JP6606322B2 - Abatement equipment - Google Patents

Description

  The present invention relates to a detoxification device for detoxifying harmful components in a gas to be treated by combustion or thermal decomposition, and in particular, maintaining only the seed fire and safely stopping the flame of the burner in the combustion chamber, and resuming combustion Therefore, the gas to be treated can be rendered harmless by complete combustion quickly without delay.

  Conventionally, for example, in a semiconductor manufacturing factory, a combustion type abatement apparatus is used as a means for detoxifying exhaust gas containing harmful components exhausted from a process chamber of a well-known semiconductor manufacturing apparatus (for example, Patent Documents). 1).

  FIG. 3 is a schematic view of a conventional abatement apparatus. The abatement apparatus M of FIG. 3 is an apparatus (combustion type) that detoxifies exhaust gas containing harmful components as a treated gas by combustion or thermal decomposition. Combustion in which the treated gas is introduced as its apparatus configuration. An abatement device body 2 having a chamber 1, a burner 3 for forming a flame necessary for detoxification in the combustion chamber 1, a pilot burner 4 for forming a seed flame necessary for ignition of the burner 3, and the flame Function as means for supplying combustible fuel necessary for formation to the burner 3 as the first combustion-supporting gas, and means for supplying air or oxygen necessary for formation of the flame to the burner 3 as the second combustion-supporting gas And a combustion-supporting gas supply means 5.

  In the conventional abatement apparatus M of FIG. 3 having the above-described configuration, when this is activated, first, a pilot flame is formed in the combustion chamber 1 by the pilot burner 4. This type of fire is set so that the ignition state is always maintained.

  Then, for example, when an instruction signal for starting combustion is given from the device controller (not shown) to the abatement device M in FIG. 3, the first combustion-supporting gas and the first 2. Supply of combustion-supporting gas is started.

  As described above, the first and second combustion-supporting gases supplied to the burner 3 become an air-fuel mixture, which is ejected from the burner 3 toward the combustion chamber 1. On the other hand, a flame necessary for detoxifying the gas to be treated is formed in the combustion chamber 1 by adding a igniting action by the pilot flame in the pilot burner 4.

  However, in the conventional abatement apparatus M of FIG. 3, in order to stop the combustion or thermal decomposition of the gas to be treated by the flame, the first combustion-supporting gas and the second combustion-supporting gas from the combustion-supporting gas supply means 5 to the burner 3 are stopped. Even when the supply of combustion-supporting gas is stopped, the system is used to maintain the seed fire as it is. However, in this case, a substance (such as unburned unburned gas fuel left in the fire) may be present in the combustion chamber, and a residue may be generated.

  In that case, in the conventional abatement apparatus M in FIG. 3, when combustion or thermal decomposition is stopped, by continuing to maintain the seed fire, as shown by the arrow R in the figure, the unburned residue in the seed fire has not been obtained. A phenomenon occurs in which combustion gas fuel or the like flows backward to the combustion-supporting gas supply means 5 through the burner 3.

  As a first problem due to the backflow phenomenon as described above, in the conventional abatement apparatus M in FIG. 3, after the combustion or thermal decomposition is stopped, the unburned gas fuel that has flowed back on the side of the combustion-supporting gas supply means 5 or the like. May ignite, and there is a problem that it is not possible to safely stop the flame in the combustion chamber while maintaining only the seed fire.

  Further, as a second problem due to the backflow phenomenon as described above, in the conventional abatement apparatus M of FIG. 3, the backflowed unburned gas fuel or the like is transferred from the combustion-supporting gas supply means 5 to the burner 3. Since it remains in the supply piping path (specifically, piping PA1) of the second combustion-supporting gas (air or oxygen), when the combustion is restarted, the unburned gas fuel and the like remaining in the second combustion-supporting gas (air or oxygen) The supply of the second combustion-supporting gas (air or oxygen) from the combustion-supporting gas supply means 5 to the burner 3 is delayed until it is pushed out to the combustion chamber 1 through the burner 3 by the combustion gas (air or oxygen). There is a problem that the complete combustion in the combustion chamber 1 is delayed, and the gas to be treated cannot be made harmless by the complete combustion promptly without delay from the time when the combustion is resumed.

JP 2001-349521 A

  The present invention has been made in order to solve the above-mentioned problems. The purpose of the present invention is to maintain only the seed fire and safely stop the flame of the burner in the combustion chamber, and to complete combustion quickly without delay from the time of restarting combustion. An object of the present invention is to provide a detoxifying device capable of detoxifying a gas to be treated by the above.

In order to achieve the above object, the present invention provides a detoxifying device for detoxifying a gas to be treated by combustion or thermal decomposition, and a detoxifying device main body having a combustion chamber into which the gas to be treated is introduced, A burner that forms a flame necessary for the combustion or pyrolysis in the combustion chamber, a pilot burner that forms a seed flame necessary for ignition of the burner, and a first support for combustible fuel necessary for the formation of the flame Means for supplying the burner as a reactive gas, and a combustion-supporting gas supply means functioning as a means for supplying air or oxygen necessary for forming the flame as the second combustion-supporting gas to the burner; mixed combustion assisting gas and the second combustion-supporting gas, the burner gas chamber covering the outside of the combustion chamber, when stopping the combustion or the pyrolysis of the gas to be treated by the flame, the combustion chamber Existing material, characterized in that and a reverse current blocking means for preventing the phenomenon of backflow into the burner gas chamber and the combustion supporting gas supplying means side.

  In the present invention, only the combustion of the pilot burner may be maintained even after the combustion of the gas to be processed or the thermal decomposition is stopped.

  In the present invention, the backflow prevention means supplies the second combustion-supporting gas from the combustion-supporting gas supply means to the burner even after the combustion of the gas to be treated or the thermal decomposition is stopped. It may be characterized by continuing.

  In the present invention, as the backflow prevention means, a valve is provided in the middle of a pipe for supplying the first combustion-supporting gas or the second combustion-supporting gas from the combustion-supporting gas supply means to the burner. It is good also as providing.

  In the present invention in which the valve is provided, the valve may be installed in the vicinity of the body of the abatement apparatus.

  In the present invention, as described above, as a specific configuration of the abatement apparatus, as described above, when combustion or thermal decomposition of the gas to be treated by the flame is stopped, as a substance existing in the combustion chamber, for example, unburned unburned in the seed fire There is provided a backflow prevention means for preventing a phenomenon in which gas fuel or the like flows backward to the combustion-supporting gas supply means side. For this reason, the conventional malfunction by such a backflow of unburned gas fuel etc. can be eliminated. Specifically, after the combustion or thermal decomposition is stopped, the flame of the burner in the combustion chamber is safely stopped by maintaining only the seed fire in that there is no risk of ignition of unburned gas fuel on the side of the combustion-supporting gas supply means. In addition, when the combustion is resumed, the second combustion-supporting gas is smoothly supplied from the combustion-supporting gas supply means to the burner. Gas can be rendered harmless.

  In particular, as a specific structure of the backflow prevention means, a structure in which the second support gas is continuously supplied from the support gas supply means to the burner even after combustion or thermal decomposition is stopped (hereinafter referred to as “after combustion stop”). In the case of adopting the “second combustion-supporting gas continuous supply system”, it is necessary to separately add a control system such as forcibly stopping the supply of the second combustion-supporting gas from the combustion-supporting gas supply means. Therefore, the control system of the entire apparatus can be simplified and the cost can be reduced.

  Further, according to the second combustion-supporting gas continuous supply system after the combustion is stopped as described above, the second combustion-supporting gas is continuously supplied to the combustion chamber through the burner even after the combustion or thermal decomposition is stopped. It is possible to maintain a high pressure. For this reason, for example, when a known central scrubber is provided downstream of the abatement device as one of the plant facilities using this type of abatement device, the central scrubber and the combustion chamber of the abatement device This creates a pressure difference between the combustion chamber of the abatement device and the central scrubber side, which allows the flow of process gas (the gas to be detoxified by the abatement device), Since unburned unburned gas fuel is discharged from the combustion chamber of the abatement device to the central scrubber side, such unburned unburned gas fuel flows backward from the combustion chamber to the combustion-supporting gas supply means side. Can be prevented more effectively.

  On the other hand, as a specific configuration of the backflow prevention means, a configuration in which a valve is provided in the middle of a pipe for supplying the second support gas to the burner from the support gas supply means is not adopted. Even if the supply of the second combustion-supporting gas from the combustion-supporting gas supply means to the burner is stopped, the above-mentioned backflow phenomenon is prevented by closing the valve, so when stopping combustion or thermal decomposition The supply of not only the first combustion-supporting gas but also the second combustion-supporting gas can be stopped, and the running cost can be reduced by stopping the supply of these gases.

The schematic diagram of the abatement apparatus which is 1st Embodiment of this invention. The schematic diagram of the abatement apparatus which is 2nd Embodiment of this invention. The schematic diagram of the conventional abatement apparatus.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a schematic diagram of an abatement apparatus according to the first embodiment of the present invention. The abatement apparatus M of FIG. 1 uses, for example, an exhaust gas containing harmful components exhausted from a process chamber of a known semiconductor manufacturing apparatus as a process gas, and the process gas is rendered harmless by combustion or thermal decomposition. It is also used as a means for detoxifying exhaust gas containing harmful components exhausted from an apparatus other than a semiconductor manufacturing apparatus as a gas to be treated.

<< Outline of Detoxifying Device M in FIG. 1 >>
An abatement apparatus M in FIG. 1 includes an abatement apparatus body 2 having a combustion chamber 1 into which a gas to be treated is introduced, a burner 3 that forms a flame necessary for combustion or thermal decomposition in the combustion chamber 1, and a burner. A pilot burner 4 that forms a seed flame necessary for ignition 3, a means for supplying a combustible fuel necessary for the formation of the flame to the burner 3 as a first combustion-supporting gas, and a necessity for the formation of the flame Combustion gas supply means 5 that functions as means for supplying air or oxygen to the burner 3 as the second combustion support gas, and is present in the combustion chamber when the combustion or pyrolysis of the gas to be treated by the flame is stopped As a substance, for example, there is provided reverse flow prevention means 6 for preventing a phenomenon in which unburned unburned gas fuel or the like in a seed fire flows backward to the combustion supporting gas supply means 5 side.

<< Details of the abatement body 1 and its combustion chamber 1 >>
The abatement apparatus body 2 in the abatement apparatus M of FIG. 1 has a structure in which a second cylinder wall 8 is installed outside the first cylinder wall 7, and an inner space portion of the first cylinder body 7 serves as a combustion chamber. 1 is configured. The space between the first cylinder wall 7 and the second cylinder wall 8 is configured as a burner gas chamber 9 into which combustible fuel and air are introduced.

  The abatement apparatus M in FIG. 1 has a nozzle N1 as a means for introducing the gas to be treated (exhaust gas) into the combustion chamber 1. The outlet of the nozzle N1 opens to the ceiling of the combustion chamber 1 (specifically, the top plate 1A closing the upper opening end of the first cylindrical wall 7). The inlet side of the nozzle N1 is connected to the outlet side of the exhaust system (not shown) of the exhaust gas (processed gas) described above. For this reason, in the abatement apparatus M of FIG. 1, exhaust gas (treated gas) is introduced from the nozzle N1 into the combustion chamber 1. The number of nozzles N1 is not particularly limited, and may be one or two or more.

<< Details of burner 3 and pilot burner 4 >>
The abatement apparatus M in FIG. 1 has a first burner 3 </ b> A and a second burner 3 </ b> B as the burner 3. The first burner 3 </ b> A has a plurality of ejection holes H formed in the first cylindrical wall 7 constituting the burner gas chamber 9, and a mixture of combustible fuel and air is ejected from the ejection holes H toward the combustion chamber 1. It is structured to be combustible. On the other hand, the second burner 3B connects another nozzle N2 in the middle of the nozzle N1 described above, and supplies combustible fuel and oxygen (or air) from the connected nozzle N2 to the nozzle N1, A mixture of combustible fuel and oxygen (or air) is jetted from the outlet of the nozzle N1 toward the combustion chamber 1 to allow combustion. In addition, although illustration is abbreviate | omitted, the nozzle N2 may be connected to each nozzle N1, respectively.

  The pilot burner 4 in the abatement apparatus M of FIG. 1 has another nozzle N3 provided in the vicinity of the nozzle N1 described above, and the outlet of the provided nozzle N3 is connected to the ceiling of the combustion chamber 1 (specifically, the above-described ceiling). By opening the plate 1A), a mixture of combustible fuel and air (or oxygen) may be ejected from the outlet of the nozzle N3 toward the combustion chamber 1 so that combustion is possible.

<< Details of Supporting Gas 5>
The detoxifying apparatus M in FIG. 1 includes, as a specific configuration of the combustion-supporting gas supply means 5, a first burner-supporting combustion-supporting gas supply means 5A provided corresponding to the first burner 3A, and a second burner 3B. And a second burner-supporting combustible gas supply means 5B provided corresponding to the above.

  The first burner-supporting combustible gas supply means 5A includes means for supplying the first burner 3A with combustible fuel necessary for forming a flame by the first burner 3A as the first combustible gas, and the first burner 3A. It functions as means for supplying air (may be oxygen) necessary for formation of a flame by the first burner 3A as the second combustion-supporting gas.

  As a specific configuration of the first burner-supporting combustible gas supply means 5A, in the abatement apparatus M of FIG. 1, the burner gas chamber 9 of the abatement apparatus body 2 from a fuel tank (not shown) outside the abatement apparatus body 2 is used. On the other hand, a configuration in which combustible fuel (first combustion-supporting gas) is pumped through the pipe PA2, air (second second) from the blower 11 (blower) outside the abatement apparatus body 2 to the burner gas chamber 9 through the pipe PA1. Adopts a structure that pumps (combustible gas). In addition, the combustible fuel and air pumped to the burner gas chamber 9 as described above are mixed and mixed in the burner gas chamber 9 to become an air-fuel mixture, which is directed from the ejection hole H of the first burner 3A toward the combustion chamber 1. Erupt.

  The second burner compatible combustion-supporting gas supply means 5B includes a means for supplying the second burner 3B with combustible fuel necessary for forming a flame by the second burner 3B as the first combustion-supporting gas, and the second burner 3B. It functions as means for supplying oxygen (may be air) necessary for the formation of the flame by the second burner 3B to the second burner 3B.

  As a specific configuration of the second burner-supporting combustible gas supply means 5B, the abatement apparatus M of FIG. 1 is combustible from a fuel tank and an oxygen tank (not shown) outside the abatement apparatus body 2 to the nozzle N2. A configuration that pumps fuel and oxygen is adopted. In addition, the combustible fuel and air pumped by the nozzle N2 as mentioned above become an air-fuel mixture, and are ejected from the outlet of the nozzle N3 toward the combustion chamber 1.

<< Details of Backflow Prevention Means 6 >>
In the abatement apparatus M of FIG. 1, as an example of a specific configuration of the backflow prevention means 6, combustion is also supported after the combustion or thermal decomposition of the gas to be treated by the flame is stopped (after combustion or thermal decomposition is stopped). The second combustion-supporting gas (specifically, the combustion gas supply means 5 (specifically, the first burner-supporting combustion-supporting gas supply means 5A) to the burner 3 (specifically, the first burner 3A)). Adopts a configuration that continues to supply air).

  That is, the first burner-supporting combustible gas supply means 5A in the abatement apparatus M1 of FIG. 1 uses the blower 11 (blower) to burn air (second combustible gas) when the gas to be treated is burned by the flame. ) Is supplied to the first burner 3A. The supply of air by the blower 11 is not only during the combustion or thermal decomposition of the gas to be treated as described above, but also after the combustion or thermal decomposition is stopped. Is also configured to be continuously performed (continuous operation of the blower 11).

  The continuous operation of the blower 11 as described above includes, for example, a combustion control system of the abatement apparatus M that starts and stops combustion, and a switch system of the blower 11 that starts and stops the blower 11. It can be realized by configuring as a completely independent system.

<< Description of Startup and Combustion Start Operation in Detoxifying Device M in FIG. 1 >>
When a device activation signal is given from a device controller (not shown) to the abatement device M of FIG. This type of fire is set so that the ignition state is always maintained.

  When an instruction signal for starting combustion is given from the apparatus controller (not shown) to the abatement apparatus M in FIG. 1, the first support gas and the second support gas are supplied from the support gas supply means 5 to the burner 3. Supply of flammable gas is started. Specifically, the supply is performed by supplying the first combustion-supporting gas (combustible fuel) and the second combustion-supporting gas (air) from the first burner-supporting combustion-supporting gas supply means 5A to the first burner 3A. The second burner-supporting gas supply means 5B supplies the first combustion-supporting gas (combustible fuel) and the second combustion-supporting gas (air or oxygen) to the second burner 3B.

  As described above, the first combustion-supporting gas and the second combustion-supporting gas supplied to the burner 3 (3A, 3B) become an air-fuel mixture and is transferred from the burner 3 (3A, 3B) to the combustion chamber 1. A flame necessary for detoxifying the gas to be treated is formed in the combustion chamber 1 by applying a igniting action by a pilot flame in the pilot burner 4 to the air-fuel mixture ejected toward the fuel.

  The gas to be treated is supplied to the combustion chamber 1 through the nozzle N1 after the formation of the flame. In addition, the gas to be treated that has been rendered harmless by the combustion or thermal decomposition by the flame is discharged out of the main body 1 from a non-illustrated outlet port that communicates with the combustion chamber 1 as a processing gas.

<< Description of Combustion (Pyrolysis) Stop Operation of Detoxifying Device M in FIG. 1 >>
When an instruction signal to stop combustion (pyrolysis) is given from the device controller (not shown) to the abatement device M in FIG. 1, the first combustion support property to the burner 3 (3A, 3B) from the combustion support gas supply means 5 When the supply of gas (combustible fuel) is stopped, the flame in the combustion chamber 1 is naturally extinguished.

  By the natural suppression of the flame, combustion or thermal decomposition of the gas to be treated by the flame in the combustion chamber 1 is also stopped. At this time, the supply of the second combustion-supporting gas to the burner 3 from the combustion-supporting gas supply means 5 Specifically, the supply of the second combustion-supporting gas (air) from the first burner-supporting combustion-supporting gas supply means 5A to the first burner 3A is continued without stopping.

That is, the supply of air to the first burner 3A by the blower 11 is continuously performed not only when the gas to be treated is burned by the flame but also after the combustion or thermal decomposition is stopped. Even after the stoppage of the decomposition, even if the seed fire remains in the ignition state, unburned unburned gas fuel or the like remaining in the seed fire flows backward through the first burner 3A toward the first burner-supporting combustible gas supply means 5A. There is nothing.

<< Description of Combustion Resuming Operation of Detoxifying Device M in FIG. 1 >>
When an instruction signal for resuming combustion is given from a device controller (not shown) to the abatement apparatus M in FIG. 1, the first combustion supporting gas and the second combustion supporting gas for the burner 3 are supplied from the combustion supporting gas supply means 5. Restart supply.

  That is, in addition to the supply of the second combustion-supporting gas (air) from the first burner-supporting combustion-supporting gas supply means 5A to the first burner 3A, the second stop that has been stopped immediately before the instruction signal for restarting combustion is given. The supply of the combustion-supporting gas (combustible fuel) is restarted, and the first combustion-supporting gas (combustible fuel) and the second support are supplied from the second-burner-supporting combustion-supporting gas supply means 5B to the second burner 3B. By restarting the supply of the flammable gas (oxygen), a flame necessary for detoxifying the gas to be treated is re-formed in the combustion chamber 1, and the combustion of the gas to be treated by the flame is resumed.

  By the way, in the abatement apparatus of FIG. 1, as described above, after combustion or thermal decomposition is stopped, unburned unburned gas fuel or the like in the seed fire is supplied to the first burner-supporting combustible gas through the first burner 3A. The phenomenon of backflow to the 5A side is prevented. For this reason, when combustion is resumed, the second combustion-supporting gas (air) supply pipe path from the first burner-supporting combustion gas supply means 5A to the first burner 3A, specifically, the seed in the pipe PA1. There is no residual unburned gas fuel remaining in the fire. Therefore, when combustion is resumed, the second combustion-supporting gas (air) can be smoothly supplied from the first burner-supporting combustion-supporting gas supply means 5A to the first burner 3A through the pipe PA1.

<< Effects of the abatement apparatus M of FIG. 1 >>
As described above, according to the abatement apparatus M of FIG. 1 described above, as described above, when combustion or thermal decomposition of the gas to be treated by the flame is stopped, unburned unburned gas fuel in the seed flame The reverse flow prevention means 6 is provided for preventing the phenomenon of reverse flow of the gas and the like toward the combustion supporting gas supply means 5 side. For this reason, the conventional malfunction by such a backflow of unburned gas fuel etc. can be eliminated. Specifically, after combustion or thermal decomposition is stopped, there is no risk of unburned gas fuel or the like igniting on the side of the combustion-supporting gas supply means 5, and only the first flame is maintained and the first burner 3A or The flame of 2 burner 3B can be stopped. In addition, when combustion is resumed, the supply of the second combustion-supporting gas from the combustion-supporting gas supply means 5 to the combustion chamber 1 becomes smooth, and the gas to be treated is rendered harmless by complete combustion quickly and without delay from the time when combustion is resumed. Is possible.

  In particular, in the abatement apparatus M of FIG. 1, as a specific configuration of the backflow prevention unit 6, the second combustion support from the combustion support gas supply unit 5 to the burner 3 even after the combustion or thermal decomposition is stopped. The supply of the second combustion-supporting gas from the combustion-supporting gas supply means 5 is forcibly stopped because the second supply of combustion-supporting gas after the combustion is stopped is adopted. Since it is not necessary to add a control system such as a valve separately, the control system of the entire apparatus can be simplified and the cost can be reduced.

  In addition, according to the second continuous combustion-supporting gas supply system after the combustion (pyrolysis) is stopped as described above, the second combustion-supporting gas is combusted even after the combustion or thermal decomposition is stopped, as before the stop. Since the supply to the chamber 1 continues, the pressure in the combustion chamber 1 can be kept high. For this reason, for example, when a known central scrubber is provided downstream of the abatement apparatus M as one of the factory facilities using this type of abatement apparatus M, the central scrubber and the abatement apparatus M By generating a pressure difference with the combustion chamber 1, the flow of the processing gas from the combustion chamber 1 of the detoxifying device M to the central scrubber side (the gas to be detoxified by the detoxifying device M) can flow. Since the unburned unburned gas fuel or the like remaining on the flow is discharged from the combustion chamber 1 of the abatement apparatus M to the central scrubber side, such unburned unburned gas fuel or the like is burned in the combustion chamber 1. The phenomenon of the reverse flow from the fuel supporting gas supply means 5 to the side can be more effectively prevented.

<< Characteristics of the abatement apparatus M in FIG. 2 >>
FIG. 2 is a schematic view of an abatement apparatus that is a second embodiment of the present invention. 2 is different from the abatement apparatus M of FIG. 1 in the specific configuration of the backflow prevention means 6, and the other configuration is the same as that of the abatement apparatus M of FIG. Therefore, in the abatement apparatus M of FIG. 2, the same members as those of the abatement apparatus M of FIG. In the following description, only a specific configuration of the backflow prevention means 6 different from the abatement apparatus M of FIG. 1 in the abatement apparatus M of FIG. 2 will be described.

  In the abatement apparatus M of FIG. 2, as an example of a specific configuration of the backflow prevention unit 6, the burner gas supply unit 5 (specifically, the first burner-supporting burnt gas supply unit 5 </ b> A) to the burner 3. A valve V is provided in the middle of the pipe PA1 for supplying the second combustion-supporting gas (specifically, air) to the (specifically, the first burner 3A). In addition, although illustration is abbreviate | omitted, you may provide the valve | bulb V in piping PA2 for supplying 1st combustion-supporting gas (flammable fuel).

  Further, in the abatement apparatus M of FIG. 2, the valve V is installed in the vicinity of the abatement apparatus body 2, and the length of the pipe PA1 (2) downstream from the valve V is set as short as possible. As a whole, the amount of unburned gas fuel and the like accumulated in the pipe PA1 (2) is reduced.

<< Effects of the abatement device M of FIG. 2 >>
The abatement device M of FIG. 2 described above also has a specific configuration, like the exclusion device M of FIG. 1, when the combustion or thermal decomposition of the gas to be treated by the flame is stopped, the unburned residue in the seed fire 1 is provided with the backflow prevention means 6 for preventing the unburned gas fuel or the like from flowing back to the combustion-supporting gas supply means 5 side. Therefore, as with the excluding device M in FIG. The flame of the first burner 3A or the second burner 3B can be stopped, and the gas to be treated can be made harmless by complete combustion quickly and without delay from the time of restarting combustion.

  In particular, in the abatement apparatus M of FIG. 2, as a specific configuration of the backflow prevention means 6, as described above, the second support gas (air) from the support gas supply means 5 to the burner 3. The structure which provided the valve | bulb V in the middle of piping PA1 for supplying this was employ | adopted. For this reason, even if the supply of the second combustion-supporting gas (air) from the combustion-supporting gas supply means 5 to the combustion chamber 1 is stopped, the above-described reverse flow phenomenon is prevented by closing the valve V. When stopping combustion or pyrolysis, in addition to stopping the supply of the first support gas (combustible fuel), it is also possible to stop the supply of the second support gas (air). The running cost can be reduced by stopping the gas.

<< Other embodiments >>
The present invention is not limited to the embodiments described above, and many modifications can be made by those having ordinary knowledge in the art within the technical idea of the present invention. For example, as another embodiment, an embodiment in which the second burner 3B and the corresponding second burner-supporting combustible gas supply means 5B are omitted in the abatement apparatus M of FIG. 1 or 2 is adopted. You can also. In addition, an embodiment in which the first burner 3A and the corresponding first burner-supporting combustible gas supply means 5A are omitted may be employed.

DESCRIPTION OF SYMBOLS 1 Combustion chamber 1A Top plate 2 Detoxifying device main body 3 Burner 3A 1st burner 3B 2nd burner 4 Pilot burner 5 Combustion gas supply means 5A 1st burner corresponding | compatible flame support gas supply means 5B 2nd burner corresponding | combustibility Gas supply means 6 Backflow prevention means 7 First cylinder wall 8 Second cylinder wall 9 Burner gas chamber 11 Blower H Ejection hole M Detoxifier N1, N2 Nozzle PA1, PA2 Piping V Valve

Claims (5)

A detoxification device that detoxifies the gas to be treated by combustion or thermal decomposition,
A detoxifying device body comprising a combustion chamber into which the gas to be treated is introduced;
A burner for forming a flame necessary for the combustion or pyrolysis in the combustion chamber;
A pilot burner that forms the required fire for ignition of the burner;
Means for supplying combustible fuel necessary for forming the flame to the burner as a first combustion-supporting gas, and supplying air or oxygen required for formation of the flame to the burner as a second combustion-supporting gas. A combustion-supporting gas supply means functioning as a means;
A burner gas chamber in which the first combustion-supporting gas and the second combustion-supporting gas are mixed to cover the outside of the combustion chamber ;
Backflow prevention that prevents a phenomenon in which a substance present in the combustion chamber flows backward to the burner gas chamber and the combustion-supporting gas supply means when the combustion or thermal decomposition of the gas to be treated by the flame is stopped. And an abatement apparatus comprising the means. 2. The abatement apparatus according to claim 1, wherein only the combustion of the pilot burner is maintained even after the combustion of the gas to be treated or the thermal decomposition is stopped. The backflow prevention means continues to supply the second combustion-supporting gas from the combustion-supporting gas supply means to the burner even after the combustion or pyrolysis of the gas to be treated is stopped. The abatement apparatus according to claim 1 or 2. As the backflow prevention means, a valve is provided in the middle of a pipe for supplying the first support gas or the second support gas to the burner from the support gas supply means. The abatement apparatus according to claim 1 or 2. The abatement apparatus according to claim 4, wherein the valve is installed in the vicinity of the abatement apparatus main body.

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