JP6645033B2 - Manufacturing method of metal-clad laminate, metal-clad laminate and printed wiring board - Google Patents
Manufacturing method of metal-clad laminate, metal-clad laminate and printed wiring board Download PDFInfo
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- JP6645033B2 JP6645033B2 JP2015104931A JP2015104931A JP6645033B2 JP 6645033 B2 JP6645033 B2 JP 6645033B2 JP 2015104931 A JP2015104931 A JP 2015104931A JP 2015104931 A JP2015104931 A JP 2015104931A JP 6645033 B2 JP6645033 B2 JP 6645033B2
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- clad laminate
- cushion material
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- 238000004519 manufacturing process Methods 0.000 title claims description 28
- 239000000463 material Substances 0.000 claims description 78
- 238000000034 method Methods 0.000 claims description 31
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 21
- 230000008602 contraction Effects 0.000 claims description 18
- 238000005259 measurement Methods 0.000 claims description 16
- 229910001220 stainless steel Inorganic materials 0.000 claims description 16
- 239000011888 foil Substances 0.000 claims description 15
- 239000010935 stainless steel Substances 0.000 claims description 15
- 239000012298 atmosphere Substances 0.000 claims description 6
- 238000010030 laminating Methods 0.000 claims description 3
- 230000000930 thermomechanical effect Effects 0.000 claims description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 30
- 239000003822 epoxy resin Substances 0.000 description 21
- 229920000647 polyepoxide Polymers 0.000 description 21
- 239000011342 resin composition Substances 0.000 description 20
- 229920005989 resin Polymers 0.000 description 18
- 239000011347 resin Substances 0.000 description 18
- 239000000123 paper Substances 0.000 description 17
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 12
- 230000003014 reinforcing effect Effects 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 230000006835 compression Effects 0.000 description 8
- 238000007906 compression Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 239000002655 kraft paper Substances 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 238000000465 moulding Methods 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 5
- 150000002460 imidazoles Chemical class 0.000 description 5
- 239000011256 inorganic filler Substances 0.000 description 5
- 229910003475 inorganic filler Inorganic materials 0.000 description 5
- 229920003986 novolac Polymers 0.000 description 5
- 239000002966 varnish Substances 0.000 description 5
- 239000002023 wood Substances 0.000 description 5
- ULKLGIFJWFIQFF-UHFFFAOYSA-N 5K8XI641G3 Chemical compound CCC1=NC=C(C)N1 ULKLGIFJWFIQFF-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229920000742 Cotton Polymers 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 4
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000005011 phenolic resin Substances 0.000 description 4
- 238000004881 precipitation hardening Methods 0.000 description 4
- QCBSYPYHCJMQGB-UHFFFAOYSA-N 2-ethyl-1,3,5-triazine Chemical compound CCC1=NC=NC=N1 QCBSYPYHCJMQGB-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 3
- 239000004841 bisphenol A epoxy resin Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- -1 imidazole compound Chemical class 0.000 description 3
- 239000005453 ketone based solvent Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 2
- ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 2-phenyl-1h-imidazole Chemical compound C1=CNC(C=2C=CC=CC=2)=N1 ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 0.000 description 2
- BVYPJEBKDLFIDL-UHFFFAOYSA-N 3-(2-phenylimidazol-1-yl)propanenitrile Chemical compound N#CCCN1C=CN=C1C1=CC=CC=C1 BVYPJEBKDLFIDL-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229960000583 acetic acid Drugs 0.000 description 2
- 239000005456 alcohol based solvent Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 2
- 239000012784 inorganic fiber Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- RUEBPOOTFCZRBC-UHFFFAOYSA-N (5-methyl-2-phenyl-1h-imidazol-4-yl)methanol Chemical compound OCC1=C(C)NC(C=2C=CC=CC=2)=N1 RUEBPOOTFCZRBC-UHFFFAOYSA-N 0.000 description 1
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical group C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- OQSQRYMTDPLPNY-UHFFFAOYSA-N 1,2-diethylimidazole Chemical compound CCC1=NC=CN1CC OQSQRYMTDPLPNY-UHFFFAOYSA-N 0.000 description 1
- GIWQSPITLQVMSG-UHFFFAOYSA-N 1,2-dimethylimidazole Chemical compound CC1=NC=CN1C GIWQSPITLQVMSG-UHFFFAOYSA-N 0.000 description 1
- XZKLXPPYISZJCV-UHFFFAOYSA-N 1-benzyl-2-phenylimidazole Chemical compound C1=CN=C(C=2C=CC=CC=2)N1CC1=CC=CC=C1 XZKLXPPYISZJCV-UHFFFAOYSA-N 0.000 description 1
- NYYVCPHBKQYINK-UHFFFAOYSA-N 1-ethyl-2-methylimidazole Chemical compound CCN1C=CN=C1C NYYVCPHBKQYINK-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 1
- NWOMMWVCNAOLOG-UHFFFAOYSA-N 1h-imidazol-5-ylmethanediol Chemical compound OC(O)C1=CN=CN1 NWOMMWVCNAOLOG-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- RUFZNDNBXKOZQV-UHFFFAOYSA-N 2,3-dihydro-1h-pyrrolo[1,2-a]benzimidazole Chemical compound C1=CC=C2N(CCC3)C3=NC2=C1 RUFZNDNBXKOZQV-UHFFFAOYSA-N 0.000 description 1
- ACUUVWABACRCCZ-UHFFFAOYSA-N 2-(2-ethyl-1h-imidazol-5-yl)propanenitrile Chemical compound CCC1=NC=C(C(C)C#N)N1 ACUUVWABACRCCZ-UHFFFAOYSA-N 0.000 description 1
- DJOYTAUERRJRAT-UHFFFAOYSA-N 2-(n-methyl-4-nitroanilino)acetonitrile Chemical compound N#CCN(C)C1=CC=C([N+]([O-])=O)C=C1 DJOYTAUERRJRAT-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- UINDRJHZBAGQFD-UHFFFAOYSA-N 2-ethyl-1-methylimidazole Chemical compound CCC1=NC=CN1C UINDRJHZBAGQFD-UHFFFAOYSA-N 0.000 description 1
- PQAMFDRRWURCFQ-UHFFFAOYSA-N 2-ethyl-1h-imidazole Chemical compound CCC1=NC=CN1 PQAMFDRRWURCFQ-UHFFFAOYSA-N 0.000 description 1
- YTWBFUCJVWKCCK-UHFFFAOYSA-N 2-heptadecyl-1h-imidazole Chemical compound CCCCCCCCCCCCCCCCCC1=NC=CN1 YTWBFUCJVWKCCK-UHFFFAOYSA-N 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- LLEASVZEQBICSN-UHFFFAOYSA-N 2-undecyl-1h-imidazole Chemical compound CCCCCCCCCCCC1=NC=CN1 LLEASVZEQBICSN-UHFFFAOYSA-N 0.000 description 1
- CMLFRMDBDNHMRA-UHFFFAOYSA-N 2h-1,2-benzoxazine Chemical group C1=CC=C2C=CNOC2=C1 CMLFRMDBDNHMRA-UHFFFAOYSA-N 0.000 description 1
- UIDDPPKZYZTEGS-UHFFFAOYSA-N 3-(2-ethyl-4-methylimidazol-1-yl)propanenitrile Chemical compound CCC1=NC(C)=CN1CCC#N UIDDPPKZYZTEGS-UHFFFAOYSA-N 0.000 description 1
- SESYNEDUKZDRJL-UHFFFAOYSA-N 3-(2-methylimidazol-1-yl)propanenitrile Chemical compound CC1=NC=CN1CCC#N SESYNEDUKZDRJL-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- RIAHASMJDOMQER-UHFFFAOYSA-N 5-ethyl-2-methyl-1h-imidazole Chemical compound CCC1=CN=C(C)N1 RIAHASMJDOMQER-UHFFFAOYSA-N 0.000 description 1
- TYOXIFXYEIILLY-UHFFFAOYSA-N 5-methyl-2-phenyl-1h-imidazole Chemical compound N1C(C)=CN=C1C1=CC=CC=C1 TYOXIFXYEIILLY-UHFFFAOYSA-N 0.000 description 1
- GJCOSYZMQJWQCA-UHFFFAOYSA-N 9H-xanthene Chemical compound C1=CC=C2CC3=CC=CC=C3OC2=C1 GJCOSYZMQJWQCA-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 244000025254 Cannabis sativa Species 0.000 description 1
- 235000012766 Cannabis sativa ssp. sativa var. sativa Nutrition 0.000 description 1
- 235000012765 Cannabis sativa ssp. sativa var. spontanea Nutrition 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 description 1
- 229910000677 High-carbon steel Inorganic materials 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical class Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910000954 Medium-carbon steel Inorganic materials 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 241000277275 Oncorhynchus mykiss Species 0.000 description 1
- 244000082204 Phyllostachys viridis Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RZEMOZGCDJJSLV-UHFFFAOYSA-N [S].CS(C)=O Chemical group [S].CS(C)=O RZEMOZGCDJJSLV-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- OJMOMXZKOWKUTA-UHFFFAOYSA-N aluminum;borate Chemical compound [Al+3].[O-]B([O-])[O-] OJMOMXZKOWKUTA-UHFFFAOYSA-N 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 239000003849 aromatic solvent Substances 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 229910021523 barium zirconate Inorganic materials 0.000 description 1
- DQBAOWPVHRWLJC-UHFFFAOYSA-N barium(2+);dioxido(oxo)zirconium Chemical compound [Ba+2].[O-][Zr]([O-])=O DQBAOWPVHRWLJC-UHFFFAOYSA-N 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 229910002115 bismuth titanate Inorganic materials 0.000 description 1
- 239000004842 bisphenol F epoxy resin Substances 0.000 description 1
- 238000004061 bleaching Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- 235000009120 camo Nutrition 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 235000005607 chanvre indien Nutrition 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- XLJMAIOERFSOGZ-UHFFFAOYSA-M cyanate Chemical compound [O-]C#N XLJMAIOERFSOGZ-UHFFFAOYSA-M 0.000 description 1
- 150000007973 cyanuric acids Chemical class 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 239000003759 ester based solvent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 239000006081 fluorescent whitening agent Substances 0.000 description 1
- 239000012362 glacial acetic acid Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 239000011487 hemp Substances 0.000 description 1
- 239000012943 hotmelt Substances 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002596 lactones Chemical class 0.000 description 1
- QDLAGTHXVHQKRE-UHFFFAOYSA-N lichenxanthone Natural products COC1=CC(O)=C2C(=O)C3=C(C)C=C(OC)C=C3OC2=C1 QDLAGTHXVHQKRE-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
- 239000000347 magnesium hydroxide Substances 0.000 description 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 229910001105 martensitic stainless steel Inorganic materials 0.000 description 1
- AUHZEENZYGFFBQ-UHFFFAOYSA-N mesitylene Substances CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 description 1
- 125000001827 mesitylenyl group Chemical group [H]C1=C(C(*)=C(C([H])=C1C([H])([H])[H])C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 150000002903 organophosphorus compounds Chemical class 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000010902 straw Substances 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 150000003462 sulfoxides Chemical class 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 125000005590 trimellitic acid group Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Description
本発明は、金属張り積層板の製造方法、金属張り積層板及びプリント配線板に関する。 The present invention relates to a method for manufacturing a metal-clad laminate, a metal-clad laminate, and a printed wiring board.
従来、印刷配線板に使用される金属張り積層板の製造方法としては、繊維質基材に熱硬化性樹脂を含浸又は塗工し、加熱等により熱硬化性樹脂を半硬化(Bステージ化)して製造されるプリプレグを所定の厚みになるよう複数枚重ね、その片側又は両側に金属箔を配置し、これらを主にステンレス製の鏡板で挟み、多段成形プレスでCステージ状態となるまで所定時間、温度及び圧力をかけて成形して得る方法が採用されている。該製造方法において、圧力分布を均一化する目的、熱盤の凹凸の影響を低減する目的、及び加熱圧縮の際の昇温速度の調整の目的で、通常、鏡板の外面(つまり金属箔とは反対側)にクッション材を配置する(特許文献1参照)。 Conventionally, as a method for manufacturing a metal-clad laminate used for a printed wiring board, a fibrous base material is impregnated or coated with a thermosetting resin, and the thermosetting resin is semi-cured by heating or the like (B-stage). A plurality of prepregs produced by stacking are stacked so as to have a predetermined thickness, metal foils are arranged on one or both sides thereof, these are mainly sandwiched by stainless steel end plates, and a predetermined stage is set until a C-stage state is obtained by a multi-stage molding press. A method is employed in which molding is performed by applying time, temperature, and pressure. In the manufacturing method, usually, the outer surface of the head plate (that is, the metal foil) is used for the purpose of equalizing the pressure distribution, reducing the effect of the unevenness of the hot platen, and adjusting the heating rate during heating and compression. On the other side), a cushion material is arranged (see Patent Document 1).
しかし、特許文献1に記載の様に、「クッション材/鏡板/金属箔/プリプレグ/金属箔/鏡板/クッション材」という構成で、熱盤で挟み込んで加熱圧縮して得られる金属張り積層板では、加熱圧縮をする成形工程において、プリプレグ中の樹脂の軟化、溶融又は硬化に伴う伸び又は収縮が起きる。一方で、鏡板やクッション材も材質特有の伸び又は収縮が発生する。このとき、成形時の圧縮によってこれらの伸び及び収縮が積層板内部の歪みとなって残留することが判明した。この歪みのことを残留歪みと称する。残留歪みは、例えば配線板加工工程でのエッチング又は加熱によって開放されて反りとなって現われ、搬送性、密着性及び位置精度等が低下するという問題が生じる。
本発明の課題は、上記問題を解決し、高温(例えば200〜300℃)に加熱してから冷却した後でも反り量の小さい金属張り積層板を製造する方法を提供すること、該製造方法によって得られる金属張り積層板を提供すること、及び該金属張り積層板に配線パターンを形成してなるプリント配線板を提供することである。
However, as described in Patent Document 1, a metal-clad laminate obtained by sandwiching and heating and compressing a hot plate with a configuration of “cushion material / end plate / metal foil / prepreg / metal foil / end plate / cushion material” In the molding step of performing heat compression, elongation or shrinkage occurs due to softening, melting or curing of the resin in the prepreg. On the other hand, the end plate and the cushion material also undergo elongation or contraction specific to the material. At this time, it was found that the elongation and shrinkage caused by the compression during molding remained as distortion inside the laminate. This distortion is called residual distortion. The residual strain is released as a result of, for example, etching or heating in the wiring board processing step and appears as a warp, resulting in a problem that transportability, adhesion, positional accuracy, and the like are reduced.
An object of the present invention is to solve the above problems and provide a method for manufacturing a metal-clad laminate having a small amount of warpage even after cooling to a high temperature (for example, 200 to 300 ° C.). An object of the present invention is to provide a metal-clad laminate obtained and to provide a printed wiring board formed by forming a wiring pattern on the metal-clad laminate.
本発明者らが検討を進めた結果、鏡板とクッション材の熱収縮係数の差を特定範囲内とすることによって前記課題が解決することを見出した。本発明は、かかる知見に基づいて完成したものである。 As a result of study by the present inventors, it has been found that the above problem can be solved by setting the difference between the heat shrinkage coefficients of the head plate and the cushion material within a specific range. The present invention has been completed based on such findings.
本発明は、次の[1]〜[9]に関する。
[1]1枚のプリプレグ又は2枚以上を重ね合わせたプリプレグの片側又は両側に金属箔を配置し、該金属箔が配置されたプリプレグの両面を挟むように鏡板を配置して構成体(A)とし、該構成体(A)の外側に又は該構成体(A)を2つ以上重ね合わせて配置した構成体(A')の外側にクッション材を配置した後、熱盤によって150〜250℃及び2〜5MPaの条件で加熱圧縮することによる金属張り積層板の製造方法であって、下記条件(1)を満たす金属張り積層板の製造方法。
条件(1):クッション材の熱収縮係数と、該クッション材と隣接する鏡板の熱収縮係数の差を5ppm/℃以下とする。
[2]前記鏡板の材質が、ステンレス鋼である、上記[1]に記載の金属張り積層板の製造方法。
[3]前記クッション材の縦方向と横方向の熱収縮係数の差が12ppm/℃以下である、上記[1]又は[2]に記載の金属張り積層板の製造方法。
[4]前記鏡板の熱収縮係数が8〜14ppm/℃である、上記[1]〜[3]のいずれか1つに記載の金属張り積層板の製造方法。
[5]前記クッション材がリンター紙である、上記[4]に記載の金属張り積層板の製造方法。
[6]前記鏡板の熱収縮係数が8〜24ppm/℃である、上記[1]〜[3]のいずれか1つに記載の金属張り積層板の製造方法。
[7]前記クッション材がクラフト紙である、上記[6]に記載の金属張り積層板の製造方法。
[8]上記[1]〜[7]のいずれか1つに記載の製造方法により得られた金属張り積層板。
[9]上記[8]に記載の金属張り積層板に配線パターンを形成してなるプリント配線板。
The present invention relates to the following [1] to [9].
[1] A structure (A) in which a metal foil is arranged on one or both sides of one prepreg or a prepreg obtained by laminating two or more prepregs, and end plates are arranged so as to sandwich both sides of the prepreg on which the metal foil is arranged. ), And after a cushion material is arranged outside the structure (A) or outside the structure (A ′) in which two or more of the structures (A) are overlapped and arranged, 150 to 250 is used by a hot platen. A method for producing a metal-clad laminate by heating and compressing at a temperature of 2 ° C. and 2 to 5 MPa, wherein the method satisfies the following condition (1).
Condition (1): The difference between the thermal contraction coefficient of the cushion material and the thermal contraction coefficient of the head plate adjacent to the cushion material is 5 ppm / ° C. or less.
[2] The method for producing a metal-clad laminate according to the above [1], wherein the material of the end plate is stainless steel.
[3] The method for producing a metal-clad laminate according to the above [1] or [2], wherein a difference between a thermal shrinkage coefficient in a longitudinal direction and a thermal shrinkage coefficient in a lateral direction of the cushion material is 12 ppm / ° C. or less.
[4] The method for producing a metal-clad laminate according to any one of [1] to [3], wherein the heat shrinkage coefficient of the end plate is 8 to 14 ppm / ° C.
[5] The method for producing a metal-clad laminate according to the above [4], wherein the cushion material is linter paper.
[6] The method for producing a metal-clad laminate according to any one of [1] to [3], wherein the heat shrinkage coefficient of the end plate is 8 to 24 ppm / ° C.
[7] The method for producing a metal-clad laminate according to the above [6], wherein the cushion material is kraft paper.
[8] A metal-clad laminate obtained by the production method according to any one of [1] to [7].
[9] A printed wiring board formed by forming a wiring pattern on the metal-clad laminate according to the above [8].
本発明によると、高温(例えば200〜300℃、より詳細には230〜270℃)に加熱してから冷却した後でも反り量の小さい金属張り積層板、つまり残留歪の少ない金属張り積層板を製造する方法を提供することができる。また、該製造方法によって、反り量の小さい金属張り積層板が得られる。さらに、該金属張り積層板に配線パターンを形成してなるプリント配線板を提供することができる。 According to the present invention, a metal-clad laminate having a small amount of warpage, that is, a metal-clad laminate having a small residual strain, even after being heated to a high temperature (for example, 200 to 300 ° C., more specifically 230 to 270 ° C.) and then cooled. A method of manufacturing can be provided. Further, a metal-clad laminate having a small amount of warpage can be obtained by the manufacturing method. Further, a printed wiring board formed by forming a wiring pattern on the metal-clad laminate can be provided.
まず、図1を参照しながら本発明の実施形態について説明する。
本発明は、1枚のプリプレグ[1]又は2枚以上を重ね合わせたプリプレグ[1]の片側又は両側に金属箔[2]を配置し、該金属箔が配置されたプリプレグの両面を挟むように鏡板[3]を配置して構成体(A)とし、該構成体(A)の外側に又は該構成体(A)を2つ以上重ね合わせて配置した構成体(A')の外側にクッション材[4]を配置した後、熱盤[6]によって150〜250℃及び2〜5MPaの条件で加熱圧縮することによる金属張り積層板の製造方法であって、下記条件(1)を満たす金属張り積層板の製造方法である。なお、通常は、クッション材[4]の外側にキャリアプレート[5]を設置する。該キャリアプレート[5]は、構成体(A)又は構成体(A')の搬送及び成形装置への挿入及び取り出しのためのものである。
条件(1):クッション材の熱収縮係数と、該クッション材と隣接する鏡板の熱収縮係数の差を5ppm/℃以下とする。なお、熱収縮係数は、下記条件に従って測定する。
(熱収縮係数の測定条件)
測定装置:熱機械測定装置「TMA2940」(ティー・エイ・インスツルメント・ジャパン株式会社製)
測定モード:引張りモード
測定条件:30℃→250℃→30℃
荷重:0.2N
雰囲気:空気雰囲気
本明細書における熱収縮係数は、特に断りのない限りは上記方法によって求められたものである。
First, an embodiment of the present invention will be described with reference to FIG.
The present invention arranges a metal foil [2] on one side or both sides of one prepreg [1] or a prepreg [1] in which two or more prepregs are overlapped, and sandwiches both sides of the prepreg on which the metal foil is arranged. A mirror plate [3] is disposed on the surface of the substrate to form a structure (A), and outside the structure (A) or outside the structure (A ') in which two or more structures (A) are superposed. This is a method for producing a metal-clad laminate by arranging a cushion material [4] and then heating and compressing it with a hot platen [6] at 150 to 250 ° C. and 2 to 5 MPa, satisfying the following condition (1). This is a method for manufacturing a metal-clad laminate. Usually, a carrier plate [5] is provided outside the cushion material [4]. The carrier plate [5] is for transporting the component (A) or the component (A ') and inserting and removing the component (A) into and from the molding apparatus.
Condition (1): The difference between the thermal contraction coefficient of the cushion material and the thermal contraction coefficient of the head plate adjacent to the cushion material is 5 ppm / ° C. or less. The heat shrinkage coefficient is measured according to the following conditions.
(Measurement condition of heat shrinkage coefficient)
Measuring device: Thermo-mechanical measuring device "TMA2940" (TA Instruments Japan Co., Ltd.)
Measurement mode: Tensile mode Measurement condition: 30 ° C. → 250 ° C. → 30 ° C.
Load: 0.2N
Atmosphere: Air atmosphere The heat shrinkage coefficient in this specification is obtained by the above method unless otherwise specified.
(条件(1)について)
本発明者らの検討により、クッション材の熱収縮係数と、該クッション材と隣接する鏡板の熱収縮係数との差を5ppm/℃以下にすることによって、反りの原因となる、加熱圧縮する際に蓄積される積層板内部の残留歪みが顕著に低減することが判明した。一方、この差が5ppm/℃を超えると、積層板の反りが顕著に大きくなる。この観点から、クッション材の熱収縮係数と、該クッション材と隣接する鏡板の熱収縮係数の差は、4ppm/℃以下としてもよく、3.5ppm/℃以下としてもよい。
なお、クッション材の熱収縮係数と、該クッション材と隣接する鏡板の熱収縮係数との差の下限値に特に制限はないが、0.5ppm/℃であってもよく、1ppm/℃であってもよく、1.5ppm/℃であってもよく、2ppm/℃であってもよい。
(About condition (1))
According to the study of the present inventors, when the difference between the heat shrinkage coefficient of the cushion material and the heat shrinkage coefficient of the head plate adjacent to the cushion material is set to 5 ppm / ° C. or less, the heat shrinkage which causes warpage is caused. It has been found that the residual strain inside the laminate accumulated in the laminate is significantly reduced. On the other hand, if this difference exceeds 5 ppm / ° C., the warpage of the laminate will increase significantly. From this viewpoint, the difference between the thermal contraction coefficient of the cushion material and the thermal contraction coefficient of the head plate adjacent to the cushion material may be 4 ppm / ° C. or less, or may be 3.5 ppm / ° C. or less.
The lower limit of the difference between the thermal contraction coefficient of the cushion material and the thermal contraction coefficient of the head plate adjacent to the cushion material is not particularly limited, but may be 0.5 ppm / ° C. or 1 ppm / ° C. May be 1.5 ppm / ° C. or 2 ppm / ° C.
(鏡板)
鏡板としては、積層板の製造において使用し得る公知の鏡板を用いることができる。鏡板としては、金属板、プラスチック板、ガラス板、セラミック板等が挙げられる。これらの中でも、金属板を選択してもよい。該金属板の金属としては、クッション材との熱収縮係数を前記範囲に収める観点から、例えば、マルテンサイト系ステンレス鋼、オーステナイト系ステンレス鋼、フェライト系ステンレス鋼、オーステナイト−フェライト系(二相系)ステンレス鋼、析出硬化系ステンレス鋼等のステンレス鋼;42合金等の鉄−ニッケル合金;低炭素鋼、中炭素鋼、高炭素鋼等の炭素鋼;ニッケル鋼;黄銅等が挙げられる。これらの中でも、反り量の低減の観点から、金属板の金属としてはステンレス鋼を選択してもよく、オーステナイト系ステンレス鋼、析出硬化系ステンレス鋼を選択してもよい。オーステナイト系ステンレス鋼としては、例えば、SUS301、SUS304、SUS304L等が挙げられる。また、析出硬化系ステンレス鋼としては、例えば、SUS420、SUS630、SUS631J1等が挙げられる。金属板の金属としては、SUS301、SUS630を選択してもよい。鏡板の熱収縮係数は8〜24ppm/℃であってもよく、8〜14ppm/℃であってもよく、また、10〜24ppm/℃であってもよく、10〜20ppm/℃であってもよく、14〜20ppm/℃であってもよい。なお、該SUS630の熱収縮係数は11ppm/℃であり、SUS301の熱収縮係数は17ppm/℃である。
オーステナイト系ステンレス鋼はニッケルを含有しているため、常温でもオーステナイトの組織が安定しており、また、クロムとニッケルの含有量が多いことから、耐食性及び耐熱性に優れるという特徴がある。また、析出硬化系ステンレス鋼は、熱処理によって高硬度化したものである。
特に、クッション材と隣接する鏡板は、上記した選択肢から選択してもよい。一方、クッション材と隣接しない鏡板については特に制限はないが、反り量の低減の観点から、ステンレス鋼の鏡板であってもよく、クッション材と隣接する鏡板と同じであってもよい。
鏡板の厚みに特に制限はないが、通常、0.2〜5mmであってもよく、0.5〜3mmであってもよく、1〜2mmであってもよい。
(End plate)
As the end plate, a known end plate that can be used in the production of a laminated plate can be used. Examples of the mirror plate include a metal plate, a plastic plate, a glass plate, and a ceramic plate. Among these, a metal plate may be selected. As the metal of the metal plate, for example, a martensitic stainless steel, an austenitic stainless steel, a ferritic stainless steel, an austenite-ferrite (two-phase) from the viewpoint of keeping the coefficient of thermal contraction with the cushion material within the above range. Stainless steel such as stainless steel and precipitation hardening stainless steel; iron-nickel alloys such as 42 alloy; carbon steel such as low carbon steel, medium carbon steel, and high carbon steel; nickel steel; brass; Among these, from the viewpoint of reducing the amount of warpage, stainless steel may be selected as the metal of the metal plate, and austenitic stainless steel or precipitation hardening stainless steel may be selected. Examples of the austenitic stainless steel include SUS301, SUS304, and SUS304L. Examples of the precipitation hardening stainless steel include SUS420, SUS630, and SUS631J1. SUS301 and SUS630 may be selected as the metal of the metal plate. The heat shrinkage coefficient of the head plate may be 8 to 24 ppm / ° C, may be 8 to 14 ppm / ° C, may be 10 to 24 ppm / ° C, and may be 10 to 20 ppm / ° C. It may be 14 to 20 ppm / ° C. The heat shrinkage coefficient of the SUS630 is 11 ppm / ° C., and the heat shrinkage coefficient of the SUS 301 is 17 ppm / ° C.
Since austenitic stainless steel contains nickel, the austenitic structure is stable even at room temperature, and the content of chromium and nickel is high, so that it is excellent in corrosion resistance and heat resistance. The precipitation hardening stainless steel has been hardened by heat treatment.
In particular, the end plate adjacent to the cushioning material may be selected from the options described above. On the other hand, there is no particular limitation on the end plate that is not adjacent to the cushion material, but from the viewpoint of reducing the amount of warpage, it may be a stainless steel end plate or may be the same as the end plate adjacent to the cushion material.
The thickness of the head plate is not particularly limited, but may be generally 0.2 to 5 mm, 0.5 to 3 mm, or 1 to 2 mm.
(クッション材)
クッション材により、圧力分布を均一化し、熱盤の凹凸の影響を低減する効果があり、且つ加熱圧縮の際の昇温速度の調整が可能となる。
加熱圧縮する際、プリプレグ中の樹脂の軟化、溶融又は硬化に伴う伸び又は収縮が起き、一方で、鏡板やクッション材も材質特有の伸び又は収縮が発生する。このとき、成形圧力によってこれらの伸び又は収縮が積層板内部の歪みとなって残留することが本発明者らの検討により判明した。そこで、クッション材の選択が重要となり、クッション材は前記条件(1)を満たすものである必要がある。また、前記条件(1)を満たすクッション材であれば特に制限はない。クッション材の厚みは、作業性及び機械強度の観点から、200〜800μmであってもよく、300〜600μmであってもよい。
クッション材としては、例えば、ゴム製クッション材、紙製クッション材等が挙げられる。該紙製クッション材の紙の材質としては、木材;木綿、麻、木材、竹、わら等の非木材が挙げられる。これらの中でも、反り量の低減の観点から、木材、木綿を選択してもよい。特に、木材はクラフトパルプであってもよく、木綿は短繊維(リンター)であってもよい。つまり、紙製クッション材としては、クラフト紙クッション材、リンター紙クッション材を選択してもよい。ここで、「クラフト紙」とは、クラフト法により製造されたパルプを原料とした洋紙のうち、漂白工程を行なわない紙のことであり、強度が高い紙である。また、「リンター紙」とは、綿花からとれる繊維の中でも、綿の実についている短繊維及び綿花の加工途中に出る短い地毛等がリンターと呼ばれ、該リンターをパルプとして製造した紙のことである。
一般的に、紙製クッション材は、鏡板、特にステンレス製鏡板と比べて面内縦横方向(以下、単に方向と称することがある。)による熱収縮係数の差異が大きいため、方向による熱収縮係数の差異が小さいリンター紙クッション材を用いてもよい。方向による熱収縮係数の差異の小さいリンター紙クッション材を使用することで、加熱圧縮によって生じる残留歪みを極少化し、金属張り積層板の反り量をより低減できる傾向にある。
クッション材の縦方向と横方向の熱収縮係数の差異は12ppm/℃以下であってもよく、10ppm/℃以下であってもよく、5ppm/℃以下であってもよく、3ppm/℃以下であってもよい。リンター紙クッション材の場合、該差異は3ppm/℃以下である傾向にある。ここで、面内縦横方向による熱収縮係数の差異の測定方法は、以下の通りである。
(面内縦横方向による熱収縮係数の差異の測定方法)
クッション材の抄紙方向(判別不能な場合は任意に選択した一辺)を縦方向とし、その90度直角方向を横方向とする。測定サンプルは、縦1m×横1mの試料から、対角線上に等間隔で縦16mm×横5mmのサンプルを8個採取する。各サンプルについて、縦方向の熱収縮係数と横方向の熱収縮係数をそれぞれ測定してそれらの差を求める。8個のサンプルの平均値を「面内縦横方向による熱収縮係数の差異」とする。
(Cushion material)
The cushioning material has the effect of making the pressure distribution uniform and reducing the influence of the unevenness of the hot platen, and also makes it possible to adjust the heating rate during heating and compression.
During the heating and compression, elongation or shrinkage occurs due to softening, melting or hardening of the resin in the prepreg. On the other hand, elongation or shrinkage specific to the material of the head plate or cushion material also occurs. At this time, it has been found by the present inventors that the elongation or shrinkage due to the molding pressure causes distortion inside the laminate and remains. Therefore, it is important to select a cushion material, and the cushion material needs to satisfy the above condition (1). There is no particular limitation as long as the cushion material satisfies the condition (1). The thickness of the cushion material may be 200 to 800 μm or 300 to 600 μm from the viewpoint of workability and mechanical strength.
Examples of the cushion material include a rubber cushion material and a paper cushion material. Examples of the paper material of the paper cushioning material include wood; non-wood such as cotton, hemp, wood, bamboo, and straw. Among them, wood and cotton may be selected from the viewpoint of reducing the amount of warpage. In particular, the wood may be kraft pulp, and the cotton may be short fibers (linter). That is, a kraft paper cushion material or a linter paper cushion material may be selected as the paper cushion material. Here, "kraft paper" refers to paper that is not subjected to the bleaching step and is high in strength, out of paper made from pulp manufactured by the kraft method. In addition, the term "linter paper" refers to paper produced from cotton as a linter. It is.
Generally, a paper cushion material has a large difference in heat shrinkage coefficient in an in-plane vertical and horizontal direction (hereinafter, may be simply referred to as a direction) as compared with a head plate, particularly a stainless steel head plate. A linter paper cushion material having a small difference may be used. By using a linter paper cushion material having a small difference in the heat shrinkage coefficient depending on the direction, there is a tendency that the residual distortion caused by the heat compression is minimized and the warpage of the metal-clad laminate can be further reduced.
The difference in the thermal contraction coefficient between the longitudinal direction and the lateral direction of the cushion material may be 12 ppm / ° C or less, 10 ppm / ° C or less, 5 ppm / ° C or less, or 3 ppm / ° C or less. There may be. In the case of linter paper cushion material, the difference tends to be 3 ppm / ° C. or less. Here, the method of measuring the difference in the coefficient of thermal contraction in the in-plane longitudinal and lateral directions is as follows.
(Measurement method of difference in thermal contraction coefficient depending on in-plane vertical and horizontal directions)
The papermaking direction of the cushion material (one side arbitrarily selected when it is not possible to determine) is the vertical direction, and the 90-degree perpendicular direction is the horizontal direction. As the measurement sample, eight 16 mm × 5 mm samples are sampled at equal intervals on a diagonal line from a 1 m × 1 m sample. With respect to each sample, the coefficient of thermal contraction in the longitudinal direction and the coefficient of thermal contraction in the lateral direction are measured, and the difference therebetween is determined. The average value of the eight samples is defined as "difference in heat shrinkage coefficient depending on in-plane length and width directions".
(プリプレグ)
プリプレグは、熱硬化性樹脂組成物をシート状補強基材に含浸又は塗工し、加熱等により半硬化(Bステージ化)させて製造することができる。
プリプレグのシート状補強基材としては、各種の電気絶縁材料用積層板に用いられている周知のものが使用できる。シート状補強基材の材質としては、Eガラス、Dガラス、Sガラス及びQガラス等のガラス繊維等の無機物繊維;ポリイミド、ポリエステル及びテトラフルオロエチレン等の有機繊維;これらの混合物などが挙げられる。これらの中でも、無機物繊維であってもよく、ガラス繊維であってもよい。これらのシート状補強基材は、例えば、織布、不織布、ロービンク、チョップドストランドマット又はサーフェシングマット等の形状を有する。なお、材質及び形状は、目的とする成形物の用途や性能により選択され、1種を単独で使用してもよいし、必要に応じて、2種以上の材質及び形状を組み合わせることもできる。
熱硬化性樹脂組成物をシート状補強基材に含浸又は塗工させる方法としては、ホットメルト法、ソルベント法が挙げられる。
(Prepreg)
The prepreg can be manufactured by impregnating or coating a sheet-like reinforcing substrate with a thermosetting resin composition, and semi-curing (B-stage) by heating or the like.
As the sheet-like reinforcing base material of the prepreg, well-known ones used for various kinds of laminates for electric insulating materials can be used. Examples of the material of the sheet-like reinforcing substrate include inorganic fibers such as glass fibers such as E glass, D glass, S glass, and Q glass; organic fibers such as polyimide, polyester, and tetrafluoroethylene; and mixtures thereof. Among these, inorganic fibers or glass fibers may be used. These sheet-like reinforcing substrates have a shape such as a woven fabric, a nonwoven fabric, a roving, a chopped strand mat, or a surfacing mat. The material and shape are selected depending on the intended use and performance of the molded product, and one type may be used alone or two or more types and materials may be combined as needed.
Examples of the method of impregnating or applying the thermosetting resin composition to the sheet-like reinforcing substrate include a hot melt method and a solvent method.
シート状補強基材の厚さは特に制限されないが、10〜400μmであってもよく、10〜200μmであってもよく、50〜150μmであってもよい。
該基材に対する熱硬化性樹脂組成物の付着量が、乾燥後のプリプレグの樹脂含有率(つまり熱硬化性樹脂組成物由来の固形分含有量)が20〜90質量%(20〜70質量%であってもよく、30〜60質量%であってもよい。)となるように、基材に含浸又は塗工した後、通常、100〜200℃の温度で1〜30分加熱乾燥し、半硬化(Bステージ化)させて、本発明のプリプレグを得ることができる。
該プリプレグは、1枚を用いるか、又は2枚以上(2〜20枚であってもよい。)を重ね合わせて用いる。
The thickness of the sheet-shaped reinforcing substrate is not particularly limited, but may be 10 to 400 μm, 10 to 200 μm, or 50 to 150 μm.
The amount of the thermosetting resin composition adhered to the substrate is such that the resin content of the prepreg after drying (that is, the solid content derived from the thermosetting resin composition) is 20 to 90% by mass (20 to 70% by mass). And may be 30 to 60% by mass.), And then dried by heating at a temperature of usually 100 to 200 ° C. for 1 to 30 minutes. The prepreg of the present invention can be obtained by semi-curing (B stage).
As the prepreg, one sheet is used, or two or more sheets (may be 2 to 20 sheets) are overlapped and used.
前記熱硬化性樹脂組成物は、熱硬化性樹脂を含有する。該熱硬化性樹脂としては、例えば、エポキシ樹脂、フェノール樹脂、ポリイミド樹脂、ポリエステル樹脂、シアネート樹脂、ベンゾオキサジン環を有する樹脂、トリアジン環を有する熱硬化性樹脂等が挙げられる。これらの中でも、エポキシ樹脂、フェノール樹脂であってもよい。
エポキシ樹脂としては、例えば、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、アルキルフェノールノボラック型エポキシ樹脂、ナフトールアルキルフェノールノボラック型エポキシ樹脂、ビフェニル型エポキシ樹脂、アラルキル型エポキシ樹脂、ナフトール型エポキシ樹脂、アントラセン型エポキシ樹脂、ジシクロペンタジエン型エポキシ樹脂、ナフタレン型エポキシ樹脂、ビフェニルアラルキル型エポキシ樹脂、フルオレン型エポキシ樹脂、キサンテン型エポキシ樹脂等が挙げられる。これらの中でも、ビスフェノールA型エポキシ樹脂であってもよい。該ビスフェノールA型エポキシ樹脂は、一部が臭素化された、臭素化ビスフェノールA型エポキシ樹脂であってもよい。
エポキシ樹脂のエポキシ当量は、100〜500g/eqであってもよく、120〜400g/eqであってもよく、140〜300g/eqであってもよい。ここで、エポキシ当量は、エポキシ基あたりの樹脂の質量(g/eq)であり、JIS K 7236に規定された方法に従って測定することができる。具体的には、自動滴定装置「GT−200型」(株式会社三菱化学アナリテック製)を用いて、200mlビーカーにエポキシ樹脂2gを秤量し、メチルエチルケトン90mlを滴下し、超音波洗浄器溶解後、氷酢酸10ml及び臭化セチルトリメチルアンモニウム1.5gを添加し、0.1mol/Lの過塩素酸/酢酸溶液で滴定することにより求められる。
フェノール樹脂としては、フェノールノボラック樹脂であってもよい。フェノール樹脂の水酸基当量は、50〜300g/eqであってもよく、70〜200g/eqであってもよく、70〜150g/eqであってもよい。
熱硬化性樹脂は、1種を単独で使用してもよいし、2種以上を併用してもよい。
熱硬化性樹脂組成物中の熱硬化性樹脂の含有量は、40〜90質量%であってもよく、40〜85質量%であってもよく、50〜85質量%であってもよく、55〜85質量%であってもよい。
The thermosetting resin composition contains a thermosetting resin. Examples of the thermosetting resin include an epoxy resin, a phenol resin, a polyimide resin, a polyester resin, a cyanate resin, a resin having a benzoxazine ring, and a thermosetting resin having a triazine ring. Among these, epoxy resins and phenol resins may be used.
Examples of the epoxy resin include bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, phenol novolak epoxy resin, alkylphenol novolak epoxy resin, naphthol alkylphenol novolak epoxy resin, biphenyl epoxy resin, and aralkyl. Epoxy resin, naphthol epoxy resin, anthracene epoxy resin, dicyclopentadiene epoxy resin, naphthalene epoxy resin, biphenylaralkyl epoxy resin, fluorene epoxy resin, xanthene epoxy resin and the like. Among these, bisphenol A type epoxy resin may be used. The bisphenol A epoxy resin may be a brominated bisphenol A epoxy resin partially brominated.
The epoxy equivalent of the epoxy resin may be 100 to 500 g / eq, 120 to 400 g / eq, or 140 to 300 g / eq. Here, the epoxy equivalent is the mass (g / eq) of the resin per epoxy group, and can be measured according to the method specified in JIS K7236. Specifically, using an automatic titrator "GT-200" (manufactured by Mitsubishi Chemical Analytech Co., Ltd.), weigh 2 g of the epoxy resin in a 200 ml beaker, drop 90 ml of methyl ethyl ketone, dissolve the ultrasonic cleaner, It is determined by adding 10 ml of glacial acetic acid and 1.5 g of cetyltrimethylammonium bromide, and titrating with a 0.1 mol / L perchloric acid / acetic acid solution.
The phenol resin may be a phenol novolak resin. The hydroxyl equivalent of the phenol resin may be 50 to 300 g / eq, 70 to 200 g / eq, or 70 to 150 g / eq.
As the thermosetting resin, one type may be used alone, or two or more types may be used in combination.
The content of the thermosetting resin in the thermosetting resin composition may be 40 to 90% by mass, may be 40 to 85% by mass, or may be 50 to 85% by mass, It may be 55 to 85% by mass.
前記熱硬化性樹脂組成物は、無機充填剤を含有することもでき、また、無機充填剤を含有していてもよい。該無機充填剤としては、例えば、シリカ、アルミナ、硫酸バリウム、タルク、クレー、雲母粉、水酸化アルミニウム、水酸化マグネシウム、炭酸カルシウム、炭酸マグネシウム、酸化マグネシウム、窒化ホウ素、ホウ酸アルミニウム、チタン酸バリウム、チタン酸ストロンチウム、チタン酸カルシウム、チタン酸マグネシウム、チタン酸ビスマス、酸化チタン、ジルコン酸バリウム、ジルコン酸カルシウム等が挙げられる。これらの中でも、水酸化アルミニウムであってもよい。
無機充填剤は、1種を単独で使用してもよいし、2種以上を併用してもよい。
熱硬化性樹脂組成物にける無機充填剤の含有量は、熱硬化性樹脂100質量部に対して、0〜300質量部であってもよく、20〜150質量部であってもよく、30〜120質量部であってもよく、50〜100質量部であってもよい。
The thermosetting resin composition may contain an inorganic filler, or may contain an inorganic filler. Examples of the inorganic filler include silica, alumina, barium sulfate, talc, clay, mica powder, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, magnesium oxide, boron nitride, aluminum borate, and barium titanate. Strontium titanate, calcium titanate, magnesium titanate, bismuth titanate, titanium oxide, barium zirconate, calcium zirconate, and the like. Among these, aluminum hydroxide may be used.
One type of inorganic filler may be used alone, or two or more types may be used in combination.
The content of the inorganic filler in the thermosetting resin composition may be 0 to 300 parts by mass, or may be 20 to 150 parts by mass with respect to 100 parts by mass of the thermosetting resin, and may be 30 to 30 parts by mass. To 120 parts by mass, or 50 to 100 parts by mass.
前記熱硬化性樹脂組成物は、その他の添加剤、例えば、硬化剤、硬化促進剤、難燃剤、酸化防止剤、紫外線吸収剤、光重合開始剤、蛍光増白剤、密着性向上剤、有機充填剤等を含有していてもよい。これらは、1種を単独で使用してもよいし、2種以上を併用してもよい。特に、熱硬化性樹脂組成物は硬化促進剤を含有していてもよい。
硬化促進剤、例えばエポキシ樹脂の硬化促進剤としては、例えば、イミダゾール化合物及びその誘導体、有機リン系化合物、第二級アミン類、第三級アミン類、第四級アンモニウム塩等が挙げられる。これらの中でも、イミダゾール化合物及びその誘導体であってもよい。イミダゾール化合物及びその誘導体の具体例としては、例えば、2−メチルイミダゾール、2−エチルイミダゾール、2−ウンデシルイミダゾール、2−ヘプタデシルイミダゾール、2−フェニルイミダゾール、1,2−ジメチルイミダゾール、2−エチル−1−メチルイミダゾール、1,2−ジエチルイミダゾール、1−エチル−2−メチルイミダゾール、2−エチル−4−メチルイミダゾール、4−エチル−2−メチルイミダゾール、2−フェニル−4−メチルイミダゾール、1−ベンジル−2−フェニルイミダゾール、1−シアノエチル−2−メチルイミダゾール、1−シアノエチル−2−エチルイミダゾール、1−シアノエチル−2−フェニルイミダゾール、1−シアノエチル−2−エチル−4−メチルイミダゾール、2−フェニル−4,5−ジヒドロキシメチルイミダゾール、2−フェニル−4−メチル−5−ヒドロキシメチルイミダゾール、2,3−ジヒドロ−1H−ピロロ[1,2−a]ベンズイミダゾール、2,4−ジアミノ−6−[2'−メチルイミダゾリル−(1’)]エチル−s−トリアジン、2,4−ジアミノ−6−[2'−ウンデシルイミダゾリル−(1’)]エチル−s−トリアジン、2,4−ジアミノ−6−[2'−エチル−4'−メチルイミダゾリル−(1’)]エチル−s−トリアジン等のイミダゾール化合物;前記イミダゾール化合物のトリメリト酸付加体;前記イミダゾール化合物のイソシアヌル酸付加体;前記イミダゾール化合物の臭化水素酸付加体などが挙げられる。これらの中でも、2−フェニルイミダゾール、2−エチル−4−メチルイミダゾール、1−シアノエチル−2−フェニルイミダゾールであってもよく、2−エチル−4−メチルイミダゾールであってもよい。
硬化促進剤は、1種を単独で使用してもよいし、2種以上を併用してもよい。
熱硬化性樹脂組成物における硬化促進剤の含有量は、熱硬化性樹脂100質量部に対して、0〜7質量部であってもよく、0〜5質量部であってもよく、0.01〜3質量部であってもよく、0.05〜1.5質量部であってもよい。
The thermosetting resin composition may contain other additives such as a curing agent, a curing accelerator, a flame retardant, an antioxidant, an ultraviolet absorber, a photopolymerization initiator, a fluorescent whitening agent, an adhesion improver, and an organic compound. It may contain a filler and the like. These may be used alone or in combination of two or more. In particular, the thermosetting resin composition may contain a curing accelerator.
Examples of the curing accelerator, for example, an epoxy resin curing accelerator include imidazole compounds and derivatives thereof, organic phosphorus compounds, secondary amines, tertiary amines, and quaternary ammonium salts. Among these, imidazole compounds and derivatives thereof may be used. Specific examples of the imidazole compound and its derivative include, for example, 2-methylimidazole, 2-ethylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 2-phenylimidazole, 1,2-dimethylimidazole, 2-ethyl -1-methylimidazole, 1,2-diethylimidazole, 1-ethyl-2-methylimidazole, 2-ethyl-4-methylimidazole, 4-ethyl-2-methylimidazole, 2-phenyl-4-methylimidazole, 1 -Benzyl-2-phenylimidazole, 1-cyanoethyl-2-methylimidazole, 1-cyanoethyl-2-ethylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 2- Phenyl- , 5-Dihydroxymethylimidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole, 2,3-dihydro-1H-pyrrolo [1,2-a] benzimidazole, 2,4-diamino-6- [2 '-Methylimidazolyl- (1')] ethyl-s-triazine, 2,4-diamino-6- [2'-undecylimidazolyl- (1 ')] ethyl-s-triazine, 2,4-diamino-6 Imidazole compounds such as-[2'-ethyl-4'-methylimidazolyl- (1 ')] ethyl-s-triazine; trimellitic acid adducts of the imidazole compounds; isocyanuric acid adducts of the imidazole compounds; And hydrobromic acid adducts. Among these, 2-phenylimidazole, 2-ethyl-4-methylimidazole, 1-cyanoethyl-2-phenylimidazole or 2-ethyl-4-methylimidazole may be used.
As the curing accelerator, one type may be used alone, or two or more types may be used in combination.
The content of the curing accelerator in the thermosetting resin composition may be 0 to 7 parts by mass, 0 to 5 parts by mass, and 0. The amount may be from 01 to 3 parts by mass, or from 0.05 to 1.5 parts by mass.
熱硬化性樹脂組成物には、希釈することによって取り扱いを容易にするという観点及び後述するプリプレグを製造し易くする観点から、有機溶剤を含有させてワニスの状態にしてもよい。
該有機溶剤としては、特に制限されないが、例えば、エタノール、プロパノール、ブタノール、メチルセロソルブ、ブチルセロソルブ、プロピレングリコールモノメチルエーテル等のアルコール系溶剤;アセトン、メチルエチルケトン、メチルイソブチルケトン、シクロヘキサノン等のケトン系溶剤;テトラヒドロフラン等のエーテル系溶剤;トルエン、キシレン、メシチレン等の芳香族系溶剤;ジメチルホルムアミド、ジメチルアセトアミド及びN−メチルピロリドン等のアミド系溶剤を含む、窒素原子含有溶剤;ジメチルスルホキシド等のスルホキシド系溶剤を含む硫黄原子含有溶剤;γ−ブチロラクトン等のラクトン系溶剤を含むエステル系溶剤などが挙げられる。
これらの中でも、溶解性の観点から、アルコール系溶剤、ケトン系溶剤、窒素原子含有溶剤であってもよく、ケトン系溶剤であってもよく、メチルエチルケトンであってもよい。
有機溶剤は、1種を単独で使用してもよいし、2種以上を併用してもよい。
The thermosetting resin composition may contain an organic solvent to form a varnish from the viewpoint of facilitating handling by diluting and facilitating the production of a prepreg described below.
Examples of the organic solvent include, but not particularly limited to, alcohol solvents such as ethanol, propanol, butanol, methyl cellosolve, butyl cellosolve, and propylene glycol monomethyl ether; ketone solvents such as acetone, methyl ethyl ketone, methyl isobutyl ketone, and cyclohexanone; Aromatic solvents such as toluene, xylene and mesitylene; Nitrogen atom-containing solvents including amide solvents such as dimethylformamide, dimethylacetamide and N-methylpyrrolidone; Sulfoxide solvents such as dimethylsulfoxide Sulfur atom-containing solvents; examples include ester solvents including lactone solvents such as γ-butyrolactone.
Among them, from the viewpoint of solubility, alcohol solvents, ketone solvents, and nitrogen atom-containing solvents may be used, ketone solvents may be used, and methyl ethyl ketone may be used.
One organic solvent may be used alone, or two or more organic solvents may be used in combination.
熱硬化性樹脂組成物における有機溶剤の含有量は、熱硬化性樹脂組成物の取り扱いが容易になる程度に適宜調整すればよく、また、ワニスの塗工性が良好となる範囲であれば特に制限はないが、熱硬化性樹脂組成物由来の固形分濃度(有機溶剤以外の成分の濃度)が30〜90質量%であってもよく、40〜80質量%であってもよく、50〜80質量%であってもよく、60〜80質量%であってもよい。
シート状補強基材への熱硬化性樹脂組成物(ワニス)の付着量を制御する方法としては、特に制限はないが、例えば、スクイズロール方式、カットバー方式等が一般的に採用される。シート状補強基材への熱硬化性樹脂ワニスの付着量は、熱硬化性樹脂固形分とシート状補強基材の総量に対して、熱硬化性樹脂組成物由来の固形分の含有割合が35〜80質量%であってもよく、35〜60質量%であってもよく、40〜60質量%であってもよい。
The content of the organic solvent in the thermosetting resin composition may be appropriately adjusted to such an extent that the handling of the thermosetting resin composition is facilitated, and in particular, as long as the coating property of the varnish is good. Although there is no limitation, the solid content concentration (concentration of components other than the organic solvent) derived from the thermosetting resin composition may be 30 to 90% by mass, 40 to 80% by mass, or 50 to 90% by mass. It may be 80% by mass or 60 to 80% by mass.
The method of controlling the amount of the thermosetting resin composition (varnish) adhered to the sheet-like reinforcing substrate is not particularly limited, but, for example, a squeeze roll system, a cut bar system, or the like is generally employed. The adhesion amount of the thermosetting resin varnish to the sheet-like reinforcing base material is such that the content ratio of the solid content derived from the thermosetting resin composition is 35 with respect to the total amount of the thermosetting resin solid content and the sheet-like reinforcing base material. To 80% by mass, 35 to 60% by mass, or 40 to 60% by mass.
[金属張り積層板の製造方法]
1枚のプリプレグ又は2枚以上を重ね合わせたプリプレグの片側又は両側に金属箔を配置し、該金属箔が配置されたプリプレグの両面を挟むように鏡板を配置して、図1に示されるような構成体(A)を形成する。本発明では、該構成体(A)を2つ以上重ね合わせて配置したものを構成体(A’)と称する。
金属箔の金属としては、配線パターンの形成に使用し得るものであれば特に制限されないが、導電性の観点から、銅、金、銀、ニッケル、白金、モリブデン、ルテニウム、アルミニウム、タングステン、鉄、チタン、クロム、又はこれらの金属元素のうちの少なくとも1種を含む合金であってもよく、銅、アミルニウムであってもよく、銅であってもよい。
金属箔の厚みは、用途によっても異なるが、通常、3〜100μmであってもよく、3〜50μmであってもよく、3〜30μmであってもよく、5〜20μmであってもよい。
該構成体(A)又は構成体(A')の外側にクッション材を配置した後、熱盤によって150〜250℃及び2〜5MPaの条件で、0.5〜4時間であってもよく、加熱圧縮することによる金属張り積層板を製造する。加熱温度は、160〜220℃であってもよく、160〜200℃であってもよい。圧力は、3〜5MPaであってもよい。加圧方式に特に制限はなく、多段加圧方式であってもよい。また、加熱圧縮が終了したら、脱圧冷却してもよい。
以上のようにして、反り量の低減された金属張り積層板が得られる。
[Production method of metal-clad laminate]
A metal foil is arranged on one or both sides of one prepreg or a prepreg obtained by laminating two or more prepregs, and end plates are arranged so as to sandwich both sides of the prepreg on which the metal foil is arranged, as shown in FIG. The structure (A) is formed. In the present invention, a structure in which two or more of the constituents (A) are overlapped and arranged is referred to as a constituent (A ′).
The metal of the metal foil is not particularly limited as long as it can be used for forming a wiring pattern, but from the viewpoint of conductivity, copper, gold, silver, nickel, platinum, molybdenum, ruthenium, aluminum, tungsten, iron, It may be titanium, chromium, or an alloy containing at least one of these metal elements, and may be copper, amylnium, or copper.
The thickness of the metal foil varies depending on the application, but is usually 3 to 100 μm, 3 to 50 μm, 3 to 30 μm, or 5 to 20 μm.
After arranging the cushion material on the outside of the component (A) or the component (A ′), the heating may be performed for 0.5 to 4 hours at 150 to 250 ° C. and 2 to 5 MPa using a hot plate, A metal-clad laminate is manufactured by heating and compressing. The heating temperature may be 160 to 220 ° C, or may be 160 to 200 ° C. The pressure may be between 3 and 5 MPa. The pressing method is not particularly limited, and a multi-stage pressing method may be used. When the heating and compression are completed, depressurizing and cooling may be performed.
As described above, a metal-clad laminate with a reduced amount of warpage is obtained.
本発明の配線板は、本発明の金属張り積層板に配線パターンを形成して得られるものである。配線パターンを形成する方法としては、特に限定されるものではなく、例えば、サブトラクティブ法、フルアディティブ法、セミアディティブ法(SAP:Semi Additive Process)又はモディファイドセミアディティブ法(m−SAP:modified Semi Additive Process)等の公知の方法によって配線パターンを形成することができる。 The wiring board of the present invention is obtained by forming a wiring pattern on the metal-clad laminate of the present invention. The method of forming the wiring pattern is not particularly limited. For example, a subtractive method, a full additive method, a semi-additive method (SAP) or a modified semi-additive method (m-SAP) is used. The wiring pattern can be formed by a known method such as Process.
以下、実施例により本発明の説明をする。なお、本発明はこれらの実施例に制限されるものではない。 Hereinafter, the present invention will be described with reference to examples. Note that the present invention is not limited to these examples.
[測定方法及び測定条件]
各実施例及び比較例において、以下の方法により各測定を行なった。
(A.熱収縮係数の測定条件)
測定装置:熱機械測定装置「TMA2940」(ティー・エイ・インスツルメント・ジャパン株式会社製)
測定モード:引張りモード
測定条件:30℃→250℃→30℃
荷重:0.2N
雰囲気:空気雰囲気
(B.面内縦横方向による熱収縮係数の差異の測定方法)
クッション材の抄紙方向(判別不能な場合は任意に選択した一辺)を縦方向とし、その90度直角方向を横方向とする。測定サンプルは、縦1m×横1mの試料から、対角線上に等間隔で縦16mm×横5mmのサンプルを8個採取した。各サンプルについて、上記A.の測定条件に従って、縦方向の熱収縮係数と横方向の熱収縮係数をそれぞれ測定し、それらの差を求めた。8個のサンプルの平均値を「面内縦横方向による熱収縮係数の差異」とした。
[Measurement method and conditions]
In each example and comparative example, each measurement was performed by the following method.
(A. Measurement conditions of heat shrinkage coefficient)
Measuring device: Thermo-mechanical measuring device "TMA2940" (TA Instruments Japan Co., Ltd.)
Measurement mode: Tensile mode Measurement condition: 30 ° C. → 250 ° C. → 30 ° C.
Load: 0.2N
Atmosphere: Air atmosphere (B. Method for measuring difference in heat shrinkage coefficient depending on in-plane vertical and horizontal directions)
The papermaking direction of the cushioning material (one side arbitrarily selected when it is not possible to determine) is the vertical direction, and the 90-degree perpendicular direction is the horizontal direction. As measurement samples, eight samples of 16 mm × 5 mm were taken at equal intervals on a diagonal line from a sample of 1 m × 1 m. For each sample, A. According to the measurement conditions, the heat shrinkage coefficient in the vertical direction and the heat shrinkage coefficient in the horizontal direction were measured, and the difference between them was obtained. The average value of the eight samples was defined as "difference in heat shrinkage coefficient depending on in-plane vertical and horizontal directions".
(C.反り量の測定方法)
各例で製造した金属張り積層板から500mm角の試験用サンプルを切り出し、AKROMETRIX社製「サーモレイ PS200」を用いて、下記条件に従って、シャドーモアレ法でのサンプルの反り量を測定した。
測定エリア:36mm×36mm
測定条件:室温から260℃まで加熱し、その後50℃まで冷却した時の反り量を測定した。
(C. Method of measuring warpage amount)
A test sample of 500 mm square was cut out from the metal-clad laminate manufactured in each example, and the amount of warpage of the sample was measured by a shadow moire method using “Thermoray PS200” manufactured by AKROMETRIX according to the following conditions.
Measurement area: 36mm x 36mm
Measurement conditions: The amount of warpage when heating from room temperature to 260 ° C. and then cooling to 50 ° C. was measured.
[実施例1]
臭素化ビスフェノールA型エポキシ樹脂「エピコート5046」(三菱化学株式会社製、エポキシ当量:475/eq)100質量部、フェノールノボラック樹脂「エピコート154」(三菱化学株式会社製、水酸基当量:178g/eq)54質量部、水酸化アルミニウム120質量部、及び硬化促進剤として2−エチル−4−メチルイミダゾール0.2質量部をメチルエチルケトンに溶解し、固形分濃度70質量%の熱硬化性樹脂組成物(ワニス)を調製した。
厚み0.10mmのガラスクロス織布に該熱硬化性樹脂組成物を含浸塗工し、その後、140℃で3〜4分加熱乾燥することによりBステージ化し、熱硬化性樹脂組成物由来の固形分含有量が45質量%のプリプレグを製造した。同様にしてプリプレグを合計4枚製造した。
得られたプリプレグ4枚を重ね合わせ、両側に、厚さ12μmの銅箔を配置し、厚さ1.5mmのステンレス製鏡板「SUS630」(熱収縮係数11ppm/℃、面内縦横方向による熱収縮係数の差異1ppm/℃以下)に挟んで1セットの構成体とした。
同じ構成体を15セット準備し、これを重ね合わせ、その両外側へリンター紙クッション材「AACP」(熱収縮係数8ppm/℃、面内縦横方向による熱収縮係数の差異2ppm/℃、阿波製紙株式会社製)を配置し、さらにその両外側へキャリアプレートを配置してから、熱盤間に挿入し、多段加圧方式にて、185℃、4MPaの条件下で85分間加熱圧縮することにより、両面銅張積層板を作製した。
得られた両面銅張り積層板のうち、クッション材と接していた構成体から作製された両面銅張積層板と、クッション材と接していた構成体の隣(1つ内側)の構成体から作製された両面銅張積層板の反り量を前述の方法に従って測定した。結果を表1に示す。
[Example 1]
100 parts by mass of brominated bisphenol A type epoxy resin "Epicoat 5046" (manufactured by Mitsubishi Chemical Corporation, epoxy equivalent: 475 / eq), phenol novolak resin "Epicoat 154" (manufactured by Mitsubishi Chemical Corporation, hydroxyl equivalent: 178 g / eq) 54 parts by mass, 120 parts by mass of aluminum hydroxide, and 0.2 parts by mass of 2-ethyl-4-methylimidazole as a curing accelerator are dissolved in methyl ethyl ketone, and a thermosetting resin composition having a solid concentration of 70% by mass (varnish) ) Was prepared.
The thermosetting resin composition is impregnated onto a glass cloth woven cloth having a thickness of 0.10 mm, and then B-staged by heating and drying at 140 ° C. for 3 to 4 minutes to obtain a solid derived from the thermosetting resin composition. A prepreg having a content of 45% by mass was produced. Similarly, a total of four prepregs were produced.
Four pieces of the obtained prepregs are overlapped, copper foil having a thickness of 12 μm is arranged on both sides, and a stainless steel end plate “SUS630” having a thickness of 1.5 mm (heat shrinkage coefficient 11 ppm / ° C., heat shrinkage in in-plane vertical and horizontal directions) (A difference in coefficient of 1 ppm / ° C. or less) to constitute one set of constituent members.
Fifteen sets of the same components were prepared and superimposed on each other, and lintered paper cushion material “AACP” (heat shrinkage coefficient 8 ppm / ° C, difference in heat shrinkage coefficient 2 mm / ° C depending on in-plane length and width directions, Awa Paper Co., Ltd.) (Manufactured by a company), and further, a carrier plate is arranged on both outer sides thereof. Then, the carrier plate is inserted between the hot plates, and is heated and compressed at 185 ° C. and 4 MPa for 85 minutes by a multi-stage pressurizing method. A double-sided copper-clad laminate was produced.
Among the obtained double-sided copper-clad laminates, a double-sided copper-clad laminate prepared from the structure in contact with the cushion material and a structure next to (one inside) the structure in contact with the cushion material The warpage of the double-sided copper-clad laminate was measured according to the method described above. Table 1 shows the results.
[実施例2]
実施例1において、ステンレス製鏡板「SUS630」の代わりにステンレス製鏡板「SUS301」(熱収縮係数17ppm/℃、面内縦横方向による熱収縮係数の差異1ppm/℃以下)を用い、リンター紙クッション材「AACP」の代わりにクラフト紙クッション材「KS−190」(熱収縮係数20ppm/℃、面内縦横方向による熱収縮係数の差異9ppm/℃、王子製紙株式会社製)を用いたこと以外は同様にして両面銅張積層板を作製し、同様にして反り量を測定した。結果を表1に示す。
[Example 2]
In Example 1, instead of the stainless steel end plate "SUS630", a stainless steel end plate "SUS301" (heat shrinkage coefficient: 17 ppm / ° C, difference in heat shrinkage coefficient in the longitudinal and transverse directions of the plane: 1 ppm / ° C or less) was used, and linter paper cushion material was used. The same except that kraft paper cushion material “KS-190” (heat shrinkage coefficient 20 ppm / ° C., difference in heat shrinkage coefficient according to in-plane vertical and horizontal directions 9 ppm / ° C., manufactured by Oji Paper Co., Ltd.) was used instead of “AACP” To prepare a double-sided copper-clad laminate, and the amount of warpage was measured in the same manner. Table 1 shows the results.
[比較例1]
実施例1において、リンター紙クッション材「AACP」の代わりにクラフト紙クッション材「KS−190」(熱収縮係数20ppm/℃、面内縦横方向による熱収縮係数の差異9ppm/℃、王子製紙株式会社製)を用いたこと以外は同様にして両面銅張積層板を作製し、同様にして反り量を測定した。結果を表1に示す。
[Comparative Example 1]
In Example 1, instead of the linter paper cushion material "AACP", a kraft paper cushion material "KS-190" (heat shrinkage coefficient 20 ppm / ° C, difference in heat shrinkage coefficient depending on in-plane longitudinal and transverse directions 9 ppm / ° C, Oji Paper Co., Ltd.) Was used to produce a double-sided copper-clad laminate, and the amount of warpage was measured in the same manner. Table 1 shows the results.
表1より、比較例1と比べて、実施例1及び2では、クッション材と接していた構成体から作製された両面銅張積層板を前記「反り量の測定方法」に記載の温度に加熱し、これによって残留歪みが開放されて得られた両面銅張積層板においても、反り量が極めて小さくなった。つまり、本発明の製造方法により、加熱圧縮して作製された最外側の積層板の残留歪みを極少化することができたといえる。比較例1では、クッション材と接していた構成体から作製された両面銅張積層板の反り量が大きいばかりでなく、面内における反り量のバラつきも大きくなることが分かる。 From Table 1, in comparison with Comparative Example 1, in Examples 1 and 2, the double-sided copper-clad laminate produced from the structure that was in contact with the cushion material was heated to the temperature described in the “method for measuring warpage”. However, even in the double-sided copper-clad laminate obtained by releasing the residual strain, the amount of warpage was extremely small. In other words, it can be said that the residual distortion of the outermost laminated plate produced by heating and compression can be minimized by the production method of the present invention. In Comparative Example 1, it can be seen that not only the amount of warpage of the double-sided copper-clad laminate produced from the structure in contact with the cushion material was large, but also the amount of warpage in the plane was large.
本発明の製造方法により得られる金属張り積層板は、反り量が小さいため、電子機器の配線板の製造に有用である。 Since the metal-clad laminate obtained by the production method of the present invention has a small amount of warpage, it is useful for producing a wiring board for electronic equipment.
1:プリプレグ
2:金属箔
3:鏡板
4:クッション材
5:キャリアプレート
6:プレス熱盤
10:構成体(A)
11:構成体(A')
1: Pre-preg 2: Metal foil 3: End plate 4: Cushion material 5: Carrier plate 6: Press hot plate 10: Constructed body (A)
11: Construct body (A ')
Claims (4)
条件(1):クッション材の熱収縮係数と、該クッション材と隣接する鏡板の下記測定条件Aに従って測定した熱収縮係数の差を5ppm/℃以下とする。
(A.熱収縮係数の測定条件)
測定装置:熱機械測定装置
測定モード:引張りモード
測定条件:30℃→250℃→30℃
荷重:0.2N
雰囲気:空気雰囲気
(B.クッション材の面内縦横方向による熱収縮係数の差異の測定方法)
クッション材の抄紙方向(判別不能な場合は任意に選択した一辺)を縦方向とし、その90度直角方向を横方向とする。測定サンプルは、縦1m×横1mの試料から、対角線上に等間隔で縦16mm×横5mmのサンプルを8個採取する。各サンプルについて、上記Aの測定条件に従って、縦方向の熱収縮係数と横方向の熱収縮係数をそれぞれ測定し、それらの差を求める。8個のサンプルの平均値を、面内縦横方向による熱収縮係数の差異とする。 A metal foil is disposed on one or both sides of one prepreg or a prepreg obtained by laminating two or more prepregs, and a head plate having a heat shrinkage coefficient of 8 to 14 ppm / ° C. is disposed so as to sandwich both sides of the prepreg on which the metal foil is disposed. After the cushioning material is disposed outside the structure (A) or the structure (A ′) in which two or more of the structures (A) are superposed and arranged, A method for producing a metal-clad laminate by heating and compressing at 150 to 250 ° C. and 2 to 5 MPa using a hot plate, wherein the following condition (1) is satisfied, and the longitudinal length of the cushion material is measured according to the following method B: A method for producing a metal-clad laminate, wherein the difference between the heat shrinkage coefficient in the transverse direction and that in the transverse direction is 12 ppm / ° C or less.
Condition (1): The difference between the heat shrinkage coefficient of the cushion material and the heat shrinkage coefficient of the head plate adjacent to the cushion material measured according to the following measurement condition A is 5 ppm / ° C. or less.
(A. Measurement conditions of heat shrinkage coefficient)
Measuring device: Thermomechanical measuring device Measuring mode: Tensile mode Measuring condition: 30 ° C → 250 ° C → 30 ° C
Load: 0.2N
Atmosphere: Air atmosphere (B. Measuring method of difference in thermal shrinkage coefficient depending on in-plane vertical and horizontal directions of cushion material)
The papermaking direction of the cushioning material (one side arbitrarily selected when it is not possible to determine) is the vertical direction, and the 90-degree perpendicular direction is the horizontal direction. Measurement sample from a sample of the vertical 1 m × horizontal 1 m, the sample of longitudinal 16 mm × horizontal 5mm to eight sampled at equal intervals in a diagonal. For each sample, according to the measurement conditions of the A, longitudinal thermal contraction coefficient and lateral thermal contraction coefficient was measured, Ru seek their difference. The average value of the eight samples is defined as the difference in the coefficient of thermal contraction in the in-plane vertical and horizontal directions.
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