JP6504151B2 - Processing device - Google Patents

Description

  BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a processing apparatus that generates dust and vaporized substances during processing.

  Laser processing apparatuses are widely used for processing such as drilling of circuit boards. The laser processing apparatus generates dust and vaporized substances during processing. These dusts and vaporized substances (i) destabilize the processing state by the generated dust entering the light path of the laser, or (ii) dust accumulates in the apparatus, and periodic cleaning is required. (Iii) Some vapors have odor and some components are harmful to human body. (Iv) In the case of a clean room, there is a problem that the dust comes out of the apparatus and the class of the clean room is lowered.

  In order to prevent the occurrence of the above problems, there is known a laser processing apparatus provided with a dust collection mechanism for collecting dust and vaporized substances. For example, in order to effectively collect dust, Patent Document 1 describes a laser processing apparatus in which dust and vaporized substances are collected in the apparatus and an exhaust flow path is formed using the introduced outside air. It is done.

JP, 2006-95530, A

  However, in a processing apparatus in which dust or vaporized material is generated in an apparatus such as a laser processing apparatus, if outside air is taken into the processing apparatus by the dust collection mechanism, the set temperature in the processing apparatus may fluctuate depending on the temperature of the outside air . As a result, the processing accuracy may be degraded. For example, a workpiece (hereinafter, also referred to as a workpiece) may expand and contract due to temperature, which may deteriorate the processing position accuracy. In addition, there is also a problem that the processing position accuracy is deteriorated because the component members of the processing apparatus expand and contract due to the temperature.

  On the other hand, for example, by using a precision air conditioner, it is possible to keep the temperature in the processing apparatus constant. However, since the precision air conditioners, particularly the precision air conditioners having a large air volume, are expensive, there is a problem that the cost of the processing system including the processing device increases. In addition, when used in a clean room, the inside of the processing apparatus needs to have a negative pressure with respect to the surrounding environment, so there is a problem that it takes in outside air to some extent and it is difficult to keep the temperature inside the processing apparatus constant. . Therefore, there is a need for a processing apparatus capable of maintaining the temperature in the processing apparatus constant even when the dust collection mechanism is used. Furthermore, there is a similar need not only for the laser processing apparatus but also for other processing apparatuses that generate dust and vaporized substances during processing, and are required to maintain a constant temperature during processing.

  Then, this invention aims at providing the processing apparatus which can maintain the temperature in a processing apparatus uniformly, even when a dust collection mechanism is used.

  In order to solve the above-mentioned subject, a processing device concerning one mode of the present invention has a crevice which covers a processing table which places a processed material, a processing room in which the processing table is arranged, and a crevice, and a crevice. A cover of a double structure including a second cover case enclosing the first cover case via a space, a second cover case and a first cover case are introduced to introduce outside air into the processing chamber A dust collection mechanism including an open air introduction part, an exhaust part penetrating the first cover housing and the second cover housing and exhausting air in the processing chamber, and constant temperature air introduction provided in the second cover housing A constant temperature air adjusted to a positive pressure with respect to the processing chamber and the outside air is supplied from the constant temperature air inlet to the gap space between the first cover housing and the second cover housing. It is characterized by

  According to the above aspect, the isothermal air adjusted to a positive pressure to the processing chamber and the outside air by using the cover portion of the double structure, from the isothermal air inlet, the first cover case and the second cover case As a result, the temperature in the processing chamber can be maintained constant even when the dust collection mechanism is used. In addition, it is possible to suppress that dust and vaporized substances generated in the processing chamber leak out of the processing apparatus.

  In one embodiment of the above aspect, the air volume A of the outside air introduced from the outdoor air introduction unit is between the air volume B of the air exhausted from the exhaust unit and the air volume C of the constant temperature air introduced. The relationship of (B−C) <A <B is satisfied.

  According to the above embodiment, almost all the outside air introduced from the outside air introducing unit can be exhausted. As a result, it becomes possible to maintain the temperature in the processing chamber constant even if the air volume of constant temperature air is lowered, so that a normal (general) air conditioner can be used instead of an expensive air conditioner with a large air volume. Thus, the processing cost can be reduced.

  In one embodiment of the above aspect, the constant-temperature air inlet is provided on the top surface of the second cover casing.

  According to the above embodiment, the constant temperature air can be effectively filled in the clearance space by introducing the constant temperature air from the upper surface of the first cover casing.

  Moreover, in one Embodiment of said aspect, the external air blower outlet of the said external air introduction part and the air suction port of the said exhaust part are facing the said to-be-processed object.

  According to the above embodiment, by making the air suction port of the outside air outlet and the air suction port of the exhaust unit face the work respectively, it becomes easy to form a flow path of air between the air outlet and the air suction port. As a result, it is possible to suppress the diffusion of the introduced outside air into the processing chamber, to suppress the temperature change in the processing chamber, and to effectively collect and exhaust the dust and the vapor generated from the workpiece.

  Moreover, in one Embodiment of said aspect, the external air blower outlet of the said external air introduction part and the air suction port of the said exhaust part are mutually opposing.

  According to the above-described embodiment, by causing the outside air outlet and the air suction port of the exhaust unit to face each other, the flow path of air is further easily formed between the outside air outlet and the air inlet. Since it is possible to further suppress the spread of the introduced outside air into the processing chamber, it is possible to further suppress the temperature change in the processing chamber, and to collect dust and vaporized substances generated by the workpiece more effectively.

  In one embodiment of the above aspect, the laser light source and the optical system for guiding the laser light emitted from the laser light source to the workpiece are provided.

  According to the above embodiment, by using the laser processing apparatus, expansion and contraction of the work due to temperature change can be suppressed, so that processing position accuracy can be improved.

  According to the present invention, it is possible to provide a processing apparatus capable of maintaining the temperature in the processing apparatus constant even when the dust collection mechanism is used.

It is a model perspective view which shows the structure of the processing system using the processing apparatus which concerns on one embodiment of this invention, and has shown the state which removed a part of cover part. It is a model longitudinal cross-sectional view of the processing system of FIG. It is explanatory drawing which shows an example of the flow of the air in the processing apparatus of this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  The processing apparatus according to the present embodiment includes a processing table on which a workpiece is placed, a first cover case that divides a processing chamber in which the processing table is disposed, and a first cover case via a clearance space. And a second cover case including a second cover case surrounding the second cover case, an outside air introducing unit which penetrates the second cover case and the first cover case and introduces outside air into the processing chamber, and the first cover case The processing chamber includes a dust collection mechanism including a body and a second cover housing and an exhaust unit for exhausting air in the processing chamber, and a constant temperature air inlet provided in the second cover housing, the processing chamber And constant-temperature air adjusted to a positive pressure with respect to the outside air is supplied from the constant-temperature air inlet to the gap space between the first cover case and the second cover case. is there.

  FIG. 1 is a schematic perspective view showing an example of a processing system S using a processing apparatus P according to the present embodiment, and shows an example in which the processing apparatus is a laser processing apparatus. FIG. 1 shows a state in which a part of a cover described later is removed for the sake of explanation. FIG. 2 is a schematic vertical sectional view of FIG.

  The processing system S includes a processing device 1, a dust collector 8, and a precision air conditioner 9. Inside the processing apparatus 1, a processing table 2 on which the workpiece W is placed is disposed. The processing chamber 6 in which the processing table 2 is disposed is surrounded by the cover portion 3 having a double structure. The cover portion 3 is configured of a first cover housing 4 that divides the processing chamber 6 and a second cover housing 5 that surrounds the first cover housing 4 via the clearance space 10.

  Furthermore, a dust collection mechanism 7 is attached to the processing device 1. The dust collection mechanism 7 penetrates the second cover housing 5 and the first cover housing 4 and introduces an outside air introducing portion 8 for introducing the outside air into the processing chamber 6, the first cover housing 4 and the second cover housing 5. And an exhaust unit 9 for exhausting the air in the processing chamber 6. Thus, the outside air introducing unit 8 directly introduces outside air outside the processing apparatus 1 into the processing chamber 6 in the first cover housing 4, and the exhaust unit directly exhausts the processing chamber 6 into the dust collector 21 outside. it can. The outside air introducing unit 8 is a tubular member having one end exposed in the processing chamber 6 and the other end in contact with the outside air, and one end thereof has an outside air outlet 8a and the other end has a blower 11 for taking in outside air. It is provided. On the other hand, the exhaust unit 9 is a tubular member having one end exposed in the processing chamber 6 and the other end connected to the dust collector 21 and has an air suction port 9a at one end. Further, a constant temperature air inlet 16 is provided on the upper surface of the second cover housing 5, and constant temperature air is supplied from the precision air conditioner 22 to the processing device 1 through the constant temperature air supply pipe 23.

  Further, in the processing chamber 6, a processing light 13 (not shown) and a processing head 13 are disposed as an optical system for guiding the laser light emitted from the laser light source to the workpiece. The processing head 13 is composed of a deflector 14 and a condenser 15. Further, the deflector 14 is composed of an X-axis deflector 14a and a Y-axis deflector 14b.

  Hereinafter, the flow of air in the processing apparatus 1 will be described with reference to FIG. The constant temperature air passes from the precision air conditioner 22 through the constant temperature air supply pipe 23 and from the constant temperature air inlet 16 provided on the upper surface of the second cover housing 5, the first cover housing 4 and the second cover housing 5 Are introduced into the interstice space 10 between them. The constant temperature air introduced into the clearance space 10 is adjusted to be a positive pressure with respect to the processing chamber 6 and the outside air, and the clearance space 10 is maintained in a constant temperature atmosphere. The constant temperature air adjusted to a positive pressure prevents the air in the processing chamber 6 (hereinafter also referred to as a processing atmosphere) from leaking into the gap space 10. Note that, as described later, part of constant temperature air adjusted to a positive pressure may leak into the processing chamber 6. On the other hand, outside air taken in through the outside air introduction unit 8 by the blower 11 carries dust and vaporized material generated from the workpiece W by laser processing using the laser light L on the flow of the outside air, and the air suction port 9a And is exhausted to the dust collector 21 through the exhaust unit 9. As a result, even when the dust collection mechanism is used, the temperature in the processing chamber can be maintained constant, and dust and vaporized substances generated in the processing chamber do not leak out of the processing apparatus 1.

  1 and 2 show an example in which the laser beam is irradiated from a direction perpendicular to the surface to be processed of the workpiece W. In this case, the direction of the outside air outlet of the outside air introduction unit of the dust collection mechanism and the direction of the air suction port of the exhaust unit are not particularly limited as long as they are in the vicinity of the processing surface. Preferably, the mouth is opposed to the workpiece. By making the air suction port of the outside air blowout port and the air suction port of the exhaust unit face the workpiece respectively, it becomes easy to form a flow path of air between the outside air blowout port and the air suction port. It is possible to suppress the diffusion to the outside, to suppress the temperature change in the processing chamber, and to effectively collect dust and vaporized substances generated by the workpiece. Furthermore, it is more preferable that the outside air outlet of the outside air introduction part and the air suction port of the exhaust part be opposed to each other. Since the flow path of air is further easily formed between the outside air outlet and the air suction port, it is possible to further suppress the spread of the introduced outside air into the processing chamber. Thereby, the temperature change in the processing chamber can be further suppressed, and dust and vaporized substances generated by the workpiece can be collected more effectively.

Further, the air flow rate A of the outside air introduced from the outside air introduction unit is between the air flow rate B of the air exhausted from the exhaust unit and the air flow rate C of the constant-temperature air introduced: It is preferable to satisfy the relationship. FIG. 3 is an explanatory view of an example of the flow of air in the processing apparatus. Constant temperature air with a temperature of 23 ° C. is supplied from the air conditioner with an air volume of 10 m ³ / min, and a portion thereof is introduced into the processing chamber with an air volume of 9 m ³ / min. On the other hand, the air volume of outside air introduced from the outside air introduction unit is 11 m ³ / min (25 ° C.), and the air volume of air exhausted from the exhaust unit is 20 m ³ / min. In this case, almost all the outside air introduced from the outside air introducing unit is exhausted from the exhaust unit. In addition, a part (1 m ³ / min) of constant temperature air is discharged to the outside of the apparatus. As a result, the constant temperature air (atmosphere) of the second cover casing is adjusted to a positive pressure with respect to the processing chamber and the outside air. That is, when the above relationship is satisfied, almost all the outside air introduced from the outside air introducing unit is exhausted, the influence of the outside air on the temperature in the processing chamber can be further suppressed. Further, in this case, since the air volume of constant temperature air can be reduced, an air conditioner with a small rated air volume can be used, and the cost reduction of the processing system becomes possible.

  Also, in order to maintain the temperature in the processing apparatus more constant, it is preferable not to place the devices that can be heat sources in the processing chamber. For example, in the case of a laser processing apparatus, the heat source is, for example, a motor, a sensor, a control device, a laser light absorber, or the like.

  In the present embodiment, the laser processing apparatus has been described as an example, but the processing apparatus according to the present embodiment is not limited to the laser processing apparatus, and dust and vaporized substances are generated during processing, and processing is performed. It can also be used in various processing devices that are required to maintain a constant temperature. For example, a conductive paste drying device, a metal welding device, a cutting device, etc. used in a clean room can be mentioned.

DESCRIPTION OF SYMBOLS 1 processing apparatus 2 processing stand 3 cover part 4 1st cover housing 5 2nd cover housing 6 processing room 7 dust collection mechanism 8 outside air introduction part 8a outside air blowout port 9 exhaust part 9a air suction port 10 clearance space 11 blower 12 movable stage 12a 1st stage 12b 2nd stage 13 processing head 14 deflector 14a X-axis deflector 14b Y-axis deflector 15 condenser 16 constant temperature air inlet 21 dust collector 22 air conditioner 23 constant temperature air supply pipe L laser beam W Workpiece

Claims (6)

A processing table on which a workpiece is placed;
A cover portion of a double structure including a first cover housing that defines a processing chamber in which the processing table is disposed, and a second cover housing that encloses the first cover housing via a clearance space;
It penetrates the 2nd cover case and the 1st cover case, penetrates the 1st cover case and the 2nd cover case through the open air introduction part which introduces outside air into the processing room, and exhausts the air in the processing room A dust collection mechanism including an exhaust portion,
A constant temperature air inlet provided in the second cover housing;
A processing apparatus, wherein constant temperature air adjusted to a positive pressure with respect to the processing chamber and the outside air is supplied from the constant temperature air inlet to the clearance space between the first cover housing and the second cover housing.   The air flow rate A of the outside air introduced from the outside air introduction unit is between the air flow rate B of the air exhausted from the exhaust unit and the air flow rate C of the constant-temperature air to be introduced: (B−C) <A <B The processing apparatus according to claim 1, which satisfies the relationship.   The processing apparatus according to claim 1, wherein the constant temperature air inlet is provided on an upper surface of the second cover casing.   The processing apparatus according to any one of claims 1 to 3, wherein an outside air outlet of the outside air introduction unit and an air suction port of the exhaust unit face the workpiece.   The processing apparatus according to any one of claims 1 to 4, wherein an outside air outlet of the outside air introduction unit and an air suction port of the exhaust unit face each other.   The processing apparatus according to any one of claims 1 to 5, comprising: a laser light source; and an optical system for guiding a laser beam emitted from the laser light source to the workpiece.

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