JP6587137B2 - Environmental observation apparatus, exhaust apparatus for environmental observation apparatus, and exhaust method for environmental observation apparatus - Google Patents

Description

  The present invention observes the state of a sample, which is an object to be observed under an atmospheric condition using a low-temperature to high-temperature gas such as −50 ° C. to + 220 ° C. and a high-temperature gas (observation with the naked eye, photography, and video shooting). The present invention relates to an environment observation apparatus (including measurement, measurement, etc.), an exhaust apparatus for the environment observation apparatus, and an exhaust method for the environment observation apparatus.

As a conventional technique, the ultra-high-speed temperature environment tester of Non-Patent Document 1 (hereinafter also referred to as “the device of Non-Patent Document 1”) is known.
The apparatus of Non-Patent Document 1 precisely controls the temperature environment such as a semiconductor / electronic device, DUT (Device Under Test) temperature environment that is rapidly changed by applying a low temperature gas and a high temperature gas of up to 20 SCFM. It is.
Its performance is controlled in the temperature range of low and high temperature gas from -80 ° C to + 225 ° C, the flow rate is up to 20SCFM (566? / Minue), + 125 ° C => -55 ° C Temperature change 10 seconds or less, -55 ° C => + 125 ° C. Temperature change 10 seconds or less, ± 0.5 ° C. temperature stability.

FIG. 8 is an external view of the apparatus of Non-Patent Document 1.
The apparatus of Non-Patent Document 1 includes an apparatus main body 100 having a low-temperature gas supply unit and a high-temperature gas supply unit, a gas supply pipe 101 for supplying the low-temperature gas and the high-temperature gas, and a tip of the gas supply pipe 101. The cover 102 is provided with a lower portion in the open form and a transparent side wall, and a sample stage 103 provided on the upper portion of the apparatus main body 100.
The sample 104 is set on the sample stage, the cover 102 is placed on the sample stage 103 in a non-contact manner to form an observation chamber, and a low temperature gas and a high temperature gas are blown onto the sample 104 from directly above to perform an environmental test (mainly Conducting current tests of electronic devices such as IC chips).

http://www.hugle.co.jp/products/new-item/cat244/post-12.html, Ultra-high temperature environment tester (Thermojet), Hugle Electronics Co., Ltd.

  In the apparatus of Non-Patent Document 1 described above, exhaust gas composed of low-temperature gas and high-temperature gas discharged to the outside of the observation room is released indoors through a gap formed between the cover and the sample stage.

  Further, since the sample stage is not transparent, the deformation behavior of the sample cannot be observed from below.

Further, 100% of the low-temperature gas and the high-temperature gas in the observation are taken out from a non-patent document 1 apparatus (for example, displacement of 0.4 m <3> / min), an establishment having a suction amount larger than the exhaust amount of the low-temperature gas and high-temperature gas. In the case of exhausting outdoors by using an existing exhaust system (for example, ventilation equipment having a displacement of 32.5 m / min), there are the following problems.
(1) When the exhaust gas is -80 ° C., there is a problem that the indoor temperature is lowered.
When the exhaust gas is + 225 ° C., there is a problem that the indoor temperature is raised.
(2) When exhaust gas is exhausted by connecting an exhaust pipe from an observation device to an existing exhaust system such as a business office, the following problems occur.
A) When the exhaust gas was −80 ° C., the exhaust pipe and the existing exhaust system continued to be cooled, and a large amount of dew condensation occurred on the outer surface. Moreover, the problem of lowering indoor temperature arises.
B) When the exhaust gas is + 225 ° C., the exhaust pipe and the existing exhaust system continue to be heated, and when the existing exhaust system has a synthetic resin member, the synthetic resin member is deteriorated by heating. It was necessary to make it heat resistant, and there was a risk of burns if people touched the exhaust pipe and the existing exhaust system. Moreover, the problem of raising indoor temperature arises.
C) In order to solve the problems a) and b), the exhaust pipe and the existing exhaust system must be heat resistant, and the structure must be covered with a heat insulating material to prevent both condensation and heat dissipation. Met.
(3) In addition, when connected to existing ventilation equipment such as a business establishment with a significantly larger suction volume than the low / high temperature gas displacement of the device of Non-Patent Document 1, the sample chamber and the low / high temperature gas supply section If the pressure is extremely negative and the outside air enters the sample body and enters the sample chamber and is a low gas of 0 ° C or less, the moisture in the outside air is condensed on the inner wall surface of the sample chamber, and the transparent wall becomes cloudy due to condensation. The problem was that the inside of the sample chamber could not be observed from the outside.

The present invention has been made in view of the above-described problems of the prior art, and even if the low and high temperature exhaust gas connected to the designated exhaust system is exhausted, the temperature of the existing exhaust system will cause condensation. To provide an environment observation device, an exhaust device for the environment observation device, and an exhaust method for the environment observation device that can be set to a temperature that does not occur and can be a temperature that does not cause heat damage such as heat deformation to the synthetic resin portion of the existing exhaust system. The first purpose.
In addition to the first object, an environmental observation device, an exhaust device for the environmental observation device, and an exhaust method for the environmental observation device in which outside air does not enter the observation chamber and condensation occurs on the inner wall of the observation chamber are provided. Is the second object of the invention.

In order to achieve the above object, the present invention is configured as follows.
<Invention of Claim 1>
A sample setting section for setting a sample;
A low temperature gas supply means for supplying a low temperature gas to the sample setting section;
High temperature gas supply means for supplying a high temperature gas to the sample setting section;
An apparatus body having the sample setting unit, the low-temperature gas supply means, and the high-temperature gas supply means;
A primary exhaust part for exhausting and guiding the primary exhaust gas which is the exhaust gas of the low temperature gas and the high temperature gas exhausted outside the sample setting part;
An outside air introduction section for introducing outside air for mixing, which is outside air mixed with the primary exhaust gas;
A secondary exhaust part that communicates with the primary exhaust part for exhausting and guiding the secondary mixed exhaust gas that is a mixed gas of the outside air for mixing and the primary exhaust gas. With
Due to the strong suction from the exhaust system side of the secondary mixed exhaust gas having a suction amount that exceeds the discharge amount of the primary exhaust gas, suction of the mixing outside air into the outside air introduction portion and the secondary mixing are performed. Exhaust gas formation takes place,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation on the exhaust system side of the secondary mixed exhaust gas. The temperature rises depending on the amount of outside air introduced,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. The environment observation apparatus is characterized in that the temperature is lowered by an introduction amount of the outside air for mixing to an unheated low temperature.

“Gas” is air or gas other than air (including mixed gas).
The “primary exhaust part” and the “outside air introduction part” have forms such as an exhaust pipe system, an exhaust port system, and an exhaust opening system.
“Outside air for mixing” includes air outside the apparatus, air adjusted to a predetermined temperature, and air mixed with a gas other than the outside air.
The same applies to the claims after this claim.

<Invention of Claim 2>
A sample setting section for setting a sample;
A low temperature gas supply means for supplying a low temperature gas to the sample setting section;
High temperature gas supply means for supplying a high temperature gas to the sample setting section;
An apparatus body having the sample setting unit, the low-temperature gas supply means, and the high-temperature gas supply means;
A primary exhaust part for exhausting and guiding the primary exhaust gas which is the exhaust gas of the low temperature gas and the high temperature gas exhausted outside the sample setting part;
An outside air introduction section for introducing outside air for mixing, which is outside air mixed with the primary exhaust gas;
A secondary exhaust part that communicates with the primary exhaust part for exhausting and guiding the secondary mixed exhaust gas that is a mixed gas of the outside air for mixing and the primary exhaust gas. With
The outside air for mixing from the outside air introduction unit is injected from the injection nozzle of the outside air introduction unit, and the primary exhaust gas is made to have a negative pressure on the primary exhaust unit side by the injection amount and the injection speed. The outside air for jet mixing introduced into the secondary exhaust section,
The primary exhaust gas sucked and introduced into the secondary exhaust portion and the injection mixing outside air injected from the injection nozzle are mixed to form the secondary mixed exhaust gas,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation on the exhaust system side of the secondary mixed exhaust gas. The temperature rises depending on the amount of outside air introduced,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. The environment observation apparatus is characterized in that the temperature is lowered by an introduction amount of the outside air for mixing to an unheated low temperature.

<Invention of Claim 3 >
A sample setting unit for setting a sample, a low-temperature gas supply unit for supplying a low-temperature gas to the sample setting unit, a high-temperature gas supply unit for supplying a high-temperature gas to the sample setting unit, the sample setting unit, the low-temperature gas supply unit, An apparatus main body having a high-temperature gas supply means, and a primary exhaust part for exhausting and guiding the low-temperature gas discharged to the outside of the sample setting part and the primary exhaust gas that is the exhaust gas of the high-temperature gas. An environmental observation device, an exhaust device for the environmental observation device,
An outside air introduction section for introducing outside air for mixing, which is outside air mixed with the primary exhaust gas;
A secondary exhaust part communicated with the primary exhaust part for exhausting and guiding a secondary mixed exhaust gas that is a mixed gas of the outside air for mixing and the primary exhaust gas, and
Due to the strong suction from the exhaust system side of the secondary mixed exhaust gas having a suction amount that exceeds the discharge amount of the primary exhaust gas, suction of the mixing outside air into the outside air introduction portion and the secondary mixing are performed. Exhaust gas formation takes place,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation on the exhaust system side of the secondary mixed exhaust gas. It is possible to increase the temperature depending on the amount of outside air introduced, or to the non-condensing temperature,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. An exhaust device for an environmental observation device, wherein the temperature can be lowered to a non-heated low temperature by the amount of outside air for mixing, or the non-heated low temperature.

<Invention of Claim 4 >
A sample setting unit for setting a sample, a low-temperature gas supply unit for supplying a low-temperature gas to the sample setting unit, a high-temperature gas supply unit for supplying a high-temperature gas to the sample setting unit, the sample setting unit, the low-temperature gas supply unit, An apparatus main body having a high-temperature gas supply means, and a primary exhaust part for exhausting and guiding the low-temperature gas discharged to the outside of the sample setting part and the primary exhaust gas that is the exhaust gas of the high-temperature gas. An environmental observation device, an exhaust device for the environmental observation device,
An outside air introduction section for introducing outside air for mixing, which is outside air mixed with the primary exhaust gas;
A secondary exhaust part that communicates with the primary exhaust part for exhausting and guiding the secondary mixed exhaust gas that is a mixed gas of the outside air for mixing and the primary exhaust gas. With
The outside air for mixing from the outside air introduction unit is injected from the injection nozzle of the outside air introduction unit, and the primary exhaust gas is made to have a negative pressure on the primary exhaust unit side by the injection amount and the injection speed. The outside air for jet mixing introduced into the secondary exhaust section,
The primary exhaust gas sucked and introduced into the secondary exhaust portion and the injection mixing outside air injected from the injection nozzle are mixed to form the secondary mixed exhaust gas,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation on the exhaust system side of the secondary mixed exhaust gas. The temperature rises depending on the amount of outside air introduced,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. An exhaust device for an environmental observation device, wherein the temperature is lowered by an introduction amount of the outside air for mixing to an unheated and low temperature.

<Invention of Claim 5 >
A sample setting section for setting a sample, a low temperature gas supply means for supplying a low temperature gas to the sample setting section, a high temperature gas supply means for supplying a high temperature gas to the sample setting section, the sample setting section, and the low temperature gas supply Of the primary exhaust gas that is the exhaust gas of the low-temperature gas and the high-temperature gas discharged out of the sample setting portion of an environment observation apparatus comprising: An exhaust method,
The second mixed exhaust gas is obtained by mixing the outside air for mixing, which is outside air, and mixing the outside air for mixing and the first exhaust gas by strong suction with a suction amount exceeding the discharge amount of the first exhaust gas. Form the
The strong suction is performed from the exhaust system side of the secondary mixed exhaust gas,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation in the exhaust system of the secondary mixed exhaust gas. Increase the temperature according to the amount introduced,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. An exhaust method for an environmental observation apparatus, wherein the temperature is lowered to a non-heated low temperature by an introduction amount of the outside air for mixing.

<Invention of Claim 6 >
A sample setting section for setting a sample, a low temperature gas supply means for supplying a low temperature gas to the sample setting section, a high temperature gas supply means for supplying a high temperature gas to the sample setting section, the sample setting section, and the low temperature gas supply Of the primary exhaust gas that is the exhaust gas of the low-temperature gas and the high-temperature gas discharged out of the sample setting portion of an environment observation apparatus comprising: An exhaust method,
The primary exhaust gas is sucked and introduced by setting the primary exhaust gas side to a negative pressure according to the injection amount and the injection speed of the mixing external air, and the primary exhaust gas and the mixing external air are To form a secondary mixed exhaust gas,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation on the exhaust system side of the secondary mixed exhaust gas. The temperature rises depending on the amount of outside air introduced,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. An exhaust method for an environmental observation apparatus, wherein the temperature is lowered to a non-heated low temperature by an introduction amount of the outside air for mixing.

The present invention has the following effects.
<Effect of the Invention of Claim 1>
(1) The temperature of the primary exhaust gas is the secondary mixed exhaust gas formed by mixing the outside air for mixing and the primary exhaust gas, and the temperature is referred to as “the primary exhaust gas is the high temperature. In the case of a gas, in the case of having a synthetic resin member on the exhaust system side of the secondary mixed exhaust gas, the synthetic resin member is heated to a non-heated low temperature that does not cause heat deformation or heat deterioration. Since the temperature can be lowered by the introduction amount of the outside air for mixing or the temperature is reduced to the non-heated low temperature ”, the exhaust system of the secondary mixed exhaust gas does not need to take measures for heat dissipation or condensation. Can be a thing. Therefore, it is not necessary to cover the exhaust system side of the secondary mixed exhaust gas with a heat insulating material or the like.
In particular, the exhaust system side of the secondary mixed exhaust gas often needs to use existing exhaust equipment (ventilation equipment) at the establishment, etc., and it is most reasonable to use the existing exhaust equipment. It is economical.
Therefore, it is possible to use an existing exhaust equipment duct or the like on the exhaust system side of the secondary mixed exhaust gas as it is without taking any measures against heat dissipation or condensation, regardless of the material.

(2) Suction introduction and secondary mixing of the outside air for mixing into the outside air introduction portion by the suction amount (by strong suction) of the secondary mixed exhaust gas exceeding the discharge amount of the primary exhaust gas from the exhaust system side Since the exhaust gas is formed and exhausted, it is not necessary to provide suction driving means for introducing the mixing outside air on the outside air introducing portion side.
This realizes cost reduction, weight reduction, size reduction, and energy saving.
In particular, in an existing exhaust system having a strong suction amount that exceeds the discharge amount of the primary exhaust gas, a new drive exhaust means for forcibly sucking or forcing the mixing outside air and the secondary mixed exhaust gas is newly provided. There is no need to provide it.

(3) Depending on the introduction amount of the outside air for mixing, the low-temperature gas supply means side can be prevented from becoming a negative pressure than the outside air pressure. Therefore, it does not occur that moist outside air enters from the apparatus main body side and enters the observation room. That is, even if an existing exhaust system that exceeds the supply amount of low-temperature gas from the low-temperature gas supply means is connected, moisture outside air will not enter the observation room, and therefore no condensation will occur on the inner wall surface of the observation room due to intrusion of outside air Realize things.

<Effects of Invention of Claim 2>
(1) The temperature of the primary exhaust gas is the secondary mixed exhaust gas formed by mixing the outside air for mixing and the primary exhaust gas, and the temperature is referred to as “the primary exhaust gas is the high temperature. In the case of a gas, in the case of having a synthetic resin member on the exhaust system side of the secondary mixed exhaust gas, the synthetic resin member is heated to a non-heated low temperature that does not cause heat deformation or heat deterioration. Since the temperature can be lowered by the introduction amount of the outside air for mixing or the temperature is reduced to the non-heated low temperature ”, the exhaust system of the secondary mixed exhaust gas does not need to take measures for heat dissipation or condensation. Can be a thing. Therefore, it is not necessary to cover the exhaust system side of the secondary mixed exhaust gas with a heat insulating material or the like.
In particular, the exhaust system side of the secondary mixed exhaust gas often needs to use existing exhaust equipment (ventilation equipment) at the establishment, etc., and it is most reasonable to use the existing exhaust equipment. It is economical.
Therefore, it is possible to use the existing exhaust system duct on the exhaust system side of the secondary mixed exhaust gas as it is without taking any heat dissipation measures or condensation measures regardless of the heat resistance of the material. is there.

(2) The primary exhaust gas is sucked according to the injection amount and injection speed of the external air for injection and mixing, and the primary exhaust gas and the external air for injection and mixing are formed to form the second exhaust gas, and the injection Since exhaust is performed by the injection pressure of the outside air for mixing, it is effective when the suction force (exhaust amount) of the existing exhaust system is small.
Further, an exhaust opening is formed in the adjacent wall, and an exhaust opening is provided in the window, so that exhaust can be performed from there.

<Effect of the Invention of Claim 3 >
A sample setting unit for setting a sample, a low-temperature gas supply unit for supplying a low-temperature gas to the sample setting unit, a high-temperature gas supply unit for supplying a high-temperature gas to the sample setting unit, the sample setting unit, the low-temperature gas supply unit, An apparatus main body having a high-temperature gas supply means, a primary exhaust unit for exhausting and guiding the low-temperature gas discharged to the outside of the sample setting unit and the primary exhaust gas that is the exhaust gas of the high-temperature gas; By attaching to the environment observation device having the above, the environment observation device can be made into an environment observation device having the same effect as that of the first aspect of the invention.
For example, an environmental observation apparatus that has the same effect as that of the first aspect of the present invention can be obtained by retrofitting an environmental observation apparatus that has already been installed in a business operator or the like and exhaust is a problem. .
<Invention Effect of Claim 4 >
A sample setting unit for setting a sample, a low-temperature gas supply unit for supplying a low-temperature gas to the sample setting unit, a high-temperature gas supply unit for supplying a high-temperature gas to the sample setting unit, the sample setting unit, the low-temperature gas supply unit, An apparatus main body having a high-temperature gas supply means, a primary exhaust unit for exhausting and guiding the low-temperature gas discharged to the outside of the sample setting unit and the primary exhaust gas that is the exhaust gas of the high-temperature gas; By attaching to the environment observation device having the above, the environment observation device can be made into an environment observation device having the same effect as that of the second aspect of the invention.

<Effect of the Invention of Claim 5 >
The same effect as that of the first aspect of the invention can be obtained.

<Effect of the invention of claim 6, wherein>
The same effect as that of the second aspect of the invention can be attained.

1 is an overall configuration diagram of Embodiment 1 of the present invention. The block diagram of the apparatus of Example 1 of this invention. The block diagram of Example 2 of this invention. The block diagram of Example 3 of this invention. The block diagram of Example 4 of this invention. The block diagram of Example 5 of this invention. The block diagram of Example 6 of this invention. The external view of the apparatus of a nonpatent literature 1. FIG.

  Embodiments that are the best mode for carrying out the present invention will be described below. However, the present invention is not intended to be limited to these examples. Further, in the description of the embodiments to be described later, the same reference numerals are given to the same components of the above-described embodiments, and the overlapping description is omitted.

In the first embodiment of the present invention shown in FIGS. 1 and 2, the environment observation apparatus 1 includes an apparatus main body 40 and an exhaust apparatus 41.
The apparatus main body 1 has the following configuration.
An observation room 4 (chamber) for observing a sample W, which is an observation object, having a sample setting portion 3 with the upper surface made of a light transmissive plate 2 such as quartz glass as a sample setting surface;
Low-temperature gas supply means for generating a low-temperature gas AG to be supplied to the observation chamber 4 and placing the sample W (here, electronic components such as a printed circuit board and an IC chip) set in the sample setting unit 3 in a low-temperature atmosphere environment state 5 and
A high temperature gas BG to be supplied to the observation chamber 4 is generated, and the high temperature gas supply means 6, a low temperature gas AG, and a high temperature gas BG for placing the sample W set in the sample setting section 3 in a high temperature environment state are guided to the observation chamber 4. A guide tube 7 to be
A primary exhaust part attached to a primary exhaust part 26a, which is an exhaust port of the observation chamber 4, for exhausting and guiding the primary exhaust gas CG comprising the low temperature gas AG and the high temperature gas BG in the observation room 4. 26b,
An automatic valve 8 such as an electromagnetic type, an electric type, or an air type for preventing the high temperature gas BG from flowing into the low temperature gas supply means 5;
An automatic valve 9 such as an electromagnetic type, an electric type, or an air type for preventing the low temperature gas AG from flowing into the high temperature gas supply means 6;
A blower 10 for delivering high temperature gas or low temperature gas provided in the middle of the guide tube 7;
A housing 11 provided in the lower part of the observation room 4;
A moving means 12 (for example, a high-precision XY stage) provided in the housing 11 and freely movable in the XY direction by a driving means such as a stepping motor;
An autofocus sensor provided in the moving means 12 and positioned in a non-contact manner with the sample setting unit 3 (in the first embodiment, the behavioral displacement of the sample W is measured), an imaging means such as a camera, a laser displacement meter Optical observation means 13 comprising,
Located in a non-contact manner on the light transmissive plate 2 below the light transmissive plate 2, which is provided so as to move integrally with the moving means 12, hot air or dry on the outer surface of the light transmissive plate 2. A hot air discharge part 14 which is a part for blowing condensation on air to prevent condensation on the outer surface of the light-transmitting plate 2;
A flexible tube 15 connected to the hot air discharge site 14;
The flexible tube 15 is connected, and a dew condensation prevention means generator 16 that generates warm air (condensation prevention means) discharged from the hot air discharge site 14;
Warm air (condensation prevention means) from the dew condensation prevention means generator 16 provided near the optical observation means 13 between the optical observation means 13 and the hot air discharge site 14 is directly applied to the optical observation means 13. This is shielded from contact with the light-transmitting plate 2 so that the observation performance of the optical observation means 13 (here, measurement or measurement of displacement) is prevented from being disturbed by warm air. A shield 17 provided in the form;
A dew point temperature detection unit 18 (including a dew point temperature measuring device) for detecting (including measurement and measurement) the dew point temperature in the housing 11;
Plate outer surface temperature detecting means 19 for detecting the outer surface temperature of the light transmissive plate 2;
The light transmissive plate 2 is positioned in a non-contact manner above the light transmissive plate 2, and dew condensation prevention means made of warm air (including hot air) is blown onto the outer surface of the light transmissive plate 2, A dew condensation preventing means generating unit 22 for generating dew condensation preventing means made of warm air or dry air to prevent condensation on the outer surface of the permeable plate 2;
A display 23;
A temperature behavior display unit 24 for displaying a temperature behavior state in the observation room 4;
It comprises a control unit 25 that controls each part.

The dew condensation prevention means generator 16, the flexible tube 15, the hot air discharge part 14, the moving means 12, the optical observation means 13, and the shielding part 17 form a lower side observation part 42.
A plurality of temperature sensors 28a to 28f that can be set at desired locations such as the sample W and the light transmissive plate are provided inside the observation chamber 4 so that the temperatures at a plurality of locations in the observation chamber 4 can be detected. Yes.
The temperature conditions of the temperature sensors 28a to 28f are displayed on the temperature behavior display unit 24 in real time.
When the temperature in the observation room 4 is out of the set range, an alarm is issued.

Since the environment observation apparatus 1 includes the low temperature gas supply means 5 and the high temperature gas supply means 6, the inside of the observation chamber 4 can be set to a low temperature environment or a high temperature environment, and the low temperature environment → high temperature. It is possible to shift to an environment, or a transition from a high temperature environment to a low temperature environment.
In the setting unit 30, a temperature change range (including maintaining a predetermined temperature) is set (instructed), a start → end time is set (instructed), and the observation time of the optical observation means 13 (including constant observation) is set. ) Is set (instructed), and a predetermined temperature rise change or temperature fall change can be set (instructed).
The environment observation apparatus 1 can cover a temperature range of 400 ° C. to −80 ° C., and can freely control the cooling rate and the heating rate.

Accordingly, it is possible to observe, for example, a temperature change range: normal temperature (for example, 25 ° C.) → −50 ° C. → + 80 ° C. → normal temperature.
Further, for example, thermal shock observation in which a temperature change of −50 ° C. → normal temperature is performed in several tens of seconds is possible.

In FIG. 2, the supply of the low temperature gas AG and the high temperature gas BG into the observation chamber 4 is performed from the side, but there is also a mode of performing from the top or the bottom.
Further, as the low temperature / high temperature gas supply device for supplying the low temperature gas AG and the high temperature gas BG, the low temperature / high temperature gas supply device of Non-Patent Document 1 may be used. In an actual environment observation apparatus, the low-temperature high-temperature gas supply apparatus of Non-Patent Document 1 will be used.

  The exhaust device 41 mixes the primary exhaust gas CG from the primary exhaust part 26a and the outside air for mixing EG into the secondary mixed exhaust gas FG, and the exhaust system 44, which is an existing exhaust system at a business office or the like. The secondary mixed exhaust gas is exhausted to the side.

The exhaust device 41 has the following configuration.
An outside air introduction section 42 for introducing outside air EG for mixing, which is outside air to be mixed with the primary exhaust gas CG;
In the exhaust system 44, the primary exhaust part 26c connected to the primary exhaust part 26b, the outside air introduction part 42, and the primary exhaust part 26c join and mix to form the secondary mixed exhaust gas FG. A secondary exhaust part 43 to be connected,
Due to the strong suction from the exhaust system 44 side of the suction amount that exceeds the discharge amount of the primary exhaust gas CG, suction of the mixing outside air EG into the outside air introduction section 42, and the mixing outside air EG and the primary exhaust gas The secondary mixed exhaust gas FG is formed in the mixing portion 29 that is a downstream portion from the CG merge position,
When the primary exhaust gas CG is a low temperature gas AG, the temperature of the secondary mixed exhaust gas FG is adjusted to a non-condensing temperature that does not cause condensation on the exhaust system 44 side of the secondary mixed exhaust gas FG. The temperature can be increased by the amount of outside air EG introduced,
When the primary exhaust gas CG is a high-temperature gas BG, if the secondary mixed exhaust gas FG has a synthetic resin member on the exhaust system 44 side, the synthetic resin member is subjected to heat deformation or heat deterioration. This is an exhaust device in which the temperature can be lowered to a non-heated low temperature by the amount of mixing external air EG introduced.
The exhaust system 44 is connected to an existing exhaust system 45 which is an existing exhaust system in a business office or the like.

The outside air introduction part 42 is provided with a valve 46 so that the introduction amount of the outside air EG for mixing can be controlled.
The primary exhaust part 26c is provided with a valve 47 so that the exhaust amount of the primary exhaust gas CG can be controlled.
A temperature detection sensor 49 is provided in the secondary exhaust unit 43, and a temperature detection sensor 50 is provided in the observation chamber 4.

The primary exhaust part 26b, the primary exhaust part 26c, the outside air introduction part 42, and the secondary exhaust part 43 are covered with a heat insulating material 48 so that strong heat radiation and condensation do not occur outside. .
Here, it is not necessary to apply heat insulation to the exhaust system 44 and the existing exhaust system 45. The exhaust system 44 has a non-heat resistant synthetic resin member. The temperature of the secondary mixed exhaust gas FG flowing through the exhaust system 44 is heated by deforming the synthetic resin member by heating. It is a non-heated low temperature that does not deteriorate.
In addition, in order to prevent condensation in the exhaust system 44, it may be necessary to provide a heat insulating material on the upstream side of the exhaust system 44 or a part thereof.
Further, when the secondary exhaust part 43 is long and there is a portion where no condensation occurs, the heat insulating material may be applied to the secondary exhaust part 43 or a part thereof where condensation occurs.

In this embodiment, a portion on the route of the exhaust system 44 is obtained by mixing the primary exhaust gas CG set to change in temperature between −50 ° C. and + 210 ° C. with 10 times or more of the room temperature mixing outside air EG. It does not require heat and heat treatment.
For example, the temperature of the primary exhaust gas CG may be observed only at −50 ° C., may be observed only at + 210 ° C., or may be observed at other temperatures. In some cases, however, the temperature changes and observation is performed. There are cases where the observation is normal temperature (for example, 25 ° C.) → −50 ° C. → + 80 ° C. → normal temperature, and there are also cases such as thermal shock observation in which a temperature change of −50 ° C. → normal temperature is performed in tens of seconds. Various temperature environment conditions can be performed.
In addition, continuous operation and observation for 24 hours, continuous operation and observation for 48 hours, continuous operation and observation for several days, continuous operation and observation for several tens of days, or continuous operation and observation beyond that are possible.
A high temperature above normal temperature is supplied by the high temperature gas supply means 6, and a low temperature below normal temperature is supplied by the low temperature gas supply means 5.

A specific example will be described.
The outside air temperature (indoor temperature or room temperature) is + 25 ° C.
The suction amount (exhaust amount) of the exhaust system 44 is approximately 32.5 m ³ / min.
The valve 47 is opened approximately 10%, and the exhaust amount of the primary exhaust gas CG is set to approximately 4 m ³ / min.
The valve 46 is opened approximately 90%, and the introduction amount of the mixing external air EG is approximately 0.4 m ³ / min.
In the calculation ignoring the expansion rate of air due to temperature, it is as follows.
The minimum temperature is −50 ° C. and the maximum temperature is + 210 ° C.
In the case of + 210 ° C., the temperature of the secondary mixed exhaust gas FG is (210−25) × 400/4400 + 25≈42 ° C.
In the case of −50 ° C., the temperature of the secondary mixed exhaust gas FG in the case of −50 ° C. is (−50−25) × 400/4400 + 25≈18 ° C.
Therefore, the temperature of the secondary mixed exhaust gas FG is between + 18 ° C. and + 42 ° C. under the valve opening / closing conditions. That is, the temperature of the secondary mixed exhaust gas FG does not cause condensation, and even if there is a non-heat resistant synthetic resin member on the exhaust system 44 side, it will not be deformed or deteriorated by heating, and people will be burned. The temperature can be used without worrying about
Further, the suction amount (exhaust amount) of the exhaust system 44 is approximately 32.5 m ³ / min, which is realized by the very strong suction power, and there is suction power from the exhaust system 44 side on this day. Therefore, the primary exhaust gas CG does not flow backward to the observation chamber 3 side.

  The temperature of the secondary mixed exhaust gas FG is constantly detected and monitored by the temperature detection sensor 49. For example, when the temperature allowable range of the secondary mixed exhaust gas FG is set to 14 ° C. to 60 ° C., when the temperature of the secondary mixed exhaust gas FG becomes a detected temperature that deviates from this temperature allowable range, An alarm is notified by an alarm sound or an alarm light.

  Exhaust of the primary exhaust gas CG and the mixing outside air EG by the automatic control valve so that the valve 46 and the valve 47 are automatically controlled so that the temperature of the secondary mixed exhaust gas FG is within a set temperature allowable range. An exhaust device that automatically controls the ratio may be used.

  The temperature of the secondary mixed exhaust gas FG is, for example, 18 ° C. to + 42 ° C., without providing the valve 46 and the valve 47, and the outside air introduction unit 42 and the primary exhaust unit 26b and / or the primary exhaust unit 26c. It is also possible to adopt a form in which the inner diameter and the throttle opening are set so as to change within the range of.

Only the exhaust device 41 can be provided as an independent device.
For example, it is an exhaust device that is attached to an existing environmental observation device that is already installed, or to an environmental observation device that is newly installed. Alternatively, only the exhaust device can be provided alone.

The first embodiment realizes an exhaust method of the environment observation apparatus described below.
A sample setting unit 3 for setting the sample W, a low-temperature gas supply unit 5 for supplying a low-temperature gas AG to the sample setting unit 3, a high-temperature gas supply unit 6 for supplying a high-temperature gas BG to the sample setting unit 3, The low-temperature gas AG discharged out of the sample setting section 3 of the environment observation apparatus 1 comprising the apparatus main body 40 having the sample setting section 3, the low-temperature gas supply means 5, and the high-temperature gas supply means 6. And an exhaust method of the primary exhaust gas CG which is an exhaust gas of the high temperature gas BG,
Due to the strong suction with the suction amount exceeding the discharge amount of the primary exhaust gas CG, the introduction of the mixing outside air EG which is the outside air, and the mixing outside air EG and the primary exhaust gas CG are mixed to produce the second. Forming the next mixed exhaust gas FG,
The strong suction is performed from the exhaust system 44 side of the secondary mixed exhaust gas FG;
When the primary exhaust gas CG is the low temperature gas AG, the temperature of the secondary mixed exhaust gas FG is set to a non-condensing temperature that does not cause condensation in the exhaust system 44 of the secondary mixed exhaust gas FG. The temperature is increased by the amount of the outside air EG for mixing introduced,
When the primary exhaust gas CG is the high-temperature gas BG, if the secondary mixed exhaust gas FG has a synthetic resin member on the exhaust system 44 side, the synthetic resin member is heated and deformed. An exhaust method for an environmental observation apparatus, wherein the temperature is lowered by an introduction amount of the outside air for mixing EG to a non-heated low temperature that is not heated or deteriorated.

  In the second embodiment of the present invention shown in FIG. 3, the main difference from the first embodiment is that an existing exhaust system 54 having an exhaust fan 53 with a single strong suction amount (exhaust amount) is provided on the outer wall 55 side of the building. The exhaust system 44 is connected to the existing exhaust system 54.

In the third embodiment of the present invention shown in FIG. 4, the main difference from the first embodiment is that the primary exhaust portion 26c is connected to the primary exhaust portion 26a, and the upstream side of one pipe is connected to the first exhaust portion 26a. An environmental observation apparatus 58 having a secondary exhaust part 26c, a downstream exhaust part 43 on the downstream side, an external air introduction part 57 in the form of a short cylinder or a simple opening, and valves 46 and 47 are not provided. It is in the point formed.
The primary exhaust part 26c, the secondary exhaust part 43, and the outside air introduction part 57 form an exhaust device 59.
Each opening or pipe inner diameter is set so that the ratio of the primary exhaust gas from the primary exhaust part 26c and the mixing external air EG from the external air introduction part 57 becomes 10:90.

In the fourth embodiment of the present invention shown in FIG. 5, the main difference from the first embodiment is that the exhaust device is an exhaust device 62.
The exhaust device 62 is connected in such a manner that the downstream side of the primary exhaust part 26b is inserted, and a second exhaust part 63 having an inner diameter larger than the outer diameter of the primary exhaust part 26b, It consists of an outside air introduction part 64 having a gap passage 65 (including an opening) formed between the secondary exhaust part 26b and the secondary exhaust part 63.
The outside air introduction section 64 is provided with a valve 66 that adjusts the amount of outside air EG for mixing by changing the opening area of the gap passage 65.
The valve 66 includes a fixed plate having a fixed side opening hole through which the mixing outside air EG passes, and a movable plate having a movable side opening hole substantially in contact with the fixed plate. By rotating the movable plate and changing the area of the through-opening hole formed by the overlap of the fixed-side opening hole and the movable-side opening hole, the introduction amount of the mixing outside air EG is adjusted.
Although it is not necessary to cover the secondary exhaust part 63 with a heat insulating material, the primary exhaust part 26b is preferably covered with the heat insulating material including the part located in the secondary exhaust part 63.
Also,

The fifth embodiment of the present invention shown in FIG. 6 is mainly different from the first embodiment in that the exhaust device is an exhaust device 70.
The exhaust device 70 is connected in a form in which almost all the upstream side of the primary exhaust part 26b is left, and the secondary exhaust has an inner diameter larger than the outer diameter of the primary exhaust part 26b. Part 63, primary exhaust part 26 b, secondary exhaust part 63 and the outside air inlet 71 formed between the outer wall surfaces of observation chamber 4, primary exhaust part 26 b and secondary exhaust part 63. And an outside air introduction portion 72 having a gap passage 65 formed therebetween.
The outside air introduction portion 72 is provided with a valve 66 (see the fifth embodiment) that adjusts the amount of outside air EG for mixing by changing the opening area of the gap passage 65.
The handle of the valve 47 is located outside the outside air introduction part 72.
Although it is not necessary to cover the secondary exhaust part 63 with a heat insulating material, the primary exhaust part 26b is preferably covered with the heat insulating material including the part located in the secondary exhaust part 63.

In the sixth embodiment of the present invention shown in FIG. 7, the main difference from the first embodiment is that the exhaust device is an exhaust device 81 in which the outside air introduction portion is the outside air introduction portion 80, and the environment observation having the exhaust device 81 is performed. The device 79 is formed.
The outside air introduction section 80 is a section where the mixing outside air EG, which is the outside air at high speed or high pressure by the injection outside air forming means 82 such as a compressor or a blower, is injected from the injection nozzle 83 toward the secondary exhaust section 43. is there. The injection nozzle 83 and a part of the upstream outside air introduction part 80 of the injection nozzle 83 are located in the outer cylinder part 84 whose upstream side communicating with the secondary exhaust part 43 is sealed or provided with an opening. The primary exhaust part 26c is communicated with the part 84. The outside air introduction unit 80 is a heater such as an electric heater, a high-frequency heating coil, or a hot air heater for heating the outside air introduction unit 80 (a metal part or the whole metal) to heat the mixing outside air EG flowing inside. Means 85 are provided.

The mixing outside air EG from the outside air introduction section 80 is injected from the injection nozzle 83 of the outside air introduction section 80, and the primary exhaust section 26c side is set to a negative pressure by the injection amount and the injection speed so that the primary exhaust gas is discharged. It is the outside air for jet mixing that sucks and introduces CG into the secondary exhaust part 43,
The primary exhaust gas CG sucked into the secondary exhaust part 43 and the mixing outside air EG injected from the injection nozzle 83 are mixed to form the secondary mixed exhaust gas FG,
When the primary exhaust gas CG is the low temperature gas AG, the temperature of the secondary mixed exhaust gas FG is set to a non-condensing temperature that does not cause condensation on the exhaust system 44 side of the secondary mixed exhaust gas FG. The temperature is increased by the introduction amount of the mixing outside air EG.
Further, when the primary exhaust gas CG is a high-temperature gas BG, if the synthetic resin member is provided on the exhaust system 44 side of the secondary mixed exhaust gas FG, the synthetic resin member is heated and deformed or heated. The temperature is lowered by the introduction amount of the outside air EG for mixing so that the non-heated low temperature does not deteriorate.

When the primary exhaust gas CG is a low-temperature gas AG, the mixing outside air EG is heated by the heating means 85 so that the temperature does not decrease due to the endothermic action during the injection of the mixing outside air EG. The rising mixing outside air EG is injected from the injection nozzle 83.
The primary exhaust part 26c is provided with an automatic control valve 46, and the outside air introduction part 80 is provided with an automatic control valve 47 so that the temperature detected by the temperature detection sensor 49 is automatically controlled within a predetermined range. It is good to make it.

The sixth embodiment realizes the exhaust method of the environment observation apparatus described below.
A sample setting unit 3 for setting the sample W, a low-temperature gas supply unit 5 for supplying a low-temperature gas AG to the sample setting unit 3, a high-temperature gas supply unit 6 for supplying a high-temperature gas BG to the sample setting unit 3, A low-temperature gas AG discharged from the sample-setting unit 3 in an environmental observation apparatus including a sample-setting unit 3, the low-temperature gas supply unit 5, and an apparatus main body 40 having the high-temperature gas supply unit 5. A method of exhausting a primary exhaust gas CG that is an exhaust gas of the high-temperature gas BG,
The primary exhaust gas CG is sucked and introduced by setting the primary exhaust gas CG side to a negative pressure according to the injection amount and the injection speed by the injection of the mixing outside air EG, and the primary exhaust gas CG and the mixing A secondary mixed exhaust gas FG is formed by mixing the outside air EG for use,
When the primary exhaust gas CG is the low-temperature gas AG, the non-condensing temperature at which the temperature of the secondary mixed exhaust gas FG does not cause condensation on the exhaust system 44 side of the secondary mixed exhaust gas FG In addition, the temperature is increased by the amount of the outside air EG for mixing introduced,
When the primary exhaust gas CG is the high-temperature gas BG, if the secondary mixed exhaust gas CG has a synthetic resin member on the exhaust system 44 side, the synthetic resin member is heated and deformed. This is a method for exhausting the environmental observation apparatus in which the temperature is lowered by the introduction amount of the outside air for mixing EG to a non-heating low temperature that does not heat or deteriorate.

  The present invention is mainly used in industries that use an environment observation apparatus that exhausts low-temperature gas and high-temperature gas.

W: Sample,
AG: Low temperature gas
BG: hot gas,
CG: primary exhaust gas,
EG: outside air for mixing,
FG: secondary mixed exhaust gas,
1: Environmental observation device,
2: Light transmissive plate,
3: Light transmissive plate,
4: Observation room
5: Low temperature gas supply means,
6: High temperature gas supply means,
7: Guide tube,
8: Automatic valve,
9: Automatic valve,
10: Blower,
11: housing
12: Moving means,
13: Optical observation means,
14: Hot air release site,
15: Flexible tube,
16: Condensation prevention means generator
17: Shielding part,
18: Dew point temperature detection unit,
19: Plate outer surface temperature detecting means,
22: Condensation prevention means generating unit,
23: Display,
24: Temperature behavior display section,
25: Control unit,
26a: primary exhaust part,
26b: primary exhaust part,
26c: primary exhaust part,
28a to 28f: temperature sensor,
29: mixing part,
40: device main body,
41: exhaust device,
42: Outside air introduction part,
43: Secondary exhaust part,
44: exhaust system,
45: Existing exhaust system,
46: Valve,
47: Valve,
48: Insulation,
49: Temperature detection sensor,
50: temperature detection sensor,
54: Existing exhaust system,
55: The outer wall of the building,
57: Outside air introduction part,
58: Environmental observation device,
59: exhaust device,
62: exhaust device,
63: Secondary exhaust part,
64: gap passage,
65: Outside air introduction part,
66: Valve,
70: exhaust system,
71: Outside air inlet,
72: Outside air introduction part,
79: Environmental observation device,
80: Outside air introduction part,
81: exhaust device,
82: Injection outside air forming means,
83: injection nozzle,
84: outer cylinder part,
85: heating means,
100: device main body,
101: Gas supply pipe,
102: Cover,
103: Sample stage,
104: Sample.

Claims (6)

A sample setting section for setting a sample;
A low temperature gas supply means for supplying a low temperature gas to the sample setting section;
High temperature gas supply means for supplying a high temperature gas to the sample setting section;
An apparatus body having the sample setting unit, the low-temperature gas supply means, and the high-temperature gas supply means;
A primary exhaust part for exhausting and guiding the primary exhaust gas which is the exhaust gas of the low temperature gas and the high temperature gas exhausted outside the sample setting part;
An outside air introduction section for introducing outside air for mixing, which is outside air mixed with the primary exhaust gas;
A secondary exhaust part that communicates with the primary exhaust part for exhausting and guiding the secondary mixed exhaust gas that is a mixed gas of the outside air for mixing and the primary exhaust gas. With
Due to the strong suction from the exhaust system side of the secondary mixed exhaust gas having a suction amount that exceeds the discharge amount of the primary exhaust gas, suction of the mixing outside air into the outside air introduction portion and the secondary mixing are performed. Exhaust gas formation takes place,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation on the exhaust system side of the secondary mixed exhaust gas. The temperature rises depending on the amount of outside air introduced,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. An environmental observation apparatus, wherein the temperature is lowered to an unheated low temperature by the amount of outside air for mixing introduced. A sample setting section for setting a sample;
A low temperature gas supply means for supplying a low temperature gas to the sample setting section;
High temperature gas supply means for supplying a high temperature gas to the sample setting section;
An apparatus body having the sample setting unit, the low-temperature gas supply means, and the high-temperature gas supply means;
A primary exhaust part for exhausting and guiding the primary exhaust gas which is the exhaust gas of the low temperature gas and the high temperature gas exhausted outside the sample setting part;
An outside air introduction section for introducing outside air for mixing, which is outside air mixed with the primary exhaust gas;
A secondary exhaust part that communicates with the primary exhaust part for exhausting and guiding the secondary mixed exhaust gas that is a mixed gas of the outside air for mixing and the primary exhaust gas. With
The outside air for mixing from the outside air introduction unit is injected from the injection nozzle of the outside air introduction unit, and the primary exhaust gas is made to have a negative pressure on the primary exhaust unit side by the injection amount and the injection speed. The outside air for jet mixing introduced into the secondary exhaust section,
The primary exhaust gas sucked and introduced into the secondary exhaust portion and the injection mixing outside air injected from the injection nozzle are mixed to form the secondary mixed exhaust gas,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation on the exhaust system side of the secondary mixed exhaust gas. The temperature rises depending on the amount of outside air introduced,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. An environmental observation apparatus, wherein the temperature is lowered to an unheated low temperature by the amount of outside air for mixing introduced. A sample setting unit for setting a sample, a low-temperature gas supply unit for supplying a low-temperature gas to the sample setting unit, a high-temperature gas supply unit for supplying a high-temperature gas to the sample setting unit, the sample setting unit, the low-temperature gas supply unit, An apparatus main body having a high-temperature gas supply means, and a primary exhaust part for exhausting and guiding the low-temperature gas discharged to the outside of the sample setting part and the primary exhaust gas that is the exhaust gas of the high-temperature gas. An environmental observation device, an exhaust device for the environmental observation device,
An outside air introduction section for introducing outside air for mixing, which is outside air mixed with the primary exhaust gas;
A secondary exhaust part communicated with the primary exhaust part for exhausting and guiding a secondary mixed exhaust gas that is a mixed gas of the outside air for mixing and the primary exhaust gas, and
Due to the strong suction from the exhaust system side of the secondary mixed exhaust gas having a suction amount that exceeds the discharge amount of the primary exhaust gas, suction of the mixing outside air into the outside air introduction portion and the secondary mixing are performed. Exhaust gas formation takes place,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation on the exhaust system side of the secondary mixed exhaust gas. It is possible to increase the temperature depending on the amount of outside air introduced, or to the non-condensing temperature,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. An exhaust apparatus for an environmental observation apparatus, wherein the temperature can be lowered to a non-heated low temperature by the amount of the outside air for mixing, or the non-heated low temperature. A sample setting unit for setting a sample, a low-temperature gas supply unit for supplying a low-temperature gas to the sample setting unit, a high-temperature gas supply unit for supplying a high-temperature gas to the sample setting unit, the sample setting unit, the low-temperature gas supply unit, An apparatus main body having a high-temperature gas supply means, and a primary exhaust part for exhausting and guiding the low-temperature gas discharged to the outside of the sample setting part and the primary exhaust gas that is the exhaust gas of the high-temperature gas. An environmental observation device, an exhaust device for the environmental observation device,
An outside air introduction section for introducing outside air for mixing, which is outside air mixed with the primary exhaust gas;
A secondary exhaust part that communicates with the primary exhaust part for exhausting and guiding the secondary mixed exhaust gas that is a mixed gas of the outside air for mixing and the primary exhaust gas. With
The outside air for mixing from the outside air introduction unit is injected from the injection nozzle of the outside air introduction unit, and the primary exhaust gas is made to have a negative pressure on the primary exhaust unit side by the injection amount and the injection speed. The outside air for jet mixing introduced into the secondary exhaust section,
The primary exhaust gas sucked and introduced into the secondary exhaust portion and the injection mixing outside air injected from the injection nozzle are mixed to form the secondary mixed exhaust gas,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation on the exhaust system side of the secondary mixed exhaust gas. The temperature rises depending on the amount of outside air introduced,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. An exhaust device for an environmental observation device, wherein the temperature is lowered by an introduction amount of the outside air for mixing to an unheated low temperature. A sample setting section for setting a sample, a low temperature gas supply means for supplying a low temperature gas to the sample setting section, a high temperature gas supply means for supplying a high temperature gas to the sample setting section, the sample setting section, and the low temperature gas supply Of the primary exhaust gas that is the exhaust gas of the low-temperature gas and the high-temperature gas discharged out of the sample setting portion of an environment observation apparatus comprising: An exhaust method,
The second mixed exhaust gas is obtained by mixing the outside air for mixing, which is outside air, and mixing the outside air for mixing and the first exhaust gas by strong suction with a suction amount exceeding the discharge amount of the first exhaust gas. Form the
The strong suction is performed from the exhaust system side of the secondary mixed exhaust gas,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation in the exhaust system of the secondary mixed exhaust gas. Increase the temperature according to the amount introduced,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. An exhaust method for an environmental observation apparatus, wherein the temperature is lowered to a non-heated and low temperature by an introduction amount of the outside air for mixing. A sample setting section for setting a sample, a low temperature gas supply means for supplying a low temperature gas to the sample setting section, a high temperature gas supply means for supplying a high temperature gas to the sample setting section, the sample setting section, and the low temperature gas supply Of the primary exhaust gas that is the exhaust gas of the low-temperature gas and the high-temperature gas discharged out of the sample setting portion of an environment observation apparatus comprising: An exhaust method,
The primary exhaust gas is sucked and introduced by setting the primary exhaust gas side to a negative pressure according to the injection amount and the injection speed of the mixing external air, and the primary exhaust gas and the mixing external air are To form a secondary mixed exhaust gas,
When the primary exhaust gas is the low-temperature gas, the temperature of the secondary mixed exhaust gas is set to a non-condensing temperature that does not cause condensation on the exhaust system side of the secondary mixed exhaust gas. The temperature rises depending on the amount of outside air introduced,
When the primary exhaust gas is the high-temperature gas, if the secondary mixed exhaust gas has a synthetic resin member on the exhaust system side, the synthetic resin member is subjected to heat deformation or heat deterioration. An exhaust method for an environmental observation apparatus, wherein the temperature is lowered to a non-heated and low temperature by an introduction amount of the outside air for mixing.

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