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JP6574881B2 - Bonding structure - Google Patents
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JP6574881B2 - Bonding structure - Google Patents

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JP6574881B2
JP6574881B2 JP2018149265A JP2018149265A JP6574881B2 JP 6574881 B2 JP6574881 B2 JP 6574881B2 JP 2018149265 A JP2018149265 A JP 2018149265A JP 2018149265 A JP2018149265 A JP 2018149265A JP 6574881 B2 JP6574881 B2 JP 6574881B2
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opening
welded portion
absorbing member
annular
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JP2018176284A (en
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山岸 裕幸
裕幸 山岸
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Fujikura Ltd
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Description

本発明は、相互に重ね合わされ、その境界面または境界面近傍に形成された溶着部を介して互いに接合された光吸収性部材及び光透過性部材を備える接合構造体、及びその製造方法に関する。   The present invention relates to a light-absorbing member and a light-transmitting member that are overlapped with each other and bonded to each other via a welded portion formed at or near the boundary surface, and a manufacturing method thereof.

従来、複数の部材を接合する方法として、レーザ光の照射による接合方法があり、その中でも最近では、局所的な加熱であり製品への熱ダメージが少ないとともに、溶着部の、外観への影響が少ないレーザ透過溶着法(Laser Transmission Welding)が注目されている。この接合方法は、接合部材の一方にレーザ光に対して透過性を有する部材(光透過性部材)を用い、他方にレーザ光に対して吸収性を有する部材(光吸収性部材)を用い、これらを互いに重ね合わせて加圧した状態で、レーザ光を光透過性部材側から照射することで、照射されたレーザ光のエネルギが光吸収性部材の境界面付近で吸収されて発熱し、その熱が光透過性部材にも伝達して両部材が溶融し、最後にその溶融部が冷却、固化されることで両部材が接合される方法である。   Conventionally, as a method of joining a plurality of members, there is a joining method by laser light irradiation, and among them, recently, it is local heating and there is little thermal damage to the product, and the influence of the welded part on the appearance is also affected. Less laser transmission welding has attracted attention. This joining method uses a member (light transmissive member) that is transparent to laser light on one side of the joining member, and a member (light absorbing member) that is absorbent to laser light on the other side. By irradiating laser light from the light transmitting member side in a state where these are superposed on each other and pressed, the energy of the irradiated laser light is absorbed near the boundary surface of the light absorbing member and generates heat. This is a method in which heat is transmitted to the light transmissive member, both members are melted, and finally, the melted portion is cooled and solidified to join both members.

このレーザ透過溶着法には、いくつかの重要なポイントがあるが、とりわけ重要なのが接合される部材同士を加圧して確実に密着させることである。接合される部材間に隙間が存在すると、レーザ照射によって光吸収性部材で発生した熱が相手側である光透過性部材にうまく伝達されず、局所的な温度上昇によって隆起、膨張、爆発といった溶着不良となるからである。   There are several important points in this laser transmission welding method, but what is particularly important is to pressurize the members to be joined together to ensure close contact. If there is a gap between the members to be joined, heat generated in the light-absorbing member due to laser irradiation will not be transferred well to the light-transmitting member on the other side, and welding such as bulging, expansion, and explosion will occur due to local temperature rise This is because it becomes defective.

この加圧は、一般的には、レーザ光に対して透過性を有するガラス板を光透過性部材上に配置し、このガラス板を介して両部材に押し圧を加える方法によって実現される(下記特許文献1参照)。しかし、この方法の場合、接合部材の加熱、溶融時に発生する煤や難燃剤の気化成分によってガラス板が汚れ、レーザ光に対するガラス板の吸収率が上がってガラス板自体が加熱されて割れに至るという問題がある。また、汚れたガラス板は、レーザ光を遮り、光吸収性部材に十分な光が届かなくなる結果、溶着強度の低下をも引き起こす。   This pressurization is generally realized by a method in which a glass plate that is transparent to laser light is placed on a light-transmitting member and a pressing pressure is applied to both members via the glass plate ( See Patent Document 1 below). However, in the case of this method, the glass plate is soiled by the soot generated during the heating and melting of the joining member and the vaporized component of the flame retardant, the absorption rate of the glass plate with respect to the laser light is increased, and the glass plate itself is heated to crack. There is a problem. In addition, the dirty glass plate blocks the laser beam, and as a result, sufficient light does not reach the light-absorbing member, resulting in a decrease in welding strength.

これに対して、下記特許文献2では、ガラス板を用いず、接合される部材同士を吸引により密着させる方法が提案されている。具体的には、特許文献2に記載の方法は、接合される部材の一方に溝部を形成しておき、この溝部の空間を減圧することで両部材同士を密着させるものである。しかし、レーザ照射により溶着する際に光透過性部材に熱変形が生じて光吸収性部材との間に隙間が発生し、この隙間を通じて空気が漏れる結果、吸引密着性が低下する場合がある。   On the other hand, Patent Document 2 below proposes a method in which members to be joined are brought into close contact with each other without using a glass plate. Specifically, in the method described in Patent Document 2, a groove is formed on one of the members to be joined, and the two members are brought into close contact with each other by decompressing the space of the groove. However, when welding is performed by laser irradiation, thermal deformation occurs in the light-transmitting member and a gap is generated between the light-absorbing member and air leaks through the gap, resulting in a decrease in suction adhesion.

特開昭62−142092号公報JP-A-62-142092 国際公開第2010/035696号パンフレットInternational Publication No. 2010/035696 Pamphlet

それ故本発明の目的は、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させるのに適した接合構造体を提供するとともに、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させることができる接合構造体の製造方法を提供することにある。   Therefore, an object of the present invention is to provide a joining structure suitable for uniformly and reliably bringing members to be joined together without using a glass plate, and without using a glass plate. An object of the present invention is to provide a method for manufacturing a joined structure capable of uniformly and reliably bringing members to be joined together.

上述した課題を解決するための本発明の接合構造体は、少なくとも1つの開口部を有する光吸収性部材と、開口部を覆うように光吸収性部材上に配置された光透過性部材と、を備え、開口部を囲繞するとともに光吸収性部材と光透過性部材とを接合する環状の溶着部が形成され、環状の溶着部は、その延在方向に対する垂直断面でみて、光透過性部材側の部分の面積に対する光吸収性部材側の部分の面積の比が12〜35の範囲内にあることを特徴とするものである。 The bonded structure of the present invention for solving the above-described problem includes a light-absorbing member having at least one opening, a light-transmitting member disposed on the light-absorbing member so as to cover the opening, An annular welded portion is formed that surrounds the opening and joins the light absorbing member and the light transmissive member. The annular welded portion is a light transmissive member as viewed in a vertical cross section with respect to the extending direction. The ratio of the area of the light absorbing member side to the area of the side part is in the range of 12 to 35.

この場合、上記比は19〜26の範囲内にあることが好ましい。   In this case, the ratio is preferably in the range of 19 to 26.

また、本発明の接合構造体にあっては、光透過性部材は、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して、光吸収性部材に密着する薄板状に形成されていることが好ましい。この場合、光透過性部材は、環状の溶着部が形成される前の状態で開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材に密着する厚みに形成されていることが好ましい。   In the bonded structure of the present invention, the light transmissive member is deformed when the inside of the opening is in a reduced pressure state before the annular welded portion is formed, and becomes a light absorbing member. It is preferably formed in a thin plate shape that is in close contact. In this case, the light transmissive member is deformed when the inside of the opening is decompressed to −80 kPa or more and −20 kPa or less by the gauge pressure before the annular welded portion is formed, and is in close contact with the light absorbing member. It is preferable that the thickness is formed.

あるいは、本発明の接合構造体にあっては、光透過性部材は、環状の溶着部よりも外側に、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して光吸収性部材に密着する薄肉片を有することが好ましい。この場合、薄肉片は、環状の溶着部が形成される前の状態で開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して光吸収性部材に密着する厚みに形成されていることが好ましい。   Alternatively, in the bonded structure according to the present invention, the light transmissive member is disposed outside the annular welded portion when the inside of the opening is in a reduced pressure state before the annular welded portion is formed. It is preferable to have a thin piece that deforms and adheres closely to the light absorbing member. In this case, the thin-walled piece is formed to a thickness that deforms and adheres closely to the light-absorbing member when the inside of the opening is decompressed to -80 kPa or more and -20 kPa or less as a gauge pressure before the annular welded portion is formed. It is preferable that

また、上記いずれかの接合構造体にあっては、環状の溶着部に隣接して位置し、光吸収性部材と光透過性部材とを接合する点状の溶着部を備えることが好ましい。   In any of the above-described bonded structures, it is preferable that the bonded structure includes a dot-shaped weld portion that is positioned adjacent to the annular weld portion and joins the light absorbing member and the light transmissive member.

上述した課題を解決するための本発明の接合構造体の製造方法は、少なくとも1つの開口部を有する光吸収性部材に、開口部を覆うように光透過性部材を重ね合わせ、光透過性部材側からレーザ光を照射することにより開口部を囲繞するよう環状の溶着部を形成して光吸収性部材と光透過性部材とを接合する接合構造体の製造方法であって、光吸収性部材の、環状の溶着部の形成予定部位に環状溝を形成しておき、環状の溶着部を形成するにあたり、光透過性部材側から環状溝にレーザ光を照射することを特徴とするものである。   In the manufacturing method of the bonded structure of the present invention for solving the above-described problem, the light-absorbing member having at least one opening is overlapped with the light-transmitting member so as to cover the opening, and the light-transmitting member is formed. A method for manufacturing a bonded structure in which a ring-shaped weld is formed so as to surround an opening by irradiating a laser beam from the side, and a light-absorbing member and a light-transmitting member are bonded. An annular groove is formed at a site where the annular welded portion is to be formed, and when forming the annular welded portion, the annular groove is irradiated with laser light from the light transmitting member side. .

この場合、環状溝の溝幅は0.1mm以上3mm以下とすることが好ましい。   In this case, the groove width of the annular groove is preferably 0.1 mm or more and 3 mm or less.

また、環状溝の深さは、環状溝の幅をL(mm)としてL/20(mm)以上L(mm)以下とすることが好ましい。   The depth of the annular groove is preferably L / 20 (mm) or more and L (mm) or less, where the width of the annular groove is L (mm).

さらに、光吸収性部材には、環状溝と開口部とを連通する連通溝を形成しておくことが好ましい。 Furthermore, it is preferable that a communication groove for communicating the annular groove and the opening is formed in the light absorbing member.

また、本発明の接合構造体の製造方法にあっては、光透過性部材を、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して、光吸収性部材に密着する薄板状に形成しておき、環状の溶着部を形成するにあたり、開口部内を減圧することにより光透過性部材を変形させ光吸収性部材に密着させた状態で光透過性部材側からレーザ光を照射することが好ましい。この場合、光透過性部材を、環状の溶着部が形成される前の状態で開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材に密着する厚みに形成しておくことが好ましい。   Further, in the method for manufacturing a bonded structure according to the present invention, the light transmissive member is deformed when the inside of the opening is in a reduced pressure state before the annular welded portion is formed, and absorbs light. The light-transmitting member is formed in a thin plate shape that is in close contact with the light-transmitting member, and in forming the annular welded portion, the light-transmitting member is deformed by reducing the pressure inside the opening and is in close contact with the light-absorbing member. It is preferable to irradiate laser light from the side. In this case, the light transmissive member is deformed when the inside of the opening is decompressed to -80 kPa or more and -20 kPa or less by the gauge pressure before the annular welded portion is formed, and is closely attached to the light absorbing member. It is preferable to form in thickness.

あるいは、本発明の接合構造体の製造方法にあっては、光透過性部材の、環状の溶着部よりも外側に、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して光吸収性部材に密着する薄肉片を形成しておき、環状の溶着部を形成するにあたり、開口部内を減圧することにより薄肉片を変形させ光吸収性部材に密着させた状態で光透過性部材側からレーザ光を照射することが好ましい。この場合、薄肉片を、環状の溶着部が形成される前の状態で開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して光吸収性部材に密着する厚みに形成しておくことが好ましい。薄肉片は、光吸収性部材の周縁部に沿って形成しておくことが好ましい。   Alternatively, in the method for manufacturing a bonded structure according to the present invention, the inside of the opening is depressurized before the annular welded portion is formed outside the annular welded portion of the light transmitting member. When forming the annular welded portion, the thin-walled piece was deformed by reducing the pressure in the opening, and the thin-walled piece was brought into close contact with the light-absorbing member. In this state, it is preferable to irradiate laser light from the light transmissive member side. In this case, the thin-walled piece is deformed when the inside of the opening is decompressed to -80 kPa or more and -20 kPa or less by the gauge pressure in a state before the annular welded portion is formed, and is formed to a thickness that adheres to the light absorbing member. It is preferable to keep it. The thin piece is preferably formed along the peripheral edge of the light absorbing member.

また、本発明の接合構造体の製造方法にあっては、光透過性部材を光吸収性部材に重ね合わせた後であってかつ環状の溶着部を形成する前に、光透過性部材側からレーザ光を照射して光吸収性部材と光透過性部材とを接合する点状の溶着部を形成することが好ましい。   Further, in the method for manufacturing a bonded structure according to the present invention, after the light transmitting member is superimposed on the light absorbing member and before the annular welded portion is formed, from the light transmitting member side. It is preferable to form a spot-like welded portion that joins the light-absorbing member and the light-transmitting member by irradiating the laser beam.

さらに、本発明の接合構造体の製造方法にあっては、光吸収性部材に、開口部につながるとともに外部の減圧装置に連通する吸引開口を形成しておくことが好ましい。   Furthermore, in the method for manufacturing a bonded structure according to the present invention, it is preferable to form a suction opening in the light-absorbing member that leads to the opening and communicates with an external pressure reducing device.

さらに、本発明の接合構造体の製造方法にあっては、環状の溶着部の形成後に、開口部内の減圧を維持したまま光透過性部材側からレーザ光を照射することによって吸引開口を溶融、閉塞させることが好ましい。   Furthermore, in the manufacturing method of the bonded structure of the present invention, after forming the annular welded portion, the suction aperture is melted by irradiating the laser beam from the light transmissive member side while maintaining the reduced pressure in the aperture. It is preferably occluded.

さらに、本発明の接合構造体の製造方法にあっては、開口部内の減圧を、該開口部内にパージガスを供給しながら行うことが好ましい。この場合、開口部内の減圧と該開口部内へのパージガスの供給とは、二重配管を用いて吸引開口を通じて行うことが好ましい。   Furthermore, in the method for manufacturing a bonded structure according to the present invention, it is preferable to perform pressure reduction in the opening while supplying a purge gas into the opening. In this case, the pressure reduction in the opening and the supply of the purge gas into the opening are preferably performed through a suction opening using a double pipe.

また、本発明の接合構造体の製造方法にあっては、環状の溶着部を形成した後に引き続き開口部内の減圧を保持し、または開口部内を加圧し、あるいは減圧と加圧を交互に行い、その際の単位時間当たりの圧力の変化を測定することによって環状の溶着部の気密性試験を行うことが好ましい。   Further, in the manufacturing method of the bonded structure of the present invention, after the annular welded portion is formed, the reduced pressure in the opening is continuously maintained, or the inside of the opening is pressurized, or the reduced pressure and the pressurized are alternately performed, It is preferable to perform an airtightness test on the annular welded portion by measuring a change in pressure per unit time.

さらに、本発明の接合構造体の製造方法にあっては、開口部内の圧力を常時検出し、その圧力の変化に基づき、光吸収性部材と光透過性部材との間の密着、環状の溶着部の形成開始、及び環状の溶着部の形成完了の判別を行うことが好ましい。   Furthermore, in the method for manufacturing a bonded structure according to the present invention, the pressure in the opening is constantly detected, and based on the change in pressure, adhesion between the light-absorbing member and the light-transmitting member, annular welding It is preferable to determine the formation start of the part and the completion of the formation of the annular welded part.

本発明の接合構造体によれば、環状の溶着部をその延在方向に対する垂直断面でみて、光透過性部材側の部分の面積に対する光吸収性部材側の部分の面積の比を12〜35の範囲内にあるように構成したことから、光透過性部材及び光吸収性部材間での接合強度を確保しつつ、環状の溶着部の形成に伴う光透過性部材への熱影響を小さくし、ひいては光透過性部材の熱歪みを抑制することができるため、光吸収性部材及び光透過性部材同士の優れた吸引密着性を得ることができる。また、本発明の接合構造体の製造方法によれば、環状の溶着部の形成予定部位に環状溝を形成しておき、この環状溝にレーザ光を照射して環状の溶着部を形成する構成としたことから、十分な幅及び深さの溶着部を形成して高い接合強度を得ることができるのに加えて、光透過性部材への熱影響を小さくし、溶着過程における光透過性部材の熱変形を抑制することができ、当該熱変形に起因した吸引密着性の低下を防止することができる。   According to the bonded structure of the present invention, the ratio of the area of the light-absorbing member side portion to the area of the light-transmitting member side portion is 12 to 35 when the annular welded portion is viewed in a cross section perpendicular to the extending direction. Therefore, while ensuring the bonding strength between the light transmitting member and the light absorbing member, the thermal effect on the light transmitting member due to the formation of the annular welded portion is reduced. In addition, since thermal distortion of the light transmissive member can be suppressed, excellent suction adhesion between the light absorptive member and the light transmissive member can be obtained. Moreover, according to the manufacturing method of the bonded structure of the present invention, an annular groove is formed at a site where the annular welded portion is to be formed, and the annular welded portion is formed by irradiating the annular groove with laser light. Therefore, in addition to being able to form a welded portion with sufficient width and depth to obtain high bonding strength, the thermal effect on the light transmissive member is reduced, and the light transmissive member in the welding process It is possible to suppress thermal deformation of the film, and it is possible to prevent a decrease in suction adhesion due to the thermal deformation.

したがって本発明によれば、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させるのに適した接合構造体を提供することができるとともに、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させることができる接合構造体の製造方法を提供することができる。   Therefore, according to the present invention, it is possible to provide a joining structure suitable for bringing the members to be joined together uniformly and reliably without using a glass plate, and without using a glass plate. In addition, it is possible to provide a method for manufacturing a joined structure that can uniformly and reliably bring members to be joined together.

図1は、本発明の一実施形態の接合構造体を示し、(a)は斜視図であり、(b)は(a)中のA−A線に沿う断面図である。FIG. 1: shows the joining structure of one Embodiment of this invention, (a) is a perspective view, (b) is sectional drawing which follows the AA line in (a). 図2は、本発明の他の実施形態の接合構造体を示し、(a)は斜視図であり、(b)は(a)中のB−B線に沿う断面図である。Figure 2 shows the bonding structure of another embodiment of the present invention, (a) is a perspective view, (b) is a sectional view taken along line B-B in (a). 図3は、本発明のさらに他の実施形態の接合構造体を示し、(a)は斜視図であり、(b)は(a)中のC−C線に沿う断面図である。FIG. 3: shows the joining structure body of further another embodiment of this invention, (a) is a perspective view, (b) is sectional drawing which follows the CC line | wire in (a). 図4(a),(b)はそれぞれ、図3に示した接合構造体における薄肉片の変形例を示す断面図である。4 (a) and 4 (b) are cross-sectional views showing modifications of the thin-walled pieces in the joint structure shown in FIG. 図5は、本発明の一実施形態の接合構造体の製造方法に用いる光吸収性部材を示し、(a)は平面図、(b)は(a)中のD−D線に沿う断面図である。FIG. 5: shows the light absorptive member used for the manufacturing method of the joining structure of one Embodiment of this invention, (a) is a top view, (b) is sectional drawing which follows the DD line | wire in (a). It is. 図6は、本発明の一実施形態の接合構造体の製造方法を示し、(a)は配置工程を示し、(b)は吸引密着工程を示す断面図である。6A and 6B show a method for manufacturing a bonded structure according to an embodiment of the present invention. FIG. 6A is a cross-sectional view showing an arrangement step and FIG. 図7は、本発明の一実施形態の接合構造体の製造方法に用いる圧力調整装置及びレーザ照射装置を示す概略図である。FIG. 7 is a schematic view showing a pressure adjusting device and a laser irradiation device used in the method for manufacturing a bonded structure according to an embodiment of the present invention. 図8(a)〜(d)は、本発明の一実施形態の接合構造体の製造方法において、光吸収性部材の環状溝にレーザを照射して環状の溶着部を形成する様子を順に示した断面図である。FIGS. 8A to 8D sequentially show a state in which an annular welded portion is formed by irradiating a laser to the annular groove of the light-absorbing member in the method for manufacturing a bonded structure according to an embodiment of the present invention. FIG. 図9は、本発明の接合構造体の製造方法に適用可能な他の環状溝の例を示した断面図である。FIG. 9 is a cross-sectional view showing an example of another annular groove applicable to the method for manufacturing a bonded structure according to the present invention. 図10は、本発明の実施形態に従う実施例のコネクタを示し、(a)は斜視図であり、(b)は断面図である。FIG. 10 shows a connector of an example according to the embodiment of the present invention, in which (a) is a perspective view and (b) is a cross-sectional view. 図11は、本発明の実施形態に従う実施例のセンサを示し、(a)は斜視図であり、(b)は断面図である。FIG. 11 shows an example sensor according to an embodiment of the present invention, in which (a) is a perspective view and (b) is a cross-sectional view.

以下、本発明の実施の形態を図面に基づき詳細に説明する。なお、各図において同様の部材または部分には、符号に「100」又は「200」のいずれかを加えた符号を付し、重複する説明は省略する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same member or part is attached with a reference numeral obtained by adding either “100” or “200” to the reference numeral, and redundant description is omitted.

図1は、本発明の一実施形態の接合構造体100を示しており、(a)は斜視図、(b)は(a)中のA−A線に沿う断面図である。この図に示すように、本実施形態の接合構造体100は、開口部Oを有する光吸収性部材102と、該開口部Oを覆うように光吸収性部材102に重ねられ、開口部Oを囲繞する環状の溶着部104を介して該光吸収性部材102に接合された光透過性部材106とを備えている。なお、「環状」とは、輪のような円い形だけを意味するのではなく、連続的に閉じた形状(無端形状)を意味する。よって、「環状」には、円形や楕円形だけではなく、矩形、多角形、その他の閉鎖形状が含まれる。溶着部104は、光透過性部材106と光吸収性部材102の境界面F上に形成されており、後で詳細に説明するが、このような溶着部104は、光透過性部材106側から光吸収性部材102へ向けてレーザ光を照射し、光吸収性部材102をまず発熱させて溶融し、その熱で光透過性部材106をも溶融させ、その後溶融部を固化させることで形成することができる。   FIG. 1: has shown the joining structure 100 of one Embodiment of this invention, (a) is a perspective view, (b) is sectional drawing which follows the AA line in (a). As shown in this figure, the bonded structure 100 of the present embodiment is overlapped with the light absorbing member 102 having the opening O and the light absorbing member 102 so as to cover the opening O. And a light-transmitting member 106 joined to the light-absorbing member 102 through an annular welded portion 104 that surrounds. Note that “annular” does not mean only a circular shape like a ring, but a continuously closed shape (endless shape). Therefore, “annular” includes not only a circle or an ellipse but also a rectangle, a polygon, and other closed shapes. The welded portion 104 is formed on the boundary surface F between the light transmitting member 106 and the light absorbing member 102, and will be described in detail later. Such a welded portion 104 is formed from the light transmitting member 106 side. The light-absorbing member 102 is irradiated with laser light, and the light-absorbing member 102 is first heated and melted, and the light-transmitting member 106 is melted by the heat, and then the melted portion is solidified. be able to.

光吸収性部材102は、レーザ光に対する吸収率が光透過性部材106の同レーザ光に対する吸収率よりも高い部材であり、主として熱可塑性樹脂又は熱可塑性エラストマーからなり、射出成形等により形成することができる。具体的には、波長193〜10600nmの範囲内に発振波長の中心を有するレーザ光から選択されたレーザ光に対して10%以上の吸収率を有するものが好ましい。レーザとしては、例えば、炭酸ガスレーザ(波長約10600nm)、Nd:YAGレーザ(波長約1064nm)、Nd:YVO レーザの第2次高調波であるグリーンレーザ(波長約532nm)、ダイオードレーザ(波長約800nm,840nm,または950nm)、エキシマレーザ(波長約193nm)等が挙げられる。光吸収性部材102の吸収率を調整するため、熱可塑性樹脂又は熱可塑性エラストマーにカーボンブラック等の黒色着色剤や顔料、染料等を混練することができる。 The light absorptive member 102 is a member that has a higher absorptance with respect to laser light than that of the light transmissive member 106 and is mainly made of a thermoplastic resin or a thermoplastic elastomer and is formed by injection molding or the like. Can do. Specifically, those having an absorption rate of 10% or more with respect to laser light selected from laser light having a center of oscillation wavelength within a wavelength range of 193 to 10600 nm are preferable. As the laser, for example, a carbon dioxide laser (wavelength of about 10600 nm), a Nd: YAG laser (wavelength of about 1064 nm), a green laser (wavelength of about 532 nm) that is the second harmonic of the Nd: YVO 4 laser, a diode laser (wavelength of about 532 nm). 800 nm, 840 nm, or 950 nm), excimer laser (wavelength of about 193 nm), and the like. In order to adjust the absorption rate of the light absorbing member 102, a black colorant such as carbon black, a pigment, a dye, or the like can be kneaded with the thermoplastic resin or the thermoplastic elastomer.

熱可塑性樹脂としては、例えば、ポリアミド樹脂、ポリエチレン樹脂、ポリプロピレン樹脂、ポリエチレンテレフタレート樹脂、ポリブチレンテレフタレート樹脂、ポリフェニルエーテル樹脂、ポリスチレン樹脂、ハイインパクトポリスチレン樹脂、水添ポリスチレン樹脂、ポリアクリルスチレン樹脂、ABS樹脂、AS樹脂、AES樹脂、ASA樹脂、SMA樹脂、ポリアルキルメタクリレート樹脂、ポリメチルメタクリレート樹脂、ポリカーボネート樹脂、ポリエステル樹脂、ポリフェニレンスルファイド、液晶ポリマー等が挙られる。熱可塑性エラストマーとしては、例えばスチレン系熱可塑性エラストマー、オレフィン系熱可塑性エラストマー、ポリエステル系熱可塑性エラストマー、ポリウレタン系熱可塑性エラストマー、PVC系熱可塑性エラストマー等が挙げられる。熱可塑性樹脂には、強化材としてガラスファイバやミネラル等を混練してもよい。   Examples of the thermoplastic resin include polyamide resin, polyethylene resin, polypropylene resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyphenyl ether resin, polystyrene resin, high impact polystyrene resin, hydrogenated polystyrene resin, polyacrylstyrene resin, ABS. Resins, AS resins, AES resins, ASA resins, SMA resins, polyalkyl methacrylate resins, polymethyl methacrylate resins, polycarbonate resins, polyester resins, polyphenylene sulfide, liquid crystal polymers and the like can be mentioned. Examples of the thermoplastic elastomer include styrene-based thermoplastic elastomers, olefin-based thermoplastic elastomers, polyester-based thermoplastic elastomers, polyurethane-based thermoplastic elastomers, PVC-based thermoplastic elastomers, and the like. The thermoplastic resin may be kneaded with glass fiber or mineral as a reinforcing material.

図示例において光吸収性部材102は主として、開口部Oを区画する周壁108と、周壁108の下端部を閉塞する底壁110とからなる。周壁108の横断面形状は略矩形であるが、これに限らず、円形、楕円形、台形、多角形、ひょうたん形状等如何なる形状としてもよい。周壁108には、後述するように開口部Oに繋がり該開口部O内を減圧状態とするのに適した吸引開口112が形成されている。吸引開口112は、底壁110に形成してもよい。あるいは、底壁110を設けずに周壁10の下端を開放し、該下端開口を吸引開口112として用いてもよい。 In the illustrated example, the light-absorbing member 102 mainly includes a peripheral wall 108 that defines the opening O, and a bottom wall 110 that closes the lower end of the peripheral wall 108. The cross-sectional shape of the peripheral wall 108 is substantially rectangular, but is not limited thereto, and may be any shape such as a circle, an ellipse, a trapezoid, a polygon, a gourd shape, and the like. As will be described later, the peripheral wall 108 is formed with a suction opening 112 that is connected to the opening O and is suitable for reducing the pressure inside the opening O. The suction opening 112 may be formed in the bottom wall 110. Alternatively, opening the lower end of the peripheral wall 108 without providing the bottom wall 110, it may be used lower end opening as a suction opening 112.

光透過性部材106はレーザ光に対する吸収率が同レーザ光に対する光吸収性部材102の吸収率よりも低い部材であり、主として熱可塑性樹脂又は熱可塑性エラストマーからなり、射出成形等により形成することができる。具体的には、波長193〜10600nmの範囲内に発振波長の中心を有するレーザ光から選択されたレーザ光に対して、光吸収性部材102の吸収率よりも低い吸収率を有するものが好ましい。   The light transmissive member 106 is a member that has a lower absorptance for laser light than that of the light absorptive member 102 for the laser light, and is mainly made of a thermoplastic resin or a thermoplastic elastomer, and may be formed by injection molding or the like. it can. Specifically, a laser beam having an absorptance lower than the absorptivity of the light-absorbing member 102 is preferable for a laser beam selected from laser beams having a center of oscillation wavelength within a wavelength range of 193 to 10600 nm.

光透過性部材106を構成する熱可塑性樹脂としては、例えば、ポリアミド樹脂、ポリエチレン樹脂、ポリプロピレン樹脂、ポリエチレンテレフタレート樹脂、ポリブチレンテレフタレート樹脂、ポリフェニルエーテル樹脂、ポリスチレン樹脂、ハイインパクトポリスチレン樹脂、水添ポリスチレン樹脂、ポリアクリルスチレン樹脂、ABS樹脂、AS樹脂、AES樹脂、ASA樹脂、SMA樹脂、ポリアルキルメタクリレート樹脂、ポリメチルメタクリレート樹脂、ポリカーボネート樹脂、ポリエステル樹脂、ポリフェニレンスルファイド、液晶ポリマー等が挙られる。熱可塑性エラストマーとしては、例えばスチレン系熱可塑性エラストマー、オレフィン系熱可塑性エラストマー、ポリエステル系熱可塑性エラストマー、ポリウレタン系熱可塑性エラストマー、PVC系熱可塑性エラストマー等が挙げられる。なお、熱可塑性樹脂には、強化材としてガラスファイバやミネラル等を混練させてもよい。熱可塑性樹脂又は熱可塑性エラストマーには、光吸収性部材の吸収率よりも低い吸収率を得られる限り、例えば、白色顔料や黄色、緑色、赤色等の有彩色着色剤を混練してもよい。   Examples of the thermoplastic resin constituting the light transmissive member 106 include polyamide resin, polyethylene resin, polypropylene resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyphenyl ether resin, polystyrene resin, high impact polystyrene resin, hydrogenated polystyrene. Resins, polyacryl styrene resins, ABS resins, AS resins, AES resins, ASA resins, SMA resins, polyalkyl methacrylate resins, polymethyl methacrylate resins, polycarbonate resins, polyester resins, polyphenylene sulfide, liquid crystal polymers, and the like. Examples of the thermoplastic elastomer include styrene-based thermoplastic elastomers, olefin-based thermoplastic elastomers, polyester-based thermoplastic elastomers, polyurethane-based thermoplastic elastomers, PVC-based thermoplastic elastomers, and the like. The thermoplastic resin may be kneaded with glass fiber, mineral, or the like as a reinforcing material. For example, a white pigment or a chromatic colorant such as yellow, green, and red may be kneaded in the thermoplastic resin or the thermoplastic elastomer as long as an absorption rate lower than that of the light absorbing member can be obtained.

光透過性部材106は、環状の溶着部104が形成される前の状態で開口部O内が減圧状態とされた場合に変形して、その周縁部が光吸収性部材102の周壁108の上端面に密着する薄板状に形成されている。これにより、光透過性部材106を光吸収性部材102に重ね合わせた際に、光吸収性部材102の周壁108の上端面と光透過性部材106との間に隙間が生じている場合でも、吸引開口112を通じて開口部O内を減圧した際に光透過性部材106を光吸収性部材102の周壁108の上端面に密着させることができるため、真空漏れを防止し光透過性部材106及び光吸収性部材102の相互間で優れた吸引密着性を得ることができる。   The light transmissive member 106 is deformed when the inside of the opening O is in a reduced pressure state before the annular welded portion 104 is formed, and the peripheral portion thereof is above the peripheral wall 108 of the light absorbing member 102. It is formed in a thin plate shape that is in close contact with the end face. Thereby, even when a gap is generated between the upper end surface of the peripheral wall 108 of the light absorbing member 102 and the light transmitting member 106 when the light transmitting member 106 is overlapped with the light absorbing member 102, Since the light transmissive member 106 can be brought into close contact with the upper end surface of the peripheral wall 108 of the light absorbing member 102 when the inside of the opening O is decompressed through the suction opening 112, vacuum leakage is prevented and the light transmissive member 106 and the light are prevented. Excellent suction adhesion between the absorbent members 102 can be obtained.

これをより確実にするため、光透過性部材106は、環状の溶着部104が形成される前の状態で開口部O内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材102に密着する易変形性を発揮する厚みに形成されていることが好ましい。具体的には、十分な変形による密着性を確保するため、光透過性部材106の厚みは、0.005mm〜0.2mmとすることが好ましく、成形性を考慮すると0.01mm〜0.1mmとすることがより好ましい。   In order to make this more reliable, the light transmissive member 106 deforms when the inside of the opening O is decompressed to −80 kPa or more and −20 kPa or less by gauge pressure before the annular welded portion 104 is formed. Therefore, it is preferable that the thickness be formed so as to exhibit easy deformability to be in close contact with the light absorbing member 102. Specifically, the thickness of the light transmissive member 106 is preferably 0.005 mm to 0.2 mm in order to ensure adhesion by sufficient deformation, and 0.01 mm to 0.1 mm in view of moldability. More preferably.

光透過性部材106は、環状の溶着部104が形成される前の状態で開口部O内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材102に密着するよう引張弾性係数(ヤング率)を0.01〜18GPaの範囲内の材料を選定又は調整するのが好ましい。光透過性部材106の引張弾性係数(ヤング率)を18GPaよりも大きくした場合には、開口部O内を減圧したときに変形し易くするために極めて薄く形成する必要があり、設計どおりに成形することが難しくなり、例えば、射出成形により光透過性部材106を形成する場合には、薄い部分に樹脂が流れず成形不良の原因となる。一方、光透過性部材106の引張弾性係数(ヤング率)が0.01GPaを下回ると、材料自体の剛性が低くなるため、自身の形状を保持することが難しくなり、目的の位置に目的の形状で位置決めすることが難しくなる。光透過性部材106の易変形性、成形性、位置決め性をより高次元でバランスさせるため、光透過性部材106の材料は、引張弾性係数(ヤング率)が6〜10GPaの範囲内となるよう選定又は調整することがより好ましい。この引張弾性係数(ヤング率)は、JIS K7161の規定に準拠し、JIS K7162に記載の試験片を引張試験機に装着し応力とひずみ(変形量)から応力―ひずみ曲線を作図し、その傾きから求めることができる。この際、応力―ひずみ曲線が直線状にならず傾きを求め難い場合には、ヤング率の代替係数としてセカント係数(応力―ひずみ曲線上の点と原点とを結ぶ直線の傾き)などを用いることができる。   The light transmissive member 106 is deformed when the inside of the opening O is decompressed to −80 kPa or more and −20 kPa or less by a gauge pressure before the annular welded portion 104 is formed, and becomes a light absorbing member 102. It is preferable to select or adjust a material having a tensile elastic modulus (Young's modulus) in the range of 0.01 to 18 GPa so as to adhere. When the tensile elastic modulus (Young's modulus) of the light-transmitting member 106 is larger than 18 GPa, it is necessary to form it very thin to facilitate deformation when the inside of the opening O is decompressed, and it is molded as designed. For example, when the light transmissive member 106 is formed by injection molding, the resin does not flow in a thin portion, which may cause molding defects. On the other hand, when the tensile elastic modulus (Young's modulus) of the light-transmitting member 106 is less than 0.01 GPa, the rigidity of the material itself becomes low, so that it becomes difficult to maintain its own shape, and the target shape is in the target position. It becomes difficult to position with. In order to balance the deformability, moldability, and positioning property of the light transmissive member 106 at a higher level, the material of the light transmissive member 106 has a tensile elastic modulus (Young's modulus) in the range of 6 to 10 GPa. It is more preferable to select or adjust. This tensile elastic modulus (Young's modulus) conforms to the provisions of JIS K7161, the test piece described in JIS K7162 is mounted on a tensile tester, and a stress-strain curve is drawn from the stress and strain (deformation amount). Can be obtained from In this case, if the stress-strain curve is not linear and it is difficult to determine the slope, a secant coefficient (slope of the straight line connecting the point on the stress-strain curve and the origin) should be used as an alternative coefficient for Young's modulus. Can do.

また、本実施形態の接合構造体100では、図1(a)に示すように、環状の溶着部104に隣接した位置に、光吸収性部材102と光透過性部材106とを接合する点状の溶着部114が設けられている。これにより、光吸収性部材102及び光透過性部材106同士の接合強度はより一層高められている。   Moreover, in the joining structure 100 of this embodiment, as shown to Fig.1 (a), the point shape which joins the light absorption member 102 and the light transmissive member 106 in the position adjacent to the cyclic | annular welding part 104. FIG. The welding part 114 is provided. As a result, the bonding strength between the light absorbing member 102 and the light transmitting member 106 is further increased.

点状の溶着部114は、環状の溶着部104と同様、レーザ光を光透過性部材106側から光吸収性部材102へ向けて照射することにより形成することができる。点状の溶着部114は、光透過性部材106が略矩形の場合にはコーナー部に隣接して形成することが好ましく、これによれば、点状の溶着部114が、環状の溶着部104を形成する際の光透過性部材106の熱変形による反りを効果的に抑制して、開口部O内の減圧時に、薄板状の光透過性部材106の易変形による密着効果と相俟って、光透過性部材106及び光吸収性部材102同士のより一層優れた吸引密着性を得ることができる。   The spot-like welded portion 114 can be formed by irradiating laser light from the light transmitting member 106 side toward the light absorbing member 102, similarly to the annular welded portion 104. The spot-like welded portion 114 is preferably formed adjacent to the corner portion when the light transmissive member 106 is substantially rectangular. According to this, the spot-like welded portion 114 is formed into the annular welded portion 104. In combination with the adhesion effect due to the easy deformation of the thin plate-like light-transmitting member 106 at the time of decompression in the opening O, effectively suppressing the warp due to the heat-deformation of the light-transmitting member 106 when forming the film. Further, it is possible to obtain even more excellent suction adhesion between the light transmitting member 106 and the light absorbing member 102.

そして、本実施形態の接合構造体100では、図1(b)中の拡大図で示すように、環状の溶着部104の延在方向に対する垂直断面でみて、溶着部104の光透過性部材106側の部分(当該図において境界面Fよりも上の部分であり、以下「第1部分」ともいう。)の面積S1に対する、光吸収性部材102側の部分(当該図において境界面Fよりも下の部分であり、以下、「第2部分」ともいう。)の面積S2の比は、12〜35の範囲内としている。当該比が12未満の場合には、光透過性部材106を光吸収性部材102から引き剥がすような力が加わった際に環状の溶着部104の境界を起点とした剥離(界面剥離)や溶着部104の光吸収性部材102側の部分の少なくとも一部が光透過性部材106に一体化した状態での剥離が発生する虞がある。また、この種の剥離は工業生産において非破壊で検査することは困難である。面積S1に対する面積S2の比率が12以上では、溶着部104に剥離は生じ難く、光透過性部材106を光吸収性部材102から引き剥がすような力が加わった場合には、光透過性部材106又は光吸収性部材102自体が破壊する「部材破壊」となるため、溶着強度を設計(設定)するにあたり、部材102,106の強さを管理すればよく、安定して生産することができる。一方、上記比率が35を超えると光吸収性部材102の深くまでレーザ光を届かせるために、パワーを上げるかあるいは照射時間を長くする必要があるため、光透過性部材106への熱影響(隆起や気泡、表面上の溶け、焼けに伴う炭化や変色の発生)や光吸収性部材102への熱影響(焼けに伴う炭化、気泡の発生)が顕在化する虞がある。これらの熱影響の回避と溶着部104における剥離の抑制、防止をより高次元で実現するためには、面積S1に対する面積S2の比率は19〜26の範囲内とすることがより好ましい。   And in the joining structure 100 of this embodiment, as shown in the enlarged view in FIG.1 (b), seeing in the cross section perpendicular | vertical with respect to the extension direction of the cyclic | annular welding part 104, the light transmissive member 106 of the welding part 104 is shown. The portion on the light-absorbing member 102 side (the boundary surface F in the drawing) with respect to the area S1 of the portion on the side (the portion above the boundary surface F in the drawing and hereinafter also referred to as “first portion”). The ratio of the area S2 of the lower portion, hereinafter also referred to as “second portion”) is in the range of 12 to 35. When the ratio is less than 12, peeling (interface peeling) or welding starting from the boundary of the annular welded portion 104 when a force is applied to peel the light transmissive member 106 from the light absorbing member 102. There is a possibility that peeling occurs when at least a part of the portion of the portion 104 on the light absorbing member 102 side is integrated with the light transmitting member 106. Also, this type of delamination is difficult to test non-destructively in industrial production. When the ratio of the area S2 to the area S1 is 12 or more, the welded portion 104 hardly peels off, and when a force is applied to peel off the light-transmitting member 106 from the light-absorbing member 102, the light-transmitting member 106 is applied. Alternatively, since the “light-absorbing member 102 itself” is destroyed, “member destruction” occurs, the strength of the members 102 and 106 may be controlled when designing (setting) the welding strength, and stable production can be achieved. On the other hand, if the ratio exceeds 35, it is necessary to increase the power or extend the irradiation time in order to allow the laser beam to reach deep into the light-absorbing member 102. There is a possibility that bulges, bubbles, melting on the surface, carbonization or discoloration associated with burning) and thermal effects on the light absorbing member 102 (carbonization associated with burning, generation of bubbles) may become apparent. In order to achieve avoidance of these thermal effects and suppression and prevention of peeling at the welded portion 104 in a higher dimension, the ratio of the area S2 to the area S1 is more preferably in the range of 19 to 26.

このように溶着部104の光透過性部材側部分の面積S1に対する、光吸収性部材側部分の面積S2の比を上記範囲内とすることで、接合強度を確保しつつ、環状の溶着部104の形成に伴う光透過性部材106への熱影響を小さくし光透過性部材106の熱歪みを抑制することができるため、開口部O内の減圧時に光透過性部材106及び光吸収性部材102同士の優れた吸引密着性を得ることができる。   In this way, by setting the ratio of the area S2 of the light absorbing member side portion to the area S1 of the light transmitting member side portion of the welded portion 104 within the above range, the annular welded portion 104 is secured while ensuring the bonding strength. The thermal effect on the light transmissive member 106 due to the formation of the film can be reduced and the thermal distortion of the light transmissive member 106 can be suppressed. Excellent suction adhesion between each other can be obtained.

なお、上記比率下の面積S1,S2を有する溶着部104は、図8を参照して後述する接合構造体の製造方法により形成することができる。また、面積S1及びS2を算出するにあたり、溶着部104の範囲(境界)は、接合構造体100を溶着部104の延在方向に対する直交方向にカットして試験片を作成し、その断面を光学顕微鏡または電子顕微鏡で観察することや、X線CTを用いた断層画像を確認することで判断することができる。   The welded portion 104 having the areas S1 and S2 under the above ratio can be formed by a method for manufacturing a bonded structure described later with reference to FIG. Further, when calculating the areas S1 and S2, the range (boundary) of the welded portion 104 is cut in a direction orthogonal to the extending direction of the welded portion 104 to create a test piece, and the cross section is optically This can be determined by observing with a microscope or an electron microscope, or by confirming a tomographic image using X-ray CT.

ところで、光透過性部材106を射出成形により製造する場合、ゲートの位置や溶融樹脂の流れ方、金型から取り出した後の冷却不均一等を起因として、光透過性部材106に下面側へ凸となる反り又は上面側へ凸となる反りが発生することがある。下面側へ凸となる反りは、光透過性部材106を光吸収性部材102に重ね合わせた際に光透過性部材106の周縁部と光吸収性部材102の周壁108の上端面との間に隙間を生じさせることになるため好ましくない。そこで、本実施形態では、光透過性部材106の下面(光吸収性部材102側の面)に板厚を減じた凹部116を環状の溶着部104の内側領域の50%以上に亘って形成し、これにより反りの方向を上面側へ凸となる方向に誘導している。凹部116の形成領域が、環状の溶着部104の内側領域の50%未満の場合には、反りの原因である樹脂材料の収縮に関して、光透過性部材106全体の反りを誘導するほどの十分な力を得ることができない虞がある。また、反りの量が過大となるのを防ぐため、凹部116の深さは板厚の50%以下とすることが好ましい。凹部116の深さが板厚の50%を超える場合には、反りの原因である樹脂材料の収縮に関して、光透過性部材106の剛性が低下してねじれが発生するため、吸引密着させる際に光透過性部材106及び光吸収性部材102間に隙間が生じて密着が不十分な状態となり、位置ずれや溶着不具合(熱が伝わらないことによる過度な温度上昇や未溶融)が発生する虞がある。   By the way, when the light transmissive member 106 is manufactured by injection molding, the light transmissive member 106 protrudes to the lower surface side due to the position of the gate, the flow of the molten resin, non-uniform cooling after removal from the mold, and the like. Or warpage that is convex toward the upper surface side may occur. The warpage convex toward the lower surface side is between the peripheral edge of the light transmissive member 106 and the upper end surface of the peripheral wall 108 of the light absorbent member 102 when the light transmissive member 106 is superimposed on the light absorbent member 102. This is not preferable because a gap is generated. Therefore, in this embodiment, the concave portion 116 having a reduced thickness is formed on the lower surface of the light transmitting member 106 (the surface on the light absorbing member 102 side) over 50% or more of the inner region of the annular welded portion 104. Thus, the direction of warping is guided in a direction that is convex toward the upper surface side. When the formation region of the concave portion 116 is less than 50% of the inner region of the annular welded portion 104, it is sufficient to induce the warp of the entire light transmitting member 106 with respect to the shrinkage of the resin material that causes the warp. There is a possibility that power cannot be obtained. In order to prevent an excessive amount of warpage, the depth of the recess 116 is preferably 50% or less of the plate thickness. When the depth of the recess 116 exceeds 50% of the plate thickness, the rigidity of the light-transmitting member 106 is reduced and twisted with respect to the shrinkage of the resin material that causes warping. There may be a gap between the light-transmitting member 106 and the light-absorbing member 102, resulting in insufficient adhesion, and misalignment or welding failure (excessive temperature rise or unmelted due to heat not being transmitted) may occur. is there.

図2を参照し、本発明に従う他の実施形態の接合構造体200について説明する。この実施形態の接合構造体200は、光吸収性部材202に複数の開口部Oが形成されている点で先の実施形態の接合構造体100とは異なる。   With reference to FIG. 2, the joining structure 200 of other embodiment according to this invention is demonstrated. The bonding structure 200 of this embodiment is different from the bonding structure 100 of the previous embodiment in that a plurality of openings O are formed in the light absorbing member 202.

具体的には、光吸収性部材202は、周壁208の上端部に繋がる天壁218を有し、該天壁218には同一方向へ延在する複数のスリット220が穿設されて開口部Oが区画されている。天壁218は、光透過性部材206の上面に外部から衝撃や荷重が加わった場合において光透過性部材206の撓み変形を規制するため、光透過性部材206や溶着部204,214が破損されるのを防ぐことができる。さらに天壁218は梁のように作用するため、光吸収性部材202の周壁208を補強することができる。   Specifically, the light-absorbing member 202 has a top wall 218 connected to the upper end portion of the peripheral wall 208, and a plurality of slits 220 extending in the same direction are formed in the top wall 218 to open the opening O. Is partitioned. The top wall 218 regulates the deformation of the light transmissive member 206 when an external impact or load is applied to the upper surface of the light transmissive member 206, so that the light transmissive member 206 and the welded portions 204 and 214 are damaged. Can be prevented. Furthermore, since the top wall 218 acts like a beam, the peripheral wall 208 of the light absorbing member 202 can be reinforced.

また、光透過性部材206の凹部216は、上述のように光透過性部材206の反りの方向及び量を制御する効果をもたらすが、これに加えて、光透過性部材206と天壁218の間に隙間を維持し、開口部Oを減圧した際に光透過性部材206が天壁218に接触して陰圧の受圧面積が減少するのを防止することができる。陰圧の受圧面積が減少すると、光透過性部材206を真空圧で十分に変形させることができなくなり、光透過性部材206及び光吸収性部材202間の吸引密着性が損なわれる虞がある。これを防止する観点においても、光透過性部材206に形成する凹部216の形成領域は、環状の溶着部104の内側領域の50%以上とすることが好ましい。   In addition, the concave portion 216 of the light transmissive member 206 has an effect of controlling the direction and amount of warpage of the light transmissive member 206 as described above, but in addition to this, the light transmissive member 206 and the top wall 218 have an effect. It is possible to prevent the light-receiving member 206 from contacting the top wall 218 and reducing the negative pressure receiving area when the opening O is decompressed while maintaining a gap therebetween. If the negative pressure receiving area is reduced, the light transmitting member 206 cannot be sufficiently deformed by the vacuum pressure, and the suction adhesion between the light transmitting member 206 and the light absorbing member 202 may be impaired. Also from the viewpoint of preventing this, it is preferable that the formation region of the concave portion 216 formed in the light transmissive member 206 is 50% or more of the inner region of the annular welded portion 104.

本実施形態の接合構造体200においても、先の実施形態の接合構造体100と同様、環状の溶着部204は、その延在方向に対する垂直断面でみて、光透過性部材206側の部分の面積S1に対する光吸収性部材202側の部分の面積S2の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   Also in the joint structure 200 of the present embodiment, the annular welded portion 204 has an area of a portion on the light transmissive member 206 side, as viewed in a vertical cross section with respect to the extending direction, as in the joint structure 100 of the previous embodiment. The ratio of the area S2 of the portion on the light absorbing member 202 side to S1 is in the range of 12 to 35, and more preferably in the range of 19 to 26.

図3を参照し、本発明に従う他の実施形態の接合構造体300について説明する。この実施形態の接合構造体300は、光透過性部材306の、環状の溶着部304よりも外側位置に、環状の溶着部304が形成される前の状態で開口部O内が減圧状態とされた場合に変形して光吸収性部材302の周壁308の上端面に密着する薄肉片324を設けた点で先の実施形態の接合構造体100,200とは異なる。これにより、光透過性部材306を光吸収性部材302に重ね合わせた際に、光吸収性部材302の周壁308の上端面と光透過性部材306との間に隙間が生じている場合でも、吸引開口312を通じて開口部O内を減圧した際に光透過性部材306の薄肉片324を光吸収性部材302の周壁308の上端面に引き寄せて密着させることができるため、空気漏れによる真空破壊を防止し光透過性部材306及び光吸収性部材302同士で優れた吸引密着性を得ることができる。   With reference to FIG. 3, the joining structure 300 of other embodiment according to this invention is demonstrated. In the bonded structure 300 of this embodiment, the inside of the opening O is in a reduced pressure state before the annular welded portion 304 is formed at a position outside the annular welded portion 304 of the light transmitting member 306. The joint structure 100, 200 of the previous embodiment is different in that a thin piece 324 is provided that is deformed and closely contacts the upper end surface of the peripheral wall 308 of the light absorbing member 302. Thereby, when the light transmissive member 306 is superposed on the light absorptive member 302, even when there is a gap between the upper end surface of the peripheral wall 308 of the light absorptive member 302 and the light transmissive member 306, When the inside of the opening O is depressurized through the suction opening 312, the thin piece 324 of the light transmissive member 306 can be brought into close contact with the upper end surface of the peripheral wall 308 of the light absorbing member 302, thereby preventing vacuum breakage due to air leakage. Therefore, it is possible to obtain excellent suction adhesion between the light transmitting member 306 and the light absorbing member 302.

これをより確実にするため、薄肉片324は、環状の溶着部304が形成される前の状態で開口部O内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材302に密着する易変形性を発揮する厚みに形成されていることが好ましい。具体的には、十分な変形による密着性を確保するため、薄肉片の厚みは、0.005mm〜0.2mmとすることが好ましく、成形性を考慮すると0.01mm〜0.1mmとすることがより好ましい。   In order to make this more reliable, the thin piece 324 is deformed when the inside of the opening O is reduced to −80 kPa or more and −20 kPa or less by gauge pressure in a state before the annular welded portion 304 is formed, It is preferable that it is formed in a thickness that exhibits easy deformability to be in close contact with the light absorbing member 302. Specifically, in order to ensure adhesion by sufficient deformation, the thickness of the thin piece is preferably 0.005 mm to 0.2 mm, and 0.01 mm to 0.1 mm in consideration of formability. Is more preferable.

図3に示す例では、薄肉片324は、光透過性部材306の周縁部下端から光吸収性部材302の周壁308の上端面に沿うように水平に形成されているが、これに限らず、図4(a)に示すように周壁308の外周面に沿うように光透過性部材306の周縁部下端から垂下させてもよく、あるいは図4(b)に示すように、光吸収性部材302の周壁308の上端面に環状溝326を形成するとともに、光透過性部材306の下面から薄肉片324を垂下させ環状溝326内に挿入するようにしてもよい。   In the example shown in FIG. 3, the thin piece 324 is formed horizontally along the upper end surface of the peripheral wall 308 of the light absorbing member 302 from the lower end of the peripheral portion of the light transmitting member 306, but is not limited thereto. As shown in FIG. 4A, the light-transmitting member 306 may be hung from the lower end of the peripheral portion along the outer peripheral surface of the peripheral wall 308. Alternatively, as shown in FIG. An annular groove 326 may be formed on the upper end surface of the peripheral wall 308, and the thin piece 324 may be suspended from the lower surface of the light transmitting member 306 and inserted into the annular groove 326.

本実施形態の接合構造体300においても、先の実施形態の接合構造体100,200と同様、環状の溶着部304は、その延在方向に対する垂直断面でみて、光透過性部材306側の部分の面積S1に対する光吸収性部材302側の部分の面積S2の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   Also in the joint structure 300 of the present embodiment, the annular welded portion 304 is a portion on the light transmitting member 306 side as seen in the vertical cross section with respect to the extending direction, as in the joint structures 100 and 200 of the previous embodiment. The ratio of the area S2 of the portion on the light absorbing member 302 side to the area S1 is in the range of 12 to 35, and more preferably in the range of 19 to 26.

次に、図5〜図9を参照して、本発明に従う一実施形態の接合構造体の製造方法について説明する。なお、ここでは図1に示した接合構造体100を製造する方法を例にとり説明するが、この製造方法は、図2〜図4に示した接合構造体200,300を製造する場合にも適用することができる。   Next, with reference to FIGS. 5-9, the manufacturing method of the junction structure of one Embodiment according to this invention is demonstrated. Here, the method for manufacturing the joint structure 100 shown in FIG. 1 will be described as an example, but this manufacturing method is also applied to the case of manufacturing the joint structures 200 and 300 shown in FIGS. can do.

まず、第1の工程は部材準備工程であり、この工程では光吸収性部材102及び光透過性部材106を準備する。光吸収性部材102及び光透過性部材106の材料及び基本的な構造については、接合構造体100について図1を参照して説明したとおりであるため、重複する説明は省略する。   First, the first step is a member preparation step. In this step, the light absorbing member 102 and the light transmissive member 106 are prepared. The material and basic structure of the light absorbing member 102 and the light transmissive member 106 are the same as those described with reference to FIG.

図5は、光透過性部材106との接合前の光吸収性部材102を示し、(a)は平面図であり、(b)は(a)中のD−D線に沿う断面図である。この図に示すように、光吸収性部材102の周壁108の上端面(光透過性部材106と当接する面)であって、環状の溶着部104の形成予定部位には環状溝130を予め形成しておく。環状溝130の幅は、そこに照射されるレーザ光の径よりも大きくしておくことが好ましく、例えば、0.1mm〜3mmとすることが好ましい。環状溝130の幅が0.1mm未満の場合には、そこに形成される環状の溶着部104の幅を十分に確保できず、溶着強度が低下するため、外力や圧力変動によって空気や水、埃が浸透し気密性能等を維持できなくなる虞がある。一方、環状溝130の幅が3mmを超えると、溶着時の熱によって環状の溶着部104以外の部分が熱の影響を受けて変形したり、環状の溶着部104が固化する際の熱収縮によって部品に過度のひずみが残り、変形したりする虞がある。また、環状溝130の深さ(境界面Fから溝底までの距離)は、環状溝130の幅をL(mm)として、L/20(mm)以上L(mm)以下とすることが好ましく、このようにすれば、図8を参照して後述するように、環状溝130へのレーザ光照射により溝底に発生した溶融池を十分に膨張させることができとともに、その熱を過不足なく光透過性部材106へ伝達させることができ、良好な溶着部104を形成することができる。さらに、環状溝130の深さは、L/10(mm)以上L/3(mm)以下とすることが、溶着部104の強度及び気密性を確保する点で好ましい。例えば、環状溝130は、溝幅Lを0.3mm、溝深さを0.05(=L/6)mmとすることができる。溶着部130の深さがL/20(mm)未満であり浅すぎると、環状溝130の溝底へのレーザ光の照射後直ぐに、膨張した溶融池が光透過性部材106に接触するとともに熱が拡散し、溶融池を十分に横方向へ広げることができず、溶着不良となる(環状溝130の一部が残ったままとなる)虞がある。溶着部130の深さがL(mm)を超え深すぎると、環状溝130の溝底で発生した溶融池が膨張するものの光透過性部材106まで到達できず、その場で焼けに伴う炭化や変色が発生し、溶着不良となる虞がある。なお、図示例において環状溝130の断面形状は矩形であるが、半円形状または半楕円形状であってもよい。また、周壁108の上端面には、環状溝130と開口部O内とを連通する少なくとも1つ(図示例では各辺に対応して4つ)の連通溝132を予め形成しておく。   5A and 5B show the light-absorbing member 102 before joining to the light-transmitting member 106, where FIG. 5A is a plan view, and FIG. 5B is a cross-sectional view taken along line DD in FIG. . As shown in this figure, an annular groove 130 is formed in advance on the upper end surface of the peripheral wall 108 of the light-absorbing member 102 (the surface that comes into contact with the light-transmitting member 106), where the annular welded portion 104 is to be formed. Keep it. The width of the annular groove 130 is preferably set to be larger than the diameter of the laser beam applied thereto, and is preferably set to 0.1 mm to 3 mm, for example. When the width of the annular groove 130 is less than 0.1 mm, the width of the annular welded portion 104 formed therein cannot be sufficiently secured, and the welding strength is reduced. There is a possibility that dust may permeate and the airtightness performance cannot be maintained. On the other hand, when the width of the annular groove 130 exceeds 3 mm, parts other than the annular welded portion 104 are deformed due to heat at the time of welding, or due to thermal contraction when the annular welded portion 104 is solidified. Excessive strain may remain on the parts and cause deformation. Further, the depth of the annular groove 130 (distance from the boundary surface F to the groove bottom) is preferably L / 20 (mm) or more and L (mm) or less, where the width of the annular groove 130 is L (mm). In this way, as will be described later with reference to FIG. 8, the molten pool generated at the bottom of the groove by the laser light irradiation to the annular groove 130 can be sufficiently expanded, and the heat can be sufficiently reduced. It can be transmitted to the light transmissive member 106, and a good welded portion 104 can be formed. Furthermore, the depth of the annular groove 130 is preferably L / 10 (mm) or more and L / 3 (mm) or less from the viewpoint of ensuring the strength and airtightness of the welded portion 104. For example, the annular groove 130 can have a groove width L of 0.3 mm and a groove depth of 0.05 (= L / 6) mm. If the depth of the welded portion 130 is less than L / 20 (mm) and is too shallow, the expanded molten pool comes into contact with the light transmissive member 106 and heats immediately after the laser beam is irradiated onto the groove bottom of the annular groove 130. And the molten pool cannot be sufficiently spread in the lateral direction, resulting in poor welding (part of the annular groove 130 may remain). If the depth of the welded portion 130 exceeds L (mm) and is too deep, the molten pool generated at the groove bottom of the annular groove 130 expands, but cannot reach the light-transmitting member 106, and carbonization accompanying burning on the spot Discoloration may occur, resulting in poor welding. In the illustrated example, the annular groove 130 has a rectangular cross-sectional shape, but may have a semicircular shape or a semielliptical shape. Further, at least one communication groove 132 (four corresponding to each side in the illustrated example) that communicates the annular groove 130 and the inside of the opening O is formed in advance on the upper end surface of the peripheral wall 108.

第2の工程は、図6(a)に示すように、光吸収性部材102の上に光透過性部材106を開口部Oを覆うように配置する配置工程である。   The second process is an arrangement process in which the light transmissive member 106 is disposed on the light absorbing member 102 so as to cover the opening O as shown in FIG.

第3の工程は、互いに重ね合わされた光吸収性部材102と光透過性部材106を吸引密着させる吸引密着工程であり、かかる吸引密着は開口部O内を減圧することにより行う。図6(b)の左図に光透過性部材106を光吸収性部材102に重ねた後の様子を示すように、光透過性部材106と光吸収性部材102との間には、光透過性部材106の成形時の反りや後述するレーザ光による溶着時の熱変形等に起因して隙間が生じる場合があるが、光透過性部材106を薄板状に形成したことから、図6(b)の右図に示すように、開口部O内を減圧することにより光透過性部材106の周縁部を周壁108の上端面に引き寄せるように変形させ、該上端面に密着させることができる。   The third step is a suction contact step in which the light absorbing member 102 and the light transmissive member 106 that are superposed on each other are sucked into close contact, and this suction close contact is performed by decompressing the inside of the opening O. As shown in the left diagram of FIG. 6B, the light transmitting member 106 is overlapped with the light absorbing member 102, and the light transmitting member 106 and the light absorbing member 102 are transmitted with light. There is a case where a gap is generated due to warpage at the time of molding of the transparent member 106 or thermal deformation at the time of welding by laser light to be described later. However, since the light transmissive member 106 is formed in a thin plate shape, FIG. As shown in the right diagram of FIG. 4, by reducing the pressure in the opening O, the peripheral edge of the light transmissive member 106 can be deformed so as to be drawn toward the upper end surface of the peripheral wall 108 and can be brought into close contact with the upper end surface.

開口部O内の減圧は、具体的には、図7に示すような外部の圧力調整装置Dを用い、光吸収性部材102に予め形成した吸引開口112を通じて行うことができる。   Specifically, the pressure reduction in the opening O can be performed through a suction opening 112 formed in advance in the light-absorbing member 102 using an external pressure adjusting device D as shown in FIG.

圧力調整装置Dは主として、減圧装置D1と、加圧装置D2と、制御器D3と、吸引開口112に接続される二重配管Pとからなる。   The pressure adjusting device D mainly includes a pressure reducing device D1, a pressurizing device D2, a controller D3, and a double pipe P connected to the suction opening 112.

減圧装置D1は、開口部O内の空気を吸引排気するための真空ポンプと電動のリークバルブとを有している(図示省略)。減圧装置D1の吸引ラインL1には、圧力センサPG1が設けられており、これにより減圧時の開口部O内の圧力を検出することができる。   The decompression device D1 has a vacuum pump for sucking and exhausting the air in the opening O and an electric leak valve (not shown). A pressure sensor PG1 is provided in the suction line L1 of the decompression device D1, thereby detecting the pressure in the opening O during decompression.

加圧装置D2は、空気又は窒素やアルゴン等の不活性ガスからなるパージガスを供給するための加圧タンクと供給バルブとを有している(図示省略)。加圧装置D2の供給ラインL2には、圧力センサPG2が設けられており、これにより加圧時において開口部O内の圧力を検出することができる。   The pressurizing device D2 has a pressurizing tank and a supply valve for supplying a purge gas made of air or an inert gas such as nitrogen or argon (not shown). A pressure sensor PG2 is provided in the supply line L2 of the pressurizing device D2, thereby detecting the pressure in the opening O during pressurization.

制御器D3は、PLC(プログラマブルロジックコントローラ)やパーソナルコンピュータ等によって構成され、供給バルブ及びリークバルブの開度を調整する。また、圧力センサPG1,PG2も制御器D3に接続し、圧力センサPG1,PG2の検出信号に基づき上記供給バルブ及びリークバルブを制御することもできる。   The controller D3 is configured by a PLC (programmable logic controller), a personal computer, or the like, and adjusts the opening degree of the supply valve and the leak valve. The pressure sensors PG1 and PG2 can also be connected to the controller D3, and the supply valve and the leak valve can be controlled based on the detection signals of the pressure sensors PG1 and PG2.

二重配管Pは、外側に配置された吸引配管p1と内側に配置された供給配管p2からなる。吸引配管p1は開口部O内と減圧装置D1とを連通し、開口部O内の空気を吸引する。供給配管p2は、開口部O内と加圧装置D2とを連通し、開口部O内にパージガスを供給する。図示は省略するが、二重配管Pの外側の配管を供給配管とし、内側の配管を吸引配管とすることもできるが、図示例のように、外側に吸引配管p1を配置する方が、溶着時に発生するガスを効率的に除去できる点で好ましい。   The double pipe P includes a suction pipe p1 disposed on the outside and a supply pipe p2 disposed on the inside. The suction pipe p1 communicates the inside of the opening O and the pressure reducing device D1, and sucks the air in the opening O. The supply pipe p2 communicates the inside of the opening O with the pressurizing device D2, and supplies the purge gas into the opening O. Although illustration is omitted, the outer pipe of the double pipe P can be used as the supply pipe, and the inner pipe can be used as the suction pipe. However, as shown in the illustrated example, it is preferable to arrange the suction pipe p1 outside. It is preferable in that gas generated at times can be efficiently removed.

第4の工程は、図7に示すように、光吸収性部材102と光透過性部材106とを吸引密着した状態で、レーザ光LBを光透過性部材106側から光吸収性部材102の周壁108の上端面へ向けて照射し、光吸収性部材102と光透過性部材106の境界面Fまたはその近傍に環状の溶着部104及び点状の溶着部114(図1参照)を形成して光吸収性部材102及び光透過性部材106同士を接合する接合工程である。   In the fourth step, as shown in FIG. 7, the peripheral wall of the light absorbing member 102 is irradiated with the laser light LB from the light transmitting member 106 side in a state where the light absorbing member 102 and the light transmitting member 106 are in close contact with each other. Irradiate toward the upper end surface of 108 to form an annular welded portion 104 and a dotted welded portion 114 (see FIG. 1) at or near the boundary surface F between the light absorbing member 102 and the light transmissive member 106. This is a joining step for joining the light absorbing member 102 and the light transmitting member 106 together.

この接合工程においても引き続き開口部O内の減圧状態は維持するが、少なくとも環状の溶着部104を形成する間は、供給配管p2を介して開口部O内にパージガスを供給することが好ましい。このようにすれば、開口部O内に空気の流れを発生させることができ、溶着時に生じる煤や難燃剤の気化成分vを吸引配管p1を通じて効率的に外部に排出、除去することができる。   Even in this joining step, the decompressed state in the opening O is continuously maintained, but it is preferable to supply a purge gas into the opening O through the supply pipe p2 at least while the annular welded portion 104 is formed. If it does in this way, the flow of air can be generated in the opening part O, and the vaporization component v of the soot and flame retardant which arise at the time of welding can be efficiently discharged | emitted and removed to the exterior through the suction piping p1.

そして、溶着部104,114を形成するにあたっては、まず点状の溶着部114を形成し、その後に、環状の溶着部104を形成する。これは、光透過性部材106への熱負荷が比較的小さい点状の溶着部114により光透過性部材106を光吸収性部材102に仮接合することで、その後に熱負荷の比較的大きい環状の溶着部104を形成した際の光透過性部材106の熱変形を抑制し、該熱変形に起因した空気漏れによる真空破壊を防止するためである。環状の溶着部104の溶着が進むにつれて、真空の受圧面積が減るため、その陰圧分を補う点では点状の溶着部114は平面を形成できる3点以上設けることが好ましい。この例では、点状の溶着部114は、光透過性部材106のコーナー部に隣接して4箇所に形成する。   And in forming the welding parts 104 and 114, the dotted | punctate welding part 114 is formed first, and the cyclic | annular welding part 104 is formed after that. This is because the light-transmitting member 106 is temporarily joined to the light-absorbing member 102 by the spot-like welded portion 114 that has a relatively small heat load on the light-transmitting member 106, and then the annular shape having a relatively large heat load. This is to suppress thermal deformation of the light transmissive member 106 when the welded portion 104 is formed, and to prevent vacuum breakage due to air leakage caused by the thermal deformation. As the welding of the annular welded portion 104 progresses, the pressure receiving area of the vacuum decreases. Therefore, it is preferable to provide three or more point-like welded portions 114 that can form a plane in terms of compensating for the negative pressure. In this example, the dotted welds 114 are formed at four locations adjacent to the corners of the light transmissive member 106.

点状の溶着部114は、光学ヘッドH(図7)を光透過性部材106の上方で停止させた状態でレーザ光LBを光吸収性部材102の周壁108の上端面に照射することで形成される。点状の溶着部114の径は、約0.3〜0.7mmとすることが好ましく、約0.5mmとすることがより好ましい。環状の溶着部104は、光学ヘッドHを光透過性部材106の上方において光吸収性部材102の周壁108に沿って移動させながらレーザ光LBを周壁108上端面に照射することで形成される。環状の溶着部104の幅は、約0.3〜0.7mmとすることが好ましく、約0.5mmとすることがより好ましい。なお、レーザ光LBの発信器としては、例えば、ファイバレーザ(波長:1070nm)やYAGレーザ(波長:1064nm)、半導体レーザ(波長:808nm,840nmまたは940nm)、CO2レーザ(波長:10600nm)などを用いることができる。   The spot-like welded portion 114 is formed by irradiating the upper end surface of the peripheral wall 108 of the light absorbing member 102 with the laser beam LB in a state where the optical head H (FIG. 7) is stopped above the light transmitting member 106. Is done. The diameter of the dotted welded portion 114 is preferably about 0.3 to 0.7 mm, and more preferably about 0.5 mm. The annular welded portion 104 is formed by irradiating the upper end surface of the peripheral wall 108 with the laser light LB while moving the optical head H along the peripheral wall 108 of the light absorbing member 102 above the light transmitting member 106. The width of the annular welded portion 104 is preferably about 0.3 to 0.7 mm, and more preferably about 0.5 mm. As a transmitter of the laser beam LB, for example, a fiber laser (wavelength: 1070 nm), a YAG laser (wavelength: 1064 nm), a semiconductor laser (wavelength: 808 nm, 840 nm or 940 nm), a CO2 laser (wavelength: 10600 nm), etc. Can be used.

ここで図8(a)〜(d)を参照し、光吸収性部材102の周壁108の上端面に予め形成した環状溝130にレーザ光LBを照射することにより、図1で説明した第1部分の面積S1に対する第2部分の面積S2の比率が12〜35となる環状の溶着部104を形成するプロセスについて説明する。   Here, referring to FIGS. 8A to 8D, the laser beam LB is irradiated to the annular groove 130 formed in advance on the upper end surface of the peripheral wall 108 of the light-absorbing member 102, whereby the first described in FIG. A process for forming the annular welded portion 104 in which the ratio of the area S2 of the second part to the area S1 of the part is 12 to 35 will be described.

図8(a)に示すように、光吸収性部材102と光透過性部材106を互いに吸引密着させた状態で、光透過性部材106側から環状溝130の溝底にレーザ光を照射すると、図8(b)に示すように環状溝130の溝底が発熱して溶融し、溶融池内で発泡が開始される。引き続きレーザ光を照射すると、図8(c)に示すように発泡が成長して溶融池が成長する。このとき、環状溝130の存在により、光吸収性部材102の溶融池は直ぐには光透過性部材106に接触せず、溶融池は十分な幅及び深さとなるまで成長させることができる。図8(d)には、溶融池が光透過性部材106に到達した後にレーザ光の照射を停止し、環状の溶着部104の形成が完了した状態を示している。   As shown in FIG. 8A, when the light absorbing member 102 and the light transmissive member 106 are attracted and adhered to each other, the laser light is irradiated from the light transmissive member 106 side to the groove bottom of the annular groove 130. As shown in FIG. 8B, the groove bottom of the annular groove 130 generates heat and melts, and foaming is started in the molten pool. When the laser beam is subsequently irradiated, the foam grows and the molten pool grows as shown in FIG. At this time, due to the presence of the annular groove 130, the molten pool of the light absorbing member 102 does not immediately contact the light transmissive member 106, and the molten pool can be grown to a sufficient width and depth. FIG. 8D shows a state where the irradiation of the laser beam is stopped after the molten pool reaches the light transmitting member 106 and the formation of the annular welded portion 104 is completed.

また、本実施形態では、光吸収性部材102の周壁108の上端面に環状溝130と開口部Oとを連通する連通溝132を設けているため、環状の溶着部104の形成過程で生じる煤や難燃剤の気化成分vは、環状溝130及び連通溝132を通って開口部O内に吸引、排出され、最終的には、吸引配管p1により外部に排出される。   In the present embodiment, the communication groove 132 that connects the annular groove 130 and the opening O is provided on the upper end surface of the peripheral wall 108 of the light-absorbing member 102. The vaporized component v of the flame retardant is sucked and discharged into the opening O through the annular groove 130 and the communication groove 132, and finally discharged to the outside through the suction pipe p1.

第5の工程は、環状の溶着部104を形成した後に引き続き開口部O内の減圧を保持し、または開口部O内を加圧し、あるいは減圧と加圧を交互に行い、その際の単位時間当たり圧力の変化を測定することによって環状の溶着部104の気密性試験を行う気密性検査工程である。開口部O内の圧力は、図7に示した圧力センサPG1,PG2で測定し、その単位時間当たりの圧力の変化は制御部D3で演算し、必要に応じて外部に出力ないし表示させることができる。あるいは、図示しない流量センサを吸引ラインL1又は供給ラインL2に設けておき、単位時間当たりの流量の変化を測定することにより、環状の溶着部104の気密性試験を行うこともできる。   In the fifth step, after the annular welded portion 104 is formed, the decompression in the opening O is continuously held, or the inside of the opening O is pressurized, or the decompression and the pressurization are alternately performed, and unit time at that time This is an airtightness inspection process for performing an airtightness test on the annular welded portion 104 by measuring a change in the contact pressure. The pressure in the opening O is measured by the pressure sensors PG1 and PG2 shown in FIG. 7, and the change in pressure per unit time is calculated by the control unit D3 and output or displayed to the outside as necessary. it can. Or the flow rate sensor which is not shown in figure is provided in the suction line L1 or the supply line L2, and the airtightness test of the cyclic | annular welding part 104 can also be performed by measuring the change of the flow rate per unit time.

図示しない第6の工程は、環状の溶着部104の形成後に、開口部O内の減圧を維持したまま、光透過性部材106側からレーザ光LBを吸引開口112の内部又はその周囲に照射することによって吸引開口112を閉塞させる吸引開口閉鎖工程である。これにより、開口部O内の真空を保ったまま開口部O内を密閉することができる。勿論、吸引開口112は開放したままでもよい。   In a sixth step (not shown), after the annular welded portion 104 is formed, the laser light LB is irradiated to the inside of the suction opening 112 or the periphery thereof from the light transmitting member 106 side while maintaining the reduced pressure in the opening O. This is a suction opening closing process for closing the suction opening 112. Thereby, the inside of the opening O can be sealed while the vacuum in the opening O is maintained. Of course, the suction opening 112 may remain open.

本実施形態の接合構造体の製造方法によれば、光吸収性部材102に開口部Oを設けておき、この開口部O内を減圧することによって光吸収性部材102と光透過性部材106を吸引密着させる構成としたので、両部材102,106を加圧密着するための従来のガラス板を不要とすることができ、上述したようなガラス板に起因する種々の問題を解消することができる。   According to the manufacturing method of the bonded structure of the present embodiment, the light absorbing member 102 and the light transmissive member 106 are provided by providing the light absorbing member 102 with the opening O and reducing the pressure inside the opening O. Since it is configured to suck and adhere, a conventional glass plate for press-contacting both members 102 and 106 can be eliminated, and various problems caused by the glass plate as described above can be solved. .

また、光吸収性部材102の周壁108の上端面に環状溝130を形成し、この環状溝130にレーザ光LBを照射して環状の溶着部104を形成する構成としたことから、十分な幅及び深さの溶着部104を形成して高い接合強度を得ることができるのに加えて、光透過性部材106への熱影響を小さくし、溶着過程における光透過性部材106の熱変形を抑制することができ、当該熱変形に起因した吸引密着性の低下を防止することができる。   Further, since the annular groove 130 is formed on the upper end surface of the peripheral wall 108 of the light absorbing member 102 and the annular groove 130 is irradiated with the laser beam LB, the annular welded portion 104 is formed. In addition to forming a weld portion 104 having a depth and a high bonding strength, the thermal effect on the light transmissive member 106 can be reduced, and thermal deformation of the light transmissive member 106 during the welding process can be suppressed. It is possible to prevent a decrease in suction adhesion due to the thermal deformation.

さらに、光吸収性部材102の周壁108の上端面に環状溝130と開口部Oを連通する連通溝132を設ける構成としたことから、環状の溶着部104の形成過程で生じる煤や難燃剤の気化成分vを、環状溝130及び連通溝132と介して開口部O内に吸引し、最終的には、吸引配管p1を介して外部に排出することができる。   Further, since the communication groove 132 that connects the annular groove 130 and the opening O is provided on the upper end surface of the peripheral wall 108 of the light-absorbing member 102, soot and flame retardant generated in the process of forming the annular welded portion 104 are provided. The vaporized component v can be sucked into the opening O through the annular groove 130 and the communication groove 132, and finally discharged to the outside through the suction pipe p1.

さらに、光透過性部材106を開口部Oの減圧に伴い容易に変形可能に構成したことから、光透過性部材106を光吸収性部材102に重ね合わせた際にこれらの間に隙間が生じる場合でも開口部O内を減圧することにより光透過性部材106でこの隙間を閉鎖することができ、優れた吸引密着性を得ることができる。   Further, since the light transmissive member 106 is configured to be easily deformable as the opening O is decompressed, a gap is generated between the light transmissive member 106 and the light absorptive member 102 when they are overlapped. However, by reducing the pressure inside the opening O, the gap can be closed by the light transmissive member 106, and excellent suction adhesion can be obtained.

さらに、環状の溶着部104を形成するのに先立って、点状の溶着部114を形成して仮接合する構成としたことから、環状の溶着部104の形成途中での光透過性部材106の熱変形を抑制することができ、当該熱変形に起因した吸引密着性の低下を防止することができる。   Further, prior to forming the annular welded portion 104, the point-shaped welded portion 114 is formed and temporarily joined, so that the light transmitting member 106 during the annular welded portion 104 formation is formed. Thermal deformation can be suppressed, and a decrease in suction adhesion due to the thermal deformation can be prevented.

さらに、開口部O内の減圧を該開口部O内にパージガスを供給しながら行う構成としたことにより、開口部O内に空気の流れを発生させ、煤や難燃剤の気化成分vを効率的に排出、除去することができる。   Further, the pressure in the opening O is reduced while supplying the purge gas into the opening O, so that an air flow is generated in the opening O, and the vaporized component v of the soot and the flame retardant is efficiently generated. Can be discharged and removed.

さらに、環状の溶着部104を形成した後に引き続き開口部O内の減圧を保持し、または開口部O内を加圧し、あるいは減圧と加圧を交互に行い、その際の単位時間当たりの圧力又は流量の変化を測定することによって環状の溶着部104の気密性試験を行う場合には、製造設備を簡略化することができるのに加えて、製造時間を大幅に短縮することができる。   Further, after the annular welded portion 104 is formed, the pressure inside the opening O is continuously maintained, or the inside of the opening O is pressurized, or pressure reduction and pressurization are alternately performed. In the case where the airtightness test of the annular welded portion 104 is performed by measuring the change in flow rate, in addition to simplifying the manufacturing equipment, the manufacturing time can be greatly shortened.

さらに、開口部O内の圧力を圧力センサPG1で常時検出し、その圧力の変化に基づき、光吸収性部材102と光透過性部材106との密着、環状の溶着部104の形成開始、及び環状の溶着部104の形成完了の判別を行うようにした場合には、通常生産時の加工時間の短縮と、異常発生時の早期対応が可能となる。   Further, the pressure in the opening O is constantly detected by the pressure sensor PG1, and based on the change in the pressure, the light absorbing member 102 and the light transmitting member 106 are brought into close contact with each other, the formation of the annular welded portion 104 is started, and the annular When it is determined that the formation of the welded portion 104 has been completed, the processing time during normal production can be shortened, and an early response can be made when an abnormality occurs.

以上、図示例に基づき本発明について説明したが、本発明は上述の実施形態に限定されず、特許請求の範囲の記載内で種々の変更、追加等を行うことが可能である。例えば、上述の実施形態の接合構造体の製造方法においては、溝底が平坦な環状溝130を図示したが、これに限らず、図9(a)に示すように、環状溝の溝底に隆起部134を設けてもよい。また、環状溝130は一つに限らず、図9(b)に示すように隣接して2つ設け、溶着時に合体して一つの幅広の溶着部104を形成するようにしてもよく、図9(c)に示すように、光透過性部材106側にも環状溝136を設けてもよい。   Although the present invention has been described based on the illustrated examples, the present invention is not limited to the above-described embodiment, and various changes and additions can be made within the scope of the claims. For example, in the manufacturing method of the bonded structure according to the above-described embodiment, the annular groove 130 having a flat groove bottom is illustrated. However, the present invention is not limited to this, and as illustrated in FIG. A raised portion 134 may be provided. Further, the number of the annular grooves 130 is not limited to one, and two annular grooves 130 may be provided adjacent to each other as shown in FIG. 9B, and may be combined at the time of welding to form one wide welding portion 104. As shown in FIG. 9C, an annular groove 136 may be provided also on the light transmitting member 106 side.

(第1実施例)
本発明をコネクタに適用した例について説明する。図10は、図2に示した実施形態の接合構造体200の一実施例としてのコネクタを示し、(a)は斜視図であり、(b)は嵌合方向Xに沿った断面図である。図中、対応する部材又は部分には符号に「’」を加えて示し、重複した説明は省略する。
(First embodiment)
An example in which the present invention is applied to a connector will be described. FIG. 10 shows a connector as an example of the joint structure 200 of the embodiment shown in FIG. 2, (a) is a perspective view, and (b) is a cross-sectional view along the fitting direction X. . In the figure, corresponding members or portions are indicated by adding “′” to the reference numerals, and redundant description is omitted.

このコネクタ200’は、携帯機器や情報機器などの電子機器内の基板に固定され、嵌合方向Xに沿って挿入される図示しない相手方のコネクタに接続されるレセプタクルコネクタであり、主として、光吸収性部材202としてのハウジング202’と、それぞれ嵌合方向Xに延在しかつ嵌合方向Xに対して直交する方向に配列される複数のコンタクト203と、ハウジング202’の開口部O’を覆うとともに封止する、光透過性部材206としての薄板状のカバー206’とを備えるものである。   This connector 200 ′ is a receptacle connector that is fixed to a substrate in an electronic device such as a portable device or an information device, and is connected to a mating connector (not shown) that is inserted along the fitting direction X, and mainly absorbs light. Covers the housing 202 ′ as the elastic member 202, the plurality of contacts 203 extending in the fitting direction X and arranged in the direction orthogonal to the fitting direction X, and the opening O ′ of the housing 202 ′. And a thin plate-like cover 206 ′ as a light transmissive member 206 that is sealed together.

ハウジング202’は、光吸収性かつ絶縁性の熱可塑性樹脂から形成されており、前方に相手方のコネクタが挿入される嵌合口212’を有する周壁208’と、底壁210’と、天壁218’とを有している。   The housing 202 ′ is formed of a light-absorbing and insulating thermoplastic resin, and has a peripheral wall 208 ′ having a fitting port 212 ′ into which a mating connector is inserted, a bottom wall 210 ′, and a top wall 218. 'And have.

ハウジング202’の天壁218’には、嵌合方向Xに沿って形成された複数のスリット220’が形成されており、該スリット220’により開口部O’が区画されている。各スリット220’内にはコンタクト203が配置されている。各コンタクト203の前方端部は相手方のコネクタとの接続のため天壁218’の内面より下方に突出し、その後方端部が電子機器の基板または他の配線板との接続のためハウジング202’から露出している。   A plurality of slits 220 ′ formed along the fitting direction X are formed in the top wall 218 ′ of the housing 202 ′, and an opening O ′ is defined by the slits 220 ′. A contact 203 is disposed in each slit 220 '. The front end portion of each contact 203 protrudes downward from the inner surface of the top wall 218 'for connection with the mating connector, and the rear end portion thereof protrudes from the housing 202' for connection with the substrate of the electronic device or other wiring board. Exposed.

カバー206’は、ハウジング202’の開口部O’を覆うようにハウジング202’に重ね合わされ、すべてのスリット220’をまとめて囲繞するように形成された環状の溶着部204’を介して周壁208’の上端面に全周に亘って接合されている。これにより、嵌合口212’から電子機器内部へのスリット220’を介した空気や埃、水の浸水ルートは、カバー206’及び環状の溶着部204’によって遮断されている。また、環状の溶着部204’の外側には、カバー206’のコーナー部に隣接して4つの点状の溶着部214’が形成されている。   The cover 206 ′ is overlapped with the housing 202 ′ so as to cover the opening O ′ of the housing 202 ′, and the peripheral wall 208 is interposed through an annular welded portion 204 ′ formed so as to surround all the slits 220 ′. It is joined to the upper end surface of 'over the entire circumference. As a result, the water, dust, and water immersion routes from the fitting port 212 ′ to the inside of the electronic device through the slit 220 ′ are blocked by the cover 206 ′ and the annular welded portion 204 ′. Further, on the outside of the annular welded portion 204 ′, four dotted welded portions 214 ′ are formed adjacent to the corner portion of the cover 206 ′.

コネクタ200’において、環状の溶着部204’は、その延在方向に対する垂直断面でみて、カバー206’側の部分の面積S1’に対するハウジング202’側の部分の面積S2’の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   In the connector 200 ′, the annular welded portion 204 ′ has a ratio of the area S2 ′ of the portion on the housing 202 ′ side to the area S1 ′ of the portion on the cover 206 ′ side in the vertical cross section with respect to the extending direction of 12 to 35. More preferably, it is in the range of 19 to 26.

このようなコネクタ200’は、嵌合口212’を吸引開口212として、図5〜図8を参照して説明した実施形態の製造方法に従って製造することができる。   Such a connector 200 ′ can be manufactured according to the manufacturing method of the embodiment described with reference to FIGS. 5 to 8 with the fitting port 212 ′ as the suction opening 212.

(第2実施例)
本発明をセンサに適用した例について説明する。図11は、図4(a)に示した実施形態の接合構造体300の一実施例としてのセンサを示し、(a)は斜視図であり、(b)は断面図である。
(Second embodiment)
An example in which the present invention is applied to a sensor will be described. 11A and 11B show a sensor as an example of the joint structure 300 according to the embodiment shown in FIG. 4A. FIG. 11A is a perspective view and FIG. 11B is a cross-sectional view.

このセンサ300’は、加速度センサ、振動センサ、角速度センサ、距離センサ、位置センサなど如何なる形式のセンサとすることができる。センサ300’は、主として、光吸収性部材302としての筐体302’と、筐体302’の開口部O’を覆うとともに封止する光透過性部材306としてのカバー306’とを備えるものであり、筐体302’内部に図示しない検出器本体(センサチップ)を収容する。   The sensor 300 ′ can be any type of sensor such as an acceleration sensor, a vibration sensor, an angular velocity sensor, a distance sensor, and a position sensor. The sensor 300 ′ mainly includes a housing 302 ′ as a light absorbing member 302 and a cover 306 ′ as a light transmissive member 306 that covers and seals the opening O ′ of the housing 302 ′. Yes, a detector main body (sensor chip) (not shown) is accommodated in the housing 302 ′.

筐体302’は、光吸収性の熱可塑性樹脂から形成されており、開口部O’を区画するとともに前方に向けて吸引筒312’を突設する周壁308’と、底壁310’とを有している。   The casing 302 ′ is made of a light-absorbing thermoplastic resin, and includes a peripheral wall 308 ′ that partitions the opening O ′ and projects a suction cylinder 312 ′ toward the front, and a bottom wall 310 ′. Have.

カバー306’は、筐体302’の開口部O’を覆うように筐体302’の周壁308’に被せられ、点状の溶着部314’及び環状の溶着部304’を介して全周に亘って接合されている。カバー306’の周縁部には、周壁308’の外面に沿って薄肉片324’が垂設されている。この薄肉片324’は吸引筒312’を通じて開口部O’内を減圧した際に周壁308’側に引き寄せられて密着するよう形成されている。   The cover 306 ′ is placed on the peripheral wall 308 ′ of the housing 302 ′ so as to cover the opening O ′ of the housing 302 ′, and is entirely surrounded by the dotted welded portion 314 ′ and the annular welded portion 304 ′. It is joined over. A thin piece 324 'is suspended from the peripheral edge of the cover 306' along the outer surface of the peripheral wall 308 '. The thin piece 324 'is formed so as to be attracted and brought into close contact with the peripheral wall 308' when the inside of the opening O 'is decompressed through the suction cylinder 312'.

センサ300’において、環状の溶着部304’は、その延在方向に対する垂直断面でみて、カバー306’側の部分の面積S1’に対する筐体302’側の部分の面積S2’の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   In the sensor 300 ′, the annular welded portion 304 ′ has a ratio of the area S2 ′ of the portion on the housing 302 ′ side to the area S1 ′ of the portion on the cover 306 ′ side as viewed in a vertical cross section with respect to the extending direction thereof. It is in the range of 35, more preferably in the range of 19 to 26.

このようなセンサ300’は、吸引筒312’を吸引開口312として、図5〜図8を参照して説明した実施形態の製造方法に従って製造することができる。   Such a sensor 300 ′ can be manufactured according to the manufacturing method of the embodiment described with reference to FIGS. 5 to 8 with the suction cylinder 312 ′ as the suction opening 312.

なお、吸引筒312’の基端部は開口したままであるが、上述した製造方法の第6工程に従い、環状の溶着部304’の形成後に、開口部O’内の減圧を維持したままの状態でカバー306’側からレーザ光を吸引筒312’の基端部の開口周辺に照射することにより、吸引筒312’の基端部の開口を閉塞してもよい。これにより、センサ300’の内部空間を真空に保ったまま密閉することができる。   Although the base end of the suction cylinder 312 ′ remains open, the reduced pressure in the opening O ′ is maintained after the formation of the annular weld 304 ′ in accordance with the sixth step of the manufacturing method described above. In this state, the opening of the proximal end portion of the suction tube 312 ′ may be closed by irradiating laser light from the cover 306 ′ side around the opening of the proximal end portion of the suction tube 312 ′. Thereby, the internal space of the sensor 300 ′ can be sealed while being kept in a vacuum.

かくして本発明によれば、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させるのに適した接合構造体を提供するとともに、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させることができる接合構造体の製造方法を提供することができる。   Thus, according to the present invention, it is possible to provide a joining structure suitable for uniformly and reliably bringing members to be joined together without using a glass plate, and joining them without using a glass plate. It is possible to provide a method for manufacturing a bonded structure that can uniformly and reliably bring the members to be bonded together.

100,200,300 接合構造体
102,202,302 光吸収性部材
104,204,304 環状の溶着部
106,206,306 光透過性部材
108,208,308 周壁
112,212,312 吸引開口
114,214,314 点状の溶着部
130 環状溝
132 連通溝
324 薄肉片
D 圧力調整装置
D1 減圧装置
D2 加圧装置
D3 制御器
F 境界面
H 光学ヘッド
L1 吸引ライン
L2 供給ライン
O 開口部
PG1,PG2 圧力センサ
S1 環状の溶着部の第1部分(光透過性部材側)の面積
S2 環状の溶着部の第2部分(光吸収性部材側)の面積
100, 200, 300 Joined structure 102, 202, 302 Light absorbing member 104, 204, 304 Annular welded portion 106, 206, 306 Light transmitting member 108, 208, 308 Peripheral wall 112, 212, 312 Suction opening 114, 214, 314 Spot welded portion 130 Annular groove 132 Communication groove 324 Thin piece D Pressure adjusting device D1 Pressure reducing device D2 Pressure device D3 Controller F Interface H Optical head L1 Suction line L2 Supply line O Opening portion PG1, PG2 Pressure Sensor S1 Area of the first portion (light transmissive member side) of the annular welded portion S2 Area of the second portion (light absorbent member side) of the annular welded portion

Claims (3)

少なくとも1つの開口部を有する光吸収性部材と、
前記開口部を覆うように前記光吸収性部材上に配置された光透過性部材と、を備え、
前記開口部を囲繞するように延在するとともに前記光吸収性部材と前記光透過性部材とを接合する環状の溶着部が形成され、
前記環状の溶着部は、その延在方向に対する垂直断面でみて、光透過性部材側の部分の面積に対する光吸収性部材側の部分の面積の比が12〜35の範囲内にあり、
前記光透過性部材は、前記環状の溶着部が形成される前の状態で前記開口部内が減圧状態とされた場合に変形して、前記光吸収性部材に密着する薄板状に形成されており、
前記光吸収性部材は、周壁と、該周壁の上端部に繋がる天壁とを有し、前記天壁には、前記開口部として、同一方向へ延在する複数のスリットが形成されていることを特徴とする接合構造体。
A light absorbing member having at least one opening;
A light transmissive member disposed on the light absorbing member so as to cover the opening,
An annular welded portion that extends so as to surround the opening and joins the light absorbing member and the light transmissive member is formed,
The annular welded portion has a ratio of the area of the light-absorbing member side portion to the area of the light-transmitting member side portion in a range of 12 to 35, as viewed in a vertical cross section with respect to the extending direction,
The light transmissive member is formed in a thin plate shape that is deformed when the inside of the opening is in a reduced pressure state before the annular welded portion is formed and is in close contact with the light absorbing member. ,
The light absorbing member has a peripheral wall and a top wall connected to the upper end of the peripheral wall, and the top wall has a plurality of slits extending in the same direction as the opening . A bonded structure characterized by the above.
前記比は、19〜26の範囲内にあることを特徴とする請求項1に記載の接合構造体。   The said structure exists in the range of 19-26, The joining structure of Claim 1 characterized by the above-mentioned. 前記環状の溶着部に隣接して位置し、前記光吸収性部材と前記光透過性部材とを接合する点状の溶着部を備えることを特徴とする請求項1または2に記載の接合構造体。 Located adjacent to the welded portion of the annular joint structure according to claim 1 or 2, characterized in that it comprises the light-absorbing member and the light transmitting member and the point-like welding portion joining the .
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