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JP6513045B2 - Turning mechanism and positioning device - Google Patents
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JP6513045B2 - Turning mechanism and positioning device - Google Patents

Turning mechanism and positioning device Download PDF

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JP6513045B2
JP6513045B2 JP2016060865A JP2016060865A JP6513045B2 JP 6513045 B2 JP6513045 B2 JP 6513045B2 JP 2016060865 A JP2016060865 A JP 2016060865A JP 2016060865 A JP2016060865 A JP 2016060865A JP 6513045 B2 JP6513045 B2 JP 6513045B2
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mass portion
positioning
mass
robot
holding
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JP2017175020A (en
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石井 徹
徹 石井
容毅 川口
容毅 川口
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Yamaha Fine Technologies Co Ltd
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Description

本発明は、旋回機構及び位置決め装置に関する。   The present invention relates to a pivoting mechanism and a positioning device.

例えば加工機械、検査機械等は、ロボットの末端に各種のツールやセンサ等を有する被位置決め部材を配設し、被位置決め部材をワークに対して位置決めするよう構成されるものが多い。また、ワークへの正対方向の中心軸(いわゆるθ軸)周りの相対角度を定めて被位置決め部材を位置決めすることが必要とされる場合も少なくない。この場合、一般に、各種ロボットの末端には、被位置決め部材を保持し、θ軸周りに回転位置決めする旋回機構が配設される。   For example, processing machines, inspection machines and the like are often configured to have a positioning member having various tools, sensors and the like at the end of a robot and position the positioning member relative to a workpiece. In addition, there are many cases where it is necessary to position the positioning member by defining a relative angle around the central axis (so-called θ axis) in the direction directly opposite the workpiece. In this case, generally, at the end of various robots, a pivoting mechanism that holds the positioning member and rotationally positions around the θ axis is disposed.

例として、第4338051号公報に記載のプリント基板の検査装置は、プリント基板の電極パターンに接触端子を当接させてプリント基板の電気的特性を検査する電気検査ヘッドを、X軸方向及びY軸方向に駆動可能な移動部にZ軸方向に移動可能かつZ軸方向の中心軸周りに回転可能に保持している。つまり、前記公報の記載のプリント基板の検査装置は、直交座標型ロボットの末端に、電気検査ヘッドを回転位置決めする旋回機構を備えている。   As an example, an inspection apparatus for a printed circuit board disclosed in Japanese Patent No. 4338051 includes an electrical inspection head for inspecting the electrical characteristics of the printed circuit board by bringing a contact terminal into contact with an electrode pattern of the printed circuit board. The movable unit which can be driven in the direction is held so as to be movable in the Z-axis direction and to be rotatable around the central axis in the Z-axis direction. That is, the inspection device of the printed circuit board described in the above-mentioned publication is provided with a pivoting mechanism for rotationally positioning the electrical inspection head at the end of the Cartesian coordinate type robot.

前記公報に記載のプリント基板の検査装置は、ロボットの末端に配設される電気検査ヘッドが、複数の接触端子と、この複数の接触端子に接続される複数の配線と、この複数の配線の中から任意の配線を選択して接続を切り換える接続切換装置と、この接続切換装置を制御するための接続切換信号を受信する接続切換信号受信装置とを有する。   In the printed board inspection apparatus described in the above-mentioned publication, an electric inspection head disposed at the end of the robot comprises a plurality of contact terminals, a plurality of wirings connected to the plurality of contact terminals, and a plurality of wirings. It has a connection switching device that switches connection by selecting an arbitrary wiring from among them, and a connection switching signal receiving device that receives a connection switching signal for controlling the connection switching device.

つまり、前記公報に記載のプリント基板の検査装置は、ロボットによって移動させられる電気検査ヘッドと、検査装置の移動しない固定部に配設され、電気検査ヘッドの電気信号を処理する機器との間の配線を減じるために、ロボットの末端に、電気検査ヘッドと電気的に接続されて電気検査ヘッドと共に移動する接続切換信号受信装置を設けている。   That is, the inspection apparatus for a printed circuit board described in the above publication is between an electrical inspection head moved by a robot and a device which is disposed at a stationary part of the inspection apparatus which does not move and which processes electrical signals of the electrical inspection head. In order to reduce wiring, the end of the robot is provided with a connection switching signal receiver electrically connected to the electrical inspection head and moved together with the electrical inspection head.

さらに、ロボットの末端に、多数の接触端子を有する電気検査ヘッドと、この電気検査ヘッドに電気的に接続され、電気検査ヘッドからの電気信号を処理してより少ない配線で電送できる信号に変換する信号処理回路とを一体に配設した検査装置も用いられるようになっている。   Furthermore, an electrical inspection head having a large number of contact terminals at the end of the robot, and electrically connected to the electrical inspection head, process the electrical signal from the electrical inspection head and convert it into a signal that can be transmitted with less wiring An inspection apparatus integrally provided with a signal processing circuit is also used.

近年のプリント基板の高密度配線化に伴って、検査点数がさらに増大し、電気検査ヘッドからの電気信号を処理する処理回路が大型化して、その処理回路の質量も増大してきている。このような質量増加は、位置決め機構の位置決め精度や位置決め速度を低下させる要因となる。特に、処理回路の質量増加は、ロボットの末端に配設されてθ軸周りの回転位置決めを行う旋回機構の動作時の振動を増大させ、振動が収束するまでの待ち時間を増加させ、プリント基板の検査効率を低下させる。   With the recent increase in the density of printed circuit boards, the number of inspection points is further increased, the size of the processing circuit for processing the electrical signal from the electrical inspection head is increased, and the mass of the processing circuit is also increased. Such mass increase causes the positioning accuracy and positioning speed of the positioning mechanism to decrease. In particular, the increase in the mass of the processing circuit increases the vibration at the time of operation of the turning mechanism disposed at the end of the robot and performs rotational positioning about the θ axis, and increases the waiting time until the vibration converges. Reduce the inspection efficiency of

従って、ロボットによって被位置決め部材(例えば電気検査ヘッド等)をワーク(例えばプリント基板等)に対して位置決めする位置決め装置において、被位置決め部材と電気的に接続され、被位置決め部材と共に移動する付属部材(例えば接続切換信号受信装置、処理回路等)の質量増大に伴う旋回機構の位置決め精度の向上及び位置決め時間の短縮が求められている。   Therefore, in the positioning device which positions the positioning member (for example, an electric inspection head or the like) by the robot relative to the work (for example, the printed circuit board), the attachment member which is electrically connected to the positioning member and moves together For example, it is required to improve the positioning accuracy of the turning mechanism and shorten the positioning time as the mass of the connection switching signal receiver, the processing circuit, etc. increases.

特許第4338051号公報Patent No. 4338051

前記状況に鑑みて、本発明は、位置決め精度が比較的高く、かつ位置決め時間が比較的短い旋回機構及び位置決め装置を提供することを課題とする。   In view of the above situation, it is an object of the present invention to provide a pivoting mechanism and a positioning device having a relatively high positioning accuracy and a relatively short positioning time.

前記課題を解決するためになされた発明は、ロボットの末端に配設され、被位置決め部材を回転位置決めする旋回機構であって、前記ロボットの末端に固定される固定部と、前記固定部に回転可能に保持され、前記被位置決め部材を保持する第1質量部と、前記固定部に支持され、前記第1質量部を回転駆動する駆動部と、前記固定部に前記第1質量部と同軸かつ独立して回転可能に保持され、被位置決め部材と電気的に接続される付属部材を保持する第2質量部とを備え、前記第1質量部及び第2質量部の回転の周方向の相対移動を規制しつつ、回転の軸方向及び径方向の相対移動を許容するよう前記第1質量部と第2質量部との間を接続する接続構造を有することを特徴とする旋回機構である。   The invention made to solve the above-mentioned problems is a pivoting mechanism which is disposed at the end of the robot and rotationally positions the positioning member, and the fixing portion fixed to the end of the robot and the rotation at the fixing portion A first mass portion capable of being held and holding the positioning member, a driving portion supported by the fixing portion and rotationally driving the first mass portion, and the fixing portion coaxial with the first mass portion And a second mass portion that is independently held rotatably and holds an attachment member electrically connected to the positioning member, and the circumferential relative movement of the rotation of the first mass portion and the second mass portion And a connecting structure connecting the first mass portion and the second mass portion so as to allow relative movement in the axial direction and the radial direction of rotation.

当該旋回機構は、前記ロボットの末端に固定される固定部と、前記被位置決め部材を保持する第1質量部と、前記固定部に支持され、前記第1質量部を回転駆動する駆動部と、前記固定部に前記第1質量部と同軸かつ独立して回転可能に保持され、被位置決め部材と電気的に接続される付属部材を保持する第2質量部とを備える。このため、当該旋回機構は、付属部材の質量を保持する第2質量部の重さを固定部によって支持し、第1質量部が第2質量部の垂直荷重を受けないので、第2質量部が第1質量部に振動を生じさせ難い。また、当該旋回機構は、第1質量部と第2質量部とが別々に支持されることによって、第2質量部の質量に起因する振動が第1質量部ひいては被位置決め部材に伝達されに難いため、第1質量部ひいては被位置決め部材の振動の収束が比較的早い。さらに、当該旋回機構は、前記第1質量部及び第2質量部の回転の周方向の相対移動を規制しつつ、回転の軸方向及び径方向の相対移動を許容するよう前記第1質量部と第2質量部との間を接続する接続構造を有する。このように、接続構造が回転の軸方向及び径方向の相対移動を許容することによって、第1質量部と第2質量部と別々に支持することによる回転軸のわずかなずれによる相対変位を可能にしつつ、第1質量部と第2質量部とを、ひいては被位置決め部材と付属部材とを同期して回動させられる。このため、当該旋回機構は、被位置決め部材と付属部材とを接続する電気配線の配設が容易で電気配線に機械的負荷が加わり難い。また、当該旋回機構では、第2質量部が第1質量部と同期して回転し、第1質量部と第2質量部とを電気的に接続する電気配線も第1質量部及び第2質量部と同期して回転する。このため、当該旋回機構は、電気配線が第1質量部に張力を作用させることを防止することができ、これにより第1質量部ひいては被位置決め部材の振動を抑制できる。以上の理由により、当該旋回機構は、被位置決め部材の位置決め精度を比較的高くすることができると共に、位置決め時間を比較的短くすることができる。   The swing mechanism includes a fixed portion fixed to the end of the robot, a first mass portion holding the positioning member, and a drive portion supported by the fixed portion to rotationally drive the first mass portion. The fixing portion includes a second mass portion coaxially and independently rotatably supported with the first mass portion and holding an attachment member electrically connected to the positioning member. For this reason, the pivoting mechanism supports the weight of the second mass portion that holds the mass of the attachment member by the fixing portion, and the first mass portion does not receive the vertical load of the second mass portion. Is less likely to cause vibration in the first mass part. In addition, by supporting the first mass portion and the second mass portion separately, it is difficult for the vibration due to the mass of the second mass portion to be transmitted to the first mass portion and thus to the positioning member by the swing mechanism. Therefore, the convergence of the vibration of the first mass portion and thus the positioning member is relatively fast. Furthermore, the pivoting mechanism regulates the relative movement in the circumferential direction of the rotation of the first mass portion and the second mass portion, and allows the relative movement in the axial direction and the radial direction of the rotation, It has the connection structure which connects between 2nd mass parts. In this manner, the connection structure allows relative displacement due to a slight displacement of the rotation shaft by separately supporting the first mass portion and the second mass portion by allowing relative axial and radial displacement of the rotation. As a result, the first mass portion and the second mass portion can be rotated in synchronization with the positioning member and the attachment member. For this reason, the said turning mechanism is easy to arrange | position the electrical wiring which connects a to-be-positioned member and an attachment member, and it is hard to add mechanical load to an electrical wiring. Further, in the pivoting mechanism, the second mass portion rotates in synchronization with the first mass portion, and the electrical wiring for electrically connecting the first mass portion and the second mass portion is also the first mass portion and the second mass. Rotate in sync with the department. Therefore, the turning mechanism can prevent the electrical wiring from exerting tension on the first mass portion, and thereby can suppress the vibration of the first mass portion and hence the positioning member. From the above reasons, the pivoting mechanism can make the positioning accuracy of the positioning member relatively high, and can make the positioning time relatively short.

前記接続構造が、第1質量部及び第2質量部の一方に固定され、回転の径方向に延在する規制溝と、第1質量部及び第2質量部の他方に固定され、前記規制溝に傾動可能に嵌合する係合部材とを有するとよい。このように、前記接続構造が、前記規制溝と前記係合部材とを有することによって、第1質量部と第2質量部との間を回転軸の軸方向及び径方向には分離しながら、第1質量部と第2質量部とを確実に同期回転させることができる。   The connection structure is fixed to one of the first mass portion and the second mass portion, and is fixed to the restriction groove extending in the radial direction of rotation, and the other of the first mass portion and the second mass portion. And an engaging member which can be fitted in a pivotable manner. As described above, the connection structure includes the restriction groove and the engagement member, thereby separating the first mass portion and the second mass portion in the axial direction and the radial direction of the rotation shaft. The first mass part and the second mass part can be reliably rotated synchronously.

前記係合部材が外周に円筒面を有し、この円筒面の全周に亘って環状溝が形成された本体と、この環状溝に嵌合し、前記円筒面から径方向外側に突出して前記規制溝に当接する環状の弾性部材とを有するとよい。このように、前記係合部材が外周に円筒面を有し、この円筒面の全周に亘って環状溝が形成された本体と、この環状溝に嵌合し、前記円筒面から径方向外側に突出して前記規制溝に当接する環状の弾性部材とを有することによって、規制溝と係合部材との接触状態の変化により振動が生じることを防止することができる。   The engaging member has a cylindrical surface on the outer periphery, and a main body in which an annular groove is formed over the entire periphery of the cylindrical surface, and the annular groove is fitted and protrudes radially outward from the cylindrical surface It is preferable to have an annular elastic member in contact with the restriction groove. Thus, the engaging member has a cylindrical surface on the outer periphery, and the main body in which the annular groove is formed over the entire periphery of the cylindrical surface, and the annular groove is fitted, and the radial outer side from the cylindrical surface By having an annular elastic member projecting in contact with the regulation groove, it is possible to prevent the occurrence of vibration due to a change in the contact state between the regulation groove and the engagement member.

前記規制溝又は係合部材が、前記被位置決め部材と付属部材との間を接続する電気配線を保持する配線保持部材に配設されるとよい。このように、前記規制溝又は係合部材が、前記被位置決め部材と付属部材との間を接続する電気配線を保持する配線保持部材に配設されることによって、前記接続構造の質量を比較的小さくすることができる。このため、接続構造の慣性に起因する振動を防止して、被位置決め部材の位置決め精度をより向上すると共に位置決め時間をより短縮することができる。   The restriction groove or the engagement member may be disposed in a wiring holding member that holds an electric wiring that connects the positioning member and the attachment member. Thus, the mass of the connection structure is relatively increased by arranging the restriction groove or the engagement member in the wiring holding member holding the electric wiring connecting the positioning member and the attachment member. It can be made smaller. For this reason, the vibration resulting from the inertia of the connection structure can be prevented, and the positioning accuracy of the positioning member can be further improved and the positioning time can be further shortened.

前記被位置決め部材として、複数の電気接触子を備える電気検査ヘッドを保持するとよい。前記被位置決め部材として、複数の電気接触子を備える電気検査ヘッドを保持することによって、当該旋回機構は、比較的多数の電気接触子を備える電気検査ヘッドを比較的正確かつ短時間で回転位置決めすることができる。   It is good to hold an electric inspection head provided with a plurality of electric contacts as said positioning member. By holding the electrical inspection head provided with a plurality of electrical contacts as the positioning member, the pivoting mechanism rotationally positions the electrical inspection head provided with a relatively large number of electrical contacts in a relatively accurate and short time. be able to.

また、前記課題を解決するためになされた別の発明は、直交座標型ロボットと、このロボットの末端に配設される当該旋回機構とを備える位置決め装置である。   Moreover, another invention made in order to solve the said subject is a positioning apparatus provided with an orthogonal coordinate type robot and the said turning mechanism arrange | positioned by the terminal of this robot.

当該位置決め装置は、当該旋回機構を備えるので、被位置決め部材の空間位置及び回転位置を比較的高精度に比較的短時間で位置決めできる。   Since the positioning device includes the pivoting mechanism, the spatial position and rotational position of the positioning member can be positioned with relatively high accuracy in a relatively short time.

以上のように、本発明の旋回機構及び位置決め装置は、位置決め精度が比較的高く、かつ位置決め時間が比較的短い。   As described above, the pivoting mechanism and the positioning device of the present invention have relatively high positioning accuracy and relatively short positioning time.

本発明の一実施形態位置決め装置の構成を示す模式的平面図である。It is a typical top view showing composition of one embodiment positioning device of the present invention. 図1の旋回機構の構成を示す模式的図断面図である。It is a schematic diagram sectional drawing which shows the structure of the turning mechanism of FIG. 図2の旋回機構の接続構造の構成を示す模式的斜視図である。It is a schematic perspective view which shows the structure of the connection structure of the turning mechanism of FIG. 図3の接続構造の別の形態を示す模式的断面図である。It is a schematic cross section which shows another form of the connection structure of FIG. 図3の接続構造のさらに別の形態を示す模式的断面図である。FIG. 7 is a schematic cross-sectional view showing still another form of the connection structure of FIG. 3;

以下、適宜図面を参照しつつ、本発明の実施の形態を詳説する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as appropriate.

[位置決め装置]
図1に示す本発明の一実施形態に係る位置決め装置は、直交座標型ロボット1と、直交座標型ロボット1の末端に配設され、それ自体が本発明の一つの実施形態である旋回機構2とを備える。旋回機構2は、図2に示すように、被位置決め部材3及び被位置決め部材と電気的に接続される付属部材4を保持する。直交座標型ロボット1は、旋回機構2ひいては旋回機構2に保持される被位置決め部材3を、水平なX方向及びY方向並びに鉛直なZ方向に位置決めする。旋回機構2は、被位置決め部材3を保持し、この被位置決め部材3のZ方向のθ軸周りの回転位置決めを行う。
[Positioning device]
A positioning apparatus according to an embodiment of the present invention shown in FIG. 1 is provided at an end of an orthogonal coordinate robot 1 and an end of the orthogonal coordinate robot 1 and is itself a pivot mechanism 2 according to an embodiment of the present invention. And The pivoting mechanism 2 holds the positioning member 3 and the attachment member 4 electrically connected to the positioning member, as shown in FIG. The Cartesian coordinate type robot 1 positions the pivoting mechanism 2 and thus the positioning target member 3 held by the pivoting mechanism 2 in the horizontal X direction, the Y direction, and the vertical Z direction. The turning mechanism 2 holds the positioning member 3 and performs rotational positioning of the positioning member 3 about the θ axis in the Z direction.

当該位置決め装置は、例として、被位置決め部材として平行に配設される複数の電気接触子(プローブ)3aを有し、このプローブ3aをプリント基板Pの測定点に当接させることによって、プリント基板Pの電気的特性を検査する電気検査ヘッド3を旋回機構2によって保持する。この例において、当該位置決め装置は、下方に隣接するテーブル上に配置されるプリント基板Pに対して被位置決め部材3のθ軸周りの角度を合わせて、プリント基板Pに電気検査ヘッドを押圧することにより、プリント基板Pの電気的特性を検査するために使用される。   The positioning device has, as an example, a plurality of electrical contacts (probes) 3a disposed in parallel as positioning members, and a printed circuit board is obtained by bringing the probes 3a into contact with the measurement points of the printed circuit board P. The electrical inspection head 3 for inspecting the electrical characteristics of P is held by the pivoting mechanism 2. In this example, the positioning device presses the electrical inspection head against the printed circuit board P by aligning the angle around the θ axis of the positioning member 3 with the printed circuit board P disposed on the table adjacent below. Is used to inspect the electrical characteristics of the printed circuit board P.

〔直交座標型ロボット〕
直交座標型ロボット1の具体例としては、図示するように、水平なX方向に延在する一対の固定ガイド11と、この一対の定レール上をそれぞれ移動する一対のスライダー12と、この一つのスライダー12の間にX方向に垂直なY方向に掛け渡される可動ガイド13と、この可動ガイド13上を移動する水平移動体14と、この水平移動体14にX方向及びY方向に垂直なZ方向(鉛直方向)に昇降可能に配設される垂直移動体15とを備えるものとすることができる。
[Orthogonal coordinate type robot]
As a specific example of the orthogonal coordinate type robot 1, as shown in the figure, a pair of fixed guides 11 extending in the horizontal X direction, a pair of sliders 12 moving on the pair of constant rails, and one of these A movable guide 13 is stretched between the sliders 12 in the Y direction perpendicular to the X direction, a horizontal moving body 14 moving on the movable guide 13, and Z perpendicular to the horizontal moving body 14 in the X and Y directions A vertically movable body 15 can be provided which can be moved up and down in the direction (vertical direction).

〔旋回機構〕
旋回機構2は、直交座標型ロボット1の末端に配設され、被位置決め部材3を回転位置決めするために用いられる。具体例としては、当該旋回機構2は、被位置決め部材3として例えばプリント基板の電気的特性を検査する電気検査ヘッドを保持する場合、平面視における電気検査ヘッド3の角度をプリント基板Pの角度に合わせるために使用される。また、当該旋回機構2は、被位置決め部材3と共に、被位置決め部材3と電気的に接続される付属部材4として、例えば電気検査ヘッドの電気信号を処理するための回路基板等も保持する。
[Pivot mechanism]
The turning mechanism 2 is disposed at the end of the Cartesian coordinate type robot 1 and is used to rotationally position the positioning member 3. As a specific example, when holding the electrical inspection head which inspects the electrical property of a printed circuit board as the to-be-positioned member 3, for example, the said turning mechanism 2 makes the angle of the electrical inspection head 3 in planar view Used to match. Further, the turning mechanism 2 holds not only the positioning member 3 but also an accessory member 4 electrically connected to the positioning member 3, such as a circuit board for processing an electric signal of the electric inspection head.

当該旋回機構2は、図2に示すように、直交座標型ロボット1の末端の垂直移動体14に固定される固定部21と、固定部21にθ軸周りに回転可能に保持され、前記被位置決め部材3を保持する第1質量部22と、固定部21に支持され、前記第1質量部22を回転駆動する駆動部23と、固定部21に前記第1質量部22と同軸かつ独立して回転可能に保持され、前記付属部材4を保持する第2質量部24と、第1質量部22が保持する被位置決め部材3と第2質量部24が保持する付属部材4とを接続する電気配線Wを保持する配線保持部材25とを備える。   As shown in FIG. 2, the turning mechanism 2 is rotatably held around the θ axis by a fixed portion 21 fixed to the vertical moving body 14 at the end of the Cartesian coordinate type robot 1 and the fixed portion 21. The first mass portion 22 holding the positioning member 3 and the drive portion 23 supported by the fixed portion 21 and rotationally driving the first mass portion 22 and the fixed portion 21 coaxially and independently with the first mass portion 22 Of the second mass portion 24 holding the attachment member 4 and the attachment member 4 held by the first mass portion 22 and the attachment member 4 held by the second mass portion 24 And a wiring holding member 25 for holding the wiring W.

また、当該旋回機構2は、第1質量部22及び第2質量部24の回転の周方向の相対移動を規制しつつ、回転の軸方向及び径方向の相対移動を許容するよう前記第1質量部22と第2質量部24との間を接続する接続構造26を有する。   In addition, while the relative movement of the first mass portion 22 and the second mass portion 24 in the circumferential direction is restricted, the swing mechanism 2 allows the relative movement in the axial direction and the radial direction of the rotation. It has the connection structure 26 which connects between the part 22 and the 2nd mass part 24. FIG.

<固定部>
固定部21は、ロボットの末端に、θ軸(Z軸)に平行に固定されるベースプレート27と、このベースプレート27のθ軸方向一端側に水平方向に突設される第1支持部材28と、ベースプレート27のθ軸方向他端側に水平方向に突設される第2支持部材29とを有する。
<Fixed part>
The fixing unit 21 includes a base plate 27 fixed in parallel to the θ axis (Z axis) at the end of the robot, and a first support member 28 horizontally provided on one end side of the base plate 27 in the θ axis direction. And a second support member 29 horizontally provided on the other end side of the base plate 27 in the θ axis direction.

第1支持部材28は、第1質量部22を回転可能に支持するための第1軸受30を有する。また、第2支持部材29は、第2質量部24を回転可能に支持するための第2軸受31を有する。   The first support member 28 has a first bearing 30 for rotatably supporting the first mass portion 22. The second support member 29 also has a second bearing 31 for rotatably supporting the second mass portion 24.

固定部21において、前記第1軸受30と第2軸受31とは、厳密な精度は要求されないが、設計上は同軸に設けられる。このため、固定部21は、別々に成形したベースプレート27、第1支持部材28及び第2支持部材29を、例えば溶接、ボルト締め等の方法により接続して形成してもよい。   In the fixing portion 21, the first bearing 30 and the second bearing 31 are provided coaxially in design, although strict precision is not required. For this reason, the fixing portion 21 may be formed by connecting the base plate 27, the first support member 28, and the second support member 29, which are separately formed, by a method such as welding or bolting.

<第1質量部>
第1質量部22は、第1支持部材28の第1軸受30に支持される第1回転軸32と、この第1回転軸32の一端側に設けられ、被位置決め部材3を保持する第1保持部材33とを備える。この第1保持部材33の構成としては、特に限定されず、例えば被位置決め部材3を把持するチャック、被位置決め部材3を例えばボルト等により固定するプレート等を採用することができる。
<First mass part>
The first mass portion 22 is provided at a first rotation shaft 32 supported by the first bearing 30 of the first support member 28 and at one end side of the first rotation shaft 32, and holds the positioning member 3. And a holding member 33. The configuration of the first holding member 33 is not particularly limited. For example, a chuck that holds the positioning member 3 or a plate that fixes the positioning member 3 with a bolt or the like can be adopted.

<駆動部>
駆動部23は、第1質量部22の第1回転軸32を回転駆動する機構である。この駆動部23としては、例えば公知の減速機付サーボモーター等を使用することができる。この駆動部23の出力軸は、第1質量部22の第1回転軸32と一体であってもよい。
<Drive part>
The drive unit 23 is a mechanism that rotationally drives the first rotation shaft 32 of the first mass unit 22. As the drive unit 23, for example, a known servomotor with a reduction gear can be used. The output shaft of the drive unit 23 may be integral with the first rotation shaft 32 of the first mass unit 22.

<第2質量部>
第2質量部24は、一端側が固定部21の第2支持部材29の第2軸受31に支持される第2回転軸34と、この第2回転軸34の他端側に設けられ、付属部材4を保持する第2保持部材35とを備える。この第2保持部材35の構成としては、例えば付属部材4を収容する箱体、付属部材4を固定できるラック等を採用することができる。
<Second mass part>
The second mass portion 24 is provided at the other end side of the second rotation shaft 34, one end side of which is supported by the second bearing 31 of the second support member 29 of the fixed portion 21, and the attachment member And a second holding member 35 for holding four. As a structure of this 2nd holding member 35, the box etc. which accommodate the attachment member 4, the rack which can fix the attachment member 4, etc. are employable, for example.

<配線保持部材>
配線保持部材25は、第1質量部22又は第2質量部24に付設される。この配線保持部材25は、例えばダクト、パイプ、ケーブルラック等に準じた構成とすることができる。また、配線保持部材25に接続構造26を設ける場合、配線保持部材25は、第1質量部22に生じる旋回駆動力を第2質量部24に伝達して第2質量部24を同期回転させられるよう、十分な剛性を有する堅固な構成とされる。配線保持部材25で電気配線Wを保持することで、被位置決め部材3と付属部材4とを接続する電気配線Wが占有する空間を小さくすると共に、電気配線Wの損傷を防止することができる。
<Wire holding member>
The wiring holding member 25 is attached to the first mass portion 22 or the second mass portion 24. The wiring holding member 25 can be configured, for example, according to a duct, a pipe, a cable rack or the like. When the connection holding member 25 is provided with the connection structure 26, the wiring holding member 25 can transmit the swing driving force generated in the first mass portion 22 to the second mass portion 24 to synchronously rotate the second mass portion 24. As such, it has a rigid construction with sufficient rigidity. By holding the electrical wiring W by the wiring holding member 25, the space occupied by the electrical wiring W connecting the positioning target member 3 and the accessory member 4 can be reduced and damage to the electrical wiring W can be prevented.

<接続構造>
接続構造26は、第1質量部22及び第2質量部24の一方に固定され、第1回転軸32及び第2回転軸34の径方向に延在する規制溝36と、第1質量部22及び第2質量部24の他方に固定され、規制溝36に傾動可能に嵌合する係合部材37とを有する構成とすることができる(規制溝36及び係合部材37については、図3に詳しく示す)。
<Connection structure>
The connection structure 26 is fixed to one of the first mass portion 22 and the second mass portion 24 and extends in the radial direction of the first rotation shaft 32 and the second rotation shaft 34, and the first mass portion 22. And an engaging member 37 fixed to the other of the second mass portion 24 and inclinably fitted to the restricting groove 36 (the restricting groove 36 and the engaging member 37 are shown in FIG. 3). Show in detail).

前記接続構造26は、規制溝36と係合部材37とを有することによって、第1質量部22と第2質量部24との間を第1回転軸32及び第2回転軸34の軸方向及び径方向には分離しながら、第1質量部22と第2質量部24とを第1回転軸32及び第2回転軸34を中心に同期して回動させられる。   The connection structure 26 includes the restriction groove 36 and the engagement member 37 so that the axial direction of the first rotation shaft 32 and the second rotation shaft 34 can be obtained between the first mass portion 22 and the second mass portion 24. The first mass portion 22 and the second mass portion 24 are synchronously rotated about the first rotation shaft 32 and the second rotation shaft 34 while being separated in the radial direction.

このため、当該旋回機構2では、第1質量部22の第1回転軸32と第2質量部24の第2回転軸34とが一体でないことにより生じるわずかな芯ずれに起因して、第1質量部22及び第2質量部24の回動によって生じる相対変位を吸収することができるので、第1質量部22及び第2質量部24に振動を生じさせ難い。   For this reason, in the pivoting mechanism 2, the first rotation shaft 32 of the first mass portion 22 and the second rotation shaft 34 of the second mass portion 24 are not integrated with each other. Since the relative displacement caused by the rotation of the mass portion 22 and the second mass portion 24 can be absorbed, it is difficult to cause the first mass portion 22 and the second mass portion 24 to vibrate.

一方、接続構造26は、第1質量部22と第2質量部24との間の第1回転軸32及び第2回転軸34の周方向の相対移動を規制するので、第1質量部22と第2質量部24とを第1回転軸32及び第2回転軸3を中心に同期回転させることができる。   On the other hand, since the connection structure 26 regulates the relative movement of the first rotation shaft 32 and the second rotation shaft 34 between the first mass portion 22 and the second mass portion 24 in the circumferential direction, the connection structure 26 The second mass portion 24 can be synchronously rotated about the first rotation shaft 32 and the second rotation shaft 3.

規制溝36と係合部材37との嵌合は、第1回転軸32及び第2回転軸34の周方向にはできるだけ遊びが小さく、第1質量部22と第2質量部24とを一体に回転させられることが望ましい。また、係合部材37は、第1回転軸32及び第2回転軸34の軸方向に一定の範囲内であれば、規制溝36に対して係合できるよう構成されること、つまりZ方向の位置ずれを許容する構造を有することが好ましい。   When the restriction groove 36 and the engagement member 37 are fitted, the play is as small as possible in the circumferential direction of the first rotation shaft 32 and the second rotation shaft 34, and the first mass portion 22 and the second mass portion 24 are integrated. It is desirable to be rotated. The engagement member 37 is configured to be able to engage with the restriction groove 36 if it is within a certain range in the axial direction of the first rotation shaft 32 and the second rotation shaft 34, that is, in the Z direction It is preferable to have a structure that allows misalignment.

具体的には、接続構造26は、規制溝36が周方向の幅が一定でかつ十分な深さ(軸方向の厚さ)を有し、係合部材37の先端部が規制溝36の幅と略等しい最大径を有し、軸方向断面が外側に凸状である構成、好ましくは係合部材37の先端部が規制溝36の幅と略等しい直径を有する球面を有する構成とすることができる。また、係合部材37は、第1回転軸32及び第2回転軸34に平行な軸を中心に回転可能に支持されることが好ましい。   Specifically, in the connection structure 26, the restriction groove 36 has a constant circumferential width and a sufficient depth (axial thickness), and the tip of the engagement member 37 has a width of the restriction groove 36. Have a maximum diameter substantially the same as the above, and the axial cross section is convex outward, preferably, the tip of the engaging member 37 has a spherical surface having a diameter substantially equal to the width of the restriction groove 36 it can. The engagement member 37 is preferably supported rotatably around an axis parallel to the first rotation shaft 32 and the second rotation shaft 34.

接続構造26において、規制溝36及び係合部材37の少なくとも一方の他方への当接部分、好ましくは係合部材37の規制溝36に当接する部分が振動を減衰させられる樹脂等の材質から形成されることが望ましい。一方、規制溝36及び係合部材37の他方は、例えばJIS−G4404(2006)に規定される合金工具鋼鋼材等の十分に硬度が大きく、当接面の変形を防止できる材料から形成されることが好ましい。   In the connection structure 26, the contact portion of at least one of the restriction groove 36 and the engagement member 37 with the other, preferably the portion of the engagement member 37 that abuts the restriction groove 36 is formed of a material such as resin which can damp the vibration. It is desirable to be done. On the other hand, the other of the restricting groove 36 and the engaging member 37 is made of a material having a sufficiently high hardness such as an alloy tool steel material specified in JIS-G 4404 (2006), for example, and capable of preventing deformation of the contact surface. Is preferred.

また、接続構造26は、第1質量部22と第2質量部24との間を直接接続できるような構造、例えば規制溝36を有する部材又係合部材37がθ軸方向に長い構造としてもよい。しかしながら、図示するように、第1質量部22と第2質量部24との距離が比較的大きい場合には、接続構造26を配線保持部材25に配設すること、つまり配線保持部材25を回転トルクを伝達する構造体の少なくとも一部とすることで、当該旋回機構2を小型化することができる。また、接続構造26を配線保持部材25に配設することにより、接続構造26の質量を小さくできるので、接続構造26の慣性力による第1質量部22ひいては被位置決め部材3の位置決め精度及び位置決め速度の低下が抑制される。   Also, the connection structure 26 may have a structure in which the first mass portion 22 and the second mass portion 24 can be directly connected, for example, a member having the restriction groove 36 or a structure in which the engagement member 37 is elongated in the θ axis direction. Good. However, as illustrated, when the distance between the first mass portion 22 and the second mass portion 24 is relatively large, the connection structure 26 is disposed on the wiring holding member 25, that is, the wiring holding member 25 is rotated. The pivoting mechanism 2 can be miniaturized by using at least a part of the structure transmitting torque. Further, by disposing the connection structure 26 on the wiring holding member 25, the mass of the connection structure 26 can be reduced, so that the positioning accuracy and positioning speed of the first mass portion 22 and consequently the positioning member 3 by the inertia force of the connection structure 26. The decrease in

<利点>
当該旋回機構2は、被位置決め部材3を保持する第1質量部22と、被位置決め部材3と電気的に接続される付属部材4を保持する第2質量部24とを同軸かつ独立して回転可能に備えることで、第1質量部22に第2質量部24の垂直荷重が加わらないので、第2質量部24が第1質量部22を振動させ難い。
<Advantage>
The pivoting mechanism 2 coaxially and independently rotates the first mass portion 22 holding the positioning member 3 and the second mass portion 24 holding the attachment member 4 electrically connected to the positioning member 3. Since the vertical load of the second mass portion 24 is not applied to the first mass portion 22 by being able to be provided, the second mass portion 24 hardly vibrates the first mass portion 22.

また、当該旋回機構2は、第1質量部22と第2質量部24とが別々に支持されることによって、第2質量部24の質量に起因する振動が第1質量部22ひいては被位置決め部材3に伝達されに難いため、第1質量部22ひいては被位置決め部材3の振動の収束が比較的早い。   Further, in the turning mechanism 2, the vibration caused by the mass of the second mass portion 24 can be determined by the first mass portion 22 and thus the positioned member by separately supporting the first mass portion 22 and the second mass portion 24. Since it is difficult to be transmitted to the third portion 3, the convergence of the vibration of the first mass portion 22 and hence the positioning member 3 is relatively fast.

さらに、当該旋回機構2では、接続構造26が、回転の軸方向及び径方向の相対移動を許容するよう第1質量部22と第2質量部24との間を接続する。このため、当該旋回機構2では、接続構造26第1質量部22の第1回転軸32と第2質量部24の第2回転軸34とが一体でないことにより生じるわずかな芯ずれに起因する相対変位を吸収することができるため、第1質量部22及び第2質量部24に振動を生じさせ難い。   Furthermore, in the turning mechanism 2, the connection structure 26 connects between the first mass portion 22 and the second mass portion 24 so as to allow relative movement in the axial direction and the radial direction of rotation. For this reason, in the turning mechanism 2, the relative rotation caused by a slight misalignment caused by the first rotation shaft 32 of the connection mass 26 and the second rotation shaft 34 of the second mass portion 24 not being integrated. Since the displacement can be absorbed, it is difficult to cause the first mass portion 22 and the second mass portion 24 to vibrate.

一方、接続構造26は、第1質量部及び第2質量部の回転の周方向の相対移動を規制するため、第1質量部22と第2質量部24とを、ひいては被位置決め部材3と付属部材4とを同期して回動させられるので、被位置決め部材3と付属部材4とを接続する電気配線Wの配設が容易で電気配線Wに機械的負荷が加わり難い。   On the other hand, the connection structure 26 regulates the relative movement in the circumferential direction of the rotation of the first mass portion and the second mass portion, so that the first mass portion 22 and the second mass portion 24 are attached together with the positioning member 3 Since the member 4 can be synchronously rotated, the arrangement of the electrical wiring W connecting the positioning member 3 and the accessory member 4 is easy, and it is difficult to apply a mechanical load to the electrical wiring W.

当該旋回機構2は、以上の作用が得られることにより、被位置決め部材3を比較的短時間でかつ高精度に位置決めすることができる。   The pivoting mechanism 2 can position the positioning member 3 in a relatively short time and with high accuracy by obtaining the above-described action.

また、当該旋回機構2では、第2質量部24が第1質量部22と同期して回転し、第1質量部22と第2質量部24とを接続する電気配線Wも同期して回転するので、電気配線Wが第1質量部22に張力を作用させることが防止され、第1質量部22ひいては被位置決め部材3の電気配線Wの影響による振動が抑制される。   Further, in the turning mechanism 2, the second mass unit 24 rotates in synchronization with the first mass unit 22, and the electrical wiring W connecting the first mass unit 22 and the second mass unit 24 also rotates in synchronization. Therefore, the electrical wiring W is prevented from applying tension to the first mass portion 22, and the vibration due to the influence of the electrical wiring W of the first mass portion 22 and thus the positioning member 3 is suppressed.

また、当該位置決め機構は、比較的位置決め精度が高く、かつ位置決め時間が比較的短い当該旋回機構2を備えるので、比較的安価な直交座標型ロボット1を使用しながら、比較的高精度かつ短時間で被位置決め部材3を位置決めすることができる。   Further, since the positioning mechanism includes the pivot mechanism 2 having relatively high positioning accuracy and relatively short positioning time, relatively high accuracy and short time while using the relatively inexpensive Cartesian coordinate type robot 1 The positioning member 3 can be positioned by the

[その他の実施形態]
前記実施形態は、本発明の構成を限定するものではない。従って、前記実施形態は、本明細書の記載及び技術常識に基づいて前記実施形態各部の構成要素の省略、置換又は追加が可能であり、それらは全て本発明の範囲に属するものと解釈されるべきである。
Other Embodiments
The embodiment does not limit the configuration of the present invention. Therefore, the embodiment can omit, substitute, or add the components of each part of the embodiment based on the description of the present specification and common technical knowledge, and all of them can be construed as belonging to the scope of the present invention. It should.

当該旋回機構は、多関節型ロボットの末端に配設されてもよく、1自由度のロボット(いわゆるアクチュエーター)の末端に配設されてもよい。また、当該旋回機構は、Z軸方向の自由度を有しない直交座標型ロボットやX方向、Y方向及びZ方向に加えてさらなる自由度を有する直交座標型ロボットの末端に配設されてもよい。また、当該旋回機構は、ロボットの末端に一体不可分(着脱不能)に配設されてもよい。   The pivoting mechanism may be disposed at the end of the articulated robot or at the end of a robot with one degree of freedom (so-called actuator). In addition, the turning mechanism may be disposed at the end of an orthogonal coordinate robot having no freedom in the Z-axis direction or an orthogonal coordinate robot having an additional degree of freedom in addition to the X, Y, and Z directions. . In addition, the turning mechanism may be disposed integrally and irremovably at the end of the robot.

当該旋回機構は、第1質量部と第2質量部とを同期回転させる接続構造の代案として、例えば図4に示す係合部材37a又は図5に示す係合部材37bを有するものとしてもよい。これらの係合部材37a,37bは、外周に円筒面を有する例えば円柱状の本体38a,38bの外周面にその全周に亘って形成した環状溝39a,39bに、例えばOリング等から形成され、本体38a,38bの円筒面から径方向外側に突出して規制溝36に当接する環状の弾性部材40a,40bが嵌合したものである。このように、弾性部材40a,40bを突出させて規制溝36に当接させることにより、円筒状の本体38a,38bの外径を規制溝36の幅よりも小さくして、本体38a,38bと規制溝36との間に隙間を形成し、この隙間の中で係合部材37a,37bを傾動させることができる。なお、係合部材37aと、係合部材37bとは、弾性部材40a,40bの大きさと数とが異なる。   The swing mechanism may have, for example, an engagement member 37a shown in FIG. 4 or an engagement member 37b shown in FIG. 5 as an alternative of the connection structure for synchronously rotating the first mass portion and the second mass portion. These engaging members 37a and 37b are formed, for example, from O-rings or the like in annular grooves 39a and 39b formed on the outer peripheral surface of a cylindrical main body 38a or 38b having a cylindrical surface on the outer periphery over the entire periphery. The annular elastic members 40a and 40b are engaged with the regulation grooves 36 so as to protrude radially outward from the cylindrical surfaces of the main bodies 38a and 38b and to be in contact with the restriction grooves 36. In this manner, the elastic members 40a and 40b are made to project and contact the control groove 36, thereby making the outer diameters of the cylindrical main bodies 38a and 38b smaller than the width of the control groove 36, and the main bodies 38a and 38b and A gap can be formed between the restricting groove 36 and the engaging members 37a and 37b can be tilted in the gap. The size and the number of the elastic members 40a and 40b are different between the engagement member 37a and the engagement member 37b.

当該旋回機構及び位置決め装置は、回転位置を変化させる多様な装置に適用可能であるが、プリント基板等の電気的特性を検査するための電気検査ヘッドの位置決めに特に好適に利用することができる。   The pivot mechanism and the positioning device are applicable to various devices that change the rotational position, but can be particularly suitably used for positioning an electrical inspection head for inspecting electrical characteristics of a printed circuit board or the like.

1 直交座標型ロボット
2 旋回機構
3 被位置決め部材(電気検査ヘッド)
3a 電気接触子
4 付属部材
11 固定ガイド
12 スライダー
13 可動ガイド
14 水平移動体
15 垂直移動体
21 固定部
22 第1質量部
23 駆動部
24 第2質量部
25 配線保持部材
26 接続構造
27 ベースプレート
28 第1支持部材
29 第2支持部材
30 第1軸受
31 第2軸受
32 第1回転軸
33 第1保持部材
34 第2回転軸
35 第2保持部材
36 規制溝
37,37a,37b 係合部材
38a,38b 本体
39a,39b 環状溝
40a,40b 弾性部材
P プリント基板
W 電気配線
1 Cartesian Coordinate Robot 2 Turning Mechanism 3 Positioning Member (Electrical Inspection Head)
3a electric contact 4 attached member 11 fixed guide 12 slider 13 movable guide 14 horizontal moving body 15 vertical moving body 21 fixed portion 22 first mass portion 23 driving portion 24 second mass portion 25 wiring holding member 26 connection structure 27 base plate 28 1 support member 29 second support member 30 first bearing 31 second bearing 32 first rotary shaft 33 first holding member 34 second rotary shaft 35 second holding member 36 regulating groove 37, 37a, 37b engagement member 38a, 38b Body 39a, 39b Annular groove 40a, 40b Elastic member P Printed circuit board W Electrical wiring

Claims (6)

ロボットの末端に配設され、被位置決め部材を回転位置決めする旋回機構であって、
前記ロボットの末端に固定される固定部と、
前記固定部に回転可能に保持され、前記被位置決め部材を保持する第1質量部と、
前記固定部に支持され、前記第1質量部を回転駆動する駆動部と、
前記固定部に前記第1質量部と同軸かつ独立して回転可能に保持され、被位置決め部材と電気的に接続される付属部材を保持する第2質量部とを備え、
前記第1質量部及び第2質量部の回転の周方向の相対移動を規制しつつ、回転の軸方向及び径方向の相対移動を許容するよう前記第1質量部と第2質量部との間を接続する接続構造を有することを特徴とする旋回機構。
A pivoting mechanism disposed at the end of the robot for rotationally positioning the positioning member,
A fixing part fixed to the end of the robot;
A first mass portion rotatably held by the fixing portion and holding the positioning member;
A driving unit that is supported by the fixed unit and rotationally drives the first mass unit;
The fixing portion includes a second mass portion coaxially and independently rotatably supported with the first mass portion and holding an attachment member electrically connected to the positioning member,
Between the first mass portion and the second mass portion so as to allow relative movement in the axial direction and radial direction of rotation while restricting relative movement in the circumferential direction of rotation of the first mass portion and the second mass portion A pivoting mechanism characterized by having a connection structure for connecting the two.
前記接続構造が、第1質量部及び第2質量部の一方に固定され、回転の径方向に延在する規制溝と、第1質量部及び第2質量部の他方に固定され、前記規制溝に傾動可能に嵌合する係合部材とを有する請求項1に記載の旋回機構。   The connection structure is fixed to one of the first mass portion and the second mass portion, and is fixed to the restriction groove extending in the radial direction of rotation, and the other of the first mass portion and the second mass portion. The pivoting mechanism according to claim 1, further comprising: an engagement member that is pivotably fitted to the second arm. 前記係合部材が外周に円筒面を有し、この円筒面の全周に亘って環状溝が形成された本体と、この環状溝に嵌合し、前記円筒面から径方向外側に突出して前記規制溝に当接する環状の弾性部材とを有する請求項2に記載の旋回機構。   The engaging member has a cylindrical surface on the outer periphery, and a main body in which an annular groove is formed over the entire periphery of the cylindrical surface, and the annular groove is fitted and protrudes radially outward from the cylindrical surface The turning mechanism according to claim 2, further comprising: an annular elastic member abutting on the restriction groove. 前記規制溝又は係合部材が、前記被位置決め部材と付属部材との間を接続する電気配線を保持する配線保持部材に配設される請求項2又は請求項3に記載の旋回機構。   The turning mechanism according to claim 2 or 3, wherein the restricting groove or the engaging member is provided in a wire holding member for holding an electric wire connecting the positioning member and the attachment member. 前記被位置決め部材として、複数の電気接触子を備える電気検査ヘッドを保持する請求項1から請求項4のいずれか1項に記載の旋回機構。   The turning mechanism according to any one of claims 1 to 4, wherein an electric inspection head provided with a plurality of electric contacts is held as the positioning member. 直交座標型ロボットと、このロボットの末端に配設される請求項1から請求項5のいずれか1項に記載の旋回機構とを備える位置決め装置。   A positioning device comprising: a Cartesian coordinate type robot; and the turning mechanism according to any one of claims 1 to 5 disposed at the end of the robot.
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