JP6534024B2 - Heat exchanger - Google Patents

Description

The present invention relates to a heat exchanger that cools a heating element via a liquid refrigerant flowing from an inlet to an outlet.

As an apparatus of a heating element which needs cooling, there is an apparatus which performs power conversion using semiconductor elements such as MOSFET (Metal Oxide Semiconductor Field Effect Transistor), IGBT (Insulated Gate Bipolar Transistor), for example. In these devices, a large output is required along with downsizing and weight reduction, and the calorific value of the semiconductor element is increasing. Therefore, in order to maintain the stability of the operation of the device which performs power conversion, the semiconductor element is efficiently It needs to be cooled. Therefore, in order to cool a heat generating body such as a semiconductor element, a heat exchanger mounted on the surface of the heat generating body is used.

As the heat exchanger mounted on the surface of the heating element, a heat exchanger cooled via a liquid refrigerant is used to facilitate heat release, for example, a semiconductor element, particularly a flat semiconductor element having contact electrodes on both sides As a semiconductor element cooling body that performs cooling by bringing cooling water into contact with both sides of the surface, as in Patent Document 1, it has an inlet and an outlet that allow the cooling water to flow in and out, and it has good thermal conductivity For example, a heat exchanger is proposed in which the upper cooling body made of copper or aluminum and the lower cooling body having a spirally formed concave portion are different in hardness and pressure-welded so that the cooling water is not leaked to the outside It is done.

In addition, as a water-cooled cooling body applied to a power converter mounted on a railway vehicle, as in Patent Document 2, it has a cooling water inlet and a cooling water outlet, and has a zigzag shape in a flat aluminum nitride container. A heat exchanger having a meandering coolant flow path has been proposed.

However, when the heat exchangers proposed in Patent Document 1 and Patent Document 2 are both mounted on a heating element such as a semiconductor element, the surface of the heating element and the surface of the heat exchanger are uniformly contacted. In addition, finishing such as smoothing the surface of the heat exchanger is performed.

Japanese Examined Patent Publication 7-112034 JP 10-107194 A

The present invention, in order to solve the above-mentioned problems, in a heat exchanger having a liquid refrigerant flowing from the inlet to the outlet, the heat exchanger is mounted on the heating element to cool the heating element. It is an object of the present invention to provide a heat exchanger which is thin and light and which is in close contact with a heating element to carry out efficient cooling without smoothing the surface of the surface.

The heat exchanger according to claim 1 of the present invention is a heat exchanger that cools a heat generating body by flowing a liquid refrigerant in a zigzag meandering flow path, wherein the zigzag meandering flow path has an inlet and a flow. The partition walls of the plurality of pieces project from the inner wall surface of the annular wall open at both end faces having an outlet toward the opposite inner wall surface, and alternately the protruding tip has a gap from the inner wall surface of the annular wall The space between the annular wall and the partition wall and the space between the spaced apart partition walls are formed to communicate with the inlet and the outlet, and the annular wall and the partition wall are made of synthetic resin or elastomer. Forming a flow path main body having the inlet and the outlet, the both end faces are open, and a space portion made of the flow path meandering in a zigzag shape inside the flow path body, Lid material closely joined to the body The heating element is mounted a liquid coolant to a heat exchanger of thin lightweight cooling the heat generating element by flowing into the space toward the outlet from the inlet, one end face of the flow path body The cover is closed by a cover, and the other end face is closed by the cover or other material, and the cover is a thin plate having a good heat-conductive material, and the annular wall and the partition wall The lid material is pressured by the liquid refrigerant when the liquid refrigerant is sent from the inflow port to the outflow port to the space portion of the flow path main body by being closely bonded to the respective end faces of The end face of each of the annular wall and the partition wall can be displaced outward in the space portion as a support end. A heat exchanger according to claim 2 is the heat exchanger according to claim 1, wherein the annular wall and the partition wall are integrally formed of the same elastomeric material and both end surfaces are open. characterized by being configured to.

The heat exchanger according to the present invention is a heat exchanger in which a liquid refrigerant is flowed in a zigzag flow path to cool a heat generating element, and the zigzag flow path has both end faces having an inlet and an outlet. The partition wall of the annular wall protrudes from the inner wall surface of the open annular wall toward the opposite inner wall surface, and the protruding tip is alternately spaced apart from the inner wall surface of the annular wall so as to have a gap And the partition wall and between the separated partition walls are in communication with the inlet and the outlet, and the annular wall and the partition wall are integrally formed of a synthetic resin material or an elastomer material. Thus, a thin and light-weight heat exchanger is formed since it has a flow path main body having the inflow port and the outflow port, both end faces being open, and having a space portion made up of the flow path zigzag in the inside . it is possible to provide, Luo, heat thin lightweight cooling the heat generating element by flowing into the space toward the outlet of the liquid coolant by mounting a heating element in the lid, which is closely attached to the flow path body from the inlet In the exchanger, one end face of the flow path main body is closed by a lid and the other end face is closed by the lid or another material, and the lid is flexible with a good heat conduction material. Liquid refrigerant is sent from the inflow port toward the outflow port in the space portion of the flow path main body by forming a thin thin film and closely bonding to the respective end faces of the annular wall and the partition wall At the time, since the lid member can be displaced outward in the space portion with the respective end faces of the annular wall and the partition wall as the support end by the pressure of the liquid refrigerant , the heat generation can be prevented. is Rukoto effectively by heat transfer the heat generated by the body in the liquid refrigerant in the heat exchanger Without processing smoothing the surface of the heat exchanger come, heat conduction can be improved and the cooling efficiency is improved. Further, the annular wall and the partition wall are transformed by the elastic action of the elastomer material by forming the flow path main body in which both the end faces are formed by integrally molding the annular wall and the partition wall with the same elastomer material. The heat source of the heat generating body is effectively transferred to the liquid refrigerant of the heat exchanger so that the liquid refrigerant can easily absorb the heat of the heat generating body. The cooling efficiency can be improved.

In Embodiment 1 of this invention, it is a cross section of the use condition of a heat exchanger. It is a perspective view of the flow-path main body of a heat exchanger same as the above. It is a perspective view of a heat exchanger same as the above. It is AA sectional drawing of FIG. It is a BB sectional view of FIG. It is CC sectional drawing of FIG. In Embodiment 2 of this invention, it is a cross section of the use condition of a heat exchanger. In Embodiment 3 of this invention, it is a perspective view of the flow-path main body of a heat exchanger. It is a perspective view of a heat exchanger same as the above. It is DD sectional drawing of FIG. It is EE sectional drawing of FIG. It is FF sectional drawing of FIG. It is explanatory drawing of the use condition of a heat exchanger same as the above.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
1 to 6 show Embodiment 1 of the present invention. In FIG. 2, the flow path main body 3 is made of polyphenylene sulfide resin, polyethylene resin, polypropylene resin, polystyrene resin, polycarbonate resin, polyvinyl chloride resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyethylene na. Synthetic resin materials or rubbers and thermoplastic elastomers exemplified for thermoplastic resins such as phthalate resin, polybutylene naphthalate resin, fluorine resin, and polyether ether ketone resin, and thermosetting resins such as phenol resin an elastomeric material, a rectangular annular wall 4 having a space portion 5 which both sides are open in the vertical direction is formed. A cylindrical inlet 7 is provided on one side of the rectangular annular wall 4 and an outlet 8 is provided on the other side facing each other, and the inlet 7 and the outlet 8 are spaces of the annular wall 4. It is integrally molded with the annular wall 4 with the same synthetic resin, elastomer, or metal as the annular wall 4 so as to communicate with 5. The liquid refrigerant flows into the inlet 7 from the arrow P and flows out from the outlet 8 in the direction of the arrow Q. In the space 5, a plurality of synthetic resin materials or elastomers or metal materials similar to the annular wall 4 are used. The partition walls 6 of one piece (three pieces in the figure) are projected from the opposing inner wall surfaces at one side and the other side of the annular wall 4 and spaced apart alternately with the tip having a gap with the inner wall surface of the annular wall 4 Thus, they are integrally molded with an injection mold or the like. In this manner, the flow path main body 3 is formed with a plurality of pieces of partition walls 6 to form a flow path in which the flow path meanders in a zigzag shape. The partition wall 6 is for rectifying current in the space 5 when flowing the liquid refrigerant described later from the inlet 7 to the outlet 8 and thus may be one piece, but the number of channels is increased by using a plurality of pieces. The cooling efficiency is improved. Further, although not shown, since the liquid refrigerant can be turbulently flowed in the space 5 by forming asperities on the inner wall surface of the annular wall 4 and the side surface of the partition wall 6, the cooling efficiency can be improved.

FIG. 3 shows a thickness t obtained by closing both sides of the flow path main body 3 opened in the vertical direction, that is, the upper and lower end faces with good heat conductive materials and lids 1 and 2 made of flexible thin rectangular plates. Shows a 2-15 mm heat exchanger. The lids 1 and 2 serve as surfaces to be cooled, and metal materials such as aluminum, copper, iron and alloys thereof or metal materials such as stainless steel or the like on which the surface of the metal material is treated with a nickel film or the like Is preferable as a good heat conductive material. This preferred metal material can be a thin plate flexible, and the liquid refrigerant is pumped from the inlet 7 into the space 5 of the flow path body 3 at a pressure of 0.1 to 0.5 MPa. Also in this case, the flexibility to the extent of deformation by the pressing force (water pressure) of the liquid refrigerant flowing into the space portion 5 of the flow path main body 3 can be secured. In this way, both the upper and lower sides of the flow path main body 3 are closed by the lids 1 and 2 and the space 5 becomes a flow path, and the liquid refrigerant flows from the inflow port 7 in the arrow P direction. It flows into the space 5 of 3 and flows out from the outlet 8 in the arrow Q direction. In this case, although the flow path main body 3 in which the upper and lower end surfaces are open on both sides is closed by the lids 1 and 2, for example, one end face of the upper and lower end surfaces is closed by molding or bonding with other materials The container may be closed with the lid 1 or 2 as a surface for cooling only the open end face.

FIG. 4 is a cross-sectional view taken along the line A-A, in which the substantially central portion of the heat exchanger shown in FIG. 3 is traversed in the flow direction Q of the liquid refrigerant. The space portion 5 which is closed by being closely joined to the upper and lower end surfaces of the annular wall 4 and the upper and lower end surfaces of the partition wall 6 at 1 and 2 is formed to be the above-mentioned flow path. FIG. 5 is a cross-sectional view of the heat exchanger shown in FIG. 3 taken along the line B-B where the part where the partition wall 6 is separated from the inner wall surface of the annular wall 4 is directed to the flow direction Q of the liquid refrigerant. The space portions 5 in the three partition walls 6 respectively projecting from the inner wall surface of the opposing annular wall 4 form flow paths communicating with each other, and the liquid medium flows to the outlet 8. 6 is a cross-sectional view of the heat exchanger shown in FIG. 3 taken along the line C--C, in which the annular wall 4 is crossed at the portion of the outlet 8 toward the outflow direction Q of the liquid refrigerant. It is closely joined to the wall 4.

In order to closely bond the lid members 1 and 2 to the upper and lower end surfaces of the annular wall 4 and the upper and lower end surfaces of the partition wall 6, the lid members 1 and 2 are metal materials such as aluminum, copper, iron and their alloys A flexible thin plate is formed of a metal material such as nickel film formed on the surface or a metal material such as stainless steel, and an adhesive such as epoxy resin is used for the upper and lower end surfaces of the annular wall 4 and the upper and lower end of the partition wall 6 It is applied to the end face performed by pressure or heat and pressure by placing the lid 2 to the flow path body 3. In this case, metal materials such as aluminum, copper, iron, and alloys thereof, or metal materials such as stainless steel or the like on which the surface of the metal material is subjected to surface treatment such as nickel film formation, instead of the adhesive A flexible thin plate is formed of a laminate sheet having a heat-welded resin layer on the inner surface of the material, and the heat-welded resin layer is brought into contact with the upper and lower end faces of the annular wall 4 and the upper and lower end faces of the partition wall 6 The lids 1 and 2 may be closely joined to the upper and lower end surfaces of the annular wall 4 and the upper and lower end surfaces of the partition wall 6 by thermally welding the welding materials. The setting of the joint strength for the close jointing is selected according to the areas of the upper and lower end surfaces of the annular wall 4 and the upper and lower end surfaces of the partition wall 6 and the material of the heat welding material or adhesive. The lids 1 and 2 support the upper and lower end surfaces of the annular wall 4 and the upper and lower end surfaces of the partition wall 6 even when they are sent from the inlet 7 into the space 5 of the flow path main body 3 at a pressure of 1 to 0.5 MPa. Since it can be deformed in the space 5 by the water pressure of the liquid refrigerant flowing into the space 5 of the flow path main body 3 as an end so as not to cause liquid leakage when pressing against the heating element H, for example, The bonding strength may be such that the peel strength at the upper and lower end surfaces of the wall 4 and the upper and lower end surfaces of the partition wall 6 corresponds to 20 to 30 N / 15 mm based on JIS Z0238 (test method of heat seal soft packaging bag and semi-rigid container).

Using the heat exchanger thus formed, as shown in FIG. 1, the semiconductor element of the apparatus performing the power conversion is a heating element H, and at least one heating element H on each surface of the cover plates 1 and 2 respectively. Even in the case where the liquid refrigerant is sent from the inlet 7 into the space portion 5 of the flow path main body 3 with a pressure of 0.1 to 0.5 MPa with the pump attached (one in the present embodiment), The lids 1 and 2 of the thin plate support the upper and lower end surfaces of the annular wall 4 and the upper and lower end surfaces of the partition wall 6 in the space portion 5 by the pressing force (water pressure) of the liquid fluid in the process of the liquid refrigerant reaching from the inlet 7 to the outlet 8 Since the end can be shifted in the direction of the arrow A indicating the outward direction, that is, the heat generating body H side, the lid members 1 and 2 are in pressure contact with the surface of the heat generating body H to effectively generate heat of the heat generating body H to the liquid refrigerant of the heat exchanger It is easy to absorb the heat of the heat generating body H by causing the liquid refrigerant to transfer heat. Thereby improving the cooling efficiency. Thus, the lids 1 and 2 have a thickness of 0.05 to 0.5 mm, preferably 0.1 mm, such as aluminum, copper, iron and so as to be displaceable by pressing force (water pressure) and to have good thermal conductivity. A metal material such as these alloys or a metal material such as stainless steel or the like whose surface is treated with a nickel film or the like is used. The liquid refrigerant to be a liquid fluid is water, antifreeze, etc., and the liquid fluid includes cooling water containing microbubbles of fine bubbles of 50 μm or less in diameter and nanobubbles of ultrafine bubbles of 100 to 200 nm in diameter. The back surfaces of the lids 1 and 2 may be cleaned using cooling water. Further, the partition wall 6 is for rectifying or turbulently flowing the liquid refrigerant, and by forming the partition wall 6 with the same metal material as the cover members 1 and 2, heat generation from the cover members 1 and 2 to the liquid refrigerant is also performed. It also plays the role of a heat dissipating fin for transferring the heat of the body H, and the cooling efficiency of the heat generating body H can be improved.

Second Embodiment
Figure 7 using embodiments 1 and the same flow path body 3 (see FIG. 2), a heating element H to the heat exchanger of a different embodiment of adhering joining lid 1 and 2 in that the flow path body 3 Indicates the installed condition of use.

The lids 1 and 2 are good thermal conductive materials and made of a flexible rectangular thin plate, and have a heat-welding resin layer on the inner surface of an adhesive such as epoxy resin or metal material as in the first embodiment. Only the upper and lower end surfaces of the annular wall 4 are closely joined and the upper and lower end surfaces of the partition wall 6 are not joined using the heat-welded resin layer of the laminated sheet of the configuration. Also in this case, the setting of the joint strength to be the close joint is selected according to the area of the upper and lower end faces of the annular wall 4 and the material of the heat welding material or adhesive. As the pressure of the liquid refrigerant flowing into the space portion 5 of the flow path main body 3 can be deformed in the space portion 5 to prevent the liquid leakage when pressured to the heat generating body H, Similarly, for example, bonding strength corresponding to 20 to 30 N / 15 mm in peel strength based on JIS Z 0238 (test method for heat seal soft packaging bag and semi-rigid container) at upper and lower end surfaces of annular wall 4 and upper and lower end surfaces of partition wall 6 If it is

At least one heat generating body H is attached to the lids 1 and 2 of the heat exchanger thus formed, and the liquid refrigerant flows through the heat exchanger, so that the liquid refrigerant becomes the upper and lower end surfaces of the partition wall 6 and the lid The lids 1 and 2 also move between the bodies 1 and 2, and the lids 1 and 2 are displaced in the direction of the heating element H (the direction of the arrow B in FIG. 7) showing the outward direction with the annular wall 4 as a support end. Since the size of the transition to the upper and lower end faces of the annular wall 4 and the upper and lower end faces of the partition wall 6 as in the first embodiment is larger than in the case of close bonding It is easy to be pressed uniformly and cooling efficiency is good.

(Embodiment 3)
8 to 13 show Embodiment 3 of the present invention.

In FIG. 8, as in the first or second embodiment, the flow path main body 31 is formed of a polyphenylene sulfide-based resin so that a rectangular annular wall 41 having space portions 51 opened in both vertical directions, that is, upper and lower end surfaces is formed. Polyethylene resin, polypropylene resin, polystyrene resin, polycarbonate resin, polyvinyl chloride resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyethylene naphthalate resin, polybutylene naphthalate resin, fluorine resin It is made of a synthetic resin material exemplified by a thermoplastic resin such as a polyetheretherketone resin or a thermosetting resin such as a phenol resin or an elastomer material such as rubber or a thermoplastic elastomer. Unlike the first or second embodiment, the rectangular annular wall 41 is provided with a tubular inlet 7 and an outlet 8 at one side thereof. The inlet 7 and the outlet 8 are made of the same synthetic resin or elastomer as the annular wall 41 so that the liquid refrigerant flows in from the arrow P and communicates with the space 51 of the annular wall 41 so that the refrigerant can flow out in the arrow Q direction. It is made of metal or metal. Furthermore, in the space 51 formed by the annular wall 41, a partition wall of a plurality of pieces (combination of 3 pieces and 4 pieces in the figure) made of the same synthetic resin material, elastomer or metal as the annular wall 41 61 is integrally molded such as injection mold such that and the tip alternately spaced with protrudes from inner wall surfaces opposed to each other in one side and the other side of the annular wall 41 having an inner wall surface and the clearance of the annular wall 41 There is. In this manner, the flow path main body 31 is formed with the flow path in which the plurality of pieces of partition walls 61 meander in a zigzag shape. Since this partition wall 61 is for rectifying current in the space 51 when flowing the liquid refrigerant from the inlet 7 to the outlet 8 as in the first or second embodiment, it may be a single piece, but a plurality of pieces As a result, the number of flow paths is increased, and the cooling efficiency is improved. Further, although not shown, since the liquid refrigerant can be made to turbulently flow in the space 51 by forming asperities on the side surfaces of the annular wall 41 and the partition wall 61, the cooling efficiency can be improved.

FIG. 9 shows a thickness t of 2 to 2 obtained by closing both sides of the flow path main body 31 opened in the vertical direction with a good heat conductive material and lids 1 and 2 formed of flexible thin rectangular thin plates. Shown is a 15 mm heat exchanger. The material of the lids 1 and 2 is the same as that of the first or second embodiment, but the arrangement of the inlet 7 and the outlet 8 in the channel body 31 opened in the vertical direction is opposite in the first or second embodiment It has been arranged in a horizontal arrangement. Although both sides of the flow path main body 31 are opened in the vertical direction as in Embodiment 1 or 2, for example, a container having a bottom is closed by closing one end face of the upper and lower end faces by molding or bonding with another material. Alternatively, only the open end face may be closed by the lid 1 or 2 of the thin plate as a surface to be cooled.

FIG. 10 is a DD cross-sectional view of the heat exchanger shown in FIG. 9 across substantially the center of the heat exchanger toward the inlet 7 and the outlet 8; A space portion 51 which is closed by the members 1 and 2 and becomes the flow path is formed. The lids 1 and 2 are metal materials such as aluminum, copper, iron and their alloys, or metal materials such as nickel film surface-treated on the surface of the metal material or metal materials such as stainless steel and an adhesive such as epoxy resin. The heat-welded resin layer is heat-deposited on the upper and lower end faces of the annular wall 41 as a laminate sheet having a heat-welded resin layer on the inner surface thereof by pressing or heating and pressurizing the upper and lower end faces of the annular wall 41 It is welded and closely bonded to the upper and lower end surfaces of the annular wall 41. In the present embodiment, the lids 1 and 2 are closely bonded only to the upper and lower end surfaces of the annular wall 41 as in the second embodiment, but also closely bonded to the upper and lower end surfaces of the partition wall 61 as in the first embodiment. You may As in the second embodiment, the setting of the bonding strength to be the close bonding is selected according to the area of the upper and lower end surfaces of the annular wall 41 and the material of the heat welding material or adhesive. Also when the lids 1 and 2 are fed from the inlet 7 into the space 51 of the flow path main body 31 at a pressure of 0.5 MPa, the space of the flow path main body 31 with the upper and lower end faces of the annular wall 41 as supporting ends. The pressure (water pressure) of the liquid refrigerant flowing into the portion 51 can be deformed in the space portion 51 so that no liquid leakage occurs when pressing against the heat generating body H. For example, the upper and lower sides of the annular wall 41 It is sufficient if the bonding strength corresponds to 20 to 30 N / 15 mm in peel strength based on JIS Z 0238 (test method for heat seal soft packaging bag and semi-rigid container) at the end face and upper and lower end faces of the partition wall 61.

FIG. 11 is a cross-sectional view taken along the line E-E, in which the portion of the partition wall 61 spaced from the inner wall surface of the annular wall 41 of the heat exchanger shown in FIG. The space portions 51 in the partition wall 61 of 31 are formed with flow paths communicating with each other, and the liquid refrigerant flows from the inflow port 7 to the outflow port 8. 12 is a cross-sectional view of the heat exchanger shown in FIG. 9 taken along the line F-F, in which the annular wall 41 is crossed at the inlet 7 and the outlet 8 toward the inlet 7 and the outlet 8; 1 and 2 are closely joined to the annular wall 41.

Using the heat exchanger thus formed, as shown in FIG. 13, the semiconductor element of the apparatus performing the power conversion is a heating element H, and at least one heating element H on each surface of the cover plates 1 and 2 respectively. By flowing the liquid refrigerant from the inflow port 7 to the outflow port 8 in a state where it is mounted (one in the present embodiment), in the process, the liquid refrigerant is between the upper and lower end surfaces of the partition wall 61 and the lids 1 and 2 The cover materials 1 and 2 of the thin plate are shifted toward the direction of the arrow C indicating the outward direction with the annular wall 41 as a supporting end by the pressing force (water pressure) of the liquid refrigerant, ie, the cover material 1, 2 makes pressure contact with the surface of the heat generating body H to effectively transfer the heat generation of the heat generating body H to the liquid refrigerant of the heat exchanger, and the liquid refrigerant easily absorbs the heat generation of the heat generating body H to improve the cooling efficiency it can. Thus, the lids 1 and 2 have a thickness of 0.05 to 0.5 mm, preferably 0.1 mm, such as aluminum, copper, iron and so as to be displaceable by pressing force (water pressure) and to have good thermal conductivity. A metal material such as these alloys or a metal material such as stainless steel or the like whose surface is treated with a nickel film or the like is used. The liquid refrigerant to be a liquid fluid is water, an antifreeze liquid, etc., as in Embodiment 1 or 2, cooling water containing microbubbles of fine bubbles of 50 μm or less in diameter or ultrafine bubbles of 100 to 200 nm in diameter The back surfaces of the lids 1 and 2 may be cleaned using cooling water containing nanobubbles. Further, the partition wall 61 is for rectifying or turbulently flowing the liquid refrigerant, and furthermore, heat dissipation from the lid members 1 and 2 to the liquid refrigerant is realized by configuring the partition wall 61 with a metal material. It also serves as a fin and can improve the cooling efficiency of the heat generating body H.

Since the heat exchanger of the present invention can be manufactured thin and light and inexpensive so that heat exchange can be performed efficiently, it particularly cools electronic parts such as semiconductor elements as described above, and further Can be used as an application for cooling the main body of the sealed electrochemical device to bring the sealed electrochemical device such as a capacitor having an electrolytic solution or a lithium battery to a predetermined usable temperature.

1, 2 lids 3, 31 flow path main body 4, 41 annular wall 5, 51 space portion 6, 61 partition wall

Claims (2)

In the heat exchanger which cools the heating element by flowing a liquid refrigerant in a zigzag flow path, the zigzag flow path is from the inner wall surface of an annular wall having both inlet and outlet ends open. A plurality of pieces of partition walls are protruded toward the opposing inner wall surface, and the tip ends thereof are alternately spaced apart from the inner wall surface of the annular wall so as to form a gap between the annular wall and the partition wall and Spaces between the separated partition walls are formed to be in communication with the inlet and outlet, and the annular wall and the partition walls are integrally formed of a synthetic resin material or an elastomeric material, thereby forming the inlet and outlet. Forming a flow path main body having a space formed by the flow path in which the both end faces are open and the zigzag meandering flow path inside, and a heating element is attached to the lid member closely joined to the flow path main body Liquid refrigerant into the Heat exchanger thin lightweight cooling the heat generating element by flowing into the space toward the outlet from one end face of the flow path body is closed by a lid member, the other end face the lid Closed by a material or other material, and the cover material is formed of a thin plate having good thermal conductivity and is flexible and closely joined to the end faces of the annular wall and the partition wall , When the liquid refrigerant is sent from the inflow port toward the outflow port to the space portion of the flow path main body, the lid member is at a pressure that the liquid refrigerant pushes, and the respective end faces of the annular wall and the partition wall A heat exchanger characterized in that it can be displaced outward in the space portion with the support end as a support end. The heat exchanger according to claim 1, characterized in that the annular wall and the partition wall are integrally formed of the same elastomeric material to form a flow path main body having open ends .

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