JP6633037B2 - Near-field noise suppression sheet - Google Patents
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Description
本発明は、電子機器や通信機器における余分な放射電波(ノイズ)を抑制するために使用される近傍界用ノイズ抑制シートに関する。 The present invention relates to a near-field noise suppression sheet used to suppress extra radiated radio waves (noise) in electronic devices and communication devices.
近年、電子機器や通信機器の小型化および軽量化に伴い、電子回路に装着される部品の実装密度が高くなっている。そのため、電子部品から放射される電波ノイズに起因して、電子部品同士間あるいは電子回路同士間において電波干渉や磁界結合が生じることによる電子機器や通信機器の誤動作が問題となる。 In recent years, as electronic devices and communication devices have become smaller and lighter, the mounting density of components mounted on electronic circuits has increased. For this reason, malfunctions of electronic devices and communication devices due to radio interference and magnetic field coupling between electronic components or between electronic circuits due to radio noise radiated from the electronic components become a problem.
この問題を防ぐために、余分な放射電波(ノイズ)を熱に変換し、不要な磁界結合を防ぐことができる近傍界用ノイズ抑制シート(以下、「ノイズ抑制シート」とも称する。)が機器などに実装されている。このノイズ抑制シートは、厚さが0.05mm〜2mmであることから、電子部品や電子回路近傍に挿入することが可能であり、加工が容易で形状自由度も高い。そのため、ノイズ抑制シートは、電子機器や通信機器の小型化および軽量化に適応することができ、電子機器や通信機器のノイズ対策部品として広く用いられている。 In order to prevent this problem, a near-field noise suppression sheet (hereinafter, also referred to as a “noise suppression sheet”) that converts unnecessary radiated radio waves (noise) into heat and can prevent unnecessary magnetic field coupling is provided in equipment and the like. Has been implemented. Since this noise suppression sheet has a thickness of 0.05 mm to 2 mm, it can be inserted near an electronic component or an electronic circuit, and is easily processed and has a high degree of freedom in shape. Therefore, the noise suppression sheet can be adapted to miniaturization and weight reduction of electronic devices and communication devices, and is widely used as a noise suppression component of electronic devices and communication devices.
典型的なノイズ抑制シートは、偏平状に加工された軟磁性合金粉末と有機結合剤からなり、軟磁性合金粉末の磁気共鳴による磁気損失によってノイズ抑制効果が得られる。よって、ノイズ抑制シートのノイズ抑制性能は、ノイズ抑制シートに含まれる軟磁性合金粉末の透磁率に依存する。一般に、透磁率は、実部透磁率μ’と虚数部透磁率μ”を用いて複素透磁率μ=μ’−j・μ”で表されるが、ノイズ抑制シートのように磁気損失を利用する場合には、虚数部透磁率μ”が重要になる。すなわち、吸収したい電波ノイズの周波数帯域(以下、「対象帯域」とも称する。)にわたって、虚数部透磁率μ”が分布することが重要である。以下、本明細書では、周波数に対する虚数部透磁率μ”の分布を「μ”分散」 と称する。μ”分散は、ノイズ抑制シートに含まれる軟磁性合金粉末の材質および形状に応じて、μ”値や分布が異なる。そのため、ノイズ抑制の効果を高めるには、対象帯域に適したノイズ抑制シートを選択する必要がある。 A typical noise suppression sheet is composed of a soft magnetic alloy powder processed in a flat shape and an organic binder, and a noise suppression effect is obtained by magnetic loss of the soft magnetic alloy powder due to magnetic resonance. Therefore, the noise suppression performance of the noise suppression sheet depends on the magnetic permeability of the soft magnetic alloy powder included in the noise suppression sheet. In general, the magnetic permeability is represented by the complex magnetic permeability μ = μ′−j · μ ″ using the real part magnetic permeability μ ′ and the imaginary part magnetic permeability μ ″, but the magnetic loss is used like a noise suppression sheet. In this case, the imaginary part magnetic permeability μ ″ is important. That is, it is important that the imaginary part magnetic permeability μ ″ be distributed over the frequency band of radio wave noise to be absorbed (hereinafter also referred to as “target band”). Hereinafter, in this specification, the distribution of the imaginary part magnetic permeability μ ″ with respect to the frequency is referred to as “μ” dispersion. The μ ″ dispersion has a different μ ″ value and distribution depending on the material and shape of the soft magnetic alloy powder included in the noise suppression sheet. Therefore, in order to enhance the effect of noise suppression, it is necessary to select a noise suppression sheet suitable for the target band.
例えば、いわゆるセンダスト組成のFe-Si-Al系合金に代表されるような偏平状の軟磁性合金粉末を使用したノイズ抑制シートでは、対象帯域がkHz〜MHz帯と低く、周波数が高くなるにつれて透磁率が減少する。特に、GHz帯域においては、μ”値が実質的に1に近づくために、ノイズ抑制効果を発揮することができない。これに対応すべく、特許文献1,2では、センダスト組成の偏平状の軟磁性合金粉末と炭素粉末とを含むノイズ抑制シートが提案されている。すなわち、周波数の低い帯域では軟磁性合金粉末による磁気損失を利用し、周波数の高い帯域では炭素粉末による誘電損失を利用することで、対象帯域を広帯域としている。 For example, in a noise suppression sheet using a flat soft magnetic alloy powder typified by an Fe-Si-Al alloy having a so-called sendust composition, the target band is as low as the kHz to MHz band, and the higher the frequency, the higher the transmittance. Magnetic susceptibility decreases. In particular, in the GHz band, the μ ″ value substantially approaches 1, so that the noise suppression effect cannot be exhibited. To cope with this, Patent Documents 1 and 2 disclose a flat soft sendust composition. A noise suppression sheet including a magnetic alloy powder and a carbon powder has been proposed, that is, a magnetic loss caused by a soft magnetic alloy powder is used in a low frequency band, and a dielectric loss caused by a carbon powder is used in a high frequency band. Thus, the target band is set to a wide band.
また、磁性部材の透磁率は、磁性部材の電気抵抗にも影響され、ノイズ抑制シートのμ”分散を高周波化させるには、電気抵抗の大きな軟磁性合金粉末を使用するのが有利である。したがって、結晶質の軟磁性合金よりも電気抵抗が大きい非晶質の軟磁性合金を使用することがμ”分散の高周波化に有効な手段である。例えば、特許文献3には、鉄系の非晶質合金からなる偏平状の軟磁性粒子と有機結合剤を主に含有し、10GHzにおける複素比透磁率μ”が7以上であることを特徴とする電磁干渉抑制体が記載されている。ここで、上記軟磁性粒子としては、組成式:{Fea(SixByPz)1−a}100−bLb(但し、LはAl、Cr、Zr、Nb、Mo、Hf、Ta、Wから選ばれる1種以上の元素、0.70≦a≦0.82原子%、0<b≦8原子%、0.05≦x≦0.60原子%、0.10≦y≦0.85原子%、0.05≦z≦0.70原子%、x+y=z=1)で表わされる粒子や、組成式:(Fe1−aTMa)100−w−x−y−zPwBxLySiz(但し、TMはCo、Niから選ばれる1種以上の元素、LはAl、V、Cr、Y、Zr、Mo、Nb、Ta、Wから選ばれる1種以上の元素、0≦a≦0.98原子%、2≦w≦16原子%、2≦x≦16原子%、0<y≦10原子%、0≦z≦8原子%)で表わされる粒子が挙げられている。 Further, the magnetic permeability of the magnetic member is also affected by the electric resistance of the magnetic member, and it is advantageous to use a soft magnetic alloy powder having a large electric resistance in order to increase the μ ″ dispersion of the noise suppression sheet. Therefore, the use of an amorphous soft magnetic alloy having an electric resistance higher than that of a crystalline soft magnetic alloy is an effective means for increasing the frequency of μ ″ dispersion. For example, Patent Literature 3 mainly includes flat soft magnetic particles made of an iron-based amorphous alloy and an organic binder, and has a complex relative magnetic permeability μ ″ at 10 GHz of 7 or more. electromagnetic interference suppressing body which is described here, as the soft magnetic particles, the composition formula:. {Fe a (Si x B y P z) 1-a} 100-b L b ( where, L is Al , Cr, Zr, Nb, Mo, Hf, Ta, W, at least one element selected from the group consisting of 0.70 ≦ a ≦ 0.82 atomic%, 0 <b ≦ 8 atomic%, and 0.05 ≦ x ≦ 0. 60 atomic%, 0.10 ≦ y ≦ 0.85 atomic%, 0.05 ≦ z ≦ 0.70 atomic%, x + y = z = 1) or a composition formula: (Fe 1-a TM) a) 100-w-x- y-z P w B x L y Si z ( where, TM is Co, 1 or more selected from Ni And L is one or more elements selected from Al, V, Cr, Y, Zr, Mo, Nb, Ta, and W, 0 ≦ a ≦ 0.98 atomic%, 2 ≦ w ≦ 16 atomic%, 2 ≦ Particles represented by x ≦ 16 at%, 0 <y ≦ 10 at%, 0 ≦ z ≦ 8 at%) are mentioned.
また、特許文献4,5には、非晶質中にα−Fe結晶が析出した組織を有する軟磁性合金が記載されている。具体的には、特許文献4には、平均粒径が5〜30nmのα−Fe結晶粒が析出した非晶質組織を有する、組成式:Fe100−a−b−c−dSiaBbCcCud(但し、1%≦a≦3%、9%≦b≦14%、1%≦c≦4%、0.3%≦d≦1.5%、80%≦100−a−b−c−d≦86%)で表わされる軟磁性合金が記載されている。また、特許文献5には、平均粒径が5〜30nmのα−Fe結晶粒が析出した非晶質組織を有する、組成式:Fe100−a−b−c−dSiaPbCcCud(但し、0%≦a≦3%、9%≦b≦13%、4%≦c≦6%、0.3%≦d≦1.5%、80%≦100−a−b−c−d≦86%)で表わされる軟磁性合金が記載されている。そして、一例として、これらの軟磁性合金をノイズ抑制シートなどの磁性部品に適用できることが記載されている。 Patent Documents 4 and 5 describe soft magnetic alloys having a structure in which α-Fe crystals are precipitated in an amorphous state. Specifically, Patent Document 4, the average particle diameter has an amorphous structure in which alpha-Fe crystal grains of 5~30nm precipitated, composition formula: Fe 100-a-b- c-d Si a B b C c Cu d (1% ≦ a ≦ 3%, 9% ≦ b ≦ 14%, 1% ≦ c ≦ 4%, 0.3% ≦ d ≦ 1.5%, 80% ≦ 100-a −b−c−d ≦ 86%). Further, Patent Document 5, an average particle size having an amorphous tissue precipitated alpha-Fe crystal grains of 5 to 30 nm, the composition formula: Fe 100-a-b- c-d Si a P b C c Cu d (where, 0% ≦ a ≦ 3% , 9% ≦ b ≦ 13%, 4% ≦ c ≦ 6%, 0.3% ≦ d ≦ 1.5%, 80% ≦ 100-a-b- (cd ≦ 86%). As an example, it is described that these soft magnetic alloys can be applied to magnetic components such as a noise suppression sheet.
近年、電子機器や通信機器の電子回路設計の高性能化および多様化が急速に進んでおり、電子回路内部のノイズの周波数も高周波化かつ広帯域化している。例えば、パソコンでは更なる高速化が求められ、CPUの駆動周波数はMHz〜GHz帯域に差し掛かっている。また、無線LANなどの通信機器では扱うデジタルコンテンツの容量は増大しており、通信周波数もGHz帯が中心になってきている。加えて、デジタルTV放送や道路交通情報システムなどの衛星通信も急速に拡大し、ユビキタスネットワーク時代が実現されつつある。このような情報通信機器の多機能化や融合が進む一方で、電子機器や通信機器から放射される余分な電波ノイズの周波数も高くなり、その電波ノイズによる機能干渉や誤動作も従来に増して心配される。そのため、従来のノイズ抑制シートは、対象帯域がkHz〜MHz帯であったのに対し、近年では、対象帯域がMHz〜GHz帯のノイズ抑制シートが求められている。 2. Description of the Related Art In recent years, the performance and diversification of electronic circuit designs of electronic devices and communication devices have been rapidly advanced, and the frequency of noise in electronic circuits has been increased in frequency and bandwidth. For example, personal computers are required to operate at higher speeds, and the driving frequency of the CPU is approaching the band from MHz to GHz. In addition, the capacity of digital contents handled by communication devices such as wireless LANs is increasing, and communication frequencies are mainly in the GHz band. In addition, satellite communications such as digital TV broadcasting and road traffic information systems are rapidly expanding, and the ubiquitous network era is being realized. As such information and communication devices have become more multifunctional and integrated, the frequency of extra radio noise emitted from electronic and communication devices has also increased, and functional interference and malfunctions due to the radio noise have become more worrying than before. Is done. Therefore, while the target band of the conventional noise suppression sheet is the kHz to MHz band, in recent years, a noise suppression sheet having the target band of the MHz to GHz band has been required.
ところが、特許文献1,2に記載のノイズ抑制シートでは、GHz帯においては、磁性損失ではなく、誘電損失のみが作用するので、GHz帯の電界ノイズを抑制することができたとしても、GHz帯の磁界ノイズを抑制することはできない。電子回路では、電流回路の相互的な作用により、電界ノイズをよりも、磁界ノイズを抑制することが重要である。 However, in the noise suppression sheets described in Patent Documents 1 and 2, in the GHz band, not the magnetic loss but only the dielectric loss acts, so even if the electric field noise in the GHz band can be suppressed, the noise in the GHz band is reduced. Magnetic field noise cannot be suppressed. In electronic circuits, it is more important to suppress magnetic field noise than electric field noise due to the interaction of current circuits.
また、特許文献3に記載のノイズ抑制シートでは、μ”分散の立ち上がり周波数が10MHzを超えたところに存在するため、1MHz〜10MHzのノイズ抑制効果を発揮することができず、MHzからGHzの広帯域に対応するノイズ抑制シートとして適していない。 Further, in the noise suppression sheet described in Patent Document 3, since the rising frequency of the μ ″ dispersion exists at a position exceeding 10 MHz, the noise suppression effect of 1 MHz to 10 MHz cannot be exhibited, and a wide band from MHz to GHz is not achieved. It is not suitable as a noise suppression sheet corresponding to.
さらに、ノイズ抑制シートの透磁率は、合金粉末の組成の他に、ノイズ抑制シートにおける偏平状の合金粉末の配向度や充填率にも影響される。すなわち、偏平状の合金粉末は、その面内方向に磁気的異方性を有するので、ノイズ抑制シートの透磁率を高めるには、シートの面内方向における合金粉末の配向度を高める必要がある。また、ノイズ抑制シートの透磁率は、シートに含まれる合金粉末の充填率にも影響され、ノイズ抑制シートの透磁率を高めるためには、ノイズ抑制シートの密度を高める必要がある。加えて、近年、ノイズ抑制シートを使用する対象機器の性質上、難燃性のノイズ抑制シートが求められており、この対策として難燃剤を添加することが一般的である。しかしながら、難燃剤を添加すると、偏平状の合金粉末の配向度が低下してしまい、その結果、ノイズ抑制シートの透磁率が低下することによって、その周波数特性も影響を受ける。 Further, the magnetic permeability of the noise suppression sheet is affected by the degree of orientation and the filling rate of the flat alloy powder in the noise suppression sheet, in addition to the composition of the alloy powder. That is, since the flat alloy powder has magnetic anisotropy in its in-plane direction, it is necessary to increase the degree of orientation of the alloy powder in the in-plane direction of the sheet in order to increase the magnetic permeability of the noise suppression sheet. . The magnetic permeability of the noise suppression sheet is also affected by the filling rate of the alloy powder contained in the sheet. In order to increase the magnetic permeability of the noise suppression sheet, it is necessary to increase the density of the noise suppression sheet. In addition, in recent years, a flame-retardant noise suppression sheet has been demanded due to the properties of a target device that uses the noise suppression sheet, and a flame retardant is generally added as a countermeasure. However, when a flame retardant is added, the degree of orientation of the flat alloy powder is reduced, and as a result, the magnetic permeability of the noise suppression sheet is reduced, so that its frequency characteristics are also affected.
ところが、特許文献4,5では、軟磁性合金の成分組成や組織を最適化することによって軟磁気特性に優れた軟磁性合金を得ることを目的としているものの、ノイズ抑制シートにおける合金粉末の配向度や、ノイズ抑制シートの密度や難燃性については記載されていない。したがって、特許文献4,5に記載の軟磁性合金を用いて、ノイズ抑制シートを作製しても、対象帯域がMHz〜GHz帯であることに加え、難燃性も併せ持つノイズ抑制シートの実現には至っていないのが現状である。 However, although Patent Documents 4 and 5 aim at obtaining a soft magnetic alloy having excellent soft magnetic properties by optimizing the composition and structure of the soft magnetic alloy, the degree of orientation of the alloy powder in the noise suppression sheet is reduced. No description is given of the density or flame retardancy of the noise suppression sheet. Therefore, even if the noise suppression sheet is manufactured using the soft magnetic alloys described in Patent Documents 4 and 5, even if the target band is the MHz to GHz band, in addition to the noise suppression sheet, the noise suppression sheet also has flame retardancy. The situation is not yet reached.
そこで本発明は、上記課題に鑑み、MHz〜GHz帯の広帯域における磁界ノイズに対応することができ、かつ難燃性も併せ持つ近傍界用ノイズ抑制シートを提供することを目的とする。すなわち、本発明は、μ”分散の立ち上がり周波数が1〜10MHzの帯域に存在し、かつ、μ”分散がGHz帯域まで分布していることを特徴とする難燃性の近傍界用ノイズ抑制シートを提供することを目的とする。 In view of the above problems, an object of the present invention is to provide a near-field noise suppression sheet that can cope with magnetic field noise in a wide band from MHz to GHz and has flame retardancy. That is, the present invention provides a flame-retardant near-field noise suppression sheet characterized in that the rising frequency of the μ ″ dispersion exists in a band of 1 to 10 MHz and the μ ″ dispersion is distributed up to the GHz band. The purpose is to provide.
上記課題を解決する本発明の要旨構成は以下のとおりである。
(1)有機物からなる基材と、前記基材中に担持された偏平状の合金粉末と、前記基材中に分散した難燃剤と、を含む近傍界用ノイズ抑制シートであって、
前記合金粉末は、原子%で、組成式:Fe100-X1-Y1(Si,P,C)X1CuY1(但し、16≦X1+Y1≦24、14.5≦X1≦24、及び0≦Y1≦1.5)で表わされる合金粉末および/または組成式:Fe100-X2-Y2(Si,B,C)X2CuY2(但し、16≦X2+Y2≦24、14.5≦X2≦24、及び0≦Y2≦1.5)で表わされる合金粉末であって、前記合金粉末の相構造は、非晶質相のみからなり、又は非晶質相とα-Feを主体とした結晶相とが混在する相からなり、
前記難燃剤の平均粒径が10μm以下であり、
さらに、密度が2.5g/cm3以上であることを特徴とする近傍界用ノイズ抑制シート。
The gist configuration of the present invention for solving the above problems is as follows.
(1) A near-field noise suppression sheet including a substrate made of an organic material, a flat alloy powder supported in the substrate, and a flame retardant dispersed in the substrate,
The alloy powder is represented by the following formula in atomic%: Fe 100-X1-Y1 (Si, P, C) X1 Cu Y1 (however, 16 ≦ X1 + Y1 ≦ 24, 14.5 ≦ X1 ≦ 24, and 0 ≦ Y1 ≦ 1.5) Alloy powder and / or composition formula: Fe 100-X2-Y2 (Si, B, C) X2 Cu Y2 (16 ≦ X2 + Y2 ≦ 24, 14.5 ≦ X2 ≦ 24, and 0) ≦ Y2 ≦ 1.5), wherein the phase structure of the alloy powder comprises only an amorphous phase or a mixture of an amorphous phase and a crystal phase mainly composed of α-Fe. Consisting of
The average particle size of the flame retardant is 10 μm or less,
Further, a near-field noise suppression sheet having a density of 2.5 g / cm 3 or more.
(2)前記合金粉末は、19≦X1+Y1≦21、18≦X1≦21、及び0≦Y1≦1.0、および/または、19≦X2+Y2≦21、18≦X2≦21、及び0≦Y2≦1.0を満たす、上記(1)に記載の近傍界用ノイズ抑制シート。 (2) The alloy powder has 19 ≦ X1 + Y1 ≦ 21, 18 ≦ X1 ≦ 21, and 0 ≦ Y1 ≦ 1.0, and / or 19 ≦ X2 + Y2 ≦ 21, 18 ≦ X2 ≦ 21, and 0 ≦ Y2 ≦ The near-field noise suppression sheet according to (1), which satisfies 1.0.
(3)前記近傍界用ノイズ抑制シートのμ”分散の立ち上がりにおいて、μ”値が1以上となる周波数が1MHz以上10MHz以下であり、かつ10GHzでのμ”値が2以上である、上記(1)又は(2)に記載の近傍界用ノイズ抑制シート。 (3) In the near-field noise suppression sheet, at the rise of μ ″ dispersion, the frequency at which the μ ″ value is 1 or more is 1 MHz to 10 MHz, and the μ ″ value at 10 GHz is 2 or more. The near-field noise suppression sheet according to (1) or (2).
(4)前記合金粉末の保磁力が0.5A/cm以上8A/cm以下である、上記(1)〜(3)のいずれか一つに記載の近傍界用ノイズ抑制シート。 (4) The near-field noise suppressing sheet according to any one of (1) to (3), wherein the coercive force of the alloy powder is 0.5 A / cm or more and 8 A / cm or less.
(5)前記難燃剤は、水酸化アルミニウム、水酸化マグネシウム、ホウ酸亜鉛、メラミンシアネレート、及び赤リンのうちから選択される1種以上の非ハロゲン系難燃剤である、上記(1)〜(4)のいずれか一つに記載の近傍界用ノイズ抑制シート。 (5) The above-mentioned (1), wherein the flame retardant is one or more non-halogen flame retardants selected from aluminum hydroxide, magnesium hydroxide, zinc borate, melamine cyanate, and red phosphorus. The near-field noise suppression sheet according to any one of (1) to (4).
(6)前記合金粉末において、前記Feの3原子%以下が、Al、Co、Ni、Cr、Nb、Mo、Ta、及びWのうちから選択される1種以上の元素で置換された、上記(1)〜(5)のいずれか一つに記載の近傍界用ノイズ抑制シート。 (6) In the alloy powder, 3 atomic% or less of the Fe is replaced with one or more elements selected from Al, Co, Ni, Cr, Nb, Mo, Ta, and W. The near-field noise suppression sheet according to any one of (1) to (5).
(7)前記合金粉末のアスペクト比の平均値が10以上100以下である、上記(1)〜(6)のいずれか一つに記載の近傍界用ノイズ抑制シート。 (7) The near-field noise suppression sheet according to any one of (1) to (6), wherein the average value of the aspect ratio of the alloy powder is 10 or more and 100 or less.
(8)前記合金粉末の厚さの平均値が0.1μm以上1.5μm以下である、上記(1)〜(7)のいずれか一つに記載の近傍界用ノイズ抑制シート。 (8) The near-field noise suppressing sheet according to any one of (1) to (7) above, wherein the average value of the thickness of the alloy powder is 0.1 μm or more and 1.5 μm or less.
(9)前記近傍界用ノイズ抑制シートの表面抵抗が105Ω/□以上である、上記(1)〜(8)のいずれか一つに記載の近傍界用ノイズ抑制シート。 (9) The near-field noise suppression sheet according to any one of (1) to (8) above, wherein the near-field noise suppression sheet has a surface resistance of 10 5 Ω / □ or more.
(10)前記基材はハロゲン元素を含まない、上記(1)〜(9)のいずれか一つに記載の近傍界用ノイズ抑制シート。 (10) The near-field noise suppression sheet according to any one of (1) to (9), wherein the base material does not include a halogen element.
(11)前記ノイズ抑制シートは、シリコン系、チタン系、アルミニウム系およびジルコニウム系のうちから選択される1種以上の酸化物を含み、前記酸化物の粒径が100nm以下である、上記(1)〜(10)のいずれか一つに記載の近傍界用ノイズ抑制シート。 (11) The above-mentioned (1), wherein the noise suppression sheet contains one or more oxides selected from a silicon-based, a titanium-based, an aluminum-based, and a zirconium-based, and the oxide has a particle size of 100 nm or less. The noise suppression sheet for near field according to any one of (1) to (10).
本発明によれば、MHz〜GHz帯の広帯域における磁界ノイズに対応することができ、かつ難燃性を併せ持つ近傍界用ノイズ抑制シートを得ることができる。 According to the present invention, it is possible to obtain a near-field noise suppression sheet that can cope with magnetic field noise in a wide band of MHz to GHz and has flame retardancy.
以下、本発明による近傍界用ノイズ抑制シートの一実施形態について説明する。 Hereinafter, an embodiment of a near-field noise suppression sheet according to the present invention will be described.
本発明の一実施形態による近傍界用ノイズ抑制シートは、有機物からなる基材と、基材中に担持された偏平状の合金粉末と、基材中に分散した難燃剤と、を含む。 A near-field noise suppression sheet according to one embodiment of the present invention includes a base material made of an organic material, a flat alloy powder supported in the base material, and a flame retardant dispersed in the base material.
偏平状の合金粉末は、原子%で、組成式:Fe100-X1-Y1(SiaPbCc)X1CuY1(但し、16≦X1+Y1≦24、14.5≦X1≦24、及び0≦Y1≦1.5)で表わされる合金粉末および/または組成式:Fe100-X2-Y2(SidBeCf)X2CuY2(但し、16≦X2+Y2≦24、14.5≦X2≦24、及び0≦Y2≦1.5)で表わされる合金粉末である。ここで、a,b,c,d,e,fは、a+b+c=X1、d+e+f=X2を満たす限り、特に限定されず、0≦a≦10、8≦b≦19、3≦c≦6、1≦d≦15、8≦e≦19、及び3≦f≦6の範囲から適宜調整することができる。本明細書では、Fe100-X1-Y1(SiaPbCc)X1CuY1をFe100-X1-Y1(Si,P,C)X1CuY1と表記し、Fe100-X2-Y2(SidBeCf)X2CuY2をFe100-X2-Y2(Si,B,C)X2CuY2と表記する。また、Fe100-X1-Y1(Si,P,C)X1CuY1とFe100-X2-Y2(Si,B,C)X2CuY2の合計量は、50質量%以上とすることが好ましい。なお、Fe100-X1-Y1(Si,P,C)X1CuY1とFe100-X2-Y2(Si,B,C)X2CuY2をともに含む場合の各合金粉末の比率は、特に限定されない。上記組成を有する合金粉末の相構造は、非晶質相のみからなる構造を有する。あるいは、これらの合金粉末のうちCuを含むものについては、後述する焼鈍処理を施してα-Fe結晶を析出させることによって、非晶質相とα-Feを主体とした結晶相とが混在する相とすることもできる。 Flat alloy powder, in atomic%, the composition formula: Fe 100-X1-Y1 ( Si a P b C c) X1 Cu Y1 ( where, 16 ≦ X1 + Y1 ≦ 24,14.5 ≦ X1 ≦ 24, and 0 ≦ Y1 alloy powder represented by ≦ 1.5) and / or formula: Fe 100-X2-Y2 ( Si d B e C f) X2 Cu Y2 ( where, 16 ≦ X2 + Y2 ≦ 24,14.5 ≦ X2 ≦ 24 and 0 ≦ Y2 ≦ 1.5). Here, a, b, c, d, e, and f are not particularly limited as long as they satisfy a + b + c = X1 and d + e + f = X2, and 0 ≦ a ≦ 10, 8 ≦ b ≦ 19, 3 ≦ c ≦ 6, It can be appropriately adjusted from the ranges of 1 ≦ d ≦ 15, 8 ≦ e ≦ 19, and 3 ≦ f ≦ 6. In this specification, Fe 100-X1-Y1 ( Si a P b C c) the X1 Cu Y1 is denoted by Fe 100-X1-Y1 (Si , P, C) X1 Cu Y1, Fe 100-X2-Y2 ( Si d B e C f) X2 Cu Y2 of Fe 100-X2-Y2 (Si , denoted B, C) and X2 Cu Y2. The total amount of Fe 100-X1-Y1 (Si , P, C) X1 Cu Y1 and Fe 100-X2-Y2 (Si , B, C) X2 Cu Y2 is preferably not less than 50 mass%. The ratio of each alloy powder when both Fe 100-X1-Y1 (Si, P, C) X1 Cu Y1 and Fe 100-X2-Y2 (Si, B, C) X2 Cu Y2 is included is not particularly limited. . The phase structure of the alloy powder having the above composition has a structure composed of only an amorphous phase. Alternatively, among these alloy powders, those containing Cu include an amorphous phase and a crystal phase mainly composed of α-Fe, which are subjected to an annealing treatment to be described later to precipitate α-Fe crystals. It can also be a phase.
ノイズ抑制効果をより高める観点から、上記組成のX1,X2及びY1,Y2は、19≦X1+Y1≦21、18≦X1≦21、及び0≦Y1≦1.0、および/または、19≦X2+Y2≦21、18≦X2≦21、及び0≦Y2≦1.0を満たすことが好ましい。 From the viewpoint of further increasing the noise suppression effect, X1, X2 and Y1, Y2 of the above composition are 19 ≦ X1 + Y1 ≦ 21, 18 ≦ X1 ≦ 21, and 0 ≦ Y1 ≦ 1.0, and / or 19 ≦ X2 + Y2 ≦ It is preferable to satisfy 21, 18 ≦ X2 ≦ 21 and 0 ≦ Y2 ≦ 1.0.
また、3原子%以下のFeを、Al、Co、Ni、Cr、Nb、Mo、Ta、及びWのうちから選択される1種以上の元素で置換してもよい。ここで、置換する元素の合計の添加量が3原子%を超えると、合金粉末の飽和磁化が著しく低下することによりノイズ抑制シートの透磁率が低下する。したがって、上限値を3原子%とする。 Further, 3 atomic% or less of Fe may be replaced with one or more elements selected from Al, Co, Ni, Cr, Nb, Mo, Ta, and W. Here, if the total amount of the elements to be replaced exceeds 3 atomic%, the saturation magnetization of the alloy powder is remarkably reduced, so that the magnetic permeability of the noise suppression sheet is reduced. Therefore, the upper limit is set to 3 atomic%.
以下、本実施形態によるノイズ抑制シートの製造方法の一例を示す。 Hereinafter, an example of the method for manufacturing the noise suppression sheet according to the present embodiment will be described.
まず、偏平状の合金粉末と、有機物と、難燃剤と、有機溶媒とを混合してスラリーを作製する。 First, a flat alloy powder, an organic substance, a flame retardant, and an organic solvent are mixed to prepare a slurry.
合金粉末の原料粉末としては、上記の組成を有する粉末を使用し、原料粉末の形状は球形とすることが好ましい。原料粉末は、一般的な粉末の合成方法であるガスアトマイズ法または水アトマイズ法によって得ることができる。原料粉末の平均粒径は、5μm以上70μm以下とすることが好ましい。5μm以上であれば、後述するアスペクト比(=直径/厚さ)が大きな偏平状の合金粉末を容易に得ることができ、70μm以下であれば、後述する偏平加工を短時間で効率的に行うことができるからである。なお、原料粉末の平均粒径は、レーザー回折・散乱法によって求めた粒度分布における積算値50%での粒径(50%累積粒径:D50)を意味する。 As the raw material powder of the alloy powder, a powder having the above composition is used, and the shape of the raw material powder is preferably spherical. The raw material powder can be obtained by a gas atomizing method or a water atomizing method, which is a general method for synthesizing a powder. The average particle diameter of the raw material powder is preferably 5 μm or more and 70 μm or less. If it is 5 μm or more, a flat alloy powder having a large aspect ratio (= diameter / thickness) described later can be easily obtained, and if it is 70 μm or less, the flattening process described later is efficiently performed in a short time. Because you can do it. The average particle size of the raw material powder means a particle size at an integrated value of 50% (50% cumulative particle size: D50) in a particle size distribution obtained by a laser diffraction / scattering method.
偏平状の合金粉末は、このような球形の原料粉末を機械的に加工することによって得られる。ここで、μ”分散の立ち上がり周波数を1MHz〜10MHzの帯域に存在させ、かつ、μ”分散をGHz帯域まで分布させるためには、偏平状の合金粉末の厚さの平均値が0.1μm以上1.5μm以下となるように偏平加工することが好ましい。また、合金粉末のアスペクト比の平均値が10以上100以下となるように偏平加工することが好ましい。アスペクト比の平均値が10以上であれば、偏平状の合金粉末の面内における反磁界の影響を無視することができ、100以下であれば、シートの面内方向における合金粉末の配向度が成膜時に高まり、平坦な表面を有するノイズ抑制シートを得ることができるからである。偏平加工には、ボールミル、アトライタ、スタンプミルなどの公知または任意の機械加工を好適に用いることができる。なお、「厚さの平均値」は、後述する方法によって作製したノイズ抑制シートの厚さ方向の断面のイオンミリング研磨面を走査型電子顕微鏡(SEM)で観察し、視野中の10個の粉末について、偏平状の合金粉末の厚さの値を平均した値を意味するものとし、「アスペクト比の平均値」は、同様に、SEMで観察したときの、視野中の10個の粉末について、偏平状の合金粉末の長さ/厚さの比の値を平均した値とする。 A flat alloy powder can be obtained by mechanically processing such a spherical raw material powder. Here, in order to make the rising frequency of the μ ″ dispersion exist in the band of 1 MHz to 10 MHz and to distribute the μ ″ dispersion to the GHz band, the average value of the thickness of the flat alloy powder is 0.1 μm or more. It is preferable to perform flattening so as to have a thickness of 1.5 μm or less. Further, it is preferable to perform flattening so that the average value of the aspect ratio of the alloy powder is 10 or more and 100 or less. If the average value of the aspect ratio is 10 or more, the influence of the demagnetizing field in the plane of the flat alloy powder can be ignored, and if it is 100 or less, the degree of orientation of the alloy powder in the in-plane direction of the sheet is small. This is because it is possible to obtain a noise suppression sheet which increases during film formation and has a flat surface. For flattening, known or arbitrary machining such as a ball mill, an attritor, and a stamp mill can be suitably used. The “average thickness” is obtained by observing the ion-milled polished surface of the cross section in the thickness direction of the noise suppression sheet manufactured by the method described later with a scanning electron microscope (SEM), and measuring the number of powders in the visual field. About, mean the value of the average value of the thickness of the flat alloy powder, "average value of the aspect ratio", similarly, when observed by SEM, for 10 powder in the field of view, The value of the length / thickness ratio of the flat alloy powder is taken as the average value.
次に、偏平加工の後に、合金粉末に対して窒素やアルゴンなどの不活性雰囲気中で焼鈍処理を行う。これにより、Cuを含む合金粉末については、α-Feを析出させることができる。また、この焼鈍処理によって偏平加工によって合金粉末に生じた残留応力を除去することもできるので、透磁率の低下を防ぐことができる。焼鈍条件は、例えば、200〜500℃の温度で、0.5〜5時間とすることができる。このように、焼鈍条件を適宜選択して、合金粉末の相構造を制御することによって、所望の保磁力を有する合金粉末を得ることができる。合金粉末の保磁力は、0.5A/cm以上8A/cm以下とすることが好ましい。保磁力が0.5A/cm以上であれば、μ”分散の立ち上がり周波数をMHz帯域に存在させることができ、8A/cm以下であれば、ノイズを抑制するのに十分な大きさのμ”値を得ることができるからである。 Next, after flattening, annealing is performed on the alloy powder in an inert atmosphere such as nitrogen or argon. Thereby, α-Fe can be precipitated from the alloy powder containing Cu. In addition, since the residual stress generated in the alloy powder by the flattening process can be removed by the annealing process, a decrease in magnetic permeability can be prevented. Annealing conditions may be, for example, at a temperature of 200 to 500 ° C. for 0.5 to 5 hours. As described above, by appropriately selecting the annealing conditions and controlling the phase structure of the alloy powder, an alloy powder having a desired coercive force can be obtained. It is preferable that the coercive force of the alloy powder be 0.5 A / cm or more and 8 A / cm or less. When the coercive force is 0.5 A / cm or more, the rising frequency of the μ ″ dispersion can be present in the MHz band, and when it is 8 A / cm or less, the μ ″ is sufficiently large to suppress noise. This is because a value can be obtained.
また、絶縁処理を施すことを目的として、偏平状の合金粉末の表面に、自己酸化被膜または外部処理被膜を形成することが好ましい。被膜形成の手段や材質は、絶縁性を保つことができるのであれば、特に制限はない。被膜の厚さは20〜100nmとするのが適当であり、必要以上に被膜を形成すると磁性相の体積が減少するため、十分な大きさのμ”値を得ることができない。自己酸化被膜の形成方法としては、大気中での加熱処理または炭化水素系有機溶媒中での加熱処理が代表的な方法である。また、外部処理被膜の形成方法としては、ディップコートやCVDなどの気相法が挙げられる。なお、上記の絶縁処理と焼鈍処理の順序は特に制限されない。 Further, it is preferable to form a self-oxidized film or an externally processed film on the surface of the flat alloy powder for the purpose of performing the insulating treatment. There are no particular restrictions on the means or material for forming the coating, as long as the insulation can be maintained. The thickness of the coating is suitably 20 to 100 nm. If the coating is formed more than necessary, the volume of the magnetic phase is reduced, so that a sufficiently large μ ″ value cannot be obtained. Typical examples of the method include a heat treatment in the air or a heat treatment in a hydrocarbon-based organic solvent, and a gas-phase method such as dip coating or CVD as a method for forming the externally treated film. Note that the order of the insulating treatment and the annealing treatment is not particularly limited.
また、偏平状の合金粉末に対して、シリコン系、チタン系、アルミニウム系およびジルコニウム系のうちから選択される1種以上のカップリング剤で表面処理を施すこともできる。カップリング処理の方法は特に限定されず、ここでは代表的な処理方法を説明する。すなわち、上記のカップリング剤を溶解した溶媒中に、偏平状の合金粉末を投入して、攪拌した後に、合金粉末を回収し、例えば100〜200℃の温度で乾燥させる。これにより、合金粉末の表面には、粒径が100nm以下の酸化物が形成される。このカップリング処理によって、後述する有機物との馴染み度合いが向上し、合金粉末の充填密度が高いノイズ抑制シートを得ることができ、その結果、ノイズ抑制に十分な大きさのμ”値を得ることができる。また、偏平状の合金粉末の表面に、カップリング剤に起因する絶縁酸化物の粒子が形成されるため、合金粉末の絶縁性の向上にも寄与する。 In addition, the flat alloy powder may be subjected to a surface treatment with at least one coupling agent selected from a silicon-based, a titanium-based, an aluminum-based, and a zirconium-based. The method of the coupling treatment is not particularly limited, and a typical treatment method will be described here. That is, the flat alloy powder is put into a solvent in which the above-described coupling agent is dissolved, and after stirring, the alloy powder is collected and dried at a temperature of, for example, 100 to 200 ° C. As a result, an oxide having a particle size of 100 nm or less is formed on the surface of the alloy powder. By this coupling treatment, the degree of familiarity with an organic substance described later is improved, and a noise suppression sheet having a high packing density of the alloy powder can be obtained. As a result, a μ ″ value large enough for noise suppression can be obtained. In addition, since insulating oxide particles resulting from the coupling agent are formed on the surface of the flat alloy powder, it also contributes to improving the insulating properties of the alloy powder.
基材を構成する有機物としては、ハロゲン元素を含まないものが好ましい。これは、従来のノイズ抑制シートでは、難燃性が高い塩素化ポリエチレンなどの有機物を用いていたが、近年、RoHS指令等の環境規制によって、ハロゲン元素を含まないノイズ抑制シートが求められているからである。ハロゲン元素を含まない有機物としては、例えば、エポキシ樹脂、フェノール樹脂、セルロース樹脂、ポリエチレン樹脂、ポリエステル樹脂などの任意の樹脂系材料や、シリコーンゴム、アクリルゴム、ニトリルゴム、ブチルゴムなどの任意のゴム系材料や、不織布、ポリエステル繊維、アクリル繊維などの任意の繊維系材料が挙げられ、有機物の選定については目的に応じて適宜選定すればよい。これらの有機物は、結合性や可塑性の付与および合金粉末同士の絶縁隔離といった機能を有する。また、ノイズ抑制シートの柔軟性を高めるために、必要に応じてフタル酸ジオクチルなどの可塑剤を添加することもできる。 As the organic substance constituting the base material, an organic substance containing no halogen element is preferable. In the conventional noise suppression sheet, an organic substance such as chlorinated polyethylene having high flame retardancy was used. However, recently, environmental regulations such as the RoHS Directive require a noise suppression sheet containing no halogen element. Because. Examples of the organic substance not containing a halogen element include, for example, any resin material such as an epoxy resin, a phenol resin, a cellulose resin, a polyethylene resin, and a polyester resin, and any rubber material such as a silicone rubber, an acrylic rubber, a nitrile rubber, and a butyl rubber. Materials and any fibrous materials such as non-woven fabric, polyester fiber and acrylic fiber can be mentioned, and the selection of the organic matter may be appropriately selected according to the purpose. These organic substances have a function of imparting bonding and plasticity and insulating and isolating the alloy powders. In addition, a plasticizer such as dioctyl phthalate can be added as necessary to increase the flexibility of the noise suppression sheet.
難燃剤については、最終的に得られるノイズ抑制シートにおけるその平均粒径を10μm以下とし、好ましくは0.2μm以上8μm以下、より好ましくは0.2μm以上6μm以下とする。難燃剤は、偏平状の合金粉末間に分散して存在するので、その平均粒径が10μmを超えると、合金粉末のシート面内方向の配向度が著しく低下してしまう。そのため、難燃性を高めることができても、所望のノイズ抑制効果が得られない。なお、難燃剤の平均粒径が0.2μm以上であれば、高い難燃性を維持することができる。ここで、「難燃剤の平均粒径」とは、ノイズ抑制シートの厚さ方向の断面のイオンミリング研磨面をSEMで観察したときの、視野中の10個の難燃剤の長径の平均値を意味する。なお、難燃剤の種類は、特に限定されないが、有機物と同様にハロゲン元素を含まない難燃剤が好ましく、具体的には、水酸化アルミニウム、水酸化マグネシウム、ホウ酸亜鉛、メラミンシアネレート、及び赤リンのうちから選択される1種以上の難燃剤が挙げられる。 The average particle size of the flame retardant in the finally obtained noise suppression sheet is 10 μm or less, preferably 0.2 μm or more and 8 μm or less, more preferably 0.2 μm or more and 6 μm or less. Since the flame retardant is dispersed between the flat alloy powders, if the average particle size exceeds 10 μm, the degree of orientation of the alloy powder in the sheet surface direction is significantly reduced. Therefore, even if the flame retardancy can be improved, a desired noise suppression effect cannot be obtained. If the average particle size of the flame retardant is 0.2 μm or more, high flame retardancy can be maintained. Here, the “average particle diameter of the flame retardant” refers to the average value of the major axes of the ten flame retardants in the visual field when the ion milling polished surface of the cross section in the thickness direction of the noise suppression sheet is observed by SEM. means. The type of flame retardant is not particularly limited, but is preferably a flame retardant containing no halogen element like organic substances, specifically, aluminum hydroxide, magnesium hydroxide, zinc borate, melamine cyanate, and One or more flame retardants selected from red phosphorus.
偏平状の合金粉末、難燃剤、及び有機物の配合比は、偏平状の合金粉末を100質量部とした場合に、難燃剤を5質量部以上30質量部以下、有機物を8質量部以上30質量部以下とすることが好ましい。難燃剤が5質量部以上であれば、UL94規格の難燃性試験においてV1以上となり、ノイズ抑制シートに要求される難燃性を確保することができ、30質量部以下であれば、ノイズ抑制シート全体に対する合金粉末の体積率が著しく減少しないので、ノイズ抑制シートの透磁率が著しく低下するのを抑制することができるからである。また、有機物が8質量部以上であれば、ノイズ抑制シートの可塑性を保つことができ、30質量部以下であれば、シート成型時に偏平状の合金粉末がシートの水平方向に配向しやすく、十分な大きさのμ”値を得ることができるからである。ここで、このような配合比で有機物を添加すれば、上述の絶縁処理を施さなくともノイズ抑制シートの表面抵抗が105Ω/□以上となる。なお、上述した絶縁処理を施した場合は、合金粉末自体の絶縁性が向上するため、絶縁処理を施さない場合に比べて有機物の添加量を減らすことができる。その結果、ノイズ抑制シートにおける合金粉末の体積が向上するので、透磁率が大きくなり、また難燃性も向上する。 The compounding ratio of the flat alloy powder, the flame retardant, and the organic substance is such that when the flat alloy powder is 100 parts by mass, the flame retardant is 5 to 30 parts by mass, and the organic substance is 8 to 30 parts by mass. Parts or less. When the flame retardant is 5 parts by mass or more, it becomes V1 or more in a flame resistance test of UL94 standard, and the flame retardancy required for the noise suppression sheet can be secured. This is because the volume ratio of the alloy powder with respect to the entire sheet does not significantly decrease, so that the magnetic permeability of the noise suppression sheet can be suppressed from significantly decreasing. Further, when the organic substance is at least 8 parts by mass, the plasticity of the noise suppression sheet can be maintained, and when it is at most 30 parts by mass, the flat alloy powder is likely to be oriented in the horizontal direction of the sheet at the time of sheet molding, so that sufficient Here, when the organic substance is added at such a compounding ratio, the surface resistance of the noise suppression sheet can be increased to 10 5 Ω / without performing the above-described insulation treatment. When the above-described insulation treatment is performed, the insulating property of the alloy powder itself is improved, so that the amount of the organic substance added can be reduced as compared with the case where the insulation treatment is not performed. Since the volume of the alloy powder in the noise suppression sheet is improved, the magnetic permeability is increased, and the flame retardancy is also improved.
有機溶媒は、特に限定されず、トルエン、酢酸ブチル、酢酸エチルなどを用いることができる。なお、有機溶媒は、後続の工程で蒸発するので、ノイズ抑制シートには含まれない。 The organic solvent is not particularly limited, and toluene, butyl acetate, ethyl acetate and the like can be used. Note that the organic solvent is not included in the noise suppression sheet because it evaporates in a subsequent step.
次に、スラリーの作製方法について説明する。スラリーは、公知のボールミル法によって作製することができる。すなわち、所定の配合比に調整した偏平状の合金粉末、難燃剤、有機物、及び有機溶剤を、混合および攪拌を促進するボールミルメディアとともに、容器に投入し、その容器を回転させることで、これらが均質に分散したスラリーを作製することができる。本実施形態におけるスラリーも、ボールミル法を用いて作製することは可能である。しかしながら、ボールミル法では、ボールミルメディアによって偏平状の合金粉末に大きな外力が加わり、偏平状の合金粉末の保磁力を0.5A/cm以上8A/cm以下の範囲内に保つことが困難になる。そのため、スラリーの作製には、ボールメディアを使用しない遊星式の混合攪拌装置を使用することが好ましい。この場合、偏平状の合金粉末に大きな外力を与えずに、偏平状の合金粉末、難燃剤、有機物、及び有機溶剤を均質に混合することが可能である。また、遊星撹拌方式であるので、スラリーに含まれる気体の脱気も促進されるので、2.5g/cm3以上という高い密度を有するノイズ抑制シートを得るのに有効なスラリーを作製することができる。 Next, a method for preparing a slurry will be described. The slurry can be prepared by a known ball mill method. That is, the flat alloy powder, the flame retardant, the organic substance, and the organic solvent adjusted to a predetermined compounding ratio are put into a container together with a ball mill medium that promotes mixing and stirring, and the container is rotated. A homogeneously dispersed slurry can be produced. The slurry in the present embodiment can also be manufactured using a ball mill method. However, in the ball mill method, a large external force is applied to the flat alloy powder by the ball mill media, and it becomes difficult to maintain the coercive force of the flat alloy powder in the range of 0.5 A / cm to 8 A / cm. Therefore, it is preferable to use a planetary mixing / stirring apparatus that does not use a ball medium for preparing the slurry. In this case, the flat alloy powder, the flame retardant, the organic substance, and the organic solvent can be uniformly mixed without applying a large external force to the flat alloy powder. In addition, because of the planetary stirring method, degassing of the gas contained in the slurry is also promoted, so that it is possible to produce a slurry effective for obtaining a noise suppression sheet having a high density of 2.5 g / cm 3 or more. it can.
次に、偏平状の合金粉末、難燃剤、有機物、及び有機溶媒とからなるスラリーをドクターブレード法にてシート状に成型および乾燥して、成型体を作製する。この成型体は、偏平状の合金粉末が有機物からなる基材に担持され、かつ難燃剤が合金粉末間に分散した構造を有しており、さらに、成型時の剪段応力によって偏平状の合金粉末は互いに水平方向に配向する。ここで、ノイズ抑制シートの成型方法としては、ドクターブレード法の他にもカレンダーロール法などの公知又は任意の方法を用いることもできるが、厚さ0.1mm以下のノイズ抑制シートを作製するには、ドクターブレード法などの塗工法式を用いることが好ましい。 Next, a slurry composed of the flat alloy powder, the flame retardant, the organic substance, and the organic solvent is formed into a sheet by a doctor blade method and dried to prepare a formed body. This molded body has a structure in which a flat alloy powder is supported on a substrate made of an organic material, and a flame retardant is dispersed between the alloy powders. The powders are oriented horizontally with respect to each other. Here, as a molding method of the noise suppression sheet, a known or arbitrary method such as a calendar roll method can be used in addition to the doctor blade method, but it is necessary to produce a noise suppression sheet having a thickness of 0.1 mm or less. It is preferable to use a coating method such as a doctor blade method.
次に、偏平状の合金粉末の水平方向の配向度および密度を高めるために、シート状の成型体に対して、有機物の軟化点以上(例えば60〜150℃程度)に加熱した状態でプレスを施す。これにより、得られるノイズ抑制シートの厚さは、0.05mm〜0.1mm程度とすることができ、ノイズ抑制シートの密度も2.5g/cm3以上にすることができる。密度が2.5g/cm3未満であると、空隙が多くなり、偏平状の合金粉末の水平配向度が低下したり、シート全体に対する合金粉末の占める割合が低下したりするので、所望のノイズ抑制効果が得られない。なお、より高い透磁率を有するノイズ抑制シートとするには、ノイズ抑制シートの密度としては2.7g/cm3以上にすることが好ましい。そのためには、空隙部の排除はもとより、偏平状の合金粉末の配合割合もできる限り高くして、シート全体に対する合金粉末の占める割合を高めることが有効である。 Next, in order to increase the degree of horizontal orientation and density of the flat alloy powder, a press is applied to the sheet-shaped molded body while heating the organic material to a temperature equal to or higher than the softening point of the organic substance (for example, about 60 to 150 ° C.). Apply. Thereby, the thickness of the obtained noise suppression sheet can be about 0.05 mm to 0.1 mm, and the density of the noise suppression sheet can be 2.5 g / cm 3 or more. If the density is less than 2.5 g / cm 3 , the number of voids increases, the degree of horizontal orientation of the flat alloy powder decreases, and the ratio of the alloy powder to the entire sheet decreases. No suppression effect is obtained. In order to obtain a noise suppression sheet having a higher magnetic permeability, the density of the noise suppression sheet is preferably set to 2.7 g / cm 3 or more. To this end, it is effective to increase the proportion of the alloy powder in the entire sheet by increasing the proportion of the flat alloy powder as much as possible, as well as eliminating voids.
以上の方法により、μ”分散の立ち上がり周波数が1MHz〜10MHzの帯域に存在し、かつ、μ”分散がGHz帯域まで分布していることを特徴とする難燃性のノイズ抑制シートを得ることができる。より詳細には、かかるノイズ抑制シートでは、μ”分散の立ち上がりにおいて、μ”値が1以上となる周波数が1MHz以上10MHz以下の帯域に存在し、かつ10GHzでのμ”値が2以上となっている。 By the above method, it is possible to obtain a flame-retardant noise suppression sheet characterized in that the rising frequency of the μ ″ dispersion exists in the band of 1 MHz to 10 MHz and the μ ″ dispersion is distributed up to the GHz band. it can. More specifically, in such a noise suppression sheet, at the rise of the μ ″ dispersion, the frequency at which the μ ″ value is 1 or more exists in the band from 1 MHz to 10 MHz, and the μ ″ value at 10 GHz becomes 2 or more. ing.
以上、本実施形態を例にして、本発明の近傍界用ノイズ抑制シートを説明したが、本発明は、上記実施形態に限定されず、特許請求の範囲において適宜変更を加えることができる。 As described above, the near-field noise suppression sheet of the present invention has been described using the present embodiment as an example. However, the present invention is not limited to the above-described embodiment, and can be appropriately modified within the scope of the claims.
例えば、難燃剤は、スラリーを作製する際ではなく、合金粉末を偏平加工する際に予め添加してもよい。この場合、合金粉末に偏平加工を施す時に、難燃剤も粉砕および解砕されるので、添加する際の難燃剤の平均粒径が10μm超えであったとしても、ノイズ抑制シートに含まれる難燃剤の平均粒径を10μm以下に調整することができる。 For example, the flame retardant may be added in advance when flattening the alloy powder, not when preparing a slurry. In this case, when the alloy powder is flattened, the flame retardant is also pulverized and crushed. Therefore, even if the average particle size of the flame retardant when added is more than 10 μm, the flame retardant contained in the noise suppression sheet is not included. Can be adjusted to 10 μm or less.
(発明例1〜12、比較例1〜12)
水アトマイズ法により、原料粉末として、表1に示す組成の合金粉末を得た。ここで、表1に示す合金粉末中のSi,P,Cの比率は、いずれも13:63:24とした。また、原料粉末の平均粒径は40〜50μmとした。次に、それぞれの合金粉末をアトライタにて偏平加工し、偏平状の合金粉末を得た。既述の方法によって測定した偏平状の合金粉末の厚さ及びアスペクト比の平均値を表1に示す。次に、合金粉末の表面に自己酸化被膜を形成するために、大気中にて100℃、1時間の酸化処理を行った後に、アルゴン中で350〜450℃、30分間の焼鈍処理を行った。表1には、焼鈍処理後の各偏平状の合金粉末に対して、粉末X線回折法により測定した相構造と保磁力測定器で測定した保磁力を示す。
(Invention Examples 1 to 12, Comparative Examples 1 to 12)
An alloy powder having a composition shown in Table 1 was obtained as a raw material powder by a water atomizing method. Here, the ratios of Si, P, and C in the alloy powder shown in Table 1 were all 13:63:24. The average particle size of the raw material powder was 40 to 50 μm. Next, each alloy powder was flattened by an attritor to obtain a flat alloy powder. Table 1 shows the average values of the thickness and aspect ratio of the flat alloy powder measured by the method described above. Next, in order to form a self-oxidized film on the surface of the alloy powder, an oxidation treatment was performed at 100 ° C. for 1 hour in the air, and then an annealing treatment was performed at 350 to 450 ° C. for 30 minutes in argon. . Table 1 shows the phase structure measured by the powder X-ray diffraction method and the coercive force measured by the coercive force measuring device for each flat alloy powder after the annealing treatment.
次に、偏平加工を施した各合金粉末100質量部、ポリブチラール樹脂(軟化点:約70℃)20質量部、酢酸ブチル50質量部、並びに難燃剤として水酸化マグネシウム5質量部および赤リン1質量部を、遊星式の混合撹拌装置によって混合してスラリーを作製した。なお、添加する際の難燃剤の平均粒径は、発明例1〜10並びに比較例1〜4及び比較例9〜12については、水酸化マグネシウム9μm-赤リン7μm、比較例5〜8については、水酸化マグネシウム13μm-赤リン13μmとし、発明例11については、水酸化マグネシウム8μm-赤リン7μmとし、発明例12については、水酸化マグネシウム6μm-赤リン6μmとした。次に、ドクターブレード法により、ポリエチレンテレフタラートのフィルム上で、このスラリーをシート状の成型体に加工した。 Next, 100 parts by mass of each flattened alloy powder, 20 parts by mass of polybutyral resin (softening point: about 70 ° C.), 50 parts by mass of butyl acetate, and 5 parts by mass of magnesium hydroxide and red phosphorus 1 as a flame retardant The parts by mass were mixed by a planetary mixing and stirring device to prepare a slurry. In addition, the average particle size of the flame retardant at the time of addition, magnesium hydroxide 9 μm-red phosphorus 7 μm for Invention Examples 1 to 10 and Comparative Examples 1 to 4 and Comparative Examples 9 to 12, and Comparative Examples 5 to 8 Magnesium hydroxide 13 μm-red phosphorus 13 μm, magnesium hydroxide 8 μm-red phosphorus 7 μm for Invention Example 11, and magnesium hydroxide 6 μm-red phosphorus 6 μm for Invention Example 12. Next, this slurry was processed into a sheet-like molded body on a polyethylene terephthalate film by a doctor blade method.
その後、発明例1〜12及び比較例1〜8については、10MPaの圧力下で100℃、1分間の加熱プレスを施すことで、表1に示す密度を有する厚さ0.05mmのノイズ抑制シートを得た。一方、比較例9〜12については、加熱プレスを施さないで、表1に示す密度を有する厚さ0.08mmのノイズ抑制シートを得た。 Thereafter, for Invention Examples 1 to 12 and Comparative Examples 1 to 8, by applying a heat press at 100 ° C. for 1 minute under a pressure of 10 MPa, a noise suppression sheet having a density shown in Table 1 and a thickness of 0.05 mm was obtained. I got On the other hand, in Comparative Examples 9 to 12, a noise suppression sheet having a density shown in Table 1 and a thickness of 0.08 mm was obtained without performing hot pressing.
各発明例および比較例のノイズ抑制シートについて、ネットワークアナライザを用いたSパラメータ法によって透磁率特性を測定した。μ”分散の立ち上がりはじめで、μ”値が1以上となる周波数、および10GHzにおけるμ”値の大きさを表1に示す。 The magnetic permeability characteristics of the noise suppression sheets of the invention examples and the comparative examples were measured by an S-parameter method using a network analyzer. Table 1 shows the frequency at which the μ ″ value becomes 1 or more at the beginning of the μ ″ dispersion and the magnitude of the μ ″ value at 10 GHz.
また、各発明例および比較例のノイズ抑制シートについて、既述の方法で測定した難燃剤の平均粒径、アルキメデス法によって測定した密度、およびハイレスタにて測定した表面抵抗を表1に示す。 Table 1 shows the average particle diameter of the flame retardant, the density measured by the Archimedes method, and the surface resistance measured by Hiresta for the noise suppression sheets of the invention examples and the comparative examples.
発明例1〜12では、本発明の成分組成を満足し、難燃剤の平均粒径が10μm以下、ノイズ抑制シートの密度が2.5g/cm3以上であったので、μ”分散の立ち上がりはじめで、μ”値が1以上となる周波数は1〜10MHzの範囲内に存在し、10GHzにおけるμ”値は2を超えていた。特に、発明例2,3,11,12では、磁気特性が良好であるせいか、10GHzにおけるμ”値は4.5を超えていた。一方、比較例1,2では、10GHzにおけるμ”値は2未満であった。比較例1では、Fe濃度が低いために、偏平状の合金粉末の磁束密度も小さくなり、10GHzにおけるμ”値は2未満であったと考えられる。また、比較例2では、本発明の成分組成を満足しておらず、偏平状の合金粉末の保磁力が8A/cmを超えているため、軟磁気特性が低下し、10GHzにおけるμ”値は2未満であったと考えられる。また、Cuが1.5原子%を超える比較例3、4では、X線回折測定によって磁気異方性が大きいFeP化合物が形成されていることがわかった。その結果、保磁力が8A/cmを超えており、周波数に対するμ”の分布幅は狭く、10GHzにおけるμ”値も0.0であった。なお、アスペクト比については、10以上であれば、透磁率の特性への影響はほとんど無視できると考えられる。また、10GHzにおけるμ”値が2以上あれば、軽薄短小化および高周波化する近年の電子機器などにおいて発生するノイズを効果的に抑制させることができる。 In Invention Examples 1 to 12, since the component composition of the present invention was satisfied, the average particle size of the flame retardant was 10 μm or less, and the density of the noise suppression sheet was 2.5 g / cm 3 or more, the μ ″ dispersion started to rise. The frequency at which the value of μ ″ was 1 or more was in the range of 1 to 10 MHz, and the value of μ ″ at 10 GHz exceeded 2. Particularly, in Invention Examples 2, 3, 11, and 12, the magnetic characteristics were poor. Perhaps because of good, the μ ″ value at 10 GHz exceeded 4.5. On the other hand, in Comparative Examples 1 and 2, the μ ″ value at 10 GHz was less than 2. In Comparative Example 1, since the Fe concentration was low, the magnetic flux density of the flat alloy powder was small, and the μ ″ value at 10 GHz. Is considered to be less than 2. In Comparative Example 2, since the component composition of the present invention was not satisfied and the coercive force of the flat alloy powder exceeded 8 A / cm, the soft magnetic properties were lowered, and the μ ″ value at 10 GHz was It is considered to be less than 2. In Comparative Examples 3 and 4 in which Cu was more than 1.5 atomic%, it was found by X-ray diffraction measurement that an FeP compound having large magnetic anisotropy was formed. As a result, the coercive force exceeded 8 A / cm, the distribution width of μ ″ with respect to frequency was narrow, and the μ ″ value at 10 GHz was 0.0. It is considered that the influence of the magnetic susceptibility on the characteristics is almost negligible.If the value of μ ″ at 10 GHz is 2 or more, it is possible to effectively suppress noise generated in recent electronic devices which are lighter, thinner and smaller and have higher frequencies. It can be.
比較例5〜8では、難燃剤の平均粒径が10μmを超えており、SEM観察から合金粉末のシート面内の配向性が乱れている部分が随所に確認された。そのため、μ”分散の立ち上がりはじめで、μ”値が1以上となる周波数は10MHzを超えており、10GHzにおけるμ”値も2を下回っていた。 In Comparative Examples 5 to 8, the average particle size of the flame retardant exceeded 10 μm, and from SEM observation, portions where the orientation of the alloy powder in the sheet surface was disordered were confirmed everywhere. For this reason, at the beginning of the rise of the μ ″ dispersion, the frequency at which the μ ″ value was 1 or more exceeded 10 MHz, and the μ ″ value at 10 GHz was also below 2.
比較例9〜12では、ノイズ抑制シートの密度が2.5g/cm3を下回っており、SEM観察から合金粉末のシート面内の配向性が乱れている部分が随所に確認された。そのため、μ”分散の立ち上がりはじめで、μ”値が1以上となる周波数は10MHzを超えており、10GHzにおけるμ”値も2を下回っていた。 In Comparative Examples 9 to 12, the density of the noise suppression sheet was lower than 2.5 g / cm 3 , and a portion where the orientation of the alloy powder in the sheet surface was disordered was confirmed everywhere from SEM observation. For this reason, at the beginning of the rise of the μ ″ dispersion, the frequency at which the μ ″ value was 1 or more exceeded 10 MHz, and the μ ″ value at 10 GHz was also below 2.
発明例11,12では、難燃剤の平均粒径が8μm以下であり、ノイズ抑制シートの密度が2.7g/cm3以上であったので、μ”分散の立ち上がりはじめで、μ”値が1以上となる周波数が1〜10MHzの範囲内に存在し、10GHzにおけるμ”値は5を超えていた。これらのシートでは、難燃剤の平均粒径が小さくなるほど偏平粉末のシート面内の配向性が良好になり、そのために10GHzにおけるμ”値もより大きくなった。 In Invention Examples 11 and 12, the average particle size of the flame retardant was 8 μm or less, and the density of the noise suppression sheet was 2.7 g / cm 3 or more. The above frequencies were in the range of 1 to 10 MHz, and the μ ″ value at 10 GHz exceeded 5. In these sheets, the smaller the average particle size of the flame retardant was, the more the orientation of the flat powder in the sheet surface was reduced. Was improved, and the μ ″ value at 10 GHz was also larger.
(発明例13〜24、比較例13〜24)
水アトマイズ法により、原料粉末として、表2に示す組成の合金粉末を得た。ここで、表2に示す合金粉末中のSi,B,Cの比率は、いずれも13:63:24とした。また、原料粉末の平均粒径は40〜50μmとした。次に、それぞれの合金粉末をアトライタにて偏平加工し、偏平状の合金粉末を得た。既述の方法によって測定した偏平状の合金粉末の厚さ及びアスペクト比の平均値を表2に示す。次に、シランカップリング剤として3-アミノプロピルトリエトキシシランが2質量%添加されているエタノール溶液中に合金粉末を投入し、30分間の攪拌を行った。その後、粉末を溶液中から取り出し、大気中で150℃、8時間の条件で乾燥させた。その後、窒素中で350〜450℃、30分間の焼鈍処理を行った。表2には、既述の方法によって測定した相構造と保磁力を示す。
(Invention Examples 13 to 24, Comparative Examples 13 to 24)
An alloy powder having a composition shown in Table 2 was obtained as a raw material powder by a water atomizing method. Here, the ratios of Si, B, and C in the alloy powder shown in Table 2 were all 13:63:24. The average particle size of the raw material powder was 40 to 50 μm. Next, each alloy powder was flattened by an attritor to obtain a flat alloy powder. Table 2 shows the average values of the thickness and aspect ratio of the flat alloy powder measured by the above-described method. Next, the alloy powder was introduced into an ethanol solution containing 2% by mass of 3-aminopropyltriethoxysilane as a silane coupling agent, and the mixture was stirred for 30 minutes. Thereafter, the powder was taken out of the solution and dried in air at 150 ° C. for 8 hours. Thereafter, an annealing treatment was performed in nitrogen at 350 to 450 ° C. for 30 minutes. Table 2 shows the phase structure and the coercive force measured by the method described above.
次に、偏平加工を施した各合金粉末100質量部、アクリルゴム20質量部(軟化点:約70℃)、トルエン50質量部、並びに難燃剤としてメラミンシアヌレート5質量部及び赤リン1質量部を、遊星式の混合撹拌装置によって混合してスラリーを作製した。なお、添加する際の難燃剤の平均粒径は、発明例13〜22並びに比較例13〜16及び21〜24については、水酸化マグネシウム9μm-赤リン7μmとし、比較例17〜20については、水酸化マグネシウム13μm-赤リン13μmとし、発明例23については、水酸化マグネシウム8μm-赤リン7μmとし、発明例24については、水酸化マグネシウム6μm-赤リン6μmとした。次に、ドクターブレード法により、ポリエチレンテレフタラートのフィルム上で、このスラリーをシート状の成型体に加工した。 Next, 100 parts by mass of each flattened alloy powder, 20 parts by mass of acrylic rubber (softening point: about 70 ° C.), 50 parts by mass of toluene, 5 parts by mass of melamine cyanurate as a flame retardant and 1 part by mass of red phosphorus Was mixed with a planetary mixing and stirring device to prepare a slurry. In addition, the average particle size of the flame retardant at the time of addition, magnesium hydroxide 9μm-red phosphorus 7μm for Invention Examples 13-22 and Comparative Examples 13-16 and 21-24, and for Comparative Examples 17-20, Magnesium hydroxide 13 μm-red phosphorus 13 μm, Invention Example 23 was magnesium hydroxide 8 μm-red phosphorus 7 μm, and Invention Example 24 was magnesium hydroxide 6 μm-red phosphorus 6 μm. Next, this slurry was processed into a sheet-like molded body on a polyethylene terephthalate film by a doctor blade method.
その後、発明例13〜24及び比較例13〜20については、10MPaの圧力下で100℃、1分間の加熱プレスを施すことで、表2に示す密度を有する厚さ0.05mmのノイズ抑制シートを作製した。一方、比較例21〜24については、加熱プレスを施さないで、表2に示す密度を有する厚さ0.08mmのノイズ抑制シートを得た。 After that, for Invention Examples 13 to 24 and Comparative Examples 13 to 20, a noise suppression sheet having a density shown in Table 2 and a thickness of 0.05 mm having a density shown in Table 2 by applying a heat press at 100 ° C. for 1 minute under a pressure of 10 MPa. Was prepared. On the other hand, for Comparative Examples 21 to 24, a noise suppression sheet having a density shown in Table 2 and having a thickness of 0.08 mm was obtained without performing hot pressing.
各発明例および比較例について、既述の方法で、透磁率特性、難燃剤の平均粒径、ノイズ抑制シートの密度、および表面抵抗を測定した。測定結果を表2に示す。 The magnetic permeability characteristics, the average particle diameter of the flame retardant, the density of the noise suppression sheet, and the surface resistance of each of the invention examples and the comparative examples were measured by the methods described above. Table 2 shows the measurement results.
発明例13〜24では、難燃剤の平均粒径が10μm以下であり、ノイズ抑制シートの密度が2.5g/cm3以上であったので、μ”分散の立ち上がりはじめで、μ”値が1以上となる周波数が1〜10MHzの範囲内に存在し、10GHzにおけるμ”値は2を超えていた。特に、発明例14,15,23,24では、磁気特性が良好であるせいか、10GHzにおけるμ”値は4.5を超えていた。一方、比較例13,14では、10GHzにおけるμ”値は2未満であった。比較例13では、Fe濃度が低いために、偏平状の合金粉末の磁束密度も小さくなり、10GHzにおけるμ”値が2未満になったと考えられる。また、比較例14では、本発明の成分組成を満足しておらず、偏平状の合金粉末の保磁力が8A/cmを超えているため、軟磁気特性が低下し、10GHzにおけるμ”値は2未満であったと考えられる。また、Cuが1.5原子%を超える比較例15,16では、X線回折測定によって、磁気異方性が大きいFeBの化合物が形成されていることがわかった。その結果、保磁力が8A/cmを超えており、周波数に対するμ”の分布幅は狭く、10GHzにおけるμ”値も0.0であった。 In Invention Examples 13 to 24, the average particle size of the flame retardant was 10 μm or less, and the density of the noise suppression sheet was 2.5 g / cm 3 or more. The above frequencies existed in the range of 1 to 10 MHz, and the value of μ ″ at 10 GHz exceeded 2. Particularly, in Invention Examples 14, 15, 23, and 24, 10 GHz was probably due to good magnetic properties. The μ ″ value in was over 4.5. On the other hand, in Comparative Examples 13 and 14, the μ ″ value at 10 GHz was less than 2. In Comparative Example 13, since the Fe concentration was low, the magnetic flux density of the flat alloy powder was small, and the μ ″ value at 10 GHz. Is considered to be less than 2. In Comparative Example 14, since the component composition of the present invention was not satisfied and the coercive force of the flat alloy powder exceeded 8 A / cm, the soft magnetic properties were reduced, and the μ ″ value at 10 GHz was It is considered to be less than 2. In Comparative Examples 15 and 16 in which Cu exceeds 1.5 atomic%, it was found by X-ray diffraction measurement that a FeB compound having large magnetic anisotropy was formed. As a result, the coercive force exceeded 8 A / cm, the distribution width of μ ″ with respect to frequency was narrow, and the value of μ ″ at 10 GHz was 0.0.
比較例17〜20では、難燃剤の平均粒径が10μmを超えており、SEM観察から合金粉末のシート面内の配向性が乱れている部分が随所に確認された。そのため、μ”分散の立ち上がりはじめで、μ”値が1以上となる周波数は10MHzを超えており、10GHzにおけるμ”値も2を下回っていた。 In Comparative Examples 17 to 20, the average particle size of the flame retardant exceeded 10 μm, and from SEM observation, portions where the orientation of the alloy powder in the sheet surface was disordered were confirmed everywhere. For this reason, at the beginning of the rise of the μ ″ dispersion, the frequency at which the μ ″ value was 1 or more exceeded 10 MHz, and the μ ″ value at 10 GHz was also below 2.
比較例21〜24では、ノイズ抑制シートの密度が2.5g/cm3を下回っており、SEM観察から合金粉末のシート面内の配向性が乱れている部分が随所に確認された。そのため、μ”分散の立ち上がりはじめで、μ”値が1以上となる周波数は10MHzを超えており、10GHzにおけるμ”値も2を下回っていた。 In Comparative Examples 21 to 24, the density of the noise suppression sheet was lower than 2.5 g / cm 3 , and a portion where the orientation of the alloy powder in the sheet surface was disordered was confirmed everywhere from SEM observation. For this reason, at the beginning of the rise of the μ ″ dispersion, the frequency at which the μ ″ value was 1 or more exceeded 10 MHz, and the μ ″ value at 10 GHz was also below 2.
発明例23,24では、難燃剤の平均粒径が8μm以下であり、ノイズ抑制シートの密度が2.7g/cm3以上であったので、μ”分散の立ち上がりはじめで、μ”値が1以上となる周波数が1〜10MHzの範囲内に存在し、10GHzにおけるμ”値は5を超えていた。これらのシートでは、難燃剤の平均粒径が小さくなるほど偏平粉末のシート面内の配向性が良好になり、そのために10GHzにおけるμ”値もより大きくなった。 In Invention Examples 23 and 24, the average particle size of the flame retardant was 8 μm or less, and the density of the noise suppression sheet was 2.7 g / cm 3 or more. The above frequencies were in the range of 1 to 10 MHz, and the μ ″ value at 10 GHz exceeded 5. In these sheets, the smaller the average particle size of the flame retardant was, the more the orientation of the flat powder in the sheet surface was reduced. Was improved, and the μ ″ value at 10 GHz was also larger.
(発明例25〜27)
水アトマイズ法により、原料粉末として、表3に示す組成の合金粉末を得た。ここで、表3に示す合金粉末中のSi,B,C及びSi,P,Cの比率は、いずれも9:65:26とし、各発明例25〜27における2種類の合金粉末の混合比は1:1とした。また、原料粉末の平均粒径は40〜50μmとした。次に、それぞれの合金粉末をアトライタにて偏平加工し、偏平状の合金粉末を得た。既述の方法によって測定した偏平状の合金粉末の厚さ及びアスペクト比の平均値を表3に示す。次に、合金粉末の表面に自己酸化被膜を形成するために、大気中にて100℃、1時間の酸化処理を行った後に、アルゴン中で350〜450℃、30分間の焼鈍処理を行った。表3には、既述の方法によって測定した相構造と保磁力測定器で測定した保磁力を示す。
(Invention Examples 25 to 27)
An alloy powder having a composition shown in Table 3 was obtained as a raw material powder by a water atomizing method. Here, the ratios of Si, B, C and Si, P, C in the alloy powders shown in Table 3 were all 9:65:26, and the mixing ratio of the two types of alloy powders in each of Inventive Examples 25 to 27. Was 1: 1. The average particle size of the raw material powder was 40 to 50 μm. Next, each alloy powder was flattened by an attritor to obtain a flat alloy powder. Table 3 shows the average values of the thickness and aspect ratio of the flat alloy powder measured by the method described above. Next, in order to form a self-oxidized film on the surface of the alloy powder, an oxidation treatment was performed in air at 100 ° C. for 1 hour, and then an annealing treatment was performed in argon at 350 to 450 ° C. for 30 minutes. . Table 3 shows the phase structure measured by the above-described method and the coercive force measured by the coercive force measuring device.
次に、偏平加工を施した各合金粉末100質量部、ポリブチラール樹脂(軟化点:約70℃)20質量部、酢酸ブチル50質量部、並びに難燃剤として平均粒径が8μmの水酸化マグネシウム5質量部および平均粒径が8μmの赤リン1質量部を、遊星式の混合撹拌装置によって混合してスラリーを作製した(発明例25)。また、偏平加工を施した各合金粉末100質量部、ポリブチラール樹脂(軟化点:約70℃)20質量部、酢酸ブチル50質量部、並びに難燃剤として平均粒径が6μmの水酸化マグネシウム5質量部および平均粒径が6μmの赤リン1質量部を、遊星式の混合撹拌装置によって混合してスラリーを作製した(発明例26,27)。次に、ドクターブレード法により、ポリエチレンテレフタラートのフィルム上で、これらのスラリーをシート状の成型体に加工した。その後、10MPaの圧力下で100℃、1分間の加熱プレスを施すことで、厚さ0.05mmのノイズ抑制シートを作製した。 Next, 100 parts by mass of each flattened alloy powder, 20 parts by mass of a polybutyral resin (softening point: about 70 ° C.), 50 parts by mass of butyl acetate, and magnesium hydroxide 5 having an average particle size of 8 μm as a flame retardant A slurry was prepared by mixing parts by mass and 1 part by mass of red phosphorus having an average particle diameter of 8 μm with a planetary mixing and stirring device (Invention Example 25). Further, 100 parts by mass of each flattened alloy powder, 20 parts by mass of polybutyral resin (softening point: about 70 ° C.), 50 parts by mass of butyl acetate, and 5 parts by mass of magnesium hydroxide having an average particle size of 6 μm as a flame retardant And 1 part by mass of red phosphorus having an average particle diameter of 6 μm were mixed by a planetary mixing and stirring device to prepare a slurry (Invention Examples 26 and 27). Next, these slurries were processed into a sheet-like molded body on a polyethylene terephthalate film by a doctor blade method. Then, a noise suppression sheet having a thickness of 0.05 mm was produced by applying a heat press at 100 ° C. for 1 minute under a pressure of 10 MPa.
各発明例について、既述の方法で、透磁率特性、難燃剤の平均粒径、ノイズ抑制シートの密度、および表面抵抗を測定した。測定結果を表3に示す。 The magnetic permeability characteristics, the average particle size of the flame retardant, the density of the noise suppression sheet, and the surface resistance of each of the inventive examples were measured by the methods described above. Table 3 shows the measurement results.
発明例25〜27では、難燃剤の平均粒径が8μm以下であり、ノイズ抑制シートの密度が2.7g/cm3以上であったので、μ”分散の立ち上がりはじめで、μ”値が1以上となる周波数が1〜10MHzの範囲内に存在し、10GHzにおけるμ”値は2を超えていた。特に、難燃剤の平均粒径が6μm以下であった発明例26,27は、偏平粉末のシート面内の配向性が更に良好となり、10GHzにおけるμ”値は5を超えていた。 In Invention Examples 25 to 27, the average particle size of the flame retardant was 8 μm or less, and the density of the noise suppression sheet was 2.7 g / cm 3 or more. The above frequencies were in the range of 1 to 10 MHz, and the μ ″ value at 10 GHz exceeded 2. In particular, Invention Examples 26 and 27, in which the average particle size of the flame retardant was 6 μm or less, correspond to flat powders. And the in-plane orientation was further improved, and the μ ″ value at 10 GHz exceeded 5.
(発明例28〜35)
水アトマイズ法により、原料粉末として、表4に示す組成の合金粉末を得た。ここで、表4に示す合金粉末中のSi,B,C及びSi,P,Cの比率は、いずれも9:65:26とした。また、原料粉末の平均粒径は40〜50μmとした。次に、それぞれの合金粉末をアトライタにて偏平加工し、偏平状の合金粉末を得た。既述の方法によって測定した偏平状の合金粉末の厚さ及びアスペクト比の平均値を表4に示す。次に、チタン系のカップリング剤としてテトラノルマルブチルチタネートを2質量%添加したエタノール溶液中に合金粉末を投入し、30分間の攪拌を行った。その後、合金粉末を溶液中から取り出し、大気中で150℃、8時間の条件で乾燥させ、合金粉末の表面に、平均粒径が100nm以下の酸化物を形成した。その後、窒素中で350〜450℃、30分間の焼鈍処理を行った。表4には、既述の方法によって測定した相構造と保磁力を示す。
(Invention Examples 28 to 35)
An alloy powder having a composition shown in Table 4 was obtained as a raw material powder by a water atomizing method. Here, the ratios of Si, B, C and Si, P, C in the alloy powder shown in Table 4 were all 9:65:26. The average particle size of the raw material powder was 40 to 50 μm. Next, each alloy powder was flattened by an attritor to obtain a flat alloy powder. Table 4 shows the average values of the thickness and the aspect ratio of the flat alloy powder measured by the method described above. Next, the alloy powder was put into an ethanol solution to which 2% by mass of tetranormal butyl titanate was added as a titanium-based coupling agent, followed by stirring for 30 minutes. Thereafter, the alloy powder was taken out of the solution and dried in the air at 150 ° C. for 8 hours to form an oxide having an average particle diameter of 100 nm or less on the surface of the alloy powder. Thereafter, an annealing treatment was performed in nitrogen at 350 to 450 ° C. for 30 minutes. Table 4 shows the phase structure and the coercive force measured by the method described above.
次に、偏平加工を施した各合金粉末100質量部、アクリルゴム20質量部(軟化点:約70℃)、トルエン50質量部、並びに難燃剤として平均粒径が10μmのメラミンシアヌレート5質量部及び平均粒径が10μmの赤リン1質量部を、遊星式の混合撹拌装置によって混合してスラリーを作製した。次に、ドクターブレード法により、ポリエチレンテレフタラートのフィルム上で、このスラリーをシート状の成型体に加工した。その後、10MPaの圧力下で100℃、1分間の加熱プレスを施すことで、表4に示す密度を有する厚さ0.05mmのノイズ抑制シートを作製した。 Next, 100 parts by mass of each flattened alloy powder, 20 parts by mass of acrylic rubber (softening point: about 70 ° C.), 50 parts by mass of toluene, and 5 parts by mass of melamine cyanurate having an average particle diameter of 10 μm as a flame retardant Then, 1 part by mass of red phosphorus having an average particle size of 10 μm was mixed by a planetary mixing and stirring device to prepare a slurry. Next, this slurry was processed into a sheet-like molded body on a polyethylene terephthalate film by a doctor blade method. Thereafter, a heat press was performed at 100 ° C. for 1 minute under a pressure of 10 MPa to produce a noise suppression sheet having a density shown in Table 4 and a thickness of 0.05 mm.
各発明例について、既述の方法で、透磁率特性、難燃剤の平均粒径、ノイズ抑制シートの密度、および表面抵抗を測定した。測定結果を表4に示す。 The magnetic permeability characteristics, the average particle size of the flame retardant, the density of the noise suppression sheet, and the surface resistance of each of the inventive examples were measured by the methods described above. Table 4 shows the measurement results.
発明例28〜35では、難燃剤の平均粒径が10μm以下であり、ノイズ抑制シートの密度が2.5g/cm3以上であったので、μ”分散の立ち上がりはじめで、μ”値が1以上となる周波数が1〜10MHzの範囲内に存在し、10GHzにおけるμ”値は2を超えていた。Feに対するAl、Co、Ni、Cr、Nb、Mo、Ta、Wの置換量の合計が3原子%以下の発明例28,30,32,34は、10GHzにおけるμ”値が2.5以上の高い値となっていた。これは、Feに対するAl、Co、Ni、Cr、Nb、Mo、Ta、Wの置換量の合計が3原子%を超えたものは、合金粉末の磁束密度が小さくなったことが考えられ、Feに対するAl、Co、Ni、Cr、Nb、Mo、Ta、Wの置換量の合計は3原子%以下とするのがより好ましい。 In Invention Examples 28 to 35, the average particle size of the flame retardant was 10 μm or less, and the density of the noise suppression sheet was 2.5 g / cm 3 or more. The above frequencies existed in the range of 1 to 10 MHz, and the μ ″ value at 10 GHz exceeded 2. The total substitution amount of Al, Co, Ni, Cr, Nb, Mo, Ta, and W with respect to Fe was Inventive Examples 28, 30, 32, and 34 at 3 atomic% or less had a high μ ″ value at 10 GHz of 2.5 or more. It is considered that the alloy having a total substitution amount of Al, Co, Ni, Cr, Nb, Mo, Ta and W with respect to Fe exceeding 3 atomic% has reduced the magnetic flux density of the alloy powder. It is more preferable that the total substitution amount of Al, Co, Ni, Cr, Nb, Mo, Ta, and W to be 3 atomic% or less.
本発明によれば、MHz〜GHz帯の広帯域における磁界ノイズに対応することができ、かつ難燃性を併せ持つ近傍界用ノイズ抑制シートを得ることができる。 According to the present invention, it is possible to obtain a near-field noise suppression sheet that can cope with magnetic field noise in a wide band of MHz to GHz and has flame retardancy.
Claims (11)
前記合金粉末は、原子%で、組成式:Fe100-X1-Y1(Si,P,C)X1CuY1(但し、16≦X1+Y1≦24、14.5≦X1≦24、及び0≦Y1≦1.5)で表わされる合金粉末および/または組成式:Fe100-X2-Y2(Si,B,C)X2CuY2(但し、16≦X2+Y2≦24、14.5≦X2≦24、及び0≦Y2≦1.5)で表わされる合金粉末であって、前記合金粉末の相構造は、非晶質相のみからなり、又は非晶質相とα-Feを主体とした結晶相とが混在する相からなり、
前記難燃剤の平均粒径が10μm以下であり、
さらに、密度が2.5g/cm3以上であることを特徴とする近傍界用ノイズ抑制シート。 A base material made of an organic material, a flat alloy powder supported in the base material, and a flame retardant dispersed in the base material, a near-field noise suppression sheet including:
The alloy powder is represented by the following formula in atomic%: Fe 100-X1-Y1 (Si, P, C) X1 Cu Y1 (where 16 ≦ X1 + Y1 ≦ 24, 14.5 ≦ X1 ≦ 24, and 0 ≦ Y1 ≦ 1.5) Alloy powder and / or composition formula: Fe 100-X2-Y2 (Si, B, C) X2 Cu Y2 (16 ≦ X2 + Y2 ≦ 24, 14.5 ≦ X2 ≦ 24, and 0) ≦ Y2 ≦ 1.5), wherein the phase structure of the alloy powder comprises only an amorphous phase or a mixture of an amorphous phase and a crystal phase mainly composed of α-Fe. Consisting of
The average particle size of the flame retardant is 10 μm or less,
Further, a near-field noise suppression sheet having a density of 2.5 g / cm 3 or more.
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| PCT/JP2018/029289 WO2019054085A1 (en) | 2017-09-12 | 2018-08-03 | Near-field noise-suppression sheet |
| KR1020207004423A KR102155542B1 (en) | 2017-09-12 | 2018-08-03 | Noise suppression sheet for near field |
| CN201880047397.6A CN110892492B (en) | 2017-09-12 | 2018-08-03 | Noise Suppression Sheet for Near Field |
| TW107130220A TWI683914B (en) | 2017-09-12 | 2018-08-30 | Noise suppression film for near field |
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| JPH11354973A (en) * | 1998-06-04 | 1999-12-24 | Hitachi Metals Ltd | Electromagnetic wave absorber |
| WO2002000954A1 (en) * | 2000-06-29 | 2002-01-03 | Sumitomo Special Metals Co., Ltd | Soft magnetic alloy powder for electromagnetic wave absorbing sheet, electromagnetic wave absorbing sheet, and method for manufacturing them |
| JP3897552B2 (en) * | 2001-05-23 | 2007-03-28 | アルプス電気株式会社 | Radio wave absorber and method of manufacturing radio wave absorber |
| JP3990658B2 (en) | 2002-08-19 | 2007-10-17 | 住友電気工業株式会社 | Electromagnetic wave absorber |
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| JP2004288941A (en) * | 2003-03-24 | 2004-10-14 | Hitachi Metals Ltd | Noise suppression sheet |
| JP2007281074A (en) * | 2006-04-04 | 2007-10-25 | Hitachi Metals Ltd | Noise suppression sheet |
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