JP6576370B2 - Grinding apparatus and grinding method - Google Patents
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Description
本発明は、研削装置に関する。 The present invention relates to a grinding apparatus.
略円柱状の研削砥石を、略円筒状の被加工物（ワーク）の内側面に当接させた状態で、軸線回りに回転させ、かつ、当該軸線に対して垂直な方向に並進させることにより、当該被加工物を内側面から研削する方法が提案されている（例えば、特許文献１参照）。 By rotating a substantially cylindrical grinding wheel around an axis while being in contact with the inner surface of a substantially cylindrical workpiece (work) and translating it in a direction perpendicular to the axis A method of grinding the workpiece from the inner surface has been proposed (see, for example, Patent Document 1).
しかし、研削砥石を被加工物に対して押し当てる圧力（研削圧）が不適切である場合、所望の態様で当該被加工物を加工することが困難となる。また、研削砥石の切れ味には、本来的な個体差のほか、使用状況の相違などの後天的な個体差があり、さらには研削加工を繰り返すことでも常に変化し、砥石径が小さい場合にはその変化率は大きい。加えて、研削圧が同じであっても研削砥石の切れ味の差によっても加工態様の制御が困難になる。例えば、切れ味の良い研削砥石を用いても、研削圧が低すぎると、加工時間が長くなってしまう可能性がある。一方、研削圧が高すぎると、砥石軸がたわみ、研削面が所望の幾何学的精度と異なる可能性がある。 However, when the pressure (grinding pressure) for pressing the grinding wheel against the workpiece is inappropriate, it is difficult to process the workpiece in a desired manner. In addition, the grinding wheel sharpness has inherent individual differences, as well as acquired individual differences such as differences in usage, and also changes constantly by repeated grinding, and when the grinding wheel diameter is small The rate of change is large. In addition, even if the grinding pressure is the same, it becomes difficult to control the processing mode due to the difference in the sharpness of the grinding wheel. For example, even when a sharp grinding wheel is used, if the grinding pressure is too low, the processing time may be long. On the other hand, if the grinding pressure is too high, the grinding wheel shaft may bend and the grinding surface may be different from the desired geometric accuracy.
そこで、本発明は、砥石切れ味を砥石切り込み送りに対する実研削速度へのゲイン（感度）と捉えて砥石から被加工物に作用する研削圧を適当に与え、かつ、加工圧を一定に安定した研削サイクルを長期的に高精度・高能率を維持する制御をしうる研削装置等を提供することを目的とする。 Therefore, the present invention regards the sharpness of the grinding wheel as a gain (sensitivity) to the actual grinding speed with respect to the grinding wheel cutting feed, and appropriately applies a grinding pressure that acts on the workpiece from the grinding stone, and also stabilizes the grinding pressure at a constant level. An object of the present invention is to provide a grinding apparatus or the like capable of controlling the cycle to maintain high accuracy and high efficiency over a long period of time.
本発明の研削装置は、研削砥石と、前記研削砥石を軸線回りに回転させる回転駆動機構と、前記研削砥石および被加工物を当該研削砥石の軸線に対して垂直な方向について相対的に並進させる並進駆動機構と、前記研削砥石の外側面により前記被加工物を研削加工するように前記回転駆動機構および前記並進駆動機構のそれぞれの動作を制御する制御装置と、を備えている研削装置であって、
前記研削砥石および前記被加工物の間で作用する力を研削圧として検知する研削圧センサを備え、
今回の研削圧の偏差ｅ（ｋ）を、以下の式（１）で算出し、
前回の研削圧の偏差ｅ（ｋ−１）を、以下の式（２）で算出し、
前記研削砥石および被加工物の相対的な並進速度をＶcomとした場合に、今回の並進速度Ｖ com （ｋ）を、以下の式（３）で算出して、算出したＶ com （ｋ）で前記研削砥石および被加工物を相対的に並進させるように前記並進駆動機構の動作を制御することで一定圧研削を行い、
砥石の切れ味である研削率η k を、以下の式（４）で算出し、
直前の研削サイクルの砥石の切れ味である研削率η k-1 を、以下の式（５）で算出し、
補正係数Ｃ（ｋ）を、以下の式（６）で算出し、サイクル毎、または、補正係数Ｃ（ｋ）がある閾値を超えた次の研削サイクルから、式（３）の各ゲインＫ １ およびＫ ２ の値を補正係数Ｃ（ｋ）に基づいて補正することを特徴とする研削装置。
ｅ（ｋ）＝Ｆ 0 −Ｆ meas （ｋ）・・・（１）
ｅ（ｋ−１）＝Ｆ 0 −Ｆ meas （ｋ−１）・・・（２）
Ｖ com (ｋ)＝Ｖ com (ｋ−１)＋Ｋ １ {ｅ(ｋ)−ｅ(ｋ−１)}＋Ｋ ２ ｅ(ｋ)・・・（３）
η k ＝Ｖ（ｋ） av ／Ｆ 0 ・・・（４）
η k-1 ＝Ｖ（ｋ−１） av ／Ｆ 0 ・・・（５）
Ｃ（ｋ）＝η k-1 ／η k ・・・（６）
但し、
Ｆ 0 は目標研削圧であり
Ｆ meas （ｋ）は今回研削圧であり
Ｆ meas （ｋ−１）は前回研削圧であり
Ｖ com （ｋ）は今回の並進速度であり
Ｖ com （ｋ−１）は前回の並進速度であり
Ｋ １ は第１のゲインであり
Ｋ ２ は第２のゲインであり
Ｖ（ｋ） av は今回の並進速度Ｖ com （ｋ）のある一定のサンプリング平均値であり
Ｖ（ｋ−１） av は前回の並進速度Ｖ com （ｋ−１）のある一定のサンプリング平均値である。
A grinding apparatus according to the present invention translates a grinding wheel, a rotation drive mechanism that rotates the grinding wheel about an axis, and relatively translates the grinding wheel and a workpiece in a direction perpendicular to the axis of the grinding wheel. A grinding device comprising: a translation drive mechanism; and a control device for controlling the operations of the rotation drive mechanism and the translation drive mechanism so as to grind the workpiece by the outer surface of the grinding wheel. And
A grinding pressure sensor for detecting a force acting between the grinding wheel and the workpiece as a grinding pressure;
The current grinding pressure deviation e (k) is calculated by the following equation (1):
The previous grinding pressure deviation e (k−1) is calculated by the following equation (2):
When the relative translation speed of the grinding wheel and the workpiece is Vcom, the current translation speed Vcom (k) is calculated by the following equation (3), and the calculated Vcom (k) Performing constant pressure grinding by controlling the operation of the translation drive mechanism so as to relatively translate the grinding wheel and the workpiece ,
The grinding rate η k that is the sharpness of the grindstone is calculated by the following formula (4),
The grinding rate η k-1 , which is the sharpness of the grinding wheel in the immediately preceding grinding cycle, is calculated by the following equation (5),
The correction coefficient C (k) is calculated by the following expression (6), and each gain K 1 of expression (3) is calculated for each cycle or from the next grinding cycle when the correction coefficient C (k) exceeds a certain threshold value. and grinding apparatus and correcting based on the value of K 2 in the correction coefficient C (k).
e (k) = F 0 −F meas (k) (1)
e (k−1) = F 0 −F meas (k−1) (2)
V com (k) = V com (k−1) + K 1 {e (k) −e (k−1)} + K 2 e (k) (3)
η k = V (k) av / F 0 (4)
η k-1 = V (k-1) av / F 0 (5)
C (k) = η k−1 / η k (6)
However,
F 0 is the target grinding pressure
F meas (k) is grinding pressure this time
F meas (k-1) is the previous grinding pressure
V com (k) is the current translation speed
V com (k-1) is the previous translation speed
K 1 is the first gain
K 2 is the second gain
V (k) av is a certain sampling average value of the current translation speed V com (k)
V (k−1) av is a certain sampling average value of the previous translation speed V com (k−1).
本発明の研削方法は、研削砥石と、前記研削砥石を軸線回りに回転させる回転駆動機構と、前記研削砥石および被加工物を当該研削砥石の軸線に対して垂直な方向について相対的に並進させる並進駆動機構と、を備えている研削装置を用いて、前記回転駆動機構および前記並進駆動機構のそれぞれの動作を制御することにより前記研削砥石の外側面により前記被加工物を研削加工する研削方法であって、
前記研削砥石および前記被加工物の間で作用する力を研削圧として検知する工程と、
今回の研削圧の偏差ｅ（ｋ）を、以下の式（７）で算出する工程と、
前回の研削圧の偏差ｅ（ｋ−１）を、以下の式（８）で算出する工程と、
前記研削砥石および被加工物の相対的な並進速度をＶcomとした場合に、今回の並進速度Ｖ com （ｋ）を、以下の式（９）で算出して、算出したＶ com （ｋ）で前記研削砥石および被加工物を相対的に並進させるように前記並進駆動機構の動作を制御することで一定圧研削を行う工程と、
砥石の切れ味である研削率η k を、以下の式（１０）で算出する工程と、
直前の研削サイクルの砥石の切れ味である研削率η k-1 を、以下の式（１１）で算出する工程と、
補正係数Ｃ（ｋ）を、以下の式（１２）で算出し、サイクル毎、または、補正係数Ｃ（ｋ）がある閾値を超えた次の研削サイクルから、式（９）の各ゲインＫ １ およびＫ ２ の値を補正係数Ｃ（ｋ）に基づいて補正する工程と、を含んでいることを特徴とする研削方法。
ｅ（ｋ）＝Ｆ 0 −Ｆ meas （ｋ）・・・（７）
ｅ（ｋ−１）＝Ｆ 0 −Ｆ meas （ｋ−１）・・・（８）
Ｖ com (ｋ)＝Ｖ com (ｋ−１)＋Ｋ １ {ｅ(ｋ)−ｅ(ｋ−１)}＋Ｋ ２ ｅ(ｋ)・・・（９）
η k ＝Ｖ（ｋ） av ／Ｆ 0 ・・・（１０）
η k-1 ＝Ｖ（ｋ−１） av ／Ｆ 0 ・・・（１１）
Ｃ（ｋ）＝η k-1 ／η k ・・・（１２）
但し、
Ｆ 0 は目標研削圧であり
Ｆ meas （ｋ）は今回研削圧であり
Ｆ meas （ｋ−１）は前回研削圧であり
Ｖ com （ｋ）は今回の並進速度であり
Ｖ com （ｋ−１）は前回の並進速度であり
Ｋ １ は第１のゲインであり
Ｋ ２ は第２のゲインであり
Ｖ（ｋ） av は今回の並進速度Ｖ com （ｋ）のある一定のサンプリング平均値であり
Ｖ（ｋ−１） av は前回の並進速度Ｖ com （ｋ−１）のある一定のサンプリング平均値である。
The grinding method according to the present invention includes a grinding wheel, a rotation drive mechanism that rotates the grinding wheel about an axis, and relatively translates the grinding wheel and the workpiece in a direction perpendicular to the axis of the grinding wheel. A grinding method for grinding the workpiece by an outer surface of the grinding wheel by controlling respective operations of the rotational drive mechanism and the translation drive mechanism using a grinding device comprising a translation drive mechanism Because
Detecting a force acting between the grinding wheel and the workpiece as a grinding pressure;
A step of calculating the grinding pressure deviation e (k) by the following equation (7);
Calculating the deviation e (k−1) of the previous grinding pressure by the following equation (8);
When the relative translation speed of the grinding wheel and the workpiece is Vcom, the current translation speed Vcom (k) is calculated by the following equation (9), and the calculated Vcom (k) Performing constant pressure grinding by controlling the operation of the translation drive mechanism so as to relatively translate the grinding wheel and the workpiece;
A step of calculating the grinding rate η k which is the sharpness of the grindstone by the following formula (10);
A step of calculating a grinding rate η k-1 that is the sharpness of the grinding wheel of the immediately preceding grinding cycle by the following equation (11):
The correction coefficient C (k) is calculated by the following formula (12), and each gain K 1 of the formula (9) is calculated for each cycle or from the next grinding cycle when the correction coefficient C (k) exceeds a certain threshold. grinding method characterized in that it includes the the steps of correcting, based on and the value of K 2 correction factor C (k).
e (k) = F 0 −F meas (k) (7)
e (k−1) = F 0 −F meas (k−1) (8)
V com (k) = V com (k−1) + K 1 {e (k) −e (k−1)} + K 2 e (k) (9)
η k = V (k) av / F 0 (10)
η k-1 = V (k-1) av / F 0 (11)
C (k) = η k−1 / η k (12)
However,
F 0 is the target grinding pressure
F meas (k) is grinding pressure this time
F meas (k-1) is the previous grinding pressure
V com (k) is the current translation speed
V com (k-1) is the previous translation speed
K 1 is the first gain
K 2 is the second gain
V (k) av is a certain sampling average value of the current translation speed V com (k)
V (k−1) av is a certain sampling average value of the previous translation speed V com (k−1).
本発明の研削装置および研削方法によれば、研削圧を目標研削圧に近づけるように並進駆動機構の動作（例えば、並進量、並進速度および並進加速度のうち少なくとも1つ）が適当に制御されうる。特に研削砥石が小径の場合は、砥石の切れ味の変化が速く、また加工圧の変化による砥石軸のたわみも大きくなることから、より有効に作用する。 According to the grinding apparatus and the grinding method of the present invention, the operation of the translation drive mechanism (for example, at least one of the translation amount, the translation speed, and the translation acceleration) can be appropriately controlled so that the grinding pressure approaches the target grinding pressure. . In particular, when the grinding wheel has a small diameter, the change in the sharpness of the grinding wheel is fast, and the deflection of the grinding wheel shaft due to the change in the processing pressure also increases, so that it works more effectively.
（構成）
図１に示されている本発明の一実施形態としての研削装置は、略円柱状の研削砥石１と、回転駆動機構２１と、回転駆動機構２１を支持する砥石台１２と、並進駆動機構２２と、略円筒状のワークＷ（被加工物）を支持するワーク台４と、副回転駆動機構４１と、制御装置２０と、を備えている。研削砥石１の近傍には、その外周面をドレッシングする研削砥石ドレッシング装置が設けられていてもよい。
(Constitution)
A grinding apparatus as an embodiment of the present invention shown in FIG. 1 includes a substantially cylindrical grinding wheel 1, a rotation drive mechanism 21, a grinding wheel base 12 that supports the rotation drive mechanism 21, and a translation drive mechanism 22. And a work table 4 that supports a substantially cylindrical workpiece W (workpiece), a sub-rotation drive mechanism 41, and a control device 20. In the vicinity of the grinding wheel 1, a grinding wheel dressing device for dressing the outer peripheral surface thereof may be provided.
回転駆動機構２１は、電動モータにより構成され、例えばその出力軸に取り付けられているスピンドルを介して研削砥石１を支持し、かつ、研削砥石１をｙ軸方向に平行な軸線回りに回転させる。並進駆動機構２２は、砥石台１２を研削砥石１の軸線方向に沿ってｘ軸方向およびｙ軸方向に並進させることにより、ワークＷに対して研削砥石１を相対的に並進させる。副回転駆動機構４１は、電動モータにより構成され、ワーク台４を通じてワークＷをｙ軸方向に平行な軸線回りに回転させる。なお、砥石台１２が固定され、ワーク台４が並進駆動機構２２によりｘ軸方向およびｙ軸方向のそれぞれに駆動されてもよい。砥石台１２が並進駆動機構２２（第1並進駆動機構）によりｘ軸方向およびｙ軸方向のうち一の方向に駆動され、砥石台１２が並進駆動機構２２（第２並進駆動機構）によりｘ軸方向およびｙ軸方向のうち他の方向に駆動されてもよい。 The rotation drive mechanism 21 is constituted by an electric motor, for example, supports the grinding wheel 1 via a spindle attached to its output shaft, and rotates the grinding wheel 1 about an axis parallel to the y-axis direction. The translation drive mechanism 22 translates the grinding wheel 1 relative to the workpiece W by translating the grinding wheel base 12 in the x-axis direction and the y-axis direction along the axial direction of the grinding wheel 1. The sub-rotation drive mechanism 41 is configured by an electric motor, and rotates the workpiece W about an axis parallel to the y-axis direction through the workpiece table 4. The grindstone base 12 may be fixed, and the work base 4 may be driven by the translation drive mechanism 22 in the x-axis direction and the y-axis direction, respectively. The grinding wheel base 12 is driven in one of the x-axis direction and the y-axis direction by the translation drive mechanism 22 (first translation driving mechanism), and the grinding wheel base 12 is driven by the translation driving mechanism 22 (second translation driving mechanism) in the x-axis direction. It may be driven in another direction among the direction and the y-axis direction.
砥石台１２には、研削圧センサSが設けられている。研削圧センサSは、例えばひずみゲージにより構成され、研削砥石1からワークＷに対して作用する力、または、研削砥石１がワークＷから受ける応力に応じた信号を出力する。研削圧センサＳは、砥石台１２に設けられていてもよい。 The grinding wheel base 12 is provided with a grinding pressure sensor S. The grinding pressure sensor S is composed of, for example, a strain gauge, and outputs a signal corresponding to the force acting on the workpiece W from the grinding wheel 1 or the stress that the grinding wheel 1 receives from the workpiece W. The grinding pressure sensor S may be provided on the grinding wheel base 12.
制御装置２０は、コンピュータ（ＣＰＵ（演算処理装置）、ＲＯＭまたはＲＡＭなどのメモリ（記憶装置）および入出力Ｉ／Ｆ回路等により構成されている。）により構成されている。制御装置２０は、回転駆動機構２１および並進駆動機構２２のそれぞれの動作を制御する。 The control device 20 is configured by a computer (a CPU (arithmetic processing unit), a memory (storage device) such as a ROM or a RAM, an input / output I / F circuit, etc.). The control device 20 controls the operations of the rotation drive mechanism 21 and the translation drive mechanism 22.
（機能）
略円筒状のワークＷがワーク台４に固定される。制御装置２０により、並進駆動機構２２の動作が制御されることにより、砥石１がｙ軸方向に動かされてワークＷの内側に挿入される。制御装置２０により、回転駆動機構２１の動作が制御されることにより、砥石１がその軸線周りに回転される。その状態で制御装置２０により、並進駆動機構２２の動作が制御されることにより、砥石１がｘ軸方向に並進してワークＷの内周面に当接される。これにより、ワークＷの内周面が研削加工されていく。
(function)
A substantially cylindrical workpiece W is fixed to the workpiece table 4. By controlling the operation of the translation drive mechanism 22 by the control device 20, the grindstone 1 is moved in the y-axis direction and inserted inside the workpiece W. By controlling the operation of the rotation drive mechanism 21 by the control device 20, the grindstone 1 is rotated around its axis. In this state, the operation of the translation drive mechanism 22 is controlled by the control device 20, whereby the grindstone 1 is translated in the x-axis direction and brought into contact with the inner peripheral surface of the workpiece W. Thereby, the inner peripheral surface of the workpiece W is ground.
この際、制御装置２０に対して、研削圧センサＳの出力信号（当該出力信号により表される研削圧）Ｆmeasが入力される。制御装置２０を構成する記憶装置に記憶保持されている目標研削圧Ｆ0が読み出される。 At this time, an output signal (grinding pressure represented by the output signal) F meas of the grinding pressure sensor S is input to the control device 20. The target grinding pressure F 0 stored in the storage device that constitutes the control device 20 is read out.
並進駆動機構２２のｘ軸方向の並進速度指令値である今回の切り込み速度Ｖcomが制御装置２０により算定される。例えば、今回の切り込み速度Ｖcom（ｋ）が、前回の切り込み速度Ｖcom（ｋ−１）と、目標研削圧Ｆ0に対する今回研削圧Ｆmeas（ｋ）（実測値）の偏差ｅ（ｋ）＝Ｆ0−Ｆmeas（ｋ）に基づき、関係式（０２）にしたがって制御装置２０により算定される。「ｋ」は制御装置２０の制御サイクル（またはクロック速度）を表わす指数であり、「今回」および「前回」とは今回および前回の制御サイクルにおける値であることを表わす。 The current cutting speed V com that is a translation speed command value in the x-axis direction of the translation drive mechanism 22 is calculated by the control device 20. For example, the current cutting speed V com (k) is the deviation e (k) between the previous cutting speed V com (k−1) and the current grinding pressure F meas (k) (actual measurement value) with respect to the target grinding pressure F 0 . = F 0 -F meas (k) is calculated by the control device 20 according to the relational expression (02). “K” is an index representing the control cycle (or clock speed) of the control device 20, and “current” and “previous” represent values in the current and previous control cycles.
Ｖcom (ｋ)＝Ｖcom (ｋ−１)＋Ｋ1{ｅ(ｋ)−ｅ(ｋ−１)}＋Ｋ2ｅ(ｋ) ‥（０２）。 V com (k) = V com (k−1) + K 1 {e (k) −e (k−1)} + K 2 e (k) (02).
今回切り込み速度Ｖ（ｋ）が、制御装置２０から並進駆動機構２２に対して指令値として出力される。当該指令値に応じて、並進駆動機構２２のｘ軸方向の並進速度が制御される。これにより、研削圧Ｆmeasを目標研削圧Ｆ0に近づけることができる。 The cutting speed V (k) this time is output from the control device 20 to the translation drive mechanism 22 as a command value. The translation speed in the x-axis direction of the translation drive mechanism 22 is controlled according to the command value. Thereby, the grinding pressure F meas can be brought close to the target grinding pressure F 0 .
さらに、関係式（０２）にしたがって行われる目標研削圧Ｆ0での研削加工サイクル中の単位圧力あたりの切込速度の平均値を直近の研削サイクルの単位圧力あたりの切込速度の平均値と比較し、補正をくわえることで、砥石の切れ味の変化に対応してより偏差eの０への収束速度を高める。 Furthermore, the average value of the cutting speed per unit pressure during the grinding cycle at the target grinding pressure F 0 performed according to the relational expression (02) is the average value of the cutting speed per unit pressure of the latest grinding cycle. By comparing and adding correction, the convergence speed of the deviation e to 0 is further increased in response to the change in the sharpness of the grindstone.
今回の研削サイクルの切り込み速度Ｖcom のある一定のサンプリング平均値をＶ（ｋ）av として、砥石の切れ味を研削率ηk＝Ｖ（ｋ）av／Ｆ0とし、直前の研削サイクルの砥石の切れ味を研削率ηk-1＝Ｖ（ｋ−１）av／Ｆ0と表わす。そこから補正係数Ｃ（ｋ）＝ηk-1／ηk を導きだし、サイクル毎、または、補正係数Ｃ（ｋ）がある閾値を超えた次の研削サイクルから関係式（０２）の各ゲインＫ1およびＫ２の値を補正する。 The constant sampling average value of the cutting speed V com of this grinding cycle is V (k) av , the sharpness of the grinding wheel is grinding rate η k = V (k) av / F 0, and the grinding wheel of the last grinding cycle is The sharpness is expressed as a grinding rate η k-1 = V (k-1) av / F 0 . Then, a correction coefficient C (k) = η k−1 / η k is derived, and each gain of the relational expression (02) is calculated for each cycle or from the next grinding cycle when the correction coefficient C (k) exceeds a certain threshold value. correcting the values of K 1 and K 2.
（本発明の他の実施形態）
並進駆動機構２２のｘ軸方向の並進速度指令値である今回の切り込み速度Ｖcomが、例えば、図２に示されている制御ブロック図にしたがって実行されてもよい。この場合、制御装置２０は、加算要素２０２、加算要素２０４、第１の１次遅れ要素２１０、第１ゲイン積算要素２１２、第２ゲイン積算要素２１４、加算要素２１６、加算要素２１８、第２の１次遅れ応答要素２２０、研削率算出要素２２８および第３の１次遅れ要素２３０を備えている。
(Other embodiments of the present invention)
The current cutting speed V com which is the translation speed command value in the x-axis direction of the translation drive mechanism 22 may be executed, for example, according to the control block diagram shown in FIG. In this case, the control device 20 includes the addition element 202, the addition element 204, the first primary delay element 210, the first gain integration element 212, the second gain integration element 214, the addition element 216, the addition element 218, and the second element. A primary delay response element 220, a grinding rate calculation element 228, and a third primary delay element 230 are provided.
加算要素２０２は、目標研削圧Ｆ0と研削圧Ｆmeasとの偏差ｅ＝Ｆ0−Ｆmeasを算出する。加算要素２０４は、研削圧偏差ｅと第１の１次遅れ要素２１０の出力との和を算出する。第１の１次遅れ要素２１０は、研削圧偏差ｅの第１時定数Ｔ1に応じた１次遅れ成分を出力する。第１ゲイン積算要素２１２は、加算要素２０４の出力に対してゲイン係数Ｋ1を乗じる。第２ゲイン積算要素２１４は、研削圧偏差ｅに対してゲイン係数Ｋ2を乗じる。加算要素２１６は、第１ゲイン積算要素２１２および第２ゲイン積算要素２１４のそれぞれの出力の和を出力する。加算要素２１８は、加算要素２１６の出力と第２の１次遅れ要素２２０の出力との和を切り込み速度指令値Ｖcomとして算出する。第２の１次遅れ要素２２０は、指令値Ｖcomの第２時定数Ｔ2に応じた１次遅れ成分を出力する。研削率算出要素２２８は、今回の研削率ηk＝Ｖ（ｋ）av／Ｆ0を算出する。第３の１次遅れ要素２３０は、今回の研削率ηkの第３時定数Ｔ3に応じた１次遅れ成分を出力する。第１ゲイン係数Ｋ1および第２ゲイン係数Ｋ2が、第３の１次遅れ要素２３０の出力に応じて、偏差ｅの０への収束速度が向上するように適応的に変更される。 The adding element 202 calculates a deviation e = F 0 −F meas between the target grinding pressure F 0 and the grinding pressure F meas . The addition element 204 calculates the sum of the grinding pressure deviation e and the output of the first primary delay element 210. The first primary delay element 210 outputs a primary delay component corresponding to the first time constant T 1 of the grinding pressure deviation e. The first gain integrating element 212 multiplies the output of the adding element 204 by a gain coefficient K 1 . Second gain integration element 214, multiplied by a gain coefficient K 2 with respect to the grinding pressure deviation e. The adding element 216 outputs the sum of the outputs of the first gain integrating element 212 and the second gain integrating element 214. The addition element 218 calculates the sum of the output of the addition element 216 and the output of the second first-order lag element 220 as the cut-off speed command value Vcom . The second first-order lag element 220 outputs a first-order lag component corresponding to the second time constant T 2 of the command value V com . The grinding rate calculation element 228 calculates the current grinding rate η k = V (k) av / F 0 . The third primary delay element 230 outputs a primary delay component corresponding to the third time constant T 3 of the current grinding rate η k . The first gain coefficient K 1 and the second gain coefficient K 2 are adaptively changed according to the output of the third primary delay element 230 so that the convergence speed of the deviation e to 0 is improved.
第１時定数Ｔ1、第２時定数Ｔ2および第３時定数Ｔ3のそれぞれは同一であっても異なっていてもよい。第１ゲイン係数Ｋ1および第２ゲイン係数Ｋ2に加えてまたは代えて第１時定数Ｔ1、第２時定数Ｔ2および第３時定数Ｔ3ののうち少なくとも１つが、偏差ｅの０への収束速度が向上するように適応的に変更されてもよい。 At first constant T 1, each of the second time constant T 2 and the third time constant T 3 may be the same or different. In addition to or instead of the first gain coefficient K 1 and the second gain coefficient K 2 , at least one of the first time constant T 1, the second time constant T 2, and the third time constant T 3 is 0 of the deviation e. It may be changed adaptively so as to improve the convergence speed.
１‥研削砥石、１２‥砥石台、２０‥制御装置、２１‥回転駆動機構、２２‥並進駆動機構、Ｓ‥研削圧センサ、Ｗ‥ワーク。
DESCRIPTION OF SYMBOLS 1 ... Grinding wheel, 12 ... Grinding wheel base, 20 ... Control device, 21 ... Rotation drive mechanism, 22 ... Translation drive mechanism, S ... Grinding pressure sensor, W ... Workpiece.
Claims (2)
前記研削砥石および前記被加工物の間で作用する力を研削圧として検知する研削圧センサを備え、
今回の研削圧の偏差ｅ（ｋ）を、以下の式（１）で算出し、
前回の研削圧の偏差ｅ（ｋ−１）を、以下の式（２）で算出し、
前記研削砥石および被加工物の相対的な並進速度をＶ com とした場合に、今回の並進速度Ｖ com （ｋ）を、以下の式（３）で算出して、算出したＶ com （ｋ）で前記研削砥石および被加工物を相対的に並進させるように前記並進駆動機構の動作を制御することで一定圧研削を行い、
砥石の切れ味である研削率η k を、以下の式（４）で算出し、
直前の研削サイクルの砥石の切れ味である研削率η k-1 を、以下の式（５）で算出し、
補正係数Ｃ（ｋ）を、以下の式（６）で算出し、サイクル毎、または、補正係数Ｃ（ｋ）がある閾値を超えた次の研削サイクルから、式（３）の各ゲインＫ １ およびＫ ２ の値を補正係数Ｃ（ｋ）に基づいて補正することを特徴とする研削装置。
ｅ（ｋ）＝Ｆ 0 −Ｆ meas （ｋ）・・・（１）
ｅ（ｋ−１）＝Ｆ 0 −Ｆ meas （ｋ−１）・・・（２）
Ｖ com (ｋ)＝Ｖ com (ｋ−１)＋Ｋ １ {ｅ(ｋ)−ｅ(ｋ−１)}＋Ｋ ２ ｅ(ｋ)・・・（３）
η k ＝Ｖ（ｋ） av ／Ｆ 0 ・・・（４）
η k-1 ＝Ｖ（ｋ−１） av ／Ｆ 0 ・・・（５）
Ｃ（ｋ）＝η k-1 ／η k ・・・（６）
但し、
Ｆ 0 は目標研削圧であり
Ｆ meas （ｋ）は今回研削圧であり
Ｆ meas （ｋ−１）は前回研削圧であり
Ｖ com （ｋ）は今回の並進速度であり
Ｖ com （ｋ−１）は前回の並進速度であり
Ｋ １ は第１のゲインであり
Ｋ ２ は第２のゲインであり
Ｖ（ｋ） av は今回の並進速度Ｖ com （ｋ）のある一定のサンプリング平均値であり
Ｖ（ｋ−１） av は前回の並進速度Ｖ com （ｋ−１）のある一定のサンプリング平均値である。 A grinding wheel, a rotation drive mechanism for rotating the grinding wheel about an axis, a translation drive mechanism for relatively translating the grinding wheel and the workpiece in a direction perpendicular to the axis of the grinding wheel, and the grinding A control device for controlling the respective operations of the rotation drive mechanism and the translation drive mechanism so as to grind the workpiece by an outer surface of a grindstone,
A grinding pressure sensor for detecting a force acting between the grinding wheel and the workpiece as a grinding pressure;
The current grinding pressure deviation e (k) is calculated by the following equation (1):
The previous grinding pressure deviation e (k−1) is calculated by the following equation (2):
When the relative translation speed of the grinding wheel and the workpiece is V com , the current translation speed V com (k) is calculated by the following equation (3), and the calculated V com (k) By performing the constant pressure grinding by controlling the operation of the translation drive mechanism so as to relatively translate the grinding wheel and the workpiece ,
The grinding rate η k that is the sharpness of the grindstone is calculated by the following formula (4),
The grinding rate η k-1 , which is the sharpness of the grinding wheel in the immediately preceding grinding cycle, is calculated by the following equation (5),
The correction coefficient C (k) is calculated by the following expression (6), and each gain K 1 of expression (3) is calculated for each cycle or from the next grinding cycle when the correction coefficient C (k) exceeds a certain threshold value. and grinding apparatus and correcting based on the value of K 2 in the correction coefficient C (k).
e (k) = F 0 −F meas (k) (1)
e (k−1) = F 0 −F meas (k−1) (2)
V com (k) = V com (k−1) + K 1 {e (k) −e (k−1)} + K 2 e (k) (3)
η k = V (k) av / F 0 (4)
η k-1 = V (k-1) av / F 0 (5)
C (k) = η k−1 / η k (6)
However,
F 0 is the target grinding pressure
F meas (k) is grinding pressure this time
F meas (k-1) is the previous grinding pressure
V com (k) is the current translation speed
V com (k-1) is the previous translation speed
K 1 is the first gain
K 2 is the second gain
V (k) av is a certain sampling average value of the current translation speed V com (k)
V (k−1) av is a certain sampling average value of the previous translation speed V com (k−1).
前記研削砥石および前記被加工物の間で作用する力を研削圧として検知する工程と、
今回の研削圧の偏差ｅ（ｋ）を、以下の式（７）で算出する工程と、
前回の研削圧の偏差ｅ（ｋ−１）を、以下の式（８）で算出する工程と、
前記研削砥石および被加工物の相対的な並進速度をＶ com とした場合に、今回の並進速度Ｖ com （ｋ）を、以下の式（９）で算出して、算出したＶ com （ｋ）で前記研削砥石および被加工物を相対的に並進させるように前記並進駆動機構の動作を制御することで一定圧研削を行う工程と、
砥石の切れ味である研削率η k を、以下の式（１０）で算出する工程と、
直前の研削サイクルの砥石の切れ味である研削率η k-1 を、以下の式（１１）で算出する工程と、
補正係数Ｃ（ｋ）を、以下の式（１２）で算出し、サイクル毎、または、補正係数Ｃ（ｋ）がある閾値を超えた次の研削サイクルから、式（９）の各ゲインＫ １ およびＫ ２ の値を補正係数Ｃ（ｋ）に基づいて補正する工程と、を含んでいることを特徴とする研削方法。
ｅ（ｋ）＝Ｆ 0 −Ｆ meas （ｋ）・・・（７）
ｅ（ｋ−１）＝Ｆ 0 −Ｆ meas （ｋ−１）・・・（８）
Ｖ com (ｋ)＝Ｖ com (ｋ−１)＋Ｋ １ {ｅ(ｋ)−ｅ(ｋ−１)}＋Ｋ ２ ｅ(ｋ)・・・（９）
η k ＝Ｖ（ｋ） av ／Ｆ 0 ・・・（１０）
η k-1 ＝Ｖ（ｋ−１） av ／Ｆ 0 ・・・（１１）
Ｃ（ｋ）＝η k-1 ／η k ・・・（１２）
但し、
Ｆ 0 は目標研削圧であり
Ｆ meas （ｋ）は今回研削圧であり
Ｆ meas （ｋ−１）は前回研削圧であり
Ｖ com （ｋ）は今回の並進速度であり
Ｖ com （ｋ−１）は前回の並進速度であり
Ｋ １ は第１のゲインであり
Ｋ ２ は第２のゲインであり
Ｖ（ｋ） av は今回の並進速度Ｖ com （ｋ）のある一定のサンプリング平均値であり
Ｖ（ｋ−１） av は前回の並進速度Ｖ com （ｋ−１）のある一定のサンプリング平均値である。 A grinding wheel, a rotation drive mechanism that rotates the grinding wheel around an axis, and a translation drive mechanism that translates the grinding wheel and the workpiece relatively in a direction perpendicular to the axis of the grinding wheel. A grinding method for grinding the workpiece by an outer surface of the grinding wheel by controlling each operation of the rotation drive mechanism and the translation drive mechanism using a grinding apparatus comprising:
Detecting a force acting between the grinding wheel and the workpiece as a grinding pressure;
A step of calculating the grinding pressure deviation e (k) by the following equation (7);
Calculating the deviation e (k−1) of the previous grinding pressure by the following equation (8);
When the relative translation speed of the grinding wheel and workpiece is V com , the current translation speed V com (k) is calculated by the following equation (9), and the calculated V com (k) A step of performing constant pressure grinding by controlling the operation of the translation drive mechanism so as to relatively translate the grinding wheel and the workpiece;
A step of calculating the grinding rate η k which is the sharpness of the grindstone by the following formula (10);
A step of calculating a grinding rate η k-1 that is the sharpness of the grinding wheel of the immediately preceding grinding cycle by the following equation (11):
The correction coefficient C (k) is calculated by the following expression (12), and each gain K 1 of expression (9) is calculated for each cycle or from the next grinding cycle when the correction coefficient C (k) exceeds a certain threshold. grinding method characterized in that it includes the the steps of correcting, based on and the value of K 2 correction factor C (k).
e (k) = F 0 −F meas (k) (7)
e (k−1) = F 0 −F meas (k−1) (8)
V com (k) = V com (k−1) + K 1 {e (k) −e (k−1)} + K 2 e (k) (9)
η k = V (k) av / F 0 (10)
η k-1 = V (k-1) av / F 0 (11)
C (k) = η k−1 / η k (12)
However,
F 0 is the target grinding pressure
F meas (k) is grinding pressure this time
F meas (k-1) is the previous grinding pressure
V com (k) is the current translation speed
V com (k-1) is the previous translation speed
K 1 is the first gain
K 2 is the second gain
V (k) av is a certain sampling average value of the current translation speed V com (k)
V (k−1) av is a certain sampling average value of the previous translation speed V com (k−1).
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