JP6579911B2 - Log comparison method, log comparison program, and log comparison device - Google Patents

Description

  The present invention relates to a log comparison method, a log comparison program, and a log comparison apparatus that compare logs before and after software upgrades.

  Conventionally, in various devices that perform software processing using a computer, logs are output and saved so that, for example, the operation status of a process (a series of processes) and the cause of a software defect can be investigated. ing. For example, logs are also output and stored in semiconductor manufacturing apparatuses such as substrate processing apparatuses that perform processing under software control.

  Software may be upgraded to add functions or correct defects. When software upgrades are made, it is necessary to confirm the effect on the process results. For example, when a version upgrade is performed to correct a defect, if the new software (program) contains a new defect, the process cannot be executed correctly and the desired result cannot be obtained. . Therefore, confirmation of the effect on the process result due to the version upgrade (for example, confirmation of whether the software after the version upgrade contains a defect) may be performed based on the logs before and after the version upgrade. . In this regard, when a software upgrade is performed, processes other than the processes related to the upgrade should generally have the same behavior before and after the upgrade. In other words, except for information such as the date and time of execution, the logs before and after the version upgrade should generally match. Therefore, by comparing the logs before and after the upgrade, it is possible to confirm the influence on the process result resulting from the upgrade. Hereinafter, processing for comparing logs before and after software upgrade is referred to as “log comparison processing”.

  In relation to the present invention, Japanese Patent Application Laid-Open No. 2012-94046 discloses an invention of an apparatus failure analysis apparatus that analyzes an operation log of an apparatus and performs failure detection or failure cause analysis. In this equipment failure analysis apparatus, a normal pattern including pattern information indicating characteristics of a normal log is stored in advance, and a comparison between a permutation of events included in an operation log and a permutation of pattern information included in a normal pattern is performed. Done. Then, whether the processing is normal or abnormal is determined depending on whether or not the degree of coincidence of both exceeds a threshold value.

JP 2012-94046 A

  By the way, there are cases where parallel processing is included in processes executed by various apparatuses. In such a case, according to the conventional log comparison process, the influence on the process result due to the version upgrade may not be correctly grasped. For example, there may be a case where it is not correctly determined whether or not a defect is included in the upgraded software. This will be described below.

  Here, as a process including parallel processing, a process in which a plurality of processes (processes A to D) are performed in the flow illustrated in FIG. In this process, regarding the relationship between the processing C and the processing D, the processing C must be executed before the processing D. However, regarding the relationship between the processing B and “processing C, processing D”, The order is not particularly limited. That is, after execution of process A, the process may be executed in the order of “process B, process C, process D”, or the process may be executed in the order of “process C, process B, process D”. Then, the processes may be executed in the order of “Process C, Process D, Process B”. Therefore, regarding these processes, even if there is a change in the log output order before and after the upgrade, the software after the upgrade does not necessarily contain a defect.

Specific examples of the processes A to D in the flow shown in FIG. 19 include the following processes which are a part of a process executed in a cleaning apparatus (one of substrate processing apparatuses which are semiconductor manufacturing apparatuses). it can.
Process A: Close door (of process unit) Process B: Rotate substrate (drive motor)
Process C: Nozzle movement Process D: Discharge of cleaning liquid (from nozzle) In this example of the cleaning apparatus, for example, as shown in FIG. 20, the order of “substrate rotation” and “nozzle movement” is changed before and after the version upgrade. However, the software after the upgrade does not necessarily contain a defect.

  In the log comparison process, if the entire lines of the two lines are compared before and after the upgrade, even if the execution order of the processes (log output order) is the same, the time information of the two is usually different. Therefore, it is judged that “there is a difference between the two”. Therefore, regardless of the presence or absence of the parallel processing as described above, it is impossible to correctly determine whether or not the software after the upgrade contains a defect.

  Therefore, it is conceivable to compare the output order of only the contents of both the logs before and after the upgrade. However, when the log as shown in FIG. 20 is obtained by the software processing for executing the process of the example shown in FIG. 19, the output order of “substrate rotation” and “nozzle movement” is switched. Moreover, it is determined that “there is a difference between the two” although there is no problem with such a change in the output order. Therefore, it cannot be correctly determined whether or not the software after the upgrade contains a defect. In addition, when sorting the contents part and comparing only the contents part of both after sorting, when the log output order fluctuates due to a software defect after version upgrade, The failure cannot be detected.

  Incidentally, a Levenshtein distance calculation algorithm is known as an algorithm for calculating the degree of difference between two character strings. It is conceivable to apply this Levenshtein distance calculation algorithm to log comparison processing. At that time, it is conceivable to compare only the contents of both the logs before and after the upgrade.

  A procedure for log comparison processing using the Levenshtein distance calculation algorithm will be described with reference to FIGS. FIG. 21 is a flowchart showing an outline of the procedure of the log comparison processing, FIG. 22 is a flowchart showing the detailed procedure of step S91 in FIG. 21, and FIG. 23 shows the detailed procedure of step S92 in FIG. FIG. 24 is a flowchart showing a detailed procedure of step S93 in FIG.

  After the start of the log comparison process, array variables necessary for the process are first prepared (step S91 in FIG. 21). In addition to the array variables prepared in step S91, variables L1, L2, i, j, and c are used in this log comparison process. Regarding the preparation of the array variable, specifically (see FIG. 22 below), first, the number of log lines before the upgrade is substituted for L1 (step S911). Next, the number of log lines after the upgrade is substituted for L2 (step S912). Then, a two-dimensional array variable A [L1 + 1, L2 + 1] is prepared (step S913). For example, if the number of log lines before the upgrade is 200 and the number of log lines after the upgrade is 201, the array variable A [201, 202] is prepared.

  After the array variable is prepared, a value is initialized for the array variable (step S92 in FIG. 21). Specifically (hereinafter, refer to FIG. 23), first, 0 is substituted for i (step S921). Next, i (value of variable i) is substituted into A [i, 0] (step S922). Next, i + 1 is substituted for i (step S923). Thereafter, it is determined whether i is larger than L1 (step S924). As a result, if i is larger than L1, the process proceeds to step S925. On the other hand, if i is equal to or less than L1, the process returns to step S922. As described above, for example, if the number of log lines before the upgrade is 200, 0 to 200 are assigned to A [0, 0] to A [200, 0], respectively.

  In step S925, 0 is substituted for j. Next, j (value of variable j) is substituted into A [0, j] (step S926). Next, j + 1 is substituted for j (step S927). Thereafter, it is determined whether j is larger than L2 (step S928). As a result, if j is larger than L2, the initial setting process ends. On the other hand, if j is less than or equal to L2, the process returns to step S926. From the above, for example, if the number of log lines after the upgrade is 201, 0 to 201 are assigned to A [0, 0] to A [0, 201], respectively.

  After the initial setting is completed, the Levenshtein distance is calculated (step S93 in FIG. 21). Specifically (hereinafter, refer to FIG. 24), first, 1 is assigned to i (step S931). Next, 1 is assigned to j (step S932). Thereafter, it is determined whether or not the i-th line of the log before the upgrade and the j-th line of the log after the upgrade match (step S933). As a result, if they match, 0 is assigned to c (step S934a), and if they do not match, 1 is assigned to c (step S934b).

  After that, the minimum value of A [i−1, j] +1, A [i, j−1] +1, and A [i−1, j−1] + c is assigned to A [i, j]. (Step S935). By the processing in step S935, one of row insertion, row deletion, and row replacement is performed by comparing a certain row of the log before the upgrade and a certain row of the log after the upgrade. If so, 1 is added to the Levenshtein distance.

  After the completion of step S935, j + 1 is substituted for j (step S936). Thereafter, it is determined whether j is larger than L2 (step S937). As a result, if j is larger than L2, the process proceeds to step S938, and if j is equal to or less than L2, the process returns to step S933. In step S938, i + 1 is substituted for i. Thereafter, it is determined whether i is larger than L1 (step S939). As a result, if i is larger than L1, A [L1, L2] is set as the Levenshtein distance (step S940). On the other hand, if i is equal to or less than L1, the process returns to step S932.

  As described above, each row of the log before the upgrade and each row of the log after the upgrade are sequentially compared, and if the insertion, deletion, and replacement operations are performed for each log row, the upgrade is performed. The Levenshtein distance is the minimum value of the number of operations required to obtain the upgraded log from the previous log. If the Levenshtein distance is 0, it is determined that there is no difference between the logs before and after the upgrade, and if the Levenstein distance is 1 or more, it is determined that there is a difference between the logs before and after the upgrade. The

  When the log comparison process as described above using the Levenstein distance calculation algorithm is performed, in the case where the log shown in FIG. 20 is obtained, row replacement occurs twice, so the Levenstein distance is 2 It becomes. Therefore, it is determined that there is a difference between the logs before and after the version upgrade. Thus, even when the Levenshtein distance calculation algorithm is used, it is not possible to correctly determine whether or not the upgraded software includes a defect.

  Therefore, the present invention provides a log comparison method, a log comparison program, and a log comparison device that can correctly grasp the influence on the result of a process resulting from a version upgrade of software that executes a process including parallel processing. Objective.

A first invention is a log comparison method for comparing a first log and a second log including a plurality of lines in which time information and processing content information are described.
A matching step for performing a matching process based on the processing content between the plurality of lines included in the first log and the plurality of lines included in the second log;
Whether or not there is a difference between the row included in the first log and the row included in the second log, which are two rows for which a determination result indicating that they match is obtained by the matching process, look including a difference whether determination step of determining, based on whether the set tolerance,
In the matching step, it is determined whether each row included in the first log is a matched row or a deleted row, and whether each row included in the second log is a matched row or an inserted row. A determination is made,
Focusing on the rows included in the first log and the rows included in the second log, which are the two rows determined as matching rows in the matching step, in the difference presence / absence determining step,
If the output order of both matches, a final determination is made that there is no difference between the two,
If the output order of the two does not match and the time difference between the two is within a preset tolerance, a final determination is made that there is no difference between the two,
If the output order of the two does not match and the time difference between the two is not within a preset allowable range, a final determination is made that both are replacement rows .

According to a second invention, in the first invention,
The first log and the second log further include a line in which information on a start or end of a processing stage including one or a plurality of processes is described,
In the matching step, a matching process is performed between a plurality of lines included in the first log and a plurality of lines included in the second log based on the content of the process and the number of the process stage including the process. It is characterized by being.

The third invention is the first or second aspect of the invention,
The method further includes a comparison result display step of displaying the presence / absence of a difference between the first log and the second log based on the determination results obtained in the matching step and the difference presence / absence determination step.

According to a fourth invention, in the third invention,
In the comparison result display step, each row determined as a deleted row, an inserted row, and a replacement row in the matching step and the difference presence / absence determining step is displayed in an identifiable manner.

A fifth invention is the third or fourth invention, wherein
In the comparison result display step, a difference degree indicating a degree of difference between the first log and the second log is further displayed.

A sixth invention is a log comparison program for comparing a first log and a second log including a plurality of lines in which time information and processing content information are described,
A matching step for performing a matching process based on the processing content between the plurality of lines included in the first log and the plurality of lines included in the second log;
Whether or not there is a difference between the row included in the first log and the row included in the second log, which are two rows for which a determination result indicating that they match is obtained by the matching process, The CPU of the computer uses a memory to execute a difference presence / absence determination step for determining based on whether or not the set allowable range is satisfied ,
In the matching step, it is determined whether each row included in the first log is a matched row or a deleted row, and whether each row included in the second log is a matched row or an inserted row. A determination is made,
Focusing on the rows included in the first log and the rows included in the second log, which are the two rows determined as matching rows in the matching step, in the difference presence / absence determining step,
If the output order of both matches, a final determination is made that there is no difference between the two,
If the output order of the two does not match and the time difference between the two is within a preset tolerance, a final determination is made that there is no difference between the two,
If the output order of the two does not match and the time difference between the two is not within a preset allowable range, a final determination is made that both are replacement rows .

A seventh invention is the sixth invention, wherein
The first log and the second log further include a line in which information on a start or end of a processing stage including one or a plurality of processes is described,
In the matching step, a matching process is performed between a plurality of lines included in the first log and a plurality of lines included in the second log based on the content of the process and the number of the process stage including the process. It is characterized by being.

The eighth invention is the sixth or seventh invention, wherein
The method further includes a comparison result display step of displaying the presence / absence of a difference between the first log and the second log based on the determination results obtained in the matching step and the difference presence / absence determination step.

In a ninth aspect based on the eighth aspect ,
In the comparison result display step, each row determined as a deleted row, an inserted row, and a replacement row in the matching step and the difference presence / absence determining step is displayed in an identifiable manner.

In a tenth aspect based on the eighth or ninth aspect ,
In the comparison result display step, a difference degree indicating a degree of difference between the first log and the second log is further displayed.

An eleventh invention is a log comparison device that compares a first log and a second log including a plurality of lines in which time information and processing content information are described,
A matching processing unit that performs a matching process based on the content of processing between the plurality of rows included in the first log and the plurality of rows included in the second log;
Whether or not there is a difference between the row included in the first log and the row included in the second log, which are two rows for which a determination result indicating that they match is obtained by the matching process, A difference presence / absence determining unit that determines based on whether or not it is within a set allowable range ,
The matching processing unit determines whether each row included in the first log is a matched row or a deleted row, and whether each matched row or inserted row is included in each second row included in the second log. Determine if there is
Focusing on the lines included in the first log and the lines included in the second log, which are the two lines determined as the matching lines by the matching processing unit, the difference presence / absence determining unit,
If the output order of both matches, a final determination is made that there is no difference between the two.
If the output order of both does not match and the time difference between the two is within a preset allowable range, a final determination is made that there is no difference between the two,
If the output order of the two does not match and the time difference between the two is not within a preset allowable range, a final determination is made that both are replacement rows .

According to the first aspect of the present invention, when comparing the logs before and after software upgrade (the first log and the second log), first, matching processing based on only the processing contents of the time and the processing contents is performed. Is called. At this time, each line of the log before and after the upgrade can be classified into “deleted line”, “inserted line”, “replaced line”, and “no difference line”. Then, the final judgment as to whether or not there is a difference between the two rows (the first log row and the second log row) from which the determination result indicating that they match each other by the matching process is obtained It is performed based on whether or not it is within a preset allowable range (considering the output order and time difference between the two) . For this reason, if the change in the log output order before and after the upgrade is simply due to parallel processing, there is no difference in the log of the process that caused the change in the output order before and after the upgrade. (That is, a determination that there is no problem in processing). Even in a portion where parallel processing is performed, if the time difference between the logs before and after the upgrade is large, it is determined that there is a difference between before and after the upgrade. As described above, it is possible to correctly grasp the influence on the result of the process resulting from the version upgrade of the software that executes the process including the parallel processing.

  According to the second aspect of the present invention, it is possible to grasp the influence on the result of the process due to the software version upgrade while taking into consideration the relationship between the processing and the processing stage.

According to the third aspect , whether or not there is a difference between the first log and the second log is displayed in the comparison result display step. For this reason, it is possible to quickly grasp whether or not the upgrade has any influence on the process.

According to the fourth aspect , since the details of the comparison result are displayed, it is possible to grasp in more detail the influence of the upgrade on the process.

According to the fifth aspect , it is possible to grasp the degree of the influence that the version upgrade has on the process.

According to the sixth to tenth inventions, the log comparison program invention can achieve the same effects as the first to fifth inventions.

According to the eleventh aspect , the same effect as that of the first aspect can be achieved in the invention of the log comparison device.

It is a block diagram which shows schematic structure of the substrate processing apparatus which is a semiconductor manufacturing apparatus concerning one Embodiment of this invention. In the said embodiment, it is a figure for demonstrating the function of a main apparatus. In the said embodiment, it is a block diagram which shows the hardware constitutions of the main apparatus which functions as a log comparison apparatus. In the said embodiment, it is a figure which shows an example of the log written in the log file. It is a figure for demonstrating the notation of the specific process content in description of the said embodiment. In the said embodiment, it is a functional block diagram which shows the function structure of a log comparison apparatus. In the said embodiment, it is a flowchart which shows the schematic procedure of a log comparison process. In the said embodiment, it is a flowchart which shows the detailed procedure of a matching process. In the said embodiment, it is a figure for demonstrating the relationship between the line in which the information which shows the specific process content is described, and the line in which the information which shows the start / end of a step is described. In the said embodiment, it is a flowchart which shows the detailed procedure of a difference presence determination process. It is a figure for demonstrating the specific example (1st case) of the comparison in the said embodiment. It is a figure for demonstrating the specific example (2nd case) of the comparison in the said embodiment. It is a figure for demonstrating the specific example (3rd case) of the comparison in the said embodiment. It is a figure for demonstrating the specific example (4th case) of the comparison in the said embodiment. In the said embodiment, it is a figure for demonstrating the fluctuation | variation of the output order of the log regarding two processes which should be performed sequentially. In the said embodiment, it is a figure for demonstrating one structural example of a comparison result screen. In the said embodiment, it is a figure which shows an example of a comparison result screen when it is judged that there exists a difference between two logs as a result of performing a log comparison process. In the said embodiment, it is a figure which shows an example of a comparison result screen when it is judged that there is no difference between two logs as a result of performing a log comparison process. It is a figure which shows an example of the flow of the process containing parallel processing. It is a figure for demonstrating the case where there is no problem even if the order of processing changes before and after version upgrade. It is a flowchart which shows the outline of the procedure of the log comparison process using the calculation algorithm of Levenshtein distance in a prior art example. It is a flowchart which shows the detailed procedure of step S91 of FIG. It is a flowchart which shows the detailed procedure of step S92 of FIG. It is a flowchart which shows the detailed procedure of step S93 of FIG.

  Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

<1. Schematic configuration>
FIG. 1 is a block diagram showing a schematic configuration of a substrate processing apparatus 1 which is a semiconductor manufacturing apparatus according to an embodiment of the present invention. Specific examples of the substrate processing apparatus 1 include a cleaning apparatus, a heat treatment apparatus, and an exposure apparatus. As shown in FIG. 1, the substrate processing apparatus 1 includes a main apparatus 10, a plurality of control substrates 20, and a plurality of processing units 30. The plurality of control boards 20 and the plurality of processing units 30 correspond one-to-one. The main apparatus 10 controls the overall operation of the substrate processing apparatus 1. Specifically, the main apparatus 10 outputs various commands to each control board 20 so that desired processing is performed in each processing unit 30. Information indicating the process execution status in each processing unit is output as a log. In the present embodiment, the main apparatus 10 correctly grasps the influence on the result of the process resulting from the version upgrade (for example, the software after the version upgrade). In order to determine whether or not a defect is included in the log), a log comparison process for comparing the logs before and after the upgrade is performed. As described above, the main device 10 according to the present embodiment typically functions as the processing control device 102 that controls the operation of each processing unit 30 and also executes a log comparison process as shown in FIG. It also functions as the comparison device 104.

  Each control board 20 controls the operation of the corresponding processing unit 30 based on a command given from the main apparatus 10. Each processing unit 30 performs a predetermined process based on control by the corresponding control board 20. For example, it is assumed that the processing unit 30 includes a substrate rotation motor. In this case, for example, a pulse signal is given from the control board 20 to the processing unit 30, and a motor in the processing unit 30 is driven based on the pulse signal. When processing is performed in the processing unit 30 in this way, information indicating the execution status of the process in the processing unit 30 is output as a log as described above. In the present embodiment, the log is transmitted from the control board 20 to the main device 10 and stored in a storage unit (an auxiliary storage device 120 described later) in the main device 10. However, the log storage location is not particularly limited.

<2. Configuration of main unit>
FIG. 3 is a block diagram illustrating a hardware configuration of the main apparatus 10 (the main apparatus 10 in the substrate processing apparatus 1) that functions as the log comparison apparatus 104. The main device 10 includes a CPU 110, an auxiliary storage device 120, a display unit 130, an input unit 140, a memory 150, and a network interface unit 160. CPU110 performs various arithmetic processing etc. according to the provided command. The auxiliary storage device 120 stores various data. As for the log comparison process, a log file 122 and a log comparison program 124 are stored in the auxiliary storage device 120. For example, the display unit 130 displays various screens for the operator to perform work. The input unit 140 receives input from an operator using a mouse or a keyboard. The memory 150 temporarily stores data necessary for the arithmetic processing of the CPU 110. The network interface unit 160 functions so as to enable data communication between the main apparatus 10 and the control board 20 via the LAN 9 or the like.

  When an execution of log comparison processing is instructed by the operator in the main apparatus 10, the log comparison program 124 is read into the memory 150, and the CPU 110 executes the log comparison program 124 read into the memory 150. As a result, the main device 10 functions as the log comparison device 104, and the log comparison processing is executed. The log comparison program 124 is provided in a form recorded on a recording medium such as a CD-ROM, DVD-ROM, or flash memory, or downloaded via a network.

  Here, the log in the log file 122 will be described. FIG. 4 is a diagram illustrating an example of a log written in the log file 122. As shown in FIG. 4, each line of the log includes “time (time)” information and “content” information. The “content” information of each line is information indicating the start / end of a step (processing stage) or information indicating specific processing contents. For example, if attention is paid to the first line, it is understood that the step “step 1” is started at 18:00:00. One step includes one or a plurality of processes. For example, when attention is paid to the third line, it is understood that the process of “rotation of the substrate” was performed at 18:00:00 101. In the following description, for the convenience of explanation, the specific processing content is expressed as “processing A” or the like as indicated by reference numeral 61 in FIG.

<3. Functional configuration and operation overview of log comparison device>
As described above, the main device 10 functions as the log comparison device 104 when the CPU 110 of the main device 10 executes the log comparison program 124. FIG. 6 is a functional block diagram showing a functional configuration of the log comparison device 104. As shown in FIG. 6, the log comparison device 104 functionally includes a comparison unit 40 and a comparison result display unit 42. The comparison unit 40 includes a matching processing unit 402 and a difference presence / absence determination unit 404.

  The matching processing unit 402 in the comparison unit 40 reads the log file 122a before the upgrade and the log file 122b after the upgrade, and includes a plurality of lines included in the log file 122a before the upgrade and the log after the upgrade. Matching processing is performed between a plurality of lines included in the file 122b. Hereinafter, the log (a plurality of lines) in the log file 122a before the upgrade is referred to as a “first log”, and the log (a plurality of lines) in the log file 122b after the upgrade is referred to as a “second log”. . As a result of comparison, “match”, “insertion”, and “deletion” are performed for each row included in the first log and the second log by the matching process for the two logs before and after the upgrade (first log and second log). One of the determinations is made.

  The difference presence / absence discriminating unit 404 in the comparing unit 40 determines one time and the other time for the rows determined to be “match” by the matching process (the rows included in the first log and the rows included in the second log). Based on the difference (time difference), the presence or absence of a difference between the two is determined. At that time, the time of each row is converted into a relative time that is an elapsed time from the start time of the process (in the example shown in FIG. 4, the start time of step 1), and whether there is a difference based on the time difference with respect to the relative time. Is determined. The comparison result is changed from “match” to “no difference” for the line for which there is no difference in the difference presence / absence determination unit 404. The comparison result is changed from “match” to “replacement” for the line in which the difference presence / absence determination unit 404 determines that there is a difference.

  As a result of the processing in the comparison unit 40 (matching processing unit 402 and difference presence / absence determination unit 404), the comparison results for each row included in the first log and the second log are “insertion”, “deletion”, “replacement”, and One of “no difference”. The comparison result is output from the comparison unit 40 as result data 48.

  The comparison result display unit 42 displays the comparison result screen 50 on the display unit 130 (see FIG. 3) based on the result data 48. A detailed description of the comparison result screen 50 will be described later.

<4. Log comparison process>
Next, the procedure of the log comparison process in this embodiment will be described. FIG. 7 is a flowchart showing a schematic procedure of log comparison processing. After the start of the log comparison process, first, the matching process unit 402 performs a matching process on the two logs (first log and second log) before and after the upgrade (step S10). Next, a process (difference presence / absence determination process) for determining the presence / absence of a difference in the lines (both the first log and the second log) determined to be “match” in step S10 by the difference presence / absence determination unit 404 is performed. Performed (step S20). Thereafter, the comparison result display unit 42 displays the comparison result screen 50 on the display unit 130 (step S30).

  In the present embodiment, a matching step is realized by step S10, a difference presence / absence determination step is realized by step S20, and a comparison result display step is realized by step S30.

  FIG. 8 is a flowchart showing a detailed procedure of the matching process (step S10 in FIG. 7). After the start of the matching process, first, a line in which information indicating specific processing contents is described for the first log (in other words, a line other than a line in which information indicating the start / end of a step is described) The first line is set as the current line (step S100). Next, for the second log, the first line among the lines in which information indicating specific processing contents is written is set as the current line (step S110). The current line is a line to be processed during execution of the log comparison program 124. Further, for the sake of convenience, the flow of processing will be described below focusing on only the lines in which information indicating specific processing contents is described.

  After completion of step S110, the current line of the first log and the current line of the second log are compared, and it is determined whether or not both the contents and the step number match (step S120). As a result, if both match, the process proceeds to step S130. On the other hand, if at least one of the contents and the step number does not match, the process proceeds to step S140. By the way, as described above, the “content” information of each line of the log is information indicating the start / end of a step or information indicating a specific processing content. In other words, for example, as shown in FIG. 9, a line describing information indicating specific processing contents includes a line describing information indicating the start of the corresponding step and information indicating the end of the step. Included between the line being. Thereby, in step S120, it can be determined whether the step number is the same between the current line of the first log and the current line of the second log.

  In step S130, the comparison result for the current line in both the first log and the second log is set to “match”. Note that, as will be described later, the comparison result is changed to “no difference” or “replacement” in the difference presence / absence determination processing for the row in which the comparison result is set to “match” in step S130. After step S130 ends, the process proceeds to step S150.

  In step S140, for the second log, the next undecided row (a row for which no comparison result is set) is set as the current row. Thereafter, it is determined whether or not the comparison with the current row of the first log has been completed for all the rows of the second log (step S142). As a result, if the comparison is complete, the process proceeds to step S144. If the comparison is not complete, the process returns to step S120. The process proceeding to step S144 means that there is no line (log) corresponding to the current line of the first log in the second log. Accordingly, in step S144, the comparison result for the current line of the first log is set to “delete”. After step S144 ends, the process proceeds to step S150.

  In step S150, the next undecided row is set as the current row for the first log. Thereafter, it is determined whether or not the comparison of each row of the first log with each row of the second log is completed (step S160). As a result, if the comparison is complete, the process proceeds to step S170, and if the comparison is not complete, the process returns to step S110.

  In step S170, with respect to the second log, the comparison result for the row for which the comparison result has not been set in the processing of step S100 to step S160 described above is set to “insertion”. Thereby, the matching process ends.

  As a result of the matching process as described above, the comparison result is set to “match” for the lines of contents existing in both the first log and the second log (the lines of both the first log and the second log). The comparison result is set to “insertion” for a content line existing only in two logs (second log line), and the comparison result is set for a content line only present in the first log (first log line). Set to “Delete”. In the following, the line for which the comparison result is set to “match” is also referred to as “matched line”, the line for which the comparison result is set to “insert” is also referred to as “inserted line”, and the comparison result is “deleted”. The line set to is also referred to as “deleted line”.

  FIG. 10 is a flowchart showing a detailed procedure of the difference presence / absence determination process. After the start of the difference presence / absence determination process, first, the first line of the lines for which the comparison result is set to “match” is set as the current line for the first log (step S200). Next, for the second log, the first line among the lines whose comparison results are set to “match” is set as the current line (step S210). Thereafter, the current line of the first log and the current line of the second log are compared, and it is determined whether or not the contents match between them (step S220). As a result, if the contents match, the process proceeds to step S230. On the other hand, if the contents do not match, the process proceeds to step S260.

  In step S230, it is determined whether or not the output order for the current line of the first log matches the output order for the current line of the second log. This determination can be made, for example, by comparing the contents of the line immediately before the current line. If the output order matches as a result of the determination, the process proceeds to step S250. On the other hand, if the output order does not match, the process proceeds to step S240.

  In step S240, a difference (time difference) between the above-described relative time for the current line of the first log (elapsed time from the start time of the process) and the relative time for the current line of the second log is set in advance. A determination is made whether it is within range. As a result, if the time difference is within the allowable range, the process proceeds to step S250. On the other hand, if the time difference is not within the allowable range, the process proceeds to step S242. The allowable range is set to “10 ms”, for example.

  In step S242, the comparison result for the current row of both the first log and the second log is changed from “match” to “replace”. After step S242 ends, the process proceeds to step S270.

  In step S250, the comparison result for the current line in both the first log and the second log is changed from “match” to “no difference”. After step S250 ends, the process proceeds to step S270.

  In step S260, for the second log, the next line for which the comparison result is set to “match” is set as the current line. Thereafter, with respect to the row for which the comparison result is set to “match”, it is determined whether or not the comparison with the current row of the first log has been completed for all the rows of the second log (step S262). As a result, if the comparison is complete, the process proceeds to step S270, and if the comparison is not complete, the process returns to step S220.

  In step S270, for the first log, the next line for which the comparison result is set to “match” is set as the current line. Thereafter, with respect to the line for which the comparison result is set to “match”, it is determined whether or not the comparison of all the lines in the first log with the respective lines in the second log has been completed (step S280). As a result, if the comparison is completed, the difference presence / absence determination process is completed. On the other hand, if the comparison has not ended, the process returns to step S210.

  As a result of the above-described difference presence / absence determination processing, the following settings are made for the lines of contents existing in both the first log and the second log (both the first log and the second log). The comparison result is set to “no difference” for a row whose time difference is within an allowable range. For rows whose time difference is outside the allowable range, the comparison result is set to “replace”. Hereinafter, a line for which the comparison result is set to “no difference” is also referred to as a “no difference line”, and a line for which the comparison result is set to “replacement” is also referred to as a “replacement line”.

<5. Specific example of comparison>
Here, a specific example of log comparison before and after version upgrade by the above-described log comparison process will be described. In the following cases, it is assumed that the processing flows of the processes A to D are those shown in FIG. 19 unless otherwise specified. Further, it is assumed that the allowable range described above is set to 10 ms.

<5.1 First Case>
A case where logs before and after version upgrade as shown in FIG. 11 are obtained is defined as a first case. As shown in FIG. 11, in this case, the output order of processing B and processing C is switched before and after the version upgrade. However, the change in the output order here is simply due to the processing B and the processing C being executed in parallel (see FIG. 19). That is, this case is a case in which it is determined that there is no difference between the first log (log before the upgrade) and the second log (log after the upgrade) (here, the step) Focus only on logs related to processing included in 1).

  The first log includes logs of four processes of process A, process B, process C, and process D as the process logs included in step 1. The second log includes four processing logs of processing A, processing C, processing B, and processing D as processing logs included in step 1. The four processing logs included in the first log and the four processing logs included in the second log have a one-to-one correspondence. Therefore, first, with respect to both the first log and the second log, all the rows from the second row to the fifth row (row numbers from 2 to 5) are matched by the matching process (see FIG. 8). The comparison result is set to “match”.

  Next, in the difference presence / absence determination process (see FIG. 10), a process of setting the comparison result to “no difference” or “replacement” is performed for each log (row) of the processes A to D. Here, a description will be given focusing on logs of process B and process C whose output order is switched. When the log (line) of the process B of the first log and the log (line) of the process B of the second log are compared, it is determined in step S220 in FIG. 10 that “the contents match”. In step S230 of FIG. 10, it is determined that “the output order does not match”. Accordingly, the process proceeds to step S240. The same applies when the log (line) of the process C of the first log and the log (line) of the process C of the second log are compared. Here, paying attention to the log of process B, the time difference between the first log and the second log is 1 ms. This time difference is within an acceptable range. Therefore, the comparison result for the third line of the first log and the comparison result for the fourth line of the second log are set to “no difference” (changed from “match” to “no difference”). When attention is paid to the log of process C, the time difference between the first log and the second log is 0 ms. This time difference is within an acceptable range. Therefore, the comparison result for the fourth line of the first log and the comparison result for the third line of the second log are set to “no difference” (changed from “match” to “no difference”). The comparison results for the logs of process A and process D, that is, the comparison results for the second line of the first log, the comparison results for the second line of the second log, and the comparison for the fifth line of the first log The result and the comparison result for the fifth line of the second log are also set to “no difference” (changed from “match” to “no difference”).

  As described above, a comparison result that “there is no difference between the log before the upgrade and the log after the upgrade” is obtained. That is, a desired result is obtained as a result of the log comparison process.

<5.2 Second Case>
A case in which logs before and after the upgrade as shown in FIG. 12 are obtained is a second case. As shown in FIG. 12, in this case, the process B is executed after the process A before the version upgrade, but the process B is executed after the process D after the version upgrade. Further, the difference (time difference) between the process B time before version upgrade and the process B time after version upgrade exceeds the allowable range (10 ms). In other words, this case is a case in which it is determined that there is a difference between the first log (log before upgrade) and the second log (log after upgrade).

  In this case, first, as in the first case, the comparison process for all the rows from the second row to the fifth row is performed for both the first log and the second log by the matching process (see FIG. 8). Is set to “match”.

  Next, a process of setting the comparison result to “no difference” or “replacement” is performed for each log of the processes A to D by the difference presence / absence determination process (see FIG. 10). Here, a description will be given focusing on the log of process B. When the log (line) of the process B of the first log and the log (line) of the process B of the second log are compared, it is determined in step S220 in FIG. 10 that “the contents match”. In step S230 of FIG. 10, it is determined that “the output order does not match”. Accordingly, the process proceeds to step S240. Here, focusing on the log of process B, the time difference between the first log and the second log is 244 ms. This time difference is outside the allowable range. Accordingly, the comparison result for the third line of the first log and the comparison result for the fifth line of the second log are set to “replacement” (changed from “match” to “replacement”).

  As described above, a comparison result that “there is a difference between the log before the upgrade and the log after the upgrade” is obtained. That is, a desired result is obtained as a result of the log comparison process.

<5.3 Third Case>
A case where logs before and after the version upgrade as shown in FIG. 13 are obtained is defined as a third case. Here, attention is focused on the third to fifth lines of the log before and after the version upgrade. As shown in FIG. 13, the output order of process B and process C is switched between before and after the version upgrade. However, the change in the output order here is simply due to the processing B and the processing C being executed in parallel (see FIG. 19). Further, as shown in FIG. 13, the log of process X exists only in the first log (log before upgrade), and the log of process Y exists only in the second log (log after upgrade). As described above, this case is a case in which it is determined that there is a difference between the first log (log before upgrade) and the second log (log after upgrade). However, for the log (line) of process B and the log (line) of process C, a comparison result of “no difference” should be obtained.

  In this case, as for the log (row) of the process B and the log (row) of the process C, the comparison result is set to “match” by the matching process (see FIG. 8) as in the first case. For the log (line) of the process X of the first log, determination that “matches” with any log (line) of the second log is not performed in step S120 of the matching process. Therefore, the comparison result is set to “delete” for the log (row) of the process X of the first log. For the log (line) of the process Y of the second log, determination that “matches” with any log (line) of the first log is not performed in step S120 of the matching process. Accordingly, the comparison result is set to “insertion” for the log (row) of the processing Y of the second log.

  In the difference presence / absence determination process (see FIG. 10), the comparison result is set to “no difference” for both the log (row) of process B and the log (line) of process C, as in the first case. (Changed from "match" to "no difference")

  As described above, a comparison result that “there is a difference between the log before the upgrade and the log after the upgrade” is obtained. However, for the log (line) of process B and the log (line) of process C, a comparison result of “no difference” is obtained. As described above, a desired result is obtained as a result of the log comparison process.

<5.4 Fourth Case>
A case where logs before and after the version upgrade as shown in FIG. 14 are obtained is a fourth case. Here, attention is focused on logs of process B, process C, and process D. As shown in FIG. 14, the output order of process B and process C is switched before and after the version upgrade. However, the change in the output order here is simply due to the processing B and the processing C being executed in parallel (see FIG. 19). As shown in FIG. 14, the process D is included in step 2 before the version upgrade, but the process D is included in step 1 after the version upgrade. In the present embodiment, the configuration of the process (one or more) included in each step should be the same before and after the version upgrade. Therefore, this case is a case where it is determined that there is a difference between the first log (log before upgrade) and the second log (log after upgrade). However, for the log (line) of process B and the log (line) of process C, a comparison result of “no difference” should be obtained.

  In this case, as for the log (row) of the process B and the log (row) of the process C, the comparison result is set to “match” by the matching process (see FIG. 8) as in the first case. For the log (line) of the process D of the first log, it is determined in step S120 of the matching process that “both contents and step number match” in any log (line) of the second log. I will not. This is because the log (line) of process D exists in the second log, but the process D of the first log is included in step 2 while the process D of the first log is included in step 1. Because it is. Therefore, the comparison result is set to “deleted” for the log (row) of the process D of the first log. Regarding the log (line) of the process D of the second log, in step S120 of the matching process, the determination that “both the contents and the step number match” is made for any log (line) of the first log. I will not. This is because the log (row) of process D exists in the first log, but the process D of the second log is included in step 1 while the process D of the second log is included in step 2. Because it is. Therefore, the comparison result is set to “insertion” for the log (row) of the processing D of the second log.

  In the difference presence / absence determination process (see FIG. 10), the comparison result is set to “no difference” for both the log (row) of process B and the log (line) of process C, as in the first case. (Changed from "match" to "no difference")

  As described above, a comparison result that “there is a difference between the log before the upgrade and the log after the upgrade” is obtained. However, for the log (line) of process B and the log (line) of process C, a comparison result of “no difference” is obtained. As described above, a desired result is obtained as a result of the log comparison process.

<5.5 Remarks>
By the way, there may be a case where the log output order relating to two processes to be executed sequentially (here, focusing on process C and process D) varies before and after the version upgrade as shown in FIG. In such a case, it is preferable that a comparison result “difference” is obtained by the log comparison process. However, according to the present embodiment, in the case shown in FIG. 15, the time difference between the first log and the second log is within an allowable range for both the log (line) of process C and the log (line) of process D. Therefore, a comparison result of “no difference” is obtained. That is, it cannot be understood that the upgrade affects the execution order of the process C and the process D. However, regarding such a case, it is possible to grasp that there is a change in the execution order (log output order) of the processes C and D before and after the version upgrade by the conventional log comparison process. In other words, by using the log comparison processing according to the present embodiment and the conventional log comparison processing together, the version for the process including the parallel processing is correctly grasped while correctly grasping the influence caused by the version upgrade for the processing to be executed sequentially. It is possible to correctly grasp the influence caused by the up.

<6. Display of comparison results>
Next, display of the comparison result will be described. As described above, when the matching process and the difference presence / absence determination process are completed, the comparison result screen 50 is displayed on the display unit 130 (step S30 in FIG. 7). FIG. 16 is a diagram for explaining a configuration example of the comparison result screen 50. As shown in FIG. 16, the comparison result screen 50 includes a difference presence / absence display area 51 for displaying the presence / absence of a difference between two compared logs (first log and second log), and the degree of difference. A difference level display area 52 for displaying a difference level indicating a log file name, a pre-upgrade log file name display area 53a for displaying a first log file name, and a post-upgrade log file name display for displaying a second log file name An area 53b, a detail display area 54 for displaying details of the comparison result, and a log browsing button 55 for instructing display of the contents (log) of the selected file are included. The detail display area 54 includes a step number display area 541 for displaying a step number, a category display area 542 for displaying a category, a process content display area 543 for displaying specific process contents, and a file corresponding to the corresponding line. A file name display area 544 for displaying names and a line number display area 545 for displaying line numbers are included. In the difference display area 52, the total of the number of deleted lines of the first log, the number of inserted lines of the second log, and the number of replacement lines of the second log is displayed as the difference.

  In the category display area 542, any one of “OK”, “insufficient”, “excessive”, and “moving” is displayed. However, these expressions are not particularly limited. “OK” means that all the rows in which the log regarding the process (s) included in the corresponding step is written are “no difference rows”. “Insufficient” means that the corresponding line in the corresponding log file is a “deleted line”. “Excessive” means that the corresponding line in the corresponding log file is an “inserted line”. “Move” means that the corresponding line in the corresponding log file is a “replacement line”. Hereinafter, specific display examples will be described.

  FIG. 17 is a diagram illustrating an example of the comparison result screen 50 when it is determined that there is a difference between two logs (logs before and after version upgrade) as a result of the log comparison process. In the difference presence / absence display area 51, “Yes” is displayed, and the difference degree is “21”. Thereby, it can be grasped that there is a difference between the two logs. Further, from the display contents of the detailed display area 54, which line in the log file before the upgrade is a deleted line, which line in the log file after the upgrade is an inserted line, and version It is possible to grasp which line in the log file after upload is a replacement line. For example, paying attention to the line denoted by reference numeral 62 in FIG. 17, it is understood that a log related to the process “process F” is inserted in the 138th line of the log file after the upgrade (log 2.log).

  When the comparison result screen 50 as shown in FIG. 17 is displayed, the log viewing button in a state where any line other than the line in which the file name display area 544 of the detail display area 54 is blank is selected. When 55 is pressed, the log written in the file having the file name displayed in the file name display area 544 of the selected line is displayed. In this way, the contents (log) of the file before and after the upgrade can be confirmed.

  FIG. 18 is a diagram illustrating an example of the comparison result screen 50 when it is determined that there is no difference between two logs (logs before and after version upgrade) as a result of the log comparison process. “None” is displayed in the difference presence / absence display area 51, and the degree of difference is “0”. Thereby, it can be understood that there is no difference between the two logs. Since there is no difference between the two logs, the category is “OK” for all steps.

<7. Effect>
According to the present embodiment, when comparing the logs before and after software upgrade (first log and second log), first, matching processing based on only the processing contents of the time and the processing contents is performed. Then, the final judgment as to whether or not there is a difference between the two rows (the first log row and the second log row) from which the determination result indicating that they match each other by the matching process is obtained It is performed based on whether or not it is within a preset allowable range. For this reason, if the change in the log output order before and after the upgrade is simply due to parallel processing, there is no difference in the log of the process that caused the change in the output order before and after the upgrade. (That is, a determination that there is no problem in processing). Even in a portion where parallel processing is performed, if the time difference between the logs before and after the upgrade is large, it is determined that there is a difference between before and after the upgrade. As described above, according to the present embodiment, it is possible to correctly grasp the influence on the result of the process resulting from the version upgrade of the software executing the process including the parallel processing.

  Further, according to the present embodiment, the comparison result screen 50 that displays the degree of difference indicating the presence / absence of the difference between the logs before and after the upgrade and the magnitude of the difference is displayed on the display unit 130. For this reason, it is possible to quickly grasp whether or not the upgrade has any influence on the process. Further, since the comparison result screen 50 is provided with a detail display area 54 for displaying details of the comparison result, it is possible to grasp in detail the influence of the upgrade on the process.

<8. Other>
In the above embodiment, an example in which the present invention is applied to comparison of logs before and after software upgrade in the substrate processing apparatus has been described. However, the present invention is not limited to this. The present invention can also be applied to a comparison of logs before and after software upgrade in various apparatuses (various systems) that perform processing using a computer.

DESCRIPTION OF SYMBOLS 1 ... Substrate processing apparatus 10 ... Main apparatus 20 ... Control board 30 ... Processing unit 40 ... Comparison part 42 ... Comparison result display part 50 ... Comparison result screen 102 ... Processing control apparatus 104 ... Log comparison apparatus 122 ... Log file 124 ... Log comparison Program 402 ... matching processing unit 404 ... difference presence / absence determination unit

Claims (11)

A log comparison method for comparing a first log and a second log including a plurality of lines in which time information and processing content information are described,
A matching step for performing a matching process based on the processing content between the plurality of lines included in the first log and the plurality of lines included in the second log;
Whether or not there is a difference between the row included in the first log and the row included in the second log, which are two rows for which a determination result indicating that they match is obtained by the matching process, look including a difference whether determination step of determining, based on whether the set tolerance,
In the matching step, it is determined whether each row included in the first log is a matched row or a deleted row, and whether each row included in the second log is a matched row or an inserted row. A determination is made,
Focusing on the rows included in the first log and the rows included in the second log, which are the two rows determined as matching rows in the matching step, in the difference presence / absence determining step,
If the output order of both matches, a final determination is made that there is no difference between the two,
If the output order of the two does not match and the time difference between the two is within a preset tolerance, a final determination is made that there is no difference between the two,
Both output order of the do not match, and, if not within tolerance difference between the time set in advance, characterized in that both final determination that a substituted line is performed on a log Comparison method. The first log and the second log further include a line in which information on a start or end of a processing stage including one or a plurality of processes is described,
In the matching step, a matching process is performed between a plurality of lines included in the first log and a plurality of lines included in the second log based on the content of the process and the number of the process stage including the process. The log comparison method according to claim 1, wherein: The method further comprises a comparison result display step of displaying the presence / absence of a difference between the first log and the second log based on the determination results obtained in the matching step and the difference presence / absence determination step. log comparing method according to 1 or 2. In the comparison result display step, wherein the matching step and delete rows in the difference whether determination step, each line is determined insert row, and substituted line as is characterized in that it is identifiably display, according to claim 3 Log comparison method. In the comparison result displaying step, the difference degree indicating the degree of difference between the first log and the second log, characterized in that it is further displayed, log comparing method according to claim 3 or 4. A log comparison program for comparing a first log and a second log including a plurality of lines in which time information and processing content information are described,
A matching step for performing a matching process based on the processing content between the plurality of lines included in the first log and the plurality of lines included in the second log;
Whether or not there is a difference between the row included in the first log and the row included in the second log, which are two rows for which a determination result indicating that they match is obtained by the matching process, The CPU of the computer uses a memory to execute a difference presence / absence determination step for determining based on whether or not the set allowable range is satisfied ,
In the matching step, it is determined whether each row included in the first log is a matched row or a deleted row, and whether each row included in the second log is a matched row or an inserted row. A determination is made,
Focusing on the rows included in the first log and the rows included in the second log, which are the two rows determined as matching rows in the matching step, in the difference presence / absence determining step,
If the output order of both matches, a final determination is made that there is no difference between the two,
If the output order of the two does not match and the time difference between the two is within a preset tolerance, a final determination is made that there is no difference between the two,
If the output order of the two does not match and the time difference between the two is not within a preset allowable range, a final determination is made that both are replacement rows. Comparison program. The first log and the second log further include a line in which information on a start or end of a processing stage including one or a plurality of processes is described,
In the matching step, a matching process is performed between a plurality of lines included in the first log and a plurality of lines included in the second log based on the content of the process and the number of the process stage including the process. The log comparison program according to claim 6 , wherein The method further comprises a comparison result display step of displaying the presence / absence of a difference between the first log and the second log based on the determination results obtained in the matching step and the difference presence / absence determination step. The log comparison program according to 6 or 7 . In the comparison result display step, wherein said matching step and delete rows in the difference whether determination step, each row that is determined insert row, and substituted row to be distinguishably displayed, according to claim 8 Log comparison program. The comparison in the result display step, the difference degree indicating the degree of difference between the first log and the second log, characterized in that it is further displayed, log comparing program according to claim 8 or 9. A log comparison device that compares a first log and a second log including a plurality of lines in which time information and processing content information are described,
A matching processing unit that performs a matching process based on the content of processing between the plurality of rows included in the first log and the plurality of rows included in the second log;
Whether or not there is a difference between the row included in the first log and the row included in the second log, which are two rows for which a determination result indicating that they match is obtained by the matching process, A difference presence / absence determining unit that determines based on whether or not it is within a set allowable range ,
The matching processing unit determines whether each row included in the first log is a matched row or a deleted row, and whether each matched row or inserted row is included in each second row included in the second log. Determine if there is
Focusing on the lines included in the first log and the lines included in the second log, which are the two lines determined as the matching lines by the matching processing unit, the difference presence / absence determining unit,
If the output order of both matches, a final determination is made that there is no difference between the two.
If the output order of both does not match and the time difference between the two is within a preset allowable range, a final determination is made that there is no difference between the two,
Log comparison, characterized in that if the output order of the two does not match and the time difference between the two is not within a preset allowable range, a final determination is made that both are replacement rows apparatus.

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