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JP6480725B2 - Laser irradiation apparatus and laser irradiation method - Google Patents
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JP6480725B2 - Laser irradiation apparatus and laser irradiation method - Google Patents

Laser irradiation apparatus and laser irradiation method Download PDF

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JP6480725B2
JP6480725B2 JP2014253772A JP2014253772A JP6480725B2 JP 6480725 B2 JP6480725 B2 JP 6480725B2 JP 2014253772 A JP2014253772 A JP 2014253772A JP 2014253772 A JP2014253772 A JP 2014253772A JP 6480725 B2 JP6480725 B2 JP 6480725B2
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irradiation
light
optical axis
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良彦 近藤
良彦 近藤
伸二 浜本
伸二 浜本
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    • B29C66/72General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the structure of the material of the parts to be joined
    • B29C66/723General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the structure of the material of the parts to be joined being multi-layered
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B29C66/8341Roller, cylinder or drum types; Band or belt types; Ball types
    • B29C66/83431Roller, cylinder or drum types; Band or belt types; Ball types rollers, cylinders or drums cooperating with bands or belts
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    • B29C66/00General aspects of processes or apparatus for joining preformed parts
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    • B29C66/05Particular design of joint configurations
    • B29C66/10Particular design of joint configurations particular design of the joint cross-sections
    • B29C66/13Single flanged joints; Fin-type joints; Single hem joints; Edge joints; Interpenetrating fingered joints; Other specific particular designs of joint cross-sections not provided for in groups B29C66/11 - B29C66/12
    • B29C66/137Beaded-edge joints or bead seals
    • BPERFORMING OPERATIONS; TRANSPORTING
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Description

本発明は、対象物へレーザー光を照射するレーザー照射装置及びレーザー照射方法に関する。   The present invention relates to a laser irradiation apparatus and a laser irradiation method for irradiating an object with laser light.

レーザー発振器から出力されるレーザー光を対象物に照射する場合、レーザー発振器内や、光路上に配置された光学部材の温度変化に起因して、予め設定された光軸が経時的に変化したり、装置の経年変化によって光軸がずれたりすることがある。そのような光軸のずれをアライメントする方法が種々提案されている。   When irradiating an object with laser light output from a laser oscillator, the preset optical axis may change over time due to temperature changes in the laser oscillator or the optical member placed on the optical path. The optical axis may shift due to aging of the device. Various methods for aligning such optical axis deviations have been proposed.

例えば特許文献1には、ビームスプリッタを用いてレーザー光を2方向に分岐させ、分岐した一方のレーザー光の位置を二次元位置検出装置によって検出することで光軸のずれを求め、そのずれ量に応じてミラーを移動させて光軸を調整する方法が記載されている。ビームスプリッタを用いた光軸のずれの補正方法は、特許文献2にも記載されている。   For example, in Patent Document 1, a laser beam is split in two directions using a beam splitter, and the position of one of the branched laser beams is detected by a two-dimensional position detection device, and the optical axis shift is obtained. The method of adjusting the optical axis by moving the mirror according to the above is described. A method for correcting an optical axis shift using a beam splitter is also described in Patent Document 2.

一方、ビームスプリッタを用いず、その代わりに2波長以上のレーザー光源を用いて光軸のずれ及びその補正を行う方法が特許文献3及び4に記載されている。   On the other hand, Patent Documents 3 and 4 describe a method of correcting the deviation of the optical axis by using a laser light source having two or more wavelengths instead of using a beam splitter.

特表2013−202658号公報Special table 2013-202658 gazette 特開2008−203416号公報JP 2008-203416 A 特開2008−293623号公報JP 2008-293623 A 国際公開第2012/108032号パンフレットInternational Publication No. 2012/108032 Pamphlet

ビームスプリッタを用いた光軸のアライメント法では、一つの光源で発生したレーザー光を分岐させることに起因して、対象物へ照射するレーザー光のエネルギーロスが生じてしまうという課題がある。一方、2波長以上のレーザー光源を用いた光軸のアライメント法であれば、対象物へ照射するレーザー光のエネルギーにロスが生じることはない。しかし2波長以上のレーザー光源を用いた場合、特許文献3に記載の技術では、2つの波長のレーザー光の戻り光の両方を検出しているため、光学系の構造が複雑になってしまうという課題がある。特許文献4に記載の技術では、波長の異なるすべてのレーザー光について、受光素子に受光されたときの出力を取得して、その出力値に基づき光軸のずれを検出しているので、それら波長の異なるすべてのレーザー光を対象物に照射する必要があるという課題がある。   In the optical axis alignment method using a beam splitter, there is a problem in that energy loss of laser light irradiated to an object occurs due to branching of laser light generated by one light source. On the other hand, if the optical axis alignment method uses a laser light source having two or more wavelengths, there is no loss in the energy of the laser light applied to the object. However, when a laser light source having two or more wavelengths is used, the technique described in Patent Document 3 detects both return lights of laser light of two wavelengths, and the structure of the optical system becomes complicated. There are challenges. In the technique described in Patent Document 4, since the output when all the laser beams having different wavelengths are received by the light receiving element is acquired and the optical axis deviation is detected based on the output value, the wavelengths of those are detected. There is a problem that it is necessary to irradiate an object with all laser beams having different values.

したがって本発明の課題は、前述した従来技術が有する欠点を解消し得るレーザー照射装置及びレーザー照射方法を提供することにある。   Therefore, the subject of this invention is providing the laser irradiation apparatus and laser irradiation method which can eliminate the fault which the prior art mentioned above has.

本発明は、対象物に照射する照射用レーザー光を発生させる第1光源と、
照射用レーザー光と異なる波長を有する位置ずれ検出用光を発生させる第2光源と、
第2光源で発生した位置ずれ検出用光の進行方向を変更する第1反射部材と、
第1反射部材を経て入射された位置ずれ検出用光を反射させるとともに、第1光源から入射された照射用レーザー光を透過させて、両光を同軸にする第1ダイクロイックミラーと、
照射用レーザー光を対象物へ照射するための最終光学ユニットの直前に配置され、且つ同軸の状態の照射用レーザー光及び位置ずれ検出用光が入射される第2ダイクロイックミラーであって、位置ずれ検出用光を反射させるとともに照射用レーザー光を透過させて、該照射用レーザー光のみを該最終光学ユニットに導く該第2ダイクロイックミラーと、
第2ダイクロイックミラーで反射した位置ずれ検出用光を受光する二次元検出器とを備え、
二次元検出器で受光した位置ずれ検出用光の検出位置に基づき、照射用レーザー光が対象物の照射予定位置に照射されているか否かを判断するようにしたレーザー照射装置を提供するものである。
The present invention includes a first light source that generates irradiation laser light for irradiating an object;
A second light source for generating misalignment detection light having a wavelength different from that of the irradiation laser light;
A first reflecting member that changes the traveling direction of the misalignment detection light generated by the second light source;
A first dichroic mirror that reflects the misalignment detection light incident through the first reflecting member and transmits the irradiation laser light incident from the first light source so as to make both lights coaxial;
A second dichroic mirror that is disposed immediately before the final optical unit for irradiating the irradiation laser beam to the object and receives the coaxial irradiation laser beam and misalignment detection light. The second dichroic mirror that reflects the detection light and transmits the irradiation laser light and guides only the irradiation laser light to the final optical unit;
A two-dimensional detector that receives the misalignment detection light reflected by the second dichroic mirror;
Provided is a laser irradiation apparatus for determining whether or not an irradiation laser beam is irradiated on an irradiation target position of an object based on a detection position of a misalignment detection light received by a two-dimensional detector. is there.

また本発明は、対象物に照射する照射用レーザー光を第1光源で発生させるとともに、照射用レーザー光と異なる波長を有する位置ずれ検出用光を第2光源で発生させ、
第2光源で発生した位置ずれ検出用光の進行方向を第1反射部材によって変更し、
照射用レーザー光及び進行方向が変更された位置ずれ検出用光を第1ダイクロイックミラーに入射させ、照射用レーザー光を透過させるとともに位置ずれ検出用光を反射させて、両光を同軸にし、
照射用レーザー光を対象物へ照射するための最終光学ユニットの直前に配置された第2ダイクロイックミラーに、同軸状態の照射用レーザー光及び位置ずれ検出用光を入射させ、該第2ダイクロイックミラーによって位置ずれ検出用光を反射させるとともに照射用レーザー光を透過させて、該照射用レーザー光のみを該最終光学ユニットへと導き、
第2ダイクロイックミラーで反射した位置ずれ検出用光を二次元検出器で受光するとともに、最終光学ユニットに導かれた照射用レーザー光を対象物に照射する、レーザー照射方法であって、
二次元検出器で受光した位置ずれ検出用光の検出位置に基づき、照射用レーザー光が対象物の照射予定位置に照射されているか否かを判断するようにした、レーザー照射方法を提供するものである。
In addition, the present invention generates an irradiation laser beam for irradiating an object with the first light source, and generates a misalignment detection light with a wavelength different from that of the irradiation laser beam with the second light source,
The traveling direction of the misalignment detection light generated by the second light source is changed by the first reflecting member,
The laser beam for irradiation and the misalignment detection light whose traveling direction is changed are made incident on the first dichroic mirror, the irradiation laser beam is transmitted and the misalignment detection light is reflected, and both lights are coaxial.
Coaxially irradiated irradiation laser light and misalignment detection light are incident on a second dichroic mirror disposed immediately before the final optical unit for irradiating the irradiation laser light onto the object, and the second dichroic mirror Reflecting the misalignment detection light and transmitting the irradiation laser light, leading only the irradiation laser light to the final optical unit,
A laser irradiation method in which a misalignment detection light reflected by a second dichroic mirror is received by a two-dimensional detector, and an irradiation laser beam guided to the final optical unit is irradiated to an object,
Provided a laser irradiation method for determining whether or not an irradiation laser beam is irradiated on a target irradiation position based on a detection position of a misalignment detection light received by a two-dimensional detector It is.

更に本発明は、複数枚のシートが重ねられたシート積層体にレーザー光を照射することにより、該シート積層体を分断するのと同時に、その分断によって生じた複数枚のシートの切断縁部どうしを融着させてシール縁部を形成する、シート融着体の製造方法であって、
前記シート積層体に照射する照射用レーザー光を第1光源で発生させるとともに、照射用レーザー光と異なる波長を有する位置ずれ検出用光を第2光源で発生させ、
第2光源で発生した位置ずれ検出用光の進行方向を第1反射部材によって変更し、
照射用レーザー光及び進行方向が変更された位置ずれ検出用光を第1ダイクロイックミラーに入射させ、照射用レーザー光を透過させるとともに位置ずれ検出用光を反射させて、両光を同軸にし、
照射用レーザー光を前記シート積層体へ照射するための最終光学ユニットの直前に配置された第2ダイクロイックミラーに、同軸状態の照射用レーザー光及び位置ずれ検出用光を入射させ、該第2ダイクロイックミラーによって位置ずれ検出用光を反射させるとともに照射用レーザー光を透過させて、該照射用レーザー光のみを該最終光学ユニットへと導き、
第2ダイクロイックミラーで反射した位置ずれ検出用光を二次元検出器で受光するとともに、最終光学ユニットに導かれた照射用レーザー光を前記シート積層体に照射する工程を有し、
二次元検出器で受光した位置ずれ検出用光の検出位置に基づき、照射用レーザー光が前記シート積層体照射予定位置に照射されているか否かを判断するようにした、シート融着体の製造方法を提供するものである。
Furthermore, the present invention divides the sheet laminate by irradiating a laser beam onto the sheet laminate in which a plurality of sheets are stacked, and at the same time, cut edges of the plurality of sheets generated by the division. Is a method for producing a sheet fusion body, in which a seal edge is formed by fusing
A laser beam for irradiating the sheet laminate is generated by a first light source, and a misalignment detection light having a wavelength different from that of the laser beam for irradiation is generated by a second light source,
The traveling direction of the misalignment detection light generated by the second light source is changed by the first reflecting member,
The laser beam for irradiation and the misalignment detection light whose traveling direction is changed are made incident on the first dichroic mirror, the irradiation laser beam is transmitted and the misalignment detection light is reflected, and both lights are coaxial.
The second dichroic light is incident on a second dichroic mirror disposed immediately before the final optical unit for irradiating the laser beam for irradiation to the sheet laminate, and the coaxial laser light for irradiation and misalignment detection light are incident on the second dichroic mirror. Reflecting the misalignment detection light by the mirror and transmitting the irradiation laser light, leading only the irradiation laser light to the final optical unit,
Receiving the misalignment detection light reflected by the second dichroic mirror with a two-dimensional detector, and irradiating the sheet laminate with the irradiation laser light guided to the final optical unit;
Manufacture of a sheet fusion body in which it is determined whether or not the irradiation position of the sheet laminate is irradiated based on the detection position of the misalignment detection light received by the two-dimensional detector. A method is provided.

本発明によれば、レーザー光の照射中でもレーザー光のエネルギーロスを生じさせることなく、レーザー光の光軸のずれを容易に検出することができる。   ADVANTAGE OF THE INVENTION According to this invention, the shift | offset | difference of the optical axis of a laser beam can be easily detected, without producing the energy loss of a laser beam even in laser beam irradiation.

図1は、本発明のレーザー照射装置の一実施形態を示す模式図である。FIG. 1 is a schematic view showing an embodiment of a laser irradiation apparatus of the present invention. 図2は、本発明のレーザー照射装置の別の実施形態を示す模式図(図1相当図)である。FIG. 2 is a schematic diagram (corresponding to FIG. 1) showing another embodiment of the laser irradiation apparatus of the present invention. 図3は、本発明のレーザー照射装置の更に別の実施形態を示す模式図(図1相当図)である。FIG. 3 is a schematic view (corresponding to FIG. 1) showing still another embodiment of the laser irradiation apparatus of the present invention. 図4は、本発明のレーザー照射装置のまた更に別の実施形態を示す模式図(図1相当図)である。FIG. 4 is a schematic diagram (corresponding to FIG. 1) showing still another embodiment of the laser irradiation apparatus of the present invention. 図5は、本発明のレーザー照射装置のまた更に別の実施形態を示す模式図(図1相当図)である。FIG. 5 is a schematic diagram (corresponding to FIG. 1) showing still another embodiment of the laser irradiation apparatus of the present invention. 図6は、本発明のレーザー照射装置及びレーザー照射方法によって製造されるシート融着体の一例としてのパンツ型使い捨ておむつを示す斜視図である。FIG. 6 is a perspective view showing a pants-type disposable diaper as an example of a sheet fusion product manufactured by the laser irradiation apparatus and the laser irradiation method of the present invention. 図7は、図6におけるVI−VI線断面図である。7 is a cross-sectional view taken along line VI-VI in FIG. 図8は、図6に示すパンツ型使い捨ておむつの製造工程を示す模式図である。FIG. 8 is a schematic diagram showing a manufacturing process of the pants-type disposable diaper shown in FIG. 図9は、図6に示すパンツ型使い捨ておむつを製造するために用いられるレーザー式接合装置を示す模式図である。FIG. 9 is a schematic view showing a laser-type joining device used for manufacturing the pants-type disposable diaper shown in FIG.

以下本発明を、その好ましい実施形態に基づき図面を参照しながら説明する。図1には、本発明のレーザー照射装置の一実施形態が模式的に示されている。同図に示すレーザー照射装置10は、照射対象物Tに照射する照射用レーザー光20を発生させる第1光源21を有している。また照射装置10は、照射用レーザー光20と異なる波長を有する位置ずれ検出用光23を発生させる第2光源22を有している。   The present invention will be described below based on preferred embodiments with reference to the drawings. FIG. 1 schematically shows an embodiment of the laser irradiation apparatus of the present invention. The laser irradiation apparatus 10 shown in the figure has a first light source 21 that generates an irradiation laser beam 20 that is applied to an irradiation target T. In addition, the irradiation apparatus 10 includes a second light source 22 that generates misalignment detection light 23 having a wavelength different from that of the irradiation laser light 20.

第2光源22で発生した位置ずれ検出用光23は、第1ミラー31及び第2ミラー32から構成される第1反射部材30Aによって、その進行方向が変更される。第1反射部材30Aによって進行方向が変更された位置ずれ検出用光23は、該第1反射部材30Aを経て、第1ダイクロイックミラー41に入射される。一方、第1光源20で発生した照射用レーザー光20は、直接に第1ダイクロイックミラー41に入射される。   The movement direction of the misalignment detection light 23 generated by the second light source 22 is changed by the first reflecting member 30 </ b> A including the first mirror 31 and the second mirror 32. The misalignment detection light 23 whose traveling direction has been changed by the first reflecting member 30A is incident on the first dichroic mirror 41 via the first reflecting member 30A. On the other hand, the irradiation laser beam 20 generated by the first light source 20 is directly incident on the first dichroic mirror 41.

第1ダイクロイックミラー41は、第1反射部材30Aを経て入射された位置ずれ検出用光23を反射させるとともに、第1光源21から入射された照射用レーザー光20を透過させて、両光20,23を同軸にする。「同軸にする」とは、照射用レーザー光20の光軸と、位置ずれ検出用光23の光軸とを一致させることをいう。また「光軸」とは、光源からターゲットまでを通過する光束の中心線のことをいう。照射用レーザー光20と位置ずれ検出用光23とを同軸の状態にするために、第1ダイクロイックミラー41への照射用レーザー光20及び位置ずれ検出用光23の入射角度を第1反射部材30Aで調整することが必要である。また、第1ダイクロイックミラー41によって照射用レーザー光20及び位置ずれ検出用光23が同軸の状態になったか否かは、第1ダイクロイックミラー41よりも下流に、第1光源21から照射対象物Tまでの光路長と同等以上の距離をもつ位置をA点と定義すると、用いる波長帯によっても異なるが、例えば2波長各々検出可能な広波長域のセンサで、第1ダイクロイックミラーからA点までの光路中の複数点において両光20,23を感知し、その各位置で検出位置を同じにすることによって判断することができる。   The first dichroic mirror 41 reflects the misalignment detection light 23 incident through the first reflecting member 30A, and transmits the irradiation laser light 20 incident from the first light source 21. 23 is coaxial. “Coaxial” means that the optical axis of the irradiation laser beam 20 is coincident with the optical axis of the positional deviation detection light 23. The “optical axis” refers to the center line of the light beam passing from the light source to the target. In order to make the irradiation laser beam 20 and the displacement detection light 23 coaxial, the incident angles of the irradiation laser beam 20 and the displacement detection light 23 to the first dichroic mirror 41 are set to the first reflecting member 30A. It is necessary to adjust with. Further, whether or not the irradiation laser beam 20 and the positional deviation detection beam 23 are in a coaxial state by the first dichroic mirror 41 is determined downstream of the first dichroic mirror 41 from the first light source 21 to the irradiation target T. If a position having a distance equal to or longer than the optical path length is defined as point A, it varies depending on the wavelength band to be used. For example, it is a sensor in a wide wavelength range that can detect each of two wavelengths. It can be judged by sensing both lights 20 and 23 at a plurality of points in the optical path and making the detection positions the same at each position.

ダイクロイックミラーは、多層光学機能反射鏡や二色鏡とも呼ばれるものであり、特殊な光学素材を用いて製造された鏡の一種である。ダイクロイックミラーは、特定の波長の光を反射し、且つその他の波長の光を透過する特性を有する。本実施形態で用いられる第1ダイクロイックミラー41としては、上述のとおり、位置ずれ検出用光23を反射させるとともに、照射用レーザー光20を透過させる性質を有するものが用いられる。   The dichroic mirror is also called a multilayer optical functional reflecting mirror or dichroic mirror, and is a kind of mirror manufactured using a special optical material. The dichroic mirror has a characteristic of reflecting light of a specific wavelength and transmitting light of other wavelengths. As the first dichroic mirror 41 used in the present embodiment, as described above, a mirror having the property of reflecting the misalignment detection light 23 and transmitting the irradiation laser light 20 is used.

レーザー照射装置10は、第1ダイクロイックミラー41に加えて、第2ダイクロイックミラー42も備える。第2ダイクロイックミラー42には、第1第2ダイクロイックミラー41によって同軸の状態にされた照射用レーザー光20及び位置ずれ検出用光23が入射される。第2ダイクロイックミラー42は、照射用レーザー光20を照射対象物Tへ照射するための最終光学ユニット43の直前に配置される。「直前に配置される」とは、第2ダイクロイックミラー42と最終光学ユニット43との間に何らの光学部品も介在しないことをいう。また「最終光学ユニット」とは、照射対象物Tの直前に配置されるレンズ若しくはミラー又はガルバノスキャナなどレンズを含んだ光学ユニットなどのことをいう。   The laser irradiation device 10 includes a second dichroic mirror 42 in addition to the first dichroic mirror 41. The second dichroic mirror 42 receives the irradiation laser light 20 and the displacement detection light 23 which are made coaxial by the first second dichroic mirror 41. The second dichroic mirror 42 is disposed immediately before the final optical unit 43 for irradiating the irradiation target T with the irradiation laser beam 20. “Arranged immediately before” means that no optical component is interposed between the second dichroic mirror 42 and the final optical unit 43. The “final optical unit” means an optical unit including a lens such as a lens or a mirror or a galvano scanner disposed immediately before the irradiation target T.

最終光学ユニット43は、照射対象物Tの種類やレーザー光20の照射の目的に応じて種々のものを採用し得る。例えば後述するとおり、照射対象物Tが、熱可塑性の樹脂を含むものであり、レーザー光20の照射によって搬送過程の該照射対象物Tを一方向に沿って溶断・融着する場合には、最終光学ユニット43としてFθレンズを備えたガルバノスキャナを用いることができる。また、一般的なステージ移動式のレーザー加工機の場合には、最終光学ユニット43として任意の焦点距離を持つ凸レンズを用いることができる。   As the final optical unit 43, various types can be adopted depending on the type of the irradiation object T and the purpose of irradiation with the laser beam 20. For example, as will be described later, the irradiation target T includes a thermoplastic resin, and when the irradiation target T in the conveyance process is melted and fused along one direction by irradiation of the laser beam 20, As the final optical unit 43, a galvano scanner provided with an Fθ lens can be used. Further, in the case of a general stage moving laser processing machine, a convex lens having an arbitrary focal length can be used as the final optical unit 43.

第1ダイクロイックミラー41と第2ダイクロイックミラー42との間においては、照射用レーザー光20及び位置ずれ検出用光23は、同軸の状態で進行する。そして、同軸の状態で進行する照射用レーザー光20及び位置ずれ検出用光23は、第1ダイクロイックミラー41と第2ダイクロイックミラー42との間に配置された少なくとも1つの第2反射部材30Bによって進行方向が変更されて、第1ダイクロイックミラー41から第2ダイクロイックミラーへと導かれる。本実施形態では第2反射部材30Bは複数のミラー群33−36から構成される。   Between the first dichroic mirror 41 and the second dichroic mirror 42, the irradiation laser light 20 and the positional deviation detection light 23 travel in a coaxial state. The irradiation laser beam 20 and the positional deviation detection beam 23 traveling in a coaxial state travel by at least one second reflecting member 30B disposed between the first dichroic mirror 41 and the second dichroic mirror 42. The direction is changed and guided from the first dichroic mirror 41 to the second dichroic mirror. In the present embodiment, the second reflecting member 30B is composed of a plurality of mirror groups 33-36.

第1ダイクロイックミラー41と第2ダイクロイックミラー42との間の光路を、同軸の状態で進行する照射用レーザー光20及び位置ずれ検出用光23は、第2ダイクロイックミラー42に入射することによって、照射用レーザー光20と位置ずれ検出用光23とに分離される。この目的のために、第2ダイクロイックミラー42としては、位置ずれ検出用光23を反射させるとともに照射用レーザー光20を透過させるものが用いられる。位置ずれ検出用光23を反射させることが可能であるとともに、照射用レーザー光20を透過させることが可能である限り、第2ダイクロイックミラー42は、第1ダイクロイックミラー41と同種のものであってもよく、あるいは異種のものであってもよい。   The irradiation laser beam 20 and the misalignment detection beam 23 traveling in a coaxial state on the optical path between the first dichroic mirror 41 and the second dichroic mirror 42 are incident on the second dichroic mirror 42 to be irradiated. The laser beam 20 is separated into the misalignment detection beam 23. For this purpose, as the second dichroic mirror 42, a mirror that reflects the displacement detection light 23 and transmits the irradiation laser light 20 is used. The second dichroic mirror 42 is the same type as the first dichroic mirror 41 as long as it can reflect the misalignment detection light 23 and transmit the irradiation laser light 20. It may be different or different.

第2ダイクロイックミラー42に入射することで反射した位置ずれ検出用光23は、二次元検出器44によって受光される。二次元検出器44は、平面状の受光部を有する光学センサからなる。この平面状の受光部に対して直交する方向から位置ずれ検出用光23を入射させることで、該受光部における位置ずれ検出用光23の受光位置、すなわち受光座標を検出することができる。   The misalignment detection light 23 reflected by being incident on the second dichroic mirror 42 is received by the two-dimensional detector 44. The two-dimensional detector 44 is composed of an optical sensor having a planar light receiving part. By making the misalignment detection light 23 incident on the planar light receiving section from a direction orthogonal thereto, the light receiving position of the misalignment detecting light 23 in the light receiving section, that is, the light receiving coordinates can be detected.

二次元検出器44としては、従来この種の光学センサとして用いられてきたものと同様のものを用いることができる。例えば二次元検出器44として、例えば半導体位置検出素子(PSD)や電荷結合素子(CCD)などを用いることができる。二次元検出器44の分解能は、照射用レーザー光20の位置ずれ検出の精度に影響を及ぼすものであり、この分解能が高いほど、位置ずれ検出の精度が高くなる。また、二次元検出器44の分解能は、照射対象物Tに照射される照射用レーザー光20のビーム径や装置の必要精度に応じて決定すればよい。   As the two-dimensional detector 44, the same one as conventionally used as this kind of optical sensor can be used. For example, as the two-dimensional detector 44, for example, a semiconductor position detection element (PSD) or a charge coupled device (CCD) can be used. The resolution of the two-dimensional detector 44 affects the accuracy of detecting the positional deviation of the irradiation laser beam 20, and the higher the resolution, the higher the accuracy of detecting the positional deviation. The resolution of the two-dimensional detector 44 may be determined according to the beam diameter of the irradiation laser beam 20 irradiated on the irradiation target T and the required accuracy of the apparatus.

本実施形態のレーザー照射装置10においては、上述した第2反射部材30Bによって形成された光路内には、上述した各種の光学部材に加え、必要に応じてその他の光学部材が配置されていてもよい。例えば図1に示すレーザー照射装置10においては、第4ミラー34と第5ミラー35との間に、付加的な光学部材としてビームエキスパンダ45が配置されている。   In the laser irradiation apparatus 10 of this embodiment, in addition to the various optical members described above, other optical members may be arranged in the optical path formed by the second reflective member 30B described above as necessary. Good. For example, in the laser irradiation apparatus 10 shown in FIG. 1, a beam expander 45 is disposed as an additional optical member between the fourth mirror 34 and the fifth mirror 35.

以上の構成を有するレーザー照射装置10を用いて、照射対象物Tにレーザー光20を照射する方法について説明する。先ず、対象物Tに照射する照射用レーザー光20を第1光源21で発生させる。これとともに、位置ずれ検出用光23を第2光源22で発生させる。照射用レーザー光20としては、照射対象物Tの種類や照射の目的に応じて適切なものが用いられ、レーザー光20の第1光源21として、CO2レーザー、YAGレーザー、LDレーザー(半導体レーザー)、YVOレーザー、ファイバーレーザー等を用いることができる。 A method of irradiating the irradiation target T with the laser beam 20 using the laser irradiation apparatus 10 having the above configuration will be described. First, an irradiation laser beam 20 for irradiating the object T is generated by the first light source 21. At the same time, the misalignment detection light 23 is generated by the second light source 22. As the irradiation laser beam 20, an appropriate one is used according to the type of irradiation object T and the purpose of irradiation. As the first light source 21 of the laser beam 20, a CO 2 laser, a YAG laser, an LD laser (semiconductor laser). ), YVO 4 laser, fiber laser or the like can be used.

一方、位置ずれ検出用光23は、第1及び第2ダイクロイックミラーによって照射用レーザー光20と分離可能な波長を有するものであれば、レーザー光に限られない。例えば、位置ずれ検出用光23の第2光源22として、レーザーダイオード、He−Neレーザー、発光ダイオード(LED)やハロゲン光源などを用いることができる。発光ダイオード(LED)やハロゲン光源を用いる場合には、レンズ系を調整して光が拡散しないようにすることが好ましい。光学系の距離が長い場合には、レーザーダイオードやHe−Neレーザーなどのレーザー光源を用いることが有利である。また位置ずれ検出用光23の波長は、アライメントがし易いように、例えば400nm以上700nm以下の可視光領域とすることが好ましい。一方、照射用レーザー光20に可視光領域の波長を用いる場合は、遠赤外領域など可視領域とは異なる波長を用いることが好ましい。   On the other hand, the misalignment detection light 23 is not limited to laser light as long as it has a wavelength that can be separated from the irradiation laser light 20 by the first and second dichroic mirrors. For example, a laser diode, a He—Ne laser, a light emitting diode (LED), a halogen light source, or the like can be used as the second light source 22 of the positional deviation detection light 23. When using a light emitting diode (LED) or a halogen light source, it is preferable to adjust the lens system to prevent light from diffusing. When the distance of the optical system is long, it is advantageous to use a laser light source such as a laser diode or a He—Ne laser. Further, the wavelength of the misalignment detection light 23 is preferably in the visible light region of, for example, 400 nm or more and 700 nm or less so that alignment is easy. On the other hand, when a wavelength in the visible light region is used for the irradiation laser beam 20, it is preferable to use a wavelength different from the visible region such as the far infrared region.

第2光源22で発生した位置ずれ検出用光23は、第1ミラー31及び第2ミラー32から構成される第1反射部材30Aによって進行方向が変更されて、第1ダイクロイックミラー41に入射して反射する。一方、第1光源21で発生した照射用レーザー光20は、直接に第1ダイクロイックミラー41に入射して、これを透過する。それによって、照射用レーザー光20及び位置ずれ検出用光23は同軸の状態になる。   The misalignment detection light 23 generated by the second light source 22 is changed in the traveling direction by the first reflecting member 30 </ b> A composed of the first mirror 31 and the second mirror 32 and is incident on the first dichroic mirror 41. reflect. On the other hand, the irradiation laser beam 20 generated by the first light source 21 directly enters the first dichroic mirror 41 and passes therethrough. As a result, the irradiation laser beam 20 and the positional deviation detection beam 23 are coaxial.

同軸の状態になった照射用レーザー光20及び位置ずれ検出用光23は、複数のミラー33−36から構成される第2反射部材30Bによって形成される光路を進行する。必要に応じ、この光路内に配置された光学部材、例えばビームエキスパンダ45を通過して、収差の発生を抑える等の光学的な処理が施される。   The irradiation laser beam 20 and the positional deviation detection beam 23 in the coaxial state travel on an optical path formed by the second reflecting member 30B composed of a plurality of mirrors 33-36. If necessary, optical processing such as suppression of aberrations is performed by passing through an optical member disposed in the optical path, for example, a beam expander 45.

第2反射部材30Bによって形成される光路を進行してきた照射用レーザー光20及び位置ずれ検出用光23は、次いで第2ダイクロイックミラー42に入射する。第2ダイクロイックミラー42は、上述のとおり、照射用レーザー光20を反射し、且つ照射用レーザー光20を透過させるものであるから、同軸の状態で第2ダイクロイックミラー42に入射した照射用レーザー光20及び位置ずれ検出用光23のうち、位置ずれ検出用光23は、第2ダイクロイックミラー42によって反射され、これを透過しない。第2ダイクロイックミラー42によって反射された位置ずれ検出用光23は、反射方向に配置された二次元検出器44によって受光される。一方、照射用レーザー光20は、第2ダイクロイックミラー42によって反射されず、これを透過する。そして、照射用レーザー光20のみが最終光学ユニット43に導かれる。   The irradiation laser beam 20 and the positional deviation detection beam 23 that have traveled along the optical path formed by the second reflecting member 30B are then incident on the second dichroic mirror 42. As described above, the second dichroic mirror 42 reflects the irradiation laser light 20 and transmits the irradiation laser light 20, so that the irradiation laser light incident on the second dichroic mirror 42 in a coaxial state is used. 20 and the misalignment detection light 23, the misalignment detection light 23 is reflected by the second dichroic mirror 42 and does not pass through it. The misalignment detection light 23 reflected by the second dichroic mirror 42 is received by a two-dimensional detector 44 arranged in the reflection direction. On the other hand, the irradiation laser beam 20 is not reflected by the second dichroic mirror 42 but passes through it. Then, only the irradiation laser beam 20 is guided to the final optical unit 43.

最終光学ユニット43に導かれた照射用レーザー光20は、該レンズ43を通過して焦点合わせ等の光学的処理が施された後に、照射対象物Tに向けて照射される。通常は、レーザー光20を照射対象物Tに本照射するのに先立ち、照射箇所の位置合わせのために事前照射を行い、レーザー光20の光軸のアライメントを行っているので、本照射時には、照射対象物Tの照射予定位置に正しくレーザー光20が照射される。しかし場合によっては、レーザー発振器内や、光路上に配置された光学部材の温度変化に起因して、予めアライメントされた光軸が経時的に変化したり、装置10の経年変化によってレーザー光20光軸がずれたりすることがある。その場合には、照射対象物Tの照射予定位置に正しくレーザー光20が照射されず、照射位置にずれが生じる。この位置ずれが発生したか否かを、第2ダイクロイックミラー42によって反射され、二次元検出器44に入射した位置ずれ検出用光23を用いて判断する。その具体的な手法は以下のとおりである。   The irradiation laser light 20 guided to the final optical unit 43 passes through the lens 43 and is subjected to optical processing such as focusing, and then irradiated toward the irradiation target T. Usually, prior to the main irradiation of the irradiation target T with the laser beam 20, the irradiation is performed in advance for alignment of the irradiated portion, and the alignment of the optical axis of the laser beam 20 is performed. The laser beam 20 is correctly applied to the irradiation target position of the irradiation target T. However, depending on the case, the optical axis aligned in advance may change over time due to the temperature change of the optical member arranged in the laser oscillator or on the optical path, or the laser beam 20 light may change due to the aging of the apparatus 10. The axis may shift. In that case, the irradiation target position of the irradiation target T is not correctly irradiated with the laser beam 20, and the irradiation position is shifted. Whether or not this misalignment has occurred is determined using misalignment detection light 23 reflected by the second dichroic mirror 42 and incident on the two-dimensional detector 44. The specific method is as follows.

二次元検出器44は上述のとおり、平面状の受光部(図示せず)を有し、該受光部が、これに入射する位置ずれ検出用光23と直交するように配置されている。この平面状の受光部に対して直交する方向から位置ずれ検出用光23を入射させることで、該受光部における位置ずれ検出用光23の受光位置、すなわち受光座標を検出する。この受光座標のことを「検出受光座標」という。検出受光座標は、照射対象物Tにレーザー光20を照射し続けている間にわたって継続的に求められるか、又は所定の間隔を置いて断続的に求められる。   As described above, the two-dimensional detector 44 has a planar light receiving portion (not shown), and the light receiving portion is arranged so as to be orthogonal to the misalignment detection light 23 incident thereon. By making the positional deviation detection light 23 incident on the planar light receiving part from a direction orthogonal thereto, the light receiving position of the positional deviation detection light 23 in the light receiving part, that is, the light receiving coordinates are detected. This light receiving coordinate is referred to as “detected light receiving coordinate”. The detected light receiving coordinates are obtained continuously while the irradiation target T is continuously irradiated with the laser beam 20, or are obtained intermittently at predetermined intervals.

先に述べたとおり、レーザー光20を照射対象物Tに本照射するのに先立ち、照射箇所の位置合わせのために事前照射を行い、レーザー光20の光軸のアライメントを行う。このときに、レーザー光20に加えて、位置ずれ検出用光23も同軸の状態で照射し、該位置ずれ検出用光23を二次元検出器44で受光して、アライメント状態での受光座標を予め検出しておく。この受光座標のことを「標準受光座標」という。そして、上述した検出受光座標を、この標準受光座標と比較し、座標のずれが、予め設定したおいた閾値内である場合には、照射用レーザー光20が対象物Tの照射予定位置に正しく照射されていると判断する。逆に、検出受光座標と標準受光座標とのずれが、閾値を超えた場合には、照射用レーザー光20が対象物Tの照射予定位置に正しく照射されていないと判断し、アラートを発生させることで、使用者に光軸調整の必要性を知らせることができる。   As described above, prior to the main irradiation of the laser beam 20 to the irradiation object T, prior irradiation is performed for alignment of the irradiated portion, and the optical axis of the laser beam 20 is aligned. At this time, in addition to the laser beam 20, the misalignment detection light 23 is also emitted in a coaxial state, the misalignment detection light 23 is received by the two-dimensional detector 44, and the received light coordinates in the alignment state are obtained. It is detected in advance. These light receiving coordinates are referred to as “standard light receiving coordinates”. Then, the detected light receiving coordinates described above are compared with the standard light receiving coordinates, and if the deviation of the coordinates is within a preset threshold value, the irradiation laser beam 20 is correctly positioned at the planned irradiation position of the object T. Judged to be irradiated. Conversely, if the deviation between the detected light receiving coordinates and the standard light receiving coordinates exceeds a threshold value, it is determined that the irradiation laser beam 20 is not correctly irradiated on the irradiation target position of the object T, and an alert is generated. Thus, it is possible to inform the user of the necessity of adjusting the optical axis.

上述の検出受光座標及び標準受光座標はいずれも二次元座標である。検出受光座標を(x,y)とし、標準受光座標を(x,y)とした場合、両座標のずれが閾値内であるとは、閾値の値をLとすると、√{(x−x+(y−y}<Lであることをいう。一方、両座標のずれが閾値を超えるとは、閾値の値をLとすると、√{(x−x+(y−y}≧Lであることをいう。 The detected light receiving coordinates and the standard light receiving coordinates are both two-dimensional coordinates. When the detected light receiving coordinates are (x d , y d ) and the standard light receiving coordinates are (x s , y s ), the deviation between the two coordinates is within the threshold value. If the threshold value is L, √ { (x d -x s) 2 + (y d -y s) 2} refers to a <L. On the other hand, the difference between the two coordinates exceeding the threshold means that {L (x d −x s ) 2 + (y d −y s ) 2 } ≧ L, where L is the threshold value.

以上の手法によれば、照射用レーザー光20の光軸のずれを、該照射用レーザー光20とは別の光である位置ずれ検出用光23を用いて検出するので、照射用レーザー光20にエネルギーロスを生じさせることなく、該照射用レーザー光20の光軸のずれを容易に検出することができる。   According to the above method, since the deviation of the optical axis of the irradiation laser light 20 is detected by using the positional deviation detection light 23 which is light different from the irradiation laser light 20, the irradiation laser light 20 It is possible to easily detect the deviation of the optical axis of the irradiation laser beam 20 without causing any energy loss.

照射用レーザー光20の光軸にずれが生じたと判断した場合には、照射用レーザー光20の光路内に設置された反射部材、特に第1ダイクロイックミラー41と第2ダイクロイックミラー42との間に配置された第2反射部材30Bを構成する各ミラー33−36の向きを調整してアライメントを行う。このアライメントを行う場合、一般に、どの光学系が原因で光軸にずれが生じたかの判断が難しいので、複数の光学系を使用する際、再度最上流からアライメントし直さなければならないことが多い。しかし本発明においては、照射用レーザー光20の光軸調整を補助するための光軸調整補助具を用いることで、容易に光軸のアライメント状態を復旧することができるレーザー照射装置及びレーザー照射方法も提供される。その実施形態を図2に示す。   When it is determined that a deviation has occurred in the optical axis of the irradiation laser beam 20, a reflection member installed in the optical path of the irradiation laser beam 20, particularly between the first dichroic mirror 41 and the second dichroic mirror 42. Alignment is performed by adjusting the direction of each mirror 33-36 constituting the second reflecting member 30B. When this alignment is performed, it is generally difficult to determine which optical system has caused the optical axis shift. Therefore, when using a plurality of optical systems, it is often necessary to realign from the most upstream side. However, in the present invention, a laser irradiation apparatus and a laser irradiation method capable of easily restoring the alignment state of the optical axis by using an optical axis adjustment assisting tool for assisting the optical axis adjustment of the irradiation laser beam 20. Is also provided. The embodiment is shown in FIG.

図2に示す実施形態のレーザー照射装置10Aは、図1に示すレーザー照射装置10が更に光軸調整補助具50を具備するものである。したがって、本実施形態においては、光軸調整補助具50及びこれを用いた照射用レーザー光20の光軸調整法を中心に説明することとし、それ以外の点については、図1に示す実施形態に関する説明が本実施形態にも適用される。   The laser irradiation apparatus 10A according to the embodiment shown in FIG. 2 is such that the laser irradiation apparatus 10 shown in FIG. Therefore, in this embodiment, the optical axis adjustment assisting tool 50 and the optical axis adjustment method of the irradiation laser beam 20 using the same will be mainly described, and other points are shown in the embodiment shown in FIG. The description regarding is also applied to this embodiment.

光軸調整補助具50は、ミラー等の光学部材からなる反射部材51と、二次元検出器52とが、ハウジング53内に収容されて構成されており、それによって反射部材51と二次元検出器52とは一体化された構造になっている。光軸調整補助具50は、少なくとも1つの第2反射部材30Bと、該第2反射部材30Bの直ぐ下流に位置する光学部材と間の位置に着脱自在に配置可能になっている。「少なくとも1つの第2反射部材30Bと、第2反射部材30Bの直ぐ下流に位置する光学部材と間」とは、第2反射部材30Bが1つの反射部材から構成されている場合には、1つの該反射部材と、その直ぐ下流に位置する光学部材との間のことをいう。一方、第2反射部材30Bが2以上の複数の反射部材から構成されている場合には、複数の第2反射部材のうちの任意の1つの第2反射部材と、その第2反射部材の直ぐ下流に位置する別の第2反射部材との間のことをいうか、又は複数の該反射部材のうちの最下流に位置する第2反射部材と、その直ぐ下流に位置する光学部材との間のことをいう。レーザー照射装置10Aにおける第2反射部材30Bは、複数のミラー33−36から構成されているので、光軸調整補助具50は、ミラー33−36のうち、上下流で隣り合う2つのミラー間の位置、又はミラー36と第2ダイクロイックミラー42との間の位置に着脱自在に配置可能になっている。図2に示す実施形態では、第3ミラー33と第4ミラー34との間の位置に光軸調整補助具50が配置されている状態が示されている。   The optical axis adjustment assisting tool 50 includes a reflecting member 51 made of an optical member such as a mirror and a two-dimensional detector 52 accommodated in a housing 53, whereby the reflecting member 51 and the two-dimensional detector are arranged. 52 has an integrated structure. The optical axis adjustment assisting tool 50 can be detachably disposed at a position between at least one second reflecting member 30B and an optical member located immediately downstream of the second reflecting member 30B. “Between at least one second reflecting member 30B and an optical member located immediately downstream of the second reflecting member 30B” is 1 when the second reflecting member 30B is composed of one reflecting member. It means between the two reflecting members and the optical member located immediately downstream thereof. On the other hand, when the second reflecting member 30B is composed of two or more reflecting members, any one second reflecting member among the plurality of second reflecting members and the second reflecting member immediately. It means between another second reflecting member located downstream, or between the second reflecting member located on the most downstream side of the plurality of reflecting members and the optical member located immediately downstream thereof. I mean. Since the second reflecting member 30B in the laser irradiation apparatus 10A is composed of a plurality of mirrors 33-36, the optical axis adjustment assisting tool 50 is provided between two mirrors 33-36 adjacent to each other upstream and downstream. It can be detachably disposed at a position or a position between the mirror 36 and the second dichroic mirror 42. In the embodiment shown in FIG. 2, a state in which the optical axis adjustment assisting tool 50 is arranged at a position between the third mirror 33 and the fourth mirror 34 is shown.

光軸調整補助具50における反射部材51は、該光軸調整補助具50が第3ミラー33と第4ミラー34との間の位置に配された状態において、同軸の状態の照射用レーザー光20及び位置ずれ検出用光23の光路内に位置して該光路を切り替えて、該光軸調整補助具50における二次元検出器52に導くようになっている。したがって、該光路内に光軸調整補助具50が配置されると、ダイクロイックミラー41によって同軸になった照射用レーザー光20及び位置ずれ検出用光23は、第3ミラー33及び反射部材51によって進行方向が変更されて二次元検出器52に導かれ、第4ミラー34以降の第2反射部材30Bへは到達しないようになっている。   The reflecting member 51 in the optical axis adjustment assisting tool 50 is coaxial with the irradiation laser light 20 in a state where the optical axis adjustment assisting tool 50 is disposed at a position between the third mirror 33 and the fourth mirror 34. In addition, the optical path is switched within the optical path of the misalignment detection light 23 and guided to the two-dimensional detector 52 in the optical axis adjustment auxiliary tool 50. Therefore, when the optical axis adjustment assisting tool 50 is disposed in the optical path, the irradiation laser beam 20 and the positional deviation detection light 23 that are coaxial with the dichroic mirror 41 travel through the third mirror 33 and the reflecting member 51. The direction is changed and guided to the two-dimensional detector 52 so that it does not reach the second reflecting member 30B after the fourth mirror 34.

光軸調整補助具50を用いた照射用レーザー光20の光軸調整は次の手順で行われる。レーザー光20を照射対象物Tに本照射するのに先立ち、対象物Tにおけるレーザー光20の照射箇所の位置合わせのために事前照射を行い、第1ダイクロイックミラー41と第2ダイクロイックミラー42との間の光路で同軸の状態の照射用レーザー光20及び位置ずれ検出用光23が予めアライメントされた状態にするための調整を行う。この調整は、第2反射部材30Bを構成する各ミラー33−36の向きを調整することで行われる。アライメントが完了したら、このアライメントされた状態下に、第2反射部材30Bの一つである第3ミラー33と第4ミラー34との間の位置に光軸調整補助具50を配置する。光軸調整補助具50の配置位置は、第3ミラー33と第4ミラー34との間のうち、第4ミラー34寄りの位置とすることが、光軸のずれを一層敏感に検知できることから好ましい(以下に述べる第4ミラー34と第5ミラー35との間、第5ミラー35と第6ミラー36との間、及び第6ミラー36と第2ダイクロイックミラー42との間においても同じ)。これとともに、第2光源22によって位置ずれ検出用光23のみを発生させる。発生した位置ずれ検出用光23は、第1反射部材30Aを構成する第1及び第2ミラー31,32、第1ダイクロイックミラー41、並びに第2反射部材30Bを構成する第3ミラー33を経て、光軸調整補助具50に入射する。光軸調整補助具50に入射した位置ずれ検出用光23は、該光軸調整補助具50内に配置された反射部材51によって反射して進行方向が変更されて、同じく光軸調整補助具50内に配置された二次元検出器52で受光する。このようにして、アライメント状態での第3ミラー33と第4ミラー34との間の位置における受光座標を予め検出し、それを記憶しておく。この受光座標のことを「第3ミラー標準受光座標」という。   The optical axis adjustment of the irradiation laser beam 20 using the optical axis adjustment auxiliary tool 50 is performed according to the following procedure. Prior to the main irradiation of the irradiation target T with the laser beam 20, pre-irradiation is performed to align the irradiation position of the laser beam 20 on the target T, and the first dichroic mirror 41 and the second dichroic mirror 42 are aligned. Adjustment is performed so that the irradiation laser beam 20 and the positional deviation detection beam 23 that are coaxial in the optical path between them are aligned in advance. This adjustment is performed by adjusting the direction of each mirror 33-36 which comprises the 2nd reflective member 30B. When the alignment is completed, the optical axis adjustment assisting tool 50 is disposed at a position between the third mirror 33 and the fourth mirror 34 which are one of the second reflecting members 30B under this aligned state. The arrangement position of the optical axis adjustment assisting tool 50 is preferably a position closer to the fourth mirror 34 between the third mirror 33 and the fourth mirror 34, since the deviation of the optical axis can be detected more sensitively. (The same applies between the fourth mirror 34 and the fifth mirror 35 described below, between the fifth mirror 35 and the sixth mirror 36, and between the sixth mirror 36 and the second dichroic mirror 42). At the same time, only the misalignment detection light 23 is generated by the second light source 22. The generated misalignment detection light 23 passes through the first and second mirrors 31 and 32 constituting the first reflecting member 30A, the first dichroic mirror 41, and the third mirror 33 constituting the second reflecting member 30B. The light enters the optical axis adjustment aid 50. The misalignment detection light 23 incident on the optical axis adjustment assisting tool 50 is reflected by the reflecting member 51 disposed in the optical axis adjustment assisting tool 50 and its traveling direction is changed. The light is received by the two-dimensional detector 52 arranged inside. In this way, the light receiving coordinates at the position between the third mirror 33 and the fourth mirror 34 in the alignment state are detected in advance and stored. This light receiving coordinate is referred to as “third mirror standard light receiving coordinate”.

先に述べた二次元検出器44による検出受光座標と、標準受光座標との比較の結果、照射用レーザー光20の光軸にずれが生じていると判断された場合には、照射用レーザー光20及び位置ずれ検出用光23の照射を中止し、第2反射部材30Bの一つである第3ミラー33と第4ミラー34との間の位置に光軸調整補助具50を配置する。これとともに、第2光源22によって位置ずれ検出用光23のみを発生させる。そして、発生した位置ずれ検出用光23を、光軸調整補助具50内に配置された二次元検出器52で受光する。それによって、二次元検出器52の受光部における位置ずれ検出用光23の受光位置である受光座標を検出する。この受光座標のことを「第3ミラー検出受光座標」という。第3ミラー検出受光座標は、照射用レーザー光20の光軸を調整している間にわたって継続的に求められるか、又は所定の間隔を置いて断続的に求められる。   If it is determined that the optical axis of the irradiation laser beam 20 is deviated as a result of the comparison between the detected light receiving coordinates by the two-dimensional detector 44 described above and the standard light receiving coordinates, the irradiation laser beam 20 and the displacement detection light 23 are stopped, and the optical axis adjustment assisting tool 50 is disposed at a position between the third mirror 33 and the fourth mirror 34 which are one of the second reflecting members 30B. At the same time, only the misalignment detection light 23 is generated by the second light source 22. The generated misalignment detection light 23 is received by the two-dimensional detector 52 disposed in the optical axis adjustment auxiliary tool 50. Thereby, the light receiving coordinates which are the light receiving position of the positional deviation detecting light 23 in the light receiving portion of the two-dimensional detector 52 are detected. This light receiving coordinate is referred to as “third mirror detected light receiving coordinate”. The third mirror detection light receiving coordinate is obtained continuously while adjusting the optical axis of the irradiation laser beam 20, or is obtained intermittently at predetermined intervals.

照射用レーザー光20の光軸の調整は、第3ミラー検出受光座標を、予め記憶しておいた第3ミラー標準受光座標と比較することで行う。具体的には、第3ミラー検出受光座標の値が、予め記憶しておいた第3ミラー標準受光座標の値に復帰するように、光軸調整補助具50の直ぐ上流に配置された第2反射部材30Bである第3ミラー33の向きを調整する。この調整は人手で又は機械的に自動化して行うことができる。先に述べたとおり、照射用レーザー光20と位置ずれ検出光23とは、既に同軸にアライメントされているので、位置ずれ検出光23に関してこの確認ないし調整を行えば、結果的に照射用レーザー光20の光軸が、どの光学系が原因で位置ずれが起きているのかを特定し、その光学系だけを調整することによって、予め調整しておいたアライメント状態に復帰する。したがって、この後は、レーザー照射装置10を通常の状態で運転すれば、対象物Tの照射予定位置に、照射用レーザー光20が適正に照射される。このように、本実施形態によれば、どの光学系が原因で位置ずれが起きているのかを、上流から順に調べることで特定することができ、ずれが生じていない他の光学系を不必要に動かすことなく、その光学系だけを調整し復旧できるという利点がある。   The adjustment of the optical axis of the irradiation laser beam 20 is performed by comparing the third mirror detection light receiving coordinates with the third mirror standard light receiving coordinates stored in advance. Specifically, a second mirror disposed immediately upstream of the optical axis adjustment assisting tool 50 so that the value of the third mirror detection light receiving coordinate returns to the value of the third mirror standard light receiving coordinate stored in advance. The direction of the third mirror 33 that is the reflecting member 30B is adjusted. This adjustment can be done manually or mechanically automated. As described above, since the irradiation laser beam 20 and the misregistration detection beam 23 are already aligned coaxially, if this confirmation or adjustment is performed with respect to the misregistration detection beam 23, the irradiation laser beam is consequently obtained. By identifying which optical system causes the positional deviation of the 20 optical axes, and adjusting only that optical system, the alignment state that has been adjusted in advance is restored. Therefore, after that, if the laser irradiation apparatus 10 is operated in a normal state, the irradiation laser beam 20 is appropriately irradiated to the irradiation target position of the object T. As described above, according to the present embodiment, it is possible to identify which optical system is causing the positional deviation by sequentially examining from the upstream side, and other optical systems in which no deviation occurs are unnecessary. There is an advantage that only the optical system can be adjusted and restored without moving it.

光軸調整補助具50を用いた照射用レーザー光20の光軸調整においては、該光軸調整補助具50を光路内に容易に着脱自在に配置可能にすることが有利である。これに加えて、配置状態での位置ずれが生じないようにすることも有利である。これらの観点から、光軸調整補助具50を第2反射部材30Bと、第2反射部材30Bの下流に位置する光学部材と間の位置に配するときの位置決めが可能な位置決め部材を、第1ダイクロイックミラー41と第2ダイクロイックミラー42との間の光路に設けることが好ましい。本実施形態においては、図2における紙面と平行な面を有する支持板(図示せず)から複数の位置決めピン54aないし54dを突設させ、これらの位置決めピン54aないし54dを用いて光軸調整補助具50を着脱自在に光路内に保持している。   In the optical axis adjustment of the irradiation laser beam 20 using the optical axis adjustment assisting tool 50, it is advantageous that the optical axis adjustment assisting tool 50 can be easily and detachably disposed in the optical path. In addition to this, it is also advantageous to prevent misalignment in the arrangement state. From these viewpoints, the positioning member capable of positioning when the optical axis adjustment assisting tool 50 is disposed at a position between the second reflecting member 30B and the optical member positioned downstream of the second reflecting member 30B is provided as the first member. It is preferable to provide the optical path between the dichroic mirror 41 and the second dichroic mirror 42. In the present embodiment, a plurality of positioning pins 54a to 54d are projected from a support plate (not shown) having a plane parallel to the paper surface in FIG. 2, and optical axis adjustment assistance is performed using these positioning pins 54a to 54d. The tool 50 is detachably held in the optical path.

以上の方法によって、照射用レーザー光20に生じた光軸のずれを修正して、第1ダイクロイックミラー41と第3ミラー33との間の光路において照射用レーザー光20の光軸をアライメント状態に復帰させることができる。しかし、場合によっては、第1ダイクロイックミラー41と第3ミラー33との間では照射用レーザー光20の光軸にずれは生じていないが、第3ミラー33よりも下流の光路において照射用レーザー光20の光軸にずれが生じている場合がある。この場合には、図2に示す操作を行って第1ダイクロイックミラー41と第3ミラー33との間の光路において照射用レーザー光20の光軸をアライメント状態にした後に、図3に示すとおり、光軸調整補助具50の配置位置を、第4ミラー34と第5ミラー35との間の位置に配置して、図2に示す操作と同様の操作を行えばよい。詳細は以下のとおりである。   By the above method, the deviation of the optical axis generated in the irradiation laser beam 20 is corrected, and the optical axis of the irradiation laser beam 20 is brought into the alignment state in the optical path between the first dichroic mirror 41 and the third mirror 33. Can be restored. However, in some cases, there is no deviation in the optical axis of the irradiation laser beam 20 between the first dichroic mirror 41 and the third mirror 33, but the irradiation laser beam in the optical path downstream of the third mirror 33. There may be a deviation in the 20 optical axes. In this case, after performing the operation shown in FIG. 2 to bring the optical axis of the irradiation laser beam 20 into the alignment state in the optical path between the first dichroic mirror 41 and the third mirror 33, as shown in FIG. The arrangement position of the optical axis adjustment assisting tool 50 may be arranged at a position between the fourth mirror 34 and the fifth mirror 35, and the same operation as that shown in FIG. Details are as follows.

先ず、図2に示す操作と同様に、レーザー光20を照射対象物Tに本照射するのに先立ち、照射箇所の位置合わせのために事前照射を行い、第1ダイクロイックミラー41と第2ダイクロイックミラー42との間の光路で、同軸の状態の照射用レーザー光20及び位置ずれ検出用光23が予めアライメントされた状態に調整を行う。アライメントが完了したら、このアライメントされた状態下に、第4ミラー34と第5ミラー35との間の位置に光軸調整補助具50を配置する。これとともに、第2光源22によって位置ずれ検出用光23のみを発生させる。発生した位置ずれ検出用光23は、光軸調整補助具50に入射する。光軸調整補助具50に入射した位置ずれ検出用光23は、光軸調整補助具50内に配置された二次元検出器52で受光される。このようにして、アライメント状態での第4ミラー34と第5ミラー35との間の位置における受光座標を予め検出し、それを記憶しておく。この受光座標のことを「第4ミラー標準受光座標」という。   First, similarly to the operation shown in FIG. 2, prior to the main irradiation of the laser beam 20 to the irradiation target T, the irradiation is performed in advance for alignment of the irradiation position, and the first dichroic mirror 41 and the second dichroic mirror are performed. In the optical path to 42, adjustment is performed so that the irradiation laser beam 20 and the displacement detection light 23 in a coaxial state are aligned in advance. When the alignment is completed, the optical axis adjustment assisting tool 50 is disposed at a position between the fourth mirror 34 and the fifth mirror 35 under the aligned state. At the same time, only the misalignment detection light 23 is generated by the second light source 22. The generated misalignment detection light 23 enters the optical axis adjustment aid 50. The misalignment detection light 23 incident on the optical axis adjustment assisting tool 50 is received by a two-dimensional detector 52 disposed in the optical axis adjustment assisting tool 50. In this way, the light receiving coordinates at the position between the fourth mirror 34 and the fifth mirror 35 in the alignment state are detected in advance and stored. This light receiving coordinate is referred to as “fourth mirror standard light receiving coordinate”.

レーザー照射装置10Aを動作させ、照射用レーザー光20及び位置ずれ検出用光23を照射している間に、照射用レーザー光20の光軸にずれが生じている判断された場合には、照射用レーザー光20及び位置ずれ検出用光23の照射を中止し、第4ミラー34と第5ミラー35との間の位置に光軸調整補助具50を配置する。これとともに、第2光源22によって位置ずれ検出用光23のみを発生させる。そして、発生した位置ずれ検出用光23を、光軸調整補助具50内に配置された二次元検出器52で受光する。それによって、二次元検出器52の受光部における位置ずれ検出用光23の受光位置の受光座標である第4ミラー検出受光座標を求める。そして、第4ミラー検出受光座標を、予め記憶しておいた第4ミラー標準受光座標と比較することで、照射用レーザー光20の光軸を調整する。具体的には、第4ミラー検出受光座標の値が、予め記憶しておいた第4ミラー標準受光座標の値に復帰するように、第4ミラー34の向きを調整する。   When it is determined that a deviation has occurred in the optical axis of the irradiation laser beam 20 while the laser irradiation apparatus 10A is operated and the irradiation laser beam 20 and the positional deviation detection beam 23 are irradiated, irradiation is performed. Irradiation of the laser beam 20 and the misalignment detection light 23 is stopped, and the optical axis adjustment assisting tool 50 is disposed at a position between the fourth mirror 34 and the fifth mirror 35. At the same time, only the misalignment detection light 23 is generated by the second light source 22. The generated misalignment detection light 23 is received by the two-dimensional detector 52 disposed in the optical axis adjustment auxiliary tool 50. As a result, a fourth mirror detection light receiving coordinate which is a light receiving coordinate of the light receiving position of the positional deviation detecting light 23 in the light receiving unit of the two-dimensional detector 52 is obtained. Then, the optical axis of the irradiation laser beam 20 is adjusted by comparing the fourth mirror detection light receiving coordinates with the previously stored fourth mirror standard light receiving coordinates. Specifically, the direction of the fourth mirror 34 is adjusted so that the value of the fourth mirror detection light receiving coordinate returns to the value of the fourth mirror standard light receiving coordinate stored in advance.

図3に示す操作は、第4ミラー34と第5ミラー35との間に光軸調整補助具50を配置して、第1ダイクロイックミラー41から第4ミラー34までの間の光路での、照射用レーザー光20の光軸のアライメントを行うものであったのに対し、図4に示す操作は、第5ミラー35と第6ミラー36との間に光軸調整補助具50を配置して、第1ダイクロイックミラー41から第5ミラー35までの間の光路での、照射用レーザー光20の光軸のアライメントを行うものである。図4に示す操作を行う場合には、それに先立ち図2に示す操作を行って第1ダイクロイックミラー41と第3ミラー33との間の光路において照射用レーザー光20の光軸をアライメント状態に調整し、引き続き図3に示す操作を行って第3ミラー33と第4ミラー34との間の光路において照射用レーザー光20の光軸をアライメント状態に調整しておく。然る後、図4に示す操作を、図3に示す操作と同様に行う。   In the operation shown in FIG. 3, the optical axis adjustment auxiliary tool 50 is disposed between the fourth mirror 34 and the fifth mirror 35, and irradiation is performed in the optical path between the first dichroic mirror 41 and the fourth mirror 34. 4, the operation shown in FIG. 4 is performed by placing an optical axis adjustment auxiliary tool 50 between the fifth mirror 35 and the sixth mirror 36. The optical axis of the irradiation laser beam 20 is aligned in the optical path from the first dichroic mirror 41 to the fifth mirror 35. When the operation shown in FIG. 4 is performed, prior to that, the operation shown in FIG. 2 is performed to adjust the optical axis of the irradiation laser beam 20 to the alignment state in the optical path between the first dichroic mirror 41 and the third mirror 33. Subsequently, the operation shown in FIG. 3 is performed to adjust the optical axis of the irradiation laser beam 20 in the alignment state in the optical path between the third mirror 33 and the fourth mirror 34. Thereafter, the operation shown in FIG. 4 is performed in the same manner as the operation shown in FIG.

以上の光軸調整補助具50を用い、図2ないし図4に示す方法で照射用レーザー光20の光軸のアライメント状態を復旧させるときには、それに先立ち、位置ずれ検出用光23の第2光源22から第2反射部材30Bまでの間の光路、具体的には、第2光源22から第3ミラー33までの間の光路において、位置ずれ検出用光23の光軸をアライメント状態にしておくことが好ましい。この操作を行うことで、アライメント状態にずれが生じた照射用レーザー光20の光軸を、確実に復旧することができる。具体的には、以下の操作を行う。   When the alignment state of the optical axis of the irradiation laser beam 20 is restored by the method shown in FIGS. 2 to 4 using the optical axis adjustment assisting tool 50 described above, prior to that, the second light source 22 of the misalignment detection light 23 is used. In the optical path from the second reflecting member 30B to the second reflecting member 30B, specifically, in the optical path from the second light source 22 to the third mirror 33, the optical axis of the misalignment detection light 23 may be in an aligned state. preferable. By performing this operation, it is possible to reliably restore the optical axis of the irradiation laser beam 20 in which the alignment state is shifted. Specifically, the following operation is performed.

先ず、照射用レーザー光20を照射対象物Tに本照射するのに先立ち、対象物Tにおけるレーザー光20の照射箇所の位置合わせのために事前照射を行い、第1ダイクロイックミラー41と第2ダイクロイックミラー42との間の光路で同軸の状態の照射用レーザー光20及び位置ずれ検出用光23が予めアライメントされた状態にするための調整を行う。アライメントが完了したら、このアライメントされた状態下に、図5に示すとおり、第2光源22と第1ミラー31との間の位置に光軸調整補助具50を配置する。これとともに、第2光源22によって位置ずれ検出用光23を発生させる。発生した位置ずれ検出用光23を光軸調整補助具50内に配置された二次元検出器52で受光する。このようにして、アライメント状態での第2光源22と第1ミラー31との間の位置における受光座標を予め検出し、それを記憶しておく。この受光座標のことを「第1ミラー標準受光座標」という。   First, prior to the main irradiation of the irradiation target T with the irradiation laser beam 20, pre-irradiation is performed for alignment of the irradiation position of the laser beam 20 on the target T, and the first dichroic mirror 41 and the second dichroic are aligned. Adjustment is performed so that the irradiation laser light 20 and the positional deviation detection light 23 in the coaxial state in the optical path to the mirror 42 are aligned in advance. When the alignment is completed, the optical axis adjustment assisting tool 50 is disposed at a position between the second light source 22 and the first mirror 31, as shown in FIG. At the same time, the second light source 22 generates misalignment detection light 23. The generated misalignment detection light 23 is received by a two-dimensional detector 52 disposed in the optical axis adjustment aid 50. In this way, the light receiving coordinates at the position between the second light source 22 and the first mirror 31 in the alignment state are detected in advance and stored. The light receiving coordinates are referred to as “first mirror standard light receiving coordinates”.

第1ミラー標準受光座標が取得できたら、光軸調整補助具50を装置10Aから取り外し、レーザー光照射装置10Aを動作させて、照射用レーザー光20を照射対象物Tに本照射する。レーザー光20を本照射している間に、二次元検出器44による検出受光座標と、標準受光座標との比較の結果、照射用レーザー光20の光軸にずれが生じていると判断された場合には、照射用レーザー光20及び位置ずれ検出用光23の照射を中止し、図5に示すとおり、第2光源22と第1ミラー31との間の位置に光軸調整補助具50を配置する。これとともに、第2光源22によって位置ずれ検出用光23のみを発生させる。そして、発生した位置ずれ検出用光23を、光軸調整補助具50内に配置された二次元検出器52で受光する。それによって、二次元検出器52の受光部における位置ずれ検出用光23の受光位置である受光座標を検出する。この受光座標のことを「第1ミラー検出受光座標」という。   When the first mirror standard light receiving coordinates can be acquired, the optical axis adjustment auxiliary tool 50 is removed from the apparatus 10A, the laser light irradiation apparatus 10A is operated, and the irradiation target T is irradiated with the irradiation laser light 20. As a result of comparison between the detected light receiving coordinates by the two-dimensional detector 44 and the standard light receiving coordinates during the main irradiation of the laser light 20, it was determined that a deviation occurred in the optical axis of the irradiation laser light 20. In this case, the irradiation of the irradiation laser beam 20 and the positional deviation detection light 23 is stopped, and the optical axis adjustment auxiliary tool 50 is placed at a position between the second light source 22 and the first mirror 31 as shown in FIG. Deploy. At the same time, only the misalignment detection light 23 is generated by the second light source 22. The generated misalignment detection light 23 is received by the two-dimensional detector 52 disposed in the optical axis adjustment auxiliary tool 50. Thereby, the light receiving coordinates which are the light receiving position of the positional deviation detecting light 23 in the light receiving portion of the two-dimensional detector 52 are detected. This light receiving coordinate is referred to as “first mirror detected light receiving coordinate”.

位置ずれ検出用光23の光軸の調整は、第1ミラー検出受光座標を、予め記憶しておいた第1ミラー標準受光座標と比較することで行う。具体的には、第1ミラー検出受光座標の値が、予め記憶しておいた第1ミラー標準受光座標の値に復帰するように、第2光源22の向きを調整する。   The adjustment of the optical axis of the misalignment detection light 23 is performed by comparing the first mirror detection light receiving coordinates with the first mirror standard light receiving coordinates stored in advance. Specifically, the direction of the second light source 22 is adjusted so that the value of the first mirror detection light receiving coordinate returns to the value of the first mirror standard light receiving coordinate stored in advance.

以上と同様の操作を、光軸調整補助具50を第1ミラー31と第2ミラー32との間、第2ミラー32と第1ダイクロイックミラー41との間、及び第1ダイクロイックミラー41と第3ミラー33との間の位置においても行い、第1ミラー31、第2ミラー32及び第1ダイクロイックミラーの向きを調整する。これによって、第2光源22から第3ミラー33までの間の光路において、位置ずれ検出用光23の光軸をアライメント状態にすることができる。その後に、上述した図2ないし図4に示す操作を行い、照射用レーザー光20の光軸をアライメント状態にする。   The same operation as described above is performed using the optical axis adjustment assisting tool 50 between the first mirror 31 and the second mirror 32, between the second mirror 32 and the first dichroic mirror 41, and between the first dichroic mirror 41 and the third mirror. This is also performed at a position between the mirror 33 and the direction of the first mirror 31, the second mirror 32, and the first dichroic mirror is adjusted. As a result, the optical axis of the misalignment detection light 23 can be brought into an alignment state in the optical path from the second light source 22 to the third mirror 33. Thereafter, the operations shown in FIGS. 2 to 4 are performed to bring the optical axis of the irradiation laser beam 20 into an alignment state.

本発明のレーザー照射装置及びレーザー照射方法は、様々な照射対象物Tに適用することができる。その一例として、シート融着体の製造方法に本発明を適用した実施形態を以下に説明する。   The laser irradiation apparatus and laser irradiation method of the present invention can be applied to various irradiation objects T. As an example, an embodiment in which the present invention is applied to a method for manufacturing a sheet fusion body will be described below.

図6及び図7にはシート融着体の一例であるパンツ型使い捨ておむつ1が示されている。おむつ1は、吸収性本体2と、該吸収性本体2の非肌当接面側に配されて該吸収性本体2を固定している外装体3とを備え、且つ腹側部1Aにおける外装体3の両側縁部と背側部1Bにおける該外装体の両側縁部とが接合されて一対のサイドシール部4,ウエスト開口部8及び一対のレッグ開口部9,形成されているパンツ型使い捨ておむつである。外装体3は、外層シート3aと内層シート3bから構成されている。このおむつ1は、複数枚のシートが重ねられたシート積層体にレーザー光を照射することにより、該シート積層体を分断するのと同時に、その分断によって生じた複数枚のシートの切断縁部どうしを融着させてシール縁部を形成する、シート融着体の製造方法に従い、図8及び図9に示す方法で製造される。   6 and 7 show a pants-type disposable diaper 1 which is an example of a sheet fusion body. The diaper 1 includes an absorbent main body 2 and an exterior body 3 that is disposed on the non-skin contact surface side of the absorbent main body 2 and fixes the absorbent main body 2. A pants-type disposable in which both side edges of the body 3 and both side edges of the exterior body in the back side 1B are joined to form a pair of side seal parts 4, a waist opening 8 and a pair of leg openings 9. A diaper. The exterior body 3 includes an outer layer sheet 3a and an inner layer sheet 3b. This diaper 1 divides the sheet laminate by irradiating a laser beam onto a sheet laminate in which a plurality of sheets are stacked, and at the same time, cut edges of a plurality of sheets generated by the division. 8 and 9 according to the method for manufacturing a sheet fusion product, in which a seal edge portion is formed by fusing the sealant.

図8に示すとおり、原反ロール(図示せず)から連続的に供給される帯状の外層シート3aと、原反ロール(図示せず)から連続的に供給される帯状の内層シート3bの間に、ウエストギャザーを形成するウエスト部弾性部材5、胴回りギャザーを形成する胴回り部弾性部材6及びレッグギャザーを形成するレッグ部弾性部材7を、所定の伸長率に伸長させた伸長状態で各々複数本配する。このとき、ウエスト部弾性部材5及び胴回り部弾性部材6には、接着剤塗工機(図示せず)によってホットメルト型接着剤を連続的あるいは間欠的に塗工し、レッグ部弾性部材7は、シートの流れ方向とは直交して往復運動する公知の揺動ガイド(図示せず)を介して、所定の脚周りパターンを形成しながら配される。また、帯状の外層シート3a及び帯状の内層シート3bには、それらを重ね合わせる前に、両シートのいずれか一方又は双方の相対向する面の所定部位に、接着剤塗工機(図示せず)によりホットメルト型接着剤を塗工する。   As shown in FIG. 8, between the strip-shaped outer layer sheet 3a continuously supplied from the original fabric roll (not shown) and the strip-shaped inner layer sheet 3b continuously supplied from the original fabric roll (not shown). In addition, a plurality of waist elastic members 5 forming waist gathers, waist elastic members 6 forming waist gathers, and leg elastic members 7 forming leg gathers are extended to a predetermined extension rate. Arrange. At this time, a hot melt adhesive is applied to the waist elastic member 5 and the waist elastic member 6 continuously or intermittently by an adhesive coating machine (not shown), and the leg elastic member 7 is These are arranged while forming a predetermined leg-circumferential pattern via a known swing guide (not shown) that reciprocates perpendicular to the sheet flow direction. In addition, before the belt-like outer layer sheet 3a and the belt-like inner layer sheet 3b are overlaid, an adhesive coating machine (not shown) is attached to a predetermined part of one or both surfaces of both sheets. ) To apply hot melt adhesive.

そして、図8に示すように、一対のニップロール111,111の間に、ウエスト部弾性部材5、胴回り部弾性部材6及びレッグ部弾性部材7を伸長状態で挟み込んだ帯状の外層シート3a及び帯状の内層シート3bを送り込んで加圧することにより、帯状シート3a,3b間に複数本の弾性部材5,6,7が伸長状態で配された帯状の外装体3を形成する。その後、弾性部材プレカット手段(図示せず)を用いて、後述する吸収性本体2を配する位置に対応させて、複数本の胴回り部弾性部材6及び複数本のレッグ部弾性部材7を押圧して、収縮機能が発現されないように個々複数個に分断する。前記弾性部材プレカット手段としては、例えば、特開2002−253605号公報に記載の複合伸縮部材の製造方法に用いる弾性部材分断部等が挙げられる。   And as shown in FIG. 8, the belt-shaped outer layer sheet 3a and the belt-shaped outer layer sheet 3a in which the waist elastic member 5, the waistline elastic member 6 and the leg elastic member 7 are sandwiched between the pair of nip rolls 111, 111 in a stretched state. By feeding and pressurizing the inner layer sheet 3b, a band-shaped exterior body 3 is formed in which a plurality of elastic members 5, 6, and 7 are arranged in an expanded state between the band-shaped sheets 3a and 3b. After that, by using an elastic member pre-cutting means (not shown), the plurality of waistline elastic members 6 and the plurality of leg elastic members 7 are pressed so as to correspond to positions where the absorbent main body 2 described later is disposed. Then, it is divided into a plurality of pieces so that the contractile function is not expressed. Examples of the elastic member precut means include an elastic member dividing portion used in the method for manufacturing a composite elastic member described in JP-A-2002-253605.

次いで、図8に示すように、別工程で製造された吸収性本体2に予めホットメルト接着剤等の接着剤を塗工し、該吸収性本体2を90度回転させて、帯状の外 装体3を構成する内層シート32上に間欠的に供給して固定する。なお、吸収性本体固定用の接着剤は、吸収性本体2ではなく、内層シート32における吸収性本体2の配置予定位置に予め塗工してもよい。   Next, as shown in FIG. 8, an adhesive such as a hot melt adhesive is applied in advance to the absorbent main body 2 manufactured in a separate process, and the absorbent main body 2 is rotated by 90 degrees to form a strip-shaped outer package. It is intermittently supplied and fixed on the inner layer sheet 32 constituting the body 3. The adhesive for fixing the absorbent main body may be applied in advance to the position where the absorbent main body 2 is to be arranged in the inner layer sheet 32 instead of the absorbent main body 2.

引き続き、図8に示すように、吸収性本体2が配置された帯状の外装体3におけるレッグ部弾性部材7で環状に囲まれた環状部の内側にレッグホールLO’を形成する。このレッグホール形成工程は、ロータリーカッター、レーザーカッター等の従来からこの種の物品の製造方法における手法と同様の手法を用いて実施することができる。なお、本実施態様においては、帯状の外装体3に吸収性本体2を配置した後にレッグホールを形成しているが、吸収性本体2の配置前にレッグ ホールを形成してもよい。   Subsequently, as shown in FIG. 8, a leg hole LO ′ is formed inside the annular portion surrounded by the leg elastic member 7 in the belt-shaped exterior body 3 in which the absorbent main body 2 is disposed. This leg hole forming step can be carried out by using a technique similar to that in a conventional method for manufacturing this type of article, such as a rotary cutter and a laser cutter. In the present embodiment, the leg hole is formed after the absorbent main body 2 is arranged on the belt-shaped outer package 3, but the leg hole may be formed before the absorbent main body 2 is arranged.

次いで、帯状の外装体3をその幅方向(外装体3の搬送方向と直交する方向)に折り畳む。より具体的には、図8に示すように、帯状の外装体3の搬送方向に 沿う両側部3’,3’を、吸収性本体2の長手方向両端部を覆うように折り返して吸収性本体2の長手方向両端部を固定した後、外装体3を吸収性本体2とともに その幅方向に二つ折りする。こうして、おむつ連続体1’が得られる。   Next, the belt-shaped exterior body 3 is folded in the width direction (a direction orthogonal to the conveyance direction of the exterior body 3). More specifically, as shown in FIG. 8, both side portions 3 ′ and 3 ′ along the conveying direction of the strip-shaped exterior body 3 are folded back so as to cover both ends in the longitudinal direction of the absorbent main body 2. After fixing both longitudinal ends of 2, the exterior body 3 is folded in half in the width direction together with the absorbent main body 2. In this way, the diaper continuous body 1 'is obtained.

こうして製造されたおむつ連続体1’に対して、本発明のレーザー照射装置を含む、図9に示すレーザー式接合装置120を用いてレーザー光を照射して、一対のサイドシール部4,4を有する外装体3を具備する、シート融着体としてのパンツ型使い捨ておむつ1を連続的に製造する。   The diaper continuous body 1 ′ thus manufactured is irradiated with laser light using the laser bonding apparatus 120 shown in FIG. 9 including the laser irradiation apparatus of the present invention, so that the pair of side seal portions 4, 4 is formed. The underpants-type disposable diaper 1 as a sheet fusion body comprising the exterior body 3 having the outer body 3 is continuously manufactured.

レーザー式接合装置120について説明すると、この装置120は、図9に示すように、矢印A方向に回転駆動される円筒状の支持部材121を備えた中空の円筒ロール123と、該支持部材121の中空部に配され、レーザー光20を集光するレンズ134を有する照射ヘッド135と、加圧手段として無端状の加圧ベルト124及び該加圧ベルト124が架け渡された状態で回転する複数本のロール125a,125b,125cを備えたベルト式加圧装置126とを備えている。レーザー式接合装置120は、環状の支持部材121の外周面、すなわち円筒ロール123の周面部に巻き掛ける加圧ベルト124の張力を増減調整できる張力調整機構(図示せず)を備え、該張力の調整により、支持部材121と加圧ベルト124とによって、おむつ連続体1’に加える圧力を適宜調整することができる。   The laser bonding apparatus 120 will be described. As shown in FIG. 9, the apparatus 120 includes a hollow cylindrical roll 123 having a cylindrical support member 121 that is rotationally driven in the direction of arrow A, and the support member 121. An irradiation head 135 that has a lens 134 that condenses the laser light 20 and is disposed in the hollow portion, an endless pressure belt 124 as a pressure unit, and a plurality of rotations that rotate in a state where the pressure belt 124 is bridged. Belt type pressurizing device 126 provided with rolls 125a, 125b, and 125c. The laser type bonding apparatus 120 includes a tension adjusting mechanism (not shown) that can adjust the tension of the pressure belt 124 wound around the outer peripheral surface of the annular support member 121, that is, the peripheral surface portion of the cylindrical roll 123. By the adjustment, the pressure applied to the diaper continuous body 1 ′ can be appropriately adjusted by the support member 121 and the pressure belt 124.

加圧ベルト124としては、加工時に発生する熱に耐え得る耐熱性を有する金属又は樹脂製のベルトを用いることができる。例えば加圧ベルト124は、鉄、アルミニウム、ステンレス鋼等の金属材料からなる。また、加圧ベルト124としては、通常、被加工物であるおむつ連続体1’に対して照射されるレーザー光20の透過性を有しないものが用いられるが、該透過性を有するものを用いることもできる。   As the pressure belt 124, a metal or resin belt having heat resistance capable of withstanding the heat generated during processing can be used. For example, the pressure belt 124 is made of a metal material such as iron, aluminum, and stainless steel. Further, as the pressure belt 124, a belt that does not have the transparency of the laser beam 20 irradiated to the diaper continuous body 1 ′ that is a workpiece is usually used, but the belt having the transparency is used. You can also.

支持部材121は、円筒ロール123の周面部を形成しており、円筒ロール123の左右両側縁部を形成する一対の環状の枠体122,122間に挟持固定されている。支持部材121は、環状の枠体122の周長と同じ長さの単一の環状部材から構成されており、例えば鉄、アルミニウム、ステンレス鋼、銅等の金属材料又はセラミックス等の耐熱性を有する材料からなる。   The support member 121 forms a peripheral surface portion of the cylindrical roll 123, and is sandwiched and fixed between a pair of annular frames 122 and 122 that form both left and right edge portions of the cylindrical roll 123. The support member 121 is composed of a single annular member having the same length as the circumferential length of the annular frame 122, and has heat resistance such as a metal material such as iron, aluminum, stainless steel, copper, or ceramics. Made of material.

支持部材121は、レーザー光が通過可能な光通過部である、該支持部材21を厚み方向に貫通するスリット状の開口部127を有している。開口部127は、平面視して矩形形状を有し、その長手方向を支持部材121の幅方向、すなわち図9中符号Xで示す方向に一致させて、円筒状の支持部材121の周方向に所定間隔を置いて複数形成されている。支持部材121は、開口部127ではレーザー光20を通過させる一方、開口部127以外の部分ではレーザー光20を透過させない。支持部材121に開口部127を形成する方法としては、1)支持部材121の所定箇所にエッチング、パンチング、レーザー加工等により開口部127を穿設する方法や、2)支持部材121として、単一の環状部材に代えて、湾曲した矩形形状の部材を複数用い、それら複数の部材を、一対の枠体122,122間に、該枠体122の周方向に所定間隔を置いて配置する方法が挙げられる。前記2)の方法では、隣接する2つの部材の間隔が、スリット状の開口部127となる。   The support member 121 has a slit-shaped opening 127 that penetrates the support member 21 in the thickness direction, which is a light passage portion through which laser light can pass. The opening 127 has a rectangular shape in plan view, and its longitudinal direction coincides with the width direction of the support member 121, that is, the direction indicated by the symbol X in FIG. 9, so that the opening 127 extends in the circumferential direction of the cylindrical support member 121. A plurality are formed at predetermined intervals. The support member 121 allows the laser light 20 to pass through the opening 127, but does not transmit the laser light 20 at portions other than the opening 127. As a method of forming the opening 127 in the support member 121, 1) a method of drilling the opening 127 in a predetermined portion of the support member 121 by etching, punching, laser processing, or the like, or 2) a single support member 121 is used. In place of the annular member, a plurality of curved rectangular members are used, and the plurality of members are arranged between the pair of frame bodies 122, 122 at a predetermined interval in the circumferential direction of the frame body 122. Can be mentioned. In the method 2), the interval between two adjacent members is a slit-shaped opening 127.

支持部材121である中空の円筒ロール123の中空部には、該円筒ロール123の周面部を形成する支持部材121に向けてレーザー光20を照射する照射ヘッド135が設けられている。照射ヘッド135には、レーザー光20を集光するレンズ134が備えられている。また照射ヘッド135は、レーザー光20を自在に走査するガルバノスキャナ、すなわちモータ軸にミラーが付いた装置を備えている。照射ヘッド135は、レーザー光20を円筒ロール123の回転軸と平行な方向、すなわち図9中符号Xで示す方向に進退させる機構、レーザー光20が支持部材121上のおむつ連続体1’に当たる位置である照射点を円筒ロール123の周方向に移動させる機構、及び円筒ロール123の周面上でレーザー光20のスポット径を一定にする機構等を備えている。照射ヘッド135は、このような構成を有することによって、レーザー光20の照射点を、円筒ロール123の周方向及び該周方向と直交する方向の両方向に任意に移動させることができる。この照射ヘッド135が、図1ないし図4に示す最終光学ユニット43に対応する。   An irradiation head 135 that irradiates the laser beam 20 toward the support member 121 that forms the peripheral surface portion of the cylindrical roll 123 is provided in the hollow portion of the hollow cylindrical roll 123 that is the support member 121. The irradiation head 135 is provided with a lens 134 that condenses the laser light 20. The irradiation head 135 includes a galvano scanner that freely scans the laser beam 20, that is, a device having a mirror on the motor shaft. The irradiation head 135 is a mechanism for moving the laser beam 20 forward and backward in a direction parallel to the rotation axis of the cylindrical roll 123, that is, a direction indicated by a symbol X in FIG. A mechanism for moving the irradiation point in the circumferential direction of the cylindrical roll 123, a mechanism for making the spot diameter of the laser light 20 constant on the circumferential surface of the cylindrical roll 123, and the like. By having such a configuration, the irradiation head 135 can arbitrarily move the irradiation point of the laser light 20 in both the circumferential direction of the cylindrical roll 123 and the direction orthogonal to the circumferential direction. This irradiation head 135 corresponds to the final optical unit 43 shown in FIGS.

以上の構成を有するレーザー式接合装置120を用いておむつ1を製造するときには、おむつ連続体1’を連続搬送しつつ、その一方の面を、円筒ロール123の周面部を形成し且つレーザー光20が通過可能なスリット状の開口部127を有する、支持部材121の外面に当接させ、加圧状態となったおむつ連続体1’に対して、支持部材121側から開口部27を介してレーザー光20を照射することにより、おむつ連続体1’を分断するのと同時に、その分断によって生じた前記加圧状態にある複数枚のシートの切断縁部どうしを融着させて、サイドシール部4を形成する。   When the diaper 1 is manufactured using the laser-type bonding apparatus 120 having the above-described configuration, the peripheral surface of the cylindrical roll 123 is formed on one surface of the diaper continuous body 1 ′ while the laser light 20 The diaper continuum 1 ′ having a slit-shaped opening 127 through which can pass through and abutting on the outer surface of the support member 121 and being in a pressurized state from the support member 121 side through the opening 27. By irradiating the light 20, the diaper continuum 1 ′ is divided, and at the same time, the cut edges of the plurality of sheets in the pressurized state generated by the division are fused to form the side seal portion 4. Form.

サイドシール部4の形成時に、おむつ連続体1’におけるレーザー光20の照射予定位置P(図9参照)に適正にレーザー光20が照射されているか否かは、
上述した図1に示す操作によって判断することができる。そして、照射用レーザー光20が照射予定位置Pに照射されていないと判断したときには、上述した光軸調整補助具50を用い、図2ないし図4に示す操作によって、照射用レーザー光20の光軸のアライメントを行う。
Whether or not the laser beam 20 is appropriately irradiated to the irradiation planned position P (see FIG. 9) of the laser beam 20 in the diaper continuous body 1 ′ during the formation of the side seal portion 4
This can be determined by the operation shown in FIG. When it is determined that the irradiation laser beam 20 is not irradiated at the irradiation scheduled position P, the light of the irradiation laser beam 20 is obtained by the operation shown in FIGS. Align the axes.

以上、本発明をその好ましい実施形態に基づき説明したが、本発明は前記実施形態に制限されない。例えば図6ないし図9に示す実施形態は、本発明のレーザー照射装置及びレーザー照射方法を、シート融着体を有する物品の一例であるパンツ型使い捨ておむつの製造に適用したものであるが、これ以外の物品の製造にも適用することができる。他の物品としては、前述したパンツ型使い捨ておむつ以外の他の吸収性物品として、前記シート融着体が吸収性物品の一部を構成している物品、例えば、生理用ナプキン、失禁パッド等が挙げられる。吸収性物品以外には、床面清掃用のシート、身体清拭用のシート、身体加温用の発熱具等が挙げられる。吸収性物品を構成するシート融着体としては、a)吸収性物品の肌当接面を形成する表面シートと非肌当接面を形成する裏面シートとが、吸収体の周縁部より延出した部分で接合されているもの、b)生理用ナプキンにおける、表面シートとウイング部形成用シート、ウイング部形成用シートと裏面シート、又は表面シートとウイング部形成用シートと裏面シートが融着したもの等が挙げられる。   As mentioned above, although this invention was demonstrated based on the preferable embodiment, this invention is not restrict | limited to the said embodiment. For example, in the embodiment shown in FIGS. 6 to 9, the laser irradiation apparatus and the laser irradiation method of the present invention are applied to the manufacture of a pants-type disposable diaper that is an example of an article having a sheet fusion body. It can also be applied to the manufacture of other articles. Examples of other articles include absorbent articles other than the above-described pants-type disposable diapers, such as articles in which the sheet fusion body constitutes a part of the absorbent article, such as sanitary napkins and incontinence pads. Can be mentioned. In addition to absorbent articles, floor cleaning sheets, body wiping sheets, body warming heating tools, and the like can be given. As a sheet fusion body which constitutes an absorptive article, a) A surface sheet which forms a skin contact surface of an absorptive article, and a back sheet which forms a non-skin contact surface extend from a peripheral part of an absorber B) In the sanitary napkin, the top sheet and the wing part forming sheet, the wing part forming sheet and the back sheet, or the top sheet, the wing part forming sheet and the back sheet are fused. And the like.

10,10A レーザー照射装置
20 照射用レーザー光
21 第1光源
22 第2光源
23 位置ずれ検出用光
30A 第1反射部材
30B 第2反射部材
31 第1ミラー
32 第2ミラー
33 第3ミラー
34 第4ミラー
35 第5ミラー
36 第6ミラー
41 第1ダイクロイックミラー
42 第2ダイクロイックミラー
43 最終光学ユニット
44 二次元検出器
50 光軸調整補助具
51 反射部材
52 二次元検出器
T 照射対象物
10, 10A Laser irradiation apparatus 20 Irradiation laser light 21 First light source 22 Second light source 23 Position shift detection light 30A First reflection member 30B Second reflection member 31 First mirror 32 Second mirror 33 Third mirror 34 Fourth Mirror 35 Fifth mirror 36 Sixth mirror 41 First dichroic mirror 42 Second dichroic mirror 43 Final optical unit 44 Two-dimensional detector 50 Optical axis adjustment auxiliary tool 51 Reflective member 52 Two-dimensional detector T Irradiation target

Claims (5)

対象物に照射する照射用レーザー光を第1光源で発生させるとともに、照射用レーザー光と異なる波長を有する位置ずれ検出用光を第2光源で発生させ、
第2光源で発生した位置ずれ検出用光の進行方向を第1反射部材によって変更し、
照射用レーザー光及び進行方向が変更された位置ずれ検出用光を第1ダイクロイックミラーに入射させ、照射用レーザー光を透過させるとともに位置ずれ検出用光を反射させて、両光を同軸にし、
照射用レーザー光を対象物へ照射するための最終光学ユニットの直前に配置された第2ダイクロイックミラーに、同軸状態の照射用レーザー光及び位置ずれ検出用光を入射させ、該第2ダイクロイックミラーによって位置ずれ検出用光を反射させるとともに照射用レーザー光を透過させて、該照射用レーザー光のみを該最終光学ユニットへと導き、
第2ダイクロイックミラーで反射した位置ずれ検出用光を二次元検出器で受光するとともに、最終光学ユニットに導かれた照射用レーザー光を対象物に照射する、レーザー照射方法であって、
第1ダイクロイックミラーから出射した同軸の状態の照射用レーザー光及び位置ずれ検出用光の進行方向を変更させて、第2ダイクロイックミラーへと導く第2反射部材を、第1ダイクロイックミラーと第2ダイクロイックミラーとの間に配した状態下に、同軸の状態の照射用レーザー光及び位置ずれ検出用光を照射し、
二次元検出器で受光した位置ずれ検出用光の検出位置に基づき、照射用レーザー光が対象物の照射予定位置に照射されているか否かを判断し、
照射用レーザー光が対象物の照射予定位置に照射されていないと判断したときに、第2反射部材を構成するミラーの向きを調整して照射用レーザー光の光軸を調整する工程を行い、
前記照射用レーザー光の光軸を調整する工程に先立ち、第2光源から第2反射部材までの間の光路において、光軸調整補助具を用いて位置ずれ検出用光の光軸を調整する工程を行い、
光軸調整補助具は、反射部材と二次元検出器とが一体化された構造を有し、且つ第2光源と第2反射部材との間の位置に着脱自在に配置可能となっており、
光軸調整補助具における反射部材は、該光軸調整補助具が第2光源と第2反射部材との間の位置に配された状態において、位置ずれ検出用光の光路内に位置して該光路を切り替えて、該光軸調整補助具における二次元検出器に導くようになっており、
前記位置ずれ検出用光の光軸を調整する工程を行うに先立ち、第1ダイクロイックミラーと第2ダイクロイックミラーとの間の光路で同軸の状態の照射用レーザー光及び位置ずれ検出用光を予めアライメントされた状態としておき、光軸調整補助具を第2光源と第2反射部材との間の位置に配するとともに位置ずれ検出用光のみを発生させ、これを光軸調整補助具の二次元検出器で受光して、アライメントされた状態での位置ずれ検出用光の検出位置を予め記憶しておき、
前記位置ずれ検出用光の光軸を調整する工程においては、照射用レーザー光が対象物の照射予定位置に照射されていないと判断した場合に、第2光源と第2反射部材との間の位置に光軸調整補助具を配するとともに位置ずれ検出用光のみを発生させ、これを光軸調整補助具の二次元検出器で受光するとともに第2光源から第2反射部材までの光路をアライメントして、該二次元検出器で受光された該位置ずれ検出用光の検出位置を、予め記憶しておいたアライメントされた状態での位置ずれ検出用光の検出位置に復帰させる、レーザー照射方法。
A laser beam for irradiating an object is generated by the first light source, and a misalignment detection light having a wavelength different from that of the laser beam for irradiation is generated by the second light source.
The traveling direction of the misalignment detection light generated by the second light source is changed by the first reflecting member,
The laser beam for irradiation and the misalignment detection light whose traveling direction is changed are made incident on the first dichroic mirror, the irradiation laser beam is transmitted and the misalignment detection light is reflected, and both lights are coaxial.
Coaxially irradiated irradiation laser light and misalignment detection light are incident on a second dichroic mirror disposed immediately before the final optical unit for irradiating the irradiation laser light onto the object, and the second dichroic mirror Reflecting the misalignment detection light and transmitting the irradiation laser light, leading only the irradiation laser light to the final optical unit,
A laser irradiation method in which a misalignment detection light reflected by a second dichroic mirror is received by a two-dimensional detector, and an irradiation laser beam guided to the final optical unit is irradiated to an object,
The first dichroic mirror and the second dichroic are connected to the second reflecting member that changes the traveling direction of the coaxially irradiated laser beam and the positional deviation detection light emitted from the first dichroic mirror and leads them to the second dichroic mirror. Under the condition of being arranged between the mirrors, irradiate the irradiation laser light and the position shift detection light in a coaxial state,
Based on the detection position of the misalignment detection light received by the two-dimensional detector, determine whether or not the irradiation laser beam is irradiated on the target irradiation position of the object ,
When it is determined that the irradiation laser beam is not irradiated on the target irradiation position of the object, the step of adjusting the optical axis of the irradiation laser beam by adjusting the direction of the mirror constituting the second reflecting member is performed,
Prior to the step of adjusting the optical axis of the irradiation laser light, the step of adjusting the optical axis of the misalignment detection light using the optical axis adjustment assisting tool in the optical path from the second light source to the second reflecting member. And
The optical axis adjustment auxiliary tool has a structure in which the reflecting member and the two-dimensional detector are integrated, and can be detachably disposed at a position between the second light source and the second reflecting member.
The reflecting member in the optical axis adjustment assisting tool is positioned in the optical path of the misalignment detection light in a state where the optical axis adjustment assisting tool is disposed at a position between the second light source and the second reflecting member. The optical path is switched and guided to the two-dimensional detector in the optical axis adjustment aid.
Prior to performing the step of adjusting the optical axis of the misalignment detection light, the irradiation laser beam and misalignment detection light that are coaxial in the optical path between the first dichroic mirror and the second dichroic mirror are aligned in advance. In this state, the optical axis adjustment assisting tool is arranged at a position between the second light source and the second reflecting member, and only the positional deviation detection light is generated, and this is detected by the two-dimensional detection of the optical axis adjustment assisting tool. Received in advance, and stored in advance the detection position of the misalignment detection light in the aligned state,
In the step of adjusting the optical axis of the misalignment detection light, when it is determined that the irradiation laser beam is not irradiated on the irradiation target position of the object, between the second light source and the second reflecting member, An optical axis adjustment assisting tool is disposed at the position, and only a positional deviation detection light is generated. This light is received by the two-dimensional detector of the optical axis adjustment assisting tool, and the optical path from the second light source to the second reflecting member is aligned. Then, the laser irradiation method for returning the detection position of the misalignment detection light received by the two-dimensional detector to the pre-stored detection position of the misalignment detection light in the aligned state .
前記照射用レーザー光の光軸を調整する工程においては、該照射用レーザー光の光軸調整の補助をするための光軸調整補助具を用い、
光軸調整補助具は、反射部材と二次元検出器とが一体化された構造を有し、且つ第2反射部材と、該第2反射部材の直ぐ下流に位置する光学部材と間の位置に着脱自在に配置可能となっており、
光軸調整補助具における反射部材は、該光軸調整補助具が第2反射部材と、該第2反射部材の直ぐ下流に位置する光学部材と間の位置に配された状態において、同軸の状態の照射用レーザー光及び位置ずれ検出用光の光路内に位置して該光路を切り替えて、該光軸調整補助具における二次元検出器に導くようになっており、
前記照射用レーザー光の光軸を調整する工程を行うに先立ち、第1ダイクロイックミラーと第2ダイクロイックミラーとの間の光路で同軸の状態の照射用レーザー光及び位置ずれ検出用光予めアライメントされた状態としておき、光軸調整補助具を第2反射部材と、該第2反射部材の直ぐ下流に位置する光学部材と間の位置に配するとともに位置ずれ検出用光のみを発生させ、これを光軸調整補助具の二次元検出器で受光して、アライメントされた状態での位置ずれ検出用光の検出位置を予め記憶しておき、
前記照射用レーザー光の光軸を調整する工程においては、照射用レーザー光が対象物の照射予定位置に照射されていないと判断した場合に、第2反射部材と、該第2反射部材の直ぐ下流に位置する光学部材と間の位置に光軸調整補助具を配するとともに位置ずれ検出用光のみを発生させ、これを光軸調整補助具の二次元検出器で受光するとともに第2反射部材から第2反射部材までの光路をアライメントして、該二次元検出器で受光された該位置ずれ検出用光の検出位置を、予め記憶しておいたアライメントされた状態での位置ずれ検出用光の検出位置に復帰させる、請求項に記載のレーザー照射方法。
In the step of adjusting the optical axis of the irradiating laser beam, have use optical axis adjustment aid for the assistance of optical axis adjustment of the irradiation laser beam,
Optical axis adjustment aid, positioned between the reflective member and having a two-dimensional detector and is integrated structure, and a second reflecting member, the optical member located immediately downstream of the second reflecting member It can be detachably placed on the
The reflecting member in the optical axis adjustment aid, and the optical axis adjusting aid is a second reflecting member, in a state arranged at a position between the optical member located immediately downstream of the second reflecting member, coaxial Is positioned in the optical path of the irradiation laser light and the misalignment detection light in the state, is switched to the optical path, and is guided to the two-dimensional detector in the optical axis adjustment assisting tool,
Prior to performing the step of adjusting the optical axis of the irradiating laser beam are previously aligned irradiated laser beam and the positional shift detection light coaxial state light path between the first dichroic mirror and the second dichroic mirror state and to keep the optical axis adjusting aid and the second reflecting member to generate only the positional deviation detecting light with disposed at a position between the optical member located immediately downstream of the second reflecting member, which Is received by the two-dimensional detector of the optical axis adjustment auxiliary tool, and the detection position of the misalignment detection light in the aligned state is stored in advance,
In the step of adjusting the optical axis of the irradiation laser beam, when it is determined that the irradiation laser beam is not irradiated to the irradiation target position of the object, the second reflecting member and the second reflecting member immediately It is generated only positional deviation detecting light with arranging the optical axis adjustment aid to the position between the optical member located downstream, second reflection with receiving this two-dimensional detector of the optical axis adjustment aid Aligning the optical path from the member to the second reflecting member , and detecting the position of the position detection light received by the two-dimensional detector in a previously stored alignment state The laser irradiation method according to claim 1 , wherein the laser is returned to the light detection position.
複数枚のシートが重ねられたシート積層体にレーザー光を照射することにより、該シート積層体を分断するのと同時に、その分断によって生じた複数枚のシートの切断縁部どうしを融着させてシール縁部を形成する、シート融着体の製造方法であって、
前記シート積層体に照射する照射用レーザー光を第1光源で発生させるとともに、照射用レーザー光と異なる波長を有する位置ずれ検出用光を第2光源で発生させ、
第2光源で発生した位置ずれ検出用光の進行方向を第1反射部材によって変更し、
照射用レーザー光及び進行方向が変更された位置ずれ検出用光を第1ダイクロイックミラーに入射させ、照射用レーザー光を透過させるとともに位置ずれ検出用光を反射させて、両光を同軸にし、
照射用レーザー光を前記シート積層体へ照射するための最終光学ユニットの直前に配置された第2ダイクロイックミラーに、同軸状態の照射用レーザー光及び位置ずれ検出用光を入射させ、該第2ダイクロイックミラーによって位置ずれ検出用光を反射させるとともに照射用レーザー光を透過させて、該照射用レーザー光のみを該最終光学ユニットへと導き、
第2ダイクロイックミラーで反射した位置ずれ検出用光を二次元検出器で受光するとともに、最終光学ユニットに導かれた照射用レーザー光を前記シート積層体に照射する工程を有し、
第1ダイクロイックミラーから出射した同軸の状態の照射用レーザー光及び位置ずれ検出用光の進行方向を変更させて、第2ダイクロイックミラーへと導く第2反射部材を、第1ダイクロイックミラーと第2ダイクロイックミラーとの間に配した状態下に、同軸の状態の照射用レーザー光及び位置ずれ検出用光を照射し、
二次元検出器で受光した位置ずれ検出用光の検出位置に基づき、照射用レーザー光が前記シート積層体照射予定位置に照射されているか否かを判断し、
照射用レーザー光が前記シート積層体照射予定位置に照射されていないと判断したときに、第2反射部材を構成するミラーの向きを調整して照射用レーザー光の光軸を調整する工程を行い、
前記照射用レーザー光の光軸を調整する工程に先立ち、第2光源から第2反射部材までの間の光路において、光軸調整補助具を用いて位置ずれ検出用光の光軸を調整する工程を行い、
光軸調整補助具は、反射部材と二次元検出器とが一体化された構造を有し、且つ第2光源と第2反射部材との間の位置に着脱自在に配置可能となっており、
光軸調整補助具における反射部材は、該光軸調整補助具が第2光源と第2反射部材との間の位置に配された状態において、位置ずれ検出用光の光路内に位置して該光路を切り替えて、該光軸調整補助具における二次元検出器に導くようになっており、
前記位置ずれ検出用光の光軸を調整する工程を行うに先立ち、第1ダイクロイックミラーと第2ダイクロイックミラーとの間の光路で同軸の状態の照射用レーザー光及び位置ずれ検出用光を予めアライメントされた状態としておき、光軸調整補助具を第2光源と第2反射部材との間の位置に配するとともに位置ずれ検出用光のみを発生させ、これを光軸調整補助具の二次元検出器で受光して、アライメントされた状態での位置ずれ検出用光の検出位置を予め記憶しておき、
前記位置ずれ検出用光の光軸を調整する工程においては、照射用レーザー光が対象物の照射予定位置に照射されていないと判断した場合に、第2光源と第2反射部材との間の位置に光軸調整補助具を配するとともに位置ずれ検出用光のみを発生させ、これを光軸調整補助具の二次元検出器で受光するとともに第2光源から第2反射部材までの光路をアライメントして、該二次元検出器で受光された該位置ずれ検出用光の検出位置を、予め記憶しておいたアライメントされた状態での位置ずれ検出用光の検出位置に復帰させる、シート融着体の製造方法
By irradiating a laser beam onto a sheet laminate in which a plurality of sheets are stacked, the sheet laminate is divided, and at the same time, the cut edges of the plurality of sheets generated by the division are fused together. A method for manufacturing a sheet fusion body, which forms a seal edge,
A laser beam for irradiating the sheet laminate is generated by a first light source, and a misalignment detection light having a wavelength different from that of the laser beam for irradiation is generated by a second light source,
The traveling direction of the misalignment detection light generated by the second light source is changed by the first reflecting member,
The laser beam for irradiation and the misalignment detection light whose traveling direction is changed are made incident on the first dichroic mirror, the irradiation laser beam is transmitted and the misalignment detection light is reflected, and both lights are coaxial.
The second dichroic light is incident on a second dichroic mirror disposed immediately before the final optical unit for irradiating the laser beam for irradiation to the sheet laminate, and the coaxial laser light for irradiation and misalignment detection light are incident on the second dichroic mirror. Reflecting the misalignment detection light by the mirror and transmitting the irradiation laser light, leading only the irradiation laser light to the final optical unit,
Receiving the misalignment detection light reflected by the second dichroic mirror with a two-dimensional detector, and irradiating the sheet laminate with the irradiation laser light guided to the final optical unit;
The first dichroic mirror and the second dichroic are connected to the second reflecting member that changes the traveling direction of the coaxially irradiated laser beam and the positional deviation detection light emitted from the first dichroic mirror and leads them to the second dichroic mirror. Under the condition of being arranged between the mirrors, irradiate the irradiation laser light and the position shift detection light in a coaxial state,
Based on the detection position of the misalignment detection light received by the two-dimensional detector, determine whether the irradiation laser beam is irradiated to the irradiation position of the sheet laminate ,
When it is determined that the irradiation laser beam is not irradiated to the irradiation position of the sheet laminate, the step of adjusting the optical axis of the irradiation laser beam by adjusting the direction of the mirror constituting the second reflecting member is performed. ,
Prior to the step of adjusting the optical axis of the irradiation laser light, the step of adjusting the optical axis of the misalignment detection light using the optical axis adjustment assisting tool in the optical path from the second light source to the second reflecting member. And
The optical axis adjustment auxiliary tool has a structure in which the reflecting member and the two-dimensional detector are integrated, and can be detachably disposed at a position between the second light source and the second reflecting member.
The reflecting member in the optical axis adjustment assisting tool is positioned in the optical path of the misalignment detection light in a state where the optical axis adjustment assisting tool is disposed at a position between the second light source and the second reflecting member. The optical path is switched and guided to the two-dimensional detector in the optical axis adjustment aid.
Prior to performing the step of adjusting the optical axis of the misalignment detection light, the irradiation laser beam and misalignment detection light that are coaxial in the optical path between the first dichroic mirror and the second dichroic mirror are aligned in advance. In this state, the optical axis adjustment assisting tool is arranged at a position between the second light source and the second reflecting member, and only the positional deviation detection light is generated, and this is detected by the two-dimensional detection of the optical axis adjustment assisting tool. Received in advance, and stored in advance the detection position of the misalignment detection light in the aligned state,
In the step of adjusting the optical axis of the misalignment detection light, when it is determined that the irradiation laser beam is not irradiated on the irradiation target position of the object, between the second light source and the second reflecting member, An optical axis adjustment assisting tool is disposed at the position, and only a positional deviation detection light is generated. This light is received by the two-dimensional detector of the optical axis adjustment assisting tool, and the optical path from the second light source to the second reflecting member is aligned. Then, the sheet fusion for returning the detection position of the misalignment detection light received by the two-dimensional detector to the pre-stored detection position of the misalignment detection light in the aligned state Body manufacturing method .
請求項に記載の製造方法により前記シート融着体を製造する工程を含む、該シート融着体が吸収性物品の一部を構成する吸収性物品の製造方法。 The manufacturing method of the absorbent article in which this sheet fusion body comprises a part of absorbent article including the process of manufacturing the said sheet fusion body by the manufacturing method of Claim 3 . 前記吸収性物品は、吸収性本体と、該吸収性本体の非肌当接面側に配されて該吸収性本体を固定している外装体とを備え、且つ腹側部における該外装体の両側縁部と背側部における該外装体の両側縁部とが接合されて一対のサイドシール部が形成されているパンツ型使い捨ておむつであり、
前記シート融着体は、前記パンツ型使い捨ておむつの一部を構成しており、
帯状の前記外装体をその幅方向に折り畳み、折り畳まれた帯状の該外装体の所定箇所に前記レーザー光を照射することにより、帯状の該外装体を分断するのと同時に前記サイドシール部を形成して前記シート融着体とする、請求項に記載の吸収性物品の製造方法。
The absorbent article includes an absorbent main body and an exterior body that is disposed on the non-skin contact surface side of the absorbent main body and fixes the absorbent main body, A pants-type disposable diaper in which a pair of side seal parts is formed by joining both side edges of the exterior body at both side edges and a back side part,
The sheet fusion body constitutes a part of the pants-type disposable diaper,
Folding the strip-shaped exterior body in the width direction and irradiating the laser beam to a predetermined portion of the folded strip-shaped exterior body, the band-shaped exterior body is divided and the side seal portion is formed at the same time. The method for producing an absorbent article according to claim 4 , wherein the sheet fusion body is used.
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