JP6561698B2 - Work inspection device - Google Patents

Description

  The present invention relates to a workpiece inspection apparatus.

  As described in Patent Document 1, there is known an inspection apparatus that inspects the appearance of a workpiece while conveying the workpiece such as an electronic component with a conveyor belt. The inspection apparatus includes a mechanism for reversing the workpiece by reversing the transport belt by a reversing guide rail provided in the center in the longitudinal direction of the transport belt. The inspection apparatus includes a first CCD camera provided on the upstream side in the conveyance direction with respect to a position (inversion point) for reversing the workpiece and a second CCD camera provided on the downstream side in the conveyance direction with respect to the reversal point. The surface of the workpiece is imaged.

JP 2007-21308 A

  In the inspection apparatus, since imaging is performed from a direction orthogonal to the workpiece conveyance direction, when the workpiece moves at high speed, it may be difficult to accurately capture the workpiece passing the preset imaging point with the camera. There is. Further, even if the workpiece moving at high speed can be captured by the camera, the captured image may be blurred, and the inspection accuracy by image processing on the image may be reduced. On the other hand, when the conveyance speed of the entire conveyance belt is limited to a predetermined speed or less in order to ensure the inspection accuracy by image processing, the conveyance efficiency of the work is lowered.

  Therefore, an object of the present invention is to provide a workpiece inspection apparatus capable of appropriately performing workpiece inspection while suppressing a decrease in conveyance efficiency.

  A workpiece inspection apparatus according to an aspect of the present invention receives a workpiece from a first conveyance unit that conveys a sheet-shaped or plate-shaped workpiece, and the first conveyance unit, and the main surface of the workpiece stands with respect to the conveyance path By supporting the workpiece so as to be, the workpiece is conveyed at a conveyance density larger than the conveyance density of the first conveyance unit, and the workpiece is removed from the first state where one main surface of the workpiece is exposed at a predetermined position on the conveyance path. A second conveying unit that reverses the workpiece so as to change to a second state in which the other main surface of the workpiece is exposed, and a workpiece in the first state that is disposed so as to oppose the workpiece reversal position in the second conveying unit. And an imaging unit that images the other main surface of the workpiece in the second state.

  In this workpiece inspection apparatus, the second conveyance unit provided at the subsequent stage of the first conveyance unit supports the workpiece so that the main surface of the workpiece is standing with respect to the conveyance path. The workpiece is transferred at a transfer density larger than the transfer density. Thereby, a 2nd conveyance part functions as a low speed area which conveys a workpiece | work at a low speed rather than a 1st conveyance part. Then, the imaging unit arranged so as to face the position where the workpiece is inverted by the second transport unit images the main surface of the workpiece before and after the inversion, thereby efficiently inspecting the inspection image of the workpiece to be inspected. Can get well. Moreover, the quality of the inspection image of each workpiece | work can be improved by acquiring the inspection image of a workpiece | work in the 2nd conveyance part which is a low speed area. Moreover, it is not necessary to reduce the conveyance speed of the entire conveyance unit (that is, the conveyance unit that can be provided at the subsequent stage of the first conveyance unit, the second conveyance unit, and the second conveyance unit) for workpiece inspection. Therefore, according to the said workpiece inspection apparatus, a workpiece | work inspection can be performed appropriately, suppressing the fall of conveyance efficiency.

  In the workpiece inspection apparatus, the second transport unit includes a loop-shaped transport member, and a plurality of support wall portions that are erected at predetermined intervals along the outer peripheral surface of the transport member and move together with the transport member. The work is supported by bringing the main surface of the work into contact with the support wall, and the first main body is supported in contact with the other main surface of the work in the bent portion where the conveying member is folded back. The workpiece may be inverted so that the state changes from the state to the second state in which one main surface of the workpiece is in contact with and supported by the support wall portion positioned in front of the support wall portion.

  According to the work inspection apparatus, the support wall supports the work so that the main surface of the work is orthogonal to the conveyance member, so that the main surface of the work stands on the conveyance path. The configuration in which the workpiece is supported can be realized with a simple configuration. Further, by using the bent portion where the conveying member is folded, the workpiece supported by the supporting wall portion on the rear side in the conveying direction among the supporting wall portions adjacent to each other is supported by the supporting wall portion on the front side in the conveying direction. In addition, the workpiece can be moved (reversed) smoothly. Further, since the interval between the tips of the support wall portions adjacent to each other is widened at the bent portion, the interval between the workpiece after reversal adjacent to the workpiece before reversal can be increased by reversing the workpiece at the bent portion. it can. This makes it easier to visually recognize the exposed surface of the workpiece (one main surface of the workpiece before reversal and the other main surface of the workpiece after reversal) from the direction facing the reversal position of the workpiece. Therefore, the inspection image of the workpiece can be appropriately captured by the imaging unit arranged so as to face the reversal position of the workpiece.

  In the workpiece inspection apparatus, the second transport unit includes a rotating body that rotates about an axis parallel to the horizontal direction, and a plurality of support walls that are provided radially at predetermined intervals along the outer periphery of the rotating body and move together with the rotating body. The second transport unit supports the work by bringing the main surface of the work into contact with the support wall, and the support wall extends in the vertical direction at the top of the rotating body. The workpiece may be reversed by tilting the workpiece supported by the support wall portion forward in the rotation direction of the rotating body.

  According to the workpiece inspection apparatus, the second transport unit can be configured with a simple configuration including the rotating body and a plurality of support wall portions provided radially on the outer periphery of the rotating body. In addition, at the position where the support wall portion extends in the vertical direction at the top of the rotating body, the work can be easily reversed by tilting the work supported by the support wall portion forward due to gravity or the like. Can do.

  The workpiece inspection apparatus further includes an illumination unit that irradiates light to the workpiece conveyed by the second conveyance unit, and a control unit that controls the operation of the imaging unit and the illumination unit. A first imaging process for irradiating one main surface of the workpiece in the first state from the front and causing the imaging unit to image one main surface of the workpiece in the first state, and an illumination unit A second imaging process in which light is obliquely applied to one main surface of the workpiece in the first state and the imaging unit images one main surface of the workpiece in the first state; and an illumination unit And a third imaging process for causing the other main surface of the workpiece in the second state to irradiate light from the front and causing the imaging unit to image the other main surface of the workpiece in the second state; And irradiating light obliquely to the other main surface of the workpiece in the second state The imaging unit, and the fourth imaging processing to image the other main surface of the second state work may be executed.

  By irradiating the work main surface with light from the front, foreign matter adhering to the surface of the work main surface can be properly captured in the captured image. Further, by irradiating the work main surface with light obliquely, scratches on the surface of the work main surface can be raised in the captured image. Therefore, according to the workpiece inspection apparatus, the control unit switches and controls the operations of the imaging unit and the illuminating unit, and executes the first to fourth imaging processes, so that the foreign object inspection (foreign matter) on one main surface of the workpiece is performed. For determining the presence or absence) and scratch inspection (external inspection such as determination of the presence or absence of scratch) (images captured by the first and second imaging processes), and foreign matter inspection on the other main surface of the workpiece In addition, it is possible to automatically acquire an image for performing a wound inspection (images captured by the third and fourth imaging processes). Thereby, the inspection of the workpiece main surface can be efficiently performed.

  In the workpiece inspection apparatus, the control unit includes a reversal control unit that forcibly reverses the workpiece in the second transport unit, and after the first imaging process and the second imaging process are completed, the reversal control unit performs the work by the reversal control unit. The third imaging process and the fourth imaging process may be executed after further executing the inversion process for inverting the image and completing the inversion process.

  According to the workpiece inspection apparatus, the control unit can control by itself the timing at which the workpiece is inverted by the inversion control means, so that the processing after the workpiece inversion (third and fourth imaging processing) can be performed at an appropriate timing. It becomes possible to execute.

  In the work inspection apparatus, the first transport unit may place and transport the work such that the main surface of the work is parallel to the transport direction. In this case, the workpiece is transferred from the first conveyance unit to the second conveyance unit, and the main surface of the workpiece is changed from a state parallel to the conveyance direction to a state standing with respect to the conveyance direction (conveyance path). The conveyance density of the second conveyance unit can be made larger than the conveyance density of the first conveyance unit. The first transport unit may be a belt conveyor.

  ADVANTAGE OF THE INVENTION According to this invention, the workpiece inspection apparatus which can perform a workpiece | work inspection appropriately can be provided, suppressing the fall of conveyance efficiency.

It is a figure showing the whole work inspection device composition of a 1st embodiment. It is a flowchart which shows an example of the control procedure of a control part. It is a figure which shows the modification of the workpiece inspection apparatus of 1st Embodiment. It is a figure which shows the modification of the workpiece inspection apparatus of 1st Embodiment. It is a figure which shows the whole structure of the workpiece inspection apparatus of 2nd Embodiment.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted.

[First Embodiment]
With reference to FIG. 1, the workpiece inspection apparatus 1 of 1st Embodiment is demonstrated. In the present embodiment, as an example, the workpiece inspection apparatus 1 is an apparatus that is incorporated into a manufacturing system for a power storage device such as a lithium ion secondary battery. Specifically, the workpiece inspection apparatus 1 performs a part of the manufacturing process of the electrode assembly used for the power storage device, and while transporting the sheet-like electrode constituting the electrode assembly, It is configured as a device that performs surface inspection. The workpiece 10 handled by the workpiece inspection apparatus 1 is a positive electrode or a negative electrode constituting the electrode assembly. However, the workpiece | work 10 should just be a sheet form or plate-shaped thing, and is not restricted to the said example.

  The positive electrode has a positive electrode active material layer formed on both sides of a rectangular metal foil made of, for example, an aluminum foil. The positive electrode active material layer is formed including a positive electrode active material and a binder. Examples of the positive electrode active material include composite oxide, metallic lithium, and sulfur. The composite oxide includes, for example, at least one of manganese, nickel, cobalt, and aluminum and lithium. A tab used for connection with the positive electrode terminal is formed on one edge of the positive electrode.

  Further, the positive electrode may be in a state in which a portion excluding the tab is accommodated in a bag-like separator. Examples of the material for forming the separator include a porous film made of a polyolefin resin such as polyethylene (PE) and polypropylene (PP), a woven fabric or a non-woven fabric made of polypropylene, polyethylene terephthalate (PET), methylcellulose and the like. In addition, a separator is not restricted to a bag shape, You may use a sheet-like thing.

  On the other hand, the negative electrode has a negative electrode active material layer formed on both surfaces of a metal foil made of, for example, copper foil. The negative electrode active material layer is formed including a negative electrode active material and a binder. Examples of the negative electrode active material include carbon such as graphite, highly oriented graphite, mesocarbon microbeads, hard carbon, and soft carbon, alkali metals such as lithium and sodium, metal compounds, SiOx (0.5 ≦ x ≦ 1.5 ) And the like, and boron-added carbon.

  The binder is, for example, a fluorine-containing resin such as polyvinylidene fluoride, polytetrafluoroethylene, or fluororubber, a thermoplastic resin such as polypropylene or polyethylene, an imide resin such as polyimide or polyamideimide, or an alkoxysilyl group-containing resin. Good. A tab is formed on one edge of the negative electrode corresponding to the position of the negative electrode terminal. The positive electrode tab and the negative electrode tab are formed at positions that do not overlap each other when the positive electrode and the negative electrode are stacked.

  As shown in FIG. 1, the workpiece inspection apparatus 1 includes a first conveyance unit 2, a second conveyance unit 3 provided at a subsequent stage of the first conveyance unit 2, and a second conveyance unit as components for conveying the workpiece 10. 3, a third transport unit 4 provided in a subsequent stage.

  The 1st conveyance part 2 is a belt conveyor, and conveys the workpiece | work 10 with the predetermined | prescribed conveyance speed V1 in the horizontal direction. The first conveyance unit 2 is configured to expose the plurality of workpieces 10 such that the tab of the workpiece 10 (positive electrode or negative electrode) faces the upstream side in the conveyance direction and one main surface 10a of the workpiece 10 is exposed upward. Transport. The workpiece 10 transported by the first transport unit 2 is transferred from the end 2 a on the downstream side in the transport direction of the first transport unit 2 to the support wall portion 32 of the second transport unit 3. In the present embodiment, the first transport unit 2 is a belt conveyor, but the first transport unit 2 places the work 10 so that the main surface 10a of the work 10 is parallel to the transport direction and is stable. Any means may be used as long as it is a means for conveying the workpiece 10 in a state. For example, the first transport unit 2 may be a roller conveyor or the like.

  The second transport unit 3 is arranged on the downstream side of the first transport unit 2 in the transport direction, and is erected at a predetermined interval along the loop-shaped transport member 31 extending in the vertical direction and the outer peripheral surface 31 a of the transport member 31. And a plurality of support wall portions 32 that move together with the conveying member 31.

  The conveying member 31 is composed of an endless belt, for example. The conveying member 31 is mounted on a pair of rollers 33 and 33 facing away from each other in the vertical direction. When the roller pairs 33 and 33 are rotated, the conveying member 31 is rotated. In the example of FIG. 1, the roller pair 33, 33 is given a rotational driving force by a drive unit (not shown) and rotates clockwise, whereby the conveying member 31 circulates clockwise. Of the path through which the transport member 31 circulates, the part through which the work 10 passes becomes a transport path for transporting the work 10. An upper end portion in the vertical direction of the conveying member 31 forms a bent portion 34 where the conveying member 31 is folded back. That is, before and after the bent portion 34, the circulation direction of the conveying member 31 changes from a vertically upward direction to a horizontal direction and then changes to a vertically downward direction.

  The support wall portion 32 is a member erected at a predetermined interval along the outer peripheral surface 31a of the transport member 31, and is a rectangular plate member, for example. The support wall 32 moves clockwise with the circulation of the transport member 31 described above. Here, the pitch at which the plurality of support wall portions 32 are provided (that is, the pitch p <b> 2 of the workpiece 10 conveyed in the second conveyance unit 3) is smaller than the pitch p <b> 1 of the workpiece 10 conveyed in the first conveyance unit 2. . This is due to the arrangement of the workpiece 10. That is, in the state where the work 10 is laid on the belt of the first transport unit 2, the pitch p <b> 1 is required to be at least the width (length) in the transport direction of the work 10, but on the main surface 10 a in the second transport unit 3. By arranging the workpieces 10 in the vertical direction, the pitch p2 can be made narrower than the pitch p1. In the 1st conveyance part 2 and the 2nd conveyance part 3, by arrange | positioning the workpiece | work 10 as mentioned above, the installation space | interval of the support wall part 32 is adjusted so that the pitch p2 may become smaller than the pitch p1. . Thereby, the conveyance density of the 2nd conveyance part 3 is larger than the conveyance density of the 1st conveyance part 2. FIG. That is, the workpiece 10 is transferred from the first conveyance unit 2 to the second conveyance unit 3, and the main surface 10a of the workpiece 10 changes from a state parallel to the conveyance direction to a state where the workpiece 10 stands in the conveyance direction (conveyance path). By making it, the conveyance density of the 2nd conveyance part 3 can be made larger than the conveyance density of the 1st conveyance part 2. FIG. Here, the conveyance density means the number of workpieces 10 included per unit section in the conveyance direction of the workpieces 10. Accordingly, the transport speed V2 of the second transport unit 3 (that is, the circulation speed of the transport member 31) can be set lower than the transport speed V1 of the first transport unit 2. Here, the conveyance speed means a distance along the conveyance direction in which the workpiece 10 moves per unit time. That is, the second transport unit 3 can function as a low speed section that transports the workpiece 10 at a lower speed than the first transport unit 2. In the present embodiment, as an example, an angle formed by the support wall portions 32 adjacent to each other in the vicinity of the bent portion 34 where the conveying member 31 is folded is set to 72 degrees.

  Subsequently, the conveying operation of the workpiece 10 by the second conveying unit 3 will be described. First, the work 10 discharged from the end 2a on the downstream side in the transport direction of the first transport unit 2 is scooped up by the support wall 32 rising from below the end 2a, whereby the first transport unit The workpiece 10 is transferred from 2 to the second transfer unit 3.

  The workpiece 10 that has been scooped up by the support wall portion 32 comes into contact with the support wall portion 32 at the main surface 10b of the workpiece 10 on the upstream side of the conveyance path in the second conveyance portion 3 (left side of the conveyance member 31 in FIG. 1). In the state where the main surface 10a is exposed (first state), and rises together with the support wall portion 32. When the support wall portion 32 that supports the workpiece 10 reaches the bent portion 34, the rotation shaft of the roller 33 on the upper side of the conveying member 31 is maintained while maintaining the posture standing with respect to the outer peripheral surface 31 a of the conveying member 31. Rotate around the center. Until the support wall 32 reaches a position extending in the vertical direction at the top of the conveying member 31, the work 10 is in a state where the main surface 10 b of the work 10 is in contact with and supported by the support wall 32. ing.

  When the support wall 32 reaches a position extending in the vertical direction at the top of the transport member 31, the workpiece 10 supported by the support wall 32 extends in the vertical direction along the support wall 32, Inverted state (state indicated by broken line R in FIG. 1). When the support wall 32 further circulates clockwise from there, the main surface 10b of the inverted workpiece 10 is pushed out in the horizontal direction by the support wall 32, and the workpiece 10 is inverted. Specifically, the workpiece 10 falls forward due to gravity, and the main surface 10a comes into contact with the support wall portion 32 that is positioned upstream of the support wall portion 32 that has previously supported the workpiece 10 (forward in the transport direction). Change to a supported state. That is, the workpiece 10 changes to a state where the main surface 10b is exposed (second state).

  The workpiece 10 that has been reversed to be in the second state has the main surface 10a of the workpiece 10 abutting against the support wall 32 on the downstream side of the conveyance path in the second conveyance unit 3 (on the right side of the conveyance member 31 in FIG. 1). In a state where the main surface 10b is supported in contact and exposed (second state), the support wall portion 32 is lowered. When the support wall 32 is lowered to the position where the workpiece 10 is delivered to the third transport unit 4, a part of the main surface 10 a of the work 10 protruding from the support wall 32 is upstream in the transport direction of the third transport unit 4. The workpiece 10 is transferred to the third transport unit 4 by riding on the end 4a. The support wall portion 32 that has transferred the workpiece 10 to the third conveyance portion 4 circulates around the lower end portion in the vertical direction of the conveyance member 31 by circulation of the conveyance member 31, and is discharged from the first conveyance portion 2. Used again to transport

  The 3rd conveyance part 4 is a belt conveyor for conveying the workpiece | work 10 to the following process (for example, the process of laminating | stacking the workpiece | work 10 etc.), and conveys the workpiece | work 10 with the same conveyance speed V1 as the 1st conveyance part 2 in the horizontal direction. To do. The third transport unit 4 exposes the plurality of workpieces 10 such that the tab of the workpiece 10 (positive electrode or negative electrode) is directed downstream in the transport direction and the other main surface 10b of the workpiece 10 is exposed upward. Transport.

  As shown in FIG. 1, the workpiece inspection apparatus 1 is configured to inspect the workpiece 10 conveyed by the second conveyance unit 3, and the imaging unit 5 that images the workpiece 10 and the imaging unit 5 at the time of imaging. The illumination unit 6 that irradiates the work 10 with light, the air blowing unit (inversion control means) 7 for reversing the work 10, the control unit 8 that controls the operation of the imaging unit 5, the illumination unit 6, and the air blowing unit 7. And comprising.

  The imaging unit 5 is disposed so as to face the reversal position (the bent portion 34 in the present embodiment) of the work 10 in the second transport unit 3, and the main surface 10a of the work 10 before reversal (work in the first state). And the main surface 10b of the workpiece | work 10 (work of a 2nd state) after inversion is imaged. In the present embodiment, as an example, the imaging unit 5 includes a first camera 5A that images the main surface 10a of the workpiece 10 before inversion, and a second camera 5B that images the main surface 10b of the workpiece 10 after inversion. . The timing of imaging of the first camera 5A and the second camera 5B is controlled by the control unit 8.

  The first camera 5 </ b> A is a workpiece 10 (work 10 </ b> A in FIG. 1) that is supported by a support wall portion 32 that is positioned downstream (backward in the conveyance direction) with respect to the support wall portion 32 that extends in the vertical direction at the top of the conveyance member 31. It is arrange | positioned in the position which opposes the main surface 10a. The second camera 5 </ b> B is a workpiece 10 (work 10 </ b> B in FIG. 1) that is supported by the support wall 32 that is positioned upstream of the support wall 32 that extends in the vertical direction at the top of the transport member 31. It arrange | positions in the position which opposes the main surface 10b.

  The illumination unit 6 is a device that irradiates the surface of the workpiece 10 with light for imaging by the imaging unit 5. In this embodiment, as an example, the illumination unit 6 includes a first illumination 6A that irradiates light in a direction D1 orthogonal to the main surface 10a of the workpiece 10A before inversion, and a workpiece 10B after inversion. The second illumination 6B that irradiates light in a direction D2 orthogonal to the main surface 10b with respect to the main surface 10b, and the main surface 10a of the workpiece 10A before reversing and the main surface 10b of the work 10B after reversing vertically downward And a third illumination 6C that irradiates light in the direction D3. ON / OFF switching of the first illumination 6A, the second illumination 6B, and the third illumination 6C is controlled by the control unit 8.

  As shown in FIG. 1, the direction D1 orthogonal to the main surface 10a of the workpiece 10A before reversal and the direction D2 orthogonal to the main surface 10b of the workpiece 10B after reversal are inclined from the vertical direction by the same angle. ing. That is, the angle θ1 formed by the direction D1 and the direction D3 is equal to the angle θ2 formed by the direction D2 and the direction D3. As a result, when the main surface 10a of the workpiece 10A is imaged by the first camera 5A in a state where the light from the third illumination 6C is irradiated to the workpiece 10A before reversal, and the work 10B before reversal is third. The imaging conditions (light irradiation angle) can be made consistent with the case where the main surface 10b of the workpiece 10B is imaged by the second camera 5B in a state where the light from the illumination 6C is irradiated.

  The air blowing unit 7 is a device that injects air to forcibly invert the workpiece 10 in the second transport unit 3. In the present embodiment, as an example, the air blowing unit 7 is shown in FIG. 1 with respect to the main surface 10b of the workpiece 10 in the inverted state (the state indicated by the broken line R in FIG. 1) (or the workpiece 10 on the near side in the inverted state). Air is injected from the left side of the figure. The work 10 injected with air is forcibly reversed by being tilted forward. The timing of air injection by the blower 7 is controlled by the controller 8.

  The control unit 8 is a part that controls the operations of the imaging unit 5, the illumination unit 6, and the air blowing unit 7 described above. For example, a CPU (Central Processing Unit), a ROM (Read Only Memory), and a RAM (Random Access Memory). And a computer having an input / output interface and the like. The control unit 8 is configured to be able to communicate with the imaging unit 5, the illumination unit 6, and the blower unit 7 via a wired or wireless communication interface. The control unit 8 transmits a control signal for controlling each operation to the imaging unit 5, the illumination unit 6, and the blower unit 7. The imaging unit 5, the illumination unit 6, and the air blowing unit 7 that have received the control signal perform an operation instructed by the control signal. In addition, the control unit 8 receives data of an image captured by the imaging unit 5 from the imaging unit 5.

  The control unit 8 performs image processing on the image captured by the imaging unit 5, thereby performing foreign matter inspection (determination of the presence or absence of foreign matter) and scratch inspection (presence of scratches) on both surfaces (main surfaces 10a and 10b) of the workpiece 10. Visual inspection). A program for executing image processing is stored in advance in the ROM or the like of the control unit 8, and the control unit 8 reads out and executes the program on the RAM, thereby executing the above-described image processing. Here, the foreign matter adhering to the surface of the workpiece main surface can be appropriately captured in the captured image by irradiating the workpiece main surface with light from the front. Further, by irradiating the work main surface with light obliquely, scratches on the surface of the work main surface can be raised in the captured image. Therefore, the control unit 8 performs foreign object inspection on the main surfaces 10a and 10b of the work 10 by executing image processing on an image captured by irradiating light on the main surfaces 10a and 10b of the work 10 from the front. To do. Moreover, the control part 8 performs the flaw test | inspection of the main surfaces 10a and 10b of the workpiece | work 10 by performing the image process with respect to the image imaged by irradiating light with respect to the main surfaces 10a and 10b of the workpiece | work 10 diagonally. To do. Various known methods can be used for various inspection methods using image processing. For example, the control unit 8 extracts defective workpieces 10 by performing pass / fail judgments for each of the above-described inspections, and removes information for specifying the extracted workpieces 10 at a subsequent stage of the workpiece inspection device 1 ( (Not shown) may be notified. Thereby, the defective workpiece | work 10 can be removed appropriately in a removal apparatus.

  The control unit 8 irradiates light on the main surface from the front with respect to each of the main surfaces 10a and 10b of the individual workpieces 10 conveyed by the second conveyance unit 3 in order to perform the above-described inspections. The operations of the imaging unit 5, the illuminating unit 6, and the air blowing unit 7 are controlled so as to acquire two types of images when light is applied obliquely to the main surface.

  With reference to FIG. 2, an example of a control procedure of the control unit 8 will be described, focusing on the case where two types of images (a total of four images) are acquired for each of the main surfaces 10 a and 10 b of one workpiece 10. . Here, the state of the 2nd conveyance part 3 shown by FIG. 1 shall be an initial state.

  First, in step S1, the control unit 8 turns on the first illumination 6A and causes the first camera 5A to execute an imaging process in the initial state. That is, the control unit 8 causes the first illumination 6A to irradiate light in the direction D1 with respect to the main surface 10a of the workpiece 10A before inversion, and causes the first camera 5A to apply the main surface 10a of the workpiece 10A before inversion. A process for imaging (first imaging process) is executed. Thereby, the control part 8 acquires the image at the time of irradiating light from the front with respect to the main surface 10a of the workpiece | work 10A before inversion from the 1st camera 5A. The control unit 8 performs the foreign substance inspection on the main surface 10a of the workpiece 10A before reversal by executing image processing on the image.

  Subsequently, in step S2, the control unit 8 turns off the first illumination 6A and turns on the third illumination 6C to cause the first camera 5A to execute an imaging process. That is, the control unit 8 causes the third illumination 6C to irradiate light in the direction D3 with respect to the main surface 10a of the workpiece 10A before inversion, and causes the first camera 5A to apply the main surface 10a of the workpiece 10A before inversion. A process for imaging (second imaging process) is executed. Thereby, the control part 8 acquires the image at the time of irradiating light diagonally with respect to the main surface 10a of the workpiece | work 10A before inversion from the 1st camera 5A. The control unit 8 performs a flaw inspection on the main surface 10a of the workpiece 10A before inversion by executing image processing on the image.

  Subsequently, the control unit 8 completes the first imaging process and the second imaging process, and then the workpiece 10 to be imaged by the first imaging process and the second imaging process is circulated by the conveyance member 31. It is detected that the position has reached the position where the head is inverted (position indicated by the broken line R in FIG. 1). A method for performing such detection is not particularly limited. For example, a sensor or the like may be used, and the elapsed time from the initial state and the preset transport speed V2 of the second transport unit 3 may be used. It may be performed by prediction based on. The control unit 8 causes the air blowing unit 7 to execute air injection (reversal processing) using the detection as a trigger (step S3). Thereby, the control part 8 can forcibly invert the workpiece | work 10 which reached | attained the position vicinity used as an inverted state.

  Then, the control part 8 starts the process of step S4 by having triggered the injection of the air by the ventilation part 7 in step S3. The control unit 8 turns off the third illumination 6C and turns on the second illumination 6B to cause the second camera 5B to execute an imaging process. That is, the control unit 8 causes the second illumination 6B to irradiate light in the direction D2 with respect to the main surface 10b of the inverted work 10B, and causes the second camera 5B to apply the main surface 10b of the inverted work 10B. A process of capturing an image (third imaging process) is executed. Thereby, the control part 8 acquires the image at the time of irradiating light from the front with respect to the main surface 10b of the workpiece | work 10B after inversion from the 2nd camera 5B. The control part 8 performs the foreign material inspection of the main surface 10b of the workpiece 10B after the inversion by executing image processing on the image.

  Subsequently, in step S5, the control unit 8 turns off the second illumination 6B and turns on the third illumination 6C to cause the second camera 5B to perform an imaging process. That is, the control unit 8 causes the third illumination 6C to irradiate light in the direction D3 with respect to the main surface 10b of the inverted work 10B, and causes the second camera 5B to apply the main surface 10b of the inverted work 10B. A process of capturing an image (fourth imaging process) is executed. Thereby, the control part 8 acquires the image at the time of irradiating light diagonally with respect to the main surface 10b of the workpiece | work 10B after inversion from the 2nd camera 5B. The control unit 8 performs a flaw inspection on the main surface 10b of the inverted workpiece 10B by performing image processing on the image.

  Before and after the workpiece 10 is reversed at the bent portion 34 where the conveying member 31 is folded back by the processing of steps S1 to S5, images of the main surfaces 10a and 10b of the workpiece 10 are acquired, and foreign matters on the main surfaces 10a and 10b of the workpiece 10 are obtained. Inspection and scratch inspection are performed. Note that the processing order of step S1 and step S2 may be switched. Similarly, the processing order of step S3 and step S4 may be switched. For example, by switching the processing order of step S4 and step S5 among the processing of steps S1 to S5, switching of illumination can be made unnecessary in step S5 executed before step S4. That is, since the third illumination 6C is turned on in step S2, it is not necessary to switch the illumination again in step S5. Moreover, the imaging process for acquiring an image in each step and the image process for the image acquired by the imaging process may be performed independently and in parallel. In this case, for example, after the first imaging process is completed in step S <b> 1, the control unit 8 performs image processing on the image acquired by the first imaging process and does not wait for the completion of the image processing. The second imaging process in step S2 can be immediately executed.

  As shown in FIG. 1, when the third and fourth imaging processes in steps S4 and S5 are performed, the subsequent workpiece 10 is captured by the first camera 5A (the position of the workpiece 10A in FIG. 1). Has reached. Therefore, when the third and fourth imaging processes for one workpiece 10 are completed, the control unit 8 operates to immediately execute the first and second imaging processes for the workpiece 10 subsequent to the one workpiece 10. To do. As described above, the control unit 8 repeatedly performs the processes of steps S1 to S5, thereby performing foreign object inspection and scratches on both surfaces (main surfaces 10a and 10b) of the individual workpieces 10 sequentially conveyed by the second conveyance unit 3. An inspection can be performed.

  As described above, in the workpiece inspection apparatus 1 according to the present embodiment, the second conveyance unit 3 provided at the rear stage of the first conveyance unit 2 has the main surfaces 10a and 10b of the workpiece 10 standing with respect to the conveyance path. By supporting the workpiece 10 so as to be in a state (a state orthogonal to the conveyance path as an example in the present embodiment), the workpiece 10 is conveyed at a conveyance density larger than the conveyance density of the first conveyance unit 2. Thereby, the 2nd conveyance part 3 functions as a low speed area which conveys the workpiece | work 10 at a low speed rather than the 1st conveyance part 2. FIG. Then, the first camera 5A and the second camera 5B arranged so as to face the position where the work 10 is reversed by the second transport unit 3 images the main surfaces 10a and 10b of the work 10 before and after the reversal. As a result, the inspection image of the workpiece 10 to be inspected can be efficiently acquired.

  Note that the “state standing with respect to the conveyance path” includes not only a state perpendicular to the conveyance path as in the present embodiment but also a state inclining with respect to the conveyance path. That is, in the present embodiment, the configuration in which the workpiece 10 is supported so as to be orthogonal to the conveyance path is illustrated, but for example, the workpiece 10 is provided by the support wall portion 32 being inclined with respect to the conveyance member 31. Further, it may be supported so as to be inclined with respect to the conveyance path. Even in this case, the workpieces 10 adjacent to each other can be arranged to face each other, and as a result, the conveyance density can be increased.

  Moreover, the quality of the inspection image of each workpiece | work 10 can be improved by acquiring the inspection image of the workpiece | work 10 in the 2nd conveyance part 3 which is a low speed area. Specifically, in the second transport unit 3, since it is a low speed section that transports the workpiece 10 at a lower speed than sections (the first transport unit 2 and the third transport unit 4) other than the second transport unit 3, The imaging quality (less blurring of the image, etc.) by the first camera 4A and the second camera 5B can be improved. For example, when an image of the main surface of the workpiece 10 moving on the first conveyance unit 2 or the third conveyance unit 4 is to be imaged, the imaging direction and the movement direction of the workpiece 10 are orthogonal to each other, so that the captured image is blurred. It is likely to occur. On the other hand, in the workpiece inspection apparatus 1, since the main surface of the workpiece 10 is imaged when the workpiece 10 rotates about the rotation axis of the roller 33 on the upper side of the conveying member 31 in the bending portion 34, The moving direction is substantially the same, and the captured image is less likely to be blurred.

  Further, it is not necessary to reduce the transport speed of the entire transport unit (that is, the first transport unit 2, the second transport unit 3, and the third transport unit 4) for inspecting the workpiece 10. Specifically, the second transport unit 3 provided as the section for inspection is a section in which the speed reduction is realized by increasing the transport density more than the first transport unit 2 and the third transport unit 4 which are normal high speed sections. Therefore, the conveyance speed V1 of the adjacent first conveyance unit 2 and third conveyance unit 4 is not affected. In other words, it is not necessary to reduce the transport speed V1 for inspection. For this reason, the inspection by the control unit 8 described above can be executed without lowering the conveyance efficiency (the number of workpieces discharged per unit time) of the entire conveyance unit. Therefore, according to the workpiece inspection apparatus 1, the workpiece 10 can be appropriately inspected while suppressing a decrease in the conveyance efficiency.

  In addition, according to the workpiece inspection apparatus 1, the support wall 32 supports the workpiece 10 so that the principal surfaces 10 a and 10 b of the workpiece 10 are orthogonal to the conveyance member 31, so that the principal surface of the workpiece 10 is the conveyance path. Therefore, the configuration in which the workpiece 10 is supported so as to be in a standing state can be realized with a simple configuration. In addition, by using the bent portion 34 where the conveying member 31 is folded, the workpiece 10 supported by the supporting wall portion 32 on the rear side in the conveying direction among the supporting wall portions 32 adjacent to each other is supported on the supporting wall portion on the front side in the conveying direction. The workpiece 10 can be smoothly moved (reversed) so as to be supported by 32. Further, as shown in FIG. 1, in the bent portion 34, the interval between the tips of the support wall portions 32 adjacent to each other is widened. Therefore, by reversing the workpiece 10 with the bent portion 34, the inverted workpieces 10 </ b> B adjacent to each other. And the workpiece 10A before reversal can be widened. Thereby, it becomes easy to visually recognize the exposed surface (the main surface 10a of the workpiece 10A before the reversal and the main surface 10b of the workpiece 10B after the reversal) from the direction facing the reversal position of the workpiece 10. Therefore, as shown in FIG. 1, the inspection image of the workpiece 10 can be appropriately captured by the first camera 5 </ b> A and the second camera 5 </ b> B arranged so as to face the inverted position of the workpiece 10.

  Moreover, according to the workpiece inspection apparatus 1, the control unit 8 switches and controls the operations of the imaging unit 5 and the illumination unit 6 and executes the first to fourth imaging processes, whereby one main surface 10a of the workpiece 10 is obtained. An image for performing foreign matter inspection and scratch inspection (images captured by the first and second imaging processes) and an image for performing foreign matter inspection and scratch inspection on the other main surface 10b of the workpiece 10 (third And an image captured by the fourth imaging process) can be automatically acquired. Thereby, the inspection of the workpiece main surface can be efficiently performed.

  Moreover, according to the workpiece inspection apparatus 1, the control unit 8 can control the timing at which the workpiece 10 is inverted by the blower unit 7 by itself, so that the processing after the workpiece inversion (third and fourth imaging processing) is performed. It is possible to execute at an appropriate timing.

  In the present embodiment, various modifications can be made without departing from the spirit of the present embodiment. For example, the reversal control means for forcibly reversing the workpiece 10 may be a device that reverses the workpiece 10 by contact with an air cylinder or the like instead of the air blowing unit 7 that ejects air. Further, as described above, after the workpiece 10 is in an inverted state (state indicated by a broken line R in FIG. 1), the workpiece inspection apparatus 1 is not necessarily provided because the workpiece 10 is naturally tilted and inverted by the circulation and gravity of the conveying member 31. The inversion control means may not be provided.

  Further, the imaging unit 5 uses the workpiece 10 before being inverted at the imaging position (the position of the workpiece 10A in FIG. 1) and the imaging position of the workpiece 10 after being inverted instead of the first camera 5A and the second camera 5B. 1 may be configured by a single wide-angle camera that can fit both of the workpieces 10 (work 10B in FIG. 1) within an imageable range. Alternatively, the imaging unit 5 may have a camera position for capturing the workpiece 10 before reversal (position of the first camera 5A in FIG. 1) and a camera position for capturing the workpiece 10 after reversal (second camera in FIG. 1). It may be configured by a single camera configured to be movable between the position 5B). The workpiece inspection apparatus 1 is configured to image the main surfaces 10a and 10b of the workpiece 10 before and after reversal. Since the workpiece 10 before reversal and the workpiece 10 after reversal, which are subjects, are close to each other, as described above. It is easy to configure the imaging unit 5 with a single camera.

  Further, for example, there is a case where it is required to continuously supply the workpiece 10 to a device (not shown) at the subsequent stage of the workpiece inspection device 1. In such a case, when the supply of the workpiece 10 from the first conveyance unit 2 is temporarily interrupted, if the second conveyance unit 3 continues the circulation operation of the conveyance member 31 as it is, an empty support that does not convey the workpiece 10. Since the wall portion 32 is mixed between the support wall portions 32 that convey the workpiece 10, the workpiece 10 cannot be continuously supplied to the third conveyance portion 4. Therefore, the second transport unit 3 may be configured as a buffer device in which the entire transport member 31 can move up and down in the vertical direction and the circulation speed of the transport member 31 can be adjusted.

  For example, when one piece of the supply of the workpiece 10 from the first transport unit 2 is lost, the speed of the circulating movement of the transport member 31 is reduced to half by a control device (not shown), and after being dropped in half. What is necessary is just to descend | fall the conveyance member 31 whole at the same speed as the speed of circulation movement. By such an operation, the empty support wall portion 32 is prevented from flowing to the third transport unit 4 and the workpiece 10 is supplied from the second transport unit 3 to the third transport unit 4 at a constant interval. can do.

  Further, contrary to the above example, there is a case where some trouble occurs in the downstream manufacturing process, and it is necessary to stop the operation of the third transport unit 4, but it is not desired to stop the operation of the first transport unit 2. Conceivable. In such a case, the speed of the circulating movement of the conveying member 31 may be reduced to half and the entire conveying member 31 may be raised at the same speed as the speed of the circulating movement after being reduced to half. By such an operation, the second transport unit 3 can stop the supply of the work 10 to the third transport unit 4 and can receive the work 10 supplied from the first transport unit 2.

  When the 2nd conveyance part 3 functions as a buffer apparatus as mentioned above, what is necessary is just to comprise the imaging part 5, the illumination part 6, and the ventilation part 7, for example so that it may move with the conveyance member 31 integrally. In this case, since the relative positions of the imaging unit 5, the illuminating unit 6, and the air blowing unit 7 with respect to the imaging position of the workpiece 10 do not change, even if the second transport unit 3 functions as a buffer device and moves up and down, the workpiece The ten main surfaces 10a and 10b can always be imaged under the same imaging conditions (conditions such as the distance and angle between the subject and the camera and the angle at which the subject is irradiated with light).

  3 and 4 are views showing a modification of the workpiece inspection apparatus 1 according to the first embodiment. As shown in FIGS. 3 and 4, in the workpiece inspection apparatuses 1 </ b> A and 1 </ b> B according to the modification, the second transport units 3 </ b> A and 3 </ b> B connect the first transport unit 2 and the third transport unit 4 having different height positions. As a conveyance section for carrying out, it has the conveyance member 31 which inclines with respect to both a horizontal direction and a perpendicular direction. In other respects, the workpiece inspection apparatuses 1A and 1B have substantially the same configuration as the workpiece inspection apparatus 1. 3 and 4, the illustration of the control unit and the air blowing unit is omitted.

  In the workpiece inspection apparatus 1A shown in FIG. 3, the second transport unit 3A is a support wall portion (support wall portion 32A in FIG. 3) that passes clockwise through the end portion positioned below both ends of the transport member 31. Thus, the workpiece 10 is received from the first transport unit 2. Further, the second transport unit 3A is changed from the support wall portion (support wall portion 32B in FIG. 3) passing through the upper end portion of both end portions of the transport member 31 to the third transport portion 4. Deliver work 10. In the second transport unit 3 </ b> A, the bent portion 34 where the transport path is folded is formed in the vicinity of the outlet where the workpiece 10 is transferred to the third transport unit 4. For this reason, the position where the workpiece 10 is reversed and the imaging positions of the main surfaces 10a and 10b of the workpiece 10 are provided in the vicinity of the exit. Imaging of the main surfaces 10a and 10b of the workpiece 10 in the workpiece inspection apparatus 1A may be performed by the two cameras 5A and 5B similarly to the workpiece inspection apparatus 1, or may be performed only by the wide-angle camera 5c. .

  In the workpiece inspection apparatus 1B shown in FIG. 4, the second transport unit 3B is a support wall portion (a support wall portion 32A in FIG. 4) that passes clockwise through the end portion located above the both ends of the transport member 31. Thus, the workpiece 10 is received from the first transport unit 2. Further, the second transport unit 3B is changed from the support wall portion (support wall portion 32B in FIG. 4) that passes through the lower end of the transport member 31 in the clockwise direction to the third transport unit 4. Deliver work 10. In the second transport unit 3 </ b> A, the bent portion 34 where the transport path is folded is formed in the vicinity of the entrance that receives the workpiece 10 from the first transport unit 2. For this reason, the position where the workpiece 10 is reversed and the imaging positions of the main surfaces 10a and 10b of the workpiece 10 are provided in the vicinity of the entrance. The imaging of the main surfaces 10a and 10b of the workpiece 10 in the workpiece inspection apparatus 1B may be performed by the two cameras 5A and 5B similarly to the workpiece inspection apparatus 1, or may be performed only by the wide-angle camera 5c. .

  Effects similar to those of the above-described workpiece inspection apparatus 1 can also be obtained by the workpiece inspection apparatuses 1B and 1C. In addition, according to the workpiece inspection apparatuses 1B and 1C, the conveyance sections necessary for connecting the first conveyance unit 2 and the third conveyance unit 4 that are different from each other in height are configured as the conveyance units 3A and 3B. Thus, it can be used as a low-speed section for executing the inspection of the workpiece 10.

[Second Embodiment]
A workpiece inspection apparatus 100 according to the second embodiment will be described with reference to FIG. In addition, illustration of a control part and a ventilation part is abbreviate | omitted in FIG. The workpiece inspection apparatus 100 is mainly different from the workpiece inspection apparatus 1 in that the workpiece inspection apparatus 100 includes a second conveyance unit 50 having a rotating body 51 and a plurality of support wall portions 52 instead of the second conveyance unit 3. The rotating body 51 rotates around an axis parallel to the horizontal direction. The plurality of support wall portions 52 are provided radially at predetermined intervals along the outer periphery of the rotator 51 and rotate together with the rotator 51.

  Here, the pitch at which the plurality of support wall portions 52 are provided (in this embodiment, as an example, at an interval of 90 degrees) is the same as that of the first embodiment in that the second conveyance unit 50 is more than the conveyance density of the first conveyance unit 2. The workpiece 10 is adjusted to be conveyed at a large conveyance density. Accordingly, the second transport unit 50 functions as a low speed section that transports the workpiece 10 at a lower speed than the first transport unit 2. Note that by reducing the pitch at which the plurality of support wall portions 52 are provided (increasing the number of support wall portions 52), the transfer density can be increased, and the transfer speed V3 (rotating body 51) of the second transfer portion 50 can be increased. (Moving speed of the workpiece 10 along the rotation direction) can be reduced. Thus, the conveyance density and the conveyance speed V3 can be adjusted by adjusting the pitch at which the support wall portions 52 are provided.

  Then, conveyance of the workpiece | work 10 by the 2nd conveyance part 50 is demonstrated. First, the work 10 discharged from the end 2a on the downstream side in the transport direction of the first transport unit 2 is scooped up by the support wall 52 rising from below the end 2a, whereby the first transport unit The workpiece 10 is transferred from 2 to the second transport unit 50.

  The workpiece 10 raised to the support wall 52 is supported by the main surface 10b of the workpiece 10 being in contact with the support wall 52 on the upstream side of the conveyance path in the second conveyance unit 50, and the main surface 10a is exposed. In the state (first state), the rotating body 51 moves in the rotation direction together with the support wall portion 32. Until the support wall portion 52 that supports the workpiece 10 reaches a position extending in the vertical direction at the top portion 51 a of the rotating body 51, the workpiece 10 is supported with the main surface 10 b in contact with the support wall portion 52. It has become.

  When the support wall 52 reaches the position where the top 51 a of the rotating body 51 extends in the vertical direction, the workpiece 10 supported by the support wall 52 extends in the vertical direction along the support wall 52. Then, it becomes an inverted state (state indicated by a broken line R in FIG. 5). The support wall 52 further circulates clockwise from there, and inverts the workpiece 10 by tilting the inverted workpiece 10 forward in the rotation direction of the rotating body 51. Specifically, the workpiece 10 falls forward due to gravity, and is supported by the main surface 10a of the workpiece 10 abutting on the support wall portion 52 positioned in front of the support wall portion 52 that has supported the workpiece 10 until then. Change to a state. That is, the workpiece 10 changes to a state (second state) in which the main surface 10b of the workpiece 10 is exposed.

  In this embodiment, as an example, the workpiece inspection apparatus 100 includes a single wide-angle camera 15A as the imaging unit 15, and includes a first illumination 16A that irradiates light vertically downward as the illumination unit 16. According to this configuration, as shown in FIG. 5, the camera 15 </ b> A has the workpiece 10 </ b> A before reversal immediately after being transferred from the first transport unit 2 to the second transport unit 50 (that is, the main surface 10 a is vertically upward). The main surface 10a of the workpiece 10A) in the facing state can be imaged. At the same time, the camera 15A can image the main surface 10b of the workpiece 10B immediately after reversal (that is, the workpiece 10B with the main surface 10b facing vertically upward).

  As shown in FIG. 5, when the illumination unit 16 includes only the first illumination 16 </ b> A, only an image when light is irradiated from the front onto the main surfaces 10 a and 10 b of the workpiece 10 can be acquired. However, the workpiece inspection apparatus 100 further includes illumination that irradiates light in a direction inclined with respect to the vertically downward direction as the illumination unit 16, so that the main surface 10 a of the workpiece 10 is similar to the workpiece inspection apparatus 1. It is also possible to acquire an image when light is obliquely applied to 10b. Needless to say, the workpiece inspection apparatus 100 can employ the same configuration of the imaging unit and the illumination unit as the workpiece inspection apparatus 1 (that is, a configuration including two cameras and three illuminations).

  According to the workpiece inspection apparatus 100 according to the present embodiment, the rotating body 51 and the plurality of support wall portions 52 provided radially on the outer periphery of the rotating body 51 have a simpler configuration than the first transport unit 2. The 2nd conveyance part 50 which functions as a low-speed area which conveys the workpiece | work 10 can be comprised. In addition, at the position where the support wall 52 extends in the vertical direction at the top 51a of the rotating body 51, the work 10 supported by the support wall 52 is tilted forward in the rotation direction by gravity or the like, so that the work 10 is reversed. Can be easily realized.

DESCRIPTION OF SYMBOLS 1,1A, 1B, 100 ... Work inspection apparatus, 2 ... 1st conveyance part, 3, 3A, 3B, 50 ... 2nd conveyance part, 4 ... 3rd conveyance part, 5,15 ... Imaging part, 6, 16 ... Illumination part, 7 ... Blower part (reversal control means), 8 ... Control part, 10, 10A, 10B ... Work, 10a ... Main surface (one main surface), 10b ... Main surface (the other main surface), 31 ... Conveying member, 32, 32A, 32B ... support wall, 34 ... bent portion, 51 ... rotating body, 52 ... support wall.

Claims (5)

A first transport unit for transporting a sheet-shaped or plate-shaped workpiece;
A conveyance density larger than the conveyance density of the first conveyance unit by receiving the workpiece from the first conveyance unit and supporting the workpiece so that the main surface of the workpiece is standing with respect to the conveyance path. And the workpiece is changed from a first state in which one principal surface of the workpiece is exposed at a predetermined position in the conveyance path to a second state in which the other principal surface of the workpiece is exposed. A second transport unit that reverses
The second transport unit is disposed so as to face a position where the work is reversed, and images one main surface of the work in the first state and the other main surface of the work in the second state. An imaging unit ,
The second transport unit is
A loop-shaped transport member, and a plurality of support wall portions that are erected at predetermined intervals along the outer peripheral surface of the transport member and move together with the transport member,
Supporting the work by bringing the main surface of the work into contact with the support wall,
In the bent portion where the conveying member is folded back, the support located in a stage before the support wall portion from the first state in which the other main surface of the workpiece is supported by being brought into contact with the one support wall portion. Reversing the workpiece so as to change to the second state in which one main surface of the workpiece is in contact with and supported by the wall,
Work inspection device. An illuminating unit for irradiating light onto the workpiece conveyed by the second conveying unit;
A control unit that controls operations of the imaging unit and the illumination unit,
The controller is
The illumination unit causes the one main surface of the workpiece in the first state to irradiate light from the front, and causes the imaging unit to image one main surface of the workpiece in the first state. 1 imaging processing;
The illumination unit irradiates light obliquely to one main surface of the workpiece in the first state, and causes the imaging unit to image one main surface of the workpiece in the first state. A second imaging process;
The illumination unit irradiates light from the front to the other main surface of the workpiece in the second state, and causes the imaging unit to image the other main surface of the workpiece in the second state. A third imaging process;
The illumination unit irradiates light obliquely to the other main surface of the workpiece in the second state, and causes the imaging unit to image the other main surface of the workpiece in the second state. Performing a fourth imaging process;
The workpiece inspection apparatus according to claim 1 . The control unit includes a reversal control unit for forcibly reversing the workpiece in the second transport unit, and the reversal control unit performs the reversal control unit after the first imaging process and the second imaging process are completed. Further executing a reversing process for reversing the work, and after executing the reversing process, execute the third imaging process and the fourth imaging process.
The workpiece inspection apparatus according to claim 2 . The first transport unit transports the work by placing the work so that the main surface of the work is parallel to the transport direction.
The workpiece inspection apparatus according to any one of claims 1 to 3 . The first transport unit is a belt conveyor.
The workpiece inspection apparatus according to claim 4 .

Images