JP6468808B2 - LAMP DEVICE AND LAMP MANUFACTURING METHOD - Google Patents

Description

  The present invention relates to a lamp device and a method for manufacturing the lamp, and more particularly to a lamp device for heating an object and a method for manufacturing such a lamp.

In various processes for manufacturing semiconductors, displays, etc., heat treatment is an indispensable process. Ohmic contact alloying, ion-implantation damage annealing, impurity activation, thin film formation of TiN, TiSi ₂ , CoSi ₂ , etc. are processes that require heat treatment.

  Examples of equipment for performing such heat treatment include a furnace and a rapid thermal process (RTP) apparatus. The rapid thermal processing system maintains the temperature of the entire substrate uniformly, maintains the same temperature-time characteristics for other substrates every time the substrate (wafer) is replaced, and accurately measures the temperature of the substrate. Although it has not attracted much attention because of its difficulty in controlling, rapid thermal processing equipment has been replaced by furnaces as the temperature measurement technology and temperature control technology have recently advanced.

  The rapid thermal processing apparatus transfers heat to the substrate using the radiation beam of a tungsten halogen lamp. For this reason, the rapid thermal processing apparatus includes a heating block, and a plurality of lamps are provided on a side surface of the heating block facing the substrate.

  FIG. 1 is a view showing a state where a lamp is separated from a socket of a separate filament assembly and removed, and FIG. 2 is a diagram illustrating a case where a separate filament assembly used in a rapid thermal processing apparatus is inserted into a socket attached to a heater housing. FIG.

  The separation type filament assembly includes a socket 10 attached to the heater housing 1 and a lamp 20 detachably provided on the socket 10. The socket 10 is attached to the attachment surface at the upper end of the heater housing 1 and functions as a seal that isolates the inside of the heater housing 1 from the outside of the heater housing 1. The socket 10 functions to fix the lamp 20 to be inserted. Electric power is supplied to the socket 10 via an external power line, and the socket 10 supplies electric power to the power supply pin of the lamp 20 that is fitted inside the socket. The lamp 20 includes a filament protective tube 23 that maintains the internal space in the state of halogen gas, a tungsten filament 22 that generates heat inside the filament protective tube 23, and a conductive wire that protects the conductive wire connecting the power pin and the filament 22. And a protective tube 21.

  However, as described above, the separate filament assembly in which the socket 10 and the lamp 20 are separated has the following problems.

  First, there is a problem that the socket 10 and the lamp 20 are not easily engaged. That is, the phenomenon that the lamp 20 is twisted when the operator inserts the lamp 20 into the socket 10, and the phenomenon that the lamp 20 is gradually removed from the socket 10 with time due to the load of the lamp 20 occurs. There's a problem. When fixing the lamp 20, there is a problem that it is difficult to attach the lamp 20 due to a processing error.

  Secondly, there is a problem that the filament protective tube 23 is easily broken when the lamp 20 is fitted into the socket 10. That is, when the operator removes the lamp 20 from the socket 10, a jig is used to hold the “T” -shaped filament protective tube 23 and pull it downward. In this case, the quartz force is applied by the jig force applied by the operator. There is a problem that the filament protective tube 23 made of a material is damaged. Note that when the lamp 10 is attached to the socket 20, the filament protective tube 23 is gripped, and a force is applied upward to insert it into the socket 10. At this time, the filament protective tube 23 may be damaged by the applied force. .

  Third, there is a problem that the outside of the conductive wire protection tube 21 that protects the conductive wire is carbonized by heat generated from the filament 22. There exists a problem that the outer peripheral surface in the boundary part of the filament protective tube 23 and the conductive wire protective tube 21 is carbonized by heat.

Korea registered patent No.1031226

  The technical problem of the present invention is to eliminate the phenomenon that the lamp is twisted when the lamp is attached to the socket, and the difficulty of the attachment. The technical problem of the present invention is to solve the problem that the filament protective tube is damaged when the lamp is attached to or removed from the socket. Furthermore, the technical problem of the present invention is to improve the phenomenon that the conductive wire protection tube is carbonized by heat.

  In order to solve the above-described technical problem, a lamp device according to an embodiment of the present invention includes a filament assembly having a filament that generates heat, a heat-resistant reinforcing member having one end fitted to the filament assembly, A conductive wire protective tube fitted to the other end of the heat-resistant reinforcing member, a fixing member fitted to the other end of the conductive wire protective tube, and one end electrically connected to the filament assembly. Connected to the heat-resistant reinforcing member, the conductive wire protective tube, and the fixing member, and a conductive wire having the other end protruding from the fixing member.

  Preferably, the filament assembly includes a filament that generates heat when current flowing into the first input end passes through the heating wire and flows out to the second input end, a filament protective tube having the filament therein, and the first A first conductive plate conductively bonded to one input end and connected to a first conductive line; a second conductive plate conductively bonded to the second input end and connected to a second conductive line; and the first conductive plate A plate and a second conductive plate are disposed on the surface, and a conductive plate support having one end attached to the filament protective tube and the other end fitted to the heat-resistant reinforcing member.

  Preferably, the filament protective tube has the same longitudinal direction as the engagement direction of the heat resistant reinforcing member, the conductive wire protective tube and the fixing member.

  Further preferably, the diameter of the filament protective tube is equal to or smaller than the diameter of the heat-resistant reinforcing member.

  Further preferably, the heat resistant reinforcing member is made of a ceramic material, the conductive wire protection tube is made of a metal material, and the inside of the conductive wire protection tube is filled with ceramic.

  Further preferably, the fixing member includes a body column through which the conductive wire passes, and a projecting flange projecting along a circumferential direction from a sidewall of the body column.

  Further preferably, a sealing material fitting groove is formed on the surface of the projecting flange facing the direction in which the filament assembly is disposed.

  Further preferably, the fixing member has an upper fixing member having an upper flange protruding from one end surface along the peripheral edge, and a lower flange protruding from the one end surface along the peripheral edge and in contact with the upper flange. A lower fixing member; and an engaging member that engages the upper flange and the lower flange.

  Further preferably, the upper fixing member protrudes from an upper column body, an upper flange protruding from one end surface of the upper column body along a peripheral edge, and a surface of the upper column body in contact with the lower fixing member. And an engaging protrusion having a conductive terminal pin fitting groove on the protruding surface, and an external power supply connecting line connected to the terminal pin fitting groove and protruding to the outside.

  Further preferably, the lower fixing member includes a lower column, a lower flange protruding from one end face of the lower column along the periphery, and facing the upper flange, and a lower column in contact with the upper fixing member An engaging groove having a stepped surface dug in the surface of the body and having a terminal pin protruding from the stepped surface at a position facing the terminal pin fitting groove.

  Further preferably, in the lamp device according to the embodiment of the present invention, the main body engagement sealing material is formed on the surface of the lower flange facing the direction in which the filament assembly is disposed and the sealing material is disposed. A fitting groove and a flange engaging sealing material fitting groove formed on the surface of the lower flange in contact with the upper flange and provided with a sealing material.

  In order to solve the above technical problem, a lamp manufacturing method according to an embodiment of the present invention includes a process of providing a filament assembly having a filament that generates heat, and a process of connecting a conductive wire to the filament assembly. A process in which the conductive wire penetrates through the inside of the heat-resistant strengthening member, and one end of the heat-resistant strengthening member is fitted to the filament assembly so as not to be separated, and protrudes through the heat-resistant strengthening member. A process in which the conductive wire penetrates the conductive wire protective tube, and one end of the conductive wire protective tube is fitted to the other end of the heat-resistant reinforcing member so as not to be separated, and the conductive wire protection A conductive wire protruding through the tube passes through a fixing member engageable with the heater housing, and the fixing member is connected to the other end of the conductive wire protection tube. And a process of preventing separation by fitting.

  Preferably, before the fixing member is fitted to the other end of the conductive wire protection tube, the inside of the conductive wire protection tube is filled with ceramic.

  According to the embodiment of the present invention, since it is realized as an integrated lamp, it is possible to eliminate inconvenience for an operator who attaches the lamp to the socket. In addition, according to the embodiment of the present invention, since it is not necessary to attach the lamp to the socket or remove the lamp from the socket, the filament protective tube is not damaged, so that the equipment can be protected. For this reason, the lamp can be easily attached to the equipment, so that the productivity can be improved and the service life of the filament can be extended. In addition, according to embodiment of this invention, the phenomenon in which a conductive wire protective tube is carbonized by a heat | fever can be improved by manufacturing the conductive wire protective tube of the area | region adjacent to a filament with a heat-resistant reinforcement | strengthening member.

It is a figure which shows a mode that the lamp | ramp was separated and removed from the socket of the separation type filament assembly. It is a figure which shows a mode that the isolation | separation type filament assembly used for a rapid thermal processing apparatus is inserted in the socket attached to the heater housing. It is sectional drawing of the rapid thermal processing apparatus with which the heating block which concerns on embodiment of this invention was applied. It is a figure which shows a mode that several lamp | ramp was attached to the attachment surface of the heater housing by embodiment of this invention. It is a perspective view of the integrated lamp which concerns on embodiment of this invention. It is sectional drawing of the integrated lamp which concerns on embodiment of this invention. It is sectional drawing which shows that an integrated lamp is inserted from the upper side of a heater housing by embodiment of this invention. FIG. 4 is a cross-sectional view showing an integrated lamp attached to a heater housing according to an embodiment of the present invention. 1 is a perspective view of an integrated lamp in which an upper fixing member and a lower fixing member are engaged according to an embodiment of the present invention. 1 is a perspective view of an integrated lamp in which an upper fixing member and a lower fixing member according to an embodiment of the present invention are separated. It is sectional drawing of the integrated lamp which has the upper fixing member and lower fixing member which concern on embodiment of this invention. It is a figure which shows the process in which an integrated lamp is manufactured by embodiment of this invention. It is a figure which shows the process in which an upper fixing member and a lower fixing member are gradually engaged by embodiment of this invention.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be embodied in various different forms, which merely complete the disclosure of the present invention. It is provided to provide full knowledge of the scope of the invention to those skilled in the art to which the invention pertains. In the drawings, the same reference numerals indicate the same components.

  FIG. 3 is a cross-sectional view of a rapid thermal processing apparatus to which a heating block according to an embodiment of the present invention is applied.

  The process chamber 200 has an internal space that is a heat treatment space for the substrate, and the substrate is placed inside the heat treatment space. The process chamber 200 is manufactured in a sealed rectangular tube shape having an empty interior, but is not limited thereto, and can be manufactured in various tube shapes. That is, the process chamber 200 can be manufactured in a cylindrical shape and a polygonal cylindrical shape. Each of the one surface and the other surface of the process chamber is provided with an entrance for entering and exiting the substrate S, and any one of the entrances is connected to a transfer module (not shown).

  The process chamber 200 includes a substrate support base 400 that supports the substrate S inside. Here, the substrate support base 400 includes an edge ring on which a plurality of lift pins 410 that move in the vertical direction are disposed and on which the substrate S is placed when a process is performed. The edge ring (not shown) is a mounting means for mounting the substrate at a position facing the heating block 100 and facing the heating block 100 inside the heat treatment space. The substrate support 400 is connected to a means for providing a lifting force, for example, a cylinder (not shown). In this embodiment, as described above, the lifting and lowering of the substrate S using the lift pins 410 has been described. However, the present invention is not limited to this. For example, a means using electrostatic force (electrostatic chuck) or vacuum attracting force can be used.

  The quartz window 300 is disposed between the heating block 100 and the process chamber 200. The quartz window 300 is made of a material that transmits heat to the substrate S disposed below. The quartz window 300 maintains hermeticity between the heating block 100 and the process chamber 200, but the heating block 100 is evacuated by blocking between the heating block 100 and the process chamber 200 using the sealing means 301. Protect the process chamber from the external environment (pressure, gas, contaminants). In addition, the quartz window 300 protects the lamp 600 and prevents a byproduct generated by heat generated from the lamp 600 from falling on the substrate S disposed in the heat treatment space inside the process chamber 200.

  The heating block 100 includes a heater housing 500 that includes an integrated lamp that generates thermal energy. A lamp mounting surface 510, which is the bottom surface of the heater housing 500, faces a heat treatment target such as the substrate S and includes a plurality of integrated lamps 600. As shown in FIG. 4, the integrated lamp 600 is arranged on the lamp mounting surface 510, provided at a position facing the substrate S, and irradiates light on the rotated or fixed substrate. The lamp mounting surface 510 may be formed in a circular shape as shown in FIG. 4 (a), or may be formed in a polygonal shape as shown in FIG. 4 (b). May be presented.

  The integrated lamp 600 according to the embodiment of the present invention has a structure different from the structure in which the existing lamp and the socket are separated, and has an integrated lamp structure without separately providing a socket. Hereinafter, the structure of the integrated lamp will be described in detail.

  FIG. 5 is a perspective view of an integrated lamp according to an embodiment of the present invention, FIG. 6 is a cross-sectional view of the integrated lamp according to an embodiment of the present invention, and FIG. 7 is according to the embodiment of the present invention. FIG. 8 is a cross-sectional view showing that the integrated lamp is fitted from the upper side of the heater housing, and FIG. 8 is a cross-sectional view showing that the integrated lamp is attached to the heater housing according to the embodiment of the present invention.

  The integrated lamp 600 includes a filament assembly 640, a heat resistant reinforcing member 630, a conductive wire protection tube 620, a fixing member 610, and a conductive wire 650.

  The filament assembly 640 is a heating body having a filament 644 that generates heat. The filament 644 generates heat, a filament protection tube 645 that protects the filament 644, a conductive plate 641 that supplies power to the filament 644, and a conductive plate 641. And a conductive plate support 642 for supporting. In addition to these, a filament support 643 may be provided.

  The filament 644 includes a first input end 644a, a second input end 644b, and a heating wire 644c, and the current that has flowed into the first input end 644a passes through the heating wire 644c that is the body, and the second input end. It flows out to 644b and generates heat. The material of the filament 644 is required to have a high melting point and to have an appropriate electric resistance value because it needs to continue to emit light even at a high temperature. For this reason, tungsten, nickel, or the like can be used as the material of the filament 644. In the case of the tungsten filament 644, the melting point of tungsten is about 3390 ° C., which is much higher than the temperature at which the filament 644 is generated (about 2000 ° C.).

  The filament support 643 is a support for supporting the heating wire 644c of the filament 644, and is made of a nonconductor such as quartz.

  The filament protection tube 645 protects the filament 644 by storing the filament 644 in the internal space. The filament protective tube 645 is formed of a material such as transparent quartz. The filament protection tube 645 has a heat resistant strengthening member 630 and a circumferential tube having the same longitudinal direction as the engagement direction of the conductive wire protection tube 620 and the fixing member 610. One end of the filament protective tube 645 is closed, and the other end is fitted with a heat-resistant reinforcing member 630 and has an internally sealed internal space. Such an internal space is filled with a halogen gas to increase heat generation efficiency. Get higher. The diameter of the filament protective tube 645 is equal to or smaller than the diameter of the heat resistant reinforcing member 630. This is because when the integrated lamp is attached to the heater housing 500 or the lamp is removed from the heater housing 500, it can pass through the attachment / detachment opening formed in the heater housing 500. Here, the diameter of the heat-resistant reinforcing member 630 is equal to the diameter of the attachment / detachment port.

  The first conductive plate 641a is electrically bonded to the first input end 644a of the filament 644 and coupled to the first conductive line 650a. The second conductive plate 641b is also conductively bonded to the second input end 644b of the filament 644 and connected to the second conductive line 650b. For this reason, the current flowing from the external power source through the first conductive line 650a is input to the first input end 644a through the first conductive plate 641a, and the second conductive plate 641b and the second conductive plate 641b through the heating line of the filament 644. It flows out to the external power supply via the two conductive lines 650b. For reference, the first conductive plate 641a and the second conductive plate 641b are made of a metal plate of molybdenum (Mo) having excellent conductivity.

  The conductive plate support 642 has a first conductive plate 641a and a second conductive plate 641b arranged on the surface, one end is attached to the filament protective tube 645, and the other end is fitted with the heat resistant reinforcing member 630. Worn. One end of the filament protection tube 645 is melted so as not to be separated from the filament protection tube 645 and fitted to one end of the conductive plate support 642. Further, the other end of the conductive plate support 642 is fitted into the heat-resistant strengthening member 630 so as not to be separated from the heat-resistant strengthening member 630, and ceramic bonding is performed. For reference, the conductive plate support 642 is formed of a nonconductor such as quartz.

On the other hand, one end of the heat-resistant reinforcing member 630 is fitted to the conductive plate support 642 of the filament assembly 640 and the other end is fitted to the conductive wire protection tube 620 to conduct with the conductive plate 641 of the filament assembly 640. It is disposed between the wire protection tube 620 and the wire protection tube 620. The heat-resistant strengthening member 630 is formed of a heat-resistant material such as ceramic (A1 ₂ O ₃ ). For this reason, the phenomenon in which a member is carbonized by the heat generated by the adjacent filament 644 is prevented. Conventionally, the structure is such that the conductive wire protection tube 620 is directly connected to the filament assembly 640 without the heat-resistant reinforcing member 630. Therefore, the connecting portion between the filament assembly 640 and the conductive wire protection tube 620 is caused by the heat of the filament 644. There is a problem of being carbonized. However, according to the embodiment of the present invention, the heat strengthening member 630 is disposed between the filament assembly 640 and the conductive wire protection tube 620, and the carbonization phenomenon occurs at the joined portion of the filament assembly 640 even by the heat of the filament 644. Can be prevented.

  The conductive wire protective tube 620 is fitted to the other end of the heat resistant reinforcing member 630. The conductive wire protection tube 620 is a housing that protects the first and second conductive wires 650a and 650b (650) connected to the first and second conductive plates 641 of the filament assembly 640, respectively. One end of the conductive wire protection tube 620 is fitted to the heat-resistant reinforcing member 630, and the other end is attached to a fixing member 610 that can be detached from the heater housing 500. The surface of the conductive wire protection tube 620 is formed of a metal material, and the inside of the conductive wire protection tube 620 is filled with ceramic. For this reason, the 1st conductive wire 650a and the 2nd conductive wire 650b arrange | positioned inside the conductive wire protection tube 620 can be fixed with the ceramic inside the conductive wire protection tube 620.

  One end of the conductive wire 650 is electrically connected to the filament assembly 640 and gradually penetrates the heat-resistant reinforcing member 630, the conductive wire protection tube 620 and the fixing member 610, and the other end is the fixing member 610. Protruding from. Such a conductive wire 650 is a thin conductive wiring like a coated metal wire. The conductive line 650 includes a first conductive line 650a and a second conductive line 650b. The first conductive line 650a is a metal wire connected to the first conductive plate 641a, and the second conductive line 650b is a metal wire connected to the second conductive plate 641b.

  The fixing member 610 is fitted to the other end of the conductive wire protection tube 620 and has a flange surface that can be attached to and detached from equipment equipment such as the heater housing 500. That is, the conductive wire protection tube 620, the heat-resistant reinforcing member 630, the filament assembly 640, and the fixing member 610 are gradually attached to form an integrated lamp in which these components are not separated. In the case of the existing lamp device, a socket serving as the fixing member 610 is provided and has a structure in which the lamp is inserted into the socket or pulled out of the socket. In this structure, since the conductive wire protection tube 620, the heat-resistant reinforcing member 630, the filament assembly 640 and the fixing member 610 are not separated, there is a problem of attaching a conventional lamp by mistake or attaching the lamp to the socket. When the lamp is removed from the socket, the problem of the filament protective tube 645 breaking can be solved.

  The fixing member 610 includes a body column through which the conductive wire 650 passes, and a projecting flange 613 projecting from the sidewall of the body column along the circumferential direction. The protruding flange 613 plays a role of attaching / detaching the fixing member 610 to / from the heater housing 500. In order to attach the integral lamp having the conductive wire protective tube 620, the heat resistant reinforcing member 630, the filament assembly 640, and the fixing member 610 to the heater housing 500, as shown in FIG. When the fitting is gradually inserted from the assembly 640 and the fitting is finished, the projecting flange 613 of the fixing member 610 and the heater housing 500 are engaged with each other using a bolt 612 or the like, as shown in FIG.

  In short, since the fixing member 610 is a member that can be attached to and detached from the heater housing 500 using bolts 612 or the like, the filament assembly 640 and the heat-resistant reinforcing member can be obtained simply by attaching only the fixing member 610 to the heater housing 500. 630, and the integrated lamp having the conductive wire protection tube 620 and the fixing member 610 can be assembled to the heater housing 500. Conversely, the integral lamp having the filament assembly 640, the heat-resistant reinforcing member 630, the conductive wire protection tube 620 and the fixing member 610 can be removed from the heater housing 500 simply by removing the fixing member 610 from the heater housing 500. Become.

  On the other hand, a sealing material fitting groove 611 is formed on the surface of the protruding flange 613 facing the direction in which the filament assembly 640 is disposed. In order to improve the sealing force in the heater housing 500 when the fixing member 610 is engaged with the heater housing 500, a sealing material fitting groove 611 in which a sealing material such as an O-ring is fitted in the bottom surface of the protruding flange 613. Is formed. Note that the fixing member 610 is formed of a material such as ceramic, metal, or synthetic resin.

  Meanwhile, as described above, the fixing member 610 may be realized as a single body, but according to another embodiment of the present invention, the upper fixing member 6100 and the lower fixing member 6200 are binary. It may be realized as an integrated fixing member 610. When the life of the filament assembly 640 is exhausted or fails, the fixing member 610 is dualized into the upper fixing member 6100 and the lower fixing member 6200 in order to reduce the cost by replacing only the portion with the filament assembly 640.

  FIG. 9 is a perspective view of an integrated lamp in which an upper fixing member and a lower fixing member according to an embodiment of the present invention are engaged, and FIG. 10 is an upper fixing member and a lower fixing member according to an embodiment of the present invention. FIG. 11 is a cross-sectional view of an integrated lamp having an upper fixing member and a lower fixing member according to an embodiment of the present invention.

  The fixing member 610 having a dual structure has an upper fixing member 6100 having an upper flange 6102 protruding from one end surface along the peripheral edge, and is protruded along the peripheral edge from one end surface to contact the upper flange 6102. A lower fixing member 6200 having a lower flange 6202 and an engaging member 6300 for engaging the upper flange 6102 and the lower flange 6202 are provided. By engaging the upper fixing member 6100 and the lower fixing member 6200 with an engaging member 6300 such as a bolt, the engagement / disengagement is easily performed.

  The upper fixing member 6100 protrudes from the surface of the upper column 6101, the upper flange 6102 protruding along the periphery from one end surface of the upper column 6101, and the surface of the upper column 6101 in contact with the lower fixing member 6200. An engaging protrusion 6103 having a conductive terminal pin fitting groove 6104 on the surface, and an external power supply connecting line 6105 connected to the terminal pin fitting groove 6104 and protruding to the outside. A terminal pin fitting groove 6104 is formed on the inside of the engagement protrusion 6103, and the surface of the terminal pin fitting groove 6104 is a conductive film. For this reason, since the external power supply connection line 6105 is electrically connected to the conductive film of the terminal pin fitting groove 6104, external power can be transmitted to the conductive film of the terminal pin fitting groove 6104.

  The lower fixing member 6200 includes a lower column body 201, a lower flange 6202 that protrudes from one end surface of the lower column body 6201 along the periphery and faces the upper flange 6102, and a lower column body 6201 that contacts the upper fixing member 6100. An engaging groove 6204 having a stepped surface dug in the surface and having a terminal pin 6203 projecting from the stepped surface at a position facing the terminal pin fitting groove 6104. Such terminal pins 6203 are realized as first and second terminal pins, and are connected to the first conductive line 650a and the second conductive line 650b, respectively.

  When the upper flange 6102 and the lower flange 6202 are engaged, the terminal pin 6203 formed on the lower flange 6202 is fitted into and contacted with the terminal pin fitting groove 6104 of the upper flange 6102 to have conductivity. Therefore, external power can be supplied to the filament 644 through the terminal pin fitting groove 6104, the terminal pin 6203, and the conductive wire 650.

  On the other hand, although not shown, the lower fixing member 6200 is formed with an engaging groove (not shown) into which a bolt to be engaged with the heater housing 500 is inserted, and the lower fixing member 6200 is engaged with the heater housing 500. Can be removed.

  On the other hand, a main body engagement sealing material fitting groove 6400 formed on the surface of the lower flange 6202 facing the direction in which the filament assembly 640 is disposed and a sealing material is disposed, and a lower flange 6202 in contact with the upper flange 6102. A flange-engaging sealing material fitting groove 6401 formed on the surface and provided with the sealing material may be provided. The main body engagement sealing material fitting groove 6400 is formed to improve the sealing performance by a sealing material such as an O-ring when the lower fixing member 6200 is assembled to the heater housing 500. The groove 6401 is formed to improve the sealing performance by a sealing material such as an O-ring when the upper flange 6102 and the lower flange 6202 are brought into contact with each other and engaged with each other.

  FIG. 12 is a diagram illustrating a process of manufacturing an integrated lamp according to an embodiment of the present invention.

  In the following description, one end refers to the longitudinal tip of the member, and the other end refers to the tip disposed on the opposite side of the one end in the longitudinal direction.

  First, a process of providing a filament assembly is included. As shown in FIG. 12A, the manufacturing process of such a filament assembly includes a tungsten material that generates heat when current is input to the first input end 644a and flows through the second input end 644b through the heating wire 644c. The conductive plate support 642 to which the first conductive plate 641a and the second conductive plate 641b made of molybdenum are attached is provided. For reference, the first input end 644a and the second input end 644b are supported by a filament support 643 made of quartz material.

  As shown in FIG. 12B, the first input end 644a and the second input end 644b of the filament 644 are bonded so as to be electrically conductive to the first conductive plate 641a and the second conductive plate 641b, respectively. Next, as shown in FIG. 12C, after the filament 644 inside the filament protective tube 645 made of quartz material is disposed, one end of the filament protective tube 645 is melted and attached to the conductive plate support 642. Seal. Next, the inner space of the filament protection tube 645 is evacuated using the injection tube formed in the filament protection tube 645, and then a halogen gas is introduced into the inner space of the filament protection tube 645 via the injection tube. After the interior space of the tube 645 is made a halogen atmosphere, the injection tube is sealed.

  Then, as shown in FIG. 12D, the first conductive line 650a and the second conductive line 650b having conductivity are bonded and connected to the first conductive plate 641a and the second conductive plate 641b, respectively. For reference, the first and second conductive lines 650 a and 650 b have a predetermined length, and the tip finally protrudes through the fixing member 610.

Next, as shown in FIG. 12 (e), one end of the heat-resistant reinforcing member 630 is attached to the conductive plate support 642 of the filament assembly 640, and the heat-resistant reinforcing member 630 and the conductive plate support 642 of the filament assembly 640 are attached. Engage so that they are not separated from each other. At this time, the first conductive line 650 a and the second conductive line 650 b are disposed through the heat resistant reinforcing member 630. Such attachment is performed by solidifying the tip of the conductive plate support 642 of the filament assembly 640 with the heat-resistant reinforcing member 630. As a material of such a heat-resistant reinforcing member 630, heat-resistant ceramic (Al ₂ O ₃ ) is employed.

  After forming the heat-resistant reinforcing member 630, as shown in FIG. 12 (f), the other end of the heat-resistant reinforcing member 630 and one end of the conductive wire protection tube 620 are engaged with each other so as not to be separated from each other. The heat strengthening member 630 and the conductive wire protection tube 620 are engaged by ceramic bonding. The conductive wire protection tube 620 is a hollow column made of metal, and the inside of the conductive wire protection tube 620 is filled with ceramic. At this time, the first conductive line 650a and the second conductive line 650b protruding from the heat resistant reinforcing member 630 penetrate the ceramic filled in the conductive line protection tube 620 and protrude from the conductive line protection tube 620. Arranged.

  After forming the conductive wire protection tube 620, as shown in FIG. 12G, the fixing member 610 and the other end of the conductive wire protection tube 620 are engaged with each other so as not to be separated from each other. At this time, the first conductive line 650a and the second conductive line 650b protrude through the inside of the fixing member 610 and are connected to an external power supply unit. The filament assembly 640, the heat-resistant reinforcing member 630, the conductive wire protection tube 620, and the fixing member 610 are gradually attached along the longitudinal direction of the integrated lamp to be manufactured as an integrated type. Since the fixing member 610 is a member that can be attached to and detached from the heater housing 500 with a bolt or the like, the filament assembly 640, the heat-resistant reinforcing member 630, and the conductive wire protection tube can be obtained by attaching only the fixing member 610 to the heater housing 500. An integrated lamp having 620 and a fixing member 610 can be attached to the heater housing 500. Conversely, the integral lamp having the filament assembly 640, the heat-resistant reinforcing member 630, the conductive wire protection tube 620 and the fixing member 610 can be removed from the heater housing 500 simply by removing the fixing member 610 from the heater housing 500. Become.

  For reference, a sealing material 611a such as an O-ring is disposed on the bottom surface of the flange of the fixing member, so that the sealing performance can be improved when engaged with the heater housing 500.

  On the other hand, in the case of the separation type, the process described above is the same, except that the upper fixing member 6100 and the lower fixing member 6200 are gradually attached as shown in FIG. For reference, a main body engaging sealing material fitting groove 6400 formed on the surface of the lower flange 6202 facing the direction in which the filament assembly 640 is disposed and a sealing material is disposed, and a lower portion in contact with the upper flange 6102 A flange engaging sealing material fitting groove 6401 formed on the surface of the flange 6202 and provided with a sealing material may be provided. The main body engaging sealing material fitting groove 6400 is formed to improve the sealing performance by a sealing material such as an O-ring when the lower fixing member 6200 is attached to the heater housing 500. The groove 6401 is formed to improve the sealing performance by a sealing material such as an O-ring when the upper flange 6102 and the lower flange 6202 are brought into contact with each other and engaged with each other.

  As mentioned above, although preferred embodiment of this invention was described based on the accompanying drawing, this invention is not limited to this at all, and is limited by the claim which is mentioned later. Therefore, a person having ordinary knowledge in this technical field can variously modify and modify the present invention without departing from the technical idea of the claims to be described later.

600: Integrated lamp 610: Fixing member 620: Conductive wire protective tube 630: Heat-resistant reinforcing member 640: Filament assembly

Claims (13)

A filament assembly having a filament that generates heat;
A heat-resistant reinforcing member having one end fitted to the filament assembly;
A conductive wire protective tube having one end fitted to the other end of the heat-resistant reinforcing member;
A fixing member fitted to the other end of the conductive wire protective tube;
A conductive wire having one end electrically connected to the filament assembly and gradually passing through the heat-resistant reinforcing member, the conductive wire protective tube and the fixing member, and the other end protruding from the fixing member; ,
Equipped with a,
The fixing member is
A fuselage column through which the conductive wire penetrates;
A projecting flange projecting along the circumferential direction from the sidewall of the body pillar;
With
A lamp device in which a sealing material fitting groove is formed on a surface of a protruding flange facing a direction in which the filament assembly is disposed . The filament assembly is
A filament in which the current flowing into the first input end passes through the heating wire and flows out to the second input end to generate heat;
A filament protective tube having the filament therein;
A first conductive plate conductively bonded to the first input end and connected to a first conductive line;
A second conductive plate conductively bonded to the second input end and connected to a second conductive line;
A conductive plate support in which the first conductive plate and the second conductive plate are disposed on a surface, one end is attached to the filament protective tube, and the other end is fitted to the heat-resistant reinforcing member; ,
The lamp device according to claim 1, comprising:   The lamp device according to claim 2, wherein the filament protective tube has the same longitudinal direction as the engagement direction of the heat resistant reinforcing member, the conductive wire protective tube and the fixing member.   The lamp device according to claim 3, wherein a diameter of the filament protective tube is equal to or smaller than a diameter of the heat-resistant reinforcing member.   The lamp device according to claim 1, wherein the heat-resistant reinforcing member is formed of a ceramic material.   The lamp device according to claim 1, wherein the conductive wire protection tube is formed of a metal material.   The lamp device according to claim 1, wherein the inside of the conductive wire protective tube is filled with ceramic. The fixing member is
An upper fixing member having an upper flange projecting along the periphery from one end surface;
A lower fixing member having a lower flange protruding from one end face along the periphery and contacting the upper flange;
An engaging member for engaging the upper flange and the lower flange;
The lamp device according to claim 1, comprising: The upper fixing member is
The upper column,
An upper flange projecting along a peripheral edge from one end face of the upper pillar,
An engaging protrusion that protrudes from the surface of the upper column that contacts the lower fixing member and has a conductive terminal pin fitting groove on the protruding surface;
An external power supply connecting line connected to the terminal pin fitting groove and protruding to the outside;
The lamp device according to claim 8 , comprising: The lower fixing member is
The lower column,
A lower flange that protrudes from one end surface of the lower column body along the periphery and faces the upper flange;
An engaging groove having a stepped surface dug in the surface of the lower column body in contact with the upper fixing member, and a terminal pin projecting from the stepped surface at a position facing the terminal pin fitting groove;
The lamp device according to claim 9 . A body engaging sealing material fitting groove formed on the surface of the lower flange facing the direction in which the filament assembly is disposed, and a sealing material is disposed;
A flange engagement sealing material fitting groove formed on the surface of the lower flange in contact with the upper flange and provided with a sealing material;
The lamp device according to claim 10 . Providing a filament assembly having a filament that generates heat;
Connecting a conductive wire to the filament assembly;
A process of allowing the conductive wire to pass through the inside of the heat-resistant reinforcing member and fitting one end of the heat-resistant reinforcing member to the filament assembly so as not to be separated;
The conductive wire protruding through the heat-resistant reinforcing member passes through the conductive wire protection tube, and one end of the conductive wire protective tube is fitted with the other end of the heat-resistant reinforcing member so as not to be separated. The process of making
The conductive wire protruding through the conductive wire protection tube passes through a fixing member that can be engaged with the heater housing, and the fixing member is fitted to the other end of the conductive wire protection tube and separated. The process of not being done,
A method of manufacturing a lamp including: The method of manufacturing a lamp according to claim 12 , wherein the inside of the conductive wire protective tube is filled with ceramic before the fixing member is fitted to the other end of the conductive wire protective tube.

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