JP6520073B2 - Table device, positioning device, flat panel display manufacturing device, and precision machine - Google Patents

Description

  The present invention relates to a table apparatus, a positioning apparatus, a flat panel display manufacturing apparatus, and a precision machine.

  In the device manufacturing process or the device measuring process, a positioning device that determines the position of a workpiece is used. The positioning device includes a table device having a movable table for supporting the work. For example, in the process of manufacturing a flat panel display, a step of bonding two substrates is performed. One of the substrates is supported by the table. By pressing the other substrate from above onto one of the substrates supported by the table, the two substrates are bonded. The two substrates are pasted together in a relatively positioned state. Patent Document 1 discloses an example of a technique for bonding two substrates in a manufacturing process of a liquid crystal panel display which is a type of flat panel display.

JP, 2002-131762, A

  When the other substrate is pressed against one substrate and a load in the vertical direction acts on the table, if the positioning accuracy of the table is insufficient, the performance of the manufactured device may be degraded.

  The aspect of this invention aims at providing the table apparatus which can suppress the lack of positioning accuracy, a positioning device, a flat panel display manufacturing apparatus, and a precision machine.

  According to the first aspect of the present invention, the table, the base member having the upper surface facing the lower surface of the table, and the table such that the lower surface of the table and the upper surface of the base member face each other with a gap therebetween. A supporting device for supporting the vertical movement of the table such that the lower surface of the table contacts the upper surface of the base member when a load in the vertical direction above a predetermined value acts on the table A table apparatus is provided, having a table guide bearing for guiding the table in a direction.

  According to the first aspect of the present invention, the table guide bearing allows displacement of the table in the vertical direction. When a load in the vertical direction above the predetermined value acts on the table, the table is guided by the table guide bearing to move downward, and is supported by the upper surface of the base member. The table can be moved straight down by means of table guide bearings. Even if the table is thermally deformed, the thermal deformation of the table is absorbed by the table guide bearing. Therefore, even when the load in the vertical direction acts on the table, the lack of the positioning accuracy of the table is suppressed.

  In the first aspect of the present invention, the table has a rod-shaped first slide member guided by the table guide bearing, and the support device is such that the table guide bearing is around the first slide member. It may have a support member that supports the table guide bearing so as to be arranged.

  Thus, the table is guided to the table guide bearing via the first slide member.

  In the first aspect of the present invention, a plurality of the first slide members are provided on the upper surface of the table, and a plurality of the table guide bearings are provided around each of the plurality of first slide members. It may be done.

  Thus, the table is guided to the table guide bearing via the plurality of first slide members.

  In the first aspect of the present invention, a moving system having an actuator capable of moving the support member in a horizontal plane may be provided.

  Thereby, the table can move in the horizontal plane together with the support member.

  In the first aspect of the present invention, the support device is disposed around the table, and further includes a frame member having an upper surface to which the support member is connected, and a stage disposed around the base member. The movement system includes: a first linear bearing connected to the lower surface of the frame member; and a first linear bearing disposed on the upper surface of the stage and guiding the first linear bearing in a direction parallel to a first axis in a horizontal plane. A guide member, a second linear bearing connected to the lower surface of the stage, and a second guide member guiding the second linear bearing in a direction parallel to a second axis in a horizontal plane orthogonal to the first axis; A first actuator generating power for moving the first linear bearing in a direction parallel to the first axis, and the second linear system in a direction parallel to the second axis A second actuator that generates power for moving the bearing may have.

  Thereby, the table can move in two directions in the horizontal plane.

  In the first aspect of the present invention, the movement system includes a third guide member connected to a first support member of the plurality of support members, and the third guide in a direction parallel to a second axis in a horizontal plane. A third linear bearing guided by the member, a fourth guide member connected to the second support member of the plurality of support members, and a direction parallel to the first axis in a horizontal plane orthogonal to the second axis A fourth linear bearing guided by the fourth guide member, and a first actuator generating a motive power for moving the first support member in a direction parallel to the first axis by moving the third linear bearing. And a second actuator that generates power for moving the second support member in a direction parallel to the second axis by moving the fourth linear bearing.

  Thereby, the table can move in two directions in the horizontal plane.

  In the first aspect of the present invention, a plurality of one or both of the first actuator and the second actuator are provided, and the movement system is an operation amount of the plurality of first actuators or a plurality of the second actuators. The amount of operation may be changed to move the table in a rotational direction about an axis parallel to the third axis orthogonal to the horizontal plane.

  Thus, the table can be moved in three directions: a direction parallel to the first axis, a direction parallel to the second axis, and a rotational direction.

  In the first aspect of the present invention, at least the table and the table guide bearing may be disposed in an internal space of a chamber apparatus, and the actuator may be disposed in an external space of the chamber apparatus.

  Thus, the chamber apparatus can be miniaturized. Since the actuator is disposed in the external space of the chamber apparatus, even if heat is generated from the actuator, the influence of the heat on the table is suppressed.

  In the first aspect of the present invention, the base member is disposed between the lower surface of the table and the upper surface of the base member, and the lower surface of the table and the upper surface of the base member face each other with a gap therebetween. A plane guide device may be provided to guide the table in a horizontal direction parallel to the top surface of the table.

  Thus, the table can be moved smoothly in the horizontal direction.

  In the first aspect of the present invention, the plain guide device has a rod-shaped second slide member, is supported by the table, and is a plain guide bearing that movably supports the second slide member in the vertical direction. You may have.

  Thus, when the table moves downward so that the lower surface of the table and the upper surface of the base member contact with the plain guide bearing in contact with the upper surface of the base member, the plain guide device moves upward with respect to the table Relative movement is possible.

  In the first aspect of the present invention, a drive element may be provided to move the plane guide device in the vertical direction.

  Thereby, the load in the vertical direction acting on the plain guide device is adjusted. For example, application of an excessive load to the plain guide device is suppressed.

  According to a second aspect of the present invention, there is provided a positioning device comprising the table apparatus of the first aspect, which determines the position of a work supported by the table of the table apparatus.

  According to the second aspect of the present invention, the shortage of the positioning accuracy of the work supported by the table is suppressed.

  According to a third aspect of the present invention, there is provided a flat panel display manufacturing apparatus comprising the table apparatus of the first aspect and a processing unit for processing a work supported by the table.

  According to the third aspect of the present invention, since the flat panel display manufacturing apparatus can process the workpiece positioned by the table, it is possible to suppress the production of a defective product from the workpiece. The flat panel display manufacturing apparatus includes, for example, a bonding apparatus for bonding two substrates, and is used in at least a part of the manufacturing process of the flat panel display. The flat panel display includes at least one of a liquid crystal display, a plasma display, and an organic EL display.

  According to a fourth aspect of the present invention, there is provided a precision machine comprising the table apparatus of the first aspect and a processing unit for processing a work supported by the table.

  According to the fourth aspect of the present invention, since the precision machine can process the work positioned by the table, it is possible to suppress the production of a defective product from the work. The precision machine includes, for example, one or both of a precision measurement machine and a precision processing machine. The precision measuring machine can measure the workpiece positioned by the table, so that the measurement of the workpiece can be performed precisely. The precision processing machine can process the workpiece positioned by the table, so that the processing of the workpiece can be performed precisely.

  According to an aspect of the present invention, a table apparatus, a positioning apparatus, a flat panel display manufacturing apparatus, and a precision machine that can suppress the lack of positioning accuracy are provided.

FIG. 1 is a plan view showing an example of a table apparatus according to the first embodiment. FIG. 2 is a side view showing an example of the table apparatus according to the first embodiment. FIG. 3 is a side sectional view showing an example of the table apparatus according to the first embodiment. FIG. 4 is a view showing a part of the table apparatus according to the first embodiment. FIG. 5 is a plan view showing an example of a table apparatus according to the second embodiment. FIG. 6 is a side sectional view showing an example of the table apparatus according to the second embodiment. FIG. 7 is a plan view showing an example of a table apparatus according to the third embodiment. FIG. 8 is a plan view showing an example of a table apparatus according to the fourth embodiment. FIG. 9 is a side sectional view showing an example of the table apparatus according to the fourth embodiment. FIG. 10 is a plan view showing an example of a table apparatus according to the fifth embodiment. FIG. 11 is a side sectional view showing an example of the table apparatus according to the fifth embodiment. FIG. 12 is a view showing a part of the table apparatus according to the fifth embodiment. FIG. 13 is a plan view showing an example of a table apparatus according to the sixth embodiment. FIG. 14 is a side sectional view showing an example of the table apparatus according to the sixth embodiment. FIG. 15 is a view showing a part of the table apparatus according to the sixth embodiment. FIG. 16 is a side sectional view showing an example of the table apparatus according to the sixth embodiment. FIG. 17 is a side sectional view showing an example of a table apparatus according to the sixth embodiment. FIG. 18 is a view showing an example of a flat panel display manufacturing apparatus according to a seventh embodiment. FIG. 19 is a view showing an example of a precision machine according to an eighth embodiment. FIG. 20 is a view showing an example of a precision machine according to a ninth embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The components of each embodiment described below can be combined as appropriate. In addition, some components may not be used.

  In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. A direction parallel to the first axis in a predetermined plane is taken as an X-axis direction. A direction parallel to a second axis orthogonal to the first axis in a predetermined plane is taken as a Y-axis direction. The direction parallel to the third axis orthogonal to the predetermined plane is taken as the Z-axis direction. The rotation (inclination) direction about the X axis (first axis) is taken as the θX direction. The rotation (inclination) direction about the Y axis (second axis) is taken as the θY direction. The rotation (inclination) direction about the Z axis (third axis) is taken as the θZ direction. The predetermined plane includes an XY plane. In the present embodiment, the predetermined plane and the horizontal plane are parallel. The Z-axis direction is the vertical direction. The X axis is orthogonal to the YZ plane. The Y axis is orthogonal to the XZ plane. The Z axis is orthogonal to the XY plane. The XY plane includes an X axis and a Y axis. The XZ plane includes an X axis and a Z axis. The YZ plane includes Y and Z axes.

First Embodiment
The first embodiment will be described. FIG. 1 is a plan view showing an example of a table apparatus 100A according to the present embodiment. FIG. 2 is a side view showing an example of the table apparatus 100A according to the present embodiment. FIG. 3 is a side sectional view showing an example of the table apparatus 100A according to the present embodiment.

  As shown in FIGS. 1, 2 and 3, the table apparatus 100A includes a table 1 having an upper surface 1A and a lower surface 1B, a base member 2 having an upper surface 2A opposed to the lower surface 1B of the table 1, and And a support device 3 for supporting the table 1 such that the lower surface 1B and the upper surface 2A of the base member 2 face each other via a gap G. The table 1 supports the work S. The work S is supported by the upper surface 1A of the table 1.

  The table device 100A functions as a positioning device that determines the position of the workpiece S. The positioning device provided with the table device 100A determines the position of the workpiece S supported by the table 1. The table device may be referred to as a positioning device.

  The support device 3 vertically moves the table 1 such that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 contact when a load in the vertical direction (Z-axis direction) equal to or greater than a predetermined value acts on the table 1. And a table guide bearing 4 for guiding the

  The table 1 has a rod-shaped first slide member 5 guided by a table guide bearing 4. The first slide member 5 is disposed on the top surface 1A of the table 1. The first slide member 5 is provided on the top surface 1A of the table 1 so as to protrude upward (+ Z direction) from the top surface 1A.

  The table guide bearing 4 is substantially cylindrical. The table guide bearing 4 is disposed around the rod-shaped first slide member 5.

  The support device 3 has a support member 6 for supporting the table guide bearing 4. The support member 6 supports the table guide bearing 4 such that the table guide bearing 4 is disposed around the first slide member 5.

  As shown in FIG. 1, a plurality of first slide members 5 are provided on the upper surface 1 </ b> A of the table 1. A plurality of first slide members 5 are provided to surround the center of the upper surface 1A. The first slide member 5 is disposed around the workpiece S supported on the upper surface 1A. A plurality of table guide bearings 4 are provided so as to be disposed around each of the plurality of first slide members 5. A plurality of support members 6 are provided to support each of the plurality of table guide bearings 4.

  In the present embodiment, four first slide members 5 are provided on the upper surface 1A. Four table guide bearings 4 are provided. Four support members 6 are provided.

  The table apparatus 100A includes a movement system 8 having an actuator 7 capable of moving the support member 6 in a horizontal plane. As the support member 6 is moved, the table 1 connected to the support member 6 moves in the horizontal plane together with the support member 6.

  In this embodiment, the actuator 7 moves the support member 6 (table 1) in the Y-axis direction, and the first actuator 7X generates power for moving the support member 6 (table 1) in the X-axis direction. And 2nd actuator 7Y which generate | occur | produces the motive power. In the present embodiment, the actuator 7 includes a servomotor.

  In the present embodiment, the support device 3 has a frame member 9 disposed around the table 1 and having an upper surface 9 A to which the support member 6 is connected, and a stage 10 disposed around the base member 2. In the present embodiment, the upper surface 10A of the stage 10 is disposed below the upper surface 2A of the base member 2. The upper surface 10A may be disposed in the same plane (the same height) as the upper surface 2A, or may be disposed above the upper surface 2A.

  The frame member 9 has an opening 9K. At least a portion of the table 1 is disposed inside the opening 9K. The frame member 9 and the table 1 are separated. The inner surface of the opening 9K and the side surface of the table 1 face each other via a gap.

  The stage 10 is a frame-like member disposed around the base member 2. The stage 10 has an opening 10K. At least a portion of the base member 2 is disposed inside the opening 10K. The stage 10 and the base member 2 are separated. The inner surface of the opening 10K and the side surface of the base member 2 face each other via a gap.

  The movement system 8 includes a first linear bearing 11 connected to the lower surface 9B of the frame member 9, and a first guide member 12 disposed on the upper surface 10A of the stage 10 and guiding the first linear bearing 11 in the X axis direction. A second linear bearing 13 connected to the lower surface 10B of the stage 10 and a second guide member 14 disposed on the base member 2 and guiding the second linear bearing 13 in the Y-axis direction are provided.

  The first actuator 7X generates a motive power for moving the first linear bearing 11 in the X-axis direction. The second actuator 7Y generates power for moving the second linear bearing 13 in the Y-axis direction.

  The actuator 7 (the first actuator 7X and the second actuator 7Y) includes a servomotor. The movement system 8 has a ball screw mechanism 15 connected to the actuator 7. The ball screw mechanism 15 includes a first ball screw mechanism 15X connected to the first actuator 7X and a second ball screw mechanism 15Y connected to the second actuator 7Y. The first ball screw mechanism 15X includes a ball screw rotated by the power generated by the first actuator 7X, and a nut disposed around the ball screw and connected to the lower surface 9B of the frame member 9. The second ball screw mechanism 15Y includes a ball screw which is rotated by the power generated by the second actuator 7Y, and a nut which is disposed around the ball screw and connected to the lower surface 10B of the stage 10. The actuator 7 and the ball screw mechanism 15 are connected via a coupling 16.

  When the first actuator 7X is actuated, the ball screw of the first ball screw mechanism 15X is rotated. Thereby, the frame member 9 moves in the X axis direction. The frame member 9 having the first linear bearing 11 is guided by the first guide member 12 in the X-axis direction. The frame member 9 and the table 1 are connected via the table guide bearing 4, the first slide member 5, and the support member 6. Therefore, when the frame member 9 moves in the X axis direction, the table 1, the table guide bearing 4, the first slide member 5, and the support member 6 move in the X axis direction together with the frame member 9.

  When the second actuator 7Y is actuated, the ball screw of the second ball screw mechanism 15Y is rotated. Thereby, the stage 10 moves in the Y-axis direction. The stage 10 having the second linear bearing 13 is guided by the second guide member 14 in the Y-axis direction. The frame member 9 is supported by the stage 10 via the first guide member 12 and the first linear bearing 11. Therefore, as the stage 10 moves in the Y axis direction, the frame member 9 moves in the Y axis direction together with the stage 10. The frame member 9 and the table 1 are connected via the table guide bearing 4, the first slide member 5, and the support member 6. Therefore, when the frame member 9 moves in the Y-axis direction, the table 1, the table guide bearing 4, the first slide member 5, and the support member 6 move in the Y-axis direction together with the frame member 9.

  Thus, in the present embodiment, the table 1 is movable in two directions, the X-axis direction and the Y-axis direction, by the movement system 8 including the first actuator 7X and the second actuator 7Y.

  FIG. 4 is a view showing a part of the table apparatus 100A according to the present embodiment. FIG. 4 is an enlarged view of the vicinity of the table guide bearing 4 and the first slide member 5. As shown in FIG. 4, the table 1 has a first slide member 5 fixed to the upper surface 1A. The first slide member 5 is provided to project upward from the upper surface 1A. The first slide member 5 has a rod portion 5L, and flange portions 5F disposed on the upper end portion and the lower end portion of the rod portion 5L, respectively.

  The table guide bearing 4 is disposed around the rod portion 5L. The table guide bearing 4 is supported by the casing 17. The support member 6 supports the table guide bearing 4 via the casing 17.

  The table guide bearing 4 includes a ball bearing. The table guide bearing 4 includes an inner ring 4A disposed to be in contact with the rod portion 5L, an outer ring 4B disposed around the inner ring 4A, and a ball 4C disposed between the inner ring 4A and the outer ring 4B. Including. In the present embodiment, two ball bearings including the inner ring 4A, the outer ring 4B, and the ball 4C are arranged in the vertical direction (the direction parallel to the central axis of the rod portion 5L).

  The table guide bearing 4 allows the movement of the first slide member 5 in the vertical direction. The first slide member 5 is supported by the table guide bearing 4 so as to be movable in the vertical direction. In the present embodiment, the table 1 is movable in the vertical direction with respect to the frame member 9 and the support member 6. In other words, the displacement of the table 1 in the vertical direction with respect to the frame member 9 and the support member 6 is allowed.

  When the load in the vertical direction on the table 1 is less than a predetermined value, the support device 3 including the table guide bearing 4 supports the table 1 so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 do not contact. When the load in the vertical direction on the table 1 is zero (in the case of no load), the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other via the gap G.

  The table guide bearing 4 permits the movement of the table 1 in the vertical direction by the size of the gap G. The dimension of the gap G is the distance between the lower surface 1B and the upper surface 2A when the load in the vertical direction on the table 1 is zero (when no load is applied). When a load downward in the vertical direction (−Z direction) acts on the table 1, the table 1 moves downward (−Z direction) while being guided by the table guide bearing 4. As the table 1 moves downward, the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2. When the force in the vertical direction on the table 1 is a predetermined value, the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2. The table guide bearing 4 guides the table 1 in the vertical direction so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 contact when a load in the vertical direction lower than a predetermined value acts on the table 1 . When the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2, the table 1 is supported by the upper surface 2A of the base member 2.

  The dimension of the gap G is determined such that the lower surface 1B and the upper surface 2A contact before the table guide bearing 4 is subjected to an excessive load (overload). In other words, even if the table 1 moves in the vertical direction within the range of the dimension of the gap G, the dimension of the gap G is determined such that an overload does not act on the table guide bearing 4. In addition, with the state where an overload acts on the table guide bearing 4, the state where a load that exceeds the static rated load acts on the table guide bearing 4, and the ball 4C is detached from the guide grooves of the inner ring 4A and the outer ring 4B. A state where such a load acts on the table guide bearing 4 is illustrated.

  The load in the -Z direction acts on the table 1 with the predetermined value, and the table guide bearing 4 can not maintain the position of the table 1 in the vertical direction, and the table 1 moves in the -Z direction. And the top surface 2A of the base member 2 contact each other, and the value of the load in the -Z direction acting on the table 1 when the dimension of the gap G becomes zero. When the load acting on the table 1 is zero (no load), the table 1 does not move in the -Z direction, the position of the table 1 in the vertical direction is maintained, and the gap G between the lower surface 1B and the upper surface 2A is maintained Be done. When a load in the -Z direction acts on the table 1, movement of the table 1 in the -Z direction is started. When the load acting on the table 1 is less than the predetermined value, the table 1 moves in the -Z direction and the dimension of the gap G gradually decreases, but the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 are separated There is. When the load acting on the table 1 reaches a predetermined value, the lower surface 1B of the table 1 moved in the -Z direction contacts the upper surface 2A of the base member 2, and the dimension of the gap G becomes zero.

  In addition, the dimension of the gap G where the lower surface 1B and the upper surface 2A can contact before the overload is applied to the table guide bearing 4, and the predetermined value of the load can be obtained in advance based on experiments or simulations. Based on the determined data, the dimension of the gap G appropriate for the table guide bearing 4 to be used and the predetermined value of the load are determined.

  Next, an example of the operation of the table apparatus 100A according to the present embodiment will be described. In the present embodiment, an example in which the table apparatus 100A is used in a manufacturing process of a liquid crystal panel display which is a type of flat panel display will be described. An example in which two substrates of a liquid crystal panel display are bonded together using the table device 100A will be described.

  One of the two substrates is supported by the upper surface 1A of the table 1 as the work S. The other substrate is held by the substrate holder. The other substrate held by the substrate holder is pressed from above onto one of the substrates supported by the table 1.

  A gap G is formed between the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 before the other substrate is pressed against the one substrate. When the other substrate is pressed against one of the substrates and a load downward in the vertical direction acts on the table 1, the table 1 moves downward. The table guide bearing 4 guides the table 1 in the vertical direction so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 are in contact with each other. The table 1 is guided by the table guide bearing 4 to move downward. When the load reaches a predetermined value, the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 are in contact with each other, and the table 1 is supported by the upper surface 2A of the base member 2.

  The table 1 can be moved straight downward by a table guide bearing 4. Therefore, when the load in the vertical direction acts on the table 1, the shortage of the positioning accuracy of the table 1 is suppressed.

  Also, for example, even if the table 1 is thermally deformed, the thermal deformation of the table 1 is absorbed by the table guide bearing 4. For example, even if the table 1 is thermally deformed in the horizontal direction, the thermal deformation is absorbed by the table guide bearing 4. Therefore, the table guide bearing 4 can guide the table 1 well.

  After the other substrate is pressed against the one substrate and the one substrate and the other substrate are bonded to each other, the substrate holder is lifted. Thereby, the load acting on the table 1 is reduced. When the load acting on the table 1 decreases and the load in the vertical direction on the table 1 falls below a predetermined value, the table 1 is moved upward by the restoring force of the table guide bearing 4. Thereby, a gap G is formed between the lower surface 1B of the table 1 and the upper surface 2A of the base member 2.

  As described above, according to the present embodiment, when the load in the vertical direction acts on the table 1, the table 1 can be moved straight downward by the table guide bearing 4. When a load in the vertical direction above the predetermined value acts on the table 1, the table 1 is supported by the base member 2. Therefore, when the load in the vertical direction acts on the table 1, the shortage of the positioning accuracy of the table 1 is suppressed.

  Further, even if the table 1 is thermally deformed, the thermal deformation 1 of the table is absorbed by the table guide bearing 4. For example, even if the table 1 is thermally deformed in the horizontal direction, the thermal deformation is absorbed by the table guide bearing 4. Therefore, the table guide bearing 4 can guide the table 1 well. Moreover, the lack of the positioning accuracy of the table 1 is suppressed.

  Further, in the present embodiment, the table 1 has the rod-shaped first slide member 5 guided by the table guide bearing 4, and the support device 3 has the table guide bearing 4 around the first slide member 5. It has a support member 6 which supports the table guide bearing 4 so as to be arranged. Thereby, the table 1 is well guided by the table guide bearing 4 via the first slide member 5.

  Further, in the present embodiment, a plurality of first slide members 5 are provided on the upper surface 1A of the table 1, and a plurality of table guide bearings 4 are provided so as to be disposed around each of the plurality of first slide members 5. Be Thus, the table 1 is well guided by the table guide bearing 4 via the plurality of first slide members 5.

  Moreover, in this embodiment, the movement system 8 which has the actuator 7 which can move the support member 6 in a horizontal surface is provided. Thereby, the table 1 can move in the horizontal plane together with the support member 6.

  Further, in the present embodiment, the support device 3 is disposed around the table 1 and has a frame member 9 having an upper surface 9A to which the support member 6 is connected, and a stage 10 disposed around the base member 2; Have. The moving system 8 includes a first linear bearing 11 connected to the lower surface 9B of the frame member 9, a first guide member 12 disposed on the upper surface 10A of the stage 10 and guiding the first linear bearing 11 in the X-axis direction The second linear bearing 13 connected to the lower surface 10B of 10, the second guide member 14 guiding the second linear bearing 13 in the Y-axis direction, and the power for moving the first linear bearing 11 in the X-axis direction It has the 1st actuator 7X which generate | occur | produces, and the 2nd actuator 7Y which generate | occur | produces the motive power for moving the 2nd linear bearing 13 to Y-axis direction. Thereby, the table 1 can be moved in two directions of the X-axis direction and the Y-axis direction in the horizontal plane.

Second Embodiment
The second embodiment will be described. In the following description, the component parts identical or equivalent to those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 5 is a plan view showing an example of a table apparatus 100B according to the present embodiment. FIG. 6 is a side sectional view showing an example of a table apparatus 100B according to the present embodiment.

  As shown in FIGS. 5 and 6, the table apparatus 100B includes a table 1 having an upper surface 1A and a lower surface 1B, a base member 2 having an upper surface 2A facing the lower surface 1B of the table 1, a lower surface 1B of the table 1 and a base And a supporting device 3 for supporting the table 1 such that the upper surface 2A of the member 2 faces the space G. The table 1 supports the work S. The work S is supported by the upper surface 1A of the table 1.

  The support device 3 has a table guide bearing 4 for guiding the table 1 in the vertical direction, and a support member 6 for supporting the table guide bearing 4. The table 1 has a rod-shaped first slide member 5 guided by a table guide bearing 4.

  As shown in FIG. 5, a plurality of first slide members 5 are provided on the upper surface 1 </ b> A of the table 1. A plurality of first slide members 5 are provided to surround the center of the upper surface 1A. The first slide member 5 is disposed around the workpiece S supported on the upper surface 1A. In the present embodiment, six first slide members 5 are provided on the upper surface 1A. Six table guide bearings 4 are provided. Six support members 6 are provided.

  The table apparatus 100B includes a movement system 8 having an actuator 7 capable of moving the support member 6 in a horizontal plane. As the support member 6 is moved, the table 1 connected to the support member 6 moves in the horizontal plane together with the support member 6.

  The actuator 7 generates a first actuator 7X that generates power for moving the support member 6 (table 1) in the X-axis direction, and generates power for moving the support member 6 (table 1) in the Y-axis direction. And a second actuator 7Y.

  In the present embodiment, the movement system 8 includes a third guide member 18 connected to the first support member 6X among the plurality of support members 6, and a third linear bearing guided by the third guide member 18 in the Y-axis direction. A fourth guide member 20 connected to the second support member 6Y among the plurality of support members 6 and a fourth linear bearing 21 guided by the fourth guide member 20 in the X-axis direction are provided. .

  The first actuator 7X moves the third linear bearing 19 to generate power for moving the first support member 6X in the X-axis direction. The second actuator 7Y moves the fourth linear bearing 21 to generate power for moving the second support member 6Y in the Y-axis direction.

  The third linear bearing 19 is supported by the support member 22. The support member 22 is fixed to the first linear bearing 11. The first actuator 7X generates a motive power for moving the first linear bearing 11 in the X-axis direction. The first linear bearing 11 is guided by the first guide member 12 in the X-axis direction. By moving the first linear bearing 11 in the X-axis direction, the third linear bearing 19 supported by the support member 22 moves in the X-axis direction together with the first linear bearing 11. The third linear bearing 19 and the table 1 are connected via the table guide bearing 4, the first slide member 5, the support member 6 (first support member 6 X), and the third guide member 18. Therefore, when the third linear bearing 19 moves in the X-axis direction, the table 1, the table guide bearing 4, the first slide member 5, the support member 6 (the first support member 6X), and the third guide member 18 It moves in the X-axis direction together with the third linear bearing 19.

  The fourth linear bearing 21 is supported by the support member 23. The support member 23 is fixed to the second linear bearing 13. The second actuator 7Y generates power for moving the second linear bearing 13 in the Y-axis direction. The second linear bearing 13 is guided by the second guide member 14 in the Y-axis direction. By moving the second linear bearing 13 in the Y-axis direction, the fourth linear bearing 21 supported by the support member 23 moves in the Y-axis direction together with the second linear bearing 13. The fourth linear bearing 21 and the table 1 are connected via the table guide bearing 4, the first slide member 5, the support member 6 (second support member 6 Y), and the fourth guide member 20. Therefore, when the fourth linear bearing 21 moves in the Y-axis direction, the table 1, the table guide bearing 4, the first slide member 5, the support member 6 (the second support member 6Y), and the fourth guide member 20 It moves in the Y-axis direction together with the fourth linear bearing 21.

  As shown in FIG. 5, in the present embodiment, the first support members 6 </ b> X are disposed on both sides (+ X side and −X side) in the X axis direction with respect to the center of the top surface 1 </ b> A of the table 1. The first support members 6X are arranged two by two in the Y-axis direction.

  As shown in FIG. 5, in the present embodiment, the second support members 6 </ b> Y are disposed on both sides (+ Y side and −Y side) in the Y axis direction with respect to the center of the upper surface 1 </ b> A of the table 1. The second support member 6Y on the + Y side can be omitted.

  The position of the first support member 6X arranged on the + X side with respect to the center of the upper surface 1A of the table 1 and the first support member arranged on the −X side with respect to the center of the upper surface 1A of the table 1 The position in the Y-axis direction of 6X is equal. That is, the Y-coordinates of the first support members 6X arranged on both sides in the X-axis direction with respect to the center of the upper surface 1A of the table 1 are equal.

  The position of the second support member 6Y arranged on the + Y side with respect to the center of the upper surface 1A of the table 1 and the second support member arranged on the −Y side with respect to the center of the upper surface 1A of the table 1 The position of 6Y in the X-axis direction is equal. That is, the X-coordinates of the second support members 6Y arranged on both sides in the Y-axis direction with respect to the center of the top surface 1A of the table 1 are equal.

  The first support members 6X disposed on both sides in the X-axis direction with respect to the center of the top surface 1A of the table 1 face each other. The first actuator 7X is one of the first support members 6X (in the present embodiment, -X) of the pair of first support members 6X arranged on both sides in the X-axis direction with respect to the center of the top surface 1A of the table 1. It is arranged to move the side first support member 6X). The first actuator 7X is not connected to the other first support member 6X (in the present embodiment, the first support member 6X on the + X side).

  The second support members 6Y disposed on both sides in the Y-axis direction with respect to the center of the upper surface 1A of the table 1 face each other. The second actuator 7Y is one of the second support members 6Y of the pair of second support members 6Y arranged on both sides in the Y-axis direction with respect to the center of the upper surface 1A of the table 1 (in the present embodiment, -Y). It arrange | positions so that the side 2nd support member 6Y may be moved. The second actuator 7Y is not connected to the other second support member 6Y (the second support member 6Y on the + Y side in the present embodiment).

  A plurality of first actuators 7X are arranged. In the space on the −X side with respect to the center of the top surface 1A of the table 1, the first actuator 7X moves each of the first support members 6X arranged in the Y-axis direction in the X-axis direction, Two are arranged.

  The movement system 8 can move the table 1 in the θZ direction (rotational direction) by changing the operation amount of the plurality of (two) first actuators 7X.

  A plurality of second support members 6Y may be arranged in the X-axis direction. A plurality of second actuators 7Y may be arranged to move each of the plurality of second support members 6Y arranged in the X-axis direction in the Y-axis direction. The movement system 8 may move the table 1 in the θZ direction by changing the operation amounts of the plurality of second actuators 7Y.

  As described above, in the present embodiment, the table 1 is movable in three directions of the X-axis direction, the Y-axis direction, and the θZ direction.

  Similar to the above-described embodiment, when the load in the vertical direction on the table 1 is zero, the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other via the gap G. When a load downward in the vertical direction (−Z direction) less than a predetermined value acts on the table 1, the table 1 moves downward (−Z direction) while being guided by the table guide bearing 4. When a load downward in the vertical direction (−Z direction) equal to or more than a predetermined value acts on the table 1, the lower surface 1B of the table 1 moved downward contacts the upper surface 2A of the base member 2. When the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2, the table 1 is supported by the upper surface 2A of the base member 2.

  As described above, also in this embodiment, when a load in the vertical direction acts on the table 1, the table 1 can be moved downward straight by the table guide bearing 4. Further, when a load equal to or more than a predetermined value acts on the table 1, the table 1 is supported by the base member 2. Further, even if the table 1 is thermally deformed, the thermal deformation 1 of the table is absorbed by the table guide bearing 4. Therefore, the lack of the positioning accuracy of the table 1 is suppressed.

  Further, in the present embodiment, when a load acts on the table 1, the pitching (rotation in the θY direction) of the first linear bearing 11, the pitching (rotation in the θX direction) of the second linear bearing 13, and the third linear bearing 19 The gap G is also reduced by at least one of the following rolling (rotation in the θY direction) and rolling of the fourth linear bearing 21 (rotation in the θX direction). When the first linear bearing 11 and the second linear bearing 13 are separated from the table 1, the pitching of the first linear bearing 11 and the pitching of the second linear bearing 13 contribute to reducing the gap G. In the embodiment, for example, when a load in the X-axis direction acts on the table 1, the radial rigidity of the table guide bearing 4, the X-axis rigidity of the third linear bearing 19, the axial rigidity of the ball screw portion (nut The load is supported by the rigidity of the part, the rigidity of the support bearing part, and the parallel spring of the rotation system from the servomotor. Even if a load in the vertical direction acts on the table 1 and a force is generated to move the table 1 in the X-axis direction based on the load, the above-described rigidity suppresses the movement of the table 1 in the X-axis direction.

Third Embodiment
A third embodiment will be described. In the following description, the component parts identical or equivalent to those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 7 is a plan view showing an example of a table apparatus 100C according to the present embodiment. The table device 100C according to the present embodiment is a modification of the table device 100B described in the above embodiment.

  As shown in FIG. 7, the table apparatus 100C supports the table 1 such that the table 1, the base member 2, and the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other via the gap G. And an apparatus 3.

  The support device 3 has a table guide bearing 4 for guiding the table 1 in the vertical direction, and a support member 6 for supporting the table guide bearing 4. The table 1 has a rod-shaped first slide member 5 guided by a table guide bearing 4.

  As shown in FIG. 7, a plurality of first slide members 5 are provided on the upper surface 1 </ b> A of the table 1. A plurality of first slide members 5 are provided to surround the center of the upper surface 1A. The first slide member 5 is disposed around the workpiece S supported on the upper surface 1A. In the present embodiment, three first slide members 5 are provided on the upper surface 1A. Three table guide bearings 4 are provided. Three support members 6 are provided.

  The table apparatus 100C includes a movement system 8 having an actuator 7 capable of moving the support member 6 in a horizontal plane. As the support member 6 is moved, the table 1 connected to the support member 6 moves in the horizontal plane together with the support member 6.

  The actuator 7 generates a first actuator 7X that generates power for moving the support member 6 (table 1) in the X-axis direction, and generates power for moving the support member 6 (table 1) in the Y-axis direction. And a second actuator 7Y.

  The movement system 8 includes a third guide member 18 connected to the first support member 6X among the plurality of support members 6, a third linear bearing 19 guided by the third guide member 18 in the Y-axis direction, and a plurality of Among the support members 6, the fourth guide member 20 connected to the second support member 6Y and the fourth linear bearing 21 guided by the fourth guide member 20 in the X-axis direction are provided.

  The first actuator 7X moves the third linear bearing 19 to generate power for moving the first support member 6X in the X-axis direction. The second actuator 7Y moves the fourth linear bearing 21 to generate power for moving the second support member 6Y in the Y-axis direction.

  The third linear bearing 19 is supported by the support member 22. The support member 22 is fixed to the first linear bearing 11. The first actuator 7X generates a motive power for moving the first linear bearing 11 in the X-axis direction. The first linear bearing 11 is guided by the first guide member 12 in the X-axis direction. By moving the first linear bearing 11 in the X-axis direction, the third linear bearing 19 supported by the support member 22 moves in the X-axis direction together with the first linear bearing 11. The third linear bearing 19 and the table 1 are connected via the table guide bearing 4, the first slide member 5, the support member 6 (first support member 6 X), and the third guide member 18. Therefore, when the third linear bearing 19 moves in the X-axis direction, the table 1, the table guide bearing 4, the first slide member 5, the support member 6 (the first support member 6X), and the third guide member 18 It moves in the X-axis direction together with the third linear bearing 19.

  The fourth linear bearing 21 is supported by the support member 23. The support member 23 is fixed to the second linear bearing 13. The second actuator 7Y generates power for moving the second linear bearing 13 in the Y-axis direction. The second linear bearing 13 is guided by the second guide member 14 in the Y-axis direction. By moving the second linear bearing 13 in the Y-axis direction, the fourth linear bearing 21 supported by the support member 23 moves in the Y-axis direction together with the second linear bearing 13. The fourth linear bearing 21 and the table 1 are connected via the table guide bearing 4, the first slide member 5, the support member 6 (second support member 6 Y), and the fourth guide member 20. Therefore, when the fourth linear bearing 21 moves in the Y-axis direction, the table 1, the table guide bearing 4, the first slide member 5, the support member 6 (the second support member 6Y), and the fourth guide member 20 It moves in the Y-axis direction together with the fourth linear bearing 21.

  As shown in FIG. 7, in the present embodiment, the first support members 6X are arranged on both sides (+ X side and −X side) in the X axis direction with respect to the center of the top surface 1A of the table 1.

  As shown in FIG. 7, in the present embodiment, the second support member 6 </ b> Y is disposed on one side (−Y side) in the Y-axis direction with respect to the center of the upper surface 1 </ b> A of the table 1.

  The position of the first support member 6X arranged on the + X side with respect to the center of the upper surface 1A of the table 1 and the first support member arranged on the −X side with respect to the center of the upper surface 1A of the table 1 The position in the Y-axis direction of 6X is different. That is, the Y-coordinates of the first support members 6X arranged on both sides in the X-axis direction with respect to the center of the upper surface 1A of the table 1 are different.

  The first support members 6X arranged on both sides in the X-axis direction with respect to the center of the upper surface 1A of the table 1 are arranged not to face each other but to be offset. Two first actuators 7X are provided to move both of the pair of first support members 6X arranged on both sides in the X-axis direction with respect to the center of the upper surface 1A of the table 1.

  The movement system 8 can move the table 1 in the θZ direction (rotational direction) by changing the operation amount of the plurality of (two) first actuators 7X.

  A plurality of second support members 6Y may be arranged in the X-axis direction. A plurality of second actuators 7Y may be arranged to move each of the plurality of second support members 6Y arranged in the X-axis direction in the Y-axis direction. The movement system 8 may move the table 1 in the θZ direction by changing the operation amounts of the plurality of second actuators 7Y.

  The table 1 is movable in three directions of the X axis direction, the Y axis direction, and the θZ direction.

  When the load in the vertical direction on the table 1 is less than the predetermined value, the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other via the gap G. When a load downward in the vertical direction (−Z direction) equal to or more than a predetermined value acts on the table 1, the table 1 moves downward (−Z direction) while being guided by the table guide bearing 4. As the table 1 moves downward, the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2. When the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2, the table 1 is supported by the upper surface 2A of the base member 2.

  As described above, also in the present embodiment, when a load in the vertical direction above the predetermined value acts on the table 1, the table 1 can be moved downward straight by the table guide bearing 4. Further, even if the table 1 is thermally deformed, the thermal deformation 1 of the table is absorbed by the table guide bearing 4. Therefore, when the load in the vertical direction acts on the table 1, the shortage of the positioning accuracy of the table 1 is suppressed.

  In the present embodiment, the number of first support members 6X or the number of second support members 6Y is small, and the enlargement of the table apparatus 100C and the complication of the structure are suppressed. For example, when the size and mass of the table 1 are small with respect to the table guide bearing 4, the structure of the table apparatus 100C is effective.

Fourth Embodiment
A fourth embodiment will be described. In the following description, the component parts identical or equivalent to those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 8 is a plan view showing an example of a table apparatus 100D according to the present embodiment. FIG. 9 is a side sectional view showing an example of a table apparatus 100D according to the present embodiment.

  Most parts of the table device 100D according to the present embodiment are the same as the table device 100B described in the above embodiment.

  In the present embodiment, at least a part of the table device 100D is disposed in the inner space of the chamber device 24. Of the table device 100D, at least the table 1 and the table guide bearing 4 are disposed in the inner space of the chamber device 24.

  In the present embodiment, the table 1, the table guide bearing 4, the first slide member 5, the support member 6, the third guide member 18, the third linear bearing 19, the fourth guide member 20, the fourth linear bearing 21, etc. , And is disposed in the internal space of the chamber device 24.

  The actuators 7 (the first actuator 7X and the second actuator 7Y) are disposed in the space outside the chamber device 24.

  The chamber device 24 includes an environmental control system that controls the environment of the internal space. The environment of the interior space includes at least one of the type of gas in the interior space, temperature, humidity, pressure (including the degree of vacuum), and the degree of cleanliness.

  The environmental control system controls the internal space of the chamber device 24 to, for example, a vacuum state. In addition, the environmental control system controls the internal space of the chamber device 24 to a constant temperature and maintains a high degree of cleanliness.

  The chamber device 24 has an opening 24K connecting the inner space and the outer space. At least a portion of the movement system 8 is disposed in the opening 24K.

  The chamber device 24 includes a bellows 25 disposed in the opening 24 K and a support device 26 for supporting the bellows 25. Thus, the flow of gas between the inner space and the outer space is suppressed.

  In the present embodiment, the openings 24 </ b> K are respectively disposed on the + Y side and the −Y side of the chamber device 24. In the present embodiment, one opening 24 </ b> K is disposed on each of the + Y side and the −Y side of the chamber device 24. The X coordinate of the opening 24K on the + Y side and the X coordinate of the opening 24K on the −Y side are the same. The openings 24 </ b> K may be disposed two each on the + Y side and the −Y side of the chamber device 24, or may be disposed at any number of three or more.

  In the present embodiment, the openings 24 </ b> K are disposed on the + X side and the −X side of the chamber device 24, respectively. In the present embodiment, two openings 24 </ b> K are disposed on each of the + X side and the −X side of the chamber device 24. The Y coordinate of the opening 24K on the + X side and the Y coordinate of the opening 24K on the −X side are the same. The openings 24 </ b> K may be disposed one by one on each of the + X side and the −X side of the chamber apparatus 24, or may be disposed in any number of three or more.

  Bellows 25 is arranged in each of the plurality of openings 24K. In the present embodiment, the chamber device 24 has a line symmetrical structure with respect to a first virtual line parallel to the X axis passing through the center of the chamber device 24 in the XY plane. The chamber device 24 has a line symmetrical structure with respect to a second imaginary line passing through the center of the chamber device 24 in the XY plane and parallel to the Y axis.

  As described above, according to the present embodiment, since the chamber apparatus 24 having at least the internal space in which the table 1 is disposed is provided, it is supported by the table 1 in the internal space of the chamber apparatus 24 whose environment is controlled. The work S is processed. Since the actuator 7 is disposed in the external space of the chamber device 24, even if heat is generated from the actuator 7, for example, the influence of the heat on the table 1 and the work S is suppressed. In addition, even if foreign matter is generated from the actuator 7, the influence of the foreign matter on the table 1 and the work S is suppressed. Further, the entire table apparatus 100D is not accommodated in the internal space of the chamber apparatus 24, and at least the table 1 and the table guide bearing 4 are accommodated in the internal space of the chamber apparatus 24, and the actuator 7 is disposed in the external space of the chamber apparatus 24. As a result, the enlargement of the chamber device 24 is suppressed.

  Further, according to the present embodiment, the chamber device 24 has a line symmetrical structure. When there is a pressure difference between the internal space of the chamber device 24 and the external space of the chamber device 24, a force proportional to the area of the bellows 25 acts in the expansion and contraction direction of the bellows 25 due to the pressure difference. The openings 24 K and the bellows 25 are arranged line-symmetrically to the first virtual line and arranged line-symmetrically to the second virtual line, whereby the force in the expansion and contraction direction acting on the bellows 25 is canceled out. Be done. The arrangement of the bellows 25 is preferably such that the drive portion on the -X side is symmetrical with respect to the first virtual line, and the follower portion on the + X side is symmetrical. The interval between the + X-side drive units and the interval between the −X-side driven units may be different.

Fifth Embodiment
A fifth embodiment will be described. In the following description, the component parts identical or equivalent to those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 10 is a plan view showing an example of a table apparatus 100E according to the present embodiment. FIG. 11 is a side sectional view showing an example of a table apparatus 100E according to the present embodiment.

  Most parts of the table device 100E according to the present embodiment are the same as the table device 100B described in the above embodiment.

  As shown in FIGS. 10 and 11, the table device 100E is disposed between the lower surface 1B of the table 1 and the upper surface 2A of the base member 2, and the gap G between the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 is And a plain guide device 30 for guiding the table 1 in the horizontal direction parallel to the upper surface 2A of the base member 2.

  In the present embodiment, the plane guide device 30 is disposed in the internal space 1H formed in the table 1. As shown in FIG. 10, a plurality of plain guide devices 30 are provided. In the present embodiment, three plane guide devices 30 are arranged in the XY plane.

  The plain guide device 30 has a support plate 32 for supporting the plurality of balls 31 and a rod-shaped second slide member 33 connected to the support plate 32. The balls 31 are disposed on the lower surface side of the support plate 32. The balls 31 are rotatably (rollably) supported by the support plate 32. At least a part of the balls 31 in the plain guide device 30 is disposed so as to project downward from the lower surface 1B of the table 1.

  The operation of the movement system 8 causes the table 1 to move on the top surface 2A of the base member 2. When the gap G is formed, the balls 31 of the plain guide device 30 can roll in contact with the top surface 2A of the base member 2. Thereby, the table 1 is guided in at least one of the X-axis direction, the Y-axis direction, and the θZ direction parallel to the upper surface 2A.

  The second slide member 33 is fixed to the upper surface of the support plate 32. The second slide member 33 is provided to project upward from the upper surface of the support plate 32. The second slide member 33 has a rod portion 33L, and flange portions 33F disposed on the upper end portion and the lower end portion of the rod portion 33L, respectively.

  In the present embodiment, the table apparatus 100E is provided with a plain guide bearing 34 supported by the table 1 and movably supporting the second slide member 33 in the vertical direction.

  FIG. 12 is an enlarged view showing the vicinity of the plain guide bearing 34. The plain guide bearing 34 is disposed around the rod portion 33L. The plain guide bearing 34 is supported on the inner surface of the internal space 1H of the table 1.

  The plain guide bearing 34 includes a ball bearing. The plain guide bearing 34 includes an inner ring 34A disposed to be in contact with the rod portion 33L, an outer ring 34B disposed around the inner ring 34A, and a ball 34C disposed between the inner ring 34A and the outer ring 34B. Including. In the present embodiment, two ball bearings including the inner ring 34A, the outer ring 34B, and the ball 34C are disposed in the vertical direction (direction parallel to the central axis of the rod portion 33L).

  The plain guide bearing 34 allows movement of the second slide member 33 (plane guide device 30) in the vertical direction. The second slide member 33 is supported by the plain guide bearing 34 so as to be movable in the vertical direction. In the present embodiment, the plane guide device 30 is movable in the vertical direction with respect to the table 1. In other words, the displacement of the plane guide device 30 in the vertical direction with respect to the table 1 is allowed.

  When the load in the vertical direction on the table 1 is zero, the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other via the gap G. When the load in the vertical direction on the table 1 is less than the predetermined value and the load in the vertical direction acts on the table 1, the table 1 is lowered such that the dimension of the gap G is reduced. When the load in the vertical direction on the table 1 is less than a predetermined value, the support device 3 including the table guide bearing 4 supports the table 1 so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 do not contact.

  At least a part of the plain guide device 30 supported by the table 1 contacts the top surface 2A of the base member 2 in a state where the load in the vertical direction on the table 1 is less than the predetermined value and the gap G is formed. When the table 1 moves in the horizontal plane by the operation of the movement system 8, the table 1 is guided to the upper surface 2A of the base member 2 through the plain guide device 30. Thereby, the table 1 can be smoothly moved in the horizontal direction.

  The table guide bearing 4 permits the movement of the table 1 in the vertical direction by the size of the gap G. When a load downward in the vertical direction (−Z direction) equal to or more than a predetermined value acts on the table 1, the table 1 moves downward (−Z direction) while being guided by the table guide bearing 4. As the table 1 moves downward, the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2. The table guide bearing 4 guides the table 1 in the vertical direction so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 contact when a load in the vertical direction lower than a predetermined value acts on the table 1 . When the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2, the table 1 is supported by the upper surface 2A of the base member 2.

  The dimension of the gap G is determined such that the lower surface 1B and the upper surface 2A contact before the table guide bearing 4 is subjected to an excessive load (overload). The dimension of the gap G is determined such that an overload does not act on the table guide bearing 4 even if the table 1 moves in the vertical direction within the range of the dimension of the gap G.

  In the present embodiment, the plain guide bearing 34 allows the movement of the second slide member 33 (plane guide device 30) in the vertical direction. When a load downward in the vertical direction above the predetermined value acts on the table 1 and the table 1 moves downward, the plain guide device 30 supported by the plain guide bearing 34 is relatively upward with respect to the table 1 It is movable. As a result, all of the plain guide device 30 is accommodated in the internal space 1H of the table 1.

  In the present embodiment, the rigidity of the plain guide bearing 34 in the vertical direction is smaller than the rigidity of the plain guide device 30 in the vertical direction. When the table 1 moves downward, a load in the vertical direction acts on the plane guide device 30. The dimension of the gap G is determined such that the lower surface 1B and the upper surface 2A come in contact with each other before an excessive load (overload) is applied to the plain guide device 30. In other words, even if the table 1 moves in the vertical direction within the range of the dimension of the gap G, the dimension of the gap G is determined so that overload does not act on the plain guide device 30.

  As described above, according to the present embodiment, since the plain guide device 30 is provided, the table 1 is in a state where the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other via the gap G. Can be smoothly moved in the horizontal direction parallel to the upper surface 2A of the base member 2.

  Further, according to the present embodiment, the plain guide device 30 has the rod-shaped second slide member 33. The second slide member 33 is vertically movably supported by a plain guide bearing 34 supported by the table 1. Therefore, when the table 1 moves downward so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 contact with the plain guide bearing 34 in contact with the upper surface 2A of the base member 2, the plain guide device 30 Can move upward relative to the table 1. Thus, the plain guide device 30 is accommodated in the internal space 1H of the table 1.

Sixth Embodiment
A sixth embodiment will be described. In the following description, the component parts identical or equivalent to those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 13 is a plan view showing an example of a table apparatus 100F according to the present embodiment. FIG. 14 is a side sectional view showing an example of a table apparatus 100F according to the present embodiment.

  Most parts of the table device 100F according to the present embodiment are the same as the table device 100E described in the above embodiment.

  In the present embodiment, the table device 100F includes a drive element 35 that moves the plane guide device 30 in the vertical direction.

  FIG. 15 is an enlarged view showing the vicinity of the plane guide device 30 and the drive element 35. As shown in FIG. The plain guide device 30 has a rod-shaped second slide member 33 fixed to the support plate 32. In the internal space 1H of the table 1, a plain guide bearing 34 for movably supporting the second slide member 33 in the vertical direction is provided. The plain guide bearing 34 is supported on the inner surface of the internal space 1H of the table 1.

  The plain guide bearing 34 includes a ball bearing. The plain guide bearing 34 includes an inner ring 34A disposed to be in contact with the rod portion 33L, an outer ring 34B disposed around the inner ring 34A, and a ball 34C disposed between the inner ring 34A and the outer ring 34B. Including. In the present embodiment, two ball bearings including the inner ring 34A, the outer ring 34B, and the ball 34C are disposed in the vertical direction (direction parallel to the central axis of the rod portion 33L).

  In the present embodiment, the spacer member 37 is disposed between the two inner rings 34A disposed in the vertical direction. The inner ring 34A contacts the spacer member 37. The two outer rings 34B arranged in the vertical direction face each other via a gap.

  The drive element 35 includes, for example, a piezoelectric element such as a piezoelectric element. The drive element 35 is disposed between the upper surface of the plain guide bearing 34 and the fixing member 36 fixed to the inner surface of the internal space 1H of the table 1.

  The drive element 35 can adjust the position of the lower end (the lower end of the ball 31 in this embodiment) of the plane guide device 30 in the vertical direction. The lower end of the plain guide device 30 moves upward by the contraction of the drive element 35. The extension of the drive element 35 moves the lower end of the plain guide device 30 downward.

  In the present embodiment, the drive element 35 is disposed between the upper outer ring 34B of the two outer rings 34B arranged in the vertical direction of the play-in guide bearing 34 and the fixing member 36. The operation of the drive element 35 changes the distance between the two outer rings 34B. Thereby, the position of the lower end portion of the plain guide device 30 is adjusted.

  According to the present embodiment, the position of the lower end portion of the plane guide device 30 in the vertical direction can be adjusted by the drive element 35. Therefore, the load acting on the plain guide device 30 is adjusted. For example, application of an excessive load to the plain guide device 30 is suppressed.

  When the load in the vertical direction on the table 1 is less than the predetermined value, the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other via the gap G. With the gap G formed, the lower end portion of the plain guide device 30 supported by the table 1 contacts the top surface 2A of the base member 2. By adjusting the position of the lower end portion of the plain guide device 30 in the vertical direction by the drive element 35, the load acting on the lower end portion of the plain guide device 30 in contact with the upper surface 2A is adjusted.

  When a load downward in the vertical direction (−Z direction) equal to or more than a predetermined value acts on the table 1, the table 1 moves downward (−Z direction) while being guided by the table guide bearing 4. As the table 1 moves downward, the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2. When the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2, the table 1 is supported by the upper surface 2A of the base member 2. When the table 1 moves downward, the lower end portion of the plain guide device 30 supported by the table 1 via the plain guide bearing 34 receives a load from the upper surface 2A of the base member 2. When the table 1 moves downward, the load on the lower end portion of the plain guide device 30 received from the upper surface 2A of the base member 2 increases. In the present embodiment, when the table 1 moves downward and the load acting on the lower end of the plain guide device 30 increases, the drive element 35 raises the lower end of the plain guide device 30 above the table 1 Move relative to Thereby, an increase in load acting on the lower end portion of the plain guide device 30 is suppressed.

  As described above, according to the present embodiment, since the driving element 35 capable of moving the plain guide device 30 in the vertical direction is provided, the application of an excessive load to the plain guide device 30 is suppressed. Since the load acting on the plain guide device 30 can be reduced, the enlargement of the plain guide device 30 is suppressed.

  In the present embodiment, as in the table device 100G shown in FIG. 16, the plain guide device 30, the plain guide bearing 34, and the drive element 35 may be disposed in the internal space 2H of the base member 2.

  In the present embodiment, as in the table device 100H shown in FIG. 17, the drive element 35 may be a force control actuator such as an air cylinder.

  In the present embodiment, when no load in the vertical direction is applied to the table 1, the dimension of the gap G between the table 1 and the base member 2 may be adjusted to zero by the drive element 35.

Seventh Embodiment
A seventh embodiment will be described. In the following description, the component parts identical or equivalent to those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 18 is a view showing an example of a flat panel display manufacturing apparatus 500 including the table apparatus 100A (100B to 100H) according to the present embodiment. Flat panel display manufacturing apparatus 500 is used in at least a part of the manufacturing process of the flat panel display. The flat panel display includes at least one of a liquid crystal display, a plasma display, and an organic EL display.

  The flat panel display manufacturing apparatus 500 includes a transport apparatus 600 capable of transporting a work S for manufacturing a flat panel display. The transfer device 600 includes the table device 100A according to the present embodiment.

  In FIG. 18, the table device 100A is illustrated in a simplified manner. The work S is supported by the table 1.

  In the present embodiment, the work S is a substrate for manufacturing a flat panel display. A flat panel display is manufactured from the work S. The workpiece S may include a glass plate. When a liquid crystal display is manufactured, the work S may include a TFT substrate or a color filter substrate.

  The flat panel display manufacturing apparatus 500 performs processing for manufacturing a flat panel display using the work S disposed at the processing position (target position) PJ1. The table apparatus 100A arranges the work S supported by the table 1 at the processing position PJ1. The transfer device 600 includes a carry-in device 601 capable of carrying (carrying in) the work S to the table 1 of the table device 100A and a carry-out device 602 capable of carrying (carrying out) the work S from the table 1. The work S before processing is conveyed (carried in) to the table 1 by the carrying-in device 601. The workpiece S supported on the table 1 is transported to the processing position PJ1 by the table apparatus 100A. The unloading device 602 transports (exports) the processed work S from the table 1.

  The table apparatus 100A moves the table 1 to move the workpiece S supported by the table 1 to the processing position PJ1. The table apparatus 100A can arrange the workpiece S supported by the table 1 at the processing position PJ1 with high positioning accuracy.

  For example, when the flat panel display manufacturing apparatus 500 includes a bonding apparatus for bonding two substrates, the work S supported by the table 1 includes one of the two substrates. The processing position PJ1 includes a bonding position where one substrate is bonded to the other substrate. The other substrate is pressed against one of the substrates of the table 1 arranged at the bonding position.

  In the present embodiment, the flat panel display manufacturing apparatus 500 has a substrate holder 501 that holds the other substrate. The substrate holder 501 functions as a processing unit that processes the workpiece S (one substrate) supported by the table 1. The substrate holder 501 causes one of the substrates disposed at the bonding position to face the other substrate held by the substrate holder 501. The substrate holder 501 moves downward so as to press the other substrate against one of the substrates supported by the table 1. Thus, the two substrates are bonded.

  After the work S is processed at the processing position PJ1, the processed work S is transported from the table 1 by the unloading device 602. The work S transported (carried out) by the carry-out device 602 is carried to a processing apparatus which performs a post process.

  In the present embodiment, the table apparatus 100A can arrange the workpiece S at the processing position PJ1. Moreover, the lack of the positioning accuracy of the table 1 is suppressed. Therefore, the occurrence of defective products (flat panel displays) is suppressed.

  The table apparatus 100A (100B to 100H) may be used in a semiconductor manufacturing apparatus. The semiconductor manufacturing apparatus includes, for example, an exposure apparatus that forms a device pattern on a workpiece S via a projection optical system. In the exposure apparatus, the processing position PJ1 includes the image plane position (exposure position) of the projection optical system. The projection optical system functions as a processing unit that exposes the workpiece S supported by the table 1. By disposing the workpiece S at the processing position PJ1, the semiconductor manufacturing apparatus can form a device pattern on the workpiece S via the projection optical system.

  The semiconductor manufacturing apparatus may include a film forming apparatus for forming a film on the work S. When the semiconductor manufacturing apparatus includes a film forming apparatus, the processing position PJ1 includes a supply position (film forming position) to which a material for forming a film is supplied. The supply unit that supplies the material functions as a processing unit that performs a film forming process of the workpiece S supported by the table 1. By disposing the work S at the processing position PJ 1, a film for forming a device pattern is formed on the work S.

Eighth Embodiment
An eighth embodiment will be described. FIG. 19 is a view showing an example of a precision machine 700 provided with the table apparatus 100A (100B to 100H) according to the present embodiment. In the present embodiment, an example will be described in which the precision machine 700 is a precision measurement machine that accurately measures a workpiece such as a precision instrument.

  The precision measurement machine 700 measures the workpiece S2. The work S2 may include, for example, at least one of a flat panel display manufactured by the flat panel display manufacturing apparatus 500 and a semiconductor device manufactured by the above-described semiconductor manufacturing apparatus. The precision measurement machine 700 includes a transport device 600B capable of transporting the workpiece S2. The transfer device 600B includes the table device 100A according to the present embodiment.

  In FIG. 19, the table device 100A is illustrated in a simplified manner. The work S2 is supported by the table 1.

  The precision measurement machine 700 measures the workpiece S2 disposed at the measurement position (target position) PJ2. The table apparatus 100A arranges the workpiece S2 supported by the table 1 at the measurement position PJ2. The transfer device 600B includes a carry-in device 601B capable of carrying (carrying in) the work S2 to the table 1 of the table device 100A, and a carry-out device 602B capable of carrying (carrying out) the work S2 from the table 1. The workpiece S2 before measurement is transported (carried in) to the table 1 by the loading device 601B. The workpiece S2 supported by the table 1 is transported to the measurement position PJ2 by the table apparatus 100A. The workpiece S2 after measurement is transported (carried out) from the table 1 by the carry-out device 602B.

  The table apparatus 100A moves the table 1 to move the workpiece S2 supported by the table 1 to the measurement position PJ2. The table apparatus 100A can arrange the workpiece S2 supported by the table 1 at the measurement position PJ2 with high positioning accuracy.

  In the present embodiment, the precision measuring machine 700 optically measures the workpiece S2 using the detection light. The precision measurement machine 700 includes an irradiation device 701 capable of emitting detection light, and a light receiving device 702 capable of receiving at least a part of the detection light emitted from the irradiation device 701 and reflected by the workpiece S2. In the present embodiment, the measurement position PJ2 includes the irradiation position of the detection light. The irradiation device 701 and the light receiving device 702 function as a processing unit that processes the workpiece S2 supported by the table 1. In the present embodiment, the irradiation device 701 and the light receiving device 702 function as a measurement unit that measures the workpiece S2 supported by the table 1. By arranging the work S2 at the measurement position PJ2, the state of the work S2 is optically measured.

  After the measurement of the workpiece S2 at the measurement position PJ2, the workpiece S2 after the measurement is transported from the table 1 by the unloading device 602B.

  In the present embodiment, since the table apparatus 100A can arrange the workpiece S2 at the measurement position (target position) PJ2, the occurrence of measurement failure can be suppressed. That is, the precision measuring instrument 700 can well determine whether the workpiece S2 is defective. As a result, for example, the defective work S2 is prevented from being transported or shipped to the subsequent process. Further, since the precision measuring machine 700 can measure the workpiece S2 arranged at the measurement position PJ2 by the table 1, the measurement of the workpiece S2 can be performed accurately.

  The three-dimensional measurement apparatus may include the table apparatus 100A according to the present embodiment, or may include a transport apparatus including the table apparatus 100A. Since the workpiece to be measured is supported by the table 1, the three-dimensional measuring device can measure the workpiece placed at the target position, so that the workpiece can be measured accurately.

The Ninth Embodiment
A ninth embodiment will be described. FIG. 20 is a view showing an example of a precision machine 800 provided with the table apparatus 100A (100B to 100H) according to the present embodiment. In the present embodiment, an example in which the precision machine 800 is a precision processing machine capable of performing precision processing will be described.

  The precision processing machine 800 processes the workpiece S3. The precision processing machine 800 includes a machining center, and has a table device 100A and a processing head 801. The processing head 801 functions as a processing unit that processes the workpiece S3 supported by the table 1 of the table device 100A. In the present embodiment, the processing head 801 functions as a processing unit that processes the workpiece S3 supported by the table 1 of the table apparatus 100A. The processing head 801 has a processing tool, and processes the workpiece S3 supported by the table 1 of the table apparatus 100A with the processing tool. The processing head 801 is a mechanism for cutting the workpiece S3. The processing head 801 moves the processing tool in the Z-axis direction orthogonal to the moving direction of the table 1.

  The precision processing machine 800 can move the processing tool and the work S3 relative to each other by moving the work S3 in the XY plane with the table apparatus 100A and moving the processing head 801 in the Z-axis direction.

  The precision processing machine 800 can process the workpiece S3 on the table 1 arranged at the processing position (target position), so that the processing of the workpiece S3 can be performed precisely.

  In the present embodiment, the table 1 is moved in the XY plane (in the horizontal plane). In the present embodiment, the table 1 may be moved in a direction inclined with respect to the XY plane. That is, the XY plane may be parallel to the horizontal plane, or may be inclined with respect to the horizontal plane.

1 table 1A upper surface 1B lower surface 1H internal space 2 base member 2A upper surface 2H internal space 3 support device 4 table guide bearing 4A inner ring 4B outer ring 4C ball 5 first slide member 5F flange portion 5L rod portion 6 support member 6X first support member 6Y Second support member 7 actuator 7X first actuator 7Y second actuator 8 movement system 9 frame member 9A upper surface 9B lower surface 9K opening 10 stage 10A upper surface 10B lower surface 10K opening 11 first linear bearing 12 first guide member 13 second linear bearing 14 Second guide member 15 ball screw mechanism 15X first ball screw mechanism 15Y second ball screw mechanism 16 coupling 17 casing 18 third guide member 19 third linear bearing 20 fourth guide member 21 fourth linear bearing 22 support portion 23 support member 24 chamber device 24K opening 25 bellows 26 support device 30 plain guide device 31 ball 32 support plate 33 second slide member 33 F flange portion 33 L rod portion 34 plain guide bearing 35 drive element 36 fixing member 37 spacer member 100 A table device 100B table apparatus 100C table apparatus 100D table apparatus 100E table apparatus 100F table apparatus 100G table apparatus 100H table apparatus 500 flat panel display manufacturing apparatus 700 precision machine (precision measurement machine)
800 Precision Machine (Precision Machine)
G gap S work

Claims (12)

Table,
A base member having an upper surface facing the lower surface of the table;
And a supporting device for supporting the table such that the lower surface of the table and the upper surface of the base member face each other with a gap therebetween.
The support device is a table guide bearing for guiding the table in the vertical direction such that the lower surface of the table and the upper surface of the base member are in contact when a load in the vertical direction above a predetermined value acts on the table. I have a,
The table has a rod-shaped first slide member guided by the table guide bearing,
The support device is
A support member supporting the table guide bearing such that the table guide bearing is disposed around the first slide member;
A moving system having an actuator capable of moving the support member in a horizontal plane;
Table device. A plurality of first slide members are provided on the upper surface of the table,
A plurality of the table guide bearings are provided so as to be disposed around each of the plurality of first slide members,
The table apparatus according to claim 1 . The support device is
A frame member disposed on the periphery of the table and having a top surface to which the support member is connected;
A stage disposed around the base member;
And have
The mobile system
A first linear bearing connected to the lower surface of the frame member;
A first guide member disposed on the upper surface of the stage and guiding the first linear bearing in a direction parallel to a first axis in a horizontal plane;
A second linear bearing connected to the lower surface of the stage;
A second guide member for guiding the second linear bearing in a direction parallel to a second axis in a horizontal plane orthogonal to the first axis;
A first actuator generating power for moving the first linear bearing in a direction parallel to the first axis;
A second actuator generating power for moving the second linear bearing in a direction parallel to the second axis;
Have
The table apparatus of Claim 1 or Claim 2 . The mobile system
A third guide member connected to the first support member among the plurality of support members;
A third linear bearing guided by the third guide member in a direction parallel to a second axis in a horizontal plane;
A fourth guide member connected to the second support member among the plurality of support members;
A fourth linear bearing guided by the fourth guide member in a direction parallel to the first axis in a horizontal plane orthogonal to the second axis;
A first actuator that generates power to move the first support member in a direction parallel to the first axis by moving the third linear bearing;
A second actuator that generates power to move the second support member in a direction parallel to the second axis by moving the fourth linear bearing;
Have
The table apparatus of Claim 1 or Claim 2 . A plurality of one or both of the first actuator and the second actuator are provided,
The movement system changes the operation amount of the plurality of first actuators or the operation amounts of the plurality of second actuators, and rotates the table in a rotation direction about an axis parallel to a third axis orthogonal to the horizontal plane. Moving,
The table apparatus of Claim 4 . At least the table and the table guide bearing are arranged in the interior space of the chamber device,
The actuator is disposed in an external space of the chamber apparatus.
Table apparatus according to any one of claims 1 to 5. It is disposed between the lower surface of the table and the upper surface of the base member, and in the horizontal direction parallel to the upper surface of the base member, with the lower surface of the table and the upper surface of the base member facing each other with a gap. Equipped with a plain guide device for guiding the table,
The table apparatus according to any one of claims 1 to 6 . The plain guide device has a rod-like second slide member,
And a plain guide bearing supported by the table and movably supporting the second slide member in the vertical direction.
The table apparatus according to claim 7 . A drive element for moving the plane guide device in the vertical direction;
The table apparatus according to claim 8 . A table apparatus according to any one of claims 1 to 9 , comprising:
Determine the position of the workpiece supported by the table of the table device;
Positioning device. The table apparatus according to any one of claims 1 to 9 .
A processing unit that processes a work supported by the table;
Flat panel display manufacturing apparatus comprising: The table apparatus according to any one of claims 1 to 9 .
A processing unit that processes a work supported by the table;
Precision machine equipped with

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