JP6545540B2 - Roll body and method of manufacturing the same, package and method of manufacturing the same, and method of transporting the package - Google Patents

Description

  The present invention relates to a roll formed by rolling a laminate having at least a base material layer, a mask pattern, and a photosensitive resin layer in a roll, a method of manufacturing the same, a package and a method of manufacturing the package, and a method of transporting the package. About.

  In recent years, with the development of thin film coating technology, it has become possible to manufacture a laminate including a photosensitive resin layer having a thickness of nanometer size to several micrometers. By thinning the film, various advantages such as miniaturization, weight reduction, resource saving and the like can be obtained. The present inventors have developed, for example, a laminate including a fine pattern mask as described in Patent Document 1. The photosensitive resin layer which has a thickness of nanometer size exists in the said laminated body, this resin layer is bonded to the to-be-processed object (substrate) which is a process target, and it processes. However, as the thickness of the photosensitive resin layer becomes thinner, a problem that did not occur in the conventional photosensitive resin layer having a thickness of several tens of micrometers or more surfaced.

  The first problem is that the fine pattern mask is easily broken. The fine pattern mask to be contained is broken when pressure is applied to the laminate, but the thickness of the photosensitive resin layer has been made into a thin film of several tens of micrometers by being a thin film of nanometer size to several micrometers in size. Compared to the prior art, the influence of pressure on the fine pattern mask is intensified and the fine pattern mask is easily broken.

  The second problem is that the level of non-landing which was not a problem in the photosensitive resin layer of several tens of micrometers in thickness causes quality defects in the photosensitive resin layer of nanometer to several micrometers in size. It is said that. For example, in the case where a photosensitive resin layer is disposed as an adhesive layer on the outermost surface of a laminate, and is bonded to a corresponding base material and cured, if there is inland, bonding failure occurs, and the photosensitive resin layer and the base material As a result of the occurrence of locations where the two do not adhere properly, local unevenness occurs in the patterning of the substrate, leading to poor quality. As described above, when using a photosensitive resin layer of nanometer size to several micrometers in thickness, even a minute uneven surface is greatly affected as compared with a photosensitive resin layer of several tens of micrometer size, and as a result, the quality It is easy to lead to a defect.

  The main factor causing non-landing is the winding pressure when the laminate is processed into a roll. In order to suppress the occurrence of non-landing, it is also possible to solve by making the laminate into a single sheet. However, roll-to-roll productivity is higher than single-wafer productivity, and this advantage is lost when adopting single-wafer. There is a method of making a roll body by weakening a winding pressure as a method of winding in a roll shape and preventing non-landing. However, if this is done, the occurrence of non-landing is suppressed, but another problem arises that the winding shift is likely to occur.

  When using a roll body, a film is unwound from a roll body and it bonds together to a to-be-processed object. This process is generally performed using an apparatus (hereinafter, bonding apparatus) in consideration of productivity. At this time, if there is a level of winding displacement that causes an obstacle in use in the apparatus due to shocks and vibrations during storage or transport of the roll, removal of the winding displacement when using the roll A process is required. As a result, there are risks such as the occurrence of landslides, scratches on the surface, and the adhesion of foreign matter.

  Patent Document 2 proposes a packing form and a packing method for absorbing vibration and impact when transporting a roll-shaped film. However, in the case of a laminate including a film of a nanometer size to a few micrometers in thickness, in order to form a roll without causing lands, compared to a laminate including a film of a thickness of several tens of micrometers It is necessary to process it into a roll shape with low tension. Therefore, it is easy for a gap to occur. For example, even if it arrange | positions a foaming buffer material like patent document 2, when the fixation is not enough, although the wound to the end surface of a laminated body can be prevented, a winding shift prevention effect is not enough.

International Publication No. 2012/176728 brochure International Publication No. 2013/103074 Pamphlet

  The present invention has been made in view of the above-described point, and a roll body in which a laminate including a photosensitive resin layer having a thickness of nanometer size to several micrometers size is wound in a roll is compared to the prior art. It is an object of the present invention to provide a roll body capable of suppressing breakage of a fine pattern mask and securing high quality, and a method of manufacturing the same.

  Furthermore, it is possible to provide a package, a manufacturing method thereof, and a method of transporting the package, which can effectively suppress the expansion of the winding deviation and prevent the deterioration of the quality when storing and transporting the roll body. With the goal.

  As a result of intensive studies and repeated experiments, the inventors of the present invention generate minute winding deviations that do not cause any practical problems when winding a laminate having a thin photosensitive resin layer to form a roll body. The roll shape was found to disperse the pressure applied to the surface of the laminate. Furthermore, the structure of the package with respect to the roll body was improved in order to prevent the winding displacement from expanding during storage and transport of the roll body. That is, the present invention is as follows.

The present invention is a roll body in which a laminate having at least a base material layer, a mask pattern, and a photosensitive resin layer is wound in a roll, and the surface of the mask pattern and the space between the mask patterns are the above. The ratio (R / t) of the surface roughness R of the roll end surface to the minimum thickness t is 500, where the minimum thickness t is defined as the thinnest thickness of the photosensitive resin covered with the photosensitive resin layer. It is characterized in that the surface roughness R is larger than 70 mm. Thereby, the dispersion of the pressure applied to the surface of the laminate can be promoted, the destruction and the like of the mask pattern can be suppressed, and high quality can be ensured.

  In the present invention, the ratio (R / t) is preferably 1000 or more and 10,000,000 or less. Thereby, the dispersion of the pressure applied to the surface of the laminate can be promoted more effectively. Moreover, it is preferable that the said surface roughness R is 50 mm or less.

  In the present invention, it is preferable that the laminate further includes a protective layer, and the mask pattern and the photosensitive resin layer be interposed between the base layer and the protective layer. Thereby, the surface layer of a laminated body can be protected appropriately.

  In the present invention, preferably, the laminate further includes a cured resin layer located between the mask patterns. It is preferable that the cured resin layer is formed with a concavo-convex structure capable of containing the mask pattern. Thereby, the mask pattern can be properly positioned.

  In the present invention, the ratio (d / w) of the diameter d of the roll body to the width w of the roll body is preferably 1 or more and 10 or less.

  The present invention is also a manufacturing method of the roll body according to any one of the above, wherein a first step of applying a cured resin which is a raw material of a cured resin layer on a base material layer, and a mold having a micro uneven structure. The second step of pressing in a cured resin and curing in that state to form a cured resin layer, removing the mold, filling the raw material of the mask pattern into the irregularities of the cured resin layer, curing the raw material of the mask pattern, and mask A third step of forming a pattern, a fourth step of applying and drying a resin as a raw material of a photosensitive resin layer on a mask pattern, and bonding a protective layer on the photosensitive resin layer to obtain a laminate And five steps.

  In the present invention, it is also possible to wind the base layer around a core and to carry out the subsequent steps by roll-to-roll.

  Moreover, the package in the present invention includes the roll according to any of the above, a cover covering at least the roll surface, a holder disposed on both sides of the roll end face, and a position between the roll and the holder. And a shock absorbing material. As a result, during storage or transport of the roll body, it is possible to appropriately prevent the winding displacement from expanding.

  In the present invention, preferably, the covering is covered from the surface of the roll to the end face of the roll, and the covering, the cushioning material and the holder are arranged in this order from the end face side of the roll.

  Further, in the present invention, the cover preferably contains a light shielding material. Thereby, the light shielding property to the photosensitive resin layer can be improved.

  Further, in the present invention, it is preferable that the light shielding material has at least a light shielding rate of 50% or more.

Further, in the present invention, it is preferable that the covering is made of a material having a water vapor transmission rate of 10 g / m ² · 24 h or less at 40 ° C and 90% RH.

  Further, in the present invention, the buffer material is preferably a polyolefin. Moreover, it is preferable that the thickness of the said shock absorbing material is 2 mm or more.

  In the present invention, it is preferable that the shock absorbing material be in contact with 90% or more of the area of the end face of the roll. This makes it possible to appropriately prevent the expansion of the winding deviation.

  Moreover, in this invention, it is a package body for transporting the roll intermediate body manufactured at each process as described in the manufacturing method of the roll body as described above, said roll intermediate body, the said coating body, and the said holder, And the above-mentioned shock absorbing material. Thereby, during storage or transport of the roll intermediate body, it is possible to appropriately prevent the winding deviation from expanding.

  In the method of producing a package according to the present invention, the method further comprises the steps of: covering at least the roll surface of the roll body described above with a covering; disposing a cushioning material on both sides of the roll end face; And a step of disposing a holder at the step of fixing the roll body and the shock absorbing material. Thereby, at the time of storage and transport of a roll object, it is possible to simply and appropriately manufacture a package which can appropriately prevent the winding displacement from expanding.

  The present invention is also a method for producing a package using the above-described roll intermediate, comprising the steps of: covering at least the roll surface of the roll intermediate with a covering; and disposing a buffer material on both sides of the roll end face And disposing a holder on both sides of the cushioning material to fix the roll intermediate and the cushioning material. In this way, it is possible to simply and appropriately manufacture a package that can appropriately prevent an increase in winding deviation during storage and transport of the roll intermediate.

  The method of transporting the package in the present invention is characterized in that the package is transported at 30 ° C. or less and 60% RH or less. Thereby, the quality of the roll body can be effectively prevented from deteriorating due to temperature or humidity.

  According to the roll body of the present invention, the dispersion of the pressure applied to the surface of the laminate can be promoted, and even in the roll body of the film in which the photosensitive resin layer is thin and the mask pattern is easily broken, the destruction and the like of the mask pattern can be suppressed. Quality can be ensured.

  Further, according to the package of the present invention, it is possible to appropriately prevent the winding displacement from being enlarged when storing and transporting the roll body.

It is a schematic diagram of the laminated body in embodiment of this invention. It is a schematic diagram of the laminated body in embodiment different from FIG. FIG. 3A is a perspective view of the roll body in the embodiment of the present invention, and FIG. 3B is a schematic cross-sectional view showing the roll end face of the roll body in the embodiment of the present invention. It is a perspective view which shows the manufacturing process of the package in embodiment of this invention. It is a perspective view which shows the manufacturing process of the package body in embodiment different from FIG. It is a cross-sectional schematic diagram of the package formed in FIG. It is a cross-sectional schematic diagram of the package formed in FIG. FIG. 8A is a front view of the holder in the embodiment of the present invention, and FIG. 8B is a side view of the holder. It is a schematic diagram at the time of accommodating the package in this invention in a case. It is process drawing for demonstrating the method for forming a fine pattern in a to-be-processed object using the laminated body shown in FIG. It is process drawing for demonstrating the method for forming a fine pattern in a to-be-processed object using the laminated body shown in FIG.

  FIG. 1 is a schematic view of a laminate in the embodiment of the present invention. As shown in FIG. 1, a laminate (multilayer laminate) 1 is a flexible sheet configured to have a base material layer 4, a mask pattern 2, and a photosensitive resin layer 3.

  As shown in FIG. 1, the mask pattern 2 is formed on the surface of the base layer 4. The mask pattern 2 may be formed directly on the surface of the substrate layer 4 or may be formed via another layer. The surface of the mask pattern 2 and the space between the mask patterns 2 are covered with the photosensitive resin layer 3. As shown in FIG. 1, the surface of the photosensitive resin layer 3 is preferably a substantially flat surface.

  The flexible laminate 1 shown in FIG. 1 is wound in a roll to form a roll body 7 shown in FIG. 3A. By the way, there is a problem that the fine mask pattern 2 is broken when it is bonded to the object to be processed which is to be processed while pressure is applied to the laminate 1 or non-alignment occurs. In addition, even if the laminate 1 alone is a fine uneven land where bonding failure does not occur, if this overlaps with several tens of layers, spots where pressure is concentrated on the laminate 1 can be formed, and the pattern of that portion is May be destroyed locally. In order to prevent the occurrence of such spots, it is effective to prevent pressure from being applied to the laminate 1.

  Therefore, in the present embodiment, as shown in FIG. 3A, when forming the roll body 7 by winding the laminate 1 in a roll, the pressure applied to the laminate 1 is dispersed. It was decided to generate a winding gap. In order to prevent the occurrence of non-landing, it is necessary to reduce the tension at the time of winding the laminate 1, and by thus reducing the tension, the winding of the roll body 7 becomes loose, and the winding slippage due to impact or vibration It is easy to generate However, at this time, if the winding deviation is expanded to a range where there is a problem, the winding deviation eliminating step becomes necessary when pasting using the device, and the risk of occurrence of non-landing, scratches on the surface, adhesion of foreign matter, etc. Will occur. Therefore, it is necessary to produce a winding gap in the range which does not have trouble in pasting using a device in roll shape.

  That is, in this embodiment, (1) winding deviation is generated in the range which does not have trouble in pasting using a device to roll body 7, (2) a state where winding deviation of roll body 7 is not expanded by impact or vibration. It must be able to achieve a maintainable packaging state. The details of (1) and (2) will be described below. First, the point which makes a winding gap generate | occur | produce in the range which does not have trouble in the bonding which used the apparatus to (1) roll body 7 is described.

  If the photosensitive resin layer 3 is thin in the winding displacement of the roll body 7 in the present embodiment, the fine mask pattern 2 is more easily damaged. Therefore, it is necessary to disperse the winding pressure, but if the winding displacement is made too large, the winding displacement eliminating step is required as described above, and another problem occurs. Therefore, in the present embodiment, the relationship between the winding deviation and the thickness of the photosensitive resin layer 3 is defined as follows. The winding deviation is defined as the surface roughness R of the roll end face 7a as shown in FIG. 3B. FIG. 3B is a schematic cross-sectional view showing the roll end surface 7 a of the roll body 7. As shown to FIG. 3B, although the some laminated body 1 is wound and the roll body 7 is formed, the level | step difference has arisen on the roll end surface 7a by winding shift. This is shown as surface roughness R. The surface roughness R can be represented by an arithmetic mean roughness Ra.

  In addition, the thinnest thickness of the photosensitive resin layer 3, that is, the thickness of the photosensitive resin most sensitive to the influence of pressure is defined as t. The minimum thickness t is shown in FIG. In the present embodiment, the ratio (R / t) of the surface roughness R of the roll end surface 7a to the minimum thickness t of the photosensitive resin layer 3 is defined.

  For example, when the laminate 1 having the photosensitive resin layer 3 having the minimum thickness t of 100 nm is wound in a roll while causing a winding deviation such that the surface roughness R of the roll end face 7a is 1 mm, the ratio (R / t) is 10000. When the ratio (R / t) decreases, the surface roughness R decreases, that is, the effect of pressure dispersion due to winding deviation decreases, or the minimum thickness t of the photosensitive resin layer 3 increases and pressure dispersion occurs. Represents a smaller need to consider. On the other hand, when the ratio (R / t) becomes large, the surface roughness R becomes large, that is, although pressure dispersion works effectively, it means that winding deviation approaches a practically problematic range.

  In consideration of the above situation, the ratio (R / t) needs to be larger than 500. The ratio (R / t) = 500 is Comparative Example 1 shown in the experimental results described later, and destruction of a fine mask pattern was observed. In the present embodiment, the ratio (R / t) is preferably 1,000 or more and 10,000,000 or less. It is known that any of the following examples is included in this range, and pattern destruction can be prevented. Further, in consideration of the allowable amount of winding deviation, 1000000 or less is more preferable, and 100000 or less is more preferable. Moreover, in consideration of the effectiveness of pressure dispersion, 5000 or more is more preferable, and 10000 or more is more preferable. These upper and lower limit values can be arbitrarily combined according to the features to be emphasized.

  Further, in addition to the above ratio (R / t), the surface roughness R of the roll end face 7a is set to a value smaller than 70 mm. That is, even if the above ratio (R / t) is satisfied, if the surface roughness R is too large, a winding displacement eliminating step is required, and there is a risk of occurrence of inland separately, scratches on the surface, adhesion of foreign matter, etc. Increase. In addition, surface roughness R = 70 mm is comparative example 2 shown in the below-mentioned experiment result, and when pasting to processing object using a pasting device, deviation of the position of processing object becomes intense and it pastes appropriately It turned out that it can not be implemented.

  The ratio (R / t) and the surface roughness R are not only at the manufacturing stage of the roll body 7 but also after the roll body 7 is packed and transported etc. until it is used after removing the packing ((7) It is necessary that R / t) and surface roughness R be maintained within the above ranges.

  The minimum thickness t of the photosensitive resin layer 3 is preferably about 1 nm to 5000 nm. Moreover, it is preferable that surface roughness R of the roll end surface 7a is about 0.1 mm-70 mm. Further, the packing form in the present invention is particularly suitably used for the mask pattern 2 having a width dimension of about 1 nm to about 1000 nm, a height dimension of about 1 nm to about 1000 nm, and a pitch of about 10 nm to about 10000 nm.

  As a method of generating the winding displacement of the roll body 7, a method such as applying fine vibration when winding the laminate 1 or vibrating the winder and / or the winder can be considered. In addition, even if unintended winding displacement of the above-mentioned numerical range occurs, it is included in the present invention.

  As shown in FIG. 1, the laminate 1 of the present embodiment includes at least a base material layer 4, a mask pattern 2, and a photosensitive resin layer 3. The base material layer 4, the mask pattern 2 and the photosensitive resin layer 3 may be adjacent to each other, and one or more layers having other functions may be interposed therebetween. The mask pattern 2 may be completely independent of the photosensitive resin layer 3 or may be contained as shown in FIG.

  The laminate 1 may include one or more layers having other functions. The layer having another function is preferably a layer obtained by curing a photosensitive resin from the viewpoint of ease of layer formation and homogeneity. The schematic diagram which added the said layer is shown in FIG. FIG. 2 is a schematic view of a laminate in an embodiment different from that of FIG.

  The laminate 1 shown in FIG. 2 includes a base material layer 4, a mask pattern 2, a cured resin layer 5 located between the mask patterns 2, and a photosensitive resin layer 3 located on the surface of the cured resin layer 5; And a protective layer 6 located on the surface of the photosensitive resin layer 3.

  The cured resin layer 5 preferably has a concavo-convex structure capable of accommodating the mask pattern 2 as an application for determining the position of the mask pattern 2. When a plurality of cured resin layers 5 are present, the composition of each layer may be the same or different.

  The protective layer 6 shown in FIG. 2 is a layer provided to protect the surface layer until the laminate 1 is used.

  As shown in FIG. 2, the mask pattern 2, the cured resin layer 5 and the photosensitive resin layer 3 are interposed between the base layer 4 and the protective layer 6. With such a laminated structure, the position of the mask pattern can be appropriately determined.

  The materials used for the base material layer 4 and the protective layer 6 can be selected freely without particular limitation as long as they can be formed into a roll shape and can be self-supporting materials. In general, a resin film is suitably used, and more specifically, a PET film, a TAC film, a COP film, a PE film, a PP film and the like can be mentioned.

  Moreover, you may perform some processes to the base material layer 4 and the protective layer 6 to be used as needed. In particular, it is preferable that the material used for the protective layer 6 is one that is easy to peel off at the time of use, and therefore, the one obtained by releasing the surface of the material is suitably used. Moreover, when both the base material layer 4 and the protective layer 6 are materials which are extremely poor in elasticity, when it is made into a roll shape, the defect that one side peels off easily occurs. From such a point of view, it is preferable that at least one of the base material layer 4 and the protective layer 6 be a material having stretchability that can follow the other.

  As the photosensitive resin layer 3, for example, a general resin containing an acrylic resin, a methacrylic resin, an epoxy resin or the like as a main component can be used, but it needs to be able to be formed with a thickness of at least nanometer size. Further, although the same resin as the photosensitive resin layer 3 can be used for the cured resin layer 5 having a concavo-convex structure capable of containing the mask pattern 2, it is used for nanoimprinting etc. in order to maintain a fine concavo-convex structure. It is preferred to use those of the components.

  Although a material having desired resistance can be selected as a material of the mask pattern 2, for example, as a material that can be used as a mask for dry etching, a material containing the following sol-gel material is suitably used. Sol-gel materials are a group of compounds that are cured and hardened by the action of heat and catalyst, causing hydrolysis and polycondensation, such as metal alkoxides, metal alcoholates, metal chelate compounds, halogenated silanes, liquid glasses, spin-on glasses, etc. Point to the reactant.

  For example, the laminate 1 is formed as follows. That is, as a first step, a cured resin which is a raw material of the cured resin layer 5 is applied onto the base material layer 4. In the second step, a mold having a fine concavo-convex structure is pressed against the cured resin and cured in that state to form the cured resin layer 5. In the third step, the mold is removed, the raw material of the mask pattern 2 is filled in the unevenness of the cured resin layer 5, and the raw material of the mask pattern 2 is hardened to form the mask pattern 2. In the fourth step, a resin as a raw material of the photosensitive resin layer 3 is applied onto the mask pattern 2 and dried. In the fifth step, the protective layer 6 is bonded onto the photosensitive resin layer 3 to obtain a laminate 1.

  Subsequently, the laminate 1 obtained in this manner is wound around a core 8 (see FIG. 3A) and rolled. Alternatively, it is preferable to perform each of the above steps by roll-to-roll from the state in which the base material layer 4 is wound around the core 8 because mass productivity can be secured.

  When each of the above steps is performed by roll-to-roll, each step may be performed in the same manufacturing site or in different manufacturing sites. In the case of carrying out at different manufacturing sites, it is necessary to transfer the roll intermediate produced at each step between the manufacturing sites. Here, the roll intermediate refers to the state from the production start state of the roll body to the step immediately before the roll body is completed.

  As shown in FIG. 3A, when the diameter of the roll body 7 is d and the width is w, the ratio (d / w) is preferably 0.1 or more and 10 or less. When the width w of the roll body 7 is smaller than the diameter d of the roll body 7, the frictional force between the laminates 1 stacked in the winding becomes small, so that the winding displacement easily occurs. However, when the ratio (d / w) is too large, it becomes difficult to wind the laminate 1 in a roll while securing a predetermined surface roughness R. Therefore, in the present embodiment, the ratio (d / w) is preferably in the range of 0.1 to 10.

  Here, the roll 7 usually refers to a form in which the cross section is wound in a circular shape, but the form depends on the shape of the core 8 located at the center. The cross section may be elliptical as well as circular.

  Next, (2) An embodiment will be described in which the above-described roll body 7 is packaged so that the winding displacement of the roll body 7 is not increased by impact or vibration.

  FIG. 4: is a perspective view which shows the manufacturing process of the package in embodiment of this invention. 6 is a cross-sectional schematic view of the package formed in FIG.

  As shown in FIGS. 4 and 6, the package 10 includes the roll 7, the cover 11 covering the roll 7, the cushioning material 12 applied to the roll end surface 7 a of the roll 7, and the cushioning material 12. A holder (core holder) 13 is provided which is disposed on both sides and fixes the roll body 7 and the shock absorbing material 12.

  The cover 11 is formed to cover at least the roll surface 7 b of the roll body 7. As shown in FIG. 4A, the cover 11 is in the form of a tube, and a through hole 11 a penetrating in the center of the cover 11 is provided.

  The covering 11 may be made of a general resin such as polyolefin. The role of the cover 11 is mainly used for antifouling and light shielding. From such a point of view, the covering 11 preferably has a size that covers at least the entire area of the roll surface 7b of the roll body 7, and additionally, the covering 11 can be covered so as to cover the entire area of the roll end face 7a. More preferably, the size is longer than the width of the roll body 7.

  As shown in FIG. 4A, the roll body 7 is inserted into the through hole 11 a of the cover 11. Thereby, at least the roll surface 7 a of the roll body 7 can be appropriately covered by the covering 11. In addition, after the length of the cover 11 is made longer than that of the roll body 7 and the roll body 7 is positioned substantially at the center of the cover body 11, the end face 7a of the roll is appropriately covered by bending both ends of the cover body 11 it can. As shown in FIG. 6, the remaining portion of the cover 11 may be inserted into the hollow portion of the core 8, or the opening of the cover 11 may be closed by thermocompression bonding or the like. Since the method of inserting the opening of the cover 11 into the hollow portion of the core 8 is simple and not sealed, it is advantageous in that it is not affected by changes in air pressure during storage and transportation. On the other hand, the method of closing the opening of the cover 11 by thermocompression bonding etc. has the advantage that the roll 7 can be sealed and high dust resistance can be exhibited. It is preferable to appropriately select in consideration of the above advantages. Although not particularly illustrated, in FIGS. 4B to 4D and FIG. 5 described later, the surface of the roll body 7 is covered with a covering 11.

  In addition, it is desirable that the cleanliness of the inner surface of the cover 11 particularly on the side in contact with the roll body 7 be high. The degree of cleanliness required may be appropriately determined depending on the application of the laminate 1. Examples of methods for improving the degree of cleanliness include static elimination of the covering 11, wiping, removal of dust by an adhesive roll, and the like. Further, in order to make it difficult for dust to adhere to the cover 11, it is preferable to use a conductive material as the material of the cover 11.

  Further, the cover 11 preferably contains a light shielding material for light shielding. For example, the cover 11 is colored for light shielding, and is particularly colored in black or near dark green, dark blue, dark red, etc., or a metal such as aluminum is coated on the surface of the cover 11. It is preferable that it is vapor deposited. As the light shielding performance, it is preferable that the wavelength at which the photosensitive resin layer 3 reacts can be shielded 50% or more, more preferably 80% or more, and particularly preferably 90% or more. Furthermore, by using the cover 11 made of the low moisture permeability material, the roll body 7 can be prevented from being exposed to moisture.

  The cover 11 may be a single layer or multiple layers. It is preferable to overlap and use a plurality of coverings 11 because the light shielding property, the antifouling property and the like are improved. Under the present circumstances, you may overlap and use the coating body 11 which has the same characteristic, or, for example, superposing each coating body 11 which divided the function into the coating body 11 for light shielding, and the coating body 11 for antifouling | staining You can also.

  In consideration of the above-mentioned circumstances, as a material of the covering 11, a polyolefin in which aluminum is vapor-deposited or a polyolefin in which a carbon filler is introduced to enhance the conductivity is particularly preferably used.

  The cover 11 covers at least the roll surface 7b of the roll body 7, and the cover 11 is not limited to the tubular shape as shown in FIG. 4A. For example, a sheet-like covering can be wound on the roll surface 7b of the roll body 7 to cover the roll surface 7b.

  Next, the shock absorbing material 12 shown in FIG. 4B and FIG. 6 is provided to prevent the expansion of the winding deviation at the roll end surface 7 a of the roll body 7. The shock absorbing material 12 is preferably light in weight, hard to generate dust, and has a certain degree of rigidity and elasticity. From such a viewpoint, low density resins are preferable, and low density polyolefins are particularly preferably used. The thickness of the cushioning material 12 is preferably 0.5 mm or more, more preferably 1 mm or more, particularly preferably 2 mm or more, and very preferably 5 mm or more. On the other hand, the thickness of the buffer material 12 is preferably 100 mm or less, preferably 30 mm or less, and particularly preferably 15 mm or less, from the viewpoint of weight saving and resource saving of the packaging form.

  The cushioning material 12 preferably covers substantially the entire area of the roll end surface 7 a of the roll body 7. As shown in FIG. 4B, a through hole 12a is provided at the center of the cushioning material 12. The through hole 12 a is a hole for inserting the central cylinder 16 of the holder 13. The cushioning material 12 preferably has a donut shape whose diameter is slightly larger than the diameter of the roll end surface 7 a of the roll body 7. Further, it is preferable that the through holes 12a of the buffer material 12 be large enough to allow the central cylinder 16 to pass through smoothly when inserting the central cylinder 16 of the holder 13 shown in FIG. 4C in order to prevent dust generation. On the other hand, when the diameter of the shock absorbing material 12 becomes larger than the length of one side of the ground portion 14 of the holder 13, the shock absorbing material 12 is grounded, so the diameter of the shock absorbing material 12 is smaller than the length of one side of the ground portion 14 of the holder 13. Is preferred. From the above point of view, the buffer material 12 preferably covers 50% or more of the area of the roll end surface 7a of the roll body 7, more preferably 70% or more, and 90% or more. Is particularly preferred.

  As shown in FIGS. 4A to 4C and FIG. 6, a hollow cylindrical core 8 is provided at the center of the roll body 7, and the length of the core 8 is longer than the length of the roll body 7. In this case, as shown in FIG. 4C and FIG. 6, it is preferable to fit the cushioning material 12 into the protruding portion of the core 8 because it is stable. In addition, when the thickness of the shock absorbing material 12 is larger than the protruding length of the core 8, the shock absorbing material 12 can be brought into close contact with the roll end surface 7 a by the holder 13 (between the shock absorbing material 12 and the roll body 7. If it is present, higher effect of preventing winding deviation can be expected through the covering 11), which is preferable.

  In the step shown in FIG. 4C, the central cylinder 16 of the holder 13 is inserted into the hollow portion of the core 8. Thereby, as shown in FIG. 4D and FIG. 6, the roll body 7 and the shock absorbing material 12 can be fixed by the holder 13.

  FIG. 5: is a perspective view which shows the manufacturing process of the package in embodiment different from FIG. FIG. 7 is a schematic cross-sectional view of the package formed in FIG.

  As shown in FIGS. 5A and 7, in this embodiment, the length of the core 8 substantially matches the length of the roll body 7. As shown in FIG. 5A, the cushioning material 12 is preferably fitted into the central cylinder 16 of the holder 13 to be stabilized (FIG. 5B). Then, as shown in FIGS. 5C and 7, the central cylinder 16 of the holder 13 with the shock absorbing material 12 is inserted into the hollow interior of the core 8.

  FIG. 8A is a front view of the holder in the embodiment of the present invention, and FIG. 8B is a side view of the holder. As shown in FIG. 8A, the holder 13 is configured to have a plate-like grounding portion 14 and a central cylinder 16 provided substantially at the center of the grounding portion 14.

  As shown in FIGS. 4, 5, 6 and 7, in each package 10, the upper end portion and the lower end portion of the ground portion 14 of the holder 13 are in the state of projecting most up and down. Therefore, when the package 10 is placed on the ground or the like, the portion of the roll body 7 covered with the cover 11 does not contact the ground or the like, regardless of the orientation.

  The shape of the ground portion 14 is not limited. Other than the square shown in FIG. 8A, it may be rectangular or circular.

  The material of the holder 13 is preferably made of a lightweight material capable of absorbing an impact. Examples of such a material include polypropylene and the like. Although the grounding portion 14 and the central cylinder 16 can be integrally formed, the grounding portion 14 and the central cylinder 16 which are separately formed can also be joined.

  As shown to FIG. 8A, in order to raise the intensity | strength of the holder 13, it is preferable to provide the reinforcement part 17 in the surface of the earthing | grounding part 14. As shown in FIG. The shape of the reinforcing portion 17 can be set arbitrarily, but a structure capable of reinforcing the boundary between the central cylinder 16 and the grounding portion 14 where shocks are easily concentrated, for example, from the central cylinder 16 to the outer periphery of the grounding portion 14 Preferably, reinforcements 17 are provided to extend. In FIG. 8A, although the reinforcement part 17 is provided in the surface of the earthing | grounding part 14 of the side in which the center cylinder 16 was provided, it arrange | positions on the surface on the opposite side to the surface, ie, the surface used as the outer surface of the package 10. You may It is preferable to use the same material as the holder 13 as the material used as the reinforcing portion 17 from the viewpoint of being able to be integrally molded.

  Further, in order to prevent foreign matter from invading the inside of the roll body 7, it is preferable that the central cylinder 16 has no hole.

  FIG. 9 is a schematic view when the package in the present invention is stored in a case. As shown in FIG. 9, the package 10 of the present embodiment can be transported in a state of being stored in the case 20. In order to make it easy to take out the package 10 from the state which accommodated the package 10 in the case, as shown to FIG. 8B, it is preferable to form the space | gap 21 which can catch a finger on the outer surface of the holder 13 .

  According to the present embodiment, the positional relationship between the holder 13, the shock absorbing material 12 and the cover 11 can be set arbitrarily, as long as the shock absorbing material 12 is closer to the roll body 7 than the holder 13. In consideration of the antifouling of the body 7, as shown in FIG. 6, it is preferable that the cover 11, the buffer material 12, and the holder 13 be arranged in the order from the side closer to the roll 7.

  The case 20 for housing the package 10 according to the present embodiment is preferably in the shape of a rectangular solid in view of its stability, and for example, cardboard can be suitably used. The number of roll bodies 7 to be put in one case 20 can be arbitrarily set based on the weight, stability of the shape of the case 20 and the like.

  The material of the case 20 can be set arbitrarily, but it is general to use a resin such as paper or polypropylene. When the case 20 is made of paper, it is inexpensive and lightweight, the impact is hard to be transmitted to the contents, and it can be disposable when recovery of the case 20 is difficult, for example, when delivered overseas, from such a viewpoint It can be used suitably. On the other hand, when the case 20 is made of resin, it can be used robustly and repeatedly, and it is possible to use it from such a point of view because dust generation is small. Further, the case 20 is preferably foldable from the viewpoint of space saving at the time of storage.

  In order to prevent the rattling of the contents in the case 20, it is preferable that there is no cavity around the package 10 in the state in which the package 10 is stored in the case 20. In particular, since vibration in the width direction of the roll body 7 easily induces winding deviation, it is particularly preferable to eliminate the hollow and make the roll body 7 difficult to vibrate. When filling the cavity in the case 20, a commercially available buffer material etc. can be used suitably as a spacer.

  In the case 20, in addition to the above-described package 10 and the spacer, an article (apparatus etc.) capable of protecting the package 10 or checking the transport state may be bundled. For example, it is preferable to bundle various detectors in order to trace the temperature change during transportation, the state of vibration, and the degree of light shielding from the viewpoint of quality maintenance and control.

  When the laminate 1 is susceptible to heat, particularly when it becomes high temperature during transportation in summer, the performance of the laminate 1 may be adversely affected. In order to reduce such an influence, it is preferable to perform cooling. Examples of the material used for cold storage include dry ice, a cold storage agent comprising water and a highly water-absorbent resin, and the like, which can be appropriately selected in consideration of the cold storage temperature, the cold storage time, and the laws and regulations according to the transport method. In addition, when it is desired to prevent the contents in the case 20 from becoming excessively low temperature or causing condensation, the case 20 is placed in a larger case and the package 10 is placed in a multi-box state. It is preferable to put a coolant or the like between the case 20 and a larger case containing the case 20. When installing a cold storage agent etc., in order to prevent damage to the package 10 due to movement of the cold storage agent etc. due to vibration during transportation, fix the cold storage agent etc. or provide an installation space in the case 20 for isolation. Is preferred.

  When the laminate 1 does not like moisture, it is preferable to bundle a desiccant and / or to use a coating 11 with a low moisture permeability or both. As a desiccant, although general things, such as an alumina and a silica gel, can be used, it is preferable to arrange | position the outer side of the coating | coated body 11 in consideration of the dust generation from a desiccant. Also, in order to prevent damage to the laminate 1 due to scattering of the desiccant due to vibration during transportation, etc., the desiccant is put in a bag having air permeability if it is in powder form, for example It is preferable to fix to a wall surface etc. Alternatively, it is preferable to use the laminate after leaving it for a certain period of time in a low humidity environment such as a dry room before using it. In a low humidity environment, relative humidity 40% RH or less is preferable, 30% RH or less is more preferable, and 20% RH or less is particularly preferable. Moreover, 4 hours or more are preferable, as for the time to rest in a low humidity environment, 8 hours or more are more preferable, and 16 hours or more are especially preferable. In particular, when stored and transported with high humidity once, it is preferable to stand at low humidity for a long time.

As the covering 11 having a low moisture permeability, it is preferable to use a resin bag such as a polyolefin which has been aluminum-deposited as described above. As a material of the cover 11 having a low moisture permeability, particularly, the water vapor transmission rate at 40 ° C., 90% RH is preferably 10 g / m ² · 24 h or less, and further preferably 1 g / m ² · 24 h or less Preferably, it is 0.1 g / m ² · 24 h or less. When using the covering 11 with low moisture permeability, it is preferable to seal the package 10 by methods, such as a thermocompression bonding. When a change in the internal pressure in the sealed cover 11 is expected by air transportation or the like, it is preferable to use a reduced pressure during sealing. Hereinafter, in the present embodiment, “RH” refers to relative humidity.

  When sealing the case 20, a general packing tape can be used. Under the present circumstances, it is preferable to stick so that the seam of case 20 may be closed with a tape, since the amount of light entering inside case 20 can be reduced. Moreover, it is also effective to use a cord for packing. The material of the cord is generally paper or resin. The tape and the string may be used alone or in combination. In the case of plastic cardboard intended to be used repeatedly, it is preferable to attach a key material for sealing and a hook-and-loop fastener, since no packaging material is required at the time of sealing and no waste material is produced at the time of unpacking.

  When carrying the case 20, the case 20 has a handle from the viewpoint of making it easy to hold the case 20 and the viewpoint of making it easy for the person who transports the case 20 to know the vertical direction of the case 20. Is preferred. The position of the handle is preferably the side of the case 20, and the number of the handle is two or more, and may be appropriately determined by the size and weight of the case 20.

  Also in the case of transferring the roll intermediate between the manufacturing sites, it is basically possible to use the above-mentioned transfer form. However, when using for transfer between manufacturing sites, it is preferable to use the case 20 multiple times from the viewpoint of environmental protection, and therefore it is preferable to use a strong resin case or the like.

  Here, when a specific example of the roll intermediate in the present embodiment is shown, a state in which the cured resin which is a raw material of the cured resin layer 5 is applied on the base material layer 4, a mold having a fine uneven structure is used as the cured resin. In the state where it is pressed and cured in that state to form the cured resin layer 5, the state in which the mold is removed from the cured resin layer 5 with the mold, the raw material of the mask pattern 2 is filled in the unevenness of the cured resin layer 5 The state in which the raw material of the mask pattern 2 is cured to form the mask pattern 2 and the state in which the resin which is the raw material of the photosensitive resin layer 3 is applied and dried on the mask pattern 2 correspond to this. In addition, in the state which bonded the protective layer 6 on the photosensitive resin layer 3, it is the state which the laminated body 1 completed, and the state which wound it comprises a roll body.

  In the present embodiment, the cover 11 covering the roll intermediate, the shock absorbing material 12 applied to the roll end surface of the roll intermediate, and the shock absorbing material 12 are disposed on both sides to fix the roll intermediate and the shock absorbing material 12 And the holder (core holder) 13, and the package using each roll intermediate body is comprised, and manufacture of a package is implemented.

  FIG. 10 is a process diagram for describing a method for forming a fine pattern on an object to be processed using the laminate 1 shown in FIG.

  In FIG. 10A, the object to be treated 30 is disposed on the surface of the photosensitive resin layer 3 of the laminate 1. The workpiece 30 is, for example, a sapphire substrate. Energy rays are irradiated to the multilayer laminate shown in FIG. 10A. Thereby, the photosensitive resin layer 3 is cured, and the space between the photosensitive resin layer 3 and the object 30 is bonded.

  Next, in the process of FIG. 10B, the base material layer 4 is removed. FIG. 10B is a diagram in which the base material layer 4 is removed in a state in which FIG. 10A is turned upside down.

  Next, with the mask pattern 2 as a mask, the photosensitive resin layer 3 is patterned as shown in FIG. 10C, for example, by oxygen ashing. Thereby, the pattern 31 comprised from the photosensitive resin layer 3 and the mask pattern 2 can be obtained. Furthermore, reactive ion etching, for example, is performed on the object to be treated 30 using the patterned photosensitive resin layer 3 as a mask to form a fine pattern 32 on the main surface of the object to be treated 30 as shown in FIG. 10D. can do. And the photosensitive resin layer 3 which remained on the main surface of the to-be-processed object 30 is removed, and the to-be-processed object 30 which has the fine pattern 32 can be obtained.

  FIG. 11 is a process diagram for describing a method for forming a fine pattern on an object to be processed using the laminate shown in FIG.

  First, the protective layer 6 shown in FIG. 2 is removed, the object to be treated 40 is disposed on the exposed surface of the photosensitive resin layer 3, and the photosensitive resin layer 3 and the object to be treated 40 are Paste it. Subsequently, the base layer 4 and the cured resin layer 5 are removed. The state is shown in FIG. 11A.

  Next, with the mask pattern 2 as a mask, the photosensitive resin layer 3 is patterned as shown in FIG. 11B, for example, by oxygen ashing. Thereby, the pattern 41 comprised from the photosensitive resin layer 3 and the mask pattern 2 can be obtained. The pattern 41 can be formed with a high aspect ratio. Furthermore, reactive ion etching is performed on the object to be treated 40, for example, using the patterned photosensitive resin layer 3 as a mask to form a fine pattern 42 on the main surface of the object to be treated 40, as shown in FIG. 11C. can do. And the photosensitive resin layer 3 which remained on the main surface of the to-be-processed object 40 is removed, and the to-be-processed object 40 which has the fine pattern 42 can be obtained.

  According to the present embodiment, in the roll body 7 in which the laminate 1 is wound in a roll, the ratio (R / t) of the surface roughness R of the roll end face 7a to the minimum thickness t of the photosensitive resin layer 3 is The surface roughness R was set to a value larger than 500 and smaller than 70 mm. Thereby, the dispersion of the pressure applied to the surface of the laminate can be promoted, and the destruction or the like of the mask pattern can be suppressed. As a result, when forming a fine pattern on the object using the laminate 1 from the roll body 7, no destruction or the like occurs in the mask pattern 2, and the occurrence of non-landing on the surface of the photosensitive resin layer 3 Can be suppressed, and the object to be treated can be appropriately bonded to the photosensitive resin layer 3. As described above, it is possible to form a fine pattern on an object to be processed with high accuracy.

  Hereinafter, although the example performed in order to clarify the effect of the present invention is described, the present invention is not limited by this example. Further, unless otherwise specified, the production of the roll body, the vibration test and the like in the following examples are performed at a temperature of 20 ° C. to 30 ° C. and 40% RH to 60% RH.

Example 1
On a PET film A-4100 (base material layer; manufactured by Toyobo Co., Ltd.) having a width of 200 mm, Alonics (registered trademark, the same as the following) M350 (acrylic monomer; manufactured by Toagosei) and Irgacure (registered trademark, the same below) 184 (polymerization initiator) A mixture of BASF (manufactured by BASF) at a weight ratio of 100: 5.

  Subsequently, a stamper having a fine concavo-convex shape was pressed and irradiated with light to cure Alonics M350, thereby forming a cured resin layer having a fine concavo-convex portion. After removing the stamper, a 50 wt% propylene glycol monomethyl ether (manufactured by Wako) solution in which titanium tetrabutoxide (metal alkoxide; manufactured by Tokyo Chemical Industry Co., Ltd.) and Irgacure 184 are mixed at a weight ratio of 100: 5 is filled in the fine asperities. Irradiated. Thus, a mask pattern was formed in the cured resin layer.

  Next, 50 wt% methyl ethyl ketone solution (manufactured by Wako) in which SR833 (acrylic monomer; manufactured by Sartmar) and Irgacure 184 were mixed at a weight ratio of 100: 2 was applied and dried to form a photosensitive resin layer. Furthermore, PET film A-4100 was affixed as a protective layer on it, and the laminated body was obtained. When the laminate was partially taken out and the cross section was confirmed by an SEM image, the thickness of the photosensitive resin layer was 100 nm.

  The above laminate was wound around an ABS core having a width of 200 mm and a diameter of 3 inches to obtain a roll having a diameter of 150 mm and a width of 200 mm. The surface roughness R of the roll end face was 0.5 mm. From the above, the roll body having a ratio (R / t) of 5000 was packed in the following procedure.

  First, the roll body was placed in a black polyethylene tube (coated body; manufactured by Icero Pack). Next, the black tube and the roll were placed in a white polyethylene tube (made by Iceropac). Next, the black tube and the white tube were put together and put into the ABS core of the roll body.

  Next, a doughnut-shaped cushioning material (rolling prevention material) of 180 mm in diameter and 5 mm in thickness made of low density polyethylene (made by Asahi Kasei Co., Ltd.) was applied to both sides of the roll body covered with a tube. Furthermore, it fixed by the polypropylene core holder (made by Sanko) from the outer side, and obtained the package.

  The end face of the roll was covered with a doughnut-shaped cushioning material (rolling prevention material) except in the vicinity of the ABS core, and 98% of the area of the roll end face was in contact with the cushioning material.

  Finally, put the package in the paper cardboard, put the cushioning material for rattling in the cavity around the package to fill the cavity, close the lid of the paper cardboard, and then join each seam of the paper cardboard All were sealed with gum tape (manufactured by Nichiban) to obtain a packaging box.

  Vibration was applied to the packaging box for 30 minutes in accordance with the conditions described in Annex A Table 1 of JIS Z 0232: 2004, but the roll deviation of the roll body did not increase, and the surface roughness R of the roll end face was 0. It remained at 5 mm. Moreover, although the laminate which comprises a roll body was bonded to the to-be-processed object (process object) using the bonding apparatus, the pattern destruction by the land does not generate | occur | produce, process the to-be-processed object into a desired shape without problem. did it.

(Example 2)
A laminate prepared in the same manner as in Example 1 except that a PET film having a width of 50 mm was used, was wound around an ABS core having a width of 50 mm and a diameter of 3 inches to obtain a roll having a diameter of 150 mm and a width of 50 mm. The surface roughness R of the roll end face was 0.3 mm. The end face of the roll was covered with a shock absorbing material except in the vicinity of the ABS core, and 98% of the area of the end face of the roll was in contact with the shock absorbing material.

  The roll body which made ratio (R / t) into 3000 by the above was packed in the same procedure as Example 1. FIG. And although vibration was added with respect to the packaging box on the same conditions as Example 1, winding deviation of a roll body is not increasing and surface roughness R of the roll end surface remained 0.3 mm. Moreover, although the laminate which comprises a roll body was bonded to the to-be-processed object (process object) using the bonding apparatus, the pattern destruction by the land does not generate | occur | produce, process the to-be-processed object into a desired shape without problem. did it.

(Example 3)
A laminate prepared in the same manner as in Example 1 was wound around an ABS core having a width of 200 mm and a diameter of 3 inches to obtain a roll having a diameter of 150 mm and a width of 200 mm. The surface roughness R of the roll end face was 0.6 mm.

  From the above, the roll body having a ratio (R / t) of 6000 was packed in the same manner as in Example 1. However, the diameter of the doughnut-shaped cushioning material was changed to φ 120 mm. In addition, 52% of the area of the end face of the roll was in contact with the buffer material.

  When vibration was applied to the packaging box under the same conditions as in Example 1, winding deviation of up to 30 mm (maximum height difference PV) occurred at the outer edge of the roll body which was not in contact with the shock absorbing material. Surface roughness R increased to 8.0 mm. Although the laminated body which comprises this roll body was bonded to the to-be-processed object (process target) using the bonding apparatus, the pattern destruction by non-landing did not generate | occur | produce but the target was able to be processed into a desired shape.

(Example 4)
A laminate prepared in the same manner as in Example 1 except that the thickness of the photosensitive resin layer was 50 nm was wound around an ABS core having a width of 200 mm and a diameter of 3 inches to obtain a roll having a diameter of 150 mm and a width of 200 mm. When winding the laminate around the core, the surface roughness R of the roll end face was made 30 mm by swinging the core.

  From the above, the roll body having a ratio (R / t) of 600000 was packed in the same manner as in Example 1. As a result, 98% of the area of the end face of the roll was in contact with the buffer material. Vibration was applied to the packaging box under the same conditions as in Example 1, but the winding deviation of the roll did not increase, and the surface roughness R of the roll end face remained at 30 mm. Moreover, although the laminate which comprises a roll body was bonded to the to-be-processed object (process object) using the bonding apparatus, the pattern destruction by the land does not generate | occur | produce, process the to-be-processed object into a desired shape without problem. did it.

(Example 5)
A roll was prepared in the same manner as in Example 1 except that the diameter (φ) of the roll was 300 mm. From the above, the roll body having a ratio (R / t) of 5000 was packed in the same manner as in Example 1. As a result, 98% of the area of the end face of the roll was in contact with the buffer material. Vibration was applied to the packaging box under the same conditions as in Example 1, but the winding displacement of the roll did not increase, and the surface roughness R of the roll end face remained at 0.5 mm. Moreover, although the laminate which comprises a roll body was bonded to the to-be-processed object (process object) using the bonding apparatus, the pattern destruction by the land does not generate | occur | produce, process the to-be-processed object into a desired shape without problem. did it.

(Example 6)
A laminate prepared in the same manner as in Example 1 except that the thickness of the photosensitive resin layer was set to 1000 nm was wound around an ABS core having a width of 200 mm and a diameter of 3 inches to obtain a roll having a diameter of 150 mm and a width of 200 mm. When winding the laminate around the core, the surface roughness R of the roll end face was 0.8 mm by swinging the core.

  From the above, the roll body having a ratio (R / t) of 800 was packed in the same manner as in Example 1. As a result, 98% of the area of the end face of the roll was in contact with the buffer material. Vibration was applied to the packaging box under the same conditions as in Example 1, but the winding deviation of the roll did not increase, and the surface roughness R of the roll end face remained at 0.8 mm. Moreover, although the laminate which comprises a roll body was bonded to the to-be-processed object (process object) using the bonding apparatus, the pattern destruction by the land does not generate | occur | produce, process the to-be-processed object into a desired shape without problem. did it.

(Example 7)
The roll body created by the method similar to Example 1 was packed in the following procedures. First, the roll body was disposed in an aluminum-deposited polyethylene bag (coated body; manufactured by As One). Next, the opening of the above-mentioned cover was closed in an environment of humidity 40% RH and sealed by thermocompression bonding.

  Next, a doughnut-shaped cushioning material (rolling prevention material) of 180 mm in diameter and 5 mm in thickness made of low density polyethylene (made by Asahi Kasei Co., Ltd.) was applied to both sides of the sealed roll body. Furthermore, it fixed by the polypropylene core holder (made by Sanko) from the outer side, and obtained the package. The package obtained by the above method was enclosed in a cardboard together with a cold-preserving agent and a temperature-hygrometer capable of logging.

  Next, the packed cardboard described above was placed in a constant temperature and humidity chamber, and the constant temperature and humidity chamber was set to 40 ° C. and 90% RH and left for 72 hours. As a result of checking the log data of the thermo-hygrometer after leaving it to stand, the temperature inside the cardboard was maintained at approximately 40% RH between approximately 5 ° C. and 15 ° C.

  Although the roll body which gave the above processing was taken out from a covering body, the lamination body which constitutes a roll body was pasted together to a processed object (processing object) using a pasting device, but pattern breakage by non-land does not occur. The object to be treated could be processed into the desired shape without any problem.

(Comparative example 1)
A laminate prepared in the same manner as in Example 1 was wound around an ABS core having a width of 200 mm and a diameter of 3 inches to obtain a roll having a diameter of 150 mm and a width of 200 mm. By raising the accuracy of the rewinder, the surface roughness R of the roll end surface became 0.05 mm or less (impossible to measure).

  From the above, the roll body having a ratio (R / t) of 500 was packed in the same procedure as Example 1. Vibration was applied to the packaging box under the same conditions as in Example 1, but the winding displacement of the roll body did not increase, and the surface roughness R of the roll end face remained at 0.05 mm or less (impossible to measure). there were. Moreover, although the laminated body which comprises a roll body was bonded to the to-be-processed object (process object) using the bonding apparatus, the pattern destruction by non-land did not generate | occur | produce. However, pattern breakage occurred in part of the laminate, and processing defects occurred only in that part.

(Comparative example 2)
A laminate prepared in the same manner as in Example 1 was wound around an ABS core having a width of 200 mm and a diameter of 3 inches to obtain a roll having a diameter of 150 mm and a width of 200 mm. The surface roughness R of the roll end face was 0.5 mm. The roll end face was in contact with the buffer material at 0% of the area.

  According to the above, the roll body having a ratio (R / t) of 5000 was packaged in the same procedure as in Example 1 except that the roll body was directly fixed by the core holder without using the shock absorbing material (rolling prevention material). . When vibration was applied to the packaging box under the same conditions as in Example 1, the winding displacement of the roll body was increased to form a bowl shape. Since the surface roughness R of the roll end surface is 70 mm and exceeds the allowable range of the bonding apparatus, it was not possible to carry out bonding to the object to be treated (object to be processed).

(Comparative example 3)
A laminate prepared in the same manner as in Example 1 was wound around an ABS core having a width of 200 mm and a diameter of 3 inches to obtain a roll having a diameter of 150 mm and a width of 200 mm. When winding the laminate around the core, the surface roughness R of the roll end face was 100 mm by swinging the core.

  From the above, the roll body having a ratio (R / t) of 1,000,000 was packed in the same procedure as in Example 1. When vibration was applied to the packaging box under the same conditions as in Example 1, the winding displacement of the roll did not increase or decrease, but before the vibration was applied, the allowable range of the bonding apparatus was already exceeded. Therefore, it was not possible to carry out bonding to the object to be treated (object to be processed).

  The experimental results of Examples 1 to 7 and Comparative Examples 1 to 3 are shown in Table 1 below.

  In the embodiment, by defining the ratio (R / t) of the surface roughness R of the roll end surface to the minimum thickness t of the photosensitive resin layer, the surface roughness R is maintained even by vibration, and the roll is wound. Deviation was suppressed. In addition, by covering the roll body with a covering body and packing it using a shock absorbing material and a core holder, even when it is left for a long time under a high temperature and high humidity environment, it is not smooth at the time of bonding of the laminate constituting the roll body. There was no occurrence of pattern breakage due to the above, and the quality deterioration of the roll body was effectively prevented.

  According to the present invention, it can be formed into a roll without impairing the performance of a mask-patterned laminate including a photosensitive resin layer having a nanometer size thickness which is prone to pattern breakage and winding deviation easily. And transport will be possible.

DESCRIPTION OF SYMBOLS 1 laminated body 2 mask pattern 3 photosensitive resin layer 4 base material layer 5 cured resin layer 6 protective layer 7 roll 7 a roll end face 7 b roll surface 8 core 10 package 11 cover 12 cushioning material 13 holder 14 grounding portion 16 central cylinder 17 Reinforcement part 20 Case 30, 40 Object to be treated 31, 41 Pattern 32, 42 Fine pattern

Claims (21)

A roll body in which a laminate having at least a base material layer, a mask pattern, and a photosensitive resin layer is wound in a roll shape,
The surface of the mask pattern and the space between the mask patterns are covered with the photosensitive resin layer, and
When the thinnest thickness of the photosensitive resin is defined as the minimum thickness t, the ratio (R / t) of the surface roughness R of the roll end surface to the minimum thickness t is larger than 500, and the surface roughness R is Roll body characterized by being smaller than 70 mm.   The roll body according to claim 1, wherein the ratio (R / t) is 1,000 or more and 10,000,000 or less.   The roll body according to claim 1 or 2, wherein the surface roughness R is 50 mm or less.   The protective layer is further contained in the said laminated body, The said mask pattern and the said photosensitive resin layer intervene between the said base material layer and the said protective layer, The any one of the Claims 1 thru | or 3 characterized by the above-mentioned. Roll body described in.   The roll body according to any one of claims 1 to 4, wherein the laminated body further includes a cured resin layer positioned between the mask patterns.   The roll body according to claim 5, wherein the cured resin layer is formed in a concavo-convex structure capable of containing the mask pattern.   The roll body according to any one of claims 1 to 6, wherein a ratio (d / w) of a diameter d of the roll body to a width w of the roll body is 1 or more and 10 or less.   It is a manufacturing method of the roll object according to any one of claims 1 to 7, and a first step of applying a cured resin which is a raw material of a cured resin layer on a base material layer, and curing a mold having a fine uneven structure. The second step of pressing in resin and curing in that state to form a cured resin layer, removing the mold, filling the raw material of the mask pattern into the irregularities of the cured resin layer, curing the raw material of the mask pattern and mask pattern A third step, and a fourth step of applying and drying a resin as a raw material of a photosensitive resin layer on a mask pattern, and laminating a protective layer on the photosensitive resin layer to obtain a laminate And a process comprising the steps of:   The method according to claim 8, wherein the base material layer is wound around a core, and the subsequent steps are performed by roll-to-roll. A roll body according to any one of claims 1 to 7;
A cover covering at least the roll surface,
Holders disposed on both sides of the roll end surface,
A buffer material located between the roll body and the holder;
A package comprising:   The package according to claim 10, wherein the covering covers from the surface of the roll to the end face of the roll, and the covering, the cushioning material and the holder are arranged in this order from the end face side of the roll.   The package according to claim 10, wherein the cover contains a light shielding material.   The package according to any one of claims 10 to 12, wherein the light shielding material has a light shielding rate of at least 50%. The package according to any one of claims 10 to 13, wherein the covering is made of a material having a water vapor transmission rate of 10 g / m ² · 24 h or less at 40 ° C and 90% RH.   The package according to any one of claims 10 to 14, wherein the buffer material is a polyolefin.   The thickness of the said shock absorbing material is 2 mm or more, The package body in any one of the Claims 10 thru | or 15 characterized by the above-mentioned.   The package according to any one of claims 10 to 16, wherein the shock absorbing material is in contact with 90% or more of the area of the end face of the roll.   It is a package for transporting the roll intermediate body manufactured by each process as described in the manufacturing method of the roll body of Claim 8 or 9, Comprising: The said roll intermediate body, the said coating body, the said holder, The package according to any one of claims 10 to 17, comprising the shock absorbing material. Covering at least the roll surface of the roll body according to any one of claims 1 to 7 with a covering;
Arranging buffer material on both sides of the roll end face;
Disposing a holder on both sides of the shock absorbing material to fix the roll body and the shock absorbing material;
A method of manufacturing a package, comprising: A method of producing a package using the roll intermediate according to claim 18.
Covering at least the roll surface of the roll intermediate with a covering;
Arranging buffer material on both sides of the roll end face;
Disposing a holder on both sides of the shock absorbing material to fix the roll intermediate and the shock absorbing material;
A method of manufacturing a package, comprising:   A method of transporting a package, comprising transporting the package according to any one of claims 10 to 18 at a temperature of 30 ° C. or less and 60% RH or less.

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