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JP6595178B2 - Polygon mirror, scanner unit, and image forming apparatus - Google Patents
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JP6595178B2 - Polygon mirror, scanner unit, and image forming apparatus - Google Patents

Polygon mirror, scanner unit, and image forming apparatus Download PDF

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JP6595178B2
JP6595178B2 JP2014252762A JP2014252762A JP6595178B2 JP 6595178 B2 JP6595178 B2 JP 6595178B2 JP 2014252762 A JP2014252762 A JP 2014252762A JP 2014252762 A JP2014252762 A JP 2014252762A JP 6595178 B2 JP6595178 B2 JP 6595178B2
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polygon mirror
film
scanner unit
resin
layer
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JP2016114737A (en
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通代 橋爪
佳菜 松田
道男 柳
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Canon Electronics Inc
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Description

本発明は、例えば、レーザビームプリンタ等の光走査装置に用いられるポリゴンミラー、及びこのポリゴンミラーを備えたスキャナユニット、並びに、このスキャナユニットを備えた画像形成装置に関する。   The present invention relates to a polygon mirror used in an optical scanning device such as a laser beam printer, a scanner unit including the polygon mirror, and an image forming apparatus including the scanner unit.

従来から、レーザビームプリンタ等の光走査装置には、回転多面鏡であるポリゴンミラーによってレーザ光束を走査するスキャナユニットが搭載されている(特許文献1参照)。   Conventionally, an optical scanning device such as a laser beam printer is equipped with a scanner unit that scans a laser beam with a polygon mirror that is a rotating polygon mirror (see Patent Document 1).

特開2005−172930号公報JP 2005-172930 A

上述した従来のポリゴンミラーは、例えば、レーザ光束の入射角によって反射率が変化する場合があり、高精度な光走査の実現が難しい。   In the conventional polygon mirror described above, for example, the reflectance may change depending on the incident angle of the laser beam, and it is difficult to realize high-precision optical scanning.

本発明は、広い入射角範囲に対応できるポリゴンミラー及びスキャナユニット並びに画像形成装置を提供する。   The present invention provides a polygon mirror, a scanner unit, and an image forming apparatus that can cope with a wide range of incident angles.

発明のポリゴンミラーは、複数の樹脂層を積層して形成される光反射面を備え、
前記複数の光反射面を形成する最表面側の樹脂層のみが非晶質フッ素樹脂層であり、
前記非晶質フッ素樹脂層の下地となる樹脂層は、フルオレン樹脂層であることを特徴とする。
かかる本発明の態様では、フルオレン樹脂層を下地とすることで、非晶質フッ素樹脂の使用量を削減でき、広い入射角度範囲に対応したポリゴンミラーを低コストで実現できる。
The polygon mirror of the present invention comprises a light reflecting surface formed by laminating a plurality of resin layers,
Only the outermost resin layer forming the plurality of light reflecting surfaces is an amorphous fluororesin layer,
The resin layer that is the base of the amorphous fluororesin layer is a fluorene resin layer.
In such an aspect of the present invention, the amount of amorphous fluororesin used can be reduced by using the fluorene resin layer as a base, and a polygon mirror corresponding to a wide incident angle range can be realized at low cost.

なお、本発明は、上述したポリゴンミラーを備えたスキャナユニット、あるいはこのスキャナユニットを備えたことを特徴とする画像形成装置についても広く対象とする。
かかる本発明の態様では、小型で高精度な光走査を実現できるスキャナユニット、画像形成装置を実現できる。
The present invention is also widely applied to the scanner unit including the polygon mirror described above or an image forming apparatus including the scanner unit.
According to such an aspect of the present invention, it is possible to realize a scanner unit and an image forming apparatus that can realize small and highly accurate optical scanning.

本発明によれば、広い入射角範囲に対応できるポリゴンミラー及びスキャナユニット並びに画像形成装置を実現できる。   According to the present invention, it is possible to realize a polygon mirror, a scanner unit, and an image forming apparatus that can cope with a wide incident angle range.

光走査装置の要部構成例を示す概略図。Schematic which shows the principal part structural example of an optical scanning device. 回転湿式成膜法を説明する図。The figure explaining the rotary wet film-forming method. 回転湿式成膜法による反射面の液溜まりを表した模式図。The schematic diagram showing the liquid pool of the reflective surface by the rotating wet film-forming method. 本発明に係わる2層の光学膜を逆回転で成膜した反射面を表した模式図。The schematic diagram showing the reflective surface which formed the two-layer optical film concerning this invention by reverse rotation. 本発明に係わる実施例1、2と比較例1、2の比較図。FIG. 3 is a comparison diagram of Examples 1 and 2 and Comparative Examples 1 and 2 according to the present invention.

以下、本発明を実施の形態に基づいて詳細に説明する。
本発明は、光を反射するポリゴンミラーであり、複数の樹脂層を積層して形成される光反射面を備えたことを特徴とする。このようなポリゴンミラーは、複数の樹脂層を積層して光反射面を形成しているので、膜厚分布が抑えられ、広い入射角度範囲に対応できる。
Hereinafter, the present invention will be described in detail based on embodiments.
The present invention is a polygon mirror that reflects light, and includes a light reflecting surface formed by laminating a plurality of resin layers. Such a polygon mirror has a light reflection surface formed by laminating a plurality of resin layers, so that the film thickness distribution can be suppressed and a wide incident angle range can be handled.

ここで、本発明のポリゴンミラーは、複数の樹脂層における積層界面が、光反射面に対して傾斜している。これは、複数の樹脂層のそれぞれがポリゴンミラーの本体下地面に対して傾斜した傾斜面を形成し、これを交互に組み合わせて、1つ1つの樹脂膜の膜厚分布を平均化して、平坦な光反射面を形成することが可能となる。   Here, in the polygon mirror of the present invention, the laminated interfaces in the plurality of resin layers are inclined with respect to the light reflecting surface. This is because each of the plurality of resin layers forms an inclined surface inclined with respect to the base surface of the main body of the polygon mirror, and this is alternately combined to average the film thickness distribution of each resin film and It becomes possible to form a simple light reflecting surface.

例えば、ポリゴンミラーは、回転中心を有する多角形の回転体を回転させながら各面に樹脂層を形成する。このとき、回転方向において樹脂層が傾斜して形成されるが、回転方向を逆回転させて複数の樹脂層を重ねることにより、結果的に回転体の下地面に対して樹脂層で形成された反射面が実質的に平行な面となる。このとき、複数の樹脂層の積層界面は、傾斜した面となる。   For example, a polygon mirror forms a resin layer on each surface while rotating a polygonal rotating body having a rotation center. At this time, the resin layer is formed to be inclined in the rotation direction. However, by rotating the rotation direction in the reverse direction and stacking a plurality of resin layers, the resin layer is formed on the lower ground of the rotating body as a result. The reflecting surface is a substantially parallel surface. At this time, the laminated interface of the plurality of resin layers is an inclined surface.

なお、本発明のポリゴンミラーは、複数の光反射面を形成する最表面側の樹脂層のみを非晶質フッ素樹脂層とするのが好ましい。これにより、比較的高価な非晶質フッ素樹脂の使用量を削減できるため、広い入射角度範囲に対応したポリゴンミラーを低コストで実現できる。   In the polygon mirror of the present invention, it is preferable that only the outermost resin layer forming the plurality of light reflecting surfaces is an amorphous fluororesin layer. Thereby, since the usage-amount of a comparatively expensive amorphous fluororesin can be reduced, the polygon mirror corresponding to a wide incident angle range is realizable at low cost.

また、本発明のポリゴンミラーは、上記非晶質フッ素樹脂層の下地となる樹脂層が、フルオレン樹脂層であることが好ましい。フルオレン樹脂層を下地とすることで、耐久性に優れ、且つ非晶質フッ素樹脂の使用量を削減でき、広い入射角度範囲に対応したポリゴンミラーを低コストで実現できる。   In the polygon mirror of the present invention, it is preferable that the resin layer serving as the base of the amorphous fluororesin layer is a fluorene resin layer. By using the fluorene resin layer as a base, it is excellent in durability and the amount of amorphous fluororesin used can be reduced, and a polygon mirror corresponding to a wide incident angle range can be realized at low cost.

なお、本発明は、上述したポリゴンミラーを備えたスキャナユニット、あるいはこのスキャナユニットを備えた画像形成装置、より具体的には、レーザビームプリンタにおいて適用可能である。そして、本発明のポリゴンミラーは、広い入射角度範囲に対応できることから、小型化にも有利であり、また高精度な光走査を実現できる。   The present invention can be applied to a scanner unit including the polygon mirror described above, or an image forming apparatus including the scanner unit, more specifically, a laser beam printer. Since the polygon mirror of the present invention can cope with a wide incident angle range, it is advantageous for miniaturization and can realize high-precision optical scanning.

以下、本発明の形態を具体的に説明する。   Hereinafter, embodiments of the present invention will be specifically described.

本発明の一実施形態では、例えば、電子写真機器等に用いられる光走査装置に搭載される反射型ポリゴンミラーにおいて、ポリゴンミラーの光反射面を2層の光学膜によって形成したポリゴンミラーである。本実施形態のポリゴンミラーは、例えば、レーザビームプリンタ等の光走査装置に対して回転多面鏡として搭載される。詳細には、ポリゴンミラーを介して像担持体面上を、光変調された光束で光走査し、画像情報の書き込みや読み出し等を行う。ここで、図1に光走査装置の概略図を示す。図1において、半導体レーザ等の光源部1より射出した光束をコリメータレンズ2により平行光束とし副走査方向にのみ屈折力を持つシリンドリカルレンズ83で集光し、ポリゴンミラー等からなる光偏向器4の偏向反射面4aへ線状に入射させている。コリメータレンズ2とシリンドリカルレンズ83とは結像光学系を構成している。偏向反射面4aで反射偏向させた光束を走査レンズ87を構成する球面よりなる負の屈折力のレンズ87bとで被走査面89上に導光しスポットを形成する。そして偏向器4を、回転軸82中心にモータ85により矢印86方向に回転させることにより、被走査面89上における偏向走査面を矢印90方向(主走査方向)に光走査する。   In one embodiment of the present invention, for example, in a reflective polygon mirror mounted on an optical scanning device used in an electrophotographic apparatus or the like, the polygon mirror is a polygon mirror in which the light reflecting surface of the polygon mirror is formed by two layers of optical films. The polygon mirror of this embodiment is mounted as a rotating polygon mirror on an optical scanning device such as a laser beam printer. Specifically, the image carrier surface is optically scanned with a light-modulated light beam through a polygon mirror, and image information is written and read out. Here, FIG. 1 shows a schematic diagram of an optical scanning device. In FIG. 1, a light beam emitted from a light source unit 1 such as a semiconductor laser is converted into a parallel light beam by a collimator lens 2 and condensed by a cylindrical lens 83 having a refractive power only in the sub-scanning direction. The light is incident linearly on the deflecting / reflecting surface 4a. The collimator lens 2 and the cylindrical lens 83 constitute an imaging optical system. The light beam reflected and deflected by the deflecting / reflecting surface 4 a is guided onto the scanned surface 89 by the lens 87 b having a negative refractive power made up of a spherical surface constituting the scanning lens 87 to form a spot. Then, the deflector 4 is rotated in the direction of the arrow 86 by the motor 85 about the rotation shaft 82 to optically scan the deflection scanning surface on the surface to be scanned 89 in the direction of the arrow 90 (main scanning direction).

そして、このような光走査装置に搭載される本実施形態の反射型ポリゴンミラーは、2層の光学膜で光反射面を形成することにより、反射面の膜厚のバラツキを抑制することができ、入射する光の入射角度・位置による反射率の依存性を抑えることができる。これにより、膜厚形成時の厳密な制御が不要となる。2層の光学膜は、安価に抑えられる湿式成膜法を用いるのが好ましい。   The reflective polygon mirror of this embodiment mounted on such an optical scanning device can suppress variations in the thickness of the reflective surface by forming the light reflective surface with two optical films. The dependence of the reflectance on the incident angle / position of incident light can be suppressed. This eliminates the need for strict control during film formation. For the two-layer optical film, it is preferable to use a wet film formation method that can be suppressed at low cost.

ここで、湿式成膜法とは、所望の膜質または膜質の前駆体を含む溶液を基材に塗布し、溶液の溶媒を除去あるいは前駆体を反応させて基材に所望の膜を形成する方法、又は溶液中で基材と溶液中の物質との反応により所望の膜を形成する方法である。   Here, the wet film forming method is a method in which a solution containing a desired film quality or a film quality precursor is applied to a substrate, and a solvent is removed from the solution or the precursor is reacted to form a desired film on the substrate. Alternatively, a desired film is formed by a reaction between a substrate and a substance in the solution in the solution.

湿式成膜法としては、例えば、ディップコートやスピンコートに代表される溶液湿式成膜法や、特にポリゴンミラー基材がアルミニウムの場合には陽極酸化法を用いて酸化アルミ被膜を形成することも可能であるが、特に設備費の負担の少ない溶液湿式成膜法を用いることが望ましい。   As the wet film forming method, for example, a solution wet film forming method typified by dip coating or spin coating, and particularly when the polygon mirror substrate is aluminum, an aluminum oxide film may be formed by using an anodic oxidation method. Although possible, it is desirable to use a solution wet film-forming method with particularly low equipment costs.

溶液湿式成膜法とは、膜を形成する物質を溶媒に溶解した溶液を、膜を形成しようとする面に塗布し、これを乾燥又は焼成して膜を得る方法である。上記のディップコートやスピンコートは1面若しくは平行した2面を成膜することに向いているが、ポリゴンミラーにみられる多面体の成膜には反射面を回転の半径方向にとる回転成膜法が最も望ましい。反射面を回転の半径方向にとるという意味は、反射面の法線が回転半径方向に一致することである。   The solution wet film forming method is a method in which a solution obtained by dissolving a substance that forms a film in a solvent is applied to a surface on which a film is to be formed, and dried or baked to obtain a film. The dip coating and spin coating described above are suitable for forming one surface or two parallel surfaces, but for film formation of a polyhedron seen in a polygon mirror, a rotating film forming method in which a reflecting surface is taken in the radial direction of rotation. Is most desirable. The meaning of taking the reflecting surface in the radial direction of rotation is that the normal line of the reflecting surface coincides with the rotating radial direction.

回転湿式成膜法は、塗布液をポリゴンミラーの反射面に塗布する塗布工程と、これに引き続いてポリゴンミラーの回転数を制御しつつ回転させ、所望の膜厚を得る膜厚制御工程を有する。塗布液に含まれる溶剤を飛ばして膜を乾燥・定着させる焼成工程も有する。なお、図2には、ポリゴンミラー4bを塗布液5に接触させながら回転させて所定の膜厚の表層を形成する塗布工程について、その概略図を示す。   The rotary wet film-forming method has a coating process for coating a coating liquid on the reflecting surface of a polygon mirror, and subsequently a film thickness control process for rotating the polygon mirror while controlling the number of rotations to obtain a desired film thickness. . There is also a baking step in which the solvent contained in the coating solution is removed to dry and fix the film. FIG. 2 shows a schematic diagram of a coating process in which the polygon mirror 4b is rotated while being in contact with the coating solution 5 to form a surface layer having a predetermined film thickness.

基材上に2層の光学膜が形成されるポリゴンミラーにおいて、回転成膜後に反射面端部が溶液の液溜まりしない均一な膜を生産性良く形成するためには、1層目と最表層の塗布方向は逆回転であることが最も望ましい。この手法で成膜することで膜厚のバラツキは小さくなり、高品質な膜が安定して得られるため、製造不良損失が低下し、ポリゴンミラーを生産性良く且つ総合的に安価に製造することが可能となる。例えば、図3に示すように、ポリゴンミラー4bの表層に塗布膜5aを形成した後、このポリゴンミラー4bを逆回転させ、図4に示すように、塗布膜5a上に塗布膜5bを形成する。このとき、塗布膜5aと塗布膜5bとの界面には、光反射面4aに対して傾斜した積層界面5cが形成される。これにより、光反射面4aは、ポリゴンミラー4a本体の表面と実質的に平行な面となる。   In a polygon mirror in which a two-layer optical film is formed on a substrate, the first layer and the outermost layer are formed in order to form a uniform film in which the end of the reflecting surface does not accumulate a solution after rotation film formation with high productivity. It is most desirable that the coating direction is reverse rotation. By forming a film with this method, the variation in film thickness is reduced, and a high-quality film can be stably obtained. Therefore, the manufacturing defect loss is reduced, and the polygon mirror is manufactured with good productivity and at a low cost. Is possible. For example, after forming the coating film 5a on the surface layer of the polygon mirror 4b as shown in FIG. 3, the polygon mirror 4b is rotated in the reverse direction to form the coating film 5b on the coating film 5a as shown in FIG. . At this time, a laminated interface 5c inclined with respect to the light reflecting surface 4a is formed at the interface between the coating film 5a and the coating film 5b. Thereby, the light reflection surface 4a becomes a surface substantially parallel to the surface of the polygon mirror 4a main body.

ここで、膜内で多重反射を起こさないような膜厚であれば、ブリュースター角より狭い入射角範囲では膜厚が厚くなると反射率は低くなる傾向にある。一方、ブリュースター角より広い入射角範囲では膜厚が厚くなると反射率は高くなる傾向にある。   Here, if the film thickness does not cause multiple reflection in the film, the reflectance tends to decrease as the film thickness increases in the incident angle range narrower than the Brewster angle. On the other hand, in the incident angle range wider than the Brewster angle, the reflectance tends to increase as the film thickness increases.

つまり、ブリュースター角の反射率を得られる膜厚は各入射角に対して理論的に求められるため、その膜厚を反射面に忠実に形成させることが、反射率の角度依存性を抑制するという観点から、特に望ましい。   In other words, since the film thickness at which the reflectivity of the Brewster angle can be obtained is theoretically obtained for each incident angle, forming the film thickness faithfully on the reflection surface suppresses the angle dependency of the reflectivity. It is particularly desirable from the viewpoint of.

例えば、p偏光の入射角をブリュースター角より狭い範囲に限定した場合、均一膜厚で反射率の一様性を実現することは容易である。このとき、ブリュースター角より広角側では急激に反射率が上昇する。そこで、異なる屈折率の膜を前記手法で形成することで理想的な膜形状に近似することができる。   For example, when the incident angle of p-polarized light is limited to a range narrower than the Brewster angle, it is easy to achieve uniform reflectance with a uniform film thickness. At this time, the reflectance rapidly increases on the wide angle side from the Brewster angle. Therefore, an ideal film shape can be approximated by forming films having different refractive indexes by the above-described method.

ここで、上記の2層の光学膜が形成される基材としては、例えば、アルミニウム、プラスチック、ガラス等、ポリゴンミラーに用いることができるものであれば、本発明による特段の制限はない。   Here, the base material on which the two-layer optical film is formed is not particularly limited by the present invention as long as it can be used for a polygon mirror, such as aluminum, plastic, and glass.

また、ポリゴンミラーの反射面に成膜する膜材料は、使用条件における耐久性を考慮して適宜決定できるが、例えば、非晶質フッ素樹脂、フルオレン骨格を有する樹脂などの熱硬化樹脂及び光硬化樹脂などを使用することができる。それらの中でも、オゾンや水に対して不活性であり、水分の影響による腐蝕及び基材の腐蝕がみられない非晶質フッ素樹脂が最表層にあることが特に望ましい。   In addition, the film material to be deposited on the reflective surface of the polygon mirror can be appropriately determined in consideration of the durability under the use conditions. For example, thermosetting resins such as amorphous fluororesins and resins having a fluorene skeleton, and photocuring Resin or the like can be used. Among these, it is particularly desirable that the outermost layer be an amorphous fluororesin that is inert to ozone and water and does not show corrosion due to the influence of moisture or corrosion of the substrate.

さらに、フルオレン骨格を有する樹脂(フルオレン樹脂)は、1つの炭素原子に4つの芳香環が結合した構造(カルド構造)を持つため、つまり、カルド構造中の芳香環が互いに異なる面を向くことでポリマー全体が光学異方性を打ち消しあい、アモルファス性が向上する為に高屈折及び低複屈折を発現する。高屈折であれば、膜厚は薄くできるため、フルオレン樹脂を用いることで全膜厚を薄くすることが可能であり、膜厚制御が容易となる。   Furthermore, since a resin having a fluorene skeleton (fluorene resin) has a structure in which four aromatic rings are bonded to one carbon atom (cardo structure), that is, the aromatic rings in the cardo structure are directed to different surfaces. The entire polymer cancels the optical anisotropy, and the amorphous nature is improved, so that high refraction and low birefringence are exhibited. Since the film thickness can be reduced with high refraction, the total film thickness can be reduced by using a fluorene resin, and the film thickness can be easily controlled.

成膜過程では、溶媒の蒸発速度について遅い方が望ましい。例えば、溶媒の蒸発速度は溶媒の沸点が高いほど遅くなるため、特に溶媒の沸点は180℃以上が望ましい。また、基材に変形を与えることのない温度で蒸発する溶媒が望ましい。例えば、アルミニウム基材を用いた場合には溶媒の沸点は280℃以下であることが望ましい。溶媒に関する他の物性としては、環境による構造の変化が少ないこと且つ作業環境上無臭であることが好ましい。   In the film formation process, it is desirable that the solvent evaporation rate is slow. For example, since the evaporation rate of the solvent is slower as the boiling point of the solvent is higher, the boiling point of the solvent is particularly preferably 180 ° C. or higher. A solvent that evaporates at a temperature that does not deform the substrate is desirable. For example, when an aluminum substrate is used, the boiling point of the solvent is preferably 280 ° C. or lower. As other physical properties relating to the solvent, it is preferable that there is little change in structure due to the environment and that it is odorless in the working environment.

本発明における光偏向器の形態としては、本発明のポリゴンミラーを有すること以外は、本発明による特段の制限はなく、電子写真機器に用いることのできる光走査装置であれば、いかなる形態も取り得る。   The form of the optical deflector in the present invention is not particularly limited by the present invention except that it has the polygon mirror of the present invention, and any form can be adopted as long as it is an optical scanning apparatus that can be used in an electrophotographic apparatus. obtain.

本発明の光走査装置の形態としては、光偏向器を備える以外は、特に本発明による制限は無く、電子写真機器に用いることのできる光走査装置であれば、いかなる形態も取り得る。   The form of the optical scanning device of the present invention is not particularly limited by the present invention except that it includes an optical deflector, and can take any form as long as it can be used in electrophotographic equipment.

例えば、光走査装置は、光源、光源から出射された光を集光して結像する結像光学系、結像された光を反射して偏向する光偏向器、および偏向された光を被走査面に導く走査レンズを備える。本発明の光走査装置は、このような構成において光偏向器が上述のポリゴンミラーを備えるものである。   For example, an optical scanning device includes a light source, an imaging optical system that focuses light emitted from the light source and forms an image, an optical deflector that reflects and deflects the imaged light, and the deflected light. A scanning lens that leads to the scanning surface is provided. In the optical scanning device of the present invention, the optical deflector includes the above-described polygon mirror in such a configuration.

本発明の電子写真機器の形態としては、上記光走査装置を備える以外は、特に本発明による制限は無く、例えば、本発明の電子写真機器は電子写真装置を含み、その構成としては、感光体を帯電させる手段、帯電した感光体を露光して潜像を形成する露光手段、該潜像にトナーを供給してトナー像を形成するトナー像形成手段、該トナー像を転写材に転写する転写手段、および該感光体表面の残留物や異物を除去するクリーニング手段を有するものであり、該露光手段として上記光走査装置を備えるものである。   The electrophotographic apparatus of the present invention is not particularly limited by the present invention except that it includes the above-described optical scanning device. For example, the electrophotographic apparatus of the present invention includes an electrophotographic apparatus, and the configuration thereof includes a photoconductor. Charging means, exposure means for exposing a charged photoreceptor to form a latent image, toner image forming means for supplying toner to the latent image to form a toner image, and transfer for transferring the toner image to a transfer material And a cleaning means for removing residues and foreign matters on the surface of the photoreceptor, and the optical scanning device is provided as the exposure means.

以下、本発明を実施例に基づいて詳細に説明する。   Hereinafter, the present invention will be described in detail based on examples.

本実施例においては、対向する2面に反射面を持つアルミニウム製ポリゴンミラーに回転湿式成膜法(図2参照)により、1層目にフルオレン骨格を有する樹脂膜、最表層に非晶質フッ素樹脂膜を塗布方向を逆回転にすることにより形成し、ポリゴンミラーの要求特性である入射角度・位置による反射率の一様性が得られることを示す。回転湿式成膜法における溶剤は、フルオレン骨格を有する樹脂はPGMEA、非晶質フッ素樹脂はTHFを用いる。   In the present embodiment, a resin film having a fluorene skeleton as the first layer is formed on an aluminum polygon mirror having reflecting surfaces on two opposite surfaces (see FIG. 2), and amorphous fluorine is formed as the outermost layer. It is shown that the resin film is formed by rotating the coating direction in the reverse direction, and the uniformity of the reflectance depending on the incident angle and position, which is a required characteristic of the polygon mirror, is obtained. As the solvent in the rotary wet film formation method, PGMEA is used as a resin having a fluorene skeleton, and THF is used as an amorphous fluororesin.

(実施例1)
4つの反射面を有するアルミニウムから成るポリゴンミラーを図2に示すように10枚軸に通す。次に、基材との密着性を上げる為、プラズマ処理を10秒間行った。続いて、1.5wt%のフルオレン骨格を有する樹脂液(EG−200:大阪ガスケミカル社製)を満たした液槽にポリゴンミラーの反射面を40rpmで10秒間浸し、液槽から引き上げた後、4000rpmで70秒間一方向に回転させて薄い液膜を形成し、180℃で30分間焼成をかけた。
Example 1
A polygon mirror made of aluminum having four reflecting surfaces is passed through 10 axes as shown in FIG. Next, plasma treatment was performed for 10 seconds in order to improve the adhesion to the substrate. Subsequently, after reflecting the reflective surface of the polygon mirror for 10 seconds at 40 rpm in a liquid tank filled with a resin liquid having a fluorene skeleton of 1.5 wt% (EG-200: manufactured by Osaka Gas Chemical Co., Ltd.) A thin liquid film was formed by rotating in one direction at 4000 rpm for 70 seconds, and baking was performed at 180 ° C. for 30 minutes.

次に、前記樹脂膜との密着性を高める為の前処理としてプライマー(CT−P10:旭硝子社製)処理を行い、1wt%の非晶質フッ素樹脂液(CTL−809A:旭硝子社製)を満たした液槽にポリゴンミラーの反射面を40rpmで10秒間浸し、液槽から引き上げた後、4000rpmで70秒間反対方向に回転させて薄い液膜を形成し、180℃で30分間焼成をかけた。   Next, a primer (CT-P10: manufactured by Asahi Glass Co., Ltd.) is applied as a pretreatment for improving the adhesion with the resin film, and a 1 wt% amorphous fluororesin liquid (CTL-809A: manufactured by Asahi Glass Co., Ltd.) is used. The reflective surface of the polygon mirror was immersed in a filled liquid tank at 40 rpm for 10 seconds, pulled up from the liquid tank, rotated in the opposite direction at 4000 rpm for 70 seconds to form a thin liquid film, and baked at 180 ° C. for 30 minutes. .

以上から、反射面にはおよそ膜厚50nmのフルオレン骨格を有する樹脂膜とおよそ膜厚30nmの非晶質フッ素樹脂膜が4つの反射面に形成され、10°と70°の入射角における反射率の変化は2%以内となった。また、このようにして得たポリゴンミラーを結露耐久試験及びオゾン耐久試験を行った結果、反射率の低下はみられない為、前記2層の光学膜はポリゴンミラーの反射面の塗布膜として非常に有効である。   From the above, on the reflecting surface, a resin film having a fluorene skeleton with a film thickness of approximately 50 nm and an amorphous fluororesin film with a film thickness of approximately 30 nm are formed on four reflecting surfaces, and the reflectance at incident angles of 10 ° and 70 °. The change was within 2%. Further, as a result of the condensation durability test and the ozone durability test performed on the polygon mirror obtained in this way, no decrease in reflectance was observed. Therefore, the two-layer optical film was very useful as a coating film for the reflection surface of the polygon mirror. It is effective for.

(実施例2)
4つの反射面を有するアルミニウムから成るポリゴンミラーを図2に示すように10枚軸に通す。次に、基材との密着性を上げるため、プラズマ処理を10秒間行った。続いて、1.8wt%のフルオレン骨格を有する樹脂液(EG−200:大阪ガスケミカル社製)を満たした液槽にポリゴンミラーの反射面を40rpmで10秒間浸し、液槽から引き上げた後、4000rpmで70秒間一方向に回転させて薄い液膜を形成し、180℃で30分間焼成をかけた。
(Example 2)
A polygon mirror made of aluminum having four reflecting surfaces is passed through 10 axes as shown in FIG. Next, plasma treatment was performed for 10 seconds in order to improve the adhesion with the substrate. Subsequently, after immersing the reflective surface of the polygon mirror in a liquid tank filled with a resin liquid having a fluorene skeleton of 1.8 wt% (EG-200: manufactured by Osaka Gas Chemical Co., Ltd.) at 40 rpm for 10 seconds, A thin liquid film was formed by rotating in one direction at 4000 rpm for 70 seconds, and baking was performed at 180 ° C. for 30 minutes.

次に、樹脂膜との密着性を高める為の前処理としてプライマー(CT−P10:旭硝子社製)処理を行い、0.2wt%の非晶質フッ素樹脂液(CTL−809A:旭硝子社製)を満たした液槽にポリゴンミラーの反射面を40rpmで10秒間浸し、液槽から引き上げた後、4000rpmで70秒間反対方向に回転させて薄い液膜を形成し、180℃で30分間焼成をかけた。   Next, a primer (CT-P10: manufactured by Asahi Glass Co., Ltd.) is applied as a pretreatment for improving the adhesion with the resin film, and a 0.2 wt% amorphous fluororesin liquid (CTL-809A: manufactured by Asahi Glass Co., Ltd.) is used. The reflective surface of the polygon mirror is immersed in a liquid tank filled with 10 seconds at 40 rpm, pulled up from the liquid tank, rotated in the opposite direction at 4000 rpm for 70 seconds to form a thin liquid film, and baked at 180 ° C. for 30 minutes It was.

以上から、反射面にはおよそ膜厚60nmのフルオレン骨格を有する樹脂膜とおよそ膜厚5nmの非晶質フッ素樹脂膜が4つの反射面に形成され、10°と70°の入射角における反射率の変化は2%以内となった。また、このようにして得たポリゴンミラーを結露耐久試験及びオゾン耐久試験を行った結果、反射率の低下はみられない為、前記2層の光学膜はポリゴンミラーの反射面の塗布膜として非常に有効である。   From the above, a resin film having a fluorene skeleton having a film thickness of about 60 nm and an amorphous fluororesin film having a film thickness of about 5 nm are formed on the four reflection surfaces on the reflection surface, and reflectivity at incident angles of 10 ° and 70 °. The change was within 2%. Further, as a result of the condensation durability test and the ozone durability test performed on the polygon mirror obtained in this way, no decrease in reflectance was observed. Therefore, the two-layer optical film was very useful as a coating film for the reflection surface of the polygon mirror. It is effective for.

比較例として、比較例1に非晶質フッ素樹脂膜を単層にしたポリゴンミラー、比較例2にアクリル樹脂を単層にしたポリゴンミラーの入射角による反射率、膜厚分布、コスト、品質を評価した。反射率は、10°〜70°の入射角における反射率の最大値と最小値の差を比較した。膜厚分布は、反射面の膜厚にバラツキが無いか比較した。コストは、製造に係わる全コストを比較した。品質は、成膜に係わる反射率不良、例えば、絶対値が規格反射率より低い、若しくは入射角による反射率のバラツキが2%以内にあるか比較した。図5に前記実施例1、実施例2、比較例1、比較例2を示す。   As a comparative example, the reflectance, film thickness distribution, cost, and quality according to the incident angle of a polygon mirror with a single layer of an amorphous fluororesin film in Comparative Example 1 and a polygon mirror with a single layer of an acrylic resin in Comparative Example 2 are as follows. evaluated. For the reflectance, the difference between the maximum value and the minimum value of the reflectance at an incident angle of 10 ° to 70 ° was compared. The film thickness distribution was compared for variations in the film thickness of the reflecting surface. The cost was compared with the total cost for manufacturing. The quality was compared with respect to poor reflectance related to film formation, for example, whether the absolute value is lower than the standard reflectance or the variation in reflectance due to the incident angle is within 2%. FIG. 5 shows Example 1, Example 2, Comparative Example 1, and Comparative Example 2.

図5からわかるように、実施例1及び2は、比較例1、2に比べ、膜厚分布も均一性がある為、入射角による反射率の最大値と最小値の差が小さく制御でき、入射角による反射率バラツキが抑えられ、品質が安定する。また、コストが高い非晶質フッ素樹脂の膜厚を薄くできる為、生産コストを下げることができる。   As can be seen from FIG. 5, in Examples 1 and 2, since the film thickness distribution is more uniform than in Comparative Examples 1 and 2, the difference between the maximum value and the minimum value of the reflectance depending on the incident angle can be controlled to be small. Reflectance variation due to the incident angle is suppressed, and the quality is stabilized. In addition, since the film thickness of the high-cost amorphous fluororesin can be reduced, the production cost can be reduced.

Claims (3)

複数の樹脂層を積層して形成される光反射面を備え、
前記複数の光反射面を形成する最表面側の樹脂層のみが非晶質フッ素樹脂層であり、
前記非晶質フッ素樹脂層の下地となる樹脂層は、フルオレン樹脂層であることを特徴と
するポリゴンミラー。
A light reflecting surface formed by laminating a plurality of resin layers;
Only the outermost resin layer forming the plurality of light reflecting surfaces is an amorphous fluororesin layer,
The polygon mirror characterized in that the resin layer which is the base of the amorphous fluororesin layer is a fluorene resin layer.
請求項1記載のポリゴンミラーを備えたスキャナユニット。 Scanner unit with polygon mirror according to claim 1. 請求項に記載のスキャナユニットを備えたことを特徴とする画像形成装置。 An image forming apparatus comprising the scanner unit according to claim 2 .
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