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JP6472168B2 - Contact combustion type gas sensor - Google Patents
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JP6472168B2 - Contact combustion type gas sensor - Google Patents

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JP6472168B2
JP6472168B2 JP2014062679A JP2014062679A JP6472168B2 JP 6472168 B2 JP6472168 B2 JP 6472168B2 JP 2014062679 A JP2014062679 A JP 2014062679A JP 2014062679 A JP2014062679 A JP 2014062679A JP 6472168 B2 JP6472168 B2 JP 6472168B2
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洋 宮崎
洋 宮崎
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New Cosmos Electric Co Ltd
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Description

本発明は、被検知ガスと感応する検出素子を備えた接触燃焼式ガスセンサに関する。   The present invention relates to a catalytic combustion type gas sensor including a detection element that is sensitive to a gas to be detected.

接触燃焼式ガス検知素子は、アルミナ等の金属酸化物焼結体に白金等の貴金属触媒を担持したガス感応部としての燃焼触媒部を、白金等の貴金属線に設けてある。当該燃焼触媒部において検知対象となる被検知ガスを貴金属触媒と接触・燃焼させ、燃焼の際に生じる温度変化を貴金属線の抵抗値の変化として検出する。被検知ガスの燃焼熱は被検知ガスの濃度に比例し、貴金属線の抵抗値は燃焼熱に比例するため、被検知ガスの燃焼による貴金属線の抵抗の変化値を測定することによって被検知ガスの濃度を測定することができる。   In the catalytic combustion type gas detection element, a combustion catalyst portion as a gas sensitive portion in which a noble metal catalyst such as platinum is supported on a sintered metal oxide such as alumina is provided on a noble metal wire such as platinum. The detected gas to be detected in the combustion catalyst unit is brought into contact with the noble metal catalyst and burned, and a temperature change that occurs during combustion is detected as a change in the resistance value of the noble metal wire. Since the combustion heat of the gas to be detected is proportional to the concentration of the gas to be detected and the resistance value of the noble metal wire is proportional to the heat of combustion, the gas to be detected is measured by measuring the change in resistance of the noble metal wire due to the combustion of the gas to be detected. Concentration can be measured.

尚、本発明における従来技術となる接触燃焼式ガス検知素子は、一般的な技術であるため、特許文献等の従来技術文献は示さない。   In addition, since the contact combustion type | formula gas detection element used as the prior art in this invention is a general technique, prior art documents, such as a patent document, are not shown.

従来の接触燃焼式ガス検知素子では、上述の通り、ガス感応部において被検知ガスの燃焼に伴う温度変化(貴金属線の抵抗値の変化)を検出するものであるため、貴金属触媒の活性は低下し易く、これによってガス感応部は劣化し易くなっていた。   As described above, the conventional catalytic combustion type gas detection element detects a temperature change (change in the resistance value of the noble metal wire) in the gas sensitive part due to the combustion of the gas to be detected, so that the activity of the noble metal catalyst is reduced. This makes it easy to deteriorate the gas sensitive part.

従って、本発明の目的は、ガス感応部の耐久性を向上させた接触燃焼式ガス検知素子を提供することにある。   Accordingly, an object of the present invention is to provide a catalytic combustion type gas detection element in which the durability of the gas sensitive part is improved.

上記目的を達成するための本発明に係る接触燃焼式ガスセンサは、被検知ガスと感応する検出素子を備えた接触燃焼式ガスセンサであって、その第一特徴構成は、前記検出素子は、貴金属線材を覆い、被検知ガスと接触するガス感応部を有し、前記ガス感応部は、被検知ガスに対して活性を有する貴金属の第一触媒を担持する第一触媒担体を備えた外層と、被検知ガスに対して前記第一触媒より高い活性を有する貴金属の第二触媒を担持する第二触媒担体を備えた内層と、の二層構造で構成した点にある。 In order to achieve the above object, a catalytic combustion type gas sensor according to the present invention is a catalytic combustion type gas sensor having a detection element that is sensitive to a gas to be detected. The first characteristic configuration of the catalytic combustion type gas sensor is that the detection element is a noble metal wire. A gas-sensitive portion that contacts the gas to be detected, the gas-sensitive portion including an outer layer including a first catalyst carrier that supports a first catalyst of a noble metal having an activity with respect to the gas to be detected; It is in the point comprised by the two-layer structure of the inner layer provided with the 2nd catalyst support | carrier which carry | supports the 2nd catalyst of the noble metal which has higher activity than said 1st catalyst with respect to detection gas.

本構成では、ガス感応部を外層と内層との二層構造で構成している。本構成によれば、接触燃焼式ガスセンサを起動して暫くの間(例えば外層の第一触媒が劣化するまでの時間)は、被検知ガスはガス感応部の表面付近を構成する外層を拡散する。即ち、外層において第一触媒が加熱されて被検知ガスと燃焼反応する。第一触媒は(第二触媒よりも)活性が低いため、被検知ガスの燃焼反応はそれほど鋭敏には行われない。一方、雰囲気中に存在する有機シリコーンガスや硫黄等の干渉ガスは、通常、第一触媒において被検知ガスよりも燃焼反応し易いと考えられる。そのため、当該干渉ガスは、外層においてその大部分が燃焼して除去される。 In this configuration, the gas sensitive part has a two-layer structure of an outer layer and an inner layer. According to this configuration, for a while after starting the catalytic combustion type gas sensor (for example, the time until the first catalyst of the outer layer deteriorates), the gas to be detected diffuses in the outer layer constituting the vicinity of the surface of the gas sensitive portion. . In other words, the first catalyst is heated in the outer layer and undergoes a combustion reaction with the gas to be detected. Since the first catalyst has a lower activity (than the second catalyst), the combustion reaction of the detected gas is not so sensitive. On the other hand, it is considered that an interference gas such as organic silicone gas and sulfur existing in the atmosphere is usually more likely to undergo a combustion reaction in the first catalyst than the detected gas. Therefore, most of the interference gas is removed by burning in the outer layer.

接触燃焼式ガスセンサを起動してある程度の時間(例えば外層の第一触媒が劣化する程度の時間)が経過すれば、被検知ガスは外層を通過して内層に到達する。内層に到達する被検知ガスは、外層で反応しなかった被検知ガスである。内層においては、第二触媒が加熱されて被検知ガスと燃焼反応する。第二触媒は第一触媒よりも活性が高いため、高感度で被検知ガスと燃焼反応する。また、干渉ガスは外層において大部分が燃焼するため、内層に到達し難くなり、第二触媒は干渉ガスの影響を受け難い。   When a certain amount of time has elapsed after starting the catalytic combustion type gas sensor (for example, a time to the extent that the first catalyst in the outer layer deteriorates), the detected gas passes through the outer layer and reaches the inner layer. The detected gas that reaches the inner layer is the detected gas that has not reacted in the outer layer. In the inner layer, the second catalyst is heated and undergoes a combustion reaction with the gas to be detected. Since the second catalyst has higher activity than the first catalyst, it reacts with the detected gas with high sensitivity. Further, since most of the interference gas burns in the outer layer, it is difficult to reach the inner layer, and the second catalyst is hardly affected by the interference gas.

従って、接触燃焼式ガスセンサを起動した初期においては、被検知ガスの燃焼反応を外層にて行わせることができるとともに、干渉ガスを除去することができる。その後、内層においては、概ね被検知ガスの燃焼反応のみを行わせることができる。そのため、内層の第二触媒の劣化を抑制することができるため、ガス感応部の耐久性を向上させることができる。   Therefore, at the initial stage when the catalytic combustion type gas sensor is activated, the combustion reaction of the gas to be detected can be performed in the outer layer, and the interference gas can be removed. Thereafter, only the combustion reaction of the detected gas can be performed in the inner layer. Therefore, since the deterioration of the second catalyst in the inner layer can be suppressed, the durability of the gas sensitive part can be improved.

また、経時的には、ガス感応部の表面に形成された外層の第一触媒から劣化していくが、第一触媒が劣化したとしても、外層の粒子構造は維持される。よって、外層は干渉ガスに対してフィルタ層としての役割を果たすことができるため、長期的なスパンを考慮した場合であっても、内層における第二触媒は干渉ガスの影響を受け難くなり、第二触媒の劣化を長期に亘って抑制することができるため、ガス感応部の耐久性をより向上させることができる。   In addition, with the passage of time, the outer layer first catalyst formed on the surface of the gas sensitive portion deteriorates, but even if the first catalyst deteriorates, the particle structure of the outer layer is maintained. Therefore, since the outer layer can serve as a filter layer for the interference gas, the second catalyst in the inner layer is hardly affected by the interference gas even when considering a long span. Since the deterioration of the two catalysts can be suppressed over a long period of time, the durability of the gas sensitive part can be further improved.

また、外層の第一触媒が劣化したとしても、内層においては活性の高い第二触媒を備えるため、被検知ガスの燃焼反応を効率よく行わせることができる。   Even if the first catalyst of the outer layer deteriorates, the inner layer includes the second catalyst having high activity, so that the combustion reaction of the detected gas can be performed efficiently.

従って、本発明の接触燃焼式ガスセンサは、検出素子が外層および内層を形成したガス感応部を有することで、干渉ガスの影響を少なくした状態で、被検知ガスに対して安定した感度を有するものとなる。   Accordingly, the catalytic combustion type gas sensor of the present invention has a gas sensor that has an outer layer and an inner layer as the detection element, and has a stable sensitivity to the gas to be detected in a state where the influence of the interference gas is reduced. It becomes.

本発明に係る接触燃焼式ガスセンサの第二特徴構成は、前記外層の平均粒子径を20〜100nmとし、前記内層の平均粒子径を200〜1000nmとした点にある。   The second characteristic configuration of the catalytic combustion type gas sensor according to the present invention is that the average particle size of the outer layer is 20 to 100 nm and the average particle size of the inner layer is 200 to 1000 nm.

本構成によれば、外層は粒径の細かい緻密な層とし、内層は粒径が大きい材料で形成されたポーラス構造の層となっているため、外層および内層においてガスが拡散するスピードを異ならせるように制御することができる。そのため、例えば干渉ガスは外層を緩やかに拡散し、外層においてその大部分を確実に燃焼させることができるため、当該干渉ガスを確実に除去することができる。また、被検知ガスが内層を拡散するスピードは比較的速いため、内層において効率よく被検知ガスと燃焼反応させることができる。   According to this configuration, the outer layer is a fine layer having a fine particle size, and the inner layer is a porous structure layer formed of a material having a large particle size, so that the gas diffusing speed is different between the outer layer and the inner layer. Can be controlled. Therefore, for example, the interference gas diffuses gently in the outer layer, and most of the interference gas can be reliably burned in the outer layer, so that the interference gas can be reliably removed. In addition, since the detection gas diffuses in the inner layer at a relatively high speed, the inner layer can be efficiently subjected to a combustion reaction with the detection gas.

ガス検知素子を示す概略図である。It is the schematic which shows a gas detection element. ブリッジ回路の概略図である。It is the schematic of a bridge circuit. ガス感応部の要部概略図である。It is a principal part schematic of a gas sensitive part. ガス感応部の要部概略図である。It is a principal part schematic of a gas sensitive part. メタンガスに対するガス感度特性を調べた結果を示したグラフである。It is the graph which showed the result of having investigated the gas sensitivity characteristic with respect to methane gas. 検出素子の劣化率を算出した結果を示したグラフである。It is the graph which showed the result of having calculated the degradation rate of the detection element.

以下、本発明の実施形態を図面に基づいて説明する。
図1,2に示すように、本発明の接触燃焼式ガスセンサXは、被検知ガス(水素ガスやメタンなどの可燃性ガス)と感応する検出素子10と、環境の変化等、被検知ガスの燃焼以外の温度変化に基づく検出素子10の抵抗値の変化を補正する温度補償素子20と、固定抵抗R1,R2と、をブリッジ回路に組み込んで構成してある。ブリッジ回路は、電源Eによって常時約90〜120mAの電流を供給し、検出素子10を被検知ガスが接触燃焼し易い温度に保持してある。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
As shown in FIGS. 1 and 2, the catalytic combustion type gas sensor X of the present invention includes a detection element 10 that is sensitive to a gas to be detected (a combustible gas such as hydrogen gas or methane), a change in environment, and the like. A temperature compensation element 20 for correcting a change in the resistance value of the detection element 10 based on a temperature change other than combustion, and fixed resistors R1 and R2 are incorporated in a bridge circuit. The bridge circuit constantly supplies a current of about 90 to 120 mA by the power source E, and maintains the detection element 10 at a temperature at which the gas to be detected is easy to contact and burn.

検出素子10は、コイル状の貴金属線材11を覆い、被検知ガスと接触するガス感応部12を有する。検出素子10は、被検知ガス中に置かれたとき、通電により発熱することで自身が備える触媒が加熱されて被検知ガスと反応し、その反応熱に応じて(被検知ガスの濃度に応じて)出力値が変化する。貴金属線11において、材質、線径、コイル径、コイル巻数等は、従来の接触燃焼式ガス検知素子に使用するものと同様で、特に限定されない。貴金属線11の材質としては白金等を適用できる。   The detection element 10 has a gas sensitive part 12 that covers the coiled noble metal wire 11 and is in contact with the gas to be detected. When the detection element 10 is placed in the gas to be detected, heat is generated by energization, whereby the catalyst included therein is heated to react with the gas to be detected, and according to the reaction heat (according to the concentration of the gas to be detected). The output value changes. In the noble metal wire 11, the material, the wire diameter, the coil diameter, the number of coil turns, and the like are the same as those used for the conventional catalytic combustion type gas detection element, and are not particularly limited. Platinum or the like can be used as the material of the noble metal wire 11.

ガス感応部12は、被検知ガスに対して活性を有する貴金属の第一触媒を担持する第一触媒担体を備えた外層12Aと、被検知ガスに対して第一触媒より高い活性を有する貴金属の第二触媒を担持する第二触媒担体を備えた内層12Bと、を形成してある。   The gas sensitive part 12 includes an outer layer 12A including a first catalyst carrier that supports a first catalyst of a noble metal having an activity with respect to a detected gas, and a noble metal having a higher activity with respect to the detected gas than the first catalyst. And an inner layer 12B provided with a second catalyst carrier for supporting the second catalyst.

第一触媒は、被検知ガスに対して活性を有する貴金属の触媒であればよく、白金(Pt)や白金・パラジウム(PtPd)などを使用することができる。第一触媒担体は第一触媒を担持するものであれば特に限定されるものではないが、例えばアルミナ、シリカアルミナ等の金属酸化物焼結体を適用することができる。   The first catalyst may be a noble metal catalyst having activity with respect to the gas to be detected, and platinum (Pt), platinum-palladium (PtPd), or the like can be used. The first catalyst carrier is not particularly limited as long as it supports the first catalyst. For example, a metal oxide sintered body such as alumina or silica alumina can be applied.

第二触媒は、被検知ガスに対して第一触媒より高い活性を有する貴金属であればよく、例えば第一触媒が白金や白金・パラジウムである場合は第二触媒をパラジウム(Pd)とすることができる。第二触媒担体は第二触媒を担持するものであれば特に限定されるものではないが、例えばアルミナ、シリカアルミナ等の金属酸化物焼結体を適用することができる。   The second catalyst may be a noble metal having higher activity than the first catalyst with respect to the gas to be detected. For example, when the first catalyst is platinum or platinum / palladium, the second catalyst is palladium (Pd). Can do. The second catalyst carrier is not particularly limited as long as it supports the second catalyst. For example, a metal oxide sintered body such as alumina or silica alumina can be used.

また、上述したように第一触媒および第二触媒において異なる種類の貴金属とせずに、同じ種類の貴金属とする場合であっても、担持量を異ならせる(第一触媒の担持量<第二触媒の担持量)ことで、活性を異ならせる(第一触媒の活性<第二触媒の活性)ことができる。   Further, as described above, even when the first catalyst and the second catalyst are not different types of precious metals but are the same type of precious metals, the supported amounts are different (the first catalyst supported amount <the second catalyst). The activity can be made different (the activity of the first catalyst <the activity of the second catalyst).

また、ガス感応部12においては、外層12Aの平均粒子径を20〜100nmとし、内層12Bの平均粒子径を200〜1000nmとしてある。即ち、本構成では、外層12Aを粒径の細かい材料を用いて緻密な層とし、内層12Bを粒径が大きい材料を用いて外層12Aよりも粒子間の隙間が大きいポーラス構造とすることにより、ガス感応部12における各層のガス拡散を制御する構造となっている   Moreover, in the gas sensitive part 12, the average particle diameter of the outer layer 12A is 20 to 100 nm, and the average particle diameter of the inner layer 12B is 200 to 1000 nm. That is, in this configuration, the outer layer 12A is a dense layer using a material having a small particle diameter, and the inner layer 12B is a porous structure having a larger gap between particles than the outer layer 12A using a material having a large particle diameter. It has a structure for controlling gas diffusion in each layer in the gas sensitive part 12.

各層の平均粒子径粒子径は、金属酸化物焼結体に貴金属触媒を混合した状態で焼結する際の温度を変更することで制御することができる。
外層12Aの平均粒子径を20〜100nmとするには、第一触媒を担持する第一触媒担体を1100〜1150℃程度で焼成すればよい。また、内層12Bの平均粒子径を200〜1000nmとするには、第二触媒を担持する第二触媒担体を1175〜1500℃程度で焼成すればよい。
The average particle diameter of each layer can be controlled by changing the temperature at which sintering is performed in a state where a noble metal catalyst is mixed with a metal oxide sintered body.
In order to set the average particle size of the outer layer 12A to 20 to 100 nm, the first catalyst carrier supporting the first catalyst may be fired at about 1100 to 1150 ° C. Moreover, what is necessary is just to calcinate the 2nd catalyst support | carrier which carry | supports a 2nd catalyst at about 1175-1500 degreeC in order to make the average particle diameter of the inner layer 12B 200-1000 nm.

本構成では、接触燃焼式ガスセンサXを起動して暫くの間(例えば外層12Aの第一触媒が劣化するまでの時間)は、被検知ガス(メタンガス)はガス感応部12の表面付近を構成する外層12Aを拡散する(図3)。即ち、外層12Aにおいて第一触媒が加熱されて被検知ガスと燃焼反応する。このとき、外層12Aは粒径の細かい緻密な層であるため、被検知ガスが外層12Aを拡散するスピードは比較的緩やかとなる。第一触媒は(第二触媒よりも)活性が低いため、被検知ガスの燃焼反応はそれほど鋭敏には行われない。一方、雰囲気中に存在する有機シリコーンガスや硫黄等の干渉ガスは、通常、第一触媒において被検知ガスよりも燃焼反応し易いと考えられる。そのため、当該干渉ガスは、外層12Aを緩やかに拡散して外層12Aにおいてその大部分が燃焼して除去される。   In this configuration, the gas to be detected (methane gas) constitutes the vicinity of the surface of the gas sensitive portion 12 for a while (for example, the time until the first catalyst of the outer layer 12A deteriorates) after starting the catalytic combustion type gas sensor X. The outer layer 12A is diffused (FIG. 3). That is, in the outer layer 12A, the first catalyst is heated and undergoes a combustion reaction with the gas to be detected. At this time, since the outer layer 12A is a dense layer having a fine particle size, the speed at which the gas to be detected diffuses in the outer layer 12A is relatively slow. Since the first catalyst has a lower activity (than the second catalyst), the combustion reaction of the detected gas is not so sensitive. On the other hand, it is considered that an interference gas such as organic silicone gas and sulfur existing in the atmosphere is usually more likely to undergo a combustion reaction in the first catalyst than the detected gas. Therefore, the interference gas diffuses gently in the outer layer 12A, and most of the interference gas is burned and removed in the outer layer 12A.

接触燃焼式ガスセンサXを起動してある程度の時間(例えば外層12Aの第一触媒が劣化する程度の時間)が経過すれば、被検知ガスは外層12Aを通過して内層12Bに到達する。内層12Bに到達する被検知ガスは、外層12Aで反応しなかった被検知ガスである。内層12Bにおいては、第二触媒が加熱されて被検知ガスと燃焼反応する。第二触媒は第一触媒よりも活性が高いため、高感度で被検知ガスと燃焼反応する。また、干渉ガスは外層12Aにおいて大部分が燃焼するため、内層12Bに到達し難くなり、第二触媒は干渉ガスの影響を受け難い。内層12Bは粒径が大きい材料で形成されたポーラス構造の層となっているため、被検知ガスが内層12Bを拡散するスピードは比較的速い。そのため、内層12Bにおいて効率よく被検知ガスと燃焼反応させることができる。   When a certain amount of time (for example, a time when the first catalyst of the outer layer 12A deteriorates) elapses after the catalytic combustion type gas sensor X is activated, the detected gas passes through the outer layer 12A and reaches the inner layer 12B. The detected gas that reaches the inner layer 12B is the detected gas that has not reacted in the outer layer 12A. In the inner layer 12B, the second catalyst is heated and undergoes a combustion reaction with the gas to be detected. Since the second catalyst has higher activity than the first catalyst, it reacts with the detected gas with high sensitivity. Further, since most of the interference gas burns in the outer layer 12A, it becomes difficult to reach the inner layer 12B, and the second catalyst is hardly affected by the interference gas. Since the inner layer 12B is a layer having a porous structure formed of a material having a large particle size, the speed at which the gas to be detected diffuses in the inner layer 12B is relatively fast. Therefore, the inner layer 12B can be efficiently combusted with the detected gas.

従って、接触燃焼式ガスセンサXを起動した初期においては、被検知ガスの燃焼反応を外層12Aにて行わせることができるとともに、干渉ガスを除去することができる。その後、内層12Bにおいては、概ね被検知ガスの燃焼反応のみを行わせることができる。そのため、内層12Bの第二触媒の劣化を抑制することができるため、ガス感応部の耐久性を向上させることができる。   Therefore, at the initial stage when the catalytic combustion type gas sensor X is activated, the combustion reaction of the gas to be detected can be performed in the outer layer 12A and the interference gas can be removed. Thereafter, only the combustion reaction of the gas to be detected can be performed in the inner layer 12B. Therefore, since the deterioration of the second catalyst of the inner layer 12B can be suppressed, the durability of the gas sensitive part can be improved.

また、経時的には、ガス感応部12の表面に形成された外層12Aの第一触媒から劣化していくが(図4)、第一触媒が劣化したとしても、外層12Aの緻密な粒子構造は維持される。よって、外層12Aは干渉ガスに対してフィルタ層としての役割を果たすことができるため、長期的なスパンを考慮した場合であっても、内層12Bにおける第二触媒は干渉ガスの影響を受け難くなり、第二触媒の劣化を長期に亘って抑制することができるため、ガス感応部の耐久性をより向上させることができる。   In addition, over time, the first catalyst of the outer layer 12A formed on the surface of the gas sensitive portion 12 deteriorates (FIG. 4). Even if the first catalyst deteriorates, the fine particle structure of the outer layer 12A Is maintained. Therefore, since the outer layer 12A can serve as a filter layer for the interference gas, the second catalyst in the inner layer 12B is hardly affected by the interference gas even when a long-term span is considered. Since the deterioration of the second catalyst can be suppressed over a long period of time, the durability of the gas sensitive part can be further improved.

また、外層12Aの第一触媒が劣化したとしても、内層12Bにおいては活性の高い第二触媒を備えるため、被検知ガスの燃焼反応を効率よく行わせることができる。   Even if the first catalyst of the outer layer 12A is deteriorated, the inner layer 12B is provided with a highly active second catalyst, so that the combustion reaction of the detected gas can be performed efficiently.

従って、本発明の接触燃焼式ガスセンサXは、検出素子10が外層12Aおよび内層12Bを形成したガス感応部12を有することで、干渉ガスの影響を少なくした状態で、被検知ガスに対して安定した感度を有するものとなる。   Therefore, the catalytic combustion type gas sensor X of the present invention is stable with respect to the gas to be detected in a state where the influence of the interference gas is reduced because the detection element 10 has the gas sensitive part 12 in which the outer layer 12A and the inner layer 12B are formed. The sensitivity is as follows.

温度補償素子20は、検知素子10と同様に可燃性ガス中に置かれて通電されることで、検知素子10の温度補償を行うための素子であり、検知素子10が有する触媒による燃焼熱に応じた出力値の変化分のみ取り出すために用いられる。
温度補償素子20は、例えば検出素子10と同等の貴金属線材の表面をアルミナ等の金属酸化物焼結体で被覆することにより形成されている。温度補償素子20は触媒を有しておらず、触媒反応による可燃性ガスの燃焼が生じないため、被検出ガスに対して不活性とされる。当該温度補償素子20は、通電されることにより発熱してその周囲を覆うアルミナ等の金属酸化物焼結体を加熱するものであり、熱により自らの抵抗値が変化する。
The temperature compensation element 20 is an element for performing temperature compensation of the detection element 10 by being placed in a flammable gas and being energized in the same manner as the detection element 10. It is used to extract only the change of the corresponding output value.
The temperature compensation element 20 is formed, for example, by coating the surface of a noble metal wire equivalent to the detection element 10 with a metal oxide sintered body such as alumina. Since the temperature compensation element 20 does not have a catalyst and combustion of the combustible gas due to the catalytic reaction does not occur, the temperature compensation element 20 is inactive to the gas to be detected. The temperature compensation element 20 generates heat when energized and heats a sintered metal oxide such as alumina covering the periphery thereof, and its resistance value changes due to heat.

通常、接触燃焼式ガスセンサXは、可燃性ガスが検出素子10の触媒に接触した際に生じる燃焼反応の発熱により高温となった検出素子10と、被検出ガスによる燃焼反応が発生せず検出素子10よりも低温の温度補償素子20との間に電気抵抗値の差が生ずることを利用し、雰囲気温度による電気抵抗値の変化分を相殺して可燃性ガスの濃度を検出することができる。   Usually, the contact combustion type gas sensor X includes a detection element 10 that has become high temperature due to heat generated by a combustion reaction that occurs when a combustible gas contacts the catalyst of the detection element 10, and a detection element in which a combustion reaction due to the gas to be detected does not occur. By utilizing the fact that a difference in electrical resistance value occurs between the temperature compensation element 20 and a temperature lower than 10, it is possible to detect the concentration of the combustible gas by offsetting the change in the electrical resistance value due to the ambient temperature.

温度補償素子20は、周囲温度の変化の影響を相殺するために使用する。すなわち、センサ素子のガスとの反応による温度変化は数10℃程度と小さく、周囲温度が例えば0℃〜40℃の範囲で変化すると、ガスとの反応によるセンサ出力変化と周囲温度の変化によるセンサ出力変化が区別できないため、検出素子10と同程度の抵抗値を有し周囲温度に対して同じような抵抗変化をする温度補償素子20を検出素子10と並列に接続して、検出素子10の検出電圧に周囲温度の影響が現れないようにしている。   The temperature compensation element 20 is used to cancel the influence of changes in the ambient temperature. That is, the temperature change due to the reaction of the sensor element with the gas is as small as several tens of degrees Celsius, and if the ambient temperature changes in the range of 0 ° C. to 40 ° C., for example, the sensor output change due to the reaction with the gas Since the output change cannot be distinguished, the temperature compensation element 20 having the same resistance value as the detection element 10 and having the same resistance change with respect to the ambient temperature is connected in parallel with the detection element 10. The influence of the ambient temperature does not appear on the detection voltage.

〔実施例1〕
本発明の実施例について説明する。
本発明の接触燃焼式ガスセンサXにおける検出素子10を従来公知の手法により作製した。即ち、貴金属線材11として白金または白金合金をコイル状に加工したものに、内層12Bとしてアルミナ(第二触媒担体)にパラジウム(第二触媒)を10wt%担持し、外層12Aとしてアルミナ(第一触媒担体)に白金或いは白金・パラジウム(第一触媒)をそれぞれ10wt%担持したガス感応部12を、素子径が0.2mm程度(内層12Bの粒子径0.17mm)の略球形となるようにした。外層12Aは、1150℃で焼成して平均粒子径を20〜100nmとし、内層12Bは1300℃で焼成して平均粒子径を200〜1000nmとした。
[Example 1]
Examples of the present invention will be described.
The detection element 10 in the catalytic combustion type gas sensor X of the present invention was produced by a conventionally known method. That is, platinum or a platinum alloy processed into a coil shape as the noble metal wire 11, 10 wt% of palladium (second catalyst) is supported on alumina (second catalyst carrier) as the inner layer 12 B, and alumina (first catalyst) as the outer layer 12 A. The gas sensitive part 12 carrying 10 wt% of platinum or platinum / palladium (first catalyst) on the carrier) is made to have a substantially spherical shape with an element diameter of about 0.2 mm (the particle diameter of the inner layer 12B is 0.17 mm). . The outer layer 12A was fired at 1150 ° C. to have an average particle size of 20 to 100 nm, and the inner layer 12B was fired at 1300 ° C. to have an average particle size of 200 to 1000 nm.

このようにして作製した検出素子10をブリッジ回路に組み込み、メタンガス(25%LEL)に対するガス感度特性を調べた。本発明例1では外層12Aの第一触媒を白金・パラジウムとし、本発明例2では外層12Aの第一触媒を白金とした。
比較例として、検出素子のガス感応部を一層構造としたものを使用した。比較例1のガス感応部は、アルミナに白金・パラジウムを10wt%担持させたもの(1150℃で焼成)とし、比較例2のガス感応部は、アルミナにパラジウムを10wt%担持させたもの(1300℃で焼成)とした。
結果を図5に示した。
The detection element 10 produced in this way was incorporated into a bridge circuit, and the gas sensitivity characteristic with respect to methane gas (25% LEL) was examined. In Invention Example 1, the first catalyst of the outer layer 12A was platinum / palladium, and in Invention Example 2, the first catalyst of the outer layer 12A was platinum.
As a comparative example, a gas sensing part of the detection element having a single layer structure was used. The gas sensitive part of Comparative Example 1 is made by supporting 10 wt% platinum / palladium on alumina (fired at 1150 ° C.), and the gas sensitive part of Comparative Example 2 is made by carrying 10 wt% palladium on alumina (1300 Fired at 0 ° C.).
The results are shown in FIG.

この結果、本発明例1,2は、100日経過後のガス感度が7mV以上であり、比較例1,2は100日経過後のガス感度が6mV以下であった。そのため、ガス感応部12が二層で形成される本発明例1,2は、ガス感応部12が一層で形成される比較例1,2より優れたガス感度を有しているものと認められた。   As a result, the inventive examples 1 and 2 had a gas sensitivity of 7 mV or more after 100 days, and the comparative examples 1 and 2 had a gas sensitivity of 6 mV or less after 100 days. Therefore, the inventive examples 1 and 2 in which the gas sensitive part 12 is formed of two layers are recognized as having gas sensitivity superior to the comparative examples 1 and 2 in which the gas sensitive part 12 is formed of one layer. It was.

このガス感度の結果に基づいて、検出素子10の劣化率を算出した。劣化率は、経過日数0日のガス感応部の劣化率を0%として算出した。結果を図6に示した。   Based on the result of the gas sensitivity, the deterioration rate of the detection element 10 was calculated. The deterioration rate was calculated assuming that the deterioration rate of the gas sensitive part with 0 days elapsed was 0%. The results are shown in FIG.

この結果、本発明例1,2は100日経過後の劣化率が45〜55%程度であり、比較例1,2は100日経過後の劣化率が75〜95%以下程度であった。そのため、ガス感応部12が二層で形成される本発明例1,2は、ガス感応部12が一層で形成される比較例1,2より優れた耐久性を有しているものと認められた。   As a result, Examples 1 and 2 of the present invention had a deterioration rate of about 45 to 55% after 100 days, and Comparative Examples 1 and 2 had a deterioration rate of about 75 to 95% after 100 days. Therefore, it is recognized that the inventive examples 1 and 2 in which the gas sensitive part 12 is formed of two layers have superior durability than the comparative examples 1 and 2 in which the gas sensitive part 12 is formed of one layer. It was.

本発明は、被検知ガスと感応する検出素子を備えた接触燃焼式ガスセンサに利用できる。   INDUSTRIAL APPLICABILITY The present invention can be used for a catalytic combustion type gas sensor including a detection element that is sensitive to a gas to be detected.

X 接触燃焼式ガスセンサ
10 検出素子
11 貴金属線材
12 ガス感応部
12A 外層
12B 内層
X catalytic combustion type gas sensor 10 sensing element 11 noble metal wire 12 gas sensitive part 12A outer layer 12B inner layer

Claims (2)

被検知ガスと感応する検出素子を備えた接触燃焼式ガスセンサにおいて、
前記検出素子は、貴金属線材を覆い、被検知ガスと接触するガス感応部を有し、
前記ガス感応部は、被検知ガスに対して活性を有する貴金属の第一触媒を担持する第一触媒担体を備えた外層と、
被検知ガスに対して前記第一触媒より高い活性を有する貴金属の第二触媒を担持する第二触媒担体を備えた内層と、の二層構造で構成してある接触燃焼式ガスセンサ。
In a contact combustion type gas sensor equipped with a detection element that is sensitive to the gas to be detected,
The detection element covers a noble metal wire and has a gas sensitive part that comes into contact with the gas to be detected.
The gas sensitive part includes an outer layer including a first catalyst carrier that supports a first catalyst of a noble metal having activity with respect to a gas to be detected;
A catalytic combustion type gas sensor configured with a two-layer structure including a second catalyst carrier supporting a second catalyst of a noble metal having higher activity than the first catalyst with respect to a detected gas.
前記外層の平均粒子径が20〜100nmであり、前記内層の平均粒子径が200〜1000nmである請求項1に記載の接触燃焼式ガスセンサ。   2. The catalytic combustion gas sensor according to claim 1, wherein the outer layer has an average particle diameter of 20 to 100 nm and the inner layer has an average particle diameter of 200 to 1000 nm.
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