JP6624487B2 - Air stage device - Google Patents

Description

  Aspects of the present invention generally relate to an air stage device.

  The air stage device is used for, for example, an exposure device and an inspection device for semiconductors and liquid crystals. In the field of semiconductors, the size of semiconductor wafers tends to increase in order to improve the throughput of devices. In response to an increase in the size of a semiconductor wafer, an air stage device used for an exposure apparatus and an inspection apparatus has been increasing in size.

  For example, the air stage device includes an X-axis stage and a Y-axis stage. For example, the Y-axis stage is provided on the X-axis stage, and moves in a direction orthogonal to the moving direction of the X-axis stage. In this case, when the size of the air stage device increases, the moment (for example, yawing) generated on the X-axis stage based on the movement of the Y-axis stage may increase. For example, when the yawing generated on the X-axis stage becomes large, a load in the left-right direction is applied to the guide portion of the X-axis stage, and the guide portion may be deformed.

  The deformation of the guide portion tends to increase as the size of the air stage device increases. Therefore, the deformation of the guide portion cannot be ignored. It is required to reduce the deformation of the guide portion of the air stage device.

JP 2014-85504 A

  The present invention has been made based on the recognition of such a problem, and an object of the present invention is to provide an air stage device that can reduce deformation of a guide portion.

A first aspect of the present invention is a hollow structure having a surface plate having an upper surface and a hydrostatic gas bearing, wherein a hollow portion includes an upper portion, a lower portion, and a side portion extending in a first direction, and a hollow portion extends in the first direction. A first guide portion made of ceramic , the lower portion being fixed to the upper surface, and a first movement portion provided at a position facing the first guide portion and moving along the first direction. A body, a second ceramic guide portion provided on the first moving body and extending in a second direction orthogonal to the first direction, and provided at a position facing the second guide portion. And a static pressure gas bearing having a second moving body that moves along the second direction , and a ceramic-made gas bearing that is fixed to the side portion and the upper surface and suppresses deformation of the first guide portion . An air stage device comprising: a fixing portion.

  According to this air stage device, since the fixing portion is fixed to the upper surface of the surface plate and the side portion of the first guide portion, the rigidity of the first guide portion is improved, and the deformation of the first guide portion is improved. Can be reduced.

  According to a second aspect of the present invention, in the first aspect, a plurality of the fixing portions are provided, and the plurality of fixing portions are provided on the side portions on both sides of the first guide portion. It is a stage device.

  According to this air stage device, since the fixing portions are provided on both sides of the first guide portion, the deformation of the first guide portion can be further reduced.

  In a third aspect based on the second aspect, a plurality of parts of the plurality of fixing portions are provided on one of the side portions on both sides of the first guide portion, and the plurality of fixing portions are provided. The air stage device is characterized in that another part of the plurality of portions is provided on one of the side portions on both sides of the first guide portion.

  According to the air stage device, since the plurality of fixing portions are provided on both sides of the first guide portion, the deformation of the first guide portion can be further reduced.

  In a fourth aspect based on any one of the first to third aspects, the fixing portion is fixed to the first guide portion by a fastening member, and a position of the fastening member is in a vertical direction of the fixing portion. An air stage device which is located above a center.

  According to this air stage device, since the fixing portion is fixed to the first guide portion by the fastening member above the vertical center of the fixing portion, the deformation of the first guide portion is further reduced. Can be.

  In a fifth aspect based on any one of the first to fourth aspects, the first guide portion is fixed by a plurality of fastening members arranged in a line in a moving direction of the first moving body. An air stage device fixed to a board.

  According to this air stage device, it is possible to secure a wider area of the sliding surface of the first moving body. Here, when the first guide portion is fixed to the surface plate by a plurality of fastening members arranged in a line in the moving direction of the first moving body, the X-axis guide portion is moved not only in the horizontal direction but also in the vertical direction. Deform to. On the other hand, this air stage device includes a fixing portion. Therefore, horizontal and vertical deformation of the first guide portion can be reduced.

  In a sixth aspect based on any one of the first to fifth aspects, the vertical dimension of the fixed portion is set to a value that does not interfere with the fixed portion when the first moving body moves. An air stage device characterized by the above.

  According to this air stage device, since the first moving body does not interfere with the fixed portion, the first moving body can be moved over the entire stroke.

  In a seventh aspect based on any one of the first to sixth aspects, the first guide portion has a rib provided in the hollow portion and connected to the upper portion and the lower portion. It is a stage device.

  According to the air stage device, even when the first guide portion has the rib provided in the hollow portion, the deformation of the first guide portion can be reduced because the fixed portion is provided. The rigidity of the guide can be improved by having the rib.

  In an eighth aspect based on any one of the first to seventh aspects, a plurality of the first guide portions are provided, and the plurality of first guide portions are arranged in a moving direction of the second moving body. An air stage device provided side by side.

  According to the air stage device, since the plurality of first guide portions are provided side by side in the moving direction of the second moving body, the deflection of the first moving body and the second guide portion is reduced. Can be. For example, in a large-sized air stage device having one side longer than 1 meter, the first moving body bends due to its own weight of the first moving body, the second guide portion, and the second moving body. Sometimes. On the other hand, in this air stage device, since the plurality of first guide portions are provided side by side in the direction in which the second moving body moves, the first moving body, the second guide portion, and Due to the weight of the second moving body, the bending of the first moving body can be reduced.

  A ninth invention is the air stage device according to any one of the first to eighth inventions, wherein the number of the first guide portions is larger than the number of the second guide portions.

  According to this air stage device, it is possible to reduce the bending generated in the first moving body due to the weight of the first moving body, the second guide portion, and the second moving body.

  In a tenth aspect based on the ninth aspect, the first moving body is a side plate provided at a position facing a surface of the side portion, and the first moving body is a side plate of the plurality of first guide portions. An air stage device having side plates provided on both sides of a first guide portion provided in a central region in a movement direction of a second moving body.

According to this air stage device, it is possible to restrain the central portion of the first moving body and suppress galling of the air stage device due to assembly accuracy of the first guide portion and the second guide portion .
In an eleventh aspect based on any one of the first to tenth aspects, the first guide portion is fixed to the surface plate such that the entire lower portion contacts the upper surface. It is an air stage device.

  According to an aspect of the present invention, an air stage device capable of reducing deformation of a guide portion is provided.

It is a typical perspective view showing the air stage device concerning this embodiment. It is a typical perspective view showing the case where the air stage device concerning this embodiment was seen from the surface plate side. It is a typical perspective view showing the air stage device concerning the modification of this embodiment. It is a schematic plan view showing the X-axis guide part of this embodiment. It is a typical perspective view showing the case where the X-axis guide part and the fixed part of this embodiment are seen obliquely. It is a typical perspective view showing the case where the fixing part of this embodiment is expanded. FIG. 2 is a schematic plan view when the X-axis stage shown in FIG. 1 is viewed in a direction of an arrow A11. FIG. 7 is a schematic plan view when the fixing portion illustrated in FIG. 6 is viewed in a direction of an arrow 13. It is a typical perspective view showing the air stage device concerning a comparative example of this embodiment. FIG. 5 is a schematic plan view illustrating an air stage device according to a comparative example. FIG. 5 is a schematic plan view illustrating an air stage device according to a comparative example. It is a schematic plan view explaining horizontal deformation of an X-axis guide part. FIG. 5 is a schematic plan view illustrating vertical deformation of an X-axis guide section. It is a typical perspective view showing the model of the air stage device in the simulation which the inventor performed. It is a schematic plan view showing the model of the X-axis guide part and the fixed part in this simulation. It is a schematic plan view explaining the conditions of this simulation. It is a typical perspective view showing an example of a simulation result of an eigenvalue of an air stage device. It is a typical perspective view showing an example of a simulation result of an eigenvalue of an air stage device. It is a typical perspective view showing an example of a simulation result of the amount of deformation of a horizontal direction of an X-axis guide part. It is a typical perspective view showing an example of a simulation result of the amount of deformation of a horizontal direction of an X-axis guide part. FIG. 9 is a schematic perspective view illustrating an example of a simulation result of a vertical deformation amount of an X-axis guide portion. FIG. 9 is a schematic perspective view illustrating an example of a simulation result of a vertical deformation amount of an X-axis guide portion.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each of the drawings, the same components are denoted by the same reference numerals, and a detailed description is omitted as appropriate.
FIG. 1 is a schematic perspective view illustrating an air stage device according to the present embodiment.
FIG. 2 is a schematic perspective view illustrating a case where the air stage device according to the present embodiment is viewed from the surface plate side.
FIG. 3 is a schematic perspective view illustrating an air stage device according to a modification of the present embodiment.
FIG. 4 is a schematic plan view illustrating the X-axis guide portion of the present embodiment.
In FIG. 2, the table is omitted for convenience of explanation.
FIG. 4A is a schematic plan view when the X-axis guide section (first guide section) 110 shown in FIG. 1 is viewed in the direction of arrow A11. FIG. 4B is a schematic plan view when the X-axis guide portion 110a shown in FIG. 3 is viewed in the direction of arrow A12.

  The air stage device 10 according to the present embodiment includes a surface plate 20, a static pressure gas bearing 30, and a fixing portion 40. The platen 20 is provided below the static pressure gas bearing 30 and the fixing portion 40 and supports the static pressure gas bearing 30 and the fixing portion 40. As a material of the surface plate 20, for example, stone or the like is used. As a material of the fixing portion 40, for example, ceramic or the like can be used.

  The static pressure gas bearing 30 includes an X-axis stage 100 and a Y-axis stage 200. The X-axis stage 100 has an X-axis guide section 110 and an X-axis moving body (first moving body) 120. The Y-axis stage 200 has a Y-axis guide section (second guide section) 210 and a Y-axis moving body (second moving body) 220.

  The X-axis moving body 120 is provided at a position facing the X-axis guide 110. The X-axis moving body 120 has an X-axis air pad 121, an X-axis side plate 123, and an X-axis table 125.

  The X-axis guide portion 110 is provided on the surface plate 20 and is fixed to the surface plate 20 by a fastening member such as a screw or a bolt. The details of fixing the X-axis guide 110 will be described later. As shown in FIGS. 1 and 2, the X-axis guide 110 extends in one axis direction (X-axis direction). As shown in FIG. 4A, the X-axis guide 110 has a hollow structure. That is, the X-axis guide unit 110 has an upper part 111, a lower part 112, a right part 113, and a left part 114. The X-axis guide portion 110 has a hollow portion surrounded by an upper portion 111, a lower portion 112, a right side portion 113, and a left side portion 114. The hollow structure (hollow portion) of the X-axis guide 110 extends in the X-axis direction (first direction). As a material of the X-axis guide portion 110, for example, ceramic or the like can be used. In the air stage device 10 shown in FIGS. 1 and 2, three X-axis guides 110 are provided. The plurality of X-axis guides 110 are provided side by side in the Y-axis direction. Note that the number of X-axis guide units 110 is not limited to “3”.

  The X-axis air pad 121 is provided between the X-axis guide section 110 and the X-axis table 125, and is fixed to the X-axis table 125. When a plurality of X-axis guides 110 are provided, the X-axis air pad 121 is provided between each of the plurality of X-axis guides 110 and the X-axis table 125. The X-axis air pad 121 has a hole (not shown), and a pressurized gas (for example, air) can be ejected from the hole to the upper surface 111a of the X-axis guide 110 (see FIG. 4A).

  The X-axis side plate 123 is located between the surface plate 20 and the X-axis table 125, and is located on both side surfaces (the right side surface 113a and the left side surface 114a: see FIG. 4A) of the X-axis guide portion 110. It is provided at an opposing position and is fixed to the X-axis air pad 121 and the X-axis table 125. The X-axis side plates 123 are provided on both sides of the X-axis guide portion 110 provided in a central region in the Y-axis direction among the plurality of X-axis guide portions 110.

  The X-axis table 125 is provided on the X-axis guide section 110 via the X-axis air pad 121, and holds the X-axis air pad 121 and the X-axis side plate 123.

  The X-axis moving body 120 sends a pressurized gas between the X-axis air pad 121 and the X-axis guide 110, and floats from the X-axis guide 110 in the direction of arrow A1 shown in FIG. (Axial direction). In other words, the X-axis moving body 120 ejects pressurized gas from the hole of the X-axis air pad 121 toward the upper surface 111a of the X-axis guide 110, and is shown in FIG. It can move in the direction of arrow A1 (X-axis direction). In a state where the X-axis moving body 120 floats from the X-axis guide section 110, the gap between the X-axis air pad 121 and the X-axis guide section 110 is, for example, about 4 micrometers (μm).

  An X-axis air pad 122 (see FIG. 7) is provided between the X-axis side plate 123 and both sides (the right side 113 and the left side 114) of the X-axis guide 110. The X-axis moving body 120 ejects pressurized gas from the holes of the X-axis air pad 122 toward both sides (the right side 113 and the left side 114) of the X-axis guide 110, and is separated from the X-axis guide 110. Can move in the direction of the arrow A1 shown in FIG. 1 (X-axis direction). That is, the X-axis stage 100 is a non-contact type bearing (for example, an air slide) that moves the X-axis moving body 120 while floating from the X-axis guide 110. When the X-axis moving body 120 is separated from the X-axis guide 110, the gap between the X-axis air pad 122 and the X-axis guide 110 is, for example, about 3 μm.

  The X-axis guide portion 110 and the X-axis side plate 123 regulate the movement direction of the X-axis moving body 120 in one axis direction. That is, the X-axis guide portion 110 and the X-axis side plate 123 serve as a guide for guiding the X-axis moving body 120 in one axis direction. In the present embodiment, the one axis direction in which the X-axis moving body 120 moves is the X-axis direction.

  The Y-axis moving body 220 is provided at a position facing the Y-axis guide section 210. The Y-axis moving body 220 has a Y-axis air pad 221, a Y-axis side plate 223, and a Y-axis table 225.

  The Y-axis guide section 210 is provided on the X-axis table 125, and is fixed to the X-axis table 125 by fastening members such as screws and bolts. As shown in FIG. 1, the Y-axis guide section 210 extends in one axis direction (Y-axis direction). The Y-axis guide section 210 has a hollow structure. The hollow structure of the Y-axis guide 210 extends in the Y-axis direction. As a material of the Y-axis guide portion 210, for example, a ceramic or the like is used. In the air stage device 10 shown in FIGS. 1 and 2, two Y-axis guide portions 210 are provided. The plurality of Y-axis guides 210 are provided side by side in the X-axis direction. Note that the number of Y-axis guide portions 210 is not limited to “2”.

  The Y-axis air pad 221 is provided between the Y-axis guide section 210 and the Y-axis table 225, and is fixed to the Y-axis table 225. When a plurality of Y-axis guides 210 are provided, the Y-axis air pad 221 is provided between each of the plurality of Y-axis guides 210 and the Y-axis table 225. The Y-axis air pad 221 has a hole (not shown), and pressurized gas can be ejected from the hole onto the upper surface of the Y-axis guide portion 210.

  The Y-axis side plate 223 is provided between the X-axis table 125 and the Y-axis table 225, and is fixed to the Y-axis air pad 221 and the Y-axis table 225. In the air stage device 10 shown in FIGS. 1 and 2, the Y-axis side plates 223 are provided on both sides of one of the two Y-axis guide portions 210.

  The Y-axis table 225 is provided on the Y-axis guide section 210 via the Y-axis air pad 221, and holds the Y-axis air pad 221 and the Y-axis side plate 223.

  The Y-axis moving body 220 sends a pressurized gas between the Y-axis air pad 221 and the Y-axis guide 210, and floats from the Y-axis guide 210 in the direction of the arrow A2 shown in FIG. (Axial direction). In other words, the Y-axis moving body 220 blows out a pressurized gas from the hole of the Y-axis air pad 221 toward the upper surface of the Y-axis guide section 210 and floats from the Y-axis guide section 210 as shown in FIG. It can move in the direction of A2 (Y-axis direction). A Y-axis air pad (not shown) is provided between the Y-axis side plate 223 and both sides of the Y-axis guide 210. The Y-axis moving body 220 ejects a pressurized gas from the hole of the Y-axis air pad toward both sides of the Y-axis guide section 210, and separates from the Y-axis guide section 210 in the direction of arrow A2 shown in FIG. (Y-axis direction). That is, the Y-axis stage 200 is a non-contact type bearing (for example, an air slide) that moves the Y-axis moving body 220 while floating from the Y-axis guide section 210.

  The Y-axis guide section 210 and the Y-axis side plate 223 regulate the movement direction of the Y-axis moving body 220 in one axis direction. That is, the Y-axis guide portion 210 and the Y-axis side plate 223 serve as a guide for guiding the Y-axis moving body 220 in one axis direction. In the present embodiment, the one axis direction in which the Y axis moving body 220 moves is the Y axis direction.

  The X-axis stage 100 of the air stage device 10a illustrated in FIG. 3 has an X-axis guide 110a. As shown in FIG. 4B, the X-axis guide 110a has a hollow rib structure. That is, the X-axis guide portion 110a has an upper portion 111, a lower portion 112, a right side portion 113, a left side portion 114, and a rib 115. The rib 115 is connected to the upper part 111 and the lower part 112. The X-axis guide 110a shown in FIG. 4B has two ribs 115. In this case, the X-axis guide portion 110a has a hollow portion surrounded by the upper portion 111, the lower portion 112, the right portion 113, and the right rib 115. The X-axis guide portion 110a has a hollow portion surrounded by the upper portion 111, the lower portion 112, the right rib 115, and the left rib 115. The X-axis guide 110a has a hollow portion surrounded by an upper portion 111, a lower portion 112, a left rib 115, and a left portion 114. That is, the rib 115 is provided in a hollow portion surrounded by the upper part 111, the lower part 112, the right part 113, and the left part 114, and is connected to the upper part 111 and the lower part 112. The hollow structure of the X-axis guide 110a extends in the X-axis direction. The other structure of the air stage device 10a shown in FIG. 3 is the same as the structure of the air stage device 10 described above with reference to FIGS.

  Here, the air stage device has been increasing in size in response to, for example, an increase in the size of a semiconductor wafer. When the size of the air stage device increases, the moment (for example, yawing) generated on the X-axis stage based on the movement of the Y-axis stage may increase. For example, when the yawing generated on the X-axis stage becomes large, a load in the left-right direction is applied to the guide portion of the X-axis stage, and the guide portion may be deformed. Note that “yaw” refers to a movement about an axis that intersects a vertical direction (vertical direction) with respect to a traveling direction (for example, the X-axis direction). The deformation of the guide portion tends to increase as the size of the air stage device increases. Therefore, the deformation of the guide portion cannot be ignored.

On the other hand, the air stage devices 10 and 10a according to the present embodiment include the fixing unit 40. The fixing portion 40 is fixed to the base 20 and the X-axis guide portions 110 and 110a, and suppresses deformation of the X-axis guide portions 110 and 110a.
According to the present embodiment, the rigidity of the X-axis guides 110 and 110a is improved by fixing the fixing unit 40 to the base 20 and the X-axis guides 110 and 110a, and the X-axis guides 110 and 110a are improved. Can be reduced.

As described above, the plurality of X-axis guides 110 are provided side by side in the direction in which the Y-axis moving body 220 moves (Y-axis direction). Thereby, the deflection of the X-axis moving body 120 and the Y-axis guide unit 210 can be reduced.
For example, in a large-sized air stage device having a dimension longer than one meter (m) on one side, the X-axis moving body may bend due to its own weight of the X-axis moving body, the Y-axis guide, and the Y-axis moving body. There is. On the other hand, in the present embodiment, since the plurality of X-axis guides 110 are provided side by side in the direction in which the Y-axis moving body 220 moves (Y-axis direction), the X-axis moving body 120 and the Y-axis guide The deflection of the X-axis moving body 120 can be reduced by the weight of the section 210 and the Y-axis moving body 220.

  Further, even when the number of X-axis guides 110 installed is greater than the number of Y-axis guides 210 installed, the X-axis moving body 120, the Y-axis guide 210, and the Y-axis moving body 220 move in the X-axis due to their own weight. The flexure occurring in the body 120 can be reduced.

  Further, since the X-axis side plates 123 are provided on both sides of the X-axis guide portion 110 provided in the center region in the Y-axis direction of the plurality of X-axis guide portions 110, the central portion of the X-axis moving body 120 is The air stage device 10 can be restrained from galling due to the assembly accuracy of the X-axis guide portion 110 and the Y-axis guide portion 210.

The fixing section 40 of the present embodiment will be further described with reference to the drawings.
FIG. 5 is a schematic perspective view illustrating a case where the X-axis guide portion and the fixing portion of the present embodiment are viewed obliquely.
FIG. 6 is a schematic perspective view illustrating a case where the fixing portion of the present embodiment is enlarged.
FIG. 7 is a schematic plan view when the X-axis stage shown in FIG. 1 is viewed in the direction of arrow A11.
FIG. 8 is a schematic plan view when the fixing portion shown in FIG. 6 is viewed in the direction of arrow 13.
In the description regarding FIGS. 5 to 8, the air stage device 10 illustrated in FIG. 1 will be described as an example.

  As shown in FIGS. 5 and 6, the fixing unit 40 is fixed to the surface plate 20 and the X-axis guide unit 110. Specifically, the fixing part 40 is fixed to the surface plate 20 and the right side part 113 of the X-axis guide part 110. That is, the fixing portion 40 is fixed in contact with the upper surface 21 of the surface plate 20 and the right side surface 113a of the X-axis guide portion 110 (see FIGS. 4A and 4B). The fixed part 40 is fixed to the surface plate 20 and the left side part 114 of the X-axis guide part 110. That is, the fixing portion 40 is fixed in contact with the upper surface 21 of the surface plate 20 and the left side surface 114a of the X-axis guide portion 110 (see FIGS. 4A and 4B).

  As described above, the fixing portion 40 is fixed to both side portions (the right side portion 113 and the left side portion 114) of the X-axis guide portion 110. Thereby, the deformation of the X-axis guide portion 110 can be further reduced.

  As shown in FIG. 5, in the air stage device 10 according to the present embodiment, a plurality of fixing portions 40 are fixed to the right side portion 113 of the X-axis guide portion 110. Further, a plurality of fixing parts 40 are fixed to the left side part 114 of the X-axis guide part 110. That is, the plurality of fixing portions 40 are fixed to both sides of the X-axis guide portion 110, respectively. Thereby, the deformation of the X-axis guide portion 110 can be further reduced. Further, since the fixing portion 40 is provided at a position where the amount of deformation of the X-axis guide portion 110 is relatively large, the deformation of the X-axis guide portion 110 can be efficiently reduced.

  As shown in FIG. 6, the fixing portion 40 has a first hole 41 and a second hole 42. The fixing part 40 is fixed to each of the right side part 113 and the left side part 114 of the X-axis guide part 110 by a fastening member such as a screw or a bolt inserted into the first hole 41. Further, the fixing portion 40 is fixed to the surface plate 20 by a fastening member such as a screw or a bolt inserted into the second hole 42.

  As shown in FIG. 8, the position (fastening position) where the fixing portion 40 is fixed to the X-axis guide portion 110 by the fastening member inserted into the first hole 41 is from the center C1 of the fixing portion 40 in the vertical direction. Is also above. Thereby, the deformation of the X-axis guide portion 110 can be further reduced.

  In a state where the fixing portion 40 is fixed to the X-axis guide portion 110, the length L1 in the X-axis direction of the fixing portion 40 is, for example, about 100 mm (mm). In a state where the fixing part 40 is fixed to the X-axis guide part 110, the length L2 in the vertical direction of the fixing part 40 is, for example, about 50 mm. In a state where the fixing portion 40 is fixed to the X-axis guide portion 110, the length L3 in the Y-axis direction of the fixing portion 40 is, for example, about 50 mm. In a state where the fixing portion 40 is fixed to the X-axis guide portion 110, the distance L4 between the bottom surface 44 of the fixing portion 40 and the center of the first hole 41 of the fixing portion 40 is, for example, about 36 to 37 mm. It is.

  As shown in FIGS. 5 and 6, the X-axis guide 110 has a first hole 116 and a second hole 117. The X-axis guide 110 shown in FIGS. 5 and 6 has a plurality of first holes 116 and a plurality of second holes 117. The plurality of first holes 116 are arranged in a line (one axis) in the X-axis direction. The plurality of second holes 117 are arranged in a line (one axis) in the X-axis direction.

  When the X-axis guide unit 110 is fixed to the surface plate 20, for example, a tool is inserted into the first hole 116. When the fastening member 301 is fastened to the surface plate 20 through the second hole 117, the X-axis guide portion 110 is fixed to the surface plate 20. That is, the X-axis guide section 110 is fixed to the surface plate 20 by the plurality of fastening members 301 arranged in a line (one axis) in the X-axis direction.

  According to this, the sliding surface of the X-axis moving body 120 can be secured. That is, as described above with reference to FIGS. 1 to 4, the X-axis moving body 120 jets the pressurized gas from the hole of the X-axis air pad 121 toward the upper surface 111 a of the X-axis guide 110. Therefore, when the X-axis guide portion 110 is fixed to the surface plate 20 by the plurality of fastening members 301 arranged in a line in the X-axis direction, it is possible to secure a larger area of the surface to which the pressurized gas is applied. .

Here, when the X-axis guide portion is fixed to the surface plate by a plurality of fastening members arranged in a line in the X-axis direction, the X-axis guide portion is not only in the horizontal direction (for example, the Y-axis direction) but also in the vertical direction. Deform to.
On the other hand, the air stage device 10 according to the present embodiment includes the fixing unit 40. Therefore, horizontal and vertical deformation of the X-axis guide 110 can be reduced. The details will be described later.

As shown in FIG. 7, the X-axis side plate 123 is fixed to the X-axis table 125 and extends from the X-axis table 125 toward the fixing unit 40. There is a gap between the bottom surface 123a of the X-axis side plate 123 and the upper surface 45 of the fixed part 40. The distance D1 between the bottom surface 44 of the fixing portion 40 and the upper surface 45 of the fixing portion 40 is the same as the vertical length L2 of the fixing portion 40 (for example, about 50 mm). The distance D2 between the bottom surface 44 of the fixing portion 40 and the bottom surface 123a of the X-axis side plate 123 is, for example, about 68 mm. Thus, a gap exists between the bottom surface 123a of the X-axis side plate 123 and the upper surface 45 of the fixing portion 40. The distance (D2-D1) between the bottom surface 44 of the fixing portion 40 and the upper surface 45 of the fixing portion 40 is, for example, about 18 mm. The distance D3 between the bottom surface 44 of the fixing part 40 and the bottom surface 125a of the X-axis table 125 is, for example, about 205 mm. As described above, the vertical length L2 of the fixed unit 40 is set to a value that does not interfere with the fixed unit 40 when the X-axis moving body 120 moves. That is, the upper surface 45 of the fixing portion 40 is present at a position lower than the bottom surface 123a of the X-axis side plate 123.
According to this, the X-axis moving body 120 can be moved over the entire stroke.

Next, a modification of the X-axis guide portion 110 of the present embodiment will be further described with reference to the drawings.
FIG. 9 is a schematic perspective view illustrating an air stage device according to a comparative example of the present embodiment.
FIG. 10 is a schematic plan view illustrating an air stage device according to this comparative example.
FIG. 11 is a schematic plan view illustrating an air stage device according to the comparative example.
FIG. 10 is a schematic plan view when the air stage device 10a shown in FIG. 9 is viewed in the direction of arrow A13. FIG. 11 is a schematic plan view when the air stage device 10a shown in FIG. 9 is viewed in the direction of arrow A14.

  The air stage device 10 described above with reference to FIGS. On the other hand, the air stage device 10b according to the present modified example does not include a fixing portion.

  As shown in FIG. 10, the air stage device 10b according to the present modification includes an X-axis linear motor 130. The X-axis linear motor 130 has a motor unit 131 and a coil unit 133. The motor section 131 of the X-axis linear motor 130 is provided on the upper surface 21 of the surface plate 20. The coil part 133 of the X-axis linear motor 130 is provided on the bottom 125 a of the X-axis table 125.

  The X-axis moving body 120 sends a pressurized gas between the X-axis air pad 121 and the X-axis guide 110, and in a state of floating from the X-axis guide 110, the force generated by the X-axis linear motor 130. Receive. Thus, the X-axis moving body 120 can move in the direction of the arrow A1 shown in FIG. 9 and the direction of the arrow A3 shown in FIG. 11 (X-axis direction).

  As shown in FIG. 11, the air stage device 10b according to the present modification includes a Y-axis linear motor 230. The Y-axis linear motor 230 has a motor unit 231 and a coil unit 233. The motor unit 231 of the Y-axis linear motor 230 is provided on the upper surface 125b of the X-axis table 125. The coil portion 233 of the Y-axis linear motor 230 is provided on the bottom surface 225a of the Y-axis table 225, like the Y-axis air pad 221 and the Y-axis side plate 223.

  The Y-axis moving body 220 sends a pressurized gas between the Y-axis air pad 221 and the Y-axis guide 210, and the force generated by the Y-axis linear motor 230 while floating from the Y-axis guide 210. Receive. Thereby, the Y-axis moving body 220 can move in the direction of the arrow A2 shown in FIG. 9 and the direction of the arrow A4 shown in FIG. 10 (Y-axis direction).

  The air stage device 10 described above with reference to FIGS. 1 to 8 includes an X-axis linear motor 130 and a Y-axis linear motor 230, similarly to the air stage device 10b according to the present modification. The other structure is the same as the structure of the air stage device 10 described above with reference to FIGS.

  For example, when the Y-axis moving body 220 moves in the direction of arrow A5 shown in FIG. 10, the X-axis moving body 120 receives a force (reaction force) in the direction of arrow A6 shown in FIG. Then, the X-axis moving body 120 tries to move in the direction of the arrow A6 shown in FIG. Specifically, when the Y-axis moving body 220 moves in the direction of arrow A5 shown in FIG. 10 under the force generated by the Y-axis linear motor 230, the motor unit 231 of the Y-axis linear motor 230 The force (reaction force) in the direction opposite to the arrow A5 shown in FIG. Since the motor unit 231 of the Y-axis linear motor 230 is provided on the upper surface 125b of the X-axis table 125, the X-axis moving body 120 receives the reaction force transmitted from the motor unit 231 of the Y-axis linear motor 230. Then, the X-axis moving body 120 tries to move in the direction of the arrow A6 shown in FIG. At this time, the X-axis guide 110 provided between the plurality of X-axis side plates 123 receives a force in the direction of arrow A7 shown in FIG.

  As described above with reference to FIGS. 1 to 4, the X-axis moving body 120 moves from the hole of the X-axis air pad 122 (see FIG. 6) toward both sides (the right side 113 and the left side 114) of the X-axis guide 110. The pressurized gas is ejected, and moves away from the X-axis guide 110. Therefore, the X-axis guide portion 110 does not directly receive a force from the X-axis side plate 123. However, the X-axis guide 110 receives a force from the X-axis side plate 123 via air. As a result, the X-axis guide portion 110 is deformed by receiving a force in the direction of the arrow A7 (Y-axis direction) shown in FIG. When the size of the air stage device 10b increases, the weights of the X-axis moving body 120 and the Y-axis moving body 220 increase. Then, the force that the X-axis guide 110 receives from the X-axis side plate 123 via air increases, so that the deformation of the X-axis guide 110 cannot be ignored.

FIG. 12 is a schematic plan view illustrating horizontal deformation of the X-axis guide portion.
FIG. 13 is a schematic plan view for explaining vertical deformation of the X-axis guide portion.
FIG. 12A and FIG. 13A are schematic plan views illustrating the periphery of the X-axis guide portion of the present embodiment. FIGS. 12B and 13B are schematic plan views illustrating the periphery of the X-axis guide portion according to the comparative example.

9 to 11 illustrate the deformation of the X-axis guide portion 110 that occurs based on the law of action and reaction.
Here, a moment (for example, yawing) generated on the X-axis stage 100 based on the movement of the Y-axis stage 200 will be described.

  For example, as shown by arrows A21 and A22 in FIG. 9, when the size of the air stage device 10 increases, the moment (yaw) applied to the X-axis stage 100 based on the movement of the Y-axis stage 200 increases. As shown in FIG. 9, when the X-axis moving body 120 moves with the Y-axis moving body 220 approaching one end of the Y-axis guide 210, a large moment (yaw) is generated by the X-axis stage 100.

  Then, as indicated by an arrow A8 in FIGS. 12A and 12B, the X-axis guide portion 110 receives a force from the X-axis side plate 123 via air and is deformed. Here, as shown in FIG. 12A, the air stage device 10 according to the present embodiment includes a fixing unit 40. The fixing unit 40 is fixed to the surface plate 20 and the X-axis guide unit 110, and suppresses the X-axis guide unit 110 from being deformed in the horizontal direction. Therefore, when a moment is generated in the X-axis stage 100, the deformation D11 of the X-axis guide 110 of the present embodiment is smaller than the deformation D12 of the X-axis guide 110 of the comparative example. Thereby, the fixing part 40 can reduce the deformation of the X-axis guide part 110 in the horizontal direction.

  As described above with reference to FIGS. 5 and 6, the X-axis guide section 110 is fixed to the surface plate 20 by the plurality of fastening members 301 arranged in a line in the X-axis direction. Therefore, as shown in FIGS. 13A and 13B, when the X-axis guide portion 110 receives a force in the direction of arrow A8, it deforms not only in the horizontal direction but also in the vertical direction. Here, as shown in FIG. 13A, the air stage device 10 according to the present embodiment includes a fixing unit 40. The fixing portion 40 is fixed to the surface plate 20 and the X-axis guide portion 110, and suppresses the X-axis guide portion 110 from being deformed in the vertical direction. Therefore, when a moment is generated in the X-axis stage 100, the deformation D13 of the X-axis guide 110 of the present embodiment is smaller than the deformation D14 of the X-axis guide 110 of the comparative example. Thereby, the fixing portion 40 can reduce the deformation of the X-axis guide portion 110 in the vertical direction.

In addition, the fixing unit 40 can improve the eigenvalue (eigenfrequency) of the air stage device 10.
The inventor performed simulations in the case where the fixing portion 40 was provided and in the case where the fixing portion 40 was not provided, and determined the eigenvalue of the air stage device 10, the deformation amount of the X-axis guide portion 110, The effect of the fixing part 40 on the pressure was examined. This will be further described with reference to the drawings.

FIG. 14 is a schematic perspective view illustrating a model of the air stage device in a simulation performed by the inventor.
FIG. 15 is a schematic plan view illustrating a model of the X-axis guide unit and the fixed unit in the simulation.
FIG. 16 is a schematic plan view illustrating the conditions of this simulation.

  As shown in FIG. 14, in this simulation, the models of the air stage device 10 described above with reference to FIG. 1 and the air stage device 10a described above with reference to FIG. 3 were used. In addition, as shown in FIGS. 15A to 15D, simulations were performed for the case where the X-axis guide portion has the rib 115 and the case where the X-axis guide portion did not have the rib 115. did. Further, as shown in FIGS. 15A to 15D, simulations were performed for a case where the fixing unit 40 was provided and a case where the fixing unit 40 was not provided.

In the model shown in FIG. 15A, the X-axis guide 110a has a rib 115. The fixed portion 40 is provided on each of the right side portion 113 of the X-axis guide portion 110a and the left side portion 114 of the X-axis guide portion 110a.
In the model shown in FIG. 15B, the X-axis guide 110a has a rib 115. The fixed portion 40 is not provided on each of the right side portion 113 of the X-axis guide portion 110a and the left side portion 114 of the X-axis guide portion 110a.
In the model shown in FIG. 15C, the X-axis guide 110 has no rib 115. The fixed portion 40 is provided on each of the right side portion 113 of the X-axis guide portion 110 and the left side portion 114 of the X-axis guide portion 110.
In the model shown in FIG. 15D, the X-axis guide section 110 does not have the rib 115. The fixed portion 40 is not provided on each of the right side portion 113 of the X-axis guide portion 110 and the left side portion 114 of the X-axis guide portion 110.

  As shown in FIG. 16, the length D21 of the X-axis guide 110a in the Y-axis direction is 320 mm. The length D22 in the vertical direction of the X-axis guide 110a is 170 mm. The length D21 in the Y-axis direction and the length D22 in the up-down direction are the same in the X-axis guide portion 110 having no rib 115. The length D23 of the fixing portion 40 in the up-down direction is 50 mm. The length D24 of the fixing portion 40 in the Y-axis direction is 50 mm.

  As indicated by an arrow A25 in FIG. 16, the X-axis guide portion 110a is fastened to the surface plate 20 by a fastening member such as a screw or a bolt at the center of the lower portion 112 in the Y-axis direction. As indicated by arrows A26 and A27 shown in FIG. 16, the fixing portion 40 provided on one side of the X-axis guide portion 110a is fixed to the surface plate 20 and the X-axis guide portion 110a by fastening members such as screws and bolts. Has been concluded. As shown by arrows A28 and A29 in FIG. 16, the fixing portion 40 provided on the other side of the X-axis guide portion 110a is fixed to the surface plate 20 and the X-axis guide portion 110a by fastening members such as screws and bolts. Has been concluded. These constraint conditions are the same even when a model of the X-axis guide portion 110 having no rib 115 is used.

  Under such a constraint condition, as shown by an arrow A24 shown in FIG. 16, the X-axis guide portion 110a provided in the central region in the Y-axis direction of the plurality of X-axis guide portions 110a Axial loads were given with equal distribution. The portion to which the load is applied is the upper part 111 of the X-axis guide part 110a. The magnitude of the load at this time is 490 Newton (N).

17 and 18 are schematic perspective views illustrating an example of a simulation result of the eigenvalue of the air stage device 10.
19 and 20 are schematic perspective views illustrating an example of a simulation result of the amount of deformation of the X-axis guide portion in the horizontal direction.
FIGS. 21 and 22 are schematic perspective views illustrating an example of a simulation result of the amount of deformation of the X-axis guide portion in the vertical direction.

FIGS. 17A, 19A, and 21A are schematic perspective views illustrating an example of a simulation result when the model illustrated in FIG. 15A is used.
FIGS. 17 (b), 19 (b), and 21 (b) are schematic perspective views showing an example of a simulation result when using the model shown in FIG. 15 (b).
FIGS. 18A, 20A, and 22A are schematic perspective views illustrating an example of a simulation result when the model illustrated in FIG. 15C is used.
FIGS. 18B, 20B, and 22B are schematic perspective views illustrating an example of a simulation result when the model illustrated in FIG. 15D is used.

  Like the arrows A31 and A32 shown in FIG. 17A, in the model shown in FIG. 15A, the primary mode of vibration is yawing. The characteristic value of the air stage device 10 at this time is 102.4 Hertz (Hz).

On the other hand, like the arrows A33 and A34 shown in FIG. 17B, in the model shown in FIG. 15B, the primary mode of vibration is yawing. At this time, the characteristic value of the air stage device 10 is 101.2 Hz.
Thus, when the X-axis guide section has the rib 115, the fixing section 40 can improve the eigenvalue of the air stage device 10.

  Like the arrows A35 and A36 shown in FIG. 18A and the arrow A37 shown in FIG. 18A, in the model shown in FIG. 15C, the primary modes of vibration are yawing and pitching. is there. At this time, the eigenvalue of the air stage device 10 is 88.5 Hz. Note that “pitching” refers to movement about an axis (for example, the Y-axis direction) perpendicular to the traveling direction (for example, the X-axis direction).

On the other hand, like the arrows A38 and A39 shown in FIG. 18B and the arrow A41 shown in FIG. 18B, even in the model shown in FIG. And pitching. At this time, the eigenvalue of the air stage device 10 is 86.9 Hz.
Thus, when the X-axis guide section does not have the rib 115, the fixing section 40 can improve the eigenvalue of the air stage device 10.

  As shown in FIG. 19A, when the above-described load is applied to the model shown in FIG. 15A, the X-axis guide 110a is deformed in the horizontal direction. At this time, the amount of deformation of the X-axis guide 110a in the horizontal direction is 0.3 μm.

On the other hand, as shown in FIG. 19B, when the above-described load is applied to the model shown in FIG. 15B, the X-axis guide portion 110a is deformed in the horizontal direction. At this time, the amount of deformation of the X-axis guide 110a in the horizontal direction is 1.8 μm.
Thus, when the X-axis guide has the ribs 115, the deformation of the X-axis guide in the horizontal direction can be reduced.

  As shown in FIG. 20A, when the above-described load is applied to the model shown in FIG. 15C, the X-axis guide 110 is deformed in the horizontal direction. At this time, the amount of deformation of the X-axis guide 110a in the horizontal direction is 0.9 μm.

On the other hand, as shown in FIG. 20B, when the above-described load is applied to the model shown in FIG. 15D, the X-axis guide 110 is deformed in the horizontal direction. At this time, the amount of deformation of the X-axis guide 110 in the horizontal direction is 3.8 μm.
Thereby, when the X-axis guide does not have the rib 115, the deformation of the X-axis guide in the horizontal direction can be reduced.

  As shown in FIG. 21A, when the above-described load is applied to the model shown in FIG. 15A, the X-axis guide 110a deforms not only in the horizontal direction but also in the vertical direction. This is as described above with reference to FIGS. 13A and 13B. At this time, the amount of vertical deformation of the X-axis guide 110a is 0.2 μm.

On the other hand, as shown in FIG. 21B, when the above-described load is applied to the model shown in FIG. 15B, the X-axis guide 110a deforms not only in the horizontal direction but also in the vertical direction. At this time, the amount of vertical deformation of the X-axis guide 110a is 1.5 μm.
Accordingly, when the X-axis guide has the ribs 115, the deformation of the X-axis guide in the vertical direction can be reduced.

  As shown in FIG. 22A, when the above-described load is applied to the model shown in FIG. 15C, the X-axis guide 110 deforms not only in the horizontal direction but also in the vertical direction. At this time, the amount of vertical deformation of the X-axis guide 110 is 0.2 μm.

On the other hand, as shown in FIG. 22B, when the above-described load is applied to the model shown in FIG. 15D, the X-axis guide unit 110 is deformed not only in the horizontal direction but also in the vertical direction. At this time, the amount of vertical deformation of the X-axis guide 110 is 2.5 μm.
Thereby, when the X-axis guide does not have the rib 115, the deformation of the X-axis guide in the vertical direction can be reduced.

The embodiment of the invention has been described. However, the invention is not limited to these descriptions. Regarding the above-described embodiments, those in which a person skilled in the art has appropriately modified the design are included in the scope of the present invention as long as they have the features of the present invention. For example, the shape, size, material, arrangement, and the like of each element included in the air stage devices 10, 10a and the like, and the installation form of the fixing portion 40 are not limited to those illustrated, and can be appropriately changed.
In addition, each element included in each of the above-described embodiments can be combined as far as technically possible, and a combination of these elements is included in the scope of the present invention as long as it includes the features of the present invention.

  10, 10a, 10b Air stage device, 20 surface plate, 21 top surface, 30 static pressure gas bearing, 40 fixing portion, 41 first hole, 42 second hole, 44 bottom surface, 45 top surface, 100 X axis stage, 110 X-axis guide portion, 110a X-axis guide portion, 111 upper portion, 111a upper surface, 112 lower portion, 113 right side portion, 113a right side surface, 114 left side portion, 114a left side surface, 115 rib, 116 first hole, 117 second hole , 120 X-axis moving body, 121, 122 X-axis air pad, 123 X-axis side plate, 123a bottom surface, 125 X-axis table, 125a bottom surface, 125b top surface, 130 X-axis linear motor, 131 motor unit, 133 coil unit, 200 Y-axis Stage, 210 Y-axis guide section, 220 Y-axis moving body, 221 Y-axis air path 223 Y-axis side plate, 225 Y-axis table, 225a bottom surface, 230 Y-axis linear motor, 231 motor unit, 233 coil unit, 301 fastening member

Claims (11)

A surface plate having an upper surface,
A hydrostatic gas bearing,
A ceramic first guide portion having a hollow structure including an upper portion, a lower portion, and a side portion extending in a first direction, a hollow portion having a hollow structure extending in the first direction, and the lower portion fixed to the upper surface; ,
A first moving body that is provided at a position facing the first guide portion and moves along the first direction;
A second guide portion made of ceramic provided on the first moving body and extending in a second direction orthogonal to the first direction;
A second moving body that is provided at a position facing the second guide portion and moves along the second direction;
A hydrostatic gas bearing having
A ceramic fixing portion fixed to the side portion and the upper surface and suppressing deformation of the first guide portion;
An air stage device comprising: The fixing unit is provided in a plurality,
The air stage device according to claim 1, wherein the plurality of fixing portions are provided on the side portions on both sides of the first guide portion. A plurality of portions of the plurality of fixing portions are provided on one of the side portions on both sides of the first guide portion,
The air stage device according to claim 2, wherein a plurality of other portions of the plurality of fixing portions are provided on one of the side portions on both sides of the first guide portion. The fixing portion is fixed to the first guide portion by a fastening member,
The air stage device according to any one of claims 1 to 3, wherein a position of the fastening member is higher than a center in a vertical direction of the fixing portion.   The said 1st guide part was being fixed to the said surface plate with the several fastening member arrange | positioned in a line with the moving direction of the said 1st mobile body, The plate characterized by the above-mentioned. The air stage device according to one.   The vertical dimension of the fixed part is set to a value that does not interfere with the fixed part when the first moving body moves. Air stage device.   The air stage device according to claim 1, wherein the first guide portion includes a rib provided in the hollow portion and connected to the upper portion and the lower portion. A plurality of the first guide portions are provided,
The air stage device according to any one of claims 1 to 7, wherein the plurality of first guide portions are provided side by side in a moving direction of the second moving body.   The air stage device according to claim 1, wherein the number of the first guide portions is larger than the number of the second guide portions.   The first moving body is a side plate provided at a position facing the surface of the side portion, and is located at a central region in the moving direction of the second moving body of the plurality of first guide portions. The air stage device according to claim 9, further comprising side plates provided on both sides of the provided first guide portion. The air stage device according to any one of claims 1 to 10 , wherein the first guide portion is fixed to the surface plate such that the entire lower portion contacts the upper surface.