JP6589666B2 - Ozone generator - Google Patents

Description

  The present invention relates to an ozone generator that generates ozone by dielectric barrier discharge.

  Patent Document 1 describes a plasma generator having a plurality of dielectrics arranged in one direction and a conductor embedded in each dielectric. The plasma generator generates a dielectric barrier discharge in a discharge space formed between dielectrics by applying a voltage between adjacent conductors. And in patent document 1, it is described that the said plasma generator can be used as a reaction apparatus for purifying harmful substances, such as NOx in exhaust gas. The reaction apparatus purifies the exhaust gas of the internal combustion engine by introducing chemicals into the discharge space where dielectric barrier discharge is generated, thereby chemically changing harmful substances such as NOx in the exhaust gas.

JP 2009-238486 A

However, the following problems arise when the above reaction apparatus is used to generate ozone.
In the reaction apparatus, a conductor is embedded in a dielectric. For this reason, the heat of the electrode is easily trapped in the dielectric body and is not easily dissipated. Accordingly, the heat of the dielectric is not easily radiated to the conductor side. Therefore, the heat dissipation efficiency of the dielectric is poor, and there is a risk that the dielectric is likely to increase in temperature. Since the dielectric is exposed to the discharge space, when the dielectric is heated, the vicinity of the dielectric in the discharge space is also heated. Therefore, when the reaction apparatus is used for generating ozone, it is considered that the thermal decomposition of ozone generated in the vicinity of the dielectric in the discharge space is easily promoted. As a result, ozone generation efficiency may be reduced.

  This invention is made | formed in view of this subject, It aims at providing the ozone generator which can improve the production | generation efficiency of ozone by improving the heat dissipation of a dielectric material.

One embodiment of the present invention includes an inlet (210) into which a gas containing oxygen flows.
An outlet (220) through which the gas flowing in from the inlet flows out;
A pair of electrode conductors (3) arranged to face each other in the internal space (5) between the inlet and the outlet;
A pair of dielectrics (4) arranged in close contact with each of the pair of electrode conductors;
The paired dielectrics are arranged to face each other with a discharge space (6) provided between them.
The electrode conductors may possess an exposed surface that is exposed to the internal space from the dielectric (7),
The electrode conductor is disposed on the surface of the dielectric opposite to the discharge space,
The exposed surface faces the flow direction of the gas flowing through the discharge space,
The dielectric is in the ozone generator (1) having a protruding portion (41) protruding in the flow direction of the gas flowing through the discharge space from the exposed surface of the electrode conductor .
In another aspect of the present invention, an inlet (210) into which a gas containing oxygen flows,
An outlet (220) through which the gas flowing in from the inlet flows out;
A pair of electrode conductors (3) arranged to face each other in the internal space (5) between the inlet and the outlet;
A pair of dielectrics (4) arranged in close contact with each of the pair of electrode conductors;
The paired dielectrics are arranged to face each other with a discharge space (6) provided between them.
The electrode conductor has an exposed surface (7) exposed from the dielectric to the internal space,
A plurality of the discharge spaces are arranged in parallel with each other,
The high-voltage electrode conductor (31), which is the electrode conductor to which a high voltage is applied, and the ground electrode conductor (32), which is the grounded electrode conductor, make a pair,
The plurality of electrode conductors are arranged side by side in the direction in which the plurality of discharge spaces are arranged,
Among the plurality of electrode conductors, the electrode conductors arranged at both ends in the arrangement direction are in the ozone generator (1) which is the ground electrode conductor.

  In the ozone generator, the paired dielectrics are arranged so as to be in close contact with each of the paired electrode conductors. Therefore, it is easy to transfer the heat of the dielectric to the electrode conductor. The electrode conductor has the exposed surface. Thereby, the heat transmitted from the dielectric to the electrode conductor can be easily released to the gas. That is, in the ozone generator, the heat of the dielectric can be easily released to the gas through the electrode conductor. Therefore, in the ozone generator, the heat of the dielectric is easily radiated not only from the discharge space side but also from the electrode conductor side. Thereby, the heat dissipation of a dielectric material can be improved. Along with this, it is possible to suppress the vicinity of the dielectric in the discharge space from becoming high temperature, and it is possible to improve the generation efficiency of ozone.

As mentioned above, according to the said aspect, the ozone generator which can improve the production | generation efficiency of ozone can be provided by improving the heat dissipation of a dielectric material.
In addition, the code | symbol in the parenthesis described in the means to solve a claim and a subject shows the correspondence with the specific means as described in embodiment mentioned later, and limits the technical scope of this invention. It is not a thing.

The top view of the ozone generator in Embodiment 1. FIG. The II-II sectional view taken on the line of FIG. The enlarged view of the exposure surface vicinity of FIG. FIG. 4 is a sectional view taken along the line IV-IV in FIG. 1. 1 is a partial cross-sectional perspective view of an ozone generator according to Embodiment 1. FIG. The diagram which showed the relationship between ratio (alpha) and the coefficient of variation Cv in an experiment example. The diagram which showed the relationship between ratio (alpha) and ozone generation efficiency in an experiment example.

(Embodiment 1)
Embodiment which concerns on embodiment of an ozone generator is described with reference to FIGS.
As shown in FIGS. 2 and 5, the ozone generator 1 of the present embodiment forms a pair with an inlet 210 into which a gas containing oxygen flows in and an outlet 220 into which the gas flowing in from the inlet 210 flows out. It has the electrode conductor 3 and the dielectric material 4 which makes a pair. The paired electrode conductors 3 are arranged to face each other in the internal space 5 between the inflow port 210 and the outflow port 220. The paired dielectrics 4 are arranged in close contact with each of the paired electrode conductors 3. The dielectrics 4 forming a pair are arranged to face each other with a discharge space 6 provided therebetween. As shown in FIGS. 2, 3, and 5, the electrode conductor 3 has an exposed surface 7 exposed from the dielectric 4 to the internal space 5.

  The ozone generator 1 can be used for purifying exhaust gas from an internal combustion engine. The ozone generator 1 applies a high-frequency alternating voltage between the pair of electrode conductors 3 while flowing a gas such as air containing oxygen in the discharge space 6 to cause a dielectric barrier discharge in the discharge space 6. generate. Thereby, the ozone generator 1 generates ozone from the gas flowing through the discharge space 6. Then, the generated ozone chemically changes harmful substances such as NOx in the exhaust gas to purify the exhaust gas.

  In the following, the flow direction of the gas flowing through the discharge space 6 is simply referred to as the flow direction X. Further, the facing direction of the paired dielectric bodies 4 is simply referred to as a facing direction Z. A direction perpendicular to both the distribution direction X and the facing direction Z is referred to as a lateral direction Y. Further, the terms “upstream side” and “downstream side” mean the upstream side and the downstream side of the gas flowing in the discharge space 6. In particular, in this embodiment, the direction parallel to the straight line connecting the inflow port 210 and the outflow port 220 is the flow direction X. In the flow direction X, the inlet 210 side is the upstream side, and the outlet 220 side is the downstream side.

  As shown in FIGS. 1, 2, and 5, the ozone generator 1 includes a main body 2, a gas inlet 21, and a gas outlet 22. The main body 2 includes an electrode conductor 3, a dielectric 4, and a later-described resin portion 20 that holds these. A discharge space 6 is formed in the main body 2. A gas introduction part 21 is connected to the upstream side of the main body part 2. The gas introduction unit 21 includes an inflow port 210. A gas outlet 22 is connected to the downstream side of the main body 2. The gas outlet 22 includes an outlet 220.

  As shown in FIG. 2 and FIG. 4, the main body 2 has a plurality of discharge spaces 6 arranged in parallel to each other. In the present embodiment, the even number of discharge spaces 6 are arranged in parallel. As shown in FIG. 4, a high-voltage electrode conductor 31 that is an electrode conductor 3 to which a high voltage is applied and a ground electrode conductor 32 that is a grounded electrode conductor 3 form a pair. The plurality of electrode conductors 3 are arranged side by side in the direction in which the plurality of discharge spaces 6 are arranged. Of the plurality of electrode conductors 3, the electrode conductors 3 disposed at both ends in the arrangement direction are ground electrode conductors 32.

  As shown in FIG. 2 and FIG. 4, in the present embodiment, the main body 2 has two discharge spaces 6 arranged in parallel in the facing direction Z. A pair of dielectrics 4 and a pair of electrode conductors 3 are arranged on both sides of each discharge space 6 in the facing direction Z. That is, in the present embodiment, the main body 2 has two pairs of electrode conductors 3 and two pairs of dielectrics 4.

  In the present embodiment, the main body 2 has three electrode conductors 3 arranged in parallel in the facing direction Z. As shown in FIGS. 1 to 5, each electrode conductor 3 has a rectangular plate shape having a thickness in the facing direction Z. As shown in FIGS. 2 to 4, the paired electrode conductors 3 have opposing surfaces 30 that face each other in the opposing direction Z.

  As shown in FIG. 4, among the three electrode conductors 3, the electrode conductor 3 disposed at the center in the facing direction Z is the high-voltage electrode conductor 31, and the electrode conductors 3 disposed at both ends in the facing direction Z are the ground electrode conductors. 32. The high-voltage electrode conductor 31 is paired with one ground electrode conductor 32 and is also paired with the other ground electrode conductor 32. The AC power supply 10 is electrically connected to the high voltage electrode conductor 31. The high-voltage electrode conductor 31 has a lead portion 12 drawn in the lateral direction Y, and is electrically connected to the AC power source 10 via the lead portion 12. The ground electrode conductor 32 is grounded.

  A dielectric 4 is disposed on the opposing surface 30 of each electrode conductor 3. That is, the electrode conductor 3 is arranged on the surface of the dielectric 4 opposite to the discharge space 6. The dielectric 4 has a rectangular sheet shape. The dielectric 4 is in surface contact with the entire surface of the facing surface 30 of the electrode conductor 3. The dielectric 4 is in close contact with the facing surface 30 of the electrode conductor 3 by, for example, an adhesive having thermal conductivity. Thereby, the dielectric 4 and the electrode conductor 3 are in thermal contact.

  The dielectric 4 is disposed on each of the facing surfaces 30 of the three electrode conductors 3. That is, the dielectric 4 is disposed on the opposing surfaces 30 of the two ground electrode conductors 32 and the opposing surfaces 30 on both sides of the high-voltage electrode conductor 31 in the opposing direction Z.

  As shown in FIGS. 2 to 4, spacers 11 are arranged at both ends in the lateral direction Y between the paired dielectric bodies 4. Thereby, the space | interval between the dielectric materials 4 which make a pair is ensured. As shown in FIG. 2, the spacer 11 is disposed in the flow direction X over a region from one end to the other end of the facing surface 30 of the electrode conductor 3. A discharge space 6 is formed between the dielectric 4 and the spacer 11 forming a pair. In the present embodiment, the discharge space 6 has a thin rectangular parallelepiped shape in the facing direction Z. The two discharge spaces 6 have the same outer shape.

  As shown in FIGS. 2, 4, and 5, the resin portion 20 of the main body portion 2 connects a pair of bottom wall portions 201 that face each other in the facing direction Z and ends in the lateral direction Y of the bottom wall portion 201. And a pair of side wall portions 202 facing each other in the lateral direction Y. The shape of the resin part 20 when viewed from the flow direction X is a rectangular ring that is long in the horizontal direction Y. In addition, the resin part 20 can also be comprised by assembling | attaching the components divided into 2 in the opposing direction Z, sealing between each other, for example.

  The resin portion 20 has a through hole 200 that penetrates in the facing direction Z at the center of each bottom wall portion 201. A ground electrode conductor 32 is fitted in each through hole 200. The surfaces of the two ground electrode conductors 32 opposite to the discharge space 6 are exposed outward from the resin portion 20. Although not shown, the space between the two ground electrode conductors 32 and the resin portion 20 is sealed.

  As shown in FIG. 1, FIG. 2, and FIG. 5, the inlet 210 of the gas introduction part 21 opens toward the upstream side in the flow direction X. Moreover, the gas introduction part 21 has the expansion flow path part 211 which a flow path expands as it goes downstream from the inflow port 210. As shown in FIG. In the present embodiment, the enlarged flow path part 211 of the gas introduction part 21 is formed so that the flow path is expanded in the lateral direction Y as it goes downstream. And the gas introduction part 21 and the main-body part 2 are mutually joined in the downstream edge in the gas introduction part 21, and the upstream edge in the resin part 20. FIG. The gas introduction part 21 and the resin part 20 are joined while sealing each other.

  An air pump (not shown) is connected to the inlet 210 of the gas inlet 21. The air pump is controlled by a control unit (not shown). The control unit controls the air pump so that the flow rate of the gas flowing into the internal space 5 of the ozone generator 1 can be adjusted. By controlling the air pump by the control unit, it is possible to easily suppress moisture remaining in the gas in the internal space 5.

  The outlet 220 of the gas outlet 22 opens toward the downstream side in the flow direction X. In addition, the gas lead-out part 22 has a reduced flow path part 221 in which the flow path is reduced toward the downstream side. In the present embodiment, the reduced flow path portion 221 is formed such that the flow path expands particularly in the lateral direction Y as it goes downstream. The gas outlet 22 and the main body 2 are joined to each other at the upstream edge of the gas outlet 22 and the downstream edge of the resin portion 20. The gas outlet part 22 and the resin part 20 are joined while sealing each other.

  As shown in FIG. 2, the space inside the gas inlet 21, the main body 2, and the gas outlet 22 is an internal space 5. The internal space 5 communicates in the flow direction X from the inlet 210 to the outlet 220. The gas introduced into the internal space 5 from the inflow port 210 is dispersed and flowed throughout the internal space 5 while spreading in the lateral direction Y, and is discharged from the outflow port 220. The gas introduced into the internal space 5 from the inflow port 210 is used for heat dissipation of the dielectric 4 through the electrode conductor 3 by striking the exposed surface 7, and flows into the discharge space 6 to be used for generating ozone. .

  As shown in FIGS. 2, 3, and 5, the exposed surface 7 of the electrode conductor 3 is directly exposed to the internal space 5. In other words, the dielectric 4 is not disposed on the exposed surface 7. The exposed surface 7 is formed on each of the three electrode conductors 3. In the present embodiment, the exposed surface 7 faces the distribution direction X. As shown in FIG. 3, the electrode conductor 3 has an upstream exposed surface 71 that is an exposed surface 7 facing the upstream side in the flow direction X. The upstream exposed surface 71 is formed on the upstream end surface of the electrode conductor 3. As shown in FIG. 2, the electrode conductor 3 further includes a downstream exposed surface 72 that is an exposed surface 7 facing the downstream side in the flow direction X. The downstream exposed surface 72 is formed on the end surface of the electrode conductor 3 on the downstream side in the flow direction X.

  As shown in FIGS. 2, 3, and 5, the dielectric 4 has a protrusion 41 that protrudes in the flow direction X from the exposed surface 7 of the electrode conductor 3. In the present embodiment, the two dielectrics 4 arranged on both surfaces of the ground electrode conductor 32 in the facing direction Z have protrusions 41. The protrusion 41 protrudes beyond the exposed surface 7 to the outside of the electrode conductor 3 in the flow direction X. As shown in FIG. 3, the dielectric 4 has an upstream projecting portion 411 that is a projecting portion 41 projecting upstream from the upstream exposed surface 71 in the flow direction X. That is, the upstream protruding portion 411 protrudes further upstream than the upstream exposed surface 71. Further, as shown in FIG. 2, the dielectric 4 further includes a downstream protrusion 412 that is a protrusion 41 that protrudes further downstream than the downstream exposed surface 72. The two dielectrics 4 arranged on both surfaces of the ground electrode conductor 32 have the same protruding amount of the upstream protruding portion 411 and the same protruding amount of the downstream protruding portion 412.

  The electrode conductor 3 and the dielectric 4 are made of a material having ozone resistance. For example, the electrode conductor 3 is made of aluminum, copper, or the like, which is a material having ozone resistance. The dielectric 4 is made of alumina, zirconia, titania or the like, which is a material having ozone resistance.

Next, the effect of this embodiment is demonstrated.
In the ozone generator 1, a pair of dielectrics 4 are arranged in close contact with each of the pair of electrode conductors 3. Therefore, it is easy to transfer the heat of the dielectric 4 to the electrode conductor 3. The electrode conductor 3 has an exposed surface 7. Thereby, the heat transferred from the dielectric 4 to the electrode conductor 3 can be easily radiated to the gas flowing into the internal space 5 from the inlet 210. That is, in the ozone generator 1, the heat of the dielectric 4 can be easily radiated to the gas via the electrode conductor 3. Therefore, in the ozone generator 1, not only the heat of the dielectric 4 is easily radiated from the discharge space 6 side but also from the electrode conductor 3 side. Thereby, the heat dissipation of the dielectric 4 can be improved. Along with this, it is possible to suppress the vicinity of the dielectric 4 in the discharge space 6 from becoming high temperature, and it is possible to improve the generation efficiency of ozone.

  The electrode conductor 3 has an upstream exposed surface 71. Therefore, the gas flowing in from the inlet 210 directly hits the electrode conductor 3. Therefore, the heat dissipation from the electrode conductor 3 to the gas can be further improved. Accordingly, the heat of the dielectric 4 can be further radiated from the electrode conductor 3 side. As a result, the heat dissipation of the dielectric 4 can be further improved.

  The electrode conductor 3 is disposed on the surface of the dielectric 4 opposite to the discharge space 6. Therefore, it is easy to suppress the electrode conductor 3 from coming into direct contact with the ozone generated in the discharge space 6.

  Further, the dielectric 4 has a protruding portion 41 that protrudes in the flow direction X from the exposed surface 7 of the electrode conductor 3. Therefore, an insulation distance between the discharge space 6 and the exposed surface 7 can be earned. Therefore, the discharge generated in the discharge space 6 can be prevented from reaching the exposed surface 7. Therefore, the ozone generator 1 with high electrical reliability can be obtained.

  In addition, the dielectric 4 has an upstream protrusion 411. Therefore, the upstream-side protruding portion 411 can disturb the flow of the gas that has flowed in the vicinity of the exposed surface 7 in the internal space 5. Thereby, it is possible to prevent gas from staying in the vicinity of the exposed surface 7 and increasing the temperature in the vicinity of the exposed surface 7. As a result, the heat dissipation from the electrode conductor 3 to the gas can be further improved.

  In addition, among the plurality of electrode conductors 3, the electrode conductors 3 disposed at both ends in the arrangement direction are ground electrode conductors 32. That is, the plurality of electrode conductors 3 are not provided with the high-voltage electrode conductors 31 at both ends in the arrangement direction. Therefore, it is easy to ensure electrical insulation between the ozone generator 1 and the outside thereof, and the ozone generator 1 with high electrical reliability can be obtained.

  The electrode conductor 3 and the dielectric 4 are made of a material having ozone resistance. Therefore, corrosion of the electrode conductor 3 and the dielectric 4 due to ozone can be suppressed.

  As described above, according to the present embodiment, it is possible to provide an ozone generator that can improve the generation efficiency of ozone by improving the heat dissipation of the dielectric.

(Experimental example)
This example is an example of evaluating the influence on the flow velocity distribution of gas flowing in the discharge space 6 and the ozone generation efficiency when the thickness and width of the discharge space 6 are variously changed in the ozone generator 1 of the first embodiment. It is. The flow velocity distribution was derived by simulation, and the ozone generation efficiency was derived by actual machine tests.

The ozone generators to be evaluated were the ten samples 1 to 10 in which the thickness t and width w of the discharge space 6 were variously changed while the basic structure was the same as that of the ozone generator 1 of the first embodiment. . Samples 1 to 10 have different thickness t and width w while having the same channel cross-sectional area, which is the product of thickness t and width w. That is, the cross-sectional area of the discharge space 6 in each sample is 150 mm ² . Here, as shown in FIG. 4, the thickness t of the discharge space 6 is a dimension in the facing direction Z in one discharge space 6. The width w of the discharge space 6 is a dimension in the horizontal direction Y in one discharge space 6.

  In each sample, the dimension L of the discharge space 6 in the flow direction X was 100 mm. Table 1 below shows the value of α = w / t, which is the ratio of width w to thickness t (mm), width w (mm), and thickness t of discharge space 6 in each sample. .

  Moreover, the flow velocity distribution is evaluated as follows. In each sample, it was assumed that an atmosphere with a flow velocity of 15 m / s was passed through each discharge space 6. And the flow velocity was calculated | required in 99 measurement points in each discharge space 6. FIG. The 99 measurement points are the positions of the grid points of the grid in the discharge space 6 at the center position in the facing direction Z, 11 rows at equal intervals in the flow direction X, and 9 columns at equal intervals in the horizontal direction Y. Was set to be. Then, the average value μ and the standard deviation σ were calculated from the value of the flow velocity measured at each measurement point, and the variation coefficient Cv = σ / μ was obtained. The variation coefficient Cv is an index for evaluating the variation in flow velocity at each measurement point in the discharge space 6. It can be said that the smaller the value of the coefficient of variation Cv, the more uniform the flow velocity distribution of the gas flowing in the discharge space 6.

In an actual machine test of ozone generation efficiency, an alternating voltage with a maximum voltage of 20 kV was applied at a maximum frequency of 23 kHz. Then, the ozone concentration (g / Nm ³ ) was measured at the outlet 220 of each sample, and the ozone generation efficiency (g / kWh) was calculated. The results are shown in Table 1, FIG. 6, and FIG.

  From Table 1 and FIG. 6, it can be seen that when the ratio α = w / t is 100 or more, the coefficient of variation Cv is significantly reduced. That is, by setting the ratio α to 100 or more, the flow velocity distribution of the gas flowing in the discharge space 6 can be made uniform. Therefore, when the ratio α is 100 or more, it is possible to suppress the occurrence of unevenness in the gas flow in the discharge space 6. As a result, by setting the ratio α to 100 or more, it is possible to further suppress the increase in the temperature of the discharge space 6. It can also be seen that the coefficient of variation Cv can be made 0.2 or less by setting the ratio α to 100 or more. From Table 1 and FIG. 7, it can be seen that the ozone production efficiency can be significantly increased by setting the ratio α to 100 or more and the coefficient of variation Cv to 0.2 or less. Further, the upper limit of the ratio α is preferably set to 200, for example, from the viewpoint of increasing the size of the ozone generator 1 and suppressing the flow resistance.

  The present invention is not limited to the above embodiment, and can be applied to various embodiments without departing from the spirit of the present invention. For example, in the above-described embodiment, an example of an ozone generator having two pairs of electrode conductors and dielectrics has been shown. However, for example, one pair of electrode conductors and dielectrics may be used. Three or more pairs may be provided.

DESCRIPTION OF SYMBOLS 1 Ozone generator 210 Inflow port 220 Outflow port 3 Electrode conductor 4 Dielectric 5 Internal space 6 Discharge space 7 Exposed surface

Claims (9)

An inlet (210) into which a gas containing oxygen flows;
An outlet (220) through which the gas flowing in from the inlet flows out;
A pair of electrode conductors (3) arranged to face each other in the internal space (5) between the inlet and the outlet;
A pair of dielectrics (4) arranged in close contact with each of the pair of electrode conductors;
The paired dielectrics are arranged to face each other with a discharge space (6) provided between them.
The electrode conductors may possess an exposed surface that is exposed to the internal space from the dielectric (7),
The electrode conductor is disposed on the surface of the dielectric opposite to the discharge space,
The exposed surface faces the flow direction of the gas flowing through the discharge space,
The said dielectric is an ozone generator (1) which has the protrusion part (41) which protruded in the distribution direction of the said gas which flows through the said discharge space rather than the said exposed surface in the said electrode conductor . The electrode conductor has an upstream exposed surface (71) which is the exposed surface facing the upstream side in the flow direction of the gas flowing through the discharge space, and the dielectric is more than the upstream exposed surface. The ozone generator of Claim 1 which has an upstream protrusion part (411) which is the said protrusion part protruded to the upstream of the distribution direction . An inlet (210) into which a gas containing oxygen flows;
An outlet (220) through which the gas flowing in from the inlet flows out;
A pair of electrode conductors (3) arranged to face each other in the internal space (5) between the inlet and the outlet;
A pair of dielectrics (4) arranged in close contact with each of the pair of electrode conductors;
The paired dielectrics are arranged to face each other with a discharge space (6) provided between them.
The electrode conductor has an exposed surface (7) exposed from the dielectric to the internal space,
A plurality of the discharge spaces are arranged in parallel with each other,
The high-voltage electrode conductor (31), which is the electrode conductor to which a high voltage is applied, and the ground electrode conductor (32), which is the grounded electrode conductor, make a pair,
The plurality of electrode conductors are arranged side by side in the direction in which the plurality of discharge spaces are arranged,
The ozone generator (1) , wherein the electrode conductors arranged at both ends in the arrangement direction among the plurality of electrode conductors are the ground electrode conductors . The ozone generator according to claim 3, wherein the electrode conductor is disposed on a surface of the dielectric opposite to the discharge space . The exposed surface faces the flow direction of the gas flowing through the discharge space, and the dielectric protrudes in the flow direction of the gas flowing through the discharge space from the exposed surface of the electrode conductor. The ozone generator of Claim 4 which has (41) . The ozone generator according to any one of claims 3 to 5 , wherein the even number of discharge spaces are arranged in parallel . The electrode conductor, the exposed surface at which the upstream-side exposed surface facing upstream in the flow direction of the gas flowing through the discharge space (X) having a (71), any one of the claims 1,3～6 The ozone generator according to item .   The thickness of the discharge space is t, and the width of the discharge space is w, and the ratio of w to t, α = w / t, is 100 or more, according to claim 1. The ozone generator as described.   The ozone generator according to any one of claims 1 to 8, wherein the electrode conductor and the dielectric are made of a material having ozone resistance.

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