JP6489388B2 - Optical deflector, optical scanning device, image forming apparatus, and vehicle - Google Patents

Description

The present invention relates to an optical deflector, the optical scanning apparatus, relates to an image forming apparatus and a vehicle, and more particularly, an optical deflector for deflecting the light, an optical scanning device including a light deflector, an image forming with the optical scanning device The present invention relates to an apparatus and a vehicle including the image forming apparatus.

  2. Description of the Related Art Conventionally, an optical scanner package that scans a surface to be scanned with light from a light source is known (see, for example, Patent Document 1).

  The optical scanner package includes a light transmission window member disposed on an optical path of light from a light source, and a swingable mirror that reflects light transmitted through the light transmission window member toward the light transmission window member. And an optical deflector for deflecting light from the light source toward the surface to be scanned.

  However, in the optical scanner package disclosed in Patent Document 1, there is a possibility that an abnormal image may be generated on the surface to be scanned due to the influence of light reflected from the surface of the light transmission window member of the light from the light source, or the surface to be scanned. There was a possibility that scanning could not be performed stably.

The present invention includes a container having an opening through which light passes, and a mirror that is housed in the container and deflects light incident through the opening by rotating around a predetermined rotation axis from a reference surface. A light transmissive plate attached to the opening and inclined about the rotation axis with respect to the reference plane, wherein the maximum deflection angle of the mirror from the reference plane is the reference plane The mirror is smaller than an inclination angle of the light transmission plate with respect to the first axis, and the mirror is rotatable about a first axis and is rotatable about a second axis orthogonal to the first axis. the frequency of rotation is rather higher than the frequency of the rotation about the second axis, the maximum deflection larger than angle castings maximum deflection angle is about the second axis around the first axis, the light transmission The plate is inclined with respect to the reference plane around the second axis. It is a vessel.

  According to the present invention, it is possible to prevent an abnormal image from being generated on the surface to be scanned, and to stably scan the surface to be scanned.

It is a figure which shows schematically the structure of the projector apparatus of one Embodiment. It is a figure for demonstrating a structure and operation | movement of the optical deflector of FIG. It is a figure for demonstrating the structure of an optical deflector. It is a figure for demonstrating the projector apparatus of a comparative example. It is a figure which shows schematically the structure of the projector apparatus of the modification 1. FIG. It is a figure which shows schematically the structure of the projector apparatus of the modification 2. It is a figure which shows schematically the structure of the projector apparatus of the modification 3. It is a figure which shows schematically the structure of the projector apparatus of the modification 4. It is a figure which shows schematically the structure of the projector apparatus of the modification 5. FIG. It is a figure which shows schematically the structure of the projector apparatus of the modification 6. As shown in FIG. It is a figure which shows schematically the structure of the optical deflector of the modification 7. It is a figure showing an example of a head up display device roughly.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS. FIG. 1 schematically shows a projector apparatus 100 as an image forming apparatus according to an embodiment.

  The projector device 100 is used, for example, in a state where it is placed on the floor or installation table of a building, a state where it is suspended from the ceiling of the building, or a state where it is hung on the wall of the building. In the following description, an XYZ three-dimensional orthogonal coordinate system with the vertical direction shown in FIG.

  As an example, the projector device 100 includes an optical scanning device 5, a control device 7, and the like as shown in FIG.

  The optical scanning device 5 includes an LD 10 (laser diode) as a light source, an optical deflector 20, and a light shielding member 30.

  The LD 10 emits laser light in the + X direction. Hereinafter, the laser light emitted from the LD 10 is also referred to as “emitted light”.

  The optical deflector 20 includes a container including a package 20a and a cover glass 20b, and a mirror 20c accommodated in the container. Here, as an example, the XZ cross-sectional shape of the container is substantially trapezoidal.

  The package 20a is a box-shaped member with no lid, and is arranged so that the opening is positioned on the optical path of the emitted light (to face the -X side). As a material of the package 20a, for example, ceramic, resin, aluminum or the like is used. Here, as an example, the package 20a is formed of a member having a substantially J-shaped XZ cross section, and is provided with a wiring member (not shown) for supplying electric power to a driving unit described later.

  The cover glass 20b is made of a transparent or translucent glass plate, and is joined to the opening end of the package 20a so as to cover the opening of the package 20a. That is, the cover glass 20b is disposed on the optical path of the emitted light and functions as a light transmission window member. Here, as an example, the cover glass 20b is disposed in parallel to the Y axis.

  The mirror 20c is a so-called MEMS mirror, and has a first axis and a second axis that are orthogonal to the package 20a in the package 20a so that the reflection surface is positioned on the optical path of the emitted light that has passed through the cover glass 20b. It is supported so that it can swing independently. Here, the first axis extends in a direction parallel to the XZ plane and inclined by a predetermined angle θ with respect to the XY plane. The second axis is parallel to the Y axis. The mirror 20c is accommodated in the container so as to be shielded from the outside air and protected from dust and moisture.

  Specifically, as shown in FIG. 2, the mirror 20c is supported by the first frame member via a torsion bar so as to be swingable around the first axis inside the first frame member, and the first frame member Is supported by the second frame member via a torsion bar so as to be swingable around the second axis inside the second frame member. The mirror 20c is independently driven within a first swing range around the first axis and within a second swing range around the second axis by a drive means (actuator) (not shown). ing. The second frame member is supported by the package 20a. Here, the first swing range (first angle range) is set to be larger than the second swing range (second angle range). As the driving means, for example, an electromagnetic system, a piezoelectric system, or the like is used. The configuration in which the above-described mirror 20c is independently swung around the first axis and the second axis is an example, and can be changed as appropriate. In FIG. 2, illustration of the container is omitted.

  The light shielding member 30 will be described later.

  The optical deflector 20 is manufactured by sequentially performing a process of mounting the mirror 20c on the package 20a (MEMS process) and a process of bonding the cover glass 20b to the package 20a (sealing process). .

  In the optical scanning device 5 configured as described above, the laser light from the LD 10 is incident on the surface of the cover glass 20b (the surface on the −X side), and the light transmitted through the cover glass 20b is reflected on the reflection surface of the mirror 20c. Incident. The laser light incident on the reflection surface of the mirror 20c is reflected in a direction corresponding to the positions around the first axis and the second axis of the mirror 20c (toward the cover glass 20b), and the back surface (+ X side) of the cover glass 20b. Incident on the surface). Of the laser light incident on the back surface of the cover glass 20b, the laser light transmitted through the cover glass 20b is guided to the surface to be scanned (the surface of the screen S).

  At this time, for example, a predetermined scanning region of the surface to be scanned can be two-dimensionally scanned by vibrating the mirror 20c around the first axis at a high frequency while vibrating around the second axis (see FIG. 2). That is, the scanning region is scanned one way at a low speed in the sub-scanning direction corresponding to the second axis while being reciprocated at a high speed in the main scanning direction corresponding to the scanning direction around the first axis. Raster scan is possible.

  Here, the scanning region has a main scanning direction (Y-axis direction) that is a scanning direction corresponding to the first axis as a longitudinal direction, and a sub-scanning direction (Z-axis direction) that is a scanning direction corresponding to the second axis. Is a substantially rectangular shape with a short direction.

  Returning to FIG. 1, the control device 7 includes an image processing unit 7a, an LD control unit 7b, and a mirror control unit 7c.

  The image processing unit 7a performs predetermined processing (for example, distortion correction processing, image size change processing, resolution conversion processing, etc.) on image information from a host device such as a personal computer, and sends it to the LD control unit 7b.

  Based on the image information from the image processing unit, the LD control unit 7b modulates the intensity of the drive signal (pulse signal) and outputs it to the LD 10. Further, the LD control unit 7b determines the light emission timing of the LD 10 (timing for supplying a drive signal to the LD 10) based on a synchronization signal described later from the mirror control unit 7c.

  The mirror controller 7c synchronizes the deflection angle of the mirror 20c and the light emission timing of the LD 10 based on a detection signal from a sensor (not shown) that detects position information about the first axis and the second axis of the mirror 20c. For this purpose is output to the LD controller 7b.

  In the projector device 100 configured as described above, laser light modulated based on image information is emitted from the LD 10 and deflected by the optical deflector 20 toward the surface to be scanned. As a result, a predetermined scanning area on the surface to be scanned is two-dimensionally scanned in the main scanning direction and the sub-scanning direction, and a desired image is formed in the scanning area.

  By the way, the semiconductor laser (laser diode) is particularly suitable for the light source of the scanning projector device as in the present embodiment, because high light utilization efficiency can be obtained due to the high directivity of the emitted light.

  However, when the emitted light is incident on the surface of the cover glass 20b, a part of the light passes through the cover glass 20b, and the remaining part (for example, less than several percent) is reflected on the surface of the cover glass 20b to become stray light.

  In this case, if the reflected light of the emitted light on the surface of the cover glass 20b (hereinafter also referred to as surface reflected light) enters the scanning region, an abnormal image is generated in the image formed in the scanning region, Image quality is degraded (see FIG. 4).

  That is, the stray light generated by the laser light from the LD 10 has a high intensity and is easily visually recognized due to its directivity. When stray light (stationary beam) that is not deflected is generated with respect to the laser light (dynamic beam) deflected by the optical deflector 20, it is visually recognized because it becomes relatively bright even if it is slight, and the image quality is degraded. End up.

  Therefore, in the present embodiment, the positional relationship between the cover glass 20b and the mirror 20c is set so that the optical path of the surface reflected light deviates from the scanning region. Here, the positional relationship between the cover glass 20b and the mirror 20c is set so that the optical path of the surface reflected light deviates from the scanning region in the sub-scanning direction (Z-axis direction).

  More specifically, the positional relationship between the cover glass 20b and the mirror 20c is such that the mirror 20c is positioned at an arbitrary position within the first swing range around the first axis and the second swing around the second axis. When located at an arbitrary position within the range, the reflecting surface of the mirror 20c and the surface of the cover glass 20b are set to be non-parallel. In this case, regardless of the positions around the first axis and the second axis of the mirror 20c, the reflection surface of the mirror 20c and the surface of the cover glass 20b are not parallel, and the surface reflected light is incident on the scanning region. Can be prevented.

  Specifically, as can be seen from FIG. 3, the maximum deflection angle α (acute angle) from the reference plane (vibration center) around the second axis of the mirror 20c is a plane parallel to the surface of the cover glass 20b and the reference plane. Is set smaller than the angle β (acute angle) formed by the above, that is, the tilt angle with respect to the reference surface of the cover glass 20b. Here, the reference plane is a plane including the first axis and the second axis.

  As can be seen from FIG. 1, the positional relationship between the cover glass 20b and the mirror 20c is such that the optical path of the laser light (emitted light) from the LD 10 and the optical path of the surface reflected light are deflected by the optical deflector 20 ( It is set to be on the same side as viewed from the −Y direction with respect to the optical path of the (scanning light). That is, the optical path of the emitted light and the optical path of the surface reflected light are on the side opposite to the optical path of the scanning light with respect to a predetermined virtual plane parallel to the Y axis.

  In this case, since the incident angle of the emitted light to the cover glass 20b can be reduced, the transmittance of the emitted light to the cover glass 20b can be increased. As a result, light utilization efficiency can be improved.

  Further, as can be seen from FIG. 1, the positional relationship between the cover glass 20b and the mirror 20c is such that the optical path of the emitted light and the optical path of the scanning light are on the same side as viewed from the −Y direction with respect to the optical path of the surface reflected light. Is set to That is, the optical path of the emitted light and the optical path of the scanning light are on the opposite side of the optical path of the surface reflected light with respect to a predetermined virtual plane parallel to the Y axis.

  In this case, the optical path of the surface reflected light can be sufficiently distant from the scanning region. If the optical path of the surface reflected light is close to the scanning region, the surface reflected light may be scattered by other members in the apparatus near the scanning region and may enter the scanning region with a relatively high intensity.

  Here, if the surface reflected light returns to the LD 10, the laser oscillation of the LD 10 becomes unstable and output fluctuation occurs. As a result, the surface to be scanned cannot be scanned stably.

  Therefore, in the present embodiment, the incident angle of the emitted light to the cover glass 20b is set to other than 0 °, and the surface reflected light is prevented from returning directly to the LD 10.

  However, if the optical path of the surface reflected light is not sufficiently separated from the optical path of the emitted light, the surface reflected light may be scattered by other members in the apparatus, and the scattered light may enter the LD 10 in a relatively strong state.

  Therefore, in this embodiment, as shown in FIG. 1, the light shielding member 30 is arranged on the optical path of the surface reflected light. The light blocking member 30 is arranged in a posture to reflect the incident surface reflected light in a direction away from the optical path of the emitted light.

  In addition, it is preferable that the incident surface (surface on which surface reflected light is incident) of the light shielding member 30 is a surface that diffuses and reflects light (for example, a rough surface). The light shielding member 30 may have a function of absorbing at least part of the surface reflected light or may have a function of transmitting part of the surface reflected light. In addition, when the light shielding member 30 has a function of absorbing most of the surface reflected light, the posture of the light shielding member 30 may be arbitrary.

  The optical scanning device 5 of the present embodiment described above includes the LD 10, the cover glass 20b disposed on the optical path of the laser light (emitted light) from the LD 10, and the laser light transmitted through the cover glass 20b. An optical deflector 20 that deflects the laser light from the LD 10 toward the surface to be scanned, and a cover glass 20b for the laser light from the LD 10. And a light shielding member 30 disposed on the optical path of the reflected light (surface reflected light) on the surface.

  In this case, since the surface reflected light is shielded by the light shielding member 30, the surface reflected light can be prevented from entering the scanning area of the surface to be scanned, and the surface reflected light can be prevented from returning to the LD 10.

  As a result, it is possible to prevent an abnormal image from being generated on the surface to be scanned, and to stably scan the surface to be scanned.

  More specifically, the mirror 20c is swingable within a first swing range around the first axis and within a second swing range around the second axis, and the mirror 20c is the first swing range. When located at an arbitrary position within the range and at an arbitrary position within the second swing range, the reflection surface of the mirror 20c and the surface of the cover glass 20b are non-parallel.

  On the other hand, in the optical scanning device of the comparative example shown in FIG. 4, the optical deflector has a so-called flat package, and the surface of the cover glass faces the reflecting surface of the mirror located at a predetermined position within the swing range. Parallel.

  In this case, the surface reflected light is incident on the center of the scanning area and is recognized as a bright spot in the center of the image (an abnormal image is generated). Therefore, it is conceivable that the distance of the cover glass with respect to the mirror is made sufficiently long, and the optical path of the surface reflected light is separated from the scanning light. However, this increases the size of the package and increases the cost. Even if the cover glass is tilted slightly with respect to the mirror, that is, by an angle smaller than the maximum deflection angle of the reflecting surface, the surface reflected light is incident on the peripheral part of the scanning area, and the bright spot at the peripheral part of the image And is recognized (an abnormal image is generated).

  By the way, in order to increase the tilt angle with respect to the reference plane (the plane including the first axis and the second axis) of the cover glass 20b, the height dimension of the package 20a (the two parallel sides in the XZ section of the package 20a) Of these, it is necessary to increase the length of the longer side), making it difficult to process the package 20a. As a result, the optical deflector 20 is increased in size and cost.

  Therefore, in the optical deflector 20, the mirror 20c has a sub-scan corresponding to the optical path of the surface reflected light around the second axis (around the axis with the smaller swing range) around the first axis and around the second axis. It is out of the scanning area with respect to the direction (Z-axis direction).

  In this case, as compared with the case where the optical path of the surface reflected light is deviated from the scanning region with respect to the main scanning direction (Y-axis direction) corresponding to the first axis (around the axis with the larger swinging range), the cover glass. The tilt angle with respect to the reference plane 20b can be reduced, and consequently the increase in size and cost of the optical deflector can be suppressed.

  5, the positional relationship between the cover glass 22b and the mirror 20c is a predetermined virtual plane in which the optical path of the emitted light and the optical path of the scanning light are parallel to the Y axis. May be set so as to be on a different side from the optical path of the surface reflected light (viewed from the −Y side), that is, to sandwich the optical path of the surface reflected light viewed from the −Y side.

  Also in Modification 1, since the surface reflected light is shielded by the light shielding member 30, the surface reflected light can be prevented from entering the scanning region, and the surface reflected light can be prevented from returning to the LD 10. Further, in the first modification, the angle difference seen from the −Y direction between the optical path of the surface reflected light and the scanning light can be reduced as compared with the above embodiment, so that the tilt angle of the cover glass 20b can be reduced. It is possible to reduce the size and cost of the deflector.

  Further, as in the projector devices 300 and 400 of Modification 2 and Modification 3 shown in FIGS. 6 and 7, respectively, a lens 60 disposed on the optical path between the LD 10 and the optical deflectors 20 and 22 is provided. May be. Here, as the lens 60, for example, a coupling lens that collimates, weakly diverges, or weakly converges the emitted light is used. The lens 60 may be a lens other than the coupling lens.

  In the second modification and the third modification, the light blocking member 30 is disposed between the lens 60 and the optical deflectors 20 and 22. As a result, it is possible to prevent the surface reflected light from returning to the LD 10 via the lens 60.

  Further, like the projector devices 500 and 600 of Modification 4 and Modification 5 shown in FIGS. 8 and 9, respectively, a lens 60 disposed on the optical path between the LD 10 and the optical deflectors 20 and 22, An opening member 80 disposed on the optical path between the lens 60 and the optical deflectors 20 and 22 may be provided. Note that the projector devices 500 and 600 do not include the light shielding member 30.

  The opening member 80 has an opening that allows a part of the emitted light through the lens 60 to pass therethrough, and shapes the emitted light. In addition, the opening member 80 is positioned on the optical path of the reflected light (surface reflected light) on the surface of the cover glass 20b, 22b of the laser light whose peripheral portion has passed through the opening. That is, the opening member 80 has a light shielding portion that shields the surface reflected light.

  In the projector apparatuses 500 and 600 according to the fourth and fifth modifications, the opening member 80 has both a function of shaping the emitted light and a function of shielding the surface reflected light, so that the configuration is simplified and the cost is reduced. be able to.

  It should be noted that the portion of the aperture member 80 where the surface reflected light is incident may be angled so that the surface reflected light does not face the optical deflector, or may be roughened and sufficiently scattered. Alternatively, it may be formed of a material that absorbs at least part of the surface reflected light.

  Further, as in the projector device 700 according to the sixth modification shown in FIG. 10, the cover glass 24b may be arranged in parallel to the reference plane (a plane including the first axis and the second axis).

  In the modified example 6, the package 24a of the optical deflector 24 is a flat package made of a member having a substantially U-shaped XZ cross section, and the surface reflected light is directed toward the optical path of the scanning light as in the comparative example shown in FIG. And proceed.

  Therefore, in the modified example 6, the light shielding member 30 is disposed at a position on the optical path of the surface reflected light (on the path) and out of the optical path of the scanning light. As a result, the surface reflected light can be shielded. It is preferable to adjust the posture of the light shielding member 30 so that the light reflected (scattered) by the light shielding member 30 does not go to the LD 10 and the optical deflector 24.

  According to the modified example 6, since the optical deflector 24 can be easily processed and a small flat package can be used, downsizing and cost reduction can be achieved.

  Moreover, like the optical deflector 26 of the modification 7 shown by FIG. 11, the package 26a (1st holding | maintenance part) holding the mirror 20c, and the holding member 26c (2nd holding | maintenance part) holding the cover glass 26b ) May be joined.

  By adopting such a configuration, a flat package can be used as the package 26a, and the cover glass 26b can be arranged to be inclined with respect to the reference plane.

  According to the modified example 7, the processing of the package can be facilitated, and the same effect as the above embodiment can be obtained.

  In the above-described embodiment and each modification, the optical deflector is used in a projector device as an image forming apparatus. However, the present invention is not limited to this, and for example, a head-up display device 1000 as an image forming apparatus shown in FIG. May be used. The head-up display 1000 is mounted on, for example, a vehicle, an aircraft, a ship, or the like.

  More specifically, as shown in FIG. 12 as an example, the head-up display 1000 includes a plurality of two-dimensionally arranged microlenses arranged on the optical path of laser light (scanning light) deflected by an optical deflector. And a translucent member (for example, a combiner) disposed on the optical path of the laser light through the microlens array. In this case, the surface (scanned surface) of the microlens array is two-dimensionally scanned by the laser light along with the deflection operation of the laser light around the first axis and the second axis by the optical deflector, and an image is formed on the scanned surface. It is formed. Then, the image light that has passed through the microlens array enters the translucent member, and a virtual image of the image light is formed. That is, the observer can visually recognize the virtual image of the image light through the translucent member. At this time, since the image light is diffused by the microlens array, so-called speckle noise can be reduced.

  Instead of the microlens array, a light transmitting member other than the microlens array (for example, a transmissive screen) may be used. Further, for example, a mirror such as a concave mirror or a plane mirror may be provided on an optical path between a light transmissive member such as a microlens array or a transmissive screen and a semitransparent member. Further, the translucent member may be substituted with a light transmission window portion (for example, window glass) of a vehicle, an aircraft, a ship or the like.

  In view of this, a vehicle including a head-up display 1000 and a light transmission window (for example, a window glass) disposed on the optical path of light deflected by the light deflector of the head-up display 1000 and transmitted through the light transmission member ( For example, a car, a train, etc.) can be provided. In this case, the image light transmitted through the light transmitting member is incident on the light transmitting window, and a virtual image of the image light is formed. That is, the observer can visually recognize the virtual image of the image light through the light transmission window.

  Also provided are an image forming apparatus for viewing a virtual image such as a head-mounted display apparatus, a prompter (document display apparatus), etc., and a vehicle having the same structure as the head-up display apparatus 1000, and a vehicle equipped with the image forming apparatus. You can also

  In addition, the optical scanning device including the optical deflector according to the above-described embodiment and each modification can be employed in an image forming apparatus such as a printer, a copying machine, and an optical plotter, and the image forming apparatus can be provided.

  In the above embodiment and each modification, the positional relationship between the cover glass and the mirror is such that the optical path of the emitted light and the optical path of the surface reflected light are on the same side with respect to the optical path of the scanning light when viewed from the −Y direction. Although set, it may be set to be on a different side (opposite side).

  Moreover, in the said embodiment and each modification, although the positional relationship of a cover glass and a mirror is set so that the optical path of surface reflected light may remove | deviate from a scanning area regarding a subscanning direction, it is not restricted to this. For example, the optical path of the surface reflected light may deviate from the scanning area with respect to the main scanning direction, or may deviate from the scanning area with respect to both the sub-scanning direction and the main scanning direction. In order to deviate the optical path of the surface reflected light from the scanning region in the main scanning direction, the maximum deflection angle (acute angle) from the reference plane (vibration center) around the first axis of the mirror is set to the surface of the cover glass. And an angle formed by a plane parallel to the reference plane (acute angle) may be set.

  In this case, the positional relationship between the cover glass and the mirror may be set so that the optical path of the emitted light and the optical path of the surface reflected light are on the same side with respect to the optical path of the scanning light as viewed from the + Z direction. It may be set to be on the (opposite side). Further, the positional relationship between the cover glass and the mirror may be set so that the optical path of the emitted light and the optical path of the surface reflected light are on the same side with respect to the optical path of the scanning light as viewed from the + Z direction. It may be set to be on the opposite side. In this case, the optical path of the emitted light and the optical path of the scanning light may be set on the same side with respect to the optical path of the surface reflected light as viewed from the + Z direction, or may be on different sides (opposite sides). May be set.

  Moreover, in the said embodiment and each modification, although cover glass is used as a light transmissive window member, it is not restricted to this, What is necessary is just the member which permeate | transmits light.

  Moreover, in the said embodiment and each modification, the shape of a light shielding part, a magnitude | size, a number, attitude | position, and arrangement | positioning can be changed suitably.

  In the above-described embodiment and each modified example, an LD (laser diode), that is, an edge-emitting laser is used as a light source of the optical scanning device. However, the present invention is not limited to this. The light source may be used.

  In the above embodiment and each modification, the control device includes the image processing unit, but it does not necessarily have to.

  Moreover, in the said embodiment and each modification, although LD control part directly modulates LD10 based on image information, it replaces with this, for example, the laser beam inject | emitted from LD10 is based on image information. You may provide the optical modulation part to modulate. That is, an external modulation method may be adopted.

  In the above embodiment and each modification, one optical deflector for two-dimensional scanning in two scanning directions (main scanning direction and sub-scanning direction) orthogonal to each other is employed. For example, an optical deflector for one-dimensional scanning in one scanning direction, that is, an optical deflector including a mirror that swings only around one axis may be employed. For example, two optical deflectors including mirrors that swing only around one axis may be combined to perform two-dimensional scanning in two orthogonal scanning directions. Even in such an optical deflector including a mirror that swings only around one axis, it is possible to generate an abnormal image on the surface to be scanned by adopting the same configuration as in the above-described embodiment and each modification. This can be prevented, and the surface to be scanned can be scanned stably.

  DESCRIPTION OF SYMBOLS 5 ... Optical scanning apparatus, 10 ... LD (light source), 20 ... Optical deflector, 20b, 22b, 24b, 26b ... Cover glass (light transmission window member), 20c ... Mirror, 26a ... Package (1st holding | maintenance part) , 26c ... holding member (second holding part), 30 ... light shielding member (light shielding part), 60 ... lens, 80 ... opening member, 100, 200, 300, 400, 500, 600, 700 ... projector apparatus (image formation) Apparatus), 1000... Head-up display apparatus (image forming apparatus).

JP 2006-221171 A

Claims (6)

A container having an opening through which light passes;
A mirror that is housed in the housing and deflects light incident through the opening by rotating around a predetermined rotation axis from a reference surface;
A light transmissive plate attached to the opening and inclined about the rotation axis with respect to the reference plane,
A maximum deflection angle of the mirror from the reference plane is smaller than an inclination angle of the light transmission plate with respect to the reference plane;
The mirror can be rotated about a first axis and can be rotated about a second axis orthogonal to the first axis, and the frequency of rotation about the first axis is about the second axis. rather higher than the frequency of rotation, the maximum deflection angle about the first axis is a maximum deflection larger than angle casting around said second axis,
The light deflector is an optical deflector that is inclined about the second axis with respect to the reference plane. The container includes a first member having a first opening whose opening surface is parallel to the reference surface, and a second member attached to the first opening, the opening surface being inclined with respect to the reference surface. Including a second member having an opening;
2. The optical deflector according to claim 1, wherein the light transmission plate is attached to the second opening and is inclined about the rotation axis with respect to the reference plane. A light source, an optical scanning device comprising a light deflector, comprising a scans a scanning area by the light deflected by the optical deflector according to claim 1 or 2 for deflecting the light from the light source,
An optical scanning device characterized in that an optical path of surface-reflected light by reflecting light from the light source on the surface of a light transmission plate of the optical deflector deviates from the scanning region. An optical scanning device according to claim 3 ,
An image forming apparatus comprising: an intensity modulating unit that modulates the intensity of a light source of the optical scanning device based on image information; or a modulating unit that modulates light emitted from the light source based on image information. The image forming apparatus according to claim 4 , further comprising a light transmission member that is scanned by light deflected by an optical deflector of the optical scanning device. An image forming apparatus according to claim 5 ;
A vehicle comprising: a light transmission window portion disposed on an optical path of light deflected by an optical deflector of the image forming apparatus and transmitted through the light transmission member.

Images