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JP6495755B2 - UV detector - Google Patents
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JP6495755B2 - UV detector - Google Patents

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JP6495755B2
JP6495755B2 JP2015119409A JP2015119409A JP6495755B2 JP 6495755 B2 JP6495755 B2 JP 6495755B2 JP 2015119409 A JP2015119409 A JP 2015119409A JP 2015119409 A JP2015119409 A JP 2015119409A JP 6495755 B2 JP6495755 B2 JP 6495755B2
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cathode
anode
discharge
light
container
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JP2017003497A (en
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司朗 池田
司朗 池田
裕之 影山
裕之 影山
天界 中村
天界 中村
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Hamamatsu Photonics KK
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Description

本発明は、紫外線検出器に関する。   The present invention relates to an ultraviolet detector.

光電子放出効果及び放電現象を利用した紫外線検出器として、光透過性を有し、放電ガスが封入された容器と、容器内に配置された陰極放電部、及び容器の封着部を貫通する陰極支持部を有する陰極と、容器内に配置された陽極放電部、及び容器の封着部を貫通する陽極支持部を有する陽極と、を備えるものが知られている(例えば、特許文献1参照)。   As an ultraviolet detector utilizing the photoelectron emission effect and discharge phenomenon, a light-transmitting container in which discharge gas is enclosed, a cathode discharge part disposed in the container, and a cathode penetrating the sealing part of the container What is equipped with the cathode which has a support part, the anode discharge part arrange | positioned in a container, and the anode which has an anode support part which penetrates the sealing part of a container is known (for example, refer patent document 1). .

特開昭49−59568号公報JP-A 49-59568

上述したような紫外線検出器においては、可視光下であっても所定の紫外域の光を精度良く検出することが好ましく、また、その検出感度も、個体によるばらつきを抑制して均一化することが好ましい。   In the ultraviolet detector as described above, it is preferable to accurately detect light in a predetermined ultraviolet region even under visible light, and the detection sensitivity should be uniformed while suppressing variation among individuals. Is preferred.

本発明は、可視光下であっても所定の紫外域の光を精度良く検出することができ、且つ簡単な構成で検出感度の均一化を図ることができる紫外線検出器を提供することを目的とする。   An object of the present invention is to provide an ultraviolet detector that can accurately detect light in a predetermined ultraviolet region even under visible light and can achieve uniform detection sensitivity with a simple configuration. And

本発明の紫外線検出器は、光透過性を有し、放電ガスが封入された容器と、容器内に配置された陰極放電部、及び容器の封着部を貫通する陰極支持部を有する棒状の陰極と、容器内に配置された陽極放電部、及び封着部を貫通する陽極支持部を有する棒状の陽極と、を備え、陰極及び陽極のいずれか一方には、陰極放電部と陽極放電部とが第1間隔で互いに対向し且つ陰極支持部と陽極支持部とが第1間隔よりも大きい第2間隔で互いに対向するように、曲げ部が設けられており、陰極放電部の少なくとも表面を構成する第1材料は、可視域の光に対する平均感度よりも所定の紫外域の光に対する平均感度が高く且つ陰極支持部の少なくとも表面を構成する第2材料に比べて可視域の光に対する平均感度が低い。   The ultraviolet detector of the present invention has a light-transmitting container having a discharge gas sealed therein, a cathode discharge part arranged in the container, and a rod-like support part penetrating the sealing part of the container A cathode and a rod-like anode having an anode support part disposed in the container and an anode support part penetrating the sealing part, and either the cathode or the anode includes a cathode discharge part and an anode discharge part And the cathode support portion and the anode support portion are opposed to each other at a second interval larger than the first interval, and at least a surface of the cathode discharge portion is provided. The first material to be configured has higher average sensitivity to light in a predetermined ultraviolet region than average sensitivity to light in the visible region, and average sensitivity to light in the visible region as compared with the second material constituting at least the surface of the cathode support portion. Is low.

この紫外線検出器では、可視域の光に対する平均感度よりも所定の紫外域の光に対する平均感度が高く且つ陰極支持部の第2材料に比べて可視域の光に対する平均感度が低い第1材料が、陰極放電部に使用されており、陰極放電部と陽極放電部とが、陰極支持部と陽極支持部との第2間隔よりも小さい第1間隔で対向している。これにより、陰極と陽極の間において放電の発生しやすい領域は、所定の紫外域の光に対して感度の高い領域と重なるので、可視域の光に起因する光電子放出及び放電は抑制され、可視光下であっても所定の紫外域の光を精度良く検出することができる。更に、陰極及び陽極のいずれか一方に曲げ部を設けることで第1間隔及び第2間隔を構成しているため、例えば陰極及び陽極の両方に曲げ部が設けられている場合と比較して、精度良く第1間隔及び第2間隔を構成することができる。これにより、簡単な構成で検出感度の均一化を図ることができる。以上により、この紫外線検出器によれば、可視光下であっても所定の紫外域の光を精度良く検出することができ、且つ簡単な構成で検出感度の均一化を図ることができる。   In this ultraviolet detector, the first material has a higher average sensitivity to light in a predetermined ultraviolet region than an average sensitivity to light in the visible region, and a lower average sensitivity to light in the visible region than the second material of the cathode support. The cathode discharge part and the anode discharge part are opposed to each other at a first interval smaller than the second interval between the cathode support part and the anode support part. As a result, a region where discharge is likely to occur between the cathode and the anode overlaps with a region having high sensitivity to light in a predetermined ultraviolet region, so that photoelectron emission and discharge caused by light in the visible region are suppressed and visible. Even under light, it is possible to accurately detect light in a predetermined ultraviolet region. Furthermore, since the first interval and the second interval are configured by providing a bent portion on one of the cathode and the anode, for example, compared to a case where the bent portion is provided on both the cathode and the anode, The first interval and the second interval can be configured with high accuracy. As a result, the detection sensitivity can be made uniform with a simple configuration. As described above, according to the ultraviolet detector, light in a predetermined ultraviolet region can be accurately detected even under visible light, and detection sensitivity can be made uniform with a simple configuration.

本発明の紫外線検出器では、第2材料と容器の材料との熱膨張係数差は、第1材料と容器の材料との熱膨張係数差よりも小さくてもよい。これにより、封着部での不具合による第1間隔及び第2間隔の変化が生じるのを確実に抑制し、検出感度の均一化をより確実に図ることができる。   In the ultraviolet detector of the present invention, the difference in thermal expansion coefficient between the second material and the container material may be smaller than the difference in thermal expansion coefficient between the first material and the container material. As a result, it is possible to reliably suppress the occurrence of changes in the first interval and the second interval due to a defect in the sealing portion, and to achieve uniform detection sensitivity.

本発明の紫外線検出器では、曲げ部は、陽極に設けられていてもよい。これにより、光電子放出領域となる陰極放電部に対する曲げ部の影響を抑制し、検出感度の更なる均一化を図ることができる。   In the ultraviolet detector of the present invention, the bent portion may be provided on the anode. Thereby, the influence of the bending part with respect to the cathode discharge part used as a photoelectron emission area | region can be suppressed, and the detection sensitivity can be made further uniform.

本発明の紫外線検出器では、曲げ部の少なくとも一部は、陰極放電部と対向していてもよい。例えば、陽極に設けられた曲げ部が陰極支持部とのみ対向している位置に設けられた場合、陰極支持部が陽極放電部と第1間隔で対向する場合もあるために、陰極支持部と陽極放電部との間で、可視域の光に起因する光電子放出及び放電が生じるおそれがある。陽極に設けられた曲げ部の少なくとも一部を陰極放電部と対向させることで、陰極支持部は陽極に対して少なくとも第1間隔よりも大きく離間するため、そのような現象を抑制し、所定の紫外域の光をより精度良く検出することができる。   In the ultraviolet detector of the present invention, at least a part of the bent portion may face the cathode discharge portion. For example, when the bent portion provided on the anode is provided at a position facing only the cathode support portion, the cathode support portion may face the anode discharge portion at the first interval. Photoelectron emission and discharge due to light in the visible range may occur between the anode discharge portion and the anode discharge portion. By causing at least a part of the bent portion provided on the anode to face the cathode discharge portion, the cathode support portion is spaced apart from the anode by at least the first interval. Ultraviolet light can be detected with higher accuracy.

本発明の紫外線検出器では、曲げ部は、陰極放電部に設けられていてもよい。これにより、曲げ部の途中で放電が発生しても、その放電は所定の紫外域の光に起因するため、所定の紫外域の光をより精度良く検出することができる。   In the ultraviolet detector of the present invention, the bent part may be provided in the cathode discharge part. As a result, even if a discharge occurs in the middle of the bent portion, the discharge is caused by light in a predetermined ultraviolet region, so that light in the predetermined ultraviolet region can be detected with higher accuracy.

本発明の紫外線検出器では、陰極放電部は、第1材料からなる棒状部材であってもよい。陰極放電部を第1材料からなる棒状部材で構成することで、例えば、陰極放電部の表面が、所望の基材上に第1材料を膜状に形成することで構成される場合と比べて、放電によって第1材料が剥離する等の不具合が生じるおそれを抑制し、長寿命化を図ることができる。   In the ultraviolet detector of the present invention, the cathode discharge part may be a rod-shaped member made of the first material. By configuring the cathode discharge part with a rod-shaped member made of the first material, for example, compared to the case where the surface of the cathode discharge part is formed by forming the first material in a film form on a desired substrate. In addition, it is possible to suppress a possibility that the first material is peeled off due to discharge, and to extend the life.

本発明の紫外線検出器では、陰極放電部と陽極放電部とが対向する方向から見た場合、陰極放電部の幅は、陽極放電部の幅よりも大きくてもよい。これにより、所定の紫外域の光に対する検出感度をより高くすることができる。   In the ultraviolet detector of the present invention, the width of the cathode discharge part may be larger than the width of the anode discharge part when viewed from the direction in which the cathode discharge part and the anode discharge part face each other. Thereby, the detection sensitivity with respect to the light of a predetermined ultraviolet region can be made higher.

本発明によれば、可視光下であっても所定の紫外域の光を精度良く検出することができ、且つ簡単な構成で検出感度の均一化を図ることができる紫外線検出器を提供できる。   ADVANTAGE OF THE INVENTION According to this invention, even if it is under visible light, the ultraviolet detector which can detect the light of a predetermined ultraviolet region accurately and can aim at equalization of detection sensitivity with a simple structure can be provided.

実施形態の紫外線検出器の断面図である。It is sectional drawing of the ultraviolet detector of embodiment. 図1の紫外線検出器をA方向から見た図である。It is the figure which looked at the ultraviolet detector of FIG. 1 from the A direction. 陰極放電部がニッケルからなる場合、及び陰極放電部がコバールからなる場合の分光感度特性を示すグラフである。It is a graph which shows the spectral sensitivity characteristic in case a cathode discharge part consists of nickel, and a cathode discharge part consists of kovar. 第1変形例の紫外線検出器の断面図である。It is sectional drawing of the ultraviolet detector of a 1st modification. 図4の紫外線検出器をB方向から見た図である。It is the figure which looked at the ultraviolet detector of FIG. 4 from the B direction. 第2変形例の紫外線検出器の断面図である。It is sectional drawing of the ultraviolet detector of a 2nd modification. 第3変形例の紫外線検出器の断面図である。It is sectional drawing of the ultraviolet detector of a 3rd modification. 第4変形例の紫外線検出器の断面図である。It is sectional drawing of the ultraviolet detector of a 4th modification.

以下、本発明に係る実施形態について、図面を参照しつつ詳細に説明する。なお、以下の説明において、同一又は相当要素には同一符号を用い、重複する説明は省略する。   Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings. In the following description, the same reference numerals are used for the same or corresponding elements, and duplicate descriptions are omitted.

図1及び図2に示されるように、紫外線検出器1は、容器10と、陰極20と、陽極30と、を備えている。紫外線検出器1は、光電子放出効果及び放電現象を利用して所定の紫外域の光を検出するセンサであって、例えば炎センサとして用いられる。なお、図2では、容器10が透過されており、容器10の外形が仮想線で示されている。   As shown in FIGS. 1 and 2, the ultraviolet detector 1 includes a container 10, a cathode 20, and an anode 30. The ultraviolet detector 1 is a sensor that detects light in a predetermined ultraviolet region using a photoelectron emission effect and a discharge phenomenon, and is used as, for example, a flame sensor. In addition, in FIG. 2, the container 10 is permeate | transmitted and the external shape of the container 10 is shown with the virtual line.

容器10は、略円筒状の本体部11と、扁平状の封着部12と、を有している。容器10は、例えばコバールガラス等の光透過性(紫外線透過性)を有する材料からなる。容器10内には、例えばネオン、アルゴン等の放電ガスが封入されており、容器10内は、気密に維持されている。   The container 10 has a substantially cylindrical main body portion 11 and a flat sealing portion 12. The container 10 is made of a material having optical transparency (ultraviolet ray transparency) such as Kovar glass. The container 10 is filled with a discharge gas such as neon or argon, and the container 10 is kept airtight.

陰極20は、容器10内に配置された陰極放電部21と、容器10の封着部12を貫通する陰極支持部22と、を有する棒状の電極である。陰極放電部21及び陰極支持部22のそれぞれは、直線状且つ断面円形状の棒状部材である。陰極放電部21の直径は、陰極支持部22の直径よりも大きい。陰極放電部21は、可視域の光に対する平均感度よりも所定の紫外域の光に対する平均感度が高く且つ陰極支持部22の材料に比べて可視域の光に対する平均感度が低い材料(以下、「第1材料」という)からなる。このような第1材料としては、例えばニッケル、白金、又は金等の金属が挙げられる。陰極支持部22は、陰極放電部と異なる材料(以下、「第2材料」という)からなる。第2材料と容器10の材料との熱膨張係数差は、第1材料と容器10の材料との熱膨張係数差よりも小さい。このような第2材料としては、例えばコバール等の金属が挙げられる。陰極放電部21と陰極支持部22とは、長手方向から見た場合に互いの中心が一致するように(陰極20として同軸に延びるように)、長手方向の端面において、例えば溶接によって互いに接続されている。   The cathode 20 is a rod-shaped electrode having a cathode discharge part 21 disposed in the container 10 and a cathode support part 22 that penetrates the sealing part 12 of the container 10. Each of the cathode discharge part 21 and the cathode support part 22 is a rod-like member having a linear shape and a circular cross section. The diameter of the cathode discharge part 21 is larger than the diameter of the cathode support part 22. The cathode discharge portion 21 is a material (hereinafter referred to as “a material having a higher average sensitivity to light in a predetermined ultraviolet region than the average sensitivity to light in the visible region” and having a lower average sensitivity to light in the visible region than the material of the cathode support portion 22. The first material). Examples of such a first material include metals such as nickel, platinum, and gold. The cathode support part 22 is made of a material different from the cathode discharge part (hereinafter referred to as “second material”). The difference in thermal expansion coefficient between the second material and the material of the container 10 is smaller than the difference in thermal expansion coefficient between the first material and the material of the container 10. An example of such a second material is a metal such as Kovar. The cathode discharge part 21 and the cathode support part 22 are connected to each other on the end face in the longitudinal direction, for example, by welding so that the centers of the cathode discharge part 21 and the cathode support part 22 coincide with each other when viewed from the longitudinal direction (extend coaxially as the cathode 20). ing.

陰極支持部22は、陰極放電部21と接続された陰極接続部分24と、容器10の封着部12に対して封着(気密封止)された陰極被封着部分25と、容器10外に延在する陰極リード部分26と、を含んでいる。陰極被封着部分25が容器10の封着部12に対して封着されていることによって、陰極20が容器10に固定されている。陰極20は、陰極放電部21及び陰極支持部22が容器10の中心線Cと平行となるように固定されている。陰極リード部分26は、外部回路との電気的な接続に供される。   The cathode support part 22 includes a cathode connection part 24 connected to the cathode discharge part 21, a cathode sealed part 25 sealed (air-tightly sealed) to the sealing part 12 of the container 10, and the outside of the container 10. And a cathode lead portion 26 extending to the surface. The cathode 20 is fixed to the container 10 by sealing the cathode sealed portion 25 to the sealing portion 12 of the container 10. The cathode 20 is fixed so that the cathode discharge portion 21 and the cathode support portion 22 are parallel to the center line C of the container 10. The cathode lead portion 26 is used for electrical connection with an external circuit.

陽極30は、容器10内に配置された陽極放電部31と、容器10の封着部12を貫通する陽極支持部32と、陽極放電部31と陽極支持部32との間に設けられた曲げ部33と、を有する棒状の電極である。陽極30は、直線状且つ断面円形状の棒状部材を、陽極放電部31と陽極支持部32とで延在方向の軸がずれるように曲げ部33でクランク状に屈曲させた部材である。陽極放電部31及び陽極支持部32は、直線状に形成されている。陽極30の直径は、陰極放電部21の直径よりも小さく、例えば陰極支持部22の直径と同一である。陽極30は、例えばコバール等の金属からなり、陰極支持部22と同じ第2材料としてもよい。   The anode 30 includes an anode discharge part 31 disposed in the container 10, an anode support part 32 that penetrates the sealing part 12 of the container 10, and a bend provided between the anode discharge part 31 and the anode support part 32. And a bar-shaped electrode having a portion 33. The anode 30 is a member obtained by bending a straight rod-shaped member having a circular cross section into a crank shape at a bending portion 33 so that the axis in the extending direction is shifted between the anode discharge portion 31 and the anode support portion 32. The anode discharge part 31 and the anode support part 32 are formed linearly. The diameter of the anode 30 is smaller than the diameter of the cathode discharge part 21, for example, the same as the diameter of the cathode support part 22. The anode 30 is made of a metal such as Kovar, for example, and may be the same second material as the cathode support portion 22.

陽極支持部32は、曲げ部33と接続された陽極接続部分34と、容器10の封着部12に対して封着(気密封止)された陽極被封着部分35と、容器10外に延在する陽極リード部分36と、を含んでいる。陽極被封着部分35が容器10の封着部12に対して封着されていることによって、陽極30が容器10に固定されている。陽極30は、陽極放電部31及び陽極支持部32が容器10の中心線Cと平行となるように固定されている。陽極リード部分36は、外部回路との電気的な接続に供される。   The anode support part 32 includes an anode connection part 34 connected to the bending part 33, an anode sealed part 35 sealed (air-tightly sealed) to the sealing part 12 of the container 10, and an outside of the container 10. An anode lead portion 36 extending therethrough. The anode 30 is fixed to the container 10 by sealing the anode sealed portion 35 to the sealing portion 12 of the container 10. The anode 30 is fixed so that the anode discharge part 31 and the anode support part 32 are parallel to the center line C of the container 10. The anode lead portion 36 is provided for electrical connection with an external circuit.

陰極放電部21、陰極支持部22、陽極放電部31、陽極支持部32及び曲げ部33は、同一平面上に位置している。陰極放電部21、陰極支持部22、陽極放電部31及び陽極支持部32は、当該平面内の所定線(例えば、容器10の中心線C)と平行である。   The cathode discharge part 21, the cathode support part 22, the anode discharge part 31, the anode support part 32, and the bending part 33 are located on the same plane. The cathode discharge part 21, the cathode support part 22, the anode discharge part 31, and the anode support part 32 are parallel to a predetermined line in the plane (for example, the center line C of the container 10).

図1に示されるように、陰極20と陽極30とは、容器10の中心線Cと直交する方向において互いに対向している。陰極放電部21と陽極放電部31とは、第1間隔D1で互いに平行となるように対向している。そして、曲げ部33によって離間した陰極支持部22と陽極支持部32とは、第1間隔D1よりも大きい第2間隔D2で互いに対向している。つまり、曲げ部33は、陰極放電部21と陽極放電部31とが第1間隔D1で互いに対向し且つ曲げ部33の陽極支持部32側の端部(曲げ部33の終端)から封着部12に到るまでの間において陰極支持部22と陽極支持部32とが第2間隔D2で対向するように、陽極30に設けられている。曲げ部33は、容器10の中心線Cと直交する方向において、陰極放電部21と対向している。より詳しくは、曲げ部33のうち、少なくとも陽極放電部31側の端部(曲げ部33の始端)は、陰極放電部21のうちの封着部12側の端部を含む領域と対向している。よって、陰極放電部21のうちの封着部12側の端部(陰極支持部22との境界部)においては、陽極30との間の距離が、第1間隔D1よりも大きく、第2間隔D2以下となる。陰極放電部21の先端21aと陽極放電部31の先端31aとは、容器10の中心線Cと直交する方向において互いに対向している。   As shown in FIG. 1, the cathode 20 and the anode 30 face each other in a direction orthogonal to the center line C of the container 10. The cathode discharge part 21 and the anode discharge part 31 are opposed to each other at a first distance D1. And the cathode support part 22 and the anode support part 32 which were separated by the bending part 33 are mutually opposed by the 2nd space | interval D2 larger than the 1st space | interval D1. That is, the bent portion 33 is a sealed portion from the end portion of the bent portion 33 on the anode support portion 32 side (the end of the bent portion 33) where the cathode discharge portion 21 and the anode discharge portion 31 face each other at the first interval D1. 12, the anode support portion 22 and the anode support portion 32 are provided on the anode 30 so as to face each other at the second distance D2. The bent portion 33 faces the cathode discharge portion 21 in a direction orthogonal to the center line C of the container 10. More specifically, in the bent portion 33, at least the end portion on the anode discharge portion 31 side (starting end of the bent portion 33) faces the region including the end portion on the sealing portion 12 side in the cathode discharge portion 21. Yes. Therefore, in the end part (boundary part with the cathode support part 22) by the side of the sealing part 12 among the cathode discharge parts 21, the distance between the anodes 30 is larger than 1st space | interval D1, and 2nd space | interval. D2 or less. The tip 21 a of the cathode discharge part 21 and the tip 31 a of the anode discharge part 31 are opposed to each other in a direction orthogonal to the center line C of the container 10.

図2に示されるように、陰極放電部21と陽極放電部31とが対向する方向(陰極20と陽極30とが重なって見える方向)から見た場合、陰極放電部21の幅は、陽極放電部31の幅よりも大きい。このため、陰極放電部21と陽極放電部31とが対向する方向から見て、陰極放電部21が陽極放電部31からはみ出している。なお、陰極放電部21及び陽極放電部31の幅方向とは、陰極放電部21、陰極支持部22、陽極放電部31、陽極支持部32及び曲げ部33が位置する上記平面と直交する方向である。   As shown in FIG. 2, when viewed from the direction in which the cathode discharge portion 21 and the anode discharge portion 31 face each other (the direction in which the cathode 20 and the anode 30 appear to overlap), the width of the cathode discharge portion 21 is the anode discharge. It is larger than the width of the part 31. Therefore, the cathode discharge portion 21 protrudes from the anode discharge portion 31 when viewed from the direction in which the cathode discharge portion 21 and the anode discharge portion 31 face each other. The width direction of the cathode discharge part 21 and the anode discharge part 31 is a direction orthogonal to the plane on which the cathode discharge part 21, the cathode support part 22, the anode discharge part 31, the anode support part 32, and the bending part 33 are located. is there.

次に、第1材料及び第2材料の特性について説明する。陰極放電部21に使用される第1材料は、可視域(例えば、400nm以上700nm未満)の光に対する平均感度よりも所定の紫外域(例えば、185nm以上260nm以下)の光に対する平均感度が高い材料であり、且つ陰極支持部22に使用される第2材料に比べて可視域の光に対する平均感度が低い材料である。また、上記所定の紫外域の光に対する平均感度を可視域の光に対する平均感度で除した(割った)値に着目すると、陰極放電部21に使用される第1材料の当該値は、陰極支持部22に使用される第2材料の当該値よりも大きい。特に、この例では、第1材料は、260nm以上の波長域(可視域及び赤外域を含む)の光に対して実質的に感度を有していない。言い換えれば、光電子放出において、第1材料は、第2材料よりも、紫外域の光に対する選択性が高いとも言える。なお、所定の波長域の光に対する平均感度とは、当該波長域における感度の平均値であり、例えば相加平均値である。   Next, the characteristics of the first material and the second material will be described. The first material used for the cathode discharge unit 21 is a material having higher average sensitivity to light in a predetermined ultraviolet region (for example, 185 nm to 260 nm) than the average sensitivity to light in the visible region (for example, 400 nm to less than 700 nm). The average sensitivity to light in the visible range is lower than that of the second material used for the cathode support 22. Further, when attention is paid to a value obtained by dividing (dividing) the average sensitivity with respect to the light in the predetermined ultraviolet region by the average sensitivity with respect to the light in the visible region, the value of the first material used for the cathode discharge portion 21 is determined by the cathode support. It is larger than the said value of the 2nd material used for the part 22. FIG. In particular, in this example, the first material has substantially no sensitivity to light in a wavelength range of 260 nm or more (including the visible range and the infrared range). In other words, in photoelectron emission, it can be said that the first material has higher selectivity for light in the ultraviolet region than the second material. In addition, the average sensitivity with respect to light in a predetermined wavelength range is an average value of sensitivity in the wavelength range, for example, an arithmetic average value.

具体例を挙げて更に説明すると、図3に示されるように、陰極放電部21が第1材料の一例であるニッケルからなる場合、陰極放電部21は、約252nm以下の紫外域の光に対して感度を有し、約252nmよりも大きい波長域の光に対して感度を有していない。一方、陰極放電部21が第2材料の一例であるコバールからなる場合、陰極放電部21は、約252nmよりも大きい波長域の光に対して感度を有している。このように、ニッケルは、可視域の光に対する平均感度(すなわち、「0」)よりも所定の紫外域(約252nm以下)の光に対する平均感度が高い材料であり、且つコバールに比べて可視域の光に対する平均感度が低い材料である。   This will be further described with reference to a specific example. As shown in FIG. 3, when the cathode discharge part 21 is made of nickel which is an example of the first material, the cathode discharge part 21 is sensitive to light in the ultraviolet region of about 252 nm or less. And has no sensitivity to light in a wavelength range greater than about 252 nm. On the other hand, when the cathode discharge part 21 consists of Kovar which is an example of a 2nd material, the cathode discharge part 21 has a sensitivity with respect to the light of a wavelength range larger than about 252 nm. Thus, nickel is a material having a higher average sensitivity to light in a predetermined ultraviolet region (about 252 nm or less) than the average sensitivity to light in the visible region (that is, “0”), and in the visible region as compared to Kovar. It is a material with low average sensitivity to light.

次に、紫外線検出器1の動作原理について説明する。使用状態においては、陰極20と陽極30との間に電圧が供給されている。陰極放電部21及び陽極放電部31は、第1間隔D1で互いに近接して対向しているため、陰極20と陽極30の間において放電の発生しやすい領域であり、放電領域として機能する。一方、陰極支持部22及び陽極支持部32は、第2間隔D2で互いに離間して対向しているため、放電領域として機能し難い。使用状態において、容器10を介して陰極放電部21に所定の紫外域の光が入射すると、陰極放電部21から光電子が放出される(光電子放出効果)。この光電子は、陽極放電部31に引き寄せられ、容器10内の放電ガス分子と衝突して放電ガス分子を電離させる。電離によって発生した電子及び正イオンのうち、電子は更に他の放電ガス分子と衝突及び電離を繰り返して陽極放電部31に至る。一方、正イオンは、陽極放電部31に向けて加速され、陽極放電部31に衝突して多くの二次電子を発生させる。以上の現象を繰り返すことにより、陰極20と陽極30との間に電流が流れ、放電状態となる。紫外線検出器1では、光電子放出効果及び放電現象を利用して、所定の紫外域の光を検出する。   Next, the operation principle of the ultraviolet detector 1 will be described. In use, a voltage is supplied between the cathode 20 and the anode 30. Since the cathode discharge portion 21 and the anode discharge portion 31 face each other close to each other at the first interval D1, the discharge is easily generated between the cathode 20 and the anode 30 and functions as a discharge region. On the other hand, the cathode support part 22 and the anode support part 32 are opposed to each other with a second distance D2, and thus hardly function as a discharge region. When light in a predetermined ultraviolet region is incident on the cathode discharge part 21 through the container 10 in the use state, photoelectrons are emitted from the cathode discharge part 21 (photoelectron emission effect). The photoelectrons are attracted to the anode discharge portion 31 and collide with the discharge gas molecules in the container 10 to ionize the discharge gas molecules. Of the electrons and positive ions generated by ionization, the electrons further collide with other discharge gas molecules and ionize to reach the anode discharge portion 31. On the other hand, positive ions are accelerated toward the anode discharge part 31 and collide with the anode discharge part 31 to generate many secondary electrons. By repeating the above phenomenon, a current flows between the cathode 20 and the anode 30, and a discharge state is obtained. The ultraviolet detector 1 detects light in a predetermined ultraviolet region using a photoelectron emission effect and a discharge phenomenon.

以上説明したように、紫外線検出器1では、可視域の光に対する平均感度よりも所定の紫外域の光に対する平均感度が高く且つ陰極支持部22の第2材料に比べて可視域の光に対する平均感度が低い第1材料が、陰極放電部21に使用されており、陰極放電部21と陽極放電部31とが、封着部12における陰極支持部22と陽極支持部32との第2間隔D2よりも小さい第1間隔D1で対向している。これにより、陰極20と陽極30の間において放電の発生しやすい領域は、所定の紫外域の光に対して感度の高い領域と重なるので、可視域の光に起因する光電子放出及び放電は抑制され、可視光下であっても所定の紫外域の光を精度良く検出することができる。更に、陽極30に曲げ部33が設けられているため、例えば陰極20及び陽極30の両方に曲げ部33が設けられている場合と比較して、精度良く第1間隔D1及び第2間隔D2を構成することができる。これにより、簡単な構成で検出感度の均一化を図ることができる。以上により、この紫外線検出器1によれば、可視光下であっても所定の紫外域の光を精度良く検出することができ、且つ簡単な構成で検出感度の均一化を図ることができる。また、陰極放電部21と異なる材料が陰極支持部22に使用されていることから、陰極支持部22の材料として、封着部12での封着に適した材料を選択することで、封着部12からの放電ガスの抜け等を抑制し、長寿命化を図ることができる。   As described above, in the ultraviolet detector 1, the average sensitivity for light in the predetermined ultraviolet region is higher than the average sensitivity for light in the visible region, and the average for visible light compared to the second material of the cathode support portion 22. A first material with low sensitivity is used for the cathode discharge part 21, and the cathode discharge part 21 and the anode discharge part 31 are separated from each other by a second distance D 2 between the cathode support part 22 and the anode support part 32 in the sealing part 12. The first interval D1 is smaller than the first interval D1. As a result, a region where discharge is likely to occur between the cathode 20 and the anode 30 overlaps a region sensitive to light in a predetermined ultraviolet region, so that photoelectron emission and discharge caused by light in the visible region are suppressed. Even under visible light, light in a predetermined ultraviolet region can be detected with high accuracy. Furthermore, since the bent portion 33 is provided in the anode 30, for example, the first interval D1 and the second interval D2 can be accurately set as compared with the case where the bent portion 33 is provided in both the cathode 20 and the anode 30. Can be configured. As a result, the detection sensitivity can be made uniform with a simple configuration. As described above, according to the ultraviolet detector 1, light in a predetermined ultraviolet region can be accurately detected even under visible light, and detection sensitivity can be made uniform with a simple configuration. Further, since a material different from that of the cathode discharge part 21 is used for the cathode support part 22, the material suitable for sealing at the sealing part 12 is selected as the material of the cathode support part 22. It is possible to prevent the discharge gas from escaping from the portion 12 and to extend the life.

例えば、ガスバーナの炎(都市ガス)の波長域は、約185nmよりも大きく、太陽光の波長域は、約280nmよりも大きい。また、タングステン電球から出力される光の波長域は、約300nmよりも大きい。したがって、紫外線検出器1によれば、太陽光又はタングステン電球から出力される光の存在下であっても、ガスバーナの炎に含まれる紫外域の光を精度良く検出することができる。   For example, the wavelength range of the gas burner flame (city gas) is greater than about 185 nm, and the wavelength range of sunlight is greater than about 280 nm. Further, the wavelength range of light output from the tungsten bulb is larger than about 300 nm. Therefore, according to the ultraviolet detector 1, even in the presence of sunlight or light output from a tungsten bulb, it is possible to accurately detect ultraviolet light contained in the flame of the gas burner.

また、紫外線検出器1では、陰極放電部21の第1材料は、可視域の光に対して実質的に感度を有していない。これにより、可視域の光に起因する光電子放出及び放電をより確実に抑制し、所定の紫外域の光をより精度良く検出することができる。   In the ultraviolet detector 1, the first material of the cathode discharge part 21 has substantially no sensitivity to visible light. Thereby, it is possible to more reliably suppress photoelectron emission and discharge caused by light in the visible region, and detect light in a predetermined ultraviolet region with higher accuracy.

また、紫外線検出器1では、陰極支持部22に使用される第2材料と容器10の材料との熱膨張係数差が、陰極放電部21に使用される第1材料と容器10の材料との熱膨張係数差よりも小さい。これにより、封着部12での不具合による第1間隔D1及び第2間隔D2の変化が生じるのを確実に抑制し、検出感度の均一化をより確実に図ることができるとともに、封着部12からの放電ガスの抜け等を抑制し、長寿命化を図ることができる。   Further, in the ultraviolet detector 1, the difference in thermal expansion coefficient between the second material used for the cathode support part 22 and the material of the container 10 is different between the first material used for the cathode discharge part 21 and the material of the container 10. It is smaller than the difference in thermal expansion coefficient. Thereby, it is possible to surely suppress the occurrence of changes in the first interval D1 and the second interval D2 due to a failure in the sealing portion 12 and to make the detection sensitivity more uniform, and to ensure the sealing portion 12. It is possible to prevent the discharge gas from escaping from, and to extend the life.

また、紫外線検出器1では、曲げ部33が陽極30に設けられている、これにより、光電子放出領域となる陰極放電部21に対する曲げ部33の影響、例えば曲げ作業による陰極支持部22との接続部に対する影響を抑制し、検出感度の更なる均一化を図ることができる。   Further, in the ultraviolet detector 1, the bent portion 33 is provided on the anode 30, and thereby the influence of the bent portion 33 on the cathode discharge portion 21 serving as a photoelectron emission region, for example, connection with the cathode support portion 22 by bending work. The influence on the part can be suppressed, and the detection sensitivity can be further uniformized.

また、紫外線検出器1では、曲げ部33が陰極放電部21と対向している。例えば、本実施形態において、陽極30に設けられた曲げ部33が陰極支持部22とのみ対向している位置に設けられた場合、陰極支持部22と陽極放電部31とが、放電の発生しやすい第1間隔D1で対向する。そのため、紫外域の光に対する選択性が低い陰極支持部22と陽極放電部31との間で、可視域の光に起因する光電子放出及び放電が生じるおそれがある。陽極30に設けられた曲げ部33の少なくとも一部を陰極放電部21と対向させることで、陰極支持部22は陽極30に対して少なくとも第1間隔D1よりも大きく離間するため、そのような現象を抑制し、所定の紫外域の光をより精度良く検出することができる。   In the ultraviolet detector 1, the bent portion 33 faces the cathode discharge portion 21. For example, in the present embodiment, when the bent portion 33 provided on the anode 30 is provided at a position facing only the cathode support portion 22, the cathode support portion 22 and the anode discharge portion 31 generate discharge. Opposite at a first interval D1 that is easy. For this reason, there is a possibility that photoelectron emission and discharge due to light in the visible range may occur between the cathode support 22 and the anode discharge unit 31 that have low selectivity for light in the ultraviolet range. By causing at least a part of the bent portion 33 provided on the anode 30 to face the cathode discharge portion 21, the cathode support portion 22 is separated from the anode 30 by at least a distance greater than the first distance D 1. Can be detected, and light in a predetermined ultraviolet region can be detected with higher accuracy.

また、紫外線検出器1では、陰極放電部21が第1材料からなる棒状部材であると共に、陰極支持部22が第2材料からなる棒状部材であり、陰極放電部21と陰極支持部22とが互いに接続されている。陰極放電部21を第1材料からなる棒状部材で構成することで、例えば、陰極支持部22の表面が、所望の基材上に第1材料を膜状に形成することで構成される場合と比べて、放電によって第1材料が剥離する等の不具合が生じるおそれを抑制し、長寿命化を図ることができる。   In the ultraviolet detector 1, the cathode discharge portion 21 is a rod-shaped member made of the first material, and the cathode support portion 22 is a rod-shaped member made of the second material. The cathode discharge portion 21 and the cathode support portion 22 Are connected to each other. By configuring the cathode discharge portion 21 with a rod-shaped member made of the first material, for example, the surface of the cathode support portion 22 is configured by forming the first material in a film shape on a desired base material. In comparison, it is possible to suppress the possibility that the first material is peeled off due to the discharge, and to extend the life.

また、紫外線検出器1では、陰極放電部21と陽極放電部31とが対向する方向から見た場合、陰極放電部21の幅は、陽極放電部31の幅よりも大きくなっている。これにより、所定の紫外域の光に対する検出感度をより高くすることができる。また、陰極放電部21の直径は、陰極支持部22の直径よりも大きいため、その接続部においては段差が生じる。この段差の分でも、陰極支持部22は陽極30と離間するため、陰極支持部22における放電は抑制され、所定の紫外域の光に対する検出感度をより高くすることができる。   In the ultraviolet detector 1, the width of the cathode discharge part 21 is larger than the width of the anode discharge part 31 when viewed from the direction in which the cathode discharge part 21 and the anode discharge part 31 face each other. Thereby, the detection sensitivity with respect to the light of a predetermined ultraviolet region can be made higher. Moreover, since the diameter of the cathode discharge part 21 is larger than the diameter of the cathode support part 22, a level | step difference arises in the connection part. Even at this level difference, the cathode support portion 22 is separated from the anode 30, so that the discharge at the cathode support portion 22 is suppressed and the detection sensitivity for light in a predetermined ultraviolet region can be further increased.

以上、本発明の好適な実施形態について説明したが、本発明は、上記実施形態に限られるものではなく、本発明の要旨を変更しない範囲で変形し、又は他のものに適用してもよい。   The preferred embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and may be modified without departing from the gist of the present invention or applied to other embodiments. .

例えば、図4及び図5に示される第1変形例の紫外線検出器1Aのように、陰極放電部21Aが扁平な板状に形成されていてもよい。図5に示されるように、紫外線検出器1Aにおいても、上記実施形態と同様に、陰極放電部21Aと陽極放電部31とが対向する方向(陰極20と陽極30とが重なって見える方向)から見た場合、陰極放電部21Aの幅は、陽極放電部31の幅よりも大きい。このような紫外線検出器1Aによっても、上記実施形態と同様に、可視光下であっても所定の紫外域の光を精度良く検出することができ、且つ簡単な構成で検出感度の均一化を図ることができる。特に、本実施形態においては、陰極放電部21Aと陽極放電部31とが対向する方向から見た場合の陰極放電部21Aの幅を大きくすることがより容易となる。さらに、少ない材料で陰極放電部21Aの幅を大きくすることができるので、電極先端部を軽量化することができ、耐震性を向上することができる。なお、図5では、容器10が透過されており、容器10の外形が仮想線で示されている。   For example, like the ultraviolet detector 1A of the first modification shown in FIGS. 4 and 5, the cathode discharge part 21A may be formed in a flat plate shape. As shown in FIG. 5, in the ultraviolet detector 1 </ b> A as well, from the direction in which the cathode discharge portion 21 </ b> A and the anode discharge portion 31 face each other (the direction in which the cathode 20 and the anode 30 appear to overlap) as in the above embodiment. When viewed, the width of the cathode discharge part 21 </ b> A is larger than the width of the anode discharge part 31. Even with such an ultraviolet detector 1A, similarly to the above-described embodiment, it is possible to accurately detect light in a predetermined ultraviolet region even under visible light, and uniform detection sensitivity with a simple configuration. Can be planned. In particular, in this embodiment, it becomes easier to increase the width of the cathode discharge part 21A when viewed from the direction in which the cathode discharge part 21A and the anode discharge part 31 face each other. Furthermore, since the width of the cathode discharge part 21A can be increased with a small amount of material, the tip part of the electrode can be reduced in weight and the earthquake resistance can be improved. In addition, in FIG. 5, the container 10 is permeate | transmitted and the external shape of the container 10 is shown with the virtual line.

また、図6に示される第2変形例の紫外線検出器1Bのように、陰極放電部21Bが封着部12と接触していてもよい。紫外線検出器1Bでは、陰極放電部21Bのうちの封着部12側の先端は、封着部12に埋め込まれている。そのため、陰極支持部22Bは、陰極接続部分24を有していない。このような紫外線検出器1Bによっても、上記実施形態と同様に、可視光下であっても所定の紫外域の光を精度良く検出することができ、且つ簡単な構成で検出感度の均一化を図ることができる。また、容器10内に露出するのは紫外域の光に対する選択性が高い陰極放電部21Bのみであるため、可視域の光に起因する光電子放出及び放電が生じるのをより確実に抑制し、所定の紫外域の光をより精度良く検出することができる。なお、このように陰極支持部22Bの先端が封着部12に埋め込まれる場合でも、封着部12で封着される部位の大半が陰極被封着部分25であるので、封着部12での陰極20の封着を問題なく行うことができる。   Moreover, the cathode discharge part 21B may be contacting the sealing part 12 like the ultraviolet detector 1B of the 2nd modification shown by FIG. In the ultraviolet detector 1 </ b> B, the tip of the cathode discharge part 21 </ b> B on the sealing part 12 side is embedded in the sealing part 12. Therefore, the cathode support portion 22B does not have the cathode connection portion 24. Even with such an ultraviolet detector 1B, similarly to the above-described embodiment, it is possible to accurately detect light in a predetermined ultraviolet region even under visible light, and uniform detection sensitivity with a simple configuration. Can be planned. Further, since only the cathode discharge part 21B having high selectivity to ultraviolet light is exposed to the inside of the container 10, it is possible to more reliably suppress the occurrence of photoelectron emission and discharge due to visible light, It is possible to more accurately detect light in the ultraviolet region. Even when the tip of the cathode support portion 22B is embedded in the sealing portion 12 in this way, the majority of the portion sealed by the sealing portion 12 is the cathode sealed portion 25, so that the sealing portion 12 The cathode 20 can be sealed without any problem.

また、図7に示される第3変形例の紫外線検出器1Cのように、陰極20に曲げ部23Cが設けられていてもよい。紫外線検出器1Cでは、陰極支持部22に曲げ部23Cが設けられている。また、陽極30には曲げ部33が設けられておらず、陽極30は、直線状に形成されている。曲げ部23Cは、陽極支持部32と対向している。このような紫外線検出器1Cによっても、上記実施形態と同様に、可視光下であっても所定の紫外域の光を精度良く検出することができ、且つ簡単な構成で検出感度の均一化を図ることができる。   Moreover, the bending part 23C may be provided in the cathode 20 like the ultraviolet detector 1C of the 3rd modification shown by FIG. In the ultraviolet detector 1 </ b> C, the cathode support portion 22 is provided with a bent portion 23 </ b> C. Further, the anode 30 is not provided with the bent portion 33, and the anode 30 is formed in a linear shape. The bent portion 23C faces the anode support portion 32. Even with such an ultraviolet detector 1C, similarly to the above-described embodiment, it is possible to accurately detect light in a predetermined ultraviolet region even under visible light, and uniform detection sensitivity with a simple configuration. Can be planned.

また、図8に示される第4変形例の紫外線検出器1Dのように、陰極放電部21に曲げ部23Dが設けられていてもよい。紫外線検出器1Dでは、曲げ部23Dは、陽極放電部31と対向している。このような紫外線検出器1Dによっても、上記実施形態と同様に、可視光下であっても所定の紫外域の光を精度良く検出することができ、且つ簡単な構成で検出感度の均一化を図ることができる。特に、曲げ部23Dの途中で放電が発生しても、その放電は所定の紫外域の光に起因するため、所定の紫外域の光をより精度良く検出することができる。   Further, a bent portion 23D may be provided in the cathode discharge portion 21 as in the ultraviolet detector 1D of the fourth modified example shown in FIG. In the ultraviolet detector 1 </ b> D, the bent portion 23 </ b> D faces the anode discharge portion 31. Even with such an ultraviolet detector 1D, similarly to the above-described embodiment, it is possible to accurately detect light in a predetermined ultraviolet region even under visible light, and uniform detection sensitivity with a simple configuration. Can be planned. In particular, even if a discharge occurs in the middle of the bending portion 23D, the discharge is caused by light in a predetermined ultraviolet region, so that light in a predetermined ultraviolet region can be detected with higher accuracy.

また、上記実施形態では、陰極放電部21が第1材料からなる棒状部材であると共に、陰極支持部22が第2材料からなる棒状部材であり、陰極放電部21と陰極支持部22とが互いに接続されていたが、所望の基材の表面の一部を覆うように第1材料を膜状に形成することで、陰極放電部21とされていてもよい。例えば、上記実施形態における陰極放電部21及び陰極支持部22を合わせた長さの第2材料からなる基材を用意し、当該基材のうちの所望の一端側を覆うように、例えば第1材料によるメッキ処理等をすることによって、膜状の陰極放電部21が形成されていてもよい。   Moreover, in the said embodiment, while the cathode discharge part 21 is a rod-shaped member which consists of 1st materials, the cathode support part 22 is a rod-shaped member which consists of 2nd materials, and the cathode discharge part 21 and the cathode support part 22 mutually Although connected, the cathode discharge part 21 may be formed by forming the first material in a film shape so as to cover a part of the surface of the desired base material. For example, the base material which consists of the 2nd material of the length which match | combined the cathode discharge part 21 and the cathode support part 22 in the said embodiment is prepared, for example, 1st so that the desired one end side of the said base material may be covered. The film-like cathode discharge part 21 may be formed by performing a plating process using a material or the like.

また、上記実施形態では、曲げ部33が陰極放電部21のうちの封着部12側の端部を含む領域に対向していたが、曲げ部33によって、陰極放電部21のうちの封着部12側の端部(陰極支持部22との境界部)における陽極30との間の距離が、第1間隔D1以上となればよく、曲げ部33が陰極放電部21の中間部と対向していてもよい。また、曲げ部33は、より急峻に屈曲していても、より緩やかに屈曲していてもよい。また、陰極支持部22と陽極支持部32とは、第2間隔D2で一定に離間するのではなく、離間の間隔が変化してもよい。また、陰極放電部21と陽極放電部31とが対向する方向から見た場合、陰極放電部21の幅は、陽極放電部31の幅と同程度であってもよく、陽極放電部31の幅よりも小さくてもよい。また、陰極放電部21の直径は、陰極支持部22の直径と同一であってもよく、陰極支持部22の直径よりも小さくてもよい。   Moreover, in the said embodiment, although the bending part 33 was facing the area | region including the edge part by the side of the sealing part 12 among the cathode discharge parts 21, the sealing of the cathode discharge part 21 is carried out by the bending part 33. The distance from the anode 30 at the end portion on the side of the portion 12 (boundary portion with the cathode support portion 22) only needs to be equal to or greater than the first distance D1, and the bent portion 33 faces the intermediate portion of the cathode discharge portion 21. It may be. Moreover, the bending part 33 may be bent more steeply or may be bent more gently. Further, the cathode support portion 22 and the anode support portion 32 are not spaced apart at a constant distance by the second distance D2, but the spacing distance may change. Further, when viewed from the direction in which the cathode discharge portion 21 and the anode discharge portion 31 face each other, the width of the cathode discharge portion 21 may be substantially the same as the width of the anode discharge portion 31. May be smaller. The diameter of the cathode discharge part 21 may be the same as the diameter of the cathode support part 22 or may be smaller than the diameter of the cathode support part 22.

1,1A,1B,1C,1D…紫外線検出器、10…容器、12…封着部、20…陰極、21,21A,21B…陰極放電部、22,22B…陰極支持部、23C,23D…曲げ部、30…陽極、31…陽極放電部、32…陽極支持部、33…曲げ部、D1…第1間隔、D2…第2間隔。 DESCRIPTION OF SYMBOLS 1,1A, 1B, 1C, 1D ... UV detector, 10 ... Container, 12 ... Sealing part, 20 ... Cathode, 21, 21A, 21B ... Cathode discharge part, 22, 22B ... Cathode support part, 23C, 23D ... Bending part, 30 ... anode, 31 ... anode discharge part, 32 ... anode support part, 33 ... bending part, D1 ... first interval, D2 ... second interval.

Claims (5)

光透過性を有し、放電ガスが封入された容器と、
前記容器内に配置された陰極放電部、及び前記容器の封着部を貫通する陰極支持部を有する棒状の陰極と、
前記容器内に配置された陽極放電部、及び前記封着部を貫通する陽極支持部を有する棒状の陽極と、を備え、
前記陰極及び前記陽極のいずれか一方のみに、前記陰極放電部と前記陽極放電部とが第1間隔で互いに対向し且つ前記陰極支持部と前記陽極支持部とが前記第1間隔よりも大きい第2間隔で互いに対向するように、曲げ部が設けられており、
前記陰極放電部の少なくとも表面を構成する第1材料は、可視域の光に対する平均感度よりも所定の紫外域の光に対する平均感度が高く且つ前記陰極支持部の少なくとも表面を構成する第2材料に比べて可視域の光に対する平均感度が低く、
前記曲げ部は、前記陽極に設けられており、前記曲げ部の少なくとも一部は、前記陰極放電部と対向している、紫外線検出器。
A light-transmissive container filled with a discharge gas;
A rod-shaped cathode having a cathode discharge part disposed in the container, and a cathode support part penetrating the sealing part of the container;
An anode discharge part arranged in the container, and a rod-shaped anode having an anode support part penetrating the sealing part,
Only one of the cathode and the anode has the cathode discharge portion and the anode discharge portion facing each other at a first interval, and the cathode support portion and the anode support portion are larger than the first interval. Bending parts are provided so as to face each other at two intervals,
The first material constituting at least the surface of the cathode discharge part has a higher average sensitivity to light in a predetermined ultraviolet region than the average sensitivity to light in the visible region, and is a second material constituting at least the surface of the cathode support part. compared average sensitivity to light in the visible region and is rather low,
The bent portion is provided on the anode, and at least a part of the bent portion is opposed to the cathode discharge portion .
光透過性を有し、放電ガスが封入された容器と、
前記容器内に配置された陰極放電部、及び前記容器の封着部を貫通する陰極支持部を有する棒状の陰極と、
前記容器内に配置された陽極放電部、及び前記封着部を貫通する陽極支持部を有する棒状の陽極と、を備え、
前記陰極及び前記陽極のいずれか一方のみに、前記陰極放電部と前記陽極放電部とが第1間隔で互いに対向し且つ前記陰極支持部と前記陽極支持部とが前記第1間隔よりも大きい第2間隔で互いに対向するように、曲げ部が設けられており、
前記陰極放電部の少なくとも表面を構成する第1材料は、可視域の光に対する平均感度よりも所定の紫外域の光に対する平均感度が高く且つ前記陰極支持部の少なくとも表面を構成する第2材料に比べて可視域の光に対する平均感度が低く、
前記曲げ部は、前記陰極放電部に設けられている、紫外線検出器。
A light-transmissive container filled with a discharge gas;
A rod-shaped cathode having a cathode discharge part disposed in the container, and a cathode support part penetrating the sealing part of the container;
An anode discharge part arranged in the container, and a rod-shaped anode having an anode support part penetrating the sealing part,
Only one of the cathode and the anode has the cathode discharge portion and the anode discharge portion facing each other at a first interval, and the cathode support portion and the anode support portion are larger than the first interval. Bending parts are provided so as to face each other at two intervals,
The first material constituting at least the surface of the cathode discharge part has a higher average sensitivity to light in a predetermined ultraviolet region than the average sensitivity to light in the visible region, and is a second material constituting at least the surface of the cathode support part. compared average sensitivity to light in the visible region and is rather low,
The bent part is an ultraviolet detector provided in the cathode discharge part .
前記第2材料と前記容器の材料との熱膨張係数差は、前記第1材料と前記容器の前記材料との熱膨張係数差よりも小さい、請求項1又は2記載の紫外線検出器。 The ultraviolet detector according to claim 1 or 2 , wherein a difference in thermal expansion coefficient between the second material and the material of the container is smaller than a difference in thermal expansion coefficient between the first material and the material of the container. 前記陰極放電部は、前記第1材料からなる棒状部材である、請求項1〜のいずれか一項記載の紫外線検出器。 The said cathode discharge part is an ultraviolet detector as described in any one of Claims 1-3 which is a rod-shaped member which consists of said 1st material. 前記陰極放電部と前記陽極放電部とが対向する方向から見た場合、前記陰極放電部の幅は、前記陽極放電部の幅よりも大きい、請求項1〜のいずれか一項記載の紫外線検出器。 The ultraviolet ray according to any one of claims 1 to 4 , wherein a width of the cathode discharge part is larger than a width of the anode discharge part when viewed from a direction in which the cathode discharge part and the anode discharge part are opposed to each other. Detector.
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