JP6519795B2 - Surface coated cutting tool with excellent chipping resistance and wear resistance - Google Patents
Surface coated cutting tool with excellent chipping resistance and wear resistance Download PDFInfo
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本発明は、硬質被覆層がすぐれた耐チッピング性、耐摩耗性を備えた表面被覆切削工具に関し、さらに詳しくは、炭素鋼、合金鋼、鋳鉄などの高速切削加工に供した場合においても、チッピング、欠損、剥離等の異常損傷を発生することなく、長期に亘ってすぐれた耐摩耗性を発揮する表面被覆切削工具(以下、被覆工具という)に関する。 The present invention relates to a surface-coated cutting tool having excellent hard coating layer and excellent chipping resistance and wear resistance, and more particularly to a chipping even when subjected to high-speed cutting of carbon steel, alloy steel, cast iron, etc. The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits excellent wear resistance over a long period of time without causing abnormal damage such as chipping or peeling.
一般に、被覆工具には、各種の鋼や鋳鉄などの被削材の旋削加工や平削り加工にバイトの先端部に着脱自在に取り付けて用いられるインサート、被削材の穴あけ切削加工などに用いられるドリルやミニチュアドリル、さらに被削材の面削加工や溝加工、肩加工などに用いられるソリッドタイプのエンドミルなどがあり、またインサートを着脱自在に取り付けてソリッドタイプのエンドミルと同様に切削加工を行うインサート式エンドミルなどが知られている。
従来から、被覆工具としては、例えば、WC基超硬合金、TiCN基サーメット、cBN焼結体を工具基体とし、これに硬質被覆層を形成した被覆工具が知られており、切削性能の改善を目的として種々の提案がなされている。
Generally, coated tools are used for inserts that are detachably attached to the tip of a cutting tool for turning and planing various materials such as steel and cast iron, and drilling and cutting of materials There are drills and miniature drills, solid type end mills used for facing, grooving and shouldering of work materials, etc. Inserts are detachably attached and cutting is performed in the same way as solid type end mills Insert type end mills and the like are known.
Conventionally, as a coated tool, for example, a coated tool in which a WC-based cemented carbide, a TiCN-based cermet, and a cBN sintered body are used as a tool substrate and a hard coating layer is formed thereon is known. Various proposals have been made for the purpose.
例えば、特許文献1には、少なくとも、(TiyAlxMe1−x−y)Nからなる成分組成の硬質被覆層(ただし、Meは、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Siから選ばれる成分元素であり、0.55≦x≦0.80、0.50≦x/(x+y)≦0.85、0.7≦x+y≦1.0)を有する被覆工具において、アルゴンまたは窒素雰囲気中で、800〜1100℃の温度に5〜240分保持することにより、(TiyAlxMe1−x−y)Nのスピノーダル分解を生じさせ、立方晶のTiN、立方晶のAlNおよび六方晶のAlNを形成して析出効果を図ることにより、硬質被覆層の耐摩耗性を向上させることが提案されている。 For example, Patent Document 1, at least, (Ti y Al x Me 1 -x-y) of N hard coating layer component composition (although, Me is, Zr, Hf, V, Nb , Ta, Cr, Mo , W, Si and coated tool having 0.55 ≦ x ≦ 0.80, 0.50 ≦ x / (x + y) ≦ 0.85, 0.7 ≦ x + y ≦ 1.0) in, argon or nitrogen atmosphere, by maintaining 5-240 minutes at a temperature of 800~1100 ℃, (Ti y Al x Me 1-x-y) causing spinodal decomposition of N, cubic TiN, It has been proposed to improve the wear resistance of the hard covering layer by forming cubic AlN and hexagonal AlN to achieve the precipitation effect.
また、特許文献2には、切削工具又は耐摩耗工具からなる母材の表面に、層厚0.04〜0.2μmのTiN層とAlN層を交互に10層以上積層して全体の層厚0.5〜8μmの被覆層を設けた切削・耐摩工具用表面被覆超硬部材が提案されており、この切削・耐摩工具用表面被覆超硬部材においては、TiNが被覆層の硬度を高めながら母材との密着性を改善し、一方AlNが被覆層の耐欠損性を向上させ且つTiNの結晶粒を微細なものにするため、全体として優れた耐摩耗性、耐溶着性及び耐欠損性を兼ね備えた被覆層が形成されるとされている。 Further, in Patent Document 2, ten or more TiN layers and AlN layers with a layer thickness of 0.04 to 0.2 μm are alternately laminated on the surface of a base material made of a cutting tool or a wear resistant tool, and the total layer thickness is 0.5. A surface-coated carbide member for cutting and abrasive tools provided with a coating layer of 8 to 8 μm has been proposed. In this surface-coated carbide member for cutting and abrasive tools, TiN increases the hardness of the coating layer and the base material In order to improve the adhesion of aluminum, while improving the fracture resistance of the coating layer and to make the crystal grains of TiN finer, AlN has excellent wear resistance, welding resistance and fracture resistance as a whole. It is supposed that a covering layer is formed.
前記特許文献1で提案されている硬質被覆層を備えた被覆工具は、高硬度を有することからすぐれた耐摩耗性は期待できるが、高速切削加工のように切れ刃に高負荷が作用する切削条件においては、耐チッピング性が十分ではなく、また、前記特許文献2で提案されている被覆工具は、耐チッピング性と耐摩耗性のバランスが優れるものの、高速切削加工においては硬質被覆層の耐剥離性が十分とはいえず、その結果、高速切削加工において耐チッピング性と耐摩耗性を相兼ね備えた被覆工具が求められている。 The coated tool provided with the hard coating layer proposed in Patent Document 1 can be expected to have excellent wear resistance because it has high hardness, but cutting with a high load acting on the cutting edge like high-speed cutting Although the chipping resistance is not sufficient under the conditions and the coated tool proposed in Patent Document 2 is excellent in the balance between the chipping resistance and the wear resistance, the resistance to the hard coating layer is high in high-speed cutting. Peelability is not sufficient, and as a result, a coated tool having both chipping resistance and wear resistance in high-speed cutting is required.
そこで、本発明者らは、前記課題を解決すべく硬質被覆層の構造について鋭意検討したところ、次のような知見を得た。 Then, when the present inventors earnestly examined about the structure of a hard coating layer in order to solve the said subject, the following knowledge was acquired.
工具基体表面に、例えばアークイオンプレーティング装置を用いて、TiとAlの複合窒化物(以下、「TiAlN」で示す場合がある。)からなる硬質被覆層を蒸着形成したのち、得られた被覆工具に特定の条件で熱処理(温度、時間、冷却条件)を施すことにより、硬質被覆層を構成する柱状組織の結晶粒の粒界に、縦長形状のAl窒化物(以下、「AlN」で示す)層および縦長形状のTi窒化物(以下、「TiN」で示す)層を形成することができることを見出した。
そして、前記縦長形状のAlN層は、熱安定性にすぐれるとともに熱伝導性が高いため、硬質被覆層の熱放出を効果的に行うことができ、その結果、高速切削加工における硬質被覆層の耐熱性、耐摩耗性を向上させ得ること、また、前記縦長形状のTiN層は、靱性、耐溶着性にすぐれるため、硬質被覆層の耐チッピング性を改善し得ることを見出したのである。
A coating obtained by depositing a hard coating layer composed of a composite nitride of Ti and Al (hereinafter sometimes referred to as "TiAlN") on the surface of a tool base using, for example, an arc ion plating apparatus By applying heat treatment (temperature, time, cooling conditions) to the tool under specific conditions, vertically elongated Al nitrides (hereinafter referred to as “AlN”) are shown in the grain boundaries of the crystal grains of the columnar structure constituting the hard coating layer. It has been found that it is possible to form a layer and a Ti-nitride (hereinafter referred to as "TiN") layer having an oblong shape.
And since the longitudinally-shaped AlN layer is excellent in thermal stability and high in thermal conductivity, heat release of the hard coating layer can be effectively performed, and as a result, the hard coating layer in high-speed cutting can be obtained. It has been found that heat resistance and wear resistance can be improved, and since the longitudinally-long TiN layer has excellent toughness and adhesion resistance, it can improve the chipping resistance of the hard coating layer.
また、前記特定の条件の熱処理とは、工具基体表面にTiAlN層を蒸着した後、800〜1000℃の温度で30〜60分保持し、次いで、10℃/min以下という遅い速度で冷却する熱処理であって、この熱処理によって、柱状組織のTiAlN層の結晶粒の粒界に、縦長形状のAlN層およびTiN層が形成される。言い換えれば、縦長形状のAlN層およびTiN層は、TiAlNの柱状組織を包み込むように形成されるといえる。
特に、冷却速度が10℃/minを超える早い冷却速度になると十分なスピノーダル分解が生じないため、柱状組織の結晶粒の粒界に、縦長形状のAlN層および縦長形状のTiN層が形成されなくなるから、硬質被覆層の熱処理においては、特に、冷却速度を制御することが重要である。
In the heat treatment under the specific conditions, after the TiAlN layer is deposited on the surface of the tool substrate, the heat treatment is performed at a temperature of 800 to 1000 ° C. for 30 to 60 minutes and then cooled at a slow rate of 10 ° C./min or less. The heat treatment forms vertically elongated AlN layers and TiN layers at grain boundaries of crystal grains of the TiAlN layer having a columnar structure. In other words, it can be said that the longitudinally elongated AlN layer and TiN layer are formed so as to surround the columnar structure of TiAlN.
In particular, when the cooling rate is faster than 10 ° C./min, sufficient spinodal decomposition does not occur, so that the longitudinally elongated AlN layer and the longitudinally elongated TiN layer can not be formed at the grain boundaries of the grain structure of the columnar structure. Thus, in the heat treatment of the hard covering layer, in particular, it is important to control the cooling rate.
本発明は、前記の知見に基づいてなされたものであって、
「 WC基超硬合金およびTiCN基サーメットのいずれかからなる工具基体の表面に、少なくとも、平均層厚0.5〜10μmのTiとAlの複合窒化物層を有する硬質被覆層を蒸着形成した表面被覆切削工具において、
前記TiとAlの複合窒化物層を、
組成式:(Ti1−xAlx)Nで表した場合、0.35≦x≦0.80(但し、xは原子比)を満足する平均組成を有し、
前記TiとAlの複合窒化物層は柱状組織を有し、前記柱状組織を構成する結晶粒の前記工具基体表面と平行な方向の結晶粒の幅の平均値をWとし、また、結晶粒の工具基体表面に垂直な方向の結晶粒の長さの平均値をLとした場合、LとWの比の値L/Wは1.4以上であり、
前記柱状組織を構成する結晶粒の粒界の少なくとも一部には、縦長形状のTi窒化物層と縦長形状のAl窒化物層が形成され、かつ、前記Ti窒化物層とAl窒化物層の縦長形状の長さがそれぞれ100nm以上であることを特徴とする表面被覆切削工具。」
を特徴とするものである。
The present invention has been made based on the above findings.
"The surface on which the hard covering layer having at least an average layer thickness of 0.5 to 10 μm of composite nitride layer of Ti and Al is vapor-deposited on the surface of the tool base consisting of either WC base cemented carbide and TiCN base cermet. In coated cutting tools,
The composite nitride layer of Ti and Al,
When represented by a composition formula: (Ti 1−x Al x ) N, it has an average composition satisfying 0.35 ≦ x ≦ 0.80 (where x is an atomic ratio),
The composite nitride layer of Ti and Al has a columnar structure, and the average value of the widths of the crystal grains in the direction parallel to the surface of the tool base of the crystal grains constituting the columnar structure is W, and When the average value of the length of the crystal grain in the direction perpendicular to the tool substrate surface is L, the value L / W of the ratio of L to W is 1.4 or more,
A vertically long Ti nitride layer and a vertically long Al nitride layer are formed on at least a part of the grain boundaries of the crystal grains constituting the columnar structure, and the Ti nitride layer and the Al nitride layer A surface-coated cutting tool characterized in that each of the longitudinally elongated shapes has a length of 100 nm or more . "
It is characterized by
ここで、本発明の被覆工具について、より詳しく説明する。 Here, the coated tool of the present invention will be described in more detail.
図1(a)に、本発明被覆工具の硬質被覆層(TiAlN層)の縦断面組織写真(TEM像)の一例を示し、図1(b)に、該縦断面組織写真(TEM像)の一部の箇所(図中、矢印で示した丸で囲った箇所)について測定したAl元素とTi元素のEDSマッピング像の一例を示し、また、図2には、図1(a)の縦断面組織写真(TEM像)の概略模式図を示す。
図1(a)、(b)および図2に示されるように、本発明のTiAlN層は柱状組織からなり、また、柱状組織を構成する結晶粒の粒界に沿って、その少なくとも一部には、縦長形状のTiN層と縦長形状のAlN層が形成されている。
本発明のTiAlN層は、その平均組成を、組成式:(Ti1−xAlx)Nで表した場合、0.35≦x≦0.80(但し、xは原子比)を満足する平均組成を有し、また、その平均層厚は、0.5〜10μmであり、さらに、図1(a)、(b)および図2に示すように柱状組織を有する。
本発明のTiAlN層の組成式において、TiとAlの合量に対するAlの平均含有割合を表すxの値(ただし、原子比)が0.35未満になると、高硬度が得られないばかりか結晶粒が粗大化しやすくなり、一方、TiとAlの合量に対するAlの平均含有割合xが0.80を超えると、一部組織の結晶構造が岩塩型結晶構造から六方晶構造に変化し、硬さが低下することから、TiとAlの合量に占めるAlの平均含有割合xは、0.35≦x≦0.80と定めた。より好ましい範囲としては0.45≦x≦0.70である。
また、上記TiAlN層の平均層厚が0.5μm未満であると、長期の使用に得わたってすぐれた耐摩耗性を発揮することができず、一方、平均層厚が10μmを超えると、結晶粒が粗大化しやすくなり、耐チッピング性向上効果が得られなくなることから、本発明のTiAlN層の平均層厚は0.5〜10μmと定めた。
なお、本発明のTiAlN層の平均組成、平均層厚については、走査型電子顕微鏡(Scanning Electron Microscopy:SEM)、透過型電子顕微鏡(Transmission Electron Microscope:TEM)、エネルギー分散型X線分光法(Energy Dispersive X−ray Spectroscopy:EDS)を用いた断面測定により求めることができる。
FIG. 1 (a) shows an example of a longitudinal sectional structure photograph (TEM image) of the hard coating layer (TiAlN layer) of the coated tool of the present invention, and FIG. 1 (b) shows the structural photograph of the longitudinal section (TEM image) An example of an EDS mapping image of Al element and Ti element measured for a part of the part (the part encircled by an arrow in the figure) is shown, and FIG. 2 shows a longitudinal cross section of FIG. The schematic diagram of a structure | tissue photograph (TEM image) is shown.
As shown in FIGS. 1 (a), (b) and FIG. 2, the TiAlN layer of the present invention has a columnar structure, and along at least a part of the grain boundaries of the crystal grains constituting the columnar structure. A vertically long TiN layer and a vertically long AlN layer are formed.
When the average composition of the TiAlN layer of the present invention is represented by a composition formula: (Ti 1−x Al x ) N, an average satisfying the condition 0.35 ≦ x ≦ 0.80 (where x is an atomic ratio) It has a composition, and its average layer thickness is 0.5 to 10 μm, and further has a columnar structure as shown in FIGS. 1 (a), (b) and FIG.
In the composition formula of the TiAlN layer of the present invention, high hardness can not only be obtained if the value of x (where the atomic ratio) represents the average content ratio of Al to the total content of Ti and Al is less than 0.35. When the average content ratio x of Al with respect to the total content of Ti and Al exceeds 0.80, the crystal structure of a part of the structure changes from a rock salt type crystal structure to a hexagonal crystal structure and hard Because of the decrease in the amount, the average content ratio x of Al in the total amount of Ti and Al was determined as 0.35 ≦ x ≦ 0.80. A more preferable range is 0.45 ≦ x ≦ 0.70.
If the average layer thickness of the TiAlN layer is less than 0.5 μm, the excellent wear resistance obtained over long-term use can not be exhibited, while if the average layer thickness exceeds 10 μm, crystals The average layer thickness of the TiAlN layer of the present invention was determined to be 0.5 to 10 μm because grains tend to be coarsened and the chipping resistance improvement effect can not be obtained.
The average composition and the average layer thickness of the TiAlN layer of the present invention are, for example, scanning electron microscopy (SEM), transmission electron microscope (TEM), energy dispersive X-ray spectroscopy (Energy) It can be determined by cross-sectional measurement using dispersive X-ray spectroscopy (EDS).
本発明の硬質被覆層は、前記TiAlN層のみによって構成することができるが、その他の層を、TiAlN層の下部層あるいは上部層として形成し、耐チッピング性、耐摩耗性のさらなる向上を図ることを妨げるものではない。このような層としては、例えば、TiN層、CrN層、TiCN層、TiSiN層、AlCrN層、TiAlSiN層などを挙げることができる。 The hard covering layer of the present invention can be constituted only by the TiAlN layer, but other layers are formed as a lower layer or an upper layer of the TiAlN layer to further improve the chipping resistance and the abrasion resistance. Does not interfere with Examples of such a layer include a TiN layer, a CrN layer, a TiCN layer, a TiSiN layer, an AlCrN layer, a TiAlSiN layer, and the like.
本発明のTiAlN層は、PVDの一種であるアークイオンプレーティング(以下、「AIP」で示す)装置を用い、特定の条件で成膜することにより、その層の組織を柱状組織とすることができる。
TiAlN層の縦断面を観察した場合、TiAlN層を構成する結晶粒の平均幅(工具基体表面と平行な方向の結晶粒の幅の平均値)をWとし、また、結晶粒の平均長さ(工具基体表面に垂直な方向の結晶粒の長さの平均値)をLとした場合、LとWの比の値L/W、即ち、平均アスペクト比は、L/W>1とすることが望ましいが、TiAlN層により優れた耐摩耗性を付与するためには、平均アスペクト比L/Wは1.4以上とすることが好ましい。
平均アスペクトが1を超えた柱状組織、あるいは、好ましくは平均アスペクトが1.4以上の柱状組織を蒸着形成するための条件としては、例えば、
反応雰囲気圧: 3.0Pa
装置内温度: 500℃
工具基体に印加する直流バイアス電圧: 70V
アーク電流: 100A
というAIP条件を挙げることができる。
The TiAlN layer of the present invention may be formed into a columnar structure of the layer by depositing under specific conditions using an arc ion plating (hereinafter referred to as "AIP") apparatus which is a type of PVD. it can.
When the longitudinal section of the TiAlN layer is observed, the average width of crystal grains constituting the TiAlN layer (average value of the width of crystal grains in the direction parallel to the tool substrate surface) is W, and the average length of crystal grains When L is an average value of lengths of crystal grains in a direction perpendicular to the tool substrate surface, the ratio L / W of L to W, that is, the average aspect ratio should be L / W> 1. Although desirable, it is preferable to set the average aspect ratio L / W to 1.4 or more in order to impart better wear resistance to the TiAlN layer.
As conditions for forming a columnar structure having an average aspect of more than 1 or, preferably, a columnar structure having an average aspect of 1.4 or more, for example,
Reaction pressure: 3.0 Pa
Internal temperature: 500 ° C
DC bias voltage applied to tool base: 70 V
Arc current: 100A
The following AIP conditions can be mentioned.
本発明では、柱状組織のTiAlN層をAIP装置で成膜した後、所定雰囲気で、所定の加熱温度、加熱保持時間、所定の速度での冷却からなる熱処理を施してスピノーダル分解を生起させることによって、柱状組織の結晶粒の粒界の少なくとも一部に、図1(a)、(b)および図2に示される縦長形状のTiN層と縦長形状のAlN層を形成することができる。
TiAlN層成膜後の熱処理条件(加熱保持条件、冷却条件)は、例えば、次のとおりである。
熱処理雰囲気:1.0Pa以下の真空、
加熱温度:800〜1000℃、
加熱保持時間:30〜60分、
加熱保持後の冷却速度:10℃/min以下、
上記熱処理において、皮膜の酸化抑制、且つスピノーダル分解の促進と縦長組織の結晶核形成の促進という理由から、雰囲気を真空もしくはAr等の不活性ガス雰囲気とし、また、加熱温度と加熱保持時間を上記所定の範囲とした。
また、加熱保持後の冷却において、冷却速度を10℃/min以下としたのは、冷却速度が速すぎて10℃/minを超えるような場合には、スピノーダル分解が生じず、その結果、柱状組織からなるTiAlN層の結晶粒の粒界に、縦長形状のTiN層と縦長形状のAlN層が形成されなくなるという理由による。
In the present invention, after forming a TiAlN layer having a columnar structure with an AIP apparatus, spinodal decomposition is caused by heat treatment including cooling at a predetermined heating temperature, heating holding time, and a predetermined speed in a predetermined atmosphere. The longitudinally elongated TiN layer and the longitudinally elongated AlN layer shown in FIGS. 1 (a), (b) and FIG. 2 can be formed on at least a part of the grain boundary of the crystal grain of the columnar structure.
The heat treatment conditions (heating holding condition, cooling condition) after forming the TiAlN layer are, for example, as follows.
Heat treatment atmosphere: vacuum of 1.0 Pa or less
Heating temperature: 800 to 1000 ° C.
Heating and holding time: 30 to 60 minutes,
Cooling rate after heating and holding: 10 ° C / min or less,
In the above heat treatment, the atmosphere is vacuum or an inert gas atmosphere such as Ar for the suppression of oxidation of the film and promotion of spinodal decomposition and promotion of crystal nucleation of the longitudinal structure, and the heating temperature and the heating holding time are the above. It was a predetermined range.
In cooling after heating and holding, the cooling rate is set to 10 ° C./min or less because spinodal decomposition does not occur when the cooling rate is too fast and exceeds 10 ° C./min. The reason is that the longitudinally elongated TiN layer and the longitudinally elongated AlN layer can not be formed at the grain boundaries of the crystal grains of the TiAlN layer consisting of a structure.
本発明のTiAlN層において、柱状組織の結晶粒の粒界の少なくとも一部に形成される縦長形状のTiN層は、靱性にすぐれ、また、耐溶着性にもすぐれるためTiAlN層の靱性を向上させるとともに、溶着に起因するチッピングの発生を抑制し、その結果、TiAlN層の耐チッピング性を向上させる。
また、縦長形状のAlN層は、熱安定性にすぐれるとともに熱伝導性が高く、特に、縦長形状を有するために硬質被覆層の熱放出を効果的に行うことができ、その結果、高速切削加工における硬質被覆層の耐熱性、耐摩耗性を向上させることができる。
そして、本発明のTiAlN層においては、柱状組織の結晶粒の粒界の少なくとも一部に前記縦長形状のTiN層と縦長形状のAlN層が存在することによって、高速切削加工において、耐チッピング性と耐摩耗性を相兼ね備えることができる。
なお、特許文献2に示すように、TiN層とAlN層を層厚方向に交互に積層させた交互積層構造からなる硬質被覆層を蒸着形成した被覆工具もあるが、このような従来被覆工具では、すでに述べたように、高速切削加工において層間剥離が発生しやすいという問題があった。
しかし、柱状組織の結晶粒の粒界の少なくとも一部に縦長形状のTiN層と縦長形状のAlN層を形成した本発明の被覆工具においては、層間剥離の発生はなく、長期の使用にわたって、すぐれた耐チッピング性、耐摩耗性が発揮される。
In the TiAlN layer of the present invention, the longitudinally-long TiN layer formed on at least a part of the grain boundary of the crystal grain of the columnar structure is excellent in toughness and also excellent in welding resistance, thereby improving the toughness of the TiAlN layer While suppressing the occurrence of chipping due to welding, as a result, the chipping resistance of the TiAlN layer is improved.
In addition, the longitudinally elongated AlN layer is excellent in thermal stability and high in thermal conductivity, and in particular, since it has a longitudinally elongated shape, heat can be effectively released from the hard coating layer, resulting in high-speed cutting The heat resistance and abrasion resistance of the hard coating layer in processing can be improved.
And, in the TiAlN layer of the present invention, the presence of the longitudinally elongated TiN layer and the longitudinally elongated AlN layer in at least a part of the grain boundaries of the crystal grain of the columnar structure makes the chipping resistance in high speed cutting. It is possible to combine wear resistance.
As shown in Patent Document 2, there is also a coated tool in which a hard coating layer having an alternate lamination structure in which a TiN layer and an AlN layer are alternately stacked in the layer thickness direction is vapor deposited. As described above, there has been a problem that delamination is likely to occur in high-speed cutting.
However, in the coated tool of the present invention in which the longitudinally elongated TiN layer and the longitudinally elongated AlN layer are formed on at least a part of the grain boundaries of the columnar grain, delamination does not occur and is excellent over long-term use. Chipping resistance and abrasion resistance are exhibited.
本発明の柱状組織のTiAlN層の結晶粒の粒界の少なくとも一部に存在する縦長形状のTiN層と縦長形状のAlN層の識別、その組成、長さ(縦長形状のTiN層あるいは縦長形状のAlN層の長さ(nm))は、TiAlN層の縦断面について、走査型電子顕微鏡(SEM)、電子線後方散乱回折法(Electoron BackScatter Diffraction:EBSD)、透過型電子顕微鏡(TEM)、エネルギー分散型X線分光法(EDS)を用いて観察・測定することによって求めることができる。
AlNとTiNが柱状組織の粒界に沿って層が存在するかは図1(b)に示すようなEDSマッピング法を用いて、識別を行った。EDSマッピング測定の結果から層の点分析を行い、組成を同定し、TiN層とAlN層の形状測定を行った。その際に縦長形状の長さが100nm以上であることが望ましいが、より耐溶着性と高熱伝導性を付与するためには200nm以上であることが好ましい。
Distinguish between a longitudinally elongated TiN layer and a longitudinally elongated AlN layer present in at least a part of the grain boundaries of the crystal grain of the TiAlN layer of the columnar structure of the present invention, the composition, length (a longitudinally elongated TiN layer or a longitudinally elongated shape The length (nm) of the AlN layer is a scanning electron microscope (SEM), an electron backscattering diffraction (EBSD), a transmission electron microscope (TEM), an energy dispersive electron microscope, for the longitudinal section of the TiAlN layer. It can be determined by observation and measurement using type X-ray spectroscopy (EDS).
Whether AlN and TiN were present along the grain boundaries of the columnar structure was identified using an EDS mapping method as shown in FIG. 1 (b). From the results of EDS mapping measurement, point analysis of the layer was performed to identify the composition, and shape measurement of the TiN layer and the AlN layer was performed. At this time, the length of the longitudinally elongated shape is preferably 100 nm or more, but in order to further provide welding resistance and high thermal conductivity, the length is preferably 200 nm or more.
本発明の被覆工具は、硬質被覆層として、少なくとも、柱状組織からなる所定組成のTiAlN層を蒸着形成し、かつ、柱状組織の結晶粒の粒界の少なくとも一部には、縦長形状のTiN層と縦長形状のAlN層が形成されていることから、硬質被覆層はすぐれた耐チッピング性とすぐれた耐摩耗性を相兼ね備えることができる。
したがって、本発明の被覆工具を、炭素鋼、合金鋼、鋳鉄等の高速切削加工に供した場合、チッピング、欠損、剥離等の異常損傷を招くこともなく、長期の使用にわたってすぐれた耐摩耗性を発揮するのである。
In the coated tool of the present invention, at least a TiAlN layer of a predetermined composition having a columnar structure is vapor-deposited as a hard covering layer, and at least a part of the grain boundaries of crystal grains of the columnar structure is a longitudinally elongated TiN layer The hard coating layer can combine excellent chipping resistance and excellent wear resistance because the AlN layer having a longitudinally elongated shape is formed.
Therefore, when the coated tool of the present invention is subjected to high-speed cutting of carbon steel, alloy steel, cast iron and the like, excellent wear resistance over long-term use without causing abnormal damage such as chipping, chipping or peeling. To exert
つぎに、本発明の被覆工具を実施例により具体的に説明する。
なお、具体的な説明としては、WC基超硬合金を工具基体とする被覆工具について説明するが、TiCN基サーメットを工具基体とする被覆工具についても同様である。
Below, an Example demonstrates the coating tool of this invention concretely.
In addition, although a coated tool which uses WC base cemented carbide as a tool base is explained as a concrete explanation, the same may be said of a coated tool which uses TiCN base cermet as a tool base.
工具基体の作製:
原料粉末として、Co粉末、VC粉末、Cr3C2粉末、TiC粉末、TaC粉末、NbC粉末、WC粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてボールミルで72時間湿式混合し、減圧乾燥した後、100MPaの圧力でプレス成形し、これらの圧粉成形体を焼結し、所定寸法となるように加工して、ISO規格SEEN1203AFTN1のインサート形状をもったWC基超硬合金製の工具基体1〜3を作製した。
Tool substrate preparation:
Prepare Co powder, VC powder, Cr 3 C 2 powder, TiC powder, TaC powder, NbC powder, WC powder as raw material powder, mix these raw material powders with the composition shown in Table 1, and add wax In addition, after wet mixing in a ball mill for 72 hours, drying under reduced pressure, press forming at a pressure of 100 MPa, sintering these green compacts and processing to a predetermined size, insert shape of ISO standard SEEN 1203 AFTN 1 The tool substrates 1 to 3 made of WC-based cemented carbide having the
硬質被覆層の成膜:
前記工具基体1〜3に対して、図2に示すアークイオンプレーティング装置を用いて、硬質被覆層を形成した。
なお、図2のTi−Al合金ターゲットとしては、目標とするTiAlN層の平均組成に応じた組成のTi−Al合金ターゲットを用いた。
(a)工具基体1〜3を、アセトン中で超音波洗浄し、乾燥した状態で、AIP装置内の回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部にそって装着する。また、カソード電極(蒸発源)として、所定組成のTi−Al合金ターゲットを配置した。
(b)まず、装置内を排気して10−2Pa以下の真空に保持しながら、ヒーターで装置内を500℃に加熱した後、0.5〜2.0PaのArガス雰囲気に設定し、前記回転テーブル上で自転しながら回転する工具基体に−200〜−1000Vの直流バイアス電圧を印加し、もって工具基体表面をアルゴンイオンによって5〜30分間ボンバード処理し、
(c)次に、装置内に反応ガスとして窒素ガスを導入して表2に示す2.0〜9.0Paの範囲内の所定の反応雰囲気とすると共に、同じく表2に示す装置内温度に維持し、前記回転テーブル上で自転しながら回転する工具基体に表2に示す−30〜−150Vの範囲内の所定の直流バイアス電圧を印加し、かつ、Ti−Al合金ターゲットからなるカソード電極(蒸発源)とアノード電極との間に表2に示す80〜240Aの範囲内の所定の電流を流してアーク放電を発生させ、工具基体表面に、表4に示される目標組成、目標平均層厚のTiAlN層からなる硬質被覆層を蒸着形成した被覆工具を作製し、
(d)次いで、前記被覆工具を、表3に示す条件で熱処理し、同じく、表3に示す条件で冷却することにより、表4に示す本発明の被覆工具(以下、「本発明工具」という)1〜7を作製した。
Formation of hard coating layer:
A hard coating layer was formed on the tool substrates 1 to 3 using an arc ion plating apparatus shown in FIG.
In addition, as a Ti-Al alloy target of FIG. 2, the Ti-Al alloy target of the composition according to the average composition of the target TiAlN layer was used.
(A) The tool substrates 1 to 3 are ultrasonically cleaned in acetone and mounted in a dry state along the outer peripheral portion at a predetermined distance in the radial direction from the central axis on the rotary table in the AIP apparatus . Moreover, the Ti-Al alloy target of the predetermined composition was arrange | positioned as a cathode electrode (evaporation source).
(B) First, the inside of the apparatus is heated to 500 ° C. with a heater while exhausting the inside of the apparatus and maintaining a vacuum of 10 −2 Pa or less, and then an Ar gas atmosphere of 0.5 to 2.0 Pa is set, A DC bias voltage of -200 to -1000 V is applied to the tool base rotating while rotating on the rotary table, thereby bombarding the surface of the tool base with argon ions for 5 to 30 minutes,
(C) Next, nitrogen gas as a reaction gas is introduced into the apparatus to obtain a predetermined reaction atmosphere in the range of 2.0 to 9.0 Pa shown in Table 2 and the temperature in the apparatus shown in Table 2 as well. A predetermined DC bias voltage within a range of -30 to -150 V shown in Table 2 is applied to a tool base rotating while rotating on the rotary table while maintaining the rotation speed, and a cathode electrode made of a Ti-Al alloy target ( A predetermined current in the range of 80 to 240 A shown in Table 2 is applied between the evaporation source) and the anode electrode to generate arc discharge, and the target composition shown in Table 4 on the tool substrate surface, target average layer thickness Manufacture a coated tool on which a hard coating layer consisting of a TiAlN layer is deposited
(D) Next, the coated tool is heat-treated under the conditions shown in Table 3 and cooled similarly under the conditions shown in Table 3 so that the coated tool of the present invention shown in Table 4 (hereinafter referred to as “invention tool”) ) 1 to 7 were prepared.
比較のため、前記工具基体1〜3に対して、図2に示すAIP装置を用いて、表5に示す条件でTiAlN層を蒸着形成し、次いで、表6に示す条件で、熱処理、その後の冷却を行い/あるいは行わずに、表7に示す比較例の被覆工具(以下、「比較例工具」という)1〜9を作製した。 For comparison, a TiAlN layer is vapor deposited on the tool substrates 1 to 3 using the AIP apparatus shown in FIG. 2 under the conditions shown in Table 5 and then heat treated under the conditions shown in Table 6 and then Coated tools (hereinafter, referred to as “comparative tool”) 1 to 9 of comparative examples shown in Table 7 were produced without cooling.
上記で作製した本発明工具1〜7および比較例工具1〜9の工具基体表面に垂直な硬質被覆層縦断面について、工具基体表面に平行な方向の幅が10μmであり、硬質被覆層の厚み領域が全て含まれるよう設定された視野について、走査型電子顕微鏡(SEM)、透過型電子顕微鏡(TEM)、エネルギー分散型X線分光法(EDS)を用いた断面測定により、TiAlN層の組成、層厚を複数箇所で測定し、これを平均することにより、平均組成、平均層厚を算出した。
The hard coating layer longitudinal cross section perpendicular to the tool substrate surface of the inventive tools 1 to 7 and the comparative example tools 1 to 9 prepared above has a width of 10 μm in the direction parallel to the tool substrate surface, and the thickness of the hard coating layer The composition of the TiAlN layer by cross-sectional measurement using a scanning electron microscope (SEM), a transmission electron microscope (TEM), and energy dispersive X-ray spectroscopy (EDS) for a field of view set so that all the regions are included. The average composition and the average layer thickness were calculated by measuring the layer thickness at a plurality of locations and averaging them.
また、柱状組織のTiAlN層の結晶粒の幅と長さLを、走査型電子顕微鏡(SEM)、電子線後方散乱回折法(EBSD)、透過型電子顕微鏡(TEM)を用いた断面観察により、視野内の結晶粒について測定し、その測定値を平均することによって、柱状結晶粒の平均幅Wと平均長さLを求めるとともに平均アスペクト比L/Wを算出した。 In addition, the width and length L of the crystal grain of the TiAlN layer having a columnar structure can be determined by cross-sectional observation using a scanning electron microscope (SEM), an electron backscattering diffraction (EBSD), and a transmission electron microscope (TEM). The average width W and the average length L of the columnar crystal grains were determined and the average aspect ratio L / W was calculated by measuring the crystal grains in the field of view and averaging the measured values.
さらに、走査型電子顕微鏡(SEM)、電子線後方散乱回折法(EBSD)、透過型電子顕微鏡(TEM)を用いた断面観察により、柱状組織のTiAlN層の結晶粒の粒界に、縦長形状のTiN層と、同じく縦長形状のAlN層が存在するか否かを確認・識別すると同時に、存在する場合には、その存在長さ(nm)を測定した。
より具体的に述べれば、次のとおりである。AlNとTiNが柱状組織の粒界に沿って層が存在するかはEDSマッピング法を用いて、識別を行い、層を複数箇所で点分析を行うことで平均組成を同定した。形状測定はEDSマッピングの結果からTiN層とAlN層の複数箇所の長さ測定を行い、平均長さを算出した。
Further, by cross-sectional observation using a scanning electron microscope (SEM), an electron backscattering diffraction (EBSD), and a transmission electron microscope (TEM), the grain boundaries of the crystal grains of the columnar TiAlN layer are elongated in shape. While checking and discriminating whether or not the TiN layer and the vertically elongated AlN layer are present, the presence length (nm) of the TiN layer and the AlN layer, if present, were measured.
More specifically, it is as follows. The presence of layers along the grain boundaries of the columnar structure of AlN and TiN was identified using EDS mapping, and the average composition was identified by point analysis of the layers at multiple locations. The shape measurement measured the length of multiple places of a TiN layer and an AlN layer from the result of EDS mapping, and computed average length.
表4、表7に、上記で求めた各種の値を示す。 Tables 4 and 7 show the various values obtained above.
次いで、本発明工具1〜7および比較例工具1〜9について、以下の条件で、炭素鋼、合金鋼、鋳鉄についての高速切削加工試験を実施した。
切削条件A:
被削材:JIS・SCM430(HB280)の丸棒、
切削速度: 200m/min.、
切り込み: 0.2mm、
送り: 0.27mm/rev.、
切削時間: 5分、
の条件での合金鋼の連続高速高送り切削加工試験(通常の切削速度および送りは、それぞれ、155m/min.、0.20 mm/rev.)。
切削条件B:
被削材:JIS・S55C(HB250)の丸棒、
切削速度: 210 m/min.、
切り込み: 0.2 mm、
送り: 0.25 mm/rev.、
切削時間: 5分、
の条件での炭素鋼の連続高速高送り切削加工試験(通常の切削速度および送りは、それぞれ、145 m/min.、0.25 mm/rev.)。
切削条件C:
被削材:JIS・SKD61(HRC60)の丸棒、
切削速度: 130 m/min.、
切り込み: 0.2 mm、
送り: 0.2 mm/rev.、
切削時間: 3分、
の条件での高硬度鋼の連続高速切削加工試験(通常の切削速度および送りは、それぞれ、70 m/min.、0.1 mm/rev.)。
表8、表9、表10にその結果を示す。
Next, high-speed cutting tests were performed on carbon steel, alloy steel, and cast iron under the following conditions for inventive tools 1 to 7 and comparative example tools 1 to 9, respectively.
Cutting condition A:
Work material: round bar of JIS · SCM430 (HB280),
Cutting speed: 200 m / min. ,
Notch: 0.2 mm,
Feeding: 0.27 mm / rev. ,
Cutting time: 5 minutes,
Continuous high-speed high-feed cutting test of alloy steel under the conditions of (normal cutting speed and feed are 155 m / min. And 0.20 mm / rev., Respectively).
Cutting condition B:
Work material: round bar of JIS · S55C (HB250),
Cutting speed: 210 m / min. ,
Notch: 0.2 mm,
Feeding: 0.25 mm / rev. ,
Cutting time: 5 minutes,
Continuous high-speed high-feed cutting test of carbon steel under the conditions of (normal cutting speed and feed are 145 m / min. And 0.25 mm / rev., Respectively).
Cutting condition C:
Work material: Round bar of JIS · SKD 61 (HRC 60),
Cutting speed: 130 m / min. ,
Notch: 0.2 mm,
Feeding: 0.2 mm / rev. ,
Cutting time: 3 minutes,
Continuous high-speed cutting processing test of high hardness steel under the conditions of (normal cutting speed and feed are respectively 70 m / min., 0.1 mm / rev.).
The results are shown in Table 8, Table 9, and Table 10.
表8〜表10の結果によれば、本発明工具1〜7については、いずれの切削条件でもチッピング、剥離等の異常損傷の発生はなく、また、逃げ面摩耗幅の平均は、切削条件Aで約0.2mm、切削条件Bで約0.23mm、切削条件Cで約0.26mm、であり、耐チッピング性、耐摩耗性のいずれにもすぐれていることがわかる。
これに対して、比較例工具1〜9については、切削条件A〜Cのいずれにおいても、チッピングの発生、あるいは、逃げ面摩耗の進行により、短時間で寿命に至ることは明らかである。
According to the results of Tables 8 to 10, no abnormal damage such as chipping or peeling occurs in any of the cutting conditions according to the present invention tools 1 to 7 , and the average of the flank wear width is the cutting condition A It is about 0.2 mm, about 0.23 mm in cutting condition B, and about 0.26 mm in cutting condition C, and it is understood that both chipping resistance and abrasion resistance are excellent.
On the other hand, it is clear that the comparative example tools 1 to 9 reach the life in a short time by the occurrence of chipping or the progress of flank wear under any of the cutting conditions A to C.
本発明の表面被覆切削工具は、各種の鋼などの通常の切削条件での切削加工は勿論のこと、特に高熱発生を伴うとともに、切刃部に対して大きな負荷がかかる炭素鋼、合金鋼、鋳鉄などの高速切削加工において、すぐれた耐チッピング性および耐摩耗性を発揮し、長期に亘ってすぐれた切削性能を示すものであるから、切削加工装置の高性能化、並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。
The surface-coated cutting tool according to the present invention includes carbon steel, alloy steel, which is accompanied by generation of particularly high heat and which exerts a large load on the cutting edge, as well as cutting under normal cutting conditions of various steels and the like. It exhibits excellent chipping resistance and wear resistance in high-speed cutting of cast iron etc. and exhibits excellent cutting performance over a long period of time, thus improving the performance of cutting equipment and saving labor in cutting And energy saving as well as cost reduction.
Claims (1)
前記TiとAlの複合窒化物層を、
組成式:(Ti1−xAlx)Nで表した場合、0.35≦x≦0.80(但し、xは原子比)を満足する平均組成を有し、
前記TiとAlの複合窒化物層は柱状組織を有し、
前記柱状組織を構成する結晶粒の前記工具基体表面と平行な方向の結晶粒の幅の平均値をWとし、また、結晶粒の工具基体表面に垂直な方向の結晶粒の長さの平均値をLとした場合、LとWの比の値L/Wは1.4以上であり、
前記柱状組織を構成する結晶粒の粒界の少なくとも一部には、縦長形状のTi窒化物層と縦長形状のAl窒化物層が形成され、かつ、前記Ti窒化物層とAl窒化物層の縦長形状の長さがそれぞれ100nm以上であることを特徴とする表面被覆切削工具。
Surface coating formed by vapor deposition of a hard coating layer having a composite nitride layer of Ti and Al with an average layer thickness of 0.5 to 10 μm on the surface of a tool substrate consisting of either WC base cemented carbide or TiCN base cermet In cutting tools,
The composite nitride layer of Ti and Al,
When represented by a composition formula: (Ti 1−x Al x ) N, it has an average composition satisfying 0.35 ≦ x ≦ 0.80 (where x is an atomic ratio),
The composite nitride layer of Ti and Al has a columnar structure,
The average value of the width of the crystal grain in the direction parallel to the tool substrate surface of the crystal grain constituting the columnar structure is W, and the average value of the length of the crystal grain in the direction perpendicular to the tool substrate surface Where L is the ratio of L to W, L / W is 1.4 or more,
A vertically long Ti nitride layer and a vertically long Al nitride layer are formed on at least a part of the grain boundaries of the crystal grains constituting the columnar structure , and the Ti nitride layer and the Al nitride layer A surface-coated cutting tool characterized in that each of the longitudinally elongated shapes has a length of 100 nm or more .
Priority Applications (1)
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6481897B2 (en) * | 2016-09-16 | 2019-03-13 | 三菱マテリアル株式会社 | Surface coated cutting tool |
| KR102821653B1 (en) * | 2018-11-09 | 2025-06-16 | 외를리콘 서피스 솔루션즈 아게, 페피콘 | Cubic Al-rich AlTiN coatings deposited from ceramic targets |
| CN111054940A (en) * | 2020-01-02 | 2020-04-24 | 广东工业大学 | Cutter with coating and preparation method thereof |
| JP7409554B1 (en) | 2022-09-22 | 2024-01-09 | 住友電気工業株式会社 | Cutting tools |
| WO2024062611A1 (en) | 2022-09-22 | 2024-03-28 | 住友電気工業株式会社 | Cutting tool |
| CN118647477A (en) | 2022-09-22 | 2024-09-13 | 住友电气工业株式会社 | Cutting Tools |
| WO2024079889A1 (en) | 2022-10-14 | 2024-04-18 | 住友電気工業株式会社 | Cutting tool |
| CN118475426A (en) | 2022-10-14 | 2024-08-09 | 住友电气工业株式会社 | Cutting tool |
| CN118475425A (en) | 2022-10-14 | 2024-08-09 | 住友电气工业株式会社 | Cutting tool |
| US12263530B2 (en) | 2023-05-17 | 2025-04-01 | Sumitomo Electric Industries, Ltd. | Cutting tool |
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| SE526338C2 (en) * | 2002-09-04 | 2005-08-23 | Seco Tools Ab | Cut with a hardened, hardened refractory coating |
| JP2005288639A (en) * | 2004-04-01 | 2005-10-20 | Mitsubishi Materials Corp | Surface coated cermet cutting tool that exhibits excellent chipping resistance due to high-speed intermittent cutting of difficult-to-cut materials |
| JP2007119810A (en) * | 2005-10-26 | 2007-05-17 | Hitachi Tool Engineering Ltd | Coated member |
| JP4863071B2 (en) * | 2006-10-25 | 2012-01-25 | 三菱マテリアル株式会社 | Surface coated cutting tool with excellent wear resistance due to hard coating layer |
| WO2013045454A2 (en) * | 2011-09-30 | 2013-04-04 | Cemecon Ag | Coating of substrates using hipims |
| JP6206800B2 (en) * | 2013-09-05 | 2017-10-04 | 住友電工ハードメタル株式会社 | Method for producing coating film |
| JP2015160259A (en) * | 2014-02-26 | 2015-09-07 | 三菱マテリアル株式会社 | Surface coated cutting tool with excellent wear resistance |
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