JP6516102B2 - Transfer hand - Google Patents

Description

  The present invention relates to a transfer hand for transferring a plate-like work.

  For example, in the transfer hand for transferring a plate-like work such as a wafer in a non-contact manner by using the Bernoulli effect, the transfer work in a state in which the work is inclined can be a factor such as breakage of the work. For this reason, a function to detect the presence or absence of the tilt of the work is included. Such a function is to project light to the workpiece held by the transfer hand, and to face the workpiece of the transfer hand with a line sensor that receives the reflected light reflected by the workpiece. It implement | achieves by providing in the multiple places of the opposing surface to be carried out (for example, refer patent document 1).

JP H04-146 092

  Here, each of the plurality of line sensors described above includes a photoelectric sensor for projecting and receiving light, and a light for projecting light for guiding the light projected by the photoelectric sensor to a projection position on the workpiece A fiber line and an optical fiber line for light reception for guiding the reflected light from the work to the photoelectric sensor are required. That is, since the photoelectric sensor according to the number of line sensors is needed, equipment cost increases. Furthermore, since it is necessary to wire the number of optical fiber lines for light emission and the number of optical fiber lines for light reception according to the number of line sensors while satisfying the demand for downsizing of equipment, the optical fiber lines are complicated. It is difficult to manage optical fiber lines, such as Under these circumstances, it is difficult to judge the quality of each line sensor or to perform maintenance, etc. In addition, in order to check the detection state of each line sensor, it is necessary to make fine adjustments for each line sensor. Man-hours will increase.

  The present invention has been made in view of the above problems, and an object of the present invention is to detect the inclination of a workpiece with a simple configuration.

(Aspects of the Invention)
The following aspects of the invention illustrate the configuration of the present invention, and do not limit the technical scope of the present invention. Therefore, it is included in the technical scope of the present invention also about what replaced a part of a component, deleted, or added another component, considering the form for carrying out the invention into consideration. It is possible.

  A transfer hand for transferring a plate-like work, holding the work by suction while holding it in a non-contacting manner, and being wired to the hand main body having a facing surface facing the work in the holding state; An optical fiber line, a photoelectric sensor for projecting and receiving light to the optical fiber line, a light projecting section for projecting light to a workpiece in a holding state, and And at least two detection units disposed apart from each other within a range in which the work in the holding state is projected onto the opposite surface of the hand main body. And detection means for detecting the presence or absence of the inclination of the work relative to the facing surface based on the amount of light received from the optical fiber line of the photoelectric sensor, the light emitted from the photoelectric sensor being at least 2 Through one detector As mentioned above is received by a photoelectric sensor, the at least two detection portions, the transfer hand connected in series with said optical fiber line (claim 1).

  Since the present invention is configured as described above, it is possible to detect the inclination of the workpiece with a simple configuration.

It is the schematic which shows roughly the structure of the transfer hand concerning embodiment of this invention. It is a disassembled perspective view of the hand main-body part of the transfer hand shown in FIG. (A) is a bottom view of the hand main-body part of the transfer hand shown in FIG. 1, (b) is an expanded sectional view of a detection part periphery arrange | positioned at a hand main-body part. It is an image figure for demonstrating the non-contact holding method of the workpiece | work using the Bernoulli effect. It is a schematic sectional drawing which passes a detection part of the hand main body part of the state holding a workpiece | work. It is the image figure which expanded the detection part vicinity in FIG. It is an image figure showing the state where the work is inclined and held by the hand main body of the transfer hand according to the embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described based on the drawings. Here, throughout the drawings, the same or corresponding parts are indicated by the same reference numerals.
FIG. 1 schematically shows a transfer hand according to an embodiment of the present invention. As shown, the transfer hand 10 includes a hand body 12, an optical fiber line 14, a photoelectric sensor 16, and a detection means 18. The hand main body 12 is a substantially plate-like one having a shape combining a circle and a rectangle in a plan view. Further, as can be confirmed in the exploded perspective view of FIG. 2, the hand upper portion 22 and the hand lower portion 24 are screwed in such a manner that the optical fiber wire 14 is sandwiched between the hand upper portion 22 and the hand lower portion 24. It is assembled by a mechanism or the like. The lower hand 24 is provided with an accommodation groove 24a for accommodating the optical fiber line 14, and the upper hand 22 is also provided with an accommodation groove 22a (see FIG. 3B) corresponding thereto. . Due to such a structure, the optical fiber line 14 is sandwiched between the upper hand 22 and the lower hand 24 while being accommodated in the accommodation groove 24 a of the lower hand 24 and the accommodation groove 22 a of the upper hand 22.

  Further, the hand main body 12 is provided with three claws 26 (26A to 26C) in the illustrated example, and the claws 26A to 26C are work W (by the hand main body 12 as described later) It is for guiding the work W when holding FIGS. 4 to 7). The claws 26A to 26C are fixed to the lower hand 24 and arranged at substantially equal intervals on the outer peripheral side of the circular portion in a plan view of the lower hand 24. Further, the upper hand 22 is provided with three notches at positions where the upper hand 22 is assembled with the lower hand 24 so as to escape from the respective claws 26A to 26C. Furthermore, as shown in the bottom view of FIG. 3A, the hand main body portion 12 has an opposing surface 28 facing the workpiece W while holding the workpiece W as will be described later. Each guide groove 30 is provided radially. Each of the guide grooves 30 is provided in such a manner that the depth of the grooves gradually decreases as it proceeds from the inner side to the outer side with respect to the radial center, and the innermost portion with respect to the radial center The injection port 32 is provided to the outside. Air is fed into each of the injection ports 32 from a pump or the like (not shown), and the air injected from the injection ports 32 flows from the inside to the outside with reference to the radial center while being guided by the guide groove 30. It has become.

  On the other hand, as shown in FIG. 1 and FIG. 2, the optical fiber line 14 is connected to the photoelectric sensor 16 at its start end 14a and end end 14b, and between the start end 14a and end end 14b. In the example of FIG. 2, the detection units 36 (36A to 36C) are provided at three locations. Each of the detection units 36A to 36C includes, for example, two end portions formed by cutting the optical fiber line 14 in a cross section orthogonal to the longitudinal direction as a light projection unit 40 and a light reception unit 42, respectively. It is. Further, as shown in FIG. 3, the detection units 36A to 36C are respectively disposed in windows 38 (38A to 38C) provided in the lower hand portion 24 of the hand main body 12. The windows 38A to 38C are provided at positions corresponding to the fixed positions of the claws 26A to 26C of the lower portion 24 of the hand (positions at substantially equal intervals of circular portions in the plan view of the lower portion 24) in communication with the accommodation groove 24a. It is opened to the outside by the opposing surface 28 of the lower hand portion 24.

  That is, as can be confirmed in FIG. 3B, each of the windows 38 communicates with two directions in the horizontal direction in the drawing of the accommodation groove 24a below the claws 26 and opens in the lower direction in the drawing. In this way, it has a shape like a fork. The light emitting unit 40 included in each detection unit 36 of the optical fiber line 14 accommodated in the accommodation groove 24a is located in the communication portion on the left side of the window 38 with respect to the accommodation groove 24a in the drawing of the window 38 It is disposed at a predetermined angle with respect to the facing surface 28 toward the downward opening. Similarly, the light receiving portion 42 included in each detection portion 36 is directed to the opening of the window 38 in the downward direction in the drawing in the communicating portion on the right side in the drawing with respect to the accommodation groove 24 a of the window 38. It is arranged at a predetermined angle with respect to it. At this time, each of the light emitting unit 40 and the light receiving unit 42 of the detecting unit 36 is sandwiched between the projection 22 b provided on the upper hand portion 22 and the inclined portion 24 b provided on the lower hand portion 24. It is fixed to maintain a predetermined angle. That is, the projection 22b is provided by inclining the bottom of the accommodation groove 22a (the upper part in FIG. 3B) downward at a predetermined angle, and the inclined portion 24b is formed in the accommodation groove 24a. The bottom is provided by being inclined downward at a predetermined angle.

On the other hand, referring to FIG. 1 again, the photoelectric sensor 16 is connected to the start end 14a and the end end 14b of the optical fiber line 14 as described above, and light is emitted to the start end 14a of the optical fiber line 14 , And receives light from the end 14 b of the optical fiber line 14. Further, the detection means 18 is communicably connected to the photoelectric sensor 16, and the hand main body 12 is based on the amount of light received by the photoelectric sensor 16 from the end portion 14b of the optical fiber line 14 as described later in detail. It detects the presence or absence of the inclination of the workpiece | work W currently hold | maintained. The detection unit 18 is configured by, for example, various computers.
In the transfer hand 10 according to the embodiment of the present invention, each of the hand main body 12, the optical fiber wire 14, the photoelectric sensor 16, and the detection means 18 as described above has, for example, a drive mechanism, a control mechanism, etc. Not attached to the transport device. Then, while the work W is held by the hand main body 12, it is transferred to a predetermined position.

  Next, with reference to FIG. 4, a mechanism for holding the work W in a noncontact manner by the hand main body portion 12 of the transfer hand 10 according to the embodiment of the present invention will be described. As described with reference to FIG. 3A, on the opposing surface 28 of the hand main body 12, twelve guide grooves 30 communicating with the injection port 32 are radially provided. Then, when air is injected from the injection port 32, the air guided by the guide groove 30 flows radially below the facing surface 28 at an elevation angle as shown by the black arrows in FIG. Then, since a negative pressure is generated below the facing surface 28 of the hand main body 12 by the Bernoulli effect, when the facing surface 28 is made to approach the workpiece W in this state, the workpiece W is pulled upward as shown in FIG. It is attracted to the hand main body 12 with a predetermined distance from 28. At this time, the work W is adsorbed while being guided by the claws 26 provided in the hand main body 12, and the movement in the horizontal direction during adsorption is restricted. As a result, the work W is held by the hand main body 12 in a non-contact manner in parallel with the facing surface 28 of the hand main body 12 in a proper suction state. The distance between the work W and the opposing surface 28 of the hand main body 12 is individually determined in accordance with conditions such as the jet velocity of air from the injection port 32 and the weight of the work W.

Then, the detection method of the presence or absence of the inclination of the workpiece | work W hold | maintained by the hand main-body part 12 in the transfer hand 10 which concerns on embodiment of this invention is demonstrated.
First, as shown in FIG. 5, the case where the work W is properly held by the hand main body 12, that is, the work W is held parallel to the facing surface 28 of the hand main body 12 at a predetermined distance. Do. As shown in FIG. 1, the start end 14 a of the optical fiber line 14 is connected to the photoelectric sensor 16, and when the workpiece W is held by the hand main body 12, the start end of the optical fiber line 14 from the photoelectric sensor 16 Light is projected to the light source 14a.

  The light projected to the start end 14 a is guided by an optical fiber line 14 wired between the upper hand 22 and the lower hand 24 of the hand main body 12 as shown in FIG. 2. The guided light first reaches the light projecting unit 40 of the detection unit 36A closest to the start end 14a among the three detection units 36A to 36C provided on the optical fiber line 14. Then, as shown in FIG. 5, since the light projecting unit 40 is fixed toward the opening of the window 38, the light reaching the light projecting unit 40 is emitted from the light projecting unit 40 and is transmitted to the window 38. And the light is projected toward the workpiece W held in parallel to the facing surface 28 by the hand main body 12. The light projected onto the workpiece W is reflected by the upper surface of the workpiece W, and is received by the light receiving unit 42 fixed toward the opening of the window 38.

  That is, in the state in which the work W is held by the hand main body 12, each detection unit 36 of the optical fiber line 14 emits light emitted from the light projection unit 40 and reflected by the work W to be incident on the light reception unit 42 Thus, the light emitting unit 40 and the light receiving unit 42 are fixed. More specifically, as shown in FIG. 6, the light emitting unit 40 and the light receiving unit 42 have a distance α between the upper surface of the work W properly held and the facing surface 28 of the hand main body 12, and In accordance with the distance β between the portion 40 and the light receiving portion 42, an installation angle with respect to the facing surface 28 is set. For example, in the example of FIG. 6, the light projection unit 40 and the light reception unit 42 are symmetrical with respect to the left-right direction (with respect to the facing surface 28) such that the angle θ formed by the light projection unit 40 and the light reception unit 42 is 150 °. It is installed at 15 °). As a result, as shown by the flow of arrows in the figure, the light guided by the optical fiber line 14 is projected from the light projecting unit 40, reflected by the upper surface of the work W, and most of the reflected light Are received by the light receiving unit 42. In FIG. 6, for convenience of explanation, the distance α between the hand main body 12 and the work W is exaggerated and illustrated, and accordingly, the emission angle of the light from the light projector 40, the light reception, etc. The incident angle of light to the portion 42 is illustrated at an angle different from the installation angle of the light emitting portion 40 and the light receiving portion 42.

  Now, in the detection unit 36A, light incident from the light receiving unit 42 is guided by the optical fiber line 14 and reaches the next detection unit 36B. Then, in the detection unit 36B as well as the detection unit 36A, the light emitted from the light projection unit 40 is reflected by the work W and is received by the light reception unit 42, thereby entering the optical fiber line 14 . Furthermore, also in the detection unit 36C, light is incident on the optical fiber line 14 through the light projection from the light projection unit 40, the reflection by the work W, and the light reception by the light reception unit 42, and finally the end of the optical fiber line 14 The light reaches the portion 14 b and is received by the photoelectric sensor 16. The photoelectric sensor 16 measures the amount of light received from the end portion 14 b of the optical fiber line 14, and transmits the measurement result to the detection means 18.

  The detection means 18 detects the presence or absence of the inclination of the work W held by the hand main body 12 based on the amount of light received from the photoelectric sensor 16. For example, the detection means 18 compares the amount of light received by the photoelectric sensor 16 with a predetermined amount of light set in advance, and detects that the work W is not inclined if the former is equal to or greater than the latter. If it is less than, it detects that the work W is inclined. Here, since the work W is properly held, light of a predetermined light amount set in the detection means 18 is received by the photoelectric sensor 16, and the detection means 18 detects that the work W is not inclined. Do. As described above, when it is detected that the workpiece W is not inclined and is properly held, transfer of the workpiece W by the transfer hand 10 may be continued. In addition, since light is attenuated in the atmosphere, even in the case where the work W is properly held, in each detection unit 36, light is received from the work W during the period from the light projecting unit 40 to the work W. The light decays between the time it goes to section 42. For this reason, the amount of light received by the photoelectric sensor 16 is smaller than the amount of light projected from the photoelectric sensor 16 regardless of the presence or absence of the inclination of the workpiece W.

  Next, as shown in FIG. 7, a case where the work W is inclined and held by the hand main body 12 will be described. In the example of FIG. 7, the distance α between the holding surface 28 of the hand main body 12 and the upper surface of the work W is compared with the case where the work W is properly held by the work W being inclined and held. Therefore, it is small below the detection unit 36A, is not changed below the detection unit 36B, and is large below the detection unit 36C. For this reason, in the detection unit 36A, the light emitted from the light projection unit 40 is reflected by the work W at a distance α smaller than that in the case where the light is properly held, and therefore the light is not greatly attenuated. Then, the reflected light from the work W is received by the light receiving unit 42. In addition, in the detection unit 36B, the light emitted from the light projection unit 40 is reflected by the work W at the same distance α as in the case where the light is properly held, and therefore the light is not largely attenuated. Then, the reflected light from the work W is received by the light receiving unit 42.

  On the other hand, in the detection unit 36C, the light projected from the light projection unit 40 is reflected by the work W at a distance α larger than that when properly held, and is received by the light reception unit 42. . Therefore, the work W is properly held while the light projected from the light projection unit 40 is advanced from the light projection unit 40 to the work W and from the work W to the light reception unit 42. Attenuates more than it does. Furthermore, since the workpiece W is held inclined by the hand main body 12, the workpiece W is arranged in a state of being inclined with respect to the facing surface 28 below all the detection units 36. Therefore, in all the detection units 36, the light reflected by the work W is reflected in a direction different from the case where the work W is held parallel to the facing surface 28 according to the direction of the inclination of the work W It will contain light and will decay due to this.

  Therefore, the light emitted from the photoelectric sensor 16 to the optical fiber line 14 is largely attenuated in the detection unit 36C, and light reflected in a direction different from the appropriate time is generated by the inclined work W. Thus, the light is received by the photoelectric sensor 16 in a state where the light quantity is greatly reduced. The detection means 18 compares the amount of light thus reduced measured by the photoelectric sensor 16 with a predetermined amount of light set in advance, and detects that the work W is inclined since the former is smaller than the latter. . As described above, when it is detected that the workpiece W is held in an inclined state, for example, the transfer of the workpiece W by the transfer hand 10 may be stopped, and a notification may be issued to the operator. .

  The predetermined amount of light used to detect the presence or absence of the inclination of the workpiece W is the amount of light received by the photoelectric sensor 16 when the workpiece W is not inclined and the amount of light received by the photoelectric sensor 16 when the workpiece W is inclined. It may be grasped in advance by a test or the like and set based on them. Further, in the detection of the presence or absence of the inclination of the work W by the detection means 18, the light amount of light projected from the photoelectric sensor 16 to the optical fiber line 14 is compared with the light amount of light received by the photoelectric sensor 16 from the optical fiber line 14 You may go by. In this case, both the light emitting amount and the light receiving amount are received from the photoelectric sensor 16 by the detecting means 18, and the work W is inclined if the difference between the light emitting amount and the light receiving amount does not exceed a predetermined amount set in advance. It is detected that the work W is not, and if it exceeds a predetermined amount set in advance, it is detected that the work W is inclined. The predetermined amount in this case may also be set based on the value grasped by a test or the like.

  Further, although three detection units 36 are provided in the embodiment described above, the transfer hand 10 according to the embodiment of the present invention is not limited to this, and at least two detection units 36 are provided. It should just be provided. That is, depending on, for example, the size of the work W, only two detection units 36 may be provided, or four or more detection units 36 may be provided. Furthermore, the light emitting unit 40 and the light receiving unit 42 included in the detecting unit 36 do not have to use the end portion formed by cutting the optical fiber line 14 as it is, and complement the light emitting function and the light receiving function. A member such as a lens may be attached. In addition, the detection unit 36 may not be disposed at a position corresponding to the fixed position of the claw portion 26, and is separated from each other within a range in which the workpiece W in the holding state is projected onto the opposing surface 28 of the hand main body 12. As long as they are arranged, their arrangement positions are arbitrary. In the transfer hand 10 according to the embodiment of the present invention, the hand body 12 holds the work W in a noncontact manner by using an adsorption method other than the Bernoulli effect, such as a vacuum generation method by the cyclone effect, for example. It may be

  Now, according to the embodiment of the present invention configured as described above, it is possible to obtain the following effects. That is, the transfer hand 10 according to the embodiment of the present invention transfers a plate-like work W (see FIGS. 4 to 7) as shown in FIGS. 12 includes an optical fiber line 14, a photoelectric sensor 16, at least two detection units 36, and detection means 18. The hand main body portion 12 sucks the workpiece W and holds the workpiece W in a non-contact manner by using, for example, the Bernoulli effect etc., and has an opposing surface 28 facing the workpiece W in a state of holding the workpiece W ing. The optical fiber line 14 is wired to the hand main body 12 and connected to the photoelectric sensor 16, and the photoelectric sensor 16 emits and receives light to the connected optical fiber line 14. In addition, at least two (three in the illustrated example) detection units 36 each include a light projecting unit 40 and a light receiving unit 42, and the light projecting unit 40 emits light to the workpiece W in the holding state. The light receiving unit 42 receives the light reflected from the light emitting unit 40 and reflected by the workpiece W.

  That is, as can be confirmed in FIG. 3B, the light emitting unit 40 and the light receiving unit 42 are disposed close to each other, and the light emitting unit 40 is disposed from the opposing surface 28 side of the hand main body 12 It is fixed at a position and an orientation (angle) at which light can be emitted toward the workpiece W held by the hand main body 12. Further, the light receiving unit 42 is fixed at a position and an orientation (angle) at which the light reflected by the work W held by the hand main body 12 can be received by the facing surface 28 side of the hand main body 12. Furthermore, the three detection units 36A to 36C are disposed apart from each other within a range in which the work W in the holding state is projected on the facing surface 28 of the hand main body 12. Further, the detection means 18 grasps the amount of light received by the photoelectric sensor 16 from the optical fiber line 14, and the workpiece W is held inclined to the facing surface 28 of the hand main body 12 based on the amount of light received. To detect if it is For example, when the light receiving amount received by the photoelectric sensor 16 is equal to or greater than a preset light amount (threshold value), the detecting unit 18 determines that the work W is not inclined and is less than the preset light amount. In this case, it is determined that the work W is inclined.

  Then, in the transfer hand 10 according to the embodiment of the present invention, light emitted from the photoelectric sensor 16 is received by the photoelectric sensor 16 through the three detection units 36 as can be confirmed in FIG. As such, the three detection units 36 are connected in series by the optical fiber line 14. That is, between the detection units 36 connected by the optical fiber line 14, the light receiving unit 40 of one detection unit 36 and the light projection unit 42 of the other detection unit 36 are connected. Only the number (one in the illustrated example, two places) less than the total number of detection units is provided. That is, in the example of FIG. 2, the light receiving unit 42 of the detecting unit 36A and the light emitting unit 40 of the detecting unit 36B are connected, and the light receiving unit 42 of the detecting unit 36B and the light emitting unit 40 of the detecting unit 36C are connected. There is. Thus, the optical fiber line 14 connects between the light emitting side of the photoelectric sensor 16 and the detection unit 36, between the detection units 36, and between the detection unit 36 and the light receiving side of the photoelectric sensor 16. Therefore, the photoelectric sensor 16 and the three detection units 36 are connected in an annular manner. With such a configuration, the light projected from the photoelectric sensor 16 to the optical fiber line 14 first reaches the light projecting unit 40 of the detection unit 36A closest to the light projecting side of the photoelectric sensor 16, as shown in FIG. The light is projected from the light projecting unit 40 and reflected by the work W, as shown in FIG. Then, the light is received by the light receiving unit 42 of the same detection unit 36A, and proceeds to the next detection unit 36B. Such a process is repeated, and after passing through all the detection parts 36 arranged in the hand main body part 12, light is received from the optical fiber line 14 by the photoelectric sensor 16.

  Here, since the light is attenuated in the atmosphere, the light projected from the light projector 40 of the detector 36 is reflected by the workpiece W and the light receiver during the period from the light projector 40 to the workpiece W. It decays in the interval to go to 42. Therefore, as shown in FIG. 5 and FIG. 6, when the work W is held in parallel to the facing surface 28 by the hand main body 12, the facing surface 28 and the upper surface of the work W under each detection unit 36 Is substantially constant, the amount of attenuation of light when passing through each detection unit 36 is also substantially constant. For this reason, when the workpiece W is held without inclination, the light projected from the light projection side of the photoelectric sensor 16 to the optical fiber line 14 passes through the detection portions 36 and reaches the light receiving side of the photoelectric sensor 16 The amount of attenuation between them will fall within a substantially constant range.

  On the other hand, as shown in FIG. 7, when the workpiece W is held inclined to the facing surface 28 by the hand main body 12, at least one of the detection portions 36 is separated from each other. The distance α between the facing surface 28 and the upper surface of the workpiece W becomes large below the detection unit 36 of the portion. That is, in the example of FIG. 7, the distance α between the facing surface 28 and the upper surface of the work W is large in the lower part of the detection unit 36C as compared with the case where the work W is held parallel to the facing surface 28. It has become. For this reason, in such a detection unit 36C, the atmosphere between the time when the light projected from the light projection unit 40 travels to the work W and the time when the light reflected by the work W travels to the light reception unit 42 As the distance traveled inward is increased, the amount of light attenuation is increased. Therefore, when the workpiece W is held in an inclined manner, the light projected to the optical fiber line 14 from the light projection side of the photoelectric sensor 16 passes through the respective detection portions 36 and reaches the light receiving side of the photoelectric sensor 16 The amount of attenuation during the period increases more than when the workpiece W is held without tilt.

  In the case where the work W is held without inclination and when the work W is held in an inclined state, the threshold value for detecting the presence or absence of the inclination of the work W set in advance in the detection means 18 in consideration of the above contents The threshold is set in consideration of the amount of light attenuation in both cases. Thereby, the detection means 18 detects the presence or absence of the inclination of the work W by comparing the threshold value (light amount) thus set with the light reception amount received from the optical fiber line 14 by the photoelectric sensor 16. Can. That is, in the transfer hand 10 according to the embodiment of the present invention, at least two of the detection units 36 used for detection of the presence or absence of the inclination of the work W are connected in series. If the amount of light attenuation increases, the inclination of the workpiece W can be detected. Therefore, in spite of the simple configuration using one photoelectric sensor 16 and the optical fiber line 14 wired in series, it is possible to detect the presence or absence of the inclination of the work W.

  In addition, since the transfer hand 10 according to the embodiment of the present invention is configured to use only one photoelectric sensor 16, equipment cost can be suppressed. Furthermore, since it is sufficient to wire the optical fiber lines 14 in series, the optical fiber lines 14 can be easily handled while satisfying the demand for downsizing of the facility without the optical fiber lines 14 crossing each other in a complicated manner. Can. Therefore, the determination of the quality of the detection, the maintenance, and the like can be facilitated, and the number of operation steps can be suppressed. Furthermore, if the light emitting unit 40 and the light receiving unit 42 of the detecting unit 36 are formed by cutting the optical fiber line 14, there is no need to perform the end portion processing, attachment of another member, etc. Also, it is possible to reduce the cost and the number of operation steps.

10: Transfer hand, 12: Hand main body, 14: Optical fiber line, 16: Photoelectric sensor, 18: Detection means, 28: Opposite surface, 36 (36A to 36C): Detection part, 40: Light projection part, 42 : Light receiving unit, W: Work

Claims (1)

A transfer hand for transferring a plate-like work, and
A hand main body which holds a work while holding it in a non-contacting manner and has a facing surface facing the held work;
An optical fiber wire wired to the hand body;
A photoelectric sensor for projecting and receiving light to the optical fiber line;
A light projection unit for projecting light onto a workpiece in a holding state, and a light receiving unit for receiving light reflected from the light projection unit and reflected by the workpiece, the holding state of the hand main body portion And at least two detection units disposed apart from each other within a range in which the work of
And detecting means for detecting the presence or absence of the inclination of the work relative to the facing surface based on the amount of light received from the optical fiber line of the photoelectric sensor.
The at least two detection units are connected in series by the optical fiber line such that the light projected from the photoelectric sensor is received by the photoelectric sensor via the at least two detection units. Characteristic transfer hand.

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