 621 has a width larger than the width of the Y-axis direction extending portion 312 (length in the X-axis direction), and extends in the Y-axis direction when viewed from the Z-axis direction in a non-driven state. The unit 312 is disposed so as to overlap.

  In the physical quantity sensor 10 having such a configuration, in the non-driven state and the driven state, the Y-axis direction extending portion 311 and the electrode portion 611 overlap each other when viewed from the Z-axis direction, and the Y-axis direction extending portion 312 and the electrode portion are overlapped. 621 overlaps.

  In the present reference example, the first power supply unit 71 applies an AC voltage to at least one of the compensation electrodes 61 and 62 in accordance with the period in which the drive unit 31 is displaced in the + X axis direction and the −X axis direction.

  Therefore, even with the physical quantity sensor 10 having such a configuration, the oblique vibration of the drive unit 31 is obtained using at least one of the compensation electrode 61 and the compensation electrode 62 according to the direction of the oblique vibration generated in the drive unit 31. Therefore, unnecessary vibration applied to the detection units 341 and 342 can be reduced.

  In particular, also in this reference example, since the electrode portion 611 is fixed on the convex portion 215 of the support substrate 21, the separation distance between the electrode portion 611 and the Y-axis extending portion 311 is further reduced. be able to. The electrostatic attraction generated between the electrode portion 611 and the Y-axis extending portion 311 increases as the distance between them decreases. Therefore, by fixing the electrode portion 611 on the convex portion 215, The electrostatic attractive force generated between the Y-axis direction extending portion 311 can be further increased. As a result, unnecessary vibration generated in the detection units 341 and 342 can be further reduced.

  For example, instead of providing the convex part 215, a method of reducing the distance between the electrode part 611 and the Y-axis direction extending part 311 by reducing the depth of the concave part 211 </ b> A is also conceivable. However, in such a method, the separation distance between the detection electrodes 51 and 52 provided on the bottom 212 and the corresponding detection units 341 and 342 is also reduced. As a result, when the detection units 341 and 342 detect and vibrate in the Z-axis direction, the detection units 341 and 342 may come into contact with the detection electrodes 51 and 52 depending on the amplitude.

  Therefore, in this reference example, the detection electrodes 51 and 52 are provided on the bottom portion 212, and the electrode portion 611 is provided on the convex portion 215. Thereby, the electrostatic attraction produced between the electrode part 611 and the Y-axis direction extension part 311 can be increased while preventing the contact between the detection parts 341 and 342 and the detection electrodes 51 and 52.

  From such a viewpoint, as shown in FIG. 12, the distance between the detection unit 341 and the detection electrode 51 (and the separation distance between the detection unit 342 and the detection electrode 52) when not driven is d1, and the electrode unit 611 When the distance from the Y-axis direction extending portion 311 is d2, it is preferable that the distance d1 and the distance d2 have the following relationship.

  For example, when the maximum value of the applied voltage applied to the compensation electrode 61 is 10 V, the relationship between the separation distance d1 and the separation distance d2 is preferably d2 ≦ d1 ≦ (10 × d2).

  Further, for example, when the applied voltage applied to the compensation electrode 61 is 3 V to 30 V, the relationship between the separation distance d1 and the separation distance d2 when not driven is (2 × d2) ≦ d1 ≦ (4 × d2) Is preferred.

2. Electronic Device Next, an electronic device to which the physical quantity sensor of the present invention is applied (electronic device of the present invention) will be described in detail with reference to FIGS.

  FIG. 13 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic device including the physical quantity sensor of the present invention is applied. In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 2000. The display unit 1106 rotates with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 includes a physical quantity sensor 10 that functions as a filter, a resonator, a reference clock, and the like.

  FIG. 14 is a perspective view showing a configuration of a mobile phone (including PHS) to which an electronic device including the physical quantity sensor of the present invention is applied. In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, a earpiece 1204, and a mouthpiece 1206, and a display unit 2000 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates a physical quantity sensor 10 that functions as a filter, a resonator, or the like.

  FIG. 15 is a perspective view showing a configuration of a digital still camera to which an electronic device including the physical quantity sensor of the present invention is applied. In this figure, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit 2000 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to display based on an imaging signal from the CCD. The display unit displays a subject as an electronic image. Function as. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital still camera 1300 incorporates a physical quantity sensor 10 that functions as a filter, a resonator, or the like.

  In addition to the personal computer (mobile personal computer) shown in FIG. 13, the mobile phone shown in FIG. 14, and the digital still camera shown in FIG. Inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, televisions Telephone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments Type (for example, vehicle Aircraft, gauges of a ship), can be applied to a flight simulator or the like.

3. Next, a mobile body to which the physical quantity sensor of the present invention is applied (a mobile body of the present invention) will be described in detail with reference to FIG.

  FIG. 16 is a perspective view showing an automobile to which the moving body of the present invention is applied. In this figure, an automobile 1500 has a vehicle body 1501 and four wheels 1503, and is configured to rotate the wheels 1503 by a power source (engine) (not shown) provided in the vehicle body 1501.

  Such an automobile 1500 incorporates a physical quantity sensor 10. According to the physical quantity sensor 10, the posture and the moving direction of the vehicle body 1501 can be detected. The detection signal of the physical quantity sensor 10 is supplied to the vehicle body posture control device 1502, and the vehicle body posture control device 1502 detects the posture of the vehicle body 1501 based on the signal, and controls the stiffness of the suspension according to the detection result. The brakes of the individual wheels 1503 can be controlled.

  Note that the mobile body including the physical quantity sensor of the present invention is not limited to an automobile, and can be applied to other vehicles such as motorcycles, railways, aircraft, ships, spacecrafts, biped robots, radio controlled helicopters, and the like. is there.

  As described above, the physical quantity sensor, the electronic device, and the moving body of the present invention have been described based on the illustrated embodiment and the reference example, but the present invention is not limited to this, and the configuration of each part has the same function. It can be replaced with one having any structure. In addition, any other component may be added to the present invention. Moreover, you may combine each embodiment suitably.

10. Physical quantity sensor 1A, 1B ... Sensor element 2 ... Package 21 ... Support substrate 211A, 211B ... Concave part 212 ... Bottom part 213 ... Side wall part 214 ... Central wall part 215 ... Convex part 22 ... Lid member 221 ....... recess 3... Vibrator 31, 31 ′ drive unit 311, 312... Y-axis extending part 313, 314 X-axis direction extending part 315. 321, 322, 323, 324... Fixed part 331, 332, 333, 334... First beam part 341, 342... Detection part 351, 352, 353, 354. Part 361... Movable electrode finger 4... Drive mechanism 41... First fixed electrode part (fixed electrode part)
42 …… Second fixed electrode part (fixed electrode part)
5 ... Detection mechanism 51, 52 ... Detection electrode 61, 62 ... Compensation electrode 71 ... First power source 72 ... Second power source 411 ... First fixed electrode finger 421 ... Second fixed electrode finger 611, 621... Electrode unit 1100... Personal computer 1102 .. Keyboard 1104... Main unit 1106 .. Display unit 1200. Digital still camera 1302 ... Case 1304 ... Light receiving unit 1306 ... Shutter button 1308 ... Memory 1312 ... Video signal output terminal 1314 ... Input / output terminal 1430 ... TV monitor 1440 ... Personal computer 1500 ... Automobile 1501 ... ... Car body 1502 ... Car body attitude control device 1503 ... Wheel 2 00 ...... Display unit D ...... axis S ...... housing space d1, d2 ...... distance W1, W2 ...... width

Claims (9)

A fixed part;
A drive unit that vibrates along a first direction;
A first beam portion connecting the fixed portion and the drive portion;
A detector that vibrates along a second direction orthogonal to the first direction by Coriolis force acting on the drive unit;
A second beam part connecting the drive part and the detection part;
A compensation electrode that generates an electrostatic attraction along the second direction between the driving unit and the driving unit;
The drive unit has a plurality of non-electrode parts configured by holes or recesses that are open to the compensation electrode side, and the plurality of non-electrode parts are arranged along the first direction,
The physical quantity sensor according to claim 1, wherein the compensation electrode has a plurality of electrode portions arranged along the first direction.   2. The physical quantity sensor according to claim 1, wherein the electrode part is included in the non-electrode part in an initial state when viewed from the second direction.   The physical quantity sensor according to claim 1, wherein the non-electrode portion has a slit shape along a direction orthogonal to both the first direction and the second direction.   4. The physical quantity sensor according to claim 1, wherein the electrode portion has a slit shape along a direction orthogonal to both the first direction and the second direction. 5.   The physical quantity sensor according to claim 1, further comprising a support substrate having a convex portion that supports the compensation electrode.   The physical quantity sensor according to claim 1, wherein a pair of the compensation electrodes is provided along the first direction.   The physical quantity sensor according to claim 1, further comprising a power supply unit that applies a DC voltage between the compensation electrode and the driving unit.   An electronic apparatus comprising the physical quantity sensor according to claim 1.   A moving body comprising the physical quantity sensor according to claim 1.

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