JP6448247B2 - Thickness gauge - Google Patents

Description

  The present invention relates to a probe used for thickness measurement.

Conventionally, a probe used for measuring the thickness of an object to be measured is known. Such a measuring element has a flat part at the tip, and measures the thickness of the object to be measured by bringing the flat part into surface contact with the surface of the object to be measured.
For example, the measuring element described in Patent Document 1 includes a fixed measuring element having a spherical lower end and a movable measuring element provided below the fixed measuring element. The movable probe is formed on the fixed probe side, a concave surface having a radius of curvature slightly larger than the radius of curvature of the lower end of the fixed probe, and a contact surface (flat portion) formed on the opposite side of the concave surface. And is configured to be rotatable.

  Then, the thickness of the object to be measured is determined by lowering the fixed measuring element and the movable measuring element with respect to the object to be measured arranged below the measuring element so that the contact surface of the movable measuring element is brought to the surface of the object to be measured. In addition to surface contact, measurement is performed by bringing the lower end of the fixed probe into contact with the concave surface of the movable probe. According to the measuring element described in Patent Document 1, the contact surface of the movable measuring element rotates following the lower end portion of the fixed measuring element when contacting the slight inclination of the object to be measured. It is possible to evenly contact the object to be measured.

Japanese Utility Model Publication No. 7-23682

  However, since the measuring element described in Patent Document 1 has both the lower end of the fixed measuring element and the concave surface of the moving measuring element formed in a curved surface, the lower end of the fixed measuring element and the movable measuring element are affected by the influence of friction or the like. There is a problem that the position of contact with the concave surface of the child is difficult to determine, causing a measurement error due to fluctuations in the contact position, which in turn causes a decrease in measurement accuracy.

  An object of the present invention is to provide a thickness measuring probe capable of improving measurement accuracy.

The thickness measuring probe of the present invention is a thickness measuring probe used for measuring the thickness of an object to be measured, the measuring element main body having a tip formed in a spherical shape, and the tip of the measuring element main body. A flat contact surface that contacts the surface of the object to be measured, and a flat measurement surface that measures the thickness of the object to be measured by being in surface contact with the surface of the object to be measured. , and a swing freely mounted plate body to the tip end of the tracing stylus body, the plate-like body, and swing by the surface area contact of the measuring Teimen DUT, the feeler body, includes a shaft portion extending on either side along the horizontal direction, and a rotating portion attached to said shaft portion rotatably around the central axis of the shaft portion, a plate-shaped body, that is attached to the rotating part It is characterized by that.

According to such a configuration, the plate-like body swings when the planar measurement surface for measuring the thickness of the object to be measured comes into contact with the surface of the object to be measured. Surface contact can be made. In addition, since this plate-like body has a flat contact surface that contacts the tip of the probe main body, the tip of the probe main body is compared with the case where the contact surface is formed into a curved surface. The portion and the contact surface of the plate-like body can be brought into stable contact. Therefore, according to the present invention, it is possible to suppress measurement errors caused by fluctuations in the contact position and improve measurement accuracy.
Further, the plate-like body can be swung around the central axis of the shaft portion with a simple configuration including the shaft portion and the rotation portion.

In the present invention, the plate-like body is attached to the probe body so as to have a gap between the tip of the probe body and the contact surface of the plate-like body, and can be moved up and down along the vertical direction. It is preferably attached to the measuring element main body.

  According to such a configuration, the plate-like body can swing greatly when the measurement surface is brought into surface contact with the surface of the object to be measured, so that the tip of the probe body and the contact surface of the plate-like body Compared with the case where there is no gap between the two, it is possible to cope with a larger inclination of the object to be measured.

  In the present invention, it is preferable that the plate-like body is attached to the measuring element main body so as to advance and retract along the horizontal direction.

  According to such a configuration, the plate-like body can be swung over a wide range when the measurement surface is brought into surface contact with the surface of the object to be measured. Compared to the case where the measurement object is not, it is possible to cope with a larger inclination of the object to be measured.

The schematic diagram which shows the cross section of the measuring element which concerns on one Embodiment of this invention. The figure which shows the state which made the measurement surface of a plate-shaped object surface-contact with the surface of a to-be-measured object

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic diagram showing a cross section of a probe according to an embodiment of the present invention.
The measuring element 1 is a thickness measuring element used in a thickness measuring instrument provided with a stand having a base surface on which the object to be measured W is placed and a spindle that is movable up and down with respect to the base surface. It is.
In the present embodiment, in the thickness measuring instrument, the illustration and description of the configuration excluding the probe 1 are omitted.

As shown in FIG. 1, the measuring element 1 includes a measuring element main body 2 and a plate-like body 3 that is slidably attached to the distal end side (downward side) of the measuring element main body 2.
The probe body 2 is fixed to a body portion 20, a screw portion 21 formed on the vertically upper side of the body portion 20, and a substantially central position of the body portion 20, and extends to both sides along the horizontal direction. A shaft portion 22, a rotation portion 23 attached to the shaft portion 22 so as to be rotatable around the central axis of the shaft portion 22, and a tip portion 24 formed in a spherical shape at the tip position of the body portion 20 are provided. .
In addition, FIG. 1 shows the figure which looked at the measuring element 1 along the direction orthogonal to the axial direction of the axial part 22 on the left side, and the figure which looked at the measuring element 1 along the axial direction of the axial part 22 on the right side. Show. The same applies to the following drawings.

The screw portion 21 is screwed into the screw hole formed in the spindle described above. Thereby, the measuring element main body 2 is fixed to the spindle.
The rotating portion 23 includes two plate members 231 and 232, and each plate member 231 and 232 has through holes 231 </ b> A and 232 </ b> A formed so as to penetrate along the axial direction of the shaft portion 22. Each of the through holes 231A and 232A is formed in a substantially elliptical shape with a narrower vertical upper side and a wider vertical lower side. Specifically, the widths of the through holes 231 </ b> A and 232 </ b> A on the vertically upper side are formed to be approximately the same as the diameter of the shaft portion 22. Moreover, the width of the vertically lower side is formed wider than that of the vertically upper side.

Further, the rotating portion 23 is attached to the shaft portion 22 by inserting both ends of the shaft portion 22 into through holes 231A and 232A formed in the plate materials 231 and 232, respectively. Here, since the shaft portion 22 is inserted without being fixed to the through holes 231 </ b> A and 232 </ b> A, the rotating portion 23 can freely move within a range that does not drop off from the shaft portion 22.
Specifically, in the vertical direction, the diameters of the through-holes 231A and 232A are larger than the diameter of the shaft part 22, so that the rotating part 23 can freely move along the vertical direction. Therefore, the rotation part 23 is attached to the measuring element main body 2 so as to be movable up and down along the vertical direction.

Moreover, since the space | interval of each board | plate material 231 and 232 is wider than the width | variety of the trunk | drum 20 in the horizontal direction, the rotation part 23 can move freely along a horizontal direction. Therefore, the rotation part 23 is attached to the measuring element main body 2 so as to be movable back and forth along the horizontal direction.
Further, since the width of each through-hole 231A, 232A on the vertical upper side is formed to be approximately the same as the diameter of the shaft portion 22, the rotating portion 23 can freely rotate around the central axis of the shaft portion 22. it can. Therefore, the rotation part 23 is attached to the shaft part 22 so as to be rotatable around the central axis of the shaft part 22.

The plate-like body 3 is positioned on the opposite side of the abutting surface 31 with the planar abutting surface 31 that abuts on the tip 24 of the measuring element main body 2, and comes into surface contact with the surface of the object W to be measured. And a flat measuring surface 32 for measuring the thickness of the workpiece W, and is attached to the rotating portion 23 by being sandwiched between the plate members 231 and 232 of the rotating portion 23. Therefore, the plate-like body 3 is attached to the probe main body 2 so as to be movable up and down along the vertical direction, and attached to the probe main body 2 so as to be movable back and forth along the horizontal direction. The plate-like body 3 is attached to the shaft portion 22 so as to be rotatable around the central axis of the shaft portion 22.
Further, the plate-like body 3 has a contact surface between the tip 24 of the measuring element body 2 and the plate-like body 3 in a state where the measurement surface 32 is not in surface contact with the surface of the workpiece W (see FIG. 1). 31 is attached to the measuring element main body 2 with a gap between them.

FIG. 2 is a diagram illustrating a state in which the measurement surface of the plate-like body is in surface contact with the surface of the object to be measured.
As shown in FIG. 2, the probe 1 lowers the spindle to bring the measurement surface 32 of the plate-like body 3 into contact with the surface of the object W to be measured, and the tip 24 of the probe body 2 and the plate-like body. 3 is contacted with the contact surface 31 and measured. At this time, the plate-like body 3 is oscillated by the measurement surface 32 coming into contact with the surface of the object to be measured W and is in surface contact with the object to be measured W evenly.
In addition, since the plate-like body 3 can swing within the through holes 231A and 232A of the rotating portion 23 within a range in which the shaft portion 22 can move, the sizes of the through holes 231A and 232A are measured. It is designed so as not to cause a decrease in accuracy.

According to the present embodiment as described above, the following operations and effects can be achieved.
(1) The plate-like body 3 swings when the planar measurement surface 32 for measuring the thickness of the object to be measured W comes into contact with the surface of the object to be measured W. Surface contact can be made. Moreover, since this plate-like body 3 has a flat contact surface 31 that contacts the tip portion 24 of the measuring element main body 2, compared to the case where the contact surface 31 is formed in a curved shape, The tip 24 of the measuring element main body 2 and the contact surface 31 of the plate-like body 3 can be stably brought into contact with each other. Therefore, according to the present embodiment, it is possible to suppress measurement errors due to fluctuations in the contact position and improve measurement accuracy.

(2) The plate-shaped body 3 is attached to the probe main body 2 with a gap between the tip 24 of the probe main body 2 and the contact surface 31 of the plate-shaped body 3, and in the vertical direction. Accordingly, the plate-like body 3 can swing significantly when the measurement surface 32 is brought into surface contact with the surface of the object W to be measured. Therefore, the measuring element 1 has a larger inclination of the object W to be measured compared to the case where there is no gap between the tip 24 of the measuring element main body 2 and the contact surface 31 of the plate-like body 3. It can correspond to.

(3) Since the plate-like body 3 is attached to the probe main body 2 so as to be movable back and forth along the horizontal direction, the plate-like body 3 can swing over a wide range when the measurement surface 32 is brought into contact with the surface of the object W to be measured. Therefore, the probe 1 can cope with a larger inclination of the workpiece W as compared with a case where the probe 1 is not attached to the probe main body 2 so as to be movable back and forth along the horizontal direction.
(4) The measuring element main body 2 includes a shaft portion 22 extending to both sides along the horizontal direction, and a rotating portion 23 attached to the shaft portion 22 so as to be rotatable about the central axis of the shaft portion 22. Since the plate-like body 3 is attached to the rotating portion 23, the plate-like body 3 can be swung around the central axis of the shaft portion 22 with a simple configuration including the shaft portion 22 and the rotating portion 23. .

Note that the present invention is not limited to the above-described embodiment, and modifications, improvements, and the like within a scope in which the object of the present invention can be achieved are included in the present invention.
For example, in the above-described embodiment, the plate-like body 3 is attached to the probe main body 2 so as to be movable up and down along the vertical direction, and attached to the probe main body 2 so as to be movable back and forth along the horizontal direction. On the other hand, if the plate-like body 3 is attached to the shaft portion 22 so that it can be swung by the measurement surface 32 coming into contact with the surface of the object to be measured W, the plate-like body 3 moves up and down along the vertical direction. It may not be attached to the probe main body 2 freely, and may not be attached to the probe main body 2 so as to be able to advance and retreat along the horizontal direction.

  Moreover, in the said embodiment, the plate-shaped body 3 was attached to the axial part 22 so that rotation around the central axis of the axial part 22 was possible. On the other hand, if the plate-like body 3 is attached to the shaft portion 22 so that it can be swung by the measurement surface 32 coming into contact with the surface of the workpiece W, the plate-like body 3 is The shaft portion 22 may not be attached to the shaft portion 22 so as to be rotatable around the central axis of the shaft portion 22.

  Further, in the above-described embodiment, the measuring element main body 2 includes the shaft portion 22 extending to both sides along the horizontal direction, and the rotating portion 23 attached to the shaft portion 22 so as to be rotatable around the central axis of the shaft portion 22. The plate-like body 3 was attached to the rotating portion 23. On the other hand, the plate-like body 3 may be attached to the shaft portion 22 by a structure different from that of the above embodiment. In short, the plate-like body only needs to be able to swing when the measurement surface comes into contact with the surface of the object to be measured.

  As described above, the present invention can be suitably used for a probe used for measuring the thickness of an object to be measured.

DESCRIPTION OF SYMBOLS 1 Measuring element 2 Measuring element main body 3 Plate-shaped body 20 Body part 21 Screw part 22 Shaft part 23 Turning part 24 Tip part 31 Contact surface 32 Measuring surface 231,232 Plate material 231A, 232A Through-hole W Measured object

Claims (3)

A thickness measuring probe used for measuring the thickness of an object to be measured,
A measuring element body having a spherical tip.
The thickness of the object to be measured is measured by being in surface contact with the surface of the object to be measured, which is located on the opposite side of the contact surface with the flat contact surface that contacts the tip of the measuring element main body. A plate-like body that is slidably attached to the tip end side of the probe body,
The plate-like body, and swing by pre Symbol surface contact the measurement surface on the surface of the object to be measured,
The probe body is
A shaft portion extending to both sides along the horizontal direction;
A rotation part attached to the shaft part so as to be rotatable around a central axis of the shaft part,
The plate-like body is attached to the rotating portion, and the thickness measuring probe. In the thickness measuring probe according to claim 1,
The plate-like body is attached to the probe body so as to have a gap between the tip of the probe body and the contact surface of the plate-like body, and can be moved up and down along the vertical direction. A measuring element for thickness measurement, which is attached to the measuring element main body. In the thickness measurement probe according to claim 1 or 2,
The thickness-measuring probe, wherein the plate-like body is attached to the probe main body so as to be movable forward and backward along a horizontal direction.

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