JP6468646B2 - Multilayer actuator - Google Patents

Description

  The present invention relates to an actuator that deforms in response to a voltage between electrode layers, and more particularly to a stacked actuator that is formed by stacking a plurality of polymer laminates that are deformed as ions move due to an electric field.

  In various electronic devices, there is an increasing need for a small, lightweight, and flexible actuator. In response to this demand, a polymer telescopic polymer actuator is expected. In particular, in order to increase the driving force of the actuator, attention has been paid to a laminated actuator in which a plurality of polymer laminates deformed according to the voltage between electrode layers are laminated.

  As a conventional example of this laminated actuator, Patent Document 1 proposes a laminated actuator 910 in which a plurality of laminated bodies (polymer laminated bodies) 901 are assembled in the thickness direction. FIG. 7 is an exploded perspective view and a perspective view illustrating a conventional multilayer actuator 910.

  As shown in FIG. 7A, the multilayer actuator 910 of the conventional example has a first structure based on a three-layer structure in which an electrolyte layer 902 is sandwiched between a first electrode 903 and a second electrode 904. A stacked body 901A, a second stacked body 901B having the same configuration, and an insulating layer 906 provided therebetween are used, and are stacked in the thickness direction as shown in FIG. 7B. Then, as shown in FIG. 7C, the stacked actuator 910 electrically connects the first protrusions 903a provided in the first stacked body 901A and the second stacked body 901B, respectively. The second protrusions 904a are electrically connected to each other, and the first stacked body 901A and the second stacked body 901B are electrically connected in parallel. Thus, when a plurality of laminated bodies 901 are connected in parallel, the energized separate laminated bodies 901 are connected in the thickness direction, and the decrease in response speed and displacement is suppressed while the actuator drive voltage remains unchanged. The generation force can be improved.

JP 2010-68678 A

  However, in the case of parallel connection as in the conventional example, as shown in FIG. 7, the first electrode 903 is provided with a first protrusion 903 a, and the second electrode 904 is provided with a second protrusion 904 a, It was necessary to devise a structure for parallel wiring. In addition, the energization portions (first protrusion 903a and second protrusion 904a) that do not contribute to the drive of the actuator become large, and there is a possibility that a voltage drop in the drive portion due to an increase in wiring resistance may occur.

  On the other hand, the structure for wiring can be simplified by electrically connecting the polymer laminates in series rather than electrically in parallel. However, due to differences in capacitance values between the polymer laminates, differences in residual charges, etc., a uniform voltage is not applied to each of the polymer laminates connected in series. New problems such as excessive voltage applied to some of the molecular stacks. For this reason, in the case of the serial connection type stacked actuator, it is necessary to stabilize its performance.

  The present invention solves the above-described problems, and an object of the present invention is to provide a multilayer actuator in which polymer laminates are connected in series and have stable performance.

In order to solve this problem, the multilayer actuator of the present invention is based on a three-layer structure of an electrolyte layer containing ions and a pair of electrode layers provided on both sides in the thickness direction of the electrolyte layer. has a set of polymer laminates, polymer laminate is stacked plurality of sets in the thickness direction, the multilayer actuator, each of the polymer stacked bodies are electrically connected in series, the polymer The electrode layers facing each other between the stacked bodies are connected via an intermediate electrode connection body having conductivity, and the intermediate electrode connection body does not transmit the ions and is formed on the electrode layers on both sides in the plate thickness direction. A voltage dividing means is provided for adjusting a voltage applied between the pair of electrode layers of each polymer laminate when a voltage is applied.

  According to this, the multilayer actuator of the present invention can prevent voltage non-uniformity applied to the polymer laminate due to variations in characteristics between the polymer laminates. As a result, the polymer laminates can be easily electrically connected in series, and stable performance can be obtained.

  In the multilayer actuator of the present invention, the electrolyte layer includes a gel in which a polymer and an ionic liquid are mixed, and the electrode layer includes a gel in which the polymer, the ionic liquid, and conductive particles are mixed. The intermediate electrode connection body is connected to the voltage dividing means.

  According to this, the intermediate electrode connector functions as a current collector while separating the polymer laminates. For this reason, the characteristic of a polymer laminated body, especially responsiveness can be improved, without increasing the lamination thickness of one polymer laminated body.

  In the multilayer actuator of the present invention, the intermediate electrode connector is characterized in that a conductive layer is formed on both surfaces of an insulating film and the conductive layers on both surfaces are connected.

  According to this, since it is an insulating film, it is possible to obtain a structure that does not transmit ions reliably and is flexible and excellent in deformation resistance. In addition, since the conductive layers are formed on both sides of the film, the composition of the conductive layer suitable for the contact portion of the polymer laminate can be adjusted (for example, improved adhesion and reduced contact resistance). An adapted structure can be obtained.

  In the multilayer actuator according to the present invention, the electrode layer and the intermediate electrode connector are connected via a conductive gel that is softer than the electrode layer.

  According to this, electrical connection between the electrode layer and the intermediate electrode connector can be reliably performed. Moreover, when the polymer laminate repeats deformation, the electrode layer expands and contracts, and the deviation between the polymer laminate and the intermediate electrode connector due to the expansion and contraction can be absorbed. For this reason, the attenuation of the driving force and deformation displacement of the multilayer actuator can be reduced.

  The laminated actuator of the present invention has a pair of terminal portions connected to the electrodes on both sides in the plate thickness direction, and the voltage dividing means and a part of the intermediate electrode connector are the pair of terminals. It is characterized by being integrated between the parts.

  According to this, the connection with the outside is easy and the handling is easy.

  The multilayer actuator of the present invention can prevent the voltage applied to the polymer laminate from becoming non-uniform due to variations in characteristics between the polymer laminates. As a result, the polymer laminates can be easily electrically connected in series, and stable performance can be obtained.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective configuration diagram illustrating a configuration of a multilayer actuator according to a first embodiment of the present invention. FIG. 2 is a configuration diagram illustrating the configuration of the multilayer actuator according to the first embodiment of the present invention, in which FIG. 2A is a top view seen from the Z1 side shown in FIG. 1, and FIG. FIG. 2 is a side view seen from the X1 side shown in FIG. The It is a block diagram explaining the structure of the multilayer actuator concerning 1st Embodiment of this invention, Comprising: It is sectional drawing in the III-III line shown to Fig.2 (a). It is a block diagram explaining the structure of the multilayer actuator concerning 1st Embodiment of this invention, Comprising: It is sectional drawing in the IV-IV line | wire shown to Fig.2 (a). It is the schematic diagram explaining the principle of operation of the polymer layered product used for the lamination type actuator concerning a 1st embodiment of the present invention. It is a schematic diagram explaining the circuit structure of the laminated actuator concerning 1st Embodiment of this invention. It is the disassembled perspective view and perspective view explaining the multilayer actuator of a prior art example.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
FIG. 1 is a perspective configuration diagram illustrating the configuration of the multilayer actuator 101 according to the first embodiment of the present invention. FIG. 2 is a configuration diagram illustrating the configuration of the multilayer actuator 101 according to the first embodiment of the present invention, and FIG. 2A is a top view seen from the Z1 side shown in FIG. 2 (b) is a side view seen from the X1 side shown in FIG. FIG. 3 is a configuration diagram illustrating the configuration of the multilayer actuator 101 according to the first embodiment of the present invention, and is a cross-sectional view taken along the line III-III shown in FIG. FIG. 4 is a configuration diagram illustrating the configuration of the multilayer actuator 101 according to the first embodiment of the present invention, and is a cross-sectional view taken along line IV-IV shown in FIG.

  The laminated actuator 101 according to the first embodiment of the present invention has a rectangular appearance as shown in FIGS. 1 and 2, and two polymer laminates R3 (R3A, R3B) sandwich an intermediate electrode connector M5. They are stacked in the plate thickness direction DT (Z direction shown in FIG. 2B) and electrically connected in series. Further, as shown in FIG. 3, the laminated actuator 101 includes two voltage dividing means D7 (D7A, D7B) for adjusting the voltage applied between the polymer laminates R3. Furthermore, in the first embodiment of the present invention, a gel layer G4 (G4A, G4B) made of a flexible conductive gel and two polymer laminates between the polymer laminate R3 and the intermediate electrode connector M5. A pair of terminal portions T9 (T9A, T9B) sandwiching R3.

  First, the polymer laminate R3 of the multilayer actuator 101 is an actuator that deforms according to voltage, and is provided on both surfaces of the electrolyte layer 11 and the electrolyte layer 11 in the thickness direction, as shown in FIGS. It is configured on the basis of a three-layer structure with a pair of electrode layers 12 (12E, 12F). Moreover, in 1st Embodiment of this invention, the current collection layer 13 (13K, 13L) formed in the outer side of the thickness direction (Z direction shown in FIG. 3) of a pair of electrode layer 12 (12E, 12F) is provided. ing. When electric power is supplied from the outside via the pair of terminal portions T9, the polymer laminate R3 is deformed according to the voltage between the electrode layer 12E and the electrode layer 12F.

  Here, the polymer laminate R3 used in the multilayer actuator 101 according to the first embodiment of the present invention will be described with reference to FIG. FIG. 5 is a schematic diagram illustrating the operating principle of the polymer laminate R3, and FIG. 5A is a diagram schematically illustrating ions in the electrolyte layer 11 and the electrode layer 12 according to the first embodiment of the present invention. FIG. 5B shows a state in which a voltage is applied to the electrode layer 12 of the first embodiment of the present invention.

  First, as shown to Fig.5 (a), polymer laminated body R3 is provided between a pair of electrode layer 12 (12E, 12F) and the pair of electrode layer 12 (12E, 12F) which were opposingly arranged. The electrolyte layer 11 is formed, and a cation CA and an anion AN are dispersed in each layer.

  Then, when a voltage is applied between the electrode layer 12E and the electrode layer 12F, as shown in FIG. 5B, the electrolyte layer 11 sandwiched between the electrode layer 12E and the electrode layer 12F. An electric field is generated, and the positive ions CA move to the electrode layer 12E, and the negative ions AN move to the electrode layer 12F. Therefore, if one side is supported and used as a fulcrum PP (supporting portion), the other side of the actuator is greatly displaced according to the direction of the electric field to the actuator (in FIG. 5B, it is displaced toward the Z1 direction). )

  If the other side of the actuator is an action point LP (action part), it can be used as various actuators. That is, deformation in the Y direction and deformation in the Z direction occur, and driving in the Z direction and the Y direction (the driving direction KD shown in FIG. 4B) becomes possible at the action point LP. Note that by changing the direction of the electric field applied to the actuator, the direction of action of the actuator can be changed, and by changing the strength of the voltage applied to the actuator, the amount of deformation deformed according to the voltage can also be changed.

  Next, each component of the polymer laminate R3 will be described in detail. First, the electrolyte layer 11 of the polymer laminate R3 is a film body including a gel in which an ionic liquid is mixed with a base polymer (resin material). As shown in FIGS. 3 and 4, a pair of electrode layers is used. 12 (12E, 12F). The electrolyte layer 11 is produced by dissolving a ionic liquid and a resin material (polymer) in a solvent to produce a cast liquid, casting the cast liquid on a mold, and then vacuum drying to evaporate the solvent. . In addition, as a material of the polymer (resin material) of the electrolyte layer 11, for example, polyvinylidene fluoride (PVDGF), polymethyl methacrylate (PMMA), or the like can be used.

  Next, the electrode layer 12 of the polymer laminate R3 includes a polymer (resin material) and an ionic liquid, which are the same base as the electrolyte layer 11, and conductive particles, and the polymer (resin material) and the ionic liquid. It contains gel by mixing conductive particles inside. And as above-mentioned, a pair of electrode layer 12 (12E, 12F) is provided in both surfaces of the thickness direction of the electrolyte layer 11, and clamps the electrolyte layer 11 (refer FIG. 3). When the electrolyte layer 11 and the electrode layer 12 (12E, 12F) configured as described above are used, a large displacement can be obtained at a low voltage. In addition, as the conductive particles of the electrode layer 12, carbon nanotubes, carbon fibers, gold particles, platinum particles, nickel particles, and the like can be used.

  Next, the current collecting layer 13 of the polymer laminate R3 is made of a film in which metal particles such as gold are dispersed in a binder resin. As shown in FIGS. 3 and 4, a pair of electrode layers 12 (12E, 12E, 12F) in the thickness direction (Z direction shown in FIG. 3). Accordingly, a pair of electrodes having high conductivity can be formed by the pair of electrode layers 12 (12E, 12F) and the pair of current collecting layers 13 (13K, 13L), and the conductivity of the electrodes can be increased. it can. And it becomes easy to flow an electric current into this electrode, and the change of the electric potential between a pair of electrode layers 12 (12E, 12F) becomes quick. For this reason, the displacement responsiveness of the polymer laminate R3 can be improved.

  Further, the current collecting layer 13 is a film made of a composite body in which metal particles are dispersed in a binder resin, and thus has sufficient flexibility. For this reason, even if this current collection layer 13 is used by being laminated on the electrode layer 12, it has strong resistance against repeated deformation without inhibiting the deformation of the polymer laminate R3. In the first embodiment of the present invention, the current collecting layer 13 is suitably formed on both sides of the pair of electrode layers 12 (12E, 12F). However, the present invention is not limited to this, and the pair of electrode layers 12 (12E, 12F) may be formed at least on one side.

  Next, the intermediate electrode connector M5 of the multilayer actuator 101 will be described. As shown in FIGS. 3 and 4, the intermediate electrode connector M <b> 5 has a conductive layer 55 (55 </ b> E) having conductivity such as gold, platinum, and copper on both sides of an insulating film 15 such as PEN (Polyethylene Naphthalate). 55F), which will be described later, the conductive layers 55 (55E, 55F) are electrically connected. The conductive layer 55 may be a conductive polymer film that is a mixture of polyethylene dioxythiophene (PEDOT) and polystyrene sulfonic acid (PSS) or a composite film in which metal powder is dispersed in a binder resin.

  The intermediate electrode connector M5 is disposed between the polymer laminate R3A and the polymer laminate R3B, and the electrode layer 12F of the polymer laminate R3A and the conductive layer 55F of the intermediate electrode connector M5 are collected. The electrode layer 12E of the polymer laminate R3B and the conductive layer 55E of the intermediate electrode connector M5 are electrically connected via the current collecting layer 13K while being electrically connected via the current layer 13L. As a result, the electrode layer 12F of the polymer laminate R3A and the electrode layer 12E of the polymer laminate R3B that face each other are electrically connected via the intermediate electrode connector M5. Further, since the conductive layer 55 of the intermediate electrode connector M5 also functions as a current collector for the polymer laminate R3, it is possible to improve the characteristics, particularly responsiveness, of the polymer laminate R3.

  Further, since the intermediate electrode connector M5 is composed of the metal thin film conductive layer 55 or the base material of the insulating film 15, it has a function of not transmitting ions in the ionic liquid contained in the polymer laminate R3. doing. Accordingly, the intermediate electrode connector M5 separates the polymer laminates R3, so that a plurality of polymer laminates R3 can be overlapped. For this reason, the characteristics of the actuator can be improved without increasing the thickness of the single polymer laminate R3.

  Further, since the base material of the intermediate electrode connector M5 is the insulating film 15, it is possible to obtain a structure that does not allow ions to permeate reliably and is flexible and has excellent deformation resistance. And since it is the structure which forms the conductive layer 55 on both surfaces of the film 15, the composition of the conductive layer 55 suitable for the part (current collection layer 13 in 1st Embodiment) which the polymer laminated body R3 contacts can be adjusted ( For example, it is possible to obtain a structure suitable for the polymer laminate R3.

  Next, the gel layer G4 of the multilayer actuator 101 is a layer made of a conductive gel in which carbon particles and silver particles are dispersed in a synthetic resin such as an acrylic resin, a series resin, and a fluorine resin. 4 and FIG. 4, the current collecting layer 13 (13L, 13K) and the intermediate electrode of the polymer laminate R3 (R3A, R3B) are disposed between the polymer laminate R3 and the intermediate electrode connector M5. The conductive layer 55 (55F, 55E) of the connection body M5 is electrically connected. As a result, the electrode layer 12 of the polymer laminate R3 and the intermediate electrode connector M5 are connected via the current collecting layer 13 and the gel layer G4. Thereby, the electrical connection between the electrode layer 12 of the polymer laminate R3 and the intermediate electrode connector M5 can be reliably performed. The synthetic resin used for the gel layer G4 is made of a material having a low elastic modulus.

  Further, the gel layer G4 has more flexible characteristics than the electrode layer 12, and when the polymer laminate R3 repeats deformation, the electrode layer 12 expands and contracts. Deviation from the electrode connector M5 can be absorbed. For this reason, the attenuation of the driving force and deformation displacement of the multilayer actuator 101 can be reduced.

  Next, the description of the configuration of the stacked actuator 101 will be continued, but will be described with reference to FIG. FIG. 6 is a schematic diagram illustrating a circuit configuration of the multilayer actuator 101 according to the first embodiment of the present invention.

  First, as the terminal portion T9 of the multilayer actuator 101, a commonly used double-sided printed wiring board (PWB, Printed Wiring Board) is used. As shown in FIGS. Electrodes at both ends of DT (Z direction shown in FIG. 3), that is, in the first embodiment of the present invention, electrically with each of the electrode layer 12E of the polymer laminate R3A and the electrode layer 12F of the polymer laminate R3B. A pair (terminal portion T9A and terminal portion T9B) is disposed at both ends. The electrical connection between the terminal portion T9 (T9A, T9B) and the electrode layer 12 (12E, 12F) is collected by a wiring pattern (not shown) provided on the one surface 9a side of the terminal portion T9. This is done via layer 13 (13K, 13L).

  Further, in order to maintain a space between the pair of terminal portions T9 (T9A, T9B), a synthetic resin spacer 58 is disposed between the pair of terminal portions T9. Although not shown, electrical components such as a resistor, a capacitor, and an integrated circuit (IC) are also mounted on the one surface 9a side of the terminal portion T9. In addition to a double-sided printed wiring board, a double-sided flexible printed circuit board (FPC, Flexible printed circuits) can also be used.

  The terminal portion T9 is connected to the AC power source ACG shown in FIG. 6 from the external terminal 9t shown in FIGS. Accordingly, the board of the laminated actuator 101 is connected via the wiring pattern provided on the other surface 9z side of the terminal portion T9, the through hole (not shown), and the wiring pattern provided on the first surface 9a side of the terminal portion T9. The total pressure of the AC voltage is applied to the electrodes (the electrode layer 12E and the electrode layer 12F in the first embodiment of the present invention) on both ends in the thickness direction DT (the Z direction shown in FIG. 3).

  Finally, the voltage dividing means D7 of the multilayer actuator 101 uses a Zener diode, and as shown in FIG. 3, the two voltage dividing means D7A and the voltage dividing means D7B have a pair of terminal portions T9 ( T9A, T9B) and disposed between the pair of terminal portions T9 (T9A, T9B).

  Further, the voltage dividing means D7 is electrically connected to the intermediate electrode connector M5 via the conductive conductor 88 shown in FIGS. 3 and 4 and the wiring pattern provided on the one surface 9a side of the terminal portion T9. Has been. As shown in FIG. 6, the voltage dividing means D7 is applied between the pair of electrode layers 12 of each polymer laminate R3 when a voltage is applied to the electrode layers 12 on both sides in the plate thickness direction DT. The voltage is adjusted. As a result, it is possible to prevent the voltage applied to the polymer laminate R3 from becoming non-uniform due to variations in characteristics between the polymer laminates R3. As a result, the polymer laminate R3 can be easily electrically connected in series, and stable performance can be obtained. In addition, although metal foil, a conductive adhesive, etc. can be used as the conductor 88, in 1st Embodiment of this invention, conductive rubber is used suitably.

  In addition, as shown in FIG. 6, the voltage dividing means D7 uses two diode elements whose rectification directions are opposite to each other, so that rectification can be performed in response to an alternating current. The two voltage dividing means D7A and the voltage dividing means D7B are mounted on each of the pair of terminal portions T9 (T9A, T9B). However, if the connection shown in FIG. It may be mounted on T9.

  Moreover, in 1st Embodiment of this invention, as shown in FIG.3 and FIG.4, the voltage dividing means D7 (D7A, D7B) and a part of intermediate electrode connection body M5 are a pair of terminal part T9 (T9A, T9B). ) Are integrated. Thereby, the connection with the outside becomes easy on one end side of the polymer laminate R3, and handling is easy by handling this integrated portion. Moreover, since the voltage dividing means D7, the electric parts, and the like are disposed between the pair of terminal portions T9, handling is easier.

  The effects of the multilayer actuator 101 according to the first embodiment of the present invention configured as described above will be described below.

  Since the laminated actuator 101 according to the first embodiment of the present invention includes the voltage dividing means D7 for adjusting the voltage applied to the pair of electrode layers 12 in each laminated polymer laminate R3, the polymer laminate R3. It is possible to prevent voltage non-uniformity applied to the polymer laminate R3 due to characteristic variation between the two. As a result, the polymer laminate R3 can be easily electrically connected in series, and stable performance can be obtained.

  Further, since the polymer laminates R3 are connected via the intermediate electrode connector M5 that does not transmit ions and has conductivity, the intermediate electrode connector M5 separates the polymer laminates R3, It will also function as a current collector. For this reason, the characteristic of the polymer laminate R3, particularly the responsiveness, can be improved without increasing the laminate thickness of one polymer laminate R3.

  Further, since the base material of the intermediate electrode connector M5 is the insulating film 15, it is possible to obtain a structure that does not allow ions to permeate reliably and is flexible and has excellent deformation resistance. And since it is the structure which forms the conductive layer 55 on both surfaces of the film 15, the composition of the conductive layer 55 suitable for the part (current collection layer 13 in 1st Embodiment) which the polymer laminated body R3 contacts can be adjusted ( For example, it is possible to obtain a structure suitable for the polymer laminate R3.

  In addition, since the electrode layer 12 and the intermediate electrode connector M5 are connected via a conductive gel that is more flexible than the electrode layer 12, the electrical connection between the electrode layer 12 and the intermediate electrode connector M5 is ensured. It can be carried out. In addition, when the polymer laminate R3 repeats deformation, the electrode layer 12 expands and contracts, and the deviation between the polymer laminate R3 and the intermediate electrode connector M5 due to the expansion and contraction can be absorbed. For this reason, the attenuation of the driving force and deformation displacement of the multilayer actuator 101 can be reduced.

  Moreover, since the voltage dividing means D7 and the intermediate electrode connector M5 are integrated between the pair of terminal portions T9, connection to the outside is easy and easy to handle.

  In addition, this invention is not limited to the said embodiment, For example, it can deform | transform and implement as follows, These embodiments also belong to the technical scope of this invention.

<Modification 1>
In the first embodiment, the two polymer laminates R3 (R3A, R3B) are laminated, but the present invention is not limited to this, and a plurality of sets are stacked in the thickness direction DT and electrically connected in series. It is also possible to have a configuration. In that case, needless to say, voltage dividing means D7 is provided between the polymer laminates R3. Further, it is preferable to use the intermediate electrode connector M5 between the polymer laminates R3.

<Modification 2>
In the first embodiment, the intermediate electrode connector M5 has a structure in which the conductive layers 55 (55E, 55F) are formed on both surfaces of the insulating film 15. However, the present invention is not limited to this. It is also possible to use a sheet mainly composed of a metal foil such as Au or Al.

<Modification 3>
With respect to the first embodiment, a configuration may be adopted in which a part of the laminated polymer laminate R3 and the terminal portion T9 is covered with a sealing member to form a sealing structure.

  The present invention is not limited to the above-described embodiment, and can be modified as appropriate without departing from the scope of the object of the present invention.

11 Electrolyte layer 12, 12E, 12F Electrode layer R3, R3A, R3B Polymer laminate G4, G4A, G4B Gel layer M5 Intermediate electrode connector 15 Film 55, 55E, 55F Conductive layer D7, D7A, D7B Voltage dividing means T9, T9A, T9B Terminal part 101 Multilayer actuator DT Thickness direction

Claims (5)

A pair of polymer laminates based on a three-layer structure of an ion-containing electrolyte layer and a pair of electrode layers provided on both sides in the thickness direction of the electrolyte layer, In a laminated actuator in which a plurality of the polymer laminates are electrically connected in series by being stacked in a plurality in the plate thickness direction,
The opposing electrode layers between the polymer laminates are connected via a conductive intermediate electrode connector,
The intermediate electrode connector does not transmit the ions,
A laminate comprising voltage dividing means for adjusting a voltage applied between the pair of electrode layers of each of the polymer laminates when a voltage is applied to the electrode layers on both sides in the plate thickness direction. Type actuator. The electrolyte layer includes a gel in which a polymer and an ionic liquid are mixed,
The electrode layer includes a gel obtained by mixing the polymer, the ionic liquid, and conductive particles,
The multilayer actuator according to claim 1, wherein the intermediate electrode connection body is connected to the voltage dividing means. The intermediate electrode connecting member is a conductive layer is formed on both surfaces of the insulating film, the multilayer actuator according to claim 1 or 2 both surfaces of the conductive layers is characterized by comprising connected. And the electrode layer and the said intermediate electrode connecting body, multilayer actuator according to any one of claims 1 to claim 3, characterized in that it is connected via the electrode layer from the flexible electrically conductive gel . Having a pair of terminal portions connected to each of the electrodes on both sides in the plate thickness direction;
Multilayer actuator according to any one of claims 1 to 4, characterized in that a part of the said voltage divider intermediate electrode connecting member are integrated between the pair of terminal portions.