JP6591282B2 - Laser ultrasonic inspection method, bonding method, laser ultrasonic inspection apparatus, and bonding apparatus - Google Patents

Description

  The present invention relates to a laser ultrasonic inspection method, a bonding method, a laser ultrasonic inspection apparatus, and a bonding apparatus.

  For example, when manufacturing large metal structures by joining by multi-layer welding, defects that occur in welds are detected during construction, and repairs are made on the spot, so that a return occurs when defects are found after construction. Can be prevented in advance.

  When joining metal structures by welding, it is conceivable to apply a laser ultrasonic method capable of non-contact inspection of high-temperature objects as a method for monitoring defects occurring in the weld during construction. . In this method, a defect is detected by using a laser (transmission laser) for exciting an ultrasonic wave on an object, a laser (receiving laser) for measuring the generated ultrasonic wave, and an interferometer (see, for example, Patent Document 1). ).

Japanese Patent No. 5651533

  In order to increase the heat resistance of a metal structure used in a high-temperature environment, a Ni-based alloy may be used for a base material to be welded or a weld metal. However, Ni-based alloys tend to have non-uniform internal structures, such as the formation of columnar crystals in the structure, and if crystal grains are present, ultrasonic waves excited by laser irradiation are scattered at the grain boundaries of the crystal grains. The strength of the signal finally obtained is lowered. Therefore, there is a problem that it becomes difficult to detect a defect or evaluate a defect size by a laser ultrasonic method.

  In addition, a case where a material having the same composition is used as a base material for welding a metal structure (co-material welding) and a case where different materials such as a low alloy steel and a Ni-based alloy are used (different material welding) are conceivable. When dissimilar material welding is performed, there is a possibility that the propagation characteristics of ultrasonic waves are different for each base material. For this reason, when the ultrasonic wave generated by the transmission laser is received by the reception laser, the measurement result varies depending on which base material side receives the ultrasonic wave, and the defect detectability and sizing accuracy may be reduced.

  The present invention was made in response to the above-described conventional circumstances, and when performing dissimilar material welding, a laser ultrasonic inspection method, a bonding method, a laser ultrasonic inspection apparatus, which can detect defects reliably and accurately, And it aims at providing a joining device.

In one aspect of the laser ultrasonic inspection method according to the embodiment of the present invention, ultrasonic waves are generated by irradiating a welding portion between a first member and a second member made of a material different from the first member with a transmission laser beam. An ultrasonic excitation step for exciting the first member, a first reception step for receiving the received laser beam irradiated on the first member to obtain a first received signal of the ultrasonic wave, and a received laser beam irradiated on the second member A second receiving step of receiving light to obtain a second received signal of the ultrasonic wave, and a signal analyzing step of detecting a defect inside the weld from the first received signal and the second received signal. The second receiving step is performed after the first receiving step .
In one aspect of the laser ultrasonic inspection method according to the embodiment of the present invention, ultrasonic waves are generated by irradiating a welding portion between a first member and a second member made of a material different from the first member with a transmission laser beam. An ultrasonic excitation step for exciting the first member, a first reception step for receiving the received laser beam irradiated on the first member to obtain a first received signal of the ultrasonic wave, and a received laser beam irradiated on the second member A second receiving step of receiving light to obtain a second received signal of the ultrasonic wave, and a signal analyzing step of detecting a defect inside the weld from the first received signal and the second received signal. The first reception step and the second reception step are performed simultaneously.
In one aspect of the laser ultrasonic inspection method according to the embodiment of the present invention, ultrasonic waves are generated by irradiating a welding portion between a first member and a second member made of a material different from the first member with a transmission laser beam. An ultrasonic excitation step for exciting the first member, a first reception step for receiving the received laser beam irradiated on the first member to obtain a first received signal of the ultrasonic wave, and a received laser beam irradiated on the second member A second receiving step of receiving light to obtain a second received signal of the ultrasonic wave, and a signal analyzing step of detecting a defect inside the weld from the first received signal and the second received signal. In the signal analysis step, the data of the signal strength and the signal-to-noise ratio of the first reception signal and the second reception signal are compared to determine the size of the defect inside the weld and / or the weld. The position of the internal defect is obtained.

One aspect of the joining method according to the embodiment of the present invention includes a step of welding a first member and a second member made of a material different from the first member at a welded portion, and a laser beam transmitted to the welded portion. An ultrasonic excitation process for exciting the ultrasonic wave by irradiating the first member, a first reception process for receiving the received laser beam irradiated on the first member and obtaining a first received signal of the ultrasonic wave, and a second member A defect inside the weld is detected from the second receiving step of receiving the irradiated received laser beam to obtain the second received signal of the ultrasonic wave, the first received signal, and the second received signal. A signal analysis step , wherein the second reception step is performed after the first reception step .
One aspect of the joining method according to the embodiment of the present invention includes a step of welding a first member and a second member made of a material different from the first member at a welded portion, and a laser beam transmitted to the welded portion. An ultrasonic excitation process for exciting the ultrasonic wave by irradiating the first member, a first reception process for receiving the received laser beam irradiated on the first member and obtaining a first received signal of the ultrasonic wave, and a second member A defect inside the weld is detected from the second receiving step of receiving the irradiated received laser beam to obtain the second received signal of the ultrasonic wave, the first received signal, and the second received signal. And a signal analysis step , wherein the first reception step and the second reception step are performed simultaneously .
One aspect of the joining method according to the embodiment of the present invention includes a step of welding a first member and a second member made of a material different from the first member at a welded portion, and a laser beam transmitted to the welded portion. An ultrasonic excitation process for exciting the ultrasonic wave by irradiating the first member, a first reception process for receiving the received laser beam irradiated on the first member and obtaining a first received signal of the ultrasonic wave, and a second member A defect inside the weld is detected from the second receiving step of receiving the irradiated received laser beam to obtain the second received signal of the ultrasonic wave, the first received signal, and the second received signal. A signal analysis process ,
In the signal analysis step, the data of the signal strength and the signal-to-noise ratio of the first reception signal and the second reception signal are compared to determine the size of the defect inside the weld and / or the inside of the weld. The position of the defect is obtained .

One aspect of a laser ultrasonic inspection apparatus according to an embodiment of the present invention is directed to ultrasonic waves by irradiating a welded portion between a first member and a second member made of a material different from the first member with a transmission laser beam. A transmission laser mechanism that excites the first member, a reception laser mechanism that receives the reception laser light applied to the first member and the second member, and interference measurement of the reception laser light received by the reception laser mechanism to measure the ultrasonic wave A reception interferometer for obtaining a reception signal, a first received signal from the first member, and a signal strength and a signal-to-noise ratio data of the second received signal from the second member obtained by the reception interferometer. In comparison, the present invention is characterized in that a signal analysis mechanism and a signal analysis mechanism for obtaining the size of the defect inside the weld and / or the position of the defect inside the weld are provided.
One aspect of a laser ultrasonic inspection apparatus according to an embodiment of the present invention is directed to ultrasonic waves by irradiating a welded portion between a first member and a second member made of a material different from the first member with a transmission laser beam. A transmission laser mechanism that excites the first member, a reception laser mechanism that receives the reception laser light applied to the first member and the second member, and interference measurement of the reception laser light received by the reception laser mechanism to measure the ultrasonic wave A reception interferometer for obtaining a reception signal, a first received signal from the first member, and a signal strength and a signal-to-noise ratio data of the second received signal from the second member obtained by the reception interferometer. In comparison, a signal analysis mechanism and a signal analysis mechanism for obtaining a size of a defect in the weld and / or a position of the defect in the weld are provided, and the reception laser mechanism is provided in the first member. Irradiated receiving laser A first position for receiving, characterized in that it is movable in between the second position for receiving the reception laser beam irradiated to the second member.
One aspect of a laser ultrasonic inspection apparatus according to an embodiment of the present invention is directed to ultrasonic waves by irradiating a welded portion between a first member and a second member made of a material different from the first member with a transmission laser beam. A transmission laser mechanism that excites the first member, a reception laser mechanism that receives the reception laser light applied to the first member and the second member, and interference measurement of the reception laser light received by the reception laser mechanism to measure the ultrasonic wave The received interferometer for obtaining the received signal, the first received signal from the first member obtained by the received interferometer, and the signal strength and signal noise ratio data of the second received signal from the second member And a signal analysis mechanism and a signal analysis mechanism for determining the size of the defect inside the weld and / or the position of the defect inside the weld, and the receiving laser mechanism includes the first member The receiving laser irradiated on A first receiving optical mechanism for receiving laser light, characterized in that it comprises a second receiving optical mechanism for receiving said reception laser beam irradiated to the second member.

One aspect of a joining device according to an embodiment of the present invention is a welding device that welds a first member and a second member made of a material different from the first member at a welded portion, and transmits the welded portion to the welded portion. and transmitting the laser mechanism by irradiating a laser beam to excite the ultrasound, said a receiving laser mechanism for receiving the received laser light irradiated to the first member and the second member, said receiving laser is received by the receiving laser mechanism A reception interferometer that obtains an ultrasonic reception signal by interferometric measurement of light, a first reception signal from the first member, and a second reception signal from the second member, obtained by the reception interferometer . by comparing the data of the signal strength and signal-to-noise ratio, characterized by comprising a signal analysis system for determining the position of the internal defect size and / or the weld defects inside of the weld.

  ADVANTAGE OF THE INVENTION According to this invention, when performing dissimilar material welding, the laser ultrasonic inspection method, joining method, laser ultrasonic inspection apparatus, and joining apparatus which can detect a defect reliably and accurately can be provided.

The figure which shows schematic structure of the laser ultrasonic inspection apparatus which concerns on 1st Embodiment. The figure which shows schematic structure of the laser ultrasonic inspection apparatus which concerns on 2nd Embodiment. The figure which shows schematic structure of the laser ultrasonic inspection apparatus which concerns on 3rd Embodiment. The flowchart for demonstrating the process which concerns on embodiment.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a diagram showing a schematic configuration of a laser ultrasonic inspection apparatus 100 according to the first embodiment. In the present embodiment, a case where a Ni-base alloy member (base material) 112 and a low alloy steel member (base material) 113 are joined at the welded portion 111 will be described in the case of dissimilar material welding. In this embodiment, the defect which generate | occur | produces in the welding part 111 is monitored by a laser ultrasonic method, and when the defect which needs a repair is detected, welding is interrupted and a defect is repaired. As a result, it is possible to prevent reversal that occurs when a defect is found after construction.

  As shown in FIG. 1, the Ni-based alloy member 112 and the low alloy steel member 113 are formed in a substantially cylindrical shape. And these edge parts are faced | matched and the groove welding which joins by the multilayer welding in the welding part 111 is performed. Welding is performed while relatively rotating the Ni-based alloy member 112 and the low alloy steel member 113 and a welding machine (not shown). Below, the case where it welds, rotating the Ni-base alloy member 112 and the low alloy steel member 113 is demonstrated. The member obtained by welding in this way can be used, for example, as a turbine rotor or the like. In the case of a turbine rotor, the diameter is, for example, about 50 cm to 100 cm, and for example, multi-layer welding is performed while rotating for several tens of minutes.

  As shown in FIG. 1, the laser ultrasonic inspection apparatus 100 includes a transmission laser mechanism 115 for exciting the ultrasonic waves by irradiating the inspection target with the transmission laser light 102. The transmission laser mechanism 115 is connected to the transmission laser light source 101 via the transmission laser light source 101 and the optical fiber 120, and transmits the transmission laser light 102 to a predetermined position to be inspected (in this embodiment, a welded portion 111 (weld bead)). And an optical mechanism 103 for transmission.

  The laser ultrasonic inspection apparatus 100 irradiates a predetermined position of the inspection target with the received laser beam 105 for receiving the excited ultrasonic wave, and receives and returns the reflected laser beam 105 (returned) that is reflected and scattered from the inspection target. A receiving laser mechanism 114 for receiving light). The reception laser mechanism 114 is configured to be able to irradiate the reception laser beam 105 to both the Ni-based alloy member 112 and the low alloy steel member 113, and is configured to detect ultrasonic waves from any of them. ing.

  Further, the laser ultrasonic inspection apparatus 100 records and analyzes the received interferometer 108 that detects ultrasonic waves from the received laser light 105 reflected and scattered from the inspection object and the data of the detected ultrasonic signals. A signal analysis device 109 and an imaging device 110 that images defects inside the inspection object from the analysis result of the signal analysis device 109 are provided.

As a laser to be used for the transmission laser beam 102 and the reception laser beam 105, for example, an Nd: YAG laser, a CO ₂ laser, an excimer laser, or the like can be used depending on the inspection object. Also good.

  As the receiving interferometer, for example, a Michelson interferometer, a homodyne interferometer, a heterodyne interferometer, a Fizeau interferometer, a Mach-Zehnder interferometer, a Fabry-Perot interferometer, a photorefractive interferometer, etc. can be used. Other than these may be used.

  When inspecting the welded part 111 using the laser ultrasonic inspection apparatus 100 having the above-described configuration, first, the transmission laser mechanism is applied so that the transmission laser beam 102 is irradiated to a predetermined position (for example, the welded part 111) to be inspected. 115 is adjusted and the transmission laser beam 102 is irradiated to excite ultrasonic waves.

  At the same time, the reception laser mechanism 114 is adjusted so that the reception laser beam 105 is irradiated to a predetermined position to be inspected, and the reception laser beam 105 is irradiated. In the present embodiment, the received laser beam 105 is applied to the Ni-based alloy member 112 and the low alloy steel member 113.

  An ultrasonic wave is generated by irradiation with the transmission laser beam 102, and an ultrasonic signal is acquired using the reception laser beam 105 and the reception interferometer 108. Examples of ultrasonic waves generated by irradiation with the transmission laser beam 102 include surface waves, longitudinal waves, transverse waves, and mode conversion waves. In the present embodiment, a case where an ultrasonic longitudinal wave is used for defect detection during construction will be described, but a surface wave, a transverse wave, and a mode conversion wave may be used.

  When there is a defect in the region where the longitudinal wave of the ultrasonic wave propagates, the echo reflected from the defect is received by the reception laser beam 105. When the echo reflected from the defect reaches the irradiation point of the received laser beam 105, the received laser beam 105 is subjected to amplitude modulation, phase modulation, a change in reflection angle, etc. Includes an ultrasonic signal. The reception laser beam 105 (return light) including the ultrasonic signal is received, and the optical signal including the ultrasonic signal is converted into an electric signal by the reception interferometer 108. In welding monitoring by the conventional laser ultrasonic method, when groove welding of two members is performed, an echo is received only by one member (base material). However, in this embodiment, echoes are received by the received laser beam 105 at the Ni-based alloy member 112 and the low alloy steel member 113 on both sides of the welded portion 111. These signals are collected by the signal analysis device 109 and analyzed to detect a defect, and the imaging device 110 forms an image. In the signal analyzer 109, for example, the signal-to-noise ratio can be improved by performing a superposition process on these received signals.

  The evaluation of the defect size of the defect generated in the welded part 111 compares the ultrasonic signal intensity obtained from the defect inside the welded part 111 with the ultrasonic signal intensity obtained from the artificial defect applied to the standard specimen. Can be done. In this case, since the low alloy has a higher ultrasonic transmission than the Ni-based alloy, the echo reception on the low alloy steel member 113 side can provide a higher signal strength, which is advantageous in defect detection. .

  On the other hand, on the Ni-based alloy member 112 side, the ultrasonic transmission is low, but the signal-to-noise ratio at a specific receiving position may be improved due to the influence of the crystal grain orientation in the Ni-based alloy. . For this reason, by combining the signal strength and signal noise ratio in the reception result on the low alloy steel member 113 side with the information on the signal strength and signal noise ratio in the reception result on the Ni base alloy member 112 side, Compared with the case where reception is performed only on one side, it is possible to improve defect detectability, defect detection position, and defect size quantitativeness.

  For example, a defect is detected from the reception signal on the low alloy steel member 113 side, and the position of the defect is also confirmed from the reception result on the Ni base alloy member 112 side. Furthermore, when evaluating the defect size, it is possible to judge by combining information on the received signal strength from the defect on the low alloy steel member 113 side and signal noise ratio information on the Ni base alloy member 112 side, etc. It is.

  In addition, when the Ni-based alloy member 112 and the low-alloy steel member 113 are irradiated with the reception laser beam 105, the received laser beam 105 reflected and scattered on the surface and the intensity of the return light are different. The signal intensity may be corrected by the intensity of the received laser beam 105 received. It is also possible to correct the signal intensity from the defect by the ultrasonic signal intensity reflected from the bottom surface of each member.

  Next, a laser ultrasonic inspection apparatus 200 according to the second embodiment will be described with reference to FIG.

  As shown in FIG. 2, in the laser ultrasonic inspection apparatus 200, a reception laser mechanism 114 includes a reception laser light source 104, a reception optical mechanism 106 connected to the reception laser light source 104 via an optical fiber 122, and a reception And a moving mechanism 107 that moves the optical mechanism 106. The receiving optical mechanism 106 includes an optical system for condensing and irradiating the received laser beam 105 and an optical system for receiving and collecting the received laser beam 105 returning from the inspection target. The moving mechanism 107 includes a position detecting mechanism such as an encoder that detects the position of the receiving optical mechanism 106, and the receiving optical mechanism 106 can be moved to a desired position at a desired speed by a control device (not shown). It is configured as follows.

  Then, the receiving optical mechanism 106 is moved to a predetermined position above the Ni-based alloy member 112 and a predetermined position above the low alloy steel member 113, and the receiving laser beam 105 is irradiated and received to thereby receive Ni. Received signals from both the base alloy member 112 and the low alloy steel member 113 can be obtained. Since the other parts are configured in the same manner as the laser ultrasonic inspection apparatus 100 shown in FIG. 1, the corresponding parts are denoted by the same reference numerals, and redundant description is omitted.

  In the present embodiment, for example, the receiving optical mechanism 106 is scanned at a constant period by the moving mechanism 107, and the ultrasonic waves are straddled across the welded portion 111 on the Ni-based alloy member 112 side and the low-alloy steel member 113 side. Is detected. In this case, since reception signals from a plurality of irradiation points can be obtained when scanning the reception optical mechanism 106, the signal-to-noise ratio can be improved by performing superposition processing on the obtained reception signals. it can.

  When the receiving optical mechanism 106 is scanned at a constant period, for example, one period is scanned for about 10 seconds. On the other hand, the rotation period of the Ni-based alloy member 112 and the low alloy steel member 113 is, for example, several tens of minutes / 1 rotation. As a result, the amount of rotation during one scanning period becomes small, so that the reception signal obtained by one scanning is the same in the circumferential direction of the Ni-based alloy member 112 and the low alloy steel member 113. It can be handled as an obtained signal.

  In addition, instead of scanning the receiving optical mechanism 106 to the Ni-based alloy member 112 side and the low-alloy steel member 113 side at regular intervals, for example, normally, ultrasonic waves are emitted from the low-alloy steel member 113 side. Only when a defect is detected, the receiving optical mechanism 106 may be moved to detect ultrasonic waves on the Ni-based alloy member 112 side.

  In the laser ultrasonic inspection apparatus 200 of the present embodiment, by using the moving mechanism 107, the Ni-based alloy member 112 and the low-alloy steel member 113 are formed by one receiving laser light source 104 and one receiving optical mechanism 106. Received signals from both sides can be obtained.

  Next, a laser ultrasonic inspection apparatus 300 according to the third embodiment will be described with reference to FIG.

  As shown in FIG. 3, in the laser ultrasonic inspection apparatus 300 of the third embodiment, the reception laser mechanism 114 for irradiating the reception laser beam 105 includes two reception laser light sources 104a and 104b and these reception laser light sources. 104a and 104b are provided with two receiving optical mechanisms 106a and 106b connected via an optical fiber 122. As for the interferometer, the reception interferometer 108a connected to the reception optical mechanism 106a via the optical fiber 121 and the reception interferometer 108b connected to the reception optical mechanism 106b via the optical fiber 121 are also provided. It has. As the light source of the reception laser beam 105, the laser beam from one reception laser source may be branched and incident on the two reception optical mechanisms 106a and 106b.

  The receiving laser light source 104a, the receiving optical mechanism 106a, and the receiving interferometer 108a irradiate the low alloy steel member 113 with the receiving laser beam 105 to obtain an echo reception signal on the low alloy steel member 113 side. On the other hand, the receiving laser light source 104b, the receiving optical mechanism 106b, and the receiving interferometer 108b irradiate the Ni-based alloy member 112 with the receiving laser beam 105 to obtain an echo reception signal on the Ni-based alloy member 112 side.

  The transmission laser beam 102 is applied to the welded portion 111 as in the first embodiment. Signals from the reception interferometers 108a and 108b are collected and analyzed by the signal analysis device 109, and then input to the imaging device 110 and shown as a flaw detection image. Since the other parts are the same as those in the first embodiment described above, the same reference numerals are assigned to the corresponding parts, and duplicate descriptions are omitted.

  Also in the third embodiment, as described in the first embodiment, for example, a defect is detected by the reception signal of the low alloy steel member 113, and the position of the defect is received on the Ni base alloy member 112 side. Confirmation and other processing are also performed.

  In addition, when quantifying the defect size, it is determined by combining information on the received signal intensity from the defect on the low alloy steel member 113 side and signal noise ratio information obtained on the Ni base alloy member 112 side. Can do.

  Next, referring to FIG. 4, normal monitoring is performed by acquiring a reception signal from one member, and when a defect is detected by monitoring in this one member, the reception signal is received by the other member. A process in the case of acquisition will be described.

  The normal monitoring (301) shown in FIG. 4 is carried out on the side of the low alloy steel member 113 in the case shown in FIG. . When the signal intensity obtained during monitoring exceeds a predetermined threshold value, it is regarded as defect detection (302), and temporary welding is stopped (303).

  Next, in the receiving laser mechanism 114, when a mechanical change is required to receive ultrasonic waves on the Ni-based alloy member 112 side, for example, in the case of the laser ultrasonic inspection apparatus 200 of the second embodiment Is changed to a state in which ultrasonic waves can be received on the Ni-based alloy member 112 side. At this time, the receiving optical mechanism 106 may be moved using the moving mechanism 107 as shown in the second embodiment, or the receiving optical mechanism 106 may be manually re-installed. Then, verification measurement is performed on the Ni-based alloy member 112 side for verification in the region where the defect is detected by reception on the low alloy steel member 113 side (304).

  Next, defect evaluation for evaluating the position and size of the defect is performed (305). In this case, as described above, the received signal intensity and signal noise ratio information from the defect obtained on the low alloy steel member 113 side, and the received signal intensity and signal noise obtained on the Ni base alloy member 112 side are obtained. It is possible to judge by combining the ratio information.

  It is judged from the result of the defect evaluation above whether or not a defect needs to be repaired (306). If repair is necessary, repair is performed (307), and then welding is resumed (308). On the other hand, if the defect need not be repaired, welding is resumed (308).

  In the above embodiments, the case of dissimilar material welding of low alloy steel and Ni base alloy has been described. However, in the case of welding of two types of low alloy steels having different compositions or two types of Ni base alloys having different compositions. Can be applied in the same manner. Moreover, although the defect inspection of the welding part during welding construction was demonstrated as an example, it is good also considering the structure after welding as a test object.

  As mentioned above, although some embodiment of this invention was described, these embodiment is shown as an example and is not intending limiting the range of invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 100,200,300 ... Laser ultrasonic inspection apparatus, 101 ... Transmission laser light source, 102 ... Transmission laser light, 103 ... Transmission optical mechanism, 104 ... Reception laser light source, 105 ... Reception laser light, 106 ...... Receiving optical mechanism, 107 ....... moving mechanism, 108 ....... reception interferometer, 109... Signal analyzing device, 110 .... imaging device, 111. ... Low-alloy steel members, 114 ... Reception laser mechanism, 115 ... Transmission laser mechanism.

Claims (10)

An ultrasonic excitation step of exciting the ultrasonic wave by irradiating a transmission laser beam to a welded portion between the first member and the second member made of a material different from the first member;
A first receiving step of receiving a reception laser beam applied to the first member to obtain a first reception signal of the ultrasonic wave;
A second receiving step of receiving a reception laser beam irradiated on the second member and obtaining a second reception signal of the ultrasonic wave;
A signal analyzing step of detecting a defect inside the weld from the first received signal and the second received signal ,
The second receiving step is performed after the first receiving step.
Laser ultrasonic inspection method characterized by the above. An ultrasonic excitation step of exciting the ultrasonic wave by irradiating a transmission laser beam to a welded portion between the first member and the second member made of a material different from the first member;
A first receiving step of receiving a reception laser beam applied to the first member to obtain a first reception signal of the ultrasonic wave;
A second receiving step of receiving a reception laser beam irradiated on the second member and obtaining a second reception signal of the ultrasonic wave;
A signal analysis step of detecting defects inside the weld from the first received signal and the second received signal;
Comprising
Performing the first receiving step and the second receiving step simultaneously;
Features and, Relais over The ultrasonic inspection method that. An ultrasonic excitation step of exciting the ultrasonic wave by irradiating a transmission laser beam to a welded portion between the first member and the second member made of a material different from the first member;
A first receiving step of receiving a reception laser beam applied to the first member to obtain a first reception signal of the ultrasonic wave;
A second receiving step of receiving a reception laser beam irradiated on the second member and obtaining a second reception signal of the ultrasonic wave;
A signal analysis step of detecting defects inside the weld from the first received signal and the second received signal;
Comprising
In the signal analysis step, the data of the signal strength and the signal-to-noise ratio of the first reception signal and the second reception signal are compared to determine the size of the defect inside the weld and / or the inside of the weld. Find the position of the defect,
Features and, Relais over The ultrasonic inspection method that.   Welding a first member and a second member made of a material different from the first member at a welding portion;
  An ultrasonic excitation step of exciting the ultrasonic wave by irradiating the weld with a transmission laser beam;
  A first receiving step of receiving a reception laser beam applied to the first member to obtain a first reception signal of the ultrasonic wave;
  A second receiving step of receiving a reception laser beam irradiated on the second member and obtaining a second reception signal of the ultrasonic wave;
  A signal analysis step of detecting defects inside the weld from the first received signal and the second received signal;
  Comprising
The second receiving step is performed after the first receiving step.
The joining method characterized by the above-mentioned. Welding a first member and a second member made of a material different from the first member at a welding portion;
An ultrasonic excitation step of exciting the ultrasonic wave by irradiating the weld with a transmission laser beam;
A first receiving step of receiving a reception laser beam applied to the first member to obtain a first reception signal of the ultrasonic wave;
A second receiving step of receiving a reception laser beam irradiated on the second member and obtaining a second reception signal of the ultrasonic wave;
A signal analyzing step of detecting a defect inside the weld from the first received signal and the second received signal ,
Performing the first receiving step and the second receiving step simultaneously;
The joining method characterized by the above-mentioned. Welding a first member and a second member made of a material different from the first member at a welding portion;
An ultrasonic excitation step of exciting the ultrasonic wave by irradiating the weld with a transmission laser beam;
A first receiving step of receiving a reception laser beam applied to the first member to obtain a first reception signal of the ultrasonic wave;
A second receiving step of receiving a reception laser beam irradiated on the second member and obtaining a second reception signal of the ultrasonic wave;
A signal analysis step of detecting defects inside the weld from the first received signal and the second received signal;
Comprising
In the signal analysis step, the data of the signal strength and the signal-to-noise ratio of the first reception signal and the second reception signal are compared to determine the size of the defect inside the weld and / or the inside of the weld. Find the position of the defect,
The joining method characterized by the above-mentioned. A transmission laser mechanism that excites ultrasonic waves by irradiating a laser beam to a welded portion between the first member and the second member made of a material different from the first member;
A receiving laser mechanism for receiving the receiving laser light applied to the first member and the second member;
A receiving interferometer that interferometrically measures the received laser beam received by the receiving laser mechanism and obtains the ultrasonic reception signal;
The signal intensity and signal noise ratio data of the first received signal from the first member and the second received signal from the second member obtained by the receiving interferometer are compared, and the inside of the welded portion A signal analysis mechanism for determining the size of the defect and / or the position of the defect inside the weld;
Features and, Relais chromatography The ultrasonic inspection apparatus that comprises a. A transmission laser mechanism that excites ultrasonic waves by irradiating a laser beam to a welded portion between the first member and the second member made of a material different from the first member;
A receiving laser mechanism for receiving the receiving laser light applied to the first member and the second member;
A receiving interferometer that interferometrically measures the received laser beam received by the receiving laser mechanism and obtains the ultrasonic reception signal;
A signal analysis mechanism for detecting defects inside the weld from the first received signal from the first member and the second received signal from the second member obtained by the receiving interferometer;
Comprising
The reception laser mechanism is movable between a first position for receiving the reception laser light applied to the first member and a second position for receiving the reception laser light applied to the second member. features and, Relais chromatography the ultrasonic inspection apparatus that constituted. A transmission laser mechanism that excites ultrasonic waves by irradiating a transmission laser beam to a welded portion between a first member and a second member made of a material different from the first member;
A receiving laser mechanism for receiving the receiving laser light applied to the first member and the second member;
A receiving interferometer the received laser light received by the receiving laser mechanism interference measurement to obtain a received signal of the ultrasonic wave,
Obtained by the receiving interferometer, a first reception signal from the first member, and a signal analysis system for detecting an internal defect of the welded portion and a second reception signal from the second member,
Equipped with,
The reception laser mechanism includes a first reception optical mechanism for receiving the reception laser light irradiated on the first member, and a second reception optical mechanism for receiving the reception laser light irradiated on the second member. A laser ultrasonic inspection apparatus comprising an optical mechanism .   A welding device that welds a first member and a second member made of a material different from the first member at a welding portion;
  A transmission laser mechanism that excites ultrasonic waves by irradiating the weld with transmission laser light;
  A receiving laser mechanism for receiving the receiving laser light applied to the first member and the second member;
  A reception interferometer that interferometrically measures the received laser light received by the reception laser mechanism and obtains a reception signal of the ultrasonic wave;
  The signal intensity and signal noise ratio data of the first received signal from the first member and the second received signal from the second member obtained by the receiving interferometer are compared, and the inside of the welded portion A signal analysis mechanism for determining the size of the defect and / or the position of the defect inside the weld;
  A joining apparatus comprising:

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