JP6464028B2 - Cutting blade outer diameter size detection method - Google Patents

Description

  The present invention relates to a method for detecting an outer diameter size of a cutting blade provided in a cutting apparatus.

  When cutting a plate-shaped workpiece using a cutting machine that cuts the cutting blade into the plate-shaped workpiece, hold the plate-shaped workpiece adhered to the adhesive tape on the holding surface of the holding table. The rotating blade is cut into the held plate-shaped workpiece, and the plate-shaped workpiece is completely cut by cutting until the tip of the cutting blade reaches the adhesive tape. In this way, when cutting a plate-like workpiece fully, it is sufficient that at least the tip of the cutting blade is cut into the adhesive tape. However, it is acceptable if the tip position of the cutting blade is within the thickness range of the adhesive tape at the time of cutting into the plate-like workpiece. However, in the case of performing a half cut in which a cut groove is made to a depth of about half the thickness of the plate workpiece without completely cutting the plate workpiece, the cutting blade is cut to a predetermined depth of the thickness of the plate workpiece. Therefore, it is necessary to recognize the tip position of the cutting blade with higher accuracy.

  Therefore, in order to recognize the tip of the cutting blade with higher accuracy, the cutting blade is cut from the upper side to the plate-shaped workpiece for forming the cutting trace, and the cutting trace is formed. There is a method of recognizing the tip of the cutting blade by calculating the outer diameter of the cutting blade from the length of the cut mark (for example, see Patent Document 1). In the method for recognizing the cutting blade tip described in Patent Document 1, the imaging means images the formed cutting trace, and the length of the cutting trace is measured from the acquired image information.

JP 2013-41972 A

  However, if there is a scum or the like generated by water (water mark) containing cutting swarf, cutting swarf or cutting splatter near the extending direction of the cutting trace to be imaged, the imaging means is a watermark, There may be a case where the cutting trace is imaged including cutting chips or wrinkles generated by scattering of cutting chips. In this case, the calculation means for measuring the length of the cutting trace from the picked-up image made up of a CPU or the like determines that the wrinkles generated by the scattering of the watermark, the cutting waste or the cutting waste are also a part of the cutting trace. As a result, the length of the measured cutting trace may be measured longer than the actual length of the cutting trace. As a result, the outer diameter of the cutting blade is calculated larger than the actual outer diameter of the cutting blade and the tip position is recognized, so that the cutting depth into the plate-like workpiece by the cutting blade becomes insufficient in the cutting process. A problem has occurred.

  Therefore, even when the watermark, cutting waste, or wrinkles generated by the scattering of cutting waste together with the cutting trace is imaged, and the length of the cutting trace is measured longer than the actual length of the cutting trace There is a problem that an accurate outer diameter of the cutting blade is calculated to recognize the tip position of the cutting blade with high accuracy.

  The present invention for solving the above problems includes a holding table for holding a plate-like workpiece, a cutting means for rotatably mounting a cutting blade for cutting the plate-like workpiece held by the holding table, the holding table, and the A cutting feed means for moving the cutting means closer to and away from the upper surface of the plate-shaped workpiece relative to the upper surface of the plate-shaped workpiece, and the cutting feed means cuts the cutting blade into a workpiece for forming a cutting trace. An outer diameter size detection method of a cutting blade using a cutting device comprising: an imaging means for imaging the cut trace that has been taken; and a calculation means for calculating the outer diameter of the cutting blade from the length of the cutting trace taken by the imaging means The cutting feed means is formed by a first cutting mark forming step in which the cutting blade is cut to a first lowered position to form a first cutting mark, and the first cutting mark forming step. The first cutting mark A first cutting blade outer diameter calculating step in which the imaging means images and measures the length of the first cutting scar, and the calculating means calculates a first outer diameter of the cutting blade; The cutting blade outer diameter calculation step is performed at least once, and the cutting feed means cuts the cutting blade to a lowered position deeper than the first lowered position and is longer than the first cutting mark. The late cutting trace forming step for forming the cutting trace, and the cutting means formed in the late cutting trace forming step is imaged by the imaging means to measure the length of the cutting trace longer than the first cutting trace, and the calculation A late cutting blade outer diameter calculating step of calculating an outer diameter of the cutting blade by means, a first outer diameter of the cutting blade calculated in the first cutting blade outer diameter calculating step, and the late cutting blade outer diameter Compare the cutting blade outer diameter calculated in the calculation process. The smallest the cutting outer diameter size detection method of cutting blade including a cutting blade outside diameter selection step, the selecting the outer diameter of the blade as the outer diameter of the correct cutting blade.

  The present invention relates to a cutting blade outer diameter size detection method using a cutting device provided with a calculating unit that calculates an outer diameter of a cutting blade from a length of a cutting mark imaged by an imaging unit, and the cutting mark forming work The cutting blade is cut at least twice at different lowered positions with respect to the object to form at least two cutting marks having different lengths. By calculating the diameter and selecting the smallest outer diameter of the cutting blade from the calculated outer diameter of the cutting blade, the length of the imaged cutting trace may be caused by scattering of watermarks, cutting waste or cutting waste. For example, even when the measurement is longer than the actual length, it is possible to detect the accurate outer diameter of the cutting blade.

It is a perspective view which shows an example of a cutting device. It is sectional drawing which shows arrangement | positioning of the cutting means with which a cutting device is equipped, and a chuck table. It is side view explanatory drawing explaining the state which the cutting blade cuts into the workpiece for cutting trace formation. It is a top view explaining the state of the formed cutting trace.

  The cutting apparatus 1 shown in FIG. 1 used in the present embodiment is an apparatus that performs cutting with a cutting means 6 on a plate-like workpiece W held on a holding table 30.

  The plate-like workpiece W held on the holding table 30 shown in FIG. 1 is, for example, a semiconductor wafer having a circular outer shape, and a lattice-like shape partitioned by division scheduled lines S on the upper surface Wa of the plate-like workpiece W. A large number of devices D are formed in this area. The shape and type of the plate-like workpiece W are not limited to this embodiment. The plate-like workpiece W is held by the holding table 30 while being supported by the ring frame F via the dicing tape T attached to the lower surface of the plate-like workpiece W.

  For example, the holding table 30 has a circular outer shape, communicates with a suction source (not shown), and sucks and holds the plate-like workpiece W on a horizontal holding surface. The holding table 30 can be rotated by rotating means 31 disposed below the holding table 30. A fixing means 32 for fixing the ring frame F is disposed around the holding table 30.

  On the base 10 of the cutting apparatus 1, a cutting feed means 5 for cutting and feeding the holding table 30 in the X-axis direction is disposed. The cutting feed means 5 includes a ball screw 50 having an axis in the X-axis direction, a pair of guide rails 51 arranged in parallel with the ball screw 50, and a pulse motor that rotates the ball screw 50 by a pulse signal from the control unit 13. 52 and a movable plate 53 whose inner nut is screwed onto the ball screw 50 and whose bottom is in sliding contact with the guide rail 51. When the pulse motor 52 rotates the ball screw 50, the movable plate 53 is moved along the guide rail. The holding table 30 arranged on the movable plate 53 is cut and fed in the X-axis direction as the movable plate 53 is moved.

  On the rear side (−X direction side) on the base 10 of the cutting apparatus 1, a wall portion 11 is erected, and on the wall portion 11, index feeding means for reciprocating the cutting means 6 in the Y-axis direction. 7 is disposed. The index feed means 7 includes a ball screw 70 having an axis in the Y-axis direction, a pair of guide rails 71 disposed in parallel to the ball screw 70, and a pulse motor that rotates the ball screw 70 by a pulse signal from the control unit 13. 72 and a movable plate 73 having an inner nut screwed into the ball screw 70 and a side portion slidably contacting the guide rail 71. When the pulse motor 72 rotates the ball screw 70, the movable plate 73 is guided by the guide rail 71 and moves in the Y-axis direction, and the cutting means 6 disposed on the movable plate 73 moves the movable plate 73. With the movement of 73, the index is fed in the Y-axis direction.

  On the movable plate 73, a cutting feed means 8 for reciprocating the cutting means 6 in the Z-axis direction (direction perpendicular to the upper surface Wa of the plate-like workpiece W) is disposed. The cutting feed means 8 includes a ball screw 80 having an axis in the Z-axis direction, a pair of guide rails 81 arranged in parallel with the ball screw 80, and a pulse motor that rotates the ball screw 80 by a pulse signal from the control unit 13. 82, and an elevating part 83 whose inner nut is screwed into the ball screw 80 and whose side part is in sliding contact with the guide rail 81. When the pulse motor 82 rotates the ball screw 80, the elevating part 83 is guided by the guide rail 81 and moves in the Z-axis direction, and the cutting means 6 disposed in the elevating part 83 is moved by the elevating part 83. Is moved by cutting in the Z-axis direction. For example, the cutting feed means 8 can control the position of the cutting blade 63 in the Z-axis direction with the number of pulse signals sent from the control unit 13 to the pulse motor 82.

  As shown in FIG. 2, the cutting means 6 includes a spindle 61 having a rotation axis in a direction (Y-axis direction) orthogonal to the horizontal direction with respect to the X-axis direction, a housing 62 that rotatably supports the spindle 61, A cutting blade 63 that is fixed to the spindle 61 and is rotatable, and a blade cover 64 that protects the cutting blade 63 are provided.

  The cutting blade 63 is clamped by a flange 630 and is fixed to the tip portion of the spindle 61 by a nut 65. For example, the spindle 61 is integrally formed with a thrust plate or the like, and is supported in a non-contact state by a thrust bearing portion and a radial bearing portion (not shown) that eject high pressure air from the housing 62 to the spindle 61. . Before and after the cutting blade 63 in the Y-axis direction, a pair of cutting fluid nozzles (not shown) that are provided on the blade cover 64 and supply cutting fluid to the machining points of the cutting blade 63 with respect to the plate-like workpiece W are provided. The cutting fluid ejected from the cutting fluid nozzle cools the contact portion between the cutting blade 63 and the plate-like workpiece W.

  As shown in FIG. 1, for example, imaging means 68 is disposed on the side surface of the housing 62. The imaging means 68 is, for example, a camera using a CCD image sensor, but is not limited to this. In addition, for example, the imaging unit 68 is connected to an alignment unit (not shown) that detects a division line S to be cut of the plate-like workpiece W held on the holding table 30, and the alignment unit is the imaging unit 68. Based on the acquired image, image processing such as pattern matching can be executed to detect the division line S to be cut of the plate-like workpiece W.

  The captured image captured by the imaging unit 68 is stored in, for example, the storage unit 12 connected to the imaging unit 68 and configured by a memory or the like, and is transmitted from the storage unit 12 to the calculation unit 14 as a digital signal. The calculation means 14 is comprised by CPU and memory etc., for example.

  For example, on the movable plate 53, the chuck table 40 that sucks and holds the workpiece B for cutting trace formation that is used to calculate the outer diameter of the cutting blade 63 by cutting the cutting blade 63 to form a cutting trace. The holding table 30 is disposed. As shown in FIG. 2, the chuck table 40 includes, for example, a suction portion 400 that is formed of a porous member or the like and sucks the workpiece B for forming a cutting trace, and a frame body 401 that supports the suction portion 400. The lower part of the suction unit 400 communicates with a suction source 41 configured by a vacuum generator or the like, and the suction force generated by the suction source 41 is an exposed surface of the suction unit 400 and is flush with the upper surface of the frame 401. By being transmitted to the holding surface 400a, the chuck table 40 sucks and holds the cutting trace forming workpiece B on the holding surface 400a.

  In the cutting apparatus 1, the positional relationship in the Z-axis direction between the holding surface 400a of the chuck table 40 and the rotation center when the spindle 61 is at the origin position Z0 (the rotation of the spindle 61 when it is at the origin position Z0 from the holding surface 400a). The distance in the Z-axis direction to the center) and the positional relationship in the Z-axis direction between the holding surface 400a of the chuck table 40 and the holding surface of the holding table 30 shown in FIG. Is grasped. The origin position Z0 is, for example, a position on the Z-axis of the rotation center of the spindle 61 provided in the cutting means 6 when the cutting means 6 is not cut by the cutting feed means 8. Further, the cutting trace forming workpiece B has, for example, a rectangular parallelepiped shape and a uniform thickness in the Z-axis direction. That is, the distance from the upper surface Ba of the workpiece B for forming cutting traces to the rotation center of the spindle 61 provided in the cutting means 6 can be determined, and the distance is stored and grasped in the storage unit 12.

  The steps of the method for detecting the outer diameter size of the cutting blade 63 provided in the cutting apparatus 1 shown in FIG. 1 and the operation of the cutting apparatus 1 will be described below with reference to FIGS. In FIGS. 2 to 3, each configuration of the cutting feed means 8 and the like of the cutting apparatus 1 is partially simplified.

(1) First Cutting Trace Formation Step In the method for detecting the outer diameter size of the cutting blade 63, first, the cutting feed means 8 provided in the cutting device 1 cuts the cutting blade 63 to the first lowered position and first A first cutting mark forming step for forming cutting marks is performed.

  First, as shown in FIG. 1, after placing the workpiece B for forming a cutting trace on the holding surface 400a of the chuck table 40, the workpiece 41 for cutting trace formation is driven on the holding surface 400a by driving the suction source 41. The object B is sucked and held. Next, the chuck table 40 is fed in the −X direction by the cutting feed means 5, and at the same time, the cutting means 6 is driven in the Y-axis direction by the index feed means 7, so that the workpiece B for cutting trace formation is aligned in the Y-axis direction. Made. After the workpiece B for forming cutting traces on the chuck table 40 is positioned below the cutting blade 63 provided in the cutting means 6, the feeding of the chuck table 40 in the −X direction is stopped.

  Next, the cutting feed means 8 lowers the cutting means 6 in the −Z direction. Further, when a motor (not shown) rotates the spindle 61 at a high speed, the cutting blade 63 fixed to the spindle 61 rotates at a high speed along with the rotation of the spindle 61 and is positioned below the cutting blade 63 for forming a cutting mark. Cut into the workpiece B. For example, the cutting feed means 8 controls the lowering position of the cutting blade 63 with the number of pulse signals sent from the control unit 13 to the pulse motor 82, and as shown in FIG. A first cutting mark M1 is formed by cutting to position Z1. Here, the first descending position Z1 is a Z-axis in which the lower end of the cutting blade 63 cuts into the upper surface Ba of the workpiece B for forming traces and the cutting blade 63 does not cut into the holding surface 400a of the chuck table 40. It is a position in the direction, and is determined with reference to the rotation center of the spindle 61. For example, it can be grasped by the number of pulse signals supplied from the control unit 13 to the pulse motor 82. In the first lowered position Z1 in the present embodiment, for example, a pulse signal of an amount for cutting the cutting blade 63 by 15 μm in the −Z direction from the upper surface Ba of the workpiece B for cutting trace formation is sent from the control unit 13 to the pulse motor 82. It becomes the position of the rotation center of the spindle 61 determined by being supplied to.

(2) First cutting blade outer diameter calculating step After performing the first cutting trace forming step, the imaging means 68 picks up the first cutting trace M1 shown in FIG. 3 formed in the first cutting trace forming step. Then, the length M1w of the first cutting mark M1 is measured, and the first cutting blade outer diameter calculating step in which the calculating unit 14 calculates the first outer diameter 2r1 of the cutting blade 63 is performed.

  First, as shown in FIG. 3, the cutting feed means 8 lifts the cutting blade 63 lowered to the first lowered position Z1 to the origin position Z0 in the + Z direction and separates it from the workpiece B for forming a cutting trace. Next, the cutting feed means 5 shown in FIG. 1 moves the chuck table 40 in the X-axis direction, and the index feed means 7 moves the imaging means 68 in the Y-axis direction so as to be positioned above the workpiece B for forming the cutting trace. . And the imaging means 68 images the 1st cutting trace M1 formed in the upper surface Ba of the workpiece B for cutting trace formation.

  The captured image of the first cutting mark M1 is stored in the storage unit 12 and transmitted from the storage unit 12 to the calculation unit 14 as a digital signal. For example, the calculation unit 14 measures the length M1w of the first cutting mark M1 based on the number of pixels of the first cutting mark M1 in the captured image.

Next, the calculating unit 14 calculates the first outer diameter 2r1 of the cutting blade 63 from the measured length M1w of the first cutting mark M1 and the first lowered position Z1. That is, the distance h1 from the position of the upper surface Ba of the workpiece B for cutting trace formation B stored in the storage unit 12 to the first lowered position Z1 is calculated by the calculation process by the calculation unit 14. . Then, the calculation means 14 calculates the first outer diameter 2r1 of the cutting blade 63 by the following calculation formula. Note that the first outer diameter 2r1 of the cutting blade 63 is twice the first radius r1 of the cutting blade 63.
r1 ² = (1/2 × M1w) ² + h1 ² (Equation 1)
2r1 = 2 (1/4 × M1w ² + h1 ² ) ^1/2 (Equation 2)
Here, the expression (1) uses the Pythagorean theorem, and the expression (2) is a modification of the expression (1).

(3) Late cutting trace formation step (second cutting trace formation step)
In the present embodiment, for example, after performing the first cutting blade outer diameter calculating step, the cutting feed means 8 cuts the cutting blade 63 to the second lowered position Z2 deeper than the first lowered position Z1. A second cutting trace forming process, which is a late cutting trace forming process for forming a second cutting trace M2 longer than one cutting trace M1, is performed.

  Until the workpiece B for forming the cutting trace is positioned below the cutting blade 63 provided in the cutting means 6, the same process as the first cutting trace forming step is performed. Here, for example, the positions of the cutting blade 63 and the workpiece B for forming a cutting trace in the X-axis direction and the Y-axis direction are the same as the positions in the first cutting trace forming step, as shown in FIG. The second cutting trace M2 is formed so as to overlap the first cutting trace M1.

  Next, the cutting feed means 8 lowers the cutting means 6 in the −Z direction. Further, the cutting blade 63 cuts into the workpiece B for forming a cutting trace positioned below the cutting blade 63 while rotating at a high speed as the spindle 61 rotates. Here, as shown in FIG. 3, for example, the cutting feed means 8 sets the lowered position of the cutting blade 63 by the number of pulse signals sent from the control unit 13 (not shown in FIG. 3) to the pulse motor 82. The cutting blade 63 is cut to the second lowered position Z2 to form a second cutting mark M2. Here, the second lowered position Z2 is a Z-axis in which the lower end of the cutting blade 63 cuts into the upper surface Ba of the workpiece B for forming cutting traces and the cutting blade 63 does not cut into the holding surface 400a of the chuck table 40. It is a position in the direction, which is determined with reference to the rotation center of the spindle 61, and can be grasped by the number of pulse signals supplied from the control unit 13 to the pulse motor 82. The second lowered position Z2 is, for example, because the number of pulse signals supplied from the control unit 13 to the pulse motor 82 is larger than the number of pulse signals supplied in the first cutting mark forming step. The lowering position is deeper than the first lowering position Z1. In the second lowered position Z2 in the present embodiment, for example, a pulse signal of an amount for cutting the cutting blade 63 by 30 μm in the −Z direction from the upper surface Ba of the workpiece B for cutting trace formation is sent from the control unit 13 to the pulse motor 82. It becomes the position of the rotation center of the spindle 61 determined by being supplied to.

(4) Late cutting blade outer diameter calculation step (second cutting blade outer diameter calculation step)
After performing the second cutting trace forming step, the imaging unit 68 images the second cutting trace M2 longer than the first cutting trace M1 formed in the second cutting trace forming step, and the second cutting trace M2 is taken. The length M2w is measured, and the calculation means 14 performs a second cutting blade outer diameter calculating step in which the outer diameter 2r2 (second outer diameter 2r2) of the cutting blade 63 is calculated.

Until the length M2w of the second cutting mark M2 is measured, the same process as the first cutting blade outer diameter calculation step is performed. The calculating means 14 calculates the second outer diameter 2r2 of the cutting blade 63 from the measured length M2w of the second cutting mark M2 and the second lowered position Z2. That is, the distance h2 from the position of the upper surface Ba of the workpiece B for cutting trace formation B stored in the storage unit 12 to the second lowered position Z2 is calculated by the calculation process by the calculation unit 14. . Then, the calculation means 14 calculates the second outer diameter 2r2 of the cutting blade 63 by the following calculation formula. Note that the second outer diameter 2r2 of the cutting blade 63 is twice the second radius r2 of the cutting blade 63.
r2 ² = (1/2 × M2w) ² + h2 ² (Equation 3)
2r2 = 2 (1/4 × M2w ² + h2 ² ) ^1/2 (Equation 4)
Here, Expression (3) uses Pythagorean theorem, and Expression (4) is a modification of Expression (3).

(5) Late cutting trace formation step (third cutting trace formation step)
In the present embodiment, for example, after the second cutting blade outer diameter calculation step is performed, the cutting blade 63 is moved by the infeed means 8 to the third descending position deeper than the first descending position Z1 and the second descending position Z2. A third cutting mark forming step, which is a late cutting mark forming step of cutting to the position Z3 and forming a third cutting mark M3 longer than the first cutting mark M1 and the second cutting mark M2, is performed.

  Until the workpiece B for forming the cutting trace is positioned below the cutting blade 63 provided in the cutting means 6, the same process as the first cutting trace forming step is performed. Here, for example, the positions of the cutting blade 63 and the workpiece B for forming a cutting trace in the X-axis direction and the Y-axis direction are the same as the positions in the first cutting trace forming step, as shown in FIG. The third cutting mark M3 is formed so as to overlap the third cutting mark M3.

  Next, the cutting feed means 8 lowers the cutting means 6 in the −Z direction. Further, the cutting blade 63 cuts into the workpiece B for forming a cutting trace positioned below the cutting blade 63 while rotating at a high speed as the spindle 61 rotates. Here, as shown in FIG. 3, for example, the cutting feed means 8 controls the lowering position of the cutting blade 63 by the number of pulse signals sent from the control unit 13 to the pulse motor 82, and the cutting blade 63 is moved to the first position. 3 is moved to the lowered position Z3 to form a third cutting mark M3. Here, the third lowered position Z3 is a Z-axis in which the lower end of the cutting blade 63 cuts into the upper surface Ba of the workpiece B for cutting trace formation and the cutting blade 63 does not cut into the holding surface 400a of the chuck table 40. It is a position in the direction, which is determined with reference to the rotation center of the spindle 61, and can be grasped by the number of pulse signals supplied from the control unit 13 to the pulse motor 82. The third descending position Z3 is such that, for example, the number of pulse signals supplied from the control unit 13 to the pulse motor 82 is the number of pulse signals supplied in the first cutting mark forming step and the second cutting mark forming step. When the number of pulse signals is larger than the number of pulse signals supplied at, the lowering position is deeper than the first lowering position Z1 and the second lowering position Z2. In the third lowered position Z3 in the present embodiment, for example, a pulse signal of an amount for cutting the cutting blade 63 by 45 μm in the −Z direction from the upper surface Ba of the cutting trace forming workpiece B is sent from the control unit 13 to the pulse motor 82. It becomes the position of the rotation center of the spindle 61 determined by being supplied to.

(6) Late cutting blade outer diameter calculation step (third cutting blade outer diameter calculation step)
After performing the third cutting mark forming step, the imaging means 68 picks up the third cutting mark M3 longer than the first cutting mark M1 and the second cutting mark M2, and the length of the third cutting mark M3. M3w is measured, and a third cutting blade outer diameter calculating step is performed in which the calculating unit 14 calculates the outer diameter 2r3 (third outer diameter 2r3) of the cutting blade 63.

Until the length M3w of the third cutting mark M3 is measured, the same process as in the first cutting blade outer diameter calculation step is performed. The calculating means 14 calculates the third outer diameter 2r3 of the cutting blade 63 from the measured length M3w of the third cutting mark M3 and the third lowered position Z3. That is, the distance h3 from the position of the upper surface Ba of the cutting trace forming workpiece B in the Z-axis direction stored in the storage unit 12 to the third lowered position Z3 is calculated by the calculation process by the calculating unit 14. . Then, the calculation means 14 calculates the third outer diameter 2r3 of the cutting blade 63 by the following calculation formula. Note that the third outer diameter 2r3 of the cutting blade 63 is twice the third radius r3 of the cutting blade 63.
r3 ² = (1/2 × M3w) ² + h3 ² (5)
2r3 = 2 (1/4 × M3w ² + h3 ² ) ^1/2 (Equation 6)
Here, Expression (5) uses Pythagorean theorem, and Expression (6) is a modification of Expression (5).

(7) Cutting blade outer diameter selection step After performing the third cutting blade outer diameter calculation step, the first outer diameter 2r1 of the cutting blade 63 calculated in the first cutting blade outer diameter calculation step, and the second The second outer diameter 2r2 of the cutting blade 63 calculated in the cutting blade outer diameter calculation step is compared with the third outer diameter 2r3 of the cutting blade 63 calculated in the third cutting blade outer diameter calculation step. A cutting blade outer diameter selection step of selecting an outer diameter of the small cutting blade 63 as an accurate outer diameter of the cutting blade is performed.

In the present embodiment, for example, the length M1w of the first cutting mark M1 shown in FIG. 3 is the actual length by the calculation means 14 using a watermark (not shown) that is in the extending direction of the first cutting mark M1. The length M2w of the second cutting mark M2 is measured by the calculating means 14 to be longer than the actual length by a watermark (not shown) in the extending direction of the second cutting mark M2. It has been measured for a long time. For this reason, for example, the following inequality is established.
First outer diameter 2r1> second outer diameter 2r2> third outer diameter 2r3 (Expression 7)

In the cutting blade outer diameter selection step, for example, the calculation means 14 calculates the absolute value | α | of the difference between the first outer diameter 2r1 and the second outer diameter 2r2 of the cutting blade 63, the second outer diameter 2r2, and the like. The absolute value | β | of the difference from the third outer diameter 2r3 and the absolute value | γ | of the difference between the third outer diameter 2r3 and the first outer diameter 2r1 are calculated.
| 2r1-2r2 | = | α | (Equation 8)
| 2r2-2r3 | = | β | (9)
| 2r3-2r1 | = | γ | (10)

  In addition, for example, the allowable value | δ | of each outer diameter difference is designated in advance in the calculation means 14. Then, the calculating means 14 compares the absolute value of the difference | α |, the absolute value of the difference | β |, and the absolute value of the difference | γ | with the allowable value | δ | It is calculated whether any one is less than or equal to the allowable value | δ |. In the present embodiment, for example, when the absolute value | β | of the difference is equal to or smaller than the allowable value | δ |, the calculation unit 14 uses the first outer diameter 2r1, the second outer diameter 2r2, and the second outer diameter 2r2. The third outer diameter 2r3 that is the smallest of the three outer diameters 2r3 is selected as the accurate outer diameter of the cutting blade 63.

  In the present embodiment, for example, when the absolute value of the difference | α |, the absolute value of the difference | β |, and the absolute value of the difference | γ | all exceed the allowable value | δ | The means 14 judges that an accurate outer diameter of the cutting blade 63 cannot be selected, and performs the same process from the first cutting mark forming process again.

  In this way, the cutting blade 63 is cut to at least three different first lowered positions Z1, second lowered positions Z2, and third lowered positions Z3, and the first cutting marks M1 having at least three different lengths are cut. The second cutting trace M2 and the third cutting trace M3 are formed, the length M1w of the formed first cutting trace M1, the length M2w of the second cutting trace M2, and the third cutting trace M3 The first outer diameter 2r1, the second outer diameter 2r2, and the third outer diameter 2r3 of the cutting blade 63 are calculated from the length M3w, and the smallest cutting blade outer diameter is calculated from the calculated outer diameters of the cutting blades. By selecting the third outer diameter 2r3, the length M1w of the imaged first cutting trace M1 and the length M2w of the second cutting trace M2 are measured longer than the actual length in consideration of the presence of the watermark. Even if it is done, the cutting blade 6 It is possible to detect an accurate outer diameter of.

  The method for detecting the outer diameter size of the cutting blade according to the present invention is not limited to the above embodiment, and the size and shape of each component of the cutting apparatus 1 shown in the attached drawings are also described. However, the present invention is not limited thereto, and can be appropriately changed within a range in which the effect of the present invention can be exhibited. For example, the cutting apparatus 1 may be configured not to include the chuck table 40, and the holding table 30 may hold the workpiece B for forming a cutting trace and perform the outer diameter size detection method for a cutting blade according to the present invention.

  Further, in the present embodiment, the second cutting trace forming process and the third cutting trace forming process are performed as the late cutting trace forming process, and the second cutting blade is calculated as the late cutting blade outer diameter calculating process accordingly. Although the outer diameter calculating step and the third cutting blade outer diameter calculating step are performed, only the second cutting mark forming step is performed as the late cutting mark forming step, and accordingly, the second cutting blade outer diameter calculating step is performed as the second cutting blade outer diameter calculating step. After performing the cutting blade outer diameter calculating step, the cutting blade outer diameter selecting step may be performed. Or after performing a 3rd cutting blade outer diameter calculation process, it is good also as what carries out a 4th cutting trace formation process as a late cutting trace formation process, and performs a 4th cutting blade outer diameter calculation process in connection with it. That is, the number of times of performing the late cutting trace forming step and the late cutting blade outer diameter calculating step can be appropriately changed.

  Further, in the cutting blade outer diameter selection step, in this embodiment, when any one of the absolute values of the differences is less than the allowable value, the calculating means 14 determines the outer diameter of the smallest cutting blade. The exact outer diameter of the cutting blade 63 is selected. For example, the fifth cutting trace forming step is performed as the latter cutting trace forming step, and the fifth cutting blade outer diameter is calculated as the latter cutting blade outer diameter calculating step accordingly. When the process is performed up to the diameter calculation step, five values are calculated as absolute values of the differences. In this case, for example, when any two of the absolute values of the differences are equal to or less than the allowable value, the calculation means 14 selects the outer diameter of the smallest cutting blade as the accurate outer diameter of the cutting blade 63. It may be a thing.

  Further, in the cutting blade outer diameter selection step, the operator may select an accurate outer diameter of the cutting blade 63 instead of the calculation means 14.

1: Cutting device 10: Base 11: Wall part 12: Storage part 13: Control part 14: Calculation means 30: Holding table 31: Rotating means 32: Fixing means 40: Chuck table 400: Suction part 400a: Holding surface 401: Frame 41: Suction source 5: Cutting feed means
50: Ball screw 51: Guide rail 52: Pulse motor 53: Movable plate
6: Cutting means 61: Spindle 62: Housing 63: Cutting blade 630: Flange
64: Blade cover 68: Imaging means 7: Index feeding means 70: Ball screw 71: Guide rail 72: Pulse motor 73: Movable plate
8: Cutting feed means
80: Ball screw 81: Guide rail 82: Pulse motor 83: Elevating part
W: Plate workpiece Wa: Upper surface of plate workpiece S: Divided line D: Device
T: Dicing tape F: Ring frame B: Cutting trace forming workpiece Ba: Upper surface of the cutting trace forming workpiece M1: First cutting trace M2: Second cutting trace M3: Third cutting trace M1w : Length of the first cutting trace M2w: length of the second cutting trace
M3w: Length of third cutting trace Z0: Origin position Z1: First descending position Z2: Second descending position Z3: Third descending position h1: Distance h2: Distance h3: Distance 2r1: First outside Diameter 2r2: Second outer diameter 2r3: Third outer diameter

Claims (1)

A holding table for holding the plate-like workpiece, a cutting means for rotatably mounting a cutting blade for cutting the plate-like workpiece held by the holding table, and the holding table and the cutting means are relatively connected to each other. A cutting feed means for approaching and separating in a direction perpendicular to the upper surface; an imaging means for imaging the cutting trace formed by cutting the cutting blade into a workpiece for forming a cutting trace; An outer diameter size detection method of a cutting blade using a cutting device comprising a calculating means for calculating the outer diameter of the cutting blade from the length of the cutting trace imaged by an imaging means,
A first cutting trace forming step in which the cutting feed means cuts the cutting blade to a first lowered position to form a first cutting trace;
The first cutting trace formed in the first cutting trace formation step is imaged by the imaging means to measure the length of the first cutting trace, and the calculation means is configured to measure the first outside of the cutting blade. A first cutting blade outer diameter calculating step of calculating a diameter;
After performing the first cutting blade outer diameter calculating step, the cutting cutting means is performed at least once, and the cutting feed means cuts the cutting blade to a lowered position deeper than the first lowered position. A late cutting trace forming process for forming a cutting trace longer than the trace,
The latter stage in which the imaging means images the cutting trace formed in the late cutting trace forming step and measures the length of the cutting trace longer than the first cutting trace, and the calculation means calculates the outer diameter of the cutting blade. Cutting blade outer diameter calculating step,
The first outer diameter of the cutting blade calculated in the first cutting blade outer diameter calculation step is compared with the outer diameter of the cutting blade calculated in the latter cutting blade outer diameter calculation step, which is the smallest A cutting blade outer diameter selecting step of selecting an outer diameter of the cutting blade as an accurate outer diameter of the cutting blade;

Images