JP6501692B2 - Alert information system - Google Patents

Description

  The present invention relates to a system for providing warning information to workers, and more particularly to a system for providing warning information in a clean room of a semiconductor device manufacturing plant.

  For example, in a clean room for manufacturing semiconductor devices, various apparatuses such as an apparatus for performing a coating and developing process on a semiconductor wafer, an exposure apparatus, and an etching apparatus are installed. And a semiconductor device is manufactured by performing predetermined processing with each of these devices.

  For the transfer of the semiconductor wafer between the above-mentioned respective devices, a transfer device for transferring a cassette for storing a semiconductor wafer, as shown in Patent Document 1, for example, using a space above a worker is used.

  Usually, a plurality of apparatuses in such a clean room are provided, and, for example, when one apparatus is stopped for maintenance, the other apparatuses are continuously operated.

  Therefore, when performing maintenance work while the other device is in operation, safety measures are taken such as warning displays for alerting surrounding workers and ropes for division.

Unexamined-Japanese-Patent No. 2003-229342

  However, the moving route of the mobile unit such as the above-described transfer device may be set to pass above various devices. Therefore, when a worker accesses the top of the device for maintenance, the transport device may approach from the blind spot of the worker during maintenance work or may collide with the worker, which is a potential hazard. The current situation is that the risk of can not be completely eliminated. In addition, safety management for such moving bodies is entrusted to the working workers, and means are required to ensure the safety of the workers against events such as the approach of the moving bodies from the blind spot of the workers. ing.

  This invention is made in view of this point, and it aims at providing warning information to a worker, and securing a worker's safety.

In order to achieve the above object, the present invention is an alert information providing system for providing alert information to a worker in a clean room, comprising a display unit for displaying predetermined information. A transmitting / receiving device for transmitting / receiving a signal between the head mounted display device, a control device for generating predetermined information to be displayed on the head mounted display device, and a position of a worker wearing the head mounted display device A position information detecting device for detecting information and current position information of a moving object moving in the clean room, the control device detecting the position information of the worker detected by the position information detecting device, and in the clean room distance between the workers obtained based on the current location information of the movable body and the movable body in the When but becomes smaller than a predetermined value set in advance, it is determined that the moving body is approaching the operator, generates alert information, the transceiver is generated by the control device The alert information is transmitted to the head mounted display device, and the head mounted display device displays the alert information generated by the control device on the display unit. Warning information refers to the potential dangers such as the location of high temperature parts in a clean room, a place where it may fall or fall, or where it may interfere with moving objects. It is information to evoke.

According to the present invention, the control device transmits the alert information generated based on the position information of the worker detected by the position information detecting device and the current position information of the moving object moving in the clean room to the head mount display device The alert information is displayed on the display unit of the head mounted display device. Therefore, the safety of the worker can be secured by alerting the worker to the approach of the moving body from the blind spot of the worker.

The control device may determine the approach between the worker and the mobile body based on a signal notifying that the worker is working at a high place .
In such a case, the head mounted display device may have a changeover switch for switching whether or not to perform the notification.

The control device may transmit, as the alerting information, information notifying that the mobile unit will approach a worker in the future.

The notification may include that the worker is located on the path of the moving body, or that the moving body passes nearby in a few tens of seconds.

In the alerting information providing system, the position information detecting device may detect position information of the mobile based on information obtained from a transmitter provided in the mobile.

In the alerting information providing system, the position information detecting device may detect position information of the mobile based on a movement control signal from a control program that controls movement of the mobile.

  According to the present invention, the alert information can be provided to the worker to ensure the safety of the worker.

BRIEF DESCRIPTION OF THE DRAWINGS It is a block diagram which shows the outline of a structure of the alerting information provision system concerning this Embodiment. It is explanatory drawing which shows the state which the operator mounted | wore with the head mounted display apparatus. It is explanatory drawing of the plane which shows the arrangement | positioning information of a position detection program. It is an explanatory view showing signs that a worker is working at a high place. It is an explanatory view showing the state where the worker equipped a head mount display and an imaging device. It is explanatory drawing which shows the captured image which imaged the opening part of the grating floor by the imaging device.

  Hereinafter, embodiments of the present invention will be described. FIG. 1 shows an outline of the configuration of the alerting information providing system 1 according to the present embodiment. In the present specification and the drawings, elements having substantially the same functional configuration will be assigned the same reference numerals and redundant description will be omitted.

  As shown in FIG. 1, the alerting information providing system 1 transmits / receives a plurality of signals between the head mounted display device 10 having the display unit DP for displaying predetermined information and the head mounted display device 10. A transmission / reception device 11 and a control device 12 that generates predetermined information to be displayed on the head mounted display device 10 are included. Each transmission / reception device 11 and the control device 12 are connected via a communication bus B. As the communication bus B, a known communication means such as an internet connection or a LAN connection is used. A plurality of transmitting / receiving devices 11 need not necessarily be provided. For example, only one transmitting / receiving device 11 may be provided as long as it can cover the entire movement range of the worker.

  For example, as shown in FIG. 2, the head mounted display device 10 has a goggle type so that the worker OP can be attached to the head. The display unit DP of the head mounted display device 10 is, for example, a semi-transmissive liquid crystal display or the like so that both of the information displayed on the display unit DP and the view area of the worker OP can be recognized. The head mounted display device 10 further includes a transmission unit 20 that transmits a signal to and from the transmission and reception device 11, and a GPS receiver 21. For communication between the transmission unit 20 and the transmission / reception device 11, a known wireless communication technology such as wireless LAN or Bluetooth (registered trademark) communication is used, for example. The signal transmitted from the transmission unit 20 to the transmission / reception device 11 is position information detected by the GPS receiver 21. The signal transmitted from the transmission / reception device 11 to the transmission unit 20 will be described later. The display unit DP may adopt a retinal projection display that projects an image directly to the retina. Further, instead of the semi-transmissive type, it may be a type that projects a captured image, and it is possible to arbitrarily select what kind of device the display unit DP of the head mounted display device 10 is configured.

  The control device 12 is, for example, a computer, and includes a program storage unit 30 (not shown). The program storage unit 30 stores programs for providing alert information to the worker OP by the alert information providing system 1, such as the position detection program PST and the alert information generating program ALT. The program storage unit 30 also stores a program (not shown) for performing, for example, processing of a semiconductor wafer by controlling the operation of various devices in the clean room described below. The control device 12 may be a host computer that controls various processing devices installed in a clean room of a semiconductor device manufacturing plant, or controls various processing devices connected to the host computer by the communication bus B. It may be a unit (not shown), and may operate a position detection program PST to be described below and a reminder information generation program ALT and can input / output predetermined signals to / from the transmission / reception device 11. For example, the configuration can be set arbitrarily.

  For example, as shown in FIG. 3, the position detection program PST includes the coating and developing treatment apparatus PR, the exposure apparatus EX, the etching apparatus ET, and the cassette C for containing a semiconductor wafer installed in the clean room CL through the rails RA. A worker equipped with arrangement information LOC of various devices such as a transfer device M to transfer between devices, information of the current position of a moving object moving in a clean room CL such as the transfer device M, and a head mounted display device 10 Detects information on the current position of the OP. The position detection of the moving object is performed based on, for example, a movement command signal from a transmitter 40 provided on the moving object or a program for controlling the movement of the moving object. Further, the position information of the worker OP is obtained based on the signal of the GPS receiver 21 input to the control device 12 via the transmission / reception device 11. In the present invention, the position information detecting device for detecting the position information of the worker OP wearing the head mounted display device 10 has the positions of the worker OP such as the position detection program PST, the GPS receiver 21 and the transmitting and receiving device 11. It consists of equipment for identification. Each program PST, ALT is, for example, a computer readable storage medium H such as a computer readable hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnet optical desk (MO), and a memory card. And may be installed in the control device 12 from the storage medium.

  The alert information generation program ALT includes information on a dangerous place in a clean room, and the information on the dangerous place, the above-mentioned arrangement information LOC, and the position information of the worker OP detected by the position detection program PST, etc. Based on the information, alert information is generated to alert the worker OP. The information on the dangerous part is information on a part where the worker OP may be injured, and is registered in advance in the alert information generation program ALT. Specific information on the dangerous place is, for example, a high temperature part which may cause burns, a grating floor is temporarily removed in the clean room CL, a place where there is a possibility of dropping, falling, etc., transportation Information on a location that may be injured due to interference with a mobile unit such as the device M is not limited to the content of the information on the danger point, and is generally Any necessary information for safe management can be set arbitrarily.

  In generating the alerting information in the alert information generating program ALT, first, the position of the dangerous place in the clean room is specified based on the arrangement information LOC and the information of the dangerous place. Then, based on the position information of the worker OP, for example, when the distance between the danger point and the worker OP becomes smaller than a predetermined value set in advance, the worker OP is approaching the danger point It is determined that, for example, information such as the direction and distance of the dangerous point seen from the worker OP is generated. Then, the information is transmitted from the transmission / reception device 11, and when the transmission unit 20 of the head mounted display device 10 receives the information, the alert information is displayed on the display unit DP.

  The alert information providing system 1 according to the present embodiment is configured as described above. Next, the actual operation of the alerting information providing system 1 will be described. In the description, for example, as shown in FIG. 4, when performing maintenance work in the upper part of the coating and developing treatment apparatus PR, or as shown on the lower right side of FIG. Will be described by way of example in the case where

  The control device 12 continuously or periodically detects position information of the worker OP wearing the head mounted display device 10 in the clean room CL by the position detection program PST. In addition, position information is detected continuously or periodically also for a mobile unit such as the transport device M, for example. Then, for example, as shown in FIG. 4, a movable body such as the transfer device M approaches from behind the worker OP performing the maintenance work in the upper part of the coating and developing treatment apparatus PR, and the distance between the worker OP and the transfer device M Becomes smaller than a predetermined value, the alert information generation program ALT of the control device 12 generates alert information indicating that the transport device M is approaching.

  The generated alerting information is transmitted from the control device 12 via the transmission / reception device 11. Then, when the transmission unit 20 of the head mounted display device 10 receives the notification information, the notification information is displayed on the display unit DP. As a result, the worker OP can recognize the approach of the moving body by the warning information and can take necessary safety measures.

  Therefore, according to the present invention, even when the mobile object such as the transport device M approaches from the blind spot of the worker OP, the worker OP can recognize the approach of the mobile object, and as a result, The safety of the worker OP can be secured.

  In addition, for example, when a part of the grating floor FL is removed, a surrounding rope (not shown), a signboard (not shown) for alerting of fall prevention, etc. are usually installed. However, for example, as shown in FIG. 4, after completing the work at the upper part of the coating and developing treatment apparatus PR, if there are a plurality of matters to be noted, as in the case of coming down to the grating floor FL, the worker OP Attention is limited.

  Therefore, for example, when a part of the grating floor FL is removed, as shown in FIG. 4, the transmitter 50 is disposed in the vicinity of a possible drop / drop. Then, the position detection program PST recognizes the position information of the transmitter 50, and recognizes the danger point in the alert information generation program ALT. When the worker OP approaches the transmitter 50 and the distance between the two falls below a predetermined value, the alert information generation program ALT generates alert information and the operator who mounts the head mounted display device 10 Alert you. Therefore, even in such a case, the safety of the worker OP can be secured by alerting the worker OP. In addition, even for a dangerous place which does not move basically like the high temperature part, the position of the high temperature part in the clean room is specified based on the arrangement information LOC and the information of the dangerous place as described above, and grating As in the case where part of the floor FL is removed, a warning is given to the approaching worker OP.

  Although the position information of the worker OP is detected by the GPS receiver 21 in the above embodiment, the method of detecting the position information of the worker OP is not limited to the contents of this embodiment, and various known methods may be used. Technology can be used. For example, as used in a mobile communication technology such as a mobile phone, the current position is calculated based on which transmitting / receiving device 11 among the transmitting / receiving devices 11 provided with a plurality of transmission units 20 is communicating with. You may do so.

  In the above embodiment, although the case where alerting information is displayed on the display unit DP has been described as an example, the method of alerting the worker OP based on the alerting information is the content of the present embodiment. For example, the head mounted display device 10 may be equipped with a speaker or a vibrator, and alerting by sound or vibration may be used in combination.

  In addition, for example, when the danger place which becomes a trigger which produces alerting information is a mobile body like the conveyance apparatus M, only transmitting alerting information to the head mounted display apparatus 10 with which the worker OP is equipped Instead, for example, an interlock that is triggered by the generation of alert information may be set by the control device 12. Then, when the worker OP does not retract from the moving path of the conveying device M or from the vicinity of the moving path, the conveying device M may be stopped by an interlock.

  In addition, a switch for turning on / off a signal indicating that the worker OP is working at a high place is turned on (not shown) at a place where there is a possibility of interference only at the time of work at high places like the transport apparatus M. ) May be provided on the head mounted display device 10 to notify the control device 12 that work is being performed at a high place. Generally, the measurement accuracy of altitude by GPS includes an error of about several meters, but the height work in a clean room is also performed at a height of about several meters in general. Therefore, the position information by the GPS receiver 21 can not identify whether the worker OP is working at a high place. In such a case, even if, for example, the placement information LOC of the position detection program PST is three-dimensionally created, it can not be determined whether the worker OP and the transport apparatus M are approaching at the same height. Even if the transport device M simply passes overhead of the worker OP on the ground (on the grating floor FL), alerting information is output to the head mounted display device 10, or the transport device M is stopped by interlock. It is possible to go wrong. In this point, the above-mentioned changeover switch is provided, for example, in determining the approach of the conveyance apparatus M and the worker OP in the alert information generation program ALT, by considering the ON and OFF states of the changeover switch, useless interlock It is possible to prevent the output of motion and alerting signals.

  Although the alert information is transmitted to the worker OP when the worker OP approaches the danger point in the above embodiment, the timing for providing the alert information is not limited to the content of the present embodiment. For example, when the worker OP is located on the path of the mobile unit such as the transport device M, the control device 12 notifies the head mounted display device 10 that the operator OP is located on the path of the transport device M Alternatively, it may be notified that the dangerous place approaches the worker OP in the future, such as when the transport device M passes nearby in a few tens of seconds.

  In the above embodiment, for example, the position of the mobile unit such as the transport device M or a part of the grating floor FL based on, for example, the movement command signal from the transmitters 40 and 50 and the program for controlling the movement of the mobile unit. Although the danger point such as the place where is removed is grasped, the method of grasping the position of the danger point is not limited to the contents of the present embodiment. For example, as shown in FIG. 5, the operator OP wears a helmet 61 equipped with an imaging device 60 capable of imaging all directions, for example, along with the head mounted display device 10 so that the surroundings of the operator OP can be imaged. The position of the dangerous place may be grasped based on the image captured by the device 60. In such a case, the information of the captured image acquired by the imaging device 60 is input to the control device 12 via, for example, the transmission unit 20 and the transmission / reception device 11.

  Specifically, the captured image acquired by the imaging device 60 is subjected to image analysis to distinguish a moving object from a stationary object. If the moving object approaches the worker OP, the moving object is determined to be a dangerous place in the clean room, and the alert information generation program ALT generates alert information. And transmit to the head mounted display device 10. As a result, even if the position information of the danger point is not registered in advance in the alert information generation program ALT, for example, alert information can be provided for the approach of the moving object or the like. Note that the imaging device 60 does not necessarily have to be capable of imaging in all directions.

  Also, even when the danger point is a stationary object, such as a part where the grating floor FL is partially removed, the danger point is determined by, for example, configuring the imaging device 60 with an infrared camera. be able to. Specifically, for example, as shown in FIG. 6, when the imaging device 60 captures an image of a portion from which a part of the grating floor FL has been removed, in the captured image 70 acquired, the opening 71 where the grating floor FL does not exist Is displayed in black because there is no infrared reflection (in FIG. 6, it is displayed in white for convenience of illustration). Therefore, in the alert information generation program ALT, when an area in a certain range is displayed in black, the area is recognized as the opening 71 which is a danger point, and alert information is generated. Then, the alert information is transmitted to the head mounted display device 10, and the operator OP is alerted to the opening 71. In addition, since the high temperature part which has a possibility of a burn is clearly identified by the infrared camera, it can be easily identified.

  In the above embodiment, although the case where alert information is displayed on the head mounted display device 10 is described as an example, the information displayed on the head mounted display device 10 is not limited to the alert information. For example, maintenance manual information for supporting maintenance work by the worker OP or, for example, a chemical solution to be replaced when replacing a chemical container (not shown) accommodated in the coating and developing treatment apparatus PR. Various information for work such as information for identifying a container may be displayed. For example, displaying maintenance manual information eliminates the need to hold a paper manual that is normally held by one hand, thus enabling work with both hands and improving work efficiency. Further, as described above, a plurality of devices of the same type are provided in the clean room CL, for example, when replacing a chemical solution container, a human error may occur such that the container of the device not to be replaced is accidentally replaced. However, displaying the container information to be replaced on the head mounted display device 10 can prevent such an error.

  Although the preferred embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to such examples. It is obvious that those skilled in the art can conceive of various modifications or alterations within the scope of the idea described in the claims, and they are naturally within the technical scope of the present invention. It is understood that. That is, the present invention is not limited to this example and can take various aspects.

  The present invention is useful when a worker works in a clean room.

DESCRIPTION OF SYMBOLS 1 substrate processing system 30 development processing apparatus 31 lower anti-reflective film forming apparatus 32 resist coating apparatus 33 upper anti-reflective film forming apparatus 40 heat processing apparatus 41 adhesion apparatus 42 peripheral exposure apparatus 151 thinner supply nozzle 170 thinner supply apparatus 201 filter 500 control part P1 , P2 pump W wafer

Claims (7)

An alert information providing system for providing alert information to a worker in a clean room, comprising
A head mounted display device comprising a display unit for displaying predetermined information;
A transmitting / receiving device for transmitting / receiving a signal to / from the head mounted display device;
A control device that generates predetermined information to be displayed on the head mounted display device;
A position information detection device for detecting position information of a worker equipped with the head mounted display device and current position information of a moving object moving in a clean room ;
The control device is configured such that the distance between the worker and the moving body obtained in advance based on the position information of the worker detected by the position information detecting device and the current position information of the moving body in the clean room is When it becomes smaller than the set predetermined value, it is determined that the mobile unit is approaching the worker, and alert information is generated;
The transmitting and receiving apparatus transmits the alert information generated by the control apparatus to the head mounted display apparatus.
The alerting information providing system, wherein the head mounted display device displays the alerting information generated by the control device on the display unit.   The alerting device according to claim 1, wherein the control device determines the approach between the worker and the mobile body based on a signal notifying that the worker is working at a high place. Information provision system.   The alerting information providing system according to claim 2, wherein the head mounted display device has a changeover switch for switching whether or not to perform the notification.   The notice according to any one of claims 1 to 3, wherein the control device transmits, as the warning information, information notifying that the mobile unit will approach a worker in the future. Evoked information provision system. The alert information according to claim 4, wherein the notification includes that the worker is located on the path of the mobile body, or that the mobile body passes nearby in a few tens of seconds. Provision system. The notice according to any one of claims 1 to 5, wherein the position information detecting device detects the position information of the moving body based on information obtained from a transmitter provided to the moving body. Evoked information provision system. The position information detection apparatus detects position information of the moving body based on a movement control signal from a control program for controlling the movement of the moving body, according to any one of claims 1 to 5, Description alerting information provision system.

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