JP6579783B2 - Manufacturing method of bellows - Google Patents

Description

  The present invention relates to a method for manufacturing a bellows.

  In order to protect an expansion / contraction displacement part or bending displacement part of a machine or the like from disturbance factors such as liquid, dust, light rays, and moisture, a bellows-like cover is often used as an extendable cover for shielding them. For example, in a processing apparatus using a liquid such as a cutting apparatus, a bellows-like cover protects each shaft portion from scattering of liquid (see Patent Document 1).

  Rubber bellows (chlorosulfonated polyethylene, chloroprene rubber, nitrile butadiene rubber, urethane rubber, etc.) are used for bellows-like covers that prevent liquid leakage and require durability. For example, a rubber sheet (chloroprene rubber, nitrile butadiene rubber) is used so that air bubbles are not sandwiched between film sheets with creases (perforations) and cut holes formed on a sheet of nylon coated with rubber on both sides. , Urethane rubber, or the like) to form a laminated body that becomes a bellows (see Patent Document 2).

JP 2001-135593 A Japanese Patent Publication No. 4-55855

  By the way, the chemical | medical agent used with a processing apparatus, for example, oxirane, changes the quality of rubber materials (chlorosulfonated polyethylene rubber, chloroprene rubber, nitrile butadiene rubber, etc.). When the liquid containing oxirane adheres to the bellows-shaped cover formed from a rubber-based material for a long time, the rubber changes in quality and absorbs the liquid, and the absorbed liquid is squeezed out when the bellows expands and contracts. There was a problem of causing water leakage in the bellows.

  Then, this invention is made | formed in view of the above, Comprising: It aims at providing the manufacturing method of the bellows which can manufacture the bellows-like cover with strong tolerance with respect to a chemical | medical agent.

In order to solve the above-described problems and achieve the object, a method for manufacturing an accordion according to the present invention includes a base sheet made of a synthetic resin sheet and a sheet-shaped mold on which a crease is formed, and a laminated sheet. A preparatory step for forming a body, a temporary fixing step for temporarily fixing the base material and the mold of the laminated sheet body to each other, and a temporary fastening step, after which the laminated sheet body is Bending step of bending along a bellows shape having crests and troughs, and heating step of heating the laminated sheet body in a compressed state until the crests and troughs are in close contact with each other And a mold removing step for removing the mold from the laminated sheet body after the heating step, and the bellows- like shape is maintained by the base material alone. The fold line of the mold is a straight line It is formed in the hole or linear recesses in the preparation step, wherein the overlaying one sheet forming die to the base material.
In the bellows manufacturing method, the base material is preferably composed of a single layer of the synthetic resin sheet.
Further, in the bellows manufacturing method, after the step of removing the mold, the base material is coated with an acrylic resin adhesive on the surface, and a resin buffer cloth is bonded to the surface and laminated. preferable.

  In the bellows manufacturing method, the base material is preferably any of polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), and polyurethane (PU).

  In the bellows manufacturing method, the folding step includes folding a U-shaped bellows comprising a horizontal sheet portion and a pair of vertical portions bent substantially vertically downward from both ends of the horizontal sheet portion. It is preferable to be bent.

  In the bellows manufacturing method of the present invention, a bellows shape is formed on a base material made of a synthetic resin sheet using a sheet-shaped mold having creases formed, and the base material alone maintains the bellows shape. Thereby, since a bellows shape can be formed without using a rubber-type material, the bellows-like cover with strong tolerance with respect to a chemical | medical agent can be manufactured.

FIG. 1 is an exploded perspective view showing a configuration example of a processing apparatus. FIG. 2 is a flowchart showing a method of manufacturing the bellows. FIG. 3 is a top view illustrating a configuration example of the base material. FIG. 4 is a top view illustrating a configuration example of a sheet-shaped mold. FIG. 5 is a top view showing an example (part 1) of temporary fixing of a sheet-shaped mold and a base material. FIG. 6 is a top view showing an example (No. 2) of temporary fixing of the sheet-shaped mold and the base material. FIG. 7 is a perspective view showing a first bent example of the sheet-shaped mold and the base material. FIG. 8 is a perspective view showing a second bent example of the sheet-shaped mold and the base material. FIG. 9 is a perspective view showing an example of heating a sheet-shaped mold and a base material. FIG. 10 is a perspective view illustrating a configuration example of a sheet-shaped mold and a base material after heating. FIG. 11 is a perspective view showing the base material after separation. FIG. 12 is a perspective view showing the sheet-shaped mold after separation.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment
The processing apparatus according to the embodiment will be described. FIG. 1 is an exploded perspective view showing a configuration example of a processing apparatus. The processing apparatus 1 cuts a wafer (not shown). The processing apparatus 1 includes a chuck table 10, a processing unit 20, an index feeding unit 30, a cutting feed unit 40, a processing feeding unit 50, and a control unit (not shown).

  The wafer is a semiconductor wafer or an optical device wafer in which a semiconductor device is formed on a substrate such as silicon or gallium arsenide, or an optical device is formed on a substrate such as sapphire or SiC, an inorganic material substrate, a ductile resin material substrate, a ceramic substrate, Various processing materials such as glass plates.

  Here, the X-axis direction is a direction in which the wafer held on the chuck table 10 is processed and fed. The Y-axis direction is a direction in which the processing means 20 is indexed and fed to the wafer held on the chuck table 10 and orthogonal to the X-axis direction on the same horizontal plane. The Z-axis direction is a direction orthogonal to the X-axis direction and the Y-axis direction, which is a vertical direction in this embodiment.

  The chuck table 10 is disposed on the upper surface of the apparatus main body 2 so as to be movable in the X-axis direction. The chuck table 10 is formed in a disk shape and includes a holding surface 11. The chuck table 10 is rotated around a rotation axis orthogonal to the center of the holding surface 11 by a rotating means (not shown). The holding surface 11 is an upper end surface in the vertical direction of the chuck table 10 and is formed flat with respect to a horizontal plane. The holding surface 11 is made of, for example, porous ceramic and sucks and holds the wafer by a negative pressure of a vacuum suction source (not shown).

  The processing means 20 processes the wafer held on the chuck table 10. The processing means 20 is disposed in the apparatus main body 2 via the index feed means 30 and the cut feed means 40. The processing means 20 includes a cutting blade 21, a spindle 22, a housing 23, and a pair of processing water supply nozzles 24. The cutting blade 21 is a cutting grindstone formed in an extremely thin disk shape and in an annular shape. The spindle 22 is detachably mounted with a cutting blade 21 at its tip. The housing 23 has a drive source such as a motor (not shown), and supports the spindle 22 so as to be rotatable around a rotation axis in the Y-axis direction. The machining water supply nozzle 24 is disposed so as to sandwich the cutting blade 21 and supplies the machining water to the cutting blade 21. The processing means 20 rotates the spindle 22 at a high speed to cut the wafer with the cutting blade 21 and supplies processing water to the cutting blade 21 with the processing water supply nozzle 24.

  The index feeding means 30 is for moving the chuck table 10 and the processing means 20 relative to each other in the Y-axis direction. For example, the index feeding means 30 has a drive source such as a ball screw 31 and a pulse motor 32 extending in the Y-axis direction, and a Y-axis moving base 33 that supports the cutting feed means 40 is arranged in the Y-axis direction. Move.

  The cutting feed means 40 is for moving the machining means 20 in the Z-axis direction orthogonal to the holding surface 11 of the chuck table 10. For example, the cutting feed means 40 has a drive source such as a ball screw (not shown) or a pulse motor 41 that extends in the Z-axis direction, and moves a Z-axis moving member 42 that supports the machining means 20 in the Z-axis direction. Let

  The processing feed means 50 is for moving the chuck table 10 and the processing means 20 relative to each other in the X-axis direction. For example, the processing feed means 50 is fixed to a pair of guide rails 51 extending in the X-axis direction, a ball screw 52 disposed in parallel to the guide rail 51, and a nut (not shown) screwed to the ball screw 52. The X-axis moving base 53 slidably disposed on the guide rail 51 and a pulse motor 54 for rotating the ball screw 52 are provided. The processing feed means 50 moves the X-axis movement base 53 that supports the chuck table 10 in the X-axis direction by rotating the ball screw 52 by the pulse motor 54.

  Here, in order to prevent the processing water supplied when processing the wafer by the cutting blade 21 from adhering to the ball screw 52 or the like of the processing feeding means 50, the processing feeding means 50 includes a cover member 60 and a bellows mechanism. 70.

  The cover member 60 is a plate-like member, and is formed in a substantially square shape when viewed from the Z-axis direction. The cover member 60 is formed in a U shape when viewed from the X-axis direction, and is formed by bending the upper surface portion 61 and both end portions in the Y-axis direction downward in the Z-axis direction. 62. The cover member 60 is disposed between the X-axis moving base 53 that supports the chuck table 10 and the chuck table 10. The cover member 60 is formed so that the length in the width direction (Y-axis direction) is slightly longer than the length in the width direction (Y-axis direction) of the processing feed means 50.

  The bellows mechanism 70 is disposed so as to extend in the X-axis direction with the cover member 60 interposed. The bellows mechanism 70 includes a first bellows portion 71A and a second bellows portion 71B. The first bellows portion 71A is disposed on one side of the cover member 60, and the second bellows portion 71B is disposed on the other side of the cover member 60. Is arranged.

  The first bellows portion 71A includes two bellows members 710A and 710B. The bellows members 710A and 710B are made of a synthetic resin such as polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), polyurethane (PU), or the like. The bellows members 710A and 710B are formed in a U shape when viewed from the X-axis direction, and include a horizontal sheet portion 710a and a pair of vertical portions 710b. As for the horizontal sheet | seat part 710a, the peak part 710c and the trough part 710d are alternately formed in the expansion-contraction direction (X-axis direction) along the horizontal surface. The length of the horizontal sheet portion 710a in the width direction (Y axis direction) is substantially the same as the length of the cover member 60 in the width direction (Y axis direction). That is, the length in the width direction (Y-axis direction) of the horizontal sheet portion 710 a is formed slightly longer than the length in the width direction (Y-axis direction) of the processing feed means 50. The vertical portions 710b of the bellows members 710A and 710B are formed to be bent substantially vertically downward from both ends in the width direction (Y-axis direction) of the horizontal sheet portion 710a. The pair of vertical portions 710b are formed in a bellows shape, and crest portions 710e and trough portions 710f are alternately formed in the expansion / contraction direction. The bellows member 710A and the bellows member 710B are connected via a guide frame 711. The guide frame 711 is formed in the same U-shape as the bellows members 710A and 710B when viewed from the X-axis direction, and a roller 711a for improving slippage is provided at each lower end of the guide frame 711. It is attached. A frame (not shown) is attached to the end face in the X-axis direction of the bellows member 710B connected to the cover member 60, and the frame and the end face of the cover member 60 are fixed by screws (not shown).

  The second bellows portion 71B is configured similarly to the first bellows portion 71A. That is, the second bellows portion 71B is composed of two bellows members 710C and 710D. The bellows members 710C and 710D include a horizontal sheet portion 710a and a pair of vertical portions 710b. As for the horizontal sheet | seat part 710a, the peak part 710c and the trough part 710d are alternately formed in the expansion-contraction direction (X-axis direction) along the horizontal surface. The length of the horizontal sheet portion 710a in the width direction (Y axis direction) is substantially the same as the length of the cover member 60 in the width direction (Y axis direction). The vertical portions 710b of the bellows members 710C and 710D are formed to be bent substantially vertically downward from both ends in the width direction (Y-axis direction) of the horizontal sheet portion 710a. The pair of vertical portions 710b are formed in a bellows shape, and crest portions 710e and trough portions 710f are alternately formed in the expansion / contraction direction. The bellows member 710 </ b> C and the bellows member 710 </ b> D are connected via a guide frame 711. Each of the lower ends of the guide frame 711 is attached with a roller 711a for improving slipping. A frame 713 is attached to an end surface in the X-axis direction of the bellows member 710C connected to the cover member 60, and the frame 713 and the end surface of the cover member 60 are fixed by screws (not shown).

  As described above, the first bellows portion 71A and the second bellows portion 71B connected to the cover member 60 cover the processing feed means 30 in the X-axis direction. When the cover member 60 moves in the X-axis direction as the chuck table 10 moves, the first bellows portion 71A expands and the second bellows portion 71B contracts, or the first bellows portion 71A contracts. Thus, the second bellows portion 71B extends. In the moving range of the cover member 60, the first bellows portion 71A or the second bellows portion 71B does not extend completely, and the first bellows portion 71A or the second bellows portion 71B is completely contracted to cover the cover member. The movement of 60 is not hindered.

  On the lower side of the bellows mechanism 70, a drainage means 80 is provided for receiving and discharging the processing water flowing from the bellows mechanism 70 together with the processing waste. The drainage means 80 includes a drainage channel 81 and a drain pipe 82. The drainage channel 81 is formed in a substantially rectangular frame shape so as to surround the first bellows portion 71A and the second bellows portion 71B connected to the cover member 60, and a portion where the processing water flows is formed in a groove shape. .

  The drainage channel 81 includes a bottom plate 810 on which the vertical portion 710b of the bellows member 710 (710A to 710D) of the bellows mechanism 70 is positioned, an inner peripheral wall 811 erected on the inner peripheral side of the bottom plate 810, and the bottom portion 810. And an outer peripheral wall 812 erected on the outer peripheral side. The inner peripheral wall 811 is located inside the vertical portion 710 b of the bellows member 710, and the outer peripheral wall 812 is located outside the vertical portion 710 b of the bellows member 710. Thereby, the processing water flowing down from the vertical portion 710 b of the bellows member 710 can be received by the bottom plate 810, and the processing water received by the bottom plate 810 can flow toward the drain pipe 82.

  Fixing brackets 813 are attached to both ends of the inner peripheral wall 811 of the drainage channel 81 in the X-axis direction. The frame 712 attached to the end surface of the bellows member 710A of the first bellows portion 71A is fixed to one fixing bracket 813, and the end surface of the bellows member 710D of the second bellows portion 71B is fixed to the other fixing bracket 813. The frame 714 attached to is fixed. Thereby, the both ends in the X-axis direction of the bellows mechanism 70 are fixed.

  The drain pipe 82 is coupled to an opening (not shown) in which the bottom plate 810 of the drainage channel 81 is partially opened, and discharges the processing water accumulated in the drainage channel 81 to the outside. For example, the drainage channel 81 is disposed with a slight inclination, and a drain pipe 82 is disposed at the lowest position. Thereby, the processing water of the drainage channel 81 flows out toward the lowest drain pipe 82 and is discharged from the drain pipe 82 to the outside.

  The control means 80 controls each component of the processing apparatus 1. For example, the control unit 80 is connected to a driving circuit (not shown) that drives the pulse motors of the indexing feeding unit 30, the cutting feeding unit 40, and the machining feeding unit 50, and controls the driving circuit to position the chuck table 10 in the X-axis direction. Or the position of the processing means 20 in the Y-axis direction and the Z-axis direction is determined.

  Next, the manufacturing method of the bellows according to the embodiment will be described. FIG. 2 is a flowchart showing a method of manufacturing the bellows. FIG. 3 is a top view illustrating a configuration example of the base material. FIG. 4 is a top view illustrating a configuration example of a sheet-shaped mold. FIG. 5 is a top view showing an example (part 1) of temporary fixing of the sheet-shaped mold and the base material, and the mold is arranged on the upper surface side. FIG. 6 is a top view showing an example (part 2) of temporary fixing of the sheet-shaped mold and the base material, and the base material is arranged on the top surface side. FIG. 7 is a perspective view showing a first bent example of the sheet-shaped mold and the base material. FIG. 8 is a perspective view showing a second bent example of the sheet-shaped mold and the base material. FIG. 9 is a perspective view showing an example of heating a sheet-shaped mold and a base material. FIG. 10 is a perspective view illustrating a configuration example of a sheet-shaped mold and a base material after heating. FIG. 11 is a perspective view showing the base material after separation. FIG. 12 is a perspective view showing the sheet-shaped mold after separation.

  First, the operator superimposes the base material 90 and the sheet-like mold 100 on which the creases are formed to form a laminated sheet body 110 (step S1 shown in FIG. 2; preparation step). Here, the base material 90 and the mold 100 are synthetic resin sheets formed of polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), polyurethane (PU), or the like. The base material 90 has a thickness of about 20 μm to 300 μm, and the base material 90 has a hardness (Rockwell) of about R60 to 120.

  As shown in FIGS. 3 and 4, the base material 90 and the mold 100 are substantially the same size and are formed in a rectangular shape. The mold 100 is formed with a plurality of substantially straight folds 101 extending in the width direction and triangular holes 102. The fold line 101 is for forming the peak part 710c and the valley part 710d of the bellows member 710A. For example, the crease 101 is formed by alternately forming a crease 101 a for a peak and a crease 101 b for a trough at regular intervals in the expansion and contraction direction of the mold 100. The crease 101a for the mountain part and the crease 101b for the valley part are formed so as to be bendable by forming holes like perforations in a substantially straight line. In addition, you may form so that it can be bent by forming a linear recessed part in the surface or back surface of the shaping | molding die 100 not only in perforation.

  The triangular hole 102 is for forming the vertical portion 710b, and is provided with the mold 100 being opened. The triangular hole 102 is formed in an isosceles triangle, and the base 102a is formed on a line that bends both ends of the base material 90 in the width direction substantially perpendicularly, and is the same as the interval between the folds 101a for the adjacent peaks in the expansion / contraction direction. It is formed in length. Further, the apex 102b of the triangular hole 102 is formed on a fold line 101b for the valley portion on the vertical portion 710b side.

  The laminated mold body 110 is formed by superposing the molding die 100 configured in this manner on the base material 90. At this time, the mold 100 and the base material 90 are overlapped so that the base material 90 does not protrude from the mold 100. Next, the operator temporarily fixes and fixes the base material 90 of the laminated sheet body 110 and the mold 100 (step S2; temporary fixing step). For example, as shown in FIG. 5, first, in a state where the laminated sheet body 110 is placed so that the mold 100 is on the upper surface side, heat resistance is provided so as to cover the triangular holes 102 along the arrangement direction of the triangular holes 102. A tape 111 is applied. Thereby, the base material 90 exposed from the triangular hole 102 and the mold 100 can be partially bonded together by the heat-resistant tape 111. Next, as shown in FIG. 6, the heat-resistant tape 111 is attached to the four sides of the outer peripheral portion 112 of the laminated sheet body 110, and the outer peripheral portion of the base material 90 and the outer peripheral portion of the mold 100 are bonded together. FIG. 6 illustrates the laminated sheet body 110 in which the base material 90 is disposed on the upper surface side.

  Next, the operator bends the laminated sheet body 110 into a bellows shape (step S3; bending step). For example, as shown in FIG. 7, the operator folds the laminated sheet body 110 along the fold line 101 a for the ridges of the mold 100 and folds the laminated sheet body 110 along the fold line 101 b for the valley parts. The laminated sheet body 110 is folded into a bellows shape having a peak portion 91 and a valley portion 92.

  Further, as shown in FIG. 8, the worker folds the triangular hole 102 along the vertical bisector 102 d of the triangular hole 102 and folds the two equal sides 102 c into a mountain fold. As a result, the end portion 113 of the laminated sheet body 110 is bent substantially vertically in a bellows shape, and a pair of vertical portions 710b are formed at both ends of the horizontal sheet portion 710a.

  Next, the worker heats the laminated sheet body 110 on which the pair of vertical portions 710b and the horizontal sheet portion 710a are formed by a heating device (not shown) (step S4; heating step). For example, as shown in FIG. 9, the operator folds and contracts the laminated sheet body 110 in the expansion / contraction direction, compresses the laminated sheet body 110 until the peak portion 91 and the valley portion 92 are in close contact with each other, and the fastener 114. Thus, each of the vertical portions 710b and the horizontal sheet portion 710a are fixed. And an operator heats the lamination sheet body 110 with a heating apparatus in the state in which the lamination sheet body 110 was compressed. The heating device heats the laminated sheet body 110 with hot water, hot air, steam, or the like, for example. The temperature for heating the laminated sheet 110 is about 50 ° to 300 °, and the heating time is about 1 minute to 10 minutes. Preferably, the heating temperature is about 80 ° to 200 °, and the heating time is about 2 minutes to 5 minutes. For example, the heating temperature is set to about 130 °, and the heating time is set to about 3 minutes.

  Next, an operator removes the shaping | molding die 100 from the lamination sheet body 110 (step S5; shaping | molding die removal step). For example, the worker dissipates heat of the laminated sheet body 110 by natural cooling or the like. Then, the operator removes the fastener 114 from the cooled laminated sheet body 110, and extends the compressed laminated sheet body 110 as shown in FIG. The operator peels off the heat-resistant tape 111 from the laminated sheet body 110 and removes the mold 100 from the base material 90 as shown in FIGS. Since the base material 90 from which the mold 100 has been removed is heat-treated in a compressed state, the base material 90 alone maintains the bellows-like shape, and the bellows member 710 is formed.

  The used mold 100 may be reused by returning to a planar shape. For example, the mold 100 after use is pressed from both sides with a flat plate (not shown) and heat-treated to return to a flat shape. Alternatively, the molding die 100 formed in a bellows shape may be bent in the opposite direction to return to a planar shape.

  As described above, according to the method of manufacturing the bellows according to the embodiment, the base material 90 is formed in a bellows shape using the mold 100 in which the fold line 101 and the triangular hole 102 are formed, and the base material 90 alone is a bellows. Maintain the shape. The base material 90 is made of, for example, polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), polyurethane (PU), etc., and easily forms a bellows shape without using a rubber-based material. can do. Thereby, the bellows member 710 which is not deteriorated by the chemical | medical agent used with the processing apparatus 1, for example, oxirane, and has strong tolerance with respect to a chemical | medical agent can be manufactured. Further, since no rubber-based material is used, the weight can be reduced, and the burden on the bent portion of the bellows member 710 can be reduced. In addition, as in the past, there was no need for advanced skills such as applying adhesive to the entire surface of the sheet in the bonding process and preventing air bubbles from being mixed during bonding, reducing the time-consuming process. The process can be simplified and work efficiency can be improved.

  The bellows member 710 formed from the base material 90 is a U-shaped bellows comprising a horizontal sheet portion 710a and a pair of vertical portions 710b bent substantially vertically downward from both ends of the horizontal sheet portion 710a. Is bent. Even such a complicated bellows shape can be easily formed using the mold 100.

[Modification]
Next, a modification of the embodiment will be described. The surface of the bellows member 710 may be covered with a resin-based cushioning cloth. For example, after removing the molding die 100 from the base material 90 (after step S5), the operator applies an acrylic resin adhesive to the surface of the bellows-like base material 90, and the bellows-like base material 90 is applied. A resin-based cushioning cloth is bonded to the surface of and laminated. Thereby, the damage which the bellows member 710 receives by the end material scattered when processed by the processing means 20 can be reduced.

  In addition, a bellows-shaped water return film (not shown) that prevents splashing of processing water from the drainage channel 81 may be provided on the vertical portion 710 b of the bellows member 710. For example, after removing the forming die 100 from the base material 90 (after step S5), the operator vertically covers the drainage channel 81 from one end side to the other end side in the expansion / contraction direction of the bellows member 710. An accordion-shaped water return film protruding from the inside of the portion 710b is adhered and fixed.

  Moreover, although the compressed laminated sheet body 110 was fixed with the fastener 114, it is not limited to this. For example, the compressed laminated sheet 110 may be sandwiched and fixed by a pair of plate-like members and heated.

  Moreover, although the example which removes the fastener 114 from the lamination sheet body 110 after cooling was demonstrated, the timing which removes the fastener 114 will not be limited after cooling, if a bellows shape can be brazed to the base material 90. FIG.

  Moreover, although the operator manufactured the bellows member 710 from the base material 90 using the mold 100, it may be automatically manufactured using a bellows manufacturing apparatus (not shown). For example, the bellows manufacturing apparatus includes a superimposing unit that superimposes the base material 90 and the molding die 100 to form the laminated sheet body 110, and the base material 90 of the laminated sheet body 110 and the molding die 100 by the heat-resistant tape 111. Temporary fixing means for temporarily fixing and fixing, folding means for bending the laminated sheet body 110 into a bellows shape, heating means for heating the laminated sheet body 110 with hot water, hot air, steam, etc., and the mold 100 from the laminated sheet body 110 And removing means for removing.

  Moreover, although the bellows member 710 manufactured by the above-described bellows manufacturing method has been described with respect to the example in which the processing feeding unit 50 is protected from the processing water and processing waste generated when the wafer is cut, the present invention is not limited thereto. For example, the bellows member 710 may be used to protect a movable part and a shaft part of a processing apparatus such as a lathe or a milling machine from cutting fluid containing oil or cutting waste.

DESCRIPTION OF SYMBOLS 1 Processing apparatus 50 Processing feed means 60 Cover member 70 Bellows mechanism 71A 1st bellows part 71B 2nd bellows part 710 (710A-710D) Bellows member 710a Horizontal sheet | seat part 710b Vertical part 80 Drainage means 81 Drainage path 90 Base material 100 Mold 101 crease 101a crease for mountain part 101b crease for valley part 102 triangular hole 110 laminated sheet body 111 heat resistant tape 114 fastener

Claims (5)

A preparatory step of superposing a base material made of a synthetic resin sheet and a sheet-shaped mold on which a crease is formed, to form a laminated sheet body;
A temporary fixing step for temporarily fixing and fixing the base material and the mold of the laminated sheet body;
After performing the temporary fixing step, the folding sheet body is folded along the crease and bent into a bellows shape having crests and troughs;
A heating step of heating the laminated sheet body in a compressed state until the peak and the valley are in close contact with each other;
A mold removing step for removing the mold from the laminated sheet body after performing the heating step;
A manufacturing method of the bellows in which the base material alone maintains the bellows- like shape ,
The fold of the mold is formed in a linear hole or a linear recess,
In the preparation step, a method of manufacturing an accordion , wherein the mold is stacked on the base material .   2. The method of manufacturing a bellows according to claim 1, wherein the base material is composed of a single layer of the synthetic resin sheet.   2. The bellows according to claim 1, wherein after the mold removing step, the base material is coated with an acrylic resin-based adhesive on the surface, and a resin-based cushioning cloth is bonded to the surface and laminated. Manufacturing method. The base material is polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), any one of the claims 1 to 3, characterized in that either a polyurethane (PU) method of manufacturing a bellows as set forth in. In the bending step, the sheet is bent into a U-shaped bellows comprising a horizontal sheet part and a pair of vertical parts bent substantially vertically downward from both ends of the horizontal sheet part. The manufacturing method of a bellows as described in any one of Claims 1-4 .

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