JP6628899B2 - Work thickness measuring device and machine tool - Google Patents

Description

  The present invention relates to an ultrasonic work thickness measuring device for measuring the thickness of a work on a machine tool, and a machine tool provided with the work thickness measuring device.

  Patent Literature 1 discloses a tapered shank attached to a main shaft of a machine tool and an ultrasonic probe provided on the tapered shank, which emits an ultrasonic wave while making an ultrasonic probe at the tip thereof come into contact with the surface of the work, and detects the echo sound wave. An ultrasonic plate thickness measurement unit that wirelessly transmits the measurement data to the control unit by measuring the thickness of the work, and a main spindle injection nozzle provided on the main shaft and an ultrasonic plate thickness measurement device. An ultrasonic plate thickness measuring device in which a coolant is injected from a measurement injection nozzle to improve a contact state between an ultrasonic probe and a surface of a work at the time of thickness measurement is disclosed.

WO2016 / 056499

  In the ultrasonic plate thickness measuring device of Patent Document 1, a coolant supplied when cutting a work is used as a couplant, but usually the coolant has low viscosity, so that the surface of the measurement site of the work has an inclined surface or In the case of a vertical surface, there is a problem that the coolant applied to the surface of the work flows down and the amount of coolant required for measuring the work thickness by the ultrasonic wave cannot remain on the work surface.

  Further, the ultrasonic plate thickness measuring device of Patent Document 1 is applicable only to a machine tool provided with a so-called through-spindle type coolant supply device in which a spindle is penetrated in an axial direction and coolant is supplied to a processing area. However, there is a problem that its versatility is low.

  The present invention has a technical problem to solve the problems of the prior art, and can apply a relatively high-viscosity gel-like couplant to the surface of a measurement site of a work, and can also be applied to an existing machine tool. It is an object of the present invention to provide a work thickness measuring device which can be easily applied and a machine tool provided with the work thickness measuring device.

In order to achieve the above object, according to the present invention, in a machine tool provided with at least an X-axis, a Y-axis, and a Z-axis orthogonal three-axis feeder for relatively moving a spindle and a workpiece, a pneumatic source and A spindle air conduit communicating with the pneumatic source and extending through the spindle, and a work thickness measuring device detachable from a tool mounting portion of the spindle,
When the work thickness measuring device is mounted on the distal end of the spindle, a measuring device having a proximal side wall facing the main shaft and a distal side wall provided on the opposite side of the proximal side wall and capable of facing the workpiece. A main body, a shank protruding from the base end wall and detachably attached to a tip end of the spindle, and a tracing stylus provided on the tip end side wall of the measuring device main body for transmitting and receiving ultrasonic waves so as to be able to contact a surface of a work; Provided in the measuring device main body, transmits and receives ultrasonic waves by the tracing stylus in a state where the tracing stylus is in contact with the surface of the work, and calculates the thickness of the work from the time difference between when transmitting and receiving the ultrasonic wave. A control unit for wirelessly transmitting the measured and measured data to the outside, a medium tank provided on the measuring device main body and storing a gel-like couplant applied between the tracing stylus and the work surface; and the measuring device main body. Before While being attached to the spindle, by using the air pressure received from the spindle air pipeline, the machine tool comprising a metering device for discharging a certain amount of couplant to the work surface is provided.

  Further, according to the present invention, the surface of the workpiece is contacted with the workpiece surface on a machine tool provided with at least a three-axis feed device orthogonal to the X-axis, the Y-axis, and the Z-axis for relatively moving the spindle and the workpiece, and In a work thickness measuring device that measures the thickness of a work from a time difference between a time of transmission and a time of reception, when attached to the distal end of the main shaft, a base side wall facing the main shaft and an opposite side of the base side wall. A measuring device main body having a distal end side wall provided to face the work, a shank portion protruding from the base end side wall and detachable from a distal end portion of the main spindle, and a distal end of the measuring device main body so as to be able to contact a surface of the work. A probe provided on the side wall for transmitting and receiving ultrasonic waves, and a probe provided on the measuring device main body, which transmits and receives ultrasonic waves by the probe while the probe is in contact with the surface of the workpiece, and transmits ultrasonic waves. And the time difference when receiving A controller for calculating the thickness of the workpiece by calculation and wirelessly transmitting measurement data to the outside, and a gel-like couplant to be applied between the tracing stylus and the workpiece surface, which is provided in the measuring device main body, is stored. While the medium tank and the main body of the measuring device are mounted on the main shaft, the medium is kept constant by utilizing the pneumatic pressure received from a spindle air line which communicates with the pneumatic source of the machine tool and extends through the main shaft. A metering device for discharging a quantity of couplant onto the surface of the workpiece.

  According to the present invention, a predetermined amount of the gel-like couplant is discharged toward the workpiece by the fixed-quantity supply device using the spindle air of the machine tool, and is reliably applied to the measurement site. Furthermore, according to the present invention, since the work thickness measuring device has a shank portion that can be attached to the tip of the spindle, it can be easily attached to various machine tools and to existing machine tools. It is possible.

1 is a schematic diagram illustrating an example of a machine tool according to the present invention. 1 is a schematic view of a work thickness measuring device according to a preferred embodiment of the present invention. 5 is a flowchart illustrating a method for measuring a work thickness using the work thickness measuring device of the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of a machine tool according to a preferred embodiment of the present invention. The machine tool 100 includes a spindle device 110 having a spindle 114 and a housing 112 for supporting the spindle 114 rotatably about a rotation axis O, and a Z-axis extending along a guide surface 120 of the bed in front of the spindle device 110. The table 122 is provided so as to be able to reciprocate in the axial direction (the left-right direction in FIG. 1).

  The machine tool 100 further includes an X-axis feeder (not shown) for feeding the spindle device 110 in the X-axis direction (a direction perpendicular to the plane of FIG. 1) and the Y-axis direction (the vertical direction in FIG. 1), and Y An axis feeder (not shown) and a Z-axis feeder (not shown) for feeding the table 122 in the Z-axis direction parallel to the main spindle O are provided. The X-axis feeder, the Y-axis feeder, and the Z-axis feeder include a ball screw (not shown) extending in the X-axis, Y-axis, and Z-axis directions, and an X-axis, Y-axis, and Z-axis. And a servomotor (not shown) for driving each of the ball screws.

  In the present embodiment, on the upper surface of the table 122, there is provided a rotary table 124 that can be rotationally fed in the B-axis direction about an axis parallel to the Y-axis. The work W to be processed is fixed so as to face the tip of the main shaft 114 via a scale 126 attached to the upper surface of the turntable 124. In the present embodiment, the scale 126 is a double-sided scale and has work mounting surfaces 126a and 126b on which the work W is mounted.

  A servo motor (not shown) that drives each of the X-axis, Y-axis, and Z-axis feeders and a servo motor (not shown) that drives the rotary table 124 in the B-axis direction are connected to a control device (NC device) 140 of the machine tool 100. The control device 140 controls each of the X-axis, Y-axis, Z-axis, and B-axis servomotors. The control device 140 can be housed in an operation panel of the machine tool 100. The operation panel includes an operation state of the machine tool 100, a machining program sent to the control device 140, and a control device for operating the machine tool 100. It has a display 142 for displaying an input screen for inputting various parameters by an operator.

  A tool mounting hole 114a for mounting a tool (not shown) is formed at the tip of the main shaft 114, and a shank portion of a tool holder (not shown) having a tool mounted therein is introduced into the tool mounting hole 114a. Thereby, the tool is attached to the tip of the main shaft 114. In order to attach and detach a tool to and from the tip of the spindle 114, for example, an automatic tool changer 130 can be used. The automatic tool changer 130 can also be controlled by the controller 140.

  The main shaft 114 may also include a spindle air line 114b extending along the axis O. The spindle air line 114b is connected to the air pressure source 102 via the external air line 106. In the external pneumatic line 106, a solenoid type shutoff valve 106a is provided as an air pressure control valve.

  The shutoff valve 106a has a first position (see FIG. 2) in which the spindle air line 114b is cut off from the air pressure source 102 and is released to the outside air, and a second position in which the spindle air line 114b communicates with the air pressure source 102. 2 can be operated. At the first position, the shutoff valve 106a can be provided with a muffler 106b that reduces exhaust noise from the spindle air line 114b. The solenoid of the shut-off valve 106a is connected to the control device 140, and the control device 140 controls the operation of the shut-off valve 106a.

  The pneumatic source 102 can be service air of a factory where the machine tool 100 is installed. However, the pneumatic source 102 may be, for example, a pneumatic source provided with a compressor (not shown) and a tank (not shown) provided separately from the service air, and further with a dryer (not shown).

  A coolant passage 112a is formed in a housing 112 of the spindle device 110, and the coolant passage 112a is connected to an external coolant source 104 via a coolant pipe 108. The coolant passage 112a extends through a receiving member 116 provided at an end of the housing 112. The coolant passage 112a is preferably formed by penetrating the side wall of the housing 112, but may be formed by a pipe or a hose extending inside or outside the housing 112.

  The coolant source 104 may include, for example, a tank (not shown) for storing coolant, and a pump (not shown) for sending coolant from the tank to the coolant line 108. The coolant line 108 is provided with a solenoid type shutoff valve 108a as a coolant control valve. The shutoff valve 108a is operable between a first position (see FIG. 2) for shutting off the coolant passage 112a from the coolant source 104 and a second position for communicating the coolant passage 112a with the coolant source 104. . The solenoid of the shut-off valve 108a is connected to the control device 140, and the control device 140 controls the operation of the shut-off valve 108a.

  A transmitting / receiving device 80 that communicates with the transmitting / receiving unit 36 of the work thickness measuring device 10 described below can be attached to the housing 112 of the spindle device 110. The transmission / reception device 80 is connected to the control device 140. Further, a receiving member 116, which will be described later, is attached to the housing 112.

  In the present embodiment, the work thickness measuring device 10 is mounted on the tip of the main shaft 114. The work thickness measuring apparatus 10 includes a hollow main body 12, which is mounted on the front end of the main shaft 114, and has a base end wall 12 a facing the main shaft 114 and a front end side wall 12 b facing the work W. And A shank portion 76a adapted to a tool mounting hole 114a formed at a distal end portion of the main shaft 114, and a shaft portion 76 having a circumferentially extending V-groove 76b engaging with a change arm 132 of the automatic tool changer 130 have a base side wall. It protrudes outward from 12a.

  A pneumatic passage 76c is formed in the shaft portion 76. The pneumatic passage 76c is provided with a spindle air conduit 114b that passes through the main shaft 114 in the axial direction when the shank portion 76a is mounted in the tool mounting hole 114a. Communicate with The pneumatic passage 76c communicates with an internal pneumatic conduit 52 described later.

  The shaft portion 76 is further provided with a rotation stopping member 78. When the work thickness measuring device 10 is mounted on the tip of the main shaft 114, the rotation stopping member 78 engages with the receiving member 116 provided on the housing 112 of the main shaft device 110, and Prevent rotation. When the rotation stop member 78 engages with the receiving member 116, the coolant passage 112a communicates with the coolant passage 72 in the main body 12, and when the shut-off valve 108a is opened, the cleaning coolant from the coolant source 104 causes the check valve 74 to move. It is pushed open and discharged from the cleaning coolant nozzle 40.

  The work thickness measuring device 10 also includes a measuring unit 14 and a medium nozzle 38 that protrude outward from the tip side wall 12b of the main body 12. The work thickness measuring device 10 can further include a cleaning coolant nozzle 40. The measuring unit 14 includes a cylindrical measuring unit main body 16, a slider 18 slidably disposed in the measuring unit main body 16 in the axial direction, a tracing stylus 26 provided at the tip of the slider 18, and a rear end of the main body 16. A rear end wall 20 for closing the spring, a spring 22 disposed between the slider 18 and the rear end wall 20 in the main body 16 and biasing the slider 18 in a distal direction, and disposed between the main body 16 and the slider 18 An O-ring 24 as a sealed member can be provided.

  In the present embodiment, the slider 18 has a cylindrical concave portion 18a formed at the tip, and the tracing stylus 26 is arranged in the concave portion 18a. The tracing stylus 26 can be an ultrasonic transducer that transmits and receives ultrasonic waves. A center hole 18b extends from the recess 18a of the slider 18 to the rear end face. In order to prevent the slider 18 from dropping off from the front end of the main body 16, a flange 18c is formed at the rear end of the slider 18, and the inner peripheral surface of the main body 16 contacts the flange 18c. A shoulder 16a is formed to be accessible. A center hole 20 a is formed in the rear end wall 20.

  The tracing stylus 26 is connected to the control unit 30 by a wire 28. The control unit 30 performs arithmetic processing on a signal received from the tracing stylus 26 via the wire 28 to calculate the thickness of the work W, an on / off switch 34 of the work thickness measuring device 10, and an external The transmission / reception unit 36 that communicates with the transmission / reception device 80 is provided. The control unit 30 can also incorporate a battery 39.

  The medium nozzle 38 preferably projects inclining from the distal end side wall 12b toward the center so that the medium can be discharged forward of the tracing stylus 26. The medium nozzle 38 is connected via a medium discharge pipe 42 to a cylinder 44 as a fixed-rate supply device. The cylinder 44 includes a pneumatic chamber 48, a medium chamber 46, and a double-headed piston 50 arranged coaxially. The double-headed piston 50 has a large-diameter first piston portion 50a arranged in the pneumatic chamber 48 and a small-diameter second piston portion 50b arranged in the medium chamber 46.

  The pneumatic chamber 48 is connected to the external pneumatic source 102 via the internal pneumatic conduit 52, the pneumatic passage 76c, the spindle air conduit 114b, and the external pneumatic conduit 106. In the present embodiment, the internal pneumatic conduit 52, the pneumatic passage 76c, the spindle air conduit 114b, and the external pneumatic conduit 106 form a pneumatic supply passage system.

  The medium chamber 46 communicates with the medium nozzle 38 via the medium discharge pipe 42. A check valve 56 that shuts off the flow from the medium chamber 46 to the medium nozzle 38 is provided in the medium discharge pipe 42. The check valve 56 is a pilot-operated check valve operated by pilot air pressure supplied by a pilot line 54 branched from the internal pneumatic line 52. When the pilot air pressure supplied to the check valve 56 increases, the check valve 56 opens, and the medium nozzle 38 communicates with the medium chamber 46, so that the medium can be discharged from the medium nozzle 38. When the pilot air pressure disappears, the check valve 56 closes and the flow from the medium chamber 46 to the medium nozzle 38 is shut off.

  The medium chamber 46 communicates with a medium tank 58 as a medium supply source via a medium supply pipe 68. A gel-like couplant is stored in the medium tank. The gel-like couplant may be any of various gel-like substances, but preferably, as shown in FIG. 1, a substance having an appropriate viscosity that does not immediately flow down when applied to the vertical surface of the work W. , For example, grease. A check valve 70 for blocking the flow of the medium from the medium tank 58 to the medium chamber 46 is provided in the medium supply pipe 68. A piston 60 and a spring 62 for urging the piston 60 in a direction to push out the medium in the medium tank 58 are provided in the medium tank 58.

  The medium tank 58 is connected to a nipple 66 via a medium replenishing line 64. The nipple 66 is a joint for preventing the leakage of the medium from the medium tank 58. The operator can externally refill the medium tank 58 with a syringe via the nipple 66. The medium replenishment line 64 is open in the medium tank 58 near the bottom wall to which the medium supply line 68 is connected.

Hereinafter, the operation of the work thickness measuring apparatus 10 according to the present embodiment will be described with reference to FIG.
First, the work thickness measuring device 10 is attached to the tip of the main shaft 114 (Step S10). This can be done by the automatic tool changer 130 under the control of the controller 140. The work thickness measuring device 10 may be attached to the tip of the main shaft 114 by an operator manually. Next, the power of the work thickness measuring device 10 is turned on by manually operating the on / off switch 34 provided on the main body of the work thickness measuring device 10 (step S12). Alternatively, a power-on command from the control device 140 may be transmitted from the transmission / reception device 80 to the control unit 30, and the on / off switch 34 may be turned on.

  Next, the control device 140 of the machine tool 100 determines whether or not a predetermined amount or more of the medium is stored in the medium tank 58, and when the medium in the medium tank 58 is smaller than the predetermined amount, A warning that the medium should be replenished is displayed on the display 142 on the operation panel (in the case of Yes in step S14). When a predetermined amount of medium is stored in the medium tank 58 (No in step S14), or when the operator replenishes the medium according to a warning (step S16), the control device 140 sends the machine tool 100 The work thickness measuring device 10 is moved to the measurement site of the work W using the device (step S18).

  Next, the shutoff valve 108a of the coolant line 108 is opened for a predetermined time, the cleaning coolant is injected from the coolant source 104 toward the work W from the cleaning coolant nozzle 40, and the measurement site is cleaned (step S20). Next, the shut-off valve 106a of the external pneumatic line 106 is opened, and pneumatic pressure is applied from the pneumatic source 102 to the pneumatic chamber 48 of the cylinder 44 via the pneumatic supply passage system. At this time, pneumatic pressure is applied to the pilot-operated check valve 56 via the pilot line 54, and the check valve 56 is opened.

  Accordingly, the piston 50 is driven by the air pressure in the air pressure chamber 48, and the couplant in the medium chamber 46 is discharged from the medium nozzle 38 via the medium discharge pipe 42. While the piston 50 is driven, the air in the pneumatic chamber 48 is exhausted to the outside through the exhaust pipe 47. The piston 50 is driven to the stroke end by the pneumatic pressure in the pneumatic chamber 48, and the couplant having a volume corresponding to a volume determined by the area and the stroke of the small-diameter second piston portion 50b of the piston 50 is dispensed once. Is discharged from the medium nozzle 38 and is applied to the surface of the measurement site of the work W (step S22). At this time, the controller 140 counts the number of times the current couplant discharge has been performed after replenishing the medium tank 58 with the couplant, and stores the count.

  When the control device 140 moves the shut-off valve 106a of the external pneumatic line 106 to the first position, the pneumatic chamber 48 communicates with the outside air through the pneumatic supply system and the shut-off valve 106a. Air pressure is exhausted from the shutoff valve 106a through the air pressure supply passage system. At that time, the pressure in pilot line 54 decreases, and check valve 56 closes. Further, the couplant stored in the medium tank 58 is introduced into the medium chamber 46 of the cylinder 44 through the medium supply pipe 68 by the pressure of the medium tank 58.

  Next, the work thickness measuring device 10 is brought close to the work W together with the spindle device 110 by the Z-axis feeder of the machine tool 100, and the tracing stylus 26 comes into contact with the surface of the measurement portion of the work W (step S24). Next, an ultrasonic wave is transmitted from the tracing stylus 26 and the reflected wave is detected by the tracing stylus 26. Ultrasonic waves have a property of being reflected at a boundary surface between objects, and in this case, are reflected at a boundary surface between the work W and the scale 126, that is, a work mounting surface 126a. The calculation unit 32 calculates the thickness of the work W from the time from transmission to reception of the ultrasonic wave. The measurement result thus obtained is transmitted to the control device 140 through the transmission / reception unit 36 and the transmission / reception device 80, and stored in a predetermined memory area of the control device 140. The measurement result may be displayed on the display 142 (step S28).

  Next, the control device 140 calculates the amount of the couplant remaining in the medium tank 58 from the stored count value by calculation and stores it (step S30). The control device 140 determines from the measurement program whether or not all the measurement sites of the work W have been completed. When the next measurement site remains (in the case of Yes in step S32), the control device 140 executes the measurement process from step S14 again. When the measurement of all the measurement sites is completed (No in step S32), the operator operates the on / off switch 34 to turn off the power of the work thickness measuring device 10 (step S34). Alternatively, a power-off command from the control device 140 may be transmitted from the transmission / reception device 80 to the control unit 30 to turn off the on / off switch 34. Next, the work thickness measuring device 10 is removed from the tip of the main shaft 114 by the automatic tool changer 130 (step S36), and the process of measuring the thickness of the work W ends. The work thickness measuring device 10 may be removed from the tip of the main shaft 114 by an operator manually.

  According to the present embodiment, since the work thickness measuring device 10 has the shank portion 76a adapted to the tool mounting hole 114a at the tip of the main shaft 114, it can be easily mounted on various machine tools. It is.

  Further, according to the present invention, a predetermined amount of the couplant is discharged from the medium nozzle 38 toward the work W by using the spindle air of the machine tool 100 by the fixed amount supply device. Further, since the work thickness measuring device 10 can be attached to and detached from the tip of the main shaft 114 by the automatic tool changing device 130, from the cleaning of the surface of the work W to the discharge of the couplant and the measurement of the thickness of the work W. It can be programmed and automated.

  In the present embodiment, a four-axis machine tool having three linear axes of X-axis, Y-axis, and Z-axis and a single axis of rotation of B-axis has been described. The present invention is also applicable to a five-axis machine tool having another rotary feed shaft. Further, the present invention is applicable to both vertical machine tools and horizontal machine tools.

DESCRIPTION OF SYMBOLS 10 Measuring apparatus 12 Main body 12a Base end wall 12b Tip side wall 26 Measuring element 30 Control part 32 Operation part 36 Transmission / reception part 38 Medium nozzle 40 Cleaning coolant nozzle 44 Cylinder 58 Medium tank 76a Shank part 76b V-groove 80 Transmission / reception apparatus 100 Machine tool 114 Main shaft 114b Spindle air line 140 Control device (NC device)

Claims (6)

In a machine tool having at least an X-axis, a Y-axis, and a Z-axis orthogonal three-axis feeder for relatively moving a main shaft and a work,
A pneumatic source,
A spindle air line communicating with the air pressure source and extending through the main shaft;
Work thickness measuring device that can be attached to and detached from the tool mounting part of the spindle,
Comprising, the work thickness measuring device,
A measuring device main body having a proximal side wall facing the main shaft and a distal side wall provided on the opposite side of the proximal side wall and capable of facing a work when attached to the distal end portion of the main shaft;
A shank protruding from the base end side wall and detachably attached to a distal end of the spindle;
A tracing stylus that transmits and receives ultrasonic waves provided on the tip side wall of the measuring device main body so as to be able to contact the surface of the work,
It is provided in the measuring device main body, transmits and receives ultrasonic waves by the tracing stylus in a state where the tracing stylus is in contact with the surface of the work, and calculates the thickness of the work from the time difference between when the ultrasonic wave is transmitted and when the ultrasonic wave is received. And a control unit for wirelessly transmitting the measurement data to the outside,
A medium tank that is provided on the measuring device main body and stores a gel-like couplant to be applied between the tracing stylus and the work surface,
While the measuring device main body is mounted on the main shaft, using a pneumatic pressure received from the spindle air line, a fixed amount feeder that discharges a certain amount of couplant onto the work surface,
A machine tool comprising: The shank portion is formed at a distal end of a shaft portion protruding from the base side wall, and the shaft portion has a V-groove extending in a circumferential direction between the shank portion and the base side wall. ,
The machine tool further includes an automatic tool changing device having an arm engageable with the V-groove, and the automatic tool changing device makes the work thickness measuring device detachable from the tip of the main spindle. The machine tool according to claim 1. Contacting the workpiece surface on a machine tool equipped with at least a 3-axis feeder of X-axis, Y-axis, and Z-axis that relatively moves the main spindle and the workpiece, and based on the time difference between ultrasonic transmission and reception In a work thickness measuring device that measures the thickness of a work,
A measuring device main body having a proximal side wall facing the main shaft and a distal side wall provided on the opposite side of the proximal side wall and capable of facing a work when attached to the distal end portion of the main shaft;
A shank protruding from the base end side wall and detachably attached to a distal end of the spindle;
A tracing stylus that transmits and receives ultrasonic waves provided on the tip side wall of the measuring device main body so as to be able to contact the surface of the work,
It is provided in the measuring device main body, transmits and receives ultrasonic waves by the tracing stylus in a state where the tracing stylus is in contact with the surface of the work, and calculates the thickness of the work from the time difference between when the ultrasonic wave is transmitted and when the ultrasonic wave is received. And a control unit for wirelessly transmitting the measurement data to the outside,
A medium tank that is provided in the measuring device main body and stores a gel-like couplant applied between the tracing stylus and the work surface,
While the measuring device main body is mounted on the main shaft, a certain amount of couplant is used by utilizing the pneumatic pressure received from a spindle air line which communicates with the pneumatic source of the machine tool and extends through the main shaft. A constant-volume feeder that discharges
A work thickness measuring device, comprising: A cylinder having a pneumatic chamber communicating with the spindle air line and a medium chamber communicating with the medium tank,
The work thickness measuring device according to claim 3, further comprising a double-headed piston having a first piston disposed in the pneumatic chamber and a second piston disposed in the medium chamber.   The work thickness measuring device according to claim 4, further comprising a medium nozzle connected to the medium tank, wherein the medium nozzle is provided so as to protrude from the base end side wall adjacent to the measuring element.   4. The work thickness according to claim 3, further comprising a cleaning coolant nozzle protruding from the base end side wall adjacent to the measuring element so as to be able to discharge the coolant toward the work surface and communicate with a coolant source of the machine tool. measuring device.

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